JP3658980B2 - Electromagnetic coil cooling device and linear motor equipped with the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cooling device for an electromagnetic coil that generates magnetic force and generates heat when energized. Preferably, the present invention relates to an electromagnetic coil unit of a linear motor and a cooling device for a magnet plate unit mounted on one and the other of a first member and a second member that move relative to each other, such as a fixed base and a slide of a machine tool. .
[0002]
[Prior art]
A linear motor used in a machine tool includes an electromagnetic coil unit and a magnet plate unit which are opposed to each other with a minute gap in a direction orthogonal to a driving direction. The electromagnetic coil unit and the magnet plate unit are mounted on one and the other of a fixed body that moves relative to each other in the drive direction and a movable body that is guided in the drive direction on the fixed body and reciprocates on the fixed body. .
[0003]
Usually, a magnet plate unit is laid on a fixed body, and an electromagnetic coil unit is mounted on the movable body. The magnet plate unit is configured by arranging a large number of magnet bars on a holding plate fixed to a fixed body at predetermined intervals in the driving direction so that their longitudinal directions cross the driving direction. The core plate is constituted by a laminated body of core plates obtained by laminating core plates in a direction crossing the driving direction, and a plurality of coils wound on the laminated body in a direction crossing the driving direction at a predetermined interval in the driving direction.
[0004]
In such a linear motor, when the electromagnetic coil unit is energized and the movable body is positioned and fed, the electromagnetic coil unit generates heat, and the generated heat is also radiated to the magnet plate unit. This heat generation is not only a loss of electric energy applied to the linear motor, but also causes thermal deformation of the fixed body and the movable body as the machine tool component due to the heat generation, which causes a reduction in machining accuracy.
[0005]
Therefore, conventionally, a cooling device shown in FIGS. 9 and 10 is attached to this type of linear motor. Each of these drawings is a schematic cross-sectional view of the linear motor when the direction perpendicular to the paper surface is the driving direction of the movable body.
In each figure, 100 is a fixed body with the magnet plate unit 108 mounted on the upper surface, and 101 indicates a movable body with the coil unit 106 mounted on the lower surface.
[0006]
In the first conventional apparatus shown in FIG. 9, a core plate laminate 103 around which a plurality of coils 102 are wound is fixed together with a cooling pipe 105 by a resin mold 104 to form a coil unit 106. The cooling pipe 105 is folded back at both ends in the driving direction in the resin mold 104, and after passing through the mold 104, the cooling liquid introduced from the left end inlet portion in the drawing is discharged from the right end outlet portion.
[0007]
In the second conventional apparatus shown in FIG. 10, an aluminum cooling plate 107 is interposed between a coil unit 106 in which a core plate laminate 103 is fixed by a resin mold 104 and a movable body 101. In the cooling plate 107, a cooling fluid channel 105 a is formed that is folded at both ends in the driving direction.
A third conventional device disclosed in US Pat. No. 4,839,545 is also known. In this apparatus, as shown in FIG. 11, the laminated body 113 of core plates uses a thick iron plate instead of a thin steel plate. The thickness of the iron plate is a width for forming the cooling channel 105b, and the layers 113a and 113b having different heights in the center in the driving direction are alternately stacked, and the upper surface of the stacked body is closed with the cover plate 113c. A cooling channel 105b extending in the driving direction and turning back at both ends in this direction is formed.
[0008]
In each figure, the magnet plate unit 108 is formed by arranging and fixing a large number of magnet rods 110 at predetermined intervals in the driving direction on an iron holding plate 109. 9 and 11 does not include means for cooling the magnet plate unit 108, the prior art shown in FIG. 10 forms half holes extending in the driving direction on both the left and right sides of the lower surface of the holding plate 109. FIG. The U-shaped cooling pipe 111 is fitted and fixed thereto. In the prior art shown in FIG. 10, aluminum spacers 112 are interposed on the lower surfaces of the left and right sides of the holding plate 109.
[0009]
[Problems to be solved by the invention]
The first conventional apparatus shown in FIG. 9 has a defect that the cooling effect on the laminated body 103 of the core plate is not sufficiently exhibited by the heat insulating action of the resin mold 104 because the cooling pipe 105 is inserted into the resin mold 104. .
Similarly, the third conventional apparatus shown in FIG. 11 cannot use a thin steel plate as the core plate laminated body 113 from the viewpoint of preventing the leakage of the coolant into the core plate laminated body. Therefore, the generation efficiency of the driving force generated by the coil unit 106 is low, and the driving output with respect to the same input power is considerably smaller than that of the laminated steel plate.
[0010]
The second conventional apparatus shown in FIG. 10 uses an aluminum cooling plate 107 having a cooling channel 105a. Therefore, when the movable body is large and the coil unit 106 is long in the driving direction, the coil unit A part of the longitudinal direction of 106 is sufficiently cooled, but the other part is not cooled.
[0011]
In particular, each of the above-described prior arts has a drawback that a significant difference occurs in cooling capacity between the left side which is the inlet side and the right side which is the outlet side of the cooling pipe 105, the flow path 105a and the channel 105b.
Further, regarding the cooling of the magnet plate unit 108, the prior art shown in FIGS. 9 and 11 does not provide any cooling means. 10 has to increase the thickness of the holding plate 109 in relation to the formation of a semicircular groove for holding the cooling pipe 111. Since the holding plate 109 has a total length corresponding to the moving stroke of the movable body 101, an increase in the thickness of the holding plate 109 significantly increases the weight of the entire magnet plate unit 108, and in particular, the fixed body 100 on which the magnet plate unit 108 is mounted. Is a movable element that is guided by a guide mechanism (not shown) and driven by a linear motor (not shown), this causes a problem in the high-speed feed control of the fixed body 100.
[0012]
Therefore, a main object of the present invention is to enable uniform cooling of the entire length of the coil unit without reducing the magnetic power generated by the coil unit.
Another object of the present invention is to make it possible to arbitrarily and easily change the flow path pattern in the entire region in the driving direction of the coil unit and the direction crossing the coil unit.
An additional object of the present invention is to prevent heat from the magnet plate unit from being transmitted to the mounting body to which the unit is mounted without increasing the weight of the magnet plate unit.
[0013]
[Means for Solving the Problems and Effects of the Invention]
The above-described problems of the conventional apparatus and the object of the present invention are solved and achieved by means configured as follows. In the invention according to claim 1, the flow path forming means is provided on the mounting surface of the core member around which the electromagnetic coil is wound.The flow path forming means includes a plurality of block elements mounted on the mounting surface at a predetermined interval in the longitudinal direction of the mounting surface, and each of the block elements extends in a direction crossing the longitudinal direction. A U-shaped channel that is formed and opens a pair of ports on both sides facing the longitudinal direction, and is formed extending in the longitudinal direction in the vicinity of the folded portion of the U-shaped channel, and another pair of surfaces on the both sides. A linear flow path that opens a port, and the flow path forming means further includes a plurality of joint elements that connect the ports that open to the opposing surfaces of the adjacent block elements, and each block element Even when the folded portion of the U-shaped flow path is arranged so as to face any long side of the mounting surface, the port of each block element is connected to the port of the adjacent block element by the joint element. And it can be connected.
[0014]
With this configuration, according to the invention of claim 1ElectricThere is an effect that the core member of the magnetic coil can be cooled substantially uniformly in the longitudinal direction and across the longitudinal direction.In addition, by arbitrarily combining the directions of the plurality of block elements, that is, the direction in which the folded portion of the U-shaped flow path faces, various flow path patterns of the cooling fluid that flows along the longitudinal direction of the core member (for example, FIG. 8), and an optimum flow path pattern can be selected and used for the heat generation characteristics of the electromagnetic coil or the cooling characteristics of the structure combined therewith.
[0017]
Claim 2The invention described inClaim 1The cooling device having the configuration is cooled so as to cool the electromagnetic coil unit of the linear motor provided with the magnet plate unit and the electromagnetic coil unit respectively attached to the opposing surfaces of the first member and the second member that move relative to each other in the driving direction. Apply. By applying to the cooling of the electromagnetic coil unit of the linear motor,Claim 2According to the invention described inClaim 1In addition to the effects of the invention of the present invention, when the linear motor is provided between the opposed surfaces, the first and second members that can be moved relative to each other can be minimized, and these members are constituent members of a machine tool. Has the effect of guaranteeing high machining accuracy.
[0018]
Claim 3The invention described inClaim 2The pair of ports of the U-shaped flow path and the pair of ports of the straight flow path are formed symmetrically in each of the plurality of block elements constituting the flow path forming means. Are arranged so that the directions of the U-shaped flow paths are alternately reversed. By configuring in this way,Claim 3According to this invention, the effect that the coil unit of a linear motor can be cooled substantially uniformly also in the direction which crosses the longitudinal direction over the full length of the longitudinal direction is show | played.
[0019]
Claim 4The invention described in 1 uses a type in which a large number of core plates are stacked in a direction crossing the driving direction as the electromagnetic coil unit of the linear motor. A plurality of connecting members extending in a direction crossing the driving direction are arranged with a predetermined interval in the driving direction, and a large number of core plates are integrally coupled by the plurality of connecting members. Each of the plurality of block elements is disposed between two adjacent connecting members.
[0020]
Claim 4According to the invention, it is possible to form a laminated body in which a large number of core plates are firmly integrated by the connecting members, and because each block element for cooling is arranged between the connecting members, the core plates are laminated and fixed. There is an advantage that the structure and the arrangement structure of a plurality of block elements for cooling are compatible.Claim 5According to the invention, the block elements disposed on both sides of each connecting member are removably fixed on the laminated body of the core plates by a plurality of pressing members attached to the connecting member, and the connecting member is a second member. It can be fixed to the member.
[0021]
Claim 5According to the invention, in addition to the connecting member functioning as a stacking fixing means for a large number of core plates and a fixing means for the block element, for example, it can also be used as a fixing means to the second member that is a structure of a machine tool, There is a practical advantage that the coil unit of the linear motor including the cooling device can be firmly attached to the structure.Claim 6In the invention described in, the magnet plate unit of the linear motor is attached to the structure via a pair of spacers extending in the driving direction at both ends in the direction crossing the driving direction, and the cooling fluid is passed through these spacers in the driving direction. A flow path is formed.
[0022]
Claim 6According to the invention described in the above, since the cooling fluid channel is provided in the spacer itself that forms a space between the magnet plate unit and the structure to cool the spacer, the thickness of the holding plate of the magnet plate unit is reduced. It is not necessary to increase the thickness, and an increase in the weight of the magnet plate unit is avoided, and at the same time, heat transfer due to radiation from the magnet plate unit to the structure and heat transfer due to conduction from the spacer to the structure can be eliminated.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a partial sectional view of a linear motor provided with a cooling device according to the present invention and a feed mechanism using the linear motor. The feed mechanism 10 includes a first member 11 and a pair on the first member 11. The second member 12 driven by the guide mechanism 20 in the first direction perpendicular to the paper surface, the linear motor LM that reciprocates the second member 12 in the first direction, and the coil unit 30 of the linear motor LM are cooled. The coil cooling device 40 and a magnet cooling device 70 for cooling the magnet plate unit 60 of the linear motor LM are further configured.
[0024]
Preferably, the first member 11 is a base of a machine tool, and the second member 12 is configured as a tool table or a work table movable on the base. In another form, the first member is configured as an intermediate slide that is moved on the base of the machine tool in a second direction that is the left-right direction of the figure.
The pair of guide mechanisms 20 are arranged on both sides in the second direction with the linear motor LM as the center, and a pair of rails 21 fixed on the first member 11 so as to extend in the first direction, and these rails 21. The bearing block 22 is guided by the second member and fixed to the four corners of the lower surface of the second member. Each bearing block 22 holds a large number of rollers 23 rolling on the corresponding guide rail 21 so as to be able to circulate in the moving direction. By rolling the rollers 23 in the V-shaped grooves formed on the left and right side surfaces of each guide rail 21, each bearing block 22 moves only in the front-rear direction which is the first direction and does not move in the up-down direction and the left-right direction. It is guided to the guide rail 21 as possible.
[0025]
The coil unit 30 of the linear motor LM has a laminated body 32 in which a large number of steel plate core plates 31 are laminated in the second direction. As shown in FIG. 2, which is a cross-sectional view taken along the line AA in FIG. 1, the stacked body 32 has a long comb shape in the first direction, and a large number of comb blade portions 32 a are formed at predetermined intervals in the first direction. A coil 33 is wound so as to surround the front and rear surfaces and the left and right surfaces of each comb blade portion 32.
[0026]
The coil unit 30 that winds the plurality of coils 33 is surrounded by a resin frame 32b that is solidified with a synthetic resin on four surfaces except the upper and lower surfaces, and the resin frame 34 has a rectangular parallelepiped shape that is long in the first direction and low in length. Presents. The upper surface of the laminated body 32 is formed as a substantially rectangular mounting surface 32c that is long in the first direction, and a plurality of connecting members 34 having a rectangular cross section are spaced in the second direction at predetermined intervals on the mounting surface 32c. It is arranged across. Each connecting member 34 is made of steel, and is fixed to a large number of core plates 31 by, for example, welding to integrate these core plates 31.
[0027]
A substantially rectangular parallelepiped block 35 having a total length in the longitudinal direction equal to the width in the left-right direction of the resin frame 32b is provided on the attachment surface 32c of the laminate 32 and between the connecting members 34. It arrange | positions in the state which made the surface contact to 32c. Each block 35 arranged between the adjacent connecting members 34 has the same configuration, and as shown in FIGS. 3 and 4, extends in the long side direction from one short side to the other short side. A letter-shaped flow path 36 is formed, and a straight flow path 37 is formed along the short side on the other short side.
[0028]
The folded portion 36r of the U-shaped passage 36 reaches a position approaching the linear flow path 37, and the open portion 36f communicates with a pair of ports 36a that open to both long side surfaces 35a of the block 35 on one short side. ing. The straight flow path 37 communicates with another pair of ports 37a opened on the long side end face 35a on the other short side. On the upper surface of the block 35, four semi-elliptical grooves 35b with which both ends of a presser piece to be described later abut are formed on both long sides. The port 36a and the boat 37a are symmetrically arranged with respect to the central portion in the longitudinal direction of the block 35, and the four semi-elliptical grooves 35b are similarly symmetrically arranged.
[0029]
Here, the “U-shape” that defines the shape of the flow path 36 means the letter U, but the heat of the fluid introduced from one side of the port 36a and sent from the other side is transferred to the other side at the turn-back portion 36r. The purpose is to conduct also to the short side, average the temperature of the entire block, and average the temperature of the other short side that the fluid passing through the straight flow path 37 cools with the temperature of one short side. have. For example, the shapes of English letters V, W, M, etc. also meet this purpose, and in the description of this embodiment, the definition of “U-shape” is used to include such similar shapes.
[0030]
FIG. 5 is a plan view showing a partially broken view with the block 35 mounted on the laminate 32, and one block 35 is disposed between two adjacent connecting members 34. A supply / discharge block 41 is arranged on one side in the driving direction, and a return block 45 is arranged on the other side. Each block 35 is pressed downward by the ends of the holding pieces 48 fixed to the connecting members 34 on both sides by the countersunk screws in the four semi-elliptical grooves 35b on both long sides, and the lower surface of the laminate 32 is The mounting surface 32c is in surface contact with each other so that a heat exchanging action is performed between them.
[0031]
Similarly, the supply / discharge block 41 and the return block 45 are moved downward by the end portion of the presser piece 48 screwed to the adjacent connecting member 34 by two semi-elliptical grooves 41b, 45b formed on one long side. It is pressed. Each block 35 is removed by loosening the presser piece 48, and the direction can be changed so that the folded portion 36r of the U-shaped flow path 36 is selectively directed upward or downward in FIG.
[0032]
In the supply / discharge block 41, a supply path 42 and a discharge path 43 having a hole pitch aligned with the ports 36a and 37a of the block 35 are formed on one and the other short sides, respectively, and both ends of the return block 45 are ports of the block 35. A U-shaped return path 46 having a hole pitch aligned with 36a and 37a is formed.
In the arrangement example shown in FIG. 5, the blocks 35 are arranged so that the folded portions 36 r of the U-shaped channel 36 are alternately directed downward and upward. Such an arrangement is such that the pair of ports 36a on one short side of each block 35 and the other pair of ports 37a on the other short side are arranged at the center in the longitudinal direction (long side direction) of each block 35. This is realized because it is formed in a symmetrical position with the center.
[0033]
The flow path connection between each block is performed using a plurality of joints 50 shown in FIG. The joint 50 is formed as a fitting portion in which the straight flow path 51 passes through the center of the shaft and both outer peripheral ends include O-rings 52. Specifically, one end of the joint 50 is inserted into the supply path 42 and the discharge path 43 of the supply / discharge block 41, and the other end of the joint 50 is inserted into the port 36a and the port 37a of the left block 35. Yes. The block 35 and the joint 50 constitute a flow path forming means in the present invention.
[0034]
The flow path connection between the two blocks 35 with the connecting members 34 interposed therebetween is made by inserting both ends of the joint 50 into the ports in the alignment relation. Furthermore, the flow path connection between the right end block 35 and the return block 45 in FIG. 5 is made by inserting joints 50 at both ends of the right end pair of ports and the U-shaped return path 46 of the return block 35.
[0035]
Thus, in the arrangement example of FIG. 5, the forward flow path FDP leading from the supply path 42 to the return path 46 and the reverse flow path RTP leading from the return path 46 to the discharge path 43 are configured such that one flow path is the other flow path. Complementary relationship of approaching the other-side flow path at a longitudinal position different from the path is established. In addition, instead of the return block 45, a supply / discharge block similar to the supply / discharge block 42 is provided, and the coolant introduced into the forward flow path FDP is discharged from the right side in FIG. The cooling liquid to be discharged may be discharged from the left side.
[0036]
The plurality of connecting members 34 integrally couple a large number of core pellets constituting the laminated body 32 by welding, for example, and integrally couple the blocks 35, 41, 45 on the laminated body 32 by push pieces 48. The connecting members 34 are formed with screw holes at three locations in the longitudinal direction, and are firmly fixed to the lower surface of the movable body 12 by bolts 49 (see FIG. 1) screwed into the screw holes, thereby the coil unit 30 and the coil. It also functions as means for attaching the cooling device 40 to the movable body 12.
[0037]
Referring to FIG. 1 again, the magnet plate unit 60 includes a plurality of magnet plate devices arranged in series in the driving direction. In each apparatus, a large number of magnet bars 62 extending in a direction crossing the driving direction are arranged and fixed on the holding plate 61 at a predetermined interval in the driving direction, and the upper surface and all side surfaces of the magnet bar 62 are surrounded by a synthetic resin. It is equipped with. The unit 60 as a whole has a total length longer in the driving direction than the coil unit 30 so as to cover the moving stroke of the movable body 12.
[0038]
The magnet cooling device 70 has a pair of spacers 71 extending in the driving direction on the lower surfaces of both ends of the holding plate 61 in the second direction. As shown in FIG. 7, each spacer 71 is configured by aligning a plurality of spacer elements 71a and 71b made of aluminum, for example, in the driving direction. The magnet plate device described above is arranged in alignment in the driving direction on the spacer 71, and is fastened and fixed on the first member 11 together with the spacer 71 by a bolt 72. Thereby, between the lower surface of each holding plate 61 and the upper surface of the first member 11, heat transfer from the holding plate 61 to the first member 11 is prevented and the lower surface of the holding plate 61 is interposed as shown in FIG. 1. Is formed in the heat insulation space G.
[0039]
Each element 71a, 71b is formed with a concentric flow path 73, and a joint 74 for connecting the flow path 73 is provided at the connection portion between the elements 71a and 71b. At the right end of FIG. 7, a return pipe 74 that communicates the flow paths 73 on both sides is provided. The return pipe 74 may be removed, and the cooling fluid may be allowed to flow alternately from one to the other of the spacers 71 or in time as indicated by a chain line.
[0040]
Next, the operation of the embodiment configured as described above will be described.
When the coil 33 of the coil unit 30 is energized by a command from a linear motor drive circuit under the control of a numerical control device (not shown), a magnetic force is generated in the vertical direction in FIG. 1, and the coil unit 30 and the magnet plate unit 60. A suction force is generated between When the energization phase of the power applied to the plurality of coils 33 arranged in the drive direction is changed by the drive circuit, thrust in the drive direction is generated in the coil unit 30 and the movable body 12 travels on the rail 21.
[0041]
Thus, when energization control to the plurality of coils 33 is performed, the laminated body 32 of the core plate 31 that holds the coils 33 generates heat. The coil cooling device 40 sequentially passes the cooling fluid supplied from the cooling fluid supply means (not shown) to the supply path 42 of the supply / discharge block 41 at the left end of FIG. 5 through the plurality of blocks 35 and the return block 45 at the right end. The return block 45 sequentially passes the plurality of blocks 35 again to return to the supply / discharge block 41, and returns to the cooling fluid supply means (not shown) from the discharge path 43 of the supply / discharge block 41.
[0042]
In this case, the cooling fluid gradually absorbs heat from the odd-numbered blocks 35 such as the first, third, fifth, etc. from the left in FIG. In the process of increasing the temperature and flowing through the retrograde flow path RTP, heat is mainly generated from the odd-numbered (or even-numbered ordinal from the left) block 35 such as the first, third, fifth, etc. from the right in FIG. Absorbs and further increases in temperature.
[0043]
Therefore, the laminated body 32 of the coil unit 30 that is in surface contact with the block 35 is cooled substantially equally at both ends and the center in the driving direction (left-right direction in FIG. 5), and between the longitudinal portions of the laminated body 32. The cooling imbalance is eliminated. In order to obtain the thermal symmetry in the driving direction, the number of blocks 35 is preferably an even number.
Further, each of the odd-numbered blocks 35 from the left side of FIG. 5 is a straight line in which the folded portion 36r of the U-shaped flow path 36 forming a part of the forward flow path FDP forms a part of the reverse flow path RTP. Since it extends to the vicinity of the flow path 37, the entire block 35 is uniformly cooled, and thermal imbalance in the longitudinal direction of the block itself is reduced. The heat exchange action in each block is the same for the even-numbered blocks 35.
[0044]
As described above, the heat generated by the coil unit 30 is absorbed substantially uniformly in the entire length in the driving direction of the coil unit 30 and in the left and right portions crossing the driving direction. As a result, the movable body 12 is partly driven in the driving direction. Thus, local thermal deformation is reliably eliminated. This advantage brings about a practical effect of guaranteeing precise feed accuracy and high machining accuracy when the movable body 12 is applied as a spindle head or a work table of a machine tool.
[0045]
The energization of the coil unit 30 acts to cause the magnet plate unit 60 to generate heat. The cooling fluid is also circulated through the flow path 73 of the spacer 71, and this cooling fluid absorbs heat from the magnet plate unit 60 and prevents thermal deformation of the first member 11. In particular, since the gap G is provided between the lower surface of the holding plate 61 and the first member 11, heat conduction from the holding plate 61 to the first member 11 is eliminated, and the air cooling effect of the holding plate 61 is also ensured. Is done.
[0046]
FIG. 8 shows various cooling fluid flow path patterns configured by arbitrarily combining the orientations of the blocks 35 described above. FIG. 8A shows a pattern when the blocks 35 are alternately arranged in the opposite direction as shown in FIG.
In FIG. 8B, the U-shaped flow paths 36 of all the blocks 35 are connected to the series by a joint 50 to form the forward flow path FDP, and the straight flow paths 37 of all the blocks 35 are series connected by the joint 50. This is a pattern in the case where the retrograde flow path RTP is configured by being connected to, and is applied when the movable body 12 has non-thermal symmetry characteristics in a direction crossing the driving direction.
[0047]
FIG. 8C shows a pattern in which the cooling effect of the central portion is enhanced as compared with both ends so that the central portion in the driving direction is first cooled by the cooling fluid, and FIG. 8D shows the latter half portion in the driving direction. The pattern is shown in the case where the cooling is performed first to give a difference in cooling effect between the first half and the rear half. The arrangement of the blocks 35 constituting these flow path patterns is such that the central portion of the movable body 12 has a poor heat dissipation effect as compared to the both ends, or the movable body 12 has a heat dissipation effect between the first half and the second half in the driving direction. It is applied when it has asymmetric characteristics.
[0048]
One of the features of the present invention is that the flow path patterns of various cooling fluids can be easily configured by loosening the presser piece 48 and arbitrarily changing the direction of the block 35.
The present invention can be implemented under various modifications described in the description of the above-described embodiment, but other than this, the scope of the present invention described in the claims in the scope of the claims is not deviated. The following changes are possible.
[0049]
(1) The cooling fluid flow path that complements the forward flow path FDP and the backward flow path RTP shown in FIG. 5 is formed on the mating surface of the cuboid without using the blocks 35, 41, and 45. You may make it form.
(2) Although the embodiment shows an example applied to a linear motor, the cooling device according to the present invention can also be applied to various devices including an electromagnetic coil that generates heat when energized, for example, a cooling device for an electromagnetic magnet chuck device.
[0050]
(3) Each of the blocks 35 is exemplified as a rectangular parallelepiped shape having different vertical and horizontal lengths. Moreover, these shapes do not need to be the shape in the strict meaning defined on geometry, and may be a shape according to them.
(4) The guide mechanism 20 can use various guide mechanisms such as a sliding mechanism, a hydrostatic bearing mechanism, and a semi-levitation mechanism.
[0051]
(5) As the coil unit 30 of the linear motor LM, a unit other than the one exemplified in the embodiment can be applied. In this case, if the coil unit 30 has one flat surface, the cooling device according to the present invention can be attached to the flat surface to implement the present invention.
[Brief description of the drawings]
FIG. 1 is a partial sectional view of an embodiment in which the present invention is applied to a linear motor of a feed mechanism.
FIG. 2 is a cross-sectional side view taken along the line AA in FIG.
FIG. 3 is a top view of a block constituting a part of the cooling device.
FIG. 4 is a side view of the block.
FIG. 5 is a top view showing a part of the cooling device in a cutaway state.
FIG. 6 is a plan view of a joint constituting a part of the cooling device.
FIG. 7 is a plan view of a spacer constituting a cooling device for a magnet plate unit of a linear motor.
FIGS. 8A to 8D are charts for explaining various flow path patterns of the cooling fluid formed by combining the blocks.
FIG. 9 is a diagram showing a conventional linear motor cooling device.
FIG. 10 is a view showing another conventional linear motor cooling device.
FIG. 11 is a view showing still another conventional linear motor cooling device.
[Explanation of symbols]
10 ... Feed mechanism
11: Fixed base (first member)
12 ... Movable body (second member)
20 ... Guide mechanism
LM ... Linear motor
30 ... Coil unit
33 ... Electromagnetic coil
31 ... Core plate
32 ... Laminated body
35 ... Block
36 ... U-shaped channel
37 ... Straight channel
50 ... Joint
34 ... Connecting member
48 ... Presser piece (fixing member)
60 ... Magnetic plate unit
61 ... Holding plate
62 ... Magnetic bar
71 ... Magnet cooling device
71 ... Spacer
73 ... Cooling channel
G ... space

Claims (6)

It includes a flow path forming means that is mounted on a substantially rectangular mounting surface formed on a core member around which an electromagnetic coil is wound and circulates a cooling fluid between one short side and the other short side of the mounting surface. In the cooling device, the flow path forming means includes a plurality of block elements mounted on the mounting surface at a predetermined interval in the longitudinal direction of the mounting surface, and each of the block elements has the longitudinal direction. A U-shaped channel that extends in a transverse direction and opens a pair of ports on both sides facing the longitudinal direction, and is formed to extend in the longitudinal direction in the vicinity of the folded portion of the U-shaped channel. A straight flow path that opens another pair of ports, and the flow path forming means further includes a plurality of joint elements that connect the ports that open to the opposing surfaces of the adjacent block elements. , Each block required Can be connected to the port of each block element by the joint element even when the folded portion of the U-shaped flow path is arranged so as to face any long side of the mounting surface. An electromagnetic coil cooling device characterized by the above. A magnet plate unit and an electromagnetic coil unit, which are respectively mounted on opposing surfaces of the first member and the second member that move relative to each other in the driving direction, are provided, and a cooling device is attached to the mounting surface of the electromagnetic coil unit to cool the electromagnetic coil unit In the linear motor, the cooling device includes flow path forming means for flowing a cooling fluid between one side and the other side in the driving direction, and the flow path forming means has a predetermined interval in the driving direction. A plurality of block elements mounted on the mounting surface, each of the block elements extending in a transverse direction across the drive direction and having a pair of ports open on both sides facing the drive direction. A U-shaped channel, and a straight channel that extends in the driving direction in the vicinity of the folded portion of the U-shaped channel and opens another pair of ports on both surfaces. In addition, the flow path forming means further includes a plurality of joint elements that connect the ports that open to the opposing faces of the adjacent block elements, and each block element has a folded portion of the U-shaped flow path. A linear motor characterized in that the port of each block element can be connected to the port of an adjacent block element by the joint element even when arranged so as to face either side in the transverse direction. 3. The linear motor according to claim 2 , wherein the pair of ports and the other pair of ports are formed symmetrically in each of the block elements, and the plurality of adjacent block elements are arranged in the U-shaped flow path. The linear motor is characterized in that the directions of the motors are alternately reversed. 4. The linear motor according to claim 2 , wherein the electromagnetic coil unit includes a stacked body in which a plurality of core plates extending in the driving direction are stacked in the transverse direction, and the crossing at a predetermined interval in the driving direction. A plurality of connecting members, each of which is formed of a plurality of electromagnetic coils wound in a direction, extending in the transverse direction and integrally connecting the plurality of core plates with a predetermined interval in the driving direction; Each of the motors is arranged between two adjacent connecting members. 5. The linear motor according to claim 4 , further comprising a plurality of fixing members that are removably fixed on the laminated body and that are attached to the connecting members and arranged on both sides of each connecting member. A linear motor characterized in that a member can be fixed to the second member. 6. The linear motor according to claim 2 , wherein the magnet plate unit is fixed to the first member via a pair of spacers extending in the driving direction at both ends in the transverse direction, in the driving direction. A linear motor characterized in that a flow path through which a cooling fluid passes is formed in the spacer.

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