126039§9_〇c/m 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種檢測設備，且特別是有關於一積 共平面度(coplanarity)檢測設備。 【先前技術】 P边者科技的進步與發達’各式各樣的電子產品3C黎 合系統及設備雖然帶給人類生活無限的方便，卻也造成^ 雜的電磁波錯訊環境，就是所謂的電磁波千提 (Electro-Magnetic Interference，EMI)，亦稱為電子噪音。 電磁波是電波與磁波的總稱。簡單地來說，就是在電 線中流動的電流，於電線的周圍會產生相同周波數的礙 場，因此在電線的周圍同時具有電場、磁場兩方的波動， 即所謂的電磁波。而在許多的醫學文獻中指出，不論電礙 波的來源是來自電器設備、高壓電線或家電用品，只要環 土兄中具有笔磁波，就容易對人體造成傷害。因此，針對電 磁波的問通’其改善方法是在這些電子產品中用貼附、卡 扣等方式裝設具有防護電磁波功能的電磁波防護殼體 (shielding case)。 圖1緣示為習知之電磁波防護殼體裝設於電路板上的 剖面示意圖。請參考圖1，習知電磁波防護殼體π〇是藉 由導電膠而黏著於電路板100上，並覆蓋電子元件120。 當電子兀件120運作時，所產生的電磁波可藉由電磁波防 護殼體110、導電膠與電路板10〇而進行宣洩。然而，當 黾磁波防遵设體110如圖1所示般存在翹曲現象問題，電 6 966twf.doc/m 126039总 磁波防護殼體110便無法完全貼合地組裝於電路板1⑻ 上。如此一來，電子元件120運作時所產生的電磁波就會 從空隙A處洩漏，不僅會造成訊號干擾，更會對人體造成 傷吾。因此，在將電磁波防護殼體11〇裝設於電路板 上前、，便需對電磁波防護殼體U㈣邊緣進行共平面度檢 測’以確保電磁波防護殼豸110能與電路才反1〇〇平整地貼 合。 、 η傳統多以人工方式來檢測電磁波防護殼體ιι〇的邊緣 疋否平正丨疋直接以目視方法來檢測電磁波防護殼體 110是否翹曲。⑼，使用人工方式對電磁波防護殼體11〇 做檢測，不但需要大量的檢測人員花費大量的 且 檢測精度又差。 另外，除了上述電磁波防護殼體110之外，還有許多 各類的產品都需要進行共平面度㈣。因此，如何提丘 平面度制之速度與精度，已絲極重要_題。，、 【發明内容】 有鑑於此，本發日⑽目的就是在提供—種解面度檢 測設備，用以提高共平面度之檢測速度i精产。 為達上述或其他目的，本發明提出-種i平面度檢測 設備’其適於檢測多個待測物之多個待測點的业平面产， 此共平面度檢喊備包衫個檢顚組、多键運裝ί以 及-伺服控制為。其中，每—檢測模組包括—平台、 測棒以及-馬達。平台是用以置放待測物以供檢測，且平 台具有貫孔嘯測棒配置於平台的下方，且探測棒適於藉 i26039§96— 2:孔:檢測待測點。馬達用以驅動探測棒。此外，搬運 台做檢測。另外:c::;用：移動待測物至平 制哭用以㈣I、重壯i 達電性連接’且伺服控 餘運1置以將待測物 控制馬達驅動探測棒由平台的貫孔往上移動二;= 點之共平面度。 付礼，‘，占之冋度貧訊，以判定待測 備，ΐ佳實施例所述之共平面度檢測設 σ ο 5•供電益，其兩極分別電性娱又 及平台’其中待測物在接 1接至k測棒以 迴路，而伺服控制哭θ ϋ 、午人“ 口日'^共同建立導電 户資1 : 導電迴路建立時擷取待測點之古 備 備 傷 器 ，檢測模例料之共平面度_ 依照本發明的較佳實施例所述之i 於 ，上述之搬運裝置例如是機械手臂。 核剩設 依照本發明的較佳實施鮮於 更包括一量測褒置，且測量裝置例如是! 度高化檢測，精 為，本發明之上述和其他目的^優更 “知例’亚配合所附圖式，作詳細說 8 I26039^,OC/1 明如下Q 【實施方式】 立一，2繪示為本發明一實施例之共平面度檢測設備的局 邛不思、圖。請芩考圖2，共平面度檢測設備200用以檢測 ，測物300上的多個待測點的共平面度。待測物3〇〇例如 • 疋用於黾子類產品的電磁波防護殼體，或是其他各種需要 進仃共平面度檢測的物品。共平面度檢測設備2〇〇包括檢 • ，模組210、搬運裝置220以及伺服控制器250。其中，每 個檢測模組210包括一個探測棒23〇、一個馬達2和以 及:個平台270。平台270用以置放待測物300以供檢測， 且平台270具有貫孔272。探測棒230配置於平台270的 下方’且彳木測棒230適於在貫孔272中作動以檢測待測點。 此外探測棒230疋藉由馬達240驅動，且馬達24〇與伺 服控制器25〇電性連接。另外，搬運裝置22〇配設於檢測 模組210旁，其例如是機械手臂，且搬運裝置220用以移 動待測物300依序至各個平台2?〇中做檢測。因此，飼服 器250可以控制搬運裝置22〇將待測物跡依序移至 平口 270内，並且同時控制馬達24〇驅動探測棒Μ。從貫 ， 孔272中往上移動，使探測棒230的頂面接觸待測物纖 上預定的待測點。然後，舰控制器25Q會在探測棒⑽ 接觸到各個待測點時獲得各個待測點的高度資訊，並利用 這些高度資訊以判定待測點是否處於共平面，來檢測這些 待測點之共平面度。 一 更详細地來說，共平面度的檢測過程是先調整探測棒 1260399 16966twf.doc/m 230的高度及平台27〇的位置，以使平台27㈣位置固定 ^采測棒230的頂面位於一基準高度平面上。因此，待測 ^〇〇置於平台270時，探測棒230能夠對應於待測物300 測點。射，調整探測棒23〇的高度以使探測棒 230 勺頂面位於基準n度平面的步驟，我們稱之為歸零。然後， 由伺服控制器250控制搬運裝置22〇，使搬運 依 序移動待測物300，使待測物3〇〇置於平台27^上。 承上述’當待測物置於平台27&，伺服控制器 250驅動馬達240，此時開始檢測待測物谢。馬達·上 例如配置有齒輪242以及與齒輪242嗜合的齒條施。馬 達240會受到伺服控制器25〇的驅動而運作，並且帶動齒 輪242轉動，使齒條244往上移動以驅動探測棒於貫 孔272中向上移動，直到探測棒23〇的頂面與待測物 的待測點相麵。在本實補巾，是以馬達與配置於 馬達240上的齒輪242驅動探測棒23〇作動。而在其他實 知例中’亦可以其他形式之升降機構來驅動探測棒顶向 上移動。 請繼縯苓考圖2，當伺服控制器250控制馬達24〇以 驅動探測棒230向上移動時，伺服控制器25〇例如是藉由 一整合於伺服控制器250内部的量測裝置252來得到探測 棒230的移動高度，而此量測裝置252例如是光學尺或感 測裔。因此，當探測棒230的頂面與待測物3〇〇的待測點 相接觸時，伺服控制器250可以獲得待測物300之待測點 的高度資訊。當伺服控制器25〇獲得待測物3〇〇之待測點 66twf.d〇c/m 1260399 169( 的回度貧訊後，伺服控制器25〇驅動馬達24〇使探測棒23〇 ^下移動。之後，搬運裝置22〇將待測物3〇〇依序移至下 f平台270 ’以檢測待測物3〇〇的另一個待測點。然後， 重硬上述之步驟，以使共平面度檢測設備2⑻待測物3〇〇 之所有待測點檢測完畢。 直到待測物300的所有待測點被檢測完畢之後，伺服 、，制器25G會將這些待測點的高度資訊加以彙整，並判定 測點是否處於同_平面上。然後，操作者便可以經 "疋結絲檢視制物3⑻衫有祕不平整或是起曲 的現象。 M 值彳于Z主忍的疋’檢測模組2 1 〇的位置是依據待測物300 ^开^輪廓以及待測點的位置來對應調整。因此，不論 二2二上的待測點如何分佈，都可用共平面度檢測設 備200來檢測其共平面度。 在-較佳實施例中’若待測物、探測棒謂盥平 i測！"都具有導電性，則可利用下面方式進行共平面度的 一供=;二2所示，共平面度檢測設備2〇〇旁需配設 及二^7㈣田1^共電器260的兩極分別與探測棒230以 及/口 270利用電後而带从、v 服栌制哭250 ：連接，且供電器260例如與伺 子工制口口 250兒性相連，戋者帝 制器250中。此外，擬、跑电為260疋整合於伺服控 探測捧2川的矣^ 棒的材質例如是金屬。或者， 全屬二材料^、Γ有—具有良好導電性的金屬層，而此 屬層的材料叹金。在本實施例中，為了讓圖示簡潔 ^66twf.doc/m 12603 二疋利用因ί【二:f簡單繪示供電器260與-組檢測模組 扪用兒線電性連接的示意圖。 棒測物2〇0置於平台謂上之後，於探測 勺頁面接觸至待測物300的待測點日寺，探測棒23〇、 避i，w制物以及供電11 的兩極形成一導電 之探、麻^服控制器250就可依據量測裝置252所檢測 二十〇當時的位置而獲得待測點的高度資訊。然 司服挂制裔250驅動馬達24〇以使探測棒230向下移 動，使探測棒230與待測物300不互相接觸。之後，飼服 空制器250將所獲得的高度資訊彙整分析之後，判定這些 =測^否具有共平面度，㈣操作者進㈣判此待測物 30〇是否有不平整或翹曲的現象。 &综上所述，本發明之共平面度檢測設備是利用自動化 栈械设備取代習知以人工方式來檢視待測物之共平面度。 因此，使用本發明之共平面度檢測設備不但可以節省人力 並加快檢測速度，還可以提高待測物之共平面度的檢測精 度，以獲得較為精確的待測物龜曲高度。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1繪示為習知之電磁波防護殼體裝設於電子產品中 的剖面示意圖。。 12 I2603U- f.doc/m 圖2繪示為本發明一實施例之共平面度檢測設備的局 部示意圖。 【主要元件符號說明】 100 :電路板 110:電磁波防護殼體 120 :電子元件 A :空隙 200 :共平面度檢測設備 210 :檢測模組 220 :機械手臂 230 :探測棒 240 :馬達 242 :齒輪 244 :齒條 250 :伺服控制器 252 :量測裝置 260 :供電器 270 :平台 272 :貫孔 300 :待測物 13126039 §9_〇c/m IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a detecting apparatus, and more particularly to a coplanarity detecting apparatus. [Prior Art] The progress of P-edge technology and the development of various electronic products 3C Lihe system and equipment, while bringing unlimited convenience to human life, it also causes a miscellaneous electromagnetic wave error environment, which is called electromagnetic wave. Electro-Magnetic Interference (EMI), also known as electronic noise. Electromagnetic waves are a general term for electric waves and magnetic waves. Simply speaking, the current flowing in the electric wire generates an obstacle to the same number of cycles around the electric wire. Therefore, there are both electric and magnetic fluctuations around the electric wire, so-called electromagnetic waves. In many medical literatures, it is pointed out that no matter whether the source of the electric wave is from electrical equipment, high-voltage electric wires or household appliances, as long as there is a magnetic wave in the earth brother, it is easy to cause harm to the human body. Therefore, the improvement method for the electromagnetic wave is to provide an electromagnetic wave shielding case having a function of protecting electromagnetic waves by attaching, snapping, or the like in these electronic products. Fig. 1 is a schematic cross-sectional view showing a conventional electromagnetic wave shielding case mounted on a circuit board. Referring to FIG. 1, the conventional electromagnetic wave shielding case π is adhered to the circuit board 100 by a conductive adhesive and covers the electronic component 120. When the electronic component 120 operates, the generated electromagnetic waves can be vented by the electromagnetic wave protection housing 110, the conductive paste, and the circuit board 10. However, when the 黾 magnetic wave anti-compliant body 110 has a warpage phenomenon as shown in Fig. 1, the electric magnetic shield housing 110 cannot be completely fitted to the circuit board 1 (8). As a result, the electromagnetic wave generated when the electronic component 120 operates will leak from the gap A, which not only causes signal interference, but also causes injury to the human body. Therefore, before the electromagnetic wave shielding housing 11 is mounted on the circuit board, it is necessary to perform the coplanarity detection on the edge of the electromagnetic wave shielding housing U (4) to ensure that the electromagnetic wave shielding housing 110 can be leveled with the circuit. Fit together. ηTraditionally, the edge of the electromagnetic wave protection casing ιι〇 is detected manually. 疋No Pingzheng directly detects whether the electromagnetic wave protection casing 110 is warped by visual means. (9) The use of the manual method for detecting the electromagnetic wave shielding case 11〇 requires not only a large number of inspectors to spend a large amount but also a poor detection accuracy. In addition, in addition to the electromagnetic wave shield housing 110 described above, there are many types of products that require coplanarity (4). Therefore, how to improve the speed and accuracy of the flatness system has become extremely important. In view of the above, the purpose of this (10) is to provide a kind of surface detection device for improving the detection speed of the coplanarity. In order to achieve the above or other objects, the present invention proposes an i-flatness detecting device that is suitable for detecting a plurality of flat products of a plurality of to-be-measured objects to be tested, and the coplanarity detecting and shuffling is checked. Group, multi-key transport ί and - servo control are. Among them, each detection module includes a platform, a measuring rod and a motor. The platform is for placing the object to be tested for detection, and the platform has a through-hole sniffer rod disposed below the platform, and the detecting rod is adapted to borrow the i26039 § 96-2: hole: detecting the point to be tested. The motor is used to drive the probe. In addition, the pallet is tested. In addition: c::; use: move the object to be tested to the flat system to cry (4) I, reinvigorate i to reach the electrical connection 'and the servo control surplus 1 to set the object to be tested to drive the probe to the rod through the platform Move up two; = the coplanarity of the point. Paying, ', occupies the poor news, to determine the test preparation, the good flatness test described in the best example σ ο 5• power supply benefits, the two poles respectively electrical entertainment and platform 'where to be tested The object is connected to the k-measuring rod to take the loop, and the servo control is crying θ ϋ, and the noon "mouth day" ^ jointly establishes the conductive household goods 1: when the conductive loop is established, the ancient preparation for the measuring point is taken, the detecting mode Coplanarity of a sample _ according to a preferred embodiment of the present invention, wherein the above-described handling device is, for example, a robotic arm. The nuclear remaining device according to the preferred embodiment of the present invention further includes a measuring device, and The measuring device is, for example, a high-intensity detection, and the above-mentioned and other objects of the present invention are excellent, and the "examples" are sub-matched with the drawings. For details, 8 I26039^, OC/1 is as follows.立立, 2 shows the inconsistency and diagram of the coplanarity detecting device according to an embodiment of the present invention. Referring to FIG. 2, the coplanarity detecting device 200 is configured to detect the coplanarity of a plurality of points to be measured on the object 300. The object to be tested is, for example, • an electromagnetic wave shielding case for a tweezers-like product, or other items that require coplanarity detection. The coplanarity detecting device 2 includes a test module 210, a transport device 220, and a servo controller 250. Each of the detection modules 210 includes a probe bar 23, a motor 2, and a platform 270. The platform 270 is used to place the object to be tested 300 for detection, and the platform 270 has a through hole 272. The probe bar 230 is disposed below the platform 270 and the rafter bar 230 is adapted to act in the through hole 272 to detect the point to be measured. Further, the probe bar 230 is driven by the motor 240, and the motor 24 is electrically connected to the servo controller 25. In addition, the carrying device 22 is disposed beside the detecting module 210, which is, for example, a robot arm, and the carrying device 220 is used to move the object to be tested 300 to the respective platforms 2 to perform detection. Therefore, the feeding device 250 can control the carrying device 22 to sequentially move the object to be tested into the flat opening 270, and at the same time control the motor 24 to drive the detecting rod. Moving upward from the hole 272, the top surface of the detecting rod 230 is brought into contact with a predetermined point to be measured on the fiber to be tested. Then, the ship controller 25Q obtains the height information of each point to be measured when the detecting rod (10) contacts each point to be measured, and uses the height information to determine whether the points to be measured are in a common plane, and detects the total of the points to be measured. Flatness. In more detail, the coplanarity detection process first adjusts the height of the probe 1260399 16966twf.doc/m 230 and the position of the platform 27〇 so that the platform 27 (four) is fixed and the top surface of the measuring rod 230 is located. A reference height plane. Therefore, when the test to be tested is placed on the platform 270, the probe bar 230 can correspond to the measurement point of the object to be tested 300. The step of adjusting the height of the probe bar 23 so that the top surface of the probe bar 230 is located on the reference n-degree plane is called zero return. Then, the carrier device 250 is controlled by the servo controller 250 to move the object to be tested 300 in order, so that the object to be tested 3 is placed on the platform 27^. According to the above, when the object to be tested is placed on the platform 27 & the servo controller 250 drives the motor 240, and at this time, the detection of the object to be tested is started. For example, a gear 242 and a rack that is in contact with the gear 242 are disposed on the motor. The motor 240 is driven by the servo controller 25A, and drives the gear 242 to rotate, so that the rack 244 moves upward to drive the detecting rod to move upward in the through hole 272 until the top surface of the detecting rod 23 is to be tested. The point to be measured of the object is opposite. In the present embodiment, the detecting rod 23 is driven by a motor and a gear 242 disposed on the motor 240. In other embodiments, other types of lifting mechanisms can be used to drive the probe bar to move up. Referring to FIG. 2, when the servo controller 250 controls the motor 24 to drive the probe bar 230 to move upward, the servo controller 25 is obtained, for example, by a measuring device 252 integrated in the servo controller 250. The moving height of the wand 230 is measured, and the measuring device 252 is, for example, an optical ruler or a sensing person. Therefore, when the top surface of the detecting rod 230 is in contact with the point to be tested of the object to be tested 3, the servo controller 250 can obtain the height information of the point to be tested of the object to be tested 300. When the servo controller 25 obtains the to-be-measured point 66 twf.d〇c/m 1260399 169 of the object to be tested, the servo controller 25 drives the motor 24 to make the detecting rod 23 〇 ^ After that, the handling device 22 〇〇 sequentially moves the object to be tested 3 to the lower f platform 270 ′ to detect another point to be tested 3 〇〇. Then, the above steps are hardened to make the total The flatness detecting device 2 (8) all the points to be tested of the object to be tested 3 are detected. Until all the points to be tested of the object to be tested 300 are detected, the servo, the controller 25G will add the height information of the points to be measured. Consolidate, and determine whether the measuring point is in the same _ plane. Then, the operator can check the phenomenon of the sturdy or sturdy phenomenon of the 3 (8) shirt through the 疋 疋 。 。 。 。 。 。 。 。 M M M M M M M M M M M M M M M M 'The position of the detection module 2 1 〇 is adjusted according to the position of the object to be tested 300 ^ and the position of the point to be measured. Therefore, regardless of how the points to be measured on the 2nd and 2nd are distributed, the coplanarity detection device can be used. 200 to detect its coplanarity. In the preferred embodiment, 'if the object to be tested, the probe is盥平伊测!"All have conductivity, you can use the following way to provide a coplanarity of the supply =; 2, 2, the coplanarity detection equipment 2 need to be equipped with two ^ 7 (four) Tian 1 ^ The two poles of the common electric device 260 are electrically connected to the detecting rod 230 and/or the port 270, respectively, and are connected to the v, 250, and the power supply 260 is connected to the servo port 250, for example. In addition, the material of the 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋The material of this genus layer is sighed. In this embodiment, in order to make the illustration simple, ^66twf.doc/m 12603 疋 疋 ί [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ Schematic diagram of the electric connection of the child line. After the rod test object 2〇0 is placed on the platform, the probe is in contact with the point to be tested of the object to be tested 300, the detection rod 23〇, the avoidance i, the w item and The two poles of the power supply 11 form a conductive probe, and the controller 250 can be detected according to the measuring device 252. The height information of the point to be measured is obtained, but the motor 250 motor is driven 24 to move the detecting rod 230 downward, so that the detecting rod 230 and the object to be tested 300 do not contact each other. After the height information obtained by the 250 is analyzed, it is determined whether the = test has a coplanarity, and (4) the operator enters (4) whether the object to be tested has an unevenness or warpage. The coplanarity detecting device of the present invention uses an automated palletizing device instead of the conventional method to manually check the coplanarity of the object to be tested. Therefore, the use of the coplanarity detecting device of the present invention can save manpower and speed up detection. The speed can also improve the detection accuracy of the coplanarity of the object to be tested to obtain a more accurate tort height of the object to be tested. While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a conventional electromagnetic wave shielding case mounted in an electronic product. . 12 I2603U-f.doc/m FIG. 2 is a partial schematic diagram of a coplanarity detecting apparatus according to an embodiment of the present invention. [Main component symbol description] 100: Circuit board 110: Electromagnetic wave protection housing 120: Electronic component A: Air gap 200: Coplanarity detecting device 210: Detection module 220: Robot arm 230: Detection bar 240: Motor 242: Gear 244 : Rack 250 : Servo controller 252 : Measuring device 260 : Power supply 270 : Platform 272 : Through hole 300 : Test object 13