TWI221903B - Carrier positional displacement detecting mechanism - Google Patents

Carrier positional displacement detecting mechanism Download PDF

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Publication number
TWI221903B
TWI221903B TW090130862A TW90130862A TWI221903B TW I221903 B TWI221903 B TW I221903B TW 090130862 A TW090130862 A TW 090130862A TW 90130862 A TW90130862 A TW 90130862A TW I221903 B TWI221903 B TW I221903B
Authority
TW
Taiwan
Prior art keywords
carrier
offset
contact
detection
shaft
Prior art date
Application number
TW090130862A
Other languages
Chinese (zh)
Inventor
Seiji Kuninobu
Osamu Arakawa
Original Assignee
Ando Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric filed Critical Ando Electric
Application granted granted Critical
Publication of TWI221903B publication Critical patent/TWI221903B/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Leads Or Probes (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

In a horizontal conveyance type auto-handler, the operation of a carrier 4 is stopped when a positional displacement of the carrier 4 relative to a test board 2 is detected. A shaft 8 is provided on a center of a guide pin 11 on the test board 2. When the carrier 4 which is displaced relative to the test board 2 is lowered, the shaft 8 is pushed down by the carrier 4, and the lowering of the shaft 8 is detected by an optical sensor 9, thereby stopping the lowering operation of the carrier 4.

Description

1221903 A7 五、發明說明(6 測試模板2,當載送器4朝測試模板2降低時,導銷丨丨插 入並接合載送器4之定位孔道4a,如此—來載送器*會如 第2( B )圖所示適當地定位於測試模板2之上。 如第2(A)及第2(B)圖所示,軸8之尖端“並未接觸 到載送器4及其他等等時,# 8不會上下移動,因此轴8 之後端8b不會中斷光學感測器9。也就是說在此例中因載 送器4之偏移並未檢測,因此載送器4之下降操作及其他 等等不會因而打斷。 於是,雖然載送器4降低,即使是如第i (A)圖所示 運送的載送器4位置自測試模板2移開,設置於測試模板 2之導銷11既不插入也不接合載送器4之定位孔道,因 此軸8之尖端8a會帶動拉觸如第2(B)圖之載送器4之定 位孔道4a以外的部份。結果,當軸8阻擋彈簧1〇時,軸 8會向下移動,使得軸8之後端8b中斷光學感測器9。 〇當光學感測器9中斷時,其會輸出載送器偏移檢測訊 號。一自動操作器之控制器,未顯示出來,係根據載送器 偏移檢測訊號而中斷載送器4之下降。結果,解決了載送 裔4會夾在接觸壓力與導銷之間的不便。其後,一旦載送 器4再次升起至運送位置並校正此位置,於是其再度下 降,並且重新開始載送器4之定位操作。 如以上所提及之細節,既然本發明採用了載送器偏移 檢測機構,即使在載送器4下降前載送器4之位置並未事 先檢測到,光學感測器9只在當載送器4確實下降到設定 的到載送器4之位置時才會輸出檢測訊號,以中斷載送器 Μ氏張尺關豕標準(CNS)A4規格 313263 請先閱讀背面之注意事項再本頁) --------訂---------線· 經濟部智慧財產局員工消費合作社印製 6 !2219〇3 之 B7 五、發明說明(7 ) 4之下降。也就是說,不需花頰外 位置,所以目標時間不會延♦ 、時間檢測載送器4 根據本發明,只有當载送器7疋非常方便的。 器4之位置時,偏移時間接觸裝=確實下降到設定的載送 且由接觸檢測裝置輸出偏移檢 才會接觸載送器4,並 測到載送器4之偏移。當檢測二:號哭以這樣的方法可檢 载送器4之下降採取中斷的載Μ 4之偏移時’可對 之變形或破壞。此外,不需 以便預先防止載送器4 你要 ^ χ 而化額外的時間檢測載送器4之 位置,所以操作時間不會 、▲ ^長’廷疋非常方便的。 卜根據本發明,可以~簡單的結構構成載送器偏 移檢測機構,係包含軸及以檢測軸之後端的 。 f請先閱讀背面之注意事項本頁) # 丨訂---------線一 經濟部智慧財產局員工消費合作社印製 適 度 尺 張 氏 29 X 210 ( 格 規 4 )Α S) Ν (C 準 標 家 7 3132631221903 A7 V. Description of the invention (6 Test template 2, when the carrier 4 is lowered toward the test template 2, the guide pin 丨 丨 inserts and engages the positioning hole 4a of the carrier 4, so that the carrier * will be as As shown in Figure 2 (B), it is properly positioned on the test template 2. As shown in Figures 2 (A) and 2 (B), the tip of the shaft 8 "does not touch the carrier 4 and other, etc. At this time, # 8 will not move up and down, so the rear end 8b of the shaft 8 will not interrupt the optical sensor 9. That is to say, in this example, because the offset of the carrier 4 is not detected, the carrier 4 is lowered. The operation and other things will not be interrupted. Therefore, although the carrier 4 is lowered, even if the carrier 4 is transported as shown in FIG. I (A), the position of the carrier 4 is removed from the test template 2 and set on the test template 2 The guide pin 11 neither inserts nor engages the positioning hole of the carrier 4, so the tip 8a of the shaft 8 will pull the contact part other than the positioning hole 4a of the carrier 4 as shown in Fig. 2 (B). Result When the shaft 8 blocks the spring 10, the shaft 8 will move downward, so that the rear end 8b of the shaft 8 interrupts the optical sensor 9. When the optical sensor 9 is interrupted, it will output the carrier Offset detection signal. The controller of an automatic operator, not shown, interrupts the lowering of the carrier 4 according to the carrier offset detection signal. As a result, it is resolved that the carrier 4 is caught between the contact pressure and the guide. The inconvenience between the pins. After that, once the carrier 4 is raised again to the transport position and the position is corrected, it is lowered again and the positioning operation of the carrier 4 is restarted. As mentioned in the details above, since The present invention adopts a carrier offset detection mechanism. Even if the position of the carrier 4 is not detected before the carrier 4 is lowered, the optical sensor 9 is only used when the carrier 4 is actually lowered to the set position. The detection signal will be output only when the position of carrier 4 is in order to interrupt the carrier ’s M-square ruler standard (CNS) A4 specification 313263 (please read the precautions on the back before this page) -------- Order --------- Line · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, B7 of 6.2219,03. 5. The description of invention (7) 4. It means that no extra cheek position is needed. , So the target time will not be delayed. Time detection carrier 4 According to the present invention, only The carrier 7 疋 is very convenient. When the position of the carrier 4 is offset, the contact time is equal to the setting of the carrier and the carrier is actually lowered to the set carrier. The shift of the carrier 4. When the detection of the second: No. 4 can detect the shift of the carrier 4 with the interruption of the carrier 4 in this way, it can be deformed or destroyed. In addition, it is not necessary to prevent the carrier in advance You need ^ χ and extra time to detect the position of the carrier 4, so the operation time will not be very long. It is very convenient. According to the present invention, the carrier can be constructed with a simple structure. The movement detection mechanism includes a shaft and a rear end of the shaft. f Please read the notes on the back page first) # 丨 Order --------- Printed by the first line of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, Moderate Ruler 29 X 210 (Specification 4) Α S) Ν (C quasi-standardist 7 313263

Claims (1)

9am ';;I ,, 第90130862號專利申請案 申請專利範圍修正本 (93年4月κ —種載送H偏移檢測機構,其係設置日' 器,該自動择作哭4人 、自動知作 安裝有IC之裁送器u υ里安襞在載送器4上之IC之旦 該載送器4有-定位孔道4a,及-具有二件2, 11之測量部件2 I由 /、 犬出部份 j里口Μ牛2,其中該突出部份u 孔…以定位載送器4與測量部件=定位 该載运器偏移檢測機構係包含: 〖係, 偏移時間接觸裝置8,係伸出配 11之每一尘☆山π ^ 夏於大出部份 大而,且只有當突出部份1 1蛊Α 乂 4“皮此相對應時才能通過定位孔道4心:孔道 T觸檢測裳置9,其係用以檢測偏移時: " 及載送器4間之接觸,並輸出載 號。 钱适為偏移訊 2* t 1 經濟部中央標準局員工福利委員會印製 二:移時間接觸裝置8係一由突出部份"伸出、 、:偏置之軸,且接觸檢測裂置9為一 3時間接觸裝置8之後端8b之感測器。“偏和 3· t申^專利範圍第1項之載送器偏移檢测機構,其 到.二:4之定位操作會在接觸檢測裝置9檢測 载适為偏移訊號時停止。 )八4規格 71^7297 公麓) 313263(修正版)9am ';; I ,, No. 90130862 Patent Application Amendment to the Patent Scope (April, 1993 κ — a kind of carrier H offset detection mechanism, which is provided with a daylight timer), which is automatically selected as a crying 4 person, automatic Known as an IC-equipped cutter u 里 襞 An IC on the carrier 4, the carrier 4 has-positioning holes 4a, and-a measuring part 2 with two pieces 2, 11 I / 1. The in-out part J is the mouth M cow 2, where the protruding part is u-hole ... To position the carrier 4 and the measurement part = to locate the carrier offset detection mechanism includes: [System, offset time contact device 8, it sticks out every dust with 11 ☆ mountain π ^ Xia Yu most of the large and large, and only when the protruding part 1 1 蛊 Α 乂 4 "skin corresponding to this can pass through the positioning hole 4 center: hole T touch detection clothes set 9 is used to detect the offset: " Contact with carrier 4 and output the load number. Qian Shi is offset 2 * t 1 Staff Welfare Committee of Central Standards Bureau, Ministry of Economic Affairs Printing 2: The time-shifting contact device 8 is a shaft that is extended by the protruding part " extended, offset :, and the contact detection split 9 is a 3 time contact The sensor at the rear end 8b of the device 8. "The offset detection mechanism of the carrier deviation detection item 1 of the patent application of the patent application, its positioning to the second: 4 will detect the load at the contact detection device 9 Stop when it is suitable for the offset signal.) 8 4 size 71 ^ 7297 foot) 313263 (revised version)
TW090130862A 2000-12-22 2001-12-13 Carrier positional displacement detecting mechanism TWI221903B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000391402A JP2002196039A (en) 2000-12-22 2000-12-22 Carrier displacement detection mechanism

Publications (1)

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TWI221903B true TWI221903B (en) 2004-10-11

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US (1) US20020079195A1 (en)
JP (1) JP2002196039A (en)
KR (1) KR100451964B1 (en)
TW (1) TWI221903B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116443730A (en) * 2023-06-13 2023-07-18 上海新创达半导体设备技术有限公司 Auxiliary crown block compensation correction system and control method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100815136B1 (en) * 2006-11-10 2008-03-20 세크론 주식회사 Strip picker device for semiconductor
JP5191924B2 (en) * 2009-02-18 2013-05-08 セイコーインスツル株式会社 Semiconductor inspection equipment
JP5113275B2 (en) * 2011-03-28 2013-01-09 京楽産業.株式会社 Inspection preparation equipment for control boards for gaming machines
JP6203589B2 (en) * 2013-09-30 2017-09-27 株式会社ディスコ Chuck table
US9666465B2 (en) 2013-12-12 2017-05-30 Seagate Technology Llc Positioning apparatus
KR101629447B1 (en) 2015-12-03 2016-06-10 이은보 Lightweight stainless steel pipe roller

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2988808B2 (en) * 1993-07-12 1999-12-13 シャープ株式会社 Frame test handler
JP3099254B2 (en) * 1994-02-28 2000-10-16 安藤電気株式会社 Suction hand with floating mechanism and transfer contact mechanism
DE19580020C1 (en) * 1994-05-10 1996-08-01 Procontrol Ag Method and device for controlling the nozzle application for electrical injection molding machines
JPH08233899A (en) * 1995-02-28 1996-09-13 Ando Electric Co Ltd Contact mechanism for ic
US6537133B1 (en) * 1995-03-28 2003-03-25 Applied Materials, Inc. Method for in-situ endpoint detection for chemical mechanical polishing operations
JP2983163B2 (en) * 1995-12-27 1999-11-29 株式会社しなのエレクトロニクス IC handler
NL1005937C2 (en) * 1997-04-29 1998-11-02 Ict Axxicon Bv Device for manufacturing information carriers by injection molding.
TW533316B (en) * 1998-12-08 2003-05-21 Advantest Corp Testing device for electronic device
JP2000338179A (en) * 1999-05-27 2000-12-08 Ando Electric Co Ltd Automatic handler
KR200197286Y1 (en) * 2000-04-14 2000-09-15 삼성전자주식회사 Contact picker assembly for test handler

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116443730A (en) * 2023-06-13 2023-07-18 上海新创达半导体设备技术有限公司 Auxiliary crown block compensation correction system and control method
CN116443730B (en) * 2023-06-13 2023-08-25 上海新创达半导体设备技术有限公司 Auxiliary crown block compensation correction system and control method

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KR20020051846A (en) 2002-06-29
US20020079195A1 (en) 2002-06-27
JP2002196039A (en) 2002-07-10
KR100451964B1 (en) 2004-10-08

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