1257335 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種金屬微粒粉末製造方法，尤其係指 一種利用離心噴霧及高壓氣體喷射粉碎方式以製造奈米級 或微米級之金屬微粒粉末製造方法。 【先前技術】 金屬微粒粉末通常用在精密電子工業的焊接材使用， 而這一些焊接材為了要使得精密電子元件的接腳得以有效 的與電路板上的迴路加以焊接固《，因此其尺寸上的要求 十分的嚴苛。 一般製造金屬微粒的方法是讓熔爐内設置的金屬棒高 速進行灰轉，並同時使得金屬棒的前端開始熔融，熔融後 的金屬液體會經由金屬棒旋轉時的離心力分散而離開金屬 棒’在熔爐内冷卻而形成為金屬粒子。但是金屬液體在離 開金屬棒而到達熔爐之内璧前，若其尚未冷卻固化，則便 不易形成為球狀的金屬微粒結構，為了要讓金屬液體在到 達炫爐内璧w可以冷卻固化，便必須要延長供金屬液體冷 :固化的時間，亦即加大金屬液體的飛行時間，也就是將 ^、盧的尺寸t大來使得金屬液體可以_實的冷卻成球狀的 玉屬粒子，但是這樣一來，卻導致熔爐言交備㈣置大型化。 為了解決上述的問題，日本發明公開昭5 9 - 1 4 〇 2號中’揭露藉由爐内氣氛之控制，以爐内氣氛之熱傳 :達到加速金屬液體的冷卻，亦即藉由例如氮氣、氬氣 $氣氣等兩種以上之惰性氣體之混合比例，來控制金屬液 1257335 體的冷卻速度。 但是，上述之方法僅可以確實獲得球狀的金屬微粒， 卻無法讓金屬微粒的尺寸達到奈米級或微米級之要求，因 此無法有效的利用在目前迴路越加精細的精密電子加工 上，另外，雖然藉由惰性氣體氣氛的控制已經可以加速金 屬液體的冷卻’然而若可以使得冷卻的時間再加以縮短， 相信即便可以使得裝置的尺寸更加的小型化。 【發明内容】 β本毛明人有蓉於上述金屬粒子在冑造時所遇到的種種 問題’乃積極著手從事研發’以期可以有效的解決上述傳 統方法的缺點，經過不㈣試驗及努力，終於開發出本發 明0 ^ &月之主要目的在於提供一種利用離心噴霧及高壓 =體喷射粉碎造㈣級或《級之金屬微粒粉末 製造方法。 严Y 了達到上述創作目的，本發明係採取以下之技術手 轉舷L達f ’本發明係將金屬液體滴下至-高速旋轉的旋 於· 剎^ _心力將金屬液體分散出旋轉盤，其特徵在 射 盤周圍處5又置有將分散飛離旋轉盤之金展液體喷 射粉碎之氣體噴 # 并_ Α 、 衣置’猎由氣體噴射裝置將金屬液體進 订一次粉碎並同時進行冷卻。 籬於/月藉田虱體噴射裝置所噴出的高壓氣體將分散非 離％轉盤之金屬 /滴進行二次粉碎，因此可以使得凝固後 1257335 的金屬微粒達到奈米級或微米級的尺寸要求。 【實施方式】 現請參看第一圖所示，本發明金屬微粒粉末製造方法 係將金屬液體（2 0 )由喷冑（i 〇 )滴下至一經由馬達 (1 1 )帶動而高速旋轉的旋轉盤（丄2 )上，利用離心 力將金屬液體（20)/分散出旋轉盤（12)，在旋轉盤 (1 2 )肖圍下侧處設置有將分散飛離旋轉盤（㈠）之 金屬液體（2 0 )進行斜向喷射粉碎之氣體喷射裳置 ，藉由氣體嘴射裝置（3〇)將金屬液體（ 行二次粉碎並同時進行冷卻。 (2 〇 )所喷出之氣體較佳為氮、 :作避用免：般的空氣所含之氧氣中 上述的氣體喷射裝置 氬氣、氦氣所混合而成， 與金屬產生任何不良的化 明多看第二圖所示，本實施型態與上 異點在旋轉盤（1 2 )周圍的上、下以’其差 飛離旋轉盤（！ 2)之全屬下兩側處設置有將分散 碎之氣體噴射裝置（3Q) )進行斜向噴射粉 將金屬液體（2 〇、4 + 如此可以進—步的 、乙υ ,刀口 μ w碎成更為細小 ^ 【實施例】 J盃濁攸被。 言月配合參看第一圖所示 將熔融之S η 1 n ~ C u 糸或 iSf i a 1 ^ P b 系、^ , ,, 1 —A 1糸金屬藉由口徑A n ς 3mm大小的噴嘴（1Q)滴下至 為ΟΙγπ^1257335 IX. DESCRIPTION OF THE INVENTION: 1. Field of the Invention The present invention relates to a method for producing a metal fine particle powder, and more particularly to a method for producing a nano- or micro-sized metal particle powder by centrifugal spray and high-pressure gas jet pulverization. method. [Prior Art] Metal particulate powders are commonly used in soldering materials in the precision electronics industry, and these soldering materials are designed to allow the pins of precision electronic components to be effectively soldered to the circuits on the circuit board. The requirements are very strict. Generally, the method of manufacturing metal particles is to make the metal rods provided in the furnace ash at a high speed, and at the same time, the front end of the metal rods starts to melt, and the molten metal liquid is dispersed by the centrifugal force when the metal rods are rotated to leave the metal rods in the furnace. It is internally cooled to form metal particles. However, before the metal liquid leaves the metal rod and reaches the inside of the furnace, if it has not been cooled and solidified, it is not easy to form a spherical metal particle structure. In order to allow the metal liquid to cool and solidify after reaching the bright furnace, It is necessary to extend the cooling time of the metal liquid: the time of solidification, that is, increase the flight time of the metal liquid, that is, the size of the metal and the large size of the metal can be such that the metal liquid can be solidly cooled into spherical jade particles, but As a result, it has led to the expansion of the furnace (4). In order to solve the above problem, Japanese Invention Laid-Open No. 59-1-4(No. 2) discloses that the heat transfer in the furnace atmosphere is achieved by the control of the atmosphere in the furnace: the cooling of the accelerated metal liquid is achieved, that is, by, for example, nitrogen gas. The mixing ratio of two or more inert gases such as argon gas and gas is used to control the cooling rate of the molten metal 1257335. However, the above method can only obtain spherical metal particles, but the size of the metal particles cannot be up to the nanometer or micrometer level, so that it is impossible to effectively utilize the finer precision electronic processing in the current circuit, and Although the cooling of the metal liquid can be accelerated by the control of the inert gas atmosphere, it is believed that even if the cooling time can be shortened, it is believed that the size of the device can be further miniaturized. [Summary of the Invention] β Ben Maoming people have various problems encountered in the manufacture of the above-mentioned metal particles 'is actively engaged in research and development' in order to effectively solve the shortcomings of the above traditional methods, after not (4) trials and efforts, Finally, the main purpose of the present invention is to provide a method for producing a metal fine particle powder by using a centrifugal spray and a high pressure = body jet pulverization (fourth) or "stage". Yan Y has achieved the above-mentioned creative purpose, and the present invention adopts the following technique: the hand-turning port L is the same as the present invention, which is to drip the metal liquid to the high-speed rotation, and to disperse the metal liquid out of the rotating disk. The feature is placed around the periphery of the disc 5 with a gas jet pulverizing the liquid-spraying liquid which is dispersed and scattered away from the rotating disc. The shovel is smashed and the metal liquid is ordered to be pulverized by the gas jetting device and simultaneously cooled. The high-pressure gas ejected from the rafter/moon 虱 喷射 喷射 将 进行 分散 金属 金属 金属 金属 金属 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 [Embodiment] Referring now to the first figure, the metal particle powder manufacturing method of the present invention is to spray a metal liquid (20) from a squirt (i 〇) to a high-speed rotation by a motor (1 1 ). On the disk (丄2), the metal liquid (20)/distributed out of the rotating disk (12) by centrifugal force, and the metal liquid which disperses and flies away from the rotating disk ((1)) is disposed at the lower side of the rotating disk (1 2 ) (2 0) performing a gas jet of oblique jet pulverization, and the metal liquid is re-pulverized and simultaneously cooled by a gas nozzle (3 〇). The gas ejected by (2 〇) is preferably Nitrogen, for avoidance: the oxygen contained in the air is mixed with the above-mentioned gas injection device, argon gas and helium gas, and any deterioration with the metal is shown in the second figure. This embodiment shows The state and the upper point are placed on the upper and lower sides of the rotating disk (1 2 ), and the gas jetting device (3Q) for dispersing the broken gas is disposed at the lower and lower sides of the rotating disk (! 2). The oblique spray powder will be a metal liquid (2 〇, 4 + so can be advanced, υ, knife edge w 碎 碎 细 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ 1—A 1糸 metal is dropped by a nozzle (1Q) with a diameter of A n ς 3mm to ΟΙγπ^
mm (例如2 5mm)的旋轉 ：:’ 2 0_至4 C 0 0 0 0至1〇0〇〇〇次的：頻馬達=用轉心 ^ 1 1 )以 5 〇「 1257335 ο 0次的旋轉數驅動旋轉盤（1 2 ) y r 9 n Wa 々疋轉以進行金屬液體 (2 ◦)的離心分散，再利用噴嘴間古 ^ ^ 系 0 · 3 m m 至 1 · 5 m m的軋體噴射裝置（3 〇 )以1 5 κ bS/min至4 UKGS/min (例如 20KGS/ · / min) 之壓力齡 圍噴出高壓氣體對金屬液體進行二次粉 物初你丸η 干所传之金屬微 粒粒k為〇 · 3 # m至1 〇 /z m。 動直IS上述相同之機台’㈣0 〇 〇 〇次的旋轉效率驅 動直k為3 Qmm之旋轉盤（丄2 )，而氣體噴射裂 之噴射壓力為4QKGS/min，則可以獲得〇. # m至3 # m之金屬球型微粒。 · [圖式簡單說明】 第一圖為本發明方法之實施狀態示意圖。 第一圖為本發明方法之另一實施狀態示意圖。 【主要元件符號說明】 (1 〇 )喷嘴 (1 1 )馬達 (1 2 )旋轉盤 、2 〇 )金屬液體 (3 0)氣體喷射裝置 (4〇)氣體喷射裝置Mm (for example, 2 5mm) rotation:: ' 2 0_ to 4 C 0 0 0 0 to 1〇0〇〇〇 times: frequency motor = use the heart ^ 1 1 ) to 5 〇 " 1257335 ο 0 times Rotating number drives the rotating disc (1 2 ) yr 9 n Wa 々疋 turns to perform centrifugal dispersion of the metal liquid (2 ◦), and then uses a rolling body injection device with a nozzle between 0 · 3 mm and 1 · 5 mm (3 〇) a high-pressure gas is sprayed from a pressure of 1 5 κ bS/min to 4 UKGS/min (for example, 20KGS/· / min). The metal powder is subjected to a secondary powder. k is 〇·3 #m to 1 〇/zm. The vertical machine IS has the same machine's (four) 0 旋转 rotational efficiency to drive the straight k to 3 Qmm rotating disk (丄2), and the gas jet split jet When the pressure is 4QKGS/min, the metal spherical particles of m. #m to 3 #m can be obtained. [A brief description of the drawings] The first figure is a schematic diagram of the implementation state of the method of the present invention. Schematic diagram of another implementation state. [Description of main component symbols] (1 〇) nozzle (1 1 ) motor (1 2 ) rotating disk, 2 〇) metal liquid (30) gas injection device (4 ) Gas injection means