經濟部智慧財產局員工消費合作社印製 573077 Λ7 8807pif. doc/008 ny 五、發明說明（丨） 本發明是有關於一種至少表面導電之物件的電化學處理方 法及元件，特別是電路板及電路箔片一面或兩面的處理。本發 明應用連續運轉機器及沈浸機器，類似的機器型式如以下文獻 所述。 文獻DE 3645319 C2揭露一種用來對板狀物件進行電解處 理的水平運轉機器，此種物件由夾具夾住，電性導通且連續在 上陽極及下陽極之間直接傳送。其中電解質係藉置於陽極及物 件之間的供應管提供。 另一個水平運轉機器亦在文獻DE 4132418 C1中揭露，其 中電路板被接觸滾輪夾在一旁，電性導通且在上陽極及下陽極 之間直接傳送。其中用以引導電路板連續通過的自由轉動支持 滾輪係置於陽極及物件之間。 文獻DE 4229403 C2揭露一種元件，其將導電塑膠箔片電 鍍於表面上，在連續運轉機器中之傳送係由一滾輪至另一滾輪 實施，物件的電流係藉與傳送方向交錯之滑動接觸元件所提供。 擠壓滾輪對提供箔片在陽極和陰極區域的傳送而不會發生短 路。 在文獻EP 0959153 A1中揭露了一種用以電鍍之水平連續 運轉機器’其中金屬材料之接觸滾輪係用來電性接觸物件，此 接觸滾輪係與傳送路徑橫向排列而在物件表面上滾動。在運轉 方向介於更遠之絕緣傳送滾輪之間更安置了不可溶的陽極，而 電解質則由陽極流進電解電池。此物件可以在機器中連續移動。 文獻EP 0759100 B1揭露了一種垂直連續運轉機器。其中 物件可在由電極形成之電解電池中連續移動，而其他的特徵與 4 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公釐） (請先閲讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 573077 Λ7 8807pif. Doc / 008 ny V. Description of the invention (丨) The present invention relates to an electrochemical treatment method and component for an object with at least surface conduction, especially a circuit board and a circuit Treatment of one or both sides of the foil. The present invention applies continuous operation machines and immersion machines. Similar machine types are described in the following documents. Document DE 3645319 C2 discloses a horizontally running machine for electrolytic treatment of plate-like objects. This kind of object is clamped by a clamp, electrically conductive and continuously transferred directly between the upper anode and the lower anode. The electrolyte is provided by a supply tube placed between the anode and the object. Another horizontally running machine is also disclosed in the document DE 4132418 C1, in which the circuit board is clamped aside by the contact roller, which is electrically conductive and directly transferred between the upper and lower anodes. The free-wheeling support roller used to guide the circuit board to pass continuously is placed between the anode and the object. Document DE 4229403 C2 discloses a component which electroconductive plastic foil is plated on the surface. The conveyance in a continuously running machine is implemented by a roller to another roller. The current of the object is obtained by the sliding contact element staggered with the conveying direction. provide. The squeeze roller pair provides foil transfer in the anode and cathode regions without short-circuiting. Document EP 0959153 A1 discloses a horizontally continuous running machine for electroplating, in which a contact roller system of metal material is used to electrically contact an object, and the contact roller system is arranged laterally with the conveying path to roll on the surface of the object. An insoluble anode is placed between the insulation transfer rollers running further away, and the electrolyte flows from the anode into the electrolytic cell. This object can move continuously in the machine. The document EP 0759100 B1 discloses a vertically continuous running machine. The objects can be moved continuously in the electrolytic cell formed by the electrode, and other features and 4 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (21 × X 297 mm) (Please read the precautions on the back before filling (This page)
訂---------線I 573077 A7 8807pif.doc/008 B7 五、發明說明（>) 以上類似。 (請先閱讀背面之注意事項再填寫本頁) 以上的機器適用於例如是12A/dm2之高電流密度下，物件 整個表面的電鍍處理。而利用一導電及全面平坦基底靥之表面 的部分處理可透過大約是2A/dm2的小電流密來實施，這包括利 用電鍍建立電路板之長條導體，亦即長條導體的形成。這種，結 構係利用在全平面基底上形成一阻抗而負向形成的，其中開放 區域則藉適當電性接觸而被電鍍。爲完成電路板，介於接觸導 體之間的基底層以蝕刻移除。如此形成之電路圖案則必需透過 阻抗達到基底層之電性接觸。 所有這些機器的特徵在於相對於電路板結構大小，陽極及 陰極之間的大距離，在以上所述的機器中，陽極及陰極之間的 距離大約介於20毫米至80毫米之間。根據電路板技術的最新 發展，其係由寬度爲0.05毫米的結構開始進行電鍍處理。很快 地此一寬度將被減半，因此，陽極陰極之間的距離與結構寬度 的比値等於或大於400:1。 經濟部智慧財產局員工消費合作社印製 根據每層導電圖案的不同，由於陽極陰極之間的大距離而 導値厚度値大至20:1。與大區域相比，在大絕緣區域中待電鍍 之小區域係超比例地電鍍處理，因此導致尖峰效應。至少在施 加實用足夠高的電流密度條件下，是不可能建立導電圖案的。 因此，此種機器僅能供全平面結構之電解處理。 文獻DE 4417551 C2所揭露之一目的在於避免大範圍的尖 峰效應。電性絕緣距離係指在連續運轉機器中連續傳送過程中 保持陽極和物件之間的距離，此距離不可超過小長條接觸體寬 度的30倍，這樣的距離尖峰效應仍然存在，然而其範圍較小。 5 ^紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐) ' 經濟部智慧財產局員工消費合作社印製 573077 Λ7 8807pif.doc/008 B7 五、發明說明（3) 在物件上連續滾動的陽極更構成了物件僅有一線型的陽極’爲 在一機器給定長度下電鍍到足夠的厚度’必需增加電流密度’ 如此強化尖峰效應而造成負面效果。在此文獻中揭露之平面陽 極避免此一負面效果，然而’爲避免陽極及陰極之間的短路， 需要許多沿著待處理表面滑動精確間隔區塊。此外’利用此一 陽極的設置而操作一般具有鋒利邊緣的電路板，會造成由絕緣 材料形成之滑動間隙區塊或滾輪間隙區塊引起損壞的危險。 文獻DE 4324330 C2揭露一種擦拭的方法，一種擦拭元件 造成物件表面擴散層的干擾。利用此擦拭元件進行之擦拭係藉 陽極及陰極之間的相對運動而產生。此擦拭元件可滑動地靠在 連續於機器中操作的物件上。在此範例具損壞電路板上阻抗的 進一步危險。在此文獻中所述之與陽極有整體功能的擦拭元件 更具有在傳送方向的陽極相當短，以及其在表面曲線上有效的 缺點。擦拭材料必需穿孔，以使其不但使離子可滲透，更可以 使電解質滲透。這樣的物質在於電路板鋒利邊緣滾動時相當容 易被磨損，若依據本文獻分離陽極的擦拭及功能時，陽極的形 狀則會被擦拭元件而延伸至一較大範圍。再者，每一個擦拭滾 輪之傳送方向上，表面曲線擦拭區域的長度相當短，而陽極及 擦拭元件會彼此阻礙。 本發明之一目的在於允許物質在連續運轉機器或浸漬機器 中之物件之精確的電解處理，其連續運轉或浸漬機器最好是用 來電鍍電路板或電路箔片中非常小的導電圖案，以避免以上之 缺點。此電路結構係利用一^基層而彼此電性連接。 此一目的的達成係利用申請專利範圍第1項之方法及第Π 6 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公楚） (請先W讀背面之注意事項再填寫本頁) •丨丨丨丨丨丨訂·丨丨丨丨—丨丨· 一 573077 Λ7 B7 8807pif.doc/008 五、發明說明（4) 和24項所述之元件所達成。 本發明適用於所有的電化學處理，例如是電化學金屬化， 蝕刻，以及使用或不使用一還原系統而利用電解質氧化還原。 最好使用不溶於電解質之陽極，然而原則上可溶陽極亦可使用。 圖式簡單說明 本發明將於以下以電鍍爲例詳細敘述之，其中電極係指陽 極及陰極。本發明以上之目的，特徵以及優點將經由以下敘述 及會意且不按比例之附圖而更加明顯，其中： 第1圖繪示出一電解處理中，在陽極及陰極的最小距離下 電解電池的基本原理； 第2圖係繪示一水平連續運轉機器，用以作具有物件滾輪 接觸體之電路板的處理； 第3圖係繪示具有物件長條接觸體之一水平連續運轉_ 器； 第4a圖係一截面圖，繪示出一長條接觸體之接觸長條，_ 係由一彈係材料隔離及觸動； ^ 第4b圖係繪示一長條接觸體，其包括一接觸長條，而其$ 身係由彈性且導電之材料構成，且利用彈性且非導電材料 緣。 圖式之標記說明： 1 :物件 2:上陽極排列 3:下陽極排列 4 :上陽極 7 (請先閲讀背面之注意事項再填寫本頁) • mmmt ammt ϋ H ϋ ϋ ϋ 如0, · I ·1 ϋ §β ϋ 1 ϋ I 一 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 573077 A7 137 8807pif.doc/008 五、發明說明（c ) 5 :下陽極 6 :震動元件，作用於陽極 7 :舉升馬達，舉升元件 8:指不移動之箭頭 9:物件之接觸電極 10 :電鍍電流源之負極導電體 11 :電鍍電流源之正極導電體 12 :絕緣材料 13 :密封滾輪 14 :密封壁 15 :處理槽 16 :電解質 17 =接觸滾輪 18 :滑動滾輪 19 :顯示傳送方向之箭頭 20 :長條接觸體 21 :載具 22 :彈性絕緣材料 23 ·僵硬接觸長條 24 :彈性接觸長條 25 :傳送滾輪 26 :彈性銅絲 實施例 本發明之較佳實施例將參考附圖敘述如下，在下列敘述及 II.— — — — — — — — — — ·1111111 ^ ·11111111 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（21〇x 297公釐） 573077 Λ7 B7 8807pif.doc/008 五、發明說明（6 ) 圖式中，相同的參考代號將用來指示相同或類似之元件，而相 同或相似之元件將不予重覆敘述。 第1圖繪示依據本發明，具有物件1，一上陽電2及一下 陽極3之電解電池的基本原理。在此，上下陽極4及5最好是 不可溶的陽極。主動區域，亦即在面對物件之區域，係由絕緣 材料12所提供。此一材料係可使離子及電解質穿透，其包括展 開之薄纖維。絕緣材料12之厚度亦爲電解處理中陽極及陰極之 間的有效距離，0.15mm的纖維厚度使陽極及陰極的距離達到 待處理結構的大小，如同導電圖案或電路板的架構。由於尖峰 效應得以避免，因此導致非常均勻的厚度分佈。 第1圖繪示出物件1電解處理的情形。物件1之傳送驅動 被關閉。上陽極排列2及下陽極排列3與待電解處理之表面， 其中可使穿透之絕緣材料12置放在陽極前以可靠避免陽極陰極 之間最小距離的短路現象。在電解處理期間，物件1及陽極排 列2及3之間沒有相對運動。在處理開始一短時間之後，陽極 被打開，因而移除待處理表面，且使物質1在箭頭19方向上進 一步傳送。在陽極排列2及3再次關閉之後，電解處理得以重 複。利用在雙箭頭8方向上打開及關閉陽極排列2及3，物件 表面及陽極之電解質在每次處理中得以更換。此一打開及關閉 的動作可藉一舉升或降低元件達成，例如是以下簡述之舉升元 件7，其由一舉升馬達所操作，此一舉升元件的製造及控制係 爲已知機械工程及自動化技術。 一震動元件6可以用來支持電解處理，此元件分別使陽極 排列2及3得震動，而使待處理表面的擴散厚度減小，其可允 9 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) il—訂· — |!!!線赢 經濟部智慧財產局員工消費合作社印製 573077 8807pif.doc/008 Λ7 137 經濟部智慧財產局員工消費合作社印製 五、發明說明) 許高電流密度的使用。 物件之導電表面係藉一接觸元件9得以電性接觸，其中接 觸滾輪，接觸輪及夾具係可適用。導體10及11與具有未顯示 之電鍍電流源的電解電池相連接。此電流可以是直流電流，單 極性脈衝電流或雙極性脈衝電流。在第1圖及第2圖中係繪示 出電鍍此物件1平均時間之極性的優勢。 第2圖繪示出對具有滾輪接觸體之電路板進行處理的水平 連續運轉機器。密封滾輪13及密封壁15中係形成沿著傳送路 徑的處理槽，其中該處理槽塡滿了電解質16。密封滾輪13防 止在電鍍期間陰極化接觸滾輪17的金屬成長。電解質的狀況係 由除了處理槽15之後，已知而未繪示的控制元件控制而被循環 傳送。物件1與電鏟電流源之間的電性接觸係在一個或多個接 觸滾輪17發生，其由未繪示之傳送驅動馬達以及也傳送物件1 之密封滾輪13共同驅動。排列於處理槽外之滑動接觸體18或 轉動液體接觸體引導電流由電鍍電流源流至接觸滾輪。 一金屬硬接觸滾輪17適用於整個表面的接觸，當用以形成 結構之電性絕緣阻抗排列於物件表面時，不可能在導電表面區 域具有接觸體。在此則使用具有彈性及導電性材料的接觸滾輪 17 ’這種材料例如是橡膠或矽材料係在製造時提供導電塡充材 料’而此塡充材料則包括金屬粉末，金屬片或類似物質。如此 可產生具有導電性的合成物質，其導電率與一般電化學阻抗材 料’例如是鈦或不鏽鋼等的導電率接近。這種彈性接觸滾輪17 將阻抗片橋接成一高度大約40埃，其中至少一大表面區域不被 長設之阻抗覆蓋，而與物件接觸。 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公.¾ ) f - (請先M讀背面之注意事項再填寫本頁) -el emMW 1 1§ I ala ϋ n n ϋ n an emf · 573077 A7 B7 8807pif.doc/008 五、發明說明（γ ) 物件之處理係逐步發生的，在第2圖所示之元件中，在處 理期間，電解處理係在兩發生。箭頭所示之傳送驅動將關閉’ 而陽極排列2及3與待處理物件1之表面接觸。電鍍電流源被 開啓，而電解處理可藉由開啓震動元件6而發生。爲同步開啓 及關閉此運動以及電鑛電源源，可使用應用已知自動化技術之 同步元件及/或開關元件。 處理的可能期間取決於電解質的化學成分，應用電流密度 以及陽極陰極間的距離，亦即在陽極前絕緣材料12的厚度以及 其型式。絕緣材料的厚度及型式決定每一處理步驟中有效之設 定電解質的量。這種設定電解質在以下係簡稱爲新鮮電解質。 至於絕緣材料12，阻抗纖維，氈製開孔泡末材料，陶瓷布以及 其他可使離子及液體滲透之材料可以適用。一個硬絕緣材料的 例如係具有一阻抗絕緣體而部分絕緣之陽極，其中該阻抗絕緣 體包括堅硬而有附著力之陶瓷顆粒或塑膠顆粒。此時，陽極係 可部分地使離子滲透且部分電性絕緣。吸收液體及平滑的絕緣 材料可藉陽極”a walk work”震動而同時形成而有利於電化學處 理。此”walk work”利用減少擴散層而加速製程。每一處理步驟 之時間係由數毫粒至一小時。 在處理步驟之後舉升元件沿著箭頭8的方向打開陽極排列 2及3,或是沿著一曲線路徑擺動打開，以導致如箭頭8之方向， 同時電鍍電流需保持開啓。此時不會發生破裂火花，電鍍電流 源之電流亦即減低，而其極性被反轉或是在打開動作時被關閉， 因此，在箭頭19方向上，開始傳送時只有極低的電流，或是沒 有電流會流至接觸滾輪17。傳送步驟的路徑長度係由首先由曝 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐） (請先閱讀背面之注意事項再填寫本真) * ί β§ βϋ ϋ ϋ Mt 1^eJ· ϋ ·1 ϋ I § ϋ n I 義 經濟部智慧財產局員工消費合作社印製 573077 Λ7 8807pif.doc/008 B7 五、發明說明（q) (請先閱讀背面之注意事項再填寫本頁) 光時間決定，對於給定機器之長度，也就是給定處理槽15的數 目以及傳送方向上的陽極長於一段長時間，相對的傳送步驟的 時間加長，機器長度及機器功率係相互匹配而使得大機器之傳 送步驟介於1mm至2m之間。陽極係可以與停止物件作相對運 動，利用打開陽極排列2及3，新鮮電解質可抵達陽極及陰極 區域。在傳送步驟之後，陽極排列再度關閉。陽極的再度下降 而與絕緣材料12在物件的表面上，因此，電解質之流體動力壓 力使得穿過物件1之孔洞及不可見的孔洞中物質的交換加速。 在陽極排列剛下降於物件上時，傳送元件被關閉，而同時原本 被關閉的電鍍電流源被開啓至所需的極性。所有的運動，傳送 步驟及電鍍電流源的電性開關皆由一未顯示之中央機器控制器 控制。在第2圖中所示情況原則上亦適用於垂直連續運轉機器， 而第2圖係一上視示意圖。 經齊部智慧財產局員Η消費合作社印製 第3圖繪示出一水平連續運轉機器之側面圖，其利用一長 條接觸體以處理電路板或電路箔片。同時，第3圖亦繪示出一 垂直連續運轉機器之上視示意圖。其中不需要密封滾輪之長條 接觸體20將在以下詳述。如第3圖所示，在此可使用連續處理 槽。長條接觸體建立物件1與上述而未於此處顯示之電鍍電流 源之間的電性連接。此長條接觸體20可以在物件1之傳送關閉 以及陽極排列同時關閉的情形下被擠壓固定在待處理的表面 上，第3圖亦繪示出此一情形之處理。之後，陽極排列2及3 再打開。利用相同的動作，長條接觸體20由虛線所示之物件1 表面舉起。在打開動作開始時電鍍電流源的關閉或是電流的減 低是有利的，其可避免火花的形成及/或接觸體之金屬化。藉著 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公餐） 573077 A7 B7 8807pif.doc/008 五、發明說明（N) 在排列的打開狀態反轉極性可使接觸體的長條朝向陰極輔助電 極成爲可能，而此一打開動作使物件1的傳送步驟開始°之後 陽極排列2及3與長條接觸體同時關閉，而在關閉動作結束之 前此一傳送步驟完成。在長條接觸體下沒有處理發生°傳送步 驟係與長條接觸體之間的距離相匹配，以使得物件所有表面區 域同時被電化學處理。在關閉動作結束之後，電鑛電流源再度 開啓，而接下來的步驟及功能係已於第2圖中所繪示。長條接 觸體20可以以一直角與傳送方向橫向排列。一個不同的角度’ 也就是說一傾斜排列之長條接觸體則與連續物件之兩區段相$ 觸。此長條接觸體將不會在彼此以一距離相隨之物件的間隙# 接觸。此一陽極的排列可以由一傾斜切割達成，而長條接觸體 具有以下特徵： 不需要滑動接觸體18，爲供應電流至長條接觸體20，可使 用不會磨損之導電體26，例如是彈性銅絲或高電流線體，因此 滑動接觸體之一般磨損不會出現。再者，與接觸滾輪相反地’ 實際的接觸可以被絕緣，以避免電鍍期間金屬的成長。彈性旦 驅動密封滾輪亦不需要，因此機器的長度可以相對減短。特別 的是，當陽極長度與滾輪接觸體相同時，在傳送方向上一接觸 位置與下一接觸位置的距離減短，如此允許較短物件1的生產 或是給定物件1長度下較長的陽極。 第4a圖繪示出一長條接觸體20之截面圖，其沿著凸出平 面延伸，一包括金屬或塑膠之截具21用以穩定地固定於一舉升 元件。一電性絕緣及彈性材料22係置裝於，例如是固化於截具 21上。在材料22中加入了一僵硬接觸長條23，此僵硬接觸長 (請先閱讀背面之注意事項再填寫本頁) 訂- 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐) 573077 A7 B7 8807pif.doc/008 五、發明說明㈠I ) ί請先閱讀背面之注意事項再填寫本頁) 條23最好是電化學阻抗金屬，例如是鈦或鈮所構成。接觸長條 23與電鍍電流源藉著電性絕緣導體連接，絕緣材料將接觸長條 23在一處理步驟中對電解電池完全隔離。因此，在電鍍時陰極 化接觸長條23上不要的金屬成長可以可靠地避免不需要密封滾 輪13的形成。 經濟部智慧財產局員工消費合作社印製 如果待處理物件表面的部分區域由一阻抗所覆蓋，則一金 屬僵硬接觸體之其餘未覆蓋表面則無法可靠地被接觸。在此則 可使用第4b圖所示之長條接觸，此長條接觸係由具導電塡充物 之彈性材料所組成。在此長條接觸24的兩端裝置了一個有彈性 且電性絕緣的材料22。此絕緣材料保護接觸長條而防止陰極的 金屬化，其彈性使得物件1與阻抗之間可靠的接觸成爲可能。 而與電鍍電流源的接觸則可藉著長條接觸體20附近而與導電體 10較遠之導電體26達成。基於第4b圖之長條接觸體20的形 成可以得到與金屬組成之物質之實際接觸，然而與第4a圖所示 之僵硬接觸長條相反地，此接觸長條係包括穿孔及厚度大約爲 0.1mm之堆疊的小金屬片所形成。此堆疊小金屬片係不置於於 接觸長條24之下半部，而是全面裝置以形成外殼。小金屬片對 著剩餘的彈性及導電材料向上方支持，而在所有的小金屬片之 間形成一共同的電性連接。對物件係形成一有效的彈性金屬接 觸。 爲適用於不平整表面，接觸長條亦可以由提供有小刷形之 凹槽之接觸長條組成，而金屬彈性刷長條亦可在此使用。 以上所述之電路板及電路箔片之實施例通常可以區段形式 應用。根據本發明之方法及元件亦適用於由滾輪至滾輪，箔片 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公坌） 573077 Λ7 B7 8807pif.doc/008 五、發明說明（V〜） 型式之連續物件的電化學處理。而已知之槽，驅動器，及電化 學傳送機器之引導滾輪及折射滾輪皆可應用。待處理帶係於由 一控制元件控制而在每一處理步驟停止。陽極排列2及3係如 以上所述而開啓及關閉。爲控制時間，亦可使用一電機控制元 件。 對大而重的捲帶軸待，處理帶之永久停止及再次運轉在技 術上是相當繁重的，爲防止在這些大而重之捲帶軸處理時的逐 步傳送，使用了臥鋸(Lying Saw)的原理，如此物件可連續地傳 送。在傳送步驟中，陽極排列2及3係設定與物件實施一同步 傳送動作，亦即與物件同步傳送。物件及陽極排列之間沒有相 對運動。在處理步驟及傳送步驟分別結束時，陽極排列打開且 回到前一傳送步驟的打開狀態，然後再次關閉，且更次使物件 處於流動狀態。此長條接觸體及打開動作，關閉動以及傳送動 作皆在長條接觸處。 以上圖式繪示出物件兩端皆被處理，對於單面處理的物件 則不需要一個陽極排列。陽極排列係由一平面物體取代，而其 接收單面陽極排列的剩餘擠壓力量。本發明之方法亦適用於有 形物件電性接觸的處理，其中陽極及絕緣材料係精確地與物件 形狀配合，因此可以可靠避免尖峰效應造成的不規則處理。此 一處理的發生係透過配合物件之電解質永久開啓交換及元件的 關閉。 本發明之另一個應用領域係爲沈浸機器，其中置於處理槽 之物件及陽極的排列係永久打開及關閉以達成電解質之交換。 物件的電性接觸係利用已知之截具，夾具及/或框達成。在電路 --一---------·11111--訂i 丨！ _ 丨丨線 <請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） 573077 A7 B7 8807pif.doc/008 五、發明說明（㈧） 板上結構的精確處理，可使用較習知高的電流密度。此外因爲 相當低的電池電壓而可節約能量。在連續運轉機器中，物件未 於此處描繪之其他形式的電性接觸亦是可能的。在此特別提出 的係例如夾具接或輪接觸之平面物件的單面接觸。其亦可應用 本發明之方法實施。 雖然本發明已以較佳實施例及圖式揭露如上，然其並非用 以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和 範圍內’當可作各種之更動與潤飾，因此本發明之保護範圍當 視後附之申請專利範圍所界定者爲準。 ·1!#--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公Μ )Order --------- Line I 573077 A7 8807pif.doc / 008 B7 V. Description of the invention (>) The above is similar. (Please read the precautions on the back before filling out this page) The above machine is suitable for plating the entire surface of the object under the high current density of 12A / dm2, for example. Partial treatment using the surface of a conductive and fully flat substrate 可 can be performed through a small current density of about 2A / dm2, which includes the use of electroplating to build a long conductor of a circuit board, which is the formation of a long conductor. In this way, the structure is formed negatively by forming an impedance on a full-plane substrate, wherein the open area is electroplated by proper electrical contact. To complete the circuit board, the substrate layer between the contact conductors is removed by etching. The circuit pattern thus formed must reach the electrical contact of the base layer through impedance. All of these machines are characterized by a large distance between the anode and the cathode relative to the size of the circuit board structure. In the machines described above, the distance between the anode and the cathode is approximately between 20 mm and 80 mm. According to the latest developments in circuit board technology, they are electroplated from structures with a width of 0.05 mm. Soon this width will be halved, so the ratio of the distance between the anode and the cathode to the structure width 値 is equal to or greater than 400: 1. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs According to the different conductive patterns of each layer, the thickness of the conductive layer is as large as 20: 1 due to the large distance between the anode and the cathode. Compared with a large area, a small area to be plated in a large insulation area is electroplated in an excessive proportion, thus causing a spike effect. It is not possible to create a conductive pattern, at least with a sufficiently high current density applied. Therefore, this machine can only be used for electrolytic treatment of full-plane structures. One of the objects disclosed in the document DE 4417551 C2 is to avoid a wide range of spike effects. Electrical insulation distance refers to maintaining the distance between the anode and the object during continuous transmission in a continuously running machine. This distance cannot exceed 30 times the width of the small strip contact body. Such distance spike effect still exists, but its range is relatively small. 5 ^ Paper size applies Chinese National Standard (CNS) A4 (210 x 297 mm) '' Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 573077 Λ7 8807pif.doc / 008 B7 V. Description of the invention (3) Continuous on the object The rolling anode constitutes an object with only a linear anode. In order to plate to a sufficient thickness at a given length of the machine, it is necessary to increase the current density. This intensifies the spike effect and causes a negative effect. The planar anode disclosed in this document avoids this negative effect, however, 'to avoid short circuits between the anode and the cathode, many slidingly spaced blocks along the surface to be treated are required. In addition, using this anode arrangement to operate a circuit board with a sharp edge generally causes a risk of damage caused by a sliding gap block or a roller gap block formed of an insulating material. Document DE 4324330 C2 discloses a method of wiping, in which a wiping element causes interference with a diffusion layer on the surface of an object. The wiping with this wiping element is generated by the relative movement between the anode and the cathode. This wiping element slidably rests on an object that is continuously operated in the machine. In this example there is a further danger of damaging the impedance on the board. The wiping element described in this document as having an integral function with the anode has the disadvantage that the anode is relatively short in the conveying direction and it is effective on the surface curve. The wiping material must be perforated to make it not only permeable to ions, but also to the electrolyte. Such a substance is relatively easy to be abraded when the sharp edges of the circuit board are rolled. If the wiping and function of the anode are separated according to this document, the shape of the anode will be extended to a wide range by the wiping element. Furthermore, in the conveying direction of each wiping roller, the length of the surface curve wiping area is relatively short, and the anode and the wiping element hinder each other. An object of the present invention is to allow accurate electrolytic treatment of a substance in a continuously operating machine or an object in a dipping machine. The continuous running or dipping machine is preferably used to plate a very small conductive pattern in a circuit board or circuit foil to Avoid the above disadvantages. This circuit structure is electrically connected to each other using a base layer. The purpose of this is to use the method of applying for the scope of patent application No. 1 and No. 6 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297). (Please read the precautions on the back before filling in (This page) • 丨 丨 丨 丨 丨 丨 Ordering 丨 丨 丨 丨 丨 丨 One 573077 Λ7 B7 8807pif.doc / 008 5. The invention described in (4) and the elements described in 24 items are achieved. The invention is applicable to all electrochemical processes, such as electrochemical metallization, etching, and oxidation reduction using electrolytes with or without a reduction system. It is preferred to use an anode that is insoluble in the electrolyte, but in principle a soluble anode can also be used. Brief Description of the Drawings The present invention will be described in detail below using electroplating as an example, where the electrodes refer to the anode and the cathode. The above objects, features, and advantages of the present invention will be more apparent through the following descriptions and comprehension drawings, which are not to scale. Among them: FIG. 1 illustrates the electrolytic cell at the minimum distance between the anode and the cathode in an electrolytic process. Basic principle; Figure 2 shows a horizontal continuous operation machine for processing a circuit board with an object roller contact body; Figure 3 shows a horizontal continuous operation device with a long object contact body; Figure 4a is a cross-sectional view showing a contact strip of a long contact body, _ is separated and touched by an elastic material; ^ Figure 4b is a long contact body, which includes a contact bar , And its body is made of elastic and conductive material, and uses the edge of elastic and non-conductive material. Explanation of drawing symbols: 1: Object 2: Upper anode arrangement 3: Lower anode arrangement 4: Upper anode 7 (Please read the precautions on the back before filling this page) • mmmt ammt ϋ H ϋ ϋ ϋ as 0, · I · 1 ϋ §β ϋ 1 ϋI Printed on the paper by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 573077 A7 137 8807pif.doc / 008 V. Invention Explanation (c) 5: lower anode 6: vibrating element acting on anode 7: lifting motor, lifting element 8: non-moving arrow 9: contact electrode of object 10: negative conductor of electroplating current source 11: electroplating Positive conductor of current source 12: Insulating material 13: Sealing roller 14: Sealing wall 15: Processing tank 16: Electrolyte 17 = Contact roller 18: Sliding roller 19: Arrow showing transmission direction 20: Long contact body 21: Carrier 22: Elastic insulation material 23. Stiff contact strip 24: Elastic contact strip 25: Transport roller 26: Elastic copper wire Embodiment The preferred embodiment of the present invention will be described below with reference to the drawings, in the following description and II. --- — — — — — — — — 11111 11 ^ · 11111111 (Please read the notes on the back before filling out this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Employee Consumer Cooperatives This paper is printed in accordance with China National Standard (CNS) A4 (21〇x 297 mm) 573077 Λ7 B7 8807pif.doc / 008 5. Description of the Invention (6) In the drawings, the same reference numerals will be used to indicate the same or similar components, and the same or similar components will not be described repeatedly. Fig. 1 illustrates the basic principle of an electrolytic cell having an object 1, an anode 2 and an anode 3 according to the present invention. Here, the upper and lower anodes 4 and 5 are preferably insoluble anodes. The active area, i.e. the area facing the object, is provided by the insulating material 12. This material is permeable to ions and electrolytes and includes spreading thin fibers. The thickness of the insulating material 12 is also the effective distance between the anode and the cathode in the electrolytic treatment. The fiber thickness of 0.15 mm enables the distance between the anode and the cathode to reach the size of the structure to be processed, like the structure of a conductive pattern or a circuit board. Since the spike effect is avoided, it results in a very uniform thickness distribution. FIG. 1 illustrates a state in which the article 1 is electrolytically processed. Object 1's transfer drive is turned off. The upper anode array 2 and the lower anode array 3 and the surface to be electrolyzed, wherein the penetrating insulating material 12 can be placed in front of the anode to reliably avoid the short-circuit phenomenon of the minimum distance between the anode and the cathode. During the electrolytic treatment, there is no relative movement between the article 1 and the anode arrays 2 and 3. A short time after the start of the treatment, the anode is opened, thereby removing the surface to be treated, and the substance 1 is further transported in the direction of arrow 19. After the anode arrays 2 and 3 were closed again, the electrolytic treatment was repeated. By opening and closing the anode arrays 2 and 3 in the direction of the double arrow 8, the electrolyte on the surface of the object and the anode can be replaced in each process. This opening and closing action can be achieved by a lifting or lowering element, such as the lifting element 7 briefly described below, which is operated by a lifting motor. The manufacturing and control of this lifting element are known mechanical engineering and Automation technology. A vibrating element 6 can be used to support the electrolytic treatment. This element vibrates the anode arrays 2 and 3, respectively, and reduces the diffusion thickness of the surface to be processed. It can allow 9 paper sizes to comply with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back before filling out this page) il—Order · — | !!! Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 573077 8807pif.doc / 008 Λ7 137 Economy Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau V. Invention Description) Allows high current density use. The conductive surface of the object is electrically contacted by a contact element 9, wherein a contact roller, a contact wheel and a clamp are applicable. The conductors 10 and 11 are connected to an electrolytic cell having a plating current source not shown. This current can be a direct current, a unipolar pulsed current or a bipolar pulsed current. Figures 1 and 2 show the advantages of the polarity of the average time of plating the object. Fig. 2 shows a horizontally continuous machine for processing a circuit board having a roller contact body. The sealing roller 13 and the sealing wall 15 form a processing tank along the conveying path, and the processing tank is filled with the electrolyte 16. The sealing roller 13 prevents the metal of the cathodic contact roller 17 from growing during electroplating. The condition of the electrolyte is cyclically transferred by control elements known and not shown after the treatment tank 15. The electrical contact between the object 1 and the shovel current source occurs on one or more contact rollers 17, which are driven by a transfer drive motor (not shown) and a seal roller 13 that also transfers the object 1. The sliding contact body 18 or the rotating liquid contact body arranged outside the processing tank guides the current from the plating current source to the contact roller. A metal hard contact roller 17 is suitable for contacting the entire surface. When the electrical insulation resistance used to form the structure is arranged on the surface of the object, it is impossible to have a contact body in the conductive surface area. Here, a contact roller 17 having an elastic and conductive material is used. This material is, for example, a rubber or silicon material, which is provided with a conductive filler material during manufacture. The filler material includes metal powder, metal sheet, or the like. In this way, a synthetic material having electric conductivity can be produced, and its electric conductivity is close to that of a general electrochemical impedance material 'such as titanium or stainless steel. The elastic contact roller 17 bridges the impedance sheet to a height of about 40 Angstroms, at least a large surface area of which is not covered by the long-standing impedance, and contacts the object. 10 This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 male. ¾) f-(Please read the precautions on the back before filling this page) -el emMW 1 1§ I ala ϋ nn ϋ n an emf · 573077 A7 B7 8807pif.doc / 008 V. Description of the Invention (γ) The processing of objects occurs gradually. In the element shown in Figure 2, during the processing, electrolytic processing occurs in two. The transfer drive shown by the arrow will be closed 'and the anode arrays 2 and 3 are in contact with the surface of the object 1 to be processed. The plating current source is turned on, and the electrolytic treatment can occur by turning on the vibration element 6. In order to turn this movement on and off simultaneously and the power source of the mine, synchronous elements and / or switching elements using known automation techniques can be used. The possible period of treatment depends on the chemical composition of the electrolyte, the applied current density, and the distance between the anode and the cathode, that is, the thickness of the insulating material 12 in front of the anode and its type. The thickness and type of the insulating material determine the amount of set electrolyte that is effective in each processing step. This set electrolyte is hereinafter simply referred to as fresh electrolyte. As for the insulating material 12, impedance fiber, felted open-cell foam material, ceramic cloth, and other materials that can penetrate ions and liquids can be used. A hard insulating material is, for example, an anode which is partially insulated with a resistance insulator, wherein the resistance insulator comprises hard and adhesive ceramic particles or plastic particles. At this time, the anode system can partially penetrate the ions and partly be electrically insulated. Liquid-absorbing and smooth insulating materials can be formed simultaneously by the "a walk work" vibration of the anode, which facilitates electrochemical processing. This "walk work" accelerates the process by reducing the diffusion layer. The duration of each processing step ranges from a few milligrams to one hour. After the processing step, the lifting element opens the anode arrays 2 and 3 in the direction of arrow 8 or swings open along a curved path to cause the direction as arrow 8 while the plating current needs to remain on. At this time, no rupture spark occurs, and the current of the plating current source is reduced, and its polarity is reversed or turned off during the opening action. Therefore, in the direction of arrow 19, there is only a very low current at the beginning of transmission, No current flows to the contact roller 17. The path length of the transfer step is determined by first applying the paper size of the Chinese National Standard (CNS) A4 (210x297 mm) (please read the precautions on the back before filling in the true) * ί β§ βϋ ϋ ϋ Mt 1 ^ eJ · ϋ · 1 ϋ I § ϋ n I Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 573077 Λ7 8807pif.doc / 008 B7 V. Invention Description (q) (Please read the precautions on the back before filling this page) The light time determines that for a given machine length, that is, the number of given processing tanks 15 and the anodes in the transfer direction are longer than a long time, the time of the relative transfer step is longer, and the machine length and machine power are matched with each other to make it large. The conveying steps of the machine are between 1mm and 2m. The anode system can move relative to the stop object. By opening the anode arrays 2 and 3, fresh electrolyte can reach the anode and cathode areas. After the transfer step, the anode arrangement is closed again. The anode is lowered again and is on the surface of the object with the insulating material 12, so the hydrodynamic pressure of the electrolyte accelerates the exchange of matter through the holes of the object 1 and invisible holes. Immediately after the anode array is lowered onto the object, the transfer element is turned off, and at the same time, the plating current source that was originally turned off is turned on to the required polarity. All movements, transfer steps and electrical switches of the galvanic current source are controlled by a central machine controller not shown. In principle, the situation shown in Fig. 2 is also applicable to vertical continuous running machines, while Fig. 2 is a schematic top view. Printed by the Ministry of Intellectual Property Bureau and Consumer Cooperatives. Figure 3 shows a side view of a horizontally continuous machine using a long contact body to process a circuit board or circuit foil. At the same time, Figure 3 also shows a schematic top view of a vertically continuous machine. The long contact body 20 in which the sealing roller is not required will be described in detail below. As shown in Figure 3, a continuous processing tank can be used here. The long contact body establishes the electrical connection between the object 1 and the plating current source described above and not shown here. This long contact body 20 can be squeezed and fixed on the surface to be processed in the case that the conveyance of the object 1 is closed and the anode array is closed at the same time. FIG. 3 also shows the processing in this case. After that, the anode arrays 2 and 3 are opened again. With the same action, the long contact body 20 is lifted from the surface of the object 1 shown by the dotted line. It is advantageous to turn off the plating current source or reduce the current at the beginning of the opening action, which can prevent the formation of sparks and / or metallization of the contact. According to the paper size, the Chinese National Standard (CNS) A4 specification (210 x 297 meals) is applicable. 573077 A7 B7 8807pif.doc / 008 5. Description of the invention (N) Reversing the polarity in the open state of the arrangement can make the length of the contact body longer. It becomes possible that the strips are directed toward the cathode auxiliary electrode, and this opening action causes the transfer step of the object 1 to begin. After the anode arrays 2 and 3 are closed simultaneously with the strip contact body, this transfer step is completed before the closing action is completed. No treatment occurs under the long contact body. The distance between the transfer step and the long contact body is matched so that all surface areas of the object are electrochemically treated at the same time. After the closing action is completed, the power source is turned on again, and the next steps and functions are shown in Figure 2. The long contact bodies 20 may be arranged laterally at a right angle to the conveying direction. A different angle ’means that an obliquely arranged strip contact body touches two sections of a continuous object. The long contact bodies will not touch each other at a distance # following the object. The arrangement of this anode can be achieved by an oblique cutting, and the long contact body has the following characteristics: The sliding contact body 18 is not needed. In order to supply current to the long contact body 20, a non-wearing conductive body 26 can be used. Elastic copper wire or high current wire body, so the general wear of sliding contact body will not occur. Furthermore, as opposed to the contact roller, the actual contact can be insulated to avoid metal growth during plating. The elastic denier drive seal rollers are also not needed, so the length of the machine can be relatively reduced. In particular, when the anode has the same length as the roller contact body, the distance between one contact position and the next contact position in the conveying direction is shortened, which allows the production of shorter objects 1 or longer objects with a given length of object 1. anode. Fig. 4a shows a cross-sectional view of a long contact body 20, which extends along the protruding plane, and a cutting tool 21 including a metal or plastic is used for stably fixing to a lifting element. An electrically insulating and elastic material 22 is placed on, for example, cured on the cutting tool 21. A stiff contact strip 23 was added to the material 22, and this stiff contact strip (please read the precautions on the back before filling this page) Order-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies Chinese national standards ( CNS) A4 specification (210x297 mm) 573077 A7 B7 8807pif.doc / 008 V. Description of the invention ㈠I) ί Please read the notes on the back before filling out this page) Article 23 is preferably an electrochemical resistance metal, such as titanium or Made of niobium. The contact strip 23 is connected to the galvanic current source through an electrically insulated conductor. The insulating material completely isolates the contact strip 23 from the electrolytic cell in a processing step. Therefore, the unnecessary metal growth on the cathodic contact strip 23 during plating can reliably prevent the formation of the seal roller 13 which is unnecessary. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs If part of the surface of the object to be processed is covered by an impedance, the remaining uncovered surface of a metal rigid contact body cannot be reliably contacted. Here you can use the strip contact shown in Figure 4b, which is made of an elastic material with a conductive filler. An elastic and electrically insulating material 22 is provided at both ends of the strip contact 24. This insulating material protects the contact strip and prevents the metallization of the cathode, and its elasticity enables reliable contact between the object 1 and the impedance. The contact with the plating current source can be achieved by the conductive body 26 which is far from the conductive body 10 near the long contact body 20. Based on the formation of the strip contact body 20 in FIG. 4b, the actual contact with the substance composed of metal can be obtained. However, in contrast to the rigid contact strip shown in FIG. 4a, this contact strip includes a perforation and a thickness of about 0.1. Formed by stacked small metal pieces of mm. This stacked small metal sheet is not placed under the lower half of the contact strip 24, but is fully assembled to form a housing. The small metal pieces are supported upwards against the remaining elastic and conductive materials, and a common electrical connection is formed between all the small metal pieces. Makes an effective resilient metal contact on the object. To be suitable for uneven surfaces, the contact strips can also be composed of contact strips provided with small brush-shaped grooves, and metal elastic brush strips can also be used here. The embodiments of the circuit board and circuit foil described above can generally be applied in the form of sections. The method and components according to the present invention are also applicable to rollers to rollers. The paper size of the foil is applicable to China National Standard (CNS) A4 (210x 297 cm) 573077 Λ7 B7 8807pif.doc / 008 V. Description of the invention (V ~ ) Electrochemical treatment of continuous objects. Known grooves, drives, and guide rollers and refraction rollers for electro-chemical transfer machines can be used. The belt to be processed is controlled by a control element and stopped at each processing step. The anode arrays 2 and 3 are turned on and off as described above. To control the time, a motor control element can also be used. For large and heavy reel shafts, the permanent stop and re-operation of the processing belt is technically quite onerous. To prevent the gradual transfer during processing of these large and heavy reel shafts, a horizontal saw (Lying Saw ) So that objects can be transferred continuously. In the transmitting step, the anode arrays 2 and 3 are set to perform a synchronous transmitting action with the object, that is, synchronously transmitting with the object. There is no relative movement between the object and the anode arrangement. At the end of the processing step and the transfer step, the anode array is opened and returned to the open state of the previous transfer step, then closed again, and the object is placed in a flowing state again. The strip contact body and the opening motion, the closing motion and the transfer motion are all at the strip contact position. The above figure shows that both ends of the object are processed. For objects processed on one side, no anode arrangement is required. The anode arrangement is replaced by a planar object, which receives the remaining squeezing force of the single-sided anode arrangement. The method of the present invention is also applicable to the electrical contact treatment of tangible objects, in which the anode and the insulating material are precisely matched with the shape of the object, so irregular treatment caused by spike effects can be reliably avoided. This treatment occurs by permanently turning on the electrolyte and shutting down the components through the electrolyte of the mating object. Another application field of the present invention is an immersion machine, in which the arrangement of the objects and anodes placed in the processing tank is permanently opened and closed to achieve electrolyte exchange. The electrical contact of the object is achieved using known cutting tools, fixtures and / or frames. In the circuit ----------- · 11111--Order i 丨! _ 丨 丨 Line & Please read the precautions on the back before filling out this page) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with China National Standard (CNS) A4 (210x 297 mm) 573077 A7 B7 8807pif .doc / 008 V. Description of the Invention (i) The precise processing of the structure on the board can use a higher current density. In addition, energy can be saved due to the relatively low battery voltage. In continuous-running machines, other forms of electrical contact with objects not depicted here are also possible. Especially proposed here is single-sided contact of planar objects such as clamps or wheels. It can also be implemented using the method of the present invention. Although the present invention has been disclosed with the preferred embodiments and drawings as above, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and decorations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the appended patent application. · 1! # -------- Order --------- line · (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Standards apply to China National Standard (CNS) A4 specifications (210 X 297mm)