TW548342B - Method for selective plating of metal - Google Patents
Method for selective plating of metal Download PDFInfo
- Publication number
- TW548342B TW548342B TW90132975A TW90132975A TW548342B TW 548342 B TW548342 B TW 548342B TW 90132975 A TW90132975 A TW 90132975A TW 90132975 A TW90132975 A TW 90132975A TW 548342 B TW548342 B TW 548342B
- Authority
- TW
- Taiwan
- Prior art keywords
- item
- gold
- patent application
- scope
- plating
- Prior art date
Links
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
548342 五、發明說明(1) 發明領域: 本發明與一種電鑛金屬製程有關,特別是有關於一種應用 網印技術形成濕膜,並藉此改善鍍金屬時滲鍍情況的方 法。 發明背景: 在極大型積體電路(ULSI)趨勢中,半導體元件的尺寸不斷 地縮小,用以不斷地提昇晶圓上元件之積集度。隨著電子 元件尺寸的縮小化後,在積體電路的製造過程上出現許多 新挑戰。此外,由於電腦以及通訊技術之蓬勃發展,伴隨 需要的是更多不同種類與應用之電子元件。例如,由語音 操作之電腦界面或其他通訊之界面均需要許多之記憶元件 以及不同類型之半導體元件。是故,積體電路之趨勢仍然 會朝向高積集度發展。近幾年來高密度半導體元件發展階 段早已進入次微米(s u b m i c r ο η)甚至深次微米之技術範 圍。 此外,隨著半導體技術之快速演進,電子產品在輕薄 短小、多功能速度快之趨勢的推動下,I C半導體的I /0數 目不但越來越多密度亦越來越高,使得封裝元件的引腳數 亦隨之越來越多,速度的要求亦越來越快。為因應此趨 勢,封裝也越做越小以符合要求,而發展出覆晶封裝548342 V. Description of the invention (1) Field of the invention: The present invention relates to a process of electro-mineral metal, and particularly relates to a method for forming a wet film by applying screen printing technology, and thereby improving the penetration condition during metal plating. Background of the Invention: In the ultra-large-scale integrated circuit (ULSI) trend, the size of semiconductor components is continuously shrinking to continuously increase the accumulation of components on wafers. With the reduction in the size of electronic components, many new challenges have arisen in the manufacturing process of integrated circuits. In addition, due to the rapid development of computer and communication technology, there is a need for more and more electronic components of different types and applications. For example, computer interfaces operated by voice or other communication interfaces require many memory components and different types of semiconductor components. Therefore, the trend of integrated circuits will still develop toward a high integration degree. In recent years, the development stage of high-density semiconductor elements has already entered the technical range of sub-micron (s u b m i c r ο η) and even deep sub-micron. In addition, with the rapid evolution of semiconductor technology, driven by the trend of light, thin, short, and multi-functional speeds, the number of I / 0 of IC semiconductors is not only increasing, but also increasing in density. The number of feet is increasing, and the speed requirements are getting faster and faster. In response to this trend, packages have also become smaller and smaller to meet requirements, and flip-chip packages have been developed.
第4頁 548342 五、發明說明(2) — (F 1 i P c h i p )、晶片級尺寸封裝與高數量I / 〇之封裝,球矩 陣排列封裝技術(bal 1 grid array ;簡稱bgA封裝)。而作 為溝通與承載晶片的電路板而言,亦勢必隨著前述這些技 術的發展,改良其本身的製作方法。譬如具更多功能^更 強大運算能力的晶片,便需具較多接點,較複雜之電路佈 局的電路板配合。 於前 板。 之一 在鍍 影乾 電路 鍍。 著力 使用 對國 述之情況下’需製作出密度較高,線寬更窄的電路 這是目前電路板製作技術的挑戰,其中會遭遇的困難 是鍍金屬時會產生的滲鍍的問題。如所示,習知技蓺 金屬時’乃先在電路板100上覆上—層乾膜,曝光顯= 膜以形成欲鍍金屬區域之圖案’接著便鍍金屬n 0於 板100上’最後去除乾膜。圖一中金屬12〇部分即為滲 會發生滲鍍的原因很多,包括乾膜與電路板之間的附 的,所鍍的金屬材質等。目前最常使用的解決方案為 較厚之乾膜,且這類乾膜一般皆仰賴進口,如此一來 内廠家而言,成本便增加許多。 =外,關於上述問題的解決方案’亦有提出以油墨為原 =丄利用塗佈(coating)的方式,形成濕膜於電路板上。 ,方法以curtain coater方式生產,可解決滲鍍問題的發 ^。但此種方式在製程上較為繁瑣複雜’成本上並不比使 :f厚之乾膜的方式低’且其所使用的相關機台設備也比 較貝。因此,雖解決了滲鍍的問題,但是在市不具Page 4 548342 V. Description of the invention (2)-(F 1 i P c h i p), wafer-level package and high-quantity I / 〇 package, ball matrix array packaging technology (bal 1 grid array; bgA package for short). As for the circuit board that communicates with and carries the chip, it is bound to improve its own manufacturing method with the development of these technologies. For example, a chip with more functions and more powerful computing power requires more contacts and more complicated circuit layout. On the front panel. One is plated in the shadow-dried circuit. Focus on the use In the case of the country, it is necessary to make a circuit with a higher density and a narrower line width. This is a challenge of current circuit board manufacturing technology, and the difficulty that will be encountered is the problem of penetration during metal plating. As shown, in the conventional technique, when metal is used, "a dry film is first coated on the circuit board 100, and the exposure is shown as a film to form a pattern of the area to be plated." Remove the dry film. The metal part 120 in Figure 1 is the cause of infiltration. There are many reasons, including the attachment between the dry film and the circuit board, and the metal material to be plated. At present, the most commonly used solution is a thicker dry film, and such dry films generally rely on imports. As a result, the cost for domestic manufacturers has increased significantly. In addition, the solution to the above-mentioned problem has also been proposed, which uses ink as the basis and uses coating to form a wet film on a circuit board. , The method is produced by curtain coater, which can solve the problem of plating. However, this method is more complicated and complicated in terms of manufacturing process, and its cost is not lower than that of the dry film with a thickness of f, and the relevant equipment used is also relatively low. Therefore, although the problem of infiltration is solved, it is not available in the market.
548342 五、發明說明(3) 有競爭力。本發明即提供了另一個較具有產業競爭優勢的 方法來取代傳統的方法。 發明目的及概述: 鑑於先前技術之缺失,本發明之主要目的為提供一種可改 善在選擇性鍍金屬時,發生滲鍍情形的方法,並節省製造 的成本。 本發明利用網印方式,藉網印型油墨,使用刮刀及網版在 物品表面形成濕膜,製程技術上並無困難,所使用之設備 成本也較低。 本發明提供一種選擇性鍍金屬的方法,藉由在不欲形成金 屬層的區域上形成一濕膜,使物品表面可選擇性的鍍上金 屬。其中前述之方法至少包含以下步驟:提供一底材,此 底材可以為印刷電路板等欲部分鍍上金屬之物品,提供一 油墨,運用網印方式形成濕膜於底材之上,此濕膜具光敏 感性,可以底片曝光技術將圖案轉移至濕膜上,再硬化上 述濕膜,接著,曝光濕膜,然後顯影濕膜,顯影濕膜後露 出上述底材上欲鍍上金屬的區域,之後,形成金屬於上述 底材之上欲鍍上金屬的區域,最後,去除濕膜,即可得選 擇性鍍金屬。548342 V. Description of invention (3) Competitive. The present invention provides another method with industrial competitive advantages to replace the traditional method. Objects and Summary of the Invention: In view of the lack of the prior art, the main object of the present invention is to provide a method that can improve the occurrence of infiltration during selective metal plating, and save manufacturing costs. The invention utilizes screen printing method, and uses screen printing ink to form a wet film on the surface of the article by using a doctor blade and a screen plate. There is no technical difficulty in the manufacturing process, and the cost of the equipment used is also low. The present invention provides a method for selective metal plating, by forming a wet film on an area where a metal layer is not to be formed, so that the surface of an article can be selectively plated with metal. The aforementioned method includes at least the following steps: providing a substrate, which can be an article such as a printed circuit board to be partially plated with metal, providing an ink, and forming a wet film on the substrate by screen printing. The film is light sensitive, and the pattern can be transferred to a wet film by negative film exposure technology, and then the wet film is hardened. Then, the wet film is exposed, and then the wet film is developed. After the wet film is developed, the areas on the substrate to be plated with metal are exposed. After that, a metal is formed on the substrate to be plated with metal. Finally, the wet film is removed to obtain selective metal plating.
第6頁 548342 五、發明說明(4) 發明詳細說明: 本發明揭露一種有關於改善在選擇性鍍金屬時,習知技術 所發生之滲鍍情形的問題。不同於以往,在物品表面形成 乾膜的方式,本發明利用於其他製程有使用之網印技術, 使網印型油墨透過網版在物品表面形成濕膜。藉調整油墨 之組成,所形成之濕膜對阻擋滲透情形的發生,有極優越 的表現。將網印技術轉移至本發明之製程中,不僅可以克 服先前技術所遭遇之困難,且成本上亦可降低。 本發明之詳細說明如下,所述之較佳實施例只做一說明非 用以限定本發明。 如圖二所示,提供一底材2 0 0,此底材2 0 0不限定其材質為 何,其可為已塗過防焊液之印刷電路板,例如行動電話所 使用之電路板,亦可為其它欲在其表面部分特定區域鍍上 金屬之物品。接著,運用網印方式形成濕膜2 2 0於該底材 2 0 0之上,此濕膜2 2 0具光敏感性。上述之網印方式,例如 是以刮刀刮過網版(mesh),使油墨透過網版之開口覆蓋 於底材2 0 0之上,而最後形成濕膜2 2 0。且上述之網版開口 之配置與大小係與欲形成金屬的區域之配置與大小對應。 在使用油墨之前,需先攪拌此油墨,之後靜置此油墨。然Page 6 548342 V. Description of the invention (4) Detailed description of the invention: The present invention discloses a problem related to improving the penetration of the conventional technology in selective metal plating. Different from the conventional method of forming a dry film on the surface of the article, the present invention utilizes screen printing technology used in other processes to make the screen printing ink form a wet film on the surface of the article through the screen. By adjusting the composition of the ink, the formed wet film has an excellent performance in preventing the occurrence of penetration. The transfer of screen printing technology to the process of the present invention can not only overcome the difficulties encountered by the previous technology, but also reduce the cost. The detailed description of the present invention is as follows. The preferred embodiment is described only for the purpose of not limiting the present invention. As shown in FIG. 2, a substrate 200 is provided. The substrate 2000 is not limited in material. It can be a printed circuit board that has been coated with solder resist, such as a circuit board used in a mobile phone. It may be other articles to be plated with metal in a specific area of the surface part. Next, a wet film 2 2 0 is formed on the substrate 2 0 by screen printing. The wet film 2 2 0 is light sensitive. The above-mentioned screen printing method is, for example, scraping through a mesh with a doctor blade, so that the ink passes through the opening of the screen and covers the substrate 200, and finally forms a wet film 220. In addition, the arrangement and size of the screen openings described above correspond to the arrangement and size of the area where the metal is to be formed. Before using the ink, you need to stir the ink, and then let the ink stand. Of course
第7頁 548342 五、發明說明(5) 後,使用刮刀與網版將此油墨塗佈於底材2 0 0上,並陰乾 該油墨,以形成濕膜2 2 0。上述之油墨包含2%〜3%成分組成 的消泡劑’此乃為避免油墨在油墨桶中攪拌時與在到印時 產生氣泡而添加。而上述攪拌此油墨的時間,約持續5〜j 〇 分鐘。靜置此油墨之時間則約為2 0至3 0分鐘。蔭乾此油墨 的溫度可在室溫下或保持在溫度4 (TC以下,時間約為丨〇至 1 5分鐘。舉一較佳實施例而言,可使用n i p p 〇 n公司的 OPTO-ER N-40 0G(H)型號之油墨,需求的濕膜黏度約在8〇〜 90 poise,可使用各種丁數的網版。且另一方面,為了增 加濕膜2 2 0的黏度,可經由提高油墨中之固形份達成。之 後’硬化此濕膜2 2 0,此步驟可以加熱烘烤的方式為之, 烘烤硬化之溫度約為i 0(rc而持續丨〇分鐘,藉由熱能的提 供,可除去部分的溶劑,同時使濕膜22〇的結構更緻密。 請參閱圖三’類似積體雷辛々视〜广μ 程中所使用之光阻,、可3 = 2 = jHtolithography)製 膜220分子結構改變。而在據祐其^光二'之不同,而致使濕 顯影液中,藉此部分二在:用1 ,濕膜22〇溶解於 底材2 0 0表面。其程2 2 0被移;而露出欲鍵金屬之 其可以使用光罩或底片田/丄如下:f先,曝光此濕膜22〇, 移至濕膜22 0上。接著/、_先的方式…,將所欲形成的圖案轉 顯影液浸蝕濕膜2 2 0^ =已曝^的濕膜2 2 0,其係利用 底材2 0 0上欲形成金屬的^凡成後逍留殘餘濕膜2 3 0並露出 以防止先前技術戶斤產生 > 品或2 1 〇 迷殘餘滿膜2 3 0可用 展玍之滲鍍現象。Page 7 548342 V. Description of the invention (5) After coating the ink on a substrate 200 with a doctor blade and a screen, the ink is dried in the shade to form a wet film 2 2 0. The above-mentioned ink contains a defoamer with a composition of 2% to 3%. This is added to avoid the occurrence of air bubbles when the ink is stirred in the ink tank and when it is printed. The above stirring time of the ink lasts about 5 ~ j0 minutes. The ink is left to stand for about 20 to 30 minutes. The temperature of this ink can be kept at room temperature or below 4 ° C, and the time is about 丨 0 to 15 minutes. For a preferred embodiment, the OPTO-ER N company from Nipp On can be used. For -40 0G (H) type inks, the required wet film viscosity is about 80 ~ 90 poise, and various stencils can be used. On the other hand, in order to increase the viscosity of the wet film 2 2 0, it can be improved by The solid content in the ink is achieved. After this' harden this wet film 2 2 0, this step can be heated and baked in a way that the temperature of baking and hardening is about i 0 (rc for 丨 0 minutes, provided by thermal energy , Can remove part of the solvent, while making the structure of the wet film 22 ° more dense. Please refer to Figure 3, “Resin similar to the integrated volume defiance ~ Photoresistance used in the wide μ process, 3 = 2 = jHtolithography) film formation The molecular structure of 220 is changed. However, according to the difference between the light and the light, the wet developing solution is caused, so that part of the liquid is dissolved on the surface of the substrate 2 with the wet film 22, and the process is 2 2 0. It can be used to expose the metal to be bonded, which can use a photomask or a negative film field as follows: f First, expose this wet film 22〇 , Move to the wet film 22 0. Then /, the first way ..., the pattern to be formed is transferred to a developing solution to etch the wet film 2 2 0 ^ = the exposed wet film 2 2 0, which uses a substrate After the formation of metal on 2 0 0, the residual wet film 2 3 0 is left uncovered and exposed to prevent the generation of the prior art product or 2 1 0 2 full residual film 2 3 0 can be used to show the phenomenon of penetration plating .
548342 五、發明說明(6) 請參閱圖四,形成金屬24〇於欲鍍金屬21〇之上。上述之 fI以為:化學錫、化學銀、化學鎳金、電鍍硬金、電鍍 軟金。而化學鎳金之鎳組成成分厚度約在100〜2〇〇微米又 ^ β ),金組成成分的厚度則約為2〜5微米(// )。最 後,並去除濕膜2 3 〇 (未圖示)。上述去除濕膜, f化鈉(NaOH)溶液侵蝕剝除之。形成金屬24〇於欲鍍金^ 0上的方法可以電鍍方式為之,亦可使用無電解電鍍 ' 視所4人形成之金屬適宜行事。例如:欲形成銲錫接 點二便可以網印塗佈錫膏的方式完成;而去除濕膜2 3 〇 二二二視,膜23 0成分不同,於本發明係以氫氧化鈉溶液 煜^ 。最後,在未鍍金屬240之金屬表面形成一有機保 f二古目的在避免金屬層因與空氣接觸而氧化。Entek乃 ^屬薄膜,主要成分為BTA,其選擇要點為需不會對 金屬層產生沉積。 η使用之電路板中最常使用鍍上化學鎳金之金 予鎳金之鎳組成成分厚度約在100~ 2 0 0微米 電話之丄金組成成分的厚度則約為2〜5微米(")。行動 耐磨耐ji板故ίΐ面上屬於按鍵的地方,因要有更好的 t刮性,故會選擇鍍化學鎳金, 易產生滲鍍的情形。 避免過去使用乾膜 牛另只施例,目丽為因應晶片尺寸封裝(Chip scale 548342 五、發明說明(7) p a c k a g e )之高階產品,於印刷電路板上電鍵軟金成為一關 鍵製程。習知技藝使用各種製程與乾膜皆難避免滲鍍,本 發明在電鍍軟金時的鎳成分厚度在200// π以上,金成分厚 度在20〜40// ’’之間,較鍍化學鎳金更厚了許多,在避免滲 鑛的情形上表現優良。 本發明以網印方式形成濕膜,在成本上降低了許多,極具 市場競爭力。同時亦解決了滲鍍的問題,且因網印技術的 製程熟悉性,在製程上適用性良好。 對熟悉此領域技藝者,本發明雖以一較佳實例闡明如上, 然其並非用以限定本發明精神。在不脫離本發明之精神與 範圍内所作之修改與類似的安排,均應包含在下述之申請 專利範圍内,這樣的範圍應該與覆蓋在所有修改與類似結 構的最寬廣的證釋一致。因此,闡明如上的本發明一較佳 實例,可用來鑑別不脫離本發明之精神與範圍内所作之各 種改變。548342 V. Description of the invention (6) Please refer to FIG. 4 to form metal 24o on top of metal 21o to be plated. The fI mentioned above are: chemical tin, chemical silver, chemical nickel gold, hard gold plating, soft gold plating. The thickness of the nickel composition of chemical nickel-gold is about 100 ~ 200 microns and ^ β), and the thickness of the gold composition is about 2 ~ 5 microns (//). Finally, the wet film 23 (not shown) is removed. As mentioned above, the wet film is removed, and it is stripped away by etching with sodium hydroxide (NaOH) solution. The method of forming the metal 24 onto the gold to be plated ^ 0 can be electroplating, or electroless plating can be used, depending on the metal formed by the 4 people. For example, if soldering contact 2 is to be formed, it can be completed by screen printing and applying solder paste; while removing the wet film 2320, the composition of the film 230 is different. In the present invention, a sodium hydroxide solution is used. Finally, an organic protective layer is formed on the metal surface of the unplated metal 240 to prevent the metal layer from oxidizing due to contact with air. Entek is a thin film with a main component of BTA. The main point of selection is that it does not deposit metal layers. η The most commonly used circuit boards used are chemically nickel-gold-plated gold to nickel-gold nickel. The thickness of the nickel composition is about 100 to 200 microns. The thickness of the gold composition of the telephone is about 2 to 5 microns (" ). Action Where the buttons on the surface of the abrasion-resistant and rugged board belong to the keys, for better t-scratching properties, electroless nickel gold plating will be selected, which is prone to infiltration. Avoid the use of dry film in the past. Another example is Muli, which is a high-end product that responds to chip size packaging (Chip scale 548342 V. Invention description (7) p a c k a g e). Soft gold keying on printed circuit boards has become a key process. It is difficult to avoid penetration through the use of various processes and dry films. The thickness of the nickel component when the soft gold is plated in the present invention is 200 // π or more, and the thickness of the gold component is between 20 and 40%. Nickel gold is much thicker and performs well in the case of avoiding ore infiltration. The invention forms a wet film by screen printing, which reduces the cost a lot and is very competitive in the market. At the same time, it also solves the problem of penetration plating, and because of the process familiarity of screen printing technology, it has good applicability in the process. For those skilled in the art, although the present invention is explained above with a preferred example, it is not intended to limit the spirit of the present invention. Modifications and similar arrangements made without departing from the spirit and scope of the present invention should be included in the scope of the patent application described below, and such scope should be consistent with the broadest evidence covering all modifications and similar structures. Therefore, a preferred embodiment of the present invention as explained above can be used to identify various changes made without departing from the spirit and scope of the present invention.
第10頁 548342 圖式簡單說明 圖式簡單說明: 圖一所示為顯示習知技藝在電鍍金屬於電路板上之截面 圖。 圖二所示為顯示本發明使用網印技術於物品上形成濕膜之 示意圖。 圖三所示為顯示本發明於濕膜上曝光顯影形成圖案之截面 圖。 圖四所示為顯示本發明於物品上形成金屬之截面圖。 符號對照表: 。 底材1 0 0 金屬110 滲鍍之金屬1 2 0 底材200 待鍍金屬區2 1 0 濕膜 2 2 0、2 3 0 金屬240Page 10 548342 Brief description of the drawings Brief description of the drawings: Figure 1 shows a cross-sectional view showing conventional techniques on electroplated metal on a circuit board. Fig. 2 is a schematic diagram showing the formation of a wet film on an article using screen printing technology according to the present invention. Fig. 3 is a sectional view showing a pattern formed by exposure and development on a wet film according to the present invention. FIG. 4 is a cross-sectional view showing a metal formed on an article according to the present invention. Symbol comparison table:. Substrate 1 0 0 Metal 110 Metal plated 1 2 0 Substrate 200 Area to be plated 2 1 0 Wet film 2 2 0, 2 3 0 Metal 240
第11頁Page 11
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW90132975A TW548342B (en) | 2001-12-28 | 2001-12-28 | Method for selective plating of metal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW90132975A TW548342B (en) | 2001-12-28 | 2001-12-28 | Method for selective plating of metal |
Publications (1)
Publication Number | Publication Date |
---|---|
TW548342B true TW548342B (en) | 2003-08-21 |
Family
ID=29997888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW90132975A TW548342B (en) | 2001-12-28 | 2001-12-28 | Method for selective plating of metal |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW548342B (en) |
-
2001
- 2001-12-28 TW TW90132975A patent/TW548342B/en not_active IP Right Cessation
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6015520A (en) | Method for filling holes in printed wiring boards | |
KR100733253B1 (en) | High density printed circuit board and manufacturing method thereof | |
US4360570A (en) | Use of photosensitive stratum to create through-hole connections in circuit boards | |
JP2000188473A (en) | New filling method for through hole | |
CN107493662B (en) | Method for manufacturing carbon oil with low resistance value and thickness of more than or equal to 25um on printed circuit board | |
CN1828411B (en) | Photosensitive resin composition | |
KR100557549B1 (en) | Method for forming bump pad of flip-chip and the structure thereof | |
CN109041425A (en) | A kind of production method and products thereof of COF double-faced flexible substrate fine-line | |
CN113543487A (en) | Surface treatment method of printed circuit board and application thereof | |
CN114190002A (en) | Forming method of semi-embedded thick copper fine circuit of flexible packaging substrate | |
CN100433954C (en) | Technological process for selective plating copper on through holes of flexible multiple layered printing circuit board | |
TW548342B (en) | Method for selective plating of metal | |
CN106455364A (en) | Electroplating and hole-filling technology for printed circuit board | |
CN105430925A (en) | Fabrication method of thick copper circuit board | |
JPH11315384A (en) | Electroless metal plating method | |
CN1402607A (en) | Method for selectively plating metal by screen printing | |
CN108430171A (en) | The method that semi-additive process makes making hole conductive layer during printed circuit board | |
CN101472406B (en) | Method for manufacturing wiring substrate | |
TW409383B (en) | Apparatus of plug hole process and the method thereof | |
US20100035187A1 (en) | Method for smoothing printed circuit boards | |
US20030089613A1 (en) | Method of selectively electroplating by screen-plating technology | |
CN111403362A (en) | Chip on film packaging method, packaging structure, display device and electronic equipment | |
JP3425139B2 (en) | Selective metal plating method | |
CN108391380A (en) | The preparation method of flexible circuit board | |
TW451301B (en) | Method for forming under bump metal |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |