TWI274238B - Proportion controlling valve for pressure and flow rate - Google Patents

Proportion controlling valve for pressure and flow rate Download PDF

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Publication number
TWI274238B
TWI274238B TW94144314A TW94144314A TWI274238B TW I274238 B TWI274238 B TW I274238B TW 94144314 A TW94144314 A TW 94144314A TW 94144314 A TW94144314 A TW 94144314A TW I274238 B TWI274238 B TW I274238B
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pressure
fluid
valve
flow rate
plunger
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TW94144314A
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Chinese (zh)
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TW200722948A (en
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Taiichi Inada
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Taiichi Inada
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  • Control Of Fluid Pressure (AREA)
  • Accessories For Mixers (AREA)
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Abstract

Disclosed is to provide a proportion controlling valve for pressure and flow rate, which can control the flow rate of fluid easily and easily without non-fluctuation. By use of plunger 5 which is located at the pressure vessel 2 connected to the pipeline of the pressurized fluid to act as piston by the fluid pressure, to allow the valve body 6 of needle valve act by using plunger. Plunger is set at the equilibrium relation of the push and press pressure of coil spring 8 which is pre-stored as the pressure or negative pressure of pressure vessel, the valve travel of valve can be adjusted by pressure regulating screw 9. Pre-confirm the valve travel by pressure regulating screw and the equilibrium relation with the valve travel, connect the fluid supplying source which should introduce into fluid inlet 3, outlet 4 to the pipeline of the pressurized fluid, the adjust the valve travel by pressure regulating screw. The valve travel of valve which is opened by using the pressure of the pipeline and the push and press pressure of coil spring in case of supplying the fluid, can be counterbalanced to cope with the push and press pressure of coil spring in proportion to the pressure change of elevation or reduction in pressure of the pipeline in the way of continuous adjustment till reaching the equilibrium state, and the valve travel of valve can be controlled.

Description

1274238 九、發明說明: 【發明所屬之技術領域】 本發明係有關利用所供給的流體壓力’控制供給的流體之流 量的壓力流量比例控制閥。 【先前技術】 以往’在控制氣體及液體等流體之流量時,通常係使空氣混 入連通至流量比例控制閥的唧筒之吸入側並以唧筒之旋轉動葉輪 混合氣液,因應主流體之壓力而須控制被控制流體之流量,需要 壓力感測器、控制電路、比例動作閥等而成的複雜構成,加上設 備費昂貴。 日本特開平8-110818號公報。 【發明内容】 釐遞欲解決的坪镅 本發明欲解決的課題係不需壓力感測器、控制電路、比例動 作閥等,藉由單純的機構,因應主流體之壓力變化,提供可控制 _制流體之流量成指定的值之壓力流量比例控制閥。 ^為解決上述課題,本發明人經精心研究及檢討的結果,發現 藉由將經予供給的主流體之管路連接至壓力流量比.綱之壓 力至’藉由该壓力之強弱變化使控制應控制的流體之流量的閥體 動作、控制,同時使閥體之動作與該壓力相抗衡並作用,藉由使 5 1274238 在&定的流1平衡的機構進行,使可連續且順暢的控制至成指定 的流量為止。 亦即’本發明係於藉由被控制流體與因該被控制流體之流入 引起壓力賊的域制之關係,予以構成至藉由在與主流體之 • 壓力或負壓成相抗衡的壓力之間形成平麵係之動作麵至可控 制,藉由對應於應予較該動作機構之平衡位置的壓力並使成可 控制’製射控制被控繼體之缝至朗應由线體之壓力變 化所設定的壓力之壓力的流量之壓力流量比例控制閥,具體而 。,其特彳政在於藉由柱塞之動作使成可調整上述控制閥之開度, 同時該柱塞藉由在與上述主流體之壓力或負壓成相抗衡的螺旋彈 簧(coil spring)之推擠壓力形成上述平衡關係,構成上述動作 : 機構,藉由調整柱塞之動作位置的調整手段,可予調整至成對應 ' 於该動作機構之平衡位置應予設定的位置。 與本發明有關的壓力流量比例控制閥,係使對應於主流體之 _壓力強弱的機械動作保持原狀的進行至被控制流體之控綱體, 並可控制被控制流體之流量。經予傳送至上述壓力流量比例控制 閥中的壓力室2之壓力係藉由推回操作卩糧6之柱塞5,使與柱塞 5成一體的尖端之閥體6由該控制閥之閥座7離開,可使被控制流 體流動。若使用與本發明有關的壓力流量比例控制閥時,則可正 確且簡單的進行控制。 另外,藉由調整經予安裝於該控制閥本體丨之下的壓力調整 6 1274238 螺絲9’可於開放、閉鎖該控制閥的方向上進行壓力之設定。再者, 壓力成負壓(真空壓)時,以頂住該閥體6之螺旋彈簧8作用的 方向成為相反的構造’相同的可控制流量。另外,至於此壓力調 整手段,取代上述的閥構造,即使使用所謂的栓塞亦可同樣的使 進行動作,對此等所謂閥構造並無任何限制。 因應主流體之壓力,為控制被控制流體之流量,將來自主流 體管路11之分歧管路連接至該控制閥之壓力室2,由流體入口 3 蠢吸入被控制流體,經由閥座7、閥體6並由流體出口 4供給至所需 的位置處。 例如’對壓力至2施加3kgf/cm2 (約300kPa)之壓力時,調 整壓力調整螺絲9至使供給被控制流體並由使閥體6設定成由閥 座7離開般。又於3kgf/cm2 (約300kPa)以上時,與該壓力成比 例並使閥體6與閥座7之間隙變大且流量亦增加。又,為求得流 里大小之精度,若能調整流入另外流體入口 3的被控制流體之流 •^入壓力時即可。 又為求得流量大小之調整程度,若能調整流入流體入口 3的 被控制流體之认壓力時,至於其祕,侧被控繼體供給單 位12與流體入口 3間之間隙的落差,或使被控制流體成加壓狀 _,女裝減壓閥於流體入口 3之正前方並可求取所需流量。 發明之功效 若依本發明時,則至所需的流量為止,無包含 7 Ϊ274238 迴路之複雜機構,以簡單的機構即可連續且順暢的進行流量控制。 【實施方式】 以下舉出實施例並詳細說明本發明。 第3圖係與本發明有關的壓力流量比例控制閥應用於本發明 人先前先前提出申請的發明申請第94115531號案所揭示的超微細 _ 氣泡產生器之氣液混合裝置上的實施型態。 首先’將加壓I液混合流體之唧筒16的吐出壓設成6kgf/cm2 (表壓約600kPa)、壓力閥15之通過壓力為4kgf/cm2 (表壓約 400kPa) ’亦即由主流體管路η及與其連通的壓力偵測管路a至 壓力流量比例控制閥10之壓力室2 (參閱第1圖)為止,唧筒16 動作中係經常保持於4kgf/cm2之壓力(可以壓力計17確認)。因 此,凋整與本發明有關的壓力流量比例控制閥10之壓力調整螺絲 善9並將壓力計17之壓力設定成3· 5kgf/cm2 (表壓約350kPa)。 與本發明有關的壓力流量比例控制閥10之構造,如第1圖所 不般’係於導入第2被控制流體之空氣流體入口 3與送出至供給 第1主流體之水至唧筒的給水管路18之流體出口 4之間,對閥座 7没置有針形閥閥體6,第2流體則介經此闕予以控制流量。 閥體6係予結合至進行活塞作用的柱塞5,壓力室2係藉由介 經壓力偵測管路13並連通至主流體管路11,若該壓力變高時,則 與經予設置於其底部的螺_簀8之推讎力減衡並壓下柱塞 1274238 5而使被控制流體之導人流量增加,相反的若該壓力降低時,則藉 由經予設置於其底部的螺旋彈簣8之推讎力使柱塞5動作曰 閉閥體6。 藉…力至2之於壓力下的柱塞5引起之閥體6的開啟關閉 程度’細由细調整獅9赃由微彈簧"起對柱塞5的 推«力予以變更,則於愿力室2之壓力與此經予調整的螺旋彈 簧8而得之推擠壓力間即有平衡_、存在。因此騎加被控制流 •體之^氣流量,若藉由壓力調整螺絲9使螺旋彈簧8退後並減少 該推擠壓力時’職由設置於域體管路n之勤録塞5後退 並於開啟關6之方向上動作,絲多的空氣躺域體管路η 導入。 結果’由於軒導人线齡路u之空紐在域體管路u 的>1力降低’再者,使與該主流體管路n連通賴力室2之麗力 降低,故可使柱塞5再於關閉閥體6之方向上動作。 籲 如上述般,壓力室2之墨力與此經予調整的螺旋彈簀S而得 之推擠壓力_有平衡_存在,蘭作係侧成朝此平衡狀態 、、’《束亦即使父互的反轉動作方向至使成由所謂的回饋迴路引起 之動作,同時未進行朝指定的條件結束的間斷性動作,順暢的達 到平衡狀態並可保持繼續該狀態。 於本發明’於指定的麼力方面雖須藉由壓力調整螺絲g予以 設定至成此平衡狀態,但若事先利用壓力計17確認壓力調整螺絲 1274238 9之操作量與壓力間之關係即可。 亦即,與本發明有關的壓力流量比例控制閥1〇之閥體6,於 前述的設定條件方面,係在4kgf/cm2 (約4〇〇kPa)之主流體管路 11的壓力之下開放,或增大開度,被控制流體之空氣由被控制流 體供給管路14經由吸水管路ι8被吸入唧筒16内。空氣若進入唧 茼16内日ττ,則空氣經予壓縮,使吐出側之主流體管路η的壓力 降低,隨著此壓力之降低,雖使閥體6之開度變小,但若達到& 5 壽kgf/cm2 (約35〇kPa)時,則使主流體管路u之壓力與螺旋彈簧8 引起之推擠壓力平衡並制體6保持可維持該壓力之開度並予停 止。 如此,閥體6並非重複的在&5kgf/cm2 (約35〇kpa)以上開 啟’在3· 5kgf/cm2 (約350kPa)以下關閉的動作,而至&此扣/⑽2 ' 為止使_且觀的變化導人空氣量並穩定的吸人。此係利用上 籲述=原理,柱塞5之動作係因應主流體管路11之壓力可朝向平衡 狀恶進行觀的侧所致。此外,於上述實補,雖制針形闕 作為閥體6,但以所謂的栓塞構造等其他閥構造亦可達成此等作 用0 以上雜件使—耻率㈣氣及水之齡舰碰力閥15在 外部減壓,而形成超微細氣泡。 釀 第4 ®係與本發财關賴力流量_控綱朗於海水淡 1274238 如以上的貫施例1及貫施例2所示,至於可適用作本發明之 壓力流量比例控制_流體,不論主流體及被控制流體究以氣體 或液體之不同的型態均可。再者,相同的流體即使有型態變化的 關係,至於主流體及被控概體若兩者的流量與壓力之間有相關 關係成立時’則本發明之原理均可適用,且本發明之適用對象並 無任何變化。 【圖式簡單說明】 第1圖為與本發明有關的壓力流量比例控制閥經予應用於超 微細氣泡產生器之截面圖。 第2圖為與本發明有關的壓力流量比例控制閥經予應用於海 水淡水化真空蒸發裝置之截面圖。 ^3圖係表示與本發明有關的壓力流量比例控制閥應用於發明 if 94115531號案所揭示的超微細氣泡產生器之氣液混合裝置 上的貫施型態。 第4圖係表示與本發明有關的壓力流量比例控制閥應用於海 水淡水化真空蒸發裝置上之實施型態。 【主要元件符號說明】 1:本體 2 :壓力室 3 :流體入口 4 :流體出口 5 :柱塞 12 1274238 6:閥體 7 :閥座 8 :螺旋彈簧 9 :壓力調整螺絲 10 :壓力流量比例控制閥 11 :主流體管路 12 :被控制流體控制單位 13 :壓力偵測管路 14 :被控制流體供給管路 15 :壓力閥 16 :唧筒 17 :壓力計 18 :吸水管路 20 :真空壓力流量比例控制閥 21 :主流體管路 22 :真空唧筒 23 :壓力偵測管路 24 :被控制流體供給管路 25 :喷霧喷嘴 26 :真空蒸發室 27 :真空計 28 :冷卻室 131274238 IX. Description of the Invention: [Technical Field] The present invention relates to a pressure flow proportional control valve for controlling the flow rate of a supplied fluid using the supplied fluid pressure. [Prior Art] In the past, when controlling the flow rate of a fluid such as a gas or a liquid, air is usually mixed into the suction side of the cylinder connected to the flow proportional control valve, and the impeller is mixed with the impeller to mix the gas and liquid, in response to the pressure of the main fluid. It is necessary to control the flow rate of the fluid to be controlled, and it requires a complicated structure of a pressure sensor, a control circuit, a proportional action valve, etc., and the equipment is expensive. Japanese Patent Publication No. 8-110818. SUMMARY OF THE INVENTION The problem to be solved by the present invention is that a pressure sensor, a control circuit, a proportional action valve, and the like are not required, and a simple mechanism is provided to control the pressure of the main fluid. The flow rate proportional control valve for the flow rate of the fluid to a specified value. In order to solve the above problems, the inventors have carefully studied and reviewed the results and found that by connecting the supplied main fluid pipeline to the pressure flow ratio, the pressure is controlled by the pressure change. The valve body action and control of the flow rate of the fluid to be controlled, and at the same time, the action of the valve body is matched with the pressure, and the mechanism is balanced by the mechanism of the flow balance 1 of 5 1274238, so that the flow can be continuous and smooth. Control until the specified flow rate. That is, the present invention is constructed by the relationship between the controlled fluid and the domain of the pressure thief caused by the inflow of the controlled fluid, by the pressure against the pressure or negative pressure of the main fluid. Forming the action surface of the plane system to be controllable, by corresponding to the pressure at which the equilibrium position of the action mechanism should be controlled, and controlling the pressure of the controlled body to control the pressure of the line body The pressure of the pressure of the set pressure is proportional to the pressure flow control valve, specifically. The special rule is that the opening of the control valve can be adjusted by the action of the plunger, and the plunger is made of a coil spring that competes with the pressure or negative pressure of the main fluid. The pushing force forms the above-mentioned equilibrium relationship, and constitutes the above-mentioned action: The mechanism can be adjusted to correspond to the position to be set at the equilibrium position of the operating mechanism by adjusting the adjusting position of the plunger. The pressure-flow proportional control valve according to the present invention maintains the mechanical action corresponding to the pressure of the main fluid to the control body of the fluid to be controlled, and controls the flow rate of the fluid to be controlled. The pressure transmitted to the pressure chamber 2 in the above-described pressure flow proportional control valve is controlled by pushing back the plunger 5 of the granule 6 so that the valve body 6 of the tip end integral with the plunger 5 is a valve of the control valve The seat 7 leaves to allow the controlled fluid to flow. When the pressure flow proportional control valve related to the present invention is used, the control can be performed accurately and simply. Further, by adjusting the pressure adjustment 6 1274238 screw 9' mounted under the control valve body 可, the pressure can be set in the direction in which the control valve is opened and closed. Further, when the pressure is a negative pressure (vacuum pressure), the direction in which the coil spring 8 of the valve body 6 acts is the same controllable flow rate as the opposite structure. Further, as for the pressure adjusting means, the above-described valve structure can be similarly operated by using a so-called plug, and the so-called valve structure is not limited in any way. In response to the pressure of the main fluid, in order to control the flow rate of the controlled fluid, the branch line of the autonomous fluid line 11 is connected to the pressure chamber 2 of the control valve, and the fluid inlet 3 is stupidly sucked into the controlled fluid through the valve seat 7, the valve Body 6 is supplied by fluid outlet 4 to the desired location. For example, when a pressure of 3 kgf/cm2 (about 300 kPa) is applied to the pressure to 2, the pressure adjusting screw 9 is adjusted to supply the controlled fluid and the valve body 6 is set to be separated from the valve seat 7. Further, when it is at least 3 kgf/cm2 (about 300 kPa), the gap between the valve body 6 and the valve seat 7 is increased and the flow rate is increased in proportion to the pressure. Further, in order to obtain the accuracy of the flow size, if the flow of the controlled fluid flowing into the other fluid inlet 3 can be adjusted, the pressure can be adjusted. Further, in order to determine the degree of adjustment of the flow rate, if the pressure of the controlled fluid flowing into the fluid inlet 3 can be adjusted, as for the secret, the gap between the laterally controlled relay supply unit 12 and the fluid inlet 3 may be The controlled fluid is pressurized. The female pressure reducing valve is directly in front of the fluid inlet 3 and can obtain the required flow rate. EFFECT OF THE INVENTION According to the present invention, the flow mechanism can be continuously and smoothly performed with a simple mechanism without a complicated mechanism including a 7 Ϊ 274238 circuit up to the required flow rate. [Embodiment] Hereinafter, the present invention will be described in detail by way of examples. Fig. 3 is a view showing an embodiment of the present invention, which is applied to a gas-liquid mixing device of an ultrafine bubble generator disclosed in the above-mentioned application No. 94115531. First, the discharge pressure of the cylinder 16 for the pressurized I liquid mixed fluid is set to 6 kgf/cm 2 (gauge pressure is about 600 kPa), and the pressure of the pressure valve 15 is 4 kgf/cm 2 (gauge pressure is about 400 kPa). The path η and the pressure detecting line a connected thereto to the pressure chamber 2 of the pressure flow proportional control valve 10 (see Fig. 1) are always maintained at a pressure of 4 kgf/cm 2 during the operation of the cylinder 16 (can be confirmed by the pressure gauge 17) ). Therefore, the pressure adjusting screw of the pressure flow proportional control valve 10 relating to the present invention is deteriorated and the pressure of the pressure gauge 17 is set to 3·5 kgf/cm2 (gauge pressure is about 350 kPa). The structure of the pressure-flow proportional control valve 10 according to the present invention is as follows in the first embodiment, the air-flow inlet 3 for introducing the second controlled fluid and the water supply pipe for discharging the water supplied to the first main fluid to the cylinder Between the fluid outlets 4 of the passage 18, the needle valve body 6 is not disposed on the valve seat 7, and the second fluid is controlled to flow through the crucible. The valve body 6 is coupled to the plunger 5 for performing a piston. The pressure chamber 2 is connected to the main fluid line 11 through the pressure detecting line 13 and, if the pressure becomes high, The pushing force of the screw _ 8 at the bottom thereof is reduced and the plunger 1274238 5 is pressed to increase the flow rate of the controlled fluid. On the contrary, if the pressure is lowered, the spiral is set at the bottom thereof. The pushing force of the magazine 8 causes the plunger 5 to act to close the valve body 6. By the force of 2 to the pressure of the plunger 5 caused by the opening and closing degree of the valve body 6 'finely adjusted by the fine lion 9 赃 by the micro spring " There is a balance between the pressure of the force chamber 2 and the pressing force of the coil spring 8 which is adjusted. Therefore, the rider is controlled to flow the flow of the body, and if the coil spring 8 is retracted by the pressure adjustment screw 9 and the push force is reduced, the position is set in the domain pipe n. And in the direction of opening the off 6, a lot of air lying in the body line η is introduced. As a result, it is reduced by the force of the main body fluid line n, and the power is reduced by the force of the main body fluid line n. The plunger 5 then moves in the direction in which the valve body 6 is closed. As mentioned above, the ink force of the pressure chamber 2 and the pre-adjusted spiral magazine S have a balance _ there is a balance _ existing, the blue line side is in this equilibrium state, '' The parent reverses the action direction to the action caused by the so-called feedback loop, and does not perform the intermittent action to end the specified condition, smoothly reaches the equilibrium state and can continue to continue the state. In the present invention, the pressure adjustment screw g must be set to the equilibrium state in terms of the specified force. However, if the pressure gauge 17 is used in advance, the relationship between the operation amount of the pressure adjusting screw 1274238 9 and the pressure can be confirmed. That is, the valve body 6 of the pressure flow proportional control valve 1 according to the present invention is opened under the pressure of the main fluid line 11 of 4 kgf/cm 2 (about 4 kPa) in terms of the aforementioned setting conditions. Or, the opening degree is increased, and the air of the controlled fluid is sucked into the cylinder 16 from the controlled fluid supply line 14 via the suction line ι8. When the air enters the inner day ττ of the crucible 16, the air is pre-compressed, so that the pressure of the main fluid line η on the discharge side is lowered, and as the pressure is lowered, the opening degree of the valve body 6 is made small, but if & 5 When the life is kgf/cm2 (about 35 kPa), the pressure of the main fluid line u is balanced with the pressing force caused by the coil spring 8, and the body 6 is maintained to maintain the opening of the pressure and is stopped. . In this way, the valve body 6 is not repeatedly opened at & 5kgf/cm2 (about 35 〇 kpa) or more, and is turned off at 5.3 kgf/cm2 (about 350 kPa), and to & this buckle / (10) 2 ' so that _ And the change in view leads the amount of air and attracts people steadily. This is explained by the above-mentioned principle that the action of the plunger 5 is caused by the pressure of the main fluid line 11 toward the side of the equilibrium. Further, in the above-mentioned actual compensation, although the needle-shaped cymbal is used as the valve body 6, it is possible to achieve such an effect by other valve structures such as a so-called plug structure, and the above-mentioned miscellaneous pieces make the shame rate (four) gas and the age of the ship. The valve 15 is decompressed externally to form ultrafine bubbles. The fourth and the second generation of the brewing power flow control _ control is based on seawater light 1274238 as shown in the above Example 1 and the second embodiment, as applicable to the pressure flow ratio control of the present invention _ fluid, Regardless of the main fluid and the controlled fluid, the gas or liquid may be of different types. Furthermore, even if the same fluid has a relationship of type change, the principle of the present invention can be applied as long as the correlation between the flow rate and the pressure of the main fluid and the controlled body is established, and the present invention is applicable. There are no changes to the applicable objects. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a pressure flow proportional control valve relating to the present invention applied to an ultrafine bubble generator. Fig. 2 is a cross-sectional view showing a pressure flow proportional control valve relating to the present invention applied to a seawater desalination vacuum evaporation apparatus. The ^3 diagram shows the pressure flow proportional control valve relating to the present invention applied to the gas-liquid mixing device of the ultrafine bubble generator disclosed in the invention of No. 94115531. Fig. 4 is a view showing an embodiment in which a pressure flow proportional control valve relating to the present invention is applied to a seawater desalination vacuum evaporation apparatus. [Description of main component symbols] 1: Body 2: Pressure chamber 3: Fluid inlet 4: Fluid outlet 5: Plunger 12 1274238 6: Valve body 7: Seat 8: Coil spring 9: Pressure adjustment screw 10: Pressure flow proportional control Valve 11: Main fluid line 12: Controlled fluid control unit 13: Pressure detection line 14: Controlled fluid supply line 15: Pressure valve 16: Cartridge 17: Pressure gauge 18: Suction line 20: Vacuum pressure flow Proportional control valve 21: main fluid line 22: vacuum cylinder 23: pressure detecting line 24: controlled fluid supply line 25: spray nozzle 26: vacuum evaporation chamber 27: vacuum gauge 28: cooling chamber 13

Claims (1)

1274238 十、申請專利範園: 1·種壓力流里比例控制閥,其特徵在於以被控制流體與因該被 控制流體之流人引起壓力變化的域體有關係之越為對象,予 以構成至藉由在與域體之壓力或負壓成相抗衡的壓力之間形成 平衡關係之動作機構至可操作、控制,同時使可控綱動作機構 之平衡位置, 介經上述的平衡關係使伴隨上述調整而生的主流體之壓力變 化作用於上述動作機構,使可控制被控制流體之流量至成經予調 整的平衡關係之流量而成。 、货 2·根據請求項1所述的壓力流量比例控賴,係藉由柱塞之動作 使成可上述控糊之開度,同時脉塞藉由在與上述主流體 之麗力或負壓成相抗衡的螺旋彈簧之推擠壓力形成上述平衡關 广、構成上述動作機構,藉由調整柱塞之動作位置的調 作機構之平衡位置。1274238 X. Patent application garden: 1. A proportional control valve in a pressure flow, characterized in that the more the relationship between the controlled fluid and the domain body caused by the flow of the controlled fluid, the more By arranging the action mechanism that forms a balance relationship with the pressure of the domain body or the negative pressure to operate and control, and at the same time, the equilibrium position of the controllable action mechanism is caused by the above-mentioned equilibrium relationship. The pressure change of the adjusted primary fluid acts on the above-described operating mechanism to control the flow rate of the controlled fluid to a flow rate that is adjusted to a balanced relationship. The cargo pressure ratio control according to claim 1 is controlled by the action of the plunger to achieve the opening degree of the paste, and the pulsation is performed by the Lili or the negative pressure with the main fluid. The pushing force of the coil spring that is contiguous with the phase forms the above-mentioned balance mechanism, which constitutes the above-mentioned action mechanism, and adjusts the balance position of the adjustment mechanism of the plunger.
TW94144314A 2005-12-01 2005-12-14 Proportion controlling valve for pressure and flow rate TWI274238B (en)

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TWI405059B (en) * 2008-06-04 2013-08-11 Fujikin Kk Automatic pressure regulator for thermal mass flow regulators

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TWI392332B (en) * 2008-01-04 2013-04-01 Mstar Semiconductor Inc Image processing circuit and method thereof
TWI422764B (en) * 2011-06-29 2014-01-11 私立中原大學 Spool-type constant-flow valve
KR101931968B1 (en) 2016-12-21 2018-12-24 두산중공업 주식회사 Turbines including flue gas recirculation combustors.
CN110668519B (en) * 2019-11-14 2021-09-14 徐沛民 Portable artificial power sea water desalting device

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JPH0452540Y2 (en) * 1987-12-15 1992-12-10

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TWI405059B (en) * 2008-06-04 2013-08-11 Fujikin Kk Automatic pressure regulator for thermal mass flow regulators

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JP2007156649A (en) 2007-06-21

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