WO2006087976A1

WO2006087976A1 - Light source device

Info

Publication number: WO2006087976A1
Application number: PCT/JP2006/302365
Authority: WO
Inventors: Koji Matsushita; Kazuo Ueno; Kouzou Adachi
Original assignee: Hamamatsu Photonics K.K.
Priority date: 2005-02-17
Filing date: 2006-02-10
Publication date: 2006-08-24
Also published as: US20080143232A1; CN101120205A; DE112006000380T5; US7781948B2; JP2006228577A; CN101120205B; JP4554395B2

Abstract

A light source device so formed that the positioning accuracy of a gas discharge tube can be increased and the maintenance operation of the gas discharge tube can be facilitated. The light source device comprises a lamp container storing the gas discharge tube, and an insulating socket member fixed to the lamp container in a positioned state together with the gas discharge tube is stored in the lamp container. The insulating socket member comprises a pin socket member in which either of a surface contact part in surface contact with the stem part of the gas discharge tube and a stem pin held on the stem part is inserted in the state of being electrically brought into contact with each other. When the corresponding stem pin is inserted into the pin socket member, the gas discharge tube is fixed to the insulating socket member in a detachable state to remarkably increase the positioning accuracy of the gas discharge tube relative to the lamp container. Also, since the insulating member fixes the gas discharge tube in a detachable state, the removal of the gas discharge tube can be facilitated and, accordingly, the maintenance operations such as the replacement of the gas discharge tube can be facilitated.

Description

Specification

Light source device

Technical field

The present invention relates to a light source device that includes a gas discharge tube that emits light of a predetermined wavelength and can be used as a light source for an analysis device, a semiconductor inspection device, or the like.

Background art

Conventionally, in a technical field such as an analysis apparatus and a semiconductor inspection apparatus, a light source device as described in Patent Document 1 is known, for example. The light source device described in Patent Document 1 includes a substrate provided with a plurality of insertion holes, and the gas discharge tube is positioned by inserting a stem pin of the gas discharge tube into these insertion holes. . After this positioning, the stem pin of the gas discharge tube was fixed to the substrate by soldering.

Patent Document 1: Japanese Patent Laid-Open No. 4-98777

Disclosure of the invention

Problems to be solved by the invention

[0003] As a result of examining the conventional light source device, the inventors have found the following problems. That is, in the structure of the conventional light source device described in Patent Document 1, since a gap is formed between the gas discharge tube and the substrate, the positioning accuracy of the gas discharge tube is difficult to further improve. Was demanded. In addition, since the stem pin of the gas discharge tube is fixed to the substrate by soldering, there is a problem that labor is required for maintenance work such as replacement of the gas discharge tube.

[0004] The present invention has been made to solve the above-described problems, and has a structure for improving the positioning accuracy of the gas discharge tube and facilitating maintenance work of the gas discharge tube. The purpose is to provide a light source device!

Means for solving the problem

A light source device according to the present invention is housed in a lamp vessel together with a gas discharge tube having a stem portion that holds a plurality of stem pins in a penetrating manner, a lamp vessel that accommodates the gas discharge tube, and the gas discharge tube. An insulating socket member. Insulating socket member is gas discharge It is arranged between the tube and the lamp vessel and is fixed in a state of being positioned with respect to the lamp vessel. The insulating socket member is made of an electrically insulating material and has a structure for fixing the gas discharge tube in a detachable state. Specifically, the insulating socket member includes a surface contact portion that makes surface contact with the stem portion of the gas discharge tube, and a pin socket member provided corresponding to at least one of the stem pins. The pin socket member is inserted in a state where the corresponding stem pin is electrically connected. By inserting the stem pin into the pin socket member, the gas discharge tube is detachably fixed to the insulating socket member.

[0006] According to the light source device having the above-described structure, the insulating socket member has the pin socket member into which the stem pin extending from the stem portion to the outside of the gas discharge tube is inserted. In this case, the insulating socket member can come into surface contact with the stem portion and can be tightly fixed in a state where the gas discharge tube can be attached and detached. Therefore, the positioning accuracy of the gas discharge tube can be remarkably improved as compared with the conventional light source device having a gap between the stem portion and the substrate. Further, since the stem portion is tightly fixed to the insulating socket member, the stability when the gas discharge tube is fixed is increased as compared with the conventional light source device in which the gas discharge tube is fixed via the stem pin. Furthermore, since the gas discharge tube is fixed to the insulating socket member in a removable state, it is easy to remove the gas discharge tube, and as a result, maintenance work such as replacement of the gas discharge tube is facilitated. It can be carried out.

[0007] Here, as a preferable configuration that exhibits the above-described operation, the light source device according to the present invention may further include a base for fixing the lamp vessel to the surface. The lamp vessel preferably has a box shape and has a wall surface substantially orthogonal to the base. The insulating socket member may be fixed to the wall surface.

[0008] Further, in the light source device according to the present invention, when the gas discharge tube includes an exhaust pipe portion extending from the stem portion toward the outside of the gas discharge tube, the insulating socket member includes the exhaust pipe. It is preferable to have an exhaust pipe entry part for entering the part.

[0009] The insulating socket member may have a stem pin entry portion for allowing the stem pin to enter. In this case, the pin socket member is attached to the predetermined stem pin entry portion.

[0010] Further, the lamp vessel has a light emitting portion that allows the light of the gas discharge tube force to pass outside the lamp vessel. The lens may be held by the light emitting part.

[0011] Each embodiment according to the present invention can be more fully understood from the following detailed description and the accompanying drawings. These examples are given for illustration only and should not be construed as limiting the invention.

[0012] Further scope of applicability of the present invention will become apparent from the following detailed description. However, the detailed description and specific examples, while indicating the preferred embodiment of the invention, are presented for purposes of illustration only and are subject to various modifications and improvements within the spirit and scope of the invention. It will be apparent to those skilled in the art from this detailed description.

The invention's effect

According to the light source device of the present invention, since the gas discharge tube can be tightly fixed to the insulating socket member, it is possible to improve the positioning accuracy of the gas discharge tube as compared with the conventional configuration. In addition, the gas discharge tube can be fixed stably. In addition, since the gas discharge tube can be easily removed, maintenance work of the gas discharge tube is facilitated.

Brief Description of Drawings

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of a light source device according to the present invention.

FIG. 2 is a cross-sectional view showing the internal structure of the deuterium lamp shown in FIG.

FIG. 3 is an exploded perspective view of a light emitting unit assembly in the deuterium lamp shown in FIG.

FIG. 4 is a perspective view showing the structure of the lamp box shown in FIG.

FIG. 5 is an exploded perspective view showing the internal state of the lamp box (internal state accommodated by the deuterium lamp) of FIG.

FIG. 6 is an exploded perspective view showing in detail the internal state of the lamp box of FIG.

FIG. 7 is a front view showing the structure of the heat insulating socket member shown in FIG.

FIG. 8 is a perspective view showing the structure of the heat insulating socket member shown in FIG. 6 from the back side.

[Fig. 9] is a diagram showing the cross-sectional structure along the line IX-IX of the heat insulating socket (Fig. 7) with the deuterium lamp fixed.

FIG. 10 is an enlarged cross-sectional view showing a stem pin penetrating portion in the deuterium lamp of FIG. FIG. 11 is a diagram showing a schematic configuration of a second embodiment of the light source device according to the present invention.

FIG. 12 is a perspective view showing the structure of a lamp box in the third embodiment of the light source device according to the present invention.

FIG. 13 is an exploded perspective view showing the internal state of the lamp box of FIG. 12 (internal state accommodated by the deuterium lamp).

FIG. 14 is a perspective view showing the structure of a lamp box in a fourth embodiment of the light source device according to the present invention.

FIG. 15 is an exploded perspective view showing the internal state of the lamp box of FIG. 14 (internal state accommodated by the deuterium lamp).

FIG. 16 is a perspective view showing a structure of a lamp box in a fifth embodiment of the light source device according to the present invention.

FIG. 17 is an exploded perspective view showing an internal state of the lamp box (internal state accommodated by the deuterium lamp) of FIG.

FIG. 18 is a front view showing a structure of a heat insulating socket member in a sixth embodiment of the light source device according to the present invention.

[Fig. 19] is a diagram showing a cross-sectional structure along the XIX-XIX line of the heat insulating socket (Fig. 18) in a state where the deuterium lamp is fixed.

FIG. 20 is a front view showing a heat insulating socket member in the seventh embodiment of the light source device according to the present invention.

[FIG. 21] is a view showing a cross-sectional structure along the XXI-XXI line of the heat insulating socket (FIG. 20) in a state where the deuterium lamp is fixed.

FIG. 22 is a front view showing a heat insulating socket member in an eighth embodiment of the light source device according to the present invention.

[FIG. 23] is a view showing a cross-sectional structure along the line XXIII-XXIII of the heat insulating socket (FIG. 22) in a state where the deuterium lamp is fixed.

FIG. 24 is a front view showing a heat insulation socket member in the ninth embodiment of the light source device according to the present invention.

[Fig. 25] shows the XXV—XXV line of the insulated socket (Fig. 24) with the deuterium lamp fixed. It is a figure which shows the cross-sectional structure along line.

FIG. 26 is a front view showing a heat insulating socket member in the tenth embodiment of the light source device according to the present invention.

FIG. 27 is a diagram showing a cross-sectional structure along the line XXVII-XXVII of the heat insulating socket (FIG. 26) in a state where the deuterium lamp is fixed.

FIG. 28 is a front view showing a heat insulating socket member in an eleventh embodiment of the light source device according to the present invention.

[FIG. 29] is a view showing a cross-sectional structure along the line XXIX-XXIX of the heat insulating socket (FIG. 28) in a state where the deuterium lamp is fixed.

FIG. 30 is a front view showing a heat insulating socket member in a twelfth embodiment of the light source device according to the present invention.

FIG. 31 is a diagram showing a cross-sectional structure along the line XXXI-XXXI of the heat insulating socket (FIG. 30) in a state where the deuterium lamp is fixed.

Explanation of symbols

[0015] 1, 41, 56, 66, 76 ··· Light source device, 7, 67 ··· Base, 10 ··· Deuterium lamp (gas discharge tube), l ib ... stem part, l id ... exhaust Tube part, 19a to 19i ... Stem pin, 20, 40, 50, 60, 70 ... Lamp box (lamp container), 22 ... Lamp fixing plate (wall surface), 23a ... Light emitting part, 26 ... Lens, 30 , 80, 90, 100, 110, 120, 130, 140 ··· Insulated socket members (insulating socket members), 30a, 101a, 121a… Surface contact area, 31, 91, 131 32a to 32i, 82d, 82f, 82h, 82i ... Stem pin entry portion, 33a to 33e, 113a to 113e ... Pin socket member.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the light source device according to the present invention will be described in detail with reference to FIGS. In the description of the drawings, the same or the same elements are denoted by the same reference numerals, and redundant descriptions are omitted. FIG. 1 is a diagram showing a schematic configuration of a first embodiment of a light source device according to the present invention, FIG. 2 is a sectional view showing the structure of the deuterium lamp shown in FIG. 1, and FIG. 2 is an exploded perspective view showing the structure of the light emitting unit assembly shown in FIG. 2, and FIGS. 4 to 6 are views showing the structure of the lamp box shown in FIG. Is shown in Figure 6 FIG. 9 is a view showing a cross-sectional structure along the line IX-IX of the heat insulation socket (FIG. 7) in a state where the deuterium lamp is fixed, and FIG. FIG. 10 is an enlarged cross-sectional view showing a stem pin penetrating portion in the deuterium lamp of FIG.

The light source device 1 shown in FIG. 1 includes a deuterium lamp (gas discharge tube) 10 that is used as a light source for an analyzer or the like and emits ultraviolet light having a predetermined wavelength. The ultraviolet light emitted from the deuterium lamp 10 and collimated by the lens 26 and the emitted light from the halogen lamp 3 are combined by the beam splitter 4, and the combined light is emitted from the light source device 1. With this configuration, the search rate in the detector of the analyzer is prevented, and the dynamic range of the detector is effectively used.

The light source device 1 further includes a lamp box (lamp vessel) 20 that houses the deuterium lamp 10 and a lamp driving substrate 6 having a lamp driving circuit. Further, the lamp box 20, the beam splitter 4, the halogen lamp 3, and the lamp driving substrate 6 are fixed at predetermined positions on the base 7, whereby the light source device 1 is reduced in size.

Hereinafter, the deuterium lamp 10 will be described in detail. The deuterium lamp 10 is a so-called head-on type deuterium lamp, and, as shown in FIG. 2, a glass sealed container 11 and a light emitting unit assembly 12 accommodated in the sealed container 11. Is provided.

[0020] The sealed container 11 includes a cylindrical side tube portion 11a, a stem portion ib that seals the lower end side of the side tube portion 11a, and a light exit window 11c that seals the upper end side. This sealed container 11 is filled with deuterium gas of about several hundred Pa. A plurality (9 in this embodiment) of conductive stem pins 19a to 19i (see FIG. 3) are hermetically fixed to the stem portion l ib in a state of being inserted along a predetermined circumference. In addition, an exhaust pipe portion id is formed at the center of the stem portion l ib so as to protrude outward (lower side in the figure).

[0021] The light emitting unit assembly 12 accommodated in the sealed container 11 functions as a light source that generates ultraviolet rays. As shown in FIGS. 2 and 3, the base portion 13, the positive electrode portion 14, the discharge path limiting portion fixing plate 15, the discharge path limiting portion 16 and the cathode portion 17 are arranged in the order of the lower forces, and these are provided. A cathode cover 18 is provided.

As shown in FIG. 3, the base portion 13 has an electrically insulating ceramic force and has a disk shape. The base portion 13 has a plurality of openings formed along the periphery. The stem pins 19a to 19i are respectively passed through these openings. A shallow concave portion 13 a having a shape corresponding to the shape of the anode portion 14 is formed on the upper surface of the base portion 13 in order to accommodate and arrange the anode portion 14.

[0023] The anode portion 14 is a conductive thin plate, and includes a substantially disc-shaped main body portion 14a and a pair of extending portions 14b and 14c extending horizontally in two radial directions from the peripheral portion of the main body portion 14a. . As shown in FIG. 2, the anode 14 is accommodated in the recess 13 a of the base portion 13 with the upper surface thereof coinciding with the upper surface of the base portion 13. As shown in FIG. 3, openings 14d and 14e are provided in the extended proportions 14b and 14c of the anode portion 14, and the tips of the stem pins 19c and 19d are electrically connected to the openings 14d and 14e. Connected to!

[0024] The discharge path limiting portion fixing plate 15 has a substantially fan shape as well as a ceramic force. The discharge path limiting fixing plate 15 is placed so as to overlap the substantially central portion of the base portion 13 and the anode portion 14. An opening 15x that exposes the body portion 14a of the anode portion 14 is provided in the approximate center of the discharge path limiting portion fixing plate 15 so as to pass a discharge path formed between the anode portion 14 and the cathode portion 17. The The upper surface of the discharge path limiting portion fixing plate 15 including the opening 15x on the narrow side (right side in the figure) has a shallow shape corresponding to the shape of the discharge path limiting portion 16 in order to accommodate and arrange the discharge path limiting portion 16. A recess 15a is formed. On the other hand, on the upper surface of the discharge path limiting portion fixing plate 15 on the wide side (left side in the figure), a convex portion 15b for standing the cathode portion 17 is provided. An opening 15c is provided at a position on the narrow side of the recess 15a of the discharge path limiting portion fixing plate 15, and a stem pin 19e is passed through the opening 15c. In addition, a pair of openings 15d and 15e are provided in the convex portion 15b of the discharge path limiting portion fixing plate 15, and stem pins 19a and 19b are passed through the openings 15d and 15e, respectively.

[0025] The discharge path limiting portion 16 is a conductive thin plate, and includes a substantially disc-shaped main body portion 16a and an extending portion 16b extending horizontally in the radial direction from the periphery of the main body portion 16a. As shown in FIG. 2, the discharge path limiting portion 16 is accommodated in the recess 15a of the discharge path limiting portion fixing plate 15 with the upper surface thereof coinciding with the upper surface of the discharge path limiting portion fixing plate 15. . As shown in FIG. 3, the extension 16b of the discharge path restricting portion 16 is provided with an opening 16c, and the tip of the stem pin 19e is electrically connected to the opening 16c.

[0026] Further, as shown in FIGS. 2 and 3, the discharge path limiting portion 16 includes a discharge path limiting portion fixing plate. A recess 16d for forming an arc ball is provided at a position coaxial with the opening 15x of 15. The recess 16d functions to accommodate an arc ball created by discharge in order to efficiently extract light, and has a cup shape that is widened toward the light exit window 1lc. A discharge path constriction opening 16e having a small diameter of about 0.5 mm is provided on the bottom surface of the recess 16d in the discharge path limiting portion 16. This makes it possible to create a flat ball-shaped arc ball in the recess 16d.

The cathode portion 17 includes a coil (filament coil) as a heater, and the heater is coated with a thermionic emission material such as barium oxide. As shown in FIG. 3, in such a cathode portion 17, both ends of the coil are erected in a state of penetrating through the openings 15d and 15e of the convex portion 15b of the discharge path limiting portion fixing plate 15. Electrically connected to the stem pins 19a and 19b penetrating the openings 15d and 15e!

The cathode cover 18 has a cylindrical shape as shown in FIGS. The cathode portion cover 18 includes an anode side cover portion 18a and a cathode side cover portion 18b. The anode side cover portion 18a covers the assembly such as the anode portion 14 and the discharge path limiting portion 16. The cathode side cover 18b is provided so that the space in the anode side cover 18a communicates with the cathode 17 covered. In addition, the cross-sectional shape of the cathode side cover 18b is smaller when a cylinder having the same diameter and the same diameter as the anode side cover 18a is cut vertically along the axial direction at a position V including the axis. The shape of the part. These anode side cover portion 18a and cathode side cover portion 18b also have an integrally formed ceramic force.

[0029] In the cathode side cover portion 18b of the cathode portion cover 18, the slit plate portion 18c on the axial center side (electron emission side of the cathode portion 17) of the discharge path constriction opening 16e has a slit 18d for emitting electrons. It is provided as an opening. On the other hand, the anode side cover portion 18a has an opening 18e for passing the discharge path at a position coaxial with the opening 15x of the discharge path limiting portion fixing plate 15 and the discharge path narrowing opening 16e of the discharge path limiting portion 16. Is provided. The opening 18e has such a size that the discharge path limiting portion 16 is not exposed more than necessary in order to increase discharge efficiency. Further, as shown in FIG. 3, the anode side cover 18a is provided with openings 18f to 18i. The distal ends of the remaining stem pins 19f to 19i, which are located outside the anode portion 14 and the discharge path limiting portion fixing plate 15 and extend upward, are connected and fixed to these openings 18f to 18i. . With this configuration, the cathode cover 18 is attached to the tip of the stem pins 19a to 19i. In addition to being fixed, the anode portion 14, the discharge path limiting portion fixing plate 15, and the discharge path limiting portion 16 are disposed between the cathode portion cover 18 and the base portion 13.

[0030] Next, the lamp box 20 that houses the deuterium lamp 10 configured as described above will be described in detail. The lamp box 20 has a box shape as shown in FIGS. The lamp box 20 includes a bottom plate 21 fixed to the base 7, a lamp fixing plate 22 that directly intersects the bottom plate 21, a light emitting plate 23, a pair of side plates 24, and an upper wall surface of the lamp box 20. A top plate 25 is provided. The bottom of the lamp box 20 is defined by the bottom plate 21, the lamp fixing plate 22, the light emitting plate 23, the pair of side plates 24 and the top plate 25.

As shown in FIG. 6, the bottom plate 21 is provided with an opening 21 a for screwing the bottom plate 21 to the base 7 in the vicinity of the corner. A light emitting plate 23 is provided upright at one end of the bottom plate 21 in the longitudinal direction, and a female screw portion 2 lb for fixing the lamp fixing plate 22 is provided near the other end. . The bottom plate 21 is screwed to the base 7 via a heat insulating material 27 as shown in FIG.

As shown in FIG. 5, the lamp fixing plate 22 is connected to a stem portion l ib (see FIGS. 2 and 6) of the deuterium lamp 10 via a heat insulating socket member (insulating socket member) 30 described later. ). As shown in FIGS. 4 to 6, the lamp fixing plate 22 is provided with an opening 22a at the center for exposing the center of the heat insulating socket member 30, and the horizontal direction of the opening 22a. Small holes 22 b and 22 b for positioning the heat insulating socket member 30 are provided on both sides. Further, a female screw portion 22c for fixing the heat insulating socket member 30 is provided in the vicinity of the corner portion of the lamp fixing plate 22. In addition, a plate-like extension 22d extending outward (left and right in the figure) is provided at the lower end of the lamp fixing plate 22, and the lamp fixing plate 22 is screwed to the bottom plate 21 in the extension 22d. An opening 22e for stopping and fixing is provided.

As shown in FIG. 5, the light emitting plate 23 constitutes an integral part together with the bottom plate 21, and has one end of the bottom plate 21 facing the lamp fixing plate 22 with the deuterium lamp 10 interposed therebetween. It is a wall surface that extends upward from the section. As shown in FIGS. 5 and 6, the light emitting plate 23 is provided with a light emitting portion 23a that emits the emitted light from the deuterium lamp 10 to the outside of the lamp box 20 at the center thereof. In addition, the lens 26 is held by the light emitting portion 23a. Light As shown in FIG. 6, a female screw portion 23b for screwing the top plate 25 is provided at the center of the upper end surface of the projecting plate 23, and the top plate 25 is provided on both sides of the female screw portion 23b. Positioning pins 23c and 23c are positioned upright.

As shown in FIG. 5, the top plate 25 is an integral part of the lamp fixing plate 22, and the upper end portion of the lamp fixing plate 22 faces the bottom plate 21 with the deuterium lamp 10 interposed therebetween. The force is also a wall surface extending horizontally to the upper end of the light exit plate 23. As shown in FIG. 6, the top plate 25 is provided with an opening 25a and a positioning hole 25b at positions corresponding to the female screw portion 23b and the positioning pin 23c of the light emitting plate 23, respectively. Then, with the positioning pin 23c being passed through the positioning hole 25b, the male screw is screwed into the female screw portion 23b through the opening 25a. Furthermore, the top plate 25 and the lamp fixing plate 22 are positioned and fixed by screwing the male screw into the female screw portion 21b through the opening 22e. That is, the lamp fixing plate 22 and the top plate 25 are detachably fixed to the bottom plate 21 and the light emitting plate 23. The top plate 25 is provided with a plurality of female screw portions 25c for fixing the upper end portion of the side plate 24 in the vicinity of the side portion.

[0035] The pair of side plates 24 are members constituting the side wall of the lamp box 20, as shown in FIGS. As shown in FIG. 5, the side plates 24 are arranged to face each other with the deuterium lamp 10 interposed therebetween. The upper end portion of the side plate 24 is bent, and this bent portion constitutes the upper end plate 24 a facing the upper surface of the top plate 25. The end of the side plate 24 on the side of the light emitting plate 23 is also bent, and this bent portion constitutes a front end plate 24b that faces the front surface of the light emitting plate 23. Further, openings 24c, 24d, 24d corresponding to the positioning pins 23c of the light emitting plate 23 and the female screw portions 25c, 25c of the top plate 25 are provided in the upper end plate 24a of the side plate 24. Then, with the upper end plate 24a overlaid on the top plate 25, the positioning pin 23c is passed through the opening 24c and the male screw is screwed into the female screw portion 25c through the opening 24d, whereby the side plate 24 Is fixed to the top plate 25. These side plates 24 are formed by bending thin plates and are urged inward by a plate spring 28 extending from the lower surface side of the bottom plate 21 to the outer surface of these side plates. That is, the pair of side plates 24 are detachably attached to the bottom plate 21, the lamp fixing plate 22, the light emitting plate 23, and the top plate 25.

Next, in the heat insulating socket member 30 for fixing the deuterium lamp 10 to the lamp box 20 I will explain in detail. As shown in FIGS. 5 and 6, the heat insulating socket member 30 has a plate shape, and the deuterium lamp 10 is lamp-lamped while holding the stem 1 lb side of the deuterium lamp 10 as described above. A member to be fixed to the fixing plate 22. As for the part of the heat insulating socket member 30, the side holding the deuterium lamp 10 will be described as the front side, and the side fixed to the lamp fixing plate 22 will be described as the back side.

[0037] The heat insulating socket member 30 is made of a polyether ether ketone resin material (PEEK material: registered trademark of Victrex) having heat insulating properties, electrical insulating properties, ultraviolet durability and corrosion resistance. The heat insulating socket member 30 has a predetermined flat surface on each of the front side and the back side, and has a size corresponding to the lamp fixing plate 22. As shown in FIGS. 7 and 8, the heat insulating socket member 30 includes an exhaust pipe entry portion 31 for allowing the exhaust pipe portion 1 Id (see FIG. 2) of the deuterium lamp 10 to enter, and the deuterium lamp 10. Stem pins 19a to 19i (see Fig. 3) to be inserted into stem pin entry parts 32a to 32i and predetermined stem pin entry parts 32a, 32b, 32g, 3 2e 2 32c Pin socket members 33a to 33e for electrically connecting 19e ゝ 19c, positioning pins 34 for positioning the heat insulation socket 30 with respect to the lamp fixing plate 22 with the rear side force protruding, and the heat insulation socket member 30 And an opening 35 for screw fixing.

The exhaust pipe entry portion 31 is an opening provided in the central portion of the heat insulating socket member 30. The diameter of this opening increases with the force on the back side toward the front side.

The stem pin entry portions 32a to 32i are a plurality of openings formed along a predetermined circumference around the exhaust pipe entry portion 31. These openings are positioned to correspond to the stem pins 19a to 19i (see FIG. 3). The diameters of the stem pin entry portions 32a, 32b, 32g, 32e, and 32c through which the pin socket members 33a to 33e enter are approximately 1.8 mm, and the remaining stem pin entry portions 32d, 32i, 32h, and 32f have a diameter of approximately 1. 3mm. As shown in FIG. 10, the stem portion l ib has a glass raised portion l ie around the penetrating portion of the stem pin 19. However, as shown in FIG. 9, the stem pin entry portion 32d, 32i, 32h, and 32f are allowed to allow the rise portion l ie to enter in order to tightly fix the stem portion ib and the heat insulating socket member 30. It has a diameter of

[0040] Pin socket members 33a to 33a, 32a, 32b, 32g, 32e, 32c attached to stem pin entry portions 32a, 32b 33e has a cylindrical shape. As shown in FIG. 8, these pin socket members 33a to 33e also project the rear side force of the heat insulating socket member 30, and the closed rear end side is connected to the electric cape. Pin sogging material 33a to 33e [On the other hand, stem pins 19a, 19b, 19g, 19e, 19c are detachable, and the rear end side (right side in the figure) of these stem pins 19a, 19b, 19g, 19e, 19c is the pin socket member Fixed to 33a to 33e (electrically connected). Further, as shown in FIG. 9, the front socket side surface force of the pin socket members 33a to 33e is also separated by a predetermined distance. Specifically, the pin socket members 33a to 33e are not separated from the raised portion 1 le of the stem portion 1 lb, and are separated to a certain extent.

[0041] Then, the deuterium lamp 10 is detachably fixed to the heat insulating socket member 30, as shown in FIG. Specifically, the exhaust pipe part l id and the stem pins 19a to 19i of the deuterium lamp 10 respectively enter the exhaust pipe entry part 31 and the stem pin entry parts 32a to 32i of the heat insulating socket member 30, and the stem part l ib Is in surface contact with the front surface of the heat-insulating socket member 30, and is fitted into the stem pins 19a ゝ 19b ゝ 19g ゝ 19e ゝ 19c force pin sockets 33a to 33e. At this time, the front portion of the heat insulating socket member 30 in contact with the stem portion l ib becomes the surface contact portion 30a.

As shown in FIG. 8, the positioning pins 34 protrude outward from both sides of the exhaust pipe entry portion 31 and fit into the small holes 22b (see FIG. 6) of the lamp fixing plate 22. As shown in FIGS. 7 and 8, the opening 35 is provided at a position corresponding to the female screw portion 22c (see FIG. 6) of the lamp fixing plate 22. Then, the positioning pin 34 is fitted into the small hole 22b of the lamp fixing plate 22, and the male screw is screwed into the female screw portion 22c through the opening 35, whereby the heat insulating socket member 30 is fixed to the lamp fixing plate 22. Is fixed to the position. That is, the lamp fixing plate 22 can be attached to and detached from the light emitting plate 23 and the bottom plate 21 while the deuterium lamp 10 is fixed to the lamp fixing plate 22 via the heat insulating socket member 30.

Next, an operation of the light source device 1 configured as described above will be described. In the deuterium lamp 10, first, about 10 seconds of power before the discharge is supplied to the cathode portion 17 through the pin socket members 33a and 33b and the stem pins 19a and 19b. The coil constituting the cathode part 17 is preheated by this power supply. Next, the cathode part 17 and A voltage of about 160 V is applied between the anode section 14 and the main discharge external power source via the stem pins 19c and 19d. This voltage application prepares for arc discharge.

After that, a predetermined voltage, for example, a voltage of about 350 V is applied between the discharge path limiting unit 16 and the anode unit 14 via the stem pins 19e, 19c, 19d as the trigger external power supply. As a result, a discharge is sequentially generated between the cathode portion 17 and the discharge path limiting portion 16 and between the cathode portion 17 and the anode portion 14, and a starting discharge is generated between the cathode portion 17 and the anode portion 14. When the starting discharge occurs, arc discharge (main discharge) is maintained between the negative electrode portion 17 and the anode portion 14, and an arc ball is generated in the concave portion 16d of the discharge path limiting portion 16. The ultraviolet rays from which the arc ball force is also extracted are transmitted to the outside through the light exit window 11c as extremely bright light. During discharge, the cathode-side cover portion 18b prevents spatter or evaporate from the cathode portion 17 from adhering to the light emission window 11c.

Then, the emitted light from the deuterium lamp 10 passes through the lens 26 and is emitted out of the lamp box 20. The emitted ultraviolet light is combined with the emitted light from the halogen lamp 3 by the beam splitter 4.

Here, when maintenance work such as replacement of the deuterium lamp 10 becomes necessary due to long-term use, the male screws fixing the lamp fixing plate 22 and the top plate 25 are loosened. If the lamp fixing plate 22 and the top plate 25 are moved upward, the lamp fixing plate 22 and the top plate 25 can be detached from the bottom plate 21 and the light emitting plate 23. Thus, the deuterium lamp 10 is removed from the light source device 1 together with the lamp fixing plate 22. When removing the deuterium lamp 10 from the lamp fixing plate 22, there is no obstructing member such as the light emitting plate 23 around, and the deuterium lamp 10 can be easily attached to and detached from the heat insulating socket member 30. Therefore, the deuterium lamp 10 can be easily replaced.

[0047] When the deuterium lamp 10 is mounted, the stem pin 19a, 19b ゝ 19g ゝ 19e ゝ 19c of the deuterium lamp 10 is inserted into the pin socket 咅 33a to 33e of the gradual heat socket 咅 30. As a result, the stem portion l ib and the heat insulating socket member 30 are firmly fixed. Thereafter, the lamp fixing plate 22 and the top plate 25 to which the deuterium lamp 10 is fixed are attached to the bottom plate 21 and the light emitting plate 23, so that the optical system such as the lens 26 and the beam splitter 4 and the deuterium lamp 10 are fixed. High-precision mounting with respect to the distance to the optical axis is realized. [0048] In the light source device 1 configured as described above, the pin socket members 33a to 33e for allowing the stem pins 19a, 19b, 19g, 19e, and 19c to protrude outward from the stem portion l ib, and these pin sockets An insulating socket member 30 having members 33a to 33e is provided. The insulating socket member 30 has a structure in which the deuterium lamp 10 is detachably fixed by bringing the stem portion 1 lb into surface contact. As described above, since the deuterium lamp 10 is firmly fixed to the heat insulating socket member 30, the positioning accuracy of the deuterium lamp 10 is remarkably improved. Further, since the stem portion l ib is closely fixed to the heat insulating socket member 30, it is fixed to the substrate on which the deuterium lamp is fixed via the stem pin (with a gap between the substrate and the stem portion). Compared with this light source device, the stability when the deuterium lamp 10 is fixed is increased.

[0049] Since the lamp fixing plate 22 has a structure that is detachable while the deuterium lamp 10 is fixed to the light emitting plate 23 facing the lamp fixing plate 22, the deuterium lamp 10 is attached to the lamp fixing plate 22. Can be separated from the light output plate 23. As a result, there are no surrounding obstacles, the deuterium lamp 10 can be easily attached to and detached from the lamp fixing plate 22, and the deuterium lamp 10 can be easily maintained. Further, since the deuterium lamp 10 has a structure that is detachable from the heat insulating socket member 30, the deuterium lamp 10 can be easily removed. From this point, maintenance work such as replacement of the deuterium lamp 10 becomes easy.

In the lamp box 20, the pair of side plates 24 has a structure that can be attached to and detached from the lamp fixing plate 22 and the top plate 25. Therefore, when the deuterium lamp 10 is removed while being fixed to the lamp fixing plate 22, maintenance work such as replacement of the deuterium lamp 10 can be performed more easily. Each side plate 24 is fixed to the top plate 25 by inserting a positioning pin 23c and a male screw into openings 24c and 24d formed in the upper end plate 24a. On the other hand, the top plate 25 and the lamp fixing plate 22 allow the male screw and the positioning pin 23c to pass through the opening 25a, the positioning hole 25b, and the opening 22e formed on the top surface of the top plate 25 and the extension 22d. And fixed to the light emitting plate 23 and the bottom plate 21. Therefore, the pair of side plates 24, the lamp fixing plate 22, and the top plate 25 can be attached and detached only from the top of the lamp box 20, and maintenance work such as replacement of the deuterium lamp 10 is further facilitated. Become. In particular, such a structure is effective when the installation space of the lamp box 20 is very small.

[0051] The light output plate 23 has a structure that holds a lens 26 that allows light from the deuterium lamp 10 to pass therethrough. Have. Therefore, the positioning of the deuterium lamp 10 with respect to the lens 26 is easy.

[0052] The heat insulating socket member 30 has a plate shape. Therefore, the heat insulating socket member 30 is easily fixed in close contact with the lamp fixing plate 22.

Further, while the deuterium lamp 10 is fixed in the lamp box 20, a heat insulating socket member 30 is disposed between the deuterium lamp 10 and the lamp fixing plate 22. Therefore, the heat conduction between the lamp box 20 and the deuterium lamp 10 is higher than that of a conventional light source device that is disposed outside the lamp box and has a deuterium lamp in contact with the lamp box. Reduced. As a result, the influence on the deuterium lamp 10 due to the temperature change outside the lamp box 20 is effectively reduced, and the luminance stability of the deuterium lamp 10 can be realized.

[0054] In the deuterium lamp 10 having the above-described structure, the cathode portion 17 is surrounded by the cathode side cover portion 18b of the cathode portion cover 18 made of ceramics having excellent heat retention (this negative electrode). Only a slit 18d for electron emission is provided in the side cover 18b as a minimum necessary opening). Therefore, the heat retention effect of the cathode portion 17 is remarkably enhanced by the cathode side covering portion 18b. Further, the temperature of the cathode part 7 can be easily maintained and the power consumption can be reduced. As a result, the gas discharge tube 10 including the power source can be downsized.

[0055] The cathode portion cover 18 is an assembly that covers the cathode portion 17 in a state where the cathode side covering portion 18b can emit electrons, while the anode side covering portion 18a includes the anode portion 14 and the discharge path limiting portion 16. It is integrally formed with ceramics so that it can be discharged. With this structure, it is not necessary to expose the discharge path limiting portion 16 more than necessary, and as a result, a member for improving the discharge efficiency (a separate member corresponding to the upper portion of the anode side cover portion 18a in this embodiment) is unnecessary. Become. Therefore, the number of parts is reduced, and low cost is achieved.

[0056] The discharge path limiting portion 16 is a discharge path limiting portion fixing plate provided with an upper wall portion of an anode side cover portion 18a which is a portion covering the assembly of the cathode portion cover 18, and an opening 15x through which the discharge path passes. It is fixed in a state of being sandwiched between 15. Therefore, the discharge path limiting portion 16 can be easily fixed with a small number of parts, and the cost can be further reduced.

Next, a second embodiment of the light source device according to the present invention will be described with reference to FIG. FIG. 11 is a diagram showing a schematic configuration of the second embodiment of the light source device according to the present invention. The light source device 41 according to the second embodiment is different from the light source device 1 according to the first embodiment in that a light exit window is used instead of the lamp box 20 having the light exit plate 23 having the lens 26. A lamp box 40 having a light emitting plate 43 having 42, and a point where the lens 46 is fixed to the base 7 so that the lens 46 is disposed between the light emitting plate 43 and the beam splitter 4. . The remaining configuration of the light source device 41 according to the second embodiment is the same as that of the light source device 1 according to the first embodiment. Even in such a configuration, the light source device 41 is the same as the light source device 1 according to the first embodiment. The effect is effective.

Next, a third embodiment of the light source device according to the present invention will be described with reference to FIG. 12 and FIG. FIG. 12 is a perspective view showing the structure of the lamp box in the third embodiment of the light source device according to the present invention. FIG. 13 is an exploded perspective view showing the internal state of the lamp box of FIG. 12 (internal state accommodated by the deuterium lamp).

[0060] The light source device 56 according to the third embodiment is different from the light source device 1 according to the first embodiment in that the side plate 24, the bottom plate 21 and the light emitting plate 23 are configured as separate members. Instead, the lamp box 50 in which the side plate 54, the bottom plate 51, and the light emitting plate 53 are configured as body members is applied, and the leaf spring 28 that urges the side plate is unnecessary. Specifically, the bottom plate 51 and the light emitting plate 53 have the same structure as the bottom plate 21 and the light emitting plate 23 in the first embodiment. However, the side plate 54 is erected upward from the end of the bottom plate 51 in the width direction. That is, the side plate 54 constitutes a wall surface orthogonal to the bottom plate 51 and the light emitting plate 53 and extends to the same height as the light emitting plate 53. The remaining structure of the light source device 56 according to the third embodiment is the same as that of the light source device 1 according to the first embodiment, and this structure also provides the same operation and effect as the light source device 1 according to the first embodiment. Play. Since the leaf spring 28 is not necessary, the number of parts is further reduced as compared with the first embodiment.

Next, a fourth embodiment of the light source device according to the present invention will be described with reference to FIGS. 14 and 15. FIG. 14 is a perspective view showing the structure of the lamp box in the fourth embodiment of the light source device according to the present invention. FIG. 15 is an exploded perspective view showing the internal state of the lamp box of FIG. 14 (internal state accommodated by the deuterium lamp).

[0062] The light source device 66 according to the fourth embodiment is different from the light source device 56 according to the third embodiment in that the side plate 54, the bottom plate 51, and the light emitting plate 53 are configured as an integral member. Instead of the tass 50, a lamp box 60 is adopted in which the light emitting plate 63 and the side plate 64 are configured as body members, while the base 67 is also configured as a bottom plate. The light emitting plate 63 and the side plate 64 have the same structure as the light emitting plate 53 and the side plate 54 according to the third embodiment, but there is no heat insulating material 27 disposed on the bottom plate 51. The base 67 has the same structure as the base 7, and a female screw portion 67b for fixing the lamp fixing plate 22 is formed at a position corresponding to the opening 22e of the extending portion 22d in the lamp fixing plate 22. ing. The remaining configuration of the light source device 66 according to the fourth embodiment is the same as the configuration of the light source device 1 according to the first embodiment, and the structure of the light source device 1 according to the first embodiment is the same as that of the light source device 1 according to the first embodiment. Has the same effects and effects. In addition, since the base 67 also serves as the bottom plate of the lamp box 60, the number of parts can be further reduced.

Next, a fifth embodiment of the light source device according to the present invention will be described with reference to FIGS. 16 and 17. FIG. 16 is a perspective view showing the structure of the lamp box in the fifth embodiment of the light source device according to the present invention. FIG. 17 is an exploded perspective view showing the internal state of the lamp box of FIG. 16 (internal state accommodated by the deuterium lamp).

[0064] The light source device 76 according to the fifth embodiment differs from the light source device 1 according to the first embodiment in that a heat insulating material 77 having a groove 77a for supporting the side plate 74 is used instead of the heat insulating material 27. As a result, the leaf spring 28 is no longer necessary. The side plate 74 protrudes downward from the bottom plate 21 at the lower end that is longer in the vertical direction than the side plate 24 in the first embodiment by the amount that enters the groove 77a. Then, the lamp box 70 in which the lower end portion of the side plate 74 is erected in the groove 77a of the heat insulating material 77 is obtained. The remaining configuration of the light source device 76 according to the fifth embodiment is the same as that of the light source device 1 according to the first embodiment, and the structure is the same as that of the light source device 1 according to the first embodiment. There is an effect. Since the leaf spring 28 is unnecessary, the number of parts is further reduced.

Next, a sixth embodiment of the light source device according to the present invention will be described with reference to FIGS. 18 and 19. FIG. 18 is a front view showing the structure of the heat insulating socket member in the sixth embodiment of the light source device according to the present invention. FIG. 19 is a diagram showing a cross-sectional structure along the XIX-XIX line of the heat insulating socket (FIG. 18) in a state where the deuterium lamp is fixed.

The light source device according to the sixth embodiment differs from the light source device according to the first embodiment in that Instead of the heat insulating socket member 30 provided with the stem pin entry portions 32d, 32i, 32h and 32f which are openings, the heat insulation socket member provided with the stem pin entry portions 82d, 82i, 82h and 82f which are recesses closed on the back side. 80 is applied. The remaining configuration of the light source device according to the sixth embodiment is the same as the configuration of the light source device 1 according to the first embodiment, and the operation similar to that of the light source device 1 according to the first embodiment is achieved by such a structure. · Plays an effect. Since the rear side of the stem pin entry portions 82d, 82i, 82h, and 82f is closed by the heat insulating member 80, the influence of the temperature change outside the lamp box 20 on the deuterium lamp 10 is further reduced.

Next, a seventh embodiment of the light source device according to the present invention will be described with reference to FIGS. 20 and 21. FIG. FIG. 20 is a front view showing a heat insulating socket member in the seventh embodiment of the light source device according to the present invention. FIG. 21 is a diagram showing a cross-sectional structure along the line XXI-XXI of the heat insulating socket (FIG. 20) in a state where the deuterium lamp is fixed.

The light source device according to the seventh embodiment is different from the light source device according to the sixth embodiment in that the back side is closed instead of the heat insulating socket member 30 provided with the exhaust pipe entry portion 31 that is an opening. The heat insulating socket member 90 provided with the exhaust pipe entry portion 91 which is a closed recess is applied. The remaining configuration of the light source device according to the seventh embodiment is the same as the configuration of the light source device 1 according to the first embodiment. Even with such a structure, the light source device 1 and the sixth embodiment according to the first embodiment are also used. The same effect as the light source device according to the embodiment is obtained. In addition, since the back side of the exhaust pipe entry portion 91 is closed by the heat insulating member 90, the influence of the temperature change outside the lamp box 20 on the deuterium lamp 10 is further reduced.

Next, an eighth embodiment of the light source device according to the present invention will be described with reference to FIG. 22 and FIG. FIG. 22 is a front view showing the heat insulating socket member in the eighth embodiment of the light source apparatus according to the present invention. FIG. 23 is a diagram showing a cross-sectional structure along the line XX-XX of the heat insulating socket (FIG. 22) in a state where the deuterium lamp is fixed.

In the light source device according to the eighth embodiment, the difference from the light source device according to the seventh embodiment is that the heat insulating socket member 100 has a first recess 101 that accommodates the stem portion l ib of the deuterium lamp 10. It is. The shape of the first recess 101 is circular when viewed from the front, and its outer diameter has a size corresponding to the outer diameter of the stem portion l ib. The bottom surface 101a of the first recess 101 is a flat surface. As shown in FIG. 23, the deuterium lamp 10 has a stem portion l ib with a first recess. The exhaust pipe part id and the stem pins 19a to 19i enter the exhaust pipe entry part 91 and the stem pin entry parts 32a, 32b, 32c, 82d, 32e, 82f, 32g, 82h, 82i, respectively, while being accommodated in the part 101. is doing. Thus, the stem portion l ib is detachably fixed in a state where the stem portion ib is in surface contact with the bottom surface (surface contact portion) 101a of the first recess. The remaining configuration of the light source device according to the eighth embodiment is the same as that of the light source device 1 according to the first embodiment. With such a structure, the light source device 1 according to the first embodiment is also used. The same effects as the light source device according to the seventh embodiment are obtained. Power! In the eighth embodiment, the stability when the deuterium lamp 10 is fixed is increased.

Next, a ninth embodiment of the light source device according to the present invention will be described with reference to FIGS. 24 and 25. FIG. FIG. 24 is a front view showing the heat insulating socket member in the ninth embodiment of the light source apparatus according to the present invention. FIG. 25 is a diagram showing a cross-sectional structure along the line XXV-XXV of the heat insulating socket (FIG. 24) in a state where the deuterium lamp is fixed.

In the light source device according to the ninth embodiment, the difference from the light source device according to the eighth embodiment is that the heat insulating socket member 110 has a second recess 112 on the bottom surface 101a of the first recess 101, This is a point having pin socket members 113a to 113e provided with flange portions 113t that are hooked to the peripheral edge portions on the front side of the stem pin entry portions 32a, 32b, 32g, 32e, and 32c. The shape of the second recess 112 is circular when viewed from the front, and its outer periphery is an outer rule of the stem pin entry portions 32a, 32b, 32c, 82d, 32e, 82f, 32g, 82h, 82i. / Speak. Further, the pin socket rods 113a to 113ei are inserted into the stem pin advance rods 32a, 32b, 32g, 32e, 32c, and are hooked on the bottom surface 112a of the metal rod 113t force S second recess 112. The remaining configuration of the light source device according to the ninth embodiment is the same as the configuration of the light source device 1 according to the first embodiment. With such a structure, the light source device 1 and the eighth embodiment according to the first embodiment are also used. The same operation and effect as the light source device according to the example are exhibited.

Next, a tenth embodiment of the light source device according to the present invention will be described with reference to FIGS. 26 and 27. FIG. 26 is a front view showing a heat insulating socket member in the tenth embodiment of the light source apparatus according to the present invention. FIG. 27 is a view showing a cross-sectional structure along the line XXVII-XXVII of the heat insulating socket (FIG. 26) in a state where the deuterium lamp is fixed.

The light source device according to the tenth embodiment differs from the light source device according to the seventh embodiment in that The heat insulation socket member 120 has an upright part 121 that is formed in an annular shape and protrudes toward the front side, and is hooked on the peripheral part on the front side of the stem pin entry parts 32a, 32b, 32g, 32e, 32c. It is a point which has the pin socket members 113a-113e provided with the collar part 113t to be provided. The pin socket members 113a to 113e have the same structure as the pin socket members 113a to 113e in the ninth embodiment.

[0075] The standing portion 121 is located outside the stem pin entry portions 32a, 32b, 32c, 82d, 32e, 82f, 32g, 82h, and 82i. The pin socket members 113 & 1136 are inserted into the stem pin entry portions 32 a, 32 b, 32 g, 32 e, and 32 c, and are hooked on the front surface of the metal 113 t force S heat insulating socket member 120. The deuterium lamp 10 is detachably fixed to the heat insulating socket member 120. Specifically, as shown in FIG. 27, the stem portion l ib is in surface contact with the tip surface (surface contact portion) 12 la of the upright portion 121, and the exhaust pipe portion id and the stem pins 19a to 19i are exhausted. It is inserted into the pipe entry portion 91 and the stem pin entry portions 32a, 32b, 32c, 82d, 32e, 82f, 32g, 82h and 82i. The remaining configuration of the light source device according to the tenth embodiment is the same as the configuration of the light source device 1 according to the first embodiment. Even with such a structure, the light source device 1 and the seventh embodiment according to the first embodiment are also used. The same operation and effect as the light source device according to the embodiment are exhibited.

Next, an eleventh embodiment of the light source device according to the present invention will be described with reference to FIGS. 28 and 29. FIG. FIG. 28 is a front view showing a heat insulation socket member in the eleventh embodiment of the light source device according to the present invention. FIG. 29 is a view showing a cross-sectional structure along the line XXIX-XXIX of the heat insulating socket (FIG. 28) in a state where the deuterium lamp is fixed.

The light source device according to the eleventh embodiment is different from the light source device 1 according to the first embodiment in that it has an exhaust pipe entry portion 31 whose diameter increases toward the rear side force and the front side. Instead of the heat insulating socket member 30, a heat insulating socket member 130 having an exhaust pipe entry portion 131 whose diameter has a constant rear side force and is directed toward the front side is applied. The remaining configuration of the light source device according to the eleventh embodiment is the same as that of the light source device 1 according to the first embodiment, and the same operation as that of the light source device 1 according to the first embodiment is achieved by such a structure. · Effect

Next, a twelfth embodiment of the light source device according to the present invention will be described with reference to FIGS. 30 and 31. FIG. 30 is a sectional view of the light source device according to the twelfth embodiment of the present invention. It is a front view which shows a thermal socket member. FIG. 31 is a view showing a cross-sectional structure along the line XXXI-XXXI of the heat insulating socket (FIG. 30) in a state where the deuterium lamp is fixed.

[0079] The light source device according to the twelfth embodiment is different from the light source device according to the eleventh embodiment in that a heat insulating socket member having a circular outer shape is used instead of the heat insulating socket member 130 having a rectangular outer shape. 140 is applied, and the position of the opening 145 through which the male screw for fixing the heat insulating socket member 140 to the lamp fixing plate is inserted is changed. The outer diameter of the heat insulating socket member 140 has a size corresponding to the diameter of the stem portion l ib. The remaining configuration of the light source device according to the twelfth embodiment is the same as the configuration of the light source device 1 according to the first embodiment. Even with such a structure, the light source device 1 according to the first embodiment and the eleventh embodiment Has the same functions and effects as the light source device of the example.

[0080] While the present invention has been specifically described based on a plurality of embodiments, the present invention is not limited to the above-described embodiments. For example, in the above-described embodiment, the lamp boxes 20, 40, 50, 60, and 70 all have a box shape, but may have a cylindrical body or other shapes.

[0081] In the above-described embodiment, the head-on type deuterium lamp 10 is shown as the gas discharge tube, but a side-on type deuterium lamp may be used. In this case, the side plates 24, 54, 64 and 74 are provided with light emitting portions. Other gas discharge tubes may also be applied.

[0082] Further, in the above-described embodiment, the material of the heat insulating socket members 30, 80, 90, 100, 110, 120, 130, 140 is a polyether ether ketone resin material. A heat-insulating socket member having other material strength may be applied.

[0083] From the above description of the present invention, it is apparent that the present invention can be variously modified. Such modifications cannot be construed as departing from the spirit and scope of the invention, and modifications obvious to all skilled in the art are intended to be included within the scope of the following claims. Industrial applicability

The present invention can be applied to light sources of various inspection apparatuses such as analysis apparatuses and semiconductor inspection apparatuses.

Claims

The scope of the claims

[1] A gas discharge tube having a stem portion that holds a plurality of stem pins in a penetrating state, a lamp vessel that accommodates the gas discharge tube, and a gap between the gas discharge tube and an inner wall of the lamp vessel A light source device including an insulating socket member disposed and fixed in a state of being positioned with respect to the lamp vessel,

The insulating socket member is made of an electrically insulating material, and as a structure for fixing the gas discharge tube in a detachable state,

An electrically insulating surface contact portion in surface contact with the stem portion, and provided corresponding to at least one of the stem pins, each corresponding stem pin being inserted in an electrically connected state. A light source device comprising a pin socket member.

[2] The light source device according to claim 1,

A base on which the lamp vessel is fixed to the surface;

The lamp vessel has a box shape, a wall surface substantially orthogonal to the base, and

The insulating socket member is fixed to the wall surface of the lamp vessel.

[3] The light source device according to claim 1 or 2,

The gas discharge tube includes an exhaust pipe portion in which the stem portion also extends toward the outside of the gas discharge tube, and

The insulating socket member has an exhaust pipe entry part for allowing the exhaust pipe part to enter.

[4] The light source device according to any one of claims 1 to 3,

The insulating socket member has a stem pin entry portion for allowing at least one of the stem pins to enter, and

The pin socket member is attached at least to the stem pin entry portion.

[5] The light source device according to any one of claims 1 to 4,

The lamp vessel includes a light emitting portion that allows light from the gas discharge tube to pass through; and The light source device includes a lens disposed in the light emitting unit.