JP4573311B2 - Light source device and discharge lamp - Google Patents

Description

  The present invention relates to a light source device that emits light including ultraviolet rays and a discharge lamp used in the light source device.

  In order to harden the paint or perform surface cleaning, peripheral exposure or surface modification of a semiconductor wafer or glass substrate, the object to be processed is irradiated with light including ultraviolet rays using a discharge lamp. . In the light source device having such a discharge lamp, for example, in the invention described in Patent Document 1, the light emitted from the discharge lamp is reflected and collected by a mirror such as an elliptical condensing mirror, and then the light is emitted to the exit. The light is guided and light is irradiated to the outside by a light guide means (light guide) such as an optical fiber bundle connected to the exit port.

  In such a light source device housing, the fixing base of the discharge lamp is attached to a lamp holder provided with an elliptical condensing mirror. When the discharge lamp is mounted at an appropriate position of the lamp holder, the luminescent spot of the discharge lamp matches the first focus of the elliptical condensing mirror. And the optical fiber bundle attached to the exit port of the 2nd focus of an elliptical condensing mirror is arrange | positioned. With this configuration, light emitted from the bright spot of the discharge lamp can be efficiently guided to the exit end of the optical fiber bundle.

Utility Model Registration No. 3124444 JP-A-10-55713 JP 2003-297228 A

  However, when the operator replaces the discharge lamp, the clamp screw may be tightened without fully inserting the fixing base of the discharge lamp into the lamp holder. Even if it is not fully inserted into the lamp holder, the discharge lamp will light up when the power is turned on to the base. However, since the bright spot of the discharge lamp is not at the first focal point of the elliptical condenser mirror, the illuminance is insufficient at the exit end of the optical fiber bundle. When the operator cannot actually clean the surface of the semiconductor wafer or glass substrate using the optical fiber bundle, the fixing cap of the discharge lamp is fully inserted into the lamp holder while investigating the cause of the defect. I noticed that it was not.

  Further, the bright spot of the discharge lamp also changes in the XY plane when the axial direction of the discharge lamp is the Z-axis direction. Since the fixing base of the discharge lamp has a substantially cylindrical shape, the discharge lamp can rotate around the axis in the lamp holder. As a result, the position of the luminescent spot of the discharge lamp may deviate from the first focal position, making it impossible to obtain a desired illuminance.

  Therefore, the present invention prevents the discharge lamp from being clamped to the lamp holder unless the operator attaches the discharge lamp so that the position of the bright spot of the discharge lamp is at the first focal position of the elliptical condenser mirror. An object of the present invention is to provide a light source device including the discharge lamp and a discharge lamp used in the light source device.

  A light source device according to a first aspect is a light source device including a light exit port, and includes a reference surface and a rotating portion that has a fitting portion formed on an inner periphery and rotates from a first position to a second position. A first pair of notches formed on the outer periphery of the cylinder, and a second pair of notches that also serve as a joint that joins the fitting portion formed on the outer periphery of the cylinder And a groove portion having a diameter equal to or smaller than the interval between the first pair of cutout portions and formed along the outer periphery between the first barrel portion and the second barrel portion. A discharge lamp having a base, and an elliptical mirror that reflects light emitted from a discharge lamp that has a first focal point and a second focal point, and is arranged so that the second focal point coincides with the light exit port, When the fixing part is joined to the fitting part and the fixing base rotates, the joining part rotates the rotating part. The axial end surface formed on the first body side of the groove is joined to the reference surface and the fixing base is fixed to the lamp holder, so that the bright spot of the discharge lamp coincides with the first focal point of the elliptical mirror. It is characterized by doing.

  The light source device according to the second aspect is characterized in that, in the first aspect, the lamp holder includes clamping means for clamping the discharge lamp.

  The light source device according to a third aspect is characterized in that, in the first aspect or the second aspect, the lamp holder includes a plunger that holds the rotational position of the fixing base.

  The light source device according to the fourth aspect is characterized in that, in the first to third aspects, a flat surface is formed in the fitting part of the rotating part.

  In the light source device according to the fifth aspect, in the first to fourth aspects, a first mark indicating the first position and a second mark indicating the second position are provided on the outer peripheral surface of the rotating unit, A window part is formed in the clamp means, and the window part displays either the first mark or the second mark.

  In the discharge lamp according to the sixth aspect, in the light source device according to the first aspect, the first pair of notches are formed by surfaces facing each other, and the second pair of notches are the first pair of notches. It is characterized by being formed by mutually facing surfaces in the same direction as the surfaces of the pair of cutout portions.

A discharge lamp according to a seventh aspect is the light source device according to the third aspect, wherein a concave portion into which the plunger enters the first body portion or the second body portion of the fixing base is formed, and the rotating portion is in the second position. The recess is characterized by receiving a plunger.

A discharge lamp according to an eighth aspect is characterized in that, in the light source device according to the fourth aspect, the bonding portion of the fixing base has a flat surface at least in part, and the flat surface of the bonding portion is bonded to the flat surface of the fitting portion. And

A discharge lamp according to a ninth aspect is the light source device according to the first to fifth aspects, wherein the fixing base has an opening in the central axis, and the stem of the discharge lamp is inserted into the opening and fixed. .

  According to the present invention, the discharge lamp fixing base can be fixed to the lamp holder only when the discharge lamp is mounted so that the position of the bright spot of the discharge lamp is at the first focal position of the elliptical condensing mirror. it can. Therefore, the discharge lamp does not light up when the illuminance is insufficient.

It is a figure which shows the example of the discharge lamp provided with the nozzle | cap | die for fixing. (A) is the figure which showed the 1st example of the nozzle | cap | die 20 for fixing, (b) is the figure which showed the 2nd example of the nozzle | cap | die 20 for fixation. (A) to (d) are plan views showing the outer shape of the fixing base 20 as seen from the Z-axis direction. (A) is a perspective view of the lamp holder 50, (b) is a perspective view in which a part of the clamp portion 54 is cut. FIG. 4 is a development view of the lamp holder 50. FIG. 6 is a development view of the lamp holder 50 as viewed from the opposite side of FIG. 5. It is a figure explaining the operation | movement which mounts the discharge lamp 10 in the lamp holder 50. FIG. It is a figure explaining the nozzle | cap | die for fixing which has the recessed part 27C in the 1st trunk | drum 21. FIG. FIG. 4 is a view showing the back surface of the fixing base 20 and the rotating ring 53 that do not have a recess 27. 2 is an example of a light source device 100 including an optical fiber bundle 83 at an emission port 81. FIG.

<Structure of discharge lamp with fixing base>
Hereinafter, embodiments of the discharge lamp of the present invention will be described.
FIG. 1 is a schematic view for explaining the configuration of the discharge lamp of the present invention. In FIG. 1, the discharge lamp 10 has a fixing base 20 at one end. Examples of the discharge lamp 10 include a mercury xenon lamp and an ultra-high pressure mercury lamp, and irradiates light including ultraviolet rays. In the present embodiment, the discharge lamp 10 is preferably a short arc lamp having a bright spot as a point light source. For example, an ultra-high pressure mercury lamp has a bulb formed of quartz glass and an anode and a cathode formed of tungsten. The stem is made of molybdenum conductive foil, and the bulb is filled with mercury or a rare gas. The fixing base 20 that is a lamp mounting portion is stably supplied with power.

  The discharge lamp 10 is inserted into the lamp holder 50 with the fixing base 20 facing up. The lamp holder 50 is attached to the lamp holder mounting bracket 70.

<Structure of fixing base>
FIG. 2A is a view showing a first example of the fixing base 20, and FIG. 2B is a view showing a second example of the fixing base 20. (A1) is a perspective view of the first example, (a2) is a plan view of the first example viewed from the Y-axis direction, and (a3) is a plan view of the first example viewed from the X-axis direction. Similarly, (b1) is a perspective view of the second example, (b2) is a plan view of the second example viewed from the Y-axis direction, and (b3) is a plan view of the second example viewed from the X-axis direction. is there. The fixing base 20 is inserted into a later-described live holder 50 and fixed to the lamp holder 50 with a clamp screw 55 (see FIG. 1).

  The fixing base 20 has a first body part 21, a second body part 23, and a cylindrical groove part 25 formed between the first body part 21 and the second body part 23. The stem of the discharge lamp 10 is inserted into the opening 29 formed on the central axis of the fixing base 20, and the stem and the opening 29 are fixed with a ceramic adhesive or the like. The first body portion 21 has a cylindrical shape, and a notch portion (first pair of notch portions) 21 </ b> H cut into a planar shape is formed symmetrically with respect to the fixing base 20.

The second body portion 23 has a cylindrical shape, and a joining portion (second pair of cutout portions) 23 </ b> H cut in a planar shape is formed symmetrically with respect to the fixing base 20. Further, as shown in FIG. 2A, a counterbore 27 </ b> A that is a concave portion 27 is formed in the second body portion 23 of the first example. As shown in FIG. 2B, a slit groove 27B extending in the axial direction is formed in the second body portion 23 of the second example.
A cylindrical groove portion 25 having an axial width L25 is formed between the first body portion 21 and the second body portion 23. For this reason, a reference step surface 21B (an axial end surface on the groove portion side on the first body portion side) is formed in the first body portion 21 and the cylindrical groove portion 25, and the second body portion 23, the cylindrical groove portion 25, and the like. The stopper surface 23E for stopping insertion is formed. Further, the axial width L25 of the cylindrical groove portion 25 is defined in relation to a clamp portion 54 described later.

  FIG. 3 is a plan view of the fixing base 20 as viewed from the Z-axis direction. Each of the notch portion 21H formed in the first body portion 21 and the joint portion 23H formed in the second body portion 23 is shown. It is the figure which showed multiple shapes. A distance L23 between the pair of joint portions 23H formed on the second body portion 23 is larger than a distance L21 between the pair of cutout portions 21H formed on the first body portion 21.

  The fixing base 20 shown in FIG. 3A has the same shape as the fixing base 20 shown in FIGS. 1 and 2. The cylindrical diameter RA21 of the first body 21 is narrower than the cylindrical diameter RA23 of the second body 23. A diameter RA25 of the cylindrical groove portion 25 is narrower than a cylindrical diameter RA21 of the first body portion 21. Further, the diameter RA25 of the cylindrical groove portion 25 is the same length or narrower than the distance L21 of the pair of notch portions 21H formed in the first body portion 21.

  The lamp holder 50 has a pair of extension portions 54T, and an interval L54S (see FIG. 4) is larger than the distance L21 of the pair of cutout portions 21H and smaller than the distance L23 of the pair of joint portions 23H. Therefore, when the discharge lamp 10 is inserted into the lamp holder 50, the stopper surface 23E shown in FIG. 2 comes into contact with the extension 54T of the clamp portion 54 of the lamp holder 50, so that the discharge lamp 10 exceeds the predetermined insertion amount. Don't enter.

  In the fixing base 20 shown in FIG. 3B, a U-shaped groove portion 21 </ b> C is formed in a pair of cutout portions 21 </ b> H formed in the first body portion 21. Thus, even if the U-shaped groove 21C is formed in the notch 21H, there is no functional problem. Although not shown, a V-shaped groove may be used instead of the U-shaped groove 21C.

  In the fixing base 20 shown in FIG. 3C, a U-shaped groove portion 23 </ b> C is formed in a pair of joint portions 23 </ b> H formed in the second body portion 23. Even if the U-shaped groove 23C is formed in the joint 23H as described above, if the joint 23H can be joined to the rotating ring 53 (see FIGS. 4 and 5) of the lamp holder 50 and the rotating ring can be rotated, It may be a V-shaped groove (not shown).

  In the fixing base 20 shown in FIG. 3 (d), a concave groove portion 21 </ b> D is formed in a pair of cutout portions 21 </ b> H formed in the first body portion 21. Even if such a concave groove 21D is formed, there is no problem as long as it functions as a notch as a whole. Further, in the fixing base 20 shown in (d), saw teeth 23 </ b> D are formed in a pair of joint portions 23 </ b> H formed in the second body portion 23. Even if the sawtooth 23D is formed in the joint portion 23H in this manner, it is only necessary that the joint portion 23H can join the rotating ring 53 of the lamp holder 50 and rotate the rotating ring 53.

<Lamp holder structure>
FIG. 4A is a perspective view of the lamp holder 50, and FIG. 4B is a perspective view with a part thereof cut. FIG. 5 is a development view of the lamp holder 50. 6 is a development view of the lamp holder 50 as viewed from the opposite side of FIG.
The lamp holder 50 includes a holder base 51, a rotating ring receiving base 52, a rotating ring 53, a clamp portion 54, and a clamp screw 55. A rotating ring cradle 52 and a clamp portion 54 that support the rotating ring 53 are fixed to the holder base 51.

  A rotating surface 52A for rotating the rotating ring 53 on a predetermined surface is formed on the rotating ring pedestal 52, and a plunger for which a ball plunger BP2 (see FIG. 7) is inserted into the rotating surface 52A. A hole 52B is formed. The rotation ring 53 is held at the first position by the ball plunger BP2.

  A projecting pin 53A is fitted and fixed to the circular outer peripheral surface of the rotating ring 53. The protruding pin 53A has two functions. One is to control the rotation of the clamp screw 55. The other is the role of colliding with the stopper pin 54D so that the rotating ring 53, that is, the discharge lamp 10 does not rotate more than a predetermined rotation. A counterbore 53B (see FIG. 9) for the ball plunger BP2 attached to the rotary ring pedestal 52 is formed on the lower surface of the rotary ring 53. Further, the inner peripheral surface of the rotating ring 53 includes a circumferential surface and a straight surface 53H that is a fitting portion. The straight surface 53 </ b> H is joined to the joint 23 </ b> H formed on the second body 23 of the fixing base 20. For this reason, the space | interval of a pair of linear surface 53H is a little larger than the space | interval of a pair of junction part 23H. Thus, since the pair of straight surfaces 53H are for rotating the rotating ring 23, even if the U-shaped groove portion 23C or the V-shaped groove portion of the second body portion 23 shown in FIG. 3 is formed. Good.

  As shown in FIG. 6A, a blue mark 53M1 and a red mark 53M2 are further formed on the circular outer peripheral surface of the rotating ring 53. The blue mark 53M1 and the red mark 53M2 are shifted by 90 degrees about the rotation axis, and the blue mark 53M1 is formed on the opposite side of the protruding pin 53A. The blue mark 53M1 means that the discharge lamp 10 is mounted and rotated 90 degrees as will be described later, and the clamp screw 55 can be tightened. Therefore, in addition to the blue mark, “closed” or “OK” may be engraved. Since the red mark 53M2 is the opposite, it is marked as “open” or “NG”.

  The clamp portion 54 includes a slit portion 54A and a circular clamp surface 54C. The slit 54A is provided with a hole 54B into which the clamp screw 55 is inserted and a screw 54F. The clamp portion 54 is fixed by three screw holes 51B of the holder base 51, and one of the slit portions 54A is not fixed. For this reason, when the clamp screw 55 is tightened, the slit portion 54 </ b> A becomes narrow and the clamp surface 54 </ b> C tightens the second body portion 23. Further, the clamp portion 54 includes a reference surface 54S, and the reference surface 54S includes an extension portion 54T extending in the central axis direction from the inner periphery of the circular clamp surface 54C. The distance L54S between the pair of extension portions 54T is larger than the distance L21 of the notch portion 21H of the first body portion 21 and smaller than the cylindrical diameter (RA21 * 2) of the first body portion 21. Further, the axial width L54T of the extension portion 54T is smaller than the width L25 of the cylindrical groove portion 25 of the fixing base 20. For this reason, the cylindrical groove portion 25 of the fixing base 20 passes through the extension portion 54T, and the fixing base 20 can be rotated by the extension portion 54T.

  The stopper surface 23E of the fixing base 20 shown in FIG. 2 contacts the lower surface of the extension portion 54T of the clamp portion 54. For this reason, the fixing base 20 of the discharge lamp 10 is prevented from entering more than a predetermined insertion amount. The axial width L54T of the extension 54T is slightly smaller than the axial width L25 of the cylindrical groove 25.

  For this reason, after the fixing base 20 is inserted into the clamp part 54 and the stopper surface 23E of the fixing base 20 contacts the lower surface of the extension part 54T, the fixing base 20 can be rotated 90 degrees. When the discharge lamp 10 is released after rotating 90 degrees, the discharge lamp 10 is lowered by its own weight, the reference step surface 21B of the first body portion 21 and the reference surface 54S of the clamp portion 54 are in contact with each other, and the Z-axis direction The position of the bright spot of the discharge lamp 10 is positioned.

  The clamp portion 54 is further provided with a stopper pin 54D that restricts the protruding pin 53A of the rotating ring 53 from rotating more than a predetermined amount. Further, a plunger hole 54P into which the ball plunger BP1 (see FIG. 7) is inserted is formed in the circular clamp surface 54C of the clamp portion 54 so that the fixing base 20 does not rotate more than a predetermined rotation. The ball plunger BP1 is attached to the plunger hole 54P of the clamp portion 54. The ball plunger BP1 contacts the counterbore 27A of the second body 23 shown in FIG. 2 (a) or the slit groove 27B shown in FIG. 2 (b).

  As shown in FIG. 6, the clamp portion 54 has a window portion 54W formed below the plunger hole 54P. As shown in FIG. 6B, the operator can check the blue mark 53M1 or the red mark 53M2 from the window portion 54W. When the discharge lamp 10 is not attached, the operator can see the red mark 53M2 from the window portion 54W. On the other hand, when the operator attaches the discharge lamp 10 and rotates the discharge lamp 10 about the 90-degree axis, the operator can see from the window 54W that the red mark 53M2 has changed to the blue mark 53M1.

  The clamp screw 55 includes a handle portion 55A and a screw portion 55B. An attachment surface 55C to which the rotation limiting ring 56 is attached is provided between the handle portion 55A and the screw portion 55B. A distance L55 between the handle portion 55A and the rotation limiting ring 56 is slightly larger than one width L54 of the slit portion 54A of the clamp portion 54, and defines the screwing amount of the clamp screw 55. For this reason, the operator can narrow or loosen the width of the slit portion 54A of the clamp portion 54 by rotating the clamp screw 55 several times. In addition to the clamp screw 55, other means such as a screwed cam may be used as long as it can tighten the clamp portion 54.

  The rotation limiting ring 56 has two protrusions 56A, and a gap into which the protrusion pin 53A of the rotation ring 53 enters is formed between the two protrusions 56A. In the state where the protruding pin 53A is between the two protruding portions 56A, the clamp screw 55 cannot be tightened even if it is to be tightened.

<Procedure for attaching the discharge lamp to the lamp holder>
FIG. 7 is a diagram illustrating a procedure for mounting the discharge lamp 10 to the lamp holder 50. In (a)-(c), the lamp holder 50 has shown sectional drawing.

  In FIG. 7A, the discharge lamp 10 is inserted into the lamp holder 50 with the fixing base 20 of the discharge lamp 10 facing upward from below the Z axis. At this time, the operator cannot insert the lamp holder 50 unless the notch portion 21H formed in the first body portion 21 is directed in the X-axis direction. This is because the distance L54S between the pair of extension portions 54T is smaller than the cylindrical diameter (RA21 * 2) of the first body portion 21. Since the rotating ring 53 is held at the first position by the ball plunger BP2 and the counterbore 53B, the stopper surface 23E hits the lower surface of the rotating ring 53, and the fixing base 20 of the discharge lamp 10 is clamped by the clamp portion 54. Can not be inserted.

  Since the distance L21 of the cutout portion 21H of the first body portion 21 is narrower than the interval L54S, the operator can insert the fixing base 20 into the extension portion 54T of the clamp portion 54. However, since the distance L23 between the pair of joint portions 23H is wider than the distance L54S, the stopper surface 23E comes into contact with the extension portion 54T of the clamp portion 54 of the lamp holder 50, and the operator moves the fixing base 20 from the predetermined position. It cannot be inserted upwards.

  FIG. 7B shows a state where the discharge lamp 10 is inserted to the uppermost position. In this state, the linear surface 53H of the rotating ring 53 and the joint 23H formed on the second body 23 are joined. However, the straight surface 53H and the joint portion 23H may be joined so loosely that the rotating ring 53 can be rotated during rotation. Therefore, when the operator releases the hand in the state shown in FIG. 7B, the discharge lamp 10 falls due to its own weight. In this state, even if the operator tries to tighten the clamp screw 55, the projection pin 53 </ b> A of the rotation ring 53 is inserted between the projections 56 </ b> A of the rotation limiting ring 56, so the operator tightens the clamp screw 55. I can't. Therefore, the operator rotates the discharge lamp 10 about the axis of 90 degrees with the discharge lamp 10 inserted to the uppermost position. Then, the state shown in FIG.

By turning the discharge lamp 10 about the 90-degree axis, the notch portion 21H is directed in the Y-axis direction, and the reference step surface 21B of the first body portion 21 is caught by the clamp portion 54. When the operator releases the discharge lamp 10 in this state, the reference step surface 21B of the first body portion 21 and the reference surface 54S of the clamp portion 54 come into contact with each other due to the weight of the discharge lamp 10. The reference surface 54S is bright point of the discharge lamp 10 is set to come to the focus F ₁ of the ellipsoidal mirror. Further, the plunger BP1 attached to the clamp part 54 enters the concave part 27 formed in the second body part 23 so that it can be recognized that the operator has turned 90 degrees. When the plunger BP1 enters the recess 27, the discharge lamp 10 is held in a state of being rotated 90 degrees. By rotating the discharge lamp 10 about the 90-degree axis, the position on the XY plane (the rotation direction in the Z-axis direction) can also be matched.

  Further, by rotating the discharge lamp 10 about the axis of 90 degrees, the joining portion 23H formed on the second body portion 23 comes into contact with the linear surface 53H of the rotating ring 53 and rotates the rotating ring 53 by 90 degrees. Then, the projecting pin 53A of the rotating ring 53 is also rotated 90 degrees. Since there is no projection pin 53A of the rotation ring 53 between the two projections 56A of the rotation limiting ring 56, the operator can tighten the clamp screw 55.

  As described above, when the operator attaches the discharge lamp 10 to the lamp holder 50, the operator attaches the discharge lamp 10 unless the discharge lamp 10 is inserted into the lamp holder 50 to the top and rotated. I can't. That is, the discharge lamp 10 cannot be mounted at a position different from the desired position. Therefore, if the discharge lamp 10 can be mounted, the luminescent spot of the discharge lamp 10 is just at the first focal point, and a slight deviation of the luminescent spot generated on the XY plane is also caused by the XY plane (the rotation direction in the Z-axis direction). ) Position can also be adjusted. Therefore, the light source device 100 can stably irradiate light including ultraviolet rays.

<Modification 1>
In FIG. 2, the spot facing 27 </ b> A is formed in the second body portion 23, and the slit groove 27 </ b> B is formed in the second body portion 23.

FIG. 8 shows an example in which a counterbore 27 </ b> A is formed on the first body portion 21.
As shown in FIG. 8A, the second body portion 23 is not formed with the counterbore 27 </ b> A, but the first body portion 21 is formed with the counterbore 27 </ b> A. (B) shows the lamp holder 50 of the first modification. A rib portion 54Q protruding upward from the reference surface 54S is formed in the clamp portion 54-1 of the lamp holder 50. A plunger hole 54P into which the ball plunger BP1 is inserted is formed in the rib portion 54Q.

  As shown in FIG. 8C, when the operator turns the discharge lamp 10 about the 90-degree axis with the discharge lamp 10 inserted to the uppermost position, the plan attached to the clamp portion 54-1. The jar BP1 enters the counterbore 27A formed in the first body portion 21.

<Modification 2>
FIG. 9 shows a second modification using the fixing base 20 having no recess 27. In this case, the ball plunger BP1 is not provided in the clamp portion 54. Instead, a counterbore 53C for the ball plunger BP2 attached to the rotating ring pedestal 52 is formed on the lower surface of the rotating ring 53.

  The counterbore 53B of the rotating ring 53 holds the rotating ring 53 in the first position when the discharge lamp 10 is inserted. On the other hand, the counterbore 53C of the rotating ring 53 holds the discharge lamp 10 at the second position rotated 90 degrees about the axis. Thus, the discharge lamp 10 may have the fixing base 20 that does not have the recess 27.

<Structure of light source device>
A light source device 100 will be described as an example of a light source device equipped with a discharge lamp according to the present invention. FIG. 10 shows an example of the light source device 100 including the optical fiber bundle 83 at the emission port 81.

The light source device 100 includes a discharge lamp 10 having a fixing base 20 at one end, a lamp holder mounting bracket 70 for mounting the discharge lamp 10, and a housing 79. The lamp holder mounting bracket 70 includes a reflective elliptical mirror 75, and the elliptical mirror 75 is disposed downward. The discharge lamp 10 is attached from the lower side, and as described above, the reference step surface 21B of the first body portion 21 of the fixing base 20 and the reference surface 54S of the clamp portion 54 come into contact with each other so as to hang under their own weight. Part of the light of the discharge lamp 10 emitted at the first focal point F ₁ of the elliptical mirror 75 is reflected by the elliptical mirror 75 and travels toward the exit port 81. Since the second focal point F ₂ of the elliptical mirror 75 is at the exit port 81, the light from the discharge lamp 10 is collected at the exit port 81. Fiber optic bundle can emit the light focused at the second focal point F ₂ to the outside. In addition to the optical fiber bundle 83, the light may be guided using a lens or a mirror.

  As shown in FIG. 10, it is preferable to connect one end of an optical fiber bundle 83 to the exit port 81, and irradiate the work guided by the optical fiber from the other end of the optical fiber bundle 83. In addition, the lamp holder mounting bracket 70 includes a diaphragm portion (not shown) that changes the numerical aperture. It is preferable to attach the heat radiating fan 85 to the housing 79, and it is preferable to cool the discharge lamp 10, the elliptical mirror 75, the power source 77, etc. by operating the heat radiating fan 85 and exhausting the air in the housing 79.

  According to the discharge lamp of the present invention, the discharge lamp cannot be clamped to the lamp holder unless the operator inserts the discharge lamp to a predetermined position of the lamp holder and rotates it. For this reason, the discharge lamp having such a fixing base is not attached to a wrong position.

  In the present embodiment, the reference step surface 21B of the first body portion 21 of the fixing base 20 is in contact with the reference surface 54S of the clamp portion 54 by its own weight. However, instead of inserting the discharge lamp 10 into the lamp holder 50 from below in the Z-axis direction, the lamp holder mounting bracket 70 may be disposed in the horizontal direction and the discharge lamp 10 may be inserted into the lamp holder 50 in the horizontal direction. . In this case, the reference step surface 21 </ b> B of the discharge lamp 10 may be in contact with the reference surface 54 </ b> S of the clamp portion 54 using a coupling means such as an electromagnet.

10 …… Discharge lamp 20 …… Fixing cap 21 …… First body (21B …… Reference step surface, 21H …… Notch)
23 …… Second body part (23H …… Joint part)
25 …… Cylindrical groove 27 …… Recess (27A …… Spot face, 27B …… Slit groove)
50 …… Lamp holder 51 …… Holder base 52 …… Rotating ring cradle 53 …… Rotating ring (53A …… Protruding pin, 53B …… Spot facing, 53C …… Spot facing, 53H …… Straight part, 53M …… mark)
54 …… Clamp part (54A …… Slipping part, 54T …… Extension part)
55 …… Clamp screw 56 …… Rotation limiting ring (56A …… Protrusions)
70 …… Lamp holder mounting bracket 75 …… Oval mirror 79 …… Housing 81 …… Exit port 83 …… Optical fiber bundle 85 …… Heat radiation fan 100 …… Light source device BP1, BP2 …… Plunger

Claims (9)

A light source device having a light exit port,
A lamp holder having a reference surface and a rotating part formed with a fitting part on the inner periphery and rotating from the first position to the second position;
A first body having a first pair of cutouts formed on the outer periphery of the cylinder, and a second pair of cutouts also serving as a joint for joining the fitting part formed on the outer periphery of the cylinder A fixing including a second body part and a groove part having a diameter equal to or smaller than a distance between the first pair of notch parts and formed along the outer periphery between the first body part and the second body part. A discharge lamp having a base,
An elliptical mirror that has a first focal point and a second focal point, and reflects the light emitted by the discharge lamp disposed so that the second focal point coincides with the light exit port;
With
When the joining portion joins the fitting portion and the fixing base rotates, the joining portion rotates the rotating portion, and an axial end surface formed on the first body portion side of the groove portion is the reference portion. A light source device characterized in that a bright spot of the discharge lamp coincides with the first focal point of the elliptical mirror by joining the fixing base to the lamp holder by joining to a surface.   The light source device according to claim 1, wherein the lamp holder includes a clamping unit that clamps the discharge lamp.   The light source device according to claim 1, wherein the lamp holder includes a plunger that holds a rotational position of the fixing base.   The light source device according to any one of claims 1 to 3, wherein a flat surface is formed in the fitting portion of the rotating portion. A first mark indicating the first position and a second mark indicating the second position are provided on the outer peripheral surface of the rotating portion,
A window portion is formed in the clamping means,
The light source device according to any one of claims 1 to 4, wherein the window portion displays either the first mark or the second mark. The first pair of cutout portions are formed by surfaces facing each other,
2. The light source device according to claim 1, wherein the second pair of cutout portions are formed by surfaces facing each other in the same direction as the surfaces of the first pair of cutout portions. The discharge lamp used. A concave portion into which the plunger enters the first body portion or the second body portion of the fixing base is formed,
The discharge lamp used in the light source device according to claim 3, wherein the concave portion receives the plunger in a state where the rotating portion is in the second position. The joint portion of the fixing base has a flat surface at least partially,
The discharge lamp used for the light source device according to claim 4, wherein a plane of the joint portion is joined to a plane of the fitting portion. The fixing base has an opening in a central axis,
The discharge lamp used for the light source device as described in any one of Claims 1-5 by which the stem of the said discharge lamp is inserted and fixed to the said opening.