JP2009104866A - Lamp unit, and light source device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lamp unit capable of carrying out exchange of a discharge lamp (10) rapidly and easily with a simple constitution. <P>SOLUTION: The lamp unit includes the discharge lamp (10) which has a first electrode (30) and a second electrode on both sides of a tube, and which emits light, a recessed reflecting mirror (13) that has an opening into which the first electrode is inserted, and that reflects light emitted from the discharge lamp (10), and a connecting part (31) which is installed on the reflecting mirror side of the recessed reflecting mirror, and electrically connected to the first electrode, and the connecting part (31) can move in a face crossing the direction into which the discharge lamp (10) is inserted. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a lamp unit and a light source device for irradiating light including ultraviolet rays.

  2. Description of the Related Art Conventionally, in order to cure a paint or perform peripheral exposure or surface modification of a semiconductor wafer or the like, an object to be processed is irradiated with light including ultraviolet rays using a discharge lamp. In the light source device having such a discharge lamp, for example, in the invention described in Patent Document 1, the light emitted from the discharge lamp is reflected and condensed by a mirror such as an elliptical condensing mirror, and then is emitted to the exit port. The light is guided, and light is irradiated to the outside by a light guide means (light guide) such as an optical fiber bundle connected to the exit port.

  In such a light source device housing, the fixing fixture for the discharge lamp is attached to a lamp holder provided with an elliptical condensing mirror in the vicinity thereof. When the discharge lamp is mounted at an appropriate position on the lamp holder, the luminescent spot of the discharge lamp matches the first focal point of the elliptical collector mirror. By comprising in this way, the light irradiated from the luminescent spot of a discharge lamp can be efficiently guided to the output end of an optical fiber bundle.

In order to simplify the replacement work of the discharge lamp, in the invention described in Patent Document 1, the terminal on the cathode side of the discharge lamp is a banana terminal, and connected to a jack connected to the cathode terminal on the starter side (not shown), A method for electrically connecting a discharge lamp and holding the discharge lamp has been proposed.
Japanese Patent No. 3377347

  In the method disclosed in Patent Document 1, it is necessary to accurately connect the fixed banana terminal to the jack, and the banana terminal cannot be connected if it is slightly deviated from the center of the jack. It's not easy.

  In addition, one end cap of the discharge lamp and the lamp holder are adjusted so that the luminescent spot of the discharge lamp matches the first focal point of the elliptical condensing mirror, but the outer shape of the discharge lamp is made of glass. The positional relationship between the end caps on both sides of the discharge lamp and the bright spot in the discharge lamp may not be arranged on a straight line. The other end cap of the discharge lamp may be displaced or inclined from a straight line connecting the first focal point and the second focal point of the elliptical condensing mirror. For this reason, when the discharge lamp is attached to the lamp holder, the position of the banana terminal 30 at the tip of the discharge lamp often deviates from the insertion direction. When the banana terminal is forcibly connected to the jack, the position of the bright spot of the discharge lamp deviates from the position of the first focal point, and the desired illuminance cannot be obtained. Also, forcibly connected to the jack shortens the life of the discharge lamp.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a lamp unit and a light source device having the lamp unit that can replace a discharge lamp quickly and easily with a simple configuration.

The lamp unit according to the first aspect has a discharge tube that has a first electrode and a second electrode on both sides of the tube to emit light, an opening into which the first electrode is inserted, and is emitted from the discharge tube. A concave reflecting mirror that reflects light; and a connecting portion that is provided on the reflecting surface side of the concave reflecting mirror and is electrically connected to the first electrode, the connecting portion intersecting a direction in which the discharge tube is inserted You can move within.
With this configuration, when replacing the discharge tube, a new discharge tube is inserted from the opposite surface side (discharge tube insertion side) of the open end (exit opening) of the concave reflecting mirror, so that the discharge tube can be operated at an appropriate pressure. One electrode (for example, cathode terminal) is connected to the connection portion. Since the connecting portion can move in a plane intersecting the direction in which the discharge tube is inserted, the electrical connection between the first electrode of the discharge tube and the connecting portion can be appropriately performed and the bright spot of the discharge tube is concavely reflected. The focal point of the mirror can be matched, and the physical load on the discharge tube can be reduced.

The connecting portion of the lamp unit of the second aspect is supported by a support portion having a width in the insertion direction.
With this configuration, it is possible to reduce the amount of emitted light that is blocked by arranging the connecting portion so that the support portion is parallel to the emitted light, and thus it is possible to extremely reduce the light amount loss. Moreover, since it is a support part with a width | variety in the insertion direction, the intensity | strength of a connection part can be ensured in the insertion direction of a discharge tube.

In the second aspect, the lamp unit of the third aspect is provided with a gap between the connection portion and the support portion, and is urged by the urging member so as to face the direction in which the connection portion is inserted. ing.
With this configuration, even if a gap is provided between the connection portion and the support portion, the connection portion is biased by the biasing member and is oriented in the insertion direction, so the first electrode of the discharge tube is connected to the connection portion. Is easy to insert at the specified position.

In the lamp unit of the fourth aspect, in the second aspect, the connection portion and the support portion are in close contact with each other, and the support portion is elastically deformed in a direction intersecting with the insertion direction.
With this configuration, even when the insertion portion is inserted slightly away from the connection portion in the direction intersecting the direction in which the first electrode of the discharge tube is inserted, the connection portion is always positioned in an appropriate position by elastic deformation of the support portion. Can be attached to.

One of the male connection part and the female connection part is provided in the connection part of the lamp unit of the fifth aspect, and the other of the male connection part and the female connection part is provided in the first electrode.
With this configuration, one electrode of the discharge tube can be reliably electrically connected to the connection portion. In addition, a male connection part means the connection part in which the convex part was formed, and a female type connection part means the connection part in which the convex part was formed.

According to a sixth aspect, in the fifth aspect, the female connection portion includes a guide portion that guides the male connection portion.
With this configuration, even when a new discharge tube is inserted slightly off the specified position, the guide portion guides to the specified position, so that the discharge tube can always be mounted at an appropriate position.

In a lamp unit according to a seventh aspect, in the fifth or sixth aspect, the female connection portion has an opening that is wide in the direction in which the support portion extends and narrow in the plate thickness direction of the support portion.
With this configuration, even when the first electrode of a new discharge tube is inserted slightly out of the direction in which the first electrode is inserted, the discharge tube can always be mounted at an appropriate position.

The lamp unit according to the eighth aspect further includes a holding member that holds the discharge tube and the concave reflecting mirror together.
With this configuration, when the discharge tube is replaced, the discharge tube can be positioned accurately and easily. That is, depending on the accuracy of the installation positions of the discharge tube and the concave reflecting mirror, the bright spot of the discharge tube is displaced from the first focal position of the concave reflecting mirror, and it becomes impossible to obtain an appropriate illuminance. This is a serious problem when the discharge tube is replaced. By providing a holding member that regulates the positions of the discharge tube and the concave reflecting mirror, the mounting accuracy of the discharge tube can be increased.

In the eighth aspect, the lamp unit according to the ninth aspect has the positioning portion on the second electrode side, and the holding member positions and holds the discharge tube by the positioning portion.
With this configuration, by providing the positioning means for regulating the position of the discharge tube, it can be easily installed and fixed to the light source device. For example, the discharge tube can be positioned easily by providing a holding portion having an inner diameter substantially the same as the outer shape of the base to which the stem of the discharge tube is bonded, and simply inserting the discharge tube into the holding portion. be able to.

  A light source device according to a tenth aspect includes the lamp unit according to any one of the first to ninth aspects, a housing that stores the lamp unit in a predetermined position, and the light source device that is provided in the housing and is reflected by a concave reflecting mirror. An emission port that emits light, and a light guide that guides light emitted from the emission port.

  According to the present invention, when the discharge tube is replaced, even if the first electrode (for example, the anode terminal) of the discharge tube is inserted slightly out of the specified position, the connecting portion moves within the plane intersecting the insertion direction. Therefore, in the replacement operation of the discharge tube, the bright spot of the discharge tube can coincide with the first focal point of the elliptical condenser mirror, and the load on the discharge tube can be reduced.

Below, embodiment of the light source device 100 of this invention is described.
<Structure of light source device>
FIG. 1 is a side sectional view of the light source device 100. An example of the light source device 100 including the optical fiber bundle 51 at the emission port 50 is shown. The figure in the middle of insertion of the discharge lamp 10 is shown for convenience of explanation.

  The light source device 100 of the present invention includes a discharge lamp 10 having a fixing base 20 at one end and a banana terminal 30 at the other end, a lamp holder mounting bracket 12 to which the discharge lamp 10 is attached, and a housing 1. The lamp holder mounting bracket 12 includes a reflecting elliptical condenser mirror 13, a lamp holder 25 for the fixing base 20, a clamp 26, and an end electrode lead wire 27. In this embodiment, the elliptical condensing mirror 13 is arranged horizontally, but may be arranged vertically. The housing 1 includes a lower housing 2 and an opening / closing door 61. A drive device 70 that drives and controls each part of the device such as a discharge lamp is stored in the lower housing 2. The open / close door 61 includes a heat radiating fan 60. The open / close door 61 is openable and closable. When the discharge lamp is replaced, the open / close door 61 is opened to take out or attach the discharge lamp. During operation of the light source device 100, the discharge lamp 10, the elliptical condenser mirror 13, the driving device 70, and the like are cooled by operating the heat radiating fan 60 to exhaust the air in the housing 1.

  A part of the light of the discharge lamp 10 emitted at the first focal point F <b> 1 of the elliptical focusing mirror 13 is reflected by the elliptical focusing mirror 13 and travels toward the exit 50. Since the second focal point F <b> 2 of the elliptical condenser mirror 13 is in the vicinity of the exit 50, the light from the discharge lamp 10 is collected in the vicinity of the exit 50. One end of the optical fiber bundle 51 is fixed to the emission fitting 52, and the optical fiber bundle 51 can emit the light condensed at the second focal point F2 to the outside. In addition to the optical fiber bundle 51, the light may be guided using a lens or a mirror.

  As shown in FIG. 1, one end of an optical fiber bundle 51 fixed to an emission fitting 52 at an emission port 50 is connected to the housing of the light source device 100, and light guided by the optical fiber is transferred from the other end of the optical fiber bundle 51 to a workpiece. Irradiation is preferred. In addition, the light source device 100 includes an aperture (not shown) that changes the numerical aperture in the vicinity of the emission port 50. Further, a coupler 31 into which the banana terminal 30 of the discharge lamp 10 is inserted is provided on the inner surface of the housing 1. A lamp unit is composed of the banana terminal 30, the coupler 31, the elliptical condenser mirror 13, and the like of the discharge lamp 10.

<Structure of discharge lamp with fixing base>
Next, the discharge lamp 10 of this embodiment will be described.
FIG. 2A is a schematic diagram for explaining the configuration of the discharge lamp 10 of the present invention. FIG. 2B is a schematic view showing the configuration of the coupler 31, and FIG. 2C is a schematic cross-sectional view of the fixing base 20.

  2A, the discharge lamp 10 has a fixing base 20 at one end and a banana terminal 30 at the other end. Examples of the discharge lamp 10 include a mercury xenon lamp and an ultra-high pressure mercury lamp, and irradiates light including ultraviolet rays. In the present embodiment, as the discharge lamp 10, a short arc lamp having a bright spot as a point light source is used. For example, in a short arc lamp, a bulb is formed of quartz glass, and a triated tungsten (tritan) electrode in which several percent of tria is dispersed in tungsten is formed on a tungsten anode and a cathode. Further, a molybdenum conductive foil is used in the stem 19 for power supply, and the bulb is filled with mercury and a rare gas. The discharge lamp 10 is inserted into the lamp holder 25 provided in the lamp holder mounting bracket 12 with the banana terminal 30 at the head.

  The coupler 31 shown in FIG. 2 (b) includes a guide portion 31 a having a wide mouth, and is attached to the L-shaped support column 32 via a push spring (spring) 35. The coupler 31 is connected to the power supply unit of the driving device 70 via the end electrode 36. The L-shaped support 32 is insulated by the insulator 33 and fixed to the side surface of the housing 1. The L-shaped support column 32 is thin so as to be parallel to the emission direction, and the amount of light to be blocked is reduced as much as possible to extremely reduce the light amount loss. Further, the L-shaped support column 32 has a width in the insertion direction, and ensures strength in the insertion direction of the discharge lamp 10.

  A fixing base 20 shown in FIG. 2C has a flange 21 and a body portion 22. The stem 19 of the discharge lamp 10 is inserted into the opening 29 formed on the central axis of the fixing base 20, and the stem 19 and the opening 29 are fixed with a ceramic adhesive or the like. When the stem 19 is fixed with the adhesive, the bright spot of the discharge lamp 10 is adjusted so as to reach the first focal point F1 of the elliptical condenser mirror 13. The trunk portion 22 has a cylindrical shape, and is formed with a cutout portion 22H that is partially cut on a plane. The fixing base 20 is also formed with a flat portion so as to correspond to the notch 22H, and restricts the rotation of the discharge lamp 10. The position of the bright spot of the discharge lamp 10 is prevented from changing due to the rotation of the discharge lamp 10.

  The flange 21 is formed with a stop surface 21E that regulates the insertion stop position of the discharge lamp 10. When the discharge lamp 10 is inserted into the lamp holder 25, the stop surface 21E comes into contact with the upper surface 25T of the lamp holder 25 shown in FIG. 1, and the discharge lamp 10 is not inserted more than a predetermined insertion amount. Further, the clamp 26 cannot be closed unless it is inserted until the stop surface 21E comes into contact with the upper surface 25T of the lamp holder 25. The fixing base 20 which is a lamp mounting portion is stably supplied with power via the lamp holder 25.

<Coupler structure>
3A (a) is a schematic sectional view showing a first example of the coupler 31, FIG. 3B (b) is a schematic sectional view showing a second example of the coupler 31, and FIG. 3B (c) is a coupler. It is the schematic sectional drawing which showed the 3rd example of 31. 3C (d) is a schematic cross-sectional view showing a fourth example of the coupler 31, and FIG. 3C (e) is a diagram showing a fifth example of the coupler 31. Hereinafter, each embodiment will be described in detail. In the description of the drawings, the same reference numerals are assigned to the same elements, and duplicate descriptions are omitted.

  In FIG. 3A (a-1), the coupler 31 of the first example is provided with a widened guide portion 31a so that it can be inserted even if the position of the banana terminal 30 is slightly deviated. The coupler 31 has a coupler shaft 31 </ b> S, and a shaft mounting hole 32 </ b> K is formed in the L-shaped column 32. The coupler 31 is attached to the L-shaped support 32 by the coupler shaft 31S entering the shaft attachment hole 32K and being fixed with a nut or the like. An end electrode lead wire 36 is connected to the coupler shaft 31S. Basically, the coupler 31 is arranged on a straight line connecting the first focal point F1 and the second focal point F2 of the elliptical condenser mirror 13.

  The shaft diameter φs of the coupler shaft 31S is considerably smaller than the hole diameter φk of the shaft mounting hole 32K, and the diameters of the shaft diameter φs and the hole diameter φk are different by about 1 mm to 3 mm. The diameter φd of the coupler 31 is larger than the hole diameter φk of the shaft mounting hole 32K. Therefore, the coupler 31 can move with respect to the L-shaped support 32 within a range in which the diameters of the shaft diameter φs and the hole diameter φk are different. That is, the coupler 31 can freely move in a plane orthogonal to the direction in which the discharge lamp 10 is inserted. Further, an R chamfer 31m is formed at a step portion between the outer periphery of the coupler 31 and the coupler shaft 31S. For this reason, the coupler 31 can freely tilt in a plane orthogonal to the direction in which the discharge lamp 10 is inserted.

  However, since the shaft diameter φs of the coupler shaft 31S is considerably smaller than the hole diameter φk of the shaft mounting hole 32K, if the center of gravity of the coupler 31 is on the tip end side of the coupler 31, the tip end side of the coupler 31 is largely inclined downward due to its own weight. . In this case, since the direction in which the banana terminal 30 is inserted is different from the direction in which the tip end side of the coupler 31 is inclined downward, the banana terminal 30 cannot be inserted into the coupler 31. Therefore, the coupler 31 is attached to the L-shaped support 32 via a spring 35 at the rear of the coupler 31. By the biasing force of the spring 35, the guide portion 31a of the coupler 31 can be directed in the direction in which the banana terminal 30 is inserted. The urging force of the spring 35 is weak, and the urging force is such that the guide portion 31a of the coupler 31 is simply directed toward the first focal point F1 of the elliptical condenser mirror 13.

  FIG. 3A (a-2) is a diagram showing a case where the banana terminal 30 is inserted from an inclined direction even though the coupler 31 is directed to the first focal point F1 of the elliptical condenser mirror 13. The outer shape of the discharge lamp 10 is glass, and the direction in which the stem 19 on both sides of the discharge lamp 10 extends and the bright spot in the discharge lamp 10 may not be arranged on a straight line. Therefore, the banana terminal 30 is tilted and inserted into the coupler 31 with the discharge lamp 10 attached to the lamp holder 25. As described above, since the biasing force of the spring 35 is weak, when the banana terminal 30 is inserted while being inclined, the R 31 chamfer 31m is formed, so that the coupler 31 is also easily inclined in the same direction.

  FIG. 3A (a-3) shows a case where the banana terminal 30 is inserted into the coupler 31 with a shift of a distance Δ parallel to the straight line L1 connecting the first focal point F1 and the second focal point F2 in the discharge lamp 10. It is. As described above, since the urging force of the spring 35 is weak, the coupler 31 moves in the same direction when the banana terminal 30 is inserted in parallel by a distance Δ.

  Even if the position of the banana terminal 30 of the discharge lamp 10 is deviated from the insertion direction for adjusting the bright spot, when the banana terminal 30 is inserted into the coupler 31, it is within a plane orthogonal to the direction in which the banana terminal 30 is inserted. Thus, the coupler 31 moves freely. That is, the guide portion 31 a of the coupler 31 faces straight to the banana terminal 30. Therefore, the bright spot of the discharge lamp 10 can coincide with the first focal point F1 of the elliptical condenser mirror 13, and the load on the discharge lamp 10 can be reduced.

  In FIG. 3B (b), the coupler 31 is provided with a mouth widening guide portion 31a so that it can be inserted even if the position of the banana terminal 30 of the discharge lamp 10 is slightly deviated. The attachment position of the spring 35 is different from FIG. 3A (a). The body 31d of the coupler 31 has a flange 31f and a coupler shaft 31S, and the L-shaped column 32 has a shaft mounting hole 32K. A spring 35 is inserted into the body portion 31 d and the coupler 31 is attached to the L-shaped support column 32. The coupler shaft 31S enters the shaft mounting hole 32K and is fixed with a nut or the like, so that the end electrode lead wire 36 is connected to the coupler shaft 31S.

  Since the shaft diameter φs of the coupler shaft 31S is considerably smaller than the hole diameter φk of the shaft mounting hole 32K, the coupler 31 can freely move in a plane perpendicular to the direction in which the discharge lamp 10 is inserted. Further, a spring 35 is inserted into the body 31 d of the coupler 31 and attached to the L-shaped support 32. Due to the weak biasing force of the spring 35, the guide portion 31a of the coupler 31 is directed in the direction in which the banana terminal 30 is inserted.

  Even if the position of the banana terminal 30 of the discharge lamp 10 is deviated from the insertion direction for adjusting the bright spot, when the banana terminal 30 is inserted into the coupler 31, it is within a plane orthogonal to the direction in which the banana terminal 30 is inserted. Thus, the coupler 31 moves freely. Therefore, the bright spot of the discharge lamp 10 can coincide with the first focal point F1 of the elliptical condenser mirror 13, and the load on the discharge lamp 10 can be reduced.

  3B (c), the banana terminal 30 is attached to the L-shaped support | pillar 32 and the coupler 31 is attached to the discharge lamp 10, contrary to FIG. 3A (a) and FIG. 3B (b). The banana terminal 30 has a banana terminal shaft 30 </ b> S, and a shaft mounting hole 32 </ b> K is formed in the L-shaped column 32. A spring 35 is inserted into the banana terminal shaft 30 </ b> S and attached to the L-shaped column 32. An end electrode lead wire 36 is connected to the banana terminal shaft 32S.

  Since the shaft diameter φs of the banana terminal shaft 30S is considerably smaller than the hole diameter φk of the shaft mounting hole 32K, the banana terminal 30 can freely move in a plane orthogonal to the direction in which the discharge lamp 10 is inserted. Further, the spring 35 is inserted into the banana terminal shaft 30 </ b> S of the banana terminal 30 and attached to the L-shaped column 32. Due to the weak biasing force of the spring 35, the banana terminal 30 is oriented in the direction in which the coupler 31 is inserted.

  In FIG. 3C (d-1), the coupler 31 has a widening guide portion 31a and a coupler shaft 31S, and the L-shaped support column 32 has a shaft mounting hole 32K. The coupler shaft 31S of the coupler 31 is attached to the L-shaped support column 32 using a floating nut 38. Further, the end electrode lead wire 36 is connected to the coupler shaft 31S. As shown in FIG. 3C (d-2), the floating nut 38 has a double structure, and has a function that the nut on the inside can move within a predetermined range.

  The shaft diameter φs of the coupler shaft 31S is considerably smaller than the hole diameter φk of the shaft mounting hole 32K, and the coupler shaft 31S is attached to the L-shaped column 32 by the floating nut 38. For this reason, the coupler 31 can freely move in a plane orthogonal to the direction in which the discharge lamp 10 is inserted.

  FIG. 3C (e) is a diagram showing a coupler 37 having a rectangular cross section, (e-1) is a longitudinal sectional view of the coupler 37, and (e-2) is a transverse sectional view of the coupler 37. , (E-3) is a front view of the coupler 37.

  The coupler 37 has a widening guide portion 37a and a coupler shaft 37S, and a shaft mounting hole 39K is formed in the L-shaped support post 39. As can be understood from (e-3), the coupler 37 has a guide portion 37a, and the opening of the coupler 37 has a rectangular or track field shape that is long in the vertical direction and narrow in the horizontal direction (width). The shaft diameter φs of the coupler shaft 37S and the hole diameter φk of the shaft attachment hole 39K are substantially the same, and the coupler shaft 31S is within the hole diameter φk of the attachment hole 32K as shown in FIGS. 3A (a) to 3B (d). Never move. Further, the end electrode lead wire 36 is connected to the coupler shaft 37S.

  The coupler 37 is fixed to an L-shaped support 39 made of a thin plate spring material. The L-shaped column 39 has a width and does not bend with respect to the insertion direction of the discharge lamp 10, but bends in the thickness direction of the L-shaped column 39. For this reason, even if the coupler 37 is fixed to the L-shaped support column 39, the coupler 37 can move in the plate thickness direction. Further, the opening of the coupler 37 is elongated in the vertical direction in the direction in which the L-shaped support column 39 extends. Therefore, the vertical displacement of the banana terminal 30 can be dealt with by the long side of the rectangle, and the load on the discharge lamp can be reduced. That is, the connection position with the coupler 31 can freely move in a plane orthogonal to the direction in which the discharge lamp 10 is inserted.

<Discharge lamp replacement work>
The replacement of the discharge lamp 10 in the light source device 100 having the coupler 31 shown in FIG. 3A (a) will be described.
As shown in FIG. 1, the operator opens the opening / closing door 61 of the light source device 100. When this open door 61 is opened, the fixing base 20 of the discharge lamp 10 is exposed. Next, the clamp 26 provided in the lamp holder 25 is loosened, and the fixing base 20 is pulled out to the front side. Then, the banana terminal 30 at the tip of the discharge lamp 10 is released from the coupler 31 on the light irradiation side, and the discharge lamp 10 is taken out from the light source device 100.

  Then, a new discharge lamp 10 is prepared. The new discharge lamp 10 is already provided with a fixing base 20 and a banana terminal 30. The discharge lamp 10 is inserted into the opening of the lamp holder 25 with the banana terminal 30 of the discharge lamp 10 as the head. Then, the banana terminal 30 is guided by the guide portion 31 a of the coupler 31, and the bubbana terminal 30 is reliably inserted into the coupler 31. At this time, even if the axis of the banana terminal 30 is deviated and inserted slightly out of the specified position, the coupler 31 moves in a plane intersecting the insertion direction of the discharge lamp 10. For this reason, the coupler 31 faces straight to the banana terminal 30 of the discharge lamp 10 so that the bright spot of the discharge lamp 10 can coincide with the first focal point of the elliptical condenser mirror 13 and the load on the discharge lamp 10 is reduced. It becomes possible.

  Next, after confirming that the stop surface 21E of the fixing base 20 is in contact with the upper surface 25T of the lamp holder 25 and the discharge lamp 10 has been pushed to a predetermined insertion position, the clamp 26 is tightened and fixed. The operator closes the opening / closing door 61 of the light source device 100 and finishes the discharge lamp replacement operation.

  FIG. 4 is a cross-sectional view showing a state after a new discharge lamp is mounted on the light source device 100. The banana terminal 30 of the discharge lamp 10 is secured by a guide part 31a having a wide mouth, and is inserted into the coupler 31 of the connection part to be electrically connected. Even if the banana terminal 30 is not arranged in the insertion direction of the discharge lamp 10, the coupler 31 can move in a plane intersecting the insertion direction, so that the bright spot is the first focal point without applying a load to the discharge lamp 10. It is mounted so as to be F1.

  In this embodiment, in FIG. 3B (b), FIG. 3C (d), and (e), the coupler 31 or the coupler 37 was mounted on the L-shaped support column 39. However, the banana terminal 30 may be mounted on the L-shaped column 39 and the coupler 31 or the coupler 37 may be provided in the discharge lamp 10.

FIG. 4 is a side cross-sectional view of the light source device 100 during insertion of the discharge lamp 10. (A) is the schematic for demonstrating the structure of the discharge lamp 10 of this invention. (B) is a schematic diagram showing the configuration of the coupler 31. FIG. 3C is a schematic cross-sectional view of the fixing base 20. (A-1) to (a-3) are schematic views showing a first example of a banana terminal 30 and a coupler 31. FIG. (B) is the schematic which showed the 2nd example of the banana terminal 30 and the coupler 31. FIG. (C) is the schematic which showed the 3rd example of the banana terminal 30 and the coupler 31. FIG. (D-1) is a schematic diagram illustrating a fourth example of the banana terminal 30 and the coupler 31, and (d-2) is an enlarged cross-sectional view of the floating nut 38. (E-1) to (e-3) are diagrams showing a fifth example of the banana terminal 30 and the coupler 37. FIG. FIG. 4 is a cross-sectional view showing a state in which a new discharge lamp is mounted on the light source device 100.

Explanation of symbols

F1 ... 1st focus F2 ... 2nd focus 1 ... Housing 2 ... Lower housing 10 ... Discharge lamp 12 ... Lamp holder mounting bracket 13 ... Elliptical condensing mirror 20 ... Fixing base 21 ... Flange 22 ... Body 22H ... Notch 25 ... Lamp holder 25T ... Holder upper surface 26 ... Clamp 27, 36 ... End electrode lead wire 29 ... Opening 30 ... Banana terminal 30S ... Banana terminal shaft 31, 37 ... Coupler 31a, 37a ... Guide part 31f ... Flange 31S, 37S ... Coupler shafts 32, 39, 39B ... L-shaped support pillars 32k, 39k ... Shaft mounting hole 33 ... Insulator 35 ... Spring 38 ... Floating nut 50 ... Outlet 51 ... Optical fiber bundle 60 ... Radiation fan 61 ... Opening and closing door 70 ... Drive device

Claims (10)

A discharge tube having a first electrode and a second electrode on both sides of the tube and emitting light;
A concave reflecting mirror having an opening into which the first electrode is inserted and reflecting light emitted from the discharge tube;
Provided on the reflecting surface side of the concave reflecting mirror, and a connection part electrically connected to the first electrode,
The lamp unit according to claim 1, wherein the connecting portion is movable in a plane intersecting a direction in which the discharge tube is inserted.   The lamp unit according to claim 1, wherein the connection portion is supported by a support portion having a width in the insertion direction.   The gap is provided between the connection part and the support part, and the connection part is biased by a biasing member so as to face the insertion direction. The lamp unit described.   The lamp unit according to claim 2, wherein the connection portion and the support portion are in close contact with each other, and the support portion is elastically deformed in a direction crossing the insertion direction.   The connection part is provided with one of a male connection part or a female connection part, and the first electrode is provided with the other of a male connection part or a female connection part, and the female connection part is The lamp unit according to claim 4, wherein the lamp unit has an opening that is wide in a direction in which the support portion extends and narrow in a plate thickness direction of the support portion.   2. The connection part is provided with either a male connection part or a female connection part, and the first electrode is provided with the other of a male connection part or a female connection part. The lamp unit according to any one of claims 4 to 4.   The lamp unit according to claim 5 or 6, wherein the female connection portion includes a guide portion that guides the male connection portion.   The lamp unit according to claim 1, further comprising a holding member that integrally holds the discharge tube and the concave reflecting mirror.   The lamp unit according to claim 8, wherein the discharge tube has a positioning portion on the second electrode side, and the holding member positions and holds the discharge tube by the positioning portion. It has a lamp unit as described in any one of Claims 1-9,
A housing for storing the lamp unit in a predetermined position;
An emission port provided in the housing and emitting light reflected by the concave reflecting mirror;
A light guide that is connected to the outlet and guides the emitted light;
A light source device comprising: