TW200411658A - Fixture for holding a master substrate, method for fabricating a substrate having a pattern thereon and a stamper - Google Patents

Abstract

A fixture for holding a master substrate having a central through hole and a photo-resist layer on the surface is provided. The fixture comprises a main body, a weight and a central lock element. The main body having a positioning cavity further comprises a protrusion disposed at the center of the positioning cavity. The protrusion deviates from the center of the gravity of the main body. The weight is movable to adjust the center of the gravity of the main body. Besides, the weight is disposed on the main body. The central lock element is suitable to connect with the protrusion disposed at the center of the positioning cavity. In addition, the fixture can be used to fabricate a substrate having a pattern thereon and a stamper.

Description

200411658 V. Description of the invention α) The technology to which the invention belongs The present invention relates to a method for making a substrate of a stereotype and a method for making a disc master. The invention relates to a method for carrying a substrate that can increase productivity. Presentation, special ^ substrate manufacturing method and optical disc mother board manufacturing method. Eight prior art ^ f films have gradually replaced a traditional magnetic storage medium because of its advantages such as large storage capacity, easy storage, long shelf life ^, low cost, and easy damage to data, and become one of the indispensable media for modern people. , Such as CD-Audi〇 for music, Video CD for image and music, CD-R for recordable discs, and read-only storage of computer files Memory discs, etc. Due to the maturity of the manufacturing technology of laser optoelectronic products and the second technology of multimedia, the development direction of optical storage media in the future will be small and small, so the size of optical discs is in full swing. Maid Figure 1 shows the structure of the stereo substrate in the conventional micro-optical disc manufacturing process. Please refer to Figure 1 'for a conventional micro-optical disc to make its stereotype substrate ^ =, usually a circular glass substrate with a diameter of 24 cm or 20 cm, and spin coating, soft baking , Hard baking and other procedures to form a uniform thickness of the photoresist layer 102 on the surface of the substrate. Then, the base material 100 is rotated around its centroid, and the material 7 is deposited on the photoresist layer 102 by means of laser exposure. After laser exposure, the "resistive layer 102 still needs to undergo a development step to form a data recording area 104. This data is 7837t.wf.ptd. Page 5 200411658% f V. Description of the invention (2 ) The area i0t is mainly composed of pits or grooves (pits / grooves), and these pits or grooves usually form a spiral recording track. In the conventional stereotype manufacturing process, since the data recording area of the micro-optical disc only needs to be] cm to about 4 · 5 cm, the conventional stereotype manufacturing process only uses a small part of the substrate ~~ other areas are not effective It is used to the ground, so after the stamped substrate is punched, the output of waste will be quite large. In addition, the conventional stenciling process can only create a data recording area of a micro-optical disc on a substrate, and cannot create multiple data recording areas on the same substrate, so it is relatively time-consuming to produce. Internal invention of the invention Therefore, the object of the present invention is to provide a supporting fixture for a rigid substrate, which can make the laser exposure process form multiple data recording areas at different positions on the same substrate, so as to use the substrate more effectively. Another object of the present invention is to provide a method for manufacturing a rigid substrate, which can form a plurality of data recording regions at different positions on the same substrate, so as to reduce the output of the waste material after the substrate is punched, thereby reducing the cost. Yet another object of the present invention is to provide a method for manufacturing an optical disc mother board. The gate guard makes multiple micro-disc mother boards' to make the production and development of the micro-disc mother board faster. In order to achieve the above and other objectives, the present invention proposes a bearing substrate with a mouthpiece suitable for fixing a substrate having a central through hole and a photoresist layer disposed on the substrate. The supporting fixture of the base material is mainly composed of a fixture body, a counterweight device, and a central locking member.

V. Description of the invention (3) Among them, the distribution range of the fixture J is; the center position is at the center position; it is equipped with a supporting base; and the solid-fixed base material implements a polygonal through hole or a polygonal groove. The central locking structure is composed of a dacturing jig and a suitable substrate. The center position of the bottom of the sub-groove of the sub-groove is biased to the fixture and is held in the centroid position. This implementation is a circular groove, bevel L. In these examples, the substrate is positioned while the annular groove or vacuum through hole The body can have a substrate positioning groove; the letter Yun has a female touch ^ This substrate positioning groove has a centroid position of the body, and the middle material of the substrate positioning groove: the center of gravity of the fixture body is maintained at : In the groove. In combination, the upper protrusion is used to lock the substrate 2. The central through hole on the substrate is, for example, a circular through hole or =, and the protrusion in the substrate positioning groove is, for example, a circular protrusion. And so on. In addition, the substrate has, for example, one: it is located at the center of the substrate, and its role is to prevent cattle from protruding from the surface of the photoresist layer. To sum up, his purpose is to provide a substrate with a rigid substrate on which a photoresist layer is arranged on a solid surface. The above-mentioned carrier / orifice is mainly composed of a fixture body and a counterweight device » The / u tool body has a substrate positioning groove, and the substrate setting range covers the centroid position of the fixture body. The substrate positioning ^ has at least one vacuum through hole, and the substrate positioning groove is in the center of the tool body. The centroid position of the center; and the counterweight device can be moved on the ground so that the center of gravity of the jig body carrying the base material can be maintained. The groove bottom has, for example, a ring shape or

The above vacuum at the bottom of the V-shaped groove is more effective for holding the substrate. 200411658 ι

5. Description of the invention (4) " '-^ In this embodiment, for example, the substrate has at least one auxiliary system adjacent to the edge of the substrate, and the auxiliary hole is used to rotate the substrate to change the orientation in the positioning groove. In addition, the substrate has, for example, registration marks on the edge of the substrate, and these registration marks are helpful for the base work. In this embodiment, the counterweight device is composed of, for example, a counterweight bolt, and the counterweight has a positioning hole, for example, which is combined with the above-mentioned stop bolt. In addition, the jig body / moon track 'is provided on the slide rail, and the bolt is positioned on the slide rail. In this embodiment, the jig body has, for example, at least one I ′ and two LI: if it is adjacent to the weight device, it is unloaded from the load bearing jig = the jig body has at least-unloaded from the substrate positioning groove f material positioning recess On the edge of the groove, the auxiliary positioning member ^ / σ /, of this embodiment 7 can be added to the fixture body to protrude from the base material: the positioning pin, the auxiliary positioning member or the fixed base material. The side wall of the vertical groove is used to fix the substrate. It is mainly used to achieve the above-mentioned method. The present invention provides a facet with the following steps: (a) Provide-the substrate has -Base 枓 κ f resistance layer; (b) providing a groove for carrying the fixture, wherein the hole of the substrate positioning groove, for example, has a plurality of fixed codes located on the substrate after the rotation and only one The positioning hole has, for example, a counterweight 孑 L, which also has a loading groove, which is used to arrange the substrate with at least one pin, such as a plate substrate in a positioning groove. Material table, the distribution range of this bearing rule

I V. Description of the invention (5)

Deviate from the shape of the supporting jig = and the central position of the positioning groove of the substrate is in the groove, so that A f is supported, (c) the substrate is fixed at the position of the center of the positioning recess of the substrate; The center of gravity of the jig is in the position of bearing the jig and being in the centroid position. = The fixture rotates with the centroid position as the axis. “X In this embodiment, the upper and lower sides of the / 形成 material form a first-recorded area. The production method of the material after the formation of the field order is in the groove of the first-record area. Orientation; Second, If :, ⑴ Adjust the substrate in the substrate positioning concave data recording area. This J, can be shaped :, the substrate is formed above the position-second, multiple data recording areas are formed on the substrate. : Ϊ́ Ϊ 其他 and other objectives, the present invention proposes-the potential of a kind of optical disc mother board, the following steps: (a) provide-a substrate, the surface of the substrate has two, "resistance layer," provided-bearing fixture This bearing fixture has: body: i vertical grooves, where the distribution range of the substrate positioning grooves covers the mouth: the centroid position of the body, and the center position of the substrate positioning grooves is deviated from the ^ loading fixture Centroid position; (c) fixing the substrate to the substrate positioning groove 'so that the center of gravity of the supporting jig carrying the substrate is located at the position of the centroid of the supporting jig; The position is the axis rotation; the substrate above the centroid position forms a first data recording area; the adjustment, the substrate at Orientation in the material positioning groove; (g) forming a second data recording area on the substrate above the centroid position; (h) repeating steps (e) to 0) to once to make the substrate into a stereotype substrate (丨) formation—the metal layer on the stereotype substrate; and (j) peeling the metal layer from the stereotype substrate, and the $ metal layer is a disc master. ^ 200411658 t V. Description of the Invention (6)- ---- In this example, the metal layer is formed, for example, by first forming a first all-layer layer surface, ... the metal layer is formed into a shape with the surface of the substrate of the stereotype, and then the metal layer is formed by, for example, electroforming. The surface layer is on the first metal layer. Ding Yi & Brother Yi Jin will odor :: 'The method of peeling the metal layer from the stereotype substrate is, for example, peeling off the metal layer first. In the manufacturing method of the photoresist layer and the two above-mentioned stencil substrates and optical disc mother boards, the first note: the data recording area is formed by, for example, -laser exposure and one development method.目的 Other purposes, features, and advantages can be explained in more detail, such as 车 Chefujia ' Then, ti :: t is used to fix the stencil substrate to the load-bearing fixture, the centroid of π # / Q on a certain material is rotated as the axis, and the laser exposure process is used to : m—the material recording area ', then adjust the stencil substrate to carry u:?, repeat the process of rotation and laser exposure to pay for the stencil base material. The stencil substrate and the bearing fixture mentioned above, λ ί Temple Not to mention, this embodiment will sequentially explain the fine structure of the stencil base material and the carrying tool as follows. Figures 2 and 3 are not the structure of the micro-optical disc manufacturing user tf according to an embodiment of the present invention. First, please refer to Figure 2. The substrate 20 () used in this embodiment is, for example, a glass substrate, and the center position of the substrate 20 () ΗΠΗ 7837twf.ptd Page 10 200411658 V. Description of the invention (7) The groove 204, at least one auxiliary hole 206 is provided with a central through hole 202, and a plurality of alignment marks 208. Among them, the central through hole ^ ⑽ Example 2: A circle is a through hole such as a polygon, and only circular through holes are illustrated in this figure as an example. The grooves 204 on the substrate 200 are, for example, located around the center through hole 202. The auxiliary hole 206 is, for example, adjacent to the edge of the substrate 200 or other appropriate positions. The alignment mark 2 08 is, for example, located at the edge of the substrate 200, and the alignment mark 208, for example, can separate the edge of the substrate 200 into multiple equal parts. In this figure, 8 equal parts cannot be drawn The alignment mark of type 2 08 is taken as an example. Next, referring to FIG. 3, a photoresist layer 210 is formed on the surface of the above-mentioned substrate 200. The photoresist layer 210 is, for example, spin coating or soft baking (s0ft bake). ), Hard baking ("Η bake), and other programming systems:! Γί: Γ00 on the surface to form a so-called stereotype substrate (the stencil substrate here has not yet completed the stereotyped action). As can be seen from the figure, the center runs through The photoresist layer 21 0 is not distributed on the holes 2 ^ 2 recessed hole 204 and the auxiliary holes 2β. The photoresist layer 21o is usually a transparent or translucent material, so the alignment of ^, and winter The mark 2 0 8 can be easily identified even after the photoresist layer 2 1 0 is formed. N ΐ = Refer to FIG. 3 'This embodiment presets a plurality of pre 2 = 2, f 1 2 on the substrate 2 0, as described above. The number of scheduled recording areas 2 1 2 may depend on the area occupied by the scheduled recording ^ ⑽ / body, and the positions of these scheduled recording areas 2 1 2 must be determined by the distribution locations of the female box a recorded area 212洗 承 # 、 / 及 载: 具 而 疋. # About 预 疋. The detailed connection of Geming Zhixing's bearing fixture will be detailed in Figure 6 and Figure 4 is shown in accordance with Hair Sun and Moon - of the rigid carrier substrate of Example

200411658 V. Description of the invention (8) The schematic diagram of the structure of the fixture, and Figure 5 shows the schematic diagram of the combination of the stencil base material and the bearing fixture according to the example January / Day; Please refer to FIG. 4 and FIG. 5 at the same time. The load-bearing jig is mainly composed of the main body 300, the counterweight device eight, and a central locking member Chuan. Among them, the jig body 300 has a substrate positioning recess Slots 302 and 302 are suitable for fixing bismuth 9 η ^ μ, +, and ι, and the soil is a concave material 2 0 0. The decisive range of the above-mentioned substrate positioning groove 3 002 must cover the centroid position of the fixture body 3000 (the position protected by the "ten"), and the center position of the substrate positioning groove 3 02 It is deviated from the centroid position of the body 300, so the center position of the substrate positioning groove 302 is at an appropriate distance from the centroid position of the fixture body 300. In addition, the fixture body ^ 〇〇 has a mark β on the edge of the substrate positioning groove 302, and the mark B is used to align with the registration mark 208 on the substrate 20G. The substrate positioning 3 02 has a protrusion 308 at the center of the groove. The protrusion 3 0 8 is, for example, a circular protrusion. The protrusion 3 0 8 is suitable for combining with the central locking member 3 1 0 The substrate 200 is fixed in the substrate positioning groove 300. In addition, since the protrusion 308 is located at the center of the substrate positioning groove 302, the centroid position of the protrusion 308 and the fixture body 300 will also be at an appropriate distance. The jig body 300 has, for example, at least one unloading groove 3 04, and the unloading groove 3 04 is, for example, located on the edge of the substrate positioning groove 300, so as to facilitate the removal of the substrate 200 from the base. Remove the material positioning groove 3 02. In addition, the fixture body 300 is configured with at least one auxiliary positioning member 3 0β, for example, and the auxiliary positioning member 3 06 is protruded from the side wall of the substrate positioning groove 300 to fix the substrate positioning. The substrate 2 0 0 in the groove 30 2. The fixture body 300 of this embodiment has, for example, a slide rail 3 1 2.

7837twf.ptd Page 12 200411658 V. Description of the invention (9) A tongue can be placed on the road 312 and placed on the fixture body 300. The two counterweight device A is movable to maintain the center of gravity of 300. = A jig body A carrying a substrate 200 is set by a counterweight, for example, at a position. In the above-mentioned counterweight basin, the counterweight is composed of a stop bolt 320.丄 IS has a positioning hole 318, which is a combination of / Λ, and ... code 316 is suitable for being arranged on the slideway, f 3 1 2. Ί The combination of the stop bolt 320 and the positioning hole 3 1 8 is positioned on the slide ^. The jig body 300 has, for example, at least one counterweight hole and Π ′ compound and two right-hand tongues 314 are adjacent to the counterweight device, for example. A, it also has the function of counterweight for the bearing fixture. The person touches t i t, the description of the carrying jig, and between the carrying jig and the substrate 200, and T will explain how to record data on the predetermined recording area 2 1 2 of the substrate 200. ^ I ,,, and 5, after placing the base material 200 formed with the photoresist into 2 丨 0; after the geometries are recessed in Cao 302, the orientation of the base material 200 can be rotated through the auxiliary hole 206, One of the pair of registration marks 208 on the substrate 2000 is aligned with the mark B on the supporting jig, and after the registration mark 208 is aligned with the mark B, one of the substrates 200 is scheduled. The center position of the recording area 212 corresponds to the centroid position of the supporting fixture. In addition, while the substrate 200 is rotated, the side wall of the substrate 2000 is smoothly rotated to the auxiliary positioning member 300, such as a steel ball protruding from the substrate positioning groove 302, to Positioning. After the adjustment of the orientation of the substrate 200 is completed, the substrate 200 is then locked in the substrate positioning groove 302 by the central locking member 310. It is worth noting that since the substrate 200 has grooves 204 (shown in FIG. 3), the 7837twf.ptd page 13

200411658 l V. Description of the invention (10) The heart locking member 310 does not protrude from the surface of the photoresist layer 210. After the substrate 200 is fixed in the substrate positioning groove 3202, the position of the heavy missing code 316 on the slideway 312 is matched with a counterweight hole, so that the bearing of the substrate 200 is loaded. Center of gravity ^, knife-shaped center position. Here, the method of precisely weighting the weights 316 and the weight holes is mainly to ensure the stability of the load bearing and the subsequent adjustment of the center of gravity of the human system, 目 目 ,, and 甘. :: The carrier b is rotated on its centroid as its axis ', and the laser beam is exposed to the substrate 2 above the centroid position while rotating while the material is centered ^^ the material recording area 212'. It can be seen from FIG. 5 that in this embodiment, a data recording area 212 is completed in this embodiment. After that, the central locking member can be made and the substrate 200 can be rotated to perform multiple data recording areas 212, In summary, the manufacturing method of the stencil substrate disclosed in this embodiment mainly includes the following steps: (a) providing a substrate, two photoresist layers have been formed on the substrate surface; (b) providing a bearing Fixture, the load-bearing fixture has two substrate positioning grooves, wherein the distribution range of the substrate positioning grooves covers the centroid position of the fixture body, and the center position of the substrate positioning grooves is offset from the bearing & ... the centroid position of the fixture; (c) fixing the substrate in the positioning groove of the substrate so that the center of gravity of the carrying fixture carrying the substrate is located at the centroid location of the carrying fixture; (d) making the carrying fixture Having the centroid position as the axis of rotation; and (e) forming a data recording area on the substrate above the shape / position. To the right of step (e), to continue the production of other data recording areas, then perform step (f) to adjust the orientation of the substrate in the substrate positioning groove; and (g) the substrate formation data at the centroid position Recording area. In this way, multiple data recording areas can be formed on the same substrate 200411658 V. Invention Description (π) " " " ' Figure 6 is a schematic structural view of another load-bearing jig according to the first embodiment of the present invention. Please refer to Figure 4, Figure 5, and Figure 6 at the same time. The bearing fixture in Figure 6 is similar in structure to Figure 4, but the difference is in the shape of the projection 3 08, and The omission of the alignment mark 208 and the mark β may be omitted or the auxiliary positioning member 3 06 may be omitted. In Fig. 6, since the protrusion 3/8 'is designed as a polygonal protrusion, the central through hole on the base material also needs to be coordinated and corrected to a polygonal through hole. When the substrate is placed in the substrate positioning groove 30 2, the protrusion 3 08 will match the polygonal through hole of the substrate, thereby achieving the purpose of automatic alignment. / Herein this embodiment, the case of making four data recording areas is taken as an example, but it is not limited to the projection 3 of the present invention, and is only applicable to the production of four data recording areas. It can be seen from FIG. 6 that the protrusion 3 08 uses, for example, the design of “edge” and the central through hole on the substrate is also changed to a quadrangular two hole. Under the combination of the quadrangular protrusion and the quadrangular through hole, the base There are only four types of placement of the material in the substrate positioning groove 302, so the positioning process of the substrate in the substrate positioning groove M2 will become very simple and fast. Figure 7 does not show the bearing of a rigid substrate according to the second embodiment of the present invention: "Structural schematic diagram. Please refer to Figure 7, the load-bearing jig is mainly composed of a j-body 40 0 and a counterweight device eight. The fixture body 400 has a positioning groove 4 02a, and the base material positioning groove 40. The distribution range is the centroid position of the kiss dish / 〇 具体 4 〇〇 (『+ ^ ′ Λ I u1 1十 』至 The marked position is centered::! The center position of t ° 2a is offset from the position of the fixture body by 400, so the center position of the substrate positioning groove 402a and the fixture body

200411658 _____ V. Description of the invention (12) The position of the centroid of the 4 G is at an appropriate distance. The above-mentioned substrate positioning groove 4 〇 2 a has a protrusion 408 at the center position, and this protrusion 408 can cooperate with the center through hole of the substrate to prevent the substrate from positioning in the substrate positioning groove 40. 2 a Improper sliding or even coming out of the substrate positioning groove 402 a. The bottom of the substrate positioning groove 4202a has at least one vacuum through hole 410, and the implementation manner is, for example, that the bottom of the substrate positioning groove 4402a is provided with a circular groove 402b 'and a circular groove 4o. A vacuum through hole 410 is made at the bottom of 2b. In addition, 'the fixture body 4 〇 has a mark B on the edge of the substrate positioning groove 4 〇 2 a' This mark B is used to align the mark 208 on the substrate 200 (illustration 3 ) Perform alignment. ... The jig body 40 0 of this embodiment has, for example, a slideway 41 2, and a counterweight device A can be disposed on g 迢 4 1 2. This counterweight device a is movably disposed on the jig body 4. Above, the center of gravity of the fixture supporting the substrate is maintained at the centroid position of the loading fixture. The above-mentioned counterweight device A = is composed of a counterweight 4 and 6 and a stopper bolt 4 2 0. 1 1 The counterweight 416 has, for example, a positioning hole 418, and the positioning hole 4〃; the stop bolt 42o is combined, and the counterweight 416 is suitable for being disposed on the slide, head, and head 41t: and ㈣ * pay bolt 42 0 and the positioning hole 418 ♦ Positioning the two bones In addition, the fixture body 400 has, for example, at least − ′ and η and the weight hole 4U is adjacent to the weight device A, for example, and it has a weight for carrying the two pieces. Functions. The part of the war / mouth assist positioning member 4 06 is similar to that of the auxiliary positioning member 3 06, and it is about the unloading groove 4 04 and the unloading groove 3 04 disclosed in the auxiliary figure 4, which will not be repeated here. .

200411658

, Λ 1 ^ is the bearing of the stereotype substrate according to the third embodiment of the present invention = I is intended. Please refer to FIG. 8, the fixture body of the embodiment is composed of a fixture body 50 0 and a weight assembly η. Among them, two materials, iL groove 5G2a, ring groove 5G2b, unloading groove 5Q4, vacuum shell, chute 512, counterweight hole 514, counterweight 5 1Θ, positioning hole $ Imu and stop bolt The components such as 52 ° are similar to those of the second embodiment, and are not described here again. The difference between this embodiment and the second embodiment is that the design of the protrusion 408 and the auxiliary positioning member 506 on the fixture body 500 is eliminated, and the

The base material is locked by using at least one anchor bolt 50 6 and one side locking mechanism 600.

FIG. 9 is a detailed structural schematic diagram of the side locking member in FIG. 8. Referring to FIG. 9, the side locking mechanism β 〇〇 in this embodiment is, for example, a positioning bolt 602 and a plug. The tip 606 is composed of one end of the positioning bolt 602: a recessed portion 602a, and the other end has a tapered surface 6 0 2b. In order to allow the side locking mechanism 6 0 0 to be solidly fixed, the base material is positioned and buckled. In this embodiment of the substrate in 50 2 a, a bolt hole 6 4 and a channel ⑽ 8 are provided at the side wall of the fixture body 500 in the groove 5 0 2 a of the substrate, and the bolt hole 604 For example, it is located on the surface of the fixture body 500, and the groove 608, for example, is located on the side wall of the substrate positioning groove 50 2a, the bolt hole 60 and the groove 608 are on the fixture body 50 0 The ten phases are connected, and the above-mentioned pin 606 is assembled in the channel 608. When fixing the base material, it is only necessary to use the work to rotate the positioning bolt 602 in the bolt hole 604, and push the pin 6 0 6 along the groove with the tapered surface 602b of the positioning bolt 602. The channel 6 08 extends to the substrate positioning groove 5 02 a to achieve the function of side locking.

7837twf.ptd Page 17 200411658 V. Description of the invention (14) Figure 10 shows the structure of a load-bearing jig according to another stereotype substrate according to the third embodiment of the present invention. Please refer to Figure 丨 0. The structure of the load-bearing jig shown in this figure is similar to that in Figure 8, but the difference lies in the circular groove 5 0 2 a at the bottom of the substrate. And the shape of the side locking member 700 and its assembly position on the jig body 500. In this embodiment, the side locking member 700 is, for example, a locking screw, which can extend from the side of the fixture body 500 into the side wall of the base material positioning groove 5 002 a to place the base material. Locked in the substrate positioning groove 502a.

Fig. 11 is a schematic diagram showing a manufacturing process of an optical disc mother board according to a fourth embodiment of the present invention. Please refer to FIG. 11. According to the manufacturing method of the optical disc mother board in this embodiment, a substrate (S800) is first provided. A photoresist layer has been formed on the surface of the substrate, and then a supporting fixture (S8. 2) The loading fixture has a substrate positioning groove, wherein the distribution range of the substrate positioning groove covers the centroid position of the fixture body, and the center position of the substrate positioning groove deviates from the shape of the loading fixture. Heart position. The substrate is then fixed in the substrate positioning groove of the supporting fixture (S804), so that the center of the bearing carrying the substrate is located at the centroid position of the supporting fixture, and then the supporting fixture is made Use the centroid position as the axis of rotation (S 8 0 6) 'and form a data recording area (S 8 0 8') by laser exposure. The data recording area is located above the centroid position of the supporting fixture. After forming a data recording area on the substrate, then adjust the orientation of the substrate in the substrate positioning groove and repeat the above steps of rotation and laser exposure to form a plurality of data recording areas (S 8 1 0). In step (s 8 1 0), the element is made into a stencil substrate. After the fabrication of the stencil substrate is completed, a metal layer is then formed on the stencil.

200411658 V. Description of the invention (15) On the substrate (S 8 1 2), the metal layer is formed by, for example, firstly forming a first metal layer (usually a nickel metal layer) on the surface of the substrate of the stencil 5 The first metal layer is conformed to the surface of the stencil substrate, and then a second metal layer with a flat upper surface and a thicker thickness is formed on the first metal layer by, for example, electro-plating. Finally, the metal layer is peeled off from the substrate of the stencil (S 8 14), and the metal layer after peeling off is a disc mother board. In this embodiment, the method of peeling off the metal layer from the stencil substrate is, for example, first stripping the substrate from the metal layer, and then peeling the photoresist layer from the metal layer by using a chemical agent. Although the present invention has been disclosed as above with the first to fourth embodiments, the second is not intended to limit the present invention. Any person skilled in the art can make changes and decorations without departing from the spirit and scope of f ^ Ming. Should be included within the scope of the present invention.

Page 19 200411658 Brief description of the drawings. Figure 1 shows the structure of the engraved substrate in the conventional micro-optical disc manufacturing process. Figures 2 and 3 show the micro-optical disc manufacturing process according to a comparative example of the present invention. Schematic diagram of the structure of the substrate; Figure 4 shows the structure of the bearing fixture of the stenciled substrate according to the first embodiment of the present invention; Figure 5, shows the structure of the stenciled substrate according to the first embodiment of the present invention The schematic diagram after combining with the bearing fixture; Fig. 6 is a schematic diagram showing the structure of another bearing fixture according to the first embodiment of the present invention; and Fig. 7 is a diagram showing the substrate of the stereotype substrate according to the second embodiment of the present invention The schematic diagram of the structure of the cutting jig; Figure 8 is a schematic diagram showing the structure of a fixture based on the third embodiment of the present invention; Figure 9 is a diagram showing the side locking members of Figure 8 Detailed structure illustration = 10 is a schematic diagram showing the structure of another kind of rigid bearing and fixture according to the third embodiment of the present invention; and the manufacturing process and length of the board are shown in FIG. k process diagram. ′, Description 1 G 〇, 2 〇: Substrate 1 〇 2, 2 1 〇: Photoresist layer 1 04, 212 ': Data recording area

200411658 Brief description of the drawing 2 0 2: Central through hole 204: Groove 2 0 6: Auxiliary hole 2 0 8: Registration mark 2 1 2: Scheduled recording area 3 0 0, 4 0 0, 5 0 0: Fixture Body 302, 402a, 502a: substrate positioning grooves 304, 404, 504: unloading grooves 3 0 6, 4 0 6: auxiliary positioning members 3 0 8, 3 0 8 ', 408: protrusion 3 1 0: center Locking members 312, 4 1 2, 5 1 2: slideway 314, 4 1 4, 5 1 4: counterweight holes 3 1 6, 4 1 6, 5 1 6: counterweight stones to yards 318, 418, 518: Positioning holes 3 2 0, 4 2 0, 5 2 0: Stop bolts 402b, 5 0 2b: Ring grooves 4 1 0, 5 1 0: Vacuum through holes 5 0 2c: Round grooves 5 0 6: Positioning bolts 6 0 0, 7 0 0: Side locking member 6 0 2: Positioning bolt 6 0 2 a: Recessed portion 602 b: Conical surface

7837twf .pt.d p. 21

I 200411658 Brief description of the drawing 6 0 4: Bolt hole 6 0 6: Insertion 6 0 8: Slot S 8 0 0 ~ S 8 1 4: Process step of optical disc mother board A: Counterweight device B: Mark II ... 7837t.wf.ptd Page 22

Claims (1)

200411658 VI. Application Patent Scope 1 · A bearing fixture for a rigid substrate, suitable for solid materials. The substrate has a central through hole, and a light drop layer is arranged on the substrate. The jig includes: a jig body, the jig body having a base material positioning groove, the distribution range of the base material positioning groove covers the center of the jig body / open position, wherein A center position is provided with a clever lifter, and the raised position is deviated from the centroid position of the jig body, a counterweight device can be movably disposed on the jig strip, so as to carry the base The center of gravity of the jig body is maintained at the centroid position of the load-bearing jig; and a central locking member, the central locking member is adapted to lock the substrate to the substrate positioning recess In the groove ', with the distant protrusion 2 · The stencil & tool as described in item 1 of the scope of patent application, wherein the central through hole includes a circular through hole, and a multi-pay bearing rule 3 · The stereotype I Becon described in 2 items. Tools, wherein the protrusions include circular protrusions, polygonal rape, etc. 4. The stereotype as described in item 1 of the scope of patent application ^. Tools, wherein the substrate further includes at least one auxiliary hole for supporting the edge of the substrate. The Λ auxiliary hole is adjacent to the cutting plate & as described in item 1 of the scope of patent application, wherein the substrate further includes a groove, and the groove is located at a specific center position. Reading the substrate 6 · The engraving tool as described in item 1 of the scope of patent application, wherein the substrate further includes a plurality of alignment marks, and the special alignment marks I 200411658 6. The scope of the patent application is located on the edge of the base material. 7. The supporting fixture of the stencil base material described in item 1 of the scope of the patent application, wherein the fixture body further includes at least one counterweight hole, the counterweight hole is close to the Counterweight device. That 8 · The fixture of the stencil substrate according to item 1 of the scope of the patent application, wherein the fixture body further includes at least one unloading groove, and the unloading concave sample is located on the edge of the positioning groove of the substrate. 9 · The load-bearing jig for a sculpted substrate as described in item 1 of the scope of patent application, wherein the counterweight device includes: a counterweight, the counterweight has a positioning hole: and a stop bolt, Suitable for combining with the positioning hole. 10. The supporting fixture of the stencil substrate according to item 9 of the scope of the patent application, wherein the fixture body further includes a slideway, wherein the counterweight is arranged on the slideway and is stopped by the stopper. The bolt positions the counterweight on the slide. Λ 11 · As described in the first patent application scope, the bearing substrate of the stencil substrate further includes at least one auxiliary positioning member, the auxiliary positioning member is configured on the fixture body, and the auxiliary positioning member is The side wall protruding from the positioning groove of the substrate is fixed to fix the substrate. 12. The carrying rule of the stencil substrate as described in item 1 of the scope of the patent application further includes at least a positioning bolt, the positioning bolt is arranged on the fixture body, and the positioning bolt is protruded from the " Hai substrate Position the side walls of the grooves to fix 1 3 · — The bearing fixture of a kind of rigid substrate is suitable for fixing a substrate. Page 24 200411658 6. The scope of the patent application The substrate is provided with a photoresist layer. The cutting jig of the sculpted substrate is a fixture body. The fixture body has a substrate positioning groove, and the substrate is positioned. The distribution range of the grooves covers the shape of the fixture body in two positions ^ ^ The base positioning groove bottom has at least one vacuum through hole, wherein a center position of the substrate positioning groove is deviated from the fixture body A centroid position; and a counterweight device movably disposed on the jig body to maintain the center of gravity of the jig body carrying the substrate at the centroid position. 1 4 · The carrying jig for a stencil substrate as described in item 3 of the patent application scope, wherein the substrate further includes at least one auxiliary hole, the auxiliary hole is adjacent to the edge of the substrate. 15 · The fixture for carrying a stencil substrate as described in item 13 of the scope of patent application, wherein the fixture body further comprises at least one counterweight hole, the counterweight hole is adjacent to the counterweight device. 16 · The carrying jig for a rigid substrate as described in item 13 of the scope of patent application, wherein the substrate further includes a plurality of alignment marks, and the alignment marks are located on the edge of the substrate. 1 7 · According to the supporting and stenciling of the substrate of the substrate as described in item 13 of the scope of patent application, wherein the jig body further comprises at least one unloading groove 'which is located on the edge of the positioning groove of the substrate. 1, 18 · The bearing of the stereotype substrate as described in item 13 of the scope of patent application: v tool, wherein the bottom of the substrate positioning groove has a circular groove 'and the bottom of the ^ -shaped groove has the vacuum through hole . 1 _ ,, Λ 1 9 · 7 of the stencil substrate as described in item 13 of the scope of patent application 7837t.wf, ptd page 25 200411658 6. Scope of patent application ^ η ^ tools, where the bottom of the substrate positioning groove is different from the circular recess 0 μ circular The bottom of the four grooves has the vacuum through hole. The Bi Shixiu Christine 20 · The stencil-based load-bearing jig as described in item 13 of the scope of patent application, wherein the counterweight device includes: a counterweight missing code, the counterweight missing code having a position hole and a stop payment A bolt is suitable to be combined with the positioning hole. 21 · The carrying fixture of a stencil substrate as described in item 20 of the patent application scope, wherein the fixture body further includes a slideway, wherein the counterweight 2 is arranged on the slideway and paid by the stop The bolt positions the counterweight on the slide rail. > 2 2 · The supporting fixture of the stencil substrate according to item 13 of the patent application park, further comprising at least one auxiliary positioning member, the auxiliary positioning member is arranged on the fixture body, and the auxiliary positioning member It protrudes from the side wall of the substrate positioning groove to fix the substrate. 2 3 · According to the patent application scope, the carrying fixture of the stencil substrate further includes at least one positioning bolt, the positioning bolt is arranged on the fixture body, and the positioning bolt is protruding from the base The side wall of the groove is positioned to fix the substrate. 2 4. —A method for manufacturing a stencil substrate, including: (a) providing a substrate, a photoresist layer has been formed on the surface of the substrate; (b) providing a load-bearing jig 'the load-bearing jig has a base Material positioning grooves, wherein the distribution range of the substrate positioning grooves covers a centroid position of the fixture body, and a center position of the substrate positioning grooves deviates from the centroid position of the loading fixture; 7837twf.ptd Page 26 200411658 ^, the scope of patent application (c) to fix the substrate in the substrate positioning groove 'and make the center of gravity of the carrier fixture carrying the substrate be located in the The centroid position (d) rotates the loading fixture around the centroid position; and (e) the substrate above the centroid position forms a first data recording area. 2 5. The method for manufacturing a stencil substrate as described in item 24 of the scope of patent application, wherein after the first recording area is formed, the method further comprises the following steps: (f) adjusting the orientation of the substrate in the substrate positioning groove And (g) the substrate above the centroid position forms a second data recording area. 2 6 · The method for making a stencil substrate as described in item 25 of the scope of patent application, further comprising repeating steps (f) to (g) at least once. 27. The method for making a stencil substrate as described in item 25 of the scope of patent application, wherein the first data recording area and the second data recording area are formed by a laser exposure and a development method. 2 8. —A method for manufacturing an optical disc mother board, comprising: (a) providing a substrate, a photoresist layer has been formed on the surface of the substrate; (b) providing a supporting jig, the supporting jig having a base Material positioning grooves, wherein the distribution range of the substrate positioning grooves covers a centroid position of the fixture body, and a center position of the substrate positioning grooves deviates from the centroid of the loading fixture Position; (c) fixing the substrate in the substrate positioning groove, so that the center of gravity of the carrying jig carrying the substrate is located at the centroid position of the carrying jig 7S37t.wf.ptd Page 27 200411658 VI. The patent application park is placed on top; (d) The load-bearing fixture is rotated around the centroid position as the axis. (E) The base material is formed above the centroid position. —In the data recording area, (f) adjust the orientation of the substrate in the groove of the signature 疋 1. (g) Repeat steps (e) to (f) at least once, ready. ^ ^ Enter the mother i 稷 once and then Forming another data recording area on the substrate, and then making the substrate into a multi-plate substrate; (h) forming a metal layer on the substrate of the stereotype; and (i) The metal layer is peeled from the substrate of the stencil, wherein the metal layer is a disc master. 29. The manufacturing method of the optical disc mother board according to item 28 of the scope of application for patent, wherein the method for forming the metal layer includes forming a first metal layer on the surface of the substrate of the stencil, and the first metal layer is And conforming to the surface of the stencil substrate; and forming a second metal layer with a flat upper surface on the first metal layer. 3 0 · According to the manufacturer of the optical disc master plate described in item 28 of the patent application scope, +1 t ′ ′, wherein the manner in which the metal layer is peeled off from the stencil substrate includes: Peeling the metal layer and the photoresist layer from the substrate; and peeling the photoresist layer from the metal layer. 31. According to item 28 of the scope of the patent application, the clothing of the optical disc mother board is formed by a method in which the first data recording area and the second data recording area are known, and the laser exposure is combined with a development method. .