TWI232633B - Temperature and voltage compensated Hall sensor circuit - Google Patents
Temperature and voltage compensated Hall sensor circuit Download PDFInfo
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- TWI232633B TWI232633B TW92124405A TW92124405A TWI232633B TW I232633 B TWI232633 B TW I232633B TW 92124405 A TW92124405 A TW 92124405A TW 92124405 A TW92124405 A TW 92124405A TW I232633 B TWI232633 B TW I232633B
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1232633 案號 92124405 五、發明說明(1) 技術領域 本發明係有關一種霍爾磁場感應器電路,尤其是應用積體 電路中矽磊晶 (e p i t a X i a 1)電阻之溫度及電壓特性,以 降低該感應器之磁場靈敏度受溫度以及電源電壓的影響。 先前技術 民國90年7月21日中華民國專利公報28卷21期第4477 1 5號 揭露一種磁滞電路之溫度補償電路,該專利雖可達成溫度 補償之目的,但並無法解決磁滯特性受到電源電壓影響的 問題。1 985年6月4日美國專利公報第uS4, 521,72 7號揭露 一種有關具溫度補償霍爾磁場感應線路,其遲滯特性雖呈 溫度補償效果,但無法做到不受電源電壓的影響。 八 創作背景 般類比產品若具較寬廣之操作溫度範圍,皆須含溫1232633 Case No. 92124405 V. Description of the Invention (1) Technical Field The present invention relates to a Hall magnetic field sensor circuit, and particularly to the application of temperature and voltage characteristics of epitaxial (epita X ia 1) resistors in integrated circuits. The magnetic field sensitivity of the sensor is affected by temperature and power supply voltage. Prior Art Republic of China July 21, 1990 Republic of China Patent Bulletin 28 Volume 21 No. 4477 1 5 discloses a temperature compensation circuit for a hysteresis circuit. Although this patent can achieve the purpose of temperature compensation, it cannot solve the problem of hysteresis characteristics. Problems affected by power supply voltage. U.S. Patent Publication No. uS4, 521, 72, June 4, 985, discloses a type of magnetic field sensing circuit with temperature compensation. Although the hysteresis characteristic is temperature compensation, it cannot be protected from the power supply voltage. 8. Creative background Generally, if analog products have a wide operating temperature range, they must include temperature.
礎之矽磁感應積體電路, 的影響。 號非常微 無論感應 外又,皿度影警其特性,所以若無 受到限制。以霍爾感測原理為^ 已有逐漸取代化合物磁感應二 1232633 «J2124405. 五 、發明說明(2) 月乙曰 修正 趨勢,無論是化合物或是 何降低霍爾元件隨溫度變 石夕磁感應器,長久以來都面臨如 化所產生的特性飄移對產品的影 第 block 元件的 為數百 施密特 裝置。 度為霍 磁感應 短、小 受到曰 所產生 利操作 第 器,其 其感應 變差, 導致風 度隨溫 到到磁 1圖顯示一霍爾感靡哭^ diagram),霍爾元;=的功能方塊圖(funCtion 兩極則隨外界磁場固定電壓源提供偏壓,於 微伏)。該電壓經一 #度/生一微小之霍爾電壓(約 觸發器(Schmitt Trf動放、大線路放大,再經由一 第2圖為霍爾感應理後,搞合至一輸出 爾感應器特性中最重要遲二寬度的 器的靈敏度。近年二mm直接反應出 由於> 產品受到輕、薄、 的發展趨勢’應用霍爾感應器的直流無刷風扇,也 益嚴格的體積限制’導致產生磁場的線圈減小,其 的:场強度也因此減弱。為了能使直流無刷風扇順 ,八對磁場感應器靈敏度的要求就相對地提高。 3A及3B圖顯示出一未經溫度補償的霍爾感應 遲滯寬度對溫度變化的定性圖。第3A圖所顯示為 器之遲滯寬度隨溫度升高而變寬,也就是其靈敏度 以至該霍爾感應器無法偵測出磁場極性的變化,而 扇不轉。第3B圖所顯示的則為其感應器的遲滯寬 度升高而變窄,也就是靈敏度過高,以至於極易受 場變化的干擾,導致風扇運轉不正常。第 4圖顯 示一未經電壓補償的霍爾感應器,其遲滞寬度對端電壓變 化的定性圖,其感應器的遲滯寬度隨電壓增加而變寬,亦 1232633 —-^-^124405 β年—9月2日 修正 五、發明說明(3) ' '~-- 即靈敏度變差。 本發明人鑒於上述之缺失,加以研究、改良後,提出 一解決方法’其係應用半導體製程中矽磊晶電阻之溫度及 電壓特性(請參考第5Α及5Β圖),例如,Ρ型離子佈植 電阻的/m度係數約為〇 · 2 % /°c,Ν型矽磊晶電阻的溫度係數 約為0· 72%/°C,而電晶體基極至射極電壓(Vbe)之溫度係 數為-1 · 8 mV/C,P型離子佈植電阻的電壓係數約為 0· 15%/V’ N型矽磊晶電阻的電壓係數約為丨.38%,c。經由 電路的設計,結合其對溫度係數(temperature coefficient)不同的組合並與其符號相反的元件整合, 以致獲得溫度係數與相互抵銷的效果,可達成於一定溫度 應用範圍内其磁感應特性不受溫度變化。第5 b圖顯示矽 磊晶電阻不同於一般電阻僅受端電壓差的特性,其電阻值 受該電阻兩端端電壓值V(A)及V(B)各別產生耗盡層32 (depletion layer)寬度的影響,電阻導通區3俩電阻不 仁又V (A)也受到V (B)的影響。因此,電路設計經由不同電 阻器的組合可達到不受操作電壓變化影響的目的。 實施方式 如第1圖所示’ 一霍爾感應電路包括一操作電壓源 1 8,經電源穩定器1 〇提供一固定電壓源24至一霍爾元件 12。經外界磁場所感應出的霍爾電壓耦合至一差動放大器 1232633 修正 _案號 92124405 五、發明說明(4) 1 4後,再經由一具溫度與電壓補償之施密特觸動器1 6將信 號處理並產生一遲滯後,再傳送至一輸出裝置17。第 6 圖顯示本發明有關差動放大器1 4之一較佳實施例,固定電 壓源24經由一電阻器1 20與一集極與基極相接之NPN電晶體 1 0 8耦接至地,形成一電流源並與電晶體1 〇 3、1 〇 4、1 0 5形 成電流鏡。霍爾元件1 2所感應之霍爾電壓分別由差動放大 器1 4之前端NPN電晶體 1 〇 6、1 0 7之基極輸入,該微小差動 信號分別由電阻器1 4 0、1 6 0與電晶體1 〇 6及電阻器1 3 0、Based on the silicon magnetic induction integrated circuit. The number is very small, regardless of whether it is sensitive or not, it has its characteristics, so if it is not restricted. Based on the principle of Hall sensing, ^ has been gradually replaced by compound magnetic induction II 1232633 «J2124405. V. Description of the invention (2) Yueyi said the correction trend, whether it is a compound or how to reduce the Hall element changes with temperature. Hundreds of Schmitt devices have long faced the characteristic drift produced by Ruhua. The degree of magnetic induction is short and small, and the induction device is operated badly, and its induction becomes worse, which causes the wind to reach the magnetic field. Figure 1 shows a hall feeling crying ^ diagram), Hall element; = function block Figure (funCtion poles are biased with a fixed voltage source in the external magnetic field, in microvolts). After this voltage is generated by a # degree / minimum Hall voltage (approximate trigger (Schmitt Trf amplifier, large line amplification, and then Hall Hall induction principle shown in Figure 2), the voltage is combined to the characteristics of an output sensor. The most important is the sensitivity of the second-best-width device. In recent years, two mm directly reflects the development trend of the product being light, thin, and 'the use of Hall sensor DC brushless fans also has strict volume restrictions'. The coil of the magnetic field is reduced, and its field strength is also weakened. In order to make the DC brushless fan smooth, the requirements for the sensitivity of the magnetic field sensor are relatively increased. The 3A and 3B diagrams show a Huo without temperature compensation. The qualitative graph of the hysteresis width of the induction sensor as a function of temperature. Figure 3A shows that the hysteresis width of the device becomes wider with increasing temperature, that is, its sensitivity is such that the Hall sensor cannot detect the change in magnetic field polarity, and the fan No. Figure 3B shows that the hysteresis width of the sensor is increased and narrowed, that is, the sensitivity is so high that it is very susceptible to interference from field changes, which causes the fan to run abnormally. 4 A qualitative graph showing the hysteresis width versus terminal voltage change of a Hall sensor without voltage compensation. The hysteresis width of its sensor becomes wider as the voltage increases. Also 1232633 —- ^-^ 124405 βyear—September Amendment 2 on the 5th, the description of the invention (3) '~~ That is, the sensitivity has deteriorated. In view of the above-mentioned shortcomings, the inventor has proposed a solution after research and improvement, which is based on the application of silicon epitaxial resistors in semiconductor processes. Temperature and voltage characteristics (please refer to Figures 5A and 5B), for example, the / m degree coefficient of P-type ion implantation resistance is about 0.2% / ° c, and the temperature coefficient of N-type silicon epitaxial resistance is about 0 · 72% / ° C, and the temperature coefficient of the transistor base-to-emitter voltage (Vbe) is -1 · 8 mV / C. The voltage coefficient of the P-type ion implantation resistor is about 0 · 15% / V 'N type The voltage coefficient of a silicon epitaxial resistor is about .38%, c. Through the design of the circuit, the combination of components with different combinations of temperature coefficient and the opposite sign is integrated, so that the temperature coefficient and the offsetting Effect, can achieve its magnetic induction characteristics in a certain temperature application range It is not affected by temperature changes. Figure 5b shows that the silicon epitaxial resistance is different from the ordinary resistance only by the terminal voltage difference. Its resistance value is affected by the voltage values V (A) and V (B) at the ends of the resistor. Due to the influence of the width of the layer 32 (depletion layer), the resistance of the resistance conduction region 3 is not good, and V (A) is also affected by V (B). Therefore, the circuit design can be achieved by the combination of different resistors. The embodiment is shown in FIG. 1 'A Hall induction circuit includes an operating voltage source 18, and a fixed voltage source 24 to a Hall element 12 is provided through a power stabilizer 10. The Hall voltage induced by the external magnetic field is coupled to a differential amplifier 1232633. Amendment_Case No. 92124405 V. Description of the invention (4) 1 4 After that, a Schmitt trigger 16 with temperature and voltage compensation will be used. After the signal is processed and a hysteresis is generated, it is transmitted to an output device 17. FIG. 6 shows a preferred embodiment of the differential amplifier 14 according to the present invention. The fixed voltage source 24 is coupled to ground through a resistor 120 and an NPN transistor 108 connected to a collector and a base. A current source is formed and a current mirror is formed with the transistors 103, 104, and 105. The Hall voltages induced by the Hall element 12 are input by the bases of the front-end NPN transistors 1 06 and 107 of the differential amplifier 14 respectively, and the tiny differential signals are respectively provided by the resistors 1 4 0 and 16 0 and transistor 1 0 6 and resistor 1 3 0,
1 5 0與電晶體1 0 7共同經由一電流源1 〇 5達成差動放大的作 用。放大後的差動信號分別經由N P N電晶體1 〇 1、1 〇 3之共 接點B ( 1 1 1 )及1 0 2、1 0 4之共接點A ( 1 1 2 ),分別接至下一 級之施密特觸動器1 6之輸入端。 第7圖顯示本發明有關具溫度與電壓補償之施密特觸 動器1 6之一較佳實施例,固定電壓源2 4經由一電阻器 2 2 0與一集極與基極相接之n P N電晶體2 0 7之射極耦接至 地,形成一電流源,並與電晶體2 0 3、2 0 6形成電流鏡。差 動放大器14的二輸出端分別由NPN電晶體2 0 9、210的集極 輸入,電晶體2 0 9的集極同時與基極共接的NPN電晶體1 50 and the transistor 10 7 jointly achieve the effect of differential amplification through a current source 105. The amplified differential signals are respectively connected to the common contact point B (1 1 1) and the common contact point A (1 1 2) of 10, 10 and 4 through the NPN transistor 1 0, 1 0 3, respectively. The input terminal of the Schmitt actuator 16 of the next stage. FIG. 7 shows a preferred embodiment of the Schmitt contactor 16 with temperature and voltage compensation according to the present invention. The fixed voltage source 24 is connected to a collector and a base n through a resistor 2 2 0. The emitter of the PN transistor 2 07 is coupled to the ground to form a current source, and a current mirror is formed with the transistors 2 0 3 and 2 06. The two output terminals of the differential amplifier 14 are respectively input by the collectors of the NPN transistors 209 and 210, and the collector of the transistor 209 is connected to the NPN transistor connected to the base at the same time.
2 1 0、2 1 1相接,電晶體2 1 〇的集極亦同時與基極共接的npn 電晶體2 0 8、2 0 9相接。電晶體2 0 8的射極經由電阻器 2 3 0、電晶體2 0 9的射極經由電阻器2 4 0、電晶體2 1 0的射極 經由電阻器2 5 0、電晶體2 11的射極經由電阻器2 6 0共同搞 合至另類電阻器310之一端,而電阻器310之另一端耦合至 電阻器27 0之一端,電阻器27〇之另一端耦接至地。基極共2 1 0 and 2 1 1 are connected, and the collector of the transistor 2 1 0 is also connected to the npn transistor 2 08 and 2 9 which are commonly connected to the base. The emitter of transistor 2 0 8 passes resistor 2 3 0, the emitter of transistor 2 0 9 passes resistor 2 4 0, the emitter of transistor 2 1 0 passes resistor 2 5 0, transistor 2 11 The emitter is coupled to one end of the alternative resistor 310 through the resistor 260, and the other end of the resistor 310 is coupled to one end of the resistor 270, and the other end of the resistor 270 is coupled to the ground. Base
第9頁 1232633 _案號92124405 年$月2日 修正 五、發明說明(5) 接的P N P電晶體2 0 4、2 0 5之共同射極接至固定電壓源2 4, 電晶體2 0 5之基極與其集極相接後再接至NPN電晶體2 0 6之 集極。電晶體2 0 6之基極與電晶體2 0 7電流鏡之基極相接並 形成一電流源,電晶體2 0 6之射極輕接至地,電晶體2 0 8之Page 9 1232633 _ Case No. 92124405 Amended on January 2, 2015 V. Description of the invention (5) The common emitter of the PNP transistor 2 0 4 and 2 0 5 is connected to the fixed voltage source 2 4 and the transistor 2 0 5 The base is connected to its collector and then to the collector of NPN transistor 206. The base of transistor 2 0 6 is connected to the base of transistor 2 0 7 current mirror to form a current source. The emitter of transistor 2 6 is lightly connected to the ground, and the transistor 2 0 8
集極耦合至電晶體204之集極。基極共接的PNP電晶體 20卜20 2之共同射極接至固定電壓源24,電晶體201之基 極與其集極相接後再耦接至NPN電晶體2 0 3之集極,電晶體 2 0 3之基極與電晶體2 0 7電流鏡之基極相接並形成一電流 源’電晶體2 0 3之射極耦接至地。電晶體2 1 1之集極耦合 至電晶體2 0 2之集極並與輸出端2 1 2相接。電晶體2 0 8、 ^09、210、211與電阻器2 3 0、240、25 0、2 6 0共同組成施 後特觸發器的’而其遲滯寬度大小則由電阻器3 1 〇、2 7 〇共 同决疋。電阻器3 1 0為石夕蟲晶電阻,其餘皆為離子植入電 阻器’石夕蠢晶電阻器3 1 〇之電阻溫度係數與於石朋離子植入 電阻器之溫度係數不同,所以適當選擇電阻器31〇與27〇之 ,阻值可與電晶體之Vbe受溫度影疊效應相抵銷、,以苴達 成磁感應參數不受溫度影響的目標。The collector is coupled to the collector of the transistor 204. The common emitter of the base PNP transistor 20 and 20 2 is connected to a fixed voltage source 24. The base of the transistor 201 is connected to its collector and then coupled to the collector of the NPN transistor 2 0. The base of crystal 203 is connected to the base of transistor 207 current mirror and forms a current source. The emitter of transistor 203 is coupled to ground. The collector of the transistor 2 1 1 is coupled to the collector of the transistor 2 0 2 and is connected to the output terminal 2 1 2. Transistors 2 0 8, ^ 09, 210, 211 and resistors 2 3 0, 240, 25 0, 2 6 0 together form a post trigger special trigger, and its hysteresis width is determined by resistors 3 1 0, 2 7 〇 Joint decision. Resistor 3 1 0 is Shi Xijing crystal resistance, the rest are ion implanted resistors. The resistance temperature coefficient of Shi Xi stupid crystal resistor 3 1 〇 is different from the temperature coefficient of Shi Peng ion implanted resistors, so it is appropriate. The resistors 31 and 27 are selected, and the resistance value can be offset with the effect of temperature Vbe of the transistor to achieve the goal that the magnetic induction parameter is not affected by temperature.
—此外’經由調整石夕蠢晶電阻器310之兩端端電壓可產生 馬^阻值,而該電阻值不同於一般電阻器只受兩端電壓差 二響的特性,該電阻值受兩端端電壓的影響。調整节 了之收端電壓影響的特性’可將固定電壓源24受摔作 應=響抵銷’而達成遲滯寬度不受操作電壓影響的磁感—In addition, the resistance value of the two ends of the Shi Xi stupid crystal resistor 310 can be adjusted to generate a resistance value, and this resistance value is different from the characteristic that the ordinary resistor is only affected by the voltage difference between the two ends. Influence of terminal voltage. Adjusting the characteristics of the end-of-line voltage effect ’The fixed voltage source 24 can be subjected to a fall response = response cancellation’ to achieve a magnetic induction with a hysteresis width that is not affected by the operating voltage
第10頁 1232633 案號 92124405 %年》月之曰 修正 圖式簡單說明 元件符號說明 操 作電壓源 18 電源穩 定器 10 固定 電壓源 霍 爾元件 12 差動放 大器 14 具 溫度與電壓補償之施密特觸 動器 16 出裝置 17 耗盡層 32 導通 區 34 遲 滯寬度 11 PNP電晶體 201 > 2 0 2 > 2 0 4、 205 NPN電晶體 101 ^ 102〜 103〜 104 、105、 106〜 108 > 2 0 3 〜 2 0 6、 207 、2 0 8、 2 0 9 ^ 211 電 阻器 120 、130、 140、 150 、160、 2 2 0 > 230 、24 0、 2 5 0、 260 > 270 另 類電阻器 310 第 1圖為霍 爾感 應器功: 能方塊圖< 0 第 2圖為霍 爾感 應器遲; 滞寬度特性圖。 第 3A圖為遲滞寬度受溫 .度影 響特 性圖一 0 第 3B圖為遲滯〕 1:度受溫 .度影 響特 性圖二 〇 第 4圖為遲 滯寬 度受操作電壓影響特性圖。 第 5A圖為矽磊晶電阻受 溫度 影響 特性圖 0 第 5B圖為砍蠢晶電阻受 端電 壓影 響特性 圖。 第 6圖為差 動放 大器之, 一較佳實施例。 24 107 210 第 圖為具溫度與電壓補償之施密特觸發器之一較佳實Page 10 1232633 Case No. 92124405% Year "Month and month correction diagram Simple description Element symbol description Operating voltage source 18 Power stabilizer 10 Fixed voltage source Hall element 12 Differential amplifier 14 Schmitt trigger with temperature and voltage compensation Device 16 output device 17 depletion layer 32 conduction region 34 hysteresis width 11 PNP transistor 201 > 2 0 2 > 2 0 4, 205 NPN transistor 101 ^ 102 ~ 103 ~ 104, 105, 106 ~ 108 > 2 0 3 to 2 0 6, 207, 2 0 8, 2 0 9 ^ 211 resistors 120, 130, 140, 150, 160, 2 2 0 > 230, 24 0, 2 5 0, 260 > 270 alternative resistance Figure 310 shows the Hall sensor function: block diagram < 0 Figure 2 shows the hysteresis characteristic of the Hall sensor. Figure 3A is the hysteresis width affected by temperature. Figure 1 Figure 3B is hysteresis] 1: Degree of temperature affected by degree. Figure 2 is a characteristic diagram of hysteresis width affected by operating voltage. Figure 5A is a graph showing the effect of temperature on the silicon epitaxial resistance. Figure 5B is a graph showing the effect of the terminal voltage on the resistance of a chip. Fig. 6 is a preferred embodiment of the differential amplifier. 24 107 210 The figure shows one of the Schmitt triggers with temperature and voltage compensation.
第11頁 1232633 _案號92124405_外年?月<Z日_修正 圖式簡單說明 施例。Page 11 1232633 _ Case No. 92124405_ Foreign years? Month < Z-day_correction The diagram briefly explains the embodiment.
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