TWI239549B - Short are electric discharge lamp and light source equipment - Google Patents

Short are electric discharge lamp and light source equipment Download PDF

Info

Publication number
TWI239549B
TWI239549B TW092102767A TW92102767A TWI239549B TW I239549 B TWI239549 B TW I239549B TW 092102767 A TW092102767 A TW 092102767A TW 92102767 A TW92102767 A TW 92102767A TW I239549 B TWI239549 B TW I239549B
Authority
TW
Taiwan
Prior art keywords
discharge lamp
metal cover
lamp
metal
short
Prior art date
Application number
TW092102767A
Other languages
Chinese (zh)
Other versions
TW200405389A (en
Inventor
Minoru Yokoi
Masaaki Miyazawa
Hiroshi Kuwabata
Akiyoshi Fujimori
Original Assignee
Orc Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Mfg Co Ltd filed Critical Orc Mfg Co Ltd
Publication of TW200405389A publication Critical patent/TW200405389A/en
Application granted granted Critical
Publication of TWI239549B publication Critical patent/TWI239549B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/52Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523Heating or cooling particular parts of the lamp
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01GHORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G9/00Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
    • A01G9/04Flower-pot saucers
    • A01G9/045Trays for receiving multiple pots
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01GHORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G9/00Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
    • A01G9/02Receptacles, e.g. flower-pots or boxes; Glasses for cultivating flowers
    • A01G9/021Pots formed in one piece; Materials used therefor
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01GHORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G9/00Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
    • A01G9/02Receptacles, e.g. flower-pots or boxes; Glasses for cultivating flowers
    • A01G9/029Receptacles for seedlings
    • A01G9/0297Grids for supporting several receptacles

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

An electric discharge lamp without shortage of cooling resulting from poor positioning of the attachment direction of the electric discharge lamp and a fixed material included in a metal cap part, allowing no un-switching on the light of electric discharge lamp, breakage, and burst, is provided. Also, a light source equipment including the electric discharge lamp attached to a luminaire without increase in the cooling capacity of the luminaire accompanying a high light-utilization of the electric discharge lamp, allowing scaling-down or small electric power of the equipment is provided. A short are electric discharge 1 amp 1 comprises: metal cap maintenance part 14 provided for an attachment to the end portion of both metal caps 11 of the electric discharge lamp 1; a positioning engagement part provided in at least one of the circumferential position of both metal cap maintenance parts 14; and pluralities of opening holes 11a and 11b provided in the position which is un-countering on the side face of the both metal caps 11.

Description

1239549 五、發明說明(1) 發明所屬之技術領域 本發明係有關於一種短弧放電燈,用以在一半導體晶 圓、液晶面板及電印板上完成光源放射過程,特別係有關 於一種具有此短弧放電燈的光源裝置。 先前技術 傳統的短弧放電燈(請參照之後所述之短弧放電燈) 中,為了將放電燈連接至光源裝置的燈具,一固定金屬或 一電子連接金屬(參照稍後提及的金屬蓋)通常藉由固定材 料而固定於放電燈之冷光管的兩―端密封管上,且做成圓柱 型。再者,圓柱形的金屬蓋固定部(凸出部)位於金屬蓋的 端部,以及一凹陷部位於燈具,用以界定位置。此裝置是 用來使張力不會施加在導線上,此導線是當放電燈連接至 燈具或發光連接部時,由放電燈連接出的。當導線及發光 連接部的張力變大時,壓力將施加於放電燈上,會造成放 電燈的破裂發生,此將造成放電燈光源無法切換及爆炸的 意外。 同樣地,在放電燈的金屬蓋中包括一連接部(參照稍 後提及的金屬焊接部),自放電燈内部之電極所導出的金 ,片與自外部通電用之導線是經由連接部所連接。金屬片φ 社、封方式為一密封結構形成於密封管路的内表面與支撐圓 柱的外表面之間’密封管路為在放電燈之冷光管的兩端, 而支撐圓柱是由石英所製成,於放電燈之冷光管的兩端及 電極處用以支撐密封管路的内側,而金屬片的尾端是暴露1239549 V. Description of the invention (1) The technical field to which the invention belongs The present invention relates to a short-arc discharge lamp, which is used to complete the radiation process of a light source on a semiconductor wafer, a liquid crystal panel and an electric printing board, and particularly relates to a device having a Light source device for this short arc discharge lamp. In the conventional short-arc discharge lamp of the prior art (refer to the short-arc discharge lamp described later), in order to connect the discharge lamp to the lamp of the light source device, a fixed metal or an electronic connection metal (refer to the metal cover mentioned later) ) It is usually fixed to the two-end sealed tube of the cold light tube of the discharge lamp by a fixing material, and is made into a cylindrical shape. Furthermore, the cylindrical metal cover fixing portion (projecting portion) is located at the end portion of the metal cover, and a recessed portion is located at the lamp to define the position. This device is used to prevent tension from being applied to the wire, which is connected by the discharge lamp when the discharge lamp is connected to a lamp or a light-emitting connection. When the tension of the lead wire and the light-emitting connection portion increases, pressure will be applied to the discharge lamp, which will cause the discharge lamp to rupture, which will cause the accident that the light source of the discharge lamp cannot be switched and exploded. Similarly, the metal cover of the discharge lamp includes a connection portion (refer to the metal welding portion mentioned later), the gold derived from the electrodes inside the discharge lamp, and the wire for conducting electricity from the outside are connected by the connection portion. connection. The metal sheet φ is sealed with a sealing structure formed between the inner surface of the sealing tube and the outer surface of the supporting cylinder. The sealing tube is at both ends of the cold light tube of the discharge lamp, and the supporting cylinder is made of quartz. The two ends of the cold light tube of the discharge lamp and the electrodes are used to support the inside of the sealed tube, and the tail of the metal sheet is exposed

1239549 五、發明說明(2) 於金屬蓋内部的環境中。更進一步地,放電燈點亮後會產 生熱輻射,金屬蓋的溫度大約是300至400 °C。於是,如果 放電燈在點亮的情況下不冷卻,則金屬焊接部會氧化,或 金屬片端面會被氧化,而裂痕便產生於由石英製成之密封 管路的支撐圓柱上。因此,會造成燈管無法點亮及爆裂的 危險。 習用之燈具包括一喷嘴提供冷卻氣 因此 嘴以喷霧方式來降低内側金屬焊接部或金屬片的溫度 同樣地,一種方法被用來直接冷卻金屬焊接部或金屬 片之端部’是在放電燈上有兩個開孔以180。夾角分置於 金屬蓋之側面上’並與放電燈軸向呈垂直,或是四個9〇。 夾角=開孔,由以上開孔導入空氣或其他氣體至金屬蓋。 然而’上述金屬蓋表面的冷卻方法產生一 垃内邛冷部效率不佳且冷不足是由於放 :被充滿既定材料,此為固定金屬蓋至放電二=内 與直接冷卻放法以金屬蓋側面開孔進行冷各丨 入燈具時:比較是較好的方法,但在將放電趋 的開孔。精確地將冷卻$氣之喷嘴安裝於金屬蓋你1239549 V. Description of the invention (2) In the environment inside the metal cover. Furthermore, when the discharge lamp is turned on, heat radiation is generated, and the temperature of the metal cover is about 300 to 400 ° C. Therefore, if the discharge lamp is not cooled when it is lit, the metal welded portion will be oxidized, or the end surface of the metal piece will be oxidized, and cracks will be generated on the support cylinder of the sealed pipeline made of quartz. Therefore, there is a danger that the lamp cannot be lit and burst. Conventional lamps include a nozzle to provide cooling gas so that the nozzle sprays to reduce the temperature of the inner metal weld or metal piece. Similarly, a method is used to directly cool the end of the metal weld or metal piece. There are two openings on it. The included angle is placed on the side of the metal cover 'and is perpendicular to the axis of the discharge lamp, or four 90. Included angle = opening, through which air or other gas is introduced into the metal cover. However, 'the cooling method of the surface of the metal cover mentioned above produces a cold inner part with poor efficiency and insufficient cooling due to the discharge: it is filled with a predetermined material, which is to fix the metal cover to the discharge. The internal and direct cooling method uses the side of the metal cover. When opening holes to cool the lamps into the lamp: comparison is a better method, but when opening the holes. Install the nozzle of cooling gas accurately on the metal cover

然而,過本从义 準之工作需依靠t電燈並無定位機構,將噴嘴與開石 屬蓋固定部,复ί二工人,在上述之圓柱狀之金屬蓋或 此放電燈連接電燈軸向垂直之剖面形狀為圓形, 向的定位並未完成,例如以放電燈的奉However, the work that has been done in the past requires the t lamp to have no positioning mechanism. The nozzle and the opening of the metal cover are fixed, and the two workers are in the above-mentioned cylindrical metal cover or the discharge lamp is connected to the lamp axis perpendicularly. The cross-sectional shape is circular, and the orientation is not completed, for example, with the discharge lamp

1239549 五、發明說明(3) 為旋轉方向 隙’而金屬 開孔是以相 的冷卻能力 電燈無法點 再者, 須增加燈具 升亦增加了 本發明 放電燈不會 題,同樣的 燈而無需增 電燈尺寸縮 而定位 蓋冷卻 對位置 ,因此 亮及爆 即使使 的冷卻 電力的 完全明 連接錯 ,一種 加金屬 小及減 。因此 氣體不 排列, ,有可 炸的意 用上述 能力是 使用與 瞭上述 誤,不 光源裝 冷卻能 少耗電 ,喷嘴 足將會 故冷卻 在放電 外。 方法, 無法避 增加燈 問題’ 會有放 置在燈 利,進 量 ° 與開孔間會產生位置間 產生。再者,因冷卻用的 效率不佳且無法得到充份 燈上產生裂痕,會造成放 ^旦因放電燈熱量的增加而 免的’因此,此燈具的提 具的冷卻能力是相關的。 本發明的目的是提供一種 電燈損壞破裂及爆炸的問 具伴隨著高光利用之放電 而可使連接至燈具上的放 發明内容1239549 V. Description of the invention (3) For the rotation direction gap, and the metal opening is based on the phase cooling capacity of the electric lamp, the lamp cannot be lit anymore, the lamp must be increased, and the discharge lamp of the present invention will not be a problem. The same lamp without additional The size of the electric lamp shrinks and the positioning cover cools to the right position. Therefore, even if the cooling power is bright and burst, the cooling power is completely connected incorrectly. Therefore, the gas does not line up, and there is a possibility of explosion. The above-mentioned ability is used in accordance with the above error. If the light source is not installed, the cooling energy and power consumption are reduced, and the nozzle foot will be cooled outside the discharge. Method, it is inevitable to increase the lamp problem ’will be placed in the lamp, the amount of the ° and the position will be generated between the opening. In addition, because the cooling efficiency is not good and sufficient cracks cannot be generated on the lamp, the discharge will be avoided due to the increase in the heat of the discharge lamp. Therefore, the cooling capacity of the fixture of this lamp is related. The object of the present invention is to provide a fixture that is damaged, ruptured, and exploded in an electric lamp.

為了解决上述的問題,根據本發明申請專利範圍第1 項所述,本發明提供一種短弧放電燈包括一陽極與一陰極 以相對的方式設置;-密封管於-冷光管的兩4,-金屬 蓋,藉由固定材料而固接至密封管路的外側,以便連接至 -端固定的燈具以使用,其中位置連接部定義明確的連接 位置於至少-金屬蓋固定部的圓周上,以及複數個開孔不 相對地没置於金屬蓋外側面。 在上述情況中,放電燈是連接至燈具,放電燈的連接 方向或照明方向是朝燈具之同一方向,係藉由位置連接部In order to solve the above-mentioned problem, according to item 1 of the scope of patent application of the present invention, the present invention provides a short-arc discharge lamp including an anode and a cathode disposed in an opposite manner; The metal cover is fixed to the outside of the sealed pipeline by a fixing material so as to be connected to the -fixed luminaire for use, wherein the position connection portion has a well-defined connection position on at least the circumference of the -metal cover fixing portion, and a plurality of The openings are not oppositely placed on the outer side of the metal cover. In the above case, the discharge lamp is connected to the lamp, and the connection direction or lighting direction of the discharge lamp is the same direction of the lamp, which is determined by the position connection portion.

2036-5481-P(Nl).ptd 第9頁 1239549 五、發明說明(4) 提供明確的固定位置,於陽極與陰極上至少一個金屬蓋固 定部的圓周上。同樣地,複數個開孔以不相對的位置設置 於放電燈的金屬蓋側面,因此,冷卻氣體導入金屬蓋的時 間變長。 為了解決上述問題’根據本發明申請專利範圍第2項 所述’本發明之短弧放電燈具有導入或導出冷卻氣體之複 數個開孔。 在上述情況中,金屬蓋側面上不相對之開孔數量有兩 個,導入金屬蓋之冷卻空氣停留的時間會變最長。 為了克服上述的問題,根據本發明申—請專利範圍第3 項所述’本發明之短弧放電燈包括位置連接部形成有既定 唯一的凸出部或凹陷部於金屬蓋固定部14的圓周表面上。 經上述組合,當一放電燈連接至燈具(設置°)時,放電 燈的連接方向或照明狀況,其正確性被提升。 為了解決上述的問題’根據本發明申請專利範圍第4 項所述’本發明之光源裝置包括一具有如申請專利範圍第 1-3項所述之放電燈的燈具。此燈具包括有一金屬蓋固定 架具有一凹陷部可與放電燈陽極或陰極的至少一金屬蓋固 定部相連接;以及一氣體供應裝置位於相對於空氣傳導開 孔的位置,此開孔是形成於放電燈陽極或陰極的側面且固 定於金屬蓋固定架。 在上述中’具有凹陷部之金屬蓋固定架是被形成用以 與放電燈的金屬蓋固定部連接,放電燈的連接方向與發光 位置成為同一方向。同樣地,在相對於傳導空氣之開孔處2036-5481-P (Nl) .ptd Page 9 1239549 5. Description of the invention (4) Provide a clear fixing position on the circumference of at least one metal cover fixing part on the anode and cathode. Similarly, since a plurality of openings are provided on the side of the metal cover of the discharge lamp at opposite positions, the time for introducing the cooling gas into the metal cover becomes longer. In order to solve the above-mentioned problem, according to item 2 of the scope of patent application of the present invention, the short-arc discharge lamp of the present invention has a plurality of openings for introducing or discharging a cooling gas. In the above case, there are two opposite openings on the side of the metal cover, and the cooling air introduction time of the metal cover will be the longest. In order to overcome the above-mentioned problems, according to the present application-the third scope of the patent application, the short arc discharge lamp of the present invention includes a position connection portion formed with a predetermined and unique projection or depression on the circumference of the metal cover fixing portion 14. On the surface. Through the above combination, when a discharge lamp is connected to a luminaire (set °), the connection direction or lighting condition of the discharge lamp is improved. In order to solve the above-mentioned problem, according to item 4 of the patent application scope of the present invention, the light source device of the present invention includes a lamp having a discharge lamp as described in the patent application scope items 1-3. The lamp includes a metal cover fixing frame having a recessed portion which can be connected to at least one metal cover fixing portion of an anode or a cathode of a discharge lamp; and a gas supply device located at a position opposite to an air conduction opening, the opening is formed at The side of the anode or cathode of the discharge lamp is fixed to a metal cover fixing frame. In the above, the metal cover fixing frame having the recessed portion is formed to be connected to the metal cover fixing portion of the discharge lamp, and the connection direction of the discharge lamp and the light emitting position become the same direction. Similarly, at the openings relative to the conducting air

12395491239549

設有空氣供應裝置,空氣供應裝置之可再生之導引空氣 孔是設置於燈具上,而放電燈的空氣導引開孔被改善了: 因此兩者之間的位置間隙將不會產生。 ▲為使本發明之上述及其他目的、特徵和優點能更明 易懂,下文特舉數個具體之較佳實施例,並配合所^ 做詳細說明。 _式 實施方式Equipped with air supply device, the reproducible guide air hole of the air supply device is set on the lamp, and the air guide opening of the discharge lamp is improved: so the position gap between the two will not be generated. ▲ In order to make the above and other objects, features, and advantages of the present invention more comprehensible, the following exemplifies several specific preferred embodiments, and makes detailed descriptions in cooperation with them. _Style implementation

以下以具體之實施例,對本發明揭示之各形態内容加 以詳細說明。第丨圖係顯示放電燈主要部份的剖面圖,第g 圖係顯不光源裝置包括具有放電燈之燈具的主要部份前視 圖’第3圖係顯示放電燈之金屬蓋的示意圖,第4a圖係顯 不燈具的金屬蓋固定架之前視圖,第4b圖是第“圖中沿剖 面線C-C的剖面圖,第5a圖是第2圖中沿剖面線A-a的剖面^ 圖’第5b圖是第2圖中沿剖面線β_Β的剖面圖,第5c圖是顯 示開孔與氣體供應裝置相關位置之剖面圖,第6圖係顯示… 金屬蓋内部溫度變化圖,第7圖係顯示放電燈之剖面樣式 列表,第8圖係顯示金屬蓋剖面樣式列表。 、請參見第1圖,放電燈1包括陽極(圖上未顯示)和陰極 3以相對的方式排列,且具有既定量之水銀與既定大氣^In the following, specific embodiments are used to describe in detail each aspect disclosed in the present invention. Figure 丨 shows a cross-sectional view of the main part of a discharge lamp, and Figure g shows a front view of the main part of a light source device including a lamp with a discharge lamp. Figure 3 shows a schematic view of the metal cover of a discharge lamp, Figure 4a The figure shows the front view of the metal cover fixing bracket of the lamp. Figure 4b is a cross-sectional view along the section line CC in the figure, and Figure 5a is a cross-section along the section line Aa in the second figure ^ Figure 5b is Section 2 along the section line β_B, Section 5c is a sectional view showing the position of the opening and the gas supply device, and Section 6 is a diagram showing the temperature change inside the metal cover, and Section 7 is a display of the discharge lamp. Section style list, Figure 8 shows the metal cover section style list. Please refer to Figure 1. The discharge lamp 1 includes an anode (not shown) and a cathode 3 arranged in a relative manner, with a predetermined amount of mercury and a predetermined amount of mercury. Atmosphere ^

力=惰性氣體填充於其中,及圓柱狀的密封管4形成於冷 光官2的兩端。 陰極3的一側設置有密 極3接近尾端的部位,玻璃 撐於電極傳導棒5後端部的 ^管4,電極傳導棒5連接於陰 管6^支撐電極傳導棒5,連接支 連接構件7是被玻璃管6所包圍Force = inert gas is filled therein, and a cylindrical sealing tube 4 is formed at both ends of the cold light official 2. One side of the cathode 3 is provided with a portion of the dense electrode 3 near the tail end. The glass is supported by the tube 4 at the rear end of the electrode conductive rod 5. The electrode conductive rod 5 is connected to the female tube 6. 7 is surrounded by glass tube 6

1239549 五、發明說明(6) 住,再者,在密封管4内,金屬片8包含鉬,作為複數金屬 用以密封燈管且與連接構件7的後端部相連,玻璃棒9包含 石夕玻璃支樓金屬片8的内側,外導引連接部1〇是支撐於玻 璃棒9的後端且被玻璃棒9所包圍。 # 如第1圖和第3圖所示,金屬蓋是設置於密封管4之 尾‘的外側’外導引部1 2是被插入金屬蓋11内以連接至外 導引連接部1 0,同時,固定材料1 3是充滿於金屬蓋丨丨内, 使付金屬盍11可以精由固定材料13固定至密封管4的尾 知。同樣地’金屬蓋固定部1 4係用以將放電燈1連接至一 燈具(圖上未顯示),將於以下討論。 位置連接部14b是用來定義連接位置的,形成於金屬 蓋固疋部14的圓周上,如第3圖中所示,位置連接部Hb是 由切割圓柱形之金屬蓋固定部14的一侧所形成之切割平面 部所構成,但不限定於此種形式。舉例來說,金屬蓋固定 部14的剖面樣式如第7圖中列表所示,其中此剖面是垂直 於放電燈的軸向,本發明之金屬蓋固定部14的剖面樣式可 以是A 2至A 9。然而’只要能夠定義出放電燈1連接至上述 之燈具的位置’任何外形都是可以的。同樣地,剖面樣式 是可以決定唯一的連接位置的,換句話說,如表中的八3 剖面樣式必需要是在上下或左右中至少一邊為非對 形,例如當剔面樣式依中心線X而上下翻轉時外形不 同,或者是當外形剖面依中心線γ而左右翻轉時外幵彡 重疊。也就是說,設定第3圖中放電燈的2軸為對軸,曰 Z軸旋轉既定角度,則剖面樣式須變成旋轉不對稱又1239549 V. Description of the invention (6) In addition, in the sealed tube 4, the metal sheet 8 contains molybdenum as a plurality of metals to seal the lamp tube and is connected to the rear end of the connecting member 7, and the glass rod 9 contains Shi Xi On the inner side of the glass branch metal sheet 8, the outer guide connection portion 10 is supported by the rear end of the glass rod 9 and is surrounded by the glass rod 9. # As shown in FIG. 1 and FIG. 3, the metal cover is provided on the outer side of the sealing tube 4 at the “outer side” of the outer guide portion 12 and is inserted into the metal cover 11 to be connected to the outer guide connection portion 10, At the same time, the fixing material 13 is filled in the metal cover 丨, so that the auxiliary metal 盍 11 can be fixed to the sealing tube 4 by the fixing material 13. Similarly, the 'metal cover fixing portion 14 is used to connect the discharge lamp 1 to a lamp (not shown in the figure), which will be discussed below. The position connection portion 14b is used to define the connection position, and is formed on the circumference of the metal cover fixing portion 14. As shown in FIG. 3, the position connection portion Hb is a side of the metal cover fixing portion 14 that is cut into a cylindrical shape. The formation of the cutting plane portion is not limited to this form. For example, the cross-sectional style of the metal cover fixing portion 14 is shown in the list in FIG. 7, where the cross-section is perpendicular to the axial direction of the discharge lamp. The cross-sectional style of the metal cover fixing portion 14 of the present invention may be A 2 to A 9. However, as long as 'the position where the discharge lamp 1 is connected to the above-mentioned lamp can be defined', any shape is possible. Similarly, the section style can determine the only connection position. In other words, as in the table, the section style must be at least one of the top and bottom or left and right sides. The shape is different when flipped upside down, or the outer ridges overlap when the profile profile is flipped left and right according to the center line γ. In other words, if the two axes of the discharge lamp in Figure 3 are set to be opposite axes, that is, the Z-axis is rotated by a predetermined angle, then the cross-sectional pattern must become rotationally asymmetric and

2036-5481-P(Nl).ptd 第12頁 1239549 五、發明說明(7) 月】後不發生重疊情況。更進一步,金属盍固定部14b較好 是一連接部形成有既定且唯一的凸出部或凹陷部於金屬蓋 固定部14的圓周表面上(如第6圖中列表的A3至A9),而金 屬蓋固定部14則與燈具21之金屬蓋固定架26的凹陷部27連 接。 咬 — 陽極(圖上未顯示)側的密封管同樣由如同陰極3側的 密封官4所構成,同樣的上述之位置連接部1 4b亦形成在陰 極3#或陽極側的金屬蓋固定部丨4至少一個中的圓周上面,κ 而當陰極3與陽極兩端都有時,需做成彼此不同之外形, 以達到放電燈以同一方向發光的情形。2036-5481-P (Nl) .ptd Page 12 1239549 V. Description of the invention (July) No overlap occurs. Furthermore, the metal cymbal fixing portion 14b is preferably a connecting portion formed with a predetermined and unique projection or depression on the peripheral surface of the metal cover fixing portion 14 (such as A3 to A9 in the list in FIG. 6), and The metal cover fixing portion 14 is connected to the recessed portion 27 of the metal cover fixing frame 26 of the lamp 21. Bite-The sealed tube on the anode (not shown) side is also composed of the sealing member 4 on the cathode 3 side, and the same position connection part 1 4b is also formed on the cathode 3 # or the metal lid fixing part on the anode side 丨4 At least one of the circumferences, κ, and when both the cathode 3 and the anode have both ends, they need to be made different from each other to achieve the situation where the discharge lamp emits light in the same direction.

如第1和3圖所示,在金屬蓋11的側面上形成有複數個 開孔11a和lib ’此等開孔lla和lib形成的位置是以不相對 的方式排列’使得可以冷卻由於放電燈發光而高溫發熱的 金屬蓋11。開孔1 la和1 lb其中一個為導入空氣開孔1 ia, 而另一個開孔與開孔丨la是以不相對的方式設置,為空氣 導出開孔11 b,另外,至少一開孔1 1 a用以導入空氣或開孔 11 b用以導出空氣是必需被設置的。然而,並無特別限制 需設置複數個開孔。冷空氣由下述之燈具的空氣供應装置 提供至開孔11a而被導入,開孔lib的導出冷空氣使得^As shown in FIGS. 1 and 3, a plurality of openings 11a and lib are formed on the side of the metal cover 11 'The positions where these openings 11a and lib are formed are not arranged in a relative manner' so that cooling can be achieved due to the discharge lamp A metal cover 11 that emits light and generates heat at a high temperature. One of the openings 1 la and 1 lb is an inlet air opening 1 ia, and the other opening and the opening 1a are arranged in a non-opposed manner, and the air outlet opening 11 b is provided. In addition, at least one opening 1 1 a for introducing air or openings 11 b for discharging air must be set. However, there are no particular restrictions on the need to provide a plurality of openings. The cold air is supplied to the opening 11a by the air supply device of the following lamps, and the cold air discharged from the opening lib makes ^

蓋11得以冷卻。 開孔的數量、不相對的位置、尺寸以及形狀在當金屬 蓋11能被充分的冷卻下,是不被特別限定的。金屬蓋丨丨的 剖面樣式正交於放電燈的軸向如第8圖列表所示,而本發 明之金屬蓋11的孔洞數量,以及不相對的設置,如表上χ的The cover 11 is cooled. The number of openings, non-opposite positions, sizes, and shapes are not particularly limited as long as the metal cover 11 can be sufficiently cooled. The cross-sectional pattern of the metal cover 丨 丨 is orthogonal to the axial direction of the discharge lamp as shown in the list in FIG. 8, and the number of holes in the metal cover 11 of the present invention and the relative arrangement are not as shown in the table.

2036-5481-P(Nl).ptd2036-5481-P (Nl) .ptd

第13頁 1239549 五、發明說明(8) B4至B6為例,但並不限定必需如此設置,而如表上B5的外 形,冷空氣在金屬蓋11中停留的時間是最長的,能得到最 好的冷卻效果。此外,用在陽極(圖上未顯示)和陰極之金 屬蓋,其上的開孔數量、不相對的設置、尺寸以及外形是 可以不同的。 再者,固定材料13是充滿於放電燈1的金屬蓋η與密 封管4之間,而金屬蓋1 1側面上的複數個開孔丨丨a和丨丨b是 沒有被堵住的,固定材料1 3的材質並沒有特別的限定,只 要在高溫下還能緊密的連接、密封以及不會變質即可。 如上述之放電燈1具有位置連接部14b使放電燈1的金 屬蓋14可具體指定連接位置,更由於具有此連接部(位置 連接部14b)為一凸出部或凹陷部形成於金屬蓋固定部η的 圓周表面以成為唯一既定的連接位置,此—金屬蓋固定部 14的剖面樣式為至少上下不對稱或左右不相稱(旋轉不相 稱)中的一種,使得放電燈1的連接方向成為放電燈丨連接 = 具時的唯一方向,燈具上的空氣供應裝置及金 屬盍11上導入空氣的開孔lla間位置對應關係得以改盖, =兩者間不產生縫隙’因此,冷卻空氣有效地經開孔山 導入’而金屬蓋lla的冷卻效率可以改善。 再由與導人空氣開孔lla非相對的開孔m導出 工軋,及精由此二開孔,被導入之冷卻空 金屬蓋η内對流(金屬蓋内的空氣傳導持續時1p/變充的刀更的在 加金屬J3IL 1 1的冷卻效率。Page 13 1239549 V. Description of the invention (8) B4 to B6 are taken as an example, but it is not limited to this setting. As shown in the shape of B5 on the table, cold air stays in the metal cover 11 for the longest time. Good cooling effect. In addition, the number of openings on the metal cover used for the anode (not shown in the figure) and the cathode can be different. In addition, the fixing material 13 is filled between the metal cover η of the discharge lamp 1 and the sealing tube 4, and the plurality of openings 丨 丨 a and 丨 丨 b on the side of the metal cover 1 1 are not blocked, and are fixed. The material of material 1 3 is not particularly limited, as long as it can be tightly connected, sealed, and not deteriorated at high temperatures. As described above, the discharge lamp 1 has a position connection portion 14b, so that the metal cover 14 of the discharge lamp 1 can specify the connection position, and because the connection portion (position connection portion 14b) is a convex portion or a concave portion formed on the metal cover for fixing The circumferential surface of the portion η becomes the only predetermined connection position. This—the cross-sectional pattern of the metal cover fixing portion 14 is at least one of up and down asymmetrical or left and right dissymmetrical (rotational disproportion), so that the connection direction of the discharge lamp 1 becomes a discharge The connection of the lamp 丨 the only direction when the fixture is installed, the positional correspondence between the air supply device on the luminaire and the opening 11a for introducing air on the metal 得以 11 can be changed, = there is no gap between the two '. Therefore, the cooling air effectively passes through The opening of the hole is introduced, and the cooling efficiency of the metal cover 11a can be improved. Then, the work rolling is derived from the opening m that is not opposite to the lead air opening lla, and the convection in the cooled empty metal cover η is introduced through the two openings (the air conduction in the metal cover is 1p / charging when the air conduction continues). The knife has more cooling efficiency in adding metal J3IL 1 1.

2036-5481-P(Nl).ptd 第14頁 1239549 五、發明說明(9) 再者,固定材料13並未堵住開孔Ua及nb,才不至於 影響空氣傳導,於是不會減少導入金屬蓋n的空氣流量, 再者,此功能與傳統放電燈的熱隔絕材料不同,因此,放 電燈11内的冷卻效率可以改善。 所以,放電燈11内部冷卻效率的改善可使冷卻不足的 問題改善’亦可使放m無法開關、損壞、爆裂及壽命 短的問題得到解決,再者,經由連接部(位置連接部14b) 以凸出部或凹陷部的形式形成於金屬蓋固定部14的圓周表 面=成唯一既定的連接位置,以及金屬I固定部14其剖 =式具有非對稱(旋轉不才目稱)#至少上下不對稱或左右 的形式’當放電燈li4接至燈具時之極性連接不正 4 : : 2 :匕種極性連接錯誤將造成負極的頂端在燈亮 ^ ‘、要的扣耗,此將會使放電燈1的壽命變短。 产且2m”、2圖所示’光源裝置20包括放電燈1以及 二2^左拄妨φ ιΙ連接至燈具21。燈具21以連接板22、23 金屬蓋Hi ,以及藉由放電燈連接元件25下半部的 金屬盍固定架26固定放電燈i。 個“巧的3定是位於放電燈1之陽極或陰極上的至少-接位晋ί固疋部U上,更精確的來說,一個唯一既定的連 金屬蓋固定架26上的連;部的側表面’並與 外形,以Μ厘从 ^連接。當然,此連接位置的 第4圖Φ μ -金屬盍固定部H的剖面樣式最好是如第3圖和 #於+ Μ —不,而在第3和4圖中,凹陷部27的凸塊27a是形 成於金屬蓋固定架26,且與形成在金屬蓋固定部14外;:2036-5481-P (Nl) .ptd Page 14 1239549 V. Description of the invention (9) Furthermore, the fixing material 13 does not block the openings Ua and nb, so that it will not affect air conduction, so it will not reduce the introduction of metal The air flow rate of the cover n, and this function is different from the thermal insulation material of the conventional discharge lamp, so that the cooling efficiency in the discharge lamp 11 can be improved. Therefore, the improvement of the cooling efficiency inside the discharge lamp 11 can improve the problem of insufficient cooling. It can also solve the problems of failure to open and close, damage, burst, and short life of the discharge lamp. Furthermore, through the connection portion (position connection portion 14b), The form of the convex portion or the concave portion is formed on the circumferential surface of the metal cover fixing portion 14 = to be the only predetermined connection position, and the metal fixing portion 14 has a cross-section = asymmetry (rotation is not the only name) #at least up and down does not Symmetrical or left-and-right form 'When the discharge lamp li4 is connected to the lamp, the polarity connection is incorrect 4:: 2: The wrong polarity connection of the dagger will cause the top of the negative pole to light up ^', the required deduction, which will make the discharge lamp 1 Has a shorter life. The light source device 20 shown in FIG. 2 includes a discharge lamp 1 and two 2 ^ 拄 拄 φ ι Ι connected to the lamp 21. The lamp 21 is connected to the plate 22, 23 with a metal cover Hi, and connected to the element by the discharge lamp 25 The lower part of the metal cymbal holder 26 fixes the discharge lamp i. A “3” must be located at least on the anode or cathode of the discharge lamp 1 on the solid part U, more precisely, The only side surface of the connection portion on the fixed metal cover fixing frame 26 is connected to the outer shape at Μ 厘. Of course, the cross-sectional pattern of the Φ μ-metal 盍 fixing part H of this connection position is preferably as shown in FIG. 3 and # 于 + Μ—No, but in FIGS. 3 and 4, the bump of the recess 27 is 27a is formed on the metal cover fixing frame 26, and is formed outside the metal cover fixing portion 14;

1239549 五、發明說明(10) 的配合凹槽14a的外形相配合,而金屬蓋固定部14的位置 連接部14b則是固定於金屬蓋固定架μ的固定元件28,更 進一步,金屬蓋固定部14的配合凹槽i4a是經金屬蓋固定 架2 6的彈簧梢2 7 b及孔洞2 7 c由螺絲來固定。 同樣地,如第2圖和第5圖所示,燈具21包括氣體喷嘴 2 9a和3 0a當作氣體供應裝置以供應氣體用以冷卻放電燈1 陽極與陰極上的金屬蓋1丨、丨1。而每一喷嘴的頂端是設置 相對於傳導空氣用之開孔11 a,此開孔是形成於陽極與陰 極之金屬蓋11、11的側表面上,冷卻氣體便由此噴出。因 此,冷卻氣體被導入金屬蓋1 1中,而金屬蓋丨丨則由内部被 冷卻。喷嘴2 9 a、3 0 a的位置關係是依據位於陽極或陰極之 金屬蓋11、11側面上每一傳導空氣之開孔丨丨a的位置,以 放電燈1為旋轉方向而可以平移的。舉例來說,噴嘴2 9 a、 30a的位置關係在第5c圖中是平移18〇度的。 如第5a和5b圖中所示,每一喷嘴29a、3〇a的頂端位置 不是如第5a圖中所示的與金屬蓋丨丨的外表面適度的靠近, 就疋如第5b圖中所示的插入金屬蓋η中,可依冷卻效率而 定。同樣地,冷卻方法可適度的選自提供複數個各別的喷 嘴29a和30a之方法,或是由金屬蓋丨丨的外表面冷卻金屬蓋 11藉由喷灑冷卻氣體於金屬蓋表面上的方法,可依冷 率而定。同理,冷卻氣體的冷卻流量(c〇〇Hng fiu^ 是設定於50-30 0mL/min,其它的冷卻氣體亦可用來取 冷卻氣體。 更進一步地,燈具21包括反射器31以收集工作中放電1239549 V. Description of the invention (10) The shape of the fitting groove 14a is matched, and the position connection portion 14b of the metal cover fixing portion 14 is a fixing element 28 fixed to the metal cover fixing frame μ. Furthermore, the metal cover fixing portion The fitting groove i4a of 14 is fixed by screws through the spring tip 2 7 b and the hole 2 7 c of the metal cover fixing frame 2 6. Similarly, as shown in FIG. 2 and FIG. 5, the lamp 21 includes gas nozzles 29 a and 30 a as a gas supply device to supply gas for cooling the discharge lamp 1 and metal caps 1 and 1 on the anode and the cathode. . The tip of each nozzle is provided with an opening 11a for conducting air. This opening is formed on the side surfaces of the metal covers 11, 11 of the anode and cathode, and the cooling gas is ejected therefrom. Therefore, the cooling gas is introduced into the metal cover 11 and the metal cover 丨 丨 is cooled from the inside. The positional relationship of the nozzles 2 9 a and 30 a is based on the position of each of the openings for conducting air on the side of the metal lids 11 and 11 of the anode or cathode, and can be translated with the discharge lamp 1 as the rotation direction. For example, the positional relationship of the nozzles 29a, 30a is translated by 180 degrees in Fig. 5c. As shown in Figures 5a and 5b, the top positions of each nozzle 29a, 30a are not appropriately close to the outer surface of the metal cover as shown in Figure 5a, as shown in Figure 5b. The illustrated insertion into the metal cover η may depend on the cooling efficiency. Similarly, the cooling method may be appropriately selected from a method of providing a plurality of individual nozzles 29a and 30a, or a method of cooling the metal cover 11 from the outer surface of the metal cover 11 by spraying cooling gas on the surface of the metal cover. , Can be determined according to the cooling rate. Similarly, the cooling flow rate of the cooling gas (c00Hng fiu ^ is set at 50-30 mL / min, and other cooling gas can also be used to take the cooling gas. Furthermore, the lamp 21 includes a reflector 31 to collect the work Discharge

12395491239549

。的反射光,(如半導體矽晶圓),冷卻裝置32用來冷卻反 :31及覆蓋板33,&覆蓋板3 3是用來擋住反射器的熱 疋位於連接板33的底部 的光源裝置20中,燈具21之金屬蓋固定架26的凹 j27疋做成可與放電燈1之金屬蓋固定部14相連的,以 使付放電燈1的連接方向只有一個,而喷嘴“^、3〇a的位 置:,現性可以視為燈具21之氣體供應裝置和放電燈1的 金蓋11上之導引氣體開孔丨丨a、丨1 a被改善了因此,其 ,間的位置間隙將不會存在,且金屬蓋ila、ila内的冷卻 政率亦被改善。此外’金屬蓋i ii i内的冷卻效率是藉由 喷嘴29a、30a來維持,此噴嘴293、3〇a的位置係與用以導 引氣體的開孔11a、lla相對。 既然金屬蓋1 1、1 1内的冷卻效率如上述的被改善且維 持’燈具21伴隨著高光利用之放電燈丨其冷卻能力並不需 增加’反而有可能會減少,$而使得可以減少裝置的尺寸 以達較小的用電里。$進一步,放電燈1的發光位置也 i成單、方向,而放電燈丨因極性連接錯誤而減少使用壽 命可以被避免。 接下來將以具體之實施例說明本發明,但本發明並不 局限於本實施例。本發明之放電燈是—個短弧放電燈於一 外徑82厘米之冷光管中’冷光管長度為7厘米,總計有 20mg/CC的水銀圍繞,電功率為5千瓦,放電瓦特為5〇伏, 放電電流為1〇〇A,以陰極做為點燈位置以及燈具的金屬蓋 固定部設置於陰極上。. The reflected light (such as a semiconductor silicon wafer), the cooling device 32 is used to cool the reverse: 31 and the cover plate 33, and the cover plate 33 is used to block the heat of the reflector. The light source device is located at the bottom of the connection plate 33. In 20, the recess j27 of the metal cover fixing frame 26 of the lamp 21 is made connectable to the metal cover fixing portion 14 of the discharge lamp 1, so that there is only one connection direction of the auxiliary discharge lamp 1, and the nozzles "^, 3〇" The position of a: The presentity can be regarded as the gas supply device of the lamp 21 and the guiding gas openings on the gold cover 11 of the discharge lamp 1 丨 a, 丨 1 a has been improved. Therefore, the position gap therebetween will be It will not exist, and the cooling rate in the metal caps ila and ila is also improved. In addition, the cooling efficiency in the metal caps i ii i is maintained by the nozzles 29a and 30a, and the positions of the nozzles 293 and 30a are Opposite to the openings 11a, 11a for guiding the gas. Since the cooling efficiency in the metal covers 11 and 11 is improved as described above and maintained, the discharge lamp of the lamp 21 with the use of high light 丨 its cooling capacity is not required Increasing 'can reduce it, but can reduce the size of the device to Small electricity consumption. Further, the light emitting position of the discharge lamp 1 is also in a single direction, and the reduction of the service life of the discharge lamp due to the wrong polarity connection can be avoided. Next, the present invention will be described with specific embodiments. However, the present invention is not limited to this embodiment. The discharge lamp of the present invention is a short-arc discharge lamp in a cold light tube with an outer diameter of 82 cm. The length of the cold light tube is 7 cm, and it is surrounded by mercury of 20 mg / CC. The electric power is 5 kW, the discharge watt is 50 volts, and the discharge current is 100 A. The cathode is used as the lighting position and the metal cover fixing part of the lamp is provided on the cathode.

2036-5481-P(Nl).ptd λΓΤΓ 乐17頁 1239549 五、發明說明(12) 第一實施例 當放電燈連接至燈具時,為了能計算連接位置的可再 現性,放電燈具有A1至A9等九種樣式不同的陰極之金屬蓋 固定部的樣式。放電燈陰極之金屬蓋固定部的Ai至A9樣式 請見第7圖中的列表。此外,放電燈樣式A丨是習知的,而 A2至A9則是本發明的樣式。 放電燈金屬蓋樣式A1是做成沒有位置連接部以說明放 電燈的連接位置。而放電燈金屬蓋樣式人2至八9是具有位置 連接部以說明放電燈的連接位置。同樣地,在金屬蓋的表 面’於尾端部相同尺寸的高度上,設置有導引空氣以冷卻 用的開孔。 測量以下面方式執行,先依燈具準備A1至A9九種形式 的放電燈,放電燈連接至燈具數次,以檢查位於金屬蓋表 面之傳導空氣的開孔是否能與燈具之氣體喷嘴的位置相對 (之後將說明此位置再現性),此結果顯示於第7圖的列表 第7圖中之列表2036-5481-P (Nl) .ptd λΓΤΓ Le 17 page 1239549 V. Description of the invention (12) First embodiment When the discharge lamp is connected to a luminaire, in order to be able to calculate the reproducibility of the connection position, the discharge lamp has A1 to A9 Wait for nine different styles of the metal cap fixing part of the cathode. Ai to A9 styles of the metal cover fixing part of the cathode of the discharge lamp See the list in Figure 7. In addition, the discharge lamp patterns A 丨 are conventional, and A2 to A9 are patterns of the present invention. The discharge lamp metal cover pattern A1 is made without a position connection portion to explain the connection position of the discharge lamp. The discharge lamp metal cover styles 2 to 8-9 have position connection portions to explain the connection position of the discharge lamp. Similarly, an opening for guiding air for cooling is provided on the surface of the metal cover at the same size as the tail end. The measurement is performed in the following manner. First, prepare nine types of discharge lamps A1 to A9 according to the lamp. The discharge lamp is connected to the lamp several times to check whether the opening of the conductive air on the surface of the metal cover can be opposite to the position of the gas nozzle of the lamp. (This position reproducibility will be explained later.) This result is shown in the list in Figure 7. The list in Figure 7.

依測量的結果,可以檢查出放電燈A1 (習知之放電 接ί ί ΐ Ϊ =及位置無法再現的問題’因放電燈以眼萍 電“轴向ϊί氣體傳導開孔和氣體喷嘴的位置… 放電燈Α2(本發明的放電燈)具有二個位置連接部(According to the measurement results, the discharge lamp A1 (the conventionally known discharge connection ί ΐ Ϊ = and the problem that the position cannot be reproduced 'is because the discharge lamp uses the eye-pitch electricity "axially" the position of the gas conduction opening and the gas nozzle ... discharge The lamp A2 (the discharge lamp of the present invention) has two position connection portions (

1239549 五、發明說明(13) 邊部)於金屬蓋固定部 部)的尺寸相同,下兩側,而此位置連接部(削邊 饩^ ^ ^ ^兩種連接位置存在。然而,連接此放電 燈時,檢查檢查惫艚值道0曰 * « ^ e ^ —體傳導開孔和氣體喷嘴的位置,其位置 再現性是可以被求得的。 放電燈A3至Α9Γ太旅η口 位於今屬笔 ^ ^月之放電燈)具有一個位置連接部 金屬i固定部的^ 連接部)以凸起咬凹陷的° ,以及一連接部(位置決定 斜招& w 要位置此金屬蓋固定部具有至少一種不 ΐί 轉不對稱)。因此,即使放電燈沒有連接至 檢查氣體傳導開孔和氣體喷嘴,氣體傳導開孔 和乳體喷嘴的位置重現性是可以充分正確的被求得。 第二實施例 俨值屬盍内部冷卻效率的實驗中,金屬蓋側面上氣 開孔的數量及6種形式之放電燈81細,在 盍内,的溫度被用來互相作比較。金屬蓋的冷卻係; -;ϊ:: ΐ:嘴以單一方向噴灑冷卻氣體’金屬蓋“ 二:、由'電偶棒部位來測量(如第1圖中的外導引連接邻 10)、、中包含了内部金屬鉬以及内導線,此一量測々 顯不於第6圖中,此外,放電燈B1至B3為習知之放電^ 而放電燈B4至B6則為本發明之放電燈。 电燈, 第8圖中之列表 里測結果顯示不具有開孔之放電燈B丨(習知之放電燈)1239549 V. Description of the invention (13) The side part is the same size as the metal cover fixing part part, with the lower sides, and there are two kinds of connection parts at this position (cut edge 饩 ^ ^ ^ ^. However, connecting this discharge When the lamp is on, check the exhaustion threshold. 0 «^ e ^ —The position of the body conduction opening and the gas nozzle can be obtained. The position reproducibility of the discharge lamps A3 to A9 is located in the current genus The discharge lamp of the pen ^ ^ month) has a position connection part ^ connection part of the metal i fixing part) with a convex bite recessed °, and a connection part (position determines the oblique stroke & w to position the metal cover fixing part has At least one kind of asymmetrical). Therefore, even if the discharge lamp is not connected to the inspection gas conduction opening and the gas nozzle, the position reproducibility of the gas conduction opening and the milk nozzle can be sufficiently accurately obtained. Second Example In the experiment where the value of 盍 is the internal cooling efficiency of 盍, the number of gas openings on the side of the metal cover and the six types of discharge lamps 81 are thin. In 盍, the temperature is used to compare with each other. The cooling system of the metal cover;-; ϊ :: ΐ: spray the cooling gas in one direction on the metal cover 'metal cover' 2: measure by the position of the galvanic rod (such as the outer guide connection 10 in Figure 1), The internal metal molybdenum and the inner lead are included in the and. This measurement is not shown in Figure 6. In addition, the discharge lamps B1 to B3 are conventional discharge lamps ^, and the discharge lamps B4 to B6 are the discharge lamps of the present invention. Electric lamp, the test result in the list in Figure 8 shows the discharge lamp B without openings (the conventional discharge lamp)

1239549 五、發明說明(14) 金屬蓋中的溫度是最高#’再者,放電燈Μ至別(本 f明之放電燈)與放電燈B2 AB3比較具有更低的金屬蓋内 ^,原'因是習知的用以導出氣體的開孔與導入氣體的 開孔其位置是相對的,其由導入氣體開孔而導入金屬蓋内 ,之冷卻氣體並未帶走足夠的金屬蓋内部的熱,便由導出 氣體開孔排出,如此一來,使的金屬蓋内部冷卻效率變得 更糟。 換句居5兒,放電燈B4及B6(本發明之放電燈),用以導 出氣體的開孔與導入氣體的開孔其位置是不相對的設置, 因此,對流之冷卻氣體在被導出氣體的開孔排出之前能夠 吸收足夠的熱。為了檢查上述之情況,由放電燈金屬蓋 B2(習知之放電燈)以及放電燈金屬蓋β5(本發明之放電燈) 所排放出(經由導出氣體的開孔)的冷卻氣體之溫度被量 測’當冷卻氣體的冷卻流量(co〇ling flux)為1〇〇L/min, 排放出之冷卻氣體的溫度顯示放電燈B5(本發明之放電燈) 相較於放電燈B2(習知之放電燈)大約高於45。〇。 上述的結果顯示藉由提供複數個開孔於金屬蓋的側面 或將導出氣體開孔與導入氣體開孔其位置以不相對而設置 能有效改善金屬蓋内的冷卻效率,再者,以冷卻流量來 說,冷卻流量的影響減至1 / 2或更少(在本發明中冷卻流量 50L/min時内部溫度為160°C),相較於習知的金屬蓋來說 (在習知中冷卻流量1 0 0 L / m i η時内部溫度為1 7 5 °C )。 如上所述,本發明之短孤放電燈包括一位置連接部用 以定義連接位置係位於至少一陽極或陰極之金屬蓋固定部1239549 V. Description of the invention (14) The temperature in the metal cover is the highest # 'Furthermore, the discharge lamp M to the other (discharge lamp of this specification) has a lower metal cover inside than the discharge lamp B2 AB3, the original reason It is a conventional opening for introducing gas and an opening for introducing gas whose positions are opposite. It is introduced into the metal cover by the introduction of the gas opening, and the cooling gas does not take away the heat inside the metal cover. It will be discharged through the opening of the outlet gas. As a result, the cooling efficiency inside the metal cover becomes worse. In other words, the discharge lamps B4 and B6 (discharge lamps of the present invention), the openings for the outlet gas and the openings for the introduction of the gas are not in opposite positions. Therefore, the convective cooling gas is in the discharged gas. It can absorb enough heat before it is discharged. In order to check the above situation, the temperature of the cooling gas discharged from the discharge lamp metal cover B2 (the conventional discharge lamp) and the discharge lamp metal cover β5 (the discharge lamp of the present invention) (through the opening of the derived gas) is measured. 'When the cooling flux of the cooling gas is 100L / min, the temperature of the discharged cooling gas shows the discharge lamp B5 (discharge lamp of the present invention) compared to the discharge lamp B2 (the conventional discharge lamp) ) About 45. 〇. The above results show that the cooling efficiency in the metal cover can be effectively improved by providing a plurality of openings on the side of the metal cover or arranging the outlet gas openings and the introduction gas openings in opposite positions, and furthermore, the cooling flow rate For example, the influence of the cooling flow rate is reduced to 1/2 or less (in the present invention, the internal temperature is 160 ° C at a cooling flow rate of 50 L / min), compared with the conventional metal cover (cooling in the conventional The internal temperature is 17 5 ° C at a flow rate of 100 L / mi. As described above, the short solitary discharge lamp of the present invention includes a position connection portion for defining the connection position of the metal cover fixing portion at at least one anode or cathode.

2036-5481-P(Nl).ptd 第20頁 1239549 五、發明說明(15) "" 的圓周上,亦包括複數個以不相對之方式設置的開孔,係 位於1%極或陰極之金屬蓋的側面。因此使得冷卻效率可^ 被提升當冷卻喷嘴的可靠定位工作能被完成時。或是開孔 的數目為兩個,且位置連接部是一連接部為唯一既定之 ,位置,以凸出或凹陷的形態形成於金屬蓋固定部的 面。本發明之貢獻使得放電燈不會因不良連接方向^ i而ίϊ屬ϊΓΐ冷卻空氣,亦不會因不正確的極性連 接U、”和發光位置的缺陷而減短放電 連 再者,上述的放電燈係連接 一 .a ^ 固定架係可與放電燈的金屬蓋 =^,八/、金屬蓋 應裝置的位置是設置在相;;;=相3接:以及氣體供 其是固定於金屬蓋固定架上。經^之傳導乳體開孔,且 利用之放電燈其冷卻能力並不需捭述,燈具伴隨著高光 少,進而使得可以減少裝置的尺^σ >反而有可能會減 雖然本發明已以較佳實施例揭,較小的用電量。 限定本發明,任何熟習此項技蓺者上,然其並非用以 神和範圍内,仍可作些許^ 不脫離本發明之精 護範圍當視後附之申請專潤錦,因此本發明之保 τ月寻利乾圍所界定者為準。 、诉2036-5481-P (Nl) .ptd Page 20 1239549 V. The circle of the invention description (15) " " also includes a plurality of openings arranged in a non-relative manner, which are located at the 1% pole or cathode Side of the metal cover. Therefore, the cooling efficiency can be improved when the reliable positioning work of the cooling nozzle can be completed. Or the number of openings is two, and the position connection part is a connection part as the only predetermined position. The position is formed on the surface of the metal cover fixing part in a convex or concave form. The contribution of the present invention enables the discharge lamp not to belong to the cooling air due to the bad connection direction, nor to shorten the discharge due to the incorrect polarity connection U, "and the defect of the light emitting position. Furthermore, the above-mentioned discharge The lamp system is connected to a. A ^ The fixed frame can be connected to the metal cover of the discharge lamp = ^, eight, the metal cover should be installed in the phase of the device;; Phase 3 is connected: and the gas is fixed to the metal cover On the fixed frame. The conductive milk openings are used, and the cooling capacity of the discharge lamp does not need to be described. The lamp is accompanied by less highlights, which can reduce the size of the device. ^ Σ > The present invention has been disclosed in a preferred embodiment with a small power consumption. Limiting the present invention, anyone who is familiar with this technique can use it within the scope and spirit, but can still make a little ^ without departing from the present invention The scope of intensive care shall be treated as the attached application for exclusive use of Jinjin. Therefore, the definition of the security τ month profit-seeking Qianwei in the present invention shall prevail.

1239549 圖式簡單說明1239549 Schematic description

具的 第1圖係顯示本發明之放電燈主 第2圖係顯示本發明之光源裝置 主要部份前視圖; 要部份的剖面圖; 包括具有放電燈之燈 圖; 第3圖係顯示本發明之放電燈之金屬蓋的厂音 . 第4a圖係顯示燈具的金屬蓋固定牟少心 〜木 < 剐硯圖; 第4b圖是第4a圖中沿剖面線C-C的剖面圖· 第5 a圖是第2圖中沿剖面線A - A的剖面圖° · 第5b圖是第2圖中沿剖面線B-B的剖面圖| 第5c圖是顯示開孔與氣體供應裝置相關位置之剖面 第6圖係顯示金屬蓋内部溫度變化圖; 第7圖係顯示放電燈之剖面樣式列表;以及 第8圖係顯示金屬蓋剖面樣式列表。Figure 1 shows the main part of the discharge lamp of the present invention. Figure 2 shows the front view of the main part of the light source device of the present invention; section view of the main part; includes a lamp with a discharge lamp; Factory sound of the metal cover of the discharge lamp of the invention. Fig. 4a shows the fixing of the metal cover of the lamp by Mu Shaoxin ~ wood; Fig. 4b is a cross-sectional view along section line CC in Fig. 4a. Fig. 5a Figure 2 is a cross-sectional view taken along section line A-A in Figure 2 ° Figure 5b is a cross-sectional view taken along section line BB in Figure 2 | Figure 5c is a section showing the position of the opening and the gas supply device Figure 6 Figure 7 shows the temperature change inside the metal cover; Figure 7 shows the cross-section style list of the discharge lamp; and Figure 8 shows the cross-section style list of the metal cover.

符號說明 I 放電燈 2 冷光管 3 陰極 4 密封管 5電極傳導棒 6玻璃管(bead pipe) 7 連接構件 8 金屬片 9 玻璃棒(bead rob) 10 外導引連接部 11金屬蓋 Ua導入氣體開孔(開孔) II b 導出氣體開孔(開孔) 12外導引部 13固定材料 14 金屬蓋固定部DESCRIPTION OF SYMBOLS I discharge lamp 2 cold light tube 3 cathode 4 sealed tube 5 electrode conducting rod 6 bead pipe 7 connecting member 8 metal piece 9 glass rod (bead rob) 10 outer guide connection portion 11 metal cover Ua gas introduction opening Hole (opening) II b Outlet gas opening (opening) 12 Outer guide 13 Fixing material 14 Metal cover fixing

1239549 圖式簡單說明 1 4a S己合凹槽(mating groove) 14b 位置連接部(連接部) 2 0 光源裝置 21 燈具(luminaire) 22、23、24 連接板 25 放電燈連接元件 26 金屬蓋固定架 27 凹陷部 27a 凸塊 27b 彈簧梢(spr i ng p i η) 27c 孔洞 29a、29b、30a 氣體喷嘴 31 反射器(reflector) 32 冷卻裝置1239549 Brief description of the drawing 1 4a S mating groove 14b Position connection part (connection part) 2 0 Light source device 21 luminaire 22, 23, 24 Connection plate 25 Discharge lamp connection element 26 Metal cover fixing frame 27 recess 27a projection 27b spring tip (spr i ng pi η) 27c hole 29a, 29b, 30a gas nozzle 31 reflector 32 cooling device

2036-5481-P(Nl).ptd 第23頁2036-5481-P (Nl) .ptd Page 23

Claims (1)

修 iEy^Repair iEy ^ 六、申請專利範圍 1 ^ ^ ; /,具有陽極和陰極以相對的方式設 1. 一種短弧放電燈,畏兩 > —U斤 置於—冷光管,該冷光管的雨端各具有一岔封管,該短弧 放電燈藉由一固定材料設置,金屬蓋於每一密封管的外 側,且連接至一端固定的燈鼻以使用’該短弧放電燈包 1239549 ,役置於每一金屬蓋的末端,用以與 括: 一金屬蓋固定部 該燈具連接; . 少一金屬蓋固定部的阊3 一位置連接部,設置在炱夕 I w圓周 上,用以定義連接位置;以及 複數個開孔,以不相對的方式設置於該等金屬蓋的侧 面。 2·如申請專利範圍第1項所述^之短弧放電燈,其中該 等開孔係用以導入及導出冷卻空氣。 3·如申請專利範圍第1項所述之短弧放電燈,其中該 位置連接部是以凸出或凹陷的形式形成於金屬蓋固定部的 圓周表面上。 4 · 一種光源裝置,其中如申清專利範圍第1或3項所述 之短弧放電燈被連接至一燈具’包括· 一金屬蓋固定架,具有/凹陷部,可與該故電燈之陽 極或陰極上的至少一金屬蓋固定部連接;以及 氣體供應裝置,設置的位置是對應於傳導空氣之該等 開孔,該等開孔是設置於放電燈之陽極或陰極之金餐的 測面,該氣體供應裝置是固接於該金屬蓋固定架了屬I、Sixth, the scope of patent application 1 ^ ^; /, with anode and cathode are set in a relative way 1. A short arc discharge lamp, two dwarf > —U jin put on — cold light tube, the rain end of the cold light tube has a The short arc discharge lamp is arranged by a bifurcation tube, and the short arc discharge lamp is provided by a fixing material. A metal cover is provided on the outside of each sealed tube, and is connected to a fixed lamp nose at one end to use the short arc discharge lamp bag 1239549. The end of the metal cover is used to connect: a metal cover fixing part to the luminaire; a 位置 3 one-position connecting part with one less metal cover fixing part, which is arranged on the circumference of the night to define the connection position; and A plurality of openings are arranged on the sides of the metal covers in a non-opposing manner. 2. The short-arc discharge lamp as described in item 1 of the scope of patent application, wherein the openings are used to introduce and discharge cooling air. 3. The short-arc discharge lamp according to item 1 of the scope of patent application, wherein the position connection portion is formed on the circumferential surface of the fixing portion of the metal cover in the form of a protrusion or a depression. 4 · A light source device in which the short-arc discharge lamp as described in claim 1 or 3 of the patent scope is connected to a lamp 'includes · a metal cover holder with / recessed portion that can be connected to the anode of the old lamp Or at least one metal cover fixing part on the cathode; and the gas supply device, the positions are set corresponding to the openings for conducting air, and the openings are the measuring surfaces of the gold meal on the anode or cathode of the discharge lamp. The gas supply device is fixed to the metal cover fixing frame.
TW092102767A 2002-03-29 2003-02-11 Short are electric discharge lamp and light source equipment TWI239549B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002097660A JP2003297228A (en) 2002-03-29 2002-03-29 Short arc type discharge lamp and light source device

Publications (2)

Publication Number Publication Date
TW200405389A TW200405389A (en) 2004-04-01
TWI239549B true TWI239549B (en) 2005-09-11

Family

ID=28786217

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092102767A TWI239549B (en) 2002-03-29 2003-02-11 Short are electric discharge lamp and light source equipment

Country Status (4)

Country Link
JP (1) JP2003297228A (en)
KR (1) KR20030078753A (en)
CN (1) CN1275287C (en)
TW (1) TWI239549B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI383424B (en) * 2007-10-22 2013-01-21 Ushio Electric Inc High pressure discharge lamp and high pressure discharge lamp device
TWI396222B (en) * 2006-04-13 2013-05-11 Ushio Electric Inc Discharge lamp
TWI576894B (en) * 2012-12-28 2017-04-01 Hoya Candeo Optronics Corp Discharge lamp and discharge lamp installation and removal tool

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4749910B2 (en) * 2006-03-28 2011-08-17 株式会社オーク製作所 Lamp power supply structure
JP4495689B2 (en) 2006-03-30 2010-07-07 株式会社オーク製作所 Lamp and light source device
KR101904954B1 (en) * 2006-09-01 2018-10-08 가부시키가이샤 니콘 Discharge lamp, light source apparatus, exposure apparatus and exposure apparatus manufacturing method
JP4392803B2 (en) 2007-03-20 2010-01-06 Hoya Candeo Optronics株式会社 Light source device
KR20090101436A (en) * 2007-12-26 2009-09-28 파나소닉 주식회사 Feed terminal, cold-cathode fluorescent lamp having feed terminal, backlight unit having cold-cathode fluorescent lamp, and liquid crystal display having backlight unit
JP4537488B2 (en) * 2009-03-27 2010-09-01 Hoya Candeo Optronics株式会社 Discharge lamp
DE102009021524B3 (en) 2009-05-15 2010-11-11 Osram Gesellschaft mit beschränkter Haftung High pressure discharge lamp with cooling element
TWI470666B (en) * 2009-09-24 2015-01-21 Orc Mfg Co Ltd A discharge lamp, a discharge lamp electrode, and a discharge lamp electrode
JP4573311B2 (en) * 2010-03-17 2010-11-04 Hoya Candeo Optronics株式会社 Light source device and discharge lamp
JP6029387B2 (en) 2012-08-30 2016-11-24 株式会社オーク製作所 Discharge lamp attachment / detachment mechanism
JP7158097B2 (en) * 2018-05-10 2022-10-21 株式会社オーク製作所 Discharge lamp and method for manufacturing discharge lamp
JP7210269B2 (en) * 2018-12-26 2023-01-23 株式会社オーク製作所 Discharge lamps and lighting devices
JP7278185B2 (en) 2019-09-17 2023-05-19 キヤノン株式会社 LAMP DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING ARTICLE
JP7207244B2 (en) * 2019-09-17 2023-01-18 ウシオ電機株式会社 SHORT ARC DISCHARGE LAMP AND LIGHT RADIATION DEVICE
WO2021053945A1 (en) * 2019-09-17 2021-03-25 ウシオ電機株式会社 Short-arc discharge lamp and light radiating device
JP7149631B2 (en) * 2021-02-26 2022-10-07 株式会社ユメックス Foil-sealed short-arc mercury lamp

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396222B (en) * 2006-04-13 2013-05-11 Ushio Electric Inc Discharge lamp
TWI383424B (en) * 2007-10-22 2013-01-21 Ushio Electric Inc High pressure discharge lamp and high pressure discharge lamp device
TWI576894B (en) * 2012-12-28 2017-04-01 Hoya Candeo Optronics Corp Discharge lamp and discharge lamp installation and removal tool

Also Published As

Publication number Publication date
TW200405389A (en) 2004-04-01
CN1275287C (en) 2006-09-13
CN1450585A (en) 2003-10-22
JP2003297228A (en) 2003-10-17
KR20030078753A (en) 2003-10-08

Similar Documents

Publication Publication Date Title
TWI239549B (en) Short are electric discharge lamp and light source equipment
US6741036B1 (en) Gas discharge tube
JP3606149B2 (en) Light source device
JP2004047476A (en) Discharge lamp and compact self-ballasted fluorescent lamp
JP2007012777A (en) Light irradiation apparatus
JP4126527B2 (en) Light bulb shaped fluorescent lamp
JP6457162B2 (en) High pressure discharge lamp and lighting device
JP7259664B2 (en) SHORT ARC DISCHARGE LAMP AND LIGHT RADIATION DEVICE
WO2006087976A1 (en) Light source device
JP4390346B2 (en) Light source device
TWI795397B (en) High pressure discharge lamp and its control method
JP5271855B2 (en) Illumination device provided with windproof member
JP7251420B2 (en) SHORT ARC DISCHARGE LAMP AND LIGHT RADIATION DEVICE
US7733001B2 (en) Light source device
CN1758413B (en) Light source apparatus
RU2464491C2 (en) Large par lamp demonstrating superb light with higher efficiency and extended service life
JP2021047983A (en) Short arc type discharge lamp and light irradiation device
JP2005005027A (en) Short arc type discharge lamp with base and light source unit
JP4190401B2 (en) High intensity discharge lamp house storage device
JP7207244B2 (en) SHORT ARC DISCHARGE LAMP AND LIGHT RADIATION DEVICE
JP2001067902A (en) Illuminating device and projector
JP2008130418A (en) Discharge lamp holding mechanism
WO2021053945A1 (en) Short-arc discharge lamp and light radiating device
JP3124296U (en) Lamp device
JPH09283090A (en) Extra-high pressure ceramic xenon lamp

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees