TWI229863B - Fixture for holding a master substrate, method for fabricating a substrate having a pattern thereon and a stamper - Google Patents

Abstract

A fixture for holding a master substrate having a central through hole and a photo-resist layer on the surface is provided. The fixture comprises a main body, a weight and a central lock element. The main body having a positioning cavity further comprises a protrusion disposed at the center of the positioning cavity. The protrusion deviates from the center of the gravity of the main body. The weight is movable to adjust the center of the gravity of the main body. Besides, the weight is disposed on the main body. The central lock element is suitable to connect with the protrusion disposed at the center of the positioning cavity. In addition, the fixture can be used to fabricate a substrate having a pattern thereon and a stamper.

Description

1229863

The invention belongs to a technical collar. The present invention relates to a method for carrying a rigid substrate, a method for making a substrate for a rigid substrate, and a method for manufacturing a disc master (s tamper), and more particularly, to a rigid plate capable of improving productivity. A carrier jig for a substrate, a method for manufacturing a rigid substrate, and a method for manufacturing an optical disc mother board. Due to the advantages of large storage capacity, easy storage, long storage period, low cost, and easy damage to data, the prior art optical discs have gradually replaced the traditional magnetic storage media and become an indispensable medium for modern people, such as playing music. Cj — Audio), a video CD (Video CD) that can play video and music at the same time, a recordable optical disc (CD ~ R), and a read-only memory disc that stores computer slot data (CD40M) and so on. As the production technology of laser optoelectronic products and the compression technology of multimedia shirts become more mature, the development direction of optical storage media in the future will be toward high capacity and small size. Therefore, research and development on the size of optical discs is in full swing. Fig. 1 is a schematic diagram showing the structure of a stencil substrate in a conventional micro-optical disc manufacturing process. Please refer to Figure 1. In the manufacture of a stereoscopic substrate for a general micro-optical disc, a round glass substrate 100 with a straight diameter of 24 cm or 20 cm is usually used, and spin coating, soft Procedures such as baking and hard baking form a photoresist layer 102 with a uniform thickness on the surface of the substrate 100. Then, the substrate 100 is rotated around its centroid, and the data is recorded on the photoresist layer 102 by means of laser exposure. The photoresist layer after laser exposure

A data recording area can be formed after the development step. This data recording

7837twf.ptd Page 5 1229863 V. Description of the invention (2) The area 104 is mainly composed of some depressions or grooves (pi), and these depressions or grooves usually form a spiral (track). In the conventional stereotyped process Since the micro-optical disc is about 3 cm to 4.5 cm, a small part of the conventional stereotype center is not effective in other areas. After stamping, the output of the waste material will be known only by the stereotype process. It is time consuming to make a micro-domain on a substrate, and it is not time-consuming to produce multiple materials on the same substrate. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a engraving tool that can make a laser exposure process in the same process. Multiple data recording areas of the substrate to make more effective use of the basic invention. Another object is to provide a stencil that can form a plurality of different locations on the same substrate to reduce the output of the substrate after stamping, thereby reducing the invention. Another object of the present invention is to provide an optical disc that can simultaneously produce multiple micro-optical disc motherboards, so as to make and develop faster. In order to achieve the above and other objectives, the present invention provides a carrier, which is suitable for A substrate is fixed, and the substrate has a photoresist layer disposed on the substrate. The above-mentioned stencil substrate is composed of a jig body, a weight set, and a center ts / groove. There are many uses to the local. The data recording area of this optical disc only needs the substrate, so in addition to the recording area, it is a different material on the substrate of the board. Cost of substrate production data recording area. Production of mother board Micro-optical disc mother board A stencil base, a center through hole, a bearing fixture, a fixing member, and a method for forming a fixture. The base is mainly composed of materials.

7837twf.ptd Page 6 1229863 V. Description of the invention (3) Among them, the distribution range of the fixture is centered on the center; it is equipped with a base; and the solid is fixed to the base material to implement a polygonal through hole or polygon. The groove, the concave center locking structure is constituted by a dacturing jig, suitable for engraving the substrate. The position of the center of the bottom of the sub-groove of the sub-groove is partially arranged at the center of the fixture. The circular grooves and through-holes of this embodiment are implemented. These bodies have a substrate positioning groove. / The position of the centroid of the fixture body, a protrusion in the positioning groove of the base material, and the position of the protrusion is deviated from the shape of the fixture body. The weight device can be movably arranged on the fixture body, so that The center of gravity of the fixture body of the material is maintained at the centroid position center locking member carrying the fixture, which can be combined with the above protrusions to lock the substrate into the groove. The central through hole on the substrate in p is, for example, a circular through hole or the like, and the protrusion in the substrate positioning groove is, for example, a circular protrusion or the like. In addition, the substrate has, for example, a groove in the center of the substrate, and its function is to prevent the part from protruding from the surface of the photoresist layer. To sum up, his purpose is to provide a substrate with a rigid substrate on which a photoresist layer is arranged on a surface. The above-mentioned fixture is mainly treated by a fixture body and a counterweight device. The fixture body has a substrate positioning groove, the substrate fixing range covers the centroid position of the fixture body, the substrate positioning, there is at least one vacuum through hole, and the substrate fixture groove is in the middle of the wheat body. Centroid position; and the counterweight device can be moved on the ground so that the center of gravity of the fixture body carrying the substrate is placed in the cymbal. The bottom of the substrate positioning groove has, for example, a ring or a% -shaped groove or The bottom of the circular groove with the above-mentioned vacuum ~ hollow through hole will be able to more effectively adsorb the substrate. 1229863 V. Description of the invention (4) This example of Bebe is helpful for the alignment operation of the edge of the substrate adjacent to the positioning groove of the substrate. In the way, the distribution is described in the middle, which is almost suitable for fixing a weight with a slide bolt, the weight hole, the heavy function, the unloading recess, and the auxiliary setting protruding from the substrate. To do this, the surface has the above-mentioned embodiment, such as adjacent energy. The implementation of your J groove, such as the positioning concave embodiment, the position of the base material of the component is as described above. It is mainly formed with a base material, such as at least one auxiliary hole. Luding. In addition, the substrate has, for example, a plurality of alignment marks located on the substrate. For the fixed weight after the substrate is rotated, the weight is set by a weight and only 4 pieces are broken. For example, the positioning hole is provided. Locating hole combined with screw inspection. In addition, the jig body has, for example, a counterweight station code that is arranged on the slideway, and by stopping payment, the jig body has, for example, at least one counterweight hole. This counterweight device also has a counterweight for the carrier jig. 'The fixture body has, for example, at least one unloading groove, which is located on the edge of the substrate positioning groove to facilitate taking out the substrate groove. A load-bearing jig can be added to the jig body at least—or a positioning bolt. The auxiliary positioning member or the positioning bolt, such as a sidewall of a positioning recess, is used to fix the positioning groove in the substrate and other purposes. A method for manufacturing a rigid substrate includes the following steps: (a) providing a substrate, the substrate surface to a photoresist layer; (b) providing a bearing fixture, the bearing positioning groove, wherein the substrate positioning groove Distribution

^ 837twf. Ptd Page 8 1229863 Five 'invention description (5) Heart ", and the center position of the substrate positioning groove is in the groove, Ϊ Ί two; (C) the substrate is fixed to the substrate positioning recess ^ The center of gravity of the supporting fixture carrying the substrate is located at the centroid position of the bearing > 1-U, into 7 7 private / 〇 fixtures are (, ,, (d)) The supporting fixture rotates around the centroid position as an axis And the substrate positioned above the centroid position forms a first data recording area. Example of the domain shape In the method for manufacturing the above-mentioned stencil substrate, the following steps are further included after the first recording area. (F) Adjusting the substrate The orientation of the material on the substrate positioning recess; and (S) the substrate above the centroid position forms a second two = recording area. In addition, steps (f) to (§) can be repeated at least once to: A plurality of data recording areas are formed on the surface. In order to achieve the above and other objectives, the present invention proposes a method for making a master disc for optical discs, including the following steps: (a) providing a substrate on which the surface of the substrate has been > Photoresist layer; (b) providing a carrier jig, the carrier jig has a substrate positioning groove, wherein The distribution range of the substrate positioning grooves covers the centroid position of the table body, and the center position of the substrate positioning grooves deviates from the centroid position of the carrying fixture; (C) fixing the substrate to the substrate positioning 'In the groove' and the center of gravity of the supporting jig carrying the substrate is positioned at the centroid position of the supporting jig; (d) the centrifugal position of the supporting jig is rotated; (e) the centroid position above the centroid position The base material forms a first data recording area; (f) adjusts the orientation of the substrate in the substrate positioning groove; (g) the substrate above the centroid position forms a second data recording area; (h) repeats Steps (e) to (f) at least once to make the substrate into a stencil substrate; (i) forming a metal layer on the stencil substrate; and (j) peeling the metal layer from the stencil substrate, wherein the metal layer That is a disc motherboard.

7837twf.ptd Page 9 1229863 V. Description of the invention (6) Attributive sound: The formation method of the two nt main metal layer is first formed, for example, the first-gold shape: the junction, and the first-metal layer belongs to the surface of the substrate The formation of the layer prayer method-the second gold will be flat on the upper surface 12 = medium, the metal layer is peeled off from the stereotype substrate, for example, the whole layer is peeled off first, and then the photoresist layer is cleaned by chemical agents Rabbits are stripped off. … In the manufacturing method of the stencil substrate and the disc mother board, the first data α = Γ field and the second data recording area are formed, for example, by a laser exposure and a development method.

a ^ To make the above and other objects, features, and advantages of the present invention clearer, ... It mainly fixes a stencil substrate on a supporting jig, then rotates the centroid of the holding jig as the axis, and forms a data recording area on the substrate by laser exposure process, and then adjusts the stencil substrate. With respect to the orientation on the supporting jig, the processes of rotation and laser exposure are repeated to form a plurality of data recording areas on the stencil substrate. The above-mentioned stencil substrate and supporting jig are all specially designed. In this embodiment, the detailed structure of the stencil substrate and the supporting jig will be described in order as follows. FIG. 2 and FIG. 3 are schematic diagrams showing the structure of a stencil substrate in a micro-optical disc manufacturing process according to an embodiment of the present invention. First, please refer to FIG. 2. The substrate 200 used in this embodiment is, for example, a glass substrate, and the center position of the substrate 200

7837twf.ptd Page 10 1229863

V. Description of the invention (7) There is a central through hole 20 2, a groove 204, at least one auxiliary hole 206, and a plurality of alignment marks 2 0 8 D. Among them, the central through hole 202 is, for example, It is in the form of a through hole such as a circle or a polygon. In this figure, only a circular through hole is illustrated as an example. The groove 2 0 4 on the substrate 2 0 is, for example, located around the center through hole 2 0 2. The auxiliary hole 206 is, for example, adjacent to the edge of the substrate 200 or another suitable location. The alignment mark 2 08 is, for example, located at the edge of the substrate 200, and the alignment rod mark 2 08 can, for example, separate the edge of the substrate 200 into multiple equal parts. In this figure, only 8 equal parts are shown. The pattern alignment mark 208 is taken as an example. Next, referring to FIG. 3, a photoresist layer 210 is formed on the surface of the above-mentioned substrate 200. The photoresist layer 210 is, for example, by spin coating (spont coating) or soft baking (s0ft bake). Procedures such as hard bake are made on the surface of the substrate 2000 to form a so-called stereotype substrate (the stereotype substrate here has not yet completed the stereotyped action). It can be seen from the figure that there is no distribution of the photoresist layer 21 0 on the central through hole 202, the groove 204, and the auxiliary hole 206. In addition, since the photoresist layer 210 is usually a transparent or translucent material, the alignment mark 2 08 on the edge of the substrate 200 can be easily identified even after the photoresist layer 2 is formed. Also referring to FIG. 3, in this embodiment, multiple predetermined sibling recording areas 2 1 2 are preset on the substrate 200. The number of the predetermined recording areas 2 1 2 may depend on the area occupied by the predetermined recording area 212 itself. , And the positions of these predetermined recording areas 21 2 φ must depend on the supporting jigs to be matched with them. The relationship between the distribution position of the predetermined recording area 21 2 and the carrying jig will be explained in detail in FIG. 6. FIG. 4 shows the bearing of a stencil substrate according to the first embodiment of the present invention.

7837twf.ptd Page 11 1229863 V. Description of the invention (8) A schematic structural diagram of a jig, and FIG. 5 is a schematic view showing a combination of a stencil substrate and a supporting jig according to the first embodiment of the present invention. Refer to Figure 5. Please refer to FIG. 4 and FIG. 5 at the same time. The load-bearing jig is mainly composed of a jig body 300, a counterweight device a, and a central locking member 310. Among them, the fixture body 300 has a substrate positioning groove 302, and the substrate positioning groove 302 is suitable for fixing a substrate 2000. The distribution range of the above-mentioned substrate positioning grooves 302 must cover the centroid position of the fixture body 300 (the position marked by the "Shi"), and the center position of the substrate positioning grooves 3 02 is deviated from the rule. With the centroid position of the body 300, the center position of the substrate positioning groove 3202 is at an appropriate distance from the centroid position of the fixture body 300. In addition, the jig body 300 has a mark B on the edge of the substrate positioning groove 302, and the mark b is used to align with the registration mark 2008 on the substrate 200. The center of the groove of the base material positioning 302 has a protrusion 3 08. The protrusion 308 is, for example, a circular protrusion. The protrusion 3 08 is suitable for combining with the central locking member 3 1 0 to bond the substrate. The material 200 is fixed in the substrate positioning groove 3 02. In addition, since the protrusion 308 is located at the center of the substrate positioning groove 302, the centroid position of the protrusion 308 and the fixture body 300 will also be at an appropriate distance. ... the two bodies 300 have, for example, at least one unloading groove 304, and the unloading concave dagger 04 is, for example, located on the edge of the substrate positioning groove 302 to facilitate positioning the substrate 200 from the substrate. Take out from slot 302. At this time, the upper part of the jig body 300 is provided with at least-auxiliary positioning member 3G6, auxiliary positioning member 306. ^ The side wall of the substrate positioning groove 302 is used to fix the substrate positioning. The substrate 200 in the groove 302. The fixture body 300 in this embodiment has, for example, a slideway 312,

1229863 V. Description of the invention (9) A counterweight can be arranged on the road 312. This weight is placed on the fixture body 3 0 0 ', so that the center of gravity can be movably equipped with 3 0 0. There is a substrate of 2 0 0 and the wooden frame is set as "column '*"-g has been placed. = The counterweight is suitable for binding with the stop bolt 32 °? L, this position hole 318 312 ^ ^ ^ ^ 32〇ΤΛ ^ ^ ^ on the road 3 1 2. The combination of the ice ν /, Jiu only the hole 3 1 8 is positioned on the slide ", and the fixture body 300, for example, has at least one matching Cao / 314, this matching Heavy hole 3 " For example, the counterweight hole tool also has the function of counterweight. 1 Device A, which is for the load-bearing combination = the load-bearing fixture and the record between the load-bearing fixture and the substrate F will be described below. How to explain the recorded data on the predetermined recording area 21 2 of the substrate 20. 2 According to FIG. 5 ′, after the substrate 2 with a photoresist formed into 21 () is formed in the 2 m recess λ302, it is assisted. The hole 206 can rotate the orientation of the substrate τ, so that one of the pair of registration marks m on the substrate 20. is aligned with the mark B ′ on the bearing, and the alignment mark 208 is aligned with the mark B. After that, one of the reservations on $: 2 0 0 The center position of the region 2! 2 corresponds to the centroid position of the soil-bearing jig. Moreover, while the substrate 200 is rotating, the side wall of the substrate 200 will be on the auxiliary positioning member 3 06, such as convex With the assistance of the steel ball of the base positioning groove 3 0 2 etc., it is smoothly rotated to the positioning. After the orientation of the base material 200 is adjusted, the base material 200 is locked to the base material positioning recess by the central locking member 310. In the groove 3〇2. It is worth noting that 'the substrate 200 has grooves 204 (shown in FIG. 3), so

7837twf.ptd Page 13 I229863 V. Description of the invention (10) The heart locking member 3 1 〇 does not protrude from the surface of the photoresist layer 210. After the base material 200 is fixed to the base groove 302 of the heavy broken code 3U on the slideway 312, the position of the center of gravity of the bearing fixture with the base material I0 adjusted corresponding to the age center I 7 will correspond to Its work. Here, the weight center is adjusted by the weights 3 1 6 and the weight holes 3 1 4. If the I is connected to ensure the stability of the supporting fixture during subsequent rotation. 7 The load-bearing jig rotates around its centroid as its axis, and while rotating, for example, 侗 ΐ a laser exposure method forms a recording area 212 on the substrate 2 above the centroid position. It can be known from FIG. 5 that in this embodiment, a data recording area 2 1 2 is formed in the present embodiment. After that, the center locking member 0 can be opened and the substrate 2 can be rotated to perform multiple data recording areas. 2 丨 2, making.

In summary, the manufacturing method of the stencil substrate disclosed in this embodiment mainly includes the following steps: (a) providing a substrate, a photoresist layer has been formed on the substrate surface; (b) providing a carrier substrate The loading fixture has a substrate positioning groove, wherein the distribution range of the substrate positioning groove covers the centroid position of the fixture body, and the center position of the substrate positioning groove is deviated from the centroid of the loading fixture. Position; (c) fixing the substrate in the positioning groove of the substrate, so that the center of gravity of the carrying jig carrying the substrate is located at the centroid position of the carrying jig; (d) placing the carrying jig at the centroid position Axis rotation; and (e) forming a data recording area on the substrate above the centroid position. After step (e), if it is necessary to continue the production of other data recording areas, perform step (f) to adjust the orientation of the substrate in the substrate positioning groove; and (g) form the substrate above the centroid position Data recording area. In this way, it can be on the same substrate

7837twf.ptd Page 14! 229863 '------ 5. Description of the invention (11) ^' '-Multiple data recording areas are formed on the.

The diagram shows the structure of the bearing structure according to another embodiment of the first embodiment of the present invention. Please refer to Figure 4, Figure 5, and Figure 6 at the same time. The bearing fixture shown in Figure 6 is structurally similar to Figure 4, but the difference is in the shape of the raised 308, And omitting the design of the alignment mark 208 and the mark B, or the auxiliary positioning member 306 can also be omitted. In Fig. 6, since the projection 308 is designed as a polygonal projection, the central through hole on the substrate must also be modified to be a polygonal through hole. When the substrate is placed in the substrate positioning groove 302, the protrusion 308 will be matched with the polygonal through hole of the substrate 'to achieve the purpose of automatic alignment. Here, the present embodiment is described by taking the case of making four data recording areas as an example, but it is not limited that the projection 3 0 'of the present invention is only applicable to the production of four data s recorded areas. It can be seen from FIG. 6 that the protrusion 3 0 8 ′ is, for example, a quadrangular design, and the central through hole on the base material is also changed to a quadrangular through hole. With the combination of the quadrangular protrusions and the quadrangular through holes, there are only four kinds of placement of the substrate in the substrate positioning groove 3 02, so the positioning process of the substrate in the substrate positioning groove 302 will become very simple. ,fast.

FIG. 7 is a schematic structural diagram of a jig for carrying a stencil substrate according to a second embodiment of the present invention. Referring to FIG. 7, the load-bearing jig is mainly composed of a jig body 400 and a counterweight device A. The jig body 400 has a substrate positioning groove 402a, and the substrate positioning groove 402a The distribution range covers the centroid position of the fixture body 400 (the position marked by the word "十"). The center position of the substrate positioning groove 4 0 2 a is deviated from the centroid position of the fixture body 4 〇 0, so the center position of the substrate positioning groove 4 0 2 a and the fixture body

7837twf.ptd Page 15 1229863

V. Description of the invention (12) The centroid positions of 4 0 0 are separated by an appropriate distance. The above-mentioned substrate positioning groove 402a has a protrusion 408 at the center position of the substrate positioning groove 402a. This protrusion 408 can cooperate with the center through hole of the substrate to avoid the substrate in the substrate positioning groove 402a. Appropriate sliding or even taking off the substrate positioning groove 402a ° The substrate positioning groove 402a has at least one vacuum through hole 410 at the bottom, and the implementation method is, for example, a ring is set at the bottom of the substrate positioning groove 402a A vacuum through hole 410 is formed at the bottom of the annular groove 402b. In addition, the "rule & fixture body 40 0 has a mark B on the edge of the substrate positioning groove 4 02a." This mark β is used to match the registration mark 208 (shown in Fig. 3) on the substrate 200. Bit.

For example, the fixture body 4 0 0 has a slide rail 4 1 2. A weight device A can be disposed on the slide rail 412, and the weight device a is movably disposed on the fixture body 400. To maintain the center of gravity of the jig body 400 carrying the base material at the centroid position of the jig. The above-mentioned counterweight device A is composed of, for example, a counterweight 416 and a stopper bolt 42. The 'weight weight baby code 416' has, for example, a positioning hole 418, and the positioning hole 4118 is suitable for combination with the stop payment * tired plug 420, and the weight weight 416 is suitable for being disposed on the slide rail 412, and the stop weight The combination of the bolt 42 and the positioning hole 418 is positioned on the slide C4 1 2 In addition, the fixture body 400 has, for example, at least one counterweight hole

414. This counterweight hole 414 is, for example, adjacent to the counterweight device a, which also has a counterweight function for the load-bearing fixture. ★ There are parts about the unloading groove 404 and the auxiliary positioning member 406, which are the same as the unloading groove 304 and auxiliary positioning disclosed in FIG. 4 and will not be repeated here.

7837twf.ptd Page 16 1229863 V. Description of the invention (13) Figure 8 shows a schematic diagram of the structure according to the jig. Please refer to the ^ figure, = the load is mainly composed of the positioning recess "2 r:" of a base of the load fixture and the example of Shima Feng's example, and a counterweight agricultural home A. Among them, the through hole 510 and the slideway Γ = Groove 5 ° 2b, unloading concave side ^ No. 518 is a dual hole 514, a counterweight 516, a positioning hole 5 1 8 and a stop screw 52〇4. This embodiment and the first Second; Shi; the same, cancel the projection 408 on this body 5 00: _ /, the point is: the fixture used at least one ^ from 408 and the design of the auxiliary positioning member 506, and the foundation The material lock / _㈣-side lock mechanism _ is shown in Figure 8. The detailed structure of the side lock member in Figure 8 is shown in the following figure: i: picture, the side lock mechanism 60 in this embodiment 0 is, for example, composed of one surname and two, and a pin 606, in which the positioning bolt 602 is a recessed portion 6023, and the other end has a tapered surface 602b. In order to let the side locking mechanism 60 〇Possible to fix the base material positioning: the base material in the groove 502a. In this embodiment, a bolt hole 604 and a groove 6 are opened at the side of the fixture body 500, which is adjacent to the side wall of the base material groove 502a. 8 The bolt holes 604 are, for example, located on the surface of the fixture body 500, and the groove 608 is, for example, located on the side wall of the substrate positioning groove 502a. The bolt holes 604 and the groove 608 are under treatment. The tool body 500 is connected to each other, and the above-mentioned pin 606 is assembled in the channel 608. When fixing the base material, it is only necessary to use the work to rotate the positioning bolt 602 into the bolt hole 604, and the positioning bolt 602 is used. The tapered surface 602b pushes the pin 6 06, so that it extends along the channel 6 08 to the substrate positioning groove 5 0 2 a to achieve the function of side locking. 7837twf.ptd No. 17 Page 1229863 V. Description of the invention (14) Figure 10 is a schematic diagram showing the structure of another jig substrate according to the third embodiment of the present invention. Please refer to Figure 丨 0, which is shown in this figure. The structure of the load-bearing jig is similar to that of FIG. 8 except that the base groove 5 0 2 a is a circular groove 5 0 2 c at the bottom and the shape of the side locking member 700 is The assembly position on the fixture body 500. In this embodiment, the 'side-side locking member 7 00 is, for example, a locking screw, which can be removed from the fixture body 500 The side extends into the side wall of the substrate positioning groove 5 0 2a to lock the substrate in the substrate positioning groove 50 2a. FIG. 11 shows the manufacturing process of the optical disc motherboard according to the fourth embodiment of the present invention. A schematic flow chart. Please refer to FIG. 11. In the manufacturing method of the optical disc mother board of this embodiment, a substrate (S800) is first provided, and a photoresist layer has been formed on the surface of the substrate. Then a supporting fixture (S 8 0 2), the loading fixture has a substrate positioning groove, wherein the distribution range of the substrate positioning groove covers the centroid position of the fixture body, and the center position of the substrate positioning groove is deviated from that of the loading fixture. Centroid position. Then, the substrate is fixed in the substrate positioning groove of the supporting fixture (S 804), so that the center of gravity of the supporting fixture carrying the substrate is located at the centroid position of the supporting fixture, and then the bearing The fixture rotates with the centroid position as the axis (S 8 0 6) 'and forms a data recording area (S 8 0 8)' by laser exposure. Among them, the data | recorded area is located at the centroid position of the bearing fixture Up. After forming a data recording area on the substrate, then adjust the orientation of the substrate in the groove of the substrate and repeat step f of the above-mentioned rotation and laser exposure to form a plurality of data recording areas (S810). In step (S81〇), the elementary substrate is produced. After the fabrication of the stencil substrate is completed, a metal layer is then formed on the stencil.

1229863 V. Description of the invention (15) On the base material (S812), this forms a first metal (e 1 ectro-p second metal peeling (S814)). In the example, the metal layer is peeled off. Although this However, it does not use the essence of the present invention, the metal-protecting layer system and the 1 ati ng layer. This peeling and engraving process is followed by the invention that the metal layer is formed in a way that limits the scope of the god and the scope, such as sputtering. (Usually a nickel metal layer) is formed on the surface of the stencil substrate, and the surface of the stencil substrate is conformal, and then a metal layer with a flat upper surface and a thicker thickness is formed by, for example, an electric front. Finally, the metal layer separated from the stencil substrate is an optical disc mother board. The method of peeling the f material of this implementation board is, for example, firstly removing the base material from gold and then using a chemical agent. The photoresist layer is peeled from the metal layer and the first embodiment to the fourth embodiment are disclosed as above. = Ming, anyone familiar with this Artists, without leaving the perimeter, should be included in the change and the run #.

7837twf.ptd Page 19-1229863 Brief description of the drawings. Figure 1 shows the structure of a stencil substrate in the conventional micro-optical disc manufacturing process. Figures 2 and 3 show a preferred implementation according to the present invention. An example of the structure of a stencil substrate in a micro-optical disc manufacturing process; FIG. 4 is a schematic diagram of the structure of a carrying fixture of the stencil substrate according to the first embodiment of the present invention; and FIG. 5 is a schematic diagram of the substrate according to the first embodiment of the present invention. Schematic diagram of a combination of a stencil substrate and a carrier fixture; FIG. 6 shows a schematic structural diagram of another susceptor according to the first embodiment of the invention; FIG. 7 shows a stencil substrate according to a second embodiment of the invention Figure 8 is a schematic structural diagram of a load-bearing jig; Figure 8 is a schematic diagram showing a structure of a load-bearing jig that is a rigid substrate according to a third embodiment of the present invention; Figure 9 is a detailed structure of a side locking member in Figure 8 FIG. 10 is a schematic diagram showing the structure of a carrier fixture of another stenciled substrate according to the third embodiment of the present invention; and FIG. 11 is a schematic diagram showing the manufacturing process of an optical disc mother board according to the fourth embodiment of the present invention. . Description of the drawings: 1 0 0, 2 0 0: substrate 1 0 2, 2 1 0: photoresist layer 1 0 4, 2 1 2: data recording area

7837twf.ptd Page 20 1229863 Brief description of the drawing 2 0 2: Central through hole 2 0 4: Groove 2 0 6: Auxiliary hole 2 0 8: Registration mark 2 1 2: Scheduled recording area 300, 400, 500: Fixture body 3 0 2, 40 2a, 5 02a: substrate positioning grooves 304, 404, 504: unloading groove 3 0 6, 4 0 6: auxiliary positioning members 308, 308 ', 408: protrusion 3 1 0 : Central locking members 312, 412, 512: Slideways 314, 414, 514: 酉 Heavy weight 孑 L 316 > 416, 51 6: Counterweights 3 1 8, 4 1 8, 5 1 8: Positioning holes 320, 420, 520: Stop bolts 402b, 5 02b: Ring groove 4 1 0, 5 1 0: Vacuum through hole 502c: Round groove 5 0 6: Positioning bolt 6 0 0, 7 0 0: Side Side lock member 6 0 2: Locating bolt 6 0 2 a: Recessed portion 6 0 2 b: Tapered surface

7837twf.ptd Page 21 1229863 Brief description of the drawing Bolt hole Slot channel -S814: Process steps of optical disc motherboard 604 606 608 S800 A: Counterweight device B: Mark

IBB 7837twf.ptd Page 22

Claims (1)

Ϊ229863 / 、 Application patent scope 1 · A material has a positioning groove for a carrier material with a base material, wherein the position of the base material from the base system is-the weight is loaded on the base material center position; • If applied, where 3 • If applied, where the 4 • If applied, where the edge of the substrate 5 • If applied, where the heart is located. 6. If it is applied for, the distribution and positioning recesses of the ruling fixture base body penetrating the jig package body deviate from the device, and the ruling and locking structure substrate lock please the patent center to ask the patent to enclose the patent substrate 〇 Please patent the base material and the supporting fixture is suitable for fixing—the base material, the meaning, and the substrate is provided with a photoresist layer, the stencil includes: the fixture body has a substrate positioning groove, the meaning The range is a convex position at a center position of a centroid position groove of the fixture body, and the centroid position of the convex fixture body; Λ can be movably arranged on the fixture body to The center of gravity of the fixture body is maintained at the shape of the load-bearing fixture, and the central locking member is adapted to be fixed to the protrusion in the positioning groove of the base material. The bearing holes of the stencil base material described in the first item of the scope include circular through holes and polygonal through holes. The bearing rule of the stencil substrate as described in the second item of the scope includes circular protrusions and polygonal protrusions. The supporting rule of the stencil substrate according to the scope item 1 includes at least one auxiliary hole. The auxiliary hole is adjacent to the supporting rule of the stencil substrate according to the scope item 1 and includes a groove. The groove is located on the substrate. Wherein, the supporting substrate of the stencil substrate described in item 1 of the patent scope further includes a plurality of alignment marks. These alignment marks are 7837twf.ptd Page 23 1229863 6. The scope of patent application is located on the edge of the substrate. 7 · The bearing rule of the stencil substrate as described in Item 丨 of the declared patent scope-wherein the 4 / σ body further includes at least one counterweight hole, which is adjacent to the counterweight device. 8. The support of the rigid substrate according to item 1 of the scope of the patent application, wherein the β-hai / α tool body further includes at least one unloading C3 groove, and the unloading groove is located on the edge of the positioning groove of the substrate 9 The load-bearing jig for a stencil substrate as described in the scope of the patent application, wherein the counterweight device includes: a counterweight, the counterweight has a positioning hole: and a stop bolt suitable for connection with the Fixing hole combination. 1 0 · The jig for carrying a stencil substrate as described in item 9 of the scope of the patent application, wherein the jig body further includes a slideway, wherein the counterweight is arranged on the slideway and the stopper is used. The auxiliary bolt positions the counterweight on the slide rail. 1 1 · The load bearing treatment of the stencil substrate according to item 1 of the patent application scope further includes at least one auxiliary positioning member, which is disposed at. On the body of the fixture, and the auxiliary positioning member protrudes from the side wall of the substrate positioning recess to fix the substrate. 1 2 · The carrying fixture of the stencil substrate as described in item 1 of the scope of patent application, further comprising at least one positioning bolt, the positioning bolt is arranged on the fixture body, and the anchor bolt is protruded from the base The material locates the sidewall of the groove to fix the substrate. Suitable for fixing a substrate’the 1 3 · —bearing jig for a kind of rigid substrate 7837twf.ptd Page 24 1229863 Scope of patent application A photoresist layer is arranged on the substrate, and the supporting fixture of the stenciled substrate includes: a fixture body having a substrate positioning groove, and the distribution range of the substrate positioning groove covers the fixture A centroid position of the body 'The bottom of the substrate positioning groove has at least one vacuum through hole, wherein a center position of the substrate positioning groove is deviated from a centroid position of the jig body; and a counterweight device, It is movably arranged on the jig body, so that the center of gravity of the jig body carrying the substrate is maintained at the centroid position. 1 4. The carrying fixture of the stencil substrate according to item 丨 3 of the scope of patent application, wherein the substrate further includes at least one auxiliary hole, and the auxiliary hole is adjacent to φ on the edge of the substrate. 15. The bearing fixture of the stencil substrate according to item 3 of the patent application scope, wherein the fixture body further includes at least one counterweight hole, the counterweight hole is adjacent to the counterweight device. 16 · The carrying jig for a stencil substrate as described in item 3 of the patent application scope, wherein the substrate further includes a plurality of alignment marks, and the alignment marks are located on the edge of the substrate. 17 • The fixture for carrying a stencil substrate as described in Item 13 of the scope of patent application, wherein the fixture body further includes at least / unloading grooves, and the unloading grooves are located on the edges of the substrate positioning grooves. 1 8 · As described in the scope of the patent application No. 丨 3, the bearing fixture of the stencil substrate, wherein the bottom of the positioning groove of the far substrate has an annular groove, and the bottom of the annular groove has the vacuum through hole. 1 9 · Carrying rule of the stencil substrate as described in item 丨 3 of the scope of patent application 7837twf.ptd Page 25 1229863 6. Scope of patent application, wherein the bottom of the substrate positioning groove has a / circular groove 'and the bottom of the circular groove has the vacuum through hole. 20 · The load-bearing jig for a stencil substrate as described in Item 13 of the scope of patent application, wherein the counterweight device includes: a counterweight knot, the counterweight has a positioning hole, and a stop bolt , Suitable for combining with the positioning hole. 2 1 · The fixture for carrying a stencil substrate as described in item 20 of the scope of patent application, wherein the fixture body further includes a slideway, wherein the counterweight is arranged on the slideway, and The stopper bolt positions the counterweight on the slideway. 2 2 · According to item 13 of the scope of the patent application, the supporting fixture of the stencil substrate further includes at least one auxiliary positioning member, the auxiliary positioning member is arranged on the jig body, and the auxiliary positioning member is protruding Position the sidewall of the groove on the substrate to fix the substrate. 2 3 · The carrier of the stencil substrate as described in item 13 of the scope of the patent application, further includes at least one positioning bolt disposed on the fixture body, and the positioning bolt is protruded from the substrate. Position the sidewall of the groove to fix the substrate. 24. — A method for manufacturing a stencil substrate, comprising: (a) providing a substrate, a photoresist layer has been formed on the surface of the substrate; (b) providing a carrying fixture, the carrying fixture has a substrate Positioning slot "where the distribution range of the positioning groove of the substrate covers the" position "of the center of the fixture body and a center position of the positioning groove of the substrate deviates from the centroid position of the carrier, page 7837twf.ptd 1229863 6. The scope of the patent application (C) fixes the substrate in the positioning groove of the substrate, so that the center of gravity of the carrying fixture carrying the substrate is located at the centroid position of the carrying fixture; d) rotating the loading fixture around the centroid position; and (e) forming a first data recording area on the substrate above the centroid position. 2 5. The method for manufacturing a stencil substrate as described in item 24 of the scope of patent application, wherein after the first recording area is formed, the method further includes the following steps: (f) adjusting the orientation of the substrate in the substrate positioning groove And (g) the substrate above the centroid position forms a second data recording area. 2 6 · The method for making a stencil substrate as described in item 25 of the scope of patent application, further comprising repeating steps (f) to (g) at least once. 2 7 · The method for making a stencil substrate as described in item 25 of the scope of the patent application, wherein the first poor material recording area and the second poor material recording area are formed by a laser exposure and a development method. . 2 8 · — A method for manufacturing an optical disc mother board, comprising: (a) providing a substrate, a photoresist layer has been formed on the surface of the substrate; (b) providing a supporting jig, the supporting jig having a base Material positioning grooves, wherein the distribution range of the substrate positioning grooves covers a centroid position of the fixture body, and a center position of the substrate positioning grooves deviates from the far centroid position of the loading fixture; (c) fixing the substrate in the substrate positioning groove, so that the center of gravity of the carrying jig carrying the substrate is located at the centroid position of the carrying jig 7837twf.ptd Page 27 1229863 6. Place the patent application scope on; (d) Make the load fixture rotate around the centroid position as the axis; (e) The substrate above the centroid position forms a data recording area (F) adjusting the orientation of the substrate in the substrate positioning groove; (g) repeating steps (e) to (f) at least once, each time forming another data recording area on the substrate, The substrate is further made into a stereo substrate; (h) a metal layer is formed on the stereo substrate; and (i) the metal layer is peeled from the stereo substrate, wherein the metal layer is a disc master board. 2 9. The manufacturing method of the optical disc mother board according to item 28 of the scope of the patent application, wherein the forming method of the metal layer includes: forming a first metal layer on the surface of the substrate of the stencil, and the first metal layer is connected with The surface of the stencil substrate is conformal; and a second metal layer with a flat upper surface is formed on the first metal layer. 30. The method for manufacturing an optical disc mother board according to item 28 of the scope of the patent application, wherein the manner of peeling the metal layer from the substrate of the stereotype includes: peeling the metal layer and the photoresist layer from the substrate. And stripping the photoresist layer from the metal layer. @ 3 1. The manufacturing method of the optical disc mother board according to item 28 of the scope of patent application, wherein the first data recording area and the second data recording area are formed by a laser exposure and a development method. 7837twf.ptd Page 28