JPH11252863A - Cooler for electromagnetic coil and linear motor provided with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformly cool the overall length of an electromagnetic coil unit, without reducing magnetic power developed from the coil unit. SOLUTION: A plurality of blocks 35 are installed as cooling fluid flow path forming means on the mounting face of a laminate 32, formed by laminating a core plates 31 of a linear motor LM, in the direction of driving with planar contact where the blocks are removable. A U-shaped flow path 36 extending in a direction crossing the direction of the driving of the linear motor LM is formed in each of the blocks 35, and further a straight flow path 37 is formed in proximity to the turned portion 36r of the flow path 36. The plurality of the blocks 35 are placed such that the folding portions 36r of the U-shaped flow paths 36 in the blocks 35 are alternately oriented in a direction crossing the driving direction in complementary relation. The plurality of the blocks 35 oriented in the same direction are series-connected by means of a plurality of joints 50, and thereby a forward flow path (FDP) which allows the cooling fluid to flow from one side to the other side in the driving direction and a return flow path (RTP) which allows the cooling fluid to flow from the other side to the one side are formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling device for an electromagnetic coil which generates magnetic force and generates heat when energized. Preferably, the present invention relates to a cooling device for an electromagnetic coil unit and a magnet plate unit of a linear motor mounted on one and the other of a first member and a second member which move relative to each other, such as a slide and a fixed base of a machine tool. .

[0002]

2. Description of the Related Art A linear motor used in a machine tool comprises an electromagnetic coil unit and a magnet plate unit which face each other with a small gap in a direction perpendicular to the driving direction. The electromagnetic coil unit and the magnet plate unit are mounted on one and the other of a fixed body that moves relative to each other in the driving direction and a movable body that is guided on the fixed body in the driving direction and reciprocates on the fixed body. .

Usually, a magnet plate unit is laid on a fixed body, and an electromagnetic coil unit is mounted on a movable body. The magnet plate unit has a large number of magnet bars arranged on a holding plate fixed to the fixed body at predetermined intervals in the driving direction so that their longitudinal directions cross the driving direction. It is composed of a core plate laminate in which core plates are laminated in a direction crossing the driving direction, and a plurality of coils wound in the direction crossing the driving direction at predetermined intervals in the driving direction on the laminate.

In such a linear motor, when the electromagnetic coil unit is energized to position and move the movable body, the electromagnetic coil unit generates heat, and this heat is also radiated to the magnet plate unit. This heat generation not only results in electric energy loss applied to the linear motor, but also causes heat deformation of the fixed body and the movable body as components of the machine tool due to the heat generation, which causes a reduction in machining accuracy.

Therefore, conventionally, a cooling device shown in FIGS. 9 and 10 is attached to this type of linear motor. Each of these drawings is a schematic cross-sectional view of the linear motor when the direction perpendicular to the plane of the drawing is the driving direction of the movable body. In each of the figures, reference numeral 100 denotes a magnet plate unit 1.
Reference numeral 08 denotes a fixed body mounted on the upper surface, and 101 denotes a movable body mounted with the coil unit 106 on the lower surface.

In a first conventional apparatus shown in FIG. 9, a laminated body 10 of a core plate on which a plurality of coils 102 are wound is provided.
3 is hardened together with a cooling pipe 105 by a resin mold 104 to form a coil unit 106. Cooling pipe 105
Is folded back at both ends in the driving direction in the resin mold 104, and after passing through the mold 104, the cooling liquid introduced from the left end entrance in the figure is discharged from the right end exit.

In a second conventional apparatus shown in FIG. 10, a cooling plate 107 made of aluminum is interposed between a movable unit 101 and a coil unit 106 formed by solidifying a core plate laminated body 103 with a resin mold 104. In the cooling plate 107, a cooling fluid flow path 105a that is folded at both ends in the driving direction is formed. Also, U.S. Pat.
A third conventional device disclosed in US Pat. In this apparatus, as shown in FIG. 11, the core plate laminate 113 uses a thick iron plate instead of a thin steel plate. The thickness of the iron plate is set to a width for forming the cooling channel 105b, and the plates 113a and 113b having different heights in the center in the driving direction are alternately stacked, and the upper surface of the stacked body is closed with a cover plate 113c. A cooling channel 105b that extends in the driving direction and is folded at both ends in this direction is formed.

In each of the drawings, a magnet plate unit 108
A large number of magnet bars 110 are arranged and fixed at predetermined intervals in a driving direction on an iron holding plate 109. 9 and 11
10 does not have a means for cooling the magnet plate unit 108, the prior art shown in FIG. 10 forms a half hole extending in the driving direction on both left and right sides of the lower surface of the holding plate 109, and has a U-shape. Cooling pipe 111 is fitted and fixed. In the prior art shown in FIG. 10, aluminum spacers 112 are interposed on the lower surfaces on both left and right sides of the holding plate 109.

[0009]

In the first conventional apparatus shown in FIG. 9, since the cooling pipe 105 is inserted through the resin mold 104, the cooling of the core plate laminated body 103 by the heat insulating action of the resin mold 104. There is a disadvantage that the effect is not sufficiently exhibited. Similarly, the third conventional apparatus shown in FIG. 11 is configured to prevent the coolant from leaking into the core plate laminated body.
Since a thin steel plate cannot be used and a thick plate material is used, the driving efficiency of the driving force generated by the coil unit 106 is low, and the driving output for the same input power is smaller than that of a laminated body made of a thin steel plate. It will be quite small.

A second conventional apparatus shown in FIG. 10 is an aluminum cooling plate 10 having a cooling passage 105a.
7, the movable body is large and the coil unit 10
When the length of the coil unit 6 is long in the driving direction, a non-uniform cooling action occurs in which a part of the coil unit 106 in the longitudinal direction is sufficiently cooled but the other part is not cooled.

In particular, each of the above-mentioned prior arts has a drawback that a remarkable difference occurs in the cooling capacity between the left side which is the inlet side of the cooling pipe 105, the flow path 105a and the channel 105b and the right side which is the outlet side. Also, the magnet plate unit 1
Regarding the cooling of the 08, the prior art shown in FIGS. 9 and 11 does not have any cooling means. In the prior art shown in FIG. 10, it is necessary to increase the wall pressure of the holding plate 109 because a semicircular groove for holding the cooling pipe 111 is formed. Since the holding plate 109 has an entire length corresponding to the moving stroke of the movable body 101, an increase in the thickness of the holding plate 109 significantly increases the weight of the entire magnet plate unit 108, and in particular, the fixed body 100 on which the magnet plate unit 108 is mounted.
Is a movable element guided by a guide mechanism (not shown) and driven by a linear motor (not shown), there is a problem in high-speed feed control of the fixed body 100.

Therefore, a main object of the present invention is to uniformly cool the entire length of the coil unit without reducing the magnetic power generated by the coil unit. Another object of the present invention is to make it possible to arbitrarily and easily change the flow path pattern in the driving direction of the coil unit and the entire region in the direction crossing the driving direction. An additional object of the present invention is to prevent the heat from the magnet plate unit from being transmitted to the mounting body on which the unit is mounted without increasing the weight of the magnet plate unit.

[0013]

Means for Solving the Problems and Effects of the Invention The above-mentioned problems of the conventional apparatus and the objects of the present invention are solved and achieved by means configured as follows. In the invention according to the first aspect, the flow path forming means is provided on the mounting surface of the core member on which the electromagnetic coil is wound. In this flow path forming means, a plurality of first U-shaped flow paths crossing from one long side to the other long side of the mounting surface are formed at predetermined intervals in a longitudinal direction of the mounting surface, and the other long side is formed. A plurality of second U-shaped flow paths crossing from one side to the one long side are formed at predetermined intervals in the longitudinal direction in a complementary relationship with the first U-shaped flow path. The downstream end of each first U-shaped flow path is connected to the upstream end of the adjacent first U-shaped flow path on the downstream side, and the downstream end of each second U-shaped flow path is connected to the downstream side. It is connected to the upstream end of the adjacent second U-shaped channel.

With this configuration, according to the first aspect of the present invention, the cooling fluid is caused to sequentially pass through the plurality of first U-shaped flow paths from one side in the longitudinal direction of the core member to the other side. By successively passing through the plurality of second U-shaped flow paths from one side to the other side, the core member of the electromagnetic coil is cooled substantially uniformly over the entire length in the longitudinal direction and also in the direction crossing the longitudinal direction. The effect which can be performed is produced.

The cooling fluid passing through the plurality of first U-shaped flow paths may be folded back toward the plurality of second U-shaped flow paths on the other side, or the first U-shaped flow path and the second U-shaped flow path may be folded back. A fluid may be separately introduced into the flow path. According to a second aspect of the present invention, the flow path forming means is composed of a plurality of block elements, and these block elements are mounted on the mounting surface of the core member at predetermined intervals in the longitudinal direction of the core member. In each of these block elements, a U-shaped flow path that opens a pair of ports on both surfaces facing the longitudinal direction is formed by extending in a direction crossing the longitudinal direction, and another pair of ports is formed on the both surfaces. The open straight flow path is formed to extend in the longitudinal direction near the folded portion of the U-shaped flow path. Even when each block element is arranged such that the folded portion of the U-shaped flow path faces one or the other of the directions crossing the longitudinal direction, the port of each block element is connected to the port of the adjacent block element by the joint element. Connectable.

With this configuration, according to the second aspect of the present invention, the directions of the plurality of block elements, that is, the directions in which the folded portions of the U-shaped flow path face, are arbitrarily combined.
Various flow path patterns (for example, see FIG. 8) of the cooling fluid flowing along the longitudinal direction of the core member can be formed, and the flow path pattern is optimal for the heat generation characteristics of the electromagnetic coil or the cooling characteristics of the structure combined therewith. Can be selected and used.

According to a third aspect of the present invention, there is provided a cooling device having the structure of the first and second aspects, wherein the cooling device is mounted on opposing surfaces of a first member and a second member which relatively move in a driving direction. The present invention is applied to cool an electromagnetic coil unit of a linear motor including a plate unit and an electromagnetic coil unit. By applying the present invention to the cooling of the electromagnetic coil unit of the linear motor, according to the third and fourth aspects of the present invention, in addition to the effects of the first and second aspects of the present invention, the linear motor can be provided on the facing surfaces thereof. Thermal deformation of the relatively movable first and second members provided therebetween can be minimized, and when these members are components of a machine tool, an effect of assuring high processing accuracy can be obtained.

According to a fifth aspect of the present invention, in the fourth aspect of the invention, each of the plurality of block elements constituting the flow path forming means has a pair of ports of a U-shaped flow path and a pair of linear flow paths. Are symmetrically formed, and a plurality of block elements are arranged such that the directions of these U-shaped flow paths are alternately opposite. With such a configuration, a fifth aspect is provided.
According to the invention, there is an effect that the coil unit of the linear motor can be cooled substantially uniformly over the entire length in the longitudinal direction and also in the direction crossing the longitudinal direction.

According to a sixth aspect of the present invention, the electromagnetic coil unit of the linear motor uses a type in which a number of core plates are stacked in a direction crossing the driving direction.
A plurality of connecting members extending in a direction transverse to the driving direction are arranged at predetermined intervals in the driving direction, and a large number of core plates are integrally connected by the plurality of connecting members. Each of the plurality of block elements is disposed between two adjacent connecting members.

According to the sixth aspect of the present invention, a large number of core plates can be firmly integrated into a laminated body by the connecting members, and each block element for cooling is arranged between the connecting members. In addition, there is an advantage that the laminated structure of the core plate and the arrangement structure of the plurality of block elements for cooling are compatible. According to a seventh aspect of the present invention, the plurality of pressing members attached to the connecting member removably fix the block elements disposed on both sides of each connecting member on the laminated body of the core plate. Can be fixed to the second member.

According to the seventh aspect of the present invention, in addition to the connecting member functioning as a stacking and fixing means for a large number of core plates and a fixing means for the block elements, the connecting member is connected to the second member which is a structure of a machine tool. Practical advantages are provided in that the coil unit of the linear motor including the cooling device can be firmly attached to the structure, which can also be used as fixing means. According to an eighth aspect of the present invention, the magnet plate unit of the linear motor is attached to the structure via a pair of spacers extending in the driving direction at both ends in the direction crossing the driving direction, and the cooling is performed in the spacers in the driving direction. A flow path for passing a fluid is formed.

According to the eighth aspect of the present invention, since the cooling fluid flow path is provided in the spacer itself forming a space between the magnet plate unit and the structure, the spacer is cooled. It is not necessary to increase the thickness of the holding plate of the unit, which avoids an increase in the weight of the magnet plate unit, and at the same time, eliminates heat transfer by radiation from the magnet plate unit to the structure and heat transfer by conduction from the spacer to the structure. it can.

[0023]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a partial sectional view of a linear motor having a cooling device according to the present invention and a feed mechanism using the linear motor.
Is a first member 11, a second member 12 driven on the first member 11 by a pair of guide mechanisms 20 in a first direction perpendicular to the paper surface, and reciprocally drives the second member 12 in the first direction. A linear motor LM, a coil cooling device 40 for cooling the coil unit 30 of the linear motor LM, and a magnet cooling device 70 for cooling the magnet plate unit 60 of the linear motor LM.

Preferably, the first member 11 is configured as a base of a machine tool, and the second member 12 is configured as a tool table or a work table movable on the base. In another aspect, the first
The member is configured as an intermediate slide that is moved on the base of the machine tool in a second direction, which is the horizontal direction in the figure. The pair of guide mechanisms 20 are disposed on both sides in the second direction about the linear motor LM, and are fixed on the first member 11 so as to extend in the first direction.
And a bearing block 22 guided by the rails 21 and fixed to four corners of the lower surface of the second member. Each bearing block 22 holds a large number of rollers 23 rolling on the corresponding guide rail 21 so as to be able to circulate in the moving direction. By rolling the rollers 23 into V-shaped grooves formed on both left and right sides of each guide rail 21, each bearing block 22 is immovable in the vertical and horizontal directions and moves only in the front-rear direction, which is the first direction. It is guided by the guide rail 21 as much as possible.

The coil unit 30 of the linear motor LM
Has a laminate 32 in which a large number of steel plate core plates 31 are laminated in the second direction. As shown in FIG. 2 which is a cross section taken along the line AA in FIG. 1, the laminate 32 has a long comb shape in the first direction, and a large number of comb blades 32a are formed at predetermined intervals in the first direction. A coil 33 is wound so as to surround the front and rear surfaces and the left and right surfaces of each comb blade 32.

The coil unit 30 on which the plurality of coils 33 are wound is surrounded by a resin frame 32b solidified with a synthetic resin on all four surfaces except the upper and lower surfaces, and the resin frame 34 is long in the first direction and low in height. It has a rectangular parallelepiped shape. The upper surface of the laminated body 32 is formed as a substantially rectangular mounting surface 32c that is long in the first direction, and a plurality of connecting members 34 having a rectangular cross section in the second direction are spaced on the mounting surface 32c at predetermined intervals in the first direction. It is arranged across. Each connecting member 34 is made of steel, and is fixed to a large number of core plates 31 by, for example, welding to integrate these core plates 31.

On the mounting surface 32c of the laminate 32 and between the connecting members 34, a substantially rectangular parallelepiped block 35 having a total length in the longitudinal direction equal to the width in the left-right direction of the resin frame 32b is attached to the lower surface of the laminate 32. Are arranged in a state of being in surface contact with the mounting surface 32c. Each block 35 disposed between the adjacent connecting members 34 has the same configuration, and as shown in FIGS. 3 and 4, extends from one short side to the other short side in a long side direction. A U-shaped flow path 36 is formed, and a straight flow path 37 is formed on the other short side along this short side.

The turn-up portion 36r of the U-shaped passage 36 reaches a position approaching the straight flow passage 37, and the open portion 36f has a pair of ports 36a which open on one short side to both end surfaces 35a on the long side of the block 35. Is in communication with The straight flow path 37 communicates with another pair of ports 37a that are open at the other short side end surface 35a on the long side side. On the upper surface of the block 35,
Four semi-elliptical grooves 35b at which both ends of a holding piece described later abut.
Are formed on both long sides. Port 36a and boat 3
7a is symmetrically arranged with respect to the central portion in the longitudinal direction of the block 35, and the four semi-elliptical grooves 35b are similarly symmetrically arranged.

Here, "U-shape" which defines the shape of the flow path 36 means an English letter U, and the heat of the fluid introduced from one of the ports 36a and sent out from the other port 36a is turned back by the return portion 36r. At the other short side, the temperature of the other short side cooled by the fluid passing through the straight flow path 37 is averaged with the temperature of the one short side. With such a purpose. For example, the letter V,
Shapes such as W and M also meet this purpose, and in the description of the present embodiment, the definition “U-shaped” is used to include such similar shapes.

FIG. 5 is a plan view, partially cut away, showing the block 35 mounted on the laminate 32. One block 35 is disposed between two adjacent connecting members 34. FIG. A supply / discharge block 41 is provided on one side in the driving direction.
However, a return block 45 is disposed on the other side. Each block 35 is pressed downward by four ends of a holding piece 48 fixed to the connecting member 34 on both sides by countersunk screws in the four semi-elliptical grooves 35b on both long sides, and the lower surface of the It comes into surface contact with the mounting surface 32c so that a heat exchange action is performed between the two.

Similarly, the supply / discharge block 41 and the return block 45 have two semi-elliptical grooves 4 formed on one long side.
At 1b and 45b, the end of the pressing piece 48 screwed to the adjacent connecting member 34 is pressed downward. By loosening the holding piece 48, each block 35 is removed, and the direction can be changed so that the folded portion 36r of the U-shaped flow path 36 can be selectively directed upward or downward in FIG.

In the supply / discharge block 41, a supply path 42 and a discharge path 43 having a hole pitch aligned with the ports 36a and 37a of the block 35 are formed on one short side and the other short side, respectively. A U-shaped return path 46 having a hole pitch aligned with the ports 36a and 37a of the 35 is formed. In the arrangement example shown in FIG.
The block 35 is arranged so that the folded portions 36r of the U-shaped flow path 36 are alternately directed downward and upward. Such an arrangement includes a pair of ports 36a on one short side of each block 35 and another pair of ports 37a on the other short side.
Are formed at symmetrical positions with respect to the center in the longitudinal direction (long side direction) of each block 35.

The connection of the channels between the blocks is made using a plurality of joints 50 shown in FIG. In this joint 50, a straight flow path 51 penetrates the center of the shaft, and both ends of the outer periphery are formed as fitting portions provided with O-rings 52.
Specifically, one end of a joint 50 is inserted into the supply path 42 and the discharge path 43 of the supply / discharge block 41, and the other end of the joint 50 is connected to the port 3 of the left block 35.
6a and port 37a. Block 35
And the joint 50 constitute a flow path forming means in the present invention.

The flow path connection between the two blocks 35 with each connecting member 34 therebetween is made by inserting both ends of the joint 50 into these aligned ports. Further, the flow path connection between the right end block 35 and the return block 45 in FIG.
The joint 50 is inserted into both ends of the U-shaped return path 46 of FIG.

As a result, in the arrangement example of FIG.
The return flow path FDP from the second flow path to the return path 46 and the return flow path RTP from the return path 46 to the discharge path 43 are different from each other in a longitudinal position where one flow path is different from the other flow path. Is in a complementary relationship to approach. The return block 4
5, a supply / discharge block similar to the supply / discharge block 42 is provided to discharge the cooling liquid introduced into the forward flow path FDP from the left side in FIG. 5 and simultaneously discharge the cooling liquid introduced into the return flow path RTP from the right side. It may be discharged from the left side.

The plurality of connecting members 34 integrally connect a large number of core plates constituting the laminated body 32 by, for example, welding, and the blocks 35, 41, and 45 are formed by pressing pieces 48.
Are integrally bonded on the laminate 32. The connection members 34 are formed with screw holes at three locations in the longitudinal direction, and are firmly fixed to the lower surface of the movable body 12 by bolts 49 (see FIG. 1) screwed into the screw holes, whereby the coil unit 30 and the coil unit It also functions as means for mounting the cooling device 40 on the movable body 12.

Referring again to FIG. 1, the magnet plate unit 6
0 comprises a plurality of magnet plate devices arranged in series in the driving direction. Each device is provided with a plurality of magnet bars 62 extending in a direction transverse to the driving direction at predetermined intervals in the driving direction.
1 and a resin frame 63 surrounding the upper surface and all side surfaces of the magnet bar 62 with a synthetic resin. Unit 6
0 has a longer overall length in the driving direction than the coil unit 30 so as to cover the moving stroke of the movable body 12 as a whole.

The magnet cooling device 70 has a pair of spacers 71 extending in the driving direction on the lower surfaces at both ends of the holding plate 61 in the second direction. As shown in FIG.
1 is a plurality of spacer elements 7 made of, for example, aluminum.
1a and 71b are arranged in the driving direction. The above-described magnet plate device is arranged on the spacer 71 in the driving direction, and is fastened together with the spacer 71 on the first member 11 by bolts 72 and fixed. Thereby, between the lower surface of each holding plate 61 and the upper surface of the first member 11, as shown in FIG.
A heat-insulating space G is formed to prevent the transfer of heat to 1 and to expose the lower surface of the holding plate 61 to the atmosphere.

Each element 71a, 71b has a concentric flow path 7
3 is formed, and a joint 74 for connecting the flow path 73 at a connection portion between the two is provided. At the right end in FIG. 7, a return pipe 74 that connects the flow paths 73 on both sides is provided. The return pipe 74 is removed, and each spacer 71
The cooling fluid may flow from one side to the other or alternately over time.

Next, the operation of the embodiment configured as described above will be described. When the coil 33 of the coil unit 30 is energized by a command from a linear motor drive circuit under the control of a numerical controller (not shown), a magnetic force is generated in the vertical direction in FIG. And a suction force is generated. When the power supply phase of the electric power applied to the plurality of coils 33 arranged in the drive direction is changed by the drive circuit, a thrust in the drive direction is generated in the coil unit 30, and the movable body 12 runs on the rail 21.

When the energization control of the plurality of coils 33 is performed as described above, the core plate 3 holding the coils 33
The one laminate 32 generates heat. The coil cooling device 40 sequentially passes the cooling fluid supplied from the unillustrated cooling fluid supply means to the supply path 42 of the supply / discharge block 41 at the left end of FIG. 5 through the plurality of blocks 35 and returns the return block 45 at the right end.
From the return block 45, a plurality of blocks 35 are sequentially passed again to return to the supply / discharge block 41, and the flow is returned from the discharge path 43 of the supply / discharge block 41 to cooling fluid supply means (not shown).

In this case, the cooling fluid absorbs heat mainly from the odd-numbered blocks 35 as shown in the first, third, fifth,... From the left in FIG. In the process of gradually raising the temperature and flowing through the return flow path RTP, the odd-numbered blocks (even numbers in the ordinal numbers from the left) mainly as shown in the first, third, fifth,... 3
5 absorbs heat and further rises in temperature.

Therefore, the laminated body 32 of the coil unit 30 which comes into surface contact with the block 35 is cooled substantially equally at both ends and the center in the driving direction (the left-right direction in FIG. 5). The cooling imbalance between each part is eliminated. In order to obtain the thermal symmetry in the driving direction, the number of the blocks 35 is preferably set to an even number. further,
Each of the odd-numbered blocks 35 from the left side of FIG. 5 is a straight flow path in which the folded portion 36r of the U-shaped flow path 36 forming a part of the forward flow path FDP forms a part of the return flow path RTP. 37
, The entire block 35 is uniformly cooled, and the thermal imbalance of the block itself in the longitudinal direction is reduced. Such a heat exchange effect in each block is the same for the even-numbered blocks 35.

As described above, the heat generated by the coil unit 30 is substantially uniformly absorbed in the entire length of the coil unit 30 in the driving direction and in the left and right portions crossing the driving direction. Partially thermally deformed in a part of the substrate is excluded. This advantage has a practical effect of guaranteeing precise feed accuracy and high machining accuracy when the movable body 12 is applied as a spindle head or a work table of a machine tool.

The energization of the coil unit 30 acts to cause the magnet plate unit 60 to generate heat. Spacer 71
The cooling fluid is also circulated to the flow path 73, and the cooling fluid absorbs heat from the magnet plate unit 60 to prevent the first member 11 from being thermally deformed. In particular, since the gap G is provided between the lower surface of the holding plate 61 and the first member 11, heat conduction from the holding plate 61 to the first member 11 is eliminated.
The air cooling effect of the holding plate 61 is also ensured.

FIG. 8 shows flow patterns of various cooling fluids formed by arbitrarily combining the directions of the blocks 35 described above. FIG. 8A shows a pattern in which the blocks 35 are alternately arranged in the opposite directions as shown in FIG. FIG. 8B shows a configuration in which the U-shaped flow paths 36 of all the blocks 35 are connected in series by a joint 50 to form a forward flow path FDP, and the straight flow paths 37 of all the blocks 35 are connected in series by the joint 50. To the movable body 1 in a pattern in a case where the
2 is applied when it has non-thermosymmetric characteristics in the direction crossing the driving direction.

FIG. 8C shows a pattern in which the cooling effect of the central portion is enhanced as compared with the both ends so that the central portion in the driving direction is first cooled by the cooling fluid, and FIG. 2 shows a pattern in the case where the latter half is cooled first to give a difference in cooling effect between the first half and the rear format. The arrangement of the blocks 35 constituting these flow path patterns may be performed when the central portion of the movable body 12 has a poor heat radiation effect as compared with the both ends, or when the movable body 1
No. 2 is applied when the first half and the second half in the driving direction have asymmetrical heat radiation effect.

One of the features of the present invention is that the flow path pattern of various cooling fluids can be easily formed by loosening the pressing piece 48 and arbitrarily changing the direction of the block 35.
The present invention can be carried out under any of the modifications described elsewhere in the description of the above embodiments, but other than this, the scope of the present invention described in the claims in the claims section does not depart from the spirit of the present invention. The following changes are possible within:

(1) The flow path of the cooling fluid in which the forward flow path FDP and the return flow path RTP shown in FIG. 5 are in a complementary relation is a half rectangular parallelepiped without using the blocks 35, 41, and 45. It may be formed on the mating surface. (2) Although the embodiment shows an example in which the present invention is applied to a linear motor, the cooling device according to the present invention can also be applied to various devices having an electromagnetic coil that generates heat when energized, for example, a cooling device of an electromagnetic magnet chuck device.

(3) Each of the blocks 35 is exemplified as a rectangular parallelepiped shape having different vertical and horizontal lengths. However, the blocks 35 may have the same vertical and horizontal lengths, or may have a cubic shape. In addition, these shapes need not be shapes in a strict sense defined in terms of geometry, and may be shapes according to them. (4) The guide mechanism 20 includes a sliding mechanism, a hydrostatic bearing mechanism,
Various guide mechanisms such as a semi-floating mechanism can be used.

(5) As the coil unit 30 of the linear motor LM, a coil unit other than the one exemplified in the embodiment can be applied. In this case, if the coil unit 30 has one flat surface, the present invention can be implemented by attaching the cooling device according to the present invention to this flat surface.

[Brief description of the drawings]

FIG. 1 is a partial sectional view of an embodiment in which the present invention is applied to a linear motor of a feed mechanism.

FIG. 2 is a cross-sectional side view taken along the line AA of FIG.

FIG. 3 is a top view of a block constituting a part of the cooling device.

FIG. 4 is a side view of the block.

FIG. 5 is a top view showing a part of the cooling device in a cutaway manner.

FIG. 6 is a plan view of a joint forming a part of the cooling device.

FIG. 7 is a plan view of a spacer constituting a cooling device for the magnet plate unit of the linear motor.

8 (A) to 8 (D) are charts for explaining various flow path patterns of a cooling fluid formed by combining the blocks.

FIG. 9 is a diagram showing a conventional linear motor cooling device.

FIG. 10 is a diagram showing another conventional linear motor cooling device.

FIG. 11 is a diagram showing still another conventional linear motor cooling device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Feed mechanism 11 ... Fixed base (1st member) 12 ... Movable body (2nd member) 20 ... Guide mechanism LM ... Linear motor 30 ... Coil unit 33 ... Electromagnetic coil 31 ・ ・ ・ Core plate 32 ・ ・ ・ Laminated body 35 ・ ・ ・ Block 36 ・ ・ ・ U-shaped channel 37 ・ ・ ・ Linear channel 50 ・ ・ ・ Joint 34 ・ ・ ・ Connecting member 48 ・ ・ ・Holding piece (fixing member) 60: magnet plate unit 61: holding plate 62: magnet bar 71: magnet cooling device 71: spacer 73: cooling channel G: space

Claims (8)

[Claims] 1. A flow which is mounted on a substantially rectangular mounting surface formed on a core member on which an electromagnetic coil is wound and through which cooling fluid flows between one short side and the other short side of the mounting surface. In the cooling device including the path forming means, the flow path forming means is disposed at a predetermined interval in a longitudinal direction of the mounting surface, and a plurality of first U-shaped flow paths crossing from one long side to the other long side. A plurality of second U-shaped flow paths arranged at a predetermined interval in the longitudinal direction in a complementary relationship with the first U-shaped flow paths and crossing from the other long side to the one long side; The downstream end of the first U-shaped flow path is connected to the upstream end of the adjacent first U-shaped flow path on the downstream side, and the downstream end of each second U-shaped flow path is adjacent on the downstream side. And a plurality of connection flow paths connected to the upstream end of the second U-shaped flow path. 2. A flow which is mounted on a substantially rectangular mounting surface formed on a core member on which an electromagnetic coil is wound and through which cooling fluid flows between one short side and the other short side of the mounting surface. In the cooling device including the path forming means, the flow path forming means includes a plurality of block elements mounted on the mounting surface at predetermined intervals in a longitudinal direction of the mounting surface, and each of the block elements is A U-shaped flow passage extending in a direction transverse to the longitudinal direction and opening a pair of ports on both surfaces facing the longitudinal direction, and extending in the longitudinal direction near a folded portion of the U-shaped flow passage. A linear flow path that opens another pair of ports on the both surfaces, and the flow path forming means connects the ports that open on opposing surfaces of the adjacent block element to each other. Further comprising a joint element, Even if each block element is arranged such that the folded portion of the U-shaped flow path faces any long side of the mounting surface, the port of each block element is connected to the port of the adjacent block element by the joint element. A cooling device for an electromagnetic coil, which can be connected to the electromagnetic coil. 3. A first member and a second member which relatively move in a driving direction.
In a linear motor, comprising a magnet plate unit and an electromagnetic coil unit respectively attached to opposing surfaces of the member, and a cooling device attached to a mounting surface of the electromagnetic coil unit for cooling the electromagnetic coil unit, the cooling device supplies a cooling fluid. A flow path forming means for flowing between one side and the other side in the driving direction is provided, and the flow path forming means
A plurality of first U disposed at a predetermined interval in the driving direction and extending from one side in the transverse direction crossing the driving direction to the other side;
A plurality of second U-shaped flow paths, which are arranged at predetermined intervals in the driving direction in a complementary relationship with the first U-shaped flow paths and extend from the other side in the transverse direction to the one side; A plurality of connection flow paths connecting between the first U-shaped flow paths to form a continuous first flow path, and the second U-shaped flow form to form a continuous second flow path. A linear motor, comprising: a plurality of connection flow paths connecting paths. 4. A first member and a second member which relatively move in a driving direction.
In a linear motor, comprising a magnet plate unit and an electromagnetic coil unit respectively attached to opposing surfaces of the member, and a cooling device attached to a mounting surface of the electromagnetic coil unit for cooling the electromagnetic coil unit, the cooling device supplies a cooling fluid. A flow path forming unit that circulates between one side and the other side in the driving direction is provided.
A plurality of block elements mounted on the mounting surface at predetermined intervals in the drive direction, each of which is formed to extend transversely across the drive direction and oriented in the drive direction; A U-shaped flow path that opens a pair of ports on both surfaces, and a straight flow path that is formed in the vicinity of the folded portion of the U-shaped flow path and extends in the driving direction and that opens another pair of ports on the two surfaces. And the flow path forming means further includes a plurality of joint elements that connect the ports that open to the opposing surfaces of the adjacent block elements, and that each block element has a shape of the U-shaped flow path. The joint element allows the port of each block element to be connected to the port of an adjacent block element even when the folded portion is arranged so as to face any side in the transverse direction. Linear motor according to claim. 5. The linear motor according to claim 4, wherein said pair of ports and said other pair of ports are formed symmetrically in each of said block elements, and said plurality of adjacent block elements are connected to said plurality of block elements. A linear motor, wherein the U-shaped flow paths are arranged so that the directions thereof are alternately opposite. 6. The linear motor according to claim 4, wherein the electromagnetic coil unit has a plurality of core plates extending in the driving direction stacked in the transverse direction and a predetermined distance in the driving direction. And a plurality of connecting members extending in the transverse direction and integrally connecting the plurality of core plates are arranged at predetermined intervals in the driving direction. And
A linear motor, wherein each of the block elements is arranged between two adjacent connecting members. 7. The linear motor according to claim 6, further comprising a plurality of fixing members that are attached to the connecting member and that removably fix the block elements disposed on both sides of each connecting member on the laminate. A linear motor having the connecting member fixed to the second member. 8. The linear motor according to claim 3, wherein the magnet plate unit is fixed to the first member via a pair of spacers extending in the driving direction at both ends in the transverse direction. A flow path for allowing a cooling fluid to pass in the driving direction in the spacer.