TW594407B - Positive type electron beam or x-ray resist composition - Google Patents

Abstract

Provided is a positive-type electron beam or X-ray resist composition which has high resolution, confers an excellent rectangular shape, has little deficient in development, and has lower dependence on PEB temperature. A positive-type electron, beam or X-ray resist composition is characterized in that it comprises an onium salt which contains electron attractive groups and may generate an acid when being exposed to electron beam or X-ray, and a resin whose solubility in alkali-developing solution will increase by the action of such acid.

Description

Printed by the Consumer Property Agency of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 —__ B7 V. Development Instructions (>) (1) A positive electron wire or X-ray resistor composition, which is characterized by containing (a) via Iron or X-ray irradiation can generate an acid and an iron salt having at least one electron attracting group on the substituent of the cation site, and (b) a resin that increases the solubility in an alkali imaging solution by the action of an acid. (2) — A type of positive electron beam or X-ray resist composition, which is characterized by containing: (a) an electron beam or an X-ray beam which can generate an acid and has at least one electron attracting group on a substituent at a cation site; Phosphonium salts, (b) resins that increase the solubility in alkali imaging solutions by the action of acids, and (c) low-molecular-weight dissolution-preventing compounds with a molecular weight of less than 3000, which have a group that can be decomposed by acids and are soluble in alkalis. The solubility in the imaging solution is increased by the action of acid. (3) A kind of positive electron beam or X-ray resistor composition, characterized by containing (a) iron capable of generating an acid through irradiation of electron beam or X-ray and having at least one electron attracting group on a substituent at a cation site Salt, (c) a low molecular weight dissolution preventing compound with a molecular weight below 3000, which has a group that can be decomposed by an acid, and its solubility in an alkali imaging solution is increased by the action of an acid, and (d) is insoluble in water and Resin soluble in alkali developing solution. (4) The positron type electron beam or X-ray resistor composition according to any one of (1) to (3) above, wherein (a) the iron salt is at least one selected from the following general formula (I) ~ (III). This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) -------------------- Order ------- line r ( (Please read the notes on the back before filling out this page) 594407 A7 Consumption Cooperation by the Intellectual Property Bureau of the Ministry of Economic Affairs.

X (wherein at least one of R! To R15, at least one of Rm to Rw, or at least one of R44 to R53 represents an electron-extracting group; the remaining 1 ^ ~ 53 may be the same or different hydrogen atoms, branched Or a cyclic alkyl group, a branched or cyclic alkoxy group, a hydroxyl group, a halogen atom, or a -s-r54 group; R54 represents a branched or cyclic alkyl or aryl group; and, 1 ~ 1 ~ 15 This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 public love) ------------ Order (Please read the precautions on the back before filling this page)

Employees at the Intellectual Property Bureau of the Ministry of Economic Affairs pay eight prices: printed by the company 594407 A7 B7 5. Invention Description (Today), Ri6 ~ R43, R44 ~ R53 have more than two links to form one or two or more selected from Single bond, carbon atom, oxygen atom, sulfur atom, and nitrogen atom ring; X · represents at least one kind of substitutable alkyl sulfonic acid having 1 to 12 carbon atoms, benzenesulfonic acid, naphthalenesulfonic acid, and anthracenesulfonic acid (Anion) (5) The positive electron wire or X-ray resistor composition according to the above (4), wherein in the general formulae (I) to (111), X · is: at least one fluorine atom, A branched or cyclic alkyl group substituted with at least a fluorine atom, a branched or cyclic alkoxy group substituted with at least one fluorine atom, a branched or cyclic alkyl group substituted with at least one fluorine atom , 'Branched or cyclic fluorenyloxy substituted with at least one fluorine atom, branched or cyclic sulfofluorenyl substituted with at least one fluorine atom, branched or cyclic substituted with at least one fluorine atom Sulfonyloxy group, branched or cyclic sulfonamido group substituted with at least one fluorine atom, at least one Atom-substituted branched or cyclic aryl groups, branched or cyclic aralkyl groups substituted with at least one fluorine atom, and phenyl mineral acids with oxo residues substituted with at least one * gas atom , Tsai sulfonic acid and anthracene sulfonic acid. (6) Any of the positive-electron wire or X-ray resistor composition 'described in (1) to (5) above, which contains a homofluorine and / or a silicon-based surfactant. (Embodiments of the invention) The positive electronic wire or sense wire resistor of the present invention will be described in detail in the following. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------ -------------- Order --------- line (please read the precautions on the back before filling this page) Staff of Intellectual Property Bureau of the Ministry of Economic Affairs, i .. · -Printed by 594407 A7 ____ B7 V. Description of the invention (r) Composition. The energy rays used for irradiation in the composition of the present invention are electron rays or X-rays. [I) (a)-phosphonium salt, which passes electrons Irradiation by X-ray or X-ray can generate acid, and it has at least one electron attracting group (hereinafter referred to as "component (a)") on the substituent of the cation site. The component (a) is an iron salt compound capable of generating an acid when irradiated with electron rays or X-rays, and has at least one electron attracting group on a substituent at a cationic site thereon. An electron-attracting group refers to a chemical substitution group that generally has a tendency to attract electrons. For example, it refers to a tendency to draw electrons from an atom in a molecule near the position of the group. The terms "electron attracting group", "cavity group", and "electron attracting group (EWG)" are the same as "electronic attracting group". For these electron attracting groups, for example, when S + or Γ in the general formulae (I) to (III) is bonded to the meta position or para position, it is known that Hamman's σ 値 is positive. The number of electron-attracting groups in the cation site of the iron salt compound of the component (a) is at least one, preferably 1-5, and more preferably 1-3. For example, in the general formulae (I) to (III) of component (a), at least one of 5, at least one of R16 to R43, and at least one of R44 to R53 represent an electron attracting group. ~ 5, more preferably 1 ~ 3. Preferable examples of these electron attracting groups include fluorine atom, chlorine atom, cyano group, trifluoromethyl group, nitro group, sulfo group, fluorenyl group, alkoxycarbonyl group, fluorenyloxy group, sulfoxyl group, and the like. Among them, fluorenyl includes, for example, ethenyl, propionyl, and the like, and alkoxycarbonyl includes, for example, methoxycarbonyl and ethoxycarbonyl. The sulfonium salt compound is preferably, for example, a sulfonium salt, a ferric salt, an ammonium salt, or the like. Buyin Mingzhong uses (a) Z component as the general formula (丨〗 ~ (1 Π) corpse; r not < _ salt paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) ---- ---- Order --------- line (please read the notes on the back before filling this page) 594407 Printed by the Consumers ’Cooperatives IV of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (A) The compound is preferably a linear or branched alkyl group of KK to K54 in the general formulae (I) to (III), for example, a methyl group, an ethyl group, a propyl group, a n-butyl group, and a 2-butan group which may have a substituent. The number of carbon atoms of the group and the 3-butyl group is 1 to 4. The cyclic alkyl group is, for example, a cyclopropyl group, a cyclopentyl group, or a cyclohexyl group having a carbon number of 3 to 8. Examples of the chain or branched alkoxy group include methoxy, ethoxy, hydroxyethoxy, propoxy, n-butoxy, isobutoxy, 2-butoxy, and 3-butoxy The carbon number of the group is 1 to 4. Examples of the cyclic alkoxy group include a cyclopentyloxy group, a cyclohexyloxy group, and the like. Examples of the halogen atom of 1 to 53 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the aryl group of R54 include phenyl, tolyl, and methoxyphenyl. The naphthyl group may have 6 to 14 carbon atoms. The preferred examples of these substituents include alkoxy groups having 1 to 4 carbon atoms, aryl groups having 6 to 10 carbon atoms, and 2 carbon atoms. ~ 6 alkenyl groups, etc. In addition, two or more of RrRu, RrRu, and R44 ~ R53 are bonded to form one or two or more selected from single bonds, carbon atoms, oxygen atoms, sulfur atoms, and nitrogen atoms. Examples of the ring include a furan ring, a dihydrofuran ring, a pyran ring, a trihydropyran ring, a thiophene ring, a pyrrole ring, and the like. Preferred groups other than the electron-extracting group of R53 are linear, branched, Cyclic alkyl group. In general formulae (I) to (III), X- is an anion which can be substituted by methanesulfonic acid, butanesulfonic acid, benzenesulfonic acid, naphthalenesulfonic acid, or anthracenesulfonic acid. It has at least one selected from the group consisting of benzenesulfonic acid, naphthalenesulfonic acid, or anthracenesulfonate. The size of this paper is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- ---------- Order --------- line (please read the notes on the back before filling this page) 594407 A7 ^^ ------- ^-V. Invention (7) Anion of acid. At least one fluorine atom, at least one A branched or cyclic alkyl group substituted with a fluorine atom, a branched or cyclic alkoxy group substituted with at least one fluorine atom, a branched or cyclic alkyl group substituted with at least one fluorine atom, A branched or cyclic fluorenyl group substituted with at least one fluorine atom, a branched or cyclic sulfonyl group substituted with at least one fluorine atom, a branched or cyclic fluorenyl group substituted with at least one fluorine atom Sulfonyloxy, branched or cyclic sulfonamido substituted with at least one fluorine atom, branched or cyclic aryl substituted with at least one fluorine atom, branched with at least one fluorine atom Aryl or cyclic aralkyl groups, and alkoxycarboxyl groups substituted with at least one fluorine atom The linear, branched, or cyclic alkyl groups described above are substituted with 1 to 12 carbon atoms and 1 to 25 fluorine atoms Those are better. Specifically, for example, trifluoromethyl, pentafluoromethyl, 2,2,2-trifluoroethyl, heptafluoropropyl, heptafluoroisopropyl, perfluorobutyl, perfluorooctyl, perfluorodeca Dialkyl, perfluorocyclohexyl and the like. Among them, perfluoroalkyl groups having 1 to 4 carbon atoms which are all substituted with fluorine are preferred. The linear, branched or cyclic alkoxy group is preferably substituted with 1 to 12 carbon atoms and 1 to 25 fluorine atoms. Specific examples include trifluoromethoxy, pentafluoroethoxy, heptafluoroisopropoxy, perfluorobutoxy, perfluorooctyloxy, perfluorododecyloxy, perfluorocyclohexyloxy, etc. . Among them, perfluoroalkoxy groups having 1 to 4 carbon atoms which are all substituted with fluorine are preferred. The above fluorenyl group is preferably substituted by carbon number 2 ~ 12 and 1 ~ 23 fluorine atoms. -9-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the note on the back first) Please fill in this page for matters) -Φ- Order --------- M Printed by the Employees 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by 594407 ). Specifically, there are, for example, trifluoroacetamyl, fluoroacetamyl, pentafluoroacetamyl, pentafluorobenzyl and the like. The fluorenyl group is preferably substituted with 2 to 12 carbon atoms and 1 to 23 fluorine atoms. Specific examples include trifluoroacetoxy, fluoroacetoxy, pentafluoropropyloxy, pentafluorobenzyloxy and the like. The sulfo group is preferably substituted with 1 to 12 carbon atoms and 1 to 25 fluorine atoms. Specific examples include trifluoromethanesulfo, pentafluoroethanesulfo, perfluorobutanesulfo, perfluorooctanesulfo, pentafluorobenzenesulfo, 4-trifluoromethylbenzenesulfo, and the like. The sulfoamino group is preferably substituted with 1 to 12 carbon atoms and 1 to 25 fluorine atoms. Specific examples include trifluoromethanesulfoamino, perfluorobutanesulfoamino, perfluorooctanesulfoamino, and pentafluorobenzenesulfoamino. The aryl group is preferably substituted with 6 to 14 carbon atoms and 1 to 9 fluorine atoms. Specific examples include pentafluorophenyl, 4-trifluoromethylphenyl, pentafluoronaphthyl, nonafluoroanthryl, 4-fluorophenyl, 2,4-difluorophenyl and the like. The aralkyl group is preferably substituted with 7 to 10 carbon atoms and 1 to 15 fluorine atoms. Specific examples include pentafluorophenylmethyl, pentafluorophenylethyl, perfluorobenzyl, perfluorophenethyl and the like. It is preferable that the alkoxycarbonyl group is substituted with 2 to 13 carbon atoms and 1 to 25 fluorine atoms. Specific examples include trifluoromethoxycarbonyl, pentafluoroethoxycarbonyl, pentafluorophenoxycarbonyl, perfluorobutoxycarbonyl, perfluorooctyloxycarbonyl, and the like. -10-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------------------- Order ------- --- (Please read the notes on the back before filling this page) 594407 A7 ~ _____ B7___ V. Description of the invention (9) The best X-series is benzenesulfonic acid anion spear, which uses pentafluoro . The benzenesulfonic acid anion is particularly good. In addition, the benzenesulfonic acid, naphthalenesulfonic acid, or anthracenesulfonic acid having a fluorine substituent may be linear, branched, or cyclic alkoxy, fluorenyl, sulfo, sulfoxy, or sulfoamino , Aryl, aralkyl, alkoxycarbonyl (these carbon ranges are the same as above), halogen (other than fluorine), hydroxy, nitro and the like. Specific examples of the component (a) represented by the general formula (I) are shown below. ------------ ΦΜ -------- Order --------- ΜΦΙ (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperatives. This paper is printed in accordance with Chinese National Standard (CNS) A4 (210 X 297 public love). 594407 Printed by employee consumer cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs.

------------------- Order --------- (Please read the precautions on the back before filling out this page) This paper size applies Chinese national standards ( CNS) A4 specification (210 x 297 mm) 594407 A7 B7 V. Description of the invention (β) (1-10) tBu

CF3SO3- (Bu 12)

cf3so3- CF3SO3- ------------------- Order --------- ^^ 1 (Please read the precautions on the back before filling this page) ( M3)

F Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

CF 3SO3 .14 · This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of Invention (Q) (M4)

F

〇4 ^ 〇3 (I-15)

F

C4F9SO3

F (1-16)

Printed by CI Consumer Affairs Bureau, Intellectual Property Bureau, Ministry of Economic Affairs

C4F9SO3 C4F9SO3 ------------------- Order --------- (Please read the precautions on the back before filling this page)

CI -15- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention ((Battle (1-18)

CF,

c4r9so3— (1-19) CF,

CF, C4F9SO3 (1-20)

2

NO

C4F 9SO3 (1-21)

NO, C4F 9SO3 -------------------- Order --------- line (Please read the precautions on the back before filling this page)

N〇2 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (Bu 22) tBu

C4F9SO3 -16- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (4 (1 ~ 23)

C4F9SO3 (1-24) COCH3

C4F 9SO3 (1-25)

C4F9SO3 -------------------- Order --------- (Please read the notes on the back before filling this page) (1-26) Economy Ministry of Intellectual Property Bureau Staff Consumption # 作 社 印

F

C4F 9SO3 -17 · This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (4) (1-27)

F

OMo (1-28)

F

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------------- Order --------- (Please (Please read the notes on the back before filling in this page) 594407 A7 B7 V. Description of Invention (π) Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs # 作 社 印

-19- (Please read the precautions on the back before filling this page)-emmam tMmr 1 I ϋ One: Mouth, I ϋ · ϋ ϋ Hua-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Centi) 594407 A7 B7 V. Description of the invention (d) (1-36) tBu

N〇2 tBu

MeO

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) 594407 A7 B7

V. Description of the invention (W (1-40)

F

ch3- ^ > -S03-1 (Bu 41)

F

ch3-h〇h-so

F (Bu 42) (Bu 43) Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs ## 社 印制

CI

ch3-h ^^-so ch3H ^^ — so3- ----------- ίφ ^ ------- order --------- line φ- (Please read first (Notes on the back then fill out this page)

Cl —21- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (p) (1-44) CF3

(I-45) pr cf3

CF, cH3 ~ 0 ~ s〇 (Please read the notes on the back before filling this page) (I-46) NO,

CH3 ~ ^ 3 ~ S〇3 ~ (1-47)

2

NO

NO, ch3-^^-so3 ~ Order --------- 簦 Consumption of employees of the Intellectual Property Bureau of the Ministry of Economy includes # 社 印制 (1-48) tBu

NO 2

CH3 " hW ^ ~ s〇3 ^ -22. The paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (M (1-49)

cH3 ~ 〇- so, (1-50) COCH,

CH so, (1-51)

CH · so, ------------------- Order --------- (Please read the precautions on the back before filling this page) 1-52 Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperative

This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407. A7 ___B7 V. Description of Invention (") Printed by the Consumer Property Agency of the Intellectual Property Bureau of the Ministry of Economic Affairs

—24— ------------------- Order --------- Line Φ- (Please read the notes on the back before filling this page) This paper Standards are applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) 594407 A7 B7 V. Description of invention (W) (Bu 57) Consumption of employees of the Intellectual Property Bureau of the Ministry of Economic Affairs includes # 社 印

-25- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------------------- Order ------- -^^ 1 (Please read the precautions on the back before filling this page) 594407 A7 __B7 V. Description of the Invention (4) (Bub. 62) tBu Intellectual Property Bureau Staff Consumption Cooperation # 社 印

-26- ------------------ Order --------- (Please read the notes on the back before filling this page) This paper size is applicable to China Standard (CNS) A4 specification (210 X 297 mm) 594407 A7 B7 V. Description of the invention (< (1-66)

F

0 II cF3ro_0 ~ s〇2 〇 (Bu 67)

F

〇

〇 II cf3s-ohQ ^ -s〇2

F (er. 68)

CI

Ο II ο so3- -------------------- Order --------- (Please read the precautions on the back before filling this page) ·

This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 594407 '. A7 __; _B7 ~ · V. Description of the invention (4)

(Please read the precautions on the back before filling out this page)-sickle w ami H ·· ＭＭＭ 一口, I I ϋ emmt * ϋ

This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) s'. 594407 A7 B7 V. Description of the invention (> 7) (1-75) tBu

〇II cf3s-ο-^》-S〇2 〇 (1-76) (1-77) COCH3

〇II CF3S-ο so2 ο

οII CF3S —〇 —so. ο

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------------- Order --------- (Please Read the notes on the back before filling this page) 594407 A7 B7 V. Description of the invention (> o (1-79)

F

p ^^ SO (Bu 80)

F

f ~ 〇- called

F (1-81)

Printed by the Consumption House of the Intellectual Property Bureau of the Ministry of Economy of the People's Republic of China (BU 82)

P ^ _S〇2 -------------------- Order --------- (Please read the Zhuyin on the back? Matters before filling out this page)

Cl -3G- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 r •. A7. B7 V. Description of the Invention (Clever) (1-83)

CF,

(1-84)

cf3, s

NO: CF, f-〇 ^ s〇3 " (1-85)

c

fhQ_s〇3- (1-86) NO,

NO, fh0 ^ s〇3- -------------------- Order --------- line, (Please read the notes on the back before filling (This page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (1-87) tBu

NO: F-〇-S〇3 ~

Q

• 31 · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (batch) (1-88) tBu

F-f V-SO,

NO: tBu (1-89) COCH3

Q +

f ~ 〇 ^ s〇: (1-90)

CN

Q,

f-^-so3 -------------------- Order --------- (Please read the note 3 on the back before filling this page)

This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (y (1-92) (1 ~ 93) (1-94)

F

F

CF,

F cf3

Xy b- S03 a so, (Please read the notes on the back before filling this page)

Cl

CF 3 so3- --------- Order --------- Line Block Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (Bu 95)

Cl

cf3 b- so 3

Cl.33 · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of Invention (V) Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

-34- -------------------- Order --------- (Please read the precautions on the back before filling this page) This paper size applies China National Standard (CNS) A4 Specification (210 X 297 mm) 594407 A7 B7 V. Description of Invention (w) (1-101) (Μ 03) (Μ 02)

cf3 S〇3 ~ cf3b- so.

CN

c

CF3Xy so, -------------------- Order --------- line (Please read the phonetic on the back? Matters before filling out this page) Ministry of Economic Affairs Printed by the Intellectual Property Bureau's Consumer Consumption Corporation (Μ 04)

F

cf3 so / The specific example of the component (a) shown in the general formula (II) is shown below. 35 «This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 594407 A7 B7 V. Description of the invention (M (11-1)

F (cf3scv):

Cl (cf3so3-): (II-1 3)

CF, (cf3so3-): Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (II-1 4)

n〇2 (cf3so3-):

(cf3so3-):

Cl -------------------- Order --------- (Please read the notes on the back before filling this page) This paper size is applicable to China Standard (CNS) A4 specification (210 X 297 mm) 594407 A7 B7 V. Description of the invention (u (11-6)

F (c4f9s〇3)

0 0 (C4F9S03 a) (I I a 8)

cf3 (c4f9so3-) (11-9)

-------------------- Order --------- (Please read the precautions on the back before filling this page) Printed by a cooperative ό N〇2 (C4F9SO;) ό (I MO)

Cl (C4F9S03 I) This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (gift) (11-11)

(IM2)

MeO ό 0

(Please read the notes on the back before filling this page) (ΙΜ3)

CF3 MeO ό ό

0 · ϋ ϋ ϋ I mmmme mtme 1 (11-14)

N〇2

MeO Employees ’Consumption Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs (11-15)

• 38- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) .Cl

MeO

s'. 594407 r. A7 • B7 V. Description of the Invention (π) (11-16)

F

CH 3 ~ 0 ~ S〇3-

Cl (Please read the notes on the back before filling this page)

cf3 ch3——so: -n ϋ · ϋ ί ϋ OJa t— ϋ tm— Consumption printed by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs

NO: cH3 ~ ^ zy ~ s〇,

Cl This paper size applies to Chinese national standard (CNS> A4 specification (210 X 297 mm) 594407 A7 __B7 V. Description of invention (to) Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

—40— -------------------- Order --------- (Please read the notes on the back before filling this page) This paper size applies China National Standard (CNS) A4 Specification (210 X 297 mm) 594407 A7 B7 V. Description of Invention (Supplement (11-26)

0 ό (cf 〇- °-so. (11-27)

(11-28) S03 · cxsot xxsxiCF3. ό ό s〇i (11-29)

-------- Order --------- (Please read the notes on the back before filling out this page) (11-30)

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) SO3 so3 ~ 594407 A7 B7 V. Description of the invention (Ο) (11-31)

F kr〇r so;

.ci scv (Please read the notes on the back before filling out this page)

cf3 FO ~ S〇3 · --------- Order ----- Consumption of Employees of Intellectual Property Bureau of Ministry of Economic Affairs

This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of Invention (々I) (I1-36)

F CF35- S〇3

Cl cf3hr S03-

cf3 cf3b-

SCV Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (11-39)

No. 2 / Cp3

SCV ------------ ^ 装 -------- Order --------- ύψ (Please read the note on the back? Matters before filling out this page)

Cl cf30 ~ s03 '/ 2 Formula (III) The specific example of component (a) is shown below. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) —43— 594407 A7 B7 V. Description of the Invention (〇) (IIM) (II1-2)

CF3SO3 CF3S03 I (II1-3) (II1-4)

cf3s〇3 ~ CF3S03- (Please read the precautions on the back before filling this page) (111-5)

CF3SO3- _ i ^ i i_i · 1 mmtmm i ^ ii ^ i ϋ ·· I ^^ 1 1 iai dll-6) (111-7) Employees of Intellectual Property Bureau of the Ministry of Economic Affairs include # 社 印制 (m-8) (111-9)

Ci CF3SO3- CF3SO3- cf3s〇3 一 CF3SO3 * Hua · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention

C4F gS〇3

C4F9S03 (I I 1-12) (111-13)

C4F 9S03 C4F9S03 (II M4)

C4F 9SO3 (111-15) (I I 1-16)

C4F 9SO3 C4F 9SO3 ------------ install -------- order --------- (Please read the note on the back? Matters before filling out this page) Ministry of Economy Printed by the Intellectual Property Bureau Staff Consumer Cooperative (111-17) (II 1-18)

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) C4F gS〇3 C4F9SO3 '594407 • A7 B7 V. Description of invention (w) (111 ~ 19)

MeO

(I I I-20)

MeO

(I 11-21)

MeO

(I -22)

Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (I 23)

-46-

MeO

MeO

-------------------- Order --------- (Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS) A4 specifications (210 X 297 mm) 594407 A7 B7 V. Description of the invention (α) (II, 24)

MeO

(I I1-25)

MeO

(111-26)

MeO

----------- Installation -------- Order --------- (Please read the precautions on the back before filling this page) (111-27) Ministry of Economy Printed by the Intellectual Property Bureau Staff Consumer Cooperative

MeO

-47- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of Invention (4) (I I 1-28)

F

ch3-^^-so3- (111-29)

F CH3-〇- so, (II Bu 30) (111-31)

ch3-h ^^-so3 · ch3— ^ ~ S03 '(I I 卜 32)

(m-33)

(m-35) so3 a -------------------- Order --------- (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (m-36)

CH S03 I

Cl

CH S〇3 一 -48- This paper size is applicable to Chinese National Standard (CNS) A4 (210 x 297 mm) 594407 A7 B7 V. Description of invention (W) (I I bu 37)

3

SO (111-38)

SO, (111-39)

(111-40)

F F

----------- Installation -------- Order --------- (Please read the notes on the back before filling this page) Printed by the cooperative (111-41)

S〇3 ~ -49- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (I I 1-42)

F F F F— "> S03 ^ (111-43)

SO, (111-44)

SO, (111-45)

----------- Installation -------- Order --------- (Please read the note 3 on the back before filling this page) Printed by consumer cooperatives cl

03 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (P) (I I1-51)

CF3S —〇 —so.

〇 II 〇 (MI-52)

f ° -〇- 2 o so. (Please read the notes on the back before filling this page) (I I 卜 53) 〇

Cl cp3r〇-〇- so, o (I Ib 54)

CF3S-o-(》 ~ so ^

〇II o Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs—52 · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (β) (II 1-55 )

F

(II Bu 56)

(111-57) (111-58)

(I I 1-59)

(111-60) (111-61) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (II1-62) (m-63)

CI f-〇-s〇3 'f ^ 〇-so3-F ^ O ^ SOf F-〇-S〇3-F-^^ — S03-F ~ 0 ~ S〇3 · ------- ------------ Order --------- (Please read the notes on the back before filling this page)

F -o SO, -53- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of Invention (β) (III-64) CF3

F

SO, (111-65)

F

F CF3 SO, (111-66) cf3

Cl

5- so. (II 卜 67)

Cl

Cl cf35- so. ----------- # 装 -------- Order --------- ^ 9. (Please read the notes on the back before filling in this (Pages) (111-68) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

F3C

cf3 cf3 < ^^ so3- • 54- This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) 594407 A7 B7 V. Description of the invention (Η) (I I 1-69) CF, o2n

NO, (I I 1-70) CF3 :: Zhong. , (I I 1-71)

Cl cf3 so, (m -72) cf3 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

Cl

Cl • 55 · This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm)

Xy so, '-(Please read the notes on the back before filling this page)

Consumption by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs ☆ Printed by the company 594407 A7 _____B7__ 5. I states that (β) The component (a) can be used in one kind or two or more kinds. The content of the component (a) is generally 0.1 to 20% by weight, preferably (K5 to 10% by weight, and more preferably, all solid components in the positive electron or X-ray resistor composition of the present invention). 1 to 7% by weight. The compounds of the general formulae (I) and (II) include, for example, an aryl Grignard reagent such as an aryl magnesium bromide, which can be reacted with a substituted or unsubstituted phenylsulfonate. 2. Make the obtained triarylsulfohalide and the corresponding sulfonic acid a salt exchange method, and use methanesulfonic acid / phosphorus pentoxide or chlorine for the substituted or unsubstituted phenylsulfonate and the corresponding aromatic compound A method of condensation and salt exchange of an acid catalyst such as aluminum oxide, or a method of condensation and salt exchange of a diaryl iron iodide salt and a diaryl sulfide using a catalyst such as copper acetate, etc. are synthesized. It can be synthesized by reacting an aromatic compound with a periodate. In addition, the sulfonic acid or sulfonate used for the salt exchange can be hydrolyzed by a commercially available sulfonic acid chloride method to make the aromatic compound and Method for reacting chlorosulfonic acid with aromatic compound and It can be prepared by a method such as a sulfonic acid reaction. [1] The acid generating compound used in addition to the component (a) In the present invention, it can be generated by decomposition of the energy ray in addition to the component (a) Compounds of acids.-"With the ingredients of this hair ra V. Used_ Borrow also \ -56 · This paper size • Applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- --Installation -------- Order --------- (Please read the precautions on the back before filling this page) 594407 A7 B7 V. Description of the invention (^) (Please read the back Please fill in this page again for attention) etal, Polymer Preprints, Japan, 37 (3), European Patent No. 199,672, same as 84515, same as 199,672, same as 044,115, · same as 0101,122, US Patent No. 6 1 No. 8,564, same as 4,371,605, same as 4,431,774, JP Sho 64, 1 8 143, JP 2-245 7 56, JP 3-140109, etc. Typical photodecomposition compounds that generate acids, and second-mill compounds described in JP-A-61-166544, etc. In addition, these compounds generate acid radicals or make compounds by irradiation with energy rays. Compounds that are incorporated into the polymer's main chain or side chain are, for example, ME Wopdhouse eta 1, J. Am. Chem. Soc., 1 04,5586 (1982) 'S. Printed by P. Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Pappas etal, J, Imaging Sci., 30 (5), 218 (1986) 'S. Kondo etal, Macromol.Chem., Rapid Commun., 9, 625 (1988)' Y. Yamada etal, Macromol.Chem., 152,153,163 (1972) 'JVCrivello etal, J. PolymerSci., Polymer Chem. Ed., 1,3,845 (1,979), U.S. Patent No. [849,1 37, German Patent No. 3914407, JP Sho 63- 266 53, JP 55-164824, JP 62-69263, JP 63-146038, JP 63-1 63452, JP 62-4 5 3853, JP Zhao Compounds described in Mutual 3-146029 and others. In addition, V.N.R. Pill ai, Synthesis, (l), 1 (1 980), A.

Abad etal'Tetrahedron Lett., (47) 4555 (1 971), DHR Barton etal, J. Chem. Soc., (C), 329 (F70),-U.S. Patent-60-This paper size applies to Chinese national standards ( CNS) A4 specification (210 x 297 public love ^: 594407

A7 B7 V. Description of Invention (M) 筚 3.779,778, European Patent No. 126,712, etc. Uses also described Compounds that generate acid by light. 'Among the above-mentioned compounds which generate an acid by irradiation with energy rays, the following description is particularly effective. (1) An oxazole derivative substituted with a trihalomethyl group and represented by the following formula (PAG1) or an S-triazine derivative represented by the general formula (PAG2). N—N // \\

/ CC R201, 〇′'C (Y) 3 (PAG1), where R2 () 1 represents a substituted or unsubstituted aryl group, alkenyl R2 () 2 represents a substituted or unsubstituted aryl group, Group, alkyl, -C (Y) 3. The Y system represents a chlorine atom or an olfactory atom. ------------------- Order ----- (Please read the precautions on the back before filling out this page) Stupid · Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

Γ .6 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (h) N—N Gl-^^ " ~ CH = GH-G, 〇 / C_CCl3 (PAG1 -1) N——N // W CH = CH — CC ~ CC13, 0, CH3 〇 (PAG1 — 2) CH3〇N—N // W CH = CH-C C-CBr3, 〇 / ( n) C4H90 (PAG1-3) N—N // W CH = CH-C C-CCI3 (PAG1 — 4)

CH = CH-C C-CC13, 〇, (PAG1-5) o-

CH = CH

N—N -------- Order -------- (Please read the notes on the back before filling out this page) Employee Consumption of Intellectual Property Bureau of the Ministry of Economic Affairs < a '' printed by the company

(PAG1-6) N—N // \\ CH = CH — C C-CCI3 xOx (PAG1-7) • CH = CH- -CH = CH-C 0-CCI3 (PAG1-8) -62- Private paper Standards are applicable to China National Standard (CNS) A4 specifications (210 x 297 mm) 594407 A7 B7 V. Description of invention (W) CC13 r person M

C13C person N 夂 CC13 (PAG2 — 1)

Cl

(PAG2-2)

(PAG2-3)

(PAG2-4) (Please read the notes on the back before filling this page)

(PAG2-5).

COCH3-ϋ 1 MmmKm in one sip, I I tmt 1 si. Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs # 作 社 印

C13C

N " CC13 (FAG2-8) -63- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 Jade, invention description) C1

(PAG2-9)

Q

CH = CH

(PAG2-10) (2) An iodonium represented by the following general formula (PAG3) or a sulfonate represented by the general formula (PAG4).

ArJ R203 (Please read the notes on the back before filling this page) I 卞 Z. R204 s + ζ ·

Ar <

R 205 (PAG4) Consumption by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs, including printed by the company (PAG3) Here, the formulas Ar1 and Ar2 each represent an independently substituted or unsubstituted aryl group. Preferred substituents are, for example, alkyl, cycloalkyl, aryl, alkoxy, carboxyl, hydroxyl, and thiol groups. R2O3, R2O4, and R2O5 each represent an independently substituted or unsubstituted aryl group. Preferred are aryl groups having 6 to 14 carbons, alkyl groups having 1 to 8 carbons, and substituted derivatives thereof. Preferred substituents include, for example, an alkoxy group having 1 to 8 carbon atoms for an aryl group, an alkyl group having 1 to 8 carbon atoms, a carboxyl group, and a hydroxy group, and an alkoxy group having i _ δ for an alkyl group. % Carboxyl * alkoxy carbonyl. ^ -64- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 public love) A7 A7

(W) Z- system means a counter anion, for example, 3? 4_, human 8? ^,? ? 6 :, 31) Condensed polynuclear aromatic sulfonate anion, anthracene sulfonate, perfluorinated alkenyl sulfonic acid anion, pentafluorobenzenesulfonic acid anion, naphthalene-sulfonic acid anion, etc. Anions, sulfonic group-containing dyes, etc. are not limited by these. Further, two of R2Q3, R2 () 4, and R2.5 and Ar ^ Ar2 may each be a single bond or bonded through a substituent. Specific examples are shown below, but are not limited thereto. 0 ~, +-〇bf, (PAG: 3-1) 〇- · + -〇pF6- (PAG3-2) 0 ~ 丨 + -1 0 AsF6- (PAG3-3) 〇- | + -〇sbFe_ (PAG3 -4) -65- i Paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ----------- Installation -------- Order ---- ----- ^ 9. (Please read the precautions on the back before filling out this page) CH3 SbFg printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

594407 A7 B7 V. Description of the invention (w) CF3S〇3 (PAG3-5) 〇 > -i +-^^ 〇ch3 pf6_ (PAG3-6) ~ l + —C ~ ^ " 〇CH3 SbF6 (PAG3-7) h3c -〇- | + _〇 ^ cH3 AsFe * (PAG3-8) H3C (PAG3-9) CH3 (n) C7H15 (n) C7H15 PF6- (PAG3-10) ----------- --------- Order --------- line (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-66 · This paper size applies China National Standard (CNS) A4 (210 x 297 mm) 594407 A7 B7 V. Description of Invention (Shan

CF, SO-3

OCH3

O3S ~ /) —OC2H5 (PAG3-16) 0 ^ ι + _0 (PAG3-17)

NH 〇3S

------------------ —Order --------- Hua (Please read the notes on the back before filling out this page) Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the club -68— This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (W) ⑻ h ”c5

(n) C5H ”(PAG3-19) OCH3 S〇3 一 -------------------- Order --------- (Please read the back first Please pay attention to this page and fill in this page again) Consumption by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs ££ Printed by the agency 9 6 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 594407 * A7 B7 Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employee Consumption Cooperative. V. Description of the invention (with) α α α α-s (ΡΛ (Μ I) -S + (PAG4-2)-S 十 (PAG4-3) -S + (PAG4-4) BF. pf6

AsFfi

SbF6 + CF3SO3- (PAG4-5)

Of + (PAG4-H)

• 70 · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ---------------------- Order ----- ---- Line (Please read the precautions on the back before filling this page) C8F17SO: j

594407 A7 B7 V. Description of the Invention (Μ; Ό ~;

h3c- \ / -s-K \ / ^ 〇c2h5 (PAG4-8) CF3S03

H3CO < y s

Cl (PAG4-9) so3-

HO — ^ — S ~ CH3 ch3 OC4H9 s〇r

OCH, (Please read the notes on the back before filling this page) (PAG 'Bu 10)

(PAG4-11)

, ≪ y

HO ~ </ Bu S 4 Employee Consumption of Intellectual Property Bureau of the Ministry of Economic Affairs # Printed by Zuosha (l) AG4-⑵

CF, SO; r -71- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7

V. Description of the invention (V (n) C4Hg HO (n) C4H9 4 ^ 9- &lt; &gt; € PF6 &quot; (PAG4-14) so

HO CH3 Me02c (PAG4-15) 3

C〇2Me (Please read the notes on the back before filling this page)

S + o pf6 (PAG4-16)

scV

OH (PAG4-17) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

(PA &amp; 4-18) • 72 · This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (一 0 ^ Vc-CH ^ S-CIl, ch3 ( PAG4-19)

C-ch2-s \ (PAG, Bu 20)

0〇S- OMe SO,

COOCH2CH2CH2CH3

Cl (1 ^ 04-22) -------------------- Order --------- (Please read the notes on the back before filling this page ) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy — 〇 ^ ~-ch2-s,

PFb (J) AG4-23)

〇c-ch2—s (PAG4-24)

AsFh '.73 · This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (&gt; Meaning och2 ~ ⑻c4h9 (n) QH9 (PAG4-25) PF (6

c8h17s〇3_ (PAG4-26) o ~ &lt; y 《

c4f9so3 · (PAG4-27)

s 2CF3SO3 ·

s

CH, ------------ ^ 装 -------- Order --------- Mf (Please read the notes on the back before filling this page) + Economy Consumption printed by the staff of the Intellectual Property Bureau of the Ministry of Harajuku (l) AG4-: U))

S〇3〇c2h5 so.

cooch2ch2ch2ch :, (PAG4-31) • 74 · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (π {3 ~ f-CH2Cl CH, h〇 ^ Q-s +-{〇) (PAG4-32)

(PAG 'Bu 33)

Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (PAG BU34) The seal JE shown in the general formulae (PAG3) and (PAG4) is, for example, JWKnapczyk etal, J.Am.Chem.Soc., 91, 145 (1969), AL Maycok etal, J. Org. Chem., 35, 2532, (1970) 'E. Geothes eta 1, Bu11.Soc. Chem. Be 1g., 73, 546 (1964), HM Leicester. J. Ame. Chem. Soc., 51, 3587 (1929) 'JVCrivello etal, J. Polym. Chem. Ed., 18, 2677 (1980), U.S. Patent No. 2,807,648, and the same No. 4,247,47 3 , JP 53-101, 331 and other methods. : The following general formula (the second one is shown in PMSi or the first formula -75-) This paper size is applicable to China National Standard (CISiS) A4 specification (210 X 297 mm) ----------- --------- Order --------- (Please read the notes on the back before filling this page) 594407 A7 B7 V. The imine shown in the description of the invention (%) (PAG6) Sulfonate derivatives

Ar ^ -SO ^ SO ^ Ar4 R-S0.2

(1) AG5) (PAG6) wherein Ar3 and Ar4 are each independently substituted or unsubstituted aryl. R2Q6 represents a substituted or unsubstituted alkyl or aryl. A represents a substituted or unsubstituted alkylene group, alkenylene group, or arylene group. Specific examples are shown below, but are not limited by these. (Please read the precautions on the back before filling out this page) ▼ Install -------- Order ----- Huawei Intellectual Property Bureau Staff Consumption Order Printed by the Agency

This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) 594407 A7 B7 V. Description of the invention (#) C1 O ~ s〇2-s〇2 ^ 0 ^ (PAG5 -1)

Cl H3C ~ * ^^^ S〇2-S〇2 ch3 (PAG5 — 2) H3CO S〇2-S〇2〇CH3 (PAG5-3) h3c-^^ so2-so2-^^ (PAG5-4)

Cl F3C ^ Q ^ S02-S〇2-^^^ CF3 (PAG5-5) (Please read the notes on the back before filling this page)-I ϋ ϋ · ϋ ϋ eMmmm sip, I 1 1

S〇2 ~ S〇2

Cl (PAG5-6) si. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs h5c2o

oa soz-s〇z \ ^ (PAG5-7) S02 ~ S02 O- (PAG5 ^ 8)

Cl

Cl 77 · This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (&gt;)

Cl

(PAG5 -10)

Cl H3C \ HCΗ3 ^ S02-S02 (PAG5-9) ch3 S〇2-S02h ^^ 〇CH3 S〇2-S〇2

〇CH3 (PAG5-11)

-^ so2-so2-Q (PAG5-12) (Please read the precautions on the back before filling out this page) '1 &gt; 1 ·-1 «.1 1 tmf eat emmt one-I .ϋ 1 1 ϋ

p F

F F

F-S〇2 ~ A, F

F F F F Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (PAG5-13)

S〇2-S02— (PAG5-14) -78- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (mouth)

〇 / N-0—S02- ^} 〇 (PAG6-1)

, Ν-0—S〇2 ^ ~ ^ &quot; CH3 〇 (PAG6-2) 〇

〇CH3

cf3 ----------- install -------- order --------- ^ 9. (Please read the precautions on the back before filling this page) Ministry of Economy Wisdom Printed by the Property Agency Staff Consumer Cooperative

.79 · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 x 297 mm) 594407 A7 B7 V. Description of the invention (0

0 (PAG6-7) 〇 N ~ 0 ~ S〇2 〇 (PAG6 — 8)

^ [一 〇 — g〇2 1 0 (PAG6 -10)

so2- &lt; ch2 ^ -ch3 0 (PAG6 -11) -------------------- Order --------- (Please read the Please fill in this page again for attention) Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

〇 (PAG6 -12) -80- This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (9?)

(PAG6 -13)

(PAG6-14) F 7

[III] (b) Resin (hereinafter referred to as "ingredient (b)") which increases the solution in the alkali developing solution by the action of acid · By the positive electron beam or X-ray resistance of the present invention The acid used in the body composition and the resin (component (b)) that increases the dissolution in the alkali developing solution are components in the resin main chain or JJI, or in the main chain or side chain. With acid __-.......... "a .... + '. Κ. Υ ..... called, and pain 丨. 丨 cis-paste to prevent ..., the decomposition of the base of the g lipid. A resin having a base obtained by acid decomposition in a side chain. A preferred base among the bases obtained by acid decomposition is 〃c〇〇 €… 〇-B0 基 · -81-This paper applies Chinese National Standard (CNS) A4 Specifications (210 X 297 mm) ------------ ^ Installation -------- Order --------- Hua (Please read the precautions on the back first (Fill in this page) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 B7_ V. Invention Description (M) In addition, such bases as -RG-C00AG, or Ar-0-BG are shown. Among them, -SUi ^ MR ^ HR. 3) or -C (R ° 4) (R ° 5) -0-R ° 6 group. BG means AG or -CO-OA ^ group R0, W1 to RG6, and Ar are as follows.) The acid decomposable group is a silane ether group, a cumyl group, an acetaldehyde group, a tetrahydropyranyl ether group, an enol ether group, an enol ester group, Alkyl alkyl ether group, tertiary alkyl ester group :, tertiary alkyl carbonate group, etc. More preferred are primary alkyl ester group, tertiary alkyl carbonate group, cumyl group, acetaldehyde group, tetrahydropyridine Secondly, the parent resin when these acids are decomposed and bonded to the side chain is alkali-soluble with a side chain having -0H or -C00H, preferably -RG-C00H or -Ar-OH group Resin. For example, the following alkali-soluble resin. The alkali-dissolving rate of these alkali-soluble soluble resins is more preferably 1.70A / second as measured by 0.26 1N tetramethylammonium halide (TMAH) (23 ° C). It is 330 A / sec or more (A is Angstrom). From this viewpoint, the more preferable alkali-soluble resin is ortho-, meta-, para-poly (hydroxystyrene) and the copolymers thereof, hydrogenated poly ( Hydroxystyrene), halogen- or alkyl-substituted poly (hydroxystyrene), parts of poly (hydroxystyrene), ortho-alkylated or meta-fluorinated compounds, styrene-hydroxybenzene Ethylene copolymer, α-methylstyrene-hydroxystyrene copolymer and hydrogen-divided aldehyde lacquer resin. The component (b) used in the present invention is, for example, European Patent No. jj_54853, Japanese Patent Application Laid-Open No. 2-25850, and the same 3- No. 223860, ibid. -25 1 259 g, which is obtained by the precursor reaction of the base-soluble resin base, or the copolymerization with the base-soluble resin monopolymer which is linked with the base obtained by acid decomposition. Specific examples of the component (b) used in the present invention are described below, and are not limited thereto. -82-This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) '---------— ιφ ^ -------- Order ------ --- (Please read the notes on the back before filling this page) 594407 A7 B7 V. Description of the invention (heart

-iCH-CH2) —f CH-CH2 &gt;-

OtBu OH (b-1) iCH-CH2)-

o-7 (b-2) fCH ~ CH2)--(CH-CH2)-(CH-CH2 ^ O-C-0-tBu ll 〇 (b-3)

OH O-CH-O-E! OH CH3 (b-4) iCR-CHzf-(CH ~ CH2)-(CH-CH2)-0-CH2-C-0-tBu ll 〇 (b-5)

ch3 0-CH2-C ~ 0 ~ tBu! l .〇 (b-6)

CH2HpEi-CH2 and CH2) ~ (CH-CH2 &gt;-OH

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs OH 0-CH2-C-0-tBu 0 (b-7) OH 0 —CH2-C—0-tBu Dagger II 〇 (b-8) ------ ----- Install -------- Order --------- (Please read the notes on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 594407 t •-A • A7. B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (# -iCE-CRz ^

-{CH2CH ^ — ch3 ch3 l) ~-(C-CH2) ~ CH3 —I fH3 / ^ v coo-ch3 0 0-ch2-c-1 0-c

ch3 -fCH-CH2h *

-(CH OH (b-10) -CH) — I -iC-CH2) —Istrict COO—C- &quot; ch3

COOCH3 COOCH3 COO—tBu (Bu 12) ch3-(CH2-C) — COO-CH2 (Please read the notes on the back before filling this page) CH3 — (CH2-? Bu coo

0 (b-13)-· I an an ϋ ϋ n--ον I ϋ · ϋ ϋ · ϋ-&CH; CH- CH2h-iCH- CH2) ~ (CH-CH2)-

(b-14) SI. OH O-CHp —C—0—tBu II 0

iCR-CH2) — (CH-cm—

CN CN (b-15) O-CH-O-C2H5 OH CHs -84- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (h 4CH-CH juice

OtBu OH ~ iCR-CEz)-(CH-CH2) ~~ (CH-CHt- CN CN

OH (b-17) 0_CH2-C-0—tBu II 0 ch3

~ (CH-CH2) —— (CH2-C)-COO-CH2CH2-OH

OtBu (b-1 B) -iCH-CH2) ~~ (CH-CH)

(b-19) ----------- install -------- order --------- (Please read the precautions on the back before filling this page)

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 0-C- OtBu OH II 〇

(b-20) This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 public love) 594407 r Qin • A7 B7 V. Description of the invention (heart) ch3 -iCH-CH2 &gt; -iC-CH2 ^-^ CH-CH2h * I * COO-tBu

&lt; ch-ch2) —

OH (b-21) 0-CH-0-C4Hgt OH (b-22) CH3 -iCH-CH2) ~ (CH-CH2)

OH

—FCH-CHh 0 and N into 0 CH3 (b-23) 0-CH2-C—0 — tBu I! 0 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

(b-24) -------------------- Order --------- line (Please read the precautions on the back before filling this page)- 8 &amp;-This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention

(b-26)? H3 V -C-CHa) COOtBu

IBu OH COO-tBu (b-27) [CH4CH2: -CH2] — ^ CH-CH2j

OH 3r ° ^ 〇 (b-29) (Please read the precautions on the back before filling this page) (b-28)

^ CH-CH2] ~ ^ QH-CH2 ^

Cracking -------- Order ---------.

OH Intellectual Property Bureau, Ministry of Economic Affairs, Employee Consumption Cooperative Printing (b-32) -S7- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 _I__B7 / V. Description of the invention (% ) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

-------------------- Order --------- Line (Please read the notes on the back before filling this page) This paper size is applicable to China Standard (CNS) A4 specification (210 X 297 mm) 594407 A7 B7 V. Description of invention (lamp) i-Bu

OH

Ο

Ο

CT, 〇〆 卜 Bu OH

CT

(b-36)

------------------- Order --------- line (please read the precautions on the back before filling this page) Staff Consumption of Intellectual Property Bureau of the Ministry of Economic Affairs Printed by i4

C02Bu (t) OH (b-37) 89- This paper size is applicable to China National Standard (CNS) A4 (210 x 297 mm) 594407 A7--B7 ___ 5. Description of the invention (to) The content of the base is based on the acid-decomposed base in the resin ______ ^ (Please read the precautions on the back before filling in this page) The number (B) and the number of alkali-soluble bases protected by the acid-decomposed base (_S ), B / jB + S). The content rate is preferably from 0.01 to 0.7, more preferably from 0.05 to 0.50, and most preferably from 0.05 to 0.40. B / (B + S)> 0.7 is caused by the shrinkage of the PEB film, poor adhesion to the substrate, or scum. In addition, B / (B + S) &lt; 0.01 is not desirable because significant fixed wave systems remain on the sidewall of the pattern. It is desirable that the weight average molecular weight (Mw) of the component (b) be 2,000 to 200,000. If it is less than 2,000, the film tends to be greatly reduced due to the appearance of an unexposed cloth, and when it is more than 200,000, the alkali-soluble resin itself has a slower dissolution rate and tends to decrease sensitivity. The better is 5,000 to 100,000, and the best is 8,000 to 50,000. In addition, the molecular weight distribution (Mw / Mn) is preferably 1.0 to 4.0, more preferably 1.0 to 2 ", and the most preferable is 1.0 to 1.6. The smaller the degree of dispersion, the higher the heat resistance and image formation properties ( Pattern appearance, defocus range) the better. Here, the weight average molecular weight is defined in terms of polystyrene conversion with a gel permeation chromatography method. Printed by the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs as a food company. In addition, component (b) can be used in combination of two or more. The amount of the ingredients used in the present invention is 40 to 99% by weight, and more preferably 60 to 95% by weight, based on the solid content of the entire composition. In order to adjust the alkali solubility, an alkali-soluble resin having no group obtained by acid decomposition may be mixed. -90- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumers' Service of Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 ___B7_ 5. Description of the invention (decay) Solvent-resistant low-molecular dissolution prevention Compounds. At this time, the content of the dissolution preventing compound is 3 to 45% by weight, preferably 5 to 30% by weight, and more preferably 10 to 20% by weight, based on the solid content of the entire composition. [IV] (e) Fluorine-based and / or silicon-based surfactants (hereinafter referred to as "(e) component") β The following describes the use of the positive electron beam or energy ray blocker composition of the present invention. (E) Fluorine surfactant and silicon surfactant. The composition of the present invention may be any one of a fluorine-based surfactant and a silicon-based surfactant, and may also contain two. This makes the effect of the present invention more apparent. The component (e) of the present invention includes, for example, JP-A-Sho 62-36663, JP-A-Sho 61-226746, JP-A-Sho 61-226745, JP-A-Sho 62- 1 70950, No., JP-Sho 63 · 3454 〇, JP 7-23〇 丨 65, JP 8-62S34, JP 9-54432, JP 9-5988 described in the surfactants, can also be directly used in the following commercially available Surfactant. • Commercially available surfactants used include Jefferson Pu (transliteration) EF301, EF303, (Shin Akita Kasei Co., Ltd.), Floraton (Transliteration) FC4 30, 431 (Sumitomo Shiriez (Transliteration) (stock) system, Mekafak (transliteration) F171, F173, F176, F189, R08 (Danish Ink (stock, system)), Seflon (transliteration) S-382, SC101, 102, Ί 〇3, 104, Secret, [0 6 (Asahi; (Teng) meal) and other fluorine-based media welfare -91- This paper size applies to China National Standard (CNS) A4 regulations ^ each (210 X 297 mm) '---------------------------- ^ 9. (Please read the notes on the back before filling this page) Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative 594407 A7 —____ ^ _ B7____ 5. Description of the invention (%) Surfactant. Furthermore, a polysiloxane polymer KP-341 (made by Shin-Etsu Chemical Industry Co., Ltd.) can also be used as the silicon-based surfactant. (e) The compounding amount of the component is generally 0.00001 to 2% by weight, preferably 0.0001 to 1% by weight, based on the solid content of all the components in the composition of the present invention. These surfactants can be used alone or in combination of two or more. [V] (c) Low-molecular acid decomposable dissolution preventing compound (hereinafter referred to as "(c) component") The component (C) may also be used in the present invention. The component (C) has a base obtained by acid decomposition, and the solubility in an alkali developing solution is increased by the action of an acid, and a low-molecular-weight dissolution preventing compound having a molecular weight of 3,000 or less. The preferred (c) component blended in the composition of the present invention is when the structure has at least two groups obtained by acid decomposition and the distance between the four groups is the furthest. A compound having at least 8 bonded atoms outside the acid-decomposable group. It is preferable that the component (c) has at least two groups obtained by acid decomposition in its structure, and the distance between the acid-decomposable groups is the farthest position, except that the acid-decomposable groups pass through at least 10 groups. , Preferably Π, more preferably a compound having 12 bonded atoms, or at least 3 groups obtained by acid decomposition, and the distance between the acid-decomposable groups is the furthest. The acid-decomposable base is at least nine, preferably 10, and more preferably II bonded Z 1 Ego. Yes, happy: '上 ▲ 细 眠 -92- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------- * 4 ^ Loading ---- ---- Order --------- ^ 9 (Please read the notes on the back before filling this page) 594407 A7 — _B7 _V. Description of the invention (9 1) The upper limit is 50, better For 30. (c) When the acid-decomposable dissolution preventing component of the component has three or more acid-decomposable groups, preferably four or more, or two acid-decomposable groups, when the acid-decomposable groups are separated by a certain distance or more, The resistance to dissolution in the alkali-soluble resin is significantly improved. The distance between the acid-decomposable groups is shown by the number of bonded atoms except for the acid-decomposable group. For example, in the following compounds (1) and (2), the distance between the acid-decomposable groups is 4 bonded atoms each, and the compound (3) has 12 bonded atoms. O-B1 ⑴ A0-OOC-4¾-2CH2-3CH2-4CH2-COO-A0 (2)

CH3

ch3 ------------------- Order --------- ^ 91 (Please read the notes on the back before filling out this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the employee consumer cooperative (3) Acid-decomposable group: -CC) Cka £) 、 一 0 一 # In addition, (c) The acid-decomposable dissolution preventing component of the component (c) may have several acids on one benzene ring A compound formed by the structure of a decomposable base. In addition, the molecular weight of the acid-decomposable metabolizing compound of the present invention is -93. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). The employee ’s consumer property of the Intellectual Property Bureau of the Ministry of Economic Affairs is used for printing. 594407 A7 ^^ ______B7___ V. Description of the invention) 3,000 or less, preferably 300 to 3,000, more preferably 500 to 2,500. A preferred embodiment of the present invention is, for example, a base obtained by acid decomposition. , Is a group containing -COOA °, -0-B °, for example, a group represented by -RQ-COOA °, or Ar-O-BG. . Among them, -CUWHRMMR. 3), -SUi ^ HRMKR. 3) or base. BG stands for AG or -CO-O-A. base. R (H, r02, r03, R04, and r05 are each the same or different hydrogen atom, alkyl, cycloalkyl, alkenyl, or aryl, and RQ6 represents alkyl or aryl. However, RQ ~ RQ3 At least two of them are a group other than hydrogen, or two groups of RQi ~ RQ3 and RG4 ~ M6 are linked to form a ring. It means a divalent or more aliphatic or aromatic hydroxyl group which may have a substituent, -Ar- Is a divalent or more aromatic group having a monocyclic or polycyclic substituent. Here, the alkyl group is, for example, methyl, ethyl, propyl, n-butyl, 2-butyl, or 3-butyl. The number of carbon atoms is preferably 1 to 4, and the number of carbon atoms of cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclohexyl, and austenyl is preferably 3 to 10, and the number of alkenyl groups such as vinyl, The carbon number of propenyl, allyl, and butenyl is preferably 2 to 4, and the carbon number of aryl is 6 to 14 such as phenyl, xylyl, tolyl, cumyl, naphthyl, and anthracenyl. Among them, the substituent is, for example, a halogen atom (fluorine, chlorine, bromine, iodine), a nitro group, a cyano group, the above-mentioned alkyl group, a methoxy group, an ethoxy group, a hydroxyethoxy group,-mm ~ m- έ τμμ-μτμμ-:-^ • 94 · This paper Degree applies to China National Standard (CNS) A4 specification (210 X 297 mm) ------------ installation -------- order --------- § ( Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 _ B7_ V. Description of the invention Alkoxycarbonyl, benzyl, phenethyl, cumyl, and the like, aryloxy, methyl, methyl, ethyl, butyl, phenyl, cyano, and pentyl Alkoxy groups such as fluorenyl and butyryloxy, alkenyl groups such as alkenyl, vinyloxy, propyleneoxy, allyloxy, butenyloxy, aryloxy groups such as aryl, phenoxy Aryloxycarbonyl groups such as alkyl, phenylfluorenyl, and the like. The acid-decomposable groups include silyl ether, cumyl, acetal, tetrahydropyranyl ether, enol ether, enol ester, and tertiary Ether groups, tertiary alkyl ester groups, tertiary alkyl carbonate groups, etc. are more preferred. Tertiary alkyl ester groups, tertiary alkyl carbonate groups, cumyl groups, and tetrahydropyranyl ether groups are more preferred. c) The better ingredients include, for example, JP-A-1,289,946, JP-A Hei 1-289947, JP 2-2560, JP 3-1 289 59, JP 3-1 58855, JP 3-1 793 53, JP 3-191351, JP 3 -2002 No. 54, JP 3-200252, JP 3-200253, JP 3-200254, JP 3-0025j, JP 3-259 1 49, JP 3-279958 JP 3-2799 59, JP 4-1 650, JP 4-y51, JP 6-1356Q, JP 4-12356, JP 4-12357, JP-J- No. 3J229 ·, No. 3 230230, No. 3 320320, No. 4-251 57, No. 4-52732, No. 4-103215, No. 4 No. 1 04 5421, JP 4-107885 r · * 今 · τ ·-t—,-^ ^ rj ^ r-tm λ, sound a, p ^ rtirt-= 4 = 1- 4—. ^ 4- i U / O 6 * jMj points "JL 4; i 7 J bL» said; d -95- This paper size applies to China National Standard (CNS) A4 specification (210 x 297 male i) ------- ---- Install -------- Order --------- ^ 9. (Please read the notes on the back before filling this page) 594407 A7 B7 V. Description of the invention (%) Record of Part or all of the hydroxy compound of the phenolic group as described above 〇H the group to -I ^ -COO-A ^ or B0 group bonded, and protected compound. Better candidates are JP-A-1, 289946, JP-A-3, 1-28959, JP-A-3, 1-855855, JP-A-1, 79353, JP-A-3-20025, JP-A-3, 200252, JP-A 3-200255, JP-A 3-259149, JP-A 3-279958, JP-A 4-4- 50, JP-A 4-1- 1260, JP-A 4-4- 23 23, JP-A 4-1-4 No. 357, No. 4-25 157, No. 4-103 215, No. 4-104542, No. 4-1 07885, No. 4-1 07889, No. 4 1 521 95 and the like described in the specification. More specific examples are compounds represented by general formulae [I] to [XVI). ------------ Installation -------- Order ----- (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs .96 · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of invention (%) Intellectual Property Bureau of the Ministry of Economic Affairs 4 Consumption printed by the agency

A11 -------------------- Order --------- line (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 594407 A7 B7 V. Description of invention (%)

16 1 (R

u [IV (R1

) w ο 1 R 1 2 1) z Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

(R

) w 1 0 1 1 2

u VI This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------- ΦM .-------- Order ----- ---- Μ0Ι. (Please read the notes on the back before filling out this page) 594407 A7 B7 V. Description of the invention (97)

(R

ο 1 R) el 8 2

1 (R

3 1 R T— {k \ 1 /

1 (R

2 ο 1 τι) / 3 3 1) h --------------------- Order --------- line i (Please read the Please fill in this page for attention) Printed by Miscellaneous Staff Association of Intellectual Property Bureau, Ministry of Economic Affairs (R1

1 1 3 X] I- 9 9 This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 594407-A7.. B7 V. Description of the invention (90)

[X]

[XI] (Please read the notes on the back before filling this page) Printed by the Consumers ’Association of Intellectual Property Bureau of the Ministry of Economic Affairs p146 r1z» 7 r147 r146

R

[ΧΠ] • 99a, this paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) W4407 V. A7 _B7_ Description of the invention (〇)

Rm, RlG2, R108, r130: may be the same or different hydrogen atoms, R0-coo-c (r01) (r02) (r03: ^-co-oc (r〇i) (r02) (r03) ' Among them, the definitions of Rg, Rg1, R ° 2 and RG3 are the same as above. R100: -co-, -coo-, -nhc〇nh-, -nhcoo-, -o-, ·, -SO-, -S02 -, -So3-, or

Among them, G = 2 ~ 6, but when G = 2, at least one of R15G and R151 is an alkyl group,

Ri50, Rm: may be the same or different hydrogen atom, alkyl, alkoxy, -OH, -CC00H, -CN, halogen atom, -R152-COOR153 or -R154-OH, R152, R154: alkylene , R153: hydrogen atom, alkyl, aryl, or aralkyl, R99, R103 to R107, R109, r1U to R118, Rm to R123, ----------------- --- Order --------- (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy R128 ~ R129, R1 3 1 R134, Rl38 ~ Rl41, and Rl43: may be the same or different hydrogen atom, hydroxyl group, alkyl group, alkoxy group, fluorenyl group, fluorenyloxy group, square group, aryloxy group, aryl group, aryl group oxygen, halogen atom, nitrate, Carboxyl, cyano, or -N (R155) (R156) (wherein R1 ", W56: Η &gt; fluorenyl, or aryl),„ _ _ -100- This paper standard applies to Chinese National Standard (CNS) A4 Specifications (210 X 297 mm) 594407 A7 B7 Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs

一 ο— ¢: Combined HO -101- V. Description of the Invention (Bamboo) R11G: Single bond, alkylene, or

R157, R159: may be the same or different single bond, alkylene, 〇_, -S-, -CO-, or carboxyl, R158: hydrogen atom, alkyl, alkoxy, fluorenyl, fluorenyl , Aryl, nitro, mesityl, cyano, or carboxyl, but hydroxyl can be acid-decomposable (for example, 3-butoxycarbonylmethyl, tetrahydrofuranyl, ethoxy, ethyl, 1- 3rd-butoxy-1-ethyl) substitution. • R119, R12Q may be the same or different methylene, lower alkyl substituted methylene, halo methylene, or halo alkyl, but the present invention Middle-lower alkyl group means an alkyl group having 1 to 4 carbon atoms, R124 to R127: may be the same or different hydrogen atom or alkyl group, R135 to R137: may be the same or different hydrogen atom, alkyl group, alkoxy group Group, fluorenyl group, or fluorenyloxy group, R142 ... hydrogen atom, -R0-COOC (R01) (R02) (R03) or -C0-0-c (r01) (r02) (r03), or o -ch2 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) -------------------- Order -------- -Line (Please read the precautions on the back before filling out this page) 594407 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 Description of the invention (ιβ) R144, R145: may be the same or different hydrogen atom, lower alkyl, lower alkyl halide, or aryl, R146 ~ R149: may be the same or different hydrogen atom, hydroxyl, halogen Atom, nitro, cyano, carbonyl, alkyl, alkoxy, alkoxycarbonyl, aralkyl, aralkoxy, fluorenyl, fluorenyl, alkenyl, alkenyl, aryl, aryloxy Group, or aryloxycarbonyl group, but each of the four substituents having the same symbol may have different groups. Y ·· -CO-, or -S02-, Z, B: a single bond, or -0-, A : Methylene, lower alkyl substituted methylene, halogenated methylene, or halogenated alkyl, E: single bond, or oxymethylene, a ~ z, al ~ yl: when in plural () The basis may be the same or different, a ~ q, s, t, v, gl ~ il, kl ~ ml, 〇1, ql, si, ul: 0 or an integer of 1 ~ 5, r, u, w, x , Y, z, al to fl, pi, rl, tl, vl to xl: integers of 0 or 1 to 4, jl, nl, zl, a2, b2, c2, d2: 0 or integers of 1 to 3, zl , At least one of a2, c2, and d2 is 1 or more, yl: an integer from 3 to 8, (a + b), ( e + f + g), (k + l + m), (q + r + s), (w + x + y), (c I + d 1) '(gi + h ί + i 1 + j I ) '(ot + p 1)-(s 1 + t 1) ^ 27 -102- This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) ---------- -• Equipment -------- Order --------- (Please read the notes on the back before filling this page) p 163, 163

R '' 165 R r163 r164 where 〇II R16G: organic group, single bond, -S ·, -SO- or -S-II 0 594407 A7 _____ Β7 ___ 5. Description of the invention (, °,) (j 1 + nl) S3 , (R + u), (w + z), (x + al), (y + bl), (cl + el), (dl + fl), (pl + rl), (tl + vl), ( xl + wl) S4, (w + z) '(x + a1) € 5, (a + c), (b + d), (e + h), (f + i) ), (G + j), (k + n), (l + o), (m + p), (Q + t), (s + v), (gl + kl), (hl + 11), (Il + ml), (o1 + q1), (s1 + u1) $ 5, (xm) R161: hydrogen atom, monovalent organic group, or -103- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ----------- · Install -------- Order --------- (Please read the precautions on the back before filling this page ) Printed by the Employee Consumption Agency of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

R 164 R 165 R 163, 164 R162 to Rl66: may be the same or different hydrogen atoms, LG-C ^ RWMRMMR03) or -00-0-(:( 1 ^) (1 ^ 2) (1 ^ 3), Among them, the definitions of R0, R01, R02 and R03 are the same as above. X: divalent organic group, e2: 0 or 1, r168 r167

p173 R168 1 R169 167

R170 r171 CH2) f 2-C- (CH2) g2 -C- (CH2) h2 (^ 170 R ^ 70 I r167 r172

(XIV) r17〇R169 -------------------- Order --------- line (Please read the precautions on the back before filling this page) R 169

168 of which:: R167 ~ Ri7i): can be the same or different argon atom, hydroxyl group, halogen-104- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 Intellectual Property Printed by the Bureau ’s Consumer Cooperatives. 5. Description of the invention (.. Phantom atom, alkyl, alkoxy, or alkenyl substituents may be different groups, R171, R172: hydrogen atom, alkyl, or only 4 to 6 R167R168 173 with the same symbol

r ”3 ·· At least two are -coo- ¢: (1 ^) (1 ^ 2) (1 ^ 3) or • CO-O-QiTHRWMRG3), others are hydroxyl, f2, h2: 0 or 1, g2 : An integer of 0 or 1 to 4.

-105- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) -------- Order ------ --- Line i 594407 A7 B7 V. Description of the invention

R

R

one

2

OHSno; 3

(Please read the notes on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

5 -107- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (, 4)

RO RO

ch3 CH2-CH-CH-CH2 ch3

OR- &lt; ^ 0R (6)

------------ Install -------- Order ----- (Please read the precautions on the back before filling this page)

-108- The size of this paper is applicable to China's XJ Standard (A4) (210 X 297 mm) Hua 594407 A7 B7 V. Description of the invention (K)

OR CH3

OR -------------------- Order --------- Line (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by Employee Consumption Cooperative

• 109 · This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (&quot;

13) / V

OR (14)

OR

OR h3c Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs h3c

(15) -110 · This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------------- Installation -------- Order ---- ----- (Please read the precautions on the back before filling this page) 594407 A7 __B7 V. Description of the invention ((.?)

OR

-------------------- Order --------- Line (Please read the notes on the back before filling this page) Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by Consumer Cooperatives

This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of Invention (&quot; °) Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

----------- Loading -------- Order --------- (Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) 594407 A7 _'_ B7 V. Description of the invention (&〃;) Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

-113- ----------- install -------- order --------- ΐΛ (Please read the precautions on the back before filling this page) This paper Standards apply to China National Standard (CNS) A4 specifications (210 X 297 mm) 594407 A7 __B7 V. Description of the invention (, 〇)

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

OR

(30) -114- ----------- install -------- order --------- ^ 9 (Please read the note 3 on the back before filling in (This page) This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention

OR

OR ----------- · Install -------- Order --------- (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by Employee Consumer Cooperative

-115 · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

OR

OR 594407 A7 B7

OR OR

OR OR

c 3H ⑽ 3Hc ------------ Installation -------- Order ----- (Please read the precautions on the back before filling this page) Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by Consumer Cooperatives

R 16 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Hua 594407 A7 B7 V. Description of the invention (&quot; ο

0 II CO one CH

OR

OR

c = o Iο CHo

(38) CHn 0 II • oc

OR

OR

(39)

R〇ch2-c-ch2-&lt; Q &gt;-〇R -------------------- Order --------- line (Please read first Note on the back, please fill out this page again) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -117- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 A7 B7 V. Description of the invention (UL )

OR κ〇Ό-

OR

(40) OR

OR

OR

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs,

RO Pu

c—ch2-ch2—-c

-o-

OR 〇R (42) • 113-

OR (Please read the notes on the back before filling this page)

This paper size is applicable to China National Standard (CNS) A4 specification (210X 297 mm) 594407 ί-A7 B7 V. Description of the invention (&quot; 7)

CHi

(Please read the precautions on the back before filling out this page) The R in compounds (1) to (44) is printed by CH2-COO-C (CH3) 2C6H5, a consumer cooperative of the Intellectual Property Bureau of the Ministry of Hydrogen Economy CH2-COO-C4H91,

• COO-C4H9t ,, / 〇, 119 · This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 594407 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 R7 V. Invention Description (, J ). However, at least two, or three depending on the structure, are each a group other than a hydrogen atom 'and each substituent r may be a different group. [V) (d) Resin that does not require water and is soluble in alkali developer solution (hereinafter referred to as "(d) component" or "(d) alkali-soluble resin") 'The positive electron wire of the present invention or In the X-ray resistor composition, it can be used without dissolving the main resin in the alkali aqueous solution, and (d) scoring. When using the component (d), it is not necessarily necessary to formulate a resin that can increase the solubility of the alkali developing solution by the acid action of the component (b). Of course, the use of (b) components is not excluded. (D) Alkali-soluble resins used in the present invention include, for example, phenolic resins, hydrogenated phenolic resins, ether-pyrophenol resins, o-polyhydroxystyrene, m-polyhydroxystyrene, and p-polyhydroxybenzene. Ethylene, hydrogenated polyhydroxystyrene, halogenated or alkyl-substituted polyhydroxystyrene, hydroxystyrene-N-substituted maleimide copolymers, o / p- and m / p-hydroxystyrene copolymers, p-poly The hydroxyl group of hydroxystyrene is partially ortho-alkylate (for example, 5 to 30 mole% of ortho-methylate, ortho- (1-methoxy) ethylate, ortho- (1-ethoxy) Ethoxide, ortho-2-tetrahydrofuranyl compound, ortho- (3-butoxycarbonyl) methylate, etc.) or ortho-fluorenyl compound (for example, 5 to 30 mole% -(3-butyl) carbonyl compounds, etc.), styrene-maleic anhydride copolymer, styrene-hydroxystyrene-ene copolymer, α-methylstyrene-hydroxystyrene copolymer, carboxyl-containing group The strict basis of chaos -120- $ paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) ----------- installed -------- order ---- ----- ^ 9. (Please Read the notes on the back before filling out this page) Printed by the Consumption of Employees of Intellectual Property Bureau of the Ministry of Economic Affairs 594407 • A7 B7 V. Invention Description ((β) is not subject to these restrictions. Better (d) Alkali-soluble resins include phenolic resins and o-polyhydroxystyrene, m-polyhydroxystyrene, p-polyhydroxystyrene and copolymers thereof, alkyl-substituted polyhydroxystyrene, and polyhydroxystyrene Ortho-alkylated or ortho-fluorinated, styrene-hydroxystyrene copolymer. The phenolic lacquer resin is based on a predetermined monopolymer, and is added with aldehydes in the presence of an acidic catalyst. It can be obtained by condensation. Phenols such as phenol, m-cresol, p-cresol, ortho-cresol, 2,5-xylol, 3,5-xylol, 3 Xylols such as 4,4-xylol, 2,3-xylol, m-ethylphenol, p-ethylphenol, o-ethylphenol, p-th-butylphenol, p- Alkyl phenols such as octyl phenol, 2,3,5-trimethylphenol, p-methoxyphenol, m-methoxyphenol, 3,5-dimethoxyphenol, Alkoxyphenols such as 2-methoxy-4-methylphenol, m-ethoxyphenol, p-ethoxyphenol, m-butoxyphenol, and p-butoxyphenol, 2-methyl Dialkyl phenols such as 4-isopropylphenol, m-chlorophenol, p-chlorophenol, o-chlorophenol, dihydroxybiphenyl, bisphenol A, phenylphenol, m-phenylene The hydroxy aromatic compounds such as phenol and naphthyl alcohol can be used alone or in combination of two or more kinds, but they are not limited by these. For example, aldehydes include formaldehyde, p-formaldehyde, acetaldehyde, propionaldehyde, benzaldehyde, and phenylacetaldehyde. , Α-phenylpropanal, / 3-phenylpropanal, o-hydroxybenzaldehyde, _. Li, 棊 5-benzaldehyde, p-hydroxybenzene, o-chlorobenzaldehyde-121- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------- · Installation -------- Order --------- ^ 9 (Please read the notes on the back before filling out this page) 594407 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (ο. ) Benzaldehyde, p-chlorobenzaldehyde, o-nitrobenzaldehyde, m-nitrobenzaldehyde, p-nitrobenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde, p- Methylbenzaldehyde, p-ethylbenzaldehyde, p-n-butylbenzaldehyde, furfural, acetaldehyde chloride, etc., among these, formaldehyde is preferably used. These aldehydes can be used alone or in combination of two or more. Acidic catalysts include hydrochloric acid, sulfuric acid, formic acid, acetic acid, and oxalic acid. The weight average molecular weight of the phenolic lacquer resin thus obtained is preferably 1,000 to 30,000. If it is less than 1,000, the film reduction of the unexposed portion after development is large, and if it is more than 30,000, the development speed becomes small. More preferably, it is 2,000 to 20,000. In addition, the weight average molecular weight of the above polyhydroxystyrene, its derivatives, and copolymers other than the phenolic lacquer resin is 2,000 or more, preferably 5,000 to 20,000, and more preferably 5,000 to 100,000. Here, the weight-average molecular weight is defined in terms of polystyrene storage conversion by gel permeation chromatography. These (d) alkali-soluble resins of the present invention can be used in combination of two or more kinds. (d) The amount of the alkali-soluble resin to be used is 40 to 97% by weight, preferably 60 to 95% by weight, based on the solid content of the entire composition of the positive electron beam or X-ray progenitor composition. , [VI] Other ingredients used in the present invention ... Find the positive type II $ thread or ^ thread group pain product of I, for its need Xu-122- (Please read the precautions on the back before filling this page) • Equipment ----

· IIII Chinese paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297) 594407 A7 B7 V. Description of the invention () (Please read the notes on the back before filling this page) Anisole, Ethylphenol -Pyrophenol condensation resin, chlorinated alcohol oxide, 2,4,2 ·, 4 · -biphenylfuran, 4,4'-thiobis (1,3 · dihydroxy) benzene, 2,2 * 4,4 · -tetrahydroxydiphenyl ether, 2,2 ·, 4,4,4-tetrahydroxydiphenyl maple, ginseng (4-hydroxyphenyl) methane, 1,1-bis (4-hydroxyphenyl) Cyclohexane, 4,4- (α-methyl phenylene) bisphenol, ^, ^, "&quot; -gins (4-hydroxyphenyl) -1-ethyl-4-isopropylbenzene, 1 , 12-gins (hydroxyphenyl) propane, 1,1,2-ginseng (3,5-dimethyl-4-hydroxyphenyl) propane, 2,2,5,5- (4 · hydroxyphenyl) ) Hexane, 1,2- (4-hydroxyphenyl) ethane, 1,1,3-ginseno ((hydroxyphenyl) butane), p- [α, α, α \ α'-iso (4-hydroxy Phenyl)]-xylene, etc. The preferred organic basic compounds used in the present invention are compounds which are more basic than phenol. Among them, nitrogen-containing basic compounds are preferred. The chemical environment has, for example, structures of the following formulae (Α) to (Ε): r251. R25〇-N-r252... (A) Among them, R25 (), R251 and R252 is the same or different hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an amino alkyl group having 1 to 6 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms or 6 to 20 substituted or unsubstituted carbon atoms. Substituted aryl groups, R2 5 4 and R255 can be bonded to each other to form a ring. -124- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 594407 Member of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 printed by the company ------- --B7 V. Description of the invention (fM) -N--… (B)… (C) 1 1… (D) R254 r255 p253 '1 pcc; R-C ^ NC-R256… (E)-(Among them, R 2 5 3, R254, R 2 5 5 and alkyl group with 1 to 6 carbons.) R 2 5 6 is a different molecule. Among them, there are two or more nitrogen atoms in different chemical environments, and the most preferable is a compound containing both a substituted or unsubstituted amine group and a nitrogen atom-containing ring structure, or a compound having an alkylamine group. Preferred examples include Replaced or Unsubstituted veins, substituted or unsubstituted aminopyridines, substituted or unsubstituted aminoalkylpyridines, substituted or unsubstituted aminopyrrolidines, substituted or unsubstituted imidazoles, substituted or unsubstituted Substituted pyrazole, substituted or unsubstituted piperazine, substituted or unsubstituted pyrimidine, substituted or unsubstituted purine, substituted or unsubstituted imidazoline, substituted or unsubstituted pyrazoline, Substituted or unsubstituted piperazine, substituted or unsubstituted aminomorpholine, substituted or unsubstituted aminoalkylmorpholine, and the like. Preferred substituents are amines, amines, alkylamines, arylaryls, arylamines, alkyls, alkoxys, macaques, stilbenes, aryls, aryloxys , Nongji, Gaoji, Yiji &quot; Geng -125- This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) ------------- ^ pack- ------- Order --------- $ 1 (Please read the notes on the back before filling this page) 594407 A7 B7 V. Description of the invention ((#) (Please read the notes on the back first) ? Please fill in this page again.) The best compounds are guanidine, 1,1-dimethylguanidine, 1,1,3,3-tetramethylguanidine, 2-aminopyridine, and 3-aminopyridine. , 4-amino group (ft d, dimethylaminopyridine, 4-dimethylaminopyridine, 2-diethylaminopyridine, 2- (aminomethyl) pyridine, 2-amine 3-methylpyridine, 2-amino-4-methylpyridine, 2-amino-5 -methylpyridine, 2-amino-6 -methylpyridine, 3-amine Glypicylpyridine, 4-aminoethylpyridine, 3-aminopyrrolidine, piperazine, N- (2-aminoethyl) piperazine, N- (2-aminoethyl) piperazine, 4 —Amine-2

I, · 2,6,6-tetramethylpiperidine, 4-piperidinylpiperidine, 2-iminopiperidine, 1- (2-aminoethyl) pyrrolidine, pyrazole, 3-amine 5-methylpyrazole, 5-amino-3-methyl-1-p-tolylpyrazole, pyrazine, 2- (aminomethyl) -5-methylpyrazine, pyrimidine, 2 , 4-diaminopyrimidine, 4,6-dihydroxypyrimidine, 2-pyrazoline, 3-pyrazoline, N-aminomorpholine, N- (2-aminoethyl) morpholine, 1, 8-Diazacyclo [5.4.0] Union-7-one, 1,5-Diazacyclo. [4.3.0] non-5-one, 2,4,5-triphenylimidazoline, among which With 1,8-diazacyclo [5.4.0] undecane-7-one, 1,5-diaza [4.3.0] non-5-one,.: 2,4,5-triphenylimidazole However, they are not limited by them. The employees of the Intellectual Property Bureau of the Ministry of Economic Affairs consume VV for printing. These nitrogen-containing basic compounds can be used alone or in combination. The amount of the nitrogen-containing basic compound to be used is usually 0.001 to 10% by weight, and preferably the solid content of all the components in the composition of the present invention.

______— ~ ^ &quot; V 0.01 ~ 5% by weight. If it is less than 0.001% by weight, the addition effect of the compound cannot be obtained. In addition, if it is more than 10% by weight, there is a tendency that the sensitivity is reduced or the developability of the non-exposed portion is deteriorated. … I: ·;. * * ..,. -126- 1 This paper size is applicable to China National Standard (CNS) A4 (210 X 297) «T 594407 Employees of Intellectual Property Bureau of the Ministry of Economic Affairs Printed by A7 B7 Five Explanation of the invention ([,]) The electron wire or X-ray resistor composition of the present invention is dissolved in a solvent that can dissolve the above components, and coated on a carrier. The solvent used here is ethylene dichloride, ring Hexanone, cyclopentanone, 2-heptanone, r-butyrolactone, methyl ethyl ketone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, toluene , Ethyl acetate, methyl lactate, ethyl lactate, methyl methoxypropionate, ethyl ethoxypropionate, methyl propionate, ethyl pyruvate, propyl pyruvate, N, N-di Methylformamide, dimethylsulfamethoxamine, N-methylpyrrolidine ether, tetrahydrofuran, etc. are preferred, and these solvents can be used singly or in combination. The fluorine of the component (e) can be used in the above solvents. Surfactants other than silicone and / or silicon surfactants. Specifically, polyethylene oxide lauryl ether, polyepoxy Polyethylene oxide alkyl ethers such as ethane stearyl ether, polyethylene oxide hexadecyl ether, polyethylene oxide oleyl ether, polyethylene oxide octylphenol ether, polyethylene oxide nonyl Polyalkylene oxide alkyl allyl ethers, polyethylene oxide · polypropylene oxide block copolymers, sorbitol monolaurate, sorbitol monopalmitate, sorbitol Sugar alcohol stearate: sorbitol fatty acid esters such as sorbitol monooleate, sorbitol trioleate, sorbitol tristearate, polyethylene oxide sorbitol Lauric acid ester, polyethylene oxide sorbitol monopalmitate, polyethylene oxide sorbitol monostearate, polyethylene oxide sorbitol trioleate, polyethylene oxide Sorbitol tristearate, etc. Polyethylene oxide, sorbitol fatty mannyl esters, etc. are not employed by the Department of Interface Activity, acrylic acid -127- ^ Paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the notes on the back before filling out this page) --------- Order --------- 594407 Printed by the Employees ’Association of Intellectual Property of the Ministry of Economic Affairs A7 B7 V. Description of the invention (ι4) or methacrylic (co) polymerized poly-Fro (transliteration) No. 75, No. 95 (made by Gongrong Company Fat Chemical Industry Co., Ltd.), etc. These surfactants The compounding amount is usually 2% by weight or less, preferably 1% by weight or less of the solid content of all the components in the composition of the present invention. These surfactants are added alone or in combination of two or more. Use The substrate (for example, silicon / silicon dioxide coating) used in the production of a precision integrated circuit element by the positive electronic wire or X-ray resistor composition of the present invention is appropriately coated by a spinner, a coater, or the like. After the coating method is applied, exposure is performed through a predetermined photomask, and development is performed by heating to obtain a good resist pattern. The developing solution of the positive electron wire or X-ray resist composition of the present invention may use inorganic bases such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium methylsilicate, ammonium water, and ethylamine. Primary amines such as n-propylamine, secondary amines such as diethylamine, di-n-butylamine, tertiary amines such as triethylamine, methyldiethylamine, dimethylethanolamine, triethanolamine, etc. Alcohols are alkaline aqueous solutions such as quaternary ammonium salts such as tetramethylammonium sodium hydroxide and sodium tetraethylammonium hydroxide, and cyclic amines such as pyrrole and pyridine. In addition, an alcohol or a surfactant can be appropriately added to the above-mentioned alkaline aqueous solution. (Example) Ling Yanlian Shen Borrowing and Borrowing Classes and other more ridiculous hamsters show _ surprised, sample-based hair -128- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)- ------------------- Order --------- (Please read the notes on the back before filling out this page) Printed by the agency 594407 A7 ___ B7__ 5. The content of the description of the invention (M) is not subject to these restrictions. / *.

[Synthesis Example 1: Synthesis of poly (p-hydroxystyrene / styrene) copolymer] _ 35. ^ 5 g (0.2 mol) was dehydrated and distilled / refined in accordance with the conventional method ~ pair 4 3-Butoxystyrene monomer and 5.21 g (0.05 mole) of styrene monomer were dissolved in 100 ml of tetrahydrofuran. Under a nitrogen atmosphere and stirring, 0.03 3 g of azobisisobutyronitrile (AIBN) was added 3 times at 80 ° C in 2.5 hours, and stirred for another 5 hours to carry out the polymerization reaction. • The reaction solution was poured into 1200 ml of hexane to precipitate a white resin. The obtained resin was dried and then dissolved in 150 ml of tetrahydrofuran. 4N hydrochloric acid was added thereto, and the mixture was hydrolyzed by heating and refluxing for 6 hours, and then reprecipitated in 5 liters of ultrapure water, and the resin was filtered, washed with water, and dried. Separately, 200 ml of tetrahydrofuran was dissolved, and 5 liters of ultrapure water was added dropwise under vigorous stirring to perform reprecipitation. This reprecipitation operation was repeated 3 times. The obtained number was dried in a vacuum dryer at 120 ° C. for 12 hours to prepare a poly (p-hydroxystyrene / styrene) copolymer. [Synthesis Example 2: Synthesis of Resin Example (b-21)] 32.4 g (0.2 mol) of p-ethylacetoxystyrene and 7.01 g (0.07 mol) of 3-butyl methacrylate were dissolved in 120 In a milliliter of butyl acetate, 0.033 g of azobisisobutyronitrile (AIBN) was added three times in 2.5 hours at 80 ° C under stirring under a nitrogen atmosphere, and finally stirred for another 5 hours to perform a polymerization reaction. . Put the reaction solution in 1200 ml of hexane to make white l ·--129- This paper is in accordance with Chinese National Standard (CNS) A4 (210 χ 297 mm). -------- Order --------- $ 1 (Please read the notes on the back before filling out this page) Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs f% Printed by the agency 594407 A7 _B7___ V. Invention Note (I j) in furan. To this was added 7.7 g (0.19 mole) of sodium hydroxide / 50 ml of an aqueous solution, and the mixture was hydrolyzed by heating under reflux for 1 hour. In addition, 200 ml of water was dissolved and diluted, and neutralized with hydrochloric acid to precipitate a white resin. This resin was filtered, washed with water, and dried. It was dissolved in 200 ml of tetrahydrofuran and dropped into 5 liters of ultrapure water with vigorous stirring for reprecipitation. This reprecipitation operation was repeated 3 times. The obtained resin was dried in a vacuum drier at 120 t for 12 hours to prepare a poly (p-hydroxystyrene / methacrylic acid 3-butyl ester) copolymer. [Synthesis M 3: Synthesis of Resin Example (b-3)] 10 g of poly (p-hydroxystyrene) (VP-8000, manufactured by Nihon Kogyo Co., Ltd.) was dissolved in 50 ml of pyridine and allowed to stir at room temperature. 3.63 g of di-third-butyl dicarbonate was added dropwise. After stirring at room temperature for 3 hours, it was dropped into a solution of 1 liter of ion-exchanged water / 20 g of concentrated hydrochloric acid. The precipitated powder was filtered, washed with water, and dried to obtain a resin example (b-3). [Synthesis Example 4: Resin Example (b-3 3) Name Synthesis] 83.1 g (0.5 mol) of para-cyclohexylphenol was dissolved in 300 ml of toluene, and 150 g of 2-benzene was added. Ethyl vinyl chloride, 25 g of sodium hydroxide, 5 g of tetrabutylammonium bromide, and 60 g of triethylamine were reacted at 120 ° C. for 5 hours. The reaction solution was washed with water and excess chloroethyl vinyl ether and toluene were distilled off, so as to capture. Under reduced steaming, the system was distilled to yield a strict yield. I-a-phenoxyethyl-130- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------------------- Order --------- ( Please read the notes on the back before filling out this page) Printed by the Consumption Consultant of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 B7____ 5. Description of the invention (^ 9) Ethylene ether. Dissolve 20 g of poly (p-ethylphenylene) (but VP-8000 made by Ben Soda Co., Ltd.) and 6.5 g of 4-cyclohexylphenoxyethyl vinyl ether in 80 ml of THF, and add 0. 01 to it G of p-toluenesulfonic acid, react at room temperature for 18 hours. The reaction solution was dropped into 5 liters of distilled water and stirred vigorously, and the precipitated powder was filtered and dried to obtain a resin example (b-33). A dry polymer and vinyl ether corresponding to resin examples (b-4) and (b-2 8) M b-3 0) were synthesized by the same method. (Synthesis Example-1 of Dissolution Inhibitor Compound: Synthesis of Compound Example 16) 42.4 g (0.10 mole) of 1- [α-methyl-α- (4-Hydroxyphenyl) ethyl] di (4Π -Hydroxyphenyl) ethyl) benzene was dissolved in 300 ml of Ν, Ν-dimethylacetamide, and 49.5 g (0.35 mol) of potassium carbonate and 84.8 g (0.33 mol) of bromoacetic acid were added thereto. ester. Then, it was stirred at 120 ° C for 7 hours. The reaction mixture was poured into ion-exchanged water 21, neutralized with acetic acid, and extracted with ethyl acetate. The ethyl acetate extract was concentrated and purified to obtain 70 g of Compound Example 16 (all R was -CH2COOC (CH3) 2C6H5 group). (Synthesis Example of Dissolution-Preventing Compound-2-Synthesis of Compound 41) 44 g of 1,3,3,5-methyl- (4-hydroxyphenyl) pentane was dissolved in 250 ml of N, N-dimethyl To acetamide, 70.7 g of potassium carbonate was added, and 90.3 g of 3-butyl bromoacetate was added thereto, followed by stirring at 120 ° C. for 7 hours. Make -131- This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) ----------- installation -------- order ------ --- ^^ 1 (Please read the notes on the back before filling out this page) Printed by the Consumer Council of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 __ B7 V. Description of Invention (IV). This was purified by column chromatography to obtain 87 g of compound 41 (all R systems were -CH2-COOC4H9 (t)). (Solution, Synthesis Example of Compound Compound-3: Synthesis of Common Compound 43) _ Make 20 g of α, αα ', α ·, α π, α &quot; -Lu (4-Crylphenyl)- 1,3,5-triethylbenzene was dissolved in 400 ml of diethyl ether. In this solution, 42.4 g of 3,4-dihydro-2H-pyran and catalytic amount of hydrochloric acid were added under a nitrogen atmosphere, and refluxed for 24 hours. After the reaction was completed, a small amount of sodium hydroxide was added for filtration / concentration of the filtrate and purification by column chromatography to obtain 55.3 g of compound force 43 (all R systems are THP groups). Examples 1 to 15. 5. Comparative Example The components shown in Table 1 below were dissolved in 8.2 g of propylene glycol monomethyl ether acetate, and filtered through a 0.1 m iron Teflon filter to prepare a resistor. Solution. The number of developing defects and the imageability of the resist were evaluated by the following methods. Table 2 shows the evaluation results of sensitivity, resolution, imaging defect, and PEB temperature dependency. (Evaluation method of the number of imaging defects)

(1) Development defect number -I The photosensitive resin composition was uniformly coated on a silicon substrate treated with hexamethyldisilanes by a spin coating method, and heated and dried on a hot plate at 120 ° C. 60 seconds to form a resist film of 0 · 8 // m. Make the barrier film with electronic EZ drawing device (quick press 5Ok money λ light Hui Qin diameter Q · 12 to -132- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) (Please (Please read the notes on the back before filling this page) --------- Order --------- Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Staff Consumption Club 594407 A7 B7 V. Invention Explanation (π1) Exposure, and directly heated on a hot plate at 110 ° C for 90 seconds after exposure. In addition, it is displayed at 23 ° C in a tetramethylammonium hydroxide aqueous solution with a concentration of 2.38% by weight. After washing in pure water for 30 seconds, it was dried. The sample formed by the contact hole pattern thus obtained was used to measure the number of development defects (Thresholds, KLA2112).

Pi xce 1 S i ze = 0 · 39) 〇 (2) Number of development defects-Π In the number of development defects in (1) above, except for exposure, the test results of heating, development, washing, and drying were performed. The number of development defects was measured in the same manner. (Image evaluation method) The same as the number of development defects in (1) above, a resist film of 0.8 // m was formed, and the film was exposed, heated, developed, washed, and dried. Then, the film thickness was measured with a film thickness meter, and the residual film ratio was calculated. In addition, the formed 0.2 // m contact hole pattern was observed with a scanning electron microscope and its appearance was observed. (Sensitivity evaluation method) Sensitivity refers to the evaluation of the exposure amount (/ zC / cm2) for re-developing a mask pattern with 0.40 // m. (Resolution Evaluation Method) The resolution is the critical resolution (// m) of the exposure amount for re-developing a mask pattern of 0.40 // m. —…. (. PK temperature bar.existence). One, one ..., ... 1 ', .........- 133- __ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm), ------------ -------- Order --------- (Please read the notes on the back before filling out this page) 594407 • A7 B7 V. Description of the invention (l &gt;) If the PEB temperature is as high as 10 ° C When the critical imaging power does not decrease is 0, the critical imaging power is reduced by 0 · 〇1 V m is △, and the critical imaging power is reduced by more than 0.02 // m is X β Table 1 -134- This paper is applicable to the standard China National Standard (CNS) A4 Specification (210 X 297 mm) -------------------- Order ------ I-- (Please read the back first (Notes on this page, please fill in this page again.) Acid generator, binder, and active agent dissolve m stop agent Example 1 1-54 0.09g b-3 1.71g W 1 o.oig 2 1-54 0.09g b-3 1.71g W -2 O.Olg 3 1-54 0.09g b-3 1.71g W-3 〇.〇lg 4 1-54 0.09g b-3 1.71g W-4 O.Olg 5 1-54 0.09g b-3 1.71 g W-5 O.Olg 6 1-2 0.09g b-3 1.71g Wl o.oig 7 1-41 0.09g b-3 1.71g Wl O.Olg 8 11-21 0.09g b-3 1.71g Wl O .Olg 9 III-38 0.09g b-3 1.71g Wl o.oig 10 1-54 0.09g b-21 1.71g Wl O.Olg 1 1 1-54 0.09g b-22 1.71g Wl o.oig 12 1-54 0.09g b-28 1.71g Wl o.oig 13 1-54 0.09g PHS / St 1.37g Wl o.oig 43 〇.34g 14 1-54 0.09g PHS 1.37g Wl O. Olg 41 〇.34g 15 1-54 0.09g b-3 1.71g Wl o.oig 41 〇.34g Comparative Example 101 PAG-1 b-3 1.71g Wl o.oig 102 PAG-2 b-3 1.71g Wl O.Olg 103 PAG-1 PHS 1.37g Wl O.Olg 41 〇.34g 104 PAG-2 PHS 1.37g Wl O.Olg 41 〇.34g 105 PAG-1 b-28 1.71g Wl o.oig Printed by the Consumers ’Association of the Intellectual Property Bureau of the Ministry of Economic Affairs 594407 A7 B7 V. Description of the invention (Acid generators PAG-1 and PAG-2 are described below 0 ^ s ^^ F3S. 3 -0m10)-° 3sh〇 ^ ch3 PAC-1 ΡΑΓ 广 2 Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the surfactants (Wl), (W-2), (W-3), (W- 4), (W-5) are as follows. W-1: Mekafak F176 (made by Dainippon Ink Co., Ltd.) W-2: Mekafak R08 (made by Dainippon Ink Co., Ltd.) W-3: Polymerization of polysiloxane KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.) W-4: polyethylene oxide nonylphenyl ether W-5: TROYSOL S-366 (manufactured by TROY Chemical) The composition and physical properties of the adhesive resin used are as follows As described. (b-3): p-hydroxystyrene / p-3-butoxy-c-styrene copolymer (molar ratio: 80/20), weight average molecular weight 1 3000, molecular weight distribution (Mw / Mn) 1 4 (b-4): p-hydroxystyrene / p- (1-ethoxyethoxy) styrene copolymer (Molar ratio: 70/30), weight average molecular weight 12000, molecular weight distribution (Mw / Mn) 1.3 (b-21): p-hydroxystyrene / three-butyl methacrylate copolymer (Mole ratio 70/30) t weight curtain weight 1600t) 135- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------- installation -------- order -------- -(Please read the precautions on the back before filling this page) 594407 A7 ___ B7 V. Description of the Invention (丨 Bamboo) Cloth (Mw / Mn) 2.0 (b-22): p-hydroxystyrene / p- (1- 3_ Butylethoxy) styrene copolymer (Molar ratio: 85/15), weight average molecular weight 12000, molecular weight distribution (Mw / Mn) l _ 1 (b-28): p-hydroxystyrene / pair _ (1_phenethyloxyethoxy) styrene copolymer (molar ratio: 85/15), weight average molecular weight 丨 2000, molecular weight distribution ( Mw / Mil) 1.2 (b-29): p-hydroxystyrene / p- (1_phenoxyethoxyethoxy) styrene copolymer (Molar ratio: 85/15), weight average Molecular weight 1 3000, molecular weight distribution (Mw / Mn) 1.2. &Lt; PHS): poly-p-hydroxystyrene (manufactured by Soda Co., Ltd., trade name VP-15000) &lt; PHS / St: synthesized in Synthesis Example 1 (Person): p-hydroxystyrene / benzene Z; ene (Molar ratio: 80/20), weight average molecular weight 26000, molecular weight distribution (Mw / Mn) 1. 9 (Please read the precautions on the back before filling this page ) -------- Order --------- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-136- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ) 594407 A7 R7 V. Description of the invention (ιπ) From the results shown in Table 2, we know the following. The positive electron wire or X-ray resistor composition of the present invention has high resolution, can give the appearance of a rectangular pattern, has few imaging defects, and has little PEB temperature dependence. Moreover, the same excellent effect is obtained when the irradiation source is X-ray. [Effects of Invention] The positive electron wire or X-ray resistor composition of the present invention has high resolution, can give a rectangular pattern appearance, has few imaging defects, and has PEB temperature dependency / J, 〇 ------ -------------- Order --------- Line climbing (Please read the notes on the back before filling this page) Employee Consumption Form of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 &gt; Printing-137- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

594407 Λη / ^ Γ Six patent application patents t Supplement No. δ9 1 1 8 1 02 "Positive electron wire or x-ray resistor composition" patent case (Amended on April 22, 1993) Six patent application scope: 1 A positive electron or X-ray resist composition, comprising (a)-an iron salt 'which can generate an acid through irradiation with an electron or x-ray, and has at least one electron attracting group which is directly substituted in the cation part' The electron-attracting group is at least one member selected from the group consisting of fluorine, chlorine, trifluoromethyl, nitro, cyano, and ethenyl, and (b) a resin, which is increased in the alkali imaging solution by the action of an acid. Solubility. 2. A kind of positive electron wire or X-ray resistor composition, including (a)-sulfonium salt, which can generate an acid through irradiation with electron or X rays, and has at least one electron attracting group which is directly substituted in the cation part 'The electron-attracting group is at least one member selected from the group consisting of fluorine, chlorine, trifluoromethyl, nitro, cyano, and ethylfluorenyl. (C) A low-molecular-weight dissolution preventing compound having a molecular weight of 3,000 or less, which is capable of being decomposed by acids And its solubility in the alkali developing solution is increased by the action of acid, and (d)-the resin is insoluble in water and soluble in the alkali developing solution. 3. The positive electron wire or X-ray resistor composition according to item 1 or 2 of the scope of patent application, wherein (a) the key salt is at least one compound selected from the following formulae U) to (III) 594407 R23 R ^ 1 (At least one of the formulae, at least one of ~ R43, and at least one of R44 ~ r53 represents an electron attracting group; the remaining Rl ~ R53 may be the same or different hydrogen atoms, branched or cyclic courtyards, branched chains Or an oxy group, carboxyl group, halogen atom, or -S-R54 group; R 5 4 represents a branched or cyclic group or aryl group; and Ri ~ Ri5, Ru ~ r43, r44 There are more than 2 links in ~ r53 to form a single bond, carbon atom, or oxygen 594407 VI. Patent application scope, ring of sulfur atom, and nitrogen atom; X stomach means at least one type of substituted alkyl sulfonic acid, benzene sulfonic acid, naphthalene sulfonic acid, anthracene sulfonic acid Of anion). 4 · A positive electron wire or X-ray resistor composition as claimed in item 3 of the patent application, wherein in the general formulae (I) to (III), X · has at least one fluorine atom and at least one fluorine atom Substituted branched or cyclic alkyl group having 1 to 12 carbon atoms, branched or cyclic alkoxy group substituted with at least one fluorine atom, substituted with at least one fluorine atom Branched or cyclic sulfofluorenyl group, branched or cyclic sulfofluorenyl group substituted with at least one fluorine atom, branched or cyclic sulfonamido group substituted with at least one fluorine atom, And at least one kind of benzenesulfonic acid, naphthalenesulfonic acid or anthracenesulfonic acid anion selected from branched or cyclic aryl groups having 6 to 14 carbon atoms substituted with at least one fluorine atom. 5. The positive electron wire or X-ray resistor composition according to item 1 or 2 of the patent application scope, which further contains (e) a fluorine-based and / or silicon-based surfactant. 6. The positive electron wire or X-ray resistor composition as claimed in item 3 of the patent application scope, which further contains (e) a fluorine-based and / or silicon-based surfactant.