TWI251527B - Wire saw capable of cutting curves - Google Patents

Abstract

This invention relates to a wire saw capable of cutting curves, including: a machine bed; a roller system, a clamp set; a movable mechanism and a swing mechanism. The machine bed serves as the primary support structure for the entire wire saw. The roller system includes plural rollers for stretching the sawing wire into a tensioned state. The clamping set serves to clamp and rotate a workpiece. The movable mechanism serves to support the clamping set and is capable of moving over the machine bed in a horizontal and a vertical direction for driving movement of the workpiece. The swing mechanism is pivoted to the machine bed and includes to guiding heads. The two guiding heads are, respectively, provided at opposing sides of the workpiece, and serve to support and guide the sawing wire. When the swing mechanism swings, the sawing wire contacts and cuts the workpiece. As such, curves may be cut on a wafer so as to significantly increase throughput of each wafer and to reduce manufacturing cost.

Description

1251527 柒, designated representative map: (1) The representative representative of the case is: (3). (2) A brief description of the components of the representative drawing: 3 The wire saw cutting machine 31 The machine main body 32 The liquid wheel system 33 The cool set 34 The moving mechanism 35 The rocking mechanism 36 The refining device 37 The first power supply device 38 drive shaft 39 rocking drive 40 control device 50 workpiece 60 saw wire 321 discharge roller 322 receiving roller 323, 324, 325 passive roller 354, 355 seeker 391 connecting rod 392 eccentric block 393 second power supply device 捌, in this case, if there is a chemical formula, Please disclose the chemical formula that best shows the characteristics of the invention: (none) 发明, invention description: [Technical field to which the invention belongs]

O:\91\91626 DOC 1251527 In particular, it relates to a cuttable wire saw cutting machine for a wire saw cutting machine. [Prior Art] Referring to Figure 1, there is shown a conventional wire saw cutting machine 1 comprising a plurality of multi-ditch pulleys U j 2 n , 13 a steel wire 14 and a refining (abrasive and s The stone stalk rod 16 is subjected to ore cutting, and the hard and brittle material is sawn to cut a plurality of sheets (for example, a wafer) and the thickness is almost the same. The research on this kind of wire mine cutting machine is as follows, Yamam〇t. [τ. such as 〇 ❹ liquid ❹ 5, the multi-ditch pulleys u, l2, 13 are used to support the steel wire 14 into a tension state ‘and the steel wire 14 drives the refining 15 against a hard and brittle material (example)

Multi-wire slabbing of granite, Ind. Diam. Rev., 55(567) (1995)179-1 81.] Cutting granite with a double wire saw for high cutting efficiency. ContanH [G. L. Contardi, Wire saw beads economic production, Ind. Diam· Rev., 53 (558) (1993) 256_26〇] Cutting a precision ceramic with a wire saw is economical than a conventional inner circle. K〇jima [M. Kojima, Development of new wafer slicing equipment,

Smmtomo Met., 42 (4) (1990) 218-224·] proposed a high-efficiency double-line miscutting' study for the precise cutting of Shi Xishi into a sheet. Suwabe [H. Suwabe, Κ·Ι· Ishikawa, Τ. Miyashita, A study of the processing characteristics of a vibration multi-wire saw-regarding the effects of slurry composition, Int. Conf. Precis. Eng., Taipei, (1997 25 3-25 6·] et al. proposed the effect of different abrasive grain combinations on the efficiency of wire saw cutting. Integrated optical optics (wave guide) component

O:\91\91626.DOC 1251527 High sensitivity, does not exaggerate the influence of magnetic interference, so it can be applied in various environments, reducing the danger of human workers and clothing. Generally, the optical guided wave is a layer of cerium oxide deposited on the germanium wafer. The transmittance is matched with each other (the first and the same is the same as the material, so the propagation loss is small and the folding is due to the fabrication of the planar optical waveguide by the semiconductor, so that it has a defensive stock company. > , has the characteristics of good privateness, mass production, and accumulability. Therefore, it is the high-density production of the high-density production, and the abundance of the ancient and minor industries:...Xun system (deleted M) 'Optical communication system 'test map', the cutting diagram of the member not only the light-guided component in the germanium wafer. After the above-mentioned cutting process, the round circle: 曰曰0 20, and then the semiconductor process to make the light guide leather piece The optical waveguide 70 21 must be diced into a piece of wafer by means of a mechanical cutter before encapsulation (if laser cutting is used, the temperature will destroy the optical properties of the component). The conventional cutting method utilizes a diamond cutter. The disadvantage is that the general optical waveguide component 21 presents various curves as required. It is juice, but in the process of cutting the wafer by the diamond cutter, the cutter can only perform linear cutting, as shown in the figure. 22, can not enter the wafer 20 The curve-cutting is based on the fact that hard and brittle materials such as wafer 2Q and precision (four) have much lower fracture toughness than metal, so when cutting, unlike plastic cutting, plastic deformation occurs, but the crack is extended by fine cracks. The new surface is produced, which makes the processing precision and the curve cutting difficult to control. When cutting in the manner of Fig. 2, the optical waveguide elements 21 on the wafer 20 will not be closely arranged, so that a lot of arrangement space is wasted between the optical waveguide elements, thus reducing each The throughput of the wafer 20. Therefore, it is necessary to provide an innovative and progressive wire sawing machine capable of cutting out the curve to solve the above problem. 0 \91\91626.doc 1251527 [Summary of the Invention] The purpose is to use a modified wire cutter to make a curved cut of the workpiece to meet the design requirements. Another purpose of this 'X Ming is to provide a curve that can be cut on the wafer 以 j cj machine' The production of each wafer reduces the production cost. The purpose of this is to provide a #line cutting machine that can cut the curve' including: a machine main body, a roll The system, a clamp set, a moving mechanism and a rocking mechanism. The main system of the machine is used as the main support structure of the wire saw cutting machine. The roller system includes a plurality of rollers for supporting a saw wire into a force. The heart-hanging fixture set is used to clamp and rotate a workpiece. The moving mechanism-supports the 5-shoulder clamp set with X, and can move horizontally and vertically on the main body of the machine. The rocking mechanism is pivotally coupled to the machine body and has: a seeker, the two seekers are respectively located on two sides of the workpiece, and are used to support and guide the saw wire when the swing mechanism When the rocking action is performed, the saw wire can be brought into contact and the workpiece can be cut. [Embodiment] Referring to FIG. 3, a perspective view of a wire saw cutting machine according to a preferred embodiment of the present invention is shown. The machine is a wafer, and the machine 3 includes a machine body 3 1 , a roller system 32 , a clamp set 33 , a moving mechanism 34 , a rocking mechanism 35 , and a refining device 36 . , a micro, ', Tian Fang 屯 device (Figure Not shown), a first power means to provide [pi], a drive shaft 38, a rocking drive means and a control means 39 4〇.

O:\91\91626.DOC 1251527 The 4-machine σ main body 3 1 is used as the main supporting structure of the wire saw cutting machine 3 as a whole. The roller system 32 includes a discharge roller 321 , a receiving roller 322 , a plurality of passive rollers 323 , 324 , a milk, and a plurality of tension adjusting rollers, and a medium σ Hai discharge roller 32 1 is used for winding the roller. A saw wire 6〇 (for example, a steel wire), the passive rollers 323, 324, 325, 326 are located on the rocking mechanism 35 for supporting the saw wire 6〇, and the receiving roller 322 is used for winding The saw wire 60 has been cut. Referring to Figure 4, there is shown a perspective view of the tension adjusting roller and the discharging roller in Figure i. The tension adjusting roller is used to adjust the tension of the mine wire 6 , which includes a first adjusting roller 327 , a second adjusting roller 328 and a third adjusting roller 329 , wherein the first adjusting roller is third The adjusting roller 329 is fixed to the machine main body 31, and the second adjusting roller 328 is coupled to the main machine (4) through the transmission-adjusting mechanism. The adjustment mechanism includes a moving rod 311, an elastic body 312 (for example, a spring), and a fixing base 313. The fixing base 313 is fixed to the machine main body 3, and one end of the moving rod 311 is fixed to the second end. The roller 328 is adjusted, and the other end is passed through the elastic body to abut against the fixing base 313. The moving rod is fixed as above - the screw 3 (1), and the tension can be adjusted to the required tension by adjusting the position of the screw 3 (1). The first power supply device 37 (for example, a stepping motor) is used to drive the drive shaft 38. In the embodiment, the gastric discharge roller 321 and the receiving roller 322 are both located on the drive shaft 38, and At the same time, the driving of the first movement 37 is accepted.仏裒 仏裒 Referring to Figures 5 and 6, a schematic diagram of the κ group and the moving mechanism is shown. The clamp set 33 includes a clamp 331 and two acrylic plates 332.

O:\9I\9I626.DOC 1251527 333, a plurality of clips 334 (illustrated by only one inflamed piece in FIG. 6), a rotating table 335, a base 336, two pivoting shafts 337, 338 and a moving seat 339 . The workpiece 50 is first sandwiched between the two acrylic plates 332, 333, and then the two acrylic plates 332, 333 are fastened by the clips 334, and then clamped by the clamps 331 The lower ends of the two acrylic plates 332, 333. The holder 331 is fixed to the rotating table 335, and the rotating table 335 is pivotally connected to the base 336 by the two pivoting shafts 3 37, 338. The two pivoting shafts 337, 338 are concentric with the wafer and are rotated by a stepping motor (not shown), so that the workpiece 50 can be centered on the two pivoting shafts 337, 338. Turn left and right. The base 336 is fixed to the moving base 339 and can move as the moving base 339 moves. The moving mechanism 34 includes a horizontal platform 341 and a vertical platform 342. The horizontal platform 341 has a road for the horizontal movement of the moving base 339 in a horizontal direction. The horizontal platform 341 is a columnar structure. One end is a free end, and the other end is linearly moved in a vertical direction on the vertical platform 342. Referring to Figure 7, a perspective view of the rocking mechanism of Figure 1 is shown. The swinging mechanism 35 is a frame outer shape, and includes two guiding rods 35丨, 352 and a rotating rod 353. The leading ends of the guiding rods 351 and 352 respectively have guiding heads 354, 3 55, respectively. The seekers 354, 35 5 are respectively located on two sides of the workpiece 5, which are used to support and guide the saw wire 60. The rotating rod 353 is located between the guiding rafts 351, 352 and rotatably disposed on the two supporting columns 314, 315 of the machine body 31. A front fixing rod 356 is fixed on the guiding rod 352, and a passive roller 323, 324 is respectively fixed at two ends of the front fixing rod 356 O: \9I \91626.DOC -9 - 1251527. A rear-fixing rod 357 is fixed above the guiding rod 35i, and a driven roller 325, 326 is fixed to each of the two ends of the rear fixing rod 357. The swing driving device 39 includes a connecting rod 391, an eccentric block 392 and a second power providing device 393. One end of the connecting rod 391 is pivotally connected to the guiding rod 352 of the swinging device 35, and the other end is coupled to the swinging device 35. The eccentric block 392 is fixed to the second power supply device 393. When the second power providing device 393 is rotated, the connecting rod 391 pulls the guiding rod 352, so that the swinging device 35 can be swung back and forth with the rotation of the swinging device 35 as shown in FIG. When the rocking mechanism 35 swings, the saw wire 60 between the two seekers 354, 355 can be brought into contact and the workpiece 5 can be cut.

Referring again to Figure 3, the refining device 36 is secured to the machine body 3i for providing refining (abrasives and liquids) to the point where the wire 6 is in contact with the workpiece 50. The micro-discharge device is used to make a fine discharge of the saw wire 6 before entering the contact with the remote workpiece 50, thus causing the saw wire 6 to produce a metamorphic layer to increase the anti-wear ability of the saw wire 60, and due to the micro-discharge The resulting micropores/same squares & the force application space for the abrasive grains can further improve the cutting efficiency. The control device 40 electrically connects the roller system 3, the clamp group 3 3, the moving mechanism 34 and the second power supply device 393 to control the speed of the saw wire 6 and the feeding of the workpiece 50 . The actuation process of the present invention is as follows. First, the roll sawing wire 60 is pulled out from the discharge roller 321 and sequentially passes through the two passive rollers 323, 3 24, the two seekers 354, 355, and the two passive rollers 325, 326. The first adjusting roller 327, the second adjusting roller 328 and the third adjusting roller 329 are finally wound by the receiving material O: \91\9I626.DOC -10 - 1251527 roller 3 2 2 . Thereafter, the ore 6 〇 is brought into contact with the workpiece 50 via the guidance of the two seekers 354, 355 of the rocking mechanism 35 and the relative movement of the clamp group 33 and the moving mechanism 34. Then, the abrasive and liquid are supplied by the refining device, and the driving shaft 38 is driven to drive the discharge roller 321 and the receiving roller 322, and simultaneously drives the second power supply device 393 to drive the rocking mechanism 35. 'Through this' to drive the abrasive in the refining, the workpiece 5 〇 is swayed. Since the tension of the mine wire 60 changes when it is shaken (ie, it is hurry ~) 'to make the cutting impossible, it is necessary to add the tension adjusting rollers (ie, the first adjusting roller 327, the second adjusting roller) 328 and the third adjustment, the wheel 329) and the adjusting mechanism (ie, the moving rod 3 ιι, the elastic body (1) and the fixing seat 313) are used to correct the tension change of the material 6G, so that the ore line 60 is maintained in a tension state. This is the cutting effect. - then, using the action of the first power supply device 37, the steel wire feed is provided, and the drive shaft 38 and the first power supply device 37 are connected to each other by a regular stroke, so that the drive shaft 38 produces a reciprocating rotation that provides the power to reciprocate the mine. (4) - Power supply device W. The control, the kg control can set the cutting stroke, the wire feed and the sawing speed, etc. In the knife J, the control device 4〇 also needs to control the horizontal platform 341 and the vertical platform 342 Controlling the position of the 1 piece 5(), while the control device controls /= and 33 to & turn the guard to 'make the guard's wrong line in the X-contact, and keep the cutting path in the mine Just below 60 (so

O:\91\91626.DOC 1251527 has the ability to cut) to complete the cutting of complex curves on workpiece 50. The above-described embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Therefore, those skilled in the art can make modifications and changes to the above embodiments without departing from the spirit of the invention. The scope of the invention should be as set forth in the claims below. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a conventional wire saw cutting machine; FIG. 2 is a schematic view showing a cutting of a light guiding device in a stone wafer; FIG. 3 is a perspective view showing a wire cutting machine according to a preferred embodiment of the present invention; 4 is a perspective view showing the tension adjusting roller, the discharging roller and the receiving roller of FIG. 3; FIG. 5 is a perspective view showing the clamp group and the moving mechanism of FIG. 3; FIG. 6 is a perspective view showing the clamp group of FIG. A perspective view of the rocking mechanism of FIG. 3 is shown; and FIG. 8 is a schematic view showing the operation of the rocking mechanism of FIG. [Graphic Symbol Description] n,l2,13 14 15 16 20 21 Conventional Wire Saw Cutting Machine The wire saw cutting machine of the present invention Multi-groove pulley Steel wire Refining Hard and brittle material Wafer Optical waveguide component

O:\91\91626.DOC -12- 22 1251527 31 32 33 34 35 36 37 38 39 40 50 60 311 3111 312 313 314,315 321 322 323,324,325,326 327 328 329 Cutting line machine main body roller system clamp group moving mechanism swinging mechanism Refining device, first power supply device, drive shaft, rocking drive, control device, workpiece, misalignment, moving rod, screw, elastomer, seat, support column, discharge roller, receiving roller, passive roller, first adjustment roller, second adjustment roller, third adjustment roller, O: \91\91626.DOC -13 - 1251527 33 1 Clamp 332,333 Acrylic plate 334 Inflammable piece 335 Rotating table 336 Base 337,338 Pivot shaft 339 Moving seat 341 Horizontal platform 342 Vertical platform 35 1,352 Guide rod 353 Rotating rod 354,355 Seeker 356 Front fixing rod 357 Rear fixing rod 391 Connecting rod 392 Eccentric block 393 Second power supply unit O:\91\91626.DOC - 14 -

Claims (1)

12 51 # 14800 Patent application bait year u month /) day repair (¢) is replacing page Chinese application patent scope replacement (December 94) Pick up, apply for patent garden: - a wire saw that can cut the curve Cutting machine, including · a machine main body; - roller system 'to support a mine line into - - system includes - discharge roller, - receiving roller, a plurality of passive; two: one = adjustment roller 'which The discharge roller is used for winding the wire, and the passive roller is used for selecting the (4). The tension roller is used to adjust the m force, and the receiving roller is used for winding the saw wire after cutting. a clamp set for holding and rotating a workpiece; a moving mechanism for supporting the clamp set: and horizontally and vertically moving on the machine body to drive the workpiece to move; and - shaking The pendulum mechanism is a frame shape, and includes two guiding rods and a rotating rod, wherein the guiding rods respectively have a guiding head at the front end, and the rotating rod is located between the guiding rods, and The machine body is pivotally connected to the two seeker systems respectively on the two sides of the workpiece. To support and guide the wrong line, when the movable rocking mechanism rocking motion, can make contact with and cut the wire mine workpiece. 2. 3. 4. For the wire-cutting machine of the scope of the patent application, the workpiece is a wafer. For example, please refer to the line fault cutting machine of the scope of the patent item, and further include an abrasive feeding device for providing abrasive to the saw wire in contact with the workpiece. 2 Clearing the wire-cutting machine of the first item of the patent scope, and further comprising a micro-discharge device for making a fine before the O:\91\91626-941212.doc 1251527 of the mine entering the contact with the workpiece The wire saw cutting machine of claim 1, further comprising a first power supply device and a drive shaft for driving the 垓 drive shaft 'the discharge roller and the receiving roller system Located on the drive shaft while receiving the drive of the power supply device. For example, the wire-cutting machine of claim i, wherein the tension adjustment comprises: a first-adjusting roller, a second adjusting roller and a third adjusting roller, wherein the first adjusting roller and the first The third adjusting roller is fixed on the main body of the machine, and the second adjusting roller is pivotally connected to the main body of the machine through an adjusting mechanism. The wire-cutting cutter of claim 6, wherein the adjusting mechanism comprises a moving rod and an elastic body, the one end of the moving rod is fixed to the second adjusting roller, and the other end is abutted against the elastic body. The wire ore cutting machine of claim 1, wherein the moving mechanism comprises a horizontal platform and a vertical platform, the horizontal platform having a depression for the linear movement of the clamp group in a horizontal direction thereon, The horizontal platform is a columnar structure, one end of which is a free end, and the other end is linearly moved in a vertical direction on the vertical platform. For example, in the line ore cutting machine of claim 1, wherein a fixing rod is fixed on each of the guiding rods, and a roller is fixed on each of the two ends of the fixing rod. 10.1° (1) The cutting machine of item 1 (4) further includes a swinging drive, /, #, and a pendulum mechanism connected to the (four) type mechanism. Le 4 shake 5. 6. 7· 8. 9· O:\91\91626-941212.doc -2 · 1251527 11. 12. 13. , ' / :;', αΙ ......... .. ............. ^ ..... „ As in the line of claim 10, the wire sawing and cutting plant has a connecting rod, an eccentricity And a second power supply device, one end of the link is pivotally connected to the swing device, and the other end is pivotally connected to the eccentric block, and the eccentric block is fixed to the second power supply device. The wire saw cutting machine further includes a control device electrically connecting the roller system, the clamp group, the moving mechanism and the rocking mechanism to control the speed of the saw wire and the feeding of the workpiece. The wire saw cutting machine of the third aspect, wherein the clamp set comprises: a second acrylic plate for holding the workpiece; a plurality of clips for fastening the acrylic plates; a pedestal for holding the lower end of the acryl plate; a turret is for the clamp to be fixed thereon; a pedestal is pivotally coupled to the turret A rotatable turret; and a movable block, the base line for fixed thereon, the movable block moves based on the movement mechanism O: \ 91 \ 91626-941212.doc.