CN205301431U - Little resistance measurement equipment - Google Patents

Little resistance measurement equipment Download PDF

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Publication number
CN205301431U
CN205301431U CN201520950421.0U CN201520950421U CN205301431U CN 205301431 U CN205301431 U CN 205301431U CN 201520950421 U CN201520950421 U CN 201520950421U CN 205301431 U CN205301431 U CN 205301431U
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CN
China
Prior art keywords
axis
axis slide
motherboard
resistivity
measuring devices
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Withdrawn - After Issue
Application number
CN201520950421.0U
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Chinese (zh)
Inventor
赵千里
王少波
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EVA Precision Industrial Holdings Ltd
EVA Precision Industrial Suzhou Co Ltd
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EVA Precision Industrial Holdings Ltd
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Priority to CN201520950421.0U priority Critical patent/CN205301431U/en
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Publication of CN205301431U publication Critical patent/CN205301431U/en
Withdrawn - After Issue legal-status Critical Current
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Abstract

The utility model discloses a little resistance measurement equipment, this resistance measurement equipment includes: slide bracket, controlling means and setting up can follow little resistance test meter of the three direction of XYZ axle motion on slide bracket, be equipped with a set ofly or the multiunit probe on little resistance test meter. The utility model relates to a little resistance measurement equipment and methods of measurement can effectively accurately carry out the measurement of resistance value fast to the product, tell qualified and unqualified product, reduce workman's operation complexity, improve its detection efficiency.

Description

A kind of microresistivity survey equipment
Technical field
This utility model relates to a kind of resistivity-measuring devices, is specifically related to a kind of microresistivity survey equipment for Minitype resistance is measured.
Background technology
At electronics field, for the yield of the product that ensures to dispatch from the factory, after production completes, in addition it is also necessary to the resistance value of product is measured. Simple metal resistance value accurate measurement is generally adopted traditional tetrad circuit units measurement, but in the process measured, inaccuracy is chosen in the position measuring point by traditional measurement device, and the pressure of probe is difficult to control to, and the resistance value measured may be produced impact by it. Resistance value owing to measuring product is very small, only several milliohms or a few milliohm of zero point, and in order to improve its measuring accuracy, therefore a kind of microresistivity survey equipment urgently proposes.
Utility model content
In order to solve above-mentioned technical problem, the utility model proposes a kind of microresistivity survey equipment, this sets the measurement that product can quickly effectively carry out resistance value, tells qualified and underproof product, reduces the operation complexity of workman, improve its detection efficiency.
In order to achieve the above object, the technical solution of the utility model is as follows:
A kind of resistivity-measuring devices, resistivity-measuring devices includes: sliding platform, controls device and is arranged on sliding platform the micro-resistance test meter that can move along three directions of XYZ axle, and micro-resistance test meter is provided with one or more groups probe.
This utility model a kind of microresistivity survey equipment adopts the micro-resistance test meter on sliding platform that product is measured. Control the device micro-resistance test meter of control to move along XY axle, it is possible to choose the measurement point measurement on product accurately and effectively, reduce the operation complexity of staff simultaneously. And control the device micro-resistance test meter of control and move along Z axis, can effectively control the pressure of the probe on micro-resistance test meter and product measurement point, prevent both loose contacts or probe from causing damage to product pressure is excessive, it is ensured that probe is more accurate to the measurement of product.
On the basis of technique scheme, also can do following improvement:
As preferred scheme, being provided with Y-axis horizontal assembly on sliding platform, including Y-axis slide block, Y-axis slide rail and Y-axis driving device, Y-axis driving device drives Y-axis slide block to move along Y-axis slide rail; X-axis horizontal assembly, is arranged on Y-axis slide block, and including X-axis slide block, X-axis slide rail and X-axis driving device, X-axis driving device drives X-axis slide block to move along X-axis slide rail;Z axis vertical component, is arranged on X-axis slide block, and including Z axis slide block, Z axis slide rail and Z axis driving device, micro-resistance test meter is arranged on Z axis slide block, and Z axis driving device drives Z axis slide block to move along Z axis slide rail.
Adopting above-mentioned preferred scheme, simple in construction, cost is low.
As preferred scheme, resistivity-measuring devices also includes: be arranged at the carrier for carrying or transport product on sliding platform.
Adopt above-mentioned preferred scheme, it is simple to product is carried or transports.
As preferred scheme, resistivity-measuring devices also includes temperature sensor, and temperature sensor electrically connects with controlling device.
Adopt above-mentioned preferred scheme, ambient temperature measurement when product is measured by temperature sensor by micro-resistance test meter, the resistance value of the product of micro-resistance test measurement amount is carried out temperature-compensating, eliminates the ambient temperature impact on product resistance so that it is detect more accurate.
As preferred scheme, resistivity-measuring devices also includes zeroing motherboard.
Adopting above-mentioned preferred scheme, the surface of zeroing motherboard is coated with noble metal, as: gold, silver. Traditional tetrad circuit units, it is necessary to staff by often organize probe carry out contact short circuit realize, complicated operation, a staff is difficult to. And the application adopts resistance infinitesimal zeroing motherboard that micro-resistance test meter is returned to zero, it is more convenient to operate.
As preferred scheme, zeroing motherboard is horizontally placed in Z axis slide rail internal cavities, and zeroing motherboard is connected with motherboard driving device, and motherboard driving device drives zeroing motherboard motion.
Adopt above-mentioned preferred scheme, reduce the operation complexity of staff.
As preferred scheme, zeroing motherboard includes front and back, and front is metal detection face, and the back side is provided with draw-in groove, is hinged with the spike for supporting zeroing template in draw-in groove.
Adopting above-mentioned preferred scheme, a spike is exchanged zero template and is carried out good support, it is ensured that its zeroing is more effective.
Accompanying drawing explanation
The structural representation of the microresistivity survey equipment that Fig. 1 provides for this utility model embodiment.
The front view of the Z axis vertical component that Fig. 2 provides for this utility model embodiment, micro-resistance test meter and zeroing motherboard.
The product structure schematic diagram that Fig. 3 provides for this utility model embodiment.
The product top view that Fig. 4 provides for this utility model embodiment.
One of side view of microresistivity survey equipment that Fig. 5 provides for this utility model embodiment.
The two of the side view of the microresistivity survey equipment that Fig. 6 provides for this utility model embodiment.
The three of the side view of the microresistivity survey equipment that Fig. 7 provides for this utility model embodiment.
The structural representation at the zeroing motherboard back side that Fig. 8 provides for this utility model embodiment.
Wherein: 1 sliding platform, 11Y axle horizontal assembly, 111Y axle slide block, 112Y axle slide rail, 12X axle horizontal assembly, 121X axle slide block, 122X axle slide rail, 13Z axle vertical component, 131Z axle slide block, 132Z axle slide rail, 133Z axial brake device, 2 micro-resistance test meters, 21 probes, 3 carriers, 4 zeroing motherboard, 41 draw-in grooves, 42 spikes.
Detailed description of the invention
Preferred implementation of the present utility model is described in detail below in conjunction with accompanying drawing.
In order to reach the purpose of this utility model, in the some of them embodiment of a kind of resistivity-measuring devices,
As illustrated in fig. 1 and 2, a kind of resistivity-measuring devices, resistivity-measuring devices includes: sliding platform 1, control device, be arranged on sliding platform 1 can move along three directions of XYZ axle micro-resistance test meter 2, for carrying or transport the carrier 3 of product, temperature sensor 4 and zeroing motherboard 5;Micro-resistance test meter 2 is provided with one group of four probe 21; Carrier 3 is arranged on sliding platform 1; Temperature sensor (not shown) electrically connects with controlling device; Zeroing motherboard 4 is for returning to zero to micro-resistance test meter 2.
Sliding platform 1 is provided with Y-axis horizontal assembly 11, X-axis horizontal assembly 12 and Z axis vertical component 13. Y-axis horizontal assembly 11 includes Y-axis slide block 111, Y-axis slide rail 112 and Y-axis driving device (not shown), and Y-axis driving device drives Y-axis slide block 111 to move along Y-axis slide rail 112. X-axis horizontal assembly 12 is arranged on Y-axis slide block 111, and including X-axis slide block 121, X-axis slide rail 122 and X-axis driving device (not shown), X-axis driving device drives X-axis slide block 121 to move along X-axis slide rail 122. Z axis vertical component 13 is arranged on X-axis slide block 121, and including Z axis slide block 131, Z axis slide rail 132 and Z axis driving device 133, micro-resistance test meter 2 is arranged on Z axis slide block 131, and Z axis driving device 133 drives Z axis slide block 131 to move along Z axis slide rail 132.
As shown in Figures 3 and 4, for the product to be detected of a kind of resistivity-measuring devices of this utility model.
A kind of microresistivity survey method, utilizes microresistivity survey equipment to measure, and microresistivity survey method specifically includes following steps:
1) zeroing motherboard 4 is utilized to be returned to zero by four probes 21;
2) product is arranged on carrier 3;
3) control the device micro-resistance test meter 2 of control to move along X-axis and Y-axis both direction, arrive the top of product;
4) control device to control micro-resistance test meter and move downward along Z axis, the probe of micro-resistance test meter 21 and the measurement point cantact of product, obtain the first resistance value of product;
5) the residing temperature of product is detected by temperature sensor, and the temperature signal that detection obtains is transmitted to control device;
6) control device temperature signal is analyzed, and the first resistance value is carried out reasonable compensation, obtain the second resistance value;
7) control device the second resistance value is analyzed, it is judged that whether this product quality is qualified;
8) step 3 is repeated)-step 7), choose the different measuring point measurement on product.
A kind of microresistivity survey equipment of this utility model its can effectively realize the measurement to product resistance value, simple operation, measure accurately, it can take average by repetitive measurement, is not likely to produce erroneous judgement.
This utility model one microresistivity survey equipment has the advantages that
First, control the device micro-resistance test meter 2 of control and move along X, Y-axis, it is possible to choose the measurement point measurement on product accurately and effectively, reduce the operation complexity of staff simultaneously.
Second, control the device micro-resistance test meter 2 of control to move along Z axis, can effectively control the pressure of the probe 21 on micro-resistance test meter 2 and product measurement point, prevent both loose contacts or probe from causing damage to product pressure is excessive, ensure that probe 21 is more accurate to the measurement of product, especially for the product of some surface irregularities, the control of pressure is even more important.
3rd, ambient temperature measurement when product is measured by temperature sensor by micro-resistance test meter 2, control device and the resistance value of the product that micro-resistance test meter 2 is measured is carried out temperature-compensating, eliminate the ambient temperature impact on product resistance so that it is detect more accurate.
4th, by returning to zero, motherboard 4 returns to zero, and the surface of zeroing motherboard 4 is coated with noble metal, as: gold, silver. Traditional tetrad circuit units, it is necessary to four probes 21 are carried out contact short circuit and realize by staff, and complicated operation, a staff is difficult to.And the application adopts resistance infinitesimal zeroing motherboard 4 that micro-resistance test meter 2 is returned to zero, it is more convenient to operate.
5th, controlled the position of micro-resistance test meter 2 by the sliding platform of XYZ axle three-coordinate, it may be achieved the continuous measurement of multiple spot, the measured value obtained is more accurate, and it is more convenient to operate.
The utility model proposes a kind of microresistivity survey equipment and measuring method, product quickly effectively can be carried out the measurement of resistance value by this apparatus and method for, tells qualified and underproof product, reduces the operation complexity of workman, improve its detection efficiency. In the present embodiment, control device to be connected with display, keyboard, mouse, audio frequency apparatus etc.
In order to optimize implementation result of the present utility model further, in other embodiment, all the other feature technologies are identical, it is different in that, as illustrated in Figures 5 and 6, zeroing motherboard 4 is horizontally placed in Z axis slide rail 132 internal cavities, and zeroing motherboard 4 is connected with motherboard driving device (not shown), and motherboard driving device drives zeroing motherboard 4 to move.
Step 1) specifically include following steps:
1.1) motherboard driving device drives zeroing motherboard 4 to stretch out from Z axis slide rail 132 internal cavities;
1.2) controlling the device micro-resistance test meter 2 of control to move downward along Z-direction, four probes 21 of micro-resistance test meter contact with zeroing motherboard 4;
1.3) control device to return to zero.
Adopting above-mentioned preferred scheme, reduce the labor intensity of operator, detection efficiency is higher.
As shown in FIG. 7 and 8, further, zeroing motherboard 4 includes front and back, and front is metal detection face, and the back side is provided with draw-in groove 41, is hinged with the spike 42 for supporting zeroing motherboard 4 in draw-in groove 41.
Step 1.1) also include: motherboard driving device drives zeroing motherboard 4 to stretch out from Z axis slide rail 132 internal cavities; After stretching out, a spike 42 at zeroing motherboard 4 back side is produced by staff, and zeroing motherboard 4 is supported. Prop up spike 42 to be made up of insulant.
Adopting above-mentioned preferred scheme, zeroing motherboard 4 is carried out good support by a spike 42, it is ensured that its zeroing is more effective.
Novel preferred implementation, it is noted that for the person of ordinary skill of the art, under the premise creating design without departing from this utility model, it is also possible to making some deformation and improvement, these broadly fall into protection domain of the present utility model.

Claims (7)

1. a resistivity-measuring devices, it is characterized in that, described resistivity-measuring devices includes: sliding platform, controls device and is arranged on described sliding platform the micro-resistance test meter that can move along three directions of XYZ axle, and described micro-resistance test meter is provided with one or more groups probe.
2. resistivity-measuring devices according to claim 1, it is characterised in that be provided with on described sliding platform
Y-axis horizontal assembly, including Y-axis slide block, Y-axis slide rail and Y-axis driving device, described Y-axis driving device drives described Y-axis slide block to move along described Y-axis slide rail;
X-axis horizontal assembly, is arranged on described Y-axis slide block, and including X-axis slide block, X-axis slide rail and X-axis driving device, described X-axis driving device drives described X-axis slide block to move along described X-axis slide rail;
Z axis vertical component, is arranged on described X-axis slide block, and including Z axis slide block, Z axis slide rail and Z axis driving device, described micro-resistance test meter is arranged on described Z axis slide block, and described Z axis driving device drives described Z axis slide block to move along Z axis slide rail.
3. resistivity-measuring devices according to claim 1 and 2, it is characterised in that described resistivity-measuring devices also includes: be arranged at the carrier for carrying or transport product on described sliding platform.
4. resistivity-measuring devices according to claim 1 and 2, it is characterised in that described resistivity-measuring devices also includes temperature sensor, and described temperature sensor electrically connects with described control device.
5. resistivity-measuring devices according to claim 2, it is characterised in that described resistivity-measuring devices also includes zeroing motherboard.
6. resistivity-measuring devices according to claim 5, it is characterized in that, described zeroing motherboard is horizontally placed in described Z axis slide rail internal cavities, and described zeroing motherboard is connected with motherboard driving device, and described motherboard driving device drives the motion of described zeroing motherboard.
7. resistivity-measuring devices according to claim 6, it is characterised in that described zeroing motherboard includes front and back, described front is metal detection face, and the described back side is provided with draw-in groove, is hinged with the spike for supporting described zeroing motherboard in described draw-in groove.
CN201520950421.0U 2015-11-25 2015-11-25 Little resistance measurement equipment Withdrawn - After Issue CN205301431U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN201520950421.0U CN205301431U (en) 2015-11-25 2015-11-25 Little resistance measurement equipment

Publications (1)

Publication Number Publication Date
CN205301431U true CN205301431U (en) 2016-06-08

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372499A (en) * 2015-11-25 2016-03-02 亿和精密工业(苏州)有限公司 Micro-resistance measurement equipment and measurement method
CN106526327A (en) * 2016-12-26 2017-03-22 昆山丘钛微电子科技有限公司 DCR micro resistor automatic measuring machine
CN109324229A (en) * 2017-08-01 2019-02-12 蔡宜兴 Micro resistor detection device and detection method
CN111208411A (en) * 2020-01-16 2020-05-29 冬烨(上海)机电科技有限公司 Multi-channel low-resistance test system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372499A (en) * 2015-11-25 2016-03-02 亿和精密工业(苏州)有限公司 Micro-resistance measurement equipment and measurement method
CN105372499B (en) * 2015-11-25 2018-05-04 亿和精密工业(苏州)有限公司 A kind of microresistivity survey equipment and measuring method
CN106526327A (en) * 2016-12-26 2017-03-22 昆山丘钛微电子科技有限公司 DCR micro resistor automatic measuring machine
CN106526327B (en) * 2016-12-26 2023-08-29 昆山丘钛微电子科技有限公司 DCR micro-resistance automatic measuring machine
CN109324229A (en) * 2017-08-01 2019-02-12 蔡宜兴 Micro resistor detection device and detection method
CN109324229B (en) * 2017-08-01 2020-09-29 蔡宜兴 Micro resistor detection device and detection method
CN111208411A (en) * 2020-01-16 2020-05-29 冬烨(上海)机电科技有限公司 Multi-channel low-resistance test system

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GR01 Patent grant
AV01 Patent right actively abandoned
AV01 Patent right actively abandoned

Granted publication date: 20160608

Effective date of abandoning: 20180504