TW541856B - Organic electro-luminescent display apparatus and method for manufacturing the same - Google Patents
Organic electro-luminescent display apparatus and method for manufacturing the same Download PDFInfo
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/353—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
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Abstract
Description
541856 五 、發明說明 (1) 本 發 明 有 關 一 種 有 機 E L ( 電 致 發 光 ) 顯 示 器 及 其 製 造 方 法 尤 指 一 種 具 有 用 於 進 行 全 彩 色 顯 示 的 結 構 的 有 機 E L 顯 示 器 及 其 製 造 方 法 0 [ 背 景 技 術 ] 有 機 E L 顯 示 器 以 有 機 E L 元 件 作 為 基 本 組 件 y 通 過 點 亮 或 不 點 亮 形 成 於 平 面 基 板 上 的 有 機 E L 元 件 5 進 行 圖 像 顯 示 〇 有 機 E L 元 件 是 指 使 規 定 面 積 的 電 極 對 向 設 置 j 其 中 - 個 作 為 施 加 正 電 壓 的 陽 極 y 另 一 個 作 為 施 加 負 電 壓 的 陰 極 在 該 電 極 之 間 設 置 有 具 有 由 有 機 發 光 材 料 形 成 之 發 光 層 的 有 機 層 其 是 通 過 在 電 極 之 間 施 加 電 壓 y 分 別 從 陰 極 注 入 電 子 從 陽 極 注 入 空 穴 到 發 光 層 中 ， 通 過 在 該 發 光 層 中 電 子 與 空 穴 的 再 次 耦 合 而 實 現 發 光 的 面 發 光 組 件 〇 該 有 機 E L 元 件 作 為 單 位 面 發 光 組 件 J 在 平 面 基 板 上 形 成 為 矩 陣 狀 ， 通 過 點 陣 驅 動 該 組 件 5 可 以 形 成 能 夠 顯 示 高 精 細 圖 像 的 平 板 顯 示 器 〇 另 外 根 據 有 機 發 光 材 料 的 研 究 人 們 開 發 了 表 示 色 純 度 較 向 的 R y G y B 的 各 發 光 顏 色 的 有 機 E L 元 件 ， 從 而 由 此 開 發 了 針 對 每 個 像 素 配 置 所 述 的 各 種 顏 色 發 光 元 件 ， 進 行 全 彩 色 顯 示 的 有 機 E L 顯 示 器 〇 圖 4 和 圖 5 表 示 其 一 個 實 例 其 表 示 通 過 點 陣 驅 動 進 行 全 彩 色 顯 示 的 有 機 E L 顯 示 器 的 結 構 〇 圖 4 表 示 該 結 構 的 說 明 圖 圖 5 是 圖 4 中 的 X- -X剖視的示意圖〔 ) 在 這 些 附 圖 中 在 由 透 明 的 玻 璃 等 形 成 的 基 板 1 上 j 在 晶 體 管 區 域 T 中 ， 形 成 有 T F 丁 的 半 導 體 層 5 另 外 由541856 V. Description of the invention (1) The present invention relates to an organic EL (electroluminescence) display and a manufacturing method thereof, particularly an organic EL display having a structure for performing full-color display and a manufacturing method thereof. [Background] Organic An EL display uses an organic EL element as a basic component. Y The image is displayed by turning on or off the organic EL element 5 formed on a flat substrate. An organic EL element is a device in which electrodes of a predetermined area are arranged opposite to each other. The anode y with a positive voltage and another cathode with a negative voltage are provided between the electrodes with an organic layer having a light-emitting layer formed of an organic light-emitting material. Electrons are injected from the cathode by applying a voltage y between the electrodes and from the anode. Holes in the light-emitting layer A surface light-emitting device that re-couples electrons and holes in the layer to realize light emission. The organic EL element is formed as a unit surface light-emitting device J on a planar substrate in a matrix shape. By driving the device 5 with a dot matrix, a high-definition image can be formed. Image flat panel display. In addition, based on the research of organic light-emitting materials, people have developed organic EL elements that represent the light-emitting colors of R y G y B with relatively high color purity, and thus have developed the various colors described for each pixel. Light-emitting element, organic EL display for full-color display. FIG. 4 and FIG. 5 show an example thereof, which shows the structure of an organic EL display for full-color display by dot-matrix driving. FIG. 4 shows an explanation of the structure. Schematic diagram of the X- -X cross section in Figure 4 () Glass and the like formed on the substrate 1 in the transistor region T j tube region, formed with T F. Butyrate semiconductor layer 5 by the addition
541856 五 、發明說明 (2) I T 〇 等 的 透 明 導 電 材 料形 成 的 多 個 第 1電極 (陽極） 2 針 對 每 個 像 素 獨 立 地 形 成。 在 該 第 1 電 極 2 之 間 的 基 板 1 上 y 沿 1 個 方 向 形 成 數據 行 L 1 和 電 源 行 L 2 沿 與 它 們 垂 直 的 方 向 形 成 掃 描行 L 3 0 另 外 ， 在 形 成 有 所 述 各 行 的 第 1電極2之間 ，形成由聚醯亞胺等形成的絕緣膜3 〇 另 外 在 該 第 1 電 極 2上 1 形 成 有 多 個 有 機 層 4 形 成 有 覆 蓋 於 該 有 機 層 4 上 面、 由 A 1 等 形 成 的 第 2 電 極 ( 陰 極 ) 5 〇 下 面 通 過 圖 5 對 形 成於 第 1 電 極 2 上 的 有 機 層 4 的 結 構 進 行 描 述 ( 在 這 裡 省略 上 述 各 行 L 1 、 L 2 、 L 3 ) y 在 基 板 1 上 的 第 1 電 極2 和 絕 緣 膜 3 上 形 成 空 穴 注 入 層 4 〇 和 空 穴 傳 層 4 1， 在 該 空 穴 傳 m 層 4 1 上 選 擇 形 成 第 1 顏 色 的 第 1 電 極2 上 的 區 域 在 該 區 域 上 y 依 次 形 成 第 1 發 光 層 4 2 a 、電 子 傳 fm 層 4 3 a Λ 電 子 注 入 層 4 4 a c •另外， ，在作為第2顏色而選擇的第1 _電極^ 2上的 區 域 ， 依 次 形 成 第 2 發 光層 4 2 b ’ 、電子傳輸層4 3 t )^ 電 子 注 入 層 4 4 b， 在作為第3顏色而選擇的第] L電極2 :上 的 區 域 1 依 次 形 成 第 3 發光 層 4 2 C Λ 電 子 傳 輸 層 4 3 C Λ 電 子 注 入 層 4 4 C 〇 另外 連 接 形 成 於 針 對 每 種 顏 色 而 選 擇 的 區 域 的 有 機 層 而 形成 有 機 層 4 以 覆 蓋 於 該 有 機 層 4 上 的 方 式 形 成 第 2 電極 5 在 該 第 2 電 極 5 和 第 1 電 極 2 的 交 叉 區 域 1 形 成 各種 顏 色 的 發 光 區 域 4 5 a ’ '4 ^ b，4 [ )c ( 在 這 裡 1 為 了 完 全 包括 發 光 區 域 4 5 a , 4 ^ 5 b， 4 5541856 V. Description of the invention (2) Multiple first electrodes (anodes) formed by transparent conductive materials such as I T 〇 and 2 are formed independently for each pixel. A data line L 1 and a power supply line L 2 are formed on the substrate 1 between the first electrodes 2 in one direction, and a scanning line L 3 0 is formed in a direction perpendicular to them. In addition, the first An insulating film 3 made of polyimide or the like is formed between the electrodes 2. In addition, a plurality of organic layers 4 are formed on the first electrode 2 and an organic layer 4 is formed to cover the organic layer 4. Second electrode (cathode) 5 〇 The structure of the organic layer 4 formed on the first electrode 2 will be described below with reference to FIG. 5 (the above-mentioned rows L 1, L 2, and L 3 are omitted). 1 A hole injection layer 40 and a hole transport layer 41 are formed on the electrode 2 and the insulating film 3, and a region on the first electrode 2 of the first color is selected on the hole transport m layer 4 1 on this region. y forms the first light-emitting layer 4 2 a and the electron transfer fm layer 4 3 a in sequence Injection layer 4 4 ac • In addition, a second light-emitting layer 4 2 b 'and an electron transport layer 4 3 t are sequentially formed on a region on the first _ electrode ^ 2 selected as the second color) ^ electron injection layer 4 4 b, the third light-emitting layer selected on the [L] electrode 2 as the third color: a third light-emitting layer 4 2 C Λ electron transport layer 4 3 C Λ electron injection layer 4 4 C An organic layer 4 is formed in an organic layer of a region selected for each color. A second electrode 5 is formed so as to cover the organic layer 4. A cross-section 1 between the second electrode 5 and the first electrode 2 is formed to emit light of various colors. Area 4 5 a '' 4 ^ b, 4 [) c (here 1 to completely include the light-emitting area 4 5 a, 4 ^ 5 b, 4 5
第5頁 541856 五、發明說明（3) c ，上述有機層4以不僅僅重合於第1電極2上，而且還 重合於絕緣膜3上的方式形成，由此，確保充分的發光量 。另外，為了在有機層4上覆蓋，形成第2電極5 ，必須 確保層的連續性，為此，將針對每種顏色而選擇的區域連 接而形成連續的層。 在上面的描述中，以有源矩陣型的有機E L顯示器為 實例進行了描述，但是純矩陣（無源）型的有機E L顯示 為'的本身結構也沒有大的差別。在此場合’在由透明的玻 璃等形成的基板1上，由I 丁〇等的透明導電材料形成的 多個第1電極2 (陽極）呈條帶狀，在這些第1電極2之 間，形成由聚醯亞胺等形成的絕緣膜3 。另外，按照與該 第1電極2相垂直的方式，呈條帶狀形成多個有機層4 ， 按照在有機層4上覆蓋的方式，呈條帶狀形成由A 1等形 成的第2電極（陰極）5 。 在上述的有機EL顯示器中，為了進行色平衡性良好 的全彩色顯示，針對與紅（R )、綠（G )、藍（B )的 各種顏色相對應的，第1發光層42 a 、電子傳輸層43 a 、電子注入層44a 、第2發光層42b 、電子傳輸層 43b 、電子注入層44b ，以及第3發光層42c 、電 子傳輸層4 3 c 、電子注入層4 4 c ，針對每種顏色形成 不同的膜厚。該情況是考慮到針對每種顏色，有機發光材 料的發光效率不同的情況，相對發光效率較低的顏色，形 成較大的膜厚，按照相對同一驅動電壓和電壓外加時間， 每種顏色的發光量不產生差別的方式設定上述膜厚。在圖Page 5 541856 5. Description of the invention (3) c. The organic layer 4 is formed not only on the first electrode 2 but also on the insulating film 3, thereby ensuring a sufficient amount of light. In addition, in order to cover the organic layer 4 and form the second electrode 5, it is necessary to ensure the continuity of the layer. To this end, regions selected for each color are connected to form a continuous layer. In the above description, the active matrix type organic EL display is taken as an example, but the pure matrix (passive) type organic EL display shows no significant difference in its structure. In this case, 'on the substrate 1 formed of transparent glass or the like, a plurality of first electrodes 2 (anodes) formed of a transparent conductive material such as I but 〇 are stripe-shaped, and between these first electrodes 2, An insulating film 3 made of polyimide or the like is formed. In addition, a plurality of organic layers 4 are formed in a stripe shape so as to be perpendicular to the first electrode 2, and a second electrode made of A 1 or the like is formed in a stripe shape so as to cover the organic layer 4 ( Cathode) 5. In the above-mentioned organic EL display, in order to perform full-color display with good color balance, the first light-emitting layer 42 a, electronic corresponding to various colors of red (R), green (G), and blue (B), The transport layer 43 a, the electron injection layer 44 a, the second light emitting layer 42 b, the electron transport layer 43 b, the electron injection layer 44 b, and the third light emitting layer 42 c, the electron transport layer 4 3 c, and the electron injection layer 4 4 c are for each The color forms different film thicknesses. In this case, it is considered that the luminous efficiency of the organic light-emitting material is different for each color. The color with a relatively low luminous efficiency forms a larger film thickness. According to the same driving voltage and voltage plus time, the luminescence of each color The above-mentioned film thickness is set so that the amount does not differ. In the figure
541856 五、發明說明（4) 5所示的實例中，使發光層和電子傳輸層的膜厚不同，考 慮各種顏色的發光效率，按照ta> tb> tc的方式，設定第 1顏色的膜厚ta，第2顏色的膜厚tb，第3顏色的膜厚tc 。層厚的設定通過調整成形時的蒸鍍處理時間而進行。 在像這樣調整發光效率的有機E L顯示器中，圖5中 的a 1〜a 4的各部份所示的那樣，在針對每種顏色而選擇的 區域的邊界部分，在有機層4的表面，產生台階部。與此 相對，對於形成於有機層4上的第2電極5 ，通常，與各 有機層的成形相同，在基板的正下方設置蒸鍍源，蒸鍍電 極材料，由此，在形成台階部的邊界部分，不能形成必要 的厚度的電極層。 由此，在形成有該台階部的部分，第2電極5的層厚 在局部處較薄，電阻值變大，造成各種顏色的發光特性的 降低，另外，像a 1和a 4的各部分所示的那樣，在台階部較 大的部分，在第2電極5上，產生切斷，由此，還造成非 發光部分的產生。如果給出具體實施例，設定發光層為R = 4〇nm、G=3〇nm、B 二 25nm，電子傳輸層 為 R=4〇nm、G=25nm、B = 2〇nm，進行蒸 鍍處理，在對電子注入層進行蒸鍍處理後，將第2電極設 定為6 0 n m，在基板的正下方設置蒸鍍源，進行蒸鍍處 理時，確認有發光不良，或非發光的部位。 即，在已有的進行全彩色顯示的有機EL顯示器中， 在形成第2電極的有機層的表面形成為平坦的情況下，具 有下述問題，即，在各種顏色的發光層中，產生發光效率541856 V. Description of the invention (4) In the example shown in (5), the film thicknesses of the light-emitting layer and the electron transport layer are different, and the luminous efficiency of each color is considered, and the film thickness of the first color is set according to ta > tb > tc. ta, the film thickness tb of the second color, and the film thickness tc of the third color. The layer thickness is set by adjusting the vapor deposition processing time during molding. In an organic EL display whose luminous efficiency is adjusted in this way, as shown in each part of a 1 to a 4 in FIG. 5, on the surface of the organic layer 4 at the boundary portion of the area selected for each color, A step is generated. In contrast, the second electrode 5 formed on the organic layer 4 is generally formed in the same manner as the formation of each organic layer. A vapor deposition source is provided directly below the substrate to vaporize the electrode material. An electrode layer having a necessary thickness cannot be formed in the boundary portion. As a result, in the portion where the stepped portion is formed, the layer thickness of the second electrode 5 is thinner locally, and the resistance value becomes larger, which causes the light-emitting characteristics of various colors to decrease. In addition, portions such as a 1 and a 4 As shown, in the large portion of the step portion, the second electrode 5 is cut off, and as a result, a non-light emitting portion is also generated. If specific examples are given, the light-emitting layer is set to R = 40nm, G = 30nm, B = 25nm, and the electron transport layer is R = 40nm, G = 25nm, B = 20nm, and evaporation is performed. After the electron injection layer was subjected to vapor deposition treatment, the second electrode was set to 60 nm, and a vapor deposition source was provided directly below the substrate. When the vapor deposition treatment was performed, it was confirmed that there was a defective or non-emissive portion. That is, in the conventional organic EL display that performs full-color display, when the surface of the organic layer forming the second electrode is formed flat, there is a problem that light is emitted in the light-emitting layers of various colors. effectiveness
541856 五、發明說明 的差別， 問題，在 差別的情 部變薄， 此，不能 【發明内 本發 在於提供 有機E L 為了 本發 括多個第 ，其具有 的任何顏 覆蓋於有 每種顏色 有機層中 最大值。 本發 括多個第 ，其具有 的任何顏 覆蓋於有 對每種顏 (5) 難於獲 各種顏 況下， 則產生 夠充分 容】 明是為 一種具 顯示器 實現上 明所述 1電極 形成於 色發光 機層上 而選擇 的發光 明所述 1電極 形成於 色發光 機層上 色而選 了解決 有用於 及其製 述目的 之有機 ，該多 第1電 的發光 的方式 的區域 層和電 這樣問題而 進行高品質 造方法。 ，本發明具 E L顯示器 個第1電極 極上的空穴 層和電子傳 形成，其中 連接的層上 子傳輸層之 得所要求的色平衡和對比度，為了消除該 色的發光層，或電子傳輸層中形成膜厚的 使形成於有機層上的第2電極的膜厚在局 發生顯示不良，像素缺陷的不利情況，由 的顯示高質量的圖象。 提出的，本發明之目的 的全彩色顯示的結構的 有下述的特徵。 ，該有機E L顯示器包 形成於基板上；有機層 傳輸層，按照R G B中 輸層；第2電極，按照 ，有機層形成於將針對 ，第2電極的膜厚大於 和的各種顏色膜厚中的 之有機E L顯示器，該有機E L顯示器包 ，該多個第1電極形成於基板上；有機層 第1電極上的空穴傳輸層，按照R G B中 的發光層和電子傳輸層；第2電極，按照 的上方式形成，其中，有機層形成於將針 擇的區域連接的層上，電子傳輸層由形成541856 V. Differences in the description of the invention. The problem is that the emotions in the difference become thinner. Therefore, the present invention cannot be provided with an organic EL. In order to cover this issue, any color that it has is covered with each color of organic. The maximum value in the layer. This article contains a number of articles, and any color that it has is sufficient for each color (5). It is difficult to obtain a variety of colors, which will be sufficient.] It is to realize a 1-electrode formed on the display for a display. The light-emitting device selected on the color light-emitting device layer is formed on the color light-emitting device layer, and the area layer and the electrode which are used to solve the organic, multi-first light emission method for the purpose of the organic light and its description purpose are selected. In this way, a high-quality manufacturing method is performed. According to the present invention, the hole layer and the electron transfer on the first electrode of the EL display are formed, and the required color balance and contrast of the sub-transport layer on the connected layer are required, in order to eliminate the light-emitting layer of the color, or the electron-transport layer The film thickness of the second electrode formed on the organic layer during the formation of the film thickness in the local layer causes display defects, pixel defects, and the like to display high-quality images. The structure of the full-color display, which is the object of the present invention, has the following features. The organic EL display package is formed on a substrate; an organic layer transmission layer is formed in accordance with RGB; and a second electrode is formed in accordance with the thickness of each color film whose thickness of the second electrode is greater than and An organic EL display, the organic EL display package, the plurality of first electrodes formed on a substrate; the hole transport layer on the first electrode of the organic layer, according to the light-emitting layer and the electron transport layer in RGB; the second electrode, according to The organic layer is formed on the layer connecting the needle-selected regions, and the electron transport layer is formed by
第8頁 541856 五、發明說明（6) 於針對每種顏色而選擇的區域的第1層，和按照各種顏色 共享的方式形成的第2層形成。 本發明所述的有機E L顯示器的製造方法，該方法包 括下述步驟：在基板上形成多個第1電極；第1電極上形 成有機層，該有機層具有空穴傳輸層，按照R G B中的任 何顏色發光的發光層和電子傳輸層；按照覆蓋於有機層上 的方式形成第2電極，其中，在將針對每種顏色而選擇的 區域連接的層上形成有機層，按照下述方式，有機層上蒸 鍍處理第2電極，即，第2電極的膜厚大於有機層中的發 光層和電子傳輸層之和的各種顏色膜厚中的最大值。 本發明所述之有機E L顯示器的製造方法，該方法包 括下述步驟：在基板上形成多個第1電極；第1電極上形 成有機層，該有機層具有空穴傳輸層，按照R G B中的任 何顏色發光的發光層和電子傳輸層；按照覆蓋於有機層上 的方式形成第2電極，其中，在將針對每種顏色而選擇的 區域連接的層上形成有機層時，在針對每種顏色而選擇的 區域，蒸鍍處理第1電子傳輸層，之後，按照各種顏色共 享的方式，均勻地蒸鍍處理第2電子傳輸層。 本發明所述之有機E L顯示器的製造方法，該方法包 括下述步驟：在基板上形成多個第1電極；第1電極上形 成有機層，該有機層具有空穴傳輸層，按照R G B中的任 何顏色發光的發光層和電子傳輸層；按照覆蓋於有機層上 的方式形成第2電極，其中在將針對每種顏色而選擇的區 域連接的層上形成有機層時，在針對每種顏色而選擇的區Page 8 541856 V. Description of the invention (6) The first layer of the area selected for each color and the second layer formed in a manner that the various colors are shared. The method for manufacturing an organic EL display according to the present invention includes the following steps: forming a plurality of first electrodes on a substrate; and forming an organic layer on the first electrode, the organic layer having a hole transport layer, according to RGB A light-emitting layer and an electron-transporting layer that emit light of any color; a second electrode is formed so as to cover the organic layer, and an organic layer is formed on a layer that connects regions selected for each color; The second electrode is vapor-deposited on the layer, that is, the film thickness of the second electrode is larger than the maximum value of the thickness of each color of the sum of the light-emitting layer and the electron transport layer in the organic layer. The method for manufacturing an organic EL display according to the present invention includes the following steps: forming a plurality of first electrodes on a substrate; forming an organic layer on the first electrode, the organic layer having a hole transporting layer; A light-emitting layer and an electron-transporting layer that emit light of any color; a second electrode is formed so as to cover the organic layer, and when an organic layer is formed on a layer that connects regions selected for each color, In the selected area, the first electron-transporting layer is vapor-deposited, and thereafter, the second electron-transporting layer is uniformly vapor-deposited in a manner of sharing various colors. The method for manufacturing an organic EL display according to the present invention includes the following steps: forming a plurality of first electrodes on a substrate; forming an organic layer on the first electrode, the organic layer having a hole transporting layer; A light-emitting layer and an electron-transporting layer that emit light of any color; a second electrode is formed so as to cover the organic layer, and when an organic layer is formed on a layer that connects regions selected for each color, Selected area
541856 五、發明說明（7) 域上蒸鐘處理 的方式，均勻 層上按下述方 厚大於有機層 厚中的最大值 本發明所 述弟2電極的 具有上述 根據本發 使在有機層中 電極的膜厚大 由於有機層中 傳輸層的厚度 值，小於發光 大值。由於如 則形成於構成 成台階部的頂 頂侧的表面上 常性保持連接 ，通過調整蒸 根據本發 對於使有機層 種顏色而不同 用作第1電子 第1電子傳輸層，之後，按照各種顏色共享 地對第2電子傳輸層進行蒸鍍處理；在有機 式，蒸鍍處理第2電極，即，第2電極的膜 中的發光層和電子傳輸層之和的各種顏色膜 述之有 形成是 特徵的 明所述 產生台 於台階 的發光 而進行 層和電 果將第 台階部 側的表 的電極 。在通 鍍處理 明所述 中的發 的厚度 傳輸層 機E L 通過傾 本發明 的有機 階部的 部，故 層的調 ，貝1j形 子傳輸 2電極 的底側 面，故 層與形 過蒸鍍 時間， 的有機 光層與 ，進行 的材料 顯示器 斜蒸鍍 具有下 E L顯 情況下 防止在 整主要 成於有 層之和 的厚度 的表面 可確保 成於底 處理而 將膜厚 E L顯 第1電 發光量 相同的 的製造 之方式 述的作 示器及 ，由於 台階部 通過調 機層中 的各種 設定在 上的電 下述狀 侧的表 形成第 設定為 示器及 子傳輸 的調整 材料或 方法， 進行的 用。 其製造 形成於 分，電 節發光 的台階 顏色膜 該最大 極的厚 態，即 面上的 2電極 上述厚 其製造 層形成 的情況 不同的 其中，所 方法，即 其上第2 極切斷。 層和電子 部的最大 厚中的最 值以上， 度大於構 ，形成於 電極層經 的情況下 度。 方法，相 為針對每 ，採用與 材料’在541856 V. Description of the invention (7) The method of steaming the bell on the field, the thickness of the uniform layer is larger than the maximum thickness of the organic layer according to the following. The second electrode of the present invention has the above-mentioned use in the organic layer according to the present invention. The thickness of the electrode is large because the thickness of the transport layer in the organic layer is smaller than the large value of light emission. Since it is formed on the surface of the top side of the stepped portion as usual, the connection is always maintained. By adjusting the steam, the color of the organic layer is different according to the present invention, and it is used as the first electron and first electron transport layer. The second electron transport layer is vapor-deposited in a color-sharing manner. In the organic type, the second electrode, that is, the sum of the light-emitting layer and the electron transport layer in the film of the second electrode, is described as being formed. It is characterized in that the electrode that emits light on the step and performs the layer and the electrode is formed on the side of the first step portion. The thickness of the transmission layer machine EL described in the through plating process is explained by tilting the organic step portion of the present invention, so the tone of the layer is transferred to the bottom side of the 2 electrode, so the layer and shape are vapor-deposited. Time, the organic light layer and the material display oblique evaporation have a lower EL display to prevent the entire surface to be formed by the thickness of the sum of the layers can ensure the bottom processing and display the film thickness EL first The indicator described in the manufacturing method with the same luminous amount and the stepped portion is formed by the various settings in the tuning layer on the following side table to form the first setting material or method for the indicator and sub-transmission. For the use. It is formed in the step and color step of the color film. The maximum thickness of the film, that is, 2 electrodes on the surface, and the thickness of the manufacturing layer is different. Among them, the method is that the second electrode is cut off. The maximum thickness of the layer and the electronic part is greater than the maximum value, and the degree is greater than that of the structure, and is formed in the case where the electrode layer is warped. Method, as opposed to each, using and materials ’in
第10頁 541856 五、發明說明（8) 第1電子傳輸層上，以各種顏色共享的方式，形成均勻的 第2電子傳輸層，通過針對每種顏色形成的發光層和第1 電子傳輸層而形成的台階部，通過設置第2電子傳輸層， 使台階的坡度變緩。由此，幾乎沒有形成於有機層上的第 2電極的台階部。 根據本發明所述的有機E L顯示器及其製造方法，像 以針對各種顏色而不同的厚度，形成有機層中的空穴傳輸 層、發光層和電子注入層的各層，進行發光量的調整的情 況的那樣，應對在有機層中形成較大的台階部的情況。由 此，同時採用使上述的第2電極的厚度增加的應對措施， 以及在每種顏色的第1電子傳輸層上，設置各種顏色共享 的第2電子傳輸層的應對措施，使形成於有機層上的第2 電極為基本上均勻的層。 根據本發明所述的有機E L顯示器及其製造方法，由 於第2電極的形成採用傾斜蒸鍍處理方式，故即使相對於 台階部分，仍確保足夠的膜厚。另外，由於還具有形成於 有機層表面上的台階部不沿一個方向形成的情況，故採用 具有多個方向性的傾斜蒸鍍處理的措施是有效的。 根據本發明所述的有機E L顯示器及其製造方法，該 有機E L顯示器包括多個第1電極，該多個第1電極形成 於基板上；有機層，該有機層具有形成於第1電極上的空 穴傳輸層，按照R G B中的任何顏色發光的發光層和電子 傳輸層；第2電極，該第2電極按照覆蓋於該有機層上的 方式形成，首先由於有機層形成於將針對每種顏色而選擇Page 10 541856 V. Description of the invention (8) On the first electron transport layer, a uniform second electron transport layer is formed in a manner of sharing various colors. The light emitting layer and the first electron transport layer are formed for each color. The formed stepped portion is provided with a second electron-transporting layer to reduce the gradient of the stepped portion. Thereby, there is almost no stepped portion of the second electrode formed on the organic layer. According to the organic EL display and the manufacturing method thereof according to the present invention, each of the hole-transporting layer, the light-emitting layer, and the electron-injecting layer in the organic layer is formed with different thicknesses for various colors to adjust the amount of light emission. As such, it is possible to cope with a case where a large stepped portion is formed in the organic layer. Therefore, the countermeasures for increasing the thickness of the second electrode described above and the countermeasures for providing a second electron-transporting layer shared by various colors on the first electron-transporting layer of each color are used to form the organic layer. The second electrode is a substantially uniform layer. According to the organic EL display and the manufacturing method thereof according to the present invention, since the second electrode is formed by an oblique vapor deposition process, a sufficient film thickness is ensured even with respect to the stepped portion. In addition, since the stepped portion formed on the surface of the organic layer may not be formed in one direction, it is effective to adopt a method of oblique vapor deposition having a plurality of directivities. According to the organic EL display of the present invention and a manufacturing method thereof, the organic EL display includes a plurality of first electrodes formed on a substrate; an organic layer having an organic layer formed on the first electrode; Hole-transporting layer, light-emitting layer and electron-transporting layer that emit light in any color in RGB; second electrode, the second electrode is formed to cover the organic layer. First, since the organic layer is formed on each color, And choose
第11頁 541856 五、發明說明（9) 的區域連接的層上，故有機層按照完全包含形成於第1電 極和第2電極之間的發光區域的方式形成，即使在以較密 的方式形成發光區域，進行高密度處理的情況下，仍可確 保足夠的發光量。此外，即使在針對每種顏色而選擇的區 域，使有機層的厚度不同，進行發光量的調整的情況下， 仍可像上述那樣使形成於有機層上的第2電極的膜厚足夠 大。因此，可使色平衡和對比度良好，不會產生顯示不良 、像素缺陷的情況，另外，可進行高密度的顯示，故可進 行高品質的全彩色顯示。 為了使 貴審查委員能更進一步了解本發明之特徵及 技術内容，請參閱以下有關本發明之詳細說明與附圖，然 而所附圖示僅供參考與說明用，並非用來對本發明加以限 制者。 【具體實施方式】Page 11 541856 V. Description of the invention (9) on the layer connected to the area, so the organic layer is formed so as to completely include the light emitting area formed between the first electrode and the second electrode, even if it is formed in a denser manner In the light emitting region, a sufficient light emission amount can be ensured even when the high-density processing is performed. In addition, even in a case where the thickness of the organic layer is different and the light emission amount is adjusted in a region selected for each color, the film thickness of the second electrode formed on the organic layer can be made sufficiently large as described above. Therefore, color balance and contrast can be made good, and display defects and pixel defects do not occur. In addition, high-density display can be performed, so high-quality full-color display can be performed. In order to allow your reviewers to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the accompanying drawings are for reference and explanation only, and are not intended to limit the present invention. . 【detailed description】
下面參照附圖，對本發明的實施例進行描述（另外， 與已有技術相同的部分採用同一標號，部分重複的說明省 略。）。圖1是表示本發明的第1實施例的有機E L顯示 器的結構的說明圖（在這裡，與圖5相同，各行L 1 、L 2 、L3省略）。在玻璃等的透明的基板1的一個面的多 個部位上，形成有由I 丁〇等的透明導電材料形成的第1 電極2 。在該弟1電極2之間的基板1上’按照以一定程 度覆蓋第1電極2的週邊的方式形成有由聚醯亞胺等形成 的絕緣膜3 。 另外，按照跨於多個第1電極2之間的方式，在第1Hereinafter, embodiments of the present invention will be described with reference to the drawings (in addition, the same reference numerals are used for the same parts as those in the prior art, and repeated descriptions are omitted.). Fig. 1 is an explanatory diagram showing the structure of an organic EL display according to a first embodiment of the present invention (here, as in Fig. 5, the rows L1, L2, and L3 are omitted). A first electrode 2 made of a transparent conductive material such as I but 0 is formed at a plurality of locations on one surface of a transparent substrate 1 such as glass. An insulating film 3 made of polyimide or the like is formed on the substrate 1 between the first electrode 2 and the first electrode 2 so as to cover the periphery of the first electrode 2 to a certain degree. In addition, the first electrode
第12頁 541856 五、發明說明（ίο) 電極2和絕緣膜3上，形成空穴注入層4 0和空穴傳輸層 41 。此外，選擇每種顏色的區域60a 、60b、60 c，在相應的區域，形成發光層42a 、42b、42c; 電子傳輸層43 a 、43 b、43 c;電子注入層44 a 、 44 b、44 c，由該這些空穴注入層、空穴傳輸層、發光 層、電子傳輸層、電子注入層形成的有機層按照將針對每 種顏色而選擇區域60a 、60b、60 c連接的方式形成 連續層。此外，在這裡，形成於發光層和第1電極之間的 層為空穴注入層40和空穴傳輸層4 1的雙層形式，但是 在本實施例和後面將要描述的各實施例中，空穴注入層4 0和空穴傳輸層41也可為進行來自第1電極的空穴注入 、空穴傳輸，向發光層的空穴注入的單層的空穴傳輸層的 類型。 在按照這樣的方式形成的有機層中，在作為第1顏色 選擇的區域6 0 a ，分別以4 0 nm的膜厚，形成用於獲 得比如紅色（R )發光的發光層4 2 a和電子傳輸層4 3 a ，在作為第2顏色選擇的區域60b ，分別以30nm 、2 5 nm的膜厚，形成用於獲得比如綠色（G)發光的 發光層42b和電子傳輸層43b ，在作為第3顏色選擇 的區域60c ，分別以25nm、20nm的膜厚，形成 用於獲得比如藍色（B)發光的發光層4 2 c和電子傳輸 層4 2 c 。像這樣，通過按照針對每種顏色而不同的方式 ，形成發光層和電子傳輸層，消除各種顏色的發光效率的 差異，由此，如上所述在有機層的表面上，在針對每種顏Page 12 541856 V. Description of the Invention (ίο) On the electrode 2 and the insulating film 3, a hole injection layer 40 and a hole transport layer 41 are formed. In addition, regions 60a, 60b, 60c of each color are selected, and light emitting layers 42a, 42b, 42c are formed in the corresponding regions; electron transport layers 43a, 43b, 43c; electron injection layers 44a, 44b, 44 c. The organic layer formed of these hole injection layer, hole transport layer, light emitting layer, electron transport layer, and electron injection layer is formed in a continuous manner by connecting the regions 60a, 60b, and 60c selected for each color. Floor. In addition, here, the layer formed between the light emitting layer and the first electrode is a two-layered form of the hole injection layer 40 and the hole transport layer 41, but in this embodiment and each embodiment to be described later, The hole injection layer 40 and the hole transport layer 41 may be a single-layer hole transport layer that performs hole injection and hole transport from the first electrode and injects holes into the light emitting layer. In the organic layer formed in such a manner, a light-emitting layer 4 2 a and electrons for obtaining, for example, red (R) light emission are formed in a region 60 0 a selected as the first color with a film thickness of 40 nm, respectively. The transmission layer 4 3 a is formed in a region 60 b selected as the second color with a film thickness of 30 nm and 25 nm, respectively, to form a light-emitting layer 42 b and an electron-transport layer 43 b for obtaining green (G) light emission. In the region 60c of 3 color selections, a light-emitting layer 4 2 c and an electron-transporting layer 4 2 c for obtaining, for example, blue (B) light emission are formed with film thicknesses of 25 nm and 20 nm, respectively. In this way, by forming the light-emitting layer and the electron-transporting layer differently for each color, the difference in the light-emitting efficiency of each color is eliminated. Thus, on the surface of the organic layer, as described above,
第13頁 541856 五 色 部 發明說明（11) 而選擇的區域60a 、60b、60 c的邊界，形成台階 〇 在該有機層上，按照覆蓋最頂層的電子注入層4 4 a 44b、44 c的方式，形成作用由A1等形成的反射電 的第2電極50 。另外，通過在第1電極2和第2電極 0之間，施加驅動電壓，從針對每種顏色而選擇的區域 〇a 、60b、60 c的發光區域 45a 、45b、45 ，通過基板1 ，有選擇地獲得RGB的各發光顏色。 大 值 膜 使 也 分 述 1 料 術 選 膜 第 在這裡，在本實施例中，設定第2電極5 0的膜厚t e 於發光層和電子傳輸層之和的各種顏色膜厚度中的最大 t m。如果按照上述各層的設定實例，則第2電極5〇的 厚te大於8〇nm，最好設定為1 OOnm。由此，即 在有機層上形成台階部的情況下，第2電極5 0的膜厚 幾乎沒有由台階部造成的影響，在局部不會形成較薄部 或斷線部位。 下面以有源型（有源矩陣驅動）的裝置為實例，對上 第1實施例的有機E L顯示器的製造方法進行描述。 (第1電極和絕緣膜形成工序）在透明玻璃制的基板 的一個面上，通過丨賤射等的物理的成膜法將透明導電材 ，比如I 丁〇成膜，通過已知的平版印刷技術和钱刻技 ，形成針對每個像素而劃分的第1電極2 。接著，以有 擇地覆蓋該第1電極2的形成區域的狀態，通過旋轉鍍 法等在基板1上塗敷絕緣材料（聚醯亞胺等），在多個 1電極2之間，形成絕緣膜3 。Page 13 541856 Description of Invention of the Five-Color Department (11) The boundary between the selected regions 60a, 60b, and 60c forms a step. On this organic layer, the topmost electron injection layer 4 4a 44b, 44c is covered. To form a second electrode 50 that acts on the reflected electricity formed by A1 or the like. In addition, by applying a driving voltage between the first electrode 2 and the second electrode 0, the light-emitting regions 45a, 45b, and 45 of the regions 0a, 60b, and 60c selected for each color are passed through the substrate 1, and The luminescent colors of RGB are selectively obtained. A large-value film is also described in detail. Here, in this embodiment, the maximum thickness tm of the film thickness of each color of the second electrode 50 is set to the sum of the film thicknesses of the light-emitting layer and the electron-transport layer. . According to the setting example of each layer described above, the thickness te of the second electrode 50 is larger than 80 nm, and preferably set to 100 nm. Therefore, even when a stepped portion is formed on the organic layer, the film thickness of the second electrode 50 is hardly affected by the stepped portion, and a thin portion or a disconnected portion is not formed locally. The manufacturing method of the organic EL display of the first embodiment is described below by taking an active type (active matrix drive) device as an example. (First electrode and insulating film forming step) On one surface of a substrate made of transparent glass, a transparent conductive material, such as I but 〇, is formed by a physical film forming method such as injecting, and known lithography is used. The technique and the money carving technique form a first electrode 2 divided for each pixel. Next, an insulating material (polyimide, etc.) is applied to the substrate 1 by a spin plating method in a state of selectively covering the formation region of the first electrode 2 to form an insulating film between the plurality of 1 electrodes 2. 3.
第14頁 541856 五、發明說明（12) (空穴注入層和空穴傳輸層形成工序）接著，採用規 定的掩模，在第1電極2和絕緣膜3上，全面蒸鍍處理空 穴注入層4 0 。另外，在該空穴注入層4 0上全面蒸鍍處 理空穴傳輸層4 1 。 (各種顏色發光層、電子傳輸層和形成工序）然後， 在基板上設定掩膜，該掩膜具有第1顏色的選擇區域開口 的圖案，在空穴傳輸層4 1上，蒸鍍處理第1顏色，比如 R的發光層4 2 a 。此時，通過蒸鍍處理時間的調整，將 膜厚設定為比如4 0 n m。接著，保持掩膜，按照形成所 需的膜厚，比如4 0 nm的方式，蒸鍍處理電子傳輸層4 3 a ，然後，按照所需的膜厚形成電子注入層4 4 a 。然 後，改變掩膜，或使上述掩膜滑動，有選擇地使第2顏色 (G )的區域開口，以比如3 0 n m的膜厚蒸鍍處理發光 層4 2 b ，以比如2 5 nm的膜厚蒸鍍處理電子傳輸層4 3 b ，然後，以所需的膜厚形成電子注入層4 4 b 。另外 ，改變掩膜，或使上述掩膜滑動，有選擇地使第3顏色 (B )的區域開口，以比如2 5 n m的膜厚蒸鍍處理發光 層4 2 c ，以比如2 0 nm的膜厚蒸鍍處理電子傳輸層4 3 c ，然後，以所需的膜厚形成電子注入層4 4 c 。 (第2電極形成工序）接著，將掩膜改變為與在上述 空穴注入層和空穴傳輸層形成工序中所採用的相同的形式 ，在電子注入層上，全面蒸鍍處理A 1等的金屬材料，而 形成第2電極50 。此時，第2電極50的膜厚tm如上所 述設定為下述膜厚值，即大於發光層和電子傳輸層之和的Page 14 541856 V. Description of the invention (12) (Formation process of hole injection layer and hole transport layer) Next, a predetermined mask is used to completely vapor-deposit hole injection on the first electrode 2 and the insulating film 3. Layer 40. In addition, the hole-transporting layer 4 1 is completely deposited on the hole-injecting layer 40. (Each color light-emitting layer, electron-transporting layer, and formation process) Then, a mask is set on the substrate, and the mask has a pattern of openings in selected regions of the first color. On the hole-transporting layer 41, a first vapor deposition process is performed. Color, such as R's light emitting layer 4 2 a. At this time, the film thickness is set to, for example, 40 nm by adjusting the vapor deposition processing time. Next, holding the mask, the electron transport layer 4 3 a is vapor-deposited to form a desired film thickness, such as 40 nm, and then, the electron injection layer 4 4 a is formed according to the required film thickness. Then, the mask is changed, or the mask is slid, and the area of the second color (G) is selectively opened, and the light-emitting layer 4 2 b is vapor-deposited with a film thickness of, for example, 30 nm. The electron-transporting layer 4 3 b is deposited by a film thickness deposition process, and then the electron-injecting layer 4 4 b is formed in a desired film thickness. In addition, by changing the mask or sliding the mask, the third color (B) region is selectively opened, and the light-emitting layer 4 2 c is vapor-deposited with a film thickness of, for example, 25 nm, and the light-emitting layer is, for example, 20 nm. The electron-transporting layer 4 3 c is deposited by a film thickness deposition process, and then the electron-injecting layer 4 4 c is formed in a desired film thickness. (Second Electrode Formation Step) Next, the mask is changed to the same form as used in the hole injection layer and hole transport layer formation steps described above, and the electron injection layer is subjected to a full vapor deposition process such as A 1 A metal material is used to form the second electrode 50. At this time, as described above, the film thickness tm of the second electrode 50 is set to a film thickness value that is larger than the sum of the light emitting layer and the electron transport layer.
第15頁 541856 五、發明說明（13) 各種顏色膜厚中的最大值，按照獲得該膜厚的方式，設定 蒸鍍時間。另外，在形成該第2電極5 0時，具有多個方 向性的傾斜蒸鍍處理是有效的，由此，即使在形成有台階 部的部位，仍可形成足夠的膜厚的第2電極層。針對具有 多個方向性的傾斜蒸鍍處理，可採用已知的各種方法，特 別是可例舉，相對基板，在斜下方設置多個蒸鍍處理源的 方法，和相對基板，在斜下方設置蒸鑛處理源，此基板旋 轉的方法等。 接著，通過圖2 ，對本發明的第2實施例進行描述， 另外，與第1實施例相同的說明部位採用同一標號，省略 部分重複的描述。 根據本實施例，其特徵在於形成於各種顏色發光層上 的電子傳輸層的結構和成形方法，通過對每種顏色所形成 的層以及形成各種顏色共同的層的多個層，形成電子傳輸 層。即，在第1顏色的選擇區域60a ，在發光層42a 上，以比如2〇nm的膜厚形成第1電子傳輸層46a ， 在第2顏色的選擇區域6 Ob ，在發光層4 2 b上，以比 如5nm的膜厚形成第1電子傳輸層46b 。另外，在第 3顏色的選擇區域6 0 c ，不形成第1電子傳輸層。另外 ，在其上，以比如2 0 n m的膜厚，均勻地形成各種顏色 共同的電子傳輸層4 7 ，而且在其上，按照所需的膜厚， 形成電子注入層44和第2電極51。 根據該實施例，各種顏色所必需的電子傳輸層的膜厚 是通過第1電子傳輸層46a 、46b和第2電子傳輸層Page 15 541856 V. Description of the invention (13) The maximum value of the film thickness of each color is set according to the way to obtain the film thickness, and the evaporation time is set. In addition, when the second electrode 50 is formed, an oblique vapor deposition process having a plurality of directions is effective, so that a second electrode layer having a sufficient film thickness can be formed even in a portion where a stepped portion is formed. . For oblique vapor deposition processes having multiple directivity, various known methods can be adopted, and in particular, a method of providing a plurality of vapor deposition processing sources at an obliquely lower side with respect to a substrate, and an opposite substrate with an obliquely lower side Source of ore processing, method of rotating this substrate, etc. Next, a second embodiment of the present invention will be described with reference to FIG. 2. In addition, the same reference numerals are used for the same explanation portions as the first embodiment, and a duplicate description will be omitted. According to this embodiment, it is characterized by the structure and forming method of the electron-transporting layers formed on the light-emitting layers of various colors. The electron-transporting layer is formed by forming a layer for each color and a plurality of layers forming a layer common to each color. . That is, in the selected region 60a of the first color, the first electron transport layer 46a is formed on the light-emitting layer 42a with a film thickness of, for example, 20 nm, and in the selected region 6 Ob of the second color, the light-emitting layer 4 2 b is formed. The first electron transport layer 46b is formed with a film thickness of, for example, 5 nm. In the selected region 60 c of the third color, the first electron transport layer is not formed. In addition, an electron transporting layer 4 7 common to various colors is uniformly formed on the film with a film thickness of, for example, 20 nm, and an electron injection layer 44 and a second electrode 51 are formed on the film in accordance with a desired film thickness. . According to this embodiment, the film thicknesses of the electron transport layers necessary for each color pass through the first electron transport layers 46a, 46b and the second electron transport layer.
第16頁 541856 五、發明說明（14) 4 7的總和而獲得。另外，在形成第1電子傳輸層4 6 a 、4 6 b的階段產生的較陡的台階部通過設置各種顏色共 同的第2電子傳輸層4 7而變得平緩。由此，在其上，通 過電子傳輸層4 4而形成第2電極5 1雖於受到台階部的 影響，在局部不會形成較薄的部分或切斷的部分。 下面與第1實施例相同，以有源型的裝置為實例，對 上述第2實施例的有機E L顯示器的製造方法進行描述。 第1電極和絕緣膜形成工序，空穴注入層和空穴傳輸層形 成工序與第1實施例相同。然後，在基板上，設定具有第 1顏色的選擇區域開口的圖案的掩膜，以比如4 0 n m的 膜厚，在空穴傳輸層4 1上，蒸鍍處理第1顏色的發光層 4 2 a 。接著，保持掩膜，以形成所需的膜厚，比如2〇 n m的方式，蒸鍍處理第1電子傳輸層4 6 a 。然後，改 變掩膜，或使上述掩膜滑動，有選擇地使第2顏色的區域 開口，以比如3 0 n m的膜厚蒸鍍處理發光層4 2 b ，接 著，以比如5 n m的膜厚，蒸鍍處理第1電子傳輸層4 6 b 。再接著，又改變掩膜，或使上述掩膜滑動，以比如2 5 nm的膜厚，蒸鍍處理第3顏色發光層4 2 c 。 接著，將掩膜改變為與在上述空穴注入層和空穴傳輸 層形成工序所採用的掩膜相同的形式，以比如2 0 n m的 膜厚，以與第1電子傳輸層46 a 、46b相同的材料， 或不同的材料，全面蒸鍍處理各種顏色共同的電子傳輸層 4 7。然後，保持該掩膜狀態，以所需的膜厚，全面蒸鍍 處理電子注入層44和第2電極51。在形成第2電極5P.16 541856 V. Invention description (14) 4 7 In addition, the steeper stepped portions generated at the stage where the first electron transport layers 4 6 a and 4 6 b are formed are smoothed by the provision of the second electron transport layers 47 of various colors in common. As a result, the second electrode 51 formed on the electron transporting layer 44 is not affected by the stepped portion, so that a thin portion or a cut portion is not formed locally. In the following, as in the first embodiment, a manufacturing method of the organic EL display of the second embodiment will be described by taking an active device as an example. The first electrode and insulating film formation step, the hole injection layer and the hole transport layer formation step are the same as those in the first embodiment. Then, on the substrate, a mask having a pattern of openings in the selected region of the first color is set, and the light-emitting layer 4 of the first color is vapor-deposited on the hole transport layer 41 with a film thickness of, for example, 40 nm. a. Next, the first electron-transporting layer 4 6 a is vapor-deposited with a mask so as to form a desired film thickness, for example, 20 nm. Then, the mask is changed, or the above-mentioned mask is slid, and the area of the second color is selectively opened, and the light-emitting layer 4 2 b is vapor-deposited with a film thickness of, for example, 30 nm. The first electron-transporting layer 4 6 b is vapor-deposited. Then, the mask is changed, or the mask is slid, and the third color light-emitting layer 4 2 c is vapor-deposited with a film thickness of, for example, 2 5 nm. Next, the mask is changed to the same form as the mask used in the hole injection layer and the hole transport layer forming step described above, with a film thickness of, for example, 20 nm, and the same thickness as that of the first electron transport layers 46 a and 46 b. The same material, or different materials, is subjected to comprehensive vapor deposition to process electron transport layers common to various colors 4 7. Then, the electron injection layer 44 and the second electrode 51 are completely vapor-deposited with the desired film thickness while maintaining the mask state. Forming the second electrode 5
第17頁 541856 五、發明說明（15) 1時，與第1實施例相同，具有多個方向性的傾斜蒸鍍處 理是有效的。 下面通過圖3 ，對本發明第3實施例進行描述。另外 ，在與上述實施例相同的說明部位採用同一標號，省略部 分重複的描述。 本實施例在於有機層上形成的台階部較大時是有效的 ，比如，在下述情況是有效的，即，根據形成發光層的材 料的種類’母種顏色的發光效率有較大差別’為了消除該 情況，在針對每種顏色而選擇區域形成的有機層的膜厚必 須在空穴傳輸層、發光層、電子傳輸層這3個層中，針對 每種顏色而不同。由此，通過針對每種顏色所形成的層， 以及形成各種顏色共同的層的多個層，形成電子傳輸層， 並且第2電極的膜厚，大於發光層和電子傳輸層之和的總 厚度的最大值。 即，在第1顏色選擇的區域60a ，以比如4〇nm 的膜厚，形成第1顏色的空穴傳輸層4 1 a ，以40nm 的膜厚，形成發光層42a ，在其上，以比如20nm的 膜厚，形成第1電子傳輸層46a ，在第2顏色選擇的區 域6 Ob ，以比如2 5 nm的膜厚形成第2顏色的空穴傳 輸層41b ，以3〇nm的膜厚形成發光層42b ，在其 上，以比如5nm的膜厚形成第1電子傳輸層46b 。另 外，在第3顏色選擇的區域60c ，以20nm的膜厚， 形成第3顏色的空穴傳輸層4 1 c ，以2 5 nm的膜厚形 成發光層42c ，在這裡，不形成第1電子傳輸層。接著P.17 541856 V. Description of the invention (15) At 1, the same as in the first embodiment, the oblique vapor deposition process having a plurality of directions is effective. A third embodiment of the present invention is described below with reference to FIG. 3. In addition, the same reference numerals are used in the same explanation portions as those in the above-mentioned embodiment, and a duplicate description is omitted. This embodiment is effective when the stepped portion formed on the organic layer is large, for example, it is effective in the following cases, that is, according to the type of the material forming the light-emitting layer, 'the luminous efficiency of the mother color is greatly different' In order to eliminate this, the thickness of the organic layer formed in the selected region for each color must be different for each color among the three layers of the hole transport layer, the light emitting layer, and the electron transport layer. Thus, an electron transport layer is formed by a layer formed for each color and a plurality of layers forming a layer common to each color, and the film thickness of the second electrode is greater than the total thickness of the sum of the light emitting layer and the electron transport layer. The maximum value. That is, in the region 60a of the first color selection, a hole transport layer 41a of the first color is formed at a film thickness of, for example, 40 nm, and a light-emitting layer 42a is formed at a film thickness of 40 nm. A first electron transport layer 46a is formed at a film thickness of 20 nm, and a hole transport layer 41b of the second color is formed at a film thickness of 2 5 nm in a region 6 Ob of a second color, for example, and formed at a film thickness of 30 nm. The light-emitting layer 42b has a first electron-transporting layer 46b formed thereon with a film thickness of, for example, 5 nm. In addition, in a region 60c of the third color selection, a hole transport layer 4 1 c of a third color is formed with a film thickness of 20 nm, and a light emitting layer 42 c is formed with a film thickness of 25 nm. Here, the first electrons are not formed. Transport layer. then
第18頁 541856 五、發明說明（16) ’在其上’以比如2〇nm的膜厚均勾地形成 同的電子傳輸層47，再在其上，以所需：f： 注入層4 4 。 J腺^予形成私十 •極ΐϊ:膜？照覆蓋電子注入層44的方式形成的第2 : = = Γ設定為大於發光層和電子傳輪層之和 的各種顏色臈厚中的最大值tm。如果採用 十 乂!弟2電極5 2的膜厚tra大於8 〇 n m，最好 為 lOOnm。由此，即使是在有機層上 又 塑了在臈厚仍幾乎沒有由台階部造成的影 曰 二°卩不s形成較薄的部分或切斷部位。 一在對上述第3實施例的有機E L顯示器的盤1 行描述時，除了在形成空穴傳輸層 =轺 的區域情況以外，纟它的方面與 f選擇母種顏色 法相同，在形成第2電極52時4;】；::== 式設定。另外，當然’同樣在本：e 極5 2時，與上述實施例相同， ：：形成弟2電 鍍處理是有效的。 個方向性的傾斜蒸 根據上述各實施例，通過在平 置針對每種顏色而選擇的區域6 (3 a暴f上，呈矩陣狀設 構成全彩色顯示器，另外，由於針 6 〇 b、6 0 c，可 域6〇a 、6〇b、6〇c形成像上诚^種顏色而選擇的區 層，故可確保以較高密度形成各像卩樣保持連續的有機 發光區域，可形成高亮度與高精細的祐同日f可確保足夠的 每種顏色的區域，考慮到每種顏色的”、、不為。另外，由於 的發光層的發光效率有Page 18 541856 V. Description of the invention (16) The same electron transport layer 47 is uniformly formed with a film thickness of, for example, 20 nm, and on it, the required: f: implanted layer 4 4 . Gland ^ I formed a private ten • Extremely ΐϊ: membrane? The second: = = Γ formed in such a manner as to cover the electron injection layer 44 is set to a maximum value tm of each color thickness greater than the sum of the light emitting layer and the electron transfer layer. If the film thickness tra of the ten electrode 2 electrode 5 2 is larger than 80 nm, it is preferably 100 nm. As a result, even if it is formed on the organic layer, there is almost no shadow caused by the stepped portion at the thickness of 2 °, and it does not form a thin portion or a cut portion. First, in the description of the first row of the panel of the organic EL display of the third embodiment, except that in the case where the hole transport layer = 轺 is formed, it is the same as the method of selecting the mother color by f, and the second method is used to form the second. Electrode 52: 4;]; :: == type setting. In addition, as a matter of course, when this: e pole 5 2 is the same as the above-mentioned embodiment, the formation of the second electrode plating process is effective. According to the above-mentioned embodiments, a full-color display is formed by placing the area 6 (3 a and 3 f) in a horizontal direction according to the above embodiments. In addition, since the needles 6 0b, 6 0 c, the domains 60a, 60b, and 60c can form a layer layer selected by various colors on the image, so it can be ensured that the organic light-emitting regions that are continuous in each image can be formed at a higher density, and can be formed. The high brightness and high resolution of the same day f can ensure sufficient areas of each color, taking into account the "," of each color. In addition, because the light-emitting layer has a light-emitting efficiency of
第19頁 541856 五、發明說明（17) 差異，故使促進發光量的有機層（發光層和電子傳輸層， 或空穴傳輸層）的膜厚不同，由此，可在不調整各種顏色 的驅動條件的情況下，實現色平衡和對比度良好的全彩色 顯示。還有，由於使通過每種顏色的有機層膜厚的設定而 形成的有機層表面的台階部按照下述方式形成，即，該台 階部不對形成於有機層表面的第2電極膜厚造成影響，故 在第2電極中，不形成不良的電阻部分或切斷部位，可完 全消除顯示不良和像素缺陷的不利情況。因此，由上述各 實施例形成的有機E L顯示器可進行高品質的全彩色顯示 〇 還有，在上面的描述中，主要以有源型（有源矩陣驅 動）的裝置為實例進行了描述，但是本發明的結構和製造 方法並不限於此，其還適合於按照平行方式設置條帶狀的 透明電極的無源型（純矩陣驅動）的有機E L顯示器。另 外，以下述的情況為實施例進行了描述，即，以第1電極 作為透明電極，第2電極作為反射電極，通過透明基板進 行顯示，但是即使與此相反，以第1電極作為反射電極， 第2電極作為反射電極，在基板的相反側進行顯示，橫可 獲得相同的作用。 本發明按照前述的方式形成，本發明涉及有機E L顯 示器及其製造方法，該有機E L顯示器包括多個第1電極 ，該多個第1電極形成於基板上；有機層，該有機層具有 空穴傳輸層，按照R G B中的任何顏色發光的發光層和電 子傳輸層，該空穴傳輸層形成於第1電極上；第2電極，Page 19 541856 V. Description of the invention (17) The film thicknesses of the organic layers (light-emitting layer and electron transport layer, or hole transport layer) that promote the amount of light emission are different. Therefore, various colors can be adjusted without adjustment. Under driving conditions, full-color display with good color balance and contrast is realized. The step portion on the surface of the organic layer formed by setting the thickness of the organic layer for each color is formed in such a manner that the step portion does not affect the thickness of the second electrode film formed on the surface of the organic layer. Therefore, in the second electrode, no defective resistance portion or cut-off portion is formed, and the disadvantages of display defects and pixel defects can be completely eliminated. Therefore, the organic EL display formed by the above embodiments can perform high-quality full-color display. Also, in the above description, the active type (active matrix drive) device is mainly described as an example, but The structure and manufacturing method of the present invention are not limited to this, and it is also suitable for a passive type (pure matrix drive) organic EL display in which strip-shaped transparent electrodes are provided in parallel. In addition, the following description is given as an example in which the first electrode is used as a transparent electrode, and the second electrode is used as a reflective electrode, and display is performed through a transparent substrate. However, even if the first electrode is used as a reflective electrode, The second electrode serves as a reflective electrode and displays on the opposite side of the substrate. The same effect can be obtained in the horizontal direction. The present invention is formed in the foregoing manner. The present invention relates to an organic EL display and a method of manufacturing the same. The organic EL display includes a plurality of first electrodes formed on a substrate; an organic layer having holes. A transport layer, a light-emitting layer and an electron transport layer that emit light in any color in RGB, and the hole transport layer is formed on the first electrode; the second electrode,
第20頁 541856 五、發明說明（18) 該第2電極按照覆蓋於該有機層上的上方式形成，可形成 良好的色平衡和對比度，不產生顯示不良和像素缺陷，另 外可進行高密度顯示，由此，可進行高品質的全彩色顯示P.20 541856 V. Description of the invention (18) The second electrode is formed by covering the organic layer, which can form a good color balance and contrast, without causing display defects and pixel defects, and can perform high-density display. , Which enables high-quality full-color display
第21頁 541856Page 541 856
第22頁 圖式簡單說明 圖 1 是 表 示 本 發 明 的 第 1 實 施 例 的 有 機 E L 顯 示 器 的 結 構 的 說 明 圖 〇 圖 2 是 表 示 本 發 明 的 第 2 實 施 例 的 有 機 E L 顯 示 器 的 結 構 的 說 明 圖 0 圖 3 是 表 示 本 發 明 的 第 3 實 施 例 的 有 機 E L 顯 示 器 的 結 構 的 說 明 圖 〇 圖 4 是 表 示 通 過 有 源 矩 陣 驅 動 進 行 全 彩 色 顯 示 的 有 機 E L 顯 示 器 的 結 構 的 說 明 圖 0 圖 5 是 圖 4 中 得 X- -X剖視的不意圖c ) 圖 號 名 稱 說 明 • 1 基 板 2 第 1 電 極 3 絕 緣 膜 4 有 機 層 4 0 空 穴 注 入 層 4 1 空 穴 傳 層 4 2 a Λ 4 2 b 4 2 C 發 光 層 541856 圖式簡單說明 tm第2電極膜厚 i ta第1顏色的膜厚 - tb第2顏色的膜厚 一 tc第3顏色的膜厚 L 1 數據行 L 2 電源行 L 3 掃描行 丁晶體管區域Brief Description of Drawings on Page 22 FIG. 1 is an explanatory diagram showing the structure of an organic EL display according to a first embodiment of the present invention. FIG. 2 is an explanatory diagram showing the structure of an organic EL display according to a second embodiment of the present invention. 3 is an explanatory diagram showing the structure of an organic EL display according to a third embodiment of the present invention. FIG. 4 is an explanatory diagram showing the structure of an organic EL display that performs full-color display by active matrix driving. FIG. X- -X cross-section is not intended c) Drawing number name description • 1 substrate 2 first electrode 3 insulating film 4 organic layer 4 0 hole injection layer 4 1 hole transport layer 4 2 a Λ 4 2 b 4 2 C Light-emitting layer 541856 Schematic description of tm second electrode film thickness i ta The thickness of a color - the color of the second film thickness tb tc a thickness L 1 of the third color data-line power supply line L 2 L 3-butoxy scanning line transistor region
第23頁Page 23
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| KR100864758B1 (en) * | 2002-06-19 | 2008-10-22 | 오리온오엘이디 주식회사 | Full color organic electroluminescence device |
| JP4230258B2 (en) | 2003-03-19 | 2009-02-25 | 東北パイオニア株式会社 | Organic EL panel and organic EL panel manufacturing method |
| JP4651918B2 (en) | 2003-05-21 | 2011-03-16 | 東北パイオニア株式会社 | Manufacturing method of organic EL panel |
| JP2004355975A (en) * | 2003-05-29 | 2004-12-16 | Sony Corp | Manufacturing method of display device |
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2002
- 2002-05-20 KR KR1020020027840A patent/KR100789199B1/en active IP Right Grant
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| TWI381768B (en) * | 2004-04-08 | 2013-01-01 | Pioneer Tohoku Corp | Method of and system for manufacturing organic el devices |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20020092793A (en) | 2002-12-12 |
| CN1391424A (en) | 2003-01-15 |
| KR100789199B1 (en) | 2007-12-31 |
| JP2002367787A (en) | 2002-12-20 |
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