TWD170400S - Caulking components for wafer boats - Google Patents

Caulking components for wafer boats

Info

Publication number
TWD170400S
TWD170400S TW103307158F TW103307158F TWD170400S TW D170400 S TWD170400 S TW D170400S TW 103307158 F TW103307158 F TW 103307158F TW 103307158 F TW103307158 F TW 103307158F TW D170400 S TWD170400 S TW D170400S
Authority
TW
Taiwan
Prior art keywords
wafer
article
semiconductor substrate
caulking
holder
Prior art date
Application number
TW103307158F
Other languages
Chinese (zh)
Inventor
Kosuke Takagi
Takaaki Noda
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD170400S publication Critical patent/TWD170400S/en

Links

Abstract

【物品用途】;本設計的物品是晶舟用填縫構件，如使用狀態參考圖所示，設置在用來將半導體基板(晶圓)保持水平的基板保持具(亦稱晶圓保持具或晶舟)之未載置半導體基板(晶圓)的部位，在對於半導體基板(晶圓)進行成膜之際，為了使成膜氣體和空氣的流動保持均勻所使用的填縫構件，並且是以不會在被載置的本物品之周圍產生淤積的方式，在框體的正面側和背面都設置了矩形狀的開口部。;【設計說明】[Use of article]; The article of this design is a caulking member for wafer boats. As shown in the reference picture of the use state, it is installed in a substrate holder (also called a wafer holder or wafer holder) used to maintain the semiconductor substrate (wafer) horizontally. A caulking member used to maintain a uniform flow of film-forming gas and air during film formation on a semiconductor substrate (wafer) in a portion of a wafer boat (wafer boat) where a semiconductor substrate (wafer) is not placed, and is Rectangular openings are provided on both the front side and the back side of the frame so that sludge does not occur around the placed article. ;【Design description】

TW103307158F 2014-06-06 2014-12-05 Caulking components for wafer boats TWD170400S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-12298F JP1520826S (en) 2014-06-06 2014-06-06

Publications (1)

Publication Number Publication Date
TWD170400S true TWD170400S (en) 2015-09-11

Family

ID=53507612

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103307158F TWD170400S (en) 2014-06-06 2014-12-05 Caulking components for wafer boats

Country Status (3)

Country Link
US (1) USD748578S1 (en)
JP (1) JP1520826S (en)
TW (1) TWD170400S (en)

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Publication number Priority date Publication date Assignee Title
USD829176S1 (en) * 2016-04-26 2018-09-25 Michael Duque Power stand
US10180251B2 (en) 2016-07-21 2019-01-15 Michael Duque Power stand with switchable power and changeable utility models
USD877071S1 (en) * 2018-11-15 2020-03-03 Capital One Services, Llc Charger
USD932684S1 (en) * 2019-09-12 2021-10-05 Qwikled, Inc. Pool lighting adapter plate for plaster
USD928392S1 (en) * 2019-09-13 2021-08-17 Qwikled, Inc. Pool lighting adapter plate

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Publication number Priority date Publication date Assignee Title
US2570559A (en) * 1945-12-29 1951-10-09 Elwood M Juergenson Wheel adapter plate
US3009167A (en) * 1959-10-12 1961-11-21 Jr Harry J Leonard Plumbing adapter plate
US4454565A (en) * 1982-09-27 1984-06-12 Carlingswitch, Inc. Adapter plate assembly for circuit breaker
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Also Published As

Publication number Publication date
JP1520826S (en) 2015-04-06
USD748578S1 (en) 2016-02-02

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