1272755 (1) 玖、發明說明 【發明所屬之技術領域】 本發明爲相關於可以不讓電動機的損失增加、使冷卻 性能上升’抑制床台的熱變形，並抑制電動機可動子形狀 增大的直線電動機之冷卻構造。 【先前技術】 以往’爲裝載工作件的床台對於固定台使其可自由自 在移動之吸引力抵銷型（Attractive Force Canceling Type )之直線電動機爲，形成如圖5般。尙，圖5爲表示第1 先前技術之直線電動機的正面剖面圖。 關於圖5，1爲固定台，2爲在固定台1上所設置左 右兩端的引導軌，3爲與引導軌2成對構成直線導軌的滑 塊，4爲直線電動機，5爲與固定台1垂直方向互相相對 固定的平面板狀的磁軛，6爲沿著（與紙面的垂直方向） 磁軛5上、磁極互相相異之複數配置之永久磁鐵，7爲爲 固定電樞的電樞安裝板，8爲經由與永久磁鐵6磁氣間的 空隙所對向設置、此外、由I字狀例如從矽鋼板所形成的 電磁鋼板依照永久磁鐵6的高度方向所堆積形成之電樞芯 ，該芯堆積後藉由焊接或黏接所構成，9爲卷繞在1個1 個的電樞芯8的繞組收藏部所形成之電樞線圈。以磁軛5 與永久磁鐵6構成疋子（磁場部）’以電樞芯8和線圈9 構成可動子（電樞部）。尙，上述電樞部爲在1個1個電 樞芯8的繞組收藏部卷上線圈9後，1個的電樞芯8沿著 -4- (2) 1272755 所指定的直線部依順序連接成爲完成塊狀製作形狀（ block-build)之者。 又，1 〇爲設於電樞的下部，以構成電樞線圈的線圈 導體之交換線、及爲容易進行中性點的連接處理的玻璃聚 酯材料所形成的連線基板，1 1爲固定線圈9及連線基板 1 0的塑模樹脂，1 5爲設在電樞安裝板7上的床台。電樞 固定板7爲，從床台1 5側、將擁有公螺紋之螺絲螺紋1 6 貫通於貫通孔1 5 a後，以旋入設於電樞固定板7的母螺紋 7a的方式與床台15連結。其次，電樞芯8爲從電樞芯8 下部側將螺栓螺絲1 3通過貫通孔8a並旋入設於電樞安裝 板7的母螺紋7b，連結電樞固定板7。尙，直線電動機4 爲爲檢測出可動子的移動方向的位置，一般來說設置有藉 由直線刻度與感應頭所構成之光學式直線編碼器，但圖5 在此省略其圖示。 關於如此般構成之直線電動機4爲，藉由未圖示之電 源對線圈9施加電流後，藉由電樞及磁場的電磁作用，直 線電動機4爲沿著永久磁鐵的延伸方向產生推力，進行直 線運動（例如，參考日本特開2000-3 7070號公報、日本 特開 2000-3 3 3432 公報）。 但，日本特開2000-37070號公報、日本特開2000- 3 3 343 2公報的直線電動機爲，當電動機的推力上升，電 樞部的線圈導體的發熱量增加時，在線圈9產生的熱大部 分經由電樞芯8、電樞安裝板7，熱傳導至床台15。該直 線電動機4爲，因無某種的冷卻對策、冷卻性能有其界限 -5- (3) 1272755 ，床台1 5藉由從線圈9的熱傳導導致溫度上升產生熱 形、和給予安裝在床台1 5的直線導軌及未圖示的直線 度不良引響’產生床台1 5的定位精度的誤差之問題。 爲解決上述日本特開2000-37070號公報、日本特 2000-3 3 343 2公報的問題，提案有對於擁有塊狀製作形 (block-build )的電樞之直線電動機，使電樞發生的熱 有效的冷卻，可得到高精確度的定位控制特性般，電樞 本身附加冷卻構造的直線電動機（例如，參考日本特 200卜128438 公報）〇 圖6爲第2先前技術所表示的直線電動機平面圖， 示底板所安裝的電樞及冷卻構件的整體構成。 關於圖，3 0爲直線電動機電樞，3 1爲底板，3 2爲 樞心’ 33爲線圈’ 34爲扁平冷卻管，35、36爲歧管， 爲可撓性構件。直線電動機電樞3 0爲，使I字狀電磁 板所堆積的電樞芯3 2與卷在其凹部的線圈3 3所形成的 數個電樞塊排列裝置，冷卻該電樞塊的冷卻構件，藉由 鄰接的前述電樞塊的細縫間，穿插般從一端部3 4 a向他 部3 4b連續的S形反覆配置的扁平中空狀之扁平冷卻 34所構成。尙，該扁平冷卻管34的兩端部34a及34b ，焊接配管第1的歧管3 5、第2的歧管3 6。又，電樞 3 2爲由未圖示的螺栓螺絲被固定在底板3 1。因此，先 的冷卻構造爲，在線圈附近藉由流動冷煤將線圈的發熱 除，向電動機的外部送出之者。 但，關於第2先前技術日本特開200 1 - 1 2843 8公報 變 刻 開 狀 里 心 開 表 電 3 7 鋼 複 在 端 管 爲 心 ..Λ 刖 去 的 (4) 1272755 冷卻構造，有如下述般的問題存在。 (1 )電樞部爲’因以扁平冷卻管只有冷卻線圈附近 ，所以冷卻性能有界限。即’在電樞線圈發生的熱的一部 份爲傳導至線圈所卷在的電樞芯齒，容易的使電樞安裝板 、床台部導熱，因熱變形給予精度面不良影響。 (2 )扁平冷卻管爲，因有電樞線圈安裝空間的存在 ，犧牲導體的佔有體積率，使得電動機的損失增加的問題 〇 (3 )扁平冷卻管爲，如圖所示般成爲波浪狀，如在 線圈間穿梭般安裝固定’所以線圏終點兩端的更外側上， 存在前述冷煤管使得直線電動機的可動子形狀（寬度尺寸 )增加。 本發明爲爲解決上述課題之者，提供不讓電動機的損 失增加時，提升冷卻性能、控制床台的熱變形、可抑制電 動機可動子形狀的增大之直線電動機冷卻構造爲目的。 【發明內容】 爲解決上述問題，申請專利範圍1所記載之關於直線 電動機的冷卻構造之發明爲，具備從在固定台上的垂直方 向，相互間隔設置對向裝設之磁性體形成二個磁軛，與沿 著該磁軛互相磁極相異的複數的永久磁鐵，形成磁場部， 與經由在前述磁場部間的空隙前述固定台上平行設置的電 樞芯、與卷在該電樞芯之電樞線圈，形成之電樞部，與設 置在前述電樞部上部爲固定該電樞部之電樞安裝板，與設 1272755 (5) 置在則述電樞安裝板上部，爲裝載工作件的床台之直線電 動機’前述電樞安裝板與前述床台間設置中間板，前述中 間板的內部及前述電樞安裝板的內部設置依照前述電樞部 的移動方向連續的往返安裝設置冷卻通路之者。 申請專利範圍2所記載之發明爲，關於申請專利範圍 第1項所記載之直線電動機的冷卻構造，前述冷卻通路上 流:的冷煤，從前述中間板流入，從前述電樞安裝板流出之 構造之者。 申請專利範圍3所記載之發明爲，關於申請專利範圍 % 1或2項所記載之直線電動機的冷卻構造，前述冷卻通 路爲，由銅製冷卻管所構成之者。 申請專利範圍4所記載之發明爲，關於申請專利範圍 第1或2項所記載之直線電動機的冷卻構造，前述床台、 前述中間板及前述電樞安裝板藉由螺栓螺絲結合爲一體之 者。 申請專利範圍5所記載之發明爲，關於申請專利範圍 第1或2項所記載之直線電動機的冷卻構造，前述中間板 及前述電樞安裝板之冷煤入口、冷煤出口爲，設置結合前 述中間板的冷煤出口及前述電樞安裝板的冷煤入口之接合 部。 【實施方式】 [第1實施方式] 以下，本發明之實施方式基於例圖做說明。 -8- 1272755 (6) 圖1爲表示本發明之實施例之直線電動機的正剖面圖 。圖2爲圖1的直線電動機可動子的側面圖’其中’冷卻 通路1 7的部分爲圖1的A-A線沿著斷面截斷之者，螺栓 螺絲21、22的部分各爲圖1的B-B線、C-C線沿著剖面 截斷之者。圖3爲表示關於直線電動機可動子的冷煤通路 出口，出口的接合處爲接續狀態之正面圖。尙，本發明之 構成要素爲關於與先前技術相同之處爲，附加同一符號省 略其說明，只說明相異之部分。 關於圖1、2，12爲中間板，1 7爲冷卻通路。又，關 於圖3，1 7a爲設於中間板1 2的冷卻通路1 7的冷煤入口 ，1 7b爲在中間板1 2側的冷煤出口，1 7c爲設置在電樞安 裝板7的冷卻通路17之冷煤入口，17d爲設在電樞安裝 板7側的冷煤出口，2 3爲接合部。 本發明與先前技術相異之部分爲，如以下說明。 即，在電樞安裝板7與床台1 5間設置中間板12，在 中間板1 2的內部及電樞安裝板7的內部沿著電樞部的移 動方向連續的反覆配置冷卻通路1 7設置之部分。 又，將在冷卻通路1 7流動的冷煤，從中間板1 2流入 ，從電樞安裝板7吐出之構造之者。 又，冷卻通路17爲由銅製冷卻管構成之者。 更，床台1 5、中間板12及電樞安裝板7藉由螺栓螺 絲2 1、22結合爲一體之者。尙，電樞安裝板7爲設置母 螺紋7a，各母螺紋7a轉入螺栓螺絲21、22將床台15、 中間板1 2及電樞安裝板7 —體化。 -9- (7) 1272755 更，中間板12及電樞安裝板7的冷煤入口、冷煤出 口爲，設置結合中間板1 2的冷煤出口 1 7b及電樞安裝板 7的冷煤入口 1 7 c的接合部2 3。 其次對動作做說明。 圖4爲，爲了說明關於本實施例冷煤通路的冷煤流動 的模式圖。尙，於圖中的冷煤入口 17a、17c、冷煤出口 17b、17d爲，由圓圈所包圍的部分表示。 首先，冷煤藉由外部的冷煤供給源（無圖示）流入中 間板1 2的冷煤入口 1 7a後，冷煤爲將中間板1 2冷卻後從 冷煤出口 1 7b流出。其次從冷煤出口 1 7b流出的冷煤爲’ 由電樞安裝板7的冷煤入口 1 7c流入，將電樞安裝板7冷 卻後，由冷煤出口 1 7d流出。因此，藉由冷煤先將中間板 1 2冷卻後，之後將電樞安裝板7冷卻。 依此，本發明之實施方式爲，在電樞安裝板7與床台 1 5間設置中間板1 2，因爲在中間板1 2的內部及電樞安裝 板7的內部對於電樞部的移動方向連續反覆的設置冷卻通 路1 7，所以直線電動機的電樞線圏9的發熱藉由各與中 間板1 2與電樞安裝板7所設的冷卻通路1 7所流動的冷煤 除去，可避免電動機的損失、增加時冷卻性能提昇，可抑 制床台1 5的熱變形。其結果，藉由床台1 5的溫度上升伴 隨著熱變形所產生的精度惡化的引響可極力減低。又’可 不給予在床台1 5上安裝的直線導軌及無圖示的直線刻度 等的不良引響，保持床台1 5的定位精度的良好。 更，因爲在冷卻通路1 7流動的冷煤，從中間板1 2流 -10- (8) 1272755 入’從電樞安裝板7吐出之構造，藉由冷煤熱交換量小的 中間板1 2先冷卻，比中間板1 2藉由冷煤熱交換量大的電 樞安裝板7後冷卻，可抑制床台丨5直接接觸的中間板1 2 藉由冷煤熱交換溫度的上升到最小。 更’冷卻通路1 7，因爲由銅製冷卻管構成，冷煤使 用水時’可去除電腐蝕的危險性。 之後’因爲床台1 5、中間板1 2及電樞安裝板7藉由 螺栓螺絲2 1、22 —體化連結，可增加各構件間的接觸熱 抵抗’可使在電樞部發生的熱有效的在冷卻通路1 7放熱 〇 其次，中間板12及電樞安裝板7的入口、出口爲， 設置結合該冷煤入口、出口之接合部，中間板1 2及電樞 安裝板7的冷煤入口、出口的連接構造可輕巧並簡單形成 [產業上的利用可能性] · 如以上本發明爲，關於直線電動機冷卻構造，特別是 作爲磁力互斥構造的直線電動機可動子的冷卻構造爲有效 的。 【圖式簡單說明】 圖1爲，表示本發明之實施例之直線電動機的正剖面 圖。 圖2爲，圖1的直線電動機可動子的側面圖，其中， -11 - 1272755 (9) 冷卻通路1 7的部分爲圖1的A - A線沿著剖面截斷之者， 螺栓螺絲21、22的部分各爲圖1的B_B線、c-C線沿著 剖面截斷之者。 圖3爲，表示關於直線電動機可動子的冷煤通路出口 ，出口的接合爲接續狀態之正面圖。 圖4爲，爲了說明關於本實施例冷煤通路的冷煤流動 的模式圖。 圖5爲，表示第1先前技術直線電動機的正剖面圖。 圖6爲，表示第2先前技術直線電動機的平面圖’表 不底板上安裝的電樞與冷卻構件之全體的構成。 【主要元件對照表】 1 固定台 2 導引軌 3 滑塊 4 直線電動機 5 磁軛 6 永久磁鐵 7 電樞安裝板 7a 母螺紋 7b 母螺紋 8 電樞芯 8a 貫通孔 9 電樞線圈 -12- (10)1272755 10 連線基板 11 塑模樹脂 12 中間板 13 螺栓螺絲 14 凹溝 15 床台 15a 貫通孔 17 冷卻通路 17a 冷煤入口 17b 冷煤出口 17c 冷煤入口 1 7d 冷煤出口 2 1 螺栓螺絲 22 螺栓螺絲 23 接合部 30 直線電動機電樞 3 1 底板 32 電樞芯 33 線圈 34 扁平冷卻管 34a 端部 34b 端部 35 歧管 36 歧管1272755 (1) Technical Field of the Invention The present invention relates to a straight line which can suppress the thermal deformation of the bed and suppress the increase in the shape of the movable body of the motor, without increasing the loss of the motor and increasing the cooling performance. Cooling structure of the motor. [Prior Art] In the past, a linear motor in which the bed was loaded with a work piece and the Attractive Force Canceling Type was freely movable to the fixed table was formed as shown in Fig. 5. Fig. 5 is a front sectional view showing the linear motor of the first prior art. 5, 1 is a fixed table, 2 is a guide rail provided at the left and right ends of the fixed table 1, 3 is a slider that forms a linear guide with the guide rail 2, 4 is a linear motor, 5 is a fixed circuit 1 a flat plate-shaped yoke that is fixed to each other in the vertical direction, 6 is a permanent magnet disposed along the yoke 5 in a direction perpendicular to the plane of the paper, and the magnetic poles are different from each other, and 7 is an armature mounting for the fixed armature. The plate 8 is an armature core that is disposed to face the gap between the permanent magnets 6 and the electromagnetic steel sheets formed of, for example, an I-shaped steel sheet in accordance with the height direction of the permanent magnets 6 . After the core is stacked, it is formed by welding or bonding, and 9 is an armature coil formed by winding a winding portion of one armature core 8. The yoke 5 and the permanent magnet 6 constitute a dice (magnetic field portion). The armature core 8 and the coil 9 constitute a movable member (armature portion).尙, in the armature portion, after the coil 9 is wound around the winding collection portion of one armature core 8, one armature core 8 is sequentially connected along a straight portion designated by -4- (2) 1272755 Become the one who completed the block-build. Further, 1 〇 is a wiring board formed by a glass polyester material which is provided in a lower portion of the armature, a coil conductor constituting the armature coil, and a glass polyester material which is easy to perform a neutral point connection process, and 1 1 is fixed. The mold resin of the coil 9 and the wiring substrate 10, and 15 is a bed provided on the armature mounting plate 7. The armature fixing plate 7 is configured such that the screw thread 16 having the male screw penetrates the through hole 15 a from the side of the bed 15 and is screwed into the female screw 7 a provided on the armature fixing plate 7 The station 15 is connected. Next, the armature core 8 is screwed into the female screw 7b provided in the armature mounting plate 7 from the lower side of the armature core 8 through the through hole 8a, and is connected to the armature fixing plate 7. In other words, the linear motor 4 is generally provided with an optical linear encoder composed of a linear scale and an inductive head for detecting the position of the moving direction of the movable member, but the illustration thereof is omitted here. In the linear motor 4 configured as described above, when a current is applied to the coil 9 by a power source (not shown), the linear motor 4 generates a thrust along the extending direction of the permanent magnet by the electromagnetic action of the armature and the magnetic field, and performs a straight line. For example, refer to Japanese Laid-Open Patent Publication No. 2000-3 7070 and Japanese Patent Laid-Open Publication No. 2000-3 3 3432. However, the linear motor disclosed in Japanese Laid-Open Patent Publication No. 2000-37070 and Japanese Patent Application Laid-Open No. Publication No. No. 2000-3343343 is a heat generated in the coil 9 when the thrust of the motor increases and the amount of heat generated by the coil conductor of the armature portion increases. Most of the heat is conducted to the bed 15 via the armature core 8 and the armature mounting plate 7. In the linear motor 4, since there is no certain cooling countermeasure and the cooling performance has a limit of -5 - (3) 1272755, the bed 15 is heated by the heat conduction from the coil 9 to generate a heat shape, and is placed in the bed. The linear guide of the table 15 and the straightness (not shown) cause a problem that the error in the positioning accuracy of the bed 15 is generated. In order to solve the problems of the above-mentioned Japanese Patent Publication No. 2000-37070 and Japanese Patent Publication No. 2000-3 3 343 2, there is proposed a heat generated by an armature for a linear motor having an armature having a block-build shape. With effective cooling, a linear motor having an additional cooling structure of the armature itself can be obtained with high-precision positioning control characteristics (for example, refer to Japanese Patent Publication No. 2004-128438). FIG. 6 is a plan view of the linear motor shown in the second prior art. The overall structure of the armature and the cooling member to which the bottom plate is mounted is shown. 3, the linear motor armature, 3 1 is the bottom plate, 3 2 is the pivot center '33 is the coil' 34 is a flat cooling pipe, and 35 and 36 are manifolds, which are flexible members. The linear motor armature 30 is a plurality of armature block arranging means formed by the armature core 3 2 stacked on the I-shaped electromagnetic plate and the coil 3 3 wound in the concave portion thereof, and the cooling member for cooling the armature block A flat hollow flat cooling 34 which is disposed in a continuous S shape from the one end portion 34a to the other portion 34b is interposed between the slits of the adjacent armature blocks. Further, both end portions 34a and 34b of the flat cooling tube 34 are welded to the first manifold 35 and the second manifold 36. Further, the armature 32 is fixed to the bottom plate 31 by a bolt screw (not shown). Therefore, the first cooling structure is such that the heat of the coil is removed by flowing cold coal in the vicinity of the coil, and is sent to the outside of the motor. However, regarding the 2nd prior art, the Japanese Patent Laid-Open No. 200 1 - 1 2843 8 is an open-cut open-hearted electric 3 7 steel complex in the end tube for the heart.. 刖 刖 (4) 1272755 Cooling structure, as follows The general problem exists. (1) The armature is "because the flat cooling tube has only the vicinity of the cooling coil, so there is a limit to the cooling performance. That is, a part of the heat generated in the armature coil is conducted to the armature core teeth wound by the coil, and the armature mounting plate and the bed portion are easily thermally conducted, and the thermal deformation imparts an adverse effect on the precision surface. (2) The flat cooling tube is a problem in which the loss of the electric motor is increased due to the presence of the armature coil installation space, and the loss of the electric motor. (3) The flat cooling tube is wavy as shown in the figure. As shown in the case where the coils are shuttled and fixed, the outer side of the end point of the winding is present, and the cold coal pipe is present to increase the movable shape (width dimension) of the linear motor. In order to solve the above problems, the present invention provides a linear motor cooling structure that can improve the cooling performance, control the thermal deformation of the bed, and suppress the increase in the shape of the movable body of the motor, without increasing the loss of the motor. In order to solve the above problems, the invention relates to a cooling structure for a linear motor according to Patent Application No. 1, which is characterized in that two magnetic bodies are formed from a magnetic body that is disposed opposite to each other in a vertical direction on a fixed table. a yoke having a plurality of permanent magnets different from each other along the yoke, forming a magnetic field portion, and an armature core disposed in parallel with the space on the fixed space between the magnetic field portions, and being wound around the armature core The armature coil, the formed armature portion, and the armature mounting plate fixed to the upper portion of the armature portion to fix the armature portion, and the 1272755 (5) are disposed on the armature mounting plate portion to be the loading work piece The linear motor of the bed is provided with an intermediate plate between the armature mounting plate and the bed, and the inside of the intermediate plate and the inner portion of the armature mounting plate are arranged to be continuously reciprocally mounted in accordance with the moving direction of the armature portion. Those. According to the invention of the invention, in the cooling structure of the linear motor according to the first aspect of the invention, the cold coal flowing in the cooling passage flows in from the intermediate plate and flows out from the armature mounting plate. Those. The invention described in claim 3 is the cooling structure of the linear motor described in claim 1 or 2, wherein the cooling passage is constituted by a copper cooling pipe. The invention of claim 4 is the cooling structure of the linear motor according to claim 1 or 2, wherein the bed, the intermediate plate, and the armature mounting plate are integrated by bolts and screws. . The invention of claim 5 is the cooling structure of the linear motor according to claim 1 or 2, wherein the intermediate plate and the cold coal inlet and the cold coal outlet of the armature mounting plate are provided in combination with the foregoing a joint between the cold coal outlet of the intermediate plate and the cold coal inlet of the armature mounting plate. [Embodiment] [First Embodiment] Hereinafter, an embodiment of the present invention will be described based on an exemplary diagram. -8- 1272755 (6) Fig. 1 is a front sectional view showing a linear motor according to an embodiment of the present invention. 2 is a side view of the linear motor mover of FIG. 1 'where the portion of the cooling passage 17 is cut along the AA line of FIG. 1 along the section, and the portions of the bolt screws 21 and 22 are each the BB line of FIG. The CC line is cut along the section. Fig. 3 is a front elevational view showing a state in which the joint of the cold coal passage of the linear motor mover is connected. That is, the constituent elements of the present invention are the same as those in the prior art, and the same reference numerals are omitted from the description, and only the differences are explained. 1, 2, and 12 are intermediate plates, and 17 is a cooling passage. 3, 17a is a cold coal inlet provided in the cooling passage 17 of the intermediate plate 12, 17b is a cold coal outlet on the side of the intermediate plate 12, and 17c is provided on the armature mounting plate 7. The cold coal inlet of the cooling passage 17, 17d is a cold coal outlet provided on the side of the armature mounting plate 7, and 23 is a joint. Portions of the present invention that differ from the prior art are as explained below. That is, the intermediate plate 12 is provided between the armature mounting plate 7 and the bed 15 , and the cooling passage 17 is continuously disposed in the inside of the intermediate plate 12 and the armature mounting plate 7 in the moving direction of the armature portion. The part of the setup. Further, the cold coal flowing through the cooling passage 17 flows from the intermediate plate 12 and is discharged from the armature mounting plate 7. Further, the cooling passage 17 is constituted by a copper cooling pipe. Further, the bed 15 , the intermediate plate 12 and the armature mounting plate 7 are integrated by the bolt screws 2 1 , 22 . That is, the armature mounting plate 7 is provided with the female screw 7a, and the female screws 7a are turned into the bolt screws 21, 22 to integrate the bed 15, the intermediate plate 12 and the armature mounting plate 7. -9- (7) 1272755 Further, the cold coal inlet and the cold coal outlet of the intermediate plate 12 and the armature mounting plate 7 are provided with a cold coal inlet 17b combined with the intermediate plate 12 and a cold coal inlet of the armature mounting plate 7. 1 7 c joint portion 2 3 . Second, explain the action. Fig. 4 is a schematic view for explaining the flow of cold coal in the cold coal passage of the present embodiment.冷, the cold coal inlets 17a, 17c and the cold coal outlets 17b, 17d in the figure are indicated by the portion surrounded by the circle. First, the cold coal flows into the cold coal inlet 17a of the intermediate plate 12 by an external cold coal supply source (not shown), and the cold coal is cooled by the intermediate plate 12 and then flows out from the cold coal outlet 17b. Next, the cold coal flowing out from the cold coal outlet 17b flows into the cold coal inlet 17c of the armature mounting plate 7, and after cooling the armature mounting plate 7, it flows out from the cold coal outlet 17d. Therefore, the intermediate plate 12 is cooled by the cold coal, and then the armature mounting plate 7 is cooled. Accordingly, the embodiment of the present invention provides that the intermediate plate 12 is disposed between the armature mounting plate 7 and the bed 15 because of the movement of the armature portion inside the intermediate plate 12 and inside the armature mounting plate 7. The cooling passages 17 are continuously and repeatedly arranged in the direction, so that the heat generation of the armature coils 9 of the linear motor is removed by the cold coal flowing through the cooling passages 17 provided in the intermediate plate 12 and the armature mounting plate 7, respectively. It avoids the loss of the motor and increases the cooling performance when it is increased, and can suppress the thermal deformation of the bed 15 . As a result, the jerk which is deteriorated by the temperature rise of the bed 15 accompanied by the thermal deformation can be extremely reduced. Further, it is not necessary to give a bad squeak such as a linear guide attached to the bed 15 and a linear scale (not shown), and the positioning accuracy of the bed 15 is maintained. Further, because the cold coal flowing in the cooling passage 17 flows from the intermediate plate 1 2 - 10 (8) 1272755 into the structure which is discharged from the armature mounting plate 7, the intermediate plate 1 having a small amount of cold coal heat exchange is used. 2 first cooling, lower than the intermediate plate 12 by the armature mounting plate 7 with a large amount of cold coal heat exchange, and can suppress the intermediate plate 1 2 directly contacting the bed 丨 5 by the cold coal heat exchange temperature rise to the minimum . Further, the cooling passage 17 is composed of a copper cooling pipe, and when the cold coal is used for water, the risk of electric corrosion can be removed. After that, because the bed 15 , the intermediate plate 12 and the armature mounting plate 7 are integrally connected by the bolt screws 2 1 and 22, the contact heat resistance between the members can be increased to make the heat generated in the armature portion. Effectively, the cooling passages 17 are exothermic, and the inlets and outlets of the intermediate plate 12 and the armature mounting plate 7 are provided with a joint portion that joins the cold coal inlet and outlet, and the intermediate plate 12 and the armature mounting plate 7 are cooled. The connection structure of the coal inlet and the outlet can be lightly and easily formed. [Industrial Applicability] As described above, the cooling structure of the linear motor cooling structure is particularly effective as the linear motor cooling structure. of. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front sectional view showing a linear motor according to an embodiment of the present invention. Figure 2 is a side elevational view of the linear motor mover of Figure 1, wherein the portion of the -11 - 1272755 (9) cooling passage 17 is taken along the line A - A of Figure 1 along the section, bolts 21, 22 The parts of each are the B_B line of Fig. 1 and the cC line is cut along the section. Fig. 3 is a front elevational view showing the state in which the joint of the cold coal passage of the linear motor mover and the outlet are connected. Fig. 4 is a schematic view for explaining the flow of cold coal in the cold coal passage of the present embodiment. Fig. 5 is a front sectional view showing a first prior art linear motor; Fig. 6 is a plan view showing the second prior art linear motor showing the entire armature and the cooling member attached to the bottom plate. [Main component comparison table] 1 Fixed table 2 Guide rail 3 Slider 4 Linear motor 5 Yoke 6 Permanent magnet 7 Armature mounting plate 7a Female thread 7b Female thread 8 Armature core 8a Through hole 9 Armature coil-12- (10) 1272755 10 Wiring board 11 Molding resin 12 Intermediate plate 13 Bolt screw 14 Groove 15 Bed 15a Through hole 17 Cooling path 17a Cold coal inlet 17b Cold coal outlet 17c Cold coal inlet 1 7d Cold coal outlet 2 1 Bolt Screw 22 Bolt Screw 23 Engagement 30 Linear Motor Armature 3 1 Base Plate 32 Armature Core 33 Coil 34 Flat Cooling Tube 34a End 34b End 35 Manifold 36 Manifold
-13- (11)1272755 37 可撓性構件-13- (11) 1272755 37 Flexible member
-14--14-