TWD177006S - Cleaning brush part with polishing section for semiconductor manufacturing equipment - Google Patents

Abstract

[Use of article] This designed article is a cleaning brush that is used in semiconductor manufacturing equipment to remove "convex portions formed on the back of the substrate" or "adhesives on the back of the substrate" that may adversely affect the exposure of the substrate. ”; This designed article has a grinding part on the outside and a cleaning part on the inside. This design article, as shown in the reference figure 1 showing the use state, grinds the back side of the substrate by strongly pressing the back side of the substrate and rotating with the polishing part in contact; also, as shown in the reference figure 2 showing the use state. As shown, by rotating with the cleaning part in contact with the back surface of the substrate, grinding debris etc. caused by grinding are removed. Through the use of this designed article, one cleaning brush can be used for grinding and cleaning, so the time required for the cleaning step can be shortened, and the manufacturing processing capacity of the semiconductor manufacturing device can be prevented from being reduced. ;[Design Description];The dotted line parts disclosed in the drawing are the parts of this case that do not advocate design; the parts represented by solid lines are the parts that are intended to be partially designed; the chain lines in the figure indicate "partial design is advocated" The boundary between "parts that do not advocate design" and "parts that do not advocate design".