12534891253489
五、發明說明（1 ) 〔發明背景〕 (請先閱讀背面之注意事項再填寫本頁) 本發明係有關平面顯示裝置及其製造方法，尤其有關 具備保持基板間用之間隔件的平面顯示裝置及其製造方法 代表液晶顯示裝置之平面裝置乃活用其薄型、輕量、 低消耗電力之特徵，被利用於各種領域。 例如有源矩陣型液晶顯示裝置具備有：陣列基板；成 對向於陣列基板之對向基板；做爲被保持於該等一對基板 間之光調變層的液晶層；及被配置於一對基板間，並被配 置成框狀於光調變層周圍之密封材（料）部。 於如此之平面顯示裝置，爲能確保良好之顯示品質（ 精細度），有需要保持該等一對基板成所定（一定）之間 隙。爲此，近年來，以如日本專利特開平1 〇 -1 4 8 8 3 6號公報等所揭示，有試行成一體形成間隔件 於陣列基板或對向基板之一方。該公報乃揭示在顯示區域 之配線上，及密封材中，成一體於基板來形成間隔件之情 事。 經濟部智慧財產局員工消費合作社印製 例如圖9係顯示在於習知之液晶顯示裝置之密封材（ 密封劑）部2 0 2，和被配置於密封材部2 0 2中而要保 持一對基板距離成所定間隙用之方柱狀間隔件2 0 1。 該方柱狀間隔件2 0 1 ，在於密封材之塗佈過程乃設 置於密封材之塗佈區域之外。密封材乃由封閉過程之加壓 而朝其廣度方向擴展。該時，方柱狀之間隔件2 0 1乃由 密封材之擴展而會被密封材部所包圍。而該封閉過程中’ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） _ 4 - 1253489 A7 B7 五、發明說明（2 ) (請先閱讀背面之注意事項再填寫本頁) 密封材之擴展會被方柱狀間隔件所妨礙。爲此，如圖9所 示’有可能會在密封材之擴展方向的下流側之方柱狀間隔 件2 0 1的側壁近旁產生氣泡2 9 9之狀態。而如此之氣 泡2 9 9會使密封材部2 0 2之形狀形成惡化，使得會成 爲引起阻斷密封等之原因。 更詳言之，以如此產生於密封材部2 0 2中之氣泡 2 9 9，將會使密封材部2 0 2之寬度變狹窄而會降低耐 環境性，耐可靠性。又在真空退火過程或注入液晶過程的 進行真空排氣液晶單元內時，具有氣泡2 9 9中之空氣膨 脹而產生密封脫落之虞。再者，密封材部2 0 2之形狀當 產生惡化時，會在對基板劃線時，形成不希望之剖面於基 板的厚度方向，使得具有製造良率（生產率）產生降低之 問題。 〔本發明之摘要〕 經濟部智慧財產局員工消費合作社印製 本發明係爲了解決上述問題而發明者，其目的係擬提 供一種形成成一體於至少一方基板之間隔件以保持均勻之 基板間隙，且不會產生氣泡於密封材部中，而優異於可靠 性及製造良率的平面顯示裝置及其製造方法者。 又本發明之目的，係擬提供一種可縮短製造時間的平 面顯示裝置及其製造方法者。 依據本發明，申請專利範圍第1項（以下簡稱爲申請 項，其他也同）係一種平面顯示裝置，係具備有：第1基 板；以離間於前述第1基板來成對向配置的第2基板；配 -5- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1253489 A7 B7 五、發明說明（3 ) 置成框狀於前述第1及第2之基板間而要貼合前述第1及 胃2之基板的密封材（料）；被保持於由前述密封材所貼 合之前述第1及第2之基板間的間隙之光調變層；及成一 體固定配置於前述第1及第2之至少一方基板，用以保持 前述間隙的間隔件，其特徵爲： 前述間隔件乃配置其一部分於前述密封材中，而其他 部分則從前述密封材突出著。 又申請項1 1所記載之平面顯示裝置的製造方法，係 要製造具備有：第1及第2之基板；被配置於該等基板間 之光調變層；被配置於前述基板間且被配置於包圍前述光 調變層的框狀之密封材；及成一體地配置於前述第1基板 而要維持前述第1及第2之基板間隙成一定的間隔件之平 面顯示裝置的方法，其特徵爲具備有： 設置前述間隔件於前述第1基板之過程；塗佈密封材 料於前述第1及第2之基板的任一方基板之過程；藉前述 密封材料及前述間隔件來重疊（疊層）前述第1及第2之 基板的過程；及加壓前述第1及第2之基板來硬化前述密 封材料，以形成前述密封材且使前述間隔件之一部分封閉 於前述密封材中，而其他部分則從前述密封材成突出的封 閉過程。 依據本發明，因接觸於密封材部之間隔件的一部分被 配置於密封材部中，而其他部分則從密封材部突出著，因 而可大幅度地減輕產生氣泡於密封材部中。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) Φ--------訂丨 經濟部智慧財產局員工消費合作社印製 -6 - 1253489 A7V. OBJECTS OF THE INVENTION (1) [Background of the Invention] (Please read the precautions on the back side and then fill out this page) The present invention relates to a flat display device and a method of manufacturing the same, and more particularly to a flat display device having a spacer for holding between substrates The manufacturing method of the liquid crystal display device and the manufacturing method thereof are characterized by being thin, lightweight, and low in power consumption, and are utilized in various fields. For example, the active matrix liquid crystal display device includes: an array substrate; an opposite substrate that faces the array substrate; a liquid crystal layer that is held by the light modulation layer between the pair of substrates; and is disposed on the liquid crystal layer The sealing material (material) portion around the light modulation layer is arranged in a frame shape between the substrates. In such a flat display device, in order to ensure good display quality (fineness), it is necessary to maintain a predetermined (constant) gap between the pair of substrates. For this reason, in recent years, it has been proposed to integrally form a spacer on one of an array substrate or a counter substrate as disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. This publication discloses a case where a spacer is formed on a wiring in a display region and a sealing member in a single body. For example, FIG. 9 shows a sealing material (sealant) portion 2 0 2 of a conventional liquid crystal display device, and is disposed in the sealing member portion 20 2 to hold a pair of substrates. The distance is a square column spacer 20 1 for a predetermined gap. The square column spacer 20 1 is that the coating process of the sealing material is disposed outside the coating area of the sealing material. The sealing material is expanded toward its breadth by the pressurization of the sealing process. At this time, the square column-shaped spacer 20 1 is surrounded by the sealing material portion by the expansion of the sealing material. In the process of closure, the paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) _ 4 - 1253489 A7 B7 V. Invention Description (2) (Please read the notes on the back and fill out this page. The expansion of the seal material is hampered by the square column spacers. For this reason, as shown in Fig. 9, it is possible that a state of the bubble 209 is generated in the vicinity of the side wall of the square column spacer 210 of the downstream side in the expansion direction of the sealing material. On the other hand, such a bubble 2 9 9 deteriorates the shape of the sealing member portion 20, which may cause a blockage or the like. More specifically, the bubble 209 which is thus generated in the sealing member portion 20 will narrow the width of the sealing member portion 2 0 2 to lower the environmental resistance and reliability. Further, in the vacuum annealing process or the vacuum evacuation liquid crystal cell which is injected into the liquid crystal process, the air in the bubble 199 expands to cause the seal to fall off. Further, when the shape of the sealing member portion 2 0 2 is deteriorated, an undesired cross section is formed in the thickness direction of the substrate when scribing the substrate, so that the manufacturing yield (productivity) is lowered. [Abstract of the Invention] The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a spacer formed integrally with at least one substrate to maintain a uniform substrate gap. A flat display device excellent in reliability and manufacturing yield, and a method of manufacturing the same, which does not generate bubbles in the sealing member portion. Still another object of the present invention is to provide a flat display device which can shorten the manufacturing time and a method of manufacturing the same. According to the invention, the first aspect of the patent application (hereinafter referred to as the application item, the same applies) is a flat display device comprising: a first substrate; and a second arrangement disposed opposite to the first substrate Substrate; with -5 - This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1253489 A7 B7 V. Invention description (3) Framed between the first and second substrates a sealing material (material) for bonding the substrate of the first and second stomachs; a light modulation layer held by a gap between the first and second substrates bonded together by the sealing material; and integrally fixed A spacer disposed on at least one of the first and second substrates to hold the gap, wherein the spacer is disposed in a part of the sealing material, and the other portion protrudes from the sealing material. Further, in the method of manufacturing a flat display device according to the above aspect 1, the first and second substrates are provided, and the light modulation layer disposed between the substrates is disposed between the substrates. a method of arranging a frame-shaped sealing material surrounding the optical modulation layer; and a planar display device integrally disposed on the first substrate to maintain a predetermined gap between the first and second substrate gaps, The method includes a process of providing the spacer on the first substrate, a process of applying a sealing material to one of the first and second substrates, and overlapping by the sealing material and the spacer (stacking) a process of the first and second substrates; and pressing the first and second substrates to cure the sealing material to form the sealing material, and partially sealing one of the spacers in the sealing material, and The part is formed into a protruding sealing process from the aforementioned sealing material. According to the invention, a part of the spacer which is in contact with the sealing member is disposed in the sealing member, and the other portion protrudes from the sealing member, so that generation of bubbles in the sealing member can be greatly reduced. This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) (please read the notes on the back and fill out this page) Φ--------Book the Ministry of Economic Affairs Intellectual Property Bureau staff consumption Co-operative printing -6 - 1253489 A7
五、發明說明（5 ) 經濟部智慧財產局員工消費合作社印製 的多晶矽層；形成覆蓋該等的閘極絕緣膜1 3 3 ;及配置 於該閘極絕緣膜1 3 3上的閘極1 1 3所構成。源極 1 3 7係藉被形成於閘極絕緣膜1 3 3及層間絕緣膜 1 3 4接觸孔來被電性連接於源極區域1 1 4。成一體於 is號線1 3 8之汲極係藉被形成於閘極絕緣膜1 3 3及層 間絕緣膜1 3 4之接觸孔來被電性連接於汲極區域1 1 2 0 紅（R)，綠（G)，藍（B)之著色層115係藉 層間絕緣膜1 3 4上之絕緣層1 3 9所配置著。而I 丁〇 (Indium Tin Oxide )所形成之圖素電極1 4 0係被配置於 著色層1 1 5上。該圖素電極1 4 0乃被層於著色層 1 1 5上。該圖素電極1 4 0係藉形成於絕緣層1 3 9及 著色層1 1 5之接觸孔來成電性連接於源極1 3 7。 柱狀間隔件1 4 1係配置於顯示區域A之著色層 1 1 5上之圖素電極1 4 0間之區域。柱狀間隔件1 0 1 係被配置於密封材部附近B。取向膜1 4 2係配設於基板 整面，形成覆蓋著柱狀間隔件1 4 1 ，1 0 1 ，圖素電極 14〇，著色層115。 對向於陣列基板1 0 3所配置之對向基板1 0 4係由 配置於透明基板1 4 5上之對向電極1 4 4 ’及配置成覆 蓋對向電極1 4 4的取向膜1 4 3 ’所構成。 接著，對於密封材部附近B之構造詳細地加以說明。 如圖2所示，玻璃基板1 3 1上之底子層1 3 2，閘 極絕緣膜1 3 3，層間絕緣膜1 3 4 ’絕緣層1 3 9 ’著 -------------^--------- - --f (請先閱讀背面之注咅？事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） _ 8 - 1253489 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明φ ) 色層1 1 5，取向膜1 4 2係被展延直至要配置密封材部 1 0 2之基板端爲止。而在密封材部附近Β之柱狀間隔件 1 0 1係與顯不區域Α之柱狀間隔件1 4 1由同一製程來 形成。該柱狀間隔件1 0 1乃被配置於密封材部1 〇 2中 。該柱狀間隔件1 0 1係如圖1所示，以略爲等間隔而沿 著配置成框狀之密封圖型被配置著。 詳述時係如圖3 B所示，與密封材部1 〇 2接觸之柱 狀間隔件1 0 1係由沿著密封材部1 0 2之分割線L 1所 配置的圓柱狀之第1間隔件1 0 1 b，及從該分割線L 1 分離而配置成鋸齒狀於分割線L 1兩側之第2間隔件 1〇1 a所構成。第2間隔件1 0 1 a係在平行於基板之 面內，具有略爲流線形狀之剖面。 如圖3 A所示，第1間隔件1 〇 1 b ，將在密封材之 塗佈過程中，被配置成位於由密封材3 0 2所包圍之位置 。而第2間隔件1 0 1 a則在於密封材之塗佈過程中，被 配置成位於後密封材3 0 2分離之位置，第2間隔件 1〇1 a被形成爲當在以平行於基板之面來切斷時，沿著 密封寬方向之長度a較與寬方向成正方向的長度b更長。 例如第2間隔件1 0 1 a形成具有其長軸a爲1 〇 〇 // m ，其短軸b爲5 0 //m之橢圓形之剖面，而高度爲5 · 2 μ m之柱狀。所相鄰之第2間隔件1 ◦ 1 a ，1 0 1 a間 之間隔乃設定成4 m m。該狀態係由於第2間隔件分間成 6 m m以上時，具有在基板間距離會產生不均勻之虞之緣 故。第1間隔件1 0 1 b則被形成爲具有直徑5 0 // m之 -------------訂--------- II·*ι (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9- 1253489 A7 B7 五、發明說明（7 ) 圓开〉剖面’而局度爲5 · 2 // m之圓柱狀。 (請先閱讀背面之注意事項再填寫本頁) 密封材3 0 2會在塗佈過程中，塗佈成包圍第1間隔 件1 0 1 b ，且塗佈於從第2間隔件1 0 1 a分開之區域 。而後，在於封閉2片基板之封閉過程時，密封材3 0 2 會被加壓並朝其寬方向擴展。由於密封材3 0 2之擴展而 形成如圖3 B所示，第2間隔件1 0 1 a會使一部分被包 圍於密封材部1 0 2之中，而剩餘之部分，亦即另一部分 會從密封材部1 0 2突出。第2間隔件1 0 1 a的會被配 置於密封材部1 0 2中之一部分的長軸方向長度，理想爲 密封材硬化後形成爲較密封材部1 〇 2之寬的1 / 3更小 〇 第2間隔件1 0 1 a之形狀，雖理想爲如上述之實施 例形成流線形狀，但其形狀若爲不會阻礙密封材3 0 2之 擴展時，可使用圓柱狀或方形柱狀等等之各種形狀。 經濟部智慧財產局員工消費合作社印製 圖6 A至6 C係顯示密封材硬化後之第2間隔件 1 0 1 a和密封材部1 〇 2之位置關係的槪略剖面圖。如 圖6 A所示，第2間隔件1 0 1 a雖理想爲在與基板成平 行之所有之剖面，能形成其一部分從密封材部1 0 2突出 之狀態，但亦可形成爲如圖6 B或圖6 C所示，在於一部 分之剖面，其一部分從密封材部1 0 2成突出之結構。 將使用圖7來說明有關上述之沿著密封材部1 〇 2之 寬方向的略中心之分割線。如圖7所示，塗佈於基板上之 硬化的密封材部1 0 2係擴展成朝著其寬方向之兩端部產 生少許之凹凸狀。在此，將密封材部1 0 2之寬方向的略 -10- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 1253489 A7 一1 *' — ___ 五、發明說明（8 ) 中心的聚集做爲L 1 ，並稱呼該l丨爲沿著密封材部 1〇2之寬方向的略中心之分割線。 於本貫施例’第2間隔件1 〇 1 a係在密封材硬化後 ，被配置於對於密封材部形成從分割線L丨分離且在於其 兩側。而第2間隔件1 〇 1 a亦可配置成如圖8 A所示， 從分割線L 1具有所定之距離，又亦可配置成如圖8 b所 示’將第2間隔件1 〇 1 a之端部形成與分割線l 1重疊 。亦即，只要會二等分各第2間隔件1 〇 1 a之長軸的線 段L a各以密封材部之分割線L 1爲界位於兩側，且配置 線段L a形成不會與分割線L 1成一到即可。 如以上所說明’依據本實施例之液晶裝置，能與被配 置於顯示區域之間隔件以同一製程來配置與陣列基板成一 體之間隔件於封閉區域，而使基板間隔維持於所定之範圍 ，因而可確保良好之顯示品質。要配置於封閉區域間隔件 係包括從密封材部有突出一部分之間隔件。爲此，在密封 材部中並不會產生非所期盼之氣泡，使得可確保所定之封 閉寬度。因而可增進製造良率，進而遍及長期間可確保優 異之可靠性。 又在本實施例，會與密封材接觸之間隔件係包括被配 置於密封材部分割線上之第1間隔件，及其一部分從密封 材部突出之第2間隔件。由而可企圖具有優異之面內基板 間隔之均勻性。 於本實施例，雖在陣列基板上配置間隔件成一體，但 亦可構成爲成一體於對向基板上來配置者。又亦可配置間 -------------訂--------- (請先閱讀背面之注咅？事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -11 - 1253489 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（9 ) 隔件之一部分於陣列基板上，而其他之部分配置於對向基 板上。 接著，說明有關本實施例之液晶顯示裝置1 〇 〇之製 造方法。 首先，陣列基板1 0 3係以例如下面所述之過程來製 造。 由常壓CVD (化學汽相澱積），或電漿CVD來澱 積（熔敷）做爲底子層1 3 2之氧化矽和氮化矽之膜所形 成之二層膜於玻璃等之透明基板1 3 1上。接著，以同樣 方法’澱積非晶矽層成膜厚有1 0 0 nm於底子層1 3 2 上。而後，照射準分子雷射光至非晶矽層以實施退火。由 而’能使非晶矽層成多晶化而形成多晶矽層。 接著，將多晶矽層進行圖型（圖案）形成，以形成所 期盼之形狀。接著，由C V D法來澱積氧化矽S i〇X於 覆蓋多晶矽層之整面來形成閘極絕緣膜1 3 3。其次，澱 積閘極金屬膜於該閘極絕緣膜1 3 3上，並以照相平版印 刷（光刻）技術來實施圖型形成而形成閘極1 1 3。 接著，以閘極1 1 3做爲掩蔽（遮蔽），摻雜例如磷 離子（P + )於多晶矽層。由而，將形成源極區域1 1 4及 汲極區域1 1 2於多晶矽層。而被挾持於源極和汲極之區 域1 1 4，1 1 2的區域，將做爲通道區域來產生功能。 接著，由C V D法等以覆蓋基板整面狀來澱積將成爲 層間絕緣膜1 3 4的氧化矽S 1 Ο X。其次，以貫穿層間 絕緣膜1 3 4及閘極絕緣膜1 3 3來形成會到達汲極區域 ---------—--------訂--------- -1-* (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -12- 經濟部智慧財產局員工消費合作社印製 1253489 A7 --—_____B7_ 五、發明說明（ΙΟ ) 1 1 2及源極區域1 1 4的接觸孔。接著，形成金屬膜， 並予以實施圖型形成，以形成與接觸於汲極區域1 1 2之 汲極成一體之信號線丨3 8 ，同時形成與接觸於源極區域 1 1 4之源極1 3 7。 接著，由C V D來形成以氧化矽S i Ο X和氮化矽 S 1 N X之2層構造所形成之絕緣層1 3 9。其次，以曝 光·顯像·烘乾來形成綠色之著色層115成所定之圖型 。並以同樣地且依序來形成藍色及紅色之著色層1 1 5。 續著，以使用旋轉器來塗敷黑色抗蝕劑（保護層）於 著色層1 1 5上，以8 0 °C，2分鐘之時間來烘乾後，使 用所定之光掩蔽且以波長3 6 5 nm，曝光量2 5 Om J /cm2來曝光。接著，以pHl 1 · 7之TMAH ( Ui methyl ammonium hydride ，三甲基氫化錢）水溶液來顯像 黑色保護層6 0秒鐘，並以2 2 0 t：，烘乾6 0分。由而 形成厚度5 · 2 // m之間隔件1 4 1 ，1 0 1於顯示區域 A及密封材部附近B。 接著，形成到達源極1 3 7的開口部於著色層1 1 5 及絕緣層1 3 9。而後，形成I T〇膜，並實施圖型形成 ，以形成藉開口來連接於源極1 3 7之圖素電極1 4 0。 接著，以覆蓋柱狀間隔件1 4 1，1 0 1，圖素電極 1 4 0，著色層1 1 5之狀態來配設取向膜1 4 2於基板 整面。 由而，可製造出陣列基板1 0 3。 另一方面，對向基板1 0 4係由依序形成對向電極 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） —13- .—--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 1253489 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（11 ) 1 4 4，取向膜1 4 3於玻璃等之透明基板1 4 5上來製 造。 而後’以如圖1 ’使用調合器（dispenser )或掩膜圖 型來塗敷熱硬化型封閉材料於陣列基板1 〇 3上。該時， 塗敷封閉材之後的寬度爲約3 5 0〜4 0 0 m m，並配設 將在後過程成爲液晶注入孔之開口部一處，且沿著顯示區 域之外周塗敷成框狀，在此爲塗敷成矩形狀。 接著’重疊陣列基板1 〇 3和對向基板1 0 4成電極 形成面互爲對向之後，以藉沿著顯示區域外周塗敷成框狀 之密封劑來緊密貼著，使成封閉貼合。陣列基板1 〇 3和 對向基板1 0 4之間隔，乃設定成由上述之間隔件所規定 之 5 · 2 # m。 密封劑之封閉係由空氣加壓封閉之方式來進行。 如圖4所示，真空加壓方式之封閉裝置係具備托盤 4 2 1及加壓片4 2 3於上I R (紅外線）加熱器4 2 5 和下I R加熱器4 2 6之間。而托盤4 2 1上，將載置藉 封閉劑來重疊陣列基板及對向基板所形成之單元（Cell ) 4 2 0。將以加壓片4 2 3來被覆被載置於托盤4 2 1上 之單元整體，而抽加壓片4 2 3和托盤4 2 1間成真空來 加壓單元。 亦即，由如此之封閉裝置，首先，予以載置單元 4 2 0於托盤4 2 1上，並對準位置。接著，以加壓片 4 2 3來被覆單元4 2 0且以框片4 2 2固定。接著，驅 動真空吸取裝置而從真空吸取口 4 2 4 (未圖示）吸取空 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） _ - -------------^--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 1253489 A7 ____B7 五、發明說明（13 ) ’也由於配設了第2間隔件，則其一部分被配置於密封材 部中，而其他部分從密封材部中突出之間隔件，使得亦可 抑制氣泡之產生。又被密封材部所包圍且所分割線分離所 配置之間隔件之剖面形狀，倘若具有流線形且該長軸方向 之長度與密封材部的寬度方向長度大致形成一致時，更能 抑制氣泡之產生。 又在要加壓單元之前的狀態下，甚至配置柱狀間隔件 成未與密封材接觸時，或配置柱狀間隔件成部分性地接觸 於密封材的狀態時，倘若在加壓後，令第2間隔件之一部 分配置成會從密封材部突出時，就可防止產生氣泡。 接著，說明有關本發明之其他實施例的密封材附近之 構造。 如圖1 Ο A至圖1 0 C所示，柱狀間隔件1 〇 1係在 密封材形成區域內，以沿著矩形之密封形狀來配置。亦即 ，如圖1 Ο B所示，接觸於密封材部1 0 2之柱狀間隔件 1 0 1 ，係由從分割線L 1分離所配置之間隔件1 〇 1 a ，及沿著分割線L 1所配置之間隔件1 0 1 b所構成。該 等間隔件1 0 1係被配置於陣列基板1 0 3上成固定狀。 將說明密封材附近之柱狀間隔件1 0 1和密封材的位 置關係。如圖3 A所示，當在塗佈密封材時，在密封材塗 佈區域外，設置間隔件1 0 1 a於沿著密封材3 0 2之兩 側，而在密封材塗佈區域內，設置有圓柱狀之間隔件 1 0 1 b。間隔件1 0 1 a係密封寬度方向之長度a較與 該寬度方向成正交之方向的長度b更長’且以平行於基板 -------------tr--------- ••I (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -16- 1253489 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（14 ) 之面切斷時之剖面形狀爲流線形。例如，間隔件1 0 1 a 乃被形成爲其長軸a爲1 0 0 //m，短軸b具有5 0 //m 之橢圓形之剖面，而高度爲5 · 2 // m之柱狀。間隔件 1 0 1 b乃被形成爲具有直徑5 0 //m之圓形剖面，高度 爲5 . 2 “ m的圓柱狀。 柱狀間隔件1 0 1 a係如圖1 〇 B及圖1 0 C所示’ 由於在封閉過程之密封材之擴展而其周圍完全由密封材部 1 0 2所包圍。爲此，密封材硬化後，柱狀間隔件 1 0 1 a就形成存在於密封材部1 0 2中。 柱狀間隔件1 0 1 a乃爲了不阻礙密封材3 0 2之擴 展，而以平行於基板之面所切斷時之剖面形成橢圓型等之 流線形之形狀。亦即，密封材3 0 2將會朝其寬度方向擴 展。爲使柱狀間隔件1 0 1 a不會阻礙密封材3 0 2之擴 展，柱狀間隔件1 0 1 a乃配置成其剖面之長軸方向能與 密封材3 0 2之擴展方向成平行。換言之，柱狀間隔件 1〇1 a之長軸方向，和與該間隔件在於最短距離之密封 材3 0 2的一邊伸出方向，大致成爲垂直之關係。再者， 柱狀間隔件1 0 1 a之剖面形狀大小，非爲一定亦可。 柱狀間隔件1 0 1 a將設置於從塗佈過程所塗佈之密 封材3 0 2以距離C言，有分離40〜5 0 //m之處。該 時，柱狀間隔件1 0 1 a乃配置成其剖面之長軸方向和密 封材3 0 2之一邊伸出方向具有成垂直之關係，換言之， 配置間隔件之長軸方向和密封材之寬度方向大致能成平行 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -17- -------------1T--------- ··- (請先間讀背面之注意事項再填寫本頁) 1253489 A7 B7 五、發明說明（15 ) 又互成相鄰之柱狀間隔件1 Q 1 a和1 0 1 a /的間 隔’理想爲6 m m以下。因柱狀間隔件當分離有6 m m以 上時’會在基板間距離具有產生不均勻之虞。柱狀間隔件 1 0 1 a因在密封部分對於要保持基板間距離可執行重要 之角色，因而設置成密封材硬化後，能位於以要等分密封 材形成區域爲二用之分割線L 1所分爲二個區域之兩方區 域。柱狀間隔件1 〇 1 a在於密封材之塗佈過程，會位於 要塗佈密封材之密封材塗佈區域之兩旁。如圖1 〇 B所示 ’柱狀間隔件1 0 1 a係設置於沿著密封材塗佈區域且在 於其兩側’並設置成鋸齒狀。因此，重疊對向基板之單元 ，會在密封材形成區域附近可保持基板間距離成均勻。 又在本實施例，柱狀間隔件乃被設置固定於密封材形 成區域之分割線L 1上及其兩旁。因此，柱狀間隔件可均 勻地設置於密封材形成區域，使得可均勻地保持密封材的 基板間距離。 柱狀間隔件之形狀並非被限定於上述形狀而已，只要 在進行密封材的封閉而擴展時，並不會阻礙密封材之移動 的形狀就可，而柱狀間隔件之材質和構造，並非被上述實 施例所限定者。 例如，將在圖1 1 A至圖1 1 F顯示可適用於本發明 之柱狀間隔件的水平於基板之剖面形狀。 圖1 1 C爲橢圓形者，適用於上述之實施例者。做爲其他 之剖面形狀之例子，亦可爲如圖1 1 A及圖1 1 B所示之 流線形，或如圖1 1 D所示之四角形，或如圖1 1 E所示 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注咅？事項再填寫本頁)V. Description of invention (5) Polycrystalline germanium layer printed by the employee consumption cooperative of the Intellectual Property Office of the Ministry of Economic Affairs; forming a gate insulating film 13 3 covering the same; and a gate 1 disposed on the gate insulating film 13 3 1 3 constitutes. The source 1 3 7 is electrically connected to the source region 1 1 4 by being formed in the gate insulating film 133 and the interlayer insulating film 134 contact hole. The gate electrode integrated into the is line 1 3 8 is electrically connected to the drain region 1 1 2 0 red by the contact hole formed in the gate insulating film 13 3 and the interlayer insulating film 13 4 . The color layer 115 of green (G) and blue (B) is disposed by the insulating layer 139 on the interlayer insulating film 134. The pixel electrode 140 formed by Indium Tin Oxide is disposed on the colored layer 115. The pixel electrode 140 is layered on the colored layer 1 15 . The pixel electrode 140 is electrically connected to the source 137 by a contact hole formed in the insulating layer 139 and the colored layer 151. The columnar spacers 1 4 1 are disposed in a region between the pixel electrodes 1 40 on the color layer 1 15 of the display region A. The columnar spacer 1 0 1 is disposed in the vicinity of the seal member B. The alignment film 142 is disposed on the entire surface of the substrate, and is formed to cover the columnar spacers 1 4 1 , 1 0 1 , the pixel electrodes 14A, and the colored layer 115. The counter substrate 1 0 4 disposed on the array substrate 110 is composed of a counter electrode 1 4 4 ' disposed on the transparent substrate 145 and an alignment film 14 disposed to cover the counter electrode 14 4 3 'constituted. Next, the structure of the vicinity B of the sealing material portion will be described in detail. As shown in FIG. 2, the base layer 133 on the glass substrate 131, the gate insulating film 133, the interlayer insulating film 134' insulating layer 139'--------- ----^--------- - --f (Please read the note on the back? Please fill out this page again) This paper scale applies to China National Standard (CNS) A4 specification (210 X 297厘) _ 8 - 1253489 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau Employees Consumption Cooperative Printed 5, Invention Description φ ) Color layer 1 1 5, oriented film 1 4 2 is stretched until the substrate of the sealing material part 1 0 2 is to be arranged So far. On the other hand, the columnar spacers 1 0 1 in the vicinity of the sealing material portion are formed by the same process as the columnar spacers 1 4 1 in the display region. The columnar spacer 110 is disposed in the sealing material portion 1 〇 2 . The columnar spacers 10 1 are arranged along the seal pattern arranged in a frame shape at slightly equal intervals as shown in Fig. 1 . In the detailed description, as shown in FIG. 3B, the columnar spacer 10 1 in contact with the sealing material portion 1 〇 2 is the first columnar shape arranged along the dividing line L 1 of the sealing member portion 120. The spacer 1 0 1 b is formed by being separated from the dividing line L 1 and arranged in a zigzag manner on the two spacers 1 〇 1 a on both sides of the dividing line L 1 . The second spacer 1 0 1 a has a slightly streamlined cross section in a plane parallel to the substrate. As shown in Fig. 3A, the first spacer 1 〇 1 b is disposed to be positioned at a position surrounded by the sealing member 306 during the application of the sealing material. The second spacer 1 0 1 a is disposed in a position where the rear sealing member 306 is separated during the coating process of the sealing material, and the second spacer 1 〇 1 a is formed to be parallel to the substrate. When the surface is cut, the length a along the seal width direction is longer than the length b which is positive in the width direction. For example, the second spacer 1 0 1 a is formed into an elliptical profile having a major axis a of 1 〇〇//m and a minor axis b of 50 //m, and a columnar height of 5 · 2 μ m. . The interval between the adjacent second spacers 1 ◦ 1 a and 1 0 1 a is set to 4 m m. In this state, when the second spacer is divided into 6 m or more, the distance between the substrates may be uneven. The first spacer 1 0 1 b is formed to have a diameter of 5 0 // m ------------- order --------- II·*ι (please first Read the notes on the back and fill out this page. This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -9- 1253489 A7 B7 V. Description of invention (7) Round opening > section ' It is a cylindrical shape of 5 · 2 // m. (Please read the precautions on the back and fill out this page.) The sealing material 3 0 2 will be applied to surround the first spacer 1 0 1 b during the coating process and applied to the second spacer 1 0 1 a separate area. Then, in the sealing process of closing the two substrates, the sealing material 300 is pressurized and spreads in the width direction thereof. As shown in FIG. 3B, the second spacer 10 1 a will surround a portion of the sealing material portion 102, and the remaining portion, that is, the other portion will be formed as shown in FIG. 3B. It protrudes from the sealing material part 1 0 2 . The second spacer 1 0 1 a is disposed in the longitudinal direction of one of the sealing member portions 120, and is preferably formed to have a width of 1 / 3 of the sealing member portion 1 〇 2 after the sealing member is cured. The shape of the second spacer 1 0 1 a is preferably a streamline shape as in the above embodiment, but if the shape is such that it does not hinder the expansion of the sealing material 320, a cylindrical or square column can be used. Shapes and so on. Printed by the Intellectual Property Office of the Ministry of Economic Affairs, the Consumers' Cooperatives. Figure 6 A to 6 C shows a schematic cross-sectional view of the positional relationship between the 1st spacer 1 0 1 a and the sealing material 1 〇 2 after the sealing material has been hardened. As shown in FIG. 6A, the second spacer 10 1 a is preferably in a state in which all of the cross sections parallel to the substrate are formed so that a part thereof protrudes from the sealing member portion 102, but may be formed as shown in the figure. 6B or FIG. 6C shows a part of the cross section, and a part thereof protrudes from the sealing material portion 102. A dividing line about the above-mentioned center in the width direction of the sealing member 1 〇 2 will be described with reference to Fig. 7 . As shown in Fig. 7, the hardened seal member portion 10 2 applied to the substrate is expanded to have a slight uneven shape toward both end portions in the width direction. Here, the paper size of the seal material part 1 0 2 is applied to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). The Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative prints 1253489 A7 1 *' — ___ V. DESCRIPTION OF THE INVENTION (8) The center gathers as L 1 and is referred to as a dividing line which is slightly centered in the width direction of the sealing member portion 1〇2. In the present embodiment, the second spacer 1 〇 1 a is disposed after the sealing material is cured, and is disposed on the sealing material portion so as to be separated from the dividing line L丨 and on both sides thereof. The second spacer 1 〇1 a may also be arranged as shown in FIG. 8A, having a predetermined distance from the dividing line L1, or may be configured to 'the second spacer 1 〇1 as shown in FIG. 8b. The end portion of a is overlapped with the dividing line l1. That is, as long as the line segments La which are bisected to the long axis of each of the second spacers 1 〇 1 a are located on both sides with the dividing line L 1 of the sealing member portion, the arrangement line segment L a is formed without division. Line L 1 can be made one by one. As described above, according to the liquid crystal device of the present embodiment, the spacers integrated with the array substrate can be disposed in the closed region in the same process as the spacers disposed in the display region, and the substrate spacing can be maintained within a predetermined range. This ensures good display quality. The spacer to be disposed in the enclosed area includes a spacer having a protruding portion from the sealing portion. For this reason, undesired bubbles are not generated in the sealing portion, so that the predetermined closing width can be ensured. Therefore, the manufacturing yield can be improved, and the reliability of the superiority can be ensured over a long period of time. Further, in the present embodiment, the spacer which is in contact with the sealing material includes a first spacer which is disposed on the dividing line of the sealing member portion, and a second spacer which protrudes from the sealing portion. It is thus possible to attempt to have an excellent uniformity of the in-plane substrate spacing. In the present embodiment, the spacers are integrally formed on the array substrate, but they may be configured to be integrated on the counter substrate. It can also be configured ------------- order--------- (please read the note on the back? Please fill out this page first) This paper scale applies to Chinese national standards. (CNS) A4 Specification (210 X 297 mm) -11 - 1253489 Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Printed A7 B7 V. Invention Description (9) One of the spacers is on the array substrate, and the other parts are placed on On the opposite substrate. Next, a method of manufacturing the liquid crystal display device 1 of the present embodiment will be described. First, the array substrate 103 is fabricated by, for example, the process described below. A two-layer film formed by a film of ruthenium oxide and tantalum nitride as a base layer 133 by atmospheric pressure CVD (Chemical Vapor Deposition) or plasma CVD is transparent to glass or the like. The substrate 1 3 1 is on. Next, an amorphous germanium layer was deposited in the same manner to a film thickness of 100 nm on the bottom layer 13 2 . Then, excimer laser light is irradiated to the amorphous germanium layer to perform annealing. Thus, the amorphous germanium layer can be polycrystallized to form a polycrystalline germanium layer. Next, the polycrystalline germanium layer is patterned (patterned) to form the desired shape. Next, a ruthenium oxide S i 〇 X is deposited by the C V D method to cover the entire surface of the polysilicon layer to form a gate insulating film 13 3 . Next, a gate metal film is deposited on the gate insulating film 13 3, and pattern formation is performed by photolithography (lithography) technique to form a gate electrode 113. Next, the gate electrode 1 1 3 is used as a mask (mask) to dope, for example, phosphorus ions (P + ) to the polysilicon layer. Thus, the source region 1 14 and the drain region 1 1 2 are formed on the polysilicon layer. The area that is held in the source and bungee regions 1 1 4, 1 1 2 will function as a channel area. Next, the ruthenium oxide S 1 Ο X to be the interlayer insulating film 134 is deposited by the C V D method or the like over the entire surface of the substrate. Secondly, the interlayer insulating film 134 and the gate insulating film 13 3 are formed to reach the drain region--------------------- --- -1-* (Please read the note on the back and fill out this page) This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) -12- Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative Printed 1253489 A7 ---_____B7_ V. Description of the invention (ΙΟ) 1 1 2 and the contact hole of the source region 1 1 4 . Next, a metal film is formed and patterned to form a signal line 丨3 8 integral with the drain of the drain region 1 1 2 while forming a source contact with the source region 1 1 4 1 3 7. Next, an insulating layer 139 formed of a two-layer structure of yttrium oxide S i Ο X and tantalum nitride S 1 N X is formed from C V D . Next, the green coloring layer 115 is formed into a predetermined pattern by exposure, development, and drying. The blue and red coloring layers 1 15 are formed in the same manner and in sequence. Continued, using a spinner to apply a black resist (protective layer) on the colored layer 1 15 , drying at 80 ° C for 2 minutes, masking with the specified light and at wavelength 3 6 5 nm, exposure 2 5 Om J /cm2 to expose. Next, a black protective layer was imaged with an aqueous solution of TMAH (Ui methyl ammonium hydride) at pH 1 · 7 for 60 seconds, and dried at 20 2 t: for 60 minutes. Thus, spacers 1 4 1 and 1 0 1 having a thickness of 5 · 2 / m are formed in the display area A and the vicinity B of the sealing material portion. Next, an opening portion reaching the source electrode 137 is formed on the colored layer 1 15 and the insulating layer 139. Then, an I T tantalum film is formed, and pattern formation is performed to form a pixel electrode 1 40 that is connected to the source electrode 13 through an opening. Next, the alignment film 142 is disposed on the entire surface of the substrate in a state of covering the columnar spacers 1 4 1,1 0 1 , the pixel electrodes 1 400, and the colored layer 1 15 . Thus, the array substrate 103 can be manufactured. On the other hand, the opposite substrate 1 0 4 is formed by sequentially forming the counter electrode. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) —13-.--------- --------- (Please read the note on the back and fill out this page) 1253489 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed A7 B7 V. Invention Description (11) 1 4 4, Orientation Film 1 4 3 Manufactured on a transparent substrate 145 such as glass. Then, a thermosetting sealing material is applied onto the array substrate 1 〇 3 by using a dispenser or a mask pattern as shown in Fig. 1'. At this time, the width after the application of the sealing material is about 305 to 4,000 mm, and is disposed at a position which becomes a liquid crystal injection hole in the subsequent process, and is applied in a frame shape along the outer periphery of the display region. Here, it is applied in a rectangular shape. Then, after the overlapping array substrate 1 〇3 and the counter substrate 104 are opposed to each other, the sealing layer is applied to the outer periphery of the display region to be closely adhered to form a closed fit. . The interval between the array substrate 1 〇 3 and the counter substrate 104 is set to 5 · 2 # m defined by the above-described spacer. The sealing of the sealant is carried out by means of air pressure closure. As shown in Fig. 4, the vacuum pressurization type closing device is provided with a tray 4 2 1 and a pressure piece 4 2 3 between the upper I R (infrared) heater 4 2 5 and the lower I R heater 4 2 6 . On the tray 4 2 1 , a cell (Cell) 420 formed by overlapping the array substrate and the counter substrate is placed on the tray. The entire unit placed on the tray 4 2 1 is covered with a pressing piece 4 2 3 , and the pressing unit is vacuumed between the pressing piece 4 2 3 and the tray 4 2 1 to pressurize the unit. That is, with such a closing device, first, the unit 420 is placed on the tray 4 2 1 and aligned. Next, the unit 4 2 0 is covered with the pressing piece 4 2 3 and fixed by the frame piece 42 2 . Next, the vacuum suction device is driven to draw the empty paper from the vacuum suction port 4 2 4 (not shown). The Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applied _ - -------- -----^--------- (Please read the note on the back and then fill out this page) Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed 1253489 A7 ____B7 V. Invention description (13) 'also When the second spacer is disposed, a part of the spacer is disposed in the sealing member, and the other portion protrudes from the sealing member, so that generation of bubbles can be suppressed. Further, when the cross-sectional shape of the spacer which is surrounded by the sealing member and which is separated by the dividing line is formed in a streamlined shape and the length in the longitudinal direction substantially coincides with the length in the width direction of the sealing member, the bubble can be more suppressed. produce. Further, in a state before the pressurizing unit, even when the columnar spacer is placed in contact with the sealing material, or when the columnar spacer is partially in contact with the sealing material, if it is pressurized, When one of the second spacers is arranged to protrude from the sealing member, generation of air bubbles can be prevented. Next, the configuration in the vicinity of the sealing material according to another embodiment of the present invention will be described. As shown in Fig. 1 Ο A to Fig. 10C, the columnar spacers 1 〇 1 are arranged in the sealing material forming region to be arranged along the rectangular sealing shape. That is, as shown in FIG. 1B, the columnar spacers 110 associated with the sealing material portion 102 are separated from the dividing line L1 by the spacers 1 〇 1 a and along the dividing line. The spacer 1 1 1 b is disposed on the line L 1 . The spacers 10 1 are arranged in a fixed shape on the array substrate 110. The positional relationship of the columnar spacers 110 in the vicinity of the sealing material and the sealing material will be explained. As shown in FIG. 3A, when the sealing material is applied, outside the sealing material coating area, spacers 10 1 a are provided on both sides of the sealing material 30 2, and in the sealing material coating area. , a cylindrical spacer 10 1 b is provided. The spacer 1 0 1 a has a length a in the sealing width direction longer than a length b in a direction orthogonal to the width direction 'and parallel to the substrate -------------tr-- ------- ••I (Please read the note on the back and fill out this page) This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -16- 1253489 A7 B7 Ministry of Economic Affairs The Intellectual Property Bureau employee consumption cooperative printed five, the invention description (14) when the surface is cut, the cross-sectional shape is streamlined. For example, the spacer 1 0 1 a is formed such that its major axis a is 1 0 0 //m, the minor axis b has an elliptical profile of 5 0 //m, and the height is 5 · 2 // m shape. The spacer 1 0 1 b is formed into a circular cross section having a diameter of 50 //m, and the height is 5. 2" m in a cylindrical shape. The columnar spacer 1 0 1 a is as shown in Fig. 1 〇B and Fig. 1 0 C shows that due to the expansion of the sealing material in the sealing process, the surrounding area is completely surrounded by the sealing material portion 120. For this reason, after the sealing material is hardened, the columnar spacers 10 1 a are formed in the sealing material. The columnar spacer 1 0 1 a is formed in a streamlined shape such as an elliptical shape such that the cross section is cut parallel to the surface of the substrate so as not to hinder the expansion of the sealing material 306. That is, the sealing material 300 will expand in the width direction thereof. In order for the columnar spacer 1 0 1 a not to hinder the expansion of the sealing material 306, the columnar spacer 10 1 a is configured to have a cross section thereof. The direction of the major axis can be parallel to the direction of extension of the sealing material 300. In other words, the direction of the long axis of the columnar spacer 1〇1 a and the direction of extension of the side of the sealing material 3 0 2 which is the shortest distance from the spacer It is roughly perpendicular. Further, the cross-sectional shape of the column spacer 10 1 a may not be constant. Column spacer 1 0 1 a will be disposed in the sealing material applied from the coating process 3 0 2 at a distance of C, there is a separation of 40 ~ 50 @ / m. At this time, the column spacer 10 1 a is configured as its profile The direction of the long axis and the direction of the extension of the sealing member 3 0 2 have a perpendicular relationship. In other words, the direction of the long axis of the spacer and the width direction of the sealing material can be substantially parallel to the paper scale applicable to the Chinese National Standard (CNS) A4. Specifications (210 X 297 mm) -17- -------------1T--------- ··- (Please read the back of the note first and then fill out this page 1253489 A7 B7 V. INSTRUCTIONS (15) The adjacent columnar spacers 1 Q 1 a and 1 0 1 a / the interval 'ideal is 6 mm or less. Because the column spacers are separated by 6 mm In the above case, there will be unevenness in the distance between the substrates. The columnar spacers 10 1 a can perform an important role in maintaining the distance between the substrates in the sealing portion, and thus can be placed in a sealed material after being hardened. The dividing material forming region is divided into two regions in which the dividing line L 1 is divided into two regions. The columnar spacer 1 〇 1 a is in the sealing material. The cloth process will be located on both sides of the sealing material coating area where the sealing material is to be applied. As shown in Fig. 1 〇B, the columnar spacers 10 1 1 are disposed along the sealing material coating area and on both sides thereof. 'And it is arranged in a zigzag shape. Therefore, the unit overlapping the opposite substrate can keep the distance between the substrates uniform in the vicinity of the sealing material forming region. In the present embodiment, the column spacer is fixed to the sealing material forming region. The dividing line L 1 is on both sides. Therefore, the columnar spacers can be uniformly disposed in the seal material forming region, so that the distance between the substrates of the seal material can be uniformly maintained. The shape of the columnar spacer is not limited to the above shape, and may be a shape that does not hinder the movement of the sealing material when the sealing material is expanded and expanded, and the material and structure of the column spacer are not The above embodiments are defined. For example, the cross-sectional shape of the substrate which is applicable to the columnar spacer of the present invention will be shown in Figs. 1 1 A to 1 1 F. Fig. 1 1 C is an elliptical shape, which is suitable for the above embodiments. As an example of other cross-sectional shapes, it may be a streamline as shown in FIG. 1 1 A and FIG. 1 1 B, or a quadrangle as shown in FIG. 1 1 D, or as shown in FIG. Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the note on the back? Please fill out this page again)
,ρ 丁 - n βϋ 1 «ϋ _1 ϋ I 、 ϋ i^i ϋ I 經濟部智慧財產局員工消費合作社印製 -18- 1253489 A7 _______B7___ 五、發明說明（16 ) (請先閱讀背面之注意事項再填寫本頁) 之六角形等之多角形。又亦可爲如圖1 1 F所示，剖面形 狀係組合長方形和半圓之流線形。無論任何之狀態，剖面 形狀係使沿著密封材部寬度方向之長度成爲較與寬度方向 成正父之方向爲長。亦即，柱狀間隔件係在於進行封閉密 封材而擴展時，並不會對於密封材的其擴展方向形成阻礙 ’而予以形成爲密封材之擴展方向和間隔件之長軸方向大 致形成平行之形狀。 以如此，在於本實施例，於柱狀間隔件剖面的長軸方 向，和與柱狀間隔件在於最短距離之密封材一邊之伸延方 向具有大致成垂直之位置關係之同時，柱狀間隔件之長軸 方向和密封材之擴展方向大致具有平行之位置關係。因此 ，可抑制產生氣泡於完全被密封材所包圍之柱狀間隔件的 周邊。 以與具有流線形之間隔件長軸方向大致予以形成一致 ，就可獲得具有無氣泡存在之密封材的液晶顯示裝置。 接著，對於本發明之其他實施例加以說明。 經濟部智慧財產局員工消費合作社印製 在上述實施例，被配置於密封材塗佈區域內之柱狀間 隔件，雖配置於分割線L 1上，但亦可從分割線L 1成分 離狀來配置。亦即，如圖1 2 A所示，柱狀間隔件1〇1 只要預先配置於在塗佈密封材時，可由所塗佈之密封材完 全被包圍之位置即可。以如此所配置之柱狀間隔件1〇1 係如圖1 2 B所示，甚至密封材部1 0 2擴展之後，並不 會產生氣泡於周圍，且大致上能以均勻的密封寬度來封閉 單元。又在密封材形成區域外，亦可配置柱狀間隔件 -19- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1253489 A7 __ —____B7 _ 五、發明說明（17 ) 1 0 1 > 。該柱狀間隔件1 0 1 /因配置於塗佈密封材時 和’硬化時，不會與密封材接觸之位置，因而並不會產生 氣泡。以如此，由於具有埋入於密封材之間隔件1 0 1和 在於密封材形成區域外之間隔件1 0 1 /，因此，可實現 具有均勻之基板間隔的液晶顯示裝置。 於上述實施例，做爲密封材所使用之熱硬化型樹脂系 黏著劑，乃具有如下之特性。 密封材乃具有如圖1 3至圖1 5的溫度特性。亦即， 在壓力0 · 4kg f/cm2之條件下而以1 〇°C/mi η 之速度溫升時，直至5 0 t爲止，擴展速度最大爲1 7% / s e c ，然而，在於5 5至7 0 t：之間時，擴展速度成 爲42至81%/sec。 又如上述實施例，在適用多晶矽層於T F T之半導體 層的液晶顯示裝置，可令驅動電路在與要形成T F T之基 板爲同一基板上予以同時形成。在於如此之驅動電路一體 型液晶顯示裝置，爲了要獲取基板之有效顯示區域，有重 疊密封材部部和驅動電路之情事。通常，密封材乃爲了保 持二片基板間之基板間距離而含有纖維，然而要形成重疊 密封材部和驅動電路之構造時，纖維具有會破壞驅動電路 之虞。 爲此，理想爲使用不含纖維之密封材（密封劑），而 使用如如此之密封材時，就需要在密封材部附近設置間隔 件。爲此，對於密封材部附近之間隔件和密封材部之位置 關係，適用本發明時，最有效。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）· 20 - (請先閱讀背面之注意事項再填寫本頁) 訂丨丨丨丨丨丨丨· 經濟部智慧財產局員工消費合作社印製 1253489 A7 B7 五、發明說明（18 ) 又在上述實施例，柱狀間隔件乃配置固定於陣列基板 上’且塗佈密封材於陣列基板上，但柱狀間隔件亦可不需 要配置於要塗佈密封材之基板側。亦可構成爲例配置柱狀 間隔件於一方基板，另一方基板上予以塗佈密封材。 又在上述實施例’雖使用形成圖素電極於陣列基板側 ’並形成對向電極於對向基板側之液晶顯示裝置，但本發 明亦可適用於如I P C ( In Plane Switching )模態，做爲 顯示用電極圖型予以配置對向電極及圖素電極於一方基板 的液晶顯示裝置。再者，在上述實施例，雖以使用液晶於 光調變層之液晶顯示裝置爲例來說明，但並不限定於此而 已’亦可爲對於光調變層配設螢光體等之發光層的E L ( Electro Luminescence )顯示裝置等。 依據本發明之平面顯示裝置及其製造方法，因對於至 少一方基板成一體地來形成間隔件，因此，可保持均勻之 基板間隔之同時，也不會產生氣泡等於密封材部中，使得 可獲取優異於可靠性及製造良率之平面顯示裝置。 〔圖式之簡單說明〕 圖1係有關本發明之一實施例的液晶顯示裝置之槪略 斜視（立體）圖。 圖2係沿著圖1中之I I 一 I I線所切斷之部分槪略 剖面圖。 圖3A及圖3 B係圖1中之區域C之槪略平面圖，圖 3 A係顯示塗佈密封材時之密封材與間隔件的配置關係圖 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注音？事項再填寫本頁) -#--------^--------- 經濟部智慧財產局員工消費合作社印製 -21 -,ρ丁- n βϋ 1 «ϋ _1 ϋ I 、 ϋ i^i ϋ I Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed -18- 1253489 A7 _______B7___ V. Invention Description (16) (Please read the notes on the back first) Fill in this page again) Polygons such as hexagons. Alternatively, as shown in Fig. 1 1 F, the cross-sectional shape combines a streamline shape of a rectangle and a semicircle. In any state, the cross-sectional shape is such that the length along the width direction of the sealing member portion is longer than the direction in which the width direction is the father. That is, the columnar spacer is formed so that the expansion direction of the sealing material does not form an obstruction when the sealing material is expanded, and the expansion direction of the sealing material and the long axis direction of the spacer are substantially parallel. shape. In this embodiment, in the longitudinal direction of the cross section of the columnar spacer, and the extending direction of the side of the sealing material at the shortest distance from the columnar spacer, the position of the columnar spacer is substantially perpendicular thereto. The direction of the long axis and the direction of expansion of the sealing material have approximately parallel positional relationships. Therefore, generation of bubbles can be suppressed from the periphery of the columnar spacer which is completely surrounded by the sealing member. A liquid crystal display device having a sealing material free from air bubbles can be obtained by substantially conforming to the longitudinal direction of the spacer having a streamline shape. Next, other embodiments of the present invention will be described. In the above-described embodiment, the columnar spacer disposed in the sealing material application region is disposed on the dividing line L1, but may be separated from the dividing line L1. To configure. That is, as shown in Fig. 12A, the columnar spacers 1〇1 may be disposed in advance at a position where the applied sealing material is completely surrounded when the sealing material is applied. The columnar spacer 1〇1 thus configured is as shown in FIG. 1 2 B, and even after the sealing material portion 102 expands, no bubble is generated around, and the sealing can be substantially closed with a uniform sealing width. unit. In addition to the sealing material forming area, column spacers can also be configured-19- This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 1253489 A7 __ —____B7 _ V. Invention description (17) 1 0 1 > . The columnar spacer 1 0 1 / is disposed at a position where it does not come into contact with the sealing material when it is applied to the sealing material and when it is hardened, so that no air bubbles are generated. Thus, since the spacer 10 1 embedded in the sealing material and the spacer 10 1 / 2 located outside the sealing material forming region are provided, a liquid crystal display device having a uniform substrate interval can be realized. In the above embodiment, the thermosetting resin-based adhesive used as the sealing material has the following characteristics. The sealing material has temperature characteristics as shown in Figs. That is, under the condition of a pressure of 0 · 4kg f/cm 2 and a temperature rise of 1 〇 ° C / mi η , the expansion speed is up to 1 7% / sec up to 50 t, however, it is 5 5 When it is between 70 t:, the expansion speed is 42 to 81%/sec. Further, as in the above embodiment, in the liquid crystal display device to which the polycrystalline germanium layer is applied to the semiconductor layer of T F T , the driving circuit can be formed simultaneously on the same substrate as the substrate on which the T F T is to be formed. In such a drive circuit-integrated liquid crystal display device, in order to obtain an effective display area of the substrate, there is a case where the sealing member portion and the drive circuit are overlapped. Generally, the sealing material contains fibers in order to maintain the distance between the substrates between the two substrates. However, when the structure in which the sealing member and the driving circuit are overlapped is formed, the fibers have a tendency to damage the driving circuit. For this reason, it is desirable to use a fiber-free sealing material (sealant), and when such a sealing material is used, it is necessary to provide a spacer near the sealing material portion. For this reason, it is most effective when the present invention is applied to the positional relationship between the spacer and the seal member in the vicinity of the seal member. This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) · 20 - (Please read the notes on the back and fill out this page) Order 丨丨丨丨丨丨丨 · Ministry of Economic Affairs Intellectual Property Bureau employees Consumer Cooperatives Printed 1253489 A7 B7 V. Inventive Description (18) In the above embodiment, the column spacers are disposed on the array substrate and the sealing material is coated on the array substrate, but the column spacers may not be required. It is disposed on the substrate side to which the sealing material is to be applied. Alternatively, the columnar spacer may be disposed on one of the substrates, and the other of the substrates may be coated with a sealing material. Further, in the above embodiment, the liquid crystal display device in which the counter electrode is formed on the side of the array substrate and the counter electrode is formed on the counter substrate side is used, but the present invention can also be applied to an modality such as IPC (In Plane Switching). A liquid crystal display device in which a counter electrode and a pixel electrode are disposed on one substrate for display electrode patterns. Further, in the above embodiment, the liquid crystal display device using the liquid crystal in the light modulation layer has been described as an example. However, the present invention is not limited thereto, and the light modulation layer may be provided with a phosphor or the like. EL (Electro Luminescence) display device of the layer. According to the flat display device and the method of manufacturing the same of the present invention, since the spacer is integrally formed on at least one of the substrates, the uniform substrate interval can be maintained, and no bubble is generated in the sealing member portion, so that the spacer can be obtained. A flat display device that is superior to reliability and manufacturing yield. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic oblique (stereo) view of a liquid crystal display device according to an embodiment of the present invention. Fig. 2 is a partial cross-sectional view taken along the line I I - I I in Fig. 1. 3A and FIG. 3B are schematic plan views of the area C in FIG. 1, and FIG. 3A shows the arrangement relationship of the sealing material and the spacer when the sealing material is applied. The paper size is applicable to the Chinese National Standard (CNS) A4 specification. (210 X 297 mm) (Please read the phonetic transcription on the back? Please fill out this page again) -#--------^--------- Ministry of Economic Affairs, Intellectual Property Bureau, Staff Consumption Cooperatives System-21 -