TW552354B - Hydraulic circuit device - Google Patents

Hydraulic circuit device Download PDF

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Publication number
TW552354B
TW552354B TW091113287A TW91113287A TW552354B TW 552354 B TW552354 B TW 552354B TW 091113287 A TW091113287 A TW 091113287A TW 91113287 A TW91113287 A TW 91113287A TW 552354 B TW552354 B TW 552354B
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TW
Taiwan
Prior art keywords
pressure
valve
proportional valve
supply
flow
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Application number
TW091113287A
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Chinese (zh)
Inventor
Junichi Miyagi
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Daikin Ind Ltd
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • F15B21/08—Servomotor systems incorporating electrically operated control means
    • F15B21/087—Control strategy, e.g. with block diagram
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/03—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type with electrical control means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/16—Servomotor systems without provision for follow-up action; Circuits therefor with two or more servomotors
    • F15B11/161—Servomotor systems without provision for follow-up action; Circuits therefor with two or more servomotors with sensing of servomotor demand or load
    • F15B11/165—Servomotor systems without provision for follow-up action; Circuits therefor with two or more servomotors with sensing of servomotor demand or load for adjusting the pump output or bypass in response to demand
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/05—Pressure after the pump outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205—Systems with pumps
    • F15B2211/2053—Type of pump
    • F15B2211/20538—Type of pump constant capacity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40515—Flow control characterised by the type of flow control means or valve with variable throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40553—Flow control characterised by the type of flow control means or valve with pressure compensating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/41—Flow control characterised by the positions of the valve element
    • F15B2211/413—Flow control characterised by the positions of the valve element the positions being continuously variable, e.g. as realised by proportional valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/415—Flow control characterised by the connections of the flow control means in the circuit
    • F15B2211/41581—Flow control characterised by the connections of the flow control means in the circuit being connected to an output member and a return line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/42—Flow control characterised by the type of actuation
    • F15B2211/426—Flow control characterised by the type of actuation electrically or electronically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/505—Pressure control characterised by the type of pressure control means
    • F15B2211/50563—Pressure control characterised by the type of pressure control means the pressure control means controlling a differential pressure
    • F15B2211/50572—Pressure control characterised by the type of pressure control means the pressure control means controlling a differential pressure using a pressure compensating valve for controlling the pressure difference across a flow control valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/515—Pressure control characterised by the connections of the pressure control means in the circuit
    • F15B2211/5157—Pressure control characterised by the connections of the pressure control means in the circuit being connected to a pressure source and a return line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/52—Pressure control characterised by the type of actuation
    • F15B2211/528—Pressure control characterised by the type of actuation actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/605—Load sensing circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/63—Electronic controllers
    • F15B2211/6303—Electronic controllers using input signals
    • F15B2211/6306—Electronic controllers using input signals representing a pressure
    • F15B2211/6309—Electronic controllers using input signals representing a pressure the pressure being a pressure source supply pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/63—Electronic controllers
    • F15B2211/6303—Electronic controllers using input signals
    • F15B2211/632—Electronic controllers using input signals representing a flow rate
    • F15B2211/6323—Electronic controllers using input signals representing a flow rate the flow rate being a pressure source flow rate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/665—Methods of control using electronic components
    • F15B2211/6655—Power control, e.g. combined pressure and flow rate control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/665—Methods of control using electronic components
    • F15B2211/6656—Closed loop control, i.e. control using feedback

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

The objective is to improve the controlling performance of the supplying amount and pressure of hydraulic oil while suppressing an increase in a cost, and expand a controllable area of pressure to a zero point, in a hydraulic circuit devices 2, 20 wherein a solenoid proportional valve 6 is interposed in a supplying passage 5 of hydraulic oil to a main machine hydraulic circuit 1. The solenoid proportional valve 6 is provided with a supply position supplying hydraulic oil to the main machine side, a discharge position discharging the hydraulic oil from the main machine side, and a stop position stopping supplying/discharging of the hydraulic oil. A pressure sensor 10 detecting the pressure of hydraulic oil of a downstream supplying passage 5b and a position sensor 11 detecting a spool position (opening) of the solenoid proportional valve 6 are provided, the opening of the solenoid proportional valve 6 is feedback controlled by a digital controller 12 so as to make the supplying amount Q and the supplying pressure P of the hydraulic oil to the main machine side become command values Qi, Pi, on the basis of signals from the pressure sensor 10 and the position sensor 11.

Description

552354 A7 B7 五、發明説明（J) 【技術領域】 (請先閲讀背面之注意事項再填寫本頁) 本發明是關於一種液壓迴路裝置爲了用以驅動機械裝 置的液壓致動器，特別屬於爲了適當控制該致動器的動作 速度及作動力的作動液流量及壓力控制的技術領域。 【背景技術】 以往做爲這種液壓迴路裝置，例如日本特開平丨0 -3 7906號公報所揭示，已知具備有：對液壓致動器爲了控 制作動油的供給流量的電磁比例閥（以下，也簡稱流量比 例閥）' 及將該流量比例閥的前後差壓能保持略呈固定加 以動作的壓力補償迴路。另外，爲了更提高控制性，除了 如前述的流量比例閥之外並內藏有爲了調整液壓的電磁比 例閥（以下，也簡稱壓力比例閥），並將分別的比例閥使 用專用的驅動迴路能加以控制的油壓迴路裝置。 經濟部智慧財i^7員工消費合作社印製 前述後者的油壓迴路裝置，是如圖6 —例所示，在供 給通路（5 )介設有流量比例閥（6 )供給作動油到主機油 壓迴路（1 )的油壓致動器，並在該流量比例閥（6 )的下 流側的A入口連接前述致動器，另外在上流側的P入口 例如連接定容量型泵（3 )。又，從前述流量比例閥（6 ) 的上流側及下流側分別承受嚮導壓，並設有差壓補償閥（ 7 )使此等差壓能形成略呈固定由上流側的供給通路（5a )使作動油分流於T入口。 另外，在下流側的控制通路（1 5 )設有小孔（1 7 )對 前述差壓補償閥（7 )從流量比例閥（6 )的下流側引導嚮 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 552354 A7 B7 五、發明説明（2) (請先閲讀背面之注意事項再填寫本頁) 導壓，並在該小孔（17 )及差壓補償閥（7 )之間的控制 通路（1 5 )，連接有壓力比例閥（8 )由此使作動油溢流 用以調整下流側的嚮導壓。而且，使前述流量比例閥（6 )及壓力比例閥（8 )的開放程度分別使用不同的電流驅 動器（9、9)形成所控制。 如此構成習知技術的油壓迴路裝置的作動，是根據致 動器的動作狀態自動地轉換成流量控制模式和壓力控制模 式。即，例如，對於供給作動油到主機的油壓汽缸的情形 加以說明，則使該油壓汽缸進行衝程時，是使流量比例閥 (6 )的前後差壓利用差壓補償閥（7 )維持成略呈固定的 狀態下，藉由該流量比例閥（6 )開放程度的控制對油壓 汽缸用以調整油量的供給，並用以控制其動作速度（流量 控制模式）。此時，由泵（3 )吐出的作動油是通過P入 口、流量比例閥（6 ) 、A入口被供給到油壓汽缸，同時 剩餘的作動油是由差壓補償閥（7 )通過T入口分流到油 槽（4 )。 經濟部智慧財產局員工消費合作社印製 而且，使汽缸達到衝程終端，則使下流側的供給通路 (5 b )的油壓急速上昇，並使該油壓超過壓力比例閥（8 )的設定壓力時，該壓力比例閥（8 )、及差壓補償閥（7 )以及小孔（1 7 )是發揮做爲所謂控制式電磁比例溢流閥 的功能，形成用以阻止超此以上油壓的上昇。此時下流側 控制通路（1 5 )的嚮導壓，是藉由壓力比例閥（8 )的溢 流壓的控制可加以變更，藉此用以變更差壓補償閥（7 ) 的溢流壓，可控制泵（3 )的吐出壓進而對油壓汽缸的供 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29?公釐） -5- 552354 A7 B7 五、發明説明（3) 給壓力（壓力控制模式）。 (請先閲讀背面之注意事項再填寫本頁) 【發明所欲解決之問題】 但是，如前述習知技術的油壓迴路裝置的情形，由於 形成對致動器的作動油的供給流量及壓力皆直接反應電磁 閥（6、8 )的電磁特性，所以從電流驅動器（9 )對輸出 電流値的作動油的流量和壓力變化是形成具有非線形的滯 後現象（hysteresis)(參考第4圖的虛線圖），要取得 作動油的流量及壓力控制中的完全精確度是有所困難。另 外，不使用電感應器因爲採用開放式控制，所以對指令値 變化也有不能過度提高感應速度的問題。 進而，對於作動油的供給壓力控制會有關於低壓側的 控制界限問題。即，前述習知技術例，對壓力比例閥（8 )即使將電流値下降到零壓力爲止，但差壓補償閥（7 ) 經濟部智慈財產苟員工消費合作社印製 的溢流壓由於僅下降到相當於彈簧構件的彈推力的預定壓 爲止，所以對致動器的供給壓是不能比前述預定壓更低。 換句話說，習知例的構造，是由於利用溢流閥加以壓力控 制’所以會存在有可控制油壓的下限値（以下，也稱爲最 低嚮導壓力），不能壓力控制在此以下的低壓。關於這一 點’例如射出成形機的情形爲了保護模具設定有低壓型夾 緊製程，該製程是比習知技術的最低嚮導壓力使用更低壓 力來控制。即，目前爲止的油壓迴路裝置，是對於壓力控 制也期待加強改善。 本發明是有鑑於以上諸點而發明，其目的在於提供一 本紙張尺度適用中國國家標準（ CNS ) A4規格（210X^7公釐) ' 一~ -6 - 552354 A7 _B7_ _ 五、發明説明（4) (請先閲讀背面之注意事項再填寫本頁) 種液壓迴路裝置（2、20 )，是在供給通路（5 )設有電磁 比例閥（6 )供給作動液到液壓致動器，能用以控制作動 液的供給流量及壓力的液壓迴路裝置中，用以改善其控制 精確度和感應性，同時特別對於供給液壓是無最低嚮導壓 力將壓力可控制範圍擴大到略呈零壓力點爲止，除此之外 ，提供一種閥構造可抑制成本的提高。 【發明揭示】 本發明爲了解決前述課題而採用以下的手段。 第1發明，其前提是提供一種液壓迴路裝置（2、20 )，針對在供給作動液到液壓致動器的供給通路（5 )， 介設用以調整作動液的供給流量的電磁比例閥（6 )，並 且設有從該電磁比例閥（6 )的上流側及下流側分別承受 嚮導壓，使此等差壓一定地由上流側的供給通路（5 a )使 作動液分流到油槽（4 )的差壓補償閥（7 )。 經濟部智慈財產苟員工消費合作社印製 而且，前述電磁比例閥（6 )，具備有：供給作動液 到致動器的供給位置之外，至少還具有從該致動器排出作 動液的排出位置；及檢測前述下流側的供給通路（5b )的 作動液壓並輸出電氣信號的壓力感測器（10 );及檢測前 述電磁比例閥（6 )的筒管位置並輸出電氣信號的位置感 測器（11 );及分別承受從前述壓力感測器（1 0 )及位置 感測器（1 1)所輸出的信號，並對前述致動器使作動液的 供給流量或供給液壓形成控制指令値地，回饋控制述電磁 比例閥（6 )開放程度的控制器（12 )。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 552354 A7 __ B7 _ 五、發明説明（5) (請先閲讀背面之注意事項再填寫本頁) 若依據本發明，則致動器的動作中，是使電磁比例閥 (6 )的前後差壓利用差壓補償閥（7 )的功能維持略呈固 定的狀態下，藉由控制器（1 2 )來控制該電磁比例閥（6 )的筒管位置，據此來控制供給流量到致動器（流量控制 模式）。此時，使電磁比例閥（6 )的實際筒管位置利用 位置感測器（11 )所檢測，並根據其檢測結果使回饋控制 被進行，所以作動液的流量控制在精確度、感應性皆非常 的高。另外，藉由回饋控制使電磁的非線形特性在外觀上 ，可進行吸收，所以將作動液的流量控制特性可線形化且 無滯後現象的產生。 經濟部智慧財產苟員工消費合作社印製 另外，使致動器達到衝程終端若形成完全無動作狀態 ，則隨著負荷的增加使下流側的供給通路（5b )的液壓也 加大，這是利用壓力感測器（1 0 )所檢測，並根據該檢測 値藉由控制器（1 2 )使電磁比例閥（6 )的回饋控制被進 行（壓力控制模式）。即，使電磁比例閥（6 )在供給位 置時，使用壓力感測器（1 0 )根據檢測値及壓力指令値的 偏差藉由電磁比例閥（6 )開放程度（筒管位置）的控制 用以調整供給流量，另外，使電磁比例閥（6 )在排出位 置時是由下流側的供給通路（5b )藉由調整排出量，最後 使該供給通路（5b )的液壓可維持壓力指令値用以控制筒 管位置。該壓力控制模式中也與前述流量控制模式同樣， 藉由回饋控制達成控制精確度、感應性、電磁的非線形特 性等的改善。另外，如前述將電磁比例閥（6 )轉換成排 出位置，從致動器排出作動液，對該致動器可將供給液壓 本紙張尺度適用中國國家標準（CNS〉A4規格（210X297公釐） 一 552354 A7 _B7_ 五、發明説明（6) 下降到零壓力爲止。 (請先閱讀背面之注意事項再填寫本頁) 而且，若依據前述的發明，則比起習知技術的構成， 形成必要新的壓力感測器（1 〇 )及位置感測器（π )，但 相對地，形成不用壓力比例閥（8 )及其電流驅動電路， 所以由於採用電氣感測器成本的增加也可相抵。 第2發明，液壓迴路裝置（2、20 )的控制器（1 2 ) ，是具備有：根據從位置感測器（11 )的信號求出對致動 器的實際供給流量，同時從流量指令値減去該實際供給流 量而算出流量偏差的流量偏差演算部（1 2b );及根據從壓 力感測器（10 )發出的信號求出對致動器的作動液的實際 供給液壓，同時從壓力指令値減去該實際供給流量而算出 壓力偏差的壓力偏差演算部（12a);及選擇前述流量偏差 及壓力偏差之中偏差値較小的偏差，並根據該選擇的偏差 算出電磁比例閥（6 )的目標筒管位置的PQ選擇部（1 2c );及使成爲前述PQ選擇部（12c)所算出的目標位置地 ，在電磁比例閥（6 )的筒管（6a )的電磁閥（6b )外加 電流的電流驅動器（12d)。 經濟部智慈財產局員工消費合作社印製 若依據本發明，則藉由流量偏差演算部（1 2b )使作 動液的實際供給流量及流量指令値之間的流量偏差被演算 ，並且藉由壓力偏差演算部（1 2a )使作動液的實際供給 液壓及壓力指令値之間的壓力偏差被演算。而且’使其實 際供給流量或實際供給液壓超過控制指令値時’則使超過 較大的流量或壓力，另外，都在指令値以下的話’則使最 接近於指令値的流量或壓力藉由PQ選擇部（1 2c )加以 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -9 - 552354 A7 B7 五、發明説明（7 ) (請先閲讀背面之注意事項再填寫本頁) 選擇。即，PQ選擇部（1 2c )，是用以判斷壓力或流量超 過指令値則屬危險的狀態，並將其危險的程度分別從流量 及壓力的偏差加以判斷，藉由選擇危險程度較大的偏差， 可實現前述第1發明的作用效果。 第3發明，液壓迴路裝置（2、20 )的差壓補償閥（7 )，是具有將其閥體（7a )彈推至關閉側的彈簧構件（7b )，並使該閥體（7a )在關閉側承受來自電磁比例閥（6 )的下流側的嚮導壓，另外使閥體（7a )在開放側承受來 自電磁比例閥（6 )的上流側的承受嚮導壓。並且，在將 嚮導壓從前述電磁比例閥（6 )的下流側引導至差壓補償 閥（7 )的下流側的控制通路（1 5 )，配設用以節流作動 液的流動的小孔（1 7 )，另外，在該小孔（1 7 )及差壓補 償閥（7 )之間的控制通路（1 5 )連接控制溢流閥（1 8 ) 〇 若依據本發明，則假定，電磁比例閥（6 )的筒管（ 6a )由於控制器（1 2 )的電氣性故障或作動液的灰塵阻塞 等即使在供給位置的地方不能流動，但下流側供給通路（ 經濟部智慧財產^7g (工消費合作社印製 5 b )的液壓在超過控制溢流閥（1 8 )的設定壓時，則使控 制溢流閥（1 8 )、及差壓補償閥（7 )以及小孔（17 )會 發揮所謂做爲控制式溢流閥的功能，阻止前述下流側供給 通路（5b )中的液壓增大。另外，該差壓補償閥（7 )的 閥體（7a )的開閉動作時，使下流側的控制通路（丨5 )中 的作動液流動從小孔（1 7 )受到通過抵抗，在前述閥體（ 7 a )的動作賦予適度的制動，可達成穩定化的效果。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29*7公釐） —- -10 - 552354 A7 _ B7__ 五、發明説明（8) (請先閱讀背面之注意事項再填寫本頁) 但是，如此在控制通路（1 5 )配設小孔（1 7 )用以限 制作動液的流動，則會形成使差壓補償閥（7 )的閥體（ 7a)的動作速度下降，所以對致動器使作動液的供給流量 增加時會引起感應性下降的疑慮。即’爲了增加對致動器 的作動液供給流量將電磁比例閥（6 )的開放程度進行加 大，則因此使該電磁比例閥（6 )的前後差壓暫時性變小 ，而使差壓補償閥（7)的閥體（7a)關閉。詳細而言’ 朝向下流側的控制通路（1 5 )中的差壓補償閥（7 )使作 動液流動，形成使該差壓補償閥（7 )的閥體（7a )移動 到關閉側，但畢竟關閉閥體（7a )的力量是彈簧構件（7b )的彈推力程度的力量，而且，如前述使作動液的流動藉 由小孔（17 )被限制的結果，會使差壓補償閥（7 )的閥 體（7a )的關閉動作遲緩，因此，對電磁比例閥（6 )由 於供給流量的增大產生感應遲緩。 經濟部智慈財產局員工消費合作社印製 考慮到如前述過渡的遲緩，則前述第3發明的液壓迴 路裝置（20 )中，在下流側的控制通路（1 5 )，用以直線 排列地配置第1小孔（2 1 )及比第1小孔節流程度更強的 第2小孔（22 )，並且在分流該第2小孔（22 )的通路（ 23)，容許朝向差壓補償閥（7)作動液的流動之外，配 設用以阻止其相反的流動的反止閥（24 )爲較佳（第4發 明）。 若如此，則例如，對致動器使作動液的供給流量增大 ，將電磁比例閥（6 )的開放程度放大時，則使下流側控 制通路（1 5 )中的作動液形成朝向差壓補償閥（7 )流動 本纸張尺度適用中國國家標準(CNS ) A4規格（210X 297公釐) ' -11 - 552354 A7 _____B7__ 五、發明説明（9) (請先閲讀背面之注意事項再填寫本頁) ’但該作動液的流動，是通過節流程度小的第1小孔（21 )，而節流程度強的第2小孔（22 )形成進行分流，所以 將通過抵抗相對性的變小形成可立刻關閉差壓補償閥（7 )的閥體（7a)，藉此，對致動器可使作動液的供給流量 立刻增大。 經濟部智慈財產局員工消費合作社印製 另外，對致動器減少作動液的供給流量時，則形成使 電磁比例閥（6 )的開放程度變小，但此時該電磁比例閥 (6 )的上流側的液壓是急速的變高，使極高的液壓在差 壓補償閥（7)的閥體（7a)產生作用，並形成使該閥體 (7a )呈開作動狀態。此時，下流側控制通路（1 5 )是從 差壓補償閥（7)朝向下流側供給通路（5b)使作動液流 動，該流動是從前述第1及第2兩方的小孔（21、22 )形 成受到通過抵抗。可是，如前述在差壓補償閥（7 )的閥 體（7a )使極高的上流側嚮導壓產生作用，所以使下流側 控制通路（1 5 )中的作動液流動即使受到限制，但差壓補 償閥（7 )的閥體（7a )是非常迅速呈開作動狀態，該結 果，在供給流量減少時是不會形成感應遲緩的問題，反而 ’使下流側控制通路（1 5 )的流動藉由第2小孔（22 )充 分的被節流，使差壓補償閥（7 )的穩定動作被保持。 即，若依據前述第4發明，則藉由配設在下流側控制 通路（15 )的小孔（21、22 )，將差壓補償閥（7 )的閥 體（7a )呈開動作狀態，限制在不損及其感應性的程度， 可用以確保穩定性，另外，該閥體（7a )的閉動作狀態是 不用限制也可確保感應性。因此，對致動器將作動液的供 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -12- 552354 A7 _ B7 五、發明説明（1〇) 給流量的穩定性及感應性以高水平可並存。 (請先閲讀背面之注意事項再填寫本頁) 第5發明，是將液壓致動器’特別規定爲了驅動射出 成形機。 即，一般而言，射出成形機的致動器情形，是因應成 型品的形狀和材料的不同並對應於廣汎的成形條件，尙且 被要求高度的再現性，所以藉由前述第1發明的液壓迴路 裝置（2、20)極爲有效可提高致動器的動作速度及作動 力的控制精確度，因此，可實現成形品質大幅度的提高。 另外，若依據前述第1發明，則對致動器可將作動液 的供給壓力下降到零壓力爲止加以控制，所以在射出成形 機中的低壓型夾緊製程所要求的低壓也可充分對應。進而 ，例如前述第4發明所述若將作動液的供給流量可增大使 感應性佳的話，則利用射出成形機可容易成形薄片的成形 品，而且也可縮短成形循環的製程。從如此的觀點而言， 適用於射出成形機的情形本發明的作用效果也極爲有效。 【發明的效果】 經濟部智慧財產局員工消費合作社印製 若依據本發明，則液壓迴路裝置（2、20 )中在供給 通路（5 )介設電磁比例閥（6 )供給作動液到液壓致動器 ，並且設有差壓補償閥（7 )分別從該電磁比例閥（6 )的 上流側及下流側承受嚮導壓，使此等差壓能形成固定從上 流側供給通路（5a )使作動液分流時，在前述電磁比例閥 (6 )’追加排出位置從致動器排出作動液，並且設有： 檢測該電磁比例閥（6 )下流側的供給通路（5b )的作動 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐)~ 一 -13 - 552354 A7 _B7_ 五、發明説明（^ (請先閲讀背面之注意事項再填寫本頁) 液壓的壓力感測器（10 );及檢測電磁比例閥（6 )的筒管 位置的位置感測器（Π );而根據從此等感測器的輸出信 號用以回饋控制電磁比例閥（6 )的筒管位置（開放程度 )，所以可極爲高精確度控制作動液的供給流量及壓力。 而且，藉由回饋控制可打消外觀上電磁的非線形特性 ，所以可將作動液的供給流量及壓力的控制特性線形化， 進而，將電磁比例閥（6 )的開閉速度比習知技術更提高 ，流量感應性也可改善。又，若將電磁比例閥（6 )轉換 成排出位置，則由於可從致動器排出作動液，所以將嚮導 壓下降到零壓力爲止可失掉不能控制的範圍。 另外，習知技術中成爲必要的壓力比例閥（8 )及其 電流驅動電路由於形成不要，所以可相抵感測器的追加所 提高的成本。 經濟部智慧財產局員工消費合作社印製 若依據第2發明，則藉由設於液壓迴路裝置（2、20 )的控制器（1 2 )的流量偏差演算部（1 2b )、壓力偏差 演算部（12a)、及PQ選擇部（12c)等，因應作動液的 實際供給狀態進行電磁比例閥（6 )的回饋控制，可充分 獲得前述第1發明的效果。 若依據第3發明，則對液壓迴路裝置（2、20 )的差 壓補償閥（7 )從電磁比例閥（6 )的下流側引導嚮導壓並 在下流側的控制通路（1 5 )，設有小孔（1 7 )及控制溢流 閥（1 8 )用以節流作動液的流動，所以萬一控制器（1 2 ) 和電磁比例閥（6 )故障時也可獲得充分的安全性，並且 在前述差壓補償閥（7 )的閥體（7a )的動作賦予適當的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14 - 552354 A7 B7 五、發明説明（12) 制動，可將其動作穩定化。 若依據第4發明，則做爲前述第3發明的小孔’是用 以直線排列配置相互節流程度不同的第1及第2小孔（2 1 、22 )，並將其中節流程度強的第2小孔（22 )在分流的 通路（23 )配設反止閥（24 )，可確保差壓補償閥（7 ) 的動作穩定性，並將其閥體（7a )的關閉動作實現高速化 ’對致動器使作動液的供給量增加時可將其流量感應性更 進一步提高。 若依據第5發明，則將液壓迴路裝置（2、20 )適用 於射出成形機，由於循環製造時間的縮短可提高生產性， 並且藉由提高作動速度及作動力的控制性使成形品質大幅 度的提高，又，容易成形薄片的成型品。進而，對低壓型 夾緊製程所要求的低壓也充分可對付，且可達成成本的降 低。 【實施發明的最佳形態】 以下，將本發明實施形態根據圖面加以詳細說明。這 是將有關本發明液壓迴路裝置，適用於伺服閥裝置用以驅 動射出成形機等的油壓汽缸。 一實施形態1一 第1圖是顯示壓力流量伺服閥裝置（2 )(以下，稱 爲PQS閥），該閥是連接於射出成形機等的主機油壓迴 路（1 )，並供給作動油到未圖示油壓汽缸等的致動器， 本紙張尺度適用中國國家標準（CMS ) Α4規格（210Χ297公釐）552354 A7 B7 V. Description of the invention (J) [Technical Field] (Please read the precautions on the back before filling out this page) The present invention relates to a hydraulic circuit device for driving a hydraulic actuator of a mechanical device, and particularly belongs to A technical field for appropriately controlling the operating speed of the actuator and the operating fluid flow rate and pressure of the operating force. [Background Art] Conventionally, as such a hydraulic circuit device, for example, disclosed in Japanese Patent Application Laid-Open No. 0-3 7906, it is known to include an electromagnetic proportional valve (hereinafter referred to as a hydraulic actuator for controlling the supply flow rate of hydraulic oil) , Also referred to as a flow proportional valve) 'and a pressure compensation circuit that can maintain a slightly fixed differential pressure between the front and rear of the flow proportional valve. In addition, in order to improve the controllability, in addition to the flow proportional valve described above, an electromagnetic proportional valve (hereinafter also referred to as a pressure proportional valve) for adjusting hydraulic pressure is built-in, and each proportional valve uses a dedicated drive circuit. Controlled hydraulic circuit device. The Ministry of Economic Affairs ’s Intellectual Property Co., Ltd. ’s employees ’cooperatives printed the latter hydraulic circuit device. As shown in the example in Figure 6, a flow proportional valve (6) is provided in the supply channel (5) to supply the operating oil to the host oil. The hydraulic actuator of the pressure circuit (1) is connected to the above-mentioned actuator at the A inlet on the downstream side of the flow proportional valve (6), and the constant-pressure pump (3) is connected to the P inlet on the upstream side, for example. In addition, the upstream and downstream sides of the flow proportional valve (6) are respectively subjected to the pilot pressure, and a differential pressure compensation valve (7) is provided so that the differential pressure can form a supply path (5a) that is slightly fixed from the upstream side. Divert the working oil to the T inlet. In addition, a small hole (1 7) is provided in the control channel (1 5) on the downstream side to guide the differential pressure compensation valve (7) from the downstream side of the flow proportional valve (6) to the paper standard. Chinese national standards ( CNS) A4 specification (210X297 mm) 552354 A7 B7 V. Description of the invention (2) (Please read the precautions on the back before filling out this page) Pilot the pressure, and place the small hole (17) and the differential pressure compensation valve (7 ) Is connected to a control path (1 5), and a pressure proportional valve (8) is connected to overflow the operating oil to adjust the pilot pressure on the downstream side. Further, the opening degree of the flow rate proportional valve (6) and the pressure proportional valve (8) is controlled by using different current drivers (9, 9), respectively. The operation of the hydraulic circuit device constituting the conventional technique is automatically converted into a flow control mode and a pressure control mode according to the operating state of the actuator. That is, for example, a description will be given of a case in which hydraulic oil is supplied to the main engine. When the hydraulic cylinder is stroked, the forward and backward differential pressures of the flow proportional valve (6) are maintained by the differential pressure compensation valve (7). In a slightly fixed state, the opening degree control of the flow proportional valve (6) is used to adjust the supply of oil to the hydraulic cylinder and to control its operating speed (flow control mode). At this time, the working oil discharged from the pump (3) is supplied to the hydraulic cylinder through the P inlet, the flow proportional valve (6), and the A inlet, and the remaining working oil is passed through the T inlet by the differential pressure compensation valve (7). Divert to the sump (4). Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and when the cylinder reaches the stroke end, the oil pressure in the downstream supply path (5 b) is rapidly increased, and the oil pressure exceeds the set pressure of the pressure proportional valve (8) At this time, the pressure proportional valve (8), the differential pressure compensation valve (7), and the small hole (17) function as a so-called controlled electromagnetic proportional relief valve, forming a block to prevent oil pressure exceeding this. rise. At this time, the pilot pressure of the downstream side control path (1 5) can be changed by controlling the overflow pressure of the pressure proportional valve (8), thereby changing the overflow pressure of the differential pressure compensation valve (7). It can control the discharge pressure of the pump (3) and supply the hydraulic cylinder. The paper size applies the Chinese National Standard (CNS) A4 specification (210X29? Mm) -5- 552354 A7 B7 5. Description of the invention (3) Pressure control mode). (Please read the precautions on the back before filling this page) [Problems to be Solved by the Invention] However, as in the case of the hydraulic circuit device of the conventional technology, the supply flow and pressure of the operating oil to the actuator are formed. Both directly reflect the electromagnetic characteristics of the solenoid valve (6, 8), so the change in the flow rate and pressure of the operating oil from the current driver (9) to the output current 是 forms a non-linear hysteresis (refer to the dotted line in Figure 4) (Figure), it is difficult to obtain the full accuracy in the control of the oil flow and pressure. In addition, since the open control is used without using an electric sensor, there is a problem that the induction speed cannot be increased excessively when the command 値 is changed. Furthermore, the control pressure of the hydraulic oil supply has a control limit problem on the low pressure side. That is, according to the foregoing conventional technical example, even if the pressure proportional valve (8) reduces the current 値 to zero pressure, the differential pressure compensation valve (7) of the differential pressure compensation valve (7) printed by the employee ’s consumer cooperative of the Intellectual Property Co., Ltd. Since the pressure drops to a predetermined pressure corresponding to the spring force of the spring member, the supply pressure to the actuator cannot be lower than the predetermined pressure. In other words, the structure of the conventional example is due to the pressure control using the relief valve, so there is a lower limit to control the oil pressure (hereinafter, also referred to as the minimum pilot pressure), and the low pressure cannot be controlled below this. . In this regard, for example, in the case of an injection molding machine, in order to protect the mold, a low-pressure type clamping process is set, which is controlled using a lower pressure than the lowest guide pressure of the conventional technique. That is to say, the hydraulic circuit device hitherto is expected to be improved in terms of pressure control. The present invention has been invented in view of the above points, and its purpose is to provide a paper size applicable to the Chinese National Standard (CNS) A4 specification (210X ^ 7 mm) '~~ -6-552354 A7 _B7_ _ V. Description of the invention ( 4) (Please read the precautions on the back before filling out this page) A hydraulic circuit device (2, 20) is provided with a solenoid proportional valve (6) in the supply path (5) to supply the operating fluid to the hydraulic actuator. In the hydraulic circuit device used to control the supply flow and pressure of the working fluid, it is used to improve the control accuracy and sensitivity. At the same time, the minimum control pressure for the supply hydraulic pressure is used to extend the controllable range of pressure to a slightly zero pressure point. In addition, providing a valve structure can suppress an increase in cost. [Disclosure of the Invention] The present invention adopts the following means in order to solve the aforementioned problems. The first invention is based on the premise that a hydraulic circuit device (2, 20) is provided, and an electromagnetic proportional valve (5) for adjusting a supply flow rate of the operating fluid is provided in the supply path (5) for supplying the operating fluid to the hydraulic actuator. 6), and is provided with receiving the pilot pressure from the upstream side and the downstream side of the electromagnetic proportional valve (6), so that the differential pressure is surely diverted to the oil tank (4) from the upstream side supply path (5a) ) Differential pressure compensation valve (7). Printed by the Intellectual Property Corporation of the Ministry of Economic Affairs and the Consumers' Cooperative, and the electromagnetic proportional valve (6) is provided with at least a discharge of the operating fluid from the actuator in addition to the supply position of the actuator. Position; and a pressure sensor (10) that detects the operating hydraulic pressure of the downstream side supply path (5b) and outputs an electrical signal; and position sensing that detects the position of the bobbin of the electromagnetic proportional valve (6) and outputs an electrical signal (11); and receiving signals output from the pressure sensor (1 0) and the position sensor (1 1), respectively, and forming a control command for the actuator to supply the operating fluid supply flow or the supply hydraulic pressure In short, the controller (12) that controls the opening degree of the electromagnetic proportional valve (6) is fed back. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 552354 A7 __ B7 _ V. Description of the invention (5) (Please read the precautions on the back before filling this page) If it is based on the present invention, actuate In the operation of the device, the front and rear differential pressure of the electromagnetic proportional valve (6) is maintained slightly fixed by the function of the differential pressure compensation valve (7), and the electromagnetic proportional valve is controlled by the controller (1 2) ( 6) The position of the bobbin is used to control the supply flow to the actuator (flow control mode). At this time, the actual bobbin position of the electromagnetic proportional valve (6) is detected by the position sensor (11), and the feedback control is performed based on the detection result, so the flow rate of the working fluid is controlled with accuracy and sensitivity. Very high. In addition, the non-linear electromagnetic characteristics can be absorbed externally by feedback control, so the flow control characteristics of the working fluid can be linearized and no hysteresis can be generated. Printed by the Intellectual Property of the Ministry of Economic Affairs and the Consumers' Cooperative. In addition, if the actuator reaches the stroke end completely inactive, the hydraulic pressure in the supply path (5b) on the downstream side will increase as the load increases. According to the detection by the pressure sensor (1 0), the feedback control of the electromagnetic proportional valve (6) is performed by the controller (1 2) based on the detection (pressure control mode). That is, when the electromagnetic proportional valve (6) is in the supply position, the pressure sensor (1 0) is used to control the opening degree (bobbin position) of the electromagnetic proportional valve (6) based on the deviation of the detection pressure and the pressure command. In order to adjust the supply flow rate, the solenoid proportional valve (6) in the discharge position is controlled by the supply path (5b) on the downstream side by adjusting the discharge amount, and finally the hydraulic pressure of the supply path (5b) can maintain the pressure command. To control the bobbin position. In this pressure control mode, similar to the aforementioned flow control mode, improvements in control accuracy, inductivity, and electromagnetic non-linear characteristics are achieved by feedback control. In addition, as described above, the electromagnetic proportional valve (6) is converted into a discharge position, and the actuator fluid is discharged from the actuator. The actuator can be supplied with hydraulic pressure. The paper size applies the Chinese national standard (CNS> A4 specification (210X297 mm)). One 552354 A7 _B7_ V. Description of the invention (6) It has dropped to zero pressure (please read the precautions on the back before filling this page). Moreover, according to the aforementioned invention, it will form a necessary new form compared with the structure of the conventional technology. Pressure sensor (10) and position sensor (π), but in contrast, a pressure-free proportional valve (8) and its current drive circuit are formed, so the increase in the cost of using an electrical sensor can also be offset. According to a second invention, the controller (1 2) of the hydraulic circuit device (2, 20) is provided with: the actual supply flow rate to the actuator is obtained from a signal from the position sensor (11), and the flow rate command値 The flow deviation calculation unit (12b) that calculates the flow deviation by subtracting the actual supply flow rate; and obtains the actual supply hydraulic pressure to the operating fluid of the actuator based on the signal from the pressure sensor (10), and simultaneously Press The pressure deviation calculation unit (12a) that calculates the pressure deviation by subtracting the actual supply flow rate from the command 选择; and selects the smaller deviation 値 among the flow rate deviation and the pressure deviation, and calculates the electromagnetic proportional valve (6) based on the selected deviation. ), The PQ selecting unit (12c) of the target bobbin position; and the solenoid valve (6b) at the bobbin (6a) of the electromagnetic proportional valve (6) to the target position calculated by the PQ selecting unit (12c). ) Current driver (12d) with additional current. Printed by the Consumer Cooperatives of the Intellectual Property Office of the Ministry of Economic Affairs. According to the present invention, the actual deviation of the supply fluid of the operating fluid and the flow instruction 値 are calculated by the flow deviation calculation unit (12b). The flow rate deviation is calculated, and the pressure deviation between the actual supply hydraulic pressure of the operating fluid and the pressure command 値 is calculated by the pressure deviation calculation unit (12a). Furthermore, the actual supply flow rate or the actual supply hydraulic pressure exceeds the control command. For the time, 'the larger flow rate or pressure is exceeded, and if both are below the command line,' the flow rate or pressure closest to the command line is applied by the PQ selection unit (12c). This paper size applies Chinese National Standard (CNS) A4 (210X297 mm) -9-552354 A7 B7 V. Description of invention (7) (Please read the precautions on the back before filling this page) Selection. That is, PQ selection department (1 2c) is used to judge that the pressure or flow exceeds the command, then it is a dangerous state, and the degree of danger is judged from the deviation of the flow and pressure respectively. By selecting the deviation with a greater degree of danger, the foregoing can be achieved. The function and effect of the first invention. In the third invention, the differential pressure compensation valve (7) of the hydraulic circuit device (2, 20) is a spring member (7b) having a valve body (7a) springed to the closed side, and The valve body (7a) receives the pilot pressure from the downstream side of the electromagnetic proportional valve (6) on the closed side, and the valve body (7a) receives the pilot pressure from the upstream side of the electromagnetic proportional valve (6) on the open side. . In addition, a small hole is provided in the control passage (1 5) for guiding the pilot pressure from the downstream side of the electromagnetic proportional valve (6) to the downstream side of the differential pressure compensation valve (7) to throttle the flow of the operating fluid. (17) In addition, the control passage (15) between the small hole (17) and the differential pressure compensation valve (7) is connected to a control relief valve (18). According to the present invention, it is assumed that The bobbin (6a) of the electromagnetic proportional valve (6) cannot flow at the supply position due to electrical failure of the controller (1 2) or dust clogging of the operating fluid, etc., but the downstream supply path (the intellectual property of the Ministry of Economic Affairs ^ When the hydraulic pressure of 7g (printed by Industrial and Commercial Cooperative Society 5 b) exceeds the set pressure of the control relief valve (18), the control relief valve (18), the differential pressure compensation valve (7), and the small hole ( 17) It functions as a control type relief valve to prevent the hydraulic pressure in the downstream side supply passage (5b) from increasing. In addition, during the opening and closing operation of the valve body (7a) of the differential pressure compensation valve (7), , So that the flow of the working fluid in the control channel (5) on the downstream side is resisted from passing through the small hole (17), The action of the aforementioned valve body (7 a) imparts moderate braking to achieve a stabilizing effect. This paper size applies the Chinese National Standard (CNS) A4 specification (210X29 * 7 mm) —- 10-552354 A7 _ B7__ 5 2. Description of the invention (8) (Please read the precautions on the back before filling in this page) However, if a small hole (1 7) is provided in the control channel (1 5) to restrict the flow of the working fluid, a difference will be formed. The operating speed of the valve body (7a) of the pressure compensating valve (7) decreases, so there is a doubt that the increase in the supply flow rate of the actuator fluid to the actuator will cause a decrease in sensitivity. That is, 'to increase the supply of actuator fluid to the actuator The flow rate increases the opening degree of the electromagnetic proportional valve (6), so the front and rear differential pressure of the electromagnetic proportional valve (6) is temporarily reduced, and the valve body (7a) of the differential pressure compensation valve (7) is closed. In detail, the differential pressure compensation valve (7) in the control path (1 5) on the downstream side flows the working fluid to form the valve body (7a) of the differential pressure compensation valve (7) to move to the closed side. But after all, the force to close the valve body (7a) is the spring thrust of the spring member (7b) As a result of restricting the flow of the working fluid through the small hole (17) as described above, the closing action of the valve body (7a) of the differential pressure compensation valve (7) will be delayed. The valve (6) has a delay due to an increase in the supply flow rate. The employee consumer cooperative of the Intellectual Property Office of the Ministry of Economic Affairs has printed the above-mentioned transition delay. Therefore, the hydraulic circuit device (20) of the third invention is on the downstream side. The control channel (1 5) is used to arrange the first small hole (2 1) and the second small hole (22) with a stronger throttling degree than the first small hole, and shunt the second small hole In the passage (23) of (22), in addition to allowing the flow of the working fluid toward the differential pressure compensation valve (7), it is preferable to arrange a check valve (24) to prevent the opposite flow (the fourth invention). In this case, for example, when the supply flow rate of the operating fluid is increased to the actuator and the opening degree of the electromagnetic proportional valve (6) is enlarged, the operating fluid in the downstream-side control path (1 5) is formed to have a differential pressure. Compensation valve (7) Flow This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X 297 mm) '-11-552354 A7 _____B7__ V. Description of the invention (9) (Please read the precautions on the back before filling in this Page) 'However, the flow of the working fluid is divided by the formation of the first orifice (21) with a small degree of throttling, and the formation of the second orifice (22) with a strong degree of throttling, so it will resist the change of relative The small body can immediately close the valve body (7a) of the differential pressure compensation valve (7), whereby the supply flow of the operating fluid to the actuator can be immediately increased. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In addition, when the supply flow rate of the operating fluid is reduced to the actuator, the opening degree of the electromagnetic proportional valve (6) is reduced, but at this time, the electromagnetic proportional valve (6) The hydraulic pressure on the upstream side is rapidly increased, so that the extremely high hydraulic pressure acts on the valve body (7a) of the differential pressure compensation valve (7), and forms the valve body (7a) in an open operation state. At this time, the downstream-side control passage (1 5) flows the working fluid from the differential pressure compensation valve (7) toward the downstream-side supply passage (5b), and the flow is from the first and second small holes (21). , 22) formation is subject to pass resistance. However, as described above, the valve body (7a) of the differential pressure compensation valve (7) causes an extremely high upstream-side pilot pressure to act, so that even if the flow of the operating fluid in the downstream-side control passage (1 5) is restricted, the difference is poor. The valve body (7a) of the pressure compensating valve (7) is actuated very quickly. As a result, when the supply flow rate is reduced, the problem of induction delay does not occur, but instead, the flow of the downstream side control path (1 5) is caused. The second orifice (22) is sufficiently throttled to maintain the stable operation of the differential pressure compensation valve (7). That is, according to the fourth invention, the valve body (7a) of the differential pressure compensation valve (7) is opened by the small holes (21, 22) arranged in the downstream-side control passage (15). It is limited to the extent that it does not damage its sensitivity, and can be used to ensure stability. In addition, the closed state of the valve body (7a) can ensure the sensitivity without restriction. Therefore, the size of the paper used for the actuator to actuate the fluid is in accordance with the Chinese National Standard (CNS) A4 specification (210X297 mm) -12- 552354 A7 _ B7 V. Description of the invention (1〇) Stability and induction of the feed flow Sex can coexist at a high level. (Please read the precautions on the reverse side before filling out this page.) The fifth invention is a special provision for the hydraulic actuator 'to drive the injection molding machine. In other words, in general, the actuator of the injection molding machine responds to a wide range of molding conditions in accordance with the shape and material of the molded product, and requires a high degree of reproducibility. The hydraulic circuit device (2, 20) is extremely effective, which can improve the speed of the actuator and the accuracy of the control of the driving force. Therefore, the forming quality can be greatly improved. In addition, according to the first invention, the actuator can control the supply pressure of the working fluid to zero pressure, so that the low pressure required for the low-pressure type clamping process in the injection molding machine can be adequately coped with. Furthermore, for example, if the supply flow rate of the working fluid can be increased to improve the sensitivity as described in the fourth aspect of the present invention, the injection molding machine can easily form a thin molded product, and the manufacturing process of the molding cycle can be shortened. From such a viewpoint, the present invention is extremely effective when applied to an injection molding machine. [Effects of the Invention] According to the invention, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, according to the present invention, an electromagnetic proportional valve (6) is provided in the hydraulic circuit device (2, 20) in the supply passage (5) to supply the operating fluid to the hydraulic pressure. And a differential pressure compensation valve (7) receives the pilot pressure from the upstream and downstream sides of the electromagnetic proportional valve (6) respectively, so that the differential pressure can form a fixed supply path (5a) from the upstream side for operation When the liquid is diverted, the operating fluid is discharged from the actuator at the above-mentioned electromagnetic proportional valve (6) 'additional discharge position, and is provided with: detecting the operation of the supply path (5b) on the downstream side of the electromagnetic proportional valve (6); China National Standard (CNS) A4 specification (210X297 mm) ~ 1-13-552354 A7 _B7_ V. Description of the invention (^ (Please read the precautions on the back before filling this page) Hydraulic pressure sensor (10); And a position sensor (Π) that detects the bobbin position of the electromagnetic proportional valve (6); and based on the output signals from these sensors, it is used to feedback control the bobbin position (openness) of the electromagnetic proportional valve (6), So it can be extremely accurate Control the supply flow rate and pressure of the working fluid. Moreover, the non-linear characteristics of the electromagnetic appearance can be eliminated by feedback control, so the control characteristics of the supply flow rate and pressure of the working fluid can be linearized, and furthermore, the electromagnetic proportional valve (6) The opening and closing speed is higher than the conventional technology, and the flow sensitivity can be improved. When the electromagnetic proportional valve (6) is switched to the discharge position, the operating fluid can be discharged from the actuator, so the pilot pressure is reduced to zero pressure. The range that cannot be controlled can be lost. In addition, the pressure proportional valve (8) and its current drive circuit, which are necessary in the conventional technology, are unnecessary, so they can offset the increased cost of adding sensors. Intellectual Property Bureau, Ministry of Economic Affairs According to the second invention of the employee consumer cooperative, the flow deviation calculation unit (12b), the pressure deviation calculation unit (12a), and the pressure deviation calculation unit (12a) provided by the controller (12) provided in the hydraulic circuit device (2, 20), and The PQ selection unit (12c) and the like perform feedback control of the electromagnetic proportional valve (6) according to the actual supply state of the working fluid, and the effects of the first invention can be fully obtained. According to the third invention, the differential pressure compensation valve (7) of the hydraulic circuit device (2, 20) is provided with a control path (1 5) for guiding the pilot pressure from the downstream side of the electromagnetic proportional valve (6) and on the downstream side. The small hole (1 7) and the control relief valve (1 8) are used to throttle the flow of the operating fluid, so in the event of a failure of the controller (1 2) and the electromagnetic proportional valve (6), sufficient safety can be obtained. And the appropriate operation of the paper body (7a) of the aforementioned differential pressure compensation valve (7) is given the appropriate paper size to apply the Chinese National Standard (CNS) A4 specification (210X297 mm) -14-552354 A7 B7 V. Description of the invention (12 ) Brake to stabilize the action. According to the fourth invention, the small holes used as the third invention described above are used to arrange the first and second small holes (2 1, 22) having different throttling degrees in a linear arrangement, and the throttling degree is strong. The second small hole (22) is provided with a check valve (24) in the shunt path (23), which can ensure the operation stability of the differential pressure compensation valve (7) and realize the closing operation of the valve body (7a). If the supply of the working fluid to the actuator is increased, the flow rate sensitivity can be further improved. According to the fifth invention, the hydraulic circuit device (2, 20) is applied to the injection molding machine, the productivity can be improved by shortening the cycle manufacturing time, and the forming quality can be greatly improved by increasing the operating speed and the controllability of the driving force. In addition, it is easy to form a molded article of a thin sheet. Furthermore, the low pressure required for the low-pressure type clamping process can be fully dealt with, and the cost can be reduced. [Best Mode for Carrying Out the Invention] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. This is a hydraulic circuit device according to the present invention, which is applied to a hydraulic cylinder of a servo valve device for driving an injection molding machine or the like. One Embodiment 1 The first figure shows a pressure-flow servo valve device (2) (hereinafter, referred to as a PQS valve). This valve is connected to a hydraulic circuit (1) of a main engine such as an injection molding machine, and supplies hydraulic oil to Actuators such as hydraulic cylinders are not shown. This paper size applies the Chinese National Standard (CMS) A4 specification (210 × 297 mm).

If n m i m n m m n I (請先閲讀背面之注意事項再填寫本頁)If n m i m n m m n I (Please read the notes on the back before filling this page)

、1T 經濟部智慧財產局K工消費合作社印製 -15- 552354 A7 ___B7_ 五、發明説明（d (請先閱讀背面之注意事項再填寫本頁) 並且用以調整其供給流量Q及供給壓力P，將該致動器的 動作速度及作動力加以控制。在該PQS閥（2 )，是設有 :連接到主機油壓迴路（1)的A入口、及連接在固定容 量型泵（3 )的P入口、及分別連接在油槽（4 )的T入口 及Y入口，從P入口到A入口在作動油的供給通路（5 ) 的途中介設有電磁比例閥（6 )用以調整其供給流量，並 且配設有差壓補償閥（7 )分別從該電磁比例閥（6 )的上 流側（5a )及下流側（5b )的供給通路承受嚮導壓，並使 此等差壓形成略呈固定從上流側的供給通路（5a )使作動 油分流到油槽（4 )。 經濟部智慧財產局員工消費合作社印製 另外，在該PQS閥（2 )，配設有：檢測比電磁比例 閥（6 )更下流側的供給通路（5b )的作動油壓P並輸出 電氣信號的壓力感測器（1 〇 )、及檢測電磁比例閥（6 ) 的筒管（6a )位置並輸出電氣信號的位置感測器（1 1 )， 進而，配設有控制器（1 2 )，該控制器是從此等各感測器 (1 0 )、（ 11 )接受所輸出的信號，並使供給到主機油壓 迴路（1)的作動油的供給流量Q及供給壓力P能形成各 自的指令値Q i、P i，用以回饋控制前述電磁比例閥（6 )的筒管（6a )的位置，即電磁比例閥（6 )的開放程度 〇 詳細而言，前述電磁比例閥（6 )是可轉換：從控制 器（1 2 )利用控制信號使電磁閥（6b )作動，並利用彈簧 (6c )反抗於推壓彈推力使筒管（6a )的位置被控制’供 給作動油到主機側的供給位置；及從主機側排出作動油的 本紙張尺度適用中國國家標準（CNS ) A4i格(210X297公釐） -16- 552354 A7 B7 五、發明説明（^ (請先閲讀背面之注意事項再填寫本頁) 排出位置；及停止該作動油的供給和排出的停止位置；的其 中之一，並且連續地用以控制該供給位置或排出位置中的 作動油的通過剖面積所構成。而且，如圖示，電磁比例閥 (6)的筒管（6a)是利用彈簧（6c)朝向排出位置推壓 彈推到圖的右側，在該排出位置，電磁比例閥（6 )，是 將上流側的供給通路（5a )加以關閉，並且使下流側的供 給通路（5b )連通在排出通路（1 3 )，形成將主機側的作 動油返回到油槽（4 )。此時，利用筒管（6a )的位置連 續地變化使返回油的通過剖面積被連續地控制。 經濟部智慧財產局員工消費合作社印製 又，如第2圖所示，根據電磁閥（6b )的作動使筒管 (6a )利用彈簧（6c )反抗於彈推力進行移動到圖的左側 ，形成供給位置，則電磁比例閥（6 )，是用以關閉排出 通路（1 3 )，並且使供給通路（5 )的上流側及下流側連 通，從泵（3 )將吐出的作動油形成供給到主機側。此時 ，藉由筒管（6a )的位置連續地變化使作動油的通過剖面 積也呈連續地變化狀態，並從泵（3 )使供給作動油到主 機側的供給流量Q被連續地控制。進而，使筒管（6a ) 在前述供給位置及排出位置的中間的停止位置時，則電磁 比例閥（6 )，形成分別用以關閉供給通路（5 )的上流側 及下流側，以及排出通路（1 3 )。 而且，安裝位置感測器（11 )到前述電磁比例閥（6 )，是使該電磁比例閥（6 )的筒管（6a )在中央的停止 位置時感測器輸出變零，使筒管（6a )在圖的右側的供給 位置時，則藉由該筒管（6a )的位置變化使作動油的通過 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -17- 552354 A7 B7___ 五、發明説明（15) (請先閲讀背面之注意事項再填寫本頁) 剖面積變大，因此使正値的感測器輸出進行增大，另外’ 使筒管（6a )在圖的左側的排出位置時，則藉由該筒管（ 6a )的位置變化使作動油的通過剖面積變大，因此使負値 的感測器輸出進行減少。 前述差壓補償閥（7 )，就是由提昇閥等所構成的閥 體（7a )利用彈簧（7b )(彈簧構件）彈推於關閉側的溢 流閥，從上流側的供給通路（5a )在分歧的分歧路（14 ) ，將該分歧路（14)對前述排出通路（13)配設成可分流 。即，在差壓補償閥（7 )的閥體（7a )，從下流側的供 給通路（5b )使分歧的下流側控制通路（1 5 )與彈簧（7b )連接於同側，並將其下流側的嚮導壓承受於閥體（7a ) 的關閉側，另外在相反側，是通過前述分歧路（14 )將上 流側供給通路（5a )的油壓（上流側嚮導壓）承受於閥體 (7a)的開放側。 經濟部智慈財產局員工消費合作社印製 而且，前述差壓補償閥（7 )，是利用上流側嚮導壓 在閥體（7a )使產生作用的推壓力，比起利用下流側嚮導 壓在閥體（7a)產生作用的推壓力形成比彈簧（7b)的彈 推力更大時則呈開作動狀態，並通過分歧路（14 )使上流 側供給通路（5a )的作動油分流於排出通路（1 3 )。藉此 若使上流側嚮導壓下降的話，則閥體（7a )呈關閉狀態並 使作動油的分流中斷，再度使上流側嚮導壓上昇。而且， 利用如此使閥體（7a )重複開閉動作，使電磁比例閥（6 )的前後差壓維持在略呈固定狀態。如此使電磁比例閥（ 6 )的前後差壓獲得固定的補償，由上流側供給通路（5a 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18- 552354 A7 B7 五、發明説明（β (請先閲讀背面之注意事項再填寫本頁) )連通到下流側供給通路（5b )的電磁比例閥（6 )的開 放程度，即對應於作動油的通過剖面積的筒管位置與實際 供給流量形成保持固定的對應關係，如此，根據筒管位置 可求出實際供給流量。 在前述下流側控制通路（1 5 )，配設有小孔（1 7 )用 以節流作動油的流動，並且在該小孔（17 )及差壓補償閥 (7)的中間連接分歧路（15a)，在該分歧路（15a)配 5又有女全閥（18)(控制溢流閥）。該安全閥（18)，使 分歧路（1 5a )的油壓形成比彈簧的設定壓更高時則呈開 動作狀態，通過分歧路（1 5a )使下流側控制通路（1 5 ) 的油壓溢流，藉此使小孔（1 7 )的前後差壓產生，並使下 流側控制通路（1 5 )的油壓進行下降使差壓補償閥（7 ) 呈開動作狀態。而且，利用該差壓補償閥（7 )的開動作 ，使供給通路（5 )的作動油從T入口排出到油槽（4 )。 即，前述差壓補償閥（7 )，是使供給通路（5 )的油壓在 過度上昇時則與安全閥（1 8 )進行協動，做爲所謂控制式 溢流閥具有開放油壓的功能。 經濟部智慧財產局員工消費合作社印製 又，前述小孔（1 7 )，是例如具有直徑約1 mm的圓 形剖面孔，用以節流下流側控制通路（1 5 )中的作動油的 流動並利用賦予通過抵抗，在差壓補償閥（7 )的閥體（ 7a )的開閉動作賦予適度的制動，使該差壓補償閥（7 ) 的動作穩定化，藉此，具有抑制供給通路（5 )中的作動 油的流動和減少壓力振動的功能。 前述控制器（12 )，是將電子式收容於未圖示記憶體 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ' -19 - 552354 A7 B7 五、發明説明（17) (請先閱讀背面之注意事項再填寫本頁) 的控制程式利用CPU在預定的時間間隔進行讀出並執行 的數位控制器，該控制器具備有：根據從壓力感測器（i 〇 )發出的信號，求出供給作動油到主機側的實際供給壓力 P (實供給壓力），將此減去壓力指令値P i (目標壓力） 算出壓力偏差的壓力偏差演算部（12a);及同樣，根據從 位置感測器（11 )發出的信號，求出供給作動油到主機側 的實際供給流量Q (實供給流量），將此減去流量指令値 Q i (目標流量）算出流量偏差的流量偏差演算部（1 2b ) 。換句話說，控制器（12 )的記憶體，是容納有前述壓力 偏差演算部（1 2a )及流量偏差演算部（1 2b )的功能使用 軟體實現的控制程式。 經濟部智慈財產苟肖工消費合作社印製 又，前述控制器（1 2 )，是利用前述壓力偏差演算部 (1 2a )及流量偏差演算部（1 2b )分別用以對比算出後的 壓力偏差及流量偏差，並選擇此等中較小的値，根據該選 擇的偏差利用所謂P I D控制法則算出電磁比例閥（6 ) 的目標開放程度，即設有PQ選擇部（1 2c )用以算出筒 管（6a )的位置。而且，從該PQ選擇部（12c )並由承受 輸出的電流驅動電路（1 2d )對電磁比例閥（6 )的電磁閥 (6b )，爲了移動成該電磁比例閥（6 )的目標開放程度 使電流形成被外加。 尙有，利用前述PQ選擇部（12c )的演算處理也藉 由容納於記憶體的控制程式來執行所實現，壓力偏差及流 量偏差之中，形成選擇較小的値。具體而言，壓力偏差及 流量偏差若皆爲正値的話，則選擇較小的絕對値，又，若 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -20- 552354 A7 B7 五、發明説明（18) (請先閱讀背面之注意事項再填寫本頁) 此等的兩偏差其中一方爲正値且另一方爲負値的話，則選 擇負値的一方。進而，壓力偏差及流量偏差若皆爲負値的 話，則選擇較大的絕對値。換句話說，前述PQ選擇部（ 1 2c )的控制邏輯，是使實際供給流量Q和實際供給壓力 P將超過指令値Q i、P i的狀態判斷爲危險狀態，並將其 危險的程度從流量及壓力的分別偏差來加以判斷，更危險 的程度則根據較大的偏差，來進行電磁比例閥（6 )的控 制。 ---P Q S閥的動作一 其次，將如上述構成的P Q S閥（2 )的動作加以說 明。 經濟部智慧財產^員工消費合作社印製 例如做爲主機的射出成形機的模型夾緊裝置中使模型 移動及鎖緊的油壓汽缸作動時，首先，使電磁比例閥（6 )移動到供給位置，從泵（3 )將吐出的作動油供給到主 機側。此時，使汽缸達到衝程終端爲止，一般而言，比必 要的實際供給壓力P設定更大値的壓力指令値P i，所以 控制器（1 2 )，是使實際供給流量Q超過流量指令値Q i 爲止使電磁比例閥（6 )呈開作動狀態，並使該電磁比例 閥（6 )的前後差壓利用差壓補償閥（7 )的功能維持於略 呈固定的狀態下，使供給到主機側的供給油量形成相當於 流量指令値Q i的略呈固定量用以回饋控制筒管（6a )的 位置（流量控制模式）。據此，如第3圖所示，實際供給 油量Q大約形成相當於流量指令値Q i，使油壓汽缸定速 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -21 - 552354 A7 B7 五、發明説明（19) 動作。 (請先閲讀背面之注意事項再填寫本頁) 此時，使電磁比例閥（6 )的筒管位置利用位置感測 器（11 )被檢測，並根據其檢測結果進行回饋控制，所以 使電磁比例閥（6 )的控制進而使作動油的流量控制成爲 極高的精確度。即，對外加的電流値使電磁閥（6b )的吸 引力特性的非線形性、滯後現象、誤差等，是根據從位置 感測器（11 )發出的信號利用回饋控制被完全修正，如第 4圖（a )實線所示，使流量控制中的靜態特性大幅度的 提高。又，由於有回饋控制，所以比起開放控制將筒管（ 6a )的動作速度可特別提高，藉此也使流量控制的感應性 .提高。 加上，前述流量控制模式中，從泵（3 )吐出後的作 動油中的剩餘油是利用差壓補償閥（7 )的功能以固定差 壓被分流，如此，將泵（3 )的吐出壓對於主機側的負荷 由於可停留在稍高的程度，所以可減輕泵（3 )的運轉負 荷，可實現省能源化。 經濟部智慧財產局員工消費合作社印製Printed by KT Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -15- 552354 A7 ___B7_ V. Description of the invention (d (please read the precautions on the back before filling this page) and use it to adjust its supply flow Q and supply pressure P To control the operating speed and power of the actuator. The PQS valve (2) is provided with an A inlet connected to the hydraulic circuit (1) of the host and a fixed capacity pump (3) The P inlet, and the T inlet and the Y inlet connected to the oil tank (4), respectively. From the P inlet to the A inlet, an electromagnetic proportional valve (6) is provided in the middle of the oil supply path (5) to adjust its supply. Flow, and is equipped with a differential pressure compensation valve (7), which receives the pilot pressure from the supply path of the upstream side (5a) and the downstream side (5b) of the electromagnetic proportional valve (6), and makes the differential pressure slightly The supply path (5a) from the upstream side is fixed to divert the working oil to the oil tank (4). Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, the PQS valve (2) is equipped with a detection ratio solenoid valve ( 6) The operating oil pressure P of the supply path (5b) on the downstream side is also output. An electric pressure sensor (10) and a position sensor (1 1) that detects the position of the bobbin (6a) of the electromagnetic proportional valve (6) and outputs an electric signal, and is further provided with a controller (1 2) The controller receives the output signals from the sensors (1 0) and (11), and enables the supply flow rate Q and the supply pressure P of the working oil to be supplied to the hydraulic circuit (1) of the host. Form respective instructions 値 Q i, P i to feedback control the position of the bobbin (6a) of the electromagnetic proportional valve (6), that is, the opening degree of the electromagnetic proportional valve (6). Specifically, the foregoing electromagnetic proportional valve (6) is switchable: the controller (1 2) uses the control signal to actuate the solenoid valve (6b), and uses the spring (6c) to resist the thrust of the pushing spring so that the position of the bobbin (6a) is controlled to supply the actuation The supply position of oil to the host side; and the paper size of the working oil discharged from the host side applies to the Chinese National Standard (CNS) A4i grid (210X297 mm) -16- 552354 A7 B7 V. Description of the invention (^ (Please read the back first (Please fill in this page again for the precautions) the discharge position; and stop the oil It is one of the stop position of feeding and discharging, and is continuously configured to control the passage cross-sectional area of the operating oil in the feeding position or the discharging position. As shown in the figure, the bobbin of the electromagnetic proportional valve (6) (6a) is a spring (6c) that pushes the bomb toward the right side of the discharge position. At this discharge position, the electromagnetic proportional valve (6) closes the upstream supply path (5a) and closes the downstream side. The supply passage (5b) is connected to the discharge passage (1 3), so that the hydraulic oil on the host side is returned to the oil tank (4). At this time, the position of the bobbin (6a) is continuously changed so that the cross-sectional area of the return oil is continuously controlled. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, as shown in Figure 2, the bobbin (6a) is moved to the left side of the figure by the spring (6c) using the spring (6c) according to the operation of the solenoid valve (6b). In the supply position, the electromagnetic proportional valve (6) is used to close the discharge passage (1 3), and communicates the upstream side and the downstream side of the supply passage (5), and forms the pumped oil from the pump (3) to supply Host side. At this time, the position of the bobbin (6a) is continuously changed so that the cross-sectional area of the operating oil is continuously changed, and the supply flow rate Q from the pump (3) to the main engine side is continuously controlled. . Furthermore, when the bobbin (6a) is stopped at the intermediate position between the supply position and the discharge position, the electromagnetic proportional valve (6) is formed to close the upstream and downstream sides of the supply passage (5) and the discharge passage, respectively. (1 3). In addition, when the position sensor (11) is installed to the electromagnetic proportional valve (6), the output of the sensor becomes zero when the bobbin (6a) of the electromagnetic proportional valve (6) is at the center stop position, so that the bobbin (6a) At the supply position on the right side of the figure, the change of the position of the bobbin (6a) allows the passing of the working oil to this paper. The Chinese standard (CNS) A4 specification (210X 297 mm) -17- 552354 A7 B7___ V. Description of the invention (15) (Please read the notes on the back before filling in this page) The cross-sectional area becomes larger, so the sensor output of the positive sensor is increased, and the tube (6a) is At the discharge position on the left side of the figure, the change in the cross-sectional area of the working oil is increased by the change in the position of the bobbin (6a), so that the output of the negative sensor is reduced. The aforementioned differential pressure compensating valve (7) is a valve body (7a) composed of a poppet valve and the like. The spring (7b) (spring member) is used to elastically push the overflow valve on the closing side from the upstream supply path (5a). On the branched branch road (14), the branched road (14) is arranged to be divertable to the exhaust passage (13). That is, in the valve body (7a) of the differential pressure compensation valve (7), the branched downstream-side control path (1 5) and the spring (7b) are connected to the same side from the downstream-side supply path (5b), and they are connected together. The pilot pressure on the downstream side is received by the closing side of the valve body (7a), and on the opposite side, the hydraulic pressure (the upstream side guide pressure) of the upstream side supply passage (5a) is received by the valve branch (14). (7a) the open side. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Furthermore, the aforementioned differential pressure compensation valve (7) uses the upstream side pressure to press the valve body (7a) to make the acting pressure more effective than the downstream side pressure pressure on the valve. When the pushing force generated by the body (7a) is greater than the spring pushing force of the spring (7b), it is in an open operation state, and the working oil of the upstream supply passage (5a) is branched to the discharge passage (14) through the branch path (14). 1 3). As a result, if the pilot pressure on the upstream side is reduced, the valve body (7a) is closed and the flow of hydraulic oil is interrupted, and the pilot pressure on the upstream side is increased again. Furthermore, by repeating the opening and closing operation of the valve body (7a) in this way, the differential pressure between the front and rear of the electromagnetic proportional valve (6) is maintained at a slightly fixed state. In this way, the front and back differential pressure of the electromagnetic proportional valve (6) is fixedly compensated, and the upstream side supply path (5a, this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -18-552354 A7 B7 V. Invention Explanation (β (Please read the precautions on the back before filling this page)) The opening degree of the solenoid proportional valve (6) connected to the downstream supply path (5b), that is, the position of the bobbin corresponding to the cross-sectional area of the hydraulic oil Corresponding relationship with the actual supply flow rate is maintained, so that the actual supply flow rate can be obtained according to the position of the bobbin. In the aforementioned downstream side control passage (1 5), a small hole (17) is provided to throttle the hydraulic oil. Flow, and the branch (15a) is connected between the small hole (17) and the differential pressure compensation valve (7), and there is 5 female full valve (18) (control relief valve) on the branch (15a) The safety valve (18) opens when the hydraulic pressure of the branch circuit (15a) is higher than the set pressure of the spring, and makes the downstream side control path (15) through the branch circuit (15a). Oil pressure overflow, so as to produce the differential pressure between the front and rear of the small hole (17) And lowering the oil pressure in the downstream control path (1 5) to open the differential pressure compensation valve (7). Furthermore, by using the opening operation of the differential pressure compensation valve (7), the supply path (5) is opened. The working oil is discharged from the T inlet to the oil tank (4). That is, the aforementioned differential pressure compensation valve (7) cooperates with the safety valve (18) when the oil pressure in the supply passage (5) rises excessively, As a so-called control type relief valve, it has the function of opening oil pressure. It is printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. The aforementioned small hole (17) is, for example, a circular cross-section hole with a diameter of about 1 mm. The flow of the hydraulic oil in the downflow-side control path (1 5) is throttled, and a suitable brake is applied to the opening and closing operation of the valve body (7a) of the differential pressure compensation valve (7) by applying a passing resistance to the differential pressure compensation valve. The operation of (7) is stabilized, thereby having the function of suppressing the flow of the working oil in the supply path (5) and reducing the pressure vibration. The controller (12) is an electronic type housed in a memory unit (not shown). Paper size applies to China National Standard (CNS) A4 specifications ( 210X297 mm) '-19-552354 A7 B7 V. The description of the invention (17) (Please read the precautions on the back before filling this page) The control program uses the CPU to read and execute the digital controller at predetermined time intervals The controller is provided with the following: from the signal from the pressure sensor (i 〇), find the actual supply pressure P (actual supply pressure) to supply the operating oil to the host, and subtract this pressure command 値 P i ( (Target pressure) The pressure deviation calculation unit (12a) that calculates the pressure deviation; and similarly, based on the signal from the position sensor (11), the actual supply flow rate Q (actual supply flow rate) for supplying the operating oil to the host side is obtained, This is subtracted from the flow command) Q i (target flow) to calculate the flow deviation calculation section (1 2b). In other words, the memory of the controller (12) is a control program implemented by software using the functions of the pressure deviation calculation section (12a) and the flow deviation calculation section (12b). Printed by the Intellectual Property Co., Ltd. of the Ministry of Economic Affairs of Gou Xiaogong Consumer Cooperative, the controller (1 2) uses the pressure deviation calculation section (12a) and flow deviation calculation section (12b) to compare the calculated pressure deviation and The deviation of the flow rate is selected, and the smaller one is selected. Based on the selected deviation, the so-called PID control rule is used to calculate the target opening degree of the electromagnetic proportional valve (6). That is, a PQ selection unit (12c) is provided to calculate the bobbin. (6a). Furthermore, the solenoid valve (6b) of the electromagnetic proportional valve (6) is driven from the PQ selecting section (12c) and driven by the output current-driven circuit (12d) to move to the target opening degree of the electromagnetic proportional valve (6). The current formation is applied. In addition, the calculation processing by the aforementioned PQ selection unit (12c) is also implemented by a control program stored in a memory, and among the pressure deviation and the flow deviation, a small selection is formed. Specifically, if the pressure deviation and the flow deviation are both positive, choose a smaller absolute pressure, and if the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -20- 552354 A7 B7 V. Description of the invention (18) (Please read the notes on the back before filling out this page) If one of these two deviations is positive and the other is negative, then choose the negative one. Further, if both the pressure deviation and the flow deviation are negative 値, a larger absolute 値 is selected. In other words, the control logic of the aforementioned PQ selection unit (12c) is to judge the actual supply flow rate Q and the actual supply pressure P to exceed the orders 値 Qi, Pi as dangerous states, and to determine the dangerous degree from The difference between the flow rate and the pressure is judged, and the more dangerous degree is based on the larger deviation to control the electromagnetic proportional valve (6). --- The operation of the P Q S valve Next, the operation of the P Q S valve (2) configured as described above will be described. Intellectual property of the Ministry of Economic Affairs ^ Printed by the employee consumer cooperative, for example, in the model clamping device of the injection molding machine as the host, when the hydraulic cylinder that moves and locks the model is operated, first, the electromagnetic proportional valve (6) is moved to the supply position The pump (3) supplies the discharged working oil to the host side. At this time, until the cylinder reaches the stroke end, in general, a pressure command 値 P i is set larger than the necessary actual supply pressure P, so the controller (1 2) makes the actual supply flow rate Q exceed the flow command 値The solenoid proportional valve (6) is opened and operated until Q i, and the differential pressure of the solenoid proportional valve (6) is maintained at a slightly fixed state by the function of the differential pressure compensation valve (7), so that the supply to The oil supply amount on the host side forms a slightly fixed amount corresponding to the flow command 値 Q i to feed back the position of the control bobbin (6a) (flow control mode). Based on this, as shown in Figure 3, the actual oil supply amount Q is approximately equivalent to the flow command 値 Q i, so that the hydraulic cylinder can be set at a fixed speed. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -21 -552354 A7 B7 V. Description of the invention (19) Action. (Please read the precautions on the back before filling this page) At this time, the position of the bobbin of the electromagnetic proportional valve (6) is detected by the position sensor (11), and the feedback control is performed based on the detection result, so the electromagnetic The control of the proportional valve (6) in turn makes the flow rate control of the hydraulic oil extremely accurate. That is, the external current causes the non-linearity, hysteresis, and errors of the attractive characteristics of the solenoid valve (6b) to be completely corrected using feedback control based on the signal sent from the position sensor (11), as shown in Section 4. Figure (a) shows the solid line, which greatly improves the static characteristics in flow control. In addition, since the feedback control is provided, the operating speed of the bobbin (6a) can be particularly increased compared to the open control, thereby improving the sensitivity of the flow control. In addition, in the aforementioned flow control mode, the remaining oil in the working oil discharged from the pump (3) is divided by the function of the differential pressure compensation valve (7) at a fixed differential pressure, so that the pump (3) is discharged Since the pressure can stay at a slightly higher level to the load on the host side, the operation load of the pump (3) can be reduced, and energy saving can be achieved. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

之後，使主機的油壓汽缸到達衝程終端，在此以上， 形成不能移動（前述第3圖的時刻t 1 )，之後使P Q S 閥（2 )中的下流側供給通路（5b )的壓力P慢慢的上昇 ，使該壓力利用壓力感測器（1 0 )被檢測並回饋於控制器 (12)。而且，使該檢測壓力P超過壓力指令値P i (圖 中的時刻t 2 )，則利用控制器（12 )的PQ選擇部（12c )，藉由壓力偏差演算部（12a )的演算値，即選擇壓力 偏差，並根據該壓力偏差，使供給到主機側的供給壓力P 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -22- 552354 A7 B7 五、發明説明（2(ί 能形成一致於壓力指令値P i，使電磁比例閥（6 )的開放 程度形成被回饋控制（壓力控制模式）。 (請先閲讀背面之注意事項再填寫本頁) 此時，供給到主機側的供給流量Q並非立刻歸零’ 首先，使在供給位置的電磁比例閥（6 )的筒管（6a )慢 慢進行移動並使作動油的通過剖面積藉由縮小，如圖示使 作動油的供給流量Q慢慢減少（t 2〜t 3 )，進而使該電磁 比例閥（6 )切換到停止位置，使供給流量Q歸零（t 3 ) 。這期間，作動油是由於繼續供給到油壓汽缸，所以供給 流量Q在歸零的時點油壓汽缸的壓力（> P )是形成最大 。之後，使電磁比例閥（6 )的筒管（6a )再度進行移動 並切換到排出位置，由油壓汽缸使作動油排出，則使壓力 P下降到壓力指令値Pi爲止，並在此進行整理固定（t4 )。尙有，實際上，從主機油壓迴路因應作動油的洩漏， 從電磁比例閥（6 )對主機側形成重複作動油的供給及停 止。 經濟部智慧財產^員工消費合作社印製 如此的壓力控制模式中也與前述的流量控制模式同樣 ，利用回饋控制可提高如第4圖實線所示的靜態特性。又 ，壓力控制模式中如前述將電磁比例閥（6 )切換到排出 位置，則失掉對主機側的供給壓力P的最低嚮導壓力（ P min)，可將供給壓力P控制到0點爲止。 因此，利用有關本實施形態1的PQS閥（2 )(液壓 迴路裝置），則在調整供給作動油到主機油壓迴路（1 ) 的供給流量的電磁比例閥（6 )，追加從主機側可排出作 動油的排出位置，並且設有：檢測該電磁比例閥（6 )的 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -23- 552354 A7 B7 五、發明説明（21) (請先閲讀背面之注意事項再填寫本頁) 下流側供給通路（5b )的壓力P的壓力感測器（1 〇 );及 檢測電磁比例閥（6 )的筒管位置的位置感測器（11 );並 根據由此等檢測器（10 )、（ 11 )發出的信號用以控制筒 管位置，能回饋控制供給作動油到主機側的供給流量Q 及供給壓力P，所以其控制性，即，將線形性和滯後現象 等靜態特性及感應性等動態特性與習知技術做比較可大幅 度的提高。 據此，將前述P Q S閥（2 )例如適用於射出成形機 時，則根據成型品的形狀和材料的不同可對應於廣汎的成 形條件，尙且可獲得高的再現性，因此可實現大幅度提高 成形品質。 另外，如前述在電磁比例閥（6 )設有排出位置，根 據由壓力感測器（10 )發出的信號能用以回饋控制其開放 程度，所以對於供給到主機側的供給壓力P失掉其最低嚮 導壓力P min，形成可控制到零壓力爲止，藉此，也可充 分對應射出成形機中低壓型夾緊製程等的低壓要求。 經濟部智慧財產笱員工消費合作社印製 而且，前述P Q S閥（2 )的構成，與習知技術的附 比例電磁式溢流閥流量調整閥裝置（參考第6圖）做比較 ，也必要新的壓力感測器（1 〇 )和位置感測器（11 )，另 外由於不要習知技術必要的壓力比例閥（8 )及其電流驅 動電路（9 )，所以可相抵感測器（10、11 )的成本提高 ---實施形態2— - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -24- 552354 A7 B7 五、發明説明（22) (請先閱讀背面之注意事項再填寫本頁) 第5圖是顯示有關本發明實施形態2的P Q S閥（20 )(液壓迴路裝置）構成圖。該PQS閥（20)，是與實 施形態1的P Q S ( 2 )僅使下流側控制通路（15 )中的小 孔構成不同，除此之外的構成是與前述實施形態1相同， 所以以下在同一構件賦予同一編號並省略其說明。而且， 本實施形態2的P Q S閥（20 )，是在差壓補償閥（7 ) 的開閉作動時對於其閥體（7a)的動作與前述實施形態1 同樣賦予適度的制動，並且僅使閥體（7a)的呈閉作動速 度更加高速化。 經濟部智慧財產局g(工消費合作社印製 即，前述實施形態1，下流側控制通路（15)的小孔 (1 7 )，是安全閥（1 8 )和差壓補償閥（7 ) —起做爲控 制式溢流閥發揮功能時的差壓產生來源，同時在差壓補償 閥（7 )的閥體（7a )的動作賦予適度的制動，並將該閥 體（7a)的動作進行穩定化的作用，但結果，在該差壓補 償閥（7)的呈閉作動時使閥體（7a)的動作會變成遲緩 ，如上述，即使提高電磁比例閥（6 )的筒管（6a )的動 作速度，但對主機側的流量上昇的感應形成不能太高速化 的原因。 對於此點詳細加以說明，則實施形態1的P Q S閥（ 2 )中，在流量控制模式時爲了增加供給作動油到主機側 的供給流量，是用以變更流量指令値Q i並使電磁比例閥 (6 )的開放程度增大，並且從泵（3 )朝向電磁比例閥（ 6 )有必要增加作動油的流量。在此時，首先，利用從控 制器（1 2 )發出的信號使在供給位置的電磁比例閥（6 ) 本紙張尺度適用中ί國家標準（CNS ) A4規格（210X 297公釐） -25- 552354 A7 —_ B7___ 五、發明説明（23) (請先閱讀背面之注意事項再填寫本頁) 的開放程度增大，藉此使該電磁比例閥（6 )的前後差壓 暫時的變小，則將上流側及下流側嚮導壓使分別承受的差 壓補償閥（7 )的閥體（7a )形成關閉。 此時，下流側控制通路（1 5 )是使作動油朝向差壓補 償閥（7 )流動，但畢竟關閉差壓補償閥（7 )的閥體（7a )的力量，由於充其量也只有彈簧（7b )的彈推力程度， 所以如前述利用小孔（1 7 )使作動油的流動節流，則使閥 體（7a)的關閉動作遲緩，從泵（3)將吐出的作動油形 成不能立刻朝後到電磁比例閥（6 )。即，電磁比例閥（6 )的開放動作本身是可高速化，但由此不能使供給作動油 到主機側的供給流量如目標增大，所以對於流量感應形成 留下改善的餘地。 經濟部智慧財產局員工消費合作社印製 考慮到如此過渡性的現象’本實施形態2的P Q S閥 (20)，是如圖示，在下流側控制通路（1 5 )，直線排列 配設有··比實施形態1的小孔（1 7 )更大的作動油通過剖 面積的第1小孔（2 1 );及比該第1小孔（2 1 )更強的節 流程度，即更小的通過剖面積的第2小孔（22 );並且在 分流該第2小孔（22 )的分流通路（23 )’配設反止閥（ 24 )朝向差壓補償閥（7 )容許作動油流動’另外並阻止 其反流。 更具體而言，前述第1小孔（2 1 ) ’是例如具有直徑 約2mm的圓形剖面的小孔，又’前述第2小孔（22 ) ’ 是與前述實施形態1的小孔（1 7 )具有相同直徑約1 mm 的圓形剖面。而且，使作動油通過下流側控制通路（1 5 ) 本紙張尺度適用巾國國家標準（CNS )八4雜（210x297公釐） -26- 552354 A7 B7____ 五、發明説明（24) 從差壓補償閥（7)朝向下流側供給通路（5b)流動時’ 則該作動油的流動是利用第1及第2兩方的小孔（2 1 ) ' C請先閱讀背面之注意事項存填寫本頁) (22 )被節流，特別利用第2小孔（22 )與前述實施形態 1的情形同樣承受通過抵抗。另外，使作動油的流動通過 下流側控制通路（1 5 )朝向差壓補償閥（7 )流動時’該 作動油的流動是僅從相對性節流程度較弱的第1小孔（2 1 )形成承受通過抵抗，而流動的通過速度形成相對的提高 〇 如此，爲了使供給作動油到主機側的供給流量增加大 大的打開電磁比例閥（6 )的開放程度時，朝向下流側控 制通路（1 5 )中的差壓補償閥（7 )流動使作動油的流動 比實施形態1的流動更快，該部分’使差壓補償閥（7 ) 的閥體（7a )呈更高速呈閉作動狀態。因此’對電磁比例 閥（6 )的呈開作動使差壓補償閥（7 )的呈閉作動遲緩大 幅度的減輕，從閥（3 )朝向電磁比例閥（6 )使作動油的 流量由於形成立刻增大，所以在作動油的供給流量增大時 可更提高其感應性。 經濟部智慧財產局員工消費合作社印製 而且，使差壓補償閥（7 )的閥體（7a )呈開作動時 ，是使通過下流側控制通路（1 5 )的作動油從第1及第2 小孔（2 1 )、（ 22 )形成承受相對性大的通過抵抗’所以 對該閥體（7 a )的動作賦予適度的制動是與前述實施形態 1同樣。 又，減少供給作動油到主機側的供給流量時’利用控 制器（1 2 )將電磁比例閥（6 )的開放程度控制成更小’ ϋ張尺度適用中國國家標準（CNS ) A4規格(210X297公楚:) -27- 552354 A7 _B7__ 五、發明説明（25^ 但此時是使該電磁比例閥（6 )的上流側油壓急速變高， 通過分歧路（14)在差壓補償閥（7)的閥體（7a)產生 作用。此時，隨著閥體（7a )呈開作動使下流側控制通路 (1 5 )中的作動油從差壓補償閥（7 )朝向下流側供給通 路（5b )流動，並使該作動油的流動從第1及第2兩方的 小孔（21 )、（ 22 )形成承受通過抵抗，但對於如前述閥 體（7a )由於使極高的上流側嚮導壓產生作用，所以該閥 體（7a)呈開動作是形成非常的高速，結果，在供給流量 減少時則不會有感應遲緩的問題。 因此，若依據有關本實施形態2的P Q S閥（20 )， 則與前述實施形態1的P Q S閥可獲得同樣的作用效果， 並且利用配設於下流側控制通路（1 5 )的2個小孔（2 1 ) 、（22)及反止閥（24)，用以確保差壓補償閥（7)的 動作穩定性，同時可將其閥體（7a)呈閉動作更高速化， 藉此，使供給作動油到主機側的供給流量增加時也可將其 感應性充分的提高。 如此，適用於射出成形機的情形是比起習知技術更容 易形成薄片的成型品，並且由於成形循環的短縮可達成成 本減低。對於這一點，利用射出成形的薄片成品，是使射 出後的樹脂在行經模型內部的途中會凝固，爲了防止凝固 特別要求高速流量上昇的感應，如有關本實施形態的P Q S閥提高感應性成爲特別有效。 ---其他實施形態_一 本紙張尺度適用中國國家標?TCNS ) A4規格（210X297公釐) 一 -28- L --------- (請先閱讀背面之注意事項再填寫本頁) 訂 ^1. 經濟部智慧財產笱員工消費合作社印製 552354 A7 B7 五、發明説明（26) (請先閲讀背面之注意事項再填寫本頁) 本發明並非限定於前述實施形態1、2的構成，也包 含其他種種實際構成。即，前述實施形態1、2，皆將有 關本申請發明的液壓迴路裝置做爲1個PQS閥（2、20 )’但將本申請發明的液壓迴路不一定必要構成做爲一體 型複合閥。又，主機是不限於射出成形機，可適用於具有 液壓氣缸和液壓馬達等液壓致動器的種種機械裝置。 又，控制器的構成也不限定於前述各實施形態的數位 控制器（1 2 )，例如，使用比較器或操作放大器等具有同 樣功能的模擬控制器所構成也可。 進而，本發明的電磁比例閥，是不限定於前述各實施 形態，若具有A入口、P入口及T入口的電氣節流量的可 變節流閥即可。即，將筒管（6a )使用電磁閥（6b )直接 推壓的直接作動型，另外，使用小型的控制閥使筒管間接 動作的控制式也可。進而，控制式的情形，做爲控制閥使 用比例閥的型式及使用噴嘴舌形閥等伺服閥的型式皆可。 又，本發明，設有筒管位置的感應器，所以將電磁比例閥 (6 )改稱爲伺服閥也可。 經濟部智慧財產局員工消費合作社印製 【產業上的利用可能性】 如以上，有關本發明的液壓迴路裝置，是將主機的致 動器的動作加以高速化且可提高控制精確度，並且由於可 將壓力的可控制範圍擴大到略呈零壓力點爲止，所以做爲 用以驅動機械裝置的液壓致動器具有極爲優異的特性，特 別，適用於射出成形機的情形是可實現成形品質大幅度的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -29- 552354 A7 B7___ 五、發明説明（27) (請先閱讀背面之注意事項再填寫本萸) 提高，並且可縮短製造循環時間，而且習知技術無法對付 的低壓型夾緊製程也充分可因應，所以產業上的利用可能 性很高。 【圖面之簡單說明】 第1圖是顯示有關本發明實施形態1的PQS構成圖 〇 第2圖是電磁比例閥在供給位置時的第1圖相當圖。 第3圖是顯示使射出成形機的模型夾緊汽缸動作時的 作動油的供給流量及供給壓力變化的時序圖。 第4圖是顯示將輸入於電磁比例閥的控制信號（電流 値）及作動油的供給流量或供給壓力的相關關係，與習知 例進行對比的特性圖。 第5圖是顯示實施形態2的第1圖相當圖。 第6圖是顯示習知技術的液壓迴路裝置一例的第1圖 相當圖。 經濟部智慧財產局員工消費合作社印製 【圖號說明】 1…主機油壓迴路， 2、20…液壓迴路裝置， 3…定容量型泵， 4…油槽， 5…供給通路， 5a…上流側供給通路， 5b…下流側供給通路， 6…流 量比例閥， 6a…筒管， 6b…電磁閥， 6c…彈簧， 7…差壓補償閥， 7a…閥體， 7b…彈簧構件， 8…壓力比例閥， 9、12cl···電流驅動器， 10…壓力感 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -30- 552354 A7 B7 五、發明説明（28) 測器， 11…位置感測器， 12…控制器， 12a…壓 力偏差演算部，12b…流量偏差演算部， 12c…PQ選 擇部， 13…排出通路， 14…分歧部， 15…下流側 控制通路， 1 7…小孔， 1 8…控制溢流閥（安全閥） ， 2 1…第1小孔， 2 2…第2小孔， 2 3…通路， 24…反止閥， P…供給壓力， P i…壓力指令値， Q…實際供給流量， Q i…流量指令値。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -31 -After that, the hydraulic cylinder of the main engine is brought to the stroke end, above which it becomes impossible to move (time t 1 in the aforementioned FIG. 3), and then the pressure P of the downstream-side supply passage (5 b) in the PQS valve (2) is made slow. The slow rise causes the pressure to be detected by the pressure sensor (1 0) and fed back to the controller (12). When the detected pressure P exceeds the pressure command 値 P i (time t 2 in the figure), the PQ selection unit (12c) of the controller (12) is used, and the calculation of the pressure deviation calculation unit (12a) is performed, That is, the pressure deviation is selected, and according to the pressure deviation, the supply pressure P to the host side is applied. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -22- 552354 A7 B7 V. Description of the invention (2 ( ί Can be formed in accordance with the pressure command 値 P i, so that the opening degree of the solenoid proportional valve (6) is feedback controlled (pressure control mode). (Please read the precautions on the back before filling this page) At this time, supply to the host The supply flow rate Q on the side does not return to zero immediately. First, slowly move the bobbin (6a) of the electromagnetic proportional valve (6) at the supply position to reduce the cross-sectional area of the working oil. The oil supply flow rate Q is gradually reduced (t 2 to t 3), and the solenoid proportional valve (6) is switched to the stop position, so that the supply flow rate Q is reset to zero (t 3). During this period, the operating oil is continuously supplied. To the hydraulic cylinder, so supply When the quantity Q is zero, the pressure (> P) of the hydraulic cylinder is maximized. After that, the bobbin (6a) of the electromagnetic proportional valve (6) is moved again and switched to the discharge position. When the hydraulic oil is discharged, the pressure P is reduced to the pressure command 値 Pi, and the pressure is fixed here (t4). Actually, in response to the leakage of the hydraulic oil from the main engine hydraulic circuit, the electromagnetic proportional valve (6) Repeated supply and stop of oil to the host side. Printed by the Ministry of Economic Affairs Intellectual Property ^ Employee Consumption Cooperative Co., Ltd. This pressure control mode is also the same as the aforementioned flow control mode. Using feedback control can improve the solid line as shown in Figure 4. In the pressure control mode, as described above, when the electromagnetic proportional valve (6) is switched to the discharge position, the minimum guide pressure (P min) to the supply pressure P on the host side is lost, and the supply pressure P can be controlled to 0. Therefore, by using the PQS valve (2) (hydraulic circuit device) according to the first embodiment, the electromagnetic proportional valve (6) is used to adjust the supply flow rate of the hydraulic oil to the host hydraulic circuit (1). ), Adding a discharge position from which the hydraulic oil can be discharged from the host side, and equipped with: the paper size of the electromagnetic proportional valve (6) is applicable to China National Standard (CNS) A4 (210X297 mm) -23- 552354 A7 B7 V. Description of the invention (21) (Please read the precautions on the back before filling in this page) Pressure sensor (10) for the pressure P of the downstream supply path (5b); and the detection of the electromagnetic proportional valve (6) The position sensor (11) of the bobbin position; and according to the signals from the detectors (10) and (11), it is used to control the bobbin position, which can feedback control the supply flow rate Q and The supply pressure P, therefore, its controllability, that is, the static characteristics such as linearity and hysteresis, and the dynamic characteristics such as inductivity can be greatly improved by comparison with conventional techniques. Accordingly, when the aforementioned PQS valve (2) is applied to, for example, an injection molding machine, it can correspond to a wide range of molding conditions depending on the shape and material of the molded product, and high reproducibility can be obtained. Increase the forming quality. In addition, as described above, the electromagnetic proportional valve (6) is provided with a discharge position. According to the signal sent by the pressure sensor (10), it can be used to feedback control the opening degree. Therefore, the minimum supply pressure P to the host side is lost. The guide pressure P min can be controlled up to zero pressure, and thus can fully meet the low pressure requirements such as the low pressure clamping process in the injection molding machine. Printed by the Intellectual Property of the Ministry of Economic Affairs and the Consumer Consumption Cooperative. In addition, the structure of the aforementioned PQS valve (2) is compared with the conventional proportional solenoid-type relief valve flow adjustment valve device (refer to Figure 6). The pressure sensor (10) and the position sensor (11). In addition, since the pressure proportional valve (8) and its current driving circuit (9), which are necessary for the conventional technology, are not required, they can be offset by the sensor (10, 11). ) Cost increase --- Implementation mode 2 --- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -24- 552354 A7 B7 V. Description of the invention (22) (Please read the notes on the back first (Fill in this page again.) Figure 5 is a block diagram showing a PQS valve (20) (hydraulic circuit device) according to a second embodiment of the present invention. This PQS valve (20) is different from the PQS (2) of the first embodiment in that only the small hole configuration in the downstream-side control passage (15) is different. The other structure is the same as that of the first embodiment, so the following is The same components are given the same numbers and their descriptions are omitted. In addition, the PQS valve (20) of the second embodiment applies a moderate brake to the operation of the valve body (7a) when the differential pressure compensation valve (7) is opened and closed as in the first embodiment, and only makes the valve The closing operation speed of the body (7a) is further increased. The Intellectual Property Bureau of the Ministry of Economic Affairs (printed by the Industrial and Consumer Cooperatives, that is, in the first embodiment described above, the small hole (17) of the downstream side control path (15) is a safety valve (18) and a differential pressure compensation valve (7) — It acts as a source of differential pressure when the control-type relief valve functions, and at the same time, a moderate brake is applied to the operation of the valve body (7a) of the differential pressure compensation valve (7), and the operation of the valve body (7a) is performed. Stabilizing effect, but as a result, when the differential pressure compensation valve (7) is closed, the action of the valve body (7a) becomes slow, as described above, even if the bobbin (6a) of the electromagnetic proportional valve (6) is increased ), But the reason why the increase in the flow rate on the host side cannot be induced is too high. To explain this in detail, the PQS valve (2) of the first embodiment operates to increase the supply in the flow control mode. The supply flow of oil to the host side is to change the flow command 値 Q i and increase the opening of the electromagnetic proportional valve (6), and it is necessary to increase the operating oil from the pump (3) to the electromagnetic proportional valve (6). Flow. At this point, first, use the slave controller (1 2) The signal sent out makes the solenoid proportional valve in the supply position (6) This paper size applies to the national standard (CNS) A4 specification (210X 297 mm) -25- 552354 A7 —_ B7___ V. Description of the invention (23) (Please read the precautions on the back before filling in this page) The degree of opening is increased, so that the differential pressure between the front and back of the solenoid proportional valve (6) is temporarily reduced, and the upstream and downstream side guide pressures are respectively supported. At this time, the valve body (7a) of the differential pressure compensation valve (7) is closed. At this time, the downstream side control path (1 5) causes the operating oil to flow toward the differential pressure compensation valve (7), but after all, the differential pressure compensation valve (7) is closed 7) The strength of the valve body (7a) is at best only the degree of the spring thrust of the spring (7b), so as mentioned above, the flow of the operating oil is throttled by the small hole (17), so that the valve body (7a) The closing operation is slow, and the working oil discharged from the pump (3) cannot be formed immediately to the electromagnetic proportional valve (6). That is, the opening operation of the electromagnetic proportional valve (6) itself can be speeded up, but the supply cannot be made thereby. The supply flow of the operating oil to the host side increases as the target, so for The flow sensing formation leaves room for improvement. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has printed such a transitional phenomenon in consideration. 'The PQS valve (20) of this embodiment 2 controls the path on the downstream side as shown in the figure (1 5), the first small hole (2 1) having a larger cross-sectional area of the working oil than the small hole (1 7) of Embodiment 1 is arranged in a straight line; and the first small hole (2 1) is larger than the first small hole (2 1) A stronger throttling degree, that is, a smaller second hole (22) through a cross-sectional area; and a check valve (24) 'is provided in the shunt path (23)' of the second small hole (22) The differential pressure compensation valve (7) allows the hydraulic fluid to flow 'in addition and prevents it from flowing back. More specifically, the first small hole (21) is, for example, a small hole having a circular cross section with a diameter of about 2 mm, and the second small hole (22) is a small hole similar to the first embodiment ( 17) A circular cross section with the same diameter of about 1 mm. In addition, the working oil is allowed to pass through the downstream control path (1 5). This paper size applies to the national standard (CNS) of the paper (210x297 mm) -26- 552354 A7 B7____ 5. Description of the invention (24) Compensation from differential pressure When the valve (7) flows to the downstream side supply passage (5b), then the flow of the working oil is through the first and second small holes (2 1). CPlease read the precautions on the back and fill in this page ) (22) is throttled, and the second small hole (22) is used to withstand passage resistance in the same manner as in the first embodiment. In addition, when the flow of the operating oil is caused to flow through the downstream-side control passage (1 5) toward the differential pressure compensation valve (7), the flow of the operating oil is only from the first orifice (2 1), which has a relatively low degree of throttling. ) To form a relative increase in the passing speed of the flow through resistance. In this way, in order to increase the supply flow rate of the supply of operating oil to the host side, when the opening degree of the electromagnetic proportional valve (6) is greatly opened, the control path is directed to the downstream side ( The flow of the differential pressure compensation valve (7) in 15) makes the flow of the working oil faster than that in Embodiment 1. This part 'makes the valve body (7a) of the differential pressure compensation valve (7) act at a higher speed and closes. status. Therefore, the opening and closing of the electromagnetic proportional valve (6) slows down the closing and closing of the differential pressure compensation valve (7) greatly, and the flow of the hydraulic oil from the valve (3) to the electromagnetic proportional valve (6) due to the formation Immediately increases, so when the supply flow rate of the hydraulic oil is increased, its sensitivity can be further improved. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and when the valve body (7a) of the differential pressure compensation valve (7) is opened, the oil flowing through the downstream side control passage (1 5) is moved from the first and the first 2 The small holes (2 1) and (22) form a relatively large resistance to pass, so that a moderate brake is applied to the operation of the valve body (7 a) as in the first embodiment. In addition, when reducing the supply flow rate for supplying the operating oil to the host side, 'the opening degree of the electromagnetic proportional valve (6) is controlled to be smaller by using the controller (1 2)'. The Chinese standard (CNS) A4 standard (210X297) is used for the expansion standard. Gongchu :) -27- 552354 A7 _B7__ 5. Description of the invention (25 ^ But at this time, the hydraulic pressure on the upstream side of the electromagnetic proportional valve (6) is rapidly increased, and the differential pressure compensation valve (14) 7) The valve body (7a) works. At this time, as the valve body (7a) is opened, the operating oil in the downstream control passage (1 5) is moved from the differential pressure compensation valve (7) to the downstream supply passage. (5b) flow, and make the flow of the working oil from the first and second small holes (21), (22) to form a through resistance, but for the valve body (7a) as described above due to the extremely high flow The side pilot pressure acts, so that the valve body (7a) is opened to operate at a very high speed. As a result, when the supply flow rate is reduced, there is no problem of induction delay. Therefore, according to the PQS valve according to the second embodiment, (20), the same effect as that of the PQS valve of the first embodiment can be obtained. As a result, the two small holes (2 1), (22) and the check valve (24) provided in the downstream side control path (1 5) are used to ensure the operational stability of the differential pressure compensation valve (7). At the same time, the valve body (7a) can be closed at a higher speed, so that when the supply flow rate of the supply of operating oil to the host is increased, the sensitivity can be sufficiently improved. In this way, it is suitable for injection molding machines. In some cases, it is easier to form a thin-sheet molded product than the conventional technique, and the cost can be reduced due to the shortening of the molding cycle. In this regard, the injection-molded thin-sheet product is used to make the resin after injection pass through the interior of the mold. In order to prevent coagulation, in order to prevent coagulation, high-speed flow rate induction is particularly required. For example, the PQS valve of this embodiment is particularly effective to improve the sensitivity. --- Other embodiments _ One paper size applies the Chinese national standard TCNS) A4 specification (210X297 Mm) I-28- L --------- (Please read the notes on the back before filling this page) Order ^ 1. Printed by the Intellectual Property of the Ministry of Economic Affairs 笱 Employee Consumer Cooperative 552354 A7 B7 V. Invention Instructions (26) (Please read the cautions on the back before filling out this page.) The present invention is not limited to the configurations of the aforementioned first and second embodiments, but also includes other various actual configurations. That is, in the aforementioned first and second embodiments, the hydraulic circuit device related to the present invention is used as one PQS valve (2, 20) ', but the hydraulic circuit according to the present invention is not necessarily configured as an integrated compound valve. The main unit is not limited to an injection molding machine, and can be applied to various mechanical devices including a hydraulic actuator such as a hydraulic cylinder and a hydraulic motor. The configuration of the controller is not limited to the digital controller (12) of the foregoing embodiments. For example, an analog controller having a similar function such as a comparator or an operational amplifier may be used. Furthermore, the electromagnetic proportional valve of the present invention is not limited to the foregoing embodiments, and may be a variable throttle valve having electrical throttles of the A inlet, the P inlet, and the T inlet. That is, a direct-acting type that directly presses the bobbin (6a) using a solenoid valve (6b), or a control type that uses a small control valve to indirectly operate the bobbin may be used. Further, in the case of a control type, a type using a proportional valve as a control valve and a type using a servo valve such as a nozzle tongue valve may be used. In addition, since the present invention is provided with a bobbin position sensor, the electromagnetic proportional valve (6) may be renamed a servo valve. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs [Industrial Applicability] As mentioned above, the hydraulic circuit device of the present invention is to speed up the operation of the actuator of the host and improve the control accuracy. The controllable range of the pressure can be extended to a point of slightly zero pressure, so it has extremely excellent characteristics as a hydraulic actuator used to drive mechanical devices. Particularly, it is suitable for injection molding machines to achieve large molding quality. The paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -29- 552354 A7 B7___ V. Description of the invention (27) (Please read the notes on the back before filling in this 萸) to increase and shorten The manufacturing cycle time and the low-pressure clamping process that conventional technology cannot handle are also fully applicable, so the industrial application possibility is very high. [Brief description of the drawing] Fig. 1 is a diagram showing the structure of a PQS according to Embodiment 1 of the present invention. Fig. 2 is a diagram corresponding to Fig. 1 when the solenoid proportional valve is in the supply position. Fig. 3 is a timing chart showing changes in the supply flow rate and supply pressure of the working oil when the model of the injection molding machine is operated to clamp the cylinder. Fig. 4 is a characteristic diagram showing the correlation between the control signal (current 値) input to the solenoid proportional valve and the supply flow rate or supply pressure of the hydraulic oil, as compared with a conventional example. Fig. 5 is a first diagram corresponding to the second embodiment. Fig. 6 is a first view corresponding to an example of a conventional hydraulic circuit device. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs [Illustration of drawing number] 1 ... host hydraulic circuit, 2, 20 ... hydraulic circuit device, 3 ... constant capacity pump, 4 ... oil tank, 5 ... supply path, 5a ... upstream side Supply passage, 5b ... downstream side supply passage, 6 ... flow proportional valve, 6a ... bobbin, 6b ... solenoid valve, 6c ... spring, 7 ... differential pressure compensation valve, 7a ... valve body, 7b ... spring member, 8 ... pressure Proportional valve, 9, 12cl ... Current driver, 10 ... Pressure sensing This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -30- 552354 A7 B7 V. Description of the invention (28) Measuring device, 11 ... position sensor, 12 ... controller, 12a ... pressure deviation calculation section, 12b ... flow deviation calculation section, 12c ... PQ selection section, 13 ... discharge path, 14 ... branching section, 15 ... downstream control path, 1 7… orifice, 1 8… control relief valve (safety valve), 2 1… orifice 1st, 2 2… orifice 2 2… path, 24… check valve, P… supply pressure, P i ... pressure command 値, Q ... actual supply flow rate, Q i ... flow command 値. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -31-

Claims (1)

552354 A8 B8 C8 D8 六、申請專利範圍 1 (請先閲讀背面之注意事項再填寫本頁) 1. 一種液壓迴路裝置，針對在供給作動液到液壓致動 器的供給通路（5 )，介設用以調整作動液的供給流量的 電磁比例閥（6 )，並且設有從該電磁比例閥（6 )的上流 側及下流側分別承受嚮導壓’使此等差壓能形成一定地由 上流側的供給通路（5a )使作動液分流到油槽（4 )的差 壓補償閥（7 )的液壓迴路裝置（2、20 )，其特徵爲： 前述電磁比例閥（6 )，具備有：供給作動液到致動 器的供給位置之外，至少還具有從該致動器排出作動液的 排出位置；及 檢測前述下流側的供給通路（5b )的作動液壓並輸出 電氣信號的壓力感測器（10);及 檢測前述電磁比例閥（6 )的筒管位置並輸出電氣信 號的位置感測器（11 );及 分別承受從前述壓力感測器（1 0 )及位置感測器（11 )所輸出的信號，並對前述致動器使作動液的供給流量或 供給液壓形成控制指令値地，回饋控制述電磁比例閥（6 )開放程度的控制器（12 )。 經濟部智慧財產局員工消費合作社印製 2. 如申請專利範圍第1項所記載之液壓迴路裝置（2 、20)，其中，前述控制器（12)，具備有： 根據從位置感測器（11 )發出的信號求出對前述致動 器的作動液的實際供給流量，同時從流量指令値減去該實 際供給流量而算出流量偏差的流量偏差演算部（1 2b ); 及根據從壓力感測器（1 〇 )發出的信號求出對前述致 動器的作動液的實際供給液壓，同時從壓力指令値減去該 本紙張尺度適用中-國家標準( CNS ) A4規格（210X297公嫠)~= -32- 552354 A8 B8 C8 D8 六、申請專利範圍 2 實際供給流量而算出壓力偏差的壓力偏差演算部（1 2a ); 及 (請先閲讀背面之注意事項再填寫本頁) 選擇前述流量偏差及壓力偏差之中偏差値較小的偏差 ，並根據該選擇的偏差算出前述電磁比例閥（6 )的目標 筒管位置的PQ選擇部（12c);及 使成爲前述PQ選擇部（1 2c )形所算出的目標位置 地，在前述電磁比例閥（6 )的筒管（6a )的電磁閥（6b )外加電流的電流驅動器（1 2d )。 3. 如申請專利範圍第1或2項中任何一項所記載之液 壓迴路裝置（2、20)，其中，前述差壓補償閥（7)，是 具有將其閥體（7a)彈推至關閉側的彈簧構件（7b)，並 使該閥體（7a )在關閉側承受來自前述電磁比例閥（6 ) 的下流側的嚮導壓，另外使閥體（7a )在開放側承受來自 電磁比例閥（6 )的上流側的嚮導壓， 經濟部智慧財產局員工消費合作社印製 並在將嚮導壓從前述電磁比例閥（6 )的下流側引導 至前述差壓補償閥（7 )的下流側的控制通路（1 5 )，配 設用以節流作動液的流動的小孔（1 7 )，另外，在該小孔 (1 7 )及差壓補償閥（7 )之間的控制通路（1 5 )連接嚮 導溢流閥（1 8 )。 4. 如申請專利範圍第3項所記載之液壓迴路裝置（20 )，其中，在前述下流側的控制通路（1 5 )，直線排列配 置第1小孔（2 1 )及比第1小孔節流程度更強的第2小孔 (22)，並且在分流該第2小孔（22)的通路（23)，容 許朝向前述差壓補償閥（7 )作動液的流動之外，配設有 本紙張尺度適用中國國家摇準（CNS ) A4規格（210X297公嫠) ~ ^ ~—一一一 -33- 552354 A8 B8 C8 D8 六、申請專利範圍 3 用以阻止其相反的流動的反止閥（24 )。 5.如申請專利範圍第1項所記載之液壓迴路裝置（20 )，其中，前述液壓致動器是爲了用以驅動射出成形機。 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家揉準（CNS ) A4規格（210X297公嫠） -34-552354 A8 B8 C8 D8 6. Scope of patent application 1 (Please read the precautions on the back before filling out this page) 1. A hydraulic circuit device is provided for the supply path (5) for supplying the operating fluid to the hydraulic actuator. An electromagnetic proportional valve (6) for adjusting the supply flow of the working fluid, and is provided with a pilot pressure from the upstream side and the downstream side of the electromagnetic proportional valve (6), so that the differential pressure can be formed from the upstream side to a certain extent. The supply path (5a) of the hydraulic circuit device (2, 20) that divides the operating fluid to the differential pressure compensation valve (7) of the oil tank (4) is characterized in that the electromagnetic proportional valve (6) is provided with: In addition to the supply position of the fluid to the actuator, at least a discharge position for discharging the operating fluid from the actuator; and a pressure sensor (for detecting an operating hydraulic pressure of the downstream supply path (5b)) and outputting an electrical signal ( 10); and a position sensor (11) for detecting the position of the bobbin of the electromagnetic proportional valve (6) and outputting an electrical signal; and a pressure sensor (10) and a position sensor (11) that are respectively subjected to the aforementioned pressure sensor (10) Output signal Or the supply flow rate supplied to the hydraulic actuator and the actuator control commands Zhi liquid form, the feedback control of said proportional solenoid valve (6) opening up of the controller (12). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2. The hydraulic circuit device (2, 20) as described in item 1 of the scope of patent application, wherein the aforementioned controller (12) is provided with: 11) a signal for calculating the actual supply flow rate of the actuating fluid of the aforementioned actuator, and subtracting the actual supply flow rate from the flow command 値 to calculate a flow deviation flow deviation calculation unit (12b); and according to the pressure sense The signal from the tester (10) determines the actual supply hydraulic pressure to the operating fluid of the aforementioned actuators, and at the same time subtracts this paper size from the pressure instruction 値 Applicable to the national standard (CNS) A4 specification (210X297 cm) ~ = -32- 552354 A8 B8 C8 D8 VI. Patent application range 2 Pressure deviation calculation section (1 2a) that calculates the pressure deviation based on the actual supply flow; and (Please read the precautions on the back before filling this page) Select the aforementioned flow Among the deviations and pressure deviations, the deviation 値 is smaller, and the PQ selection unit (12c) for the target bobbin position of the electromagnetic proportional valve (6) is calculated based on the selected deviation; Optional portions (1 2c) shaped calculated target position, the bobbin (6a) of the solenoid proportional valve (6) is a solenoid valve (6b) of the applied current current driver (1 2d). 3. The hydraulic circuit device (2, 20) according to any one of claims 1 or 2, wherein the differential pressure compensation valve (7) is provided with a valve body (7a) that is pushed to the The spring member (7b) on the closing side makes the valve body (7a) receive the pilot pressure from the downstream side of the electromagnetic proportional valve (6) on the closing side, and the valve body (7a) receives the electromagnetic ratio on the opening side. The pilot pressure on the upstream side of the valve (6) is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and guides the pilot pressure from the downstream side of the electromagnetic proportional valve (6) to the downstream side of the differential pressure compensation valve (7). A control passage (1 5) is provided with a small hole (1 7) for throttling the flow of the working fluid, and a control passage (7) between the small hole (1 7) and the differential pressure compensation valve (7) is provided. 1 5) Connect the pilot relief valve (1 8). 4. The hydraulic circuit device (20) according to item 3 of the scope of patent application, wherein the first control hole (1 5) on the downstream side is linearly arranged with the first small hole (2 1) and the smaller small hole than the first small hole. A second orifice (22) having a stronger throttling degree is provided, and the passage (23) for diverting the second orifice (22) allows the flow of the working fluid to the differential pressure compensation valve (7), and is provided. Have this paper standard applicable to China National Standard (CNS) A4 specification (210X297 male) ~ ^ ~-one one one -33- 552354 A8 B8 C8 D8 Six, apply for a patent scope 3 to prevent its reverse flow Valve (24). 5. The hydraulic circuit device (20) according to item 1 of the patent application scope, wherein the hydraulic actuator is used to drive an injection molding machine. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies to China National Standard (CNS) A4 (210X297 cm) -34-
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CN1464945A (en) 2003-12-31
CN1274965C (en) 2006-09-13

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