TWI526381B - Transport car - Google Patents
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- TWI526381B TWI526381B TW101124729A TW101124729A TWI526381B TW I526381 B TWI526381 B TW I526381B TW 101124729 A TW101124729 A TW 101124729A TW 101124729 A TW101124729 A TW 101124729A TW I526381 B TWI526381 B TW I526381B
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- image sensor
- storage case
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- conveyed
- transport vehicle
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Description
本發明係關於一種用於例如於無塵室內搬送收納有複數片玻璃基板之收容盒等被搬送物之搬送車。 The present invention relates to a transport vehicle for transporting a transported object such as a storage box in which a plurality of glass substrates are housed in a clean room.
作為先前之搬送車，已知有例如專利文獻1中記載者。專利文獻1中記載之搬送車包含：暫存收容盒，其具有複數個收納晶圓之棚架；移載裝置，其進行晶圓之移載；及感測器，其檢測暫存收容盒內之晶圓之有無。 As a conventional transport vehicle, for example, those described in Patent Document 1 are known. The transport vehicle described in Patent Document 1 includes a temporary storage case having a plurality of scaffolds for storing wafers, a transfer device for transferring the wafers, and a sensor for detecting the temporary storage case. The presence or absence of wafers.
[專利文獻1]日本專利特開2003-237941號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-237941
於例如半導體或液晶面板之生產線中，於將收容盒自前一步驟搬送至後一步驟時，為掌握收容盒內之平板狀構件之片數，而必需如上所述檢測收納於收容盒內之平板狀構件之有無。如此，於該領域中，要求高精度地檢測收納於收容盒之平板狀構件之收納狀態。 In a production line such as a semiconductor or a liquid crystal panel, in order to transfer the storage box from the previous step to the next step, in order to grasp the number of the flat members in the storage box, it is necessary to detect the flat plate stored in the storage box as described above. The presence or absence of a member. As described above, in this field, it is required to accurately detect the storage state of the flat member housed in the storage case.
本發明係為解決上述課題而研製成者，其目的在於提供一種可高精度地檢測收納於被搬送物中之平板狀構件之收納狀態之搬送車。 The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a transport vehicle capable of accurately detecting a storage state of a flat member housed in a conveyed object.
本發明之搬送車係搬送收納有平板狀構件之被搬送物者，其特徵在於，其具備有：本體部，其可沿著既定方向移行地設置；旋轉部，其可相對於本體部旋轉地設置於上下方向之軸中心；移載裝置，其設置於旋轉部，載置被搬送物，並且取放被搬送物；光學式檢測手段，其使用光檢測被搬送物中之平板狀構件之收納狀態，並且設置於其光軸方向沿著本體部之移行方向且不隨著旋轉部一起旋轉之位置；及控制部，其以於藉由移載裝置取入被搬送物，並使旋轉部旋轉從而使被搬送物旋轉之後，光學式檢測手段檢測被搬送物中平板狀構件之收納狀態之方式進行控制。 In the transport vehicle of the present invention, the transported object in which the flat member is stored and stored is provided with a main body portion that is movably disposed along a predetermined direction, and a rotating portion that is rotatable relative to the main body portion. The center of the shaft is disposed in the vertical direction; the transfer device is disposed in the rotating portion, and the object to be transported is placed, and the object to be transported is placed; and the optical detecting means uses the light to detect the storage of the flat member in the transported object a state in which the optical axis direction is along a traveling direction of the main body portion and does not rotate together with the rotating portion; and a control portion that takes in the object to be conveyed by the transfer device and rotates the rotating portion After the object to be conveyed is rotated, the optical detecting means controls the storage state of the flat member in the conveyed body.
於該搬送車中，於藉由光學式檢測手段而檢測收納於被搬送物之平板狀構件時，使旋轉部旋轉從而使被搬送物旋轉。有時於收納平板狀構件之被搬送物中設置支撐平板狀構件之支撐構件。該支撐構件於藉由移載裝置而取入被搬送物時，沿著與光學式檢測手段之檢測光正交之方向延伸，因而有與檢測光干涉之虞。因此，藉由於使被搬送物旋轉後進行檢測，而可避免支撐構件干涉檢測光。因此，可高精度地檢測收納於被搬送物之平板狀構件之收納狀態。 In the transport vehicle, when the flat member housed in the object to be transported is detected by the optical detecting means, the rotating portion is rotated to rotate the object to be transported. A support member that supports the flat member may be provided in the object to be conveyed in which the flat member is housed. When the support member picks up the object to be transported by the transfer device, the support member extends in a direction orthogonal to the detection light of the optical detecting means, and thus interferes with the detection light. Therefore, by detecting the rotation of the object to be conveyed, it is possible to prevent the support member from interfering with the detection light. Therefore, the storage state of the flat member accommodated in the object to be conveyed can be detected with high precision.
光學式檢測手段可固定地設置於當被搬送物旋轉時不與該被搬送物抵接之位置。根據該構成，因於使被搬送物旋轉時無需使光學式檢測手段移動，故不需要用於其移動之機構 並且可削減移動時間。因此，可設為簡易之構成並且可迅速地進行平板狀構件之檢測。 The optical detecting means can be fixedly disposed at a position that does not abut against the object to be conveyed when the object to be conveyed is rotated. According to this configuration, since it is not necessary to move the optical detecting means when the object to be conveyed is rotated, a mechanism for moving the same is not required. And can reduce the movement time. Therefore, it is possible to adopt a simple configuration and to quickly detect the flat member.
平板狀構件係以於上下方向彼此相對之方式收納於被搬送物內，光學式檢測手段可於對應於各平板狀構件之收納位置之部位設置有複數個。根據該構成，可同時檢測複數個平板狀構件。又，因於檢測各平板狀構件時，無需使光學式檢測手段於上下方向移動，故不需要用於其移動之機構並且可削減移動時間。因此，可設為簡易之構成並且可迅速地進行平板狀構件之檢測。 The flat member is housed in the object to be conveyed so as to face each other in the vertical direction, and the optical detecting means can be provided in plural at a portion corresponding to the storage position of each of the flat members. According to this configuration, a plurality of flat members can be simultaneously detected. Further, since it is not necessary to move the optical detecting means in the vertical direction when detecting each of the flat members, the mechanism for moving the same is not required, and the moving time can be reduced. Therefore, it is possible to adopt a simple configuration and to quickly detect the flat member.
被搬送物具有：開口，其供取放平板狀構件；及支撐構件，其支撐平板狀構件；且開口於藉由移載裝置取入時，朝向於水平面上與光軸方向正交之方向，支撐構件係經由開口而沿著取放平板狀構件之方向延伸之棒狀構件。此種構成之被搬送物係於載置於移載裝置時支撐構件之延伸方向與光學式檢測手段之光軸方向正交。因此，有檢測光干涉支撐構件因而平板狀構件之檢測變得不穩定之虞。因此，藉由使旋轉部旋轉從而使被搬送物旋轉，而可避免檢測光干涉支撐構件。因此，可高精度地檢測收納於被搬送物之平板狀構件之收納狀態。 The object to be conveyed has an opening for picking up and placing a flat member, and a supporting member for supporting the flat member; and the opening is oriented in a direction orthogonal to the optical axis direction on the horizontal plane when being taken in by the transfer device, The support member is a rod-shaped member that extends in the direction in which the flat member is taken and placed via the opening. When the object to be transported in such a configuration is placed on the transfer device, the extending direction of the support member is orthogonal to the optical axis direction of the optical detecting means. Therefore, there is a possibility that the detection light interferes with the support member and the detection of the flat member becomes unstable. Therefore, by rotating the rotating portion and rotating the object to be conveyed, it is possible to prevent the detecting light from interfering with the supporting member. Therefore, the storage state of the flat member accommodated in the object to be conveyed can be detected with high precision.
根據本發明，可高精度地檢測收納於被搬送物之平板狀構件之收納狀態。 According to the present invention, it is possible to accurately detect the storage state of the flat member housed in the object to be conveyed.
以下，參照隨附圖式，對於較佳之實施形態詳細地進行說明。再者，於圖式之說明中，對於相同或相當之要素附註相同元件符號，並省略重複之說明。 Hereinafter, preferred embodiments will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and the description thereof will be omitted.
圖1係表示一實施形態之搬送車之立體圖，圖2係自前方觀察圖1所示之搬送車之圖式。 Fig. 1 is a perspective view showing a transport vehicle according to an embodiment, and Fig. 2 is a view showing a transport vehicle shown in Fig. 1 from the front.
圖1及圖2所示之搬送車1係於配置有多個棚架(未圖示)之無塵室內移動，且於各棚架進行收容盒(被搬送物)W之取放之裝置。於收容盒W中，收納有例如用於液晶面板或太陽能電池面板之複數個玻璃基板(平板狀構件)G(參照圖5)。 The transport vehicle 1 shown in Fig. 1 and Fig. 2 is a device that moves in a clean room in which a plurality of scaffolds (not shown) are disposed, and the storage box (the transported object) W is taken and placed in each scaffold. In the storage case W, for example, a plurality of glass substrates (flat members) G for a liquid crystal panel or a solar cell panel are housed (see FIG. 5).
搬送車1之構成包含：於無塵室內移動之移行台車(本體部)3；豎立設置於該移行台車3之2台支柱裝置5a、5b；相對於支柱裝置5a、5b可於上下方向移動地設置之升降台7；設置於升降台7上之轉盤(旋轉部)9；設置於轉盤9上之移載裝置11；以及檢測收容盒W內之玻璃基板G之有無之映像感測器(光學式檢測手段)13。又，搬送車1具有控制該搬送車1之動作之控制器(控制部)15(參照圖4)。 The transport vehicle 1 includes a transfer trolley (main body) 3 that moves in a clean room, two pillar devices 5a and 5b that are erected on the transport trolley 3, and can be moved in the vertical direction with respect to the pillar devices 5a and 5b. a lifting table 7 provided; a turntable (rotating portion) 9 provided on the lifting table 7; a transfer device 11 provided on the turntable 9; and an image sensor for detecting the presence or absence of the glass substrate G in the storage case W (optical Type detection means) 13. Moreover, the transport vehicle 1 has a controller (control unit) 15 (see FIG. 4) that controls the operation of the transport vehicle 1.
移行台車3可沿著既定方向移行地設置。移行台車3具有車輪3a，且沿著鋪設於無塵室內之軌道R進行直線移動。車輪3a係藉由未圖示之馬達而旋轉驅動。搬送車1藉由該移行台車3而可於無塵室內移動地設置。 The moving trolley 3 can be arranged to move in a predetermined direction. The moving trolley 3 has a wheel 3a and linearly moves along a track R laid in the clean room. The wheel 3a is rotationally driven by a motor (not shown). The transport vehicle 1 is provided to be movable in the clean room by the transport trolley 3.
支柱裝置5a、5b係於移行台車3之移行方向上對向地設 置有一對。於支柱裝置5a、5b，沿著上下方向設置有導軌17。於該導軌17可滑動地設置有設置於升降台7之兩側之支撐框架19之導件(未圖示)。升降台7係藉由未圖示之升降驅動手段而沿著導軌17於支柱裝置5a、5b之上下方向升降。 The pillar devices 5a, 5b are arranged opposite to each other in the traveling direction of the moving carriage 3 There is a pair. The rails 17 are provided in the vertical direction in the pillar devices 5a and 5b. A guide (not shown) provided on the support frame 19 on both sides of the lift table 7 is slidably provided on the guide rail 17. The elevating table 7 is raised and lowered along the guide rails 17 in the vertical direction of the strut devices 5a and 5b by means of an elevating driving means (not shown).
轉盤9係相對於移行台車3可繞上下方向之軸中心旋轉地設置。轉盤9係設置於升降台7上，且藉由未圖示之馬達而旋轉驅動。 The turntable 9 is rotatably provided about the axis center of the vertical direction with respect to the traveling carriage 3. The turntable 9 is provided on the lift table 7, and is rotationally driven by a motor (not shown).
移載裝置11包含水平關節型機械手臂(SCARA Arm，Selective Compliance Assembly Robot Arm)20、及設置該水平關節型機械手臂20之滑動部21。水平關節型機械手臂20係包含基端側臂20a、前端側臂20b及移載臂20c。基端側臂20a之基端側係轉動自如地設置於基台22。基端側臂20a與前端側臂20b係彼此轉動自如地設置，且構成自由臂23。又，前端側臂20b與移載臂20c係彼此轉動自如地設置。移載臂20c之上表面係構成載置收容盒W之載置面。水平關節型機械手臂20藉由使基端側臂20a以基台22之中心線為對稱軸同步地旋轉驅動，而使移載臂20c向與移行台車3之移行方向正交之方向(取放收容盒W之方向)進行直線移動。 The transfer device 11 includes a SCARA Arm (Selective Compliance Assembly Robot Arm) 20 and a sliding portion 21 that mounts the horizontal articulated robot arm 20. The horizontal articulated robot arm 20 includes a proximal end side arm 20a, a distal end side arm 20b, and a transfer arm 20c. The proximal end side of the proximal end side arm 20a is rotatably provided on the base 22. The proximal end side arm 20a and the distal end side arm 20b are rotatably provided to each other, and constitute a free arm 23. Further, the front end side arm 20b and the transfer arm 20c are rotatably provided to each other. The upper surface of the transfer arm 20c constitutes a mounting surface on which the storage case W is placed. The horizontal articulated robot arm 20 rotates the base end side arm 20a synchronously with the center line of the base 22 as an axis of symmetry, and causes the transfer arm 20c to be orthogonal to the traveling direction of the traveling carriage 3 (take and drop) The direction of the storage box W is linearly moved.
滑動部21係向與移行台車3之移行方向正交之方向進行前進移動，且使水平關節型機械手臂20滑動。滑動部21 係設置於轉盤9上。藉此，移載裝置11設置為可自圖1所示之移載臂20c之前端之方向旋轉至180°之相反方向。 The sliding portion 21 is moved forward in a direction orthogonal to the traveling direction of the traveling carriage 3, and the horizontal joint type robot 20 is slid. Slide portion 21 It is set on the turntable 9. Thereby, the transfer device 11 is disposed to be rotatable from the front end of the transfer arm 20c shown in FIG. 1 to the opposite direction of 180°.
圖3係表示映像感測器之圖式。如圖3所示，映像感測器13係設置於支柱裝置5a、5b。映像感測器13為例如使用紅外線之光學式感測器，且包含投光部13a及受光部13b。映像感測器13藉由受光部13b而接收自投光部13a投射之光L，藉此檢測玻璃基板G。 Figure 3 is a diagram showing a map sensor. As shown in FIG. 3, the image sensor 13 is provided in the pillar devices 5a and 5b. The image sensor 13 is, for example, an optical sensor using infrared rays, and includes a light projecting portion 13a and a light receiving portion 13b. The image sensor 13 receives the light L projected from the light projecting portion 13a by the light receiving portion 13b, thereby detecting the glass substrate G.
映像感測器13為使受光部13b接收自投光部13a投射之光，而將投光部13a與受光部13b以對向之方式分別設置於支柱裝置5a、5b之下部。即，映像感測器13之光軸方向係沿著移行台車3之移行方向。映像感測器13係於收容盒W載置於移載裝置11之狀態下設置於當旋轉時不抵接收容盒W之位置。換言之，映像感測器13係設置於與載置於移載裝置11之收容盒W之旋轉中心(轉盤9之旋轉中心)相距該旋轉中心與收容盒W之角部之間之距離以上之位置。 The image sensor 13 is configured such that the light receiving unit 13b receives the light projected from the light projecting unit 13a, and the light projecting unit 13a and the light receiving unit 13b are disposed opposite to each other in the lower portion of the pillar devices 5a and 5b. That is, the optical axis direction of the image sensor 13 is along the traveling direction of the traveling carriage 3. The image sensor 13 is disposed at a position where the storage box W is placed on the transfer device 11 so as not to receive the cassette W when rotated. In other words, the image sensor 13 is disposed at a position more than the distance between the center of rotation of the storage case W (the rotation center of the turntable 9) placed on the transfer device 11 and the corner of the storage case W. .
映像感測器13之投光部13a及受光部13b係沿著上下方向隔開既定間隔地配置，且設置有與收納於收容盒W內之玻璃基板G之片數對應之個數(於本實施形態中為13個)。投光部13a之高度位置與受光部13b之高度位置係於上下方向僅偏離既定高度。具體而言，投光部13a配置於向下方(或上方)與受光部13b相距有玻璃基板G之收納間距之處。即，自投光部13a投射之光L相對於水平方向(玻璃基板G之面 方向)傾斜。 The light projecting portion 13a and the light receiving portion 13b of the image sensor 13 are arranged at predetermined intervals in the vertical direction, and are provided in a number corresponding to the number of the glass substrates G housed in the storage case W (in this case). In the embodiment, there are 13). The height position of the light projecting portion 13a and the height position of the light receiving portion 13b are shifted from the predetermined height in the vertical direction. Specifically, the light projecting portion 13a is disposed at a position where the glass substrate G is spaced apart from the light receiving portion 13b downward (or upward). That is, the light L projected from the light projecting portion 13a with respect to the horizontal direction (the surface of the glass substrate G) Direction) Tilt.
藉由該構成，自投光部13a投射之光相對於玻璃基板G傾斜地入射，且透過玻璃基板G而由受光部13b接收。映像感測器13係根據自投光部13a投光時之光強度與由受光部13b接收時之光強度之強度變化，而檢測玻璃基板G之有無。 With this configuration, the light projected from the light projecting portion 13a is incident obliquely with respect to the glass substrate G, and is transmitted through the glass substrate G and received by the light receiving portion 13b. The image sensor 13 detects the presence or absence of the glass substrate G based on the intensity of the light when the light is emitted from the light projecting portion 13a and the intensity of the light when received by the light receiving portion 13b.
映像感測器13係按照自控制器15輸出之指示信號而進行玻璃基板G之檢測。映像感測器13係於將收容盒W取入至搬送車1時，或將收容盒W自搬送車1移動至移動地之棚架時，進行收納於收容盒W之玻璃基板G之有無之檢測。映像感測器13將表示檢測結果之檢測信號(映射資料)輸出至控制器15。 The image sensor 13 performs detection of the glass substrate G in accordance with an instruction signal output from the controller 15. The image sensor 13 is used to take the storage case W into the transport vehicle 1 or to move the storage case W from the transport vehicle 1 to the scaffold of the moving place, and to store the glass substrate G stored in the storage case W. Detection. The image sensor 13 outputs a detection signal (mapping data) indicating the detection result to the controller 15.
圖3係表示控制器之方塊圖。如圖3所示，於控制器15連接有映像感測器13(投光部13a及受光部13b)。控制器15係包含CPU[Central Processing Unit，中央處理單元]、ROM[Read Only Memory，唯讀記憶體]、RAM[Random Access Memory，隨機取放記憶體]等，且藉由程式而執行各種控制。 Figure 3 is a block diagram showing the controller. As shown in FIG. 3, the image sensor 13 (the light projecting part 13a and the light receiving part 13b) is connected to the controller 15. The controller 15 includes a CPU [Central Processing Unit], a ROM [Read Only Memory], a RAM [Random Access Memory], and the like, and performs various controls by a program. .
控制器15係進行與搬送車1之動作相關之控制之裝置，且控制移行台車3、支柱裝置5a、5b、升降台7、轉盤9及移載裝置11之動作。又，控制器15控制映像感測器13之檢測玻璃基板G之時機。具體而言，控制器15以於藉由移 載裝置11而取入收容盒W，並使轉盤9旋轉後，使映像感測器13實施收納於收容盒W之玻璃基板G之檢測之方式進行控制。換言之，控制器15係以於使收容盒W旋轉後，使映像感測器13實施收納於收容盒W之玻璃基板G之檢測之方式進行控制。控制器15係將指示玻璃基板G之檢測之指示信號輸出至映像感測器13。 The controller 15 is a device that performs control related to the operation of the transport vehicle 1, and controls the operations of the transfer cart 3, the strut devices 5a and 5b, the elevating table 7, the turntable 9, and the transfer device 11. Further, the controller 15 controls the timing at which the image sensor 13 detects the glass substrate G. Specifically, the controller 15 is configured to move The carrier 11 is taken into the storage case W, and after the turntable 9 is rotated, the image sensor 13 is controlled to perform the detection of the glass substrate G accommodated in the storage case W. In other words, the controller 15 controls the image sensor 13 to detect the glass substrate G stored in the storage case W after the storage case W is rotated. The controller 15 outputs an instruction signal indicating the detection of the glass substrate G to the image sensor 13.
又，控制器15若接收自映像感測器13輸出之檢測信號，則基於該檢測信號而記憶收容盒W內之玻璃基板G之片數。然後，控制器15判定向自動倉庫入庫時之收容盒W內之玻璃基板G之片數及配置與出庫時之收容盒W內之玻璃基板G之片數及配置是否一致。控制器15係於判定之結果、即入庫時與出庫時玻璃基板G之片數不同之情形時，將表示其意旨之錯誤信號輸出至例如報告手段。然後，控制器15以將檢查出錯誤之收容盒W移載至並非移送地之既定棚架之棚架(例如，維護用台或原來之棚架等)之方式控制移行台車3及移載裝置11。 When the controller 15 receives the detection signal output from the image sensor 13, the controller 15 memorizes the number of the glass substrates G in the housing case W based on the detection signal. Then, the controller 15 determines whether or not the number of the glass substrates G in the storage case W at the time of storage into the automatic warehouse and the arrangement and the arrangement and the arrangement of the glass substrates G in the storage case W at the time of delivery are the same. The controller 15 outputs an error signal indicating the result to the report means, for example, when the result of the determination, that is, when the number of sheets of the glass substrate G at the time of storage is different from the time of delivery. Then, the controller 15 controls the transfer trolley 3 and the transfer device in such a manner that the storage box W in which the error is detected is transferred to the scaffold (for example, the maintenance table or the original scaffold, etc.) of the predetermined scaffold which is not the transfer destination. 11.
繼而，對於搬送車1之動作進行說明。搬送車1係控制器15基於程式而控制各裝置，且於無塵室內進行收容盒W之移載及搬送。若藉由移載裝置11自棚架取出並取入收容盒W，則搬送車1使轉盤9大致旋轉90°。此時，於升降台7位於上方之情形時，使升降台7下降至設置有映像感測器13之支柱裝置5a、5b之下部。然後，藉由映像感測器13 而檢測收納於收容盒W之玻璃基板G。於玻璃基板G之檢測後，搬送車1使轉盤9大致旋轉90°，且使收容盒W之開口K朝向棚架側。然後，搬送車1移動至移送地之既定棚架並藉由移載裝置11而將收容盒W移動至棚架。 Next, the operation of the transport vehicle 1 will be described. The transport vehicle 1 system controller 15 controls each device based on the program, and transfers and transports the storage box W in the clean room. When the transfer case 11 is taken out from the scaffolding and taken into the storage case W, the transport car 1 rotates the turntable 9 by approximately 90°. At this time, when the elevating table 7 is positioned above, the elevating table 7 is lowered to the lower portion of the strut devices 5a and 5b on which the image sensor 13 is provided. Then, by the image sensor 13 The glass substrate G accommodated in the storage case W is detected. After the detection of the glass substrate G, the transport vehicle 1 rotates the turntable 9 by approximately 90°, and the opening K of the storage box W faces the scaffolding side. Then, the transport vehicle 1 is moved to a predetermined scaffold of the transfer place, and the storage box W is moved to the scaffold by the transfer device 11.
繼而，對於藉由映像感測器13檢測之玻璃基板G之方法詳細地進行說明。圖5係表示取入有收容盒時之收容盒與映像感測器之位置關係之圖式。圖6係表示收容盒旋轉後之收容盒與映像感測器之位置關係之圖式。於各圖中，(a)係自前方觀察收容盒W之圖式，(b)係自下方觀察(a)所示之收容盒W之圖式，(c)係自側面觀察(a)所示之收容盒W之圖式。 Next, a method of detecting the glass substrate G by the image sensor 13 will be described in detail. Fig. 5 is a view showing the positional relationship between the storage box and the image sensor when the storage box is taken in. Fig. 6 is a view showing the positional relationship between the storage case and the image sensor after the storage case is rotated. In each of the drawings, (a) is a view in which the storage case W is viewed from the front, (b) is a view in which the storage case W shown in (a) is viewed from below, and (c) is viewed from the side (a). Show the storage box W's pattern.
首先，對於收容盒W進行說明。收容盒W呈長方體形狀，且由框架F構成。收容盒W於前方(圖5(b)中之上側)具有供取放玻璃基板G之開口K。於收容盒W之後方(圖5(b)中之下側)，沿著上下方向(高度方向)於寬度方向上隔開既定間隔地設置有2根柱構件C1、C2。柱構件C1、C2係作為自開口K側插入之玻璃基板G之擋止件而發揮作用。 First, the storage case W will be described. The storage box W has a rectangular parallelepiped shape and is constituted by a frame F. The storage case W has an opening K for receiving the glass substrate G on the front side (upper side in FIG. 5(b)). After the storage case W (the lower side in FIG. 5(b)), two column members C1 and C2 are provided at predetermined intervals in the width direction in the vertical direction (height direction). The column members C1 and C2 function as stoppers of the glass substrate G inserted from the opening K side.
又，於柱構件C1、C2安裝有棒狀之後支承件(支撐構件)B1、B2。後支承件B1、B2係自收容盒W之後方向前方延伸，且基端部固定於柱構件C1、C2並且前端部延伸至開口K側為止。又，於收容盒W之寬度方向之兩側，於前後方向隔開既定間隔地設置有複數個(此處為4根)側支承件S。玻璃基板G係藉由後支承件B1、B2及側支承件S而支 撐下部，且以於上下方向相對之方式收納於收容盒W。 Moreover, the rod-shaped rear support members (support members) B1 and B2 are attached to the column members C1 and C2. The rear supports B1 and B2 extend forward from the rear of the storage case W, and the base end portions are fixed to the column members C1 and C2 and the front end portion extends to the opening K side. Further, a plurality of (here, four) side supports S are provided on both sides in the width direction of the storage case W at predetermined intervals in the front-rear direction. The glass substrate G is supported by the rear supports B1, B2 and the side supports S The lower part is supported and accommodated in the storage case W so as to face up and down.
如圖5所示，藉由移載裝置11而取入至搬送車1之收容盒W之開口K朝向棚架側。即，收容盒W之開口K朝向與移行台車3之移行方向正交之方向，後支承件B1、B2亦沿著與移行方向正交之方向延伸。此時，映像感測器13之光軸方向與後支承件B1、B2正交。因此，有自映像感測器13之投光部13a投射之光L干涉後支承件B1、B2之虞。 As shown in FIG. 5, the opening K of the storage case W taken into the transport vehicle 1 by the transfer device 11 is directed toward the scaffolding side. That is, the opening K of the storage box W is oriented in a direction orthogonal to the traveling direction of the traveling carriage 3, and the rear supports B1, B2 also extend in a direction orthogonal to the traveling direction. At this time, the optical axis direction of the image sensor 13 is orthogonal to the rear supports B1, B2. Therefore, the light L projected from the light projecting portion 13a of the image sensor 13 interferes with the ridges of the support members B1, B2.
因此，於本實施形態中，於藉由移載裝置11而取入收容盒W後，使轉盤9旋轉從而使收容盒W大致旋轉90°。藉此，如圖6所示，映像感測器13之光軸方向與後支承件B1、B2之延伸方向大致平行。因此，避免自映像感測器13之投光部13a投射之光L干涉後支承件B1、B2。映像感測器13於使收容盒W自初始狀態(取入至搬送車1之狀態)大致旋轉90°後，檢測玻璃基板G之有無。 Therefore, in the present embodiment, after the storage case W is taken in by the transfer device 11, the turntable 9 is rotated to rotate the storage case W substantially by 90 degrees. Thereby, as shown in FIG. 6, the optical axis direction of the image sensor 13 is substantially parallel to the extending direction of the rear supports B1, B2. Therefore, the light beams L projected from the light projecting portion 13a of the image sensor 13 are prevented from interfering with the support members B1, B2. The image sensor 13 detects the presence or absence of the glass substrate G after the storage case W is rotated substantially 90 degrees from the initial state (the state taken in to the transport vehicle 1).
如以上說明般，於本實施形態中，於支柱裝置5a、5b設置有映像感測器13，且藉由映像感測器13而進行玻璃基板G之有無之檢測。利用映像感測器13之玻璃基板G之檢測係於藉由移載裝置11而將收容盒W取入至搬送車1，並使轉盤9大致旋轉90°後進行。藉此，取入時沿著與映像感測器13之光軸方向正交之方向延伸之收容盒W之後支承件B1、B2與光軸方向大致平行。因此，避免映像感測器13之光L干涉收容盒W之後支承件B1、B2。其結果，可藉由 映像感測器13而穩定地檢測玻璃基板G，且可高精度地檢測收納於收容盒W之玻璃基板G之收納狀態。 As described above, in the present embodiment, the image sensor 13 is provided in the pillar devices 5a and 5b, and the presence or absence of the glass substrate G is detected by the image sensor 13. The detection by the glass substrate G of the image sensor 13 is performed by taking the storage case W into the transport vehicle 1 by the transfer device 11, and rotating the turntable 9 by approximately 90°. Thereby, the support members B1 and B2 are substantially parallel to the optical axis direction after the storage case W extending in the direction orthogonal to the optical axis direction of the image sensor 13 at the time of taking in. Therefore, the light L of the image sensor 13 is prevented from interfering with the support members B1, B2 after the storage case W. The result can be The glass sensor G is stably detected by the image sensor 13, and the storage state of the glass substrate G accommodated in the storage case W can be detected with high precision.
又，於本實施形態中，映像感測器13係安裝於支柱裝置5a、5b。支柱裝置5a、5b係將移載裝置11夾持於中間而設置，且配置於當載置於移載裝置11之收容盒W旋轉時不與收容盒W抵接之位置。即，映像感測器13設置於當收容盒W旋轉時不與收容盒W抵接之位置。因此，因於使收容盒W旋轉時無需使映像感測器13移動，故不需要用於其移動之機構並且可削減移動時間。因此，可設為簡易之構成並且可迅速地進行玻璃基板G之檢測。 Further, in the present embodiment, the image sensor 13 is attached to the pillar devices 5a and 5b. The pillar devices 5a and 5b are provided so as to sandwich the transfer device 11 therebetween, and are disposed at a position where they are not in contact with the storage case W when the storage case W placed on the transfer device 11 rotates. That is, the image sensor 13 is provided at a position that does not abut against the storage case W when the storage case W is rotated. Therefore, since it is not necessary to move the image sensor 13 when the storage box W is rotated, a mechanism for moving the same is not required and the movement time can be reduced. Therefore, it is possible to provide a simple configuration and to quickly detect the glass substrate G.
又，映像感測器13係按照收納於收容盒W之玻璃基板G之片數而於收容盒W之上下方向設置有複數個投光部13a及受光部13b。因此，可同時地檢測收納於收容盒W之複數個玻璃基板G。又，與僅設置一個投光部13a及受光部13b之情形相比，無需為檢測玻璃基板G而使映像感測器13於上下方向移動，故不需要用於其移動之機構並且可削減移動時間。因此，可設為簡易之構成並且可迅速地進行玻璃基板G之檢測。 Further, the image sensor 13 is provided with a plurality of light projecting portions 13a and light receiving portions 13b in the upper and lower directions of the storage case W in accordance with the number of the glass substrates G accommodated in the storage case W. Therefore, the plurality of glass substrates G accommodated in the storage case W can be simultaneously detected. Further, since it is not necessary to move the image sensor 13 in the vertical direction in order to detect the glass substrate G, it is not necessary to provide a mechanism for moving the image substrate 13 and to reduce the movement, as compared with the case where only one of the light projecting portion 13a and the light receiving portion 13b is provided. time. Therefore, it is possible to provide a simple configuration and to quickly detect the glass substrate G.
本發明並不限定於上述實施形態。例如，於上述實施形態中，雖將映像感測器13設置於搬送車1之支柱裝置5a、5b，但亦可將映像感測器13設置於升降台7。 The present invention is not limited to the above embodiment. For example, in the above embodiment, the image sensor 13 is provided in the pillar devices 5a and 5b of the transport vehicle 1, but the image sensor 13 may be provided on the elevation platform 7.
又，於上述實施形態中，雖例示了投受光紅外線之映像感 測器13，但映像感測器13亦可為使用有雷射之光學式者。 Moreover, in the above embodiment, the image sense of the light-receiving light is exemplified. The detector 13, but the image sensor 13 can also be an optical type using a laser.
又，於上述實施形態中，雖於藉由映像感測器13而檢測玻璃基板G時，使收容盒W大致旋轉90°，但收容盒W之旋轉角亦可不為90°。總之，只要使收容盒W旋轉至收容盒W之後支承件B1、B2不與自映像感測器13之投光部13a投射之光L相干涉之角度即可。 Further, in the above embodiment, when the glass substrate G is detected by the image sensor 13, the storage case W is rotated substantially by 90 degrees, but the rotation angle of the storage case W may not be 90 degrees. In short, the support members B1 and B2 do not interfere with the light L projected from the light projecting portion 13a of the image sensor 13 after the storage case W is rotated to the storage case W.
又，於上述實施形態中，雖已例示具有後支承件B1、B2之收容盒W作為被搬送物，但亦可為藉由線架而支撐玻璃基板G之所謂之線架收容盒。 Further, in the above-described embodiment, the storage case W having the rear supports B1 and B2 is exemplified as the object to be conveyed, but a so-called wire frame housing case for supporting the glass substrate G by the wire frame may be used.
以上，雖對本發明之一實施形態進行了說明，但本發明並不限定於上述實施形態，可於不脫離發明之主旨之範圍內進行各種變更。特別是本說明書中所述之複數個實施形態及變形例可視需要加以任意組合。 The embodiment of the present invention has been described above, but the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the spirit and scope of the invention. In particular, the plurality of embodiments and modifications described in the present specification may be arbitrarily combined as needed.
1‧‧‧搬送車 1‧‧‧Transportation car
3‧‧‧移行台車(本體部) 3‧‧‧Transition trolley (body part)
3a‧‧‧車輪 3a‧‧‧ Wheels
5a、5b‧‧‧支柱裝置 5a, 5b‧‧‧ pillar installation
7‧‧‧升降台 7‧‧‧ Lifting table
9‧‧‧轉盤(旋轉部) 9‧‧‧ Turntable (rotary part)
11‧‧‧移載裝置 11‧‧‧Transfer device
13‧‧‧映像感測器(光學式檢測手段) 13‧‧‧Image sensor (optical detection means)
13a‧‧‧投光部 13a‧‧‧Projecting Department
13b‧‧‧受光部 13b‧‧‧Receiving Department
15‧‧‧控制器(控制部) 15‧‧‧Controller (Control Department)
17‧‧‧導軌 17‧‧‧rail
19‧‧‧支撐框架 19‧‧‧Support frame
20‧‧‧水平關節型機械手臂 20‧‧‧ horizontal joint type robot
20a‧‧‧基端側臂 20a‧‧‧ proximal arm
20b‧‧‧前端側臂 20b‧‧‧Front side arm
20c‧‧‧移載臂 20c‧‧‧Transfer arm
21‧‧‧滑動部 21‧‧‧Sliding section
22‧‧‧基台 22‧‧‧Abutment
23‧‧‧自由臂 23‧‧‧Free arm
B1、B2‧‧‧後支承件(支撐構件) B1, B2‧‧‧ rear support (support member)
C1、C2‧‧‧柱構件 C1, C2‧‧‧ column components
F‧‧‧框架 F‧‧‧Frame
G‧‧‧玻璃基板(平板狀構件) G‧‧‧Glass substrate (flat member)
K‧‧‧開口 K‧‧‧ openings
L‧‧‧光 L‧‧‧Light
R‧‧‧軌道 R‧‧ track
S‧‧‧側支承件 S‧‧‧ side support
W‧‧‧收容盒(被搬送物) W‧‧‧ containment box (transported)
圖1係表示一實施形態之搬送車之立體圖。 Fig. 1 is a perspective view showing a transport vehicle according to an embodiment.
圖2係自前方觀察圖1所示之搬送車之圖式。 Fig. 2 is a view showing the transport car shown in Fig. 1 from the front.
圖3係表示映像感測器之圖式。 Figure 3 is a diagram showing a map sensor.
圖4係表示控制器之方塊圖。 Figure 4 is a block diagram showing the controller.
圖5係表示取入收容盒時收容盒與映像感測器之位置關係之圖式。 Fig. 5 is a view showing the positional relationship between the storage case and the image sensor when the storage case is taken in.
圖6係表示收容盒旋轉後收容盒與映像感測器之位置關係之圖式。 Fig. 6 is a view showing the positional relationship between the storage case and the image sensor after the storage case is rotated.
1‧‧‧搬送車 1‧‧‧Transportation car
3‧‧‧移行台車(本體部) 3‧‧‧Transition trolley (body part)
3a‧‧‧車輪 3a‧‧‧ Wheels
5a、5b‧‧‧支柱裝置 5a, 5b‧‧‧ pillar installation
7‧‧‧升降台 7‧‧‧ Lifting table
9‧‧‧轉盤(旋轉部) 9‧‧‧ Turntable (rotary part)
11‧‧‧移載裝置 11‧‧‧Transfer device
13‧‧‧映像感測器(光學式檢測手段) 13‧‧‧Image sensor (optical detection means)
19‧‧‧支撐框架 19‧‧‧Support frame
R‧‧‧軌道 R‧‧ track
Claims (4)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011153883A JP5927791B2 (en) | 2011-07-12 | 2011-07-12 | Transport vehicle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201305032A TW201305032A (en) | 2013-02-01 |
| TWI526381B true TWI526381B (en) | 2016-03-21 |
Family
ID=47476100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101124729A TWI526381B (en) | 2011-07-12 | 2012-07-10 | Transport car |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5927791B2 (en) |
| KR (1) | KR101526436B1 (en) |
| CN (1) | CN102874530B (en) |
| TW (1) | TWI526381B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101421573B1 (en) * | 2013-02-15 | 2014-07-22 | 주식회사 신성에프에이 | Mapping Module of Cassette Crane |
| CN104952776B (en) * | 2015-04-24 | 2019-04-26 | 沈阳拓荆科技有限公司 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271951A (en) * | 1987-04-28 | 1988-11-09 | Nippon Signal Co Ltd:The | Wafer transfer device |
| JPH042036U (en) * | 1990-04-19 | 1992-01-09 | ||
| JP2931922B2 (en) * | 1990-09-03 | 1999-08-09 | 東京エレクトロン株式会社 | Unloading method and heat treatment apparatus in heat treatment process |
| JP3959778B2 (en) * | 1997-04-14 | 2007-08-15 | 神鋼電機株式会社 | Automated guided vehicle |
| KR100563456B1 (en) * | 1997-04-14 | 2006-05-25 | 아시스트 신꼬, 인코포레이티드 | The self-transfer vehicle and its device |
| JP2000238904A (en) * | 1999-02-18 | 2000-09-05 | Sumitomo Heavy Ind Ltd | Stacker crane |
| JP2001274224A (en) * | 2000-03-27 | 2001-10-05 | Mitsubishi Electric Corp | Substrate cassette apparatus |
| US7153079B2 (en) * | 2001-09-18 | 2006-12-26 | Murata Kikai Kabushiki Kaisha | Automated guided vehicle |
| JP4276810B2 (en) * | 2002-02-15 | 2009-06-10 | 東京エレクトロン株式会社 | Automated guided vehicle |
| JP3927798B2 (en) * | 2001-12-03 | 2007-06-13 | 東京エレクトロン株式会社 | Transfer equipment |
| JP4502127B2 (en) * | 2005-04-01 | 2010-07-14 | 株式会社ダイフク | Cassette storage and processing plate processing equipment |
| JP4706902B2 (en) * | 2005-04-11 | 2011-06-22 | 村田機械株式会社 | Transport vehicle and article transfer method |
| JP4297145B2 (en) * | 2006-09-21 | 2009-07-15 | 村田機械株式会社 | Transfer equipment |
| JP2008118014A (en) * | 2006-11-07 | 2008-05-22 | Toshiba Matsushita Display Technology Co Ltd | Substrate holding cassette |
| JP2009051307A (en) * | 2007-08-24 | 2009-03-12 | Asyst Technologies Japan Inc | Unmanned conveying vehicle, conveying and transferring system provided with the conveying vehicle and conveying and transferring method |
-
2011
- 2011-07-12 JP JP2011153883A patent/JP5927791B2/en not_active Expired - Fee Related
-
2012
- 2012-04-27 CN CN201210128532.4A patent/CN102874530B/en not_active Expired - Fee Related
- 2012-06-18 KR KR1020120064950A patent/KR101526436B1/en not_active IP Right Cessation
- 2012-07-10 TW TW101124729A patent/TWI526381B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR101526436B1 (en) | 2015-06-05 |
| KR20130008456A (en) | 2013-01-22 |
| TW201305032A (en) | 2013-02-01 |
| CN102874530A (en) | 2013-01-16 |
| JP5927791B2 (en) | 2016-06-01 |
| CN102874530B (en) | 2016-11-02 |
| JP2013021166A (en) | 2013-01-31 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |