TWI221903B - Carrier positional displacement detecting mechanism - Google Patents
Carrier positional displacement detecting mechanism Download PDFInfo
- Publication number
- TWI221903B TWI221903B TW090130862A TW90130862A TWI221903B TW I221903 B TWI221903 B TW I221903B TW 090130862 A TW090130862 A TW 090130862A TW 90130862 A TW90130862 A TW 90130862A TW I221903 B TWI221903 B TW I221903B
- Authority
- TW
- Taiwan
- Prior art keywords
- carrier
- offset
- contact
- detection
- shaft
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Leads Or Probes (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Description
1221903 A7 五、發明說明(6 測試模板2,當載送器4朝測試模板2降低時,導銷丨丨插 入並接合載送器4之定位孔道4a,如此—來載送器*會如 第2( B )圖所示適當地定位於測試模板2之上。 如第2(A)及第2(B)圖所示,軸8之尖端“並未接觸 到載送器4及其他等等時,# 8不會上下移動,因此轴8 之後端8b不會中斷光學感測器9。也就是說在此例中因載 送器4之偏移並未檢測,因此載送器4之下降操作及其他 等等不會因而打斷。 於是,雖然載送器4降低,即使是如第i (A)圖所示 運送的載送器4位置自測試模板2移開,設置於測試模板 2之導銷11既不插入也不接合載送器4之定位孔道,因 此軸8之尖端8a會帶動拉觸如第2(B)圖之載送器4之定 位孔道4a以外的部份。結果,當軸8阻擋彈簧1〇時,軸 8會向下移動,使得軸8之後端8b中斷光學感測器9。 〇當光學感測器9中斷時,其會輸出載送器偏移檢測訊 號。一自動操作器之控制器,未顯示出來,係根據載送器 偏移檢測訊號而中斷載送器4之下降。結果,解決了載送 裔4會夾在接觸壓力與導銷之間的不便。其後,一旦載送 器4再次升起至運送位置並校正此位置,於是其再度下 降,並且重新開始載送器4之定位操作。 如以上所提及之細節,既然本發明採用了載送器偏移 檢測機構,即使在載送器4下降前載送器4之位置並未事 先檢測到,光學感測器9只在當載送器4確實下降到設定 的到載送器4之位置時才會輸出檢測訊號,以中斷載送器 Μ氏張尺關豕標準(CNS)A4規格 313263 請先閱讀背面之注意事項再本頁) --------訂---------線· 經濟部智慧財產局員工消費合作社印製 6 !2219〇3 之 B7 五、發明說明(7 ) 4之下降。也就是說,不需花頰外 位置,所以目標時間不會延♦ 、時間檢測載送器4 根據本發明,只有當载送器7疋非常方便的。 器4之位置時,偏移時間接觸裝=確實下降到設定的載送 且由接觸檢測裝置輸出偏移檢 才會接觸載送器4,並 測到載送器4之偏移。當檢測二:號哭以這樣的方法可檢 载送器4之下降採取中斷的載Μ 4之偏移時’可對 之變形或破壞。此外,不需 以便預先防止載送器4 你要 ^ χ 而化額外的時間檢測載送器4之 位置,所以操作時間不會 、▲ ^長’廷疋非常方便的。 卜根據本發明,可以~簡單的結構構成載送器偏 移檢測機構,係包含軸及以檢測軸之後端的 。 f請先閱讀背面之注意事項本頁) # 丨訂---------線一 經濟部智慧財產局員工消費合作社印製 適 度 尺 張 氏 29 X 210 ( 格 規 4 )Α S) Ν (C 準 標 家 7 3132631221903 A7 V. Description of the invention (6 Test template 2, when the carrier 4 is lowered toward the test template 2, the guide pin 丨 丨 inserts and engages the positioning hole 4a of the carrier 4, so that the carrier * will be as As shown in Figure 2 (B), it is properly positioned on the test template 2. As shown in Figures 2 (A) and 2 (B), the tip of the shaft 8 "does not touch the carrier 4 and other, etc. At this time, # 8 will not move up and down, so the rear end 8b of the shaft 8 will not interrupt the optical sensor 9. That is to say, in this example, because the offset of the carrier 4 is not detected, the carrier 4 is lowered. The operation and other things will not be interrupted. Therefore, although the carrier 4 is lowered, even if the carrier 4 is transported as shown in FIG. I (A), the position of the carrier 4 is removed from the test template 2 and set on the test template 2 The guide pin 11 neither inserts nor engages the positioning hole of the carrier 4, so the tip 8a of the shaft 8 will pull the contact part other than the positioning hole 4a of the carrier 4 as shown in Fig. 2 (B). Result When the shaft 8 blocks the spring 10, the shaft 8 will move downward, so that the rear end 8b of the shaft 8 interrupts the optical sensor 9. When the optical sensor 9 is interrupted, it will output the carrier Offset detection signal. The controller of an automatic operator, not shown, interrupts the lowering of the carrier 4 according to the carrier offset detection signal. As a result, it is resolved that the carrier 4 is caught between the contact pressure and the guide. The inconvenience between the pins. After that, once the carrier 4 is raised again to the transport position and the position is corrected, it is lowered again and the positioning operation of the carrier 4 is restarted. As mentioned in the details above, since The present invention adopts a carrier offset detection mechanism. Even if the position of the carrier 4 is not detected before the carrier 4 is lowered, the optical sensor 9 is only used when the carrier 4 is actually lowered to the set position. The detection signal will be output only when the position of carrier 4 is in order to interrupt the carrier ’s M-square ruler standard (CNS) A4 specification 313263 (please read the precautions on the back before this page) -------- Order --------- Line · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, B7 of 6.2219,03. 5. The description of invention (7) 4. It means that no extra cheek position is needed. , So the target time will not be delayed. Time detection carrier 4 According to the present invention, only The carrier 7 疋 is very convenient. When the position of the carrier 4 is offset, the contact time is equal to the setting of the carrier and the carrier is actually lowered to the set carrier. The shift of the carrier 4. When the detection of the second: No. 4 can detect the shift of the carrier 4 with the interruption of the carrier 4 in this way, it can be deformed or destroyed. In addition, it is not necessary to prevent the carrier in advance You need ^ χ and extra time to detect the position of the carrier 4, so the operation time will not be very long. It is very convenient. According to the present invention, the carrier can be constructed with a simple structure. The movement detection mechanism includes a shaft and a rear end of the shaft. f Please read the notes on the back page first) # 丨 Order --------- Printed by the first line of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, Moderate Ruler 29 X 210 (Specification 4) Α S) Ν (C quasi-standardist 7 313263
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000391402A JP2002196039A (en) | 2000-12-22 | 2000-12-22 | Carrier displacement detection mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
TWI221903B true TWI221903B (en) | 2004-10-11 |
Family
ID=18857545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW090130862A TWI221903B (en) | 2000-12-22 | 2001-12-13 | Carrier positional displacement detecting mechanism |
Country Status (4)
Country | Link |
---|---|
US (1) | US20020079195A1 (en) |
JP (1) | JP2002196039A (en) |
KR (1) | KR100451964B1 (en) |
TW (1) | TWI221903B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116443730A (en) * | 2023-06-13 | 2023-07-18 | 上海新创达半导体设备技术有限公司 | Auxiliary crown block compensation correction system and control method |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100815136B1 (en) * | 2006-11-10 | 2008-03-20 | 세크론 주식회사 | Strip picker device for semiconductor |
JP5191924B2 (en) * | 2009-02-18 | 2013-05-08 | セイコーインスツル株式会社 | Semiconductor inspection equipment |
JP5113275B2 (en) * | 2011-03-28 | 2013-01-09 | 京楽産業.株式会社 | Inspection preparation equipment for control boards for gaming machines |
JP6203589B2 (en) * | 2013-09-30 | 2017-09-27 | 株式会社ディスコ | Chuck table |
US9666465B2 (en) | 2013-12-12 | 2017-05-30 | Seagate Technology Llc | Positioning apparatus |
KR101629447B1 (en) | 2015-12-03 | 2016-06-10 | 이은보 | Lightweight stainless steel pipe roller |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2988808B2 (en) * | 1993-07-12 | 1999-12-13 | シャープ株式会社 | Frame test handler |
JP3099254B2 (en) * | 1994-02-28 | 2000-10-16 | 安藤電気株式会社 | Suction hand with floating mechanism and transfer contact mechanism |
DE19580020C1 (en) * | 1994-05-10 | 1996-08-01 | Procontrol Ag | Method and device for controlling the nozzle application for electrical injection molding machines |
JPH08233899A (en) * | 1995-02-28 | 1996-09-13 | Ando Electric Co Ltd | Contact mechanism for ic |
US6537133B1 (en) * | 1995-03-28 | 2003-03-25 | Applied Materials, Inc. | Method for in-situ endpoint detection for chemical mechanical polishing operations |
JP2983163B2 (en) * | 1995-12-27 | 1999-11-29 | 株式会社しなのエレクトロニクス | IC handler |
NL1005937C2 (en) * | 1997-04-29 | 1998-11-02 | Ict Axxicon Bv | Device for manufacturing information carriers by injection molding. |
TW533316B (en) * | 1998-12-08 | 2003-05-21 | Advantest Corp | Testing device for electronic device |
JP2000338179A (en) * | 1999-05-27 | 2000-12-08 | Ando Electric Co Ltd | Automatic handler |
KR200197286Y1 (en) * | 2000-04-14 | 2000-09-15 | 삼성전자주식회사 | Contact picker assembly for test handler |
-
2000
- 2000-12-22 JP JP2000391402A patent/JP2002196039A/en active Pending
-
2001
- 2001-12-13 TW TW090130862A patent/TWI221903B/en not_active IP Right Cessation
- 2001-12-13 US US10/022,082 patent/US20020079195A1/en not_active Abandoned
- 2001-12-20 KR KR10-2001-0081595A patent/KR100451964B1/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116443730A (en) * | 2023-06-13 | 2023-07-18 | 上海新创达半导体设备技术有限公司 | Auxiliary crown block compensation correction system and control method |
CN116443730B (en) * | 2023-06-13 | 2023-08-25 | 上海新创达半导体设备技术有限公司 | Auxiliary crown block compensation correction system and control method |
Also Published As
Publication number | Publication date |
---|---|
KR20020051846A (en) | 2002-06-29 |
US20020079195A1 (en) | 2002-06-27 |
JP2002196039A (en) | 2002-07-10 |
KR100451964B1 (en) | 2004-10-08 |
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MM4A | Annulment or lapse of patent due to non-payment of fees |