TWD241088S - 基板處理裝置用溫度測定具之部分 - Google Patents

基板處理裝置用溫度測定具之部分

Info

Publication number
TWD241088S
TWD241088S TW112304678F TW112304678F TWD241088S TW D241088 S TWD241088 S TW D241088S TW 112304678 F TW112304678 F TW 112304678F TW 112304678 F TW112304678 F TW 112304678F TW D241088 S TWD241088 S TW D241088S
Authority
TW
Taiwan
Prior art keywords
substrate processing
temperature measuring
design
processing equipment
measuring tool
Prior art date
Application number
TW112304678F
Other languages
English (en)
Chinese (zh)
Inventor
谷口大騎
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD241088S publication Critical patent/TWD241088S/zh

Links

TW112304678F 2023-03-13 2023-09-11 基板處理裝置用溫度測定具之部分 TWD241088S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023-004909 2023-03-13
JP2023004909F JP1755435S (oth) 2023-03-13 2023-03-13

Publications (1)

Publication Number Publication Date
TWD241088S true TWD241088S (zh) 2025-10-21

Family

ID=88328217

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112304678F TWD241088S (zh) 2023-03-13 2023-09-11 基板處理裝置用溫度測定具之部分

Country Status (2)

Country Link
JP (1) JP1755435S (oth)
TW (1) TWD241088S (oth)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215215S (zh) 2020-07-27 2021-11-11 日商國際電氣股份有限公司 基板處理裝置用氣體供給噴嘴

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215215S (zh) 2020-07-27 2021-11-11 日商國際電氣股份有限公司 基板處理裝置用氣體供給噴嘴

Also Published As

Publication number Publication date
JP1755435S (oth) 2023-10-17

Similar Documents

Publication Publication Date Title
JP2008182228A5 (oth)
TWD197466S (zh) 基板處理裝置用隔熱板
CN107817054A (zh) 一种用于真空腔内部件的红外成像仪测温方法
ATE451599T1 (de) Temperatur-festpunkt, zellentemperatur- festpunktvorrichtung und verfahren zur kalibrierung eines thermometers
JP2014122843A (ja) 熱伝導率測定装置及び測定方法
MX370694B (es) Aparato de procesamiento y método de medición de la temperatura de una pieza de trabajo en aparatos de procesamiento.
TWD241088S (zh) 基板處理裝置用溫度測定具之部分
TW200734615A (en) Electronic thermometer with sensor location
WO2023277812A3 (zh) 体温测量方法及体温测量系统
TWD240928S (zh) 基板處理裝置用溫度測定具之部分
TWI636251B (zh) 熱特性量測裝置
TWD216927S (zh) 溫度感測器
CN104253060B (zh) 半导体工艺的温度测量和调节方法
TWD240927S (zh) 基板處理裝置用溫度測定具
TW200641365A (en) Nondestructive inspection method for inspecting junction of flexible printed circuit board
TWD202242S (zh) 溫度感測器之部分
RU2610115C1 (ru) Устройство для определения температуры газа в полых высокотемпературных элементах газотурбинных двигателей
Myrick et al. Calibration of a plug-type gauge for measurement of surface heat flux and temperature using data from in-depth thermocouples
JP2020020773A (ja) 垂直入射音響特性測定のための装置、方法及びプログラム
JP1712880S (ja) 手持式熱画像計測器
TWD182149S (zh) 基板處理裝置之溫度測定器之部分
TW202618951A (zh) 基板處理裝置、校正用基板及校正方法
TWD191013S (zh) Substrate temperature measurement component
CN309838021S (zh) 测温仪控制器开关(ir-t1)
PH12020550084A1 (en) Measurement device and substrate mounting device