558489 A7 B7 五、發明説明（Θ 【發明所屬之技術領域】 本發明係關於例如以放射出紫外光之燈作爲光源燈的 光照射裝置。 【先前之技術】 使用具備放射出紫外光之光源燈的光照射裝置，例如 對於被處理物上之保護膜、黏著劑、塗料、油墨或是光阻 劑等，藉由照射紫外光，來進行硬化、乾燥、熔融或是軟 化處理等，廣泛地被應用在各領域。 對於如此的光照射裝置，作爲光源燈，係使用輸出功 率大的棒狀高壓水銀燈或是鹵化金屬燈（metal halide lamp) ，以縮短處理時間。而且，爲了使從這些光源燈放射出來 的光，高效率地照射在被處理物上，設置反射鏡，用來將 從光源燈往被處理物以外方向放射的光，往被處理物的方 向反射回去。 使用上述的光照射裝置，當對被放置在被照射面區域 內之被處理物照射紫外光時，爲了使處理時間短、使被處 理物全體在相同條件下被處理，該光照射裝置係構成以均 勻的照度分布，來照射整個被照射面區域。例如，如第9 圖所示，爲了在被照射面區域2 1上，得到高均勻性的照 度分布，提案出一種光照射裝置，係由：被配置在從該被 照射面區域2 1隔開較大距離的位置處之光源燈2 2、以 及相對於光源燈2 2之管軸的垂直方向剖面爲半橢圓狀之 溜槽（chute)狀鏡2 3所組成；進而組合用來包圍從光源燈 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) •裝·· 訂 經濟部智慧財產局員工消費合作社印t -4- 558489 A7 - B7 五、發明説明（j 2 2至被照射面區域2 1之放射光的光路之空間的筒形鏡 25 (參照日本特公平7 - 106316號公報）。 (請先閲讀背面之注意事項再填寫本頁) 若根據此光照射裝置，從光源燈2 2放射出來的光、 以及被溜槽狀鏡2 3反射回去的光，可以將其中偏離被照 射面區域2 1方向之光的大部分，利用筒形鏡2 5反射至 該被照射面區域2 1之周邊部，來防止被照射面區域2 1 之周邊部的照度降低，以改善照度分布。 然而，對於如此的光照射裝置，如第9圖之折線P 所示，大部分照射在被照射面區域2 1周邊部上的光，係 被溜槽狀鏡2 3和筒形鏡2 5，反復地進行2次反射。 然而，從光源燈2 2放射出來的光每次被反射鏡反射 時，其強度便會變小，所以無法高效率地利用從光源燈 2 2放射出來的光，於是被照射面區域2 1周邊部的照度 ，與中央部的照度相比，便無法充分地達到相同大的照度 〇 經濟部智慧財產局員工消費合作社印製 近年來，爲了可以在短時間內均勻地處理被處理物， 希望以更均勻的照度分布來照射被照射面區域，因而有僅 利用上述的溜槽狀鏡的反射作用，無法得到極高照度分布 之均勻性的問題存在。 【本發明所欲解決之課題】 本發明係根據上述的問題點而發明出來，其目的在於 提供一種光照射裝置，可以高效率地利用從光源燈放射出 來的光，而可以在被照射面區域上得到均勻性極高的照度 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） -5- 558489 A7 B7 五、發明説明（$ 分布。 【用以解決課題之手段】 本發明之光照射裝置，係具有：配置成面對預先設定 之被照射面區域的棒狀光源燈、以及相對於上述光源燈的 管軸之垂直方向的剖面爲凹狀的反射鏡；而且該反射鏡係 用來反射從該光源燈放射出來的光，而將光照射在上述被 照射區域上的形態的光照射裝置，其特徵爲： 上述反射鏡係由複數個平面狀鏡元件所構成，各個平 面狀鏡元件，係被配置成··被其反射的反射光的全部，不 會入射至其他平面狀鏡元件上，而照射在被照射區域的整 個區域上。 【作用】 若根據上述構造的光照射裝置，具有：由複數個平面 狀鏡元件構成，而相對於上述光源燈之管軸的垂直方向的 剖面爲凹狀的反射鏡；由構成該反射鏡之各個平面狀鏡元 件所反射出來的反射光的全部，由於不會入射至其他平面 狀鏡元件上，而照射在被照射區域的全部區域上，所以會g 夠高效率地利用從光源燈放射出來的光，而且在被照射區 域內，可以得到均勻性極高的照度分布。 【發明之實施形態】 以下，詳細地說明本發明之實施形態。 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -6 - 558489 一 A7 . _B7 五、發明説明（4) (請先閲讀背面之注意事項再填寫本頁) 第1圖係顯示本發明之光照射裝置之一例的槪要之說 明用槪要圖。再者’此圖係相對於光照射裝置之光源燈管 軸之垂直方向的剖面圖。 在此光照射裝置中，爲了對一定大小的被處理物全體 照射紫外光，而設定了具有必要面積的被照射面區域1 1 ;而例如高壓水銀燈或是鹵化金屬燈（m e t a 1 h a 1 i d e 1 a m ρ)等 的棒狀光源，則被配置成面對該被設定之被照射面區域 1 1，而且設置反射鏡1 3，將從光源燈1 2放射出來的 光線之中往偏離被照射面區域1 1方向放射的光，反射至 被照射面區域1 1上。 光源燈1 2，其管軸係被配置成往第1圖中之紙面的 垂直方向延伸；該管軸的長度至少比被照射面區域1 1之 往紙面的垂直方向的長度更長。管軸的長度，由於與光源 燈1 2之發光長度大致相同，所以可以使在被照射面區域 1 1上之光源燈1 2的管軸方向的照度分布均勻。 線 經濟部智慧財產局員工消費合作社印製 反射鏡1 3 ，相對於包含光源燈1 2之管軸之與被照 射面區域1 1垂直的假想平面（以下，稱爲「對稱面」） Μ，具有對稱的構造（在第1圖中形成左右對稱）：而且 ，其相對於上述光源燈1 2之垂直方向的剖面，形成覆蓋 光源燈1 2之凹狀。光源燈1 2平行方向之反射鏡1 3的 全長，至少比光源燈1 2之長度更長。 又，在反射鏡1 3的下端和被照射面區域1 1之間， 有間隙。利用此手段，當藉由光照射裝置來對被處理物進 行光照射處理時，可以無障礙地將被處理物搬入被照射面 本紙張尺度適用中國國家標隼（CMS ) Α4規格（210X 297公釐〉 558489 A 7 - B7_ 五、發明説明（g 區域11內。 在此圖所示之例中，在反射鏡1 3上，位於光照射口 1 4之相反側的位置處，形成冷卻風流通口 1 5。藉由此 手段，由於冷卻風可以在被反射鏡1 3所圍成的空間內流 通，所以可以對動作中之光照射裝置之中的光源燈1 2以 及反射鏡1 3等，進行冷卻。 反射鏡1 3，在第1圖之對稱面Μ的左右兩側，依序 地分別由第1平面狀鏡元件1 3 a、1 3 a ’、第2平面狀 鏡元件1 3b、1 3b’、以及第3平面狀鏡元件1 3 c、 1 3 c ’所構成。 各個平面狀鏡元件13a、13a’、13b、13b ’、1 3 c、1 3 c ’，係被配置成：分別用來反射從光源 燈1 2所放射出來的光的一部份，其反射光不會入射至其 他的平面狀鏡元件上，而且可以直接照射在被照射面區域 1 1的整個區域上。 具體而言，對於被配置在第1圖中之對稱面Μ右側而 形成右側鏡之平面狀鏡元件1 3 a、1 3 b、1 3 c的形 態和配置，使用第2圖〜第5圖來加以說明。在各圖中， 僅簡略地表示反射鏡1 3之構成要素，其中線段A B係表 示被照射面區域1 1之相對於光源燈1 2之管軸的垂直方 向的剖面形狀；而圓Q則表示光源燈1 2之發光部的剖面 形狀。 h爲從光源燈1 2之中心畫至被照射面區域1 1之垂 直線，且爲線段A B之平分線。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (請先閲讀背面之注意事項再填寫本頁)558489 A7 B7 5. Description of the invention (Θ [Technical field to which the invention belongs] The present invention relates to a light irradiation device using, for example, a lamp emitting ultraviolet light as a light source lamp. [Previous technology] Using a light source lamp having ultraviolet light Light irradiation devices, such as protective films, adhesives, coatings, inks, or photoresists on objects to be treated, are irradiated with ultraviolet light to perform hardening, drying, melting, or softening, and are widely used. It is used in various fields. For such light irradiation devices, as the light source lamp, a rod-shaped high-pressure mercury lamp or a metal halide lamp with a high output power is used to shorten the processing time. In addition, in order to make these light source lamps The emitted light is efficiently irradiated on the object to be treated, and a reflecting mirror is provided to reflect the light emitted from the light source lamp in a direction other than the object to be treated and reflected back to the object. Use the above-mentioned light irradiation device When irradiating the object to be treated in the area of the illuminated surface with ultraviolet light, in order to shorten the processing time and make the object to be treated completely Processed under the same conditions, the light irradiation device is configured to irradiate the entire illuminated surface area with a uniform illuminance distribution. For example, as shown in FIG. 9, in order to obtain high uniformity on the illuminated surface area 21 According to the illuminance distribution of the light source, a light irradiation device is proposed. The light source lamp 2 is arranged at a large distance from the illuminated surface area 21, and the tube axis with respect to the tube axis of the light source lamp 22. The vertical cross-section is composed of semi-elliptical chute-shaped mirrors 2 and 3; and then combined to surround the light source lamp. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the back Please fill in this page for the matters needing attention) • Assemble and order the stamp of the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs t -4- 558489 A7-B7 V. Description of the invention (j 2 2 to the light path of the radiated light area 2 1 Space cylindrical mirror 25 (refer to Japanese Patent Publication No. 7-106316). (Please read the precautions on the back before filling out this page.) According to this light irradiation device, the light emitted from the light source lamp 2 and Chute mirror 2 3 The light reflected back can prevent most of the light deviating from the direction of the illuminated surface area 21 from being reflected by the cylindrical mirror 25 to the periphery of the illuminated surface area 2 1 to prevent the illuminated surface area 2 1 The illuminance at the periphery is reduced to improve the illuminance distribution. However, for such a light irradiation device, as shown by the broken line P in FIG. 9, most of the light irradiated on the periphery of the illuminated surface area 21 is chuteed. The shape mirror 23 and the cylindrical mirror 25 are repeatedly reflected twice. However, each time the light emitted from the light source lamp 2 2 is reflected by the reflection mirror, its intensity becomes small, so it cannot be used efficiently. The light radiated from the light source lamp 2 2, so that the illuminance at the periphery of the illuminated surface area 21 1 cannot sufficiently reach the same illuminance compared with the illuminance at the central part. In recent years, in order to uniformly process an object in a short period of time, it is desirable to irradiate the illuminated surface area with a more uniform illuminance distribution. Therefore, only the reflection effect of the above-mentioned chute-shaped mirror is used, and extremely high illumination cannot be obtained. The problem of the uniformity of the degree distribution exists. [Problems to be Solved by the Invention] The present invention is invented in accordance with the above-mentioned problems, and an object of the present invention is to provide a light irradiation device that can efficiently use light emitted from a light source lamp and can be used in a region to be illuminated. The uniformity of the illuminance is extremely high on this paper. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -5- 558489 A7 B7. 5. Description of the invention ($ distribution. [Method to solve the problem] The present invention The light irradiation device includes a rod-shaped light source lamp arranged to face a predetermined area to be irradiated, and a reflector having a concave cross section in a vertical direction with respect to a tube axis of the light source lamp; and the reflector The light irradiating device is configured to reflect the light radiated from the light source lamp and irradiate the light onto the irradiated area, wherein the reflecting mirror is composed of a plurality of planar mirror elements, and each plane is The mirror element is arranged so that all the reflected light reflected by it will not be incident on other planar mirror elements, but will be irradiated on the entire area to be irradiated. [Function] According to the light irradiation device having the above structure, the light irradiating device includes: a plurality of flat mirror elements, and a mirror having a concave section in a vertical direction with respect to the tube axis of the light source lamp; All of the reflected light reflected by each of the planar mirror elements of the mirror will not be incident on other planar mirror elements, but will be irradiated on the entire area of the illuminated area, so it can be used efficiently. The light emitted from the light source lamp can obtain an extremely uniform illuminance distribution in the illuminated area. [Embodiments of the Invention] Hereinafter, the embodiments of the present invention will be described in detail. This paper scale applies the Chinese national standard ( CNS) A4 specification (210X297 mm) (Please read the notes on the back before filling out this page) Order printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs -6-558489 A7. _B7 V. Invention Description (4) (Please (Please read the precautions on the back before filling in this page.) Figure 1 is a key explanatory diagram showing an example of the light irradiation device of the present invention. Furthermore, this figure It is a cross-sectional view in the vertical direction with respect to the axis of the light source tube of the light irradiation device. In this light irradiation device, an irradiated surface area 1 having a necessary area is set in order to irradiate the entire object to be treated with a certain size with ultraviolet light 1 1; and rod-shaped light sources such as high-pressure mercury lamps or metal halide lamps (meta 1 ha 1 ide 1 am ρ) are configured to face the set illuminated surface area 1 1, and a reflector 1 3 is provided Of the light emitted from the light source lamp 12, the light emitted in a direction deviating from the illuminated surface area 11 is reflected to the illuminated surface area 11. The light source lamp 12 has its tube axis system arranged to the first The vertical direction of the paper surface in Fig. 1 extends; the length of the tube axis is at least longer than the vertical direction of the illuminated surface area 11 toward the paper surface. Since the length of the tube axis is approximately the same as the light emission length of the light source lamp 12, the illuminance distribution in the tube axis direction of the light source lamp 12 on the illuminated surface area 11 can be made uniform. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Line Economy printed a reflector 13, which is an imaginary plane (hereinafter, referred to as a "symmetric plane") perpendicular to the illuminated surface area 11 with respect to the tube axis containing the light source lamp 12, M, It has a symmetrical structure (left-right symmetry is formed in the first figure): and a cross section of the light source lamp 12 in a vertical direction is formed in a concave shape covering the light source lamp 12. The total length of the light source lamp 12 parallel to the reflector 13 is longer than the length of the light source lamp 12 at least. There is a gap between the lower end of the mirror 13 and the illuminated surface area 11. By this means, when the object to be processed is light-irradiated by a light irradiation device, the object to be processed can be carried into the surface to be irradiated without obstruction. 〉> 558489 A 7-B7_ V. Description of the invention (in area 11 g. In the example shown in this figure, the reflecting mirror 13 is located on the opposite side of the light irradiation port 14 to form a cooling air flow. Mouth 15. By this means, since the cooling air can circulate in the space surrounded by the reflector 13, the light source lamp 12 and the reflector 13 in the device can be illuminated by the light in motion, The cooling mirrors 13 are sequentially formed by the first planar mirror elements 1 3 a, 1 3 a ′, the second planar mirror elements 1 3 b, and the left and right sides of the symmetry plane M in FIG. 1, respectively. 1 3b 'and a third planar mirror element 1 3 c, 1 3 c'. Each of the planar mirror elements 13a, 13a ', 13b, 13b', 1 3c, 1 3c 'is arranged to : Used to reflect a part of the light emitted from the light source lamp 12 respectively, and the reflected light will not be incident The other planar mirror elements can be directly irradiated on the entire area of the illuminated surface region 11. Specifically, for a planar mirror element arranged on the right side of the symmetry plane M in FIG. 1 to form a right-side mirror The form and arrangement of 1 3 a, 1 3 b, and 1 3 c are described using Figures 2 to 5. In each figure, only the constituent elements of the mirror 13 are shown briefly, where the line segment AB indicates The cross-sectional shape in the vertical direction of the illuminated surface area 11 with respect to the tube axis of the light source lamp 12; and the circle Q represents the cross-sectional shape of the light emitting part of the light source lamp 12. h is drawn from the center of the light source lamp 12 to The vertical line of the illuminated surface area 11 is the bisector of the line segment AB. This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) (Please read the precautions on the back before filling this page)
、1T 線 經濟部智慧財產局員工消费合作社印製 -8- 558489 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（@ 在此，從被照射面區域1 1至光源燈1 2的距離，係 考慮該被照射面區域1 1所必要照度和照度分布、光源燈 1 2的外徑以及光照射裝置本身的大小，來加以設定。 (第1平面狀鏡元件1 3 a的形態和配置） 首先，如第2圖所示，求出直線A C (切線）的延長 線與直線η兩直線的交點A ’，上述延長線係從線段a B的 一端點A，與垂直線h交叉後，與圓Q相切；而上述直線 η係與線段A B平行；同時，求出直線B D (切線）的延 長線與直線η兩直線的交點B ’，上述延長線係從線段a B 的另一端點B，與垂直線h交叉後，與圓Q相切。 在此，直線η係考慮被照射面區域1 1所需的照度、 以及光源燈1 2等的冷卻效率，來決定其位置；但是，爲 了高效率地利用從光源燈1 2放射出來的光，理想爲設置 在靠近圓Q的位置處。 接著，如第3圖所示，求出通過點A ’而與圓Q相切之 直線A ’ E以及直線A A ’的延長線兩線所夾的角α的平分 線L i ;進而，如第4圖所示，求出以該平分線L :爲對稱 軸而與圓Q對稱的圓Qi。而且，求出通過點B而和圓Qi 相切之直線B F (與線段A B之夾角較大一側的切線）與 平分線L i兩線的交點G !。 將第1平面狀鏡元件1 3 a，配置成與上述所得到的 線段A · G : —致的位置處。 (請先閲讀背面之注意事項再填寫本頁} 裝泰 訂 線 本紙張尺度適用中國國家梂準（CNS )八4说格（2!〇X297公釐） -9 - 558489 A7 B7Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the 1T line -8-558489 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (@ Here, from the illuminated area 1 1 to the light source lamp 1 2 The distance is set in consideration of the necessary illuminance and illuminance distribution of the illuminated surface area 11, the outer diameter of the light source lamp 12, and the size of the light irradiation device itself. (The form of the first planar mirror element 1 3a And placement) First, as shown in FIG. 2, the intersection point A ′ of the extension line of the straight line AC (tangent line) and the straight line η is obtained. The extension line crosses from the end point A of the line segment a B to the vertical line h. Then, it is tangent to the circle Q; and the straight line η is parallel to the line segment AB. At the same time, the intersection point B ′ between the extension line of the straight line BD (tangent line) and the straight line η is obtained. An end point B, after crossing the vertical line h, is tangent to the circle Q. Here, the straight line η takes into consideration the required illuminance of the illuminated surface area 11 and the cooling efficiency of the light source lamp 12 to determine its position; However, in order to make efficient use of The emitted light is ideally placed near the circle Q. Next, as shown in Fig. 3, two straight lines A 'E and a straight line AA' extending from the point A 'and tangent to the circle Q are obtained. The bisector L i of the angle α included by the line; and, as shown in FIG. 4, a circle Qi that is symmetrical with the circle Q using the bisector L: as the axis of symmetry is obtained. The intersection point G of the line tangent to the circle BF (the tangent to the side with the larger angle between the line segment AB) and the bisector line L i. The first planar mirror element 1 3 a is arranged to be the same as the one obtained above. Line segment A · G:-At the same position. (Please read the precautions on the back before filling in this page.) The binding size of this paper is applicable to China National Standards (CNS) 8 and 4 grids (2.0 × 297 mm). ) -9-558489 A7 B7
(第2平面狀鏡元件l 3 b的形態和配置） 如第5圖所不’求出通過點g 1而和圓Q相切之直線 G 1 J (與線段A，G i之夾角較小一側的切線）與平分線 A G ^之延長線兩線所夾的角0的平分線l 2 ;進而，以此 平分線L 2作爲對稱軸，求出與圓q對稱的圓q 2 ;然後， 求出通過點B而和圓Q2相切之直線b K (與線段a B之夾 角較大一側的切線）與平分線L 2兩線的交點G 2。 將第2平面狀鏡元件1 3 b，配置成與上述所得到的 線段G : G 2 —致的位置處。 (第3平面狀鏡元件1 3 c的形態和配置） 利用與第2平面狀鏡元件1 3 b相同的手段，接著第 5圖所不的線段G 1 G 2而得到線段G 2 G 3。而將第3平面 狀鏡元件1 3 c配置成與線段G 2 G 3 —致。 然後’由於線段G 2 G 3的前端（第5圖中的點G 3 ) 靠近線段A B，所以利用與第2平面狀鏡元件1 3 b相同 的手段’而得到之接著線段G2G3的新線段，由於將會與 線段A B的延長線交叉，所以實際上並沒有接著第3平面 狀鏡元件1 3 c而設置平面狀鏡元件。但是，若根據從所 設定之被照射面區域1 1至光源燈1 2的距離，可以的話 ，也有接著第3平面狀鏡元件1 3 c而設置平面狀鏡元件 的情況。 在此，在第1圖中，被配置在對稱面Μ左側而形成左 側鏡的平面狀鏡元件1 3 a ·、1 3 b，、1 3 c ·，相對 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁} .裝病 訂 經濟部智慧財產局員工消費合作社印製 -10- 558489 A7 - B7 五、發明説明（3 於對稱面Μ，係被配置成與右側鏡成對稱的狀態。 再者，在所得到線段A ’ Β ’的位置處，並不配置平面 狀鏡元件，例如可以設置冷卻風流通口 1 5等。 在根據以上的形態所配置之各個平面狀鏡元件上，分 別映出1個光源燈1 2的像；結果，從被照射面區域1 1 的任一位置朝反射鏡1 3的方向看，確認有相當於構成該 反射鏡1 3之平面狀鏡元件總數的6個光源燈的像。因此 ，在被照射面區域1 1中，從任一位置處來看，包含實際 的光源燈1 2，看起來好像有7個光源存在。 在根據上述構造的光照射裝置中，從光源燈1 2所放 射出來的光的一部份，直接通過光照射口 1 4而照射在該 被照射面區域1 1上；其他的光，亦即朝向偏離被照射面 區域1 1方向而放射出來的光，首先入射至構成反射鏡 13之平面狀鏡元件13a、13a’、13b、13b’ 、：I3c、13c’的任一之上。然後，如第6圖所示，平 面狀鏡元件 13a、13a’、13b、13b’、13c 、1 3 c ’的各個反射光，外表看起來係從該平面狀鏡元件 13a、13a’、13b、13b’、13c、13c’ 上所映出之光源12a、12a’、12b、12b’、 1 2 c、1 2 c ’（在第6圖中，分別以虛線表示）所放射 出來的光，而分別形成獨立的光路，所有的光不會反射至 其他的平面狀鏡元件，而通過光照射口 1 4，重疊地照射 在被照射面區域1 1的整個區域上。 又，構成反射鏡1 3之右側之例如平面狀鏡元件 本紙張尺度適用中國國家標率（CNS ) A4規格（210Χ297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消费合作社印製 -11 - 558489 經濟部智慧財產局8工消費合作社印紫 一 A 7 · _ B7五、發明説明（$ 1 3 a的反射光、以及構成反射鏡1 3之左側的平面狀鏡 元件1 3 a ’的反射光，由於反射鏡1 3具有以對稱面Μ爲 基準的對稱構造，其反射光的照度分布也對稱，而在被照 射面區域1 1的整個區域內互相重疊補償；同樣的，被平 面狀鏡元件1 3 b和1 3 b ’反射的反射光、被平面狀鏡元 件1 3 c和1 3 c ’反射的反射光，也互相地補償。結果， 從反射鏡1 3照射在被照射面區域1 1上的反射光，在被 照射面區域1 1內，具有均勻性。 如此，從光源燈1 2所放射出來的光，其中一部份從 光源燈1 2直接照射在被照射面區域1 1上；又，其他的 光則經由反射鏡1 3而照射在被照射面區域1 1的整個區 域上。 若根據上述構造的光照射裝置，由於具有反射鏡1 3 ，而該反射鏡1 3係由連續之複數個平面狀鏡元件1 3 a 、13b、13c 以及 13a ’13b’、13c’ 所構成 ，且在相對於上述光源燈1 2之管軸的垂直方向剖面，呈 凹狀；所以從構成該反射鏡1 3之各個平面狀鏡元件 13a、13b、13c 以及 13a 13b’、13c’ 所反射出來的反射光，全部不會入射至其他的平面狀鏡元 件上，而會照射在被照射面區域1 1的整個區域內，所以 可以藉由反射鏡1 3，將從光源燈1 2所放射出來的光， 使其照射在被照射面區域1 1之整個區域內，而且，從各 平面狀鏡元件（反射鏡）所映出來的6個光源，由於分別 放射出具有與從光源燈1 2放射出之光的強度相同程度的 $紙張尺度適用中國國家標準（CNS ) A4規格( 210X29*7公釐） 一 •12- (請先閱讀背面之注意事項再填寫本頁) -裝秦 訂 線 558489 一 A7 - __B7_ 五、發明説明（士 光，所以可以高效率地利用從光源燈1 2所放射出來的光 ’而且在被照射面區域1 1上可以得到極高均勻性的照度 分布。 本發明的光照射裝置，例如，係對於被處理物表面上 所塗佈的保護膜、黏著劑、塗料、油墨或是光阻劑等，藉 由照射紫外光，來進行硬化、乾燥、熔融或是軟化處理的 光照射處理裝置，可以作爲將光照射在該被處理物表面上 的光源部來使用。在此情形下，藉由本發明之光照射裝置 所構成的光源部，在預先設定的被照射面區域內，能夠在 均勻的照度分布下，照射高強度的紫外光。 因此，可以加快處理配置在被照射面區域1 1上之被 處理物的處理速度，且可以均勻地處理被處理物全體。 以上，具體地說明關於本發明之實施形態，但是本發 明並不被限定於上述實施例，關於各部的具體構造可以做 種種的變更。 例如，構成反射鏡之平面狀鏡元件的總數，可以根據 被照射面區域和光源燈之間的距離、以及在被照射面區域 中之要被光照射處理的被處理物的高度，來加以適當地變 更。 又，如第7圖所示，若被處理物的搬送沒有問題，反 射鏡1 3也可以延長至被照射面區域1 1附近。延長部分 以虛線表示。 藉由此手段，從被照射面區域1 1和反射鏡1 3之間 漏出去的光，可以被往被照射面區域1 1方向反射，而可 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁} 、τ 經濟部智慧財產局員工消費合作社印製 -13- 558489 A7 B7(Form and arrangement of the second planar mirror element l 3 b) Find the straight line G 1 J passing through the point g 1 and tangent to the circle Q as shown in FIG. 5 (the angle between the line G and the line segment A and G i is small Tangent line on one side) and the extension line of the bisecting line AG ^, the bisector line l 2 of the angle 0 between the two lines; further, using the bisector line L 2 as the axis of symmetry, find the circle q 2 symmetrical to the circle q; then Calculate the intersection point G 2 of the line b K (tangent line on the side with the larger angle with the line segment a B) tangent to the circle Q 2 passing through the point B and the bisector L 2. The second planar mirror element 1 3 b is arranged at a position corresponding to the line segment G: G 2 obtained above. (Form and Arrangement of the Third Planar Mirror Element 1 3 c) A line segment G 2 G 3 is obtained by following the line segment G 1 G 2 not shown in FIG. 5 by the same method as the second plane mirror element 1 3 b. The third planar mirror element 1 3 c is arranged so as to coincide with the line segment G 2 G 3. Then "because the front end of the line segment G 2 G 3 (point G 3 in Fig. 5) is close to the line segment AB, the same method as the second planar mirror element 1 3 b is used" to obtain a new line segment followed by the line segment G2G3, Since it will cross the extension line of the line segment AB, a planar mirror element is not actually provided after the third planar mirror element 1 3 c. However, if the distance from the set illuminated surface area 11 to the light source lamp 12 is possible, a planar mirror element may be provided next to the third planar mirror element 1 3 c. Here, in FIG. 1, the planar mirror elements 1 3 a ·, 1 3 b, and 1 3 c · which are arranged on the left side of the symmetry plane M to form the left side mirror are applicable to the Chinese paper standard (CNS) ) A4 size (210X297mm) (Please read the notes on the back before filling out this page}. Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs -10- 558489 A7-B7 V. Description of the invention (3 in symmetry The plane M is arranged in a state symmetrical to the right-side mirror. In addition, no plane-shaped mirror element is arranged at the position of the obtained line segment A'B ', for example, a cooling air flow opening 15 can be provided. The image of each light source lamp 12 is reflected on each of the planar mirror elements arranged according to the above forms. As a result, when viewed from any position of the illuminated surface area 1 1 toward the reflection mirror 13, it is confirmed that An image of six light source lamps corresponding to the total number of planar mirror elements constituting the reflecting mirror 13. Therefore, in the illuminated surface area 11 from any position, the actual light source lamps 12 are included. It seems that there are 7 light sources. In the light irradiating device, a part of the light radiated from the light source lamp 12 is directly irradiated on the irradiated surface area 11 through the light irradiation port 14; other light, that is, is irradiated with a deviation from the direction The light emitted from the surface area 11 in the first direction is first incident on any of the planar mirror elements 13a, 13a ', 13b, 13b', I3c, and 13c 'constituting the reflector 13. Then, as shown in FIG. 6 As shown, the reflected light of each of the planar mirror elements 13a, 13a ', 13b, 13b', 13c, and 1 3c 'appears to be from the planar mirror elements 13a, 13a', 13b, 13b ', 13c, The light emitted from the light sources 12a, 12a ', 12b, 12b', 1 2c, and 1 2 c '(represented by dotted lines in Fig. 6) reflected on 13c' respectively form independent light paths. All the light will not be reflected to other flat mirror elements, but will be irradiated on the entire area of the illuminated surface area 11 through the light irradiation port 14 in an overlapping manner. Also, for example, a plane forming the right side of the reflection mirror 13 Lens element This paper size applies to China National Standard (CNS) A4 specification (210 × 297 (%) (Please read the notes on the back before filling out this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives-11-558489 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs of the 8th Industrial Cooperatives Cooperative Print A 7 · _ B7 V. Invention Explanation (The reflected light of $ 1 3 a and the reflected light of the planar mirror element 1 3 a ′ that constitutes the left side of the mirror 13 is reflected by the mirror 13 because it has a symmetrical structure based on the symmetry plane M. The illuminance distribution is also symmetrical, and overlaps and compensates each other in the entire area of the illuminated surface area 1 1; similarly, the reflected light reflected by the planar mirror elements 1 3 b and 1 3 b ', and the planar mirror element 1 3 c and 1 3 c 'reflected reflected light, also compensate each other. As a result, the reflected light irradiated onto the illuminated surface area 11 from the reflecting mirror 13 has uniformity in the illuminated surface area 11. In this way, a part of the light emitted from the light source lamp 12 is directly irradiated on the illuminated surface area 11 from the light source lamp 12; and other light is irradiated on the illuminated surface area through the mirror 13. 1 over the entire area. If the light irradiation device according to the above-mentioned structure has a reflecting mirror 13, the reflecting mirror 13 is composed of a plurality of continuous planar mirror elements 1 3 a, 13b, 13c, and 13a '13b', 13c ', And the cross section in the vertical direction with respect to the tube axis of the light source lamp 12 is concave; therefore, it is reflected from each of the planar mirror elements 13a, 13b, 13c and 13a 13b ', 13c' constituting the reflecting mirror 13. All of the reflected light will not be incident on other flat mirror elements, but will be irradiated on the entire area of the illuminated surface area 1 1. Therefore, it can be radiated from the light source lamp 12 through the reflector 1 3. The light radiates to the entire area of the illuminated surface area 11, and the six light sources reflected from the flat mirror elements (reflectors) are radiated from the light source 12 respectively. The intensity of the light is the same as the $ paper size. Applicable to the Chinese National Standard (CNS) A4 size (210X29 * 7mm). 1 · 12- (Please read the precautions on the back before filling this page)-Binding Line 558489 First A7-__B7_ V. Invention Ming (Shiguang), it is possible to efficiently use the light emitted from the light source lamp 12 'and to obtain an extremely uniform illumination distribution on the illuminated surface area 11. The light irradiation device of the present invention, for example, It is a light irradiation treatment device for curing, drying, melting or softening the protective film, adhesive, paint, ink or photoresist applied on the surface of the object to be treated. It can be used as a light source unit that irradiates light on the surface of the object to be processed. In this case, the light source unit constituted by the light irradiation device of the present invention can uniformly illuminate the area of the irradiation surface set in advance. Under the illuminance distribution, high-intensity ultraviolet light is irradiated. Therefore, the processing speed of the processing object disposed on the illuminated surface area 11 can be accelerated, and the entire processing object can be uniformly processed. The above specifically describes the present invention. Embodiments of the invention, but the invention is not limited to the above embodiments, and various changes can be made to the specific structure of each unit. The total number of plane mirror elements of the mirror can be appropriately changed according to the distance between the illuminated surface area and the light source lamp, and the height of the object to be processed by light irradiation in the illuminated surface area. As shown in FIG. 7, if there is no problem in the conveyance of the object to be processed, the reflecting mirror 13 can also be extended to the vicinity of the illuminated surface area 11. The extended portion is indicated by a dotted line. By this means, from the illuminated surface area 1 The light leaked between 1 and the reflector 1 3 can be reflected in the direction of the illuminated surface area 1 1, but this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the back Please fill in this page again for matters needing attention}, τ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy-13- 558489 A7 B7
五、發明説明（A 以有效地利用光。 ------1--：--裝· (請先閲讀背面之注意事項再填寫本頁) 又，平面狀鏡元件13a、13b、13c以及 1 3 a ’1 3b’、1 3 c’，可以將一個反射鏡1 3彎曲 來加以形成或是以各個平面狀鏡來構成。 【實施例】 以下，說明關於本發明的實施例，但是本發明並不被 限定於這些實施例。 <實施例1 > 根據第7圖所示的構造，製作出具有高度2 2 Om、 寬度2 2 0 m m大小之被照射面區域（1 1 )的光照射裝 置。 在此光照射裝置中，使用外徑2 2mm、全長2 5 0 m m、燈輸入功率7 k W的高壓水銀燈，來作爲光源燈（ 12):而將被照射面區域（1 1 )和光源燈（1 2 )的 中心之間的距離設定爲3 7 5 m m。 經濟部智慧財產局員工消費合作社印製 又，作爲反射鏡（1 3 )，係使用：具有第1平面狀 鏡元件（13a、13a’）、第2平面狀鏡元件（13b 、13b’）、第3平面狀鏡元件（13c、13c·)， 由總共6枚平面狀鏡元件所構成的反射鏡。在此反射鏡（ 1 3)中，在靠近光源燈的位置處，設置冷卻風流通口； 又，從反射鏡（1 3 )的外端至被照射面區域（1 1 )的 距離，設定爲1 5mm。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14- 558489 A7 B7 五、發明説明（也 將製作成的光照射裝置之光源燈（1 2 )開燈，測量 在被照射面區域（1 1 )內之任意1 3點的照度，根據其 最大値I M A X以及最小値I m i n，利用以下的公式（1 ) ’來調查照度分布的均勻度，其値爲±3·2%;由此可 知，若根據本發明的光照射裝置，在被照射面區域（1 1 )內，可以得到極高的均勻性。 公式（1 ) 均勻度（％ ) 土 最大値似-最小値La i 最大値1η αχ -最小値Im i X 1 Ο Ο 經濟部智慧財產局員工消費合作社印製 又，在被照射面區域（1 1 )中，測量垂直於光源燈 (1 2 )之管軸方向的方向之照度分布，將結果的一例表 示於第8圖。 此測量中之被照射面區域（1 1 )內的照度最大値 Ιμαχ爲 3 4 OmW/cm2、最小値 Imin爲 3 2 4 m W/ c m 2 ;由此可知，若根據此光照射裝置，可以高效 率地利用從光源燈（1 2 )所放射出來的光，而且’在被 照射面區域（1 1 )內，可以得到極高的照度分布均勻性 <比較例1 > 根據第9圖所示的構造，製作出具有與實施例1同樣 的被照射面區域的光照射裝置。 在此光照射裝置中，使用與實施例1相同的高壓水銀 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公嫠）V. Description of the invention (A for effective use of light. ------ 1-:-install · (Please read the precautions on the back before filling out this page) Also, the flat mirror elements 13a, 13b, 13c And 1 3 a '1 3b', 1 3 c ', one reflecting mirror 13 can be formed by bending, or it can be formed by each flat mirror. [Embodiment] Hereinafter, an embodiment of the present invention will be described, but The present invention is not limited to these examples. ≪ Example 1 > An irradiated surface region (1 1) having a height of 2 2 m and a width of 220 mm was produced based on the structure shown in FIG. 7. In this light irradiation device, a high-pressure mercury lamp with an outer diameter of 22 mm, a total length of 250 mm, and a lamp input power of 7 k W is used as the light source lamp (12): the illuminated surface area (1 The distance between 1) and the center of the light source lamp (1 2) is set to 3 7 5 mm. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and used as a reflector (1 3), it has a first planar shape Mirror element (13a, 13a '), second planar mirror element (13b, 13b'), third planar mirror element (1 3c, 13c ·), a reflecting mirror composed of a total of 6 planar mirror elements. In this reflecting mirror (1 3), a cooling air flow opening is provided near the light source lamp; and from the reflecting mirror ( 1 3) The distance from the outer end to the illuminated surface area (1 1) is set to 15 mm. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -14- 558489 A7 B7 V. Description of the invention (The light source lamp (12) of the manufactured light irradiation device is also turned on, and the illuminance at any 13 points in the illuminated surface area (1 1) is measured. According to its maximum 値 IMAX and minimum 値 I min, use The following formula (1) 'is used to investigate the uniformity of the illuminance distribution, where 値 is ± 3.2%; from this, it can be seen that if the light irradiation device according to the present invention can be obtained in the illuminated surface area (1 1), Extremely high uniformity. Formula (1) Uniformity (%) Soil maximum resemblance-minimum 値 La i maximum 値 1η αχ-minimum 値 Im i X 1 Ο Ο In the illuminated surface area (1 1), measure the tube axis perpendicular to the light source lamp (1 2) The illuminance distribution in the direction is shown in Fig. 8. An illuminance in the irradiated surface area (1 1) in this measurement is the maximum μΙμαχ is 3 4 OmW / cm2, and the minimum 値 Imin is 3 2 4 m W / cm 2; From this, it can be seen that if this light irradiation device can efficiently use the light emitted from the light source lamp (1 2), and 'in the area of the illuminated surface (1 1), extremely high Uniformity of Illumination Distribution < Comparative Example 1 > A light irradiation device having the same illuminated surface area as in Example 1 was manufactured based on the structure shown in FIG. In this light irradiation device, the same high-pressure mercury as in Example 1 is used. The paper size is in accordance with China National Standard (CNS) A4 (210X297 cm).
線 (請先閲讀背面之注意事項再填寫本頁) -15- 558489 A7 - B7_ 五、發明説明（七 燈來作爲光源燈；又，被照射面區域和光源燈的中心之間 的距離設定爲與實施例1相同。 又，作爲反射鏡，使用高度3 0 m m之溜槽狀鏡、以 及高度爲2 7 Omm，其端部與被照射面區域的距離設定 爲1 5 in in的筒形鏡。 將製作成的光照射裝置之光源燈開燈，利用與實施例 1相同的方法，來調查在被照射面區域內之照度分布的均 勻性，其値爲± 1 5 %。 【發明之效果】 若根據本發明的光照射裝置，由於具有反射鏡，而該 反射鏡係由複數個平面狀鏡元件所構成，且在相對於上述 光源燈之管軸的垂直方向剖面，呈凹狀；且藉由構成該反 射鏡之各個平面狀鏡元件所反射出來的反射光，不會入射 至其他平面狀鏡元件上，而照射在被照射面區域的整個區 域上，所以能夠高效率地利用從光源燈放射出來的光，而 且可以在被照射面區域內，可以得到極高均勻性的照度分 【圖面之簡單說明】 第1圖係顯示本發明之光照射裝置之一例的槪要之說 明用槪要圖。 第2圖係表示在本發明之光照射裝置中的被照射面區 域和光源燈的簡略化說明圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ------1——,——— (請先閲讀背面之注意事項再填寫本頁) 、訂 線 經濟部智慧財產局員工消費合作社印製 -16- 558489 — A7 · _ B7 五、發明説明（也 第3圖係用來說明本發明之光照射裝置之反射鏡的構 造之第1說明圖。 第4圖係用來說明本發明之光照射裝置之反射鏡的構 造之第2說明圖。 第5圖係用來說明本發明之光照射裝置之反射鏡的構 造之第3說明圖。 第6圖係表示第1圖之光照射裝置的光源燈開燈狀態 的說明圖。 第7圖係表示本發明之光照射裝置的其他例之槪要的 說明用槪要圖。 第8圖係表示在本發明之光照射裝置的被照射面區域 中，相對於光源燈之管軸方向的垂直方向之照度分布圖。 第9圖係表示習知光照射裝置之槪要的說明用槪要圖 〇 【圖號說明】 1 1 :被照射面區域 1 2 :光源燈 12a、12a’、12b、12b，、12c、12c’ :在平面狀鏡元件上所映出來的光源 1 3 :反射鏡 13a、13a，、13b、13b，、13c、13c· :平面狀鏡元件 1 4 :光照射口 ^紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） " -17- (請先閱讀背面之注意事項再填寫本頁)(Please read the precautions on the back before filling this page) -15- 558489 A7-B7_ V. Description of the invention (seven lamps as the light source lamp; Also, the distance between the illuminated surface area and the center of the light source lamp is set to It is the same as Example 1. Also, as the reflecting mirror, a trough-shaped mirror having a height of 30 mm and a cylindrical mirror having a height of 27 mm and a distance between the end portion and the illuminated surface area were set to 15 in in. The light source lamp of the manufactured light irradiation device was turned on, and the uniformity of the illuminance distribution in the area of the illuminated surface was investigated by the same method as in Example 1. Its 値 was ± 15%. [Effect of the Invention] If the light irradiation device according to the present invention has a reflecting mirror, the reflecting mirror is composed of a plurality of flat mirror elements and has a concave shape in a cross section in a vertical direction with respect to the tube axis of the light source lamp; and The reflected light reflected by each of the planar mirror elements constituting the reflector will not be incident on other planar mirror elements, but will be irradiated on the entire area of the illuminated surface area. Therefore, the light source lamp can be efficiently used. The radiated light can be obtained in the area of the illuminated surface with extremely high uniformity. [Simplified description of the drawing] FIG. 1 is an important explanation for showing an example of the light irradiation device of the present invention. The figure 2 is a simplified explanatory diagram showing the illuminated surface area and the light source lamp in the light irradiation device of the present invention. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) --- --- 1 ——, ——— (Please read the notes on the back before filling this page), printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-16- 558489 — A7 · _ B7 V. Description of the invention ( Fig. 3 is a first explanatory diagram for explaining the structure of the mirror of the light irradiation device of the present invention. Fig. 4 is a second explanatory diagram for explaining the structure of the mirror of the light irradiation device of the present invention. Fig. 5 is a third explanatory diagram for explaining the structure of the reflecting mirror of the light irradiation device of the present invention. Fig. 6 is an explanatory diagram showing the light-on state of the light source lamp of the light irradiation device of Fig. 1. Fig. 7 shows Other examples of the light irradiation device of the present invention The essential explanation diagram is shown in FIG. 8. FIG. 8 is a diagram showing the illuminance distribution in the vertical direction with respect to the tube axis direction of the light source lamp in the area of the illuminated surface of the light irradiation device of the present invention. Outline of the general description of the conventional light irradiation device. [Illustration of drawing number] 1 1: Illuminated surface area 1 2: Light source lamps 12a, 12a ', 12b, 12b, 12c, 12c': In a flat mirror element The light source 1 3 shown above: reflectors 13a, 13a, 13b, 13b, 13c, 13c ·: flat mirror element 1 4: light irradiation port ^ paper size applies Chinese National Standard (CNS) A4 specification (210X297 Mm) " -17- (Please read the notes on the back before filling this page)
、?T 經濟部智慈財產局員工消費合作社印製 558489 ~ A7 B7 五、發明説明（4 1 5 :冷卻風流通口 2 1 :被照射面區域 2 2 :光源燈 2 3 :溜槽狀鏡 2 5 :筒形鏡 (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印髮 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -18-Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs of the Ministry of Economic Affairs 558489 ~ A7 B7 V. Description of the invention (4 1 5: Cooling air circulation opening 2 1: Illuminated area 2 2: Light source lamp 2 3: Chute-like mirror 2 5: Cylindrical mirror (please read the precautions on the back before filling this page) Order the paper printed and issued by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is applicable to the Chinese National Standard (CNS) A4 (210X 297 mm) -18-