562966 ί · 五、發明說明（1) 【發明所屬技術領域】 本發明係有關一種工件積載裝置，爲使用於進行液晶 面板等板狀電子構件之熱處理的裝置。 【習知技術】 例如，在製造液晶面板之程序中，爲將已設有TFir等 驅動側基板與彩色濾光器基板經由環氧樹脂材料等密封劑 而進行貼合。在此貼合時，爲使密封劑硬化，而使用熱處 理裝置來實施一定時間之熱處理。實施熱處理之工件因係 爲基板或與其貼合者，故均爲板狀，且被支撐在稱之爲熱 處理框架（rack )之工件積載裝置上。作爲習知之工件積 載裝置，一般係將工件之多處藉由銷所支撐。此外，在專 利文獻1 (日本專利特開平2002- 1 3 0959 )中係揭示有一 種熱處理用之工件積載裝置，係爲以長條狀之圓軸取代銷 以作爲工件承接構件來使用，藉由1對圓軸而僅支撐工件 之兩邊緣。 【發明所欲解決之問題】 於液晶面板製造時之各基板間的貼合中，必須將對向 圖素以微米規模來定位，進而在密封劑爲無充分強度之情 況下，於基板發生撓曲後便進而產生伴隨位置偏移之顯示 不均的情況。近年來，液晶面板等係朝高精細化、大型 化、薄板化前進，在製造此種液晶面板時，於將工件以上 述習知之銷支撐型式之工件積載裝置而支撐的情況下，便 有引起顯示不均之問題發生。顯示不均之發生原因係爲， 562966 五、 發明說明（2) 因 工 件 與 銷之間的接觸爲點接觸，因此在熱處理 中 之 工 件 本 身 的 重 量便集中施加至銷上，而可判斷爲因此 而 造 成 在 基 板 上 之 局部變形。顯示不均係爲，因玻璃基板 之 變 形 而 使 間 隙 尺 寸變形所引起，作爲引起間隔尺寸變形 之 原 因 係 可 判 斷 爲 來自樹脂隔離物之耐熱度強度不足所造 成 之 壓 縮 變 形 或 是隔離物之位置偏移等。同樣地，即使 在 專 利 文 獻 1 中， 因工件與銷之間的接觸爲線接觸，因此 工 件本 身 的 重 量 便 集中施加至兩端緣之圓軸上，同時，工 件 因 整 體 呈 彎 曲 呈 凹狀，故可判斷其係難以確實地解除作 爲 最 終 製 品 之 液 晶 面板之顯示不均。 不僅限於液晶面板之基板貼合，即使在基板 上 形 成 電 路 圖 型 的 情況下，在熱處理時亦會在基板上產 生 局 部 變 形 且 因 殘餘此種變形而具有引起製造不良之 問 題 此 外 1 此 種 熱處理雖在淸潔環境下進行，但支撐 面 之 位 準 ( 平 面 度 )在工件承接構件間不同時，便會在工 件 上 產 生 局 部 漂 浮 ，而具有藉熱風流速而振動工件、造成 產 生 灰 塵 之 原 因 的 問題，在習知之物中，即使在此問題點 中 亦 爲 並 法 充 分 解 決之物。 此外 ，在點接觸支撐及線接觸支撐之物中， 爲 了 避 免 工 件 本 身 的重量雖考慮有增加支撐處之數目，然 而在 增 加 數 S 的 情 況下，並不僅是增加製造成本，亦須在 全 數 接 觸 處 上 呈 均 等地支撐者係形成相當困難，結果，造 成 容 易 地 引 起 局 部 變形，且無法充分地解決上述問題。 -4- 562966 五、 發明說明（3) 本發明之目的係爲· 提供 一種熱處 理 裝置 用 工 件 積 載 裝 置 ，係爲在熱處理程序 中， 可減少伴 隨 於工 件 之局 部 變 形 所 產生之不良，此外， 亦可 抑制工件 之 振動 Ο [ 解決問題之手段及發 明之 效果】 本發明之熱處理裝 置用 工件積載 裝 置係 爲 — 種 工 件 積 載 裝置，爲將所熱處理 之板 狀工件分別於上 下 方 向 隔 開 所 定 間隔、且具備有可積 載多 層之積載 部 及積 載 支 撐 體 ， 其 特 徵在於，各積載部係 具有 直接支撐 工 件之 多 數 工 件 承 接 構 件，至少其中之一爲 用以 在遠離工 件 周邊 之 位 置 上 承 接 之 物，各工件承接構件係呈長條狀 且上 面 爲 呈 平 坦 狀 者 〇 工件承接構件係爲 ，在 耐熱性、 強 度、 低 變 形 低 產 生 灰塵性、低成本等實 用上 之點來看 係 以不 銹 鋼 製 之 角 管 爲 佳。 當工件爲長方形之; 板狀 的情況下 5 工件 承 接 構 件 之 方 向 亦可呈沿著工件長邊 方向 之方向、 亦 可呈 沿 著 工 件 短 邊 方 向之方向，不過，由 達到 減少支撐 構 件數 量 之 輕 里 化 且 改善蓄熱特性之點來 看， 係以將工 件 承接 構 件 之 方 向 爲 呈 沿著工件長邊方向之 方向 爲佳。更 具 體而 言 ， 在 工 件 之 長 邊方向上使用平行之 共計 5根的工 件承接 構 件 1 並亦 可 將 其配置在工件之兩端 緣部 、中央部 及 各靠 近 端 緣 部 之 位 置 ，此外，亦可在工件 之長 邊方向上 使用平行> 之: 共計 6 根 的 工件承接構件，並亦 可將 其配置在 -5- 工 件之 兩 端 緣 部 及 兩 562966 五、 發明說明（4) 端 緣部之間成等間隔配置。 此外’上述工件承接構件之根數係 可 藉 由 工 件 之 尺 寸 而 適當地變更。 在藉由本發明之熱處理裝置用工件 積 載 裝 置 後 工 件 係以多數之工件承接構件所支撐的同時 ， 因 至 少 1 個 爲 設 置 在遠離工件周邊之位置上，故可防止 工 件 之 振 動 更 甚 者 ’各工件承接構件爲長條狀、且其上 面 爲 呈 平 坦 因 工 件 爲以面接觸所支撐，故可防止因在工 件 上 所 產 生 之 局 部 變 形而造成製品不良。 至少於各工件承接構件上面上設有緩衝材料。 緩衝材料係爲，可使用熱收縮被覆 材料 而 用 以 被 覆 不 銹 鋼製之角管全面，此外，亦可爲將帶 狀 物 僅 貼 附 於 與 不 銹 鋼製之角管之工件接觸之面上。作爲 使 用 在 緩 衝 材料 之 材料中，係以樹脂或橡膠等具有彈性、 且 難 以 剝 離 帶 電 之 物 ，且以在熱處理溫度（例如爲20(TC 之 程 度 或 以 下 ) 中 不 致產生灰塵或未有影響到液晶之漏氣 者 爲‘ 佳 0 在不銹鋼製之角管方面，雖有傷害 到 工 件 ( 例 如 玻 璃 基 板）之可能性，然而，藉由在工件承 接 構 件 上 設 置 緩 衝 材料，即使是容易受到傷害之工件，亦 可 毫 Μ j\\\ 顧 慮 進 行 積 載 。且可吸收工件承接構件之工件支撐 面 之 構 件 間 的 不 齊 備 ，而可更佳均勻地支撐工件。 此外，各工件承接構件係爲，在承 載 工 件 之 際 爲 了 緩 和 施加至工件承接構件之衝擊，而將工 -6 - 件 本 身 重 里 於承 接 562966 五、發明說明（5) 之際呈可傾斜狀地支撐於積載部支撐體上。亦即，工件承 接構件係由構成如下：角管，爲將球面軸承形成爲可收納 至內部；球面軸承，爲固定於積載部支撐體、且將角管呈 可旋轉狀地支撐於任意水平軸之周圍；或是工件承接構件 爲構成如下：角管，以處於可將垂直軸構件呈自由狀態地 插入；垂直軸構件，爲固定於積載部支撐體，上部則在角 管內呈可相對移動狀地插入；壓縮彈簧等彈性構件，爲夾 於角管下面與積載部支撐體之間，而使角管支撐呈可上下 移動。 如此，將工件藉由機械部而載置於此種積載裝置時， 工件雖會因本身重量而形成產生撓曲狀態，但藉由各工件 承接構件分別對應於工件而進行傾斜，而可防止在1個工 件承接構件上工件本身重量過於集中，進而可平衡爲佳地 支撐工件。 【本發明較佳實施例之詳細說明】 參照所附圖式說明本發明之實施例。 第1圖所示係爲整體之熱處理裝置，熱處理裝置係具 備有··加熱室（2);工件積載裝置（1)，爲設置於加熱室（2) 內；機械部（3)，爲在加熱室（2)之外部與工件積載裝置（1) 之間進行工件（W)之移載。 工件（W)係被處理呈將其長邊方向以朝向呈與加熱室（2) 內之熱風流動方向正交之方向，而被積載於工件積載裝置 ⑴上。 562966 五、發明說明（6 ) 機械部（3)係具有支撐工件（W)之多根（圖式中爲3 根）手部（3a)。 本發明之工件積載裝置（1)係如第2圖及第3圖之放大 圖所不’具備有：多層之積載部（1 〇)，係積載所熱處理之 工件（W) ·’積載部支撐體（Π)，爲支撐該等積載部（10)。 積載部支撐體（1 1)係具備有：左右3對之支柱（丨3);補 強構件（12)，爲在左右之支柱（1 3)間分別傳遞、停止，且 支撐各層之積載部（1〇)。 各積載部（1 0)係藉由被支撐於3根並列狀補強構件 (12)、且直接承接工件（w)之6根並列狀之工件承接構件 (14)所構成。 各工件承接構件（14)係藉由長條狀之不銹鋼製之角管 所形成。6根工件承接構件（1 4)係以等間隔配置、且使工 件承接構件不致位於中央部。 各補強構件（1 2)係爲藉由板金加工而將各補強構件（1 2) 之機器手部（3 a)於插入位置上設有如第4圖放大所示之用 以避免干涉之缺口。藉此可抑制工件積載裝置（1)之整體高 度、且可設置多層之積載部（1〇)。 此外，工件承接構件（1 4)之數目並不僅限於6根。機 器手部（3 a)之數目除了 3根之外亦具有2根等物，當機器 手部（3 a)之數目爲3根的情況下’將工件承接構件（1 4)之 數目設爲偶數根，且以使工件承接構件不致位在中央部上 者爲佳，當機器手部（3 a)之數目爲2根的情況下’將工件 562966 五、發明說明（7) 承接構件（1 4)之數目設爲奇數根，而亦使工件承接構件位 在中央部上者爲佳。 第5圖係模式性地顯示出施加於被支撐在工件積載裝 置上之工件（W)之力，（a)係揭示出以本發明之角管之工件 承接構件（14)直接支撐工件（W)的情況，而（b)係揭示出以 被固定在習知方式之角管（31)上面之半球狀之銷（32)來支 撐工件（W)的情況。工件（W)係被形成爲液晶顯示面板之 物，其中，係將設有TFT等驅動側基板（W1)與彩色濾光器 基板（W2)經由環氧樹脂材料等密封劑（W3)而貼合，藉由熱 處理使密封劑（W3)硬化而獲得。驅動側基板（W1)與彩色濾 光器基板（W2)之間的間隙（G)係具有5// m程度，在彩色濾 光器基板（W2)上係形成有藉由微影製程 (photolithography )等而用以獲得間隙（G)之隔離物。工 件（W)之大小係例如爲1 500mmXl 800mm之程度，密封劑 之硬化條件係爲，溫度呈120 °C至180°C之程度、維持時 間則爲30分至120分之程度。藉由第5圖之（b)即可得 知，在銷支撐型式之物中，因工件（W)本身重量直接支撐 於其上、造成集中性地施加於銷（3 2)，因此，接觸至銷（3 2) 之基板（W1)便變形、而間隙G之尺寸亦大幅變動。間隙G 之尺寸大幅變動之原因係可推測爲隔離物之耐熱強度不足 所造成之壓縮變形、或是因隔離物之位置偏移所造成者。 如此，在銷支撐型式之物中，間隙G係因大幅變動而在銷 (3 2)位置上引起顯示不均。相對於此，在藉由第5圖（a)所 562966 五、發明說明（8) 示之本發明之物後，因工件（W)爲以角管製之工件承接構 件（14)所承接，故橫跨長邊方向全〜長、將工件（W)與工件 承接構件（1 4)呈面接觸，而可大幅減少藉由工件（界）本身 重量而被施加於工件承接構件（14)上之壓力，其結果，可 知係可將間隙G之尺寸維持成一定。亦即，在本發明之工 件積載裝置（1)中，係可知爲可除去顯示不均之原因。在分 析施加至工件之應力模擬（simulation )後，便顯示出具 有6根工件承接構件（14)之情況下的應力峰値爲形成 6.9 1 7E + 005 Pa、且緩和應力集中。此外，相對於在如同 銷支撐型式之點接觸支撐物或斷面爲半球狀之長條狀材料 之線接觸支撐物中，加上工件（W)之局部變形，仍具有大 型之工件（W)的支撐爲呈不安定狀而具有工件（w)易振動之 問題，本發明之工件積載裝置（1)係亦可解決此種問題。 作爲上述工件承接構件（1 4)，當然亦可維持使用不銹 鋼製之角管，然而，亦可構成爲具有緩衝材料。亦即，工 件承接構件（14)係如第6圖之（a)所示，呈在不銹鋼製之角 管（14a)之整面上貼附有橡膠、塑膠等緩衝材料（1 4b)。此 種構成係例如在將成爲緩衝材料之熱收縮被覆材料被覆於 角管後，藉由加熱、收縮而可容易地獲得。此外，工件承 接構件（14)係如第6圖之（b)所示，亦可在不銹鋼製之角管 (14a)上以接著劑貼附橡膠、塑膠等緩衝材料（14b)。藉 此，在可防止傷害到工件（W)的同時，在角管單體上，對 於因工件承接構件（14)些許傾斜而造成容易形成工件承接 -10- 562966 五、發明說明（9 ) 構件（14)與工件（W)間的線接觸，爲可藉由緩衝材料 (14b)、（14c)夾於其中而可確實地進行面接觸。 再者，工件承接構件（14)係爲，爲了緩和在承載工件 (W)時施加至工件承接構件（1 4)之衝擊，亦可經由球面軸 承（22)、壓縮彈簧（2 5)等而呈現出在承接工件（W)本身重量 時可傾斜般地被支撐在積載支撐體（Π)。亦即，工件承接 構件（14)係如第7圖之（a)所示，亦可構成爲：角管（21)， 爲形成可將球面軸承（22)收納於內部；球面軸承（22)，爲 支撐呈可將分別固定在各補強構件（12)上之角管（21)呈可 繞任意水平軸旋轉狀地支撐。工件承接構件（1 4)係如第7 圖之（b)所示，亦可構成爲：角管（23)，以處於可將垂直軸 構件（24)呈自由狀態地插入；垂直軸構件（24)，爲固定於 各補強材料（12)上，上部則在角管（23)內呈可相對移動狀 地（角管（23)爲對於垂直構件（23)爲呈可上下移動、且角管 (23)上面係形成爲可由水平面傾斜者）插入；壓縮彈簧等彈 性構件（25)，爲夾於角管（23)下面與補強材料（12)之間，而 使角管（2 3)支撐呈可上下移動。 此外，本發明之工件積載裝置並非僅限定於上述所揭 示之物中，當然，亦可因應工件尺寸、重量等而進行適當 地變更。 圖式簡單說明 第1圖所示係本發明工件積載裝置所使用之熱處理裝 置之一例的平面圖。 -1 1 - 562966 五、發明說明（1〇) 第2圖所不係本發明工件積載裝置之平面圖。 第3圖所示係本發明工件積載裝置之正面圖。 第4圖所示係第3圖之局部擴大的局部擴大正面圖。 第5圖所示係將本發明工件積載裝置之作用效果與習 知之物作比較之模式圖。 第6圖所示係表示本發明工件積載裝置之工件承接構 件之變形例的立體圖。 第7圖所示係表示本發明工件積載裝置之工件承接構 件之其他變形例之垂直斷面圖。 【圖式符號說明】 1 :熱處理裝置用工件積載裝置 1 〇 :積載部 1 1 :積載部支撐體 1 4 :工件承接構件 14a，21,23 :角管 1 4 b、1 4 c :緩衝材料 22 :球面軸承 24 :垂直構件 2 5 :壓縮彈簧（彈性構件） -12-562966 Ⅴ. Description of the Invention (1) [Technical Field of the Invention] The present invention relates to a workpiece stowage device, which is a device for performing heat treatment of a plate-shaped electronic component such as a liquid crystal panel. [Knowledge technology] For example, in the process of manufacturing a liquid crystal panel, a driving-side substrate such as TFir and a color filter substrate are bonded together via a sealant such as an epoxy resin material. During the bonding, a heat treatment device is used to perform heat treatment for a certain period of time in order to harden the sealant. Since the workpieces subjected to the heat treatment are substrates or those attached thereto, they are all plate-shaped and are supported on a workpiece stowage device called a heat treatment frame. As a conventional workpiece loading device, a plurality of workpieces are generally supported by pins. In addition, Patent Document 1 (Japanese Patent Laid-Open Publication No. 2002- 13 0959) discloses a workpiece stowage device for heat treatment, which uses a long round shaft instead of a pin as a workpiece receiving member. 1 pair of round shafts supporting only two edges of the workpiece. [Problems to be Solved by the Invention] In the bonding between the substrates during the manufacture of the liquid crystal panel, the opposing pixels must be positioned on the micrometer scale, and the substrate will be scratched when the sealant has insufficient strength. After the curve, the display unevenness caused by the position shift will occur. In recent years, liquid crystal panels and the like have been moving toward higher definition, larger size, and thinner plates. When manufacturing such a liquid crystal panel, the workpiece is supported by a workpiece stowage device of the conventional pin support type as described above. Display unevenness occurred. The cause of the display unevenness is: 562966 V. Description of the invention (2) Because the contact between the workpiece and the pin is a point contact, the weight of the workpiece itself during the heat treatment is concentrated on the pin, and it can be judged that This causes local deformation on the substrate. The display unevenness is caused by the deformation of the gap size due to the deformation of the glass substrate. The cause of the deformation of the space size can be judged as the compression deformation or the position of the spacer caused by the insufficient heat resistance strength of the resin spacer. Offset, etc. Similarly, even in Patent Document 1, since the contact between the workpiece and the pin is a linear contact, the weight of the workpiece itself is concentratedly applied to the round shafts at both ends, and at the same time, the workpiece is curved and concave as a whole. Therefore, it can be judged that it is difficult to reliably remove the display unevenness of the liquid crystal panel as the final product. Not only the substrate bonding of liquid crystal panels, but even when a circuit pattern is formed on the substrate, local deformation will occur on the substrate during heat treatment and there will be problems caused by manufacturing defects due to residual such deformation. In addition, 1 It is performed in a clean environment, but when the level (flatness) of the supporting surface is different between the workpiece receiving members, local floating will occur on the workpiece, and the workpiece will be vibrated by the flow velocity of hot air, causing the problem of dust generation. , Of the things that are known, even in this point, they are fully resolved by law. In addition, in the point contact support and the line contact support, although the number of supports is considered to avoid the weight of the workpiece itself, in the case of increasing the number S, it is not only an increase in manufacturing costs, but also in full contact. It is quite difficult to form a uniform supporter everywhere, and as a result, it is easy to cause local deformation, and the above problems cannot be fully solved. -4- 562966 V. Description of the invention (3) The purpose of the present invention is to provide a workpiece stowage device for a heat treatment device, which can reduce the defects caused by the local deformation of the workpiece during the heat treatment process. In addition, Vibration of the workpiece can be suppressed. [Means for solving the problem and effects of the invention] The workpiece stowage device for the heat treatment device of the present invention is a kind of workpiece stowage device, which separates the heat-treated plate-shaped workpieces at a predetermined interval in the vertical direction. It also has stowage parts and stowage supports that can store multiple layers. Each stowage part has a plurality of work piece receiving members that directly support the work piece. At least one of them is an object to be received at a position away from the periphery of the work piece. Each workpiece receiving member has a long shape and the top surface is flat. The workpiece receiving member is practical in terms of heat resistance, strength, low deformation, low dust generation, and low cost. At an angle of view based made of stainless steel tube excellent. When the workpiece is rectangular; in the case of a plate shape, the direction of the workpiece receiving member may be along the long side of the workpiece, or it may be along the short side of the workpiece. However, by reducing the number of supporting members, From the viewpoint of lightening the thickness and improving the heat storage characteristics, it is preferable that the direction of the workpiece receiving member is the direction along the longitudinal direction of the workpiece. More specifically, a total of five workpiece receiving members 1 in parallel in the longitudinal direction of the workpiece may be used, and the workpiece receiving members 1 may be arranged at both end edges, the central portion, and the positions near the end edges of the workpiece. Parallels can also be used in the longitudinal direction of the workpiece: a total of 6 workpiece receiving members, and can also be arranged at the edge of both ends of the -5- workpiece and two 562966 V. Description of the invention (4) The edges are arranged at equal intervals. In addition, the number of the above-mentioned workpiece receiving members can be appropriately changed by the size of the workpiece. When the workpiece is supported by a plurality of workpiece receiving members by the workpiece stowage device for the heat treatment device of the present invention, at least one of the workpieces is installed at a position far from the periphery of the workpiece, so that it is possible to prevent the workpiece from being further vibrated. The workpiece receiving member has a long shape and its upper surface is flat. The workpiece is supported by surface contact, so it can prevent product defects caused by local deformation on the workpiece. A buffer material is provided on at least the upper surface of each workpiece receiving member. The cushioning material is a heat-shrinkable covering material that can be used to cover stainless steel corner tubes. In addition, it can also be used to attach a strip only to the surface in contact with the workpiece of stainless steel corner tubes. As the material used for the buffer material, it is made of resin or rubber, which is elastic and difficult to peel off the charged material, and does not cause dust or influence at the heat treatment temperature (for example, 20 (TC level or below)). The leak of the liquid crystal is 'Good 0'. Although the corner tube made of stainless steel may damage the workpiece (such as a glass substrate), however, by providing a buffer material on the workpiece receiving member, it is easy to be damaged. Workpieces can also be loaded with worries. And it can absorb the incompleteness of the components on the workpiece support surface of the workpiece receiving member, and can support the workpiece more uniformly. In addition, each workpiece receiving member is: In order to alleviate the impact applied to the workpiece receiving member when the workpiece is being carried, the workpiece -6 is itself focused on receiving 562966. V. Description of the invention (5) is supported on the stowage part support body in an inclined manner. The workpiece receiving member is composed of the following: a corner tube is a spherical surface The bearing is formed to be accommodated inside; the spherical bearing is fixed to the stowage part support body and rotatably supports the angle tube around any horizontal axis; or the workpiece receiving member is structured as follows: the angle tube The vertical axis member can be inserted in a free state; the vertical axis member is fixed to the stowage part support body, and the upper part is inserted relatively in the corner tube; elastic members such as compression springs are sandwiched under the corner tube and The angle tube support can be moved up and down between the stowage part support body. In this way, when the workpiece is placed in this stowage device by the mechanical part, the work piece will be deflected due to its own weight, but Each workpiece receiving member is tilted corresponding to the workpiece, so that the weight of the workpiece itself can be prevented from being too concentrated on one workpiece receiving member, and the workpiece can be supported in a balanced manner. [Detailed description of the preferred embodiment of the present invention] Reference The attached drawings illustrate an embodiment of the present invention. Figure 1 shows the entire heat treatment device. The heat treatment device is equipped with a heating chamber (2); The device (1) is installed in the heating chamber (2); the mechanical part (3) is used to transfer the workpiece (W) between the outside of the heating chamber (2) and the workpiece stowage device (1). W) is processed on the workpiece stowage device ⑴ with its long side oriented in a direction orthogonal to the direction of the hot air flow in the heating chamber (2). 562966 V. Description of the invention (6) Mechanical department (3) is a hand (3a) having a plurality of supporting pieces (3 in the drawing) (3). The workpiece stowage device (1) of the present invention is as shown in the enlarged views of FIG. 2 and FIG. 3 'Equipped with: a multi-layered stowage part (10), which is used to stow the heat-treated workpiece (W)'; 'The stowage part support (Π) is to support these stowage parts (10). The stowage part support body (1 1) is provided with: left and right 3 pairs of pillars (丨 3); and a reinforcing member (12), which is respectively transmitted and stopped between the left and right pillars (1 3), and supports the stowage sections of each layer ( 1〇). Each stowage part (10) is constituted by six parallel workpiece receiving members (14) supported by three parallel reinforcing members (12) and directly receiving workpieces (w). Each of the workpiece receiving members (14) is formed by a long stainless steel angle tube. The six workpiece receiving members (14) are arranged at equal intervals so that the workpiece receiving members are not located at the center. Each reinforcing member (1 2) is a notch for avoiding interference by enlarging the mechanical hand (3 a) of each reinforcing member (1 2) at the insertion position by sheet metal processing. As a result, the overall height of the workpiece stowage device (1) can be suppressed, and a plurality of stowage portions (10) can be provided. In addition, the number of workpiece receiving members (1 4) is not limited to six. The number of robot hands (3 a) has 2 and so on besides 3, when the number of robot hands (3 a) is 3, 'the number of workpiece receiving members (1 4) is set to An even number is preferred, so that the workpiece receiving member is not positioned on the central part. When the number of the robot hand (3 a) is two, the workpiece 562966 V. Description of the invention (7) The receiving member (1 4) The number is set to an odd number, and it is also preferable that the workpiece receiving member is located on the central portion. FIG. 5 schematically shows the force applied to the workpiece (W) supported on the workpiece stowage device, and (a) shows that the workpiece receiving member (14) directly supports the workpiece (W) with the corner tube of the present invention. ), And (b) reveals a case where the workpiece (W) is supported by a hemispherical pin (32) fixed on the corner tube (31) in a conventional manner. The workpiece (W) is formed as a liquid crystal display panel, and a driving side substrate (W1) such as a TFT and a color filter substrate (W2) are attached through a sealant (W3) such as an epoxy resin material. It is obtained by hardening the sealant (W3) by heat treatment. The gap (G) between the drive-side substrate (W1) and the color filter substrate (W2) is about 5 // m, and a photolithography is formed on the color filter substrate (W2) by a photolithography process. ) And so on to obtain a spacer of the gap (G). The size of the work piece (W) is, for example, about 1500 mm × 800 mm. The hardening condition of the sealant is such that the temperature is about 120 ° C to 180 ° C, and the maintenance time is about 30 minutes to 120 minutes. It can be known from (b) of FIG. 5 that in the pin support type, the workpiece (W) itself is directly supported by the weight of the pin (W), which results in concentrated application to the pin (3 2). The substrate (W1) to the pin (3 2) is deformed, and the size of the gap G is also greatly changed. The reason for the large change in the size of the gap G can be presumed to be the compression deformation caused by the insufficient heat resistance strength of the spacer, or the displacement caused by the position of the spacer. As described above, in the pin supporting type, the gap G causes uneven display at the position of the pin (32) due to a large change. In contrast, after the object of the present invention shown in FIG. 5 (a) 562966 V. Invention description (8), because the workpiece (W) is the workpiece receiving member (14) controlled by the angle, Therefore, the workpiece (W) and the workpiece receiving member (14) are brought into surface contact across the entire length of the long side, which can greatly reduce the weight of the workpiece (boundary) applied to the workpiece receiving member (14). As a result, it can be seen that the size of the gap G can be maintained constant. That is, in the workpiece stowage device (1) of the present invention, it is known that the cause of the uneven display can be removed. After analyzing the stress simulation applied to the workpiece, it was shown that the stress peak in the case of six workpiece receiving members (14) was 6.9 1 7E + 005 Pa, and the stress concentration was alleviated. In addition, compared with the point contact support like the pin support type or the line contact support with a hemispherical strip-shaped material in cross section, plus the local deformation of the workpiece (W), there is still a large workpiece (W) The support is unstable and has the problem that the workpiece (w) is easy to vibrate. The workpiece stowage device (1) of the present invention can also solve this problem. Of course, as the workpiece receiving member (14), an angle pipe made of stainless steel can be maintained, but it may be configured to have a cushioning material. That is, as shown in Fig. 6 (a), the work piece receiving member (14) is provided with a cushion material (14b) such as rubber or plastic attached to the entire surface of the stainless steel corner pipe (14a). Such a structure can be easily obtained by applying heat and shrinkage to a corner tube after applying a heat-shrinkable coating material as a cushioning material, for example. In addition, as shown in Fig. 6 (b), the workpiece receiving member (14) can also be used to attach a cushioning material (14b) such as rubber or plastic to an angle tube (14a) made of stainless steel with an adhesive. With this, while preventing damage to the workpiece (W), on the corner tube monomer, it is easy to form the workpiece receiving due to the slight tilt of the workpiece receiving member (14) -10- 562966 V. Description of the Invention (9) Component (14) The line contact with the workpiece (W) is such that surface contact can be reliably performed by sandwiching the cushioning materials (14b) and (14c) therebetween. In addition, the workpiece receiving member (14) is to reduce the impact applied to the workpiece receiving member (1 4) when carrying the workpiece (W), and can also be via a spherical bearing (22), a compression spring (2 5), etc. It appears that it can be tilted and supported on the stowage support (Π) when receiving the weight of the workpiece (W). That is, the workpiece receiving member (14) is shown in FIG. 7 (a), and can also be configured as: an angle tube (21), in order to form a spherical bearing (22) can be housed inside; a spherical bearing (22) For support, the angle tube (21) which can be fixed on each reinforcing member (12) is supported in a rotatable manner around any horizontal axis. The workpiece receiving member (1 4) is shown in FIG. 7 (b), and can also be configured as: a corner tube (23), which can be inserted in a free state of the vertical axis member (24); the vertical axis member ( 24), in order to be fixed to each reinforcing material (12), the upper part is relatively movable in the angle tube (23) (the angle tube (23) is vertically movable for the vertical member (23), and the angle is The upper surface of the tube (23) is formed so that it can be inserted by a person inclined at a horizontal plane; the elastic member (25) such as a compression spring is sandwiched between the lower surface of the angle tube (23) and the reinforcing material (12) so that the angle tube (2 3) The support is movable up and down. In addition, the workpiece stowage device of the present invention is not limited to only those disclosed above, and of course, it can be appropriately changed in accordance with the size and weight of the workpiece. Brief Description of the Drawings Fig. 1 is a plan view showing an example of a heat treatment device used in a workpiece stowage device of the present invention. -1 1-562966 V. Description of the invention (10) The plan shown in Figure 2 is not a workpiece stowage device of the present invention. Figure 3 is a front view of the workpiece stowage device of the present invention. FIG. 4 is a partially enlarged front view of the enlarged view of FIG. 3. Fig. 5 is a schematic diagram comparing the effect of the workpiece stowage device of the present invention with a conventional one. Fig. 6 is a perspective view showing a modified example of the workpiece receiving member of the workpiece stowage device of the present invention. Fig. 7 is a vertical sectional view showing another modified example of the workpiece receiving member of the workpiece stowage device of the present invention. [Symbol description] 1: Workpiece stowage device 1 for heat treatment device 〇: Stowage part 1 1: Stowage part support 1 4: Workpiece receiving member 14a, 21, 23: Corner tube 1 4b, 1 4c: Cushioning material 22: spherical bearing 24: vertical member 2 5: compression spring (elastic member) -12-