WO2021053945A1 - Short-arc discharge lamp and light radiating device - Google Patents

Short-arc discharge lamp and light radiating device Download PDF

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Publication number
WO2021053945A1
WO2021053945A1 PCT/JP2020/027318 JP2020027318W WO2021053945A1 WO 2021053945 A1 WO2021053945 A1 WO 2021053945A1 JP 2020027318 W JP2020027318 W JP 2020027318W WO 2021053945 A1 WO2021053945 A1 WO 2021053945A1
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WO
WIPO (PCT)
Prior art keywords
discharge lamp
short arc
type discharge
arc type
end surface
Prior art date
Application number
PCT/JP2020/027318
Other languages
French (fr)
Japanese (ja)
Inventor
尚久 池田
山本　直樹
和彦 信田
Original Assignee
ウシオ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2019167932A external-priority patent/JP2021047983A/en
Priority claimed from JP2019167933A external-priority patent/JP7207244B2/en
Priority claimed from JP2019167934A external-priority patent/JP7251420B2/en
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Publication of WO2021053945A1 publication Critical patent/WO2021053945A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/502—Cooling arrangements characterised by the adaptation for cooling of specific components
    • F21V29/503—Cooling arrangements characterised by the adaptation for cooling of specific components of light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/60—Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
    • F21V29/67—Cooling arrangements characterised by the use of a forced flow of gas, e.g. air characterised by the arrangement of fans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/70—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks
    • F21V29/83—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks the elements having apertures, ducts or channels, e.g. heat radiation holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/24—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Definitions

  • the present invention relates to a short arc type discharge lamp in which a base is attached to a sealing portion of an arc tube and a light irradiation device provided with the short arc type discharge lamp.
  • a short arc type discharge lamp is used as a light source in an exposure apparatus used in a manufacturing process of a semiconductor element, a liquid crystal display element, or the like, or in various projectors.
  • This short arc type discharge lamp is configured such that an anode and a cathode are arranged in an arc tube so as to face each other, and a luminescent substance such as mercury or xenon gas is sealed in the arc tube.
  • a foil sealing structure using a conductive foil for sealing is adopted as the sealing structure of the sealing portion. ing.
  • the arc tube becomes extremely hot when lit, and the sealing portion of the arc tube also becomes hot accordingly.
  • the conductive foil embedded in the sealing portion is oxidized, which may damage the sealing portion and make it unusable.
  • a first opening is formed in the peripheral surface portion of the mouthpiece attached to the sealing portion, and a second opening is formed in the outer end surface portion of the mouthpiece, so that the first opening in the mouthpiece is formed.
  • a technique in which cooling air is blown into a portion where an opening is formed to allow cooling air to flow into the mouthpiece from the first opening and to flow out from the second opening to the outside of the mouthpiece (see Patent Document 1).
  • Inflow air holes and outflow air holes are formed on the peripheral surface of the mouthpiece attached to the sealing part, and cooling air is blown to the portion of the mouthpiece where the inflow air holes are formed to blow the cooling air into the inflow air port.
  • Patent Document 2 there is known a technique (see Patent Document 2) in which cooling air flows into the mouthpiece and the cooling air flows out from the outflow air hole to the outside of the mouthpiece.
  • the present invention has been made based on the above circumstances, and an object of the present invention is a short arc type discharge lamp capable of cooling a sealed portion with high efficiency without lowering the temperature of the arc tube. And to provide a light irradiation device provided with this short arc type discharge lamp. Another object of the present invention is, in addition to the above object, a short arc type discharge capable of cooling the sealing portion with high efficiency without contaminating the inside of the device on which the short arc type discharge lamp is mounted. It is an object of the present invention to provide a lamp and a light irradiation device including the short arc type discharge lamp.
  • the short arc type discharge lamp of the present invention includes an arc tube in which a sealing portion is continuously formed at one end of a light emitting portion, and a mouthpiece into which the sealing portion is inserted and fixed.
  • An internal space is formed between the outer end surface portion of the mouthpiece and the outer end surface portion of the sealing portion.
  • the outer end surface portion of the mouthpiece is characterized by having a ventilation port for allowing cooling air to flow in and out of the internal space.
  • a plurality of the ventilation ports are formed on the outer end surface portion of the mouthpiece.
  • At least one or more of the plurality of ventilation ports is an inflow ventilation port. It is preferable that the length of the line segment defining the maximum length of the inflow vent is smaller than the length of the line segment defining the maximum length of the air outlet arranged to face the outer end surface portion of the mouthpiece. ..
  • At least one or more of the plurality of ventilation ports is an outflow ventilation port.
  • a line segment having a line segment length defining the maximum length of the outflow vent is arranged to face the outer end surface of the mouthpiece and defines the maximum length of the outlet corresponding to the outflow vent. It is preferably smaller than the length of a minute.
  • the plurality of ventilation ports are arranged along a virtual circle coaxial with the outer peripheral surface of the mouthpiece. At least one or more of the plurality of ventilation openings is an inflow ventilation port.
  • the total length of the arcs of the virtual circle overlapping the inflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the air outlets arranged so as to face the outer end surface portion of the mouthpiece. preferable.
  • At least one or more of the plurality of ventilation ports is an outflow ventilation port.
  • the total length of the arcs of the virtual circle overlapping the outflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the discharge port arranged to face the outer end surface portion of the mouthpiece. preferable.
  • the ratio of the area of the ventilation port to the outer end surface of the mouthpiece is 5% or more and 80% or less.
  • the plurality of ventilation ports are formed so as to surround the central portion of the outer end surface portion of the mouthpiece.
  • the base has a positioning portion. Further, it is preferable that the positioning portion is formed by a D-cut shaped notch.
  • the short arc type discharge lamp of the present invention includes a bonding layer formed between the outer peripheral surface of the sealing portion and the inner peripheral surface of the mouthpiece. It is preferable that a step of 3 mm or more is formed between the outer end surface of the sealing portion and the inner space side end surface of the bonding layer.
  • the internal space is provided with a partition wall that partitions the inside of the base with a cross section perpendicular to the tube axis of the arc tube. Further, it is preferable that the distance between the outer end surface of the sealing portion and the partition wall is 5 mm or less. Further, it is preferable that the partition wall is made of metal or ceramics. Further, it is preferable that the partition wall is made of any one of aluminum, copper, brass, tungsten, molybdenum, aluminum nitride and silicon carbide. Further, the thickness of the partition wall is preferably 1 mm or more and 2 mm or less. Further, it is preferable that a partition holding portion for holding the partition is formed on the inner surface of the mouthpiece. Further, it is preferable that the partition wall is integrally formed on the inner surface of the mouthpiece.
  • the light irradiation device of the present invention includes the above-mentioned short arc type discharge lamp and A lamp holding portion that holds the base of the short arc type discharge lamp, and a lamp holding portion. It is characterized by including a ventilation mechanism for allowing cooling air to flow in and out of the internal space through the ventilation port on the outer end surface portion of the mouthpiece.
  • the lamp holding portion has an air outlet for blowing cooling air and an exhaust port for discharging cooling air, which are arranged so as to communicate with the ventilation port, respectively.
  • the ventilation port for allowing the cooling air to flow in and out of the internal space of the mouthpiece is formed on the outer end surface portion of the mouthpiece, the cooling air can be directly applied to the outer end surface of the sealing portion of the arc tube. As a result, the efficiency with which the sealing portion is cooled is improved. Further, since the ventilation port is formed on the flat outer end surface portion of the mouthpiece, it is possible to connect the ventilation port and the exhaust port of the cooling air to the ventilation port. Therefore, the arc tube is not cooled by the cooling air.
  • the sealing portion can be cooled with high efficiency without lowering the temperature of the arc tube, and as a result, the sealing portion is suppressed from being damaged due to the temperature rise of the sealing portion, resulting in a short arc.
  • a long service life can be obtained in a type discharge lamp.
  • by connecting the air outlet and the exhaust port of the cooling air to the ventilation port it is possible to prevent the inside of the device on which the short arc type discharge lamp is mounted from being contaminated by contaminants such as the joint layer. it can.
  • the length of the line segment that defines the maximum length of the inflow vent is the line that defines the maximum length of the air outlet corresponding to the inflow vent, which is arranged so as to face the outer end surface of the mouthpiece.
  • the inflow vent is located inside the air outlet even if the short arc type discharge lamp is slightly displaced in the direction of rotation about the tube axis. Therefore, the connection between the inflow vent and the air outlet can be easily achieved.
  • the length of the line segment that defines the maximum length of the outflow vent is the line that defines the maximum length of the outlet corresponding to the outflow vent, which is arranged so as to face the outer end surface of the mouthpiece.
  • the total length of the arcs of the virtual circle overlapping the outflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the discharge port arranged facing the outer end surface of the mouthpiece.
  • a part of the outer peripheral surface of the sealing portion or the inner peripheral surface of the joining portion is exposed to the internal space, the efficiency of cooling the sealing portion directly or through the bonding layer is improved, and as a result, the sealing portion can be cooled with higher efficiency.
  • the inside of the base is provided with a partition partition in a cross section perpendicular to the tube axis of the arc tube, even if the cooling air flows in and out of the internal space of the base, the base and the sealing portion are bonded to each other. It is possible to prevent the inside of the device on which the short arc type discharge lamp is mounted from being contaminated by contaminants such as agents. Further, since the distance between the outer end surface of the sealing portion and the partition wall is 5 mm or less, sufficient heat is transferred from the sealing portion to the partition wall, so that the sealing portion is cooled with high efficiency through the partition wall. be able to.
  • FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base of the short arc type discharge lamp shown in FIG.
  • FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base in a modified example of the short arc type discharge lamp according to the second embodiment.
  • FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base in a modified example of the short arc type discharge lamp according to the third embodiment.
  • FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base in another modified example of the short arc type discharge lamp according to the third embodiment. It is explanatory drawing which shows the modification of the mouthpiece used for the short arc type discharge lamp which concerns on 3rd Embodiment.
  • FIG. 1 is an explanatory sectional view showing a configuration of a short arc type discharge lamp according to the first embodiment of the present invention.
  • this short arc type discharge lamp (hereinafter, also simply referred to as “discharge lamp”) 10
  • sealing portions 14 are formed at both ends of a substantially spherical light emitting portion 12 so as to continuously extend outward through a narrowed portion 13.
  • the arc lamp 11 is provided.
  • a light emitting space S1 is formed inside the light emitting portion 12 of the light emitting tube 11, and an anode 20 and a cathode 21 are arranged in the light emitting space S1 so as to face each other. Further, the light emitting space S1 is filled with a light emitting substance such as mercury and a buffer gas for starting assistance such as argon gas.
  • a light-transmitting material such as quartz glass can be used.
  • tungsten can be used as the material constituting the anode 20
  • triated tungsten can be used as the material constituting the cathode 21.
  • the amount of the luminescent substance, for example, mercury sealed in the light emitting space S1 is 2 to 6 mg / cm 3
  • the sealing pressure of the buffer gas, for example, argon gas is 0.09 to 0.5 MPa in static pressure.
  • each base end portion of the internal lead 22 is fixedly supported by one end portion of a substantially columnar sealing insulator 15 made of, for example, glass, which is arranged in the sealing portion 14 along the pipe axis. ..
  • a substantially columnar sealing insulator 15 made of, for example, glass, which is arranged in the sealing portion 14 along the pipe axis. ..
  • one end of the sealing insulator 15 is formed in a tapered shape.
  • two rod-shaped external leads 23 extending outward from the sealing portion 14 along the pipe axis are fixedly supported. Tungsten can be used as the material constituting the inner lead 22 and the outer lead 23.
  • a plurality of (for example, six) strip-shaped conductive foils 24 are arranged in the circumferential direction of the sealing insulator 15 at equal intervals, and the arc tube is provided. It is arranged so as to extend along the pipe axis direction of 11.
  • One end of each of these conductive foils 24 is interposed between the disc-shaped conductive disc 25 and the disc-shaped auxiliary disc 26 stacked on one end surface of the sealing insulator 15.
  • One end of each of the conductive foils 24 is integrally joined with the conductive disk 25 by welding.
  • An internal lead 22 penetrates each of the conductive disk 25 and the auxiliary disk 26. As a result, the conductive foil 24 is electrically connected to the internal lead 22 via the conductive disk 25.
  • each of the conductive foils 24 is joined to the outer peripheral surface of the bottomed tubular metal member 27 that opens outward by welding.
  • the external lead 23 penetrates the metal member 27 in a state of being electrically connected, whereby the conductive foil 24 is electrically connected to the external lead 23 via the metal member 27.
  • the inner surface of the sealing portion 14 in the arc tube 11 and the sealing insulator 15 are welded via the conductive foil 24, so that the conductive foil 24 is airtightly embedded in the sealing portion 14.
  • the structure is formed.
  • refractory metals such as tungsten, tantalum, ruthenium, and rhenium or alloys thereof can be used, but the ease of welding and the conductivity of welding heat are good. For this reason, it is preferable to use a metal containing molybdenum as a main component.
  • the thickness of the conductive foil 24 is, for example, 0.02 to 0.06 mm, and the width of the conductive foil 24 is, for example, 6 to 12 mm.
  • refractory metals such as tantalum, niobium, tungsten, and molybdenum can be used.
  • the thickness of the conductive disk 25 in contact with one end surface of the sealing insulator 15 is, for example, 0.5 to 6 mm, and the thickness of the auxiliary disk 26 is, for example, 0.05 to 1 mm. Molybdenum or the like can be used as the material constituting the metal member 27.
  • a tubular internal lead support member 16 made of glass, for example, through which the internal lead 22 is inserted is arranged in the narrowed portion 13 of the arc tube 11. Further, in the tubular hole of the metal member 27, for example, a glass tubular external lead support member 17 through which the external lead 23 is inserted is arranged.
  • the sealing portion 14 of the arc tube 11 is provided with a bottomed tubular base 30 in a state where the sealing portion 14 is inserted into the tubular hole.
  • a bonding layer 40 made of an adhesive is formed between the outer peripheral surface of the sealing portion 14 and the inner peripheral surface of the base 30, and the base 30 is fixed to the sealing portion 14 by the bonding layer 40. There is.
  • the material constituting the base 30 brass, aluminum, or the like can be used.
  • the adhesive constituting the bonding layer 40 an inorganic adhesive typified by a ceramic adhesive can be used.
  • the thickness of the bonding layer 40 is preferably 0.5 to 5 mm.
  • An internal space S2 is formed between the outer end surface portion 31 of the mouthpiece 30 and the outer end surface 14a of the sealing portion 14 in the mouthpiece 30.
  • a bottomed cylindrical terminal portion 32 that opens into the internal space S2 is formed so as to project outward from the outer end surface portion 31 of the base 30.
  • the tip of the external lead 23 is inserted into the tubular hole of the terminal portion 32 and fixed by brazing or the like, so that the external lead 23 is electrically connected to the terminal portion 32 of the base 30.
  • a plurality of (two in the illustrated example) circular ventilation ports 33 are formed in the outer end surface portion 31 of the base 30 to allow cooling air to flow in and out of the internal space S2. These ventilation ports 33 are arranged along a virtual circle C coaxial with the outer peripheral surface of the base 33. In the illustrated example, one ventilation port 33 is an inflow ventilation port 33a, and the other ventilation port 33 is an outflow ventilation port 33b.
  • the ratio of the area of the ventilation port 33 to the outer end surface of the base 30 (hereinafter referred to as "opening ratio") is preferably 5% or more and 80% or less, and more preferably 10% or more and 40% or less. If the opening ratio of the ventilation port 33 is too small, the cooling air does not sufficiently flow in and out of the internal space S of the base 30, and therefore it becomes difficult to sufficiently cool the sealing portion 14. There is. On the other hand, when the opening ratio of the ventilation port 33 is excessive, the strength of the outer end surface portion 31 of the mouthpiece 30 is low, and the outer end surface portion 31 may be easily damaged.
  • the total length of the arc C1 of the virtual circle C overlapping with the inflow ventilation port 33a (in the illustrated example, the inflow ventilation port). Since there is only one 33a, the length of the arc C2 of the virtual circle C where the length of the arc related to the inflow ventilation port 33a) overlaps with the air outlet 52 arranged to face the outer end surface portion 31 of the mouthpiece 30. It is preferable that it is smaller than the total sum (in the illustrated example, since there is only one air outlet 52, the length of the arc related to the air outlet 52).
  • the ratio of the total length of the arc C1 related to the inflow ventilation port 33a and the total length of the arc C2 related to the ventilation port 52 is preferably 1: 1.05 to 1: 1.3, and more preferably. It is preferably 1: 1.1 to 1: 1.2.
  • the total length of the arc C3 of the virtual circle C overlapping with the outflow ventilation port 33b (in the illustrated example, the outflow ventilation port 33b is one). Therefore, the total length of the arc C4 of the virtual circle C in which the length of the arc related to the outflow ventilation port 33b) overlaps with the discharge port 53 arranged to face the outer end surface portion 31 of the mouthpiece 30 (illustrated). In the example of, since there is only one discharge port 53, it is preferably smaller than the length of the arc related to the discharge port 53).
  • the ratio of the total length of the arc C3 related to the outflow ventilation port 33b and the total length of the arc C4 related to the discharge port 53 is preferably 1: 1.05 to 1: 1.3, and more preferably. It is preferably 1: 1.1 to 1: 1.2.
  • the light irradiation device of the present invention blows cooling air into the internal space S2 via the discharge lamp 10, the lamp holding portion for holding the base 30 of the discharge lamp 10, and the ventilation port 33 of the outer end surface portion 31 of the base 30. It is equipped with a ventilation mechanism that allows inflow and outflow.
  • FIG. 4 is an explanatory diagram showing a configuration in an example of the light irradiation device of the present invention.
  • This light irradiation device includes a discharge lamp 10 shown in FIG. 1, a lamp holding portion 50 for holding the discharge lamp 10, and a concave reflector 55 arranged so as to surround the light emitting portion 12 in the discharge lamp 10. These are housed in the lamp house 60.
  • the lamp holding portion 50 is formed of, for example, a rectangular plate-like body made of metal.
  • a circular terminal connection opening 51, an air outlet 52, and an exhaust port 53 penetrating in the thickness direction correspond to the terminal portion 32 and the two ventilation ports 33 in the base 30 of the discharge lamp 10. It is formed.
  • the air outlet 52 of the lamp holding portion 50 is connected to the air blowing mechanism 65 provided outside the lamp house 60 by a pipe 61.
  • the discharge port 53 of the lamp holding portion 50 is connected to the filter 63 provided outside the lamp house 60 by a pipe 62.
  • the terminal connection opening 51 has an inner diameter slightly larger than the outer diameter of the terminal portion 32 in the base 30.
  • the air outlet 52 and the discharge port 53 are formed within a range covered by the outer end surface of the base 30 when the discharge lamp 10 is held by the lamp holding portion 50.
  • the air outlet 52 and the exhaust port 53 are formed so that the distance L is smaller than the outer diameter of the outer end surface of the base 30.
  • the ventilation mechanism 65 is operated when the discharge lamp 10 is lit, so that the cooling air flows from the ventilation port 52 into the internal space S2 through the inflow ventilation port 33a of the base 30.
  • the flow rate of the cooling air flowing into the internal space S2 is, for example, 1.0 to 2.5 L / min.
  • the cooling air flowing into the internal space S2 from the inflow ventilation port 33a directly hits the outer end surface 14a of the sealing portion 14 of the arc tube 11 facing the inflow ventilation port 33a.
  • the efficiency with which the sealing portion 14 is cooled is improved.
  • the cooling air that hits the outer end surface 14a of the sealing portion 14 flows out from the outflow ventilation port 33b. After that, the cooling air is discharged through the discharge port 53. Further, since the air outlet 52 and the discharge port 53 for the cooling air are connected to the ventilation port 33 of the base 30, the arc tube 11 is not cooled by the cooling air.
  • the sealing portion 14 can be cooled with high efficiency without lowering the temperature of the arc tube 11, thereby suppressing damage to the sealing portion 14 due to the temperature rise of the sealing portion 14. As a result, a long service life can be obtained in the discharge lamp 10. Further, since the cooling air ventilation port 52 and the discharge port 53 are connected to the ventilation port 33 of the base 30, it is possible to prevent the inside of the light irradiation device from being contaminated by contaminants such as the bonding layer 40. ..
  • the total length of the arc C1 of the virtual circle C overlapping the inflow ventilation port 33a is the length of the arc C2 of the virtual circle C overlapping the air outlet 52 arranged to face the outer end surface portion 31 of the base 30.
  • the discharge lamp 10 is slightly displaced in the direction of rotation about the tube axis when the discharge lamp 10 is attached to the light irradiation device because it is smaller than the total of the above. Since the inflow vent 33a is located inside the air outlet 52, the required connection between the inflow vent 33a and the air outlet 52 can be easily achieved.
  • the total length of the arc C3 of the virtual circle C overlapping the outflow ventilation port 33b is the length of the arc C4 of the virtual circle C overlapping the discharge port 53 arranged to face the outer end surface portion 31 of the base 30.
  • FIG. 8 is an explanatory sectional view showing a configuration of a short arc type discharge lamp according to a second embodiment of the present invention.
  • a step is formed between the outer end surface 14a of the sealing portion 14 and the internal space side end surface 40a of the bonding layer 40.
  • a step is formed by projecting the outer end surface 14a of the sealing portion 14 toward the internal space S2 side from the internal space side end surface 40a of the bonding layer 40.
  • the size of the step is 3 mm or more, preferably 5 mm or more.
  • the size of the step is, for example, 10 mm or less.
  • Other configurations of the discharge lamp 10 according to the second embodiment are the same as those of the discharge lamp 10 according to the first embodiment.
  • the light irradiation device can be configured in the same manner as the discharge lamp 10 according to the first embodiment (see FIGS. 4 and 5). Then, in such a light irradiation device, as shown in FIG. 10, the cooling air that has flowed into the internal space S2 from one ventilation port 33 is the sealing portion 14 of the arc tube 11 facing the one ventilation port 33. Directly hits the outer end surface 14a of the. Further, the cooling air that hits the outer end surface 14a of the sealing portion 14 flows out from the other ventilation port 33 that is used as the outflow ventilation port. After that, the cooling air is discharged through the discharge port 53.
  • the sealing portion 14 can be cooled with high efficiency without lowering the temperature of the arc tube 11, thereby suppressing damage to the sealing portion 14 due to the temperature rise of the sealing portion 14.
  • the cooling air ventilation port 52 and the discharge port 53 are connected to the ventilation port 33 of the base 30, it is possible to prevent the inside of the light irradiation device from being contaminated by contaminants such as the bonding layer 40. ..
  • FIG. 11 is an explanatory sectional view showing a configuration of a short arc type discharge lamp according to a third embodiment of the present invention.
  • a disc-shaped partition wall 35 is provided in the internal space S2 of the base 30 so as to partition the inside of the base 30 in a cross section perpendicular to the tube axis of the arc tube 11.
  • a through hole 35a through which the external lead 23 penetrates is formed in the partition wall 35 at the central position.
  • the base 30 has a large diameter portion 30a having an inner diameter larger than the diameter of the partition wall 35 and a small diameter portion 30b having an inner diameter smaller than the diameter of the partition wall 35.
  • a partition holding portion for holding the partition wall 35 is formed by a step D between the large diameter portion 30a and the small diameter portion 30b on the inner surface of the base 30.
  • Other configurations of the discharge lamp 10 according to the third embodiment are the same as those of the discharge lamp 10 according to the first embodiment.
  • the thickness of the partition wall 35 is preferably 1 to 2 mm. If the thickness of the partition wall 35 is too small, the partition wall 35 may be deformed or damaged. On the other hand, if the thickness of the partition wall 35 is excessive, the cooling efficiency of the sealing portion 14 may decrease.
  • the material constituting the partition wall 35 it is preferable to use metal or ceramics from the viewpoint of obtaining high thermoconductivity.
  • the metal constituting the partition wall 35 it is preferable to use aluminum, copper, brass, tungsten, or molybdenum. Further, it is preferable to use aluminum nitride or silicon carbide as the ceramics constituting the partition wall 35.
  • the distance R between the outer end surface of the sealing portion 14 and the partition wall 35 is 5 mm or less, preferably 3 mm or less, and more preferably 1 mm or less. If this distance R is excessive, it becomes difficult to cool the sealing portion 14 with high efficiency. In the illustrated example, there is a gap between the outer end surface of the sealing portion 14 and the partition wall 35, but a bonding layer 40 may be formed between the outer end surface of the sealing portion 14 and the partition wall 35. ..
  • the light irradiation device can be configured in the same manner as the discharge lamp 10 according to the first embodiment (see FIGS. 4 and 5). Then, in such a light irradiation device, the ventilation mechanism 65 is operated when the discharge lamp 10 is lit, so that the cooling air is provided from the ventilation port 52 to the ventilation port 33 for inflow in the base 30. It flows into the internal space S2 through the inside space S2. Then, as shown in FIG. 13, the cooling air that has flowed into the internal space S2 from one ventilation port 33 directly hits the partition wall 35 and then flows out from the other ventilation port 33 that is used as the outflow ventilation port. Then, the cooling air is discharged through the discharge port 53.
  • the internal space S2 of the base 30 is provided with a partition wall 35 that partitions the inside of the base 30 in a cross section perpendicular to the tube axis of the arc tube 11, so that the internal space S2 of the base 30 is cooled. Even if the wind flows in and out, it is possible to prevent the inside of the light irradiation device from being contaminated by contaminants such as an adhesive that joins the base 30 and the sealing portion 14. Further, since the distance between the outer end surface of the sealing portion 14 and the partition wall 35 is 5 mm or less, sufficient heat is transferred from the sealing portion 14 to the partition wall 35, so that the sealing portion 14 is passed through the partition wall 35. Can be cooled with high efficiency.
  • the outer end surface portion 31 of the base 30 is formed with a ventilation port 33 for cooling air that allows cooling air to flow in and out of the internal space S2, thereby preventing the arc tube 11 from being cooled by the cooling air. it can. Therefore, the sealing portion 14 can be cooled with high efficiency without lowering the temperature of the arc tube 11.
  • the base 30 may have a positioning portion 34 formed by, for example, a D-cut shaped notch.
  • a positioning portion 34 By providing such a positioning portion 34, when the discharge lamp 10 is attached to the lamp holding portion 50, the ventilation port 33, the ventilation port 52, and the discharge port 53 can be easily and surely aligned with each other. .. Further, the positioning portion 34 is not limited to the one formed by the D-cut shape notch, and various forms can be adopted.
  • the shape of the ventilation port 33 of the base 30 is not limited to a circular shape.
  • a rectangular ventilation port 33 may be formed, as shown in FIG. 15 (b).
  • a bow-shaped ventilation port 33 may be formed.
  • the number of ventilation ports 33 of the base 30 is not limited to two, and for example, a single ventilation port 33 that is also used for the inflow and outflow of cooling air may be formed.
  • the ventilation port 33 may have the same inner diameter as the internal space S2 of the base 30 as shown in FIG. In the figure, the sealing portion 14, the external lead 23, and the bonding layer 40 on the end side of the discharge lamp 10 can be seen inside the ventilation port 33.
  • the lamp holding portion 50 is preferably sized to cover the ventilation port 33.
  • three or more ventilation ports for example, as shown in FIG. 17A, four ventilation ports 33 surround the central portion of the outer end surface portion 31 where the terminal portion 32 is formed. It may be formed, and as shown in FIG. 17B, a large number of ventilation openings 33 may be formed so as to surround the central portion where the terminal portion 32 is formed in the outer end surface portion 31.
  • the shapes of the air outlet 52 and the exhaust port 53 of the lamp holding portion 50 are not limited to a circular shape, and for example, as shown in FIG. 18A, the rectangular air outlet 52 and the exhaust port 52 and the exhaust port 53.
  • the outlet 53 may be formed, and as shown in FIG. 18B, a truck-shaped air outlet 52 and an outlet 53 may be formed.
  • either or both of the air outlet 52 and the exhaust port 53 of the lamp holding portion 50 is the air outlet 33 of the base 30. It may be formed by a tubular portion 55 having an outer diameter slightly smaller than the inner diameter. According to such a configuration, when the discharge lamp 10 is attached to the lamp holding portion 50, the tubular portion 55 serves as a positioning portion between the ventilation port 33, the ventilation port 52, and the discharge port 53. The alignment with the air outlet 52 and the exhaust port 53 can be easily and surely performed.
  • the plurality of ventilation ports 33 may not be arranged along a virtual circle coaxial with the outer peripheral surface of the base 30.
  • the length of the line segment that defines the maximum length of the inflow ventilation port 33a among the ventilation ports 33 defines the maximum length of the ventilation port 52 corresponding to the inflow ventilation port 33a. It is preferably smaller than the length of the line segment.
  • the length of the line segment defining the maximum length of the outflow ventilation port 33b is smaller than the length of the line segment defining the maximum length of the discharge port 53 corresponding to the outflow ventilation port 33b. Is preferable.
  • the length of the line segment that defines the maximum length means, for example, the diameter if the ventilation port 33 is circular, and the diagonal length if the ventilation port 33 is rectangular. According to such a configuration, when the discharge lamp 10 is attached to the light irradiation device, the ventilation port 33 is the ventilation port even if the discharge lamp 10 is slightly displaced in the direction of rotation about the tube axis thereof. Since it is located in the 52 or the discharge port 53, the required connection between the ventilation port 33 and the ventilation port 52 or the discharge port 53 can be easily achieved.
  • the step between the outer end surface 14a of the sealing portion 14 and the internal space side end surface 40a of the joint layer 40 is the internal space side end surface of the joint layer 40.
  • 40a may be formed by projecting toward the internal space S2 side from the outer end surface 14a of the sealing portion 14. According to such a configuration, since a part of the inner peripheral surface of the bonding layer 40 is exposed to the internal space S2, heat is dissipated from the exposed surface of the bonding layer 40, and as a result, the sealing portion 14 is cooled. Efficiency is improved.
  • the partition wall 35 may be integrally formed on the inner surface of the base 30.
  • the base 30 has two bottomed tubular base materials 30a and 30b, and the outer surfaces of the bottoms 35b and 35c are joined to each other. It may be composed of.
  • the partition wall 35 is formed by the joints of the bottoms 35b and 35c of the base materials 30a and 30b.
  • a connecting pipe portion 37 leading to the internal space S2 is formed on the peripheral surface portion 36 of the base 30, and a lead wire electrically connected to the external lead 23. 28 may be configured to be led out to the outside of the base 30 via the connecting pipe portion 37.
  • the opening at the tip of the connecting pipe portion 37 is closed by processing such as hexagonal caulking.
  • Example 1 A discharge lamp having the following specifications was produced according to the configurations shown in FIGS. 1 and 2.
  • a cooling air supply nozzle having an outlet with an inner diameter of 2.5 mm was inserted into one of the ventilation ports of the mouthpiece of the above discharge lamp.
  • Example 2 A discharge lamp having the following specifications was produced according to the configurations shown in FIGS. 8 and 9.
  • a cooling air supply nozzle having an outlet with an inner diameter of 2.5 mm was inserted into one of the ventilation ports of the mouthpiece of the above discharge lamp.
  • Example 3 A discharge lamp having the following specifications was produced according to the configurations shown in FIGS. 11 and 12.
  • a cooling air supply nozzle having an outlet with an inner diameter of 2.5 mm was inserted into one of the ventilation ports of the mouthpiece of the above discharge lamp.
  • a cooling air supply nozzle having an outlet having an inner diameter of 25 mm was arranged at a position 60 mm away from the outer peripheral surface of the base of the discharge lamp.
  • the sealed portion can be cooled with high efficiency according to the discharge lamps according to Examples 1 to 3. Further, by connecting the cooling air discharged from the other ventilation port to the discharge port of the lamp holding portion in the light irradiation device, it is possible to cool the sealing portion without lowering the temperature of the arc tube. ..

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Abstract

Provided are: a short-arc discharge lamp in which a sealing part can be cooled with high efficiency without lowering the temperature of a light-emitting tube; and a light radiating device provided with this short-arc discharge lamp.　This short-arc discharge lamp is provided with: a light-emitting tube constituted by a sealing part being formed so as to be continuous with one end of a light-emitting part; and a socket into which the sealing part is inserted and secured. The sealing part has a foil seal structure formed thereon. The short-arc discharge lamp is characterized in that: an internal space is formed between an outer-end surface section of the socket and an outer-end surface of the sealing part; and the outer-end surface section of the socket has a ventilation port through which cooling air flows into and out of the internal space.

Description

ショートアーク型放電ランプおよび光照射装置Short arc type discharge lamp and light irradiation device
　本発明は、発光管の封止部に口金が装着されたショートアーク型放電ランプおよびこのショートアーク型放電ランプを備えた光照射装置に関する。 The present invention relates to a short arc type discharge lamp in which a base is attached to a sealing portion of an arc tube and a light irradiation device provided with the short arc type discharge lamp.
　例えば半導体素子、液晶表示素子等の製造工程に用いられる露光装置や、種々の映写機においては、光源としてショートアーク型放電ランプが用いられている。このショートアーク型放電ランプは、発光管内に陽極および陰極が互いに対向して配置されると共に、当該発光管内に、水銀、キセノンガス等の発光物質が封入されて構成されている。また、ショートアーク型放電ランプにおいて、発光管の封止部に高い耐圧性が要求される場合には、封止部の封止構造として、封止用の導電箔を用いる箔シール構造が採用されている。 For example, a short arc type discharge lamp is used as a light source in an exposure apparatus used in a manufacturing process of a semiconductor element, a liquid crystal display element, or the like, or in various projectors. This short arc type discharge lamp is configured such that an anode and a cathode are arranged in an arc tube so as to face each other, and a luminescent substance such as mercury or xenon gas is sealed in the arc tube. Further, in a short arc type discharge lamp, when high pressure resistance is required for the sealing portion of the arc tube, a foil sealing structure using a conductive foil for sealing is adopted as the sealing structure of the sealing portion. ing.
　このようなショートアーク型放電ランプは、点灯時に発光管が極めて高温となり、これに伴い、発光管の封止部も高温になる。そして、封止部が高温となると、封止部内に埋設された導電箔の酸化が進行することにより、封止部が破損して使用不能になるおそれがある。 In such a short arc type discharge lamp, the arc tube becomes extremely hot when lit, and the sealing portion of the arc tube also becomes hot accordingly. When the temperature of the sealing portion becomes high, the conductive foil embedded in the sealing portion is oxidized, which may damage the sealing portion and make it unusable.
　このような問題を解決するために、封止部に装着された口金の周面部に第１の開口を形成すると共に、口金の外端面部に第２の開口を形成し、口金における第１の開口が形成された部分に冷却風を吹き付けることにより、第１の開口から口金内に冷却風を流入させ、第２の開口から口金の外部に冷却風を流出させる技術（特許文献１参照）や、封止部に装着された口金の周面部に流入用空気孔および流出用空気孔を形成し、口金における流入用空気孔が形成された部分に冷却風を吹き付けることにより、当該流入用空気口から口金内に冷却風を流入させ、流出用空気孔から口金の外部に冷却風を流出させる技術（特許文献２参照）が知られている。 In order to solve such a problem, a first opening is formed in the peripheral surface portion of the mouthpiece attached to the sealing portion, and a second opening is formed in the outer end surface portion of the mouthpiece, so that the first opening in the mouthpiece is formed. A technique (see Patent Document 1) in which cooling air is blown into a portion where an opening is formed to allow cooling air to flow into the mouthpiece from the first opening and to flow out from the second opening to the outside of the mouthpiece (see Patent Document 1). , Inflow air holes and outflow air holes are formed on the peripheral surface of the mouthpiece attached to the sealing part, and cooling air is blown to the portion of the mouthpiece where the inflow air holes are formed to blow the cooling air into the inflow air port. There is known a technique (see Patent Document 2) in which cooling air flows into the mouthpiece and the cooling air flows out from the outflow air hole to the outside of the mouthpiece.
特開２００１－２１６９３８号公報Japanese Unexamined Patent Publication No. 2001-216938 特開２００２－７５２８２号公報JP-A-2002-75282
　しかしながら、特許文献１および特許文献２に記載のショートアーク型放電ランプにおいては、外部リードには直接冷却風が当たるため、外部リードを高い効率で冷却することは可能であるが、封止部を高い効率で冷却することが困難である。
　また、封止部を冷却するために、大きい流量の冷却風を吹き付けたときには、冷却風の一部が口金の外周面に当たった後に、発光管に向かって流れるため、発光管の温度が低下する結果、点灯に不具合が生じるおそれがある。
　また、特許文献２に記載のショートアーク型放電ランプにおいては、流出用空気孔が口金の外周面部に形成されていることにより、流出用空気孔に排気口を接続することが困難である。そのため、封止部と口金とを接合する接着剤などによる汚染物が冷却風と共に流出用空気孔から流出する結果、ショートアーク型放電ランプが搭載される装置の内部が汚染されるという問題がある。 However, in the short arc type discharge lamps described in Patent Document 1 and Patent Document 2, since the external reed is directly exposed to the cooling air, it is possible to cool the external reed with high efficiency, but the sealing portion is provided. It is difficult to cool with high efficiency.
Further, when a large flow rate of cooling air is blown to cool the sealing portion, a part of the cooling air hits the outer peripheral surface of the base and then flows toward the arc tube, so that the temperature of the arc tube drops. As a result, there is a risk of malfunction in lighting.
Further, in the short arc type discharge lamp described in Patent Document 2, it is difficult to connect the exhaust port to the outflow air hole because the outflow air hole is formed on the outer peripheral surface portion of the mouthpiece. Therefore, there is a problem that the inside of the device on which the short arc type discharge lamp is mounted is contaminated as a result of the contaminants such as the adhesive that joins the sealing portion and the mouthpiece flowing out from the outflow air holes together with the cooling air. ..
　本発明は、以上のような事情に基づいてなされたものであって、その目的は、発光管の温度を低下させることなしに封止部を高い効率で冷却することができるショートアーク型放電ランプおよびこのショートアーク型放電ランプを備えた光照射装置を提供することにある。
　本発明の他の目的は、上記の目的に加えて更に、ショートアーク型放電ランプが搭載される装置の内部を汚染することなしに封止部を高い効率で冷却することができるショートアーク型放電ランプおよびこのショートアーク型放電ランプを備えた光照射装置を提供することにある。 The present invention has been made based on the above circumstances, and an object of the present invention is a short arc type discharge lamp capable of cooling a sealed portion with high efficiency without lowering the temperature of the arc tube. And to provide a light irradiation device provided with this short arc type discharge lamp.
Another object of the present invention is, in addition to the above object, a short arc type discharge capable of cooling the sealing portion with high efficiency without contaminating the inside of the device on which the short arc type discharge lamp is mounted. It is an object of the present invention to provide a lamp and a light irradiation device including the short arc type discharge lamp.
　本発明のショートアーク型放電ランプは、発光部の一端に連続して封止部が形成されてなる発光管と、前記封止部が挿入されて固定された口金とを備え、前記封止部に箔シール構造が形成されたショートアーク型放電ランプであって、
　前記口金の外端面部と前記封止部の外端面との間には、内部空間が形成され、
　前記口金の外端面部は、前記内部空間に冷却風を流入出させる通風口を有することを特徴とする。 The short arc type discharge lamp of the present invention includes an arc tube in which a sealing portion is continuously formed at one end of a light emitting portion, and a mouthpiece into which the sealing portion is inserted and fixed. A short arc type discharge lamp with a foil seal structure formed on it.
An internal space is formed between the outer end surface portion of the mouthpiece and the outer end surface portion of the sealing portion.
The outer end surface portion of the mouthpiece is characterized by having a ventilation port for allowing cooling air to flow in and out of the internal space.
　本発明のショートアーク型放電ランプにおいては、前記通風口は、前記口金の外端面部に複数形成されていることが好ましい。 In the short arc type discharge lamp of the present invention, it is preferable that a plurality of the ventilation ports are formed on the outer end surface portion of the mouthpiece.
　また、本発明のショートアーク型放電ランプにおいては、前記複数の通風口のうち少なくとも一つ以上が流入用通風口であり、
　前記流入用通風口の最大長さを画定する線分の長さが、前記口金の外端面部に対向して配置される送風口の最大長さを画定する線分の長さより小さいことが好ましい。 Further, in the short arc type discharge lamp of the present invention, at least one or more of the plurality of ventilation ports is an inflow ventilation port.
It is preferable that the length of the line segment defining the maximum length of the inflow vent is smaller than the length of the line segment defining the maximum length of the air outlet arranged to face the outer end surface portion of the mouthpiece. ..
　また、本発明のショートアーク型放電ランプにおいては、前記複数の通風口のうち少なくとも一つ以上が流出用通風口であり、
　前記流出用通風口の最大長さを画定する線分の長さが、前記口金の外端面部に対向して配置され、前記流出用通風口に対応する排出口の最大長さを画定する線分の長さより小さいことが好ましい。 Further, in the short arc type discharge lamp of the present invention, at least one or more of the plurality of ventilation ports is an outflow ventilation port.
A line segment having a line segment length defining the maximum length of the outflow vent is arranged to face the outer end surface of the mouthpiece and defines the maximum length of the outlet corresponding to the outflow vent. It is preferably smaller than the length of a minute.
　また、本発明のショートアーク型放電ランプにおいては、前記複数の通風口は、前記口金の外周面と同軸の仮想円に沿って配置されており、
　前記複数の通風口のうち少なくとも一つ以上が流入用通風口であり、
　前記流入用通風口と重なる前記仮想円の円弧の長さの合計が、前記口金の外端面部に対向して配置される送風口と重なる前記仮想円の円弧の長さの合計より小さいことが好ましい。 Further, in the short arc type discharge lamp of the present invention, the plurality of ventilation ports are arranged along a virtual circle coaxial with the outer peripheral surface of the mouthpiece.
At least one or more of the plurality of ventilation openings is an inflow ventilation port.
The total length of the arcs of the virtual circle overlapping the inflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the air outlets arranged so as to face the outer end surface portion of the mouthpiece. preferable.
　また、本発明のショートアーク型放電ランプにおいては、前記複数の通風口のうち少なくとも一つ以上が流出用通風口であり、
　前記流出用通風口と重なる前記仮想円の円弧の長さの合計が、前記口金の外端面部に対向して配置される排出口と重なる前記仮想円の円弧の長さの合計より小さいことが好ましい。 Further, in the short arc type discharge lamp of the present invention, at least one or more of the plurality of ventilation ports is an outflow ventilation port.
The total length of the arcs of the virtual circle overlapping the outflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the discharge port arranged to face the outer end surface portion of the mouthpiece. preferable.
　また、本発明のショートアーク型放電ランプにおいては、前記通風口は、前記口金の外端面に対して面積の比率が５％以上８０％以下であることが好ましい。 Further, in the short arc type discharge lamp of the present invention, it is preferable that the ratio of the area of the ventilation port to the outer end surface of the mouthpiece is 5% or more and 80% or less.
　また、本発明のショートアーク型放電ランプにおいては、前記複数の通風口は、前記前記口金の外端面部の中央部分を取り囲むよう形成されていることが好ましい。 Further, in the short arc type discharge lamp of the present invention, it is preferable that the plurality of ventilation ports are formed so as to surround the central portion of the outer end surface portion of the mouthpiece.
　また、本発明のショートアーク型放電ランプにおいては、前記口金は、位置決め部を有することが好ましい。
　また、前記位置決め部は、Ｄカット形状の切り欠きによって形成されていることが好ましい。 Further, in the short arc type discharge lamp of the present invention, it is preferable that the base has a positioning portion.
Further, it is preferable that the positioning portion is formed by a D-cut shaped notch.
　また、本発明のショートアーク型放電ランプにおいては、前記封止部の外周面と前記口金の内周面との間に形成された接合層を備え、
　前記封止部の外端面と前記接合層の内部空間側端面との間には、３ｍｍ以上の段差が形成されていることが好ましい。 Further, the short arc type discharge lamp of the present invention includes a bonding layer formed between the outer peripheral surface of the sealing portion and the inner peripheral surface of the mouthpiece.
It is preferable that a step of 3 mm or more is formed between the outer end surface of the sealing portion and the inner space side end surface of the bonding layer.
　また、本発明のショートアーク型放電ランプにおいては、前記内部空間には、前記口金内を前記発光管の管軸と垂直な断面において仕切る隔壁が設けられていることが好ましい。
　また、前記封止部の外端面と前記隔壁との間の距離が５ｍｍ以下であることが好ましい。
　また、前記隔壁が、金属またはセラミックスよりなることが好ましい。
　また、前記隔壁が、アルミニウム、銅、真鍮、タングステン、モリブデン、窒化アルミニウムおよび炭化ケイ素のいずれかよりなることが好ましい。
　また、前記隔壁の厚みが１ｍｍ以上２ｍｍ以下であることが好ましい。
　また、前記口金の内面には、前記隔壁を保持する隔壁保持部が形成されていることが好ましい。
　また、前記隔壁は、前記口金の内面に一体に形成されていることが好ましい。 Further, in the short arc type discharge lamp of the present invention, it is preferable that the internal space is provided with a partition wall that partitions the inside of the base with a cross section perpendicular to the tube axis of the arc tube.
Further, it is preferable that the distance between the outer end surface of the sealing portion and the partition wall is 5 mm or less.
Further, it is preferable that the partition wall is made of metal or ceramics.
Further, it is preferable that the partition wall is made of any one of aluminum, copper, brass, tungsten, molybdenum, aluminum nitride and silicon carbide.
Further, the thickness of the partition wall is preferably 1 mm or more and 2 mm or less.
Further, it is preferable that a partition holding portion for holding the partition is formed on the inner surface of the mouthpiece.
Further, it is preferable that the partition wall is integrally formed on the inner surface of the mouthpiece.
　本発明の光照射装置は、上記のショートアーク型放電ランプと、
　前記ショートアーク型放電ランプの前記口金を保持するランプ保持部と、
　前記口金の前記外端面部の前記通風口を介して前記内部空間に冷却風を流入出させる送風機構とを備えることを特徴とする。 The light irradiation device of the present invention includes the above-mentioned short arc type discharge lamp and
A lamp holding portion that holds the base of the short arc type discharge lamp, and a lamp holding portion.
It is characterized by including a ventilation mechanism for allowing cooling air to flow in and out of the internal space through the ventilation port on the outer end surface portion of the mouthpiece.
　本発明の光照射装置においては、前記ランプ保持部は、それぞれ前記通風口に連通するよう配置された、冷却風を送風する送風口および冷却風を排出する排出口を有することが好ましい。 In the light irradiation device of the present invention, it is preferable that the lamp holding portion has an air outlet for blowing cooling air and an exhaust port for discharging cooling air, which are arranged so as to communicate with the ventilation port, respectively.
　本発明によれば、口金の外端面部に、口金の内部空間に冷却風を流入出させる通風口が形成されているため、冷却風を発光管の封止部の外端面に直接当てることができ、その結果、封止部が冷却される効率が向上する。
　また、口金における平坦な外端面部に通風口が形成されていることにより、当該通風口に冷却風の送風口および排出口を接続することが可能である。そのため、冷却風によって発光管が冷却されることがない。
　従って、発光管の温度を低下させることなしに封止部を高い効率で冷却することができ、これにより、封止部の温度上昇に起因する封止部の破損が抑制される結果、ショートアーク型放電ランプにおいて長い使用寿命が得られる。
　また、通風口に冷却風の送風口および排出口が接続されることにより、接合層などによる汚染物によって、ショートアーク型放電ランプが搭載される装置の内部が汚染されることを防止することができる。 According to the present invention, since the ventilation port for allowing the cooling air to flow in and out of the internal space of the mouthpiece is formed on the outer end surface portion of the mouthpiece, the cooling air can be directly applied to the outer end surface of the sealing portion of the arc tube. As a result, the efficiency with which the sealing portion is cooled is improved.
Further, since the ventilation port is formed on the flat outer end surface portion of the mouthpiece, it is possible to connect the ventilation port and the exhaust port of the cooling air to the ventilation port. Therefore, the arc tube is not cooled by the cooling air.
Therefore, the sealing portion can be cooled with high efficiency without lowering the temperature of the arc tube, and as a result, the sealing portion is suppressed from being damaged due to the temperature rise of the sealing portion, resulting in a short arc. A long service life can be obtained in a type discharge lamp.
In addition, by connecting the air outlet and the exhaust port of the cooling air to the ventilation port, it is possible to prevent the inside of the device on which the short arc type discharge lamp is mounted from being contaminated by contaminants such as the joint layer. it can.
　また、流入用通風口の最大長さを画定する線分の長さが、口金の外端面部に対向して配置される、流入用通風口に対応する送風口の最大長さを画定する線分の長さより小さい構成によれば、ショートアーク型放電ランプを光照射装置に装着する際に、ショートアーク型放電ランプがその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、流入用通風口が送風口内に位置するため、流入用通風口と送風口との所要の接続が容易に達成される。
　また、流入用通風口と重なる仮想円の円弧の長さの合計が、口金の外端面部に対向して配置される送風口と重なる仮想円の円弧の長さの合計より小さい構成によれば、ショートアーク型放電ランプを光照射装置に装着する際に、ショートアーク型放電ランプがその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、流入用通風口が送風口内に位置されるため、流入用通風口と送風口との接続を容易に達成することができる。 In addition, the length of the line segment that defines the maximum length of the inflow vent is the line that defines the maximum length of the air outlet corresponding to the inflow vent, which is arranged so as to face the outer end surface of the mouthpiece. According to the configuration smaller than the length of the minute, when the short arc type discharge lamp is attached to the light irradiation device, even if the short arc type discharge lamp is slightly displaced in the direction of rotation about the tube axis as the central axis. Since the inflow vent is located within the vent, the required connection between the inflow vent and the vent is easily achieved.
Further, according to the configuration in which the total length of the arcs of the virtual circle overlapping the inflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the air outlets arranged facing the outer end surface of the mouthpiece. , When the short arc type discharge lamp is attached to the light irradiation device, the inflow vent is located inside the air outlet even if the short arc type discharge lamp is slightly displaced in the direction of rotation about the tube axis. Therefore, the connection between the inflow vent and the air outlet can be easily achieved.
　また、流出用通風口の最大長さを画定する線分の長さが、口金の外端面部に対向して配置される、流出用通風口に対応する排出口の最大長さを画定する線分の長さより小さい構成によれば、ショートアーク型放電ランプを光照射装置に装着する際に、ショートアーク型放電ランプがその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、流入用通風口が送風口内に位置するため、流出用通風口と排出口との所要の接続が容易に達成される。
　また、流出用通風口と重なる仮想円の円弧の長さの合計が、口金の外端面部に対向して配置される排出口と重なる仮想円の円弧の長さの合計より小さい構成によれば、ショートアーク型放電ランプを光照射装置に装着する際に、ショートアーク型放電ランプがその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、流出用通風口が排出口内に位置するため、流出用通風口と排出口との所要の接続が容易に達成される。 In addition, the length of the line segment that defines the maximum length of the outflow vent is the line that defines the maximum length of the outlet corresponding to the outflow vent, which is arranged so as to face the outer end surface of the mouthpiece. According to the configuration smaller than the length of the minute, when the short arc type discharge lamp is attached to the light irradiation device, even if the short arc type discharge lamp is slightly displaced in the direction of rotation about the tube axis as the central axis. Since the inflow vent is located within the vent, the required connection between the outflow vent and the outlet is easily achieved.
Further, according to the configuration in which the total length of the arcs of the virtual circle overlapping the outflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the discharge port arranged facing the outer end surface of the mouthpiece. , When the short arc type discharge lamp is attached to the light irradiation device, even if the short arc type discharge lamp is slightly misaligned in the direction of rotation around the tube axis, the outflow vent is located inside the discharge port. Therefore, the required connection between the outflow vent and the outlet is easily achieved.
　また、封止部の外端面と接合層の内部空間側端面との間に３ｍｍ以上の段差が形成された構成によれば、封止部の外周面の一部または接合部の内周面の一部が内部空間に露出しているため、封止部が直接または接合層を介して冷却される効率が向上する結果、封止部を更に高い効率で冷却することができる。 Further, according to the configuration in which a step of 3 mm or more is formed between the outer end surface of the sealing portion and the end surface on the internal space side of the joining layer, a part of the outer peripheral surface of the sealing portion or the inner peripheral surface of the joining portion. Since a part of the sealing portion is exposed to the internal space, the efficiency of cooling the sealing portion directly or through the bonding layer is improved, and as a result, the sealing portion can be cooled with higher efficiency.
　また、口金内を発光管の管軸と垂直な断面において仕切る隔壁が設けられた構成によれば、口金の内部空間に冷却風を流入出させても、口金と封止部とを接合する接着剤などによる汚染物によって、ショートアーク型放電ランプが搭載される装置の内部が汚染されることが回避される。
　また、封止部の外端面と隔壁との間の距離が５ｍｍ以下であることにより、封止部から隔壁に十分に伝熱されるため、当該隔壁を介して封止部を高い効率で冷却することができる。 Further, according to the configuration in which the inside of the base is provided with a partition partition in a cross section perpendicular to the tube axis of the arc tube, even if the cooling air flows in and out of the internal space of the base, the base and the sealing portion are bonded to each other. It is possible to prevent the inside of the device on which the short arc type discharge lamp is mounted from being contaminated by contaminants such as agents.
Further, since the distance between the outer end surface of the sealing portion and the partition wall is 5 mm or less, sufficient heat is transferred from the sealing portion to the partition wall, so that the sealing portion is cooled with high efficiency through the partition wall. be able to.
本発明の第１の実施形態に係るショートアーク型放電ランプの構成を示す説明用断面図である。It is explanatory cross-sectional view which shows the structure of the short arc type discharge lamp which concerns on 1st Embodiment of this invention. 図１に示すショートアーク型放電ランプにおける口金の外端面部を示す説明図である。It is explanatory drawing which shows the outer end surface part of the mouthpiece in the short arc type discharge lamp shown in FIG. 図１に示すショートアーク型放電ランプにおける口金の外端面部に送風口および排出口を重ね合わせた状態を示す説明図である。It is explanatory drawing which shows the state which superposed the air outlet and the discharge port on the outer end surface portion of the mouthpiece in the short arc type discharge lamp shown in FIG. 本発明の光照射装置の一例における構成を示す説明図である。It is explanatory drawing which shows the structure in the example of the light irradiation apparatus of this invention. 本発明の光照射装置におけるランプ保持部の一例における構成を示す説明図である。It is explanatory drawing which shows the structure in the example of the lamp holding part in the light irradiation apparatus of this invention. 図１に示すショートアーク型放電ランプにおいて、口金の内部空間における冷却風の流れを示す説明図である。It is explanatory drawing which shows the flow of the cooling air in the internal space of the base in the short arc type discharge lamp shown in FIG. 図１に示すショートアーク型放電ランプを光照射装置に装着した際に、当該ショートアーク型放電ランプがその管軸を中心軸として回転する方向に位置ずれした状態を示す説明図である。It is explanatory drawing which shows the state which when the short arc type discharge lamp shown in FIG. 1 is attached to a light irradiation apparatus, the short arc type discharge lamp is displaced in the direction of rotation about the tube axis as a central axis. 本発明の第２の実施形態に係るショートアーク型放電ランプの構成を示す説明用断面図である。It is explanatory cross-sectional view which shows the structure of the short arc type discharge lamp which concerns on 2nd Embodiment of this invention. 図８に示すショートアーク型放電ランプにおける封止部および口金の一部を拡大して示す説明用断面図である。FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base of the short arc type discharge lamp shown in FIG. 図８に示すショートアーク型放電ランプにおいて、口金の内部空間における冷却風の流れを示す説明図である。It is explanatory drawing which shows the flow of the cooling air in the internal space of the base in the short arc type discharge lamp shown in FIG. 本発明の第３の実施形態に係るショートアーク型放電ランプの構成を示す説明用断面図である。It is explanatory cross-sectional view which shows the structure of the short arc type discharge lamp which concerns on 3rd Embodiment of this invention. 図１１に示すショートアーク型放電ランプにおける封止部および口金の一部を拡大して示す説明用断面図である。11 is an explanatory sectional view showing an enlarged part of a sealing portion and a base of the short arc type discharge lamp shown in FIG. 11. 図１１に示すショートアーク型放電ランプにおいて、口金の内部空間における冷却風の流れを示す説明図である。It is explanatory drawing which shows the flow of the cooling air in the internal space of the base in the short arc type discharge lamp shown in FIG. 本発明のショートアーク型放電ランプに用いられる口金の他の例における構成を示す説明図である。It is explanatory drawing which shows the structure in another example of the base used for the short arc type discharge lamp of this invention. 本発明のショートアーク型放電ランプに用いられる口金の変形例を示す説明図である。It is explanatory drawing which shows the modification of the mouthpiece used for the short arc type discharge lamp of this invention. 本発明のショートアーク型放電ランプに用いられる口金の他の変形例を示す説明図である。It is explanatory drawing which shows the other modification of the mouthpiece used for the short arc type discharge lamp of this invention. 本発明のショートアーク型放電ランプに用いられる口金の更に他の変形例を示す説明図である。It is explanatory drawing which shows the further modification of the mouthpiece used for the short arc type discharge lamp of this invention. 本発明の光照射装置に用いられるランプ保持部の他の例における構成を示す説明図である。It is explanatory drawing which shows the structure in another example of the lamp holding part used for the light irradiation apparatus of this invention. 本発明の光照射装置に用いられるランプ保持部の更に他の例における構成を示す説明図である。It is explanatory drawing which shows the structure in still another example of the lamp holding part used in the light irradiation apparatus of this invention. 第２の実施形態に係るショートアーク型放電ランプの変形例における封止部および口金の一部を拡大して示す説明用断面図である。FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base in a modified example of the short arc type discharge lamp according to the second embodiment. 第３の実施形態に係るショートアーク型放電ランプの変形例における封止部および口金の一部を拡大して示す説明用断面図である。FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base in a modified example of the short arc type discharge lamp according to the third embodiment. 第３の実施形態に係るショートアーク型放電ランプの他の変形例における封止部および口金の一部を拡大して示す説明用断面図である。FIG. 5 is an explanatory cross-sectional view showing an enlarged part of a sealing portion and a base in another modified example of the short arc type discharge lamp according to the third embodiment. 第３の実施形態に係るショートアーク型放電ランプに用いられる口金の変形例を示す説明図である。It is explanatory drawing which shows the modification of the mouthpiece used for the short arc type discharge lamp which concerns on 3rd Embodiment.
　以下、本発明の実施の形態について詳細に説明する。
［第１の実施形態］
　図１は、本発明の第１の実施形態に係るショートアーク型放電ランプの構成を示す説明用断面図である。このショートアーク型放電ランプ（以下、単に「放電ランプ」ともいう。）１０は、略球状の発光部１２の両端に狭窄部１３を介して連続して外方に伸びる封止部１４が形成されてなる発光管１１を有する。発光管１１における発光部１２の内部には発光空間Ｓ１が形成され、この発光空間Ｓ１には、陽極２０および陰極２１が互いに対向して配置されている。また、発光空間Ｓ１には、水銀などの発光物質やアルゴンガスなどの始動補助用バッファガスが封入されている。 Hereinafter, embodiments of the present invention will be described in detail.
[First Embodiment]
FIG. 1 is an explanatory sectional view showing a configuration of a short arc type discharge lamp according to the first embodiment of the present invention. In this short arc type discharge lamp (hereinafter, also simply referred to as “discharge lamp”) 10, sealing portions 14 are formed at both ends of a substantially spherical light emitting portion 12 so as to continuously extend outward through a narrowed portion 13. The arc lamp 11 is provided. A light emitting space S1 is formed inside the light emitting portion 12 of the light emitting tube 11, and an anode 20 and a cathode 21 are arranged in the light emitting space S1 so as to face each other. Further, the light emitting space S1 is filled with a light emitting substance such as mercury and a buffer gas for starting assistance such as argon gas.
　発光管１１を構成する材料としては、例えば石英ガラスなどの光透過性材料を用いることができる。
　また、陽極２０を構成する材料としては、タングステンを用いることができ、陰極２１を構成する材料としては、トリエーテッドタングステンを用いることができる。
　また、発光空間Ｓ１に封入される発光物質例えば水銀の封入量は、２～６ｍｇ／ｃｍ3 であり、バッファガス例えばアルゴンガスの封入圧は、静圧で０．０９～０．５ＭＰａである。 As the material constituting the arc tube 11, a light-transmitting material such as quartz glass can be used.
Further, tungsten can be used as the material constituting the anode 20, and triated tungsten can be used as the material constituting the cathode 21.
The amount of the luminescent substance, for example, mercury sealed in the light emitting space S1 is 2 to 6 mg / cm 3 , and the sealing pressure of the buffer gas, for example, argon gas is 0.09 to 0.5 MPa in static pressure.
  発光管１１内には、それぞれ封止部１４から発光空間Ｓ１に向かって管軸に沿って伸びる２つのロッド状の内部リード２２が配置されている。内部リード２２の各々の先端には、陽極２０または陰極２１が固定されている。また、内部リード２２の各々の基端部は、封止部１４内に管軸に沿って配置された例えばガラスよりなる略円柱状の封止用絶縁体１５の一端部に固定支持されている。図示の例では、封止用絶縁体１５の一端部分がテーパ状に形成されている。また、封止用絶縁体１５の他端部には、封止部１４から管軸に沿って外方に突出して伸びる２つのロッド状の外部リード２３が固定支持されている。
　内部リード２２および外部リード２３を構成する材料としては、タングステンを用いることができる。 Inside the arc tube 11, two rod-shaped internal leads 22 extending from the sealing portion 14 toward the light emitting space S1 along the tube axis are arranged. An anode 20 or a cathode 21 is fixed to each tip of the internal lead 22. Further, each base end portion of the internal lead 22 is fixedly supported by one end portion of a substantially columnar sealing insulator 15 made of, for example, glass, which is arranged in the sealing portion 14 along the pipe axis. .. In the illustrated example, one end of the sealing insulator 15 is formed in a tapered shape. Further, at the other end of the sealing insulator 15, two rod-shaped external leads 23 extending outward from the sealing portion 14 along the pipe axis are fixedly supported.
Tungsten can be used as the material constituting the inner lead 22 and the outer lead 23.
  封止用絶縁体１５の外周面には、複数（例えば６つ）の帯状の導電箔２４が、封止用絶縁体１５の周方向に互いに等間隔で離間して並んだ状態で、発光管１１の管軸方向に沿って伸びるよう配置されている。これらの導電箔２４の各々の一端部は、封止用絶縁体１５の一端面に積重された円板状の導電ディスク２５と円板状の補助ディスク２６との間に介在している。そして、導電箔２４の各々の一端部は、溶接により導電ディスク２５と一体に接合されている。導電ディスク２５および補助ディスク２６の各々には、内部リード２２が貫通している。そして、これにより、導電箔２４が導電ディスク２５を介して内部リード２２に電気的に接続されている。また、導電箔２４の各々の他端部は、外方に開口する有底筒状の金属部材２７の外周面に溶接により接合されている。金属部材２７には、外部リード２３が電気的に接続された状態で貫通しており、これにより、導電箔２４が金属部材２７を介して外部リード２３に電気的に接続されている。
  そして、発光管１１における封止部１４の内面と封止用絶縁体１５とが導電箔２４を介して溶着されることによって、導電箔２４が封止部１４内に気密に埋設された箔シール構造が形成されている。 On the outer peripheral surface of the sealing insulator 15, a plurality of (for example, six) strip-shaped conductive foils 24 are arranged in the circumferential direction of the sealing insulator 15 at equal intervals, and the arc tube is provided. It is arranged so as to extend along the pipe axis direction of 11. One end of each of these conductive foils 24 is interposed between the disc-shaped conductive disc 25 and the disc-shaped auxiliary disc 26 stacked on one end surface of the sealing insulator 15. One end of each of the conductive foils 24 is integrally joined with the conductive disk 25 by welding. An internal lead 22 penetrates each of the conductive disk 25 and the auxiliary disk 26. As a result, the conductive foil 24 is electrically connected to the internal lead 22 via the conductive disk 25. Further, the other end of each of the conductive foils 24 is joined to the outer peripheral surface of the bottomed tubular metal member 27 that opens outward by welding. The external lead 23 penetrates the metal member 27 in a state of being electrically connected, whereby the conductive foil 24 is electrically connected to the external lead 23 via the metal member 27.
Then, the inner surface of the sealing portion 14 in the arc tube 11 and the sealing insulator 15 are welded via the conductive foil 24, so that the conductive foil 24 is airtightly embedded in the sealing portion 14. The structure is formed.
  導電箔２４を構成する材料としては、例えばタングステン、タンタル、ルテニウム、レニウム等の高融点金属またはそれらの合金を用いることができるが、溶接のしやすさ、溶接熱の伝導性がよいことなどの理由から、モリブデンを主成分とする金属を用いることが好ましい。また、導電箔２４の厚みは例えば０．０２～０．０６ｍｍ、導電箔２４の幅は例えば６～１２ｍｍである。
　導電ディスク２５および補助ディスク２６を構成する材料としては、タンタル、ニオブ、タングステン、モリブデンなどの高融点金属を用いることができる。また、封止用絶縁体１５の一端面に接する導電ディスク２５の厚みは、例えば０．５～６ｍｍであり、補助ディスク２６の厚みは、例えば０．０５～１ｍｍである。
　金属部材２７を構成する材料としては、モリブデンなどを用いることができる。 As the material constituting the conductive foil 24, for example, refractory metals such as tungsten, tantalum, ruthenium, and rhenium or alloys thereof can be used, but the ease of welding and the conductivity of welding heat are good. For this reason, it is preferable to use a metal containing molybdenum as a main component. The thickness of the conductive foil 24 is, for example, 0.02 to 0.06 mm, and the width of the conductive foil 24 is, for example, 6 to 12 mm.
As a material constituting the conductive disk 25 and the auxiliary disk 26, refractory metals such as tantalum, niobium, tungsten, and molybdenum can be used. The thickness of the conductive disk 25 in contact with one end surface of the sealing insulator 15 is, for example, 0.5 to 6 mm, and the thickness of the auxiliary disk 26 is, for example, 0.05 to 1 mm.
Molybdenum or the like can be used as the material constituting the metal member 27.
　図示の例では、発光管１１における狭窄部１３内には、内部リード２２が挿通された例えばガラス製の筒状の内部リード支持部材１６が配置されている。また、金属部材２７の筒孔内には、外部リード２３が挿通された例えばガラス製の筒状の外部リード支持部材１７が配置されている。 In the illustrated example, a tubular internal lead support member 16 made of glass, for example, through which the internal lead 22 is inserted is arranged in the narrowed portion 13 of the arc tube 11. Further, in the tubular hole of the metal member 27, for example, a glass tubular external lead support member 17 through which the external lead 23 is inserted is arranged.
　発光管１１における封止部１４には、有底筒状の口金３０が、その筒孔内に当該封止部１４が挿入された状態で設けられている。封止部１４の外周面と口金３０の内周面との間には、接着剤よりなる接合層４０が形成されており、この接合層４０によって、口金３０が封止部１４に固定されている。 The sealing portion 14 of the arc tube 11 is provided with a bottomed tubular base 30 in a state where the sealing portion 14 is inserted into the tubular hole. A bonding layer 40 made of an adhesive is formed between the outer peripheral surface of the sealing portion 14 and the inner peripheral surface of the base 30, and the base 30 is fixed to the sealing portion 14 by the bonding layer 40. There is.
　口金３０を構成する材料としては、真鍮、アルミニウムなどを用いることができる。
　接合層４０を構成する接着剤としては、セラミック系接着剤に代表される無機系接着剤を用いることができる。また、接合層４０の厚みは、０．５～５ｍｍであることが好ましい。 As the material constituting the base 30, brass, aluminum, or the like can be used.
As the adhesive constituting the bonding layer 40, an inorganic adhesive typified by a ceramic adhesive can be used. The thickness of the bonding layer 40 is preferably 0.5 to 5 mm.
　口金３０内における当該口金３０の外端面部３１と封止部１４の外端面１４ａとの間には、内部空間Ｓ２が形成されている。口金３０の外端面部３１における中心部分には、内部空間Ｓ２に開口する底有円筒状の端子部３２が、口金３０の外端面部３１から外方に突出するよう形成されている。この端子部３２の筒孔内に外部リード２３の先端部が挿入されてロウ付けなどにより固定されることにより、口金３０の端子部３２に外部リード２３が電気的に接続されている。 An internal space S2 is formed between the outer end surface portion 31 of the mouthpiece 30 and the outer end surface 14a of the sealing portion 14 in the mouthpiece 30. At the central portion of the outer end surface portion 31 of the base 30, a bottomed cylindrical terminal portion 32 that opens into the internal space S2 is formed so as to project outward from the outer end surface portion 31 of the base 30. The tip of the external lead 23 is inserted into the tubular hole of the terminal portion 32 and fixed by brazing or the like, so that the external lead 23 is electrically connected to the terminal portion 32 of the base 30.
　図２にも示すように、口金３０の外端面部３１には、内部空間Ｓ２に冷却風を流入出させる複数（図示の例では２つ）の円形の通風口３３が形成されている。これらの通風口３３は、口金３３の外周面と同軸の仮想円Ｃに沿って配置されている。図示の例では、一方の通風口３３が流入用通風口３３ａとされ、他方の通風口３３が流出用通風口３３ｂとされている。 As shown in FIG. 2, a plurality of (two in the illustrated example) circular ventilation ports 33 are formed in the outer end surface portion 31 of the base 30 to allow cooling air to flow in and out of the internal space S2. These ventilation ports 33 are arranged along a virtual circle C coaxial with the outer peripheral surface of the base 33. In the illustrated example, one ventilation port 33 is an inflow ventilation port 33a, and the other ventilation port 33 is an outflow ventilation port 33b.
　通風口３３は、口金３０の外端面に対する面積の比率（以下、「開口率」という。）が５％以上８０％以下であることが好ましく、より好ましくは１０％以上４０％以下である。通風口３３の開口率が過小である場合には、口金３０の内部空間Ｓに対して冷却風が十分に流入出されず、そのため、封止部１４を十分に冷却することが困難となることがある。一方、通風口３３の開口率が過大である場合には、口金３０の外端面部３１の強度が低く、当該外端面部３１が破損しやすくなるおそれがある。 The ratio of the area of the ventilation port 33 to the outer end surface of the base 30 (hereinafter referred to as "opening ratio") is preferably 5% or more and 80% or less, and more preferably 10% or more and 40% or less. If the opening ratio of the ventilation port 33 is too small, the cooling air does not sufficiently flow in and out of the internal space S of the base 30, and therefore it becomes difficult to sufficiently cool the sealing portion 14. There is. On the other hand, when the opening ratio of the ventilation port 33 is excessive, the strength of the outer end surface portion 31 of the mouthpiece 30 is low, and the outer end surface portion 31 may be easily damaged.
　複数の通風口３３のうち流入用通風口３３ａにおいては、図３に示すように、流入用通風口３３ａと重なる仮想円Ｃの円弧Ｃ１の長さの合計（図示の例では、流入用通風口３３ａが一つであるため、当該流入用通風口３３ａに係る円弧の長さ）が、口金３０の外端面部３１に対向して配置される送風口５２と重なる仮想円Ｃの円弧Ｃ２の長さの合計（図示の例では、送風口５２が一つであるため、当該送風口５２に係る円弧の長さ）より小さいことが好ましい。
　流入用通風口３３ａに係る円弧Ｃ１の長さの合計と送風口５２に係る円弧Ｃ２の長さの合計との比は、１：１．０５～１：１．３であることが好ましく、より好ましくは１：１．１～１：１．２である。 Of the plurality of ventilation ports 33, in the inflow ventilation port 33a, as shown in FIG. 3, the total length of the arc C1 of the virtual circle C overlapping with the inflow ventilation port 33a (in the illustrated example, the inflow ventilation port). Since there is only one 33a, the length of the arc C2 of the virtual circle C where the length of the arc related to the inflow ventilation port 33a) overlaps with the air outlet 52 arranged to face the outer end surface portion 31 of the mouthpiece 30. It is preferable that it is smaller than the total sum (in the illustrated example, since there is only one air outlet 52, the length of the arc related to the air outlet 52).
The ratio of the total length of the arc C1 related to the inflow ventilation port 33a and the total length of the arc C2 related to the ventilation port 52 is preferably 1: 1.05 to 1: 1.3, and more preferably. It is preferably 1: 1.1 to 1: 1.2.
　また、複数の通風口３３のうち流出用通風口３３ｂにおいては、流出用通風口３３ｂと重なる仮想円Ｃの円弧Ｃ３の長さの合計（図示の例では、流出用通風口３３ｂが一つであるため、当該流出用通風口３３ｂに係る円弧の長さ）が、口金３０の外端面部３１に対向して配置される排出口５３と重なる仮想円Ｃの円弧Ｃ４の長さの合計（図示の例では、排出口５３が一つであるため、当該排出口５３に係る円弧の長さ）より小さいことが好ましい。
　流出用通風口３３ｂに係る円弧Ｃ３の長さの合計と排出口５３に係る円弧Ｃ４の長さの合計との比は、１：１．０５～１：１．３であることが好ましく、より好ましくは１：１．１～１：１．２である。 Further, in the outflow ventilation port 33b among the plurality of ventilation ports 33, the total length of the arc C3 of the virtual circle C overlapping with the outflow ventilation port 33b (in the illustrated example, the outflow ventilation port 33b is one). Therefore, the total length of the arc C4 of the virtual circle C in which the length of the arc related to the outflow ventilation port 33b) overlaps with the discharge port 53 arranged to face the outer end surface portion 31 of the mouthpiece 30 (illustrated). In the example of, since there is only one discharge port 53, it is preferably smaller than the length of the arc related to the discharge port 53).
The ratio of the total length of the arc C3 related to the outflow ventilation port 33b and the total length of the arc C4 related to the discharge port 53 is preferably 1: 1.05 to 1: 1.3, and more preferably. It is preferably 1: 1.1 to 1: 1.2.
　本発明の光照射装置は、上記の放電ランプ１０と、放電ランプ１０の口金３０を保持するランプ保持部と、口金３０の外端面部３１の通風口３３を介して内部空間Ｓ２に冷却風を流入出させる送風機構と備えてなる。 The light irradiation device of the present invention blows cooling air into the internal space S2 via the discharge lamp 10, the lamp holding portion for holding the base 30 of the discharge lamp 10, and the ventilation port 33 of the outer end surface portion 31 of the base 30. It is equipped with a ventilation mechanism that allows inflow and outflow.
　図４は、本発明の光照射装置の一例における構成を示す説明図である。この光照射装置は、図１に示す放電ランプ１０と、この放電ランプ１０を保持するランプ保持部５０と、放電ランプ１０における発光部１２を取り囲むよう配置された凹面反射鏡５５とを有し、これらは、ランプハウス６０内に収納されている。
　図５に示すように、ランプ保持部５０は、例えば金属よりなる矩形の板状体によって構成されている。ランプ保持部５０には、それぞれ厚み方向に貫通する円形の端子接続用開口５１、送風口５２および排出口５３が、放電ランプ１０の口金３０における端子部３２および２つの通風口３３に対応して形成されている。
　ランプ保持部５０の送風口５２は、ランプハウス６０の外部に設けられた送風機構６５に、配管６１によって接続されている。一方、ランプ保持部５０の排出口５３は、ランプハウス６０の外部に設けられたフィルター６３に、配管６２によって接続されている。 FIG. 4 is an explanatory diagram showing a configuration in an example of the light irradiation device of the present invention. This light irradiation device includes a discharge lamp 10 shown in FIG. 1, a lamp holding portion 50 for holding the discharge lamp 10, and a concave reflector 55 arranged so as to surround the light emitting portion 12 in the discharge lamp 10. These are housed in the lamp house 60.
As shown in FIG. 5, the lamp holding portion 50 is formed of, for example, a rectangular plate-like body made of metal. In the lamp holding portion 50, a circular terminal connection opening 51, an air outlet 52, and an exhaust port 53 penetrating in the thickness direction correspond to the terminal portion 32 and the two ventilation ports 33 in the base 30 of the discharge lamp 10. It is formed.
The air outlet 52 of the lamp holding portion 50 is connected to the air blowing mechanism 65 provided outside the lamp house 60 by a pipe 61. On the other hand, the discharge port 53 of the lamp holding portion 50 is connected to the filter 63 provided outside the lamp house 60 by a pipe 62.
　ランプ保持部５０において、端子接続用開口５１は、口金３０における端子部３２の外径より僅かに大きい内径を有する。放電ランプ１０がランプ保持部５０に装着される際には、口金３０の通風口３３の各々がランプ保持部５０の送風口５２および排出口５３に対向するよう位置合わせした状態で、端子接続用開口５１に口金３０における端子部３２が挿入され、これにより、送風口５２および排出口５３が、口金３０の通風口３３に連通した状態とされる。ランプ保持部５０の側面には、口金３０における端子部３２を固定する、ネジよりなる固定部材５４が設けられている（図５）。 In the lamp holding portion 50, the terminal connection opening 51 has an inner diameter slightly larger than the outer diameter of the terminal portion 32 in the base 30. When the discharge lamp 10 is attached to the lamp holding portion 50, it is used for terminal connection in a state where each of the ventilation ports 33 of the base 30 is aligned so as to face the ventilation port 52 and the discharge port 53 of the lamp holding portion 50. The terminal portion 32 of the base 30 is inserted into the opening 51, whereby the air outlet 52 and the discharge port 53 are in a state of communicating with the ventilation port 33 of the base 30. On the side surface of the lamp holding portion 50, a fixing member 54 made of a screw for fixing the terminal portion 32 of the base 30 is provided (FIG. 5).
　また、送風口５２および排出口５３は、放電ランプ１０がランプ保持部５０に保持された際に、口金３０の外端面によってカバーされる範囲内に形成されている。図５に示す例では、距離Ｌが口金３０の外端面の外径より小さくなるよう、送風口５２および排出口５３が形成されている。これにより、ランプ保持部５０の送風口５２または口金３０の通風口３３から冷却風が外部に漏出することを防止することができる。 Further, the air outlet 52 and the discharge port 53 are formed within a range covered by the outer end surface of the base 30 when the discharge lamp 10 is held by the lamp holding portion 50. In the example shown in FIG. 5, the air outlet 52 and the exhaust port 53 are formed so that the distance L is smaller than the outer diameter of the outer end surface of the base 30. As a result, it is possible to prevent the cooling air from leaking to the outside from the ventilation port 52 of the lamp holding portion 50 or the ventilation port 33 of the base 30.
　上記の光照射装置においては、放電ランプ１０の点灯時に送風機構６５が作動されることにより、冷却風が送風口５２から口金３０の流入用通風口３３ａを介して内部空間Ｓ２に流入する。内部空間Ｓ２に流入する冷却風の流量は、例えば１．０～２．５Ｌ／ｍｉｎである。 In the above light irradiation device, the ventilation mechanism 65 is operated when the discharge lamp 10 is lit, so that the cooling air flows from the ventilation port 52 into the internal space S2 through the inflow ventilation port 33a of the base 30. The flow rate of the cooling air flowing into the internal space S2 is, for example, 1.0 to 2.5 L / min.
　そして、図６に示すように、流入用通風口３３ａから内部空間Ｓ２に流入した冷却風は、流入用通風口３３ａに対向する発光管１１の封止部１４の外端面１４ａに直接当たる。その結果、封止部１４が冷却される効率が向上する。さらに、封止部１４の外端面１４ａに当たった冷却風は、流出用通風口３３ｂから流出する。その後、冷却風は、排出口５３を介して排出される。
　また、口金３０の通風口３３に冷却風の送風口５２および排出口５３が接続されているため、冷却風によって発光管１１が冷却されることがない。
　従って、発光管１１の温度を低下させることなしに封止部１４を高い効率で冷却することができ、これにより、封止部１４の温度上昇に起因する封止部１４の破損が抑制される結果、放電ランプ１０において長い使用寿命が得られる。
　また、口金３０の通風口３３に冷却風の送風口５２および排出口５３が接続されているため、接合層４０などによる汚染物によって、光照射装置の内部が汚染することを防止することができる。 Then, as shown in FIG. 6, the cooling air flowing into the internal space S2 from the inflow ventilation port 33a directly hits the outer end surface 14a of the sealing portion 14 of the arc tube 11 facing the inflow ventilation port 33a. As a result, the efficiency with which the sealing portion 14 is cooled is improved. Further, the cooling air that hits the outer end surface 14a of the sealing portion 14 flows out from the outflow ventilation port 33b. After that, the cooling air is discharged through the discharge port 53.
Further, since the air outlet 52 and the discharge port 53 for the cooling air are connected to the ventilation port 33 of the base 30, the arc tube 11 is not cooled by the cooling air.
Therefore, the sealing portion 14 can be cooled with high efficiency without lowering the temperature of the arc tube 11, thereby suppressing damage to the sealing portion 14 due to the temperature rise of the sealing portion 14. As a result, a long service life can be obtained in the discharge lamp 10.
Further, since the cooling air ventilation port 52 and the discharge port 53 are connected to the ventilation port 33 of the base 30, it is possible to prevent the inside of the light irradiation device from being contaminated by contaminants such as the bonding layer 40. ..
　また、流入用通風口３３ａと重なる仮想円Ｃの円弧Ｃ１の長さの合計が、口金３０の外端面部３１に対向して配置される送風口５２と重なる仮想円Ｃの円弧Ｃ２の長さの合計より小さいことにより、放電ランプ１０を光照射装置に装着する際に、放電ランプ１０がその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、図７に示すように、流入用通風口３３ａが送風口５２内に位置するため、流入用通風口３３ａと送風口５２との所要の接続を容易に達成することができる。 Further, the total length of the arc C1 of the virtual circle C overlapping the inflow ventilation port 33a is the length of the arc C2 of the virtual circle C overlapping the air outlet 52 arranged to face the outer end surface portion 31 of the base 30. As shown in FIG. 7, even if the discharge lamp 10 is slightly displaced in the direction of rotation about the tube axis when the discharge lamp 10 is attached to the light irradiation device because it is smaller than the total of the above. Since the inflow vent 33a is located inside the air outlet 52, the required connection between the inflow vent 33a and the air outlet 52 can be easily achieved.
　また、流出用通風口３３ｂと重なる仮想円Ｃの円弧Ｃ３の長さの合計が、口金３０の外端面部３１に対向して配置される排出口５３と重なる仮想円Ｃの円弧Ｃ４の長さの合計より小さいことにより、放電ランプ１０を光照射装置に装着する際に、放電ランプ１０がその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、流出用通風口３３ｂが排出口５３内に位置するため、流出用通風口３３ｂと排出口５３との所要の接続を容易に達成することができる。 Further, the total length of the arc C3 of the virtual circle C overlapping the outflow ventilation port 33b is the length of the arc C4 of the virtual circle C overlapping the discharge port 53 arranged to face the outer end surface portion 31 of the base 30. When the discharge lamp 10 is attached to the light irradiation device, the outflow ventilation port 33b is exhausted even if the discharge lamp 10 is slightly displaced in the direction of rotation about the tube axis. Since it is located in the outlet 53, the required connection between the outflow ventilation port 33b and the discharge port 53 can be easily achieved.
　図８は、本発明の第２の実施形態に係るショートアーク型放電ランプの構成を示す説明用断面図である。この放電ランプ１０においては、図９にも拡大して示すように、封止部１４の外端面１４ａと接合層４０の内部空間側端面４０ａとの間には段差が形成されている。図示の例では、封止部１４の外端面１４ａが接合層４０の内部空間側端面４０ａよりも内部空間Ｓ２側に突出することにより段差が形成されている。段差の大きさは、３ｍｍ以上とされ、好ましくは５ｍｍ以上とされる。また、段差の大きさは、例えば１０ｍｍ以下である。第２の実施形態に係る放電ランプ１０におけるその他の構成は、第１の実施形態に係る放電ランプ１０と同様である。 FIG. 8 is an explanatory sectional view showing a configuration of a short arc type discharge lamp according to a second embodiment of the present invention. In the discharge lamp 10, as shown in an enlarged manner in FIG. 9, a step is formed between the outer end surface 14a of the sealing portion 14 and the internal space side end surface 40a of the bonding layer 40. In the illustrated example, a step is formed by projecting the outer end surface 14a of the sealing portion 14 toward the internal space S2 side from the internal space side end surface 40a of the bonding layer 40. The size of the step is 3 mm or more, preferably 5 mm or more. The size of the step is, for example, 10 mm or less. Other configurations of the discharge lamp 10 according to the second embodiment are the same as those of the discharge lamp 10 according to the first embodiment.
　第２の実施形態に係る放電ランプ１０によれば、第１の実施形態に係る放電ランプ１０と同様にして光照射装置を構成することができる（図４および図５参照）。
　そして、このような光照射装置においては、図１０に示すように、一方の通風口３３から内部空間Ｓ２に流入した冷却風は、一方の通風口３３に対向する発光管１１の封止部１４の外端面１４ａに直接当たる。さらに、封止部１４の外端面１４ａに当たった冷却風は、流出用通風口とされた他方の通風口３３から流出する。その後、冷却風は、排出口５３を介して排出される。また、封止部１４の外端面１４ａと接合層４０の内部空間側端面４０ａとの間に形成された段差により、封止部１４の外周面の一部が内部空間Ｓ２に露出している。このため、その露出の分だけ対流により冷却される部分の表面積が大きくなり、封止部１４が冷却される効率が向上する。
　また、口金３０の通風口３３に冷却風の送風口５２および排出口５３が接続されているため、冷却風によって発光管１１が冷却されることがない。
　従って、発光管１１の温度を低下させることなしに封止部１４を高い効率で冷却することができ、これにより、封止部１４の温度上昇に起因する封止部１４の破損が抑制される結果、放電ランプ１０において長い使用寿命が得られる。
　また、口金３０の通風口３３に冷却風の送風口５２および排出口５３が接続されているため、接合層４０などによる汚染物によって、光照射装置の内部が汚染することを防止することができる。 According to the discharge lamp 10 according to the second embodiment, the light irradiation device can be configured in the same manner as the discharge lamp 10 according to the first embodiment (see FIGS. 4 and 5).
Then, in such a light irradiation device, as shown in FIG. 10, the cooling air that has flowed into the internal space S2 from one ventilation port 33 is the sealing portion 14 of the arc tube 11 facing the one ventilation port 33. Directly hits the outer end surface 14a of the. Further, the cooling air that hits the outer end surface 14a of the sealing portion 14 flows out from the other ventilation port 33 that is used as the outflow ventilation port. After that, the cooling air is discharged through the discharge port 53. Further, a part of the outer peripheral surface of the sealing portion 14 is exposed to the internal space S2 due to the step formed between the outer end surface 14a of the sealing portion 14 and the internal space side end surface 40a of the bonding layer 40. Therefore, the surface area of the portion cooled by convection is increased by the amount of the exposure, and the efficiency of cooling the sealing portion 14 is improved.
Further, since the air outlet 52 and the discharge port 53 for the cooling air are connected to the ventilation port 33 of the base 30, the arc tube 11 is not cooled by the cooling air.
Therefore, the sealing portion 14 can be cooled with high efficiency without lowering the temperature of the arc tube 11, thereby suppressing damage to the sealing portion 14 due to the temperature rise of the sealing portion 14. As a result, a long service life can be obtained in the discharge lamp 10.
Further, since the cooling air ventilation port 52 and the discharge port 53 are connected to the ventilation port 33 of the base 30, it is possible to prevent the inside of the light irradiation device from being contaminated by contaminants such as the bonding layer 40. ..
　図１１は、本発明の第３の実施形態に係るショートアーク型放電ランプの構成を示す説明用断面図である。この放電ランプ１０においては、口金３０の内部空間Ｓ２に、口金３０内を発光管１１の管軸と垂直な断面において仕切る円板状の隔壁３５が設けられている。この隔壁３５には、中央位置に外部リード２３が貫通する貫通口３５ａが形成されている。この例では、図１２にも拡大して示すように、口金３０が、隔壁３５の径よりも大きい内径の大径部分３０ａと、隔壁３５の径よりも小さい内径の小径部分３０ｂとを有し、口金３０の内面における大径部分３０ａと小径部分３０ｂとの段差Ｄによって、隔壁３５を保持する隔壁保持部が形成されている。第３の実施形態に係る放電ランプ１０におけるその他の構成は、第１の実施形態に係る放電ランプ１０と同様である。 FIG. 11 is an explanatory sectional view showing a configuration of a short arc type discharge lamp according to a third embodiment of the present invention. In the discharge lamp 10, a disc-shaped partition wall 35 is provided in the internal space S2 of the base 30 so as to partition the inside of the base 30 in a cross section perpendicular to the tube axis of the arc tube 11. A through hole 35a through which the external lead 23 penetrates is formed in the partition wall 35 at the central position. In this example, as shown enlarged in FIG. 12, the base 30 has a large diameter portion 30a having an inner diameter larger than the diameter of the partition wall 35 and a small diameter portion 30b having an inner diameter smaller than the diameter of the partition wall 35. A partition holding portion for holding the partition wall 35 is formed by a step D between the large diameter portion 30a and the small diameter portion 30b on the inner surface of the base 30. Other configurations of the discharge lamp 10 according to the third embodiment are the same as those of the discharge lamp 10 according to the first embodiment.
　隔壁３５の厚みは、１～２ｍｍであることが好ましい。隔壁３５の厚みが過小である場合には、隔壁３５が変形、破損するおそれがある。一方、隔壁３５の厚みが過大である場合には、封止部の１４の冷却効率が低下するおそれがある。 The thickness of the partition wall 35 is preferably 1 to 2 mm. If the thickness of the partition wall 35 is too small, the partition wall 35 may be deformed or damaged. On the other hand, if the thickness of the partition wall 35 is excessive, the cooling efficiency of the sealing portion 14 may decrease.
　隔壁３５を構成する材料としては、高い熱電導性が得られる点で、金属またはセラミックスを用いることが好ましい。
　隔壁３５を構成する金属としては、アルミニウム、銅、真鍮、タングステン、モリブデンを用いることが好ましい。
　また、隔壁３５を構成するセラミックスとしては、窒化アルミニウム、炭化ケイ素を用いることが好ましい。 As the material constituting the partition wall 35, it is preferable to use metal or ceramics from the viewpoint of obtaining high thermoconductivity.
As the metal constituting the partition wall 35, it is preferable to use aluminum, copper, brass, tungsten, or molybdenum.
Further, it is preferable to use aluminum nitride or silicon carbide as the ceramics constituting the partition wall 35.
　封止部１４の外端面と隔壁３５との間の距離Ｒは、５ｍｍ以下とされ、好ましくは３ｍｍ以下、より好ましくは１ｍｍ以下とされる。この距離Ｒが過大である場合には、封止部１４を高い効率で冷却することが困難となる。図示の例では、封止部１４の外端面と隔壁３５との間は空隙とされているが、封止部１４の外端面と隔壁３５との間に接合層４０が形成されていてもよい。 The distance R between the outer end surface of the sealing portion 14 and the partition wall 35 is 5 mm or less, preferably 3 mm or less, and more preferably 1 mm or less. If this distance R is excessive, it becomes difficult to cool the sealing portion 14 with high efficiency. In the illustrated example, there is a gap between the outer end surface of the sealing portion 14 and the partition wall 35, but a bonding layer 40 may be formed between the outer end surface of the sealing portion 14 and the partition wall 35. ..
　第３の実施形態に係る放電ランプ１０によれば、第１の実施形態に係る放電ランプ１０と同様にして光照射装置を構成することができる（図４および図５参照）。
　そして、このような光照射装置においては、放電ランプ１０の点灯時に送風機構６５が作動されることにより、冷却風が送風口５２から口金３０における流入用通風口とされた一方の通風口３３を介して内部空間Ｓ２に流入する。そして、図１３に示すように、一方の通風口３３から内部空間Ｓ２に流入した冷却風は、隔壁３５に直接当たった後、流出用通風口とされた他方の通風口３３から流出する。そして、冷却風は、排出口５３を介して排出される。 According to the discharge lamp 10 according to the third embodiment, the light irradiation device can be configured in the same manner as the discharge lamp 10 according to the first embodiment (see FIGS. 4 and 5).
Then, in such a light irradiation device, the ventilation mechanism 65 is operated when the discharge lamp 10 is lit, so that the cooling air is provided from the ventilation port 52 to the ventilation port 33 for inflow in the base 30. It flows into the internal space S2 through the inside space S2. Then, as shown in FIG. 13, the cooling air that has flowed into the internal space S2 from one ventilation port 33 directly hits the partition wall 35 and then flows out from the other ventilation port 33 that is used as the outflow ventilation port. Then, the cooling air is discharged through the discharge port 53.
　このような構成によれば、口金３０の内部空間Ｓ２には、口金３０内を発光管１１の管軸と垂直な断面において仕切る隔壁３５が設けられているため、口金３０の内部空間Ｓ２に冷却風を流入出させても、口金３０と封止部１４とを接合する接着剤などによる汚染物によって、光照射装置の内部が汚染することが回避される。また、封止部１４の外端面と隔壁３５との間の距離が５ｍｍ以下であることにより、封止部１４から隔壁３５に十分に伝熱されるため、当該隔壁３５を介して封止部１４を高い効率で冷却することができる。
　また、口金３０の外端面部３１に、内部空間Ｓ２に冷却風を流入出させる冷却風の通風口３３が形成されることによって、冷却風によって発光管１１が冷却されることを防止することができる。従って、発光管１１の温度を低下させることなしに封止部１４を高い効率で冷却することができる。 According to such a configuration, the internal space S2 of the base 30 is provided with a partition wall 35 that partitions the inside of the base 30 in a cross section perpendicular to the tube axis of the arc tube 11, so that the internal space S2 of the base 30 is cooled. Even if the wind flows in and out, it is possible to prevent the inside of the light irradiation device from being contaminated by contaminants such as an adhesive that joins the base 30 and the sealing portion 14. Further, since the distance between the outer end surface of the sealing portion 14 and the partition wall 35 is 5 mm or less, sufficient heat is transferred from the sealing portion 14 to the partition wall 35, so that the sealing portion 14 is passed through the partition wall 35. Can be cooled with high efficiency.
Further, the outer end surface portion 31 of the base 30 is formed with a ventilation port 33 for cooling air that allows cooling air to flow in and out of the internal space S2, thereby preventing the arc tube 11 from being cooled by the cooling air. it can. Therefore, the sealing portion 14 can be cooled with high efficiency without lowering the temperature of the arc tube 11.
　以上、本発明の実施の形態について説明したが、本発明は上記の形態に限定されず、以下のような種々の変更を加えることが可能である。 Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications such as the following can be made.
（１）図１４に示すように、口金３０は、例えばＤカット形状の切り欠きによって形成された位置決め部３４を有していてもよい。このような位置決め部３４を設けることにより、放電ランプ１０をランプ保持部５０に装着する際に、通風口３３と送風口５２および排出口５３との位置合わせを容易にかつ確実に行うことができる。また、位置決め部３４は、Ｄカット形状の切り欠きによって形成されたものに限定されず、種々の形態を採用することができる。 (1) As shown in FIG. 14, the base 30 may have a positioning portion 34 formed by, for example, a D-cut shaped notch. By providing such a positioning portion 34, when the discharge lamp 10 is attached to the lamp holding portion 50, the ventilation port 33, the ventilation port 52, and the discharge port 53 can be easily and surely aligned with each other. .. Further, the positioning portion 34 is not limited to the one formed by the D-cut shape notch, and various forms can be adopted.
（２）口金３０の通風口３３の形状は、円形に限定されず、例えば図１５（ａ）に示すように、矩形状の通風口３３が形成されていてもよく、図１５（ｂ）に示すように、弓なり形状の通風口３３が形成されていてもよい。 (2) The shape of the ventilation port 33 of the base 30 is not limited to a circular shape. For example, as shown in FIG. 15 (a), a rectangular ventilation port 33 may be formed, as shown in FIG. 15 (b). As shown, a bow-shaped ventilation port 33 may be formed.
（３）口金３０の通風口３３の数は２つに限定されず、例えば冷却風の流入および流出に兼用される単一の通風口３３が形成されていてもよい。単一の通風口３３を形成する場合には、通風口３３は、図１６に示すように、口金３０の内部空間Ｓ２と同一の内径を有するものであってもよい。同図では、通風口３３の内部に放電ランプ１０の端部側の封止部１４、外部リード２３、接合層４０が見える状態となっている。このような構成の口金３０を用いる場合には、ランプ保持部５０は、通風口３３をカバーする大きさであることが好ましい。 (3) The number of ventilation ports 33 of the base 30 is not limited to two, and for example, a single ventilation port 33 that is also used for the inflow and outflow of cooling air may be formed. When forming a single ventilation port 33, the ventilation port 33 may have the same inner diameter as the internal space S2 of the base 30 as shown in FIG. In the figure, the sealing portion 14, the external lead 23, and the bonding layer 40 on the end side of the discharge lamp 10 can be seen inside the ventilation port 33. When the base 30 having such a configuration is used, the lamp holding portion 50 is preferably sized to cover the ventilation port 33.
（４）口金３０には、３つ以上の通風口、例えば図１７（ａ）に示すように、４つの通風口３３が、外端面部３１における端子部３２が形成された中心部分を取り囲むよう形成されていてもよく、図１７（ｂ）に示すように、多数の通風口３３が、外端面部３１における端子部３２が形成された中心部分を取り囲むよう形成されていてもよい。 (4) In the base 30, three or more ventilation ports, for example, as shown in FIG. 17A, four ventilation ports 33 surround the central portion of the outer end surface portion 31 where the terminal portion 32 is formed. It may be formed, and as shown in FIG. 17B, a large number of ventilation openings 33 may be formed so as to surround the central portion where the terminal portion 32 is formed in the outer end surface portion 31.
（５）光照射装置においては、ランプ保持部５０の送風口５２および排出口５３の形状は、円形に限定されず、例えば図１８（ａ）に示すように、矩形状の送風口５２および排出口５３が形成されていてもよく、図１８（ｂ）に示すように、トラック状の送風口５２および排出口５３が形成されていてもよい。 (5) In the light irradiation device, the shapes of the air outlet 52 and the exhaust port 53 of the lamp holding portion 50 are not limited to a circular shape, and for example, as shown in FIG. 18A, the rectangular air outlet 52 and the exhaust port 52 and the exhaust port 53. The outlet 53 may be formed, and as shown in FIG. 18B, a truck-shaped air outlet 52 and an outlet 53 may be formed.
（６）光照射装置においては、図１９（ａ）～（ｃ）に示すように、ランプ保持部５０の送風口５２および排出口５３のいずれか一方または両方が、口金３０の送風口３３の内径より僅かに小さい外径を有する筒状部５５によって形成されていてもよい。このような構成によれば、放電ランプ１０をランプ保持部５０に装着する際に、筒状部５５が通風口３３と送風口５２および排出口５３との位置決め部となるため、通風口３３と送風口５２および排出口５３との位置合わせを容易にかつ確実に行うことができる。 (6) In the light irradiation device, as shown in FIGS. 19A to 19C, either or both of the air outlet 52 and the exhaust port 53 of the lamp holding portion 50 is the air outlet 33 of the base 30. It may be formed by a tubular portion 55 having an outer diameter slightly smaller than the inner diameter. According to such a configuration, when the discharge lamp 10 is attached to the lamp holding portion 50, the tubular portion 55 serves as a positioning portion between the ventilation port 33, the ventilation port 52, and the discharge port 53. The alignment with the air outlet 52 and the exhaust port 53 can be easily and surely performed.
（７）複数の通風口３３は、口金３０の外周面と同軸の仮想円に沿って配置されていなくてもよい。このような場合においては、通風口３３のうち流入用通風口３３ａの最大長さを画定する線分の長さが、当該流入用通風口３３ａに対応する送風口５２の最大長さを画定する線分の長さより小さいことが好ましい。通風口３３のうち流出用通風口３３ｂの最大長さを画定する線分の長さが、当該流出用通風口３３ｂに対応する排出口５３の最大長さを画定する線分の長さより小さいことが好ましい。ここで、最大長さを画定する線分の長さとは、例えば通風口３３が円形であれば直径を意味し、通風口３３が矩形であれば対角線の長さを意味する。このような構成によれば、放電ランプ１０を光照射装置に装着する際に、放電ランプ１０がその管軸を中心軸として回転する方向に僅かに位置ずれした場合でも、通風口３３が送風口５２内または排出口５３内に位置するため、通風口３３と送風口５２または排出口５３との所要の接続を容易に達成することができる。 (7) The plurality of ventilation ports 33 may not be arranged along a virtual circle coaxial with the outer peripheral surface of the base 30. In such a case, the length of the line segment that defines the maximum length of the inflow ventilation port 33a among the ventilation ports 33 defines the maximum length of the ventilation port 52 corresponding to the inflow ventilation port 33a. It is preferably smaller than the length of the line segment. Of the ventilation ports 33, the length of the line segment defining the maximum length of the outflow ventilation port 33b is smaller than the length of the line segment defining the maximum length of the discharge port 53 corresponding to the outflow ventilation port 33b. Is preferable. Here, the length of the line segment that defines the maximum length means, for example, the diameter if the ventilation port 33 is circular, and the diagonal length if the ventilation port 33 is rectangular. According to such a configuration, when the discharge lamp 10 is attached to the light irradiation device, the ventilation port 33 is the ventilation port even if the discharge lamp 10 is slightly displaced in the direction of rotation about the tube axis thereof. Since it is located in the 52 or the discharge port 53, the required connection between the ventilation port 33 and the ventilation port 52 or the discharge port 53 can be easily achieved.
（８）第２の実施形態において、図２０に示すように、封止部１４の外端面１４ａと接合層４０の内部空間側端面４０ａとの間の段差は、接合層４０の内部空間側端面４０ａが封止部１４の外端面１４ａよりも内部空間Ｓ２側に突出することによって形成されていてもよい。このような構成によれば、接合層４０の内周面の一部が内部空間Ｓ２に露出しているため、接合層４０における露出した表面から放熱される結果、封止部１４が冷却される効率が向上する。 (8) In the second embodiment, as shown in FIG. 20, the step between the outer end surface 14a of the sealing portion 14 and the internal space side end surface 40a of the joint layer 40 is the internal space side end surface of the joint layer 40. 40a may be formed by projecting toward the internal space S2 side from the outer end surface 14a of the sealing portion 14. According to such a configuration, since a part of the inner peripheral surface of the bonding layer 40 is exposed to the internal space S2, heat is dissipated from the exposed surface of the bonding layer 40, and as a result, the sealing portion 14 is cooled. Efficiency is improved.
（９）第３の実施形態において、図２１に示すように、隔壁３５は口金３０の内面に一体に形成されていてもよい。
（１０）第３の実施形態において、図２２に示すように、口金３０は、それぞれ有底筒状の２つの口金材３０ａ，３０ｂが、それぞれの底部３５ｂ，３５ｃの外面が互いに接合されることによって構成されていてもよい。このような口金３０においては、口金材３０ａ，３０ｂにおける底部３５ｂ，３５ｃの接合体によって、隔壁３５が形成される。 (9) In the third embodiment, as shown in FIG. 21, the partition wall 35 may be integrally formed on the inner surface of the base 30.
(10) In the third embodiment, as shown in FIG. 22, the base 30 has two bottomed tubular base materials 30a and 30b, and the outer surfaces of the bottoms 35b and 35c are joined to each other. It may be composed of. In such a base 30, the partition wall 35 is formed by the joints of the bottoms 35b and 35c of the base materials 30a and 30b.
（１１）第３の実施形態において、図２３に示すように、口金３０の周面部３６に、内部空間Ｓ２に通ずる接続管部３７が形成され、外部リード２３に電気的に接続されたリード線２８が、接続管部３７を介して口金３０の外部に導出された構成であってもよい。このような構成においては、冷却風の漏出を防止するために、接続管部３７の先端部の開口が例えば六角カシメなどの加工が施されることによって塞がれていることが好ましい。 (11) In the third embodiment, as shown in FIG. 23, a connecting pipe portion 37 leading to the internal space S2 is formed on the peripheral surface portion 36 of the base 30, and a lead wire electrically connected to the external lead 23. 28 may be configured to be led out to the outside of the base 30 via the connecting pipe portion 37. In such a configuration, in order to prevent leakage of the cooling air, it is preferable that the opening at the tip of the connecting pipe portion 37 is closed by processing such as hexagonal caulking.
〈実施例１〉
　図１および図２に示す構成に従い、下記の仕様の放電ランプを作製した。
［発光管（１１）］
　材質＝石英ガラス，全長＝９０ｍｍ，
　発光部（１２）：最大外径＝６２ｍｍ，最大内径＝５５ｍｍ，
　封止部（１３）：外径＝３０ｍｍ
［陽極（２０）］
　材質＝タングステン，外径＝２５ｍｍ
［陰極（２１）］
　材質＝トリエーテッドタングステン，外径＝１２ｍｍ
［導電箔（２４）］
　材質＝モリブデン
［口金（３０）］
　材質＝真鍮，全長＝７０ｍｍ，内径＝３１．５ｍｍ，外径＝３３．５ｍｍ
　通風口の数＝２，通風口の径＝７ｍｍ
［接合層（４０）］
　材質＝セラミック系接着剤，厚み＝０．７５ｍｍ， <Example 1>
A discharge lamp having the following specifications was produced according to the configurations shown in FIGS. 1 and 2.
[Expression tube (11)]
Material = quartz glass, total length = 90 mm,
Light emitting part (12): maximum outer diameter = 62 mm, maximum inner diameter = 55 mm,
Sealing part (13): Outer diameter = 30 mm
[Anode (20)]
Material = Tungsten, Outer diameter = 25 mm
[Cathode (21)]
Material = Triated Tungsten, Outer Diameter = 12mm
[Conductive foil (24)]
Material = molybdenum [base (30)]
Material = brass, overall length = 70 mm, inner diameter = 31.5 mm, outer diameter = 33.5 mm
Number of ventilation openings = 2, Diameter of ventilation openings = 7 mm
[Joint layer (40)]
Material = ceramic adhesive, thickness = 0.75 mm,
　上記の放電ランプにおける口金の一方の通風口に、内径が２．５ｍｍの吹き出し口を有する冷却風供給ノズルを挿入した。この放電ランプを２．７ｋＷのランプ入力（電流＝２５Ａ，電圧＝１０７Ｖ）で点灯させると共に、冷却風供給ノズルから口金内に冷却風を供給した。そして、導電箔における封止部の外端から約２０ｍｍの離れた位置の温度を測定し、当該導電箔の温度を３５０℃に維持するために必要な冷却風の流量を測定したところ、１．０Ｌ／ｍｉｎであった。 A cooling air supply nozzle having an outlet with an inner diameter of 2.5 mm was inserted into one of the ventilation ports of the mouthpiece of the above discharge lamp. This discharge lamp was lit with a lamp input of 2.7 kW (current = 25 A, voltage = 107 V), and cooling air was supplied into the base from a cooling air supply nozzle. Then, the temperature at a position about 20 mm away from the outer end of the sealing portion of the conductive foil was measured, and the flow rate of the cooling air required to maintain the temperature of the conductive foil at 350 ° C. was measured. It was 0 L / min.
〈実施例２〉
　図８および図９に示す構成に従い、下記の仕様の放電ランプを作製した。
［発光管（１１）］
　材質＝石英ガラス，全長＝９０ｍｍ，
　発光部（１２）：最大外径＝６２ｍｍ，最大内径＝５５ｍｍ，
　封止部（１３）：外径＝３０ｍｍ
［陽極（２０）］
　材質＝タングステン，外径＝２５ｍｍ
［陰極（２１）］
　材質＝トリエーテッドタングステン，外径＝１２ｍｍ
［導電箔（２４）］
　材質＝モリブデン
［口金（３０）］
　材質＝真鍮，全長＝７０ｍｍ，内径＝３１．５ｍｍ，外径＝３３．５ｍｍ
　通風口の数＝２，通風口の径＝７ｍｍ
［接合層（４０）］
　材質＝セラミック系接着剤，厚み＝０．７５ｍｍ，
　封止部の外端面と接合層の内部空間側端面との間の段差＝５ｍｍ <Example 2>
A discharge lamp having the following specifications was produced according to the configurations shown in FIGS. 8 and 9.
[Expression tube (11)]
Material = quartz glass, total length = 90 mm,
Light emitting part (12): maximum outer diameter = 62 mm, maximum inner diameter = 55 mm,
Sealing part (13): Outer diameter = 30 mm
[Anode (20)]
Material = Tungsten, Outer diameter = 25 mm
[Cathode (21)]
Material = Triated Tungsten, Outer Diameter = 12mm
[Conductive foil (24)]
Material = molybdenum [base (30)]
Material = brass, overall length = 70 mm, inner diameter = 31.5 mm, outer diameter = 33.5 mm
Number of ventilation openings = 2, Diameter of ventilation openings = 7 mm
[Joint layer (40)]
Material = ceramic adhesive, thickness = 0.75 mm,
Step = 5 mm between the outer end surface of the sealing part and the inner space side end surface of the joint layer
　上記の放電ランプにおける口金の一方の通風口に、内径が２．５ｍｍの吹き出し口を有する冷却風供給ノズルを挿入した。この放電ランプを２．７ｋＷのランプ入力（電流＝２５Ａ，電圧＝１０７Ｖ）で点灯させると共に、冷却風供給ノズルから口金内に冷却風を供給した。そして、導電箔における封止部の外端から約２０ｍｍの離れた位置の温度を測定し、当該導電箔の温度を３５０℃に維持するために必要な冷却風の流量を測定したところ、１．０Ｌ／ｍｉｎであった。 A cooling air supply nozzle having an outlet with an inner diameter of 2.5 mm was inserted into one of the ventilation ports of the mouthpiece of the above discharge lamp. This discharge lamp was lit with a lamp input of 2.7 kW (current = 25 A, voltage = 107 V), and cooling air was supplied into the base from a cooling air supply nozzle. Then, the temperature at a position about 20 mm away from the outer end of the sealing portion of the conductive foil was measured, and the flow rate of the cooling air required to maintain the temperature of the conductive foil at 350 ° C. was measured. It was 0 L / min.
〈実施例３〉
　図１１および図１２に示す構成に従い、下記の仕様の放電ランプを作製した。
［発光管（１１）］
　材質＝石英ガラス，全長＝９０ｍｍ，
　発光部（１２）：最大外径＝６２ｍｍ，最大内径＝５５ｍｍ，
　封止部（１３）：外径＝３０ｍｍ
［陽極（２０）］
　材質＝タングステン，外径＝２５ｍｍ
［陰極（２１）］
　材質＝トリエーテッドタングステン，外径＝１２ｍｍ
［導電箔（２４）］
　材質＝モリブデン
［口金（３０）］
　材質＝真鍮，全長＝７０ｍｍ，内径＝３１．５ｍｍ，外径＝３３．５ｍｍ
　通風口の数＝２，通風口の径＝７ｍｍ
［隔壁（３５）］
　材質＝真鍮，厚み＝１ｍｍ，封止部の外端面と隔壁との間の距離（Ｒ）＝１ｍｍ
［接合層（４０）］
　材質＝セラミック系接着剤，厚み＝０．７５ｍｍ <Example 3>
A discharge lamp having the following specifications was produced according to the configurations shown in FIGS. 11 and 12.
[Expression tube (11)]
Material = quartz glass, total length = 90 mm,
Light emitting part (12): maximum outer diameter = 62 mm, maximum inner diameter = 55 mm,
Sealing part (13): Outer diameter = 30 mm
[Anode (20)]
Material = Tungsten, Outer diameter = 25 mm
[Cathode (21)]
Material = Triated Tungsten, Outer Diameter = 12mm
[Conductive foil (24)]
Material = molybdenum [base (30)]
Material = brass, overall length = 70 mm, inner diameter = 31.5 mm, outer diameter = 33.5 mm
Number of ventilation openings = 2, Diameter of ventilation openings = 7 mm
[Septum (35)]
Material = brass, thickness = 1 mm, distance (R) = 1 mm between the outer end surface of the sealing part and the partition wall
[Joint layer (40)]
Material = ceramic adhesive, thickness = 0.75 mm
　上記の放電ランプにおける口金の一方の通風口に、内径が２．５ｍｍの吹き出し口を有する冷却風供給ノズルを挿入した。この放電ランプを２．７ｋＷのランプ入力（電流＝２５Ａ，電圧＝１０７Ｖ）で点灯させると共に、冷却風供給ノズルから口金内に冷却風を供給した。そして、導電箔における封止部の外端から約２０ｍｍの離れた位置の温度を測定し、当該導電箔の温度を３５０℃に維持するために必要な冷却風の流量を測定したところ、１．０Ｌ／ｍｉｎであった。 A cooling air supply nozzle having an outlet with an inner diameter of 2.5 mm was inserted into one of the ventilation ports of the mouthpiece of the above discharge lamp. This discharge lamp was lit with a lamp input of 2.7 kW (current = 25 A, voltage = 107 V), and cooling air was supplied into the base from a cooling air supply nozzle. Then, the temperature at a position about 20 mm away from the outer end of the sealing portion of the conductive foil was measured, and the flow rate of the cooling air required to maintain the temperature of the conductive foil at 350 ° C. was measured. It was 0 L / min.
〈比較例１〉
　口金に通風口が形成されておらず、接合層が封止部の外端面と口金の底面との間に充填されるよう形成されていること以外は、実施例１と同様の仕様の放電ランプを作製した。
　この放電ランプにおける口金の外周面から６０ｍｍ離間した位置に、内径が２５ｍｍの吹き出し口を有する冷却風供給ノズルを配置した。この放電ランプを２．７ｋＷのランプ入力（電流＝２５Ａ，電圧＝１０７Ｖ）で点灯させると共に、冷却風供給ノズルから口金の外周面に向かって冷却風を供給した。そして、導電箔における封止部の外端から約２０ｍｍの離れた位置の温度を測定し、当該導電箔の温度を３５０℃に維持するために必要な冷却風の流量を測定したところ、１２０Ｌ／ｍｉｎであった。 <Comparative example 1>
A discharge lamp having the same specifications as in Example 1 except that a ventilation port is not formed in the base and the joint layer is formed so as to be filled between the outer end surface of the sealing portion and the bottom surface of the base. Was produced.
A cooling air supply nozzle having an outlet having an inner diameter of 25 mm was arranged at a position 60 mm away from the outer peripheral surface of the base of the discharge lamp. This discharge lamp was lit with a lamp input of 2.7 kW (current = 25 A, voltage = 107 V), and cooling air was supplied from the cooling air supply nozzle toward the outer peripheral surface of the base. Then, the temperature at a position about 20 mm away from the outer end of the sealing portion of the conductive foil was measured, and the flow rate of the cooling air required to maintain the temperature of the conductive foil at 350 ° C. was measured. It was min.
　以上の結果から、実施例１～３に係る放電ランプによれば、封止部を高い効率で冷却することができることが確認された。また、他方の通風口から排出される冷却風を光照射装置におけるランプ保持部の排出口に接続することにより、発光管の温度を低下させることなしに封止部を冷却することが可能となる。 From the above results, it was confirmed that the sealed portion can be cooled with high efficiency according to the discharge lamps according to Examples 1 to 3. Further, by connecting the cooling air discharged from the other ventilation port to the discharge port of the lamp holding portion in the light irradiation device, it is possible to cool the sealing portion without lowering the temperature of the arc tube. ..
　１０　ショートアーク型放電ランプ
　１１　発光管
　１２　発光部
　１３　狭窄部
　１４　封止部
　１４ａ　外端面
　１５　封止用絶縁体
　１６　内部リード支持部材
　１７　外部リード支持部材
　２０　陽極
　２１　陰極
　２２　内部リード
　２３　外部リード
　２４　導電箔
　２５　導電ディスク
　２６　補助ディスク
　２７　金属部材
　２８　リード線
　３０　口金
　３０ａ，３０ｂ　口金材
　３１　外端面部
　３２　端子部
　３３　通風口
　３３ａ　流入用通風口
　３３ｂ　流出用通風口
　３４　位置決め部
　３５　隔壁
　３５ａ　貫通口
　３５ｂ，３５ｃ　底部
　３６　周面部
　３７　接続管部
　４０　接合層
　４０ａ　内部空間側端面
　５０　ランプ保持部
　５１　端子接続用開口
　５２　送風口
　５３　排出口
　５４　固定部材
　５５　凹面反射鏡
　６０　ランプハウス
　６１，６２　配管
　６３　フィルター
　６５　送風機構
　Ｃ　　仮想円
　Ｃ１，Ｃ２，Ｃ３，Ｃ４　円弧
　Ｄ　　段差
　Ｓ１　発光空間
　Ｓ２　内部空間 10 Short arc type discharge lamp 11 Light emitting tube 12 Light emitting part 13 Constriction part 14 Sealing part 14a Outer end surface 15 Sealing insulator 16 Internal lead support member 17 External lead support member 20 Electrode 21 Electrode 22 Internal lead 23 External lead 24 Conductive Foil 25 Conductive disk 26 Auxiliary disk 27 Metal member 28 Lead wire 30 Mouthpiece 30a, 30b Mouthpiece material 31 Outer end surface 32 Terminal 33 Ventilation port 33a Inflow ventilation port 33b Outflow ventilation port 34 Positioning part 35 Partition 35a Through port 35b, 35c Bottom 36 Peripheral surface 37 Connection pipe 40 Joint layer 40a Internal space side end face 50 Lamp holding part 51 Terminal connection opening 52 Blower 53 Outlet 54 Fixing member 55 Concave reflector 60 Lamp house 61, 62 Piping 63 Filter 65 Blower Mechanism C Virtual circle C1, C2, C3, C4 Arc D Step S1 Light emitting space S2 Internal space

Claims (20)

  1. 　発光部の一端に連続して封止部が形成されてなる発光管と、前記封止部が挿入されて固定された口金とを備え、前記封止部に箔シール構造が形成されたショートアーク型放電ランプであって、
    　前記口金の外端面部と前記封止部の外端面との間には、内部空間が形成され、
    　前記口金の外端面部は、前記内部空間に冷却風を流入出させる通風口を有することを特徴とするショートアーク型放電ランプ。     A short arc having a light emitting tube in which a sealing portion is continuously formed at one end of a light emitting portion and a mouthpiece into which the sealing portion is inserted and fixed, and a foil seal structure is formed in the sealing portion. It is a type discharge lamp
    An internal space is formed between the outer end surface portion of the mouthpiece and the outer end surface portion of the sealing portion.
    A short arc type discharge lamp characterized in that the outer end surface portion of the mouthpiece has a ventilation port for allowing cooling air to flow in and out of the internal space.
  2. 　前記通風口は、前記口金の外端面部に複数形成されていること特徴とする請求項１に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 1, wherein a plurality of the ventilation ports are formed on the outer end surface portion of the mouthpiece.
  3. 　前記複数の通風口のうち少なくとも一つ以上が流入用通風口であり、
    　前記流入用通風口の最大長さを画定する線分の長さが、前記口金の外端面部に対向して配置される送風口の最大長さを画定する線分の長さより小さいことを特徴とする請求項２に記載のショートアーク型放電ランプ。     At least one or more of the plurality of ventilation openings is an inflow ventilation port.
    The length of the line segment defining the maximum length of the inflow vent is smaller than the length of the line segment defining the maximum length of the air outlet arranged to face the outer end surface portion of the mouthpiece. The short arc type discharge lamp according to claim 2.
  4. 　前記複数の通風口のうち少なくとも一つ以上が流出用通風口であり、
    　前記流出用通風口の最大長さを画定する線分の長さが、前記口金の外端面部に対向して配置され、前記流出用通風口に対応する排出口の最大長さを画定する線分の長さより小さいことを特徴とする請求項３に記載のショートアーク型放電ランプ。     At least one or more of the plurality of ventilation openings is an outflow ventilation port.
    A line segment having a line segment length defining the maximum length of the outflow vent is arranged to face the outer end surface of the mouthpiece and defines the maximum length of the discharge port corresponding to the outflow vent. The short arc type discharge lamp according to claim 3, wherein the length is smaller than a minute.
  5. 　前記複数の通風口は、前記口金の外周面と同軸の仮想円に沿って配置されており、
    　前記複数の通風口のうち少なくとも一つ以上が流入用通風口であり、
    　前記流入用通風口と重なる前記仮想円の円弧の長さの合計が、前記口金の外端面部に対向して配置される送風口と重なる前記仮想円の円弧の長さの合計より小さいことを特徴とする請求項２に記載のショートアーク型放電ランプ。     The plurality of ventilation holes are arranged along a virtual circle coaxial with the outer peripheral surface of the mouthpiece.
    At least one or more of the plurality of ventilation openings is an inflow ventilation port.
    The total length of the arcs of the virtual circle overlapping the inflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the air outlets arranged so as to face the outer end surface portion of the mouthpiece. The short arc type discharge lamp according to claim 2.
  6. 　前記複数の通風口のうち少なくとも一つ以上が流出用通風口であり、
    　前記流出用通風口と重なる前記仮想円の円弧の長さの合計が、前記口金の外端面部に対向して配置される排出口と重なる前記仮想円の円弧の長さの合計より小さいことを特徴とする請求項５に記載のショートアーク型放電ランプ。     At least one or more of the plurality of ventilation openings is an outflow ventilation port.
    The total length of the arcs of the virtual circle overlapping the outflow ventilation port is smaller than the total length of the arcs of the virtual circle overlapping the discharge port arranged so as to face the outer end surface portion of the mouthpiece. The short arc type discharge lamp according to claim 5.
  7. 　前記通風口は、前記口金の外端面に対して面積の比率が５％以上８０％以下であることを特徴とする請求項２に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 2, wherein the ventilation port has an area ratio of 5% or more and 80% or less with respect to the outer end surface of the mouthpiece.
  8. 　前記複数の通風口は、前記前記口金の外端面部の中央部分を取り囲むよう形成されていることを特徴とする請求項２に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 2, wherein the plurality of ventilation ports are formed so as to surround a central portion of an outer end surface portion of the mouthpiece.
  9. 　前記口金は、位置決め部を有することを特徴とする請求項１に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 1, wherein the mouthpiece has a positioning portion.
  10. 　前記位置決め部は、Ｄカット形状の切り欠きによって形成されていることを特徴とする請求項９に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 9, wherein the positioning portion is formed by a D-cut shaped notch.
  11. 前記封止部の外周面と前記口金の内周面との間に形成された接合層を備え、
    　前記封止部の外端面と前記接合層の内部空間側端面との間には、３ｍｍ以上の段差が形成されていることを特徴とする請求項１に記載のショートアーク型放電ランプ。     A bonding layer formed between the outer peripheral surface of the sealing portion and the inner peripheral surface of the mouthpiece is provided.
    The short arc type discharge lamp according to claim 1, wherein a step of 3 mm or more is formed between the outer end surface of the sealing portion and the inner space side end surface of the bonding layer.
  12. 　前記内部空間には、前記口金内を前記発光管の管軸と垂直な断面において仕切る隔壁が設けられていることを特徴とする請求項１に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 1, wherein the internal space is provided with a partition wall that partitions the inside of the base with a cross section perpendicular to the tube axis of the arc tube.
  13. 　前記封止部の外端面と前記隔壁との間の距離が５ｍｍ以下であることを特徴と請求項１２に記載のするショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 12, wherein the distance between the outer end surface of the sealing portion and the partition wall is 5 mm or less.
  14. 　前記隔壁が、金属またはセラミックスよりなることを特徴とする請求項１２に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 12, wherein the partition wall is made of metal or ceramics.
  15. 　前記隔壁が、アルミニウム、銅、真鍮、タングステン、モリブデン、窒化アルミニウムおよび炭化ケイ素のいずれかよりなることを特徴とする請求項１４に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 14, wherein the partition wall is made of any one of aluminum, copper, brass, tungsten, molybdenum, aluminum nitride and silicon carbide.
  16. 　前記隔壁の厚みが１ｍｍ以上２ｍｍ以下であることを特徴とする請求項１２に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 12, wherein the thickness of the partition wall is 1 mm or more and 2 mm or less.
  17. 　前記口金の内面には、前記隔壁を保持する隔壁保持部が形成されていることを特徴とする請求項１２に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 12, wherein a partition holding portion for holding the partition is formed on the inner surface of the mouthpiece.
  18. 　前記隔壁は、前記口金の内面に一体に形成されていることを特徴とする請求項１２に記載のショートアーク型放電ランプ。 The short arc type discharge lamp according to claim 12, wherein the partition wall is integrally formed on the inner surface of the mouthpiece.
  19. 　請求項１に記載のショートアーク型放電ランプと、
    　前記ショートアーク型放電ランプの前記口金を保持するランプ保持部と、
    　前記口金の前記外端面部の前記通風口を介して前記内部空間に冷却風を流入出させる送風機構とを備えることを特徴とする光照射装置。     The short arc type discharge lamp according to claim 1 and
    A lamp holding portion that holds the base of the short arc type discharge lamp, and a lamp holding portion.
    A light irradiation device including a ventilation mechanism for allowing cooling air to flow in and out of the internal space through the ventilation port on the outer end surface portion of the mouthpiece.
  20. 　前記ランプ保持部は、それぞれ前記通風口に連通するよう配置された、冷却風を送風する送風口および冷却風を排出する排出口を有することを特徴とする請求項１９に記載の光照射装置。 The light irradiation device according to claim 19, wherein each of the lamp holding portions has a ventilation port for blowing cooling air and an exhaust port for discharging cooling air, which are arranged so as to communicate with the ventilation port.
PCT/JP2020/027318 2019-09-17 2020-07-14 Short-arc discharge lamp and light radiating device WO2021053945A1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2019-167932 2019-09-17
JP2019167932A JP2021047983A (en) 2019-09-17 2019-09-17 Short arc type discharge lamp and light irradiation device
JP2019167933A JP7207244B2 (en) 2019-09-17 2019-09-17 SHORT ARC DISCHARGE LAMP AND LIGHT RADIATION DEVICE
JP2019-167933 2019-09-17
JP2019-167934 2019-09-17
JP2019167934A JP7251420B2 (en) 2019-09-17 2019-09-17 SHORT ARC DISCHARGE LAMP AND LIGHT RADIATION DEVICE

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001216938A (en) * 2000-02-01 2001-08-10 Ushio Inc Short arc type discharge lamp and light source device
JP2003132845A (en) * 2001-10-29 2003-05-09 Ushio Inc Short arc discharge lamp
JP2003297228A (en) * 2002-03-29 2003-10-17 Orc Mfg Co Ltd Short arc type discharge lamp and light source device
JP2013258152A (en) * 2007-04-12 2013-12-26 Nikon Corp Discharge lamp, connection cable, light source device, and exposure device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001216938A (en) * 2000-02-01 2001-08-10 Ushio Inc Short arc type discharge lamp and light source device
JP2003132845A (en) * 2001-10-29 2003-05-09 Ushio Inc Short arc discharge lamp
JP2003297228A (en) * 2002-03-29 2003-10-17 Orc Mfg Co Ltd Short arc type discharge lamp and light source device
JP2013258152A (en) * 2007-04-12 2013-12-26 Nikon Corp Discharge lamp, connection cable, light source device, and exposure device

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