TWI241415B - Microlens arrays having high focusing efficiency - Google Patents

Microlens arrays having high focusing efficiency Download PDF

Info

Publication number
TWI241415B
TWI241415B TW093126107A TW93126107A TWI241415B TW I241415 B TWI241415 B TW I241415B TW 093126107 A TW093126107 A TW 093126107A TW 93126107 A TW93126107 A TW 93126107A TW I241415 B TWI241415 B TW I241415B
Authority
TW
Taiwan
Prior art keywords
array
microlens
microlenses
concave
convex
Prior art date
Application number
TW093126107A
Other languages
English (en)
Chinese (zh)
Other versions
TW200502586A (en
Inventor
Geoffrey B Gretton
G Michael Morris
Tasso R M Sales
Original Assignee
Rochester Photonics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rochester Photonics Corp filed Critical Rochester Photonics Corp
Publication of TW200502586A publication Critical patent/TW200502586A/zh
Application granted granted Critical
Publication of TWI241415B publication Critical patent/TWI241415B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0043—Inhomogeneous or irregular arrays, e.g. varying shape, size, height
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14627—Microlenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Viewfinders (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW093126107A 2000-07-31 2001-07-31 Microlens arrays having high focusing efficiency TWI241415B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22203200P 2000-07-31 2000-07-31

Publications (2)

Publication Number Publication Date
TW200502586A TW200502586A (en) 2005-01-16
TWI241415B true TWI241415B (en) 2005-10-11

Family

ID=22830476

Family Applications (2)

Application Number Title Priority Date Filing Date
TW093126107A TWI241415B (en) 2000-07-31 2001-07-31 Microlens arrays having high focusing efficiency
TW090118831A TWI238266B (en) 2000-07-31 2001-07-31 Microlens arrays having high focusing efficiency

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW090118831A TWI238266B (en) 2000-07-31 2001-07-31 Microlens arrays having high focusing efficiency

Country Status (7)

Country Link
EP (1) EP1218777A4 (de)
JP (1) JP2004505307A (de)
KR (1) KR100878966B1 (de)
CN (1) CN1200304C (de)
AU (1) AU2001283514A1 (de)
TW (2) TWI241415B (de)
WO (1) WO2002010805A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6042421A (en) * 1994-12-12 2000-03-28 Itt Manufacturing Enterprises, Inc. Coaxial connector
CN1688516A (zh) 2002-10-04 2005-10-26 康宁股份有限公司 透镜阵列及制造这种透镜阵列和光敏玻璃板的方法
US7098589B2 (en) 2003-04-15 2006-08-29 Luminus Devices, Inc. Light emitting devices with high light collimation
TWI526720B (zh) 2013-06-21 2016-03-21 佳能股份有限公司 漫射板

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483846A (en) * 1977-12-16 1979-07-04 Canon Inc Diffusing plate
US4372649A (en) * 1978-05-22 1983-02-08 Minnesota Mining And Manufacturing Company Extended area diffractive subtractive color filters
JPH03122614A (ja) * 1989-10-05 1991-05-24 Matsushita Electric Ind Co Ltd マイクロレンズの製造方法
US5148322A (en) * 1989-11-09 1992-09-15 Omron Tateisi Electronics Co. Micro aspherical lens and fabricating method therefor and optical device
US5119235A (en) * 1989-12-21 1992-06-02 Nikon Corporation Focusing screen and method of manufacturing same
JPH03198003A (ja) * 1989-12-27 1991-08-29 Ricoh Co Ltd マイクロレンズアレイの製造方法
US5401968A (en) * 1989-12-29 1995-03-28 Honeywell Inc. Binary optical microlens detector array
JPH03214101A (ja) * 1990-01-18 1991-09-19 Nippon Sheet Glass Co Ltd 稠密充填レンズアレイ
CA2071598C (en) * 1991-06-21 1999-01-19 Akira Eda Optical device and method of manufacturing the same
JPH0524121A (ja) * 1991-07-23 1993-02-02 Hitachi Ltd 光学部品、光学部品マザー、それらの製造方法、及び関連製品
JP2856612B2 (ja) * 1992-10-12 1999-02-10 シャープ株式会社 ホログラフィック・ステレオグラム記録用投影装置
JP3191464B2 (ja) * 1992-11-17 2001-07-23 オムロン株式会社 画像表示装置及び画像表示装置用のマイクロレンズアレイ
US5439621A (en) * 1993-04-12 1995-08-08 Minnesota Mining And Manufacturing Company Method of making an array of variable focal length microlenses
DE4333620A1 (de) * 1993-10-15 1995-04-20 Jenoptik Technologie Gmbh Anordnung und Verfahren zur Erzeugung von Dosisprofilen für die Herstellung von Oberflächenprofilen
JP3117886B2 (ja) * 1994-12-14 2000-12-18 沖電気工業株式会社 レジストパターン形成用のマスク、レジストパターンの形成方法およびレンズの製造方法
JP3611613B2 (ja) * 1994-12-27 2005-01-19 Ｈｏｙａ株式会社 三次元形状の形成方法、該方法により形成した三次元構造体およびプレス成形型
JPH08248403A (ja) * 1995-03-14 1996-09-27 Kuraray Co Ltd 液晶表示装置
JPH09127309A (ja) * 1995-08-28 1997-05-16 Toray Ind Inc マイクロレンズアレイシートおよびそれを用いた液晶ディスプレイ
US5808657A (en) * 1996-06-17 1998-09-15 Eastman Kodak Company Laser printer with low fill modulator array and high pixel fill at a media plane
US5871653A (en) * 1996-10-30 1999-02-16 Advanced Materials Engineering Research, Inc. Methods of manufacturing micro-lens array substrates for implementation in flat panel display
US5867307A (en) * 1996-11-13 1999-02-02 Raytheon Company Blur film assembly for infrared optical applications
JPH11344602A (ja) * 1998-03-30 1999-12-14 Seiko Epson Corp ブラックマトリクス付マイクロレンズ基板の製造方法、液晶パネル用対向基板、液晶パネルおよび投射型表示装置
JP2000187212A (ja) * 1998-12-22 2000-07-04 Sharp Corp マイクロレンズ基板、マイクロレンズ付液晶表示素子および投影型画像表示装置

Also Published As

Publication number Publication date
EP1218777A4 (de) 2005-12-28
AU2001283514A1 (en) 2002-02-13
WO2002010805A1 (en) 2002-02-07
CN1386204A (zh) 2002-12-18
TW200502586A (en) 2005-01-16
KR100878966B1 (ko) 2009-01-19
JP2004505307A (ja) 2004-02-19
KR20020044154A (ko) 2002-06-14
CN1200304C (zh) 2005-05-04
EP1218777A1 (de) 2002-07-03
TWI238266B (en) 2005-08-21

Similar Documents

Publication Publication Date Title
Gale et al. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
DE69635126T2 (de) Microreliefelement und seine herstellung
EP2567290B1 (de) Herstellung von nanometer- und mikrometerstrukturen mit kontinuierlichen reliefs
Poleshchuk et al. Laser technologies in micro-optics. Part 2. Fabrication of elements with a three-dimensional profile
EP3757628B1 (de) Diffusionsplatte
US20080252988A1 (en) Method of Fabricating Tridimensional Micro- and Nanostructures as Well as Optical Element Assembly Having a Tridimensional Convex Structure Obtained by the Method
CN110235050A (zh) 一种衍射光学元件的制造方法
US9625819B2 (en) Photolithography on shrink film
Park et al. Design and fabrication of multi-focusing microlens array with different numerical apertures by using thermal reflow method
TW200928598A (en) Inclined exposure lithography system
TWI241415B (en) Microlens arrays having high focusing efficiency
US20220128742A1 (en) Diffuser plate
Boehlen et al. Laser micromachining of high-density optical structures on large substrates
Schift et al. Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography
JP4565711B2 (ja) 濃度分布マスクの製造方法
TWI288830B (en) A 3-D display apparatus
KR20060118949A (ko) 마이크로렌즈 어레이 및 이 마이크로렌즈 어레이의 복제용음각틀의 제작방법
Chang et al. Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography
JP2014071415A (ja) 微細構造体の製造方法、および微細構造体
EP4335630A1 (de) Verfahren zur strukturierung einer maske, verfahren zur herstellung eines einsatzes oder einer form und optischer artikel mit oberflächenmikrostrukturen
Wu et al. Fabrication of microlens arrays based on the mass transport effect of SU-8 photoresist using a multiexposure two-beam interference technique
WO2022238146A1 (en) Method for creating surface microstructures
JP4918769B2 (ja) 光学スクリーンとそれを用いたプロジェクションスクリーンおよびその光学スクリーンの製造方法
JP2007086418A (ja) 光学スクリーンとそれを用いたプロジェクションスクリーンおよびその光学スクリーンの製造方法
JP4794091B2 (ja) 三次元構造体の製造方法

Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent