588428 (1) 玖、發明說明 【發明所屬技術領域】 本發明係關於供將液晶顯示器用玻璃基板等方形板狀 工件，從取出位置移載至收容位置處用的移載方法及移載 裝置。 【先前技術】 此種移載裝置係如第9圖所示，將收容晶盒4或中心 平台等收容於托架上的複數方形板狀工件W，從熱處理裝 置5(熱風循環加熱式無塵烤箱：120〜250°C )的入口開口部 ，依既定順序利用搬送機器人401的機械手407，一片片 的搭載並吸附而移載於內部的支撐架5 1之既定層中。此 外，使經過熱處理時間後的工件，依序一片片水平狀的搭 載於機械手407上並予以吸附取出，且收容於容器中。 此時爲防止工件W的角或邊緣與收容晶盒4或支撐 架5 1的框、壁等發生衝撞或接觸，而造成破損並產生粉 塵等現象，便有施行工件W依不致對上述框等產生干涉 的適當位置及方向進行移載之調整（校正），有機械式校正 方式與非接觸式校正方式。 機械式校正方式係如第8圖所示，預先將玻璃基板等 工件W放置於中心平台501上，並利用中心單元502等 從工件端面押入而進行校正，然後再進行搬送或移載。此 情況下，中心單元502已知有如利用軸承或球狀螺絲等進 行押入的方式。 -5- (2) (2)588428 此外，非接觸校正方式已知有如：在搬送機器人安裝 機械手的根部處，朝橫向隔開既定距離設置二個位置偵測 器，並利用此位置偵測器依非接觸式檢測出矩形工件一邊 的緣，藉此掌握工件的旋轉角（0 )與縱向變位量（X)，更利 用在排列裝置的一個處所中所設置的其他位置偵測器，檢 測出矩形工件另一邊的緣，藉此而掌握橫向變位量（Y)， 並利用機械手的伸縮量與旋轉角、及機械人的橫向移動， 而分別修正工件的位置與方向，俾執行整齊排列（譬如參 照專利文獻1)。 在第8圖所示的上述機械式校正方式中，需要供該中 心平台50 1用的空間以及其他設備，不僅導致潔淨室佔有 面積的增加導致高成本，而且也將因需要附屬的步驟因而 將造成不必要的時間浪費，此將導致校正時間變長，僅此 對處理材料的投資亦將變大，難謂具經濟效益。此外，因 爲利用中心單元502而機械式的按押工件側部，因此在工 件W與工件支撐部503間的接觸部處將引起滑動，恐將 產生粉塵或破損的現象。另外，因爲工件W的彎曲等而 造成無法正確校正的可能性，該等問題點在基板趨於大型 化的近年更日趨突顯。 再者，在上述非接觸校正方式中，因爲二個位置偵測 器乃設置於安裝機械手的根部處，因此將造成偵測器耐熱 性等問題，而無法使用於移載於熱處理裝置方面。即，就 位置偵測器的耐熱溫度低於一般加熱爐溫度、或應取出工 件W溫度（120〜25(TC )，或者其溫度的可靠性或壽命性等 -6 - 588428 Ο) 觀點而言，均屬於無法承受實用性者，而且在熱處理中從 基板所產生的昇華物將附著於位置偵測器，而亦可導致無 法產生動作的情形發生，潛在有耐熱、可靠性的問題。 在此爲將非接觸校正方式採用於移載至熱處理裝置載 方面，在習知中，雖有如第9圖所示，將冷卻裝置9配置 於前方，並對在該冷卻裝置與熱處理裝置之間進行移動的 熱處理用架504’藉由移載基板而消除位置偵測器408的 耐熱性、可靠性等問題，但是需要另設熱處理用架的移動 機構或步驟，此外裝置的佈局亦將受限制，而無法表現出 效率。 在者，相關曝光裝置，已知有具備：將方形基板分別 載置於可旋轉及X、Y座標方向進行移動的可動平台上， 並將規範基板外型的位置資訊利用非接觸式進行檢測，且 在檢測出對基準座標系統的偏差之後，再移動至目標位置 ，因此相關基準座標系統之相互正交座標軸其中一座標軸 ，便由二點檢測出，而相關另一座標軸則利用一點檢測出 的機板位置檢測機構（譬如專利文獻2)。 但是，上述曝光裝置係揭示在應進行處理的位置處， 供進行靜態對位的技術，並無法進行移載於熱處理裝置時 所要求的動態對位。即，動態對位並非在處理場所或保管 場所，而是要求在將工件一片片的移載於該等位置上的一 連串重複動作中，於各動作時間中便修正工件的方向與位 置之偏差，並依正確方向到達正確位置，但是上述曝光裝 置中所揭的技術係無法達此要求，而無法徹底的採用該位 (4) (4)588428 置檢測機構。 【專利文獻1】 日本專利特開2001 - 1441 65號公報 【專利文獻2】 日本專利第3254704號公報 【發明內容】 【發明欲解決之課題】 所以，本發明乃有鑒於上述狀況而爲尋求解決，重點 在於提供一種不致產生隨工件的粉麈、破損、或彎曲等原 因而造成校正失誤問題的校正方式，係在對移載於熱處理 裝置中，亦不致產生位置偵測器的耐熱性、可靠性問題， 而且可省略在冷卻裝置9與熱處理裝置5間的熱處理用架 5 04之移動機構或移動步驟，可直接利用機械手對熱處理 裝置進行移載或取出的移載方法及移載裝置。 【解決課題之手段】 本發明乃爲解決上述課題，遂提供一種方形板狀工件 之移載方法，係利用具備有：設有可旋轉的支撐著且在徑 方向上可伸縮之機械臂及其前端所設置的機械手，並將工 件從取出位置移載至收容位置的搬送機器人；供調整保持 於上述機械手上的上述工件位置及姿態用的校正機構；以 及對應於上述機械手上所保持工件一端邊的複數個位置偵 測器；的移載裝置進行方形板狀工件之移載方法；將上述 -8- (5) (5)588428 複數個位置偵測器配設於上述機械手以外的適當處所，而 上述校正機構係包含有：利用上述複數個位置偵測器，檢 測出該一端邊之位置與角度的步驟；根據上述檢測出的位 置與角度，計算出該工件對上述機械手之位置偏差量、與 對機械臂伸縮軸之角度偏差量的步驟；根據上述所計算出 的角度偏差量，將上述工件的姿態調整爲平行於機械臂伸 縮軸的步驟；藉由至少一個位置偵測器，檢測出鄰接上述 一端邊的另一端邊之位置的步驟；根據上述所檢測出另一 端邊的位置，計算出該工件對上述機械臂之位置偏差量的 步驟；以及根據上述所計算出一端邊與另一端邊的各位置 偏差量，修正利用上述搬送機器人所進行的上述工件之縱 橫移動量，並將該工件收容於既定適當位置的步驟。其中 ，上述所謂「位置偏差量」係指當檢測量的端邊屬於工件 橫邊的情況時，便爲縱向偏差量，而當檢測量的端邊屬於 工件縱邊的情況時，便爲橫向偏差量。所謂「機械臂伸縮 軸」係指機械臂進行伸縮時的軸。 其中，最好藉由上述檢測出一端邊位置與角度的複數 個位置偵測器中，至少其中一個的位置偵測器，檢測出鄰 接上述一端邊的另一端邊之位置。 再者，上述工件的一端邊最好爲工件位於機械手前端 側的端邊。 更具體而言，本發明亦提供一種方形板狀工件之移載 方法，係利用具備有：設有可旋轉的支撐著且在徑方向上 可伸縮之機械臂及其前端所設置的機械手，並將工件從取 -9 - (6) (6)588428 出位置移載至收容位置的搬送機器人；供調整保持於上述 機械手上的上述工件位置及姿態用的校正機構；以及對應 於上述機械手上所保持工件一端邊的複數個位置偵測器； 的移載裝置進行方形板狀工件之移載方法；上述搬送機器 人乃構成可使保持於機械手上的工件進行朝沿機械臂軸的 縱向進行移動的縱移動、使該工件朝橫向進行移動的橫移 動、以及利用上述機械臂或機械手的旋轉而使工件進行旋 轉移動的構造，且將上述複數個位置偵測器配設於上述機 械手以外的適當處所；上述校正機構係包含有：根據隨上 述縱移動並利用上述複數個位置偵測器所檢測出的位置及 角度，計算出該工件之縱向位置偏差量、與對機械臂伸縮 軸之角度偏差量的步驟；根據上述所計算出的角度偏差量 ，利用上述旋轉移動，將上述工件的姿態調整爲平行於機 械臂伸縮軸的步驟；藉由隨上述橫移動，而利用上述複數 個位置偵測器中至少一個位置偵測器所檢測出的另一端邊 位置，計算出該工件之橫向位置偏差量的步驟；以及根據 上述縱向與橫向之各位置偏差量，修正利用上述搬送機器 人所進行的上述工件之縱橫移動量，並將該工件收容於既 定適當位置的步驟。其中，上述所謂「縱向」係指在取出 或收容時，沿使機械臂進行移動的機械臂伸縮軸之方向， 而上述所謂「橫向」係指上述縱向的正交方向，乃使搬送 機器人在取出位置與收容位置之間進行移動的方向。 再者，本發明亦提供一種方形板狀工件之移載裝置， 係利用具備有：設有可旋轉的支撐著且在徑方向上可伸縮 -10- (7) (7)588428 之機械臂及其前端所設置的機械手，並將工件從取出位置 移載至收容位置的搬送機器人；供調整保持於上述機械手 上的上述工件位置及姿態用的校正機構；以及對應於上述 機械手上所保持工件一端邊的複數個位置偵測器；的移載 裝置進行方形板狀工件之移載裝置；將上述複數個位置偵 測器配設於上述機械手以外的適當處所；而上述校正機構 係包含有：利用上述複數個位置偵測器，檢測出該一端邊 之位置與角度，並此而計算出該工件對上述機械手之位置 偏差量、與對機械臂伸縮軸之角度偏差量，然後將上述工 件的姿態調整爲平行於機械臂伸縮軸，再藉由至少一個位 置偵測器，檢測出鄰接上述一端邊的另一端邊之位置，並 根據此而計算出該工件對上述機械臂之位置偏差量，然後 再根據該等所計算出的一端邊與另一端邊之各位置偏差量 ，修正利用上述搬送機器人所進行的上述工件之縱橫移動 量，並將該工件收容於既定適當位置。 其中，上述校正機構最好藉由上述檢測出一端邊位置 與角度之複數個位置偵測器中，至少其中一個位置偵測器 ，檢測出鄰接上述一端邊的另一端邊之位置。 再者，本發明的較佳實施例乃利用具備有：設有可旋 轉的支撐著且在徑方向上可伸縮之機械臂及其前端所設置 的機械手，並將工件從取出位置移載至收容位置的搬送機 器人；供調整保持於上述機械手上的上述工件位置及姿態 用的校正機構；以及對應於上述機械手上所保持工件一端 邊的複數個位置偵測器；的移載裝置進行方形板狀工件之 -11 - (8) (8)588428 移載裝置；其中，上述搬送機器人係構成可使保持於機械 手上的工件進行朝沿機械臂軸的縱向進行移動的縱移動、 使該工件朝橫向進行移動的橫移動、以及利用上述機械臂 或機械手的旋轉而使工件進行旋轉移動的構造，且上述複 數個位置偵測器係配設於上述機械手以外的適當處所，而 上述校正機構則根據隨上述縱移動並利用上述複數個位置 偵測器所檢測出的位置及角度，計算出該工件之縱向位置 偏差量、與對機械臂伸縮軸之角度偏差量，然後藉由上述 · 旋轉旋轉移動而將上述工件的姿態調整爲平行於機械臂伸 · 縮軸，同時隨上述橫移動，而根據上述複數個位置偵測器 中至少一個位置偵測器所檢測出的另一端邊位置，計算出 該工件之橫向位置偏差量，之後再根據該等所計算出的縱 向與橫向之各位置偏差量，修正利用上述搬送機器人所進 行的上述工件之縱橫移動量，並將該工件收容於既定適當 位置。 【實施方式】 . 【發明實施形態】 ★ 其次，根據所附圖式，詳細說明本發明之實施形態。 第1圖所示係本發明的移載裝置構造說明圖。第1〜7 圖所示係代表實施形態。圖中編號1係移載裝置，2係搬 送機器人，4係晶盒，5係熱處理裝置，31〜33係位置偵 測器，W係基板。 本發明之移載裝置1係如第1圖所示，具備有：由可 -12- 588428 Ο) 在水平方向上進行旋轉支撐且在徑向上可伸縮的機械臂6 ，以及設置於其前端的機械手7所構成，並將方形板狀基 板（W)從取出位置移載至收容位置的搬送機器人2 ;供調 整保持於上述機械手7上之上述基板（W)的位置及姿態用 的校正機構；對應著上述機械手7上所保持的基板（W)之 一端邊80，而配置於上述機械臂以外的適當處所的至少 二個位置偵測器31，32 ;以及對應於鄰接上述一端邊的另 一端邊81之位置偵測器33。 上述校正機構係利用配置於機械手以外的適當位置處 的上述位置偵測器31，3 2,3 3，而計算工件（W)對上述機械 手7的縱橫位置邊差量及對機械臂伸縮軸的角度偏差量， 並將上述工件的姿態調整爲平行於機械臂伸縮軸A，同時 根據所計算的位置偏差量而修正縱橫移動量，然後再將該 工件收容於既定的適當位置處。因爲不需要在機械手7上 設置位置偵測器，因此便可直接從高溫的熱處理裝置內取 出基板。 以下，在本實施形態中，乃針對在熱處理裝置5之支 撐架5 1、冷卻裝置9之支撐架5 2、及屬於外部托架的晶 盒4之間’移載著工件的矩形狀液晶顯示器用玻璃基板w 之例子進行說明。本發明乃如上述，乃具有藉由可從機械 手上省略設置偵測器，便可從熱處理裝置5中直接取出基 板的特徵點。包括工件對熱處理裝置5移動在內的形態並 無特別的限制，譬如在晶盒等外部托架、與熱處理裝置以 外的步驟裝置之間的移載，或熱處理裝置以外的步驟間之 -13 - (10) 移載等均同樣可適用。 本例子的移載裝置1具體而言係在潔淨室中所設置的 台架10上，橫向舖設導引線架上述搬送機器人2的導引 軌23，並在包夾著該導引軌23的二側，分別配置著由供 加熱該基板用的加熱爐50所構成的熱處理裝置5，以及 供冷卻該基板用的冷卻裝置9，藉由沿上述導引軌23進 行橫向（Y軸方向）移動的搬送機器人2，而取出晶盒內的 基板W，並在移動至熱處理裝置5之前面，之後再將上述 基板W收容於該冷卻裝置9內部，若冷卻結束的話，便 從該裝置內的支撐架52上取出基板W，並收容於晶盒4 中。在上述台架10上的適當位置處（在本例中爲在冷卻裝 置的前方），設置著供檢測出基板W —端邊之二位置用的 二個位置偵測器3 1，32，及檢測出另一端邊的位置偵測器 33 0 晶盒4係在面臨限電壓上述導引軌的前面處，形成供 基板W進出入用的開口 40，並在左右側臂的內面上’分 別沿上下方向相隔既定間格，突設未圖示的支撐片，並藉 由在對應的左右支撐片上卡接著各基板的側端部’藉此便 在該晶盒4內部中，上下多層的水平收容著複數個基板W 〇 搬送機器人2，更詳言之，係如第3圖所示’由：沿上 述導引軌23，並可朝橫向（Y軸方向）移動而設置的機台20 ;可對該機台20進行上下升降，且可水平旋轉支撐的機 械臂6;可旋轉的連結於該機械臂6的機械手7°上述機 -14- (11) (11)588428 械臂6係由：可旋轉支撐於機台20上的第1機械臂21、以 及在上述第1機械臂21前端部處可旋轉支撐的第2機械 臂22所構成。在上述第2機械臂22前端部處連結著機械 手7。 再者，僅要可伸縮與旋轉的話便可，機械臂與機械手 均可採用其他構造，並不僅受限於上述。 此種搬送機器人2係如圖中箭頭所示，構成可進行下 述移動：在取出或收容時，將吸附保持於機械手7上的基 板W，朝沿機械臂6之伸縮軸的縱向（X軸方向）進行直線 移動的縱移動；使機械臂6與機台20均朝沿導引軌23的 橫向（Y軸方向）進行移動的橫移動；從第2圖中亦可得知 ，使機械臂6與機械手7對導引軌23進行上下方向（Z軸 方向）移動的上下移動；藉由上述機械臂6或機械手7之 旋轉而使上述基板W的方向進行旋轉的旋轉移動。 第4圖所示係移載裝置1之系統構造方塊圖。搬送機 器人2係具備有：上述機械臂6與機械手7等的搬送機構 25，以及供驅動此之馬達等驅動部24。該搬送機器人2 係利用外部的控制裝置1 1進行動作控制。即，控制裝置 11係利用來自透過使用者介面而由使用者所輸入之控制 命令、或遠端主機之作業指令，或者根據裝置內之記憶部 中所儲存的控制程式，依將基板W搬入於熱處理裝置5 中，並取出而將基板搭載於晶盒或次一步驟設備之一定位 置處的方式，控制搬送機器人2的動作，乃輸入來自上述 位置偵測器31，32,33的檢測信號，而構成本發明的校正機 -15- (12) (12)588428 構。 在上述位置偵測器3 1 (3 2，3 3)係採用反射式偵測器、 或由投光器與受光器所構成的光偵測器。當屬於反射式偵 測器的情況時，藉由所投射的光被反射，而感測基板端邊 。當屬於投光、受光型的情況時，便藉由將從投光器所投 射的光，被基板端邊所遮光，再由受光器感測遮光，藉此 而檢測出基板端邊的二位置。 在本例子中，從基板W下方朝上方投射光線的反射 式偵測器係在對應著基板一端邊80並沿軌之橫向上平行 的連設二個，同時在對應著另一端邊80，於既定位置處 設置一個。各位置偵測器所檢測出的位置資訊係輸入於屬 於上述校正機構的控制裝置11中。 再者，僅要在基板尙未產生干涉現象的話，亦可在基 板上方設置上述位置偵測器，並配設呈光線從上朝下進行 投射狀態。此外，亦可採用其他非接觸偵測器、或接觸式 偵測器。 第5圖所示係本實施形態之利用移載裝置1的移載處 理順序之實施例說明槪略圖。 將基板W吸附保持於機械手7上並從支撐架52上取 出的搬送機器人2，在收縮機械臂6並使基板W之一端邊 80通過位置偵測器32上之際，從位置偵測器32朝上方 投射的光，將被基板W所反射，並利用辨識此反射光， 而檢測出該一端邊的通過位置（譬如相對於機械手的相對 位置）（S 101)，而所檢測出的位置資訊便傳送於上述控制裝 -16- (13) (13)588428 置1 1中並記憶著。 在S101中，在一端邊80通過偵測器32之後，更收 縮機械臂，並利用偵測器3 1同樣的檢測一端邊80的通過 位置（S 102)，而所檢測出的位置資訊則傳送於上述控制裝 置11中並記憶著。在控制裝置11中，便根據所記憶的上 述二位置之資訊，計算出相對於機械臂伸縮軸的基板W 傾斜，以及相對於經修正過該傾斜後的機械手7之縱向（X 軸方向）基板的位置偏差量。 上述基板的傾斜係從預先記憶的位置偵測器3 1，32之 位置資訊，與沿上述二位置間的縱向位置偏差量而計算出 ，並根據該角度偏差量而從控制裝置1 1將控制信號傳送 給驅動部24，再藉由旋轉機械手7而進行角度修正，俾 將基板W調整爲平行於機械臂伸縮軸的姿態（S 103)。 搬送機器人2雖在更進一步收縮機械臂之後，便朝橫 向（Y軸方向）移動至晶盒4之前爲止，但是在中途便利用 位置偵測器33檢測出鄰接於基板W之上述一端邊80的 另一端邊（在本例子中爲平行於X軸方向的端邊81)之通過 位置（S 104)，並將此通過位置資訊傳送給控制裝置11，而 計算出該基板W的橫向（Y軸方向）位置偏差量並記憶之。 如上述，經完成利用位置偵測器31，3 2,3 3測量的搬送 機器人2，便沿橫向（Y軸方向）移動至晶盒4相對向的既 定位置處。此時的停止位置乃利用上述所計算出的Y軸方 向基板位置偏差量而進行修正並決定。已停止的搬送機器 人2便在使應該將基板W收容於上述晶盒4中的機械臂6 -17- (14) (14)588428 進行收縮狀態下，進行1800旋轉（SI 05)，並使機械臂6進 行上下移動至配合收容位置的既定高度之後，再使機械臂 6朝縱向（X軸方向）延伸出去，而將基板W收容於晶盒4 中（S 106)。沿此收容時之縱向的基板W移動量（機械臂6 之停止位置）乃利用上述縱向位置偏差量進行修正而決定 〇 收容於支撐架52的複數層中之各基板W便經由以上 順序，利用搬送機器人2依序被機械臂6所吸附，並移載 於晶盒4中收容。此外，當從晶盒4移載至熱處理裝置5 中，並從熱處理裝置5移載至冷卻裝置之際，亦最好施行 同樣的校正處理。此情況下，同樣的，最好在晶盒4或熱 處理裝置的支撐架5 1之前，設置二個以上的位置偵測器 。當然，此情況下亦可兼用在一個位置處所設置的二個以 上位置偵測器。 第6圖所示係利用檢測出一端邊80之通過位置的二 個位置偵測器3 1，32中之一個位置偵測器3 1，亦檢測出另 一端邊8 1的通過位置之變化例的順序說明槪略圖。藉由 本例子，利用至少二個以上的位置偵測器，便可測量上述 三個偏差量，可減少組件數量。 從S201至S203的步驟，係利用位置偵測器31，32分 別檢測出從冷卻裝置之支撐架52中所取出基板W之一端 邊80通過位置，藉由該位置資訊而計算出基板W的傾斜 ，與縱向位置偏差量，並修正傾斜的步驟，乃如同上述 S 1 0 1〜S 1 0 3的步驟。 -18- (15) (15)588428 搬送機器人2係在沿縱向的基板W之移動區域中， 沿橫向進行移動至非偵測器3 1所在位置的既定偵測器側 邊位置處，並使基板W的上述另一端邊8 1朝縱向延伸至 位置偵測器3 1相對向位置處爲止之後，便如同上述一端 邊8 0的檢測，朝位置偵測器3 1進行橫向移動，並將經該 位置偵測器3 1所檢測出的上述端邊8 1通過位置資訊，傳 送給控制裝置1 1，且計算出該基板W的橫向位置偏差量 並記憶之（S104)。 第7圖所示係使二個位置偵測器3 1，32沿機械臂伸縮 軸的縱向（X軸方向）平行連設的變化例順序說明槪略圖。 從晶盒中取出基板W的搬送機器人2係使機械臂6 朝縱向（X軸方向）收縮至基板W端邊81位於位置偵測器 3 1，32相對向位置爲止，然後再朝向位置偵測器31，32使 基板W朝橫向（Y軸方向）進行移動，並從31檢測出端邊 81的通過位置（S301)，且將該位置資訊記憶於控制裝置11 中。其次，使搬送機器人2更朝橫向進行移動，並利用位 置偵測器32同樣的檢測出端邊81的通過位置（S302)，且 將該位置資訊記憶於控制裝置1 1中。 在控制裝置11中，便根據所記憶的上述二位置之資 訊，計算出相對於機械臂伸縮軸的基板W傾斜，以及相 對於經修正過該傾斜後的橫向基板之位置偏差量。上述基 板的傾斜係根據沿橫向的位置偏差量而計算出，並根據該 角度偏差量進行角度修正，俾將基板W調整爲平行於機 械臂伸縮軸的姿態（S303)。 -19- (16) (16)588428 其次，從上述S 303的狀態，使搬送機器人2更朝橫 向（Y軸方向）進行移動，然後再利用位置偵測器31，32捕 捉基板W的位置（在本例中爲位於二者位置偵測器31，32 的上方位置處）之後（S304)，再使機械臂6更進一步收縮， 再藉由位置偵測器3 1辨識未捕捉到反射光的位置，而檢 測出基板W的端邊80通過位置（S 305)，控制裝置11則計 算出相對於機械手7的該基板W之X軸方向位置偏差量 並記憶之。 在本實施形態的移載處理順序中，基板W的角度修 正雖利用機械手的旋轉而執行的，但是亦可利用機械臂的 旋轉而執行。此外，形成移載去向的晶盒4係對於導引軌 23並設於冷卻裝置9相同側，但是亦可將簍卻裝置設置 於軌端部的晶盒4正交側，當屬於並設的情況時，搬送機 器人便不需要進行1 80°旋轉，而當設於正交側的情況時 ，在該軌端部上，便使搬送機器人進行9(Τ旋轉。 再者，上述實施形態雖爲求簡化，而僅針對縱向、橫 向均利用二個或一個偵測器進行檢測出的例子進行說明， 但是，並未必在縱向、橫向上均需要二個或一個偵測器， 亦可根據利用更多偵測器之檢測資料的週知統計處理，而 計算傾斜或位置偏差。 再者，本發明並未受限於上述實施形態，亦包含各種 變化。 【發明之效果】 -20· (17) (17)588428 如上述依照本發明的話’利用在機械臂以外的適當位 置處所設計的至少二個位置偵測器’檢測出工件的一端邊 之二個位置，而計算出縱向或橫向的位置偏差量，同時修 正傾斜，更藉由一個位置偵測器檢測出工件令一端邊的一 位置，而計算出橫向或縱向的位置偏差量’並根據該等位 置偏差量，修正朝晶盒等收容位置進行移動之際的縱橫移 動量。藉此在機械手上便必須要位置偵測器，即便在對熱 處理裝置進行移載之中，亦不致產生位置偵測器的耐熱性 、可靠性問題。 所以，便可省略習知分接觸校正方式中所需要之在冷 卻裝置與熱處理裝置間的基板晶盒移動機構或移動步驟， 可利用機器人對熱處理裝置直接進行收容及取出，而將使 裝置低成本化，同時裝置的佈局幅度亦較廣，可有效的使 用潔淨室，同時亦可大幅縮短流程時間。 再者，亦不需要如習知的機械式校正的中心平台或其 校正步驟，當然亦不致產生隨工件的粉塵、破損、彎曲等 原因而造成校正失誤的問題。 【圖式簡單說明】 第1圖係本發明代表實施形態的移載裝置構造平視圖 〇 第2圖係同移載裝置的側視圖。 第3圖係搬送機器人說明圖。 第4圖係移載裝置之系統構造方塊圖。 -21 - (18)588428 第5圖係移載處理順序的實施例說明槪略圖。 第6圖係移載處理順序的變化例說明槪略圖。 第7圖係移載處理順序的另一變化例說明槪略圖。 第8圖（a)與（b)係利用中心單元的習知機械式校正方 式說明圖。 第9圖係習知非接觸校正方式的移載裝置平視圖。 【元件符號說明】 1 移載裝置 2 搬送機器人 4 晶盒 5 熱處理裝置 6 機械臂 7 機械手 9 冷卻裝置 10 台架 11 控制裝置 20 機台 21 第1機械臂 22 第2機械臂 23 導引軌 24 驅動部 25 搬送機構 31,32,33 位置偵測器 -22- (19)588428 40 開 P 50 加 熱 爐 51,52 支 撐 架 80,81 上山 m 邊 401 搬 送 機 器 人 407 機 械 手 408 位 置 偵 測 器 501 中 心 平 台 502 中 心 單 元 503 工 件 支 撐 部 504 熱 處 理 用 架 A 機 械 臂 伸 縮軸 W 基 板 -23-588428 (1) 发明 Description of the invention [Technical field to which the invention belongs] The present invention relates to a transfer method and a transfer device for transferring a square plate-shaped workpiece such as a glass substrate for a liquid crystal display from a take-out position to a storage position. [Prior art] system such as transfer device shown in FIG. 9, the central housing or pod platform 4 is accommodated in a plurality of rectangular plate workpiece W on the carriage, from the clean heated heat treatment apparatus 5 (hot-air circulation Oven: 120 ~ 250 ° C) The openings of the inlets are transferred in a predetermined order using the manipulator 407 of the transfer robot 401, which is mounted and adsorbed piece by piece in the predetermined layer of the internal support frame 51. In addition, the workpieces after the heat treatment time are sequentially stacked horizontally on the robot 407, sucked out, and stored in a container. At this time, in order to prevent the corners or edges of the workpiece W from colliding with or contacting the frame, wall, etc. of the crystal box 4 or the supporting frame 51, causing damage and dust, etc., the implementation of the workpiece W may not affect the above-mentioned frames, etc. The appropriate position and direction of the interference to adjust the load (correction) are mechanical correction method and non-contact correction method. As shown in Fig. 8, the mechanical correction method is to place a workpiece W such as a glass substrate on the center stage 501 in advance, and use the center unit 502 or the like to push in from the end surface of the workpiece for correction, and then carry or transfer it. In this case, the center unit 502 is known to be pushed in by means such as a bearing or a ball screw. 5- (2) (2) 588 428 In addition, a non-contact manner known a correction: transfer robot installed in the robot at the root, provided two spaced apart a predetermined distance towards the transverse position detector, and use this location detection detected by the non-contact edge side of the rectangular shape of the workpiece, whereby the workpiece grasp the rotation angle (0) with the longitudinal displacement amount (X-), the use of other more location detection arrangement in a place set in the apparatus, Detect the edge of the other side of the rectangular workpiece, thereby grasp the lateral displacement (Y), and use the robot's telescopic amount and rotation angle, and the robot's lateral movement to modify the position and direction of the workpiece, respectively, and execute alignment (for example, refer to Patent Document 1). In the above-mentioned mechanical correction method shown in FIG. 8, the space and other equipment for the center platform 501 are required, which not only leads to an increase in the occupied area of the clean room and high costs, but also requires additional steps and therefore It will cause unnecessary time wastage, which will lead to longer calibration time, and the investment in processing materials will also increase, which is hardly economical. In addition, since the side of the workpiece is pressed mechanically by using the center unit 502, slippage may occur at the contact portion between the workpiece W and the workpiece supporting portion 503, and dust or damage may occur. In addition, there is a possibility that the workpiece W cannot be correctly calibrated due to the bending of the workpiece W, and these problems have become more prominent in recent years as the substrate has become larger. Furthermore, in the above-mentioned non-contact calibration method, since the two position detectors are disposed at the root of the mounting robot, it will cause problems such as the heat resistance of the detectors and cannot be used for transfer to a heat treatment device. That is, from the viewpoint of the heat resistance temperature of the position detector being lower than that of a general heating furnace, or the temperature at which the workpiece should be taken out (120 to 25 (TC), or the reliability or life of the temperature, etc.-6-588428 Ο) All belong to those who cannot withstand practicality, and the sublimation produced from the substrate during the heat treatment will be attached to the position detector, which can also lead to the situation where no action can occur, potentially having problems of heat resistance and reliability. Here, the non-contact correction method is adopted for transferring to the heat treatment device. In the conventional art, although the cooling device 9 is arranged in the front as shown in FIG. 9, the cooling device 9 is disposed between the cooling device and the heat treatment device. Moving the heat treatment rack 504 'eliminates the heat resistance and reliability of the position detector 408 by transferring the substrate. However, a moving mechanism or step of the heat treatment rack is required, and the layout of the device will be limited. Without showing efficiency. The related exposure device is known to have: a square substrate is placed on a movable platform that can be rotated and moved in the X and Y coordinate directions, and the position information of the standard substrate shape is detected using a non-contact method, And after detecting the deviation to the reference coordinate system, it moves to the target position. Therefore, one of the axes of the orthogonal coordinate axes of the related reference coordinate system is detected by two points, and the other related axis is detected by one point. Board position detection mechanism (for example, Patent Document 2). However, the above-mentioned exposure apparatus discloses a technique for performing static alignment at a position to be processed, and cannot perform dynamic alignment required when transferring to a heat treatment apparatus. That is, the dynamic alignment is not in the processing place or storage place, but in a series of repeated actions that transfer the workpiece one by one to these positions, the deviation of the direction and position of the workpiece is corrected in each operation time. and reaches a correct position in the correct direction, but the exposure apparatus exposing the technical system can not achieve this requirement, but not completely using the bit (4) (4) position detecting means 588,428. [Patent Document 1] Japanese Patent Laid-Open No. 2001-1441 65 [Patent Document 2] Japanese Patent No. 3254704 [Summary of the Invention] [Problems to be Solved by the Invention] Therefore, the present invention seeks a solution in view of the above situation. The main point is to provide a correction method that does not cause the problem of correction errors caused by powder, damage, or bending of the workpiece. It is based on the heat resistance and reliability of the position detector when it is transferred to the heat treatment device. In addition, the moving mechanism or moving step of the heat treatment frame 504 between the cooling device 9 and the heat treatment device 5 can be omitted, and the transfer method and the transfer device for transferring or taking out the heat treatment device directly by using a robot can be omitted. Means to solve the Problem The present invention is the solve the above problems, then provided a method of transferring a rectangular plate workpiece, comprising the use of system are: is provided and rotatably supported in the radial direction of the telescopic robot arm and the front end of the manipulator provided, and removed from a workpiece transfer position into the receiving position transfer robot; for adjustment to the robot arm holding the workpiece with the position and the posture correction mechanism; and corresponds to the robot arm holding the A plurality of position detectors on one end of the workpiece; a method of transferring a square plate-shaped workpiece by a transfer device; a plurality of position detectors as described above are arranged outside of the above-mentioned robots (8) (5) (5) 588428 proper place, and said correcting means based comprises: using the plurality of position detectors, the step of detecting the position and angle of the end edge; according to the detected position and angle of the workpiece is calculated on the robot the position deviation amount, and the step angle of the telescopic shaft manipulator deviation amount; deviation amount according to the calculated angle, the attitude of the workpiece transfer A step of the whole telescopic shaft parallel to the robot arm; by at least one position detector detects the position of the other end side adjacent to the one end side of the step; according to the detected position of the other end side of the workpiece is calculated step a position of the robot arm of the deviation amount; and said calculated position with one end side of the other end side of the deviation, the aspect of the transfer robot for the movement of the workpiece with the correction amount, and the workpiece is received in step predetermined place. Among them, the above-mentioned "position deviation amount" refers to the longitudinal deviation amount when the end edge of the detected amount belongs to the lateral edge of the workpiece, and the lateral deviation when the end edge of the detected amount belongs to the longitudinal edge of the workpiece. the amount. The "manipulator telescopic shaft" refers to the axis when the robot arm is telescopic. Among them, it is preferable that at least one of the plurality of position detectors that detect the position and angle of one end edge detects the position adjacent to the other end edge of the one end edge. Furthermore, it is preferable that the one end edge of the workpiece is the end edge of the workpiece on the front end side of the robot. More particularly, the present invention also provides a shift of one kind of the rectangular plate-shaped workpiece carrier is a process, there is provided the use of: rotatably provided and supporting the robot in the radial direction of the robot arm and the front end of the telescopic set, and the work from the take -9-- transfer (6) (6) 588 428 position to the storing position transfer robot; for adjustment to the robot arm holding the workpiece with the position and attitude correction mechanism; and corresponding to the mechanical end of the workpiece edge position of the plurality of hand held detector; means the transfer of the rectangular plate-shaped workpiece transfer method; is the above-described configuration allows the transfer robot mechanical hand holding the workpiece toward the robot arm along the axis for vertical movement of the vertical movement, so that the workpiece toward the lateral movement of the movable transversely, and by using the robot arm or the robot is constructed by rotating the rotational movement of the workpiece, and the above-mentioned plurality of detectors disposed in positions above Appropriate places other than a robot; the above-mentioned correction mechanism includes: Angle, the step of calculating the longitudinal position deviation of the workpiece and the angular deviation from the telescopic shaft of the robot arm; according to the calculated angular deviation, using the rotation movement to adjust the attitude of the workpiece parallel to the machine A step of telescoping the arm; a step of calculating a lateral position deviation of the workpiece by using the lateral movement and using the position of the other end detected by at least one of the position detectors; And a step of correcting the amount of vertical and horizontal movement of the workpiece by the transport robot based on the positional deviation between the vertical and horizontal positions, and accommodating the workpiece at a predetermined appropriate position. Wherein the so-called "longitudinal" means when removing or receiving, the direction along the robot arm of the robot arm to move the telescopic shaft, and said so-called "transverse" means perpendicular to said longitudinal direction, transfer robot taking out Naishi The direction of movement between the position and the containment position. Furthermore, the present invention also provides a rectangular plate of a workpiece transfer apparatus, comprising using a system are: supporting rotatably provided and is retractable in the radial direction 10- (7) arm (7) of 588,428 and A robot provided at the front end thereof, a transfer robot that transfers a workpiece from a take-out position to a storage position; a correction mechanism for adjusting the position and attitude of the workpiece held on the robot hand; and a robot corresponding to the robot hand side end of the workpiece holding a plurality of position detectors; a transfer apparatus of the rectangular plate-shaped workpiece transfer device; the above-mentioned plurality of detectors disposed in a position suitable place other than the robot; and said correcting means based comprising: using the plurality of position detectors detect the position and angle of the edge of the one end, and this calculated amount of positional deviation of the robot, the robot arm and the angle deviation amount of the telescopic shaft of the workpiece, and adjusting the posture of the workpiece parallel to the axis of the telescopic robot arm, then by at least one position detector detects the position of the other end adjacent said one end edge of the side, and According to this calculated deviation amount of the position of the robot arm of the workpiece, then one end of these according to the calculated position of each side of the other end side of the deviation amount, the correction by using the aspect of the transfer robot for the movement of said workpiece Measure, and store the workpiece in a predetermined appropriate position. Among them, the correction mechanism preferably detects the position of the other end edge adjacent to the one end edge by using at least one position detector among the plurality of position detectors for detecting the position and angle of the one end edge. Further, the preferred embodiment is the embodiment of the present invention there is provided the use of: rotatably provided and supporting the robot in the radial direction of the robot arm and the front end of the telescopic set, and a workpiece carrier to move from a withdrawn position transfer robot accommodating position; adjustment for mechanically held in the hand position and orientation of the workpiece by the correction mechanism; corresponding to the end of the workpiece and a plurality of sides of the mechanical position detector hand held; a transfer device -11-(8) (8) 588428 transfer device for square plate-shaped workpiece; wherein the above-mentioned transfer robot is configured to move the workpiece held on the robot hand in the longitudinal direction along the axis of the robot arm, A structure in which the workpiece is moved laterally and the workpiece is rotated by the rotation of the robot arm or the robot, and the plurality of position detectors are arranged at appropriate places other than the robot. The correction mechanism calculates the longitudinal position of the workpiece according to the longitudinal movement and the positions and angles detected by the plurality of position detectors. Deviation, and the deviation angle of the telescopic shaft of the robot arm, and by the above-described rotational movement and rotation of the workpiece to adjust the posture of the robot arm is parallel to the extension-contraction axis, while with the lateral movement, and a plurality of the above-described The position of the other end detected by at least one of the position detectors calculates the lateral position deviation of the workpiece, and then corrects and uses the calculated position deviations of the longitudinal and lateral positions. The vertical and horizontal movement amount of the workpiece by the transfer robot, and the workpiece is stored in a predetermined appropriate position. [Embodiment]. [Inventive embodiment] ★ Next, an embodiment of the present invention will be described in detail based on the drawings. FIG. 1 is an explanatory diagram showing a structure of a transfer device of the present invention. The figures 1 to 7 represent representative embodiments. In the figure, No. 1 is a transfer device, 2 is a transfer robot, 4 is a crystal box, 5 is a heat treatment device, 31 to 33 is a position detector, and W is a substrate. As shown in FIG. 1, the transfer device 1 of the present invention includes a mechanical arm 6 that is rotatably supported in a horizontal direction by -12- 588428 〇) and is retractable in a radial direction, and a front end of the robot arm 6 is provided. A transfer robot 2 composed of a robot hand 7 that transfers a square plate-shaped substrate (W) from a take-out position to a storage position; correction for adjusting the position and attitude of the substrate (W) held on the robot hand 7 Mechanism; at least two position detectors 31, 32 corresponding to one end edge 80 of the substrate (W) held on the robot hand 7 and disposed in an appropriate place other than the above-mentioned robot arm; and corresponding to adjacent one end edge The position detector 33 on the other side of 81. The correction means based on the use of the position detector disposed at an appropriate position other than the mechanical hand 31,3 2,3 3, the difference of the vertical and horizontal position of the edge 7 of the robot is calculated workpiece (W) and the telescopic robot arm The amount of angular deviation of the axis, and the posture of the workpiece is adjusted to be parallel to the telescopic axis A of the robot arm. At the same time, the amount of vertical and horizontal movement is corrected according to the calculated position deviation, and then the workpiece is stored at a predetermined appropriate position. Since it is not necessary to install a position detector on the robot 7, the substrate can be taken out directly from the high-temperature heat treatment apparatus. Hereinafter, in the present embodiment, for the heat treatment apparatus 5 is the support frame 51 of the cooling device 9 of the support frame 52, and an external cradle crystal cell belonging between 4 'carrying the work shift rectangular liquid crystal display An example will be described using a glass substrate w. As described above, the present invention has the characteristic point that the substrate can be directly taken out of the heat treatment device 5 by omitting the detector from the robot. There are no particular restrictions on the shape of the workpiece including the movement of the heat treatment device 5, such as the transfer between an external bracket such as a crystal box and a step device other than the heat treatment device, or between steps -13- (10) Transfers, etc. are equally applicable. Specifically, the transfer device 1 of this example is mounted on a stand 10 provided in a clean room, a guide wire rack of the guide rail 23 of the transfer robot 2 is laid laterally, and the guide rail 23 is sandwiched between the guide rails 23. On both sides, a heat treatment device 5 composed of a heating furnace 50 for heating the substrate and a cooling device 9 for cooling the substrate are arranged, and are moved laterally (Y-axis direction) along the guide rail 23. The robot W takes out the substrate W in the crystal box, moves it to the front surface of the heat treatment device 5, and then stores the substrate W in the cooling device 9. After the cooling is completed, it is supported from the device. The substrate W is taken out from the rack 52 and stored in the crystal case 4. Two position detectors 3 1, 32 for detecting the position of the substrate W—the two edges of the substrate W are provided at appropriate positions on the gantry 10 (in front of the cooling device in this example), and The position detector 33 0 at the other end is detected. The crystal box 4 is formed in front of the above-mentioned guide rail facing the voltage limit, and an opening 40 for the substrate W to enter and exit is formed on the inner surfaces of the left and right side arms. A predetermined space is provided in the vertical direction, and support pieces (not shown) are protruded, and the side ends of the substrates are clamped on the corresponding left and right support pieces. Contains a plurality of substrates W 0 transport robot 2, more specifically, as shown in Figure 3 'from: along the above-mentioned guide rail 23, and can be moved in the lateral direction (Y-axis direction) of the machine 20; It may be performed on the machine table 20 up and down, and horizontally rotatable support of the robot arm 6; rotatably connected to the robot hand 6, 7 ° above -14- machine (11) (11) 6 588 428 robotic arm system By: the first robot arm 21 rotatably supported on the machine table 20, and the front end portion of the first robot arm 21 Rotatably supported by the second mechanical arm 22 is constituted. A robot hand 7 is connected to a front end portion of the second robot arm 22. Furthermore, as long as it is retractable and rotatable, the robot arm and the manipulator can adopt other structures, and it is not limited to the above. As shown by the arrow in the figure, this type of transfer robot 2 can be configured to move the substrate W sucked and held on the robot hand 7 in the longitudinal direction (X along the telescopic axis of the robot arm 6) during removal or storage. (Axis direction) vertical movement with linear movement; horizontal movement that moves both the robot arm 6 and the machine table 20 in the lateral direction (Y-axis direction) of the guide rail 23; it can also be seen from the second figure that the machine 6 arm up and down direction (Z axis direction) with the vertical movement of the mobile robot 237 guide rail pair; performed by hand or machine direction of rotation of the substrate W 7 of the robot arm 6 rotates the rotating movement. System shown in FIG. 4, a block diagram of a system configuration of a transfer device. The transport system includes a robot 2 has: the above-described robot arm 6 and robot 7 and the like conveying mechanism 25, and the motor for driving the drive unit 24 and the like. The transfer robot 2 based external control device 11 controls the operation. That is, the control device 11 from the system via the user interface using the input of control commands by the user, or the remote host of the job instructions, or according to the memory unit within the apparatus control program stored in, depending on the substrate W into heat treatment apparatus 5, and the substrate is taken out to the embodiment is mounted at a predetermined position of the pod or equipment in the next step, the control operation of the transport robot 2, is the detection signal from the position detector 31, 32, the present invention constituted -15- correction unit (12) (12) 588 428 configuration. The above-mentioned position detector 3 1 (3 2, 3 3) is a reflective detector, or a light detector composed of a light projector and a light receiver. In the case of a reflective detector, the projected light is reflected and the end of the substrate is sensed. When part of the light-emitting, upon receiving the light type, then by from the light projector administered emitted light by the substrate side edge of the shielding, and then by the light sensed shielding, whereby to detect the two positions of the substrate side edge. In the present example, the light projected upward from below the substrate W based on the reflection-type detectors corresponding to one end side of the substrate 80 and parallel to the transverse direction of the rail-connecting two, while the other end of the corresponding side 80, in Set one at the predetermined position. Each of the position detection by the detector location based on the input control means belonging to the correction means 11. Furthermore, as long as there is no interference phenomenon on the substrate 尙, the above-mentioned position detector can also be arranged above the substrate, and it can be arranged to project light from the top to the bottom. Moreover, they can use other non-contact detectors, or a contact detector. FIG fifth aspect of the present system using the embodiment of the transfer apparatus 1 transfer processing sequence of the embodiment described Coming to thumbnails. The transfer robot 2 holding the substrate W on the robot hand 7 and taking it out of the support frame 52 retracts the robot arm 6 and passes one end 80 of the substrate W through the position detector 32. The light projected upwards 32 will be reflected by the substrate W, and the passing position (such as the relative position with respect to the manipulator) of the one end will be detected by identifying the reflected light (S 101), and the detected It will transmit location information to the control device 16- (13) (13) 588 428 11 and set the memory. In S101, after one end edge 80 passes the detector 32, the robot arm is retracted, and the passing position of the one end edge 80 is also detected by the detector 31 (S 102), and the detected position information is transmitted in the control device 11 and the memory. In the control device 11, based on the memorized information of the above two positions, the tilt of the substrate W relative to the telescopic axis of the robot arm and the longitudinal direction (X-axis direction) of the robot 7 after the tilt is corrected are calculated. Position deviation of the substrate. The inclination of the substrate is calculated from the position information of the position detectors 3, 32 stored in advance, and the longitudinal position deviation amount along the two positions, and is controlled by the control device 11 according to the angle deviation amount. signal to the drive unit 24, and then by rotating the robot 7 to perform angle correction, to serve as the substrate W is adjusted in parallel to the axis of the telescopic robot arm posture (S 103). Although the transfer robot 2 further retracts the robotic arm, it moves laterally (Y-axis direction) until before the crystal box 4, but the position detector 33 detects a part of the substrate W adjacent to the one end 80 of the substrate W midway. The passing position of the other end edge (in this example, the end edge 81 parallel to the X-axis direction) (S 104), and this position information is transmitted to the control device 11 to calculate the lateral direction (Y-axis of the substrate W) (Direction) position deviation and memorize it. As described above, after the completion of the measurement by the position detectors 31, 3, 2, 3 3, the transfer robot 2 moves in the lateral direction (Y-axis direction) to a predetermined position opposite to the crystal box 4. The stop position at this time is corrected and determined using the Y-axis direction substrate position deviation amount calculated above. The stopped transfer robot 2 makes the robot arm 6 -17- (14) (14) 588428 in which the substrate W should be housed in the crystal box 4 in a contracted state, rotates 1800 (SI 05), and makes the machine After the arm 6 is moved up and down to a predetermined height corresponding to the storage position, the robot arm 6 is extended in the longitudinal direction (X-axis direction) to store the substrate W in the crystal case 4 (S 106). W when the amount of movement of the substrate along the longitudinal direction of this housing (6 the robot arm stop position) is determined on the square support frame received in longitudinal position by using the deviation amount correction of a plurality of layers 52 each substrate W via the above sequence will be using transfer robot 2 are sequentially adsorbed by the robot arm 6, and transferring the pod to the housing 4. In addition, when transferring from the crystal case 4 to the heat treatment device 5 and from the heat treatment device 5 to the cooling device, it is also preferable to perform the same correction process. In this case, it is also preferable to provide two or more position detectors before the crystal box 4 or the supporting frame 51 of the thermal processing device. Of course, in this case, it is also possible to use two or more position detectors installed at one position. Figure 6 shows an example of the change in the passing position of one of the two position detectors 3 1 and 32, which also detects the passing position of one end edge 80, and the other end edge 81. The sequence description is sketched. With this example, using at least two position detectors, the above three deviations can be measured, and the number of components can be reduced. From steps S201 to S203, the position detectors 31 and 32 are used to detect the passing position of one end 80 of the substrate W taken from the support frame 52 of the cooling device, and the inclination of the substrate W is calculated based on the position information. The steps of deviation from the vertical position and correcting the tilt are the same as the steps of S 1 0 1 to S 1 0 3 described above. -18- (15) (15) 588428 The conveying robot 2 moves in the moving area of the substrate W in the longitudinal direction and moves in the horizontal direction to the side of the predetermined detector where the non-detector 3 1 is located, and makes after the other end of the substrate W edge 81 extending longitudinally toward the detector 31 to the position opposite to the up position, as it detects the end edge 80, the position of the detector 31 toward the lateral movement, and by the above-mentioned end position detector 31 detected by the edge 81 by the position information transmitted to the control device 11, and calculates the amount of deviation of the lateral position of the substrate W and the memory (S104). Fig. 7 is a sequence diagram of a modification example in which two position detectors 3 1, 32 are connected in parallel along the longitudinal direction (X-axis direction) of the telescopic axis of the robot arm. The transfer robot 2 that takes out the substrate W from the crystal box shrinks the robot arm 6 in the longitudinal direction (X-axis direction) until the end edge 81 of the substrate W is located at the position detector 3 1, 32, and then faces the position detection. 31, 32 laterally toward the substrate W (Y-axis direction) moves, and the position detected by the end edge 81 (S301) from 31, and the memory location 11 in the control device. Next, the transfer robot 2 is moved further laterally, and the passing position of the end edge 81 is also detected by the position detector 32 (S302), and the position information is stored in the control device 11. The control device 11 calculates the tilt of the substrate W with respect to the telescopic axis of the robot arm and the positional deviation with respect to the transverse substrate after the tilt is corrected, based on the information of the two positions memorized. The inclination of the substrate is calculated based on the positional deviation in the horizontal direction, and the angle is corrected based on the angular deviation. The substrate W is adjusted to an attitude parallel to the telescopic axis of the robot arm (S303). -19- (16) (16) 588 428 Then, from the state of the S 303, the conveyance robot 2 moves further towards the transverse (Y-axis direction), and then by the position detector 31 to capture the position of the substrate W ( in the present embodiment, both the position detector is located at position 31 and 32 above) after (S304,), and then further shrink robot arm 6, and then by the position detector 31 does not recognize the captured reflected light position, the substrate W is detected by the position of the end edge 80 (S 305), the control unit 11 calculates the X-axis direction position deviation amount of the substrate W relative to the robot 7 and the memory. In the transfer processing sequence of this embodiment, although the angle correction of the substrate W is performed by the rotation of the robot arm, it may be performed by the rotation of the robot arm. In addition, the crystal box 4 forming the transfer direction is provided on the same side of the cooling device 9 as the guide rail 23, but the purge device can also be disposed on the orthogonal side of the crystal box 4 at the end of the rail. when the case, it does not require transfer robot 1 80 ° rotation, and when conditions are provided when the orthogonal side, on which the rail end portion, then the conveyance robot 9 (Τ rotation. Further, although the above embodiment for simplicity, only for the longitudinal, lateral or utilize two detectors were detected examples will be described, however, and not necessarily in the longitudinal, transverse or require two detectors, also based on the use of more multi-detector to detect a known statistical processing of the data unit, tilt or positional deviation is calculated. Further, the present invention is not limited to the above embodiment, and various changes are also included. effect of the invention] -20 * (17) (17) 588428 According to the above, according to the present invention, 'using at least two position detectors designed at appropriate positions outside the robotic arm', two positions of one end of the workpiece are detected, and longitudinal or lateral position deviations are calculated. the amount At the same time, the tilt is corrected, and a position detector is used to detect a position on one end of the workpiece, and the horizontal or vertical position deviation is calculated. The amount of vertical and horizontal movement during the movement. This requires a position detector in the manipulator. Even when the heat treatment device is transferred, the heat resistance and reliability of the position detector will not be caused. Therefore, the contact points can be omitted conventional manner required for the correction of the substrate between the cooling means and the heat treatment apparatus or pod movement mechanism moving step, the robot may be utilized for the heat treatment apparatus for receiving and directly removed, the device will cost, At the same time, the layout of the device is wide, which can effectively use the clean room, and can also greatly reduce the process time. Furthermore, the conventional mechanical calibration center platform or its calibration steps are not required, and of course, no random dust workpiece, breakage, bending and other problems caused by reasons correcting errors. [Brief Description of the drawings FIG 1] the present invention The plan view shows the structure of the transfer device. Figure 2 is a side view of the same transfer device. Figure 3 is a diagram illustrating the transfer robot. Figure 4 is a block diagram of the system structure of the transfer device. -21-(18 588428 Fig. 5 is a schematic diagram illustrating an example of a transfer processing sequence. Fig. 6 is a schematic diagram of a variation example of a transfer processing sequence. Fig. 7 is a schematic diagram of another variation example of a transfer processing sequence. Figure 8 (a) and (b) are explanatory diagrams of a conventional mechanical calibration method using a central unit. Figure 9 is a plan view of a conventional non-contact calibration method of a transfer device. [Description of component symbols] 1 Transfer device 2 Carrying robot 4 Crystal box 5 Heat treatment device 6 Manipulator 7 Manipulator 9 Cooling device 10 Bench 11 Control device 20 Machine 21 First robot arm 22 Second robot arm 23 Guide rail 24 Drive unit 25 Transport mechanism 31, 32, 33 position detector-22- (19) 588428 40 open P 50 heating furnace 51,52 support frame 80,81 uphill m edge 401 transfer robot 407 manipulator 408 position detector 501 center platform 502 center Support member 504 supporting portion 503 of the industrial heat treatment A mechanical arm with a rack telescopic shaft W substrate -23-