TWD191016S - Part of the cabin - Google Patents

Part of the cabin

Info

Publication number
TWD191016S
TWD191016S TW106304102F TW106304102F TWD191016S TW D191016 S TWD191016 S TW D191016S TW 106304102 F TW106304102 F TW 106304102F TW 106304102 F TW106304102 F TW 106304102F TW D191016 S TWD191016 S TW D191016S
Authority
TW
Taiwan
Prior art keywords
cabin
cassette
design
item
deflection
Prior art date
Application number
TW106304102F
Other languages
English (en)
Chinese (zh)
Inventor
唐澤端是
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD191016S publication Critical patent/TWD191016S/zh

Links

TW106304102F 2017-01-18 2017-07-18 Part of the cabin TWD191016S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-000730 2017-01-05
JPD2017-730F JP1584067S (enrdf_load_stackoverflow) 2017-01-18 2017-01-18

Publications (1)

Publication Number Publication Date
TWD191016S true TWD191016S (zh) 2018-06-11

Family

ID=59593334

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106304102F TWD191016S (zh) 2017-01-18 2017-07-18 Part of the cabin

Country Status (3)

Country Link
US (1) USD868013S1 (enrdf_load_stackoverflow)
JP (1) JP1584067S (enrdf_load_stackoverflow)
TW (1) TWD191016S (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1678672S (enrdf_load_stackoverflow) * 2019-11-07 2021-02-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM418159U (en) 2011-07-01 2011-12-11 Qun-Jing Kong Improved stopper structure of window

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10139159A (ja) * 1996-11-13 1998-05-26 Tokyo Electron Ltd カセットチャンバ及びカセット搬入搬出機構
JPH10147432A (ja) * 1996-11-20 1998-06-02 Tokyo Electron Ltd カセットチャンバ
US6152680A (en) * 1997-08-26 2000-11-28 Daitron, Inc. Wafer cassette rotation mechanism
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM418159U (en) 2011-07-01 2011-12-11 Qun-Jing Kong Improved stopper structure of window

Also Published As

Publication number Publication date
USD868013S1 (en) 2019-11-26
JP1584067S (enrdf_load_stackoverflow) 2017-08-21

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