CN104596410B - A kind of hexahedron high accuracy morpheme measurement apparatus and method - Google Patents

A kind of hexahedron high accuracy morpheme measurement apparatus and method Download PDF

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CN104596410B
CN104596410B CN201510016621.3A CN201510016621A CN104596410B CN 104596410 B CN104596410 B CN 104596410B CN 201510016621 A CN201510016621 A CN 201510016621A CN 104596410 B CN104596410 B CN 104596410B
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test surface
hexahedron
positioning plate
probe
micrometer
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CN104596410A (en
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君华
黄德
王长青
李冰远
曹勇
马晓峰
宋大海
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China Aerospace Times Electronics Corp
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Abstract

本发明涉及航天惯性器件精密检测技术领域,特别涉及一种六面体高精度形位测量装置及方法。该装置包括电感测微仪、大理石定位平板、电感测头、第一测头固定块、第二测头固定块、标准平行刀口尺或标准棒、测头连接线、第一支架和第二支架。本发明的方法,检测时间短,检测效率高。一组平面的形位关系检测时间只需2分钟,而进口高精度三坐标测试仪检测时间约为20分钟以上,检测效率提高了10倍以上。

The invention relates to the technical field of precise detection of aerospace inertial devices, in particular to a hexahedral high-precision shape and position measuring device and method. The device includes an inductive micrometer, a marble positioning plate, an inductive probe, a first probe fixing block, a second probe fixing block, a standard parallel knife-edge ruler or a standard rod, a probe connecting wire, a first bracket and a second bracket . The method of the invention has short detection time and high detection efficiency. It takes only 2 minutes to detect the shape and position relationship of a group of planes, while the detection time of the imported high-precision three-coordinate tester is about 20 minutes or more, and the detection efficiency has increased by more than 10 times.

Description

一种六面体高精度形位测量装置及方法A device and method for measuring hexahedral high-precision shape and position

技术领域technical field

本发明涉及航天惯性器件精密检测技术领域,特别涉及一种六面体高精度形位测量装置及方法。The invention relates to the technical field of precise detection of aerospace inertial devices, in particular to a hexahedral high-precision shape and position measuring device and method.

背景技术Background technique

六面体构成高精度的三维直角坐标系,是安装和调试惯性仪表的重要装置。用于惯性组件安装调试的一种六面体零件实际工作面为6个,外形是由六个相互垂直的平面组成。六面体尺寸有多种,大型六面体总高可达350mm,精度要求为各面垂直度、平行度在0.002mm以内。小型六面体总高25mm,精度要求为各面垂直度、平行度在0.001mm以内。由于是六面体将形成外部24个夹角,夹角精度为1.3”以内。六面体的形位精度直接影响装在惯组上的各种惯性仪表的安装精度,以及所建立的直角坐标系的准确性,故要求六面体加工过程中的测量精度极高。随着航天惯性技术的发展,高精度六面体的需求逐渐增多,要求生产单位具备大批量生产的能力,传统的检测方法是使用进口高精度三坐标测试仪,该设备不仅价格高,对环境要求高,维护保养难度大,而且测量周期长,需要专业检测人员操作,大大影响了六面体的检测效率。The hexahedron forms a high-precision three-dimensional rectangular coordinate system and is an important device for installing and debugging inertial instruments. A hexahedron part used for the installation and debugging of inertial components has six actual working surfaces, and its shape is composed of six mutually perpendicular planes. There are many sizes of hexahedrons, the total height of large hexahedrons can reach 350mm, and the precision requirement is that the verticality and parallelism of each surface should be within 0.002mm. The total height of the small hexahedron is 25mm, and the precision requirement is that the verticality and parallelism of each surface are within 0.001mm. Since the hexahedron will form 24 external angles, the angle accuracy is within 1.3". The shape and position accuracy of the hexahedron directly affects the installation accuracy of various inertial instruments mounted on the inertial group, as well as the accuracy of the established rectangular coordinate system , so the measurement accuracy in the hexahedron processing process is required to be extremely high. With the development of aerospace inertial technology, the demand for high-precision hexahedrons is gradually increasing, requiring production units to have the ability to produce in large quantities. The traditional detection method is to use imported high-precision three-coordinate The tester is not only expensive, but also has high environmental requirements and is difficult to maintain. It also has a long measurement cycle and requires professional testing personnel to operate, which greatly affects the testing efficiency of the hexahedron.

发明内容Contents of the invention

本发明的目的是为了克服现有六面体形位测量技术的不足,提出一种六面体高精度形位测量装置及方法。The object of the present invention is to propose a hexahedron high-precision shape and position measurement device and method in order to overcome the shortcomings of the existing hexahedron shape and position measurement technology.

本发明的目的是通过以下技术方案实现的。The purpose of the present invention is achieved through the following technical solutions.

本发明的一种六面体高精度形位测量装置,包括电感测微仪、大理石定位平板、电感测头、第一测头固定块、第二测头固定块、标准平行刀口尺或标准棒、测头连接线、第一支架和第二支架;A hexahedral high-precision shape and position measuring device of the present invention comprises an inductive micrometer, a marble positioning plate, an inductive measuring head, a first measuring head fixing block, a second measuring head fixing block, a standard parallel knife-edge ruler or a standard rod, and a measuring head. Head connecting wire, first bracket and second bracket;

第一测头固定块为带有中心通孔的铜质长方体;The first measuring head fixing block is a copper cuboid with a central through hole;

第二测头固定块为带有中心通孔的钢质刀口尺;The second measuring head fixed block is a steel knife-edge ruler with a central through hole;

定位平板为大理石材质,定位平板的表面光洁度小于Ra0.002mm,平面度小于0.005mm,定位平板大小可根据待测六面体的大小适当调整。The positioning plate is made of marble. The surface finish of the positioning plate is less than Ra0.002mm, and the flatness is less than 0.005mm. The size of the positioning plate can be adjusted according to the size of the hexahedron to be measured.

电感测头穿过第一测头固定块和第二测头固定块的中心通孔,电感测头与第一测头固定块和第二测头固定块通过螺栓固定;The electrical probe passes through the central through holes of the first probe fixing block and the second probe fixing block, and the electrical probe is fixed to the first probe fixing block and the second probe fixing block by bolts;

标准棒为钢质圆柱,表面光洁度小于Ra0.002mm,圆柱度小于0.005mm,直径为15mm~40mm,长度可根据待测六面体的大小适当调整。The standard rod is a steel cylinder, the surface finish is less than Ra0.002mm, the cylindricity is less than 0.005mm, the diameter is 15mm-40mm, and the length can be adjusted according to the size of the hexahedron to be measured.

第一支架固定在大理石定位平板上,用于支撑电感测微仪与电感测头的连接线;The first bracket is fixed on the marble positioning plate, and is used to support the connection line between the inductive micrometer and the inductive probe;

第二支架的一端固定在大理石定位平板上,另一端带有与大理石定位平板平行的平台,该平台用于固定支撑第一测头固定块;One end of the second bracket is fixed on the marble positioning plate, and the other end has a platform parallel to the marble positioning plate, which is used to fix and support the first measuring head fixing block;

电感测微仪固定在大理石定位平板上;The inductance micrometer is fixed on the marble positioning plate;

标准平行刀口尺或标准棒固定在大理石定位平板上,标准平行刀口尺或标准棒与六面体的待测面接触,且标准平行刀口尺或标准棒靠近六面体的待测面的底端;The standard parallel knife-edge ruler or standard rod is fixed on the marble positioning plate, the standard parallel knife-edge ruler or standard rod is in contact with the surface to be measured of the hexahedron, and the standard parallel knife-edge ruler or standard rod is close to the bottom end of the hexahedron to be measured;

测头连接线的一端与电感测微仪连接,中间部分通过第一支架进行固定,另一端与电感测头的非敏感端连接;电感测头的敏感端与六面体的待测面接触,电感测头的敏感端靠近六面体的待测面的顶端;One end of the probe connection line is connected to the inductance micrometer, the middle part is fixed by the first bracket, and the other end is connected to the non-sensitive end of the inductance probe; the sensitive end of the inductance probe is in contact with the surface to be measured of the hexahedron, and the inductance is sensed. The sensitive end of the head is close to the top of the surface to be measured of the hexahedron;

第二测头固定块用于对待测试的六面体进行限位;The second probe fixed block is used to limit the hexahedron to be tested;

标准平行刀口尺或标准棒用于对待测试的六面体进行限位,以保证六面体的待测面与大理石定位平板垂直;The standard parallel knife-edge ruler or standard rod is used to limit the hexahedron to be tested, so as to ensure that the tested surface of the hexahedron is perpendicular to the marble positioning plate;

本发明的一种六面体高精度形位测量方法,该方法用于测量六面体六个面的垂直度和平行度,并命名待测试的六面体的顶面为第一测试面,底面为第二测试面,其他四个侧面从上往下看,按顺指针方向依次为第三测试面、第四测试面、第五测试面、第六测试面;A method for measuring the shape and position of a hexahedron with high precision according to the present invention, the method is used to measure the verticality and parallelism of the six faces of the hexahedron, and the top surface of the hexahedron to be tested is named as the first test surface, and the bottom surface is called the second test surface , the other four sides are viewed from top to bottom, and they are the third test surface, the fourth test surface, the fifth test surface, and the sixth test surface in the direction of the pointer;

步骤为:The steps are:

(1)对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) Grinding the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and take the first test surface and the second test surface as reference planes;

(2)使第二测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the third test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position. ;

(3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第三测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the third test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the third test surface.

依此类推,可测得第四测试面、第五测试面、第六测试面与第一测试面或是第二测试面之间的垂直度。By analogy, the perpendicularity between the fourth test surface, the fifth test surface, the sixth test surface and the first test surface or the second test surface can be measured.

有益效果Beneficial effect

(1)本发明的一种六面体高精度形位测量装置,结构简单,组装便捷,可自行组装,只包括电感测微仪、大理石定位平板、电感测头、第一测头固定块、第二测头固定块、标准平行刀口尺或标准棒、测头连接线、第一支架和第二支架等9个部件。(1) A hexahedral high-precision shape and position measuring device of the present invention has simple structure, convenient assembly, and can be self-assembled. It only includes an inductance micrometer, a marble positioning plate, an inductance probe, a first probe fixing block, There are 9 parts including the probe fixing block, standard parallel knife-edge ruler or standard rod, probe connecting wire, first bracket and second bracket.

(2)本发明的一种六面体高精度形位测量装置,相对于昂贵的进口高精度三坐标测试仪,价格便宜,总价只是进口高精度三坐标测试仪的千分之一。(2) A hexahedron high-precision shape and position measuring device of the present invention is cheap compared to expensive imported high-precision three-coordinate testers, and the total price is only one-thousandth of the imported high-precision three-coordinate testers.

(3)本发明的一种六面体高精度形位测量装置,检测精度高,最高精度可达0.001mm,与进口高精度三坐标的检测精度相当。(3) A hexahedron high-precision shape and position measuring device of the present invention has high detection accuracy, and the highest accuracy can reach 0.001 mm, which is equivalent to the detection accuracy of imported high-precision three-coordinates.

(4)本发明的一种六面体高精度形位测量装置,无需特别维护和保养,测试前只需简单擦拭,保持各台面清洁。而进口高精度三坐标测试仪需要定期校准和维护,影响了生产进度和使用效果。(4) A hexahedral high-precision shape and position measuring device of the present invention does not require special maintenance and maintenance, and only needs to be simply wiped before testing to keep each table surface clean. However, the imported high-precision three-coordinate tester needs regular calibration and maintenance, which affects the production progress and use effect.

(5)本发明的一种六面体高精度形位测量方法,操作方法简单,使用方便,可在现场对六面体进行标定检测,无须专业的检测人员,一般技术人员经过简短的学习即可使用。(5) The method for measuring the shape and position of a hexahedron with high precision of the present invention is simple in operation and easy to use, and can be used for calibration and detection of the hexahedron on the spot, without the need for professional inspectors, and general technicians can use it after a brief study.

(6)本发明一种六面体高精度形位测量方法,检测时间短,检测效率高。一组平面的形位关系检测时间只需2分钟,而进口高精度三坐标测试仪检测时间约为20分钟以上,检测效率提高了10倍以上。(6) A method for measuring the shape and position of a hexahedron with high precision in the present invention has short detection time and high detection efficiency. It only takes 2 minutes to detect the shape and position relationship of a group of planes, while the detection time of the imported high-precision three-coordinate tester is about 20 minutes or more, and the detection efficiency has increased by more than 10 times.

附图说明Description of drawings

图1为本发明的装置的结构示意图;Fig. 1 is the structural representation of device of the present invention;

图2为图1的局部放大图;Figure 2 is a partially enlarged view of Figure 1;

图3为带有六面体的本发明的装置结构示意图。Fig. 3 is a schematic structural diagram of the device of the present invention with a hexahedron.

具体实施方式detailed description

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.

实施例1Example 1

如图1和图2所示,一种六面体高精度形位测量装置,包括电感测微仪、大理石定位平板、电感测头、第一测头固定块、第二测头固定块、标准平行刀口尺或标准棒、测头连接线、第一支架和第二支架;As shown in Figure 1 and Figure 2, a hexahedral high-precision shape and position measuring device includes an inductance micrometer, a marble positioning plate, an inductance probe, a first probe fixing block, a second probe fixing block, and a standard parallel knife edge Ruler or standard rod, probe connecting wire, first bracket and second bracket;

待测六面体总高350mmThe total height of the hexahedron to be tested is 350mm

第一测头固定块为带有中心通孔的铜质长方体;The first measuring head fixing block is a copper cuboid with a central through hole;

第二测头固定块为带有中心通孔的钢质刀口尺;The second measuring head fixed block is a steel knife-edge ruler with a central through hole;

定位平板为大理石材质,定位平板的表面光洁度Ra0.001mm,平面度0.005mm,定位平板大小为400mm×400mm。The positioning plate is made of marble, the surface finish of the positioning plate is Ra0.001mm, the flatness is 0.005mm, and the size of the positioning plate is 400mm×400mm.

电感测头穿过第一测头固定块和第二测头固定块的中心通孔,电感测头与第一测头固定块和第二测头固定块通过螺栓固定;The electrical probe passes through the central through holes of the first probe fixing block and the second probe fixing block, and the electrical probe is fixed to the first probe fixing block and the second probe fixing block by bolts;

标准棒为钢质圆柱,表面光洁度Ra0.0015mm,圆柱度0.005mm,直径为30mm,长度为400mm。The standard rod is a steel cylinder with a surface finish of Ra0.0015mm, a cylindricity of 0.005mm, a diameter of 30mm, and a length of 400mm.

第一支架固定在大理石定位平板上,用于支撑电感测微仪与电感测头的连接线;The first bracket is fixed on the marble positioning plate, and is used to support the connection line between the inductive micrometer and the inductive probe;

第二支架的一端固定在大理石定位平板上,另一端带有与大理石定位平板平行的平台,该平台用于固定支撑第一测头固定块;One end of the second bracket is fixed on the marble positioning plate, and the other end has a platform parallel to the marble positioning plate, which is used to fix and support the first measuring head fixing block;

电感测微仪固定在大理石定位平板上;The inductance micrometer is fixed on the marble positioning plate;

标准棒固定在大理石定位平板上,标准棒与六面体的待测面接触,且标准棒靠近六面体的待测面的底端;The standard rod is fixed on the marble positioning plate, the standard rod is in contact with the surface to be measured of the hexahedron, and the standard rod is close to the bottom of the surface to be measured of the hexahedron;

测头连接线的一端与电感测微仪连接,中间部分通过第一支架进行固定,另一端与电感测头的非敏感端连接;电感测头的敏感端与六面体的待测面接触,电感测头的敏感端靠近六面体的待测面的顶端;One end of the probe connection line is connected to the inductance micrometer, the middle part is fixed by the first bracket, and the other end is connected to the non-sensitive end of the inductance probe; the sensitive end of the inductance probe is in contact with the surface to be measured of the hexahedron, and the inductance is sensed. The sensitive end of the head is close to the top of the surface to be measured of the hexahedron;

第二测头固定块用于对待测试的六面体进行限位;The second probe fixed block is used to limit the hexahedron to be tested;

标准棒用于对待测试的六面体进行限位,以保证六面体的待测面与大理石定位平板垂直;The standard rod is used to limit the hexahedron to be tested, so as to ensure that the surface to be tested of the hexahedron is perpendicular to the marble positioning plate;

如图3所示,一种六面体高精度形位测量方法,该方法用于测量六面体六个面的垂直度,并命名待测试的六面体的顶面为第一测试面,底面为第二测试面,其他四个侧面从上往下看,按顺指针方向依次为第三测试面、第四测试面、第五测试面、第六测试面;As shown in Figure 3, a high-precision shape and position measurement method for a hexahedron is used to measure the verticality of the six faces of the hexahedron, and the top surface of the hexahedron to be tested is named as the first test surface, and the bottom surface is the second test surface. , the other four sides are viewed from top to bottom, and they are the third test surface, the fourth test surface, the fifth test surface, and the sixth test surface in the direction of the pointer;

步骤为:The steps are:

(1)对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) Grinding the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and take the first test surface and the second test surface as reference planes;

(2)使第二测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the third test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position. ;

(3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第三测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the third test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the third test surface.

依此类推,可测得第四测试面、第五测试面、第六测试面与第一测试面或是第二测试面之间的垂直度。By analogy, the perpendicularity between the fourth test surface, the fifth test surface, the sixth test surface and the first test surface or the second test surface can be measured.

通过测试结果可知,第一测试面或是第二测试面与第三测试面、第四测试面、第五测试面、第六测试面的垂直度分别为0.002mm、0.01mm、0.005mm、0.003mm。It can be seen from the test results that the perpendicularity of the first test surface or the second test surface to the third test surface, the fourth test surface, the fifth test surface, and the sixth test surface are 0.002mm, 0.01mm, 0.005mm, 0.003 mm.

实施例2Example 2

一种六面体高精度形位测量装置,包括电感测微仪、大理石定位平板、电感测头、第一测头固定块、第二测头固定块、标准平行刀口尺或标准棒、测头连接线、第一支架和第二支架;A hexahedron high-precision shape and position measuring device, including an inductive micrometer, a marble positioning plate, an inductive probe, a first probe fixing block, a second probe fixing block, a standard parallel knife-edge ruler or a standard rod, and a probe connecting wire , the first bracket and the second bracket;

待测六面体总高25mmThe total height of the hexahedron to be tested is 25mm

第一测头固定块为带有中心通孔的铜质长方体;The first measuring head fixing block is a copper cuboid with a central through hole;

第二测头固定块为带有中心通孔的钢质刀口尺;The second measuring head fixed block is a steel knife-edge ruler with a central through hole;

定位平板为大理石材质,定位平板的表面光洁度Ra0.001mm,平面度0.002mm,定位平板大小为100mm×100mm。The positioning plate is made of marble, the surface finish of the positioning plate is Ra0.001mm, the flatness is 0.002mm, and the size of the positioning plate is 100mm×100mm.

电感测头穿过第一测头固定块和第二测头固定块的中心通孔,电感测头与第一测头固定块和第二测头固定块通过螺栓固定;The electrical probe passes through the central through holes of the first probe fixing block and the second probe fixing block, and the electrical probe is fixed to the first probe fixing block and the second probe fixing block by bolts;

标准平行刀口尺的刀口部分平面度为0.001mm。The flatness of the knife-edge part of the standard parallel knife-edge ruler is 0.001mm.

第一支架固定在大理石定位平板上,用于支撑电感测微仪与电感测头的连接线;The first bracket is fixed on the marble positioning plate, and is used to support the connection line between the inductive micrometer and the inductive probe;

第二支架的一端固定在大理石定位平板上,另一端带有与大理石定位平板平行的平台,该平台用于固定支撑第一测头固定块;One end of the second bracket is fixed on the marble positioning plate, and the other end has a platform parallel to the marble positioning plate, which is used to fix and support the first measuring head fixing block;

电感测微仪固定在大理石定位平板上;The inductance micrometer is fixed on the marble positioning plate;

标准平行刀口尺固定在大理石定位平板上,标准平行刀口尺与六面体的待测面接触,且标准平行刀口尺靠近六面体的待测面的底端;The standard parallel knife-edge ruler is fixed on the marble positioning plate, the standard parallel knife-edge ruler is in contact with the surface to be measured of the hexahedron, and the standard parallel knife-edge ruler is close to the bottom end of the hexahedron to be measured;

测头连接线的一端与电感测微仪连接,中间部分通过第一支架进行固定,另一端与电感测头的非敏感端连接;电感测头的敏感端与六面体的待测面接触,电感测头的敏感端靠近六面体的待测面的顶端;One end of the probe connection line is connected to the inductance micrometer, the middle part is fixed by the first bracket, and the other end is connected to the non-sensitive end of the inductance probe; the sensitive end of the inductance probe is in contact with the surface to be measured of the hexahedron, and the inductance is sensed. The sensitive end of the head is close to the top of the surface to be measured of the hexahedron;

第二测头固定块用于对待测试的六面体进行限位;The second probe fixed block is used to limit the hexahedron to be tested;

标准平行刀口尺用于对待测试的六面体进行限位,以保证六面体的待测面与大理石定位平板垂直;The standard parallel knife-edge ruler is used to limit the hexahedron to be tested, so as to ensure that the tested surface of the hexahedron is perpendicular to the marble positioning plate;

一种六面体高精度形位测量方法,该方法用于测量六面体六个面的垂直度和平行度,并命名待测试的六面体的顶面为第一测试面,底面为第二测试面,其他四个侧面从上往下看,按顺指针方向依次为第三测试面、第四测试面、第五测试面、第六测试面;A hexahedron high-precision shape and position measurement method, the method is used to measure the verticality and parallelism of the six faces of the hexahedron, and name the top face of the hexahedron to be tested as the first test face, the bottom face as the second test face, and the other four Looking from the top to the bottom of the first side, the third test surface, the fourth test surface, the fifth test surface, and the sixth test surface are followed in the direction of the pointer;

步骤为:The steps are:

(1)对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) Grinding the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and take the first test surface and the second test surface as reference planes;

(2)使第二测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the third test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position. ;

(3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第三测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the third test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the third test surface.

依此类推,可测得第四测试面、第五测试面、第六测试面与第一测试面或是第二测试面之间的垂直度。By analogy, the perpendicularity between the fourth test surface, the fifth test surface, the sixth test surface and the first test surface or the second test surface can be measured.

通过测试结果可知,第一测试面或是第二测试面与第三测试面、第四测试面、第五测试面、第六测试面的垂直度分别为0.001mm、0.005mm、0.002mm、0.004mm。According to the test results, the verticality of the first test surface or the second test surface and the third test surface, the fourth test surface, the fifth test surface, and the sixth test surface are respectively 0.001mm, 0.005mm, 0.002mm, 0.004 mm.

Claims (5)

1.一种六面体高精度形位测量装置,其特征在于:包括电感测微仪、大理石定位平板、电感测头、第一测头固定块、第二测头固定块、标准平行刀口尺或标准棒、测头连接线、第一支架和第二支架;1. A hexahedron high-precision shape and position measuring device is characterized in that: it comprises an inductive micrometer, a marble positioning plate, an inductive probe, a first probe fixed block, a second probe fixed block, a standard parallel knife-edge ruler or a standard Rod, probe connecting wire, first support and second support; 第一测头固定块为带有中心通孔的铜质长方体;The first measuring head fixing block is a copper cuboid with a central through hole; 第二测头固定块为带有中心通孔的钢质刀口尺;The second measuring head fixed block is a steel knife-edge ruler with a central through hole; 电感测头穿过第一测头固定块和第二测头固定块的中心通孔,电感测头与第一测头固定块和第二测头固定块通过螺栓固定;The electrical probe passes through the central through holes of the first probe fixing block and the second probe fixing block, and the electrical probe is fixed to the first probe fixing block and the second probe fixing block by bolts; 第一支架固定在大理石定位平板上,用于支撑电感测微仪与电感测头的连接线;The first bracket is fixed on the marble positioning plate, and is used to support the connection line between the inductive micrometer and the inductive probe; 第二支架的一端固定在大理石定位平板上,另一端带有与大理石定位平板平行的平台,该平台用于固定支撑第一测头固定块;One end of the second bracket is fixed on the marble positioning plate, and the other end has a platform parallel to the marble positioning plate, which is used to fix and support the first measuring head fixing block; 电感测微仪固定在大理石定位平板上;The inductance micrometer is fixed on the marble positioning plate; 标准平行刀口尺或标准棒固定在大理石定位平板上,标准平行刀口尺或标准棒与六面体的待测面接触,且标准平行刀口尺或标准棒靠近六面体的待测面的底端;The standard parallel knife-edge ruler or standard rod is fixed on the marble positioning plate, the standard parallel knife-edge ruler or standard rod is in contact with the surface to be measured of the hexahedron, and the standard parallel knife-edge ruler or standard rod is close to the bottom end of the hexahedron to be measured; 测头连接线的一端与电感测微仪连接,中间部分通过第一支架进行固定,另一端与电感测头的非敏感端连接;电感测头的敏感端与六面体的待测面接触,电感测头的敏感端靠近六面体的待测面的顶端;One end of the probe connection line is connected to the inductance micrometer, the middle part is fixed by the first bracket, and the other end is connected to the non-sensitive end of the inductance probe; the sensitive end of the inductance probe is in contact with the surface to be measured of the hexahedron, and the inductance is sensed. The sensitive end of the head is close to the top of the surface to be measured of the hexahedron; 第二测头固定块用于对待测试的六面体进行限位;The second probe fixed block is used to limit the hexahedron to be tested; 标准平行刀口尺或标准棒用于对待测试的六面体进行限位,以保证六面体的待测面与大理石定位平板垂直;所述的大理石定位平板的表面光洁度小于Ra0.002mm,平面度小于0.005mm,定位平板大小根据待测六面体的大小进行调整;所述的标准棒为钢质圆柱,表面光洁度小于Ra0.002mm,圆柱度小于0.005mm,直径为15mm~40mm,长度根据待测六面体的大小进行调整。The standard parallel knife-edge ruler or standard rod is used to limit the hexahedron to be tested, so as to ensure that the surface to be tested of the hexahedron is perpendicular to the marble positioning plate; the surface finish of the marble positioning plate is less than Ra0.002mm, and the flatness is less than 0.005mm. The size of the positioning plate is adjusted according to the size of the hexahedron to be measured; the standard rod is a steel cylinder, the surface finish is less than Ra0.002mm, the cylindricity is less than 0.005mm, the diameter is 15mm to 40mm, and the length is adjusted according to the size of the hexahedron to be measured . 2.一种六面体高精度形位测量方法,该方法用于测量六面体六个面的垂直度,并命名待测试的六面体的顶面为第一测试面,底面为第二测试面,其他四个侧面从上往下看,按顺指针方向依次为第三测试面、第四测试面、第五测试面、第六测试面;2. A method for measuring the shape and position of a hexahedron with high precision, which is used to measure the verticality of the six faces of the hexahedron, and name the top face of the hexahedron to be tested as the first test face, the bottom face as the second test face, and the other four Looking from the top to the bottom from the side, it is the third test surface, the fourth test surface, the fifth test surface, and the sixth test surface according to the direction of the pointer; 其特征在于步骤为:It is characterized in that the steps are: (1)使用权利要求1所述的一种六面体高精度形位测量装置对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) use a kind of hexahedron high-precision shape and position measuring device described in claim 1 to grind the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and Taking the first test surface and the second test surface as reference surfaces; (2)使第二测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the third test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position. ; (3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第三测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第三测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the third test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the third test surface. 3.根据权利要求2所述的一种六面体高精度形位测量方法,其特征在于:3. a kind of hexahedron high-precision shape and position measuring method according to claim 2, is characterized in that: (1)对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) Grinding the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and take the first test surface and the second test surface as reference planes; (2)使第二测试面与大理石定位平板接触,当电感测头接触到第四测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the fourth test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position. ; (3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第四测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第四测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the fourth test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the fourth test surface. 4.根据权利要求2所述的一种六面体高精度形位测量方法,其特征在于:4. a kind of hexahedron high-precision shape and position measuring method according to claim 2, is characterized in that: (1)对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) Grinding the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and take the first test surface and the second test surface as reference planes; (2)使第二测试面与大理石定位平板接触,当电感测头接触到第五测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the fifth test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position ; (3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第五测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第五测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the fifth test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the fifth test surface. 5.根据权利要求2所述的一种六面体高精度形位测量方法,其特征在于:5. a kind of hexahedron high-precision shape and position measuring method according to claim 2, is characterized in that: (1)对第一测试面和第二测试面进行研磨,使第一测试面和第二测试面均与大理石定位平板平行,并以第一测试面和第二测试面作为基准面;(1) Grinding the first test surface and the second test surface, so that the first test surface and the second test surface are all parallel to the marble positioning plate, and take the first test surface and the second test surface as reference planes; (2)使第二测试面与大理石定位平板接触,当电感测头接触到第六测试面时,电感测微仪的指针发生偏转,调整电感测微仪的对零旋钮,使指针指向零位;(2) Make the second test surface contact with the marble positioning plate. When the inductive probe touches the sixth test surface, the pointer of the inductive micrometer deflects. Adjust the zero adjustment knob of the inductive micrometer to make the pointer point to the zero position. ; (3)翻转六面体,使第一测试面与大理石定位平板接触,当电感测头接触到第六测试面时,电感测微仪的指针发生偏转,此时电感测微仪的指数即为第一测试面或是第二测试面与第六测试面的垂直度。(3) Flip the hexahedron so that the first test surface is in contact with the marble positioning plate. When the inductance probe touches the sixth test surface, the pointer of the inductance micrometer deflects, and the index of the inductance micrometer is the first. The test surface or the perpendicularity between the second test surface and the sixth test surface.
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