530526 經濟部智慧財產局員工消費合作社印製 5 3 5 9pir.doc/0 0(> 五、發明說明（/ ) - =發^月是有關於將K、LSI等之半導體晶片、二極體、 電阻器等電子元件搭載在實際安裝基板上之電子元件搭 衣置以及吸者來自兀件供給部之電子元件之吸著噴嘴。 爲J Μ寸IC、LSI等之半導體晶片、電容、二極體等之 電子兀件ί合載在實際安裝基板、檢查板等之被搭載構件上 使所謂安裝裝置、晶片安裝裝置等之電子元件搭載裝置。 爲了將容納於元件供給部之電子元件搬送到鄰近於元件供 給部所配置之實際安裝基板上，此搭載裝置具一水平方向 移動之ί合載頭，而可上下自由移動之工作握持具是安裝在 此搭載頭上。 、 目前，自元件供給部將電子元件取出並吸著之吸著噴 嘴、用來握持電子元件之緊握手是使用於工作握持具上。 使吸著噴嘴之端面（吸著面）接觸到半導體晶片等之電子元 件之表面，藉由使半導體晶片等之電子元件之表面成爲真 空，來進行電子元件之吸著。 有關於吸著噴，噴嘴本體是由單管所構成，使單管之 開口面成爲吸著面，可了解吸著電子元件之構成。再者， 爲環狀縫開口之環狀吸著部以同心圓狀方式配置在吸著面 上，亦可了解吸著電子元件之構成。 搭載在實際安裝基板等之被搭載構件上之電子元件的 大小是個個不同的。由於對於做爲用來握持電子元件之工 作握持具之吸者噴嘴，無法配合電子元件之大小來更換， 所以目則需要對應於各種大小之電子元件之構成。 有關於噴嘴本體爲單管狀所構成之吸著嘴，其吸著面 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------裝---- C請先閱讀背面之注音？事項再填寫本頁) 訂--------- 530526 pi f.doc/0 06 A7 B7 五、發明說明（2 ) (請先閱讀背面之注意事項再填寫本頁) 之口徑爲定値。爲了藉由吸著面之口徑來吸著小的電子元 件，必須配合一般電子元件之大小來更換吸著噴嘴。爲了 安裝效率之改善，必需要有不用更換之技術。 一方面，使用以同心圓狀將環狀吸著部形成於吸著面 之吸著噴嘴，配合所吸著之電子元件之大小，選擇環狀吸 著嘴來吸引，則可進行個種大小電子元件之吸著。但是， 產生以同心圓狀將環狀吸著部形成於吸著面上之吸著噴嘴 是困難的，因而吸著噴嘴之生產成本是昂貴的。 再者，爲了使配置成同心圓狀之環狀吸著部，配合所 吸著之電子元件之大小，而選擇性地吸引，則必須要有以 獨立個別環狀吸著部方式來吸引之構成，如此會使機械構 成體變得複雜。 本發明之目的在於提供一種可以簡單構成來進行大小 電子元件之吸著的吸著噴嘴。 本發明之目的在於提供一種電子元件搭載裝置，其裝 設有可以簡單構成來進行大小電子元件之吸著的吸著噴 嘴。 經濟部智慧財產局員工消費合作社印製 可從本說明書及所附圖式，了解本發明之上述及其它 目的與其特徵。 以下，將簡單說明揭露在本申請之發明中之代表性槪 要。 . 亦即，本發明爲一種吸著噴嘴，其安裝在上下移動軸 心之下端，該上下移動軸心是以自由上下移動方式設置在 搭載頭上，而該搭載頭可在元件供給部上方與被搭載構件 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 530526 5 3 5 c) p i Γ . d 〇 c 0 0 6 A7 B7 五、發明說明（$ ) (請先閱讀背面之注意事項再填寫本頁) 上方之間以水平方向自由地移動，該吸著噴嘴是用來吸著 /保持儲放在該電子元件供給部中之電子元件，其特徵在 於：具有噴嘴本體，其將連通至設置在上下移動軸心上之 真空室中之連通面設置在上端，而將吸著電子元件之吸著 面設置下端·，形成複數個細孔，該複數個細孔將個別該吸 著面與該連通面連通至該噴嘴本體；在以吸著在該吸著面 上之該電子元件，而不會完全閉塞該細孔之狀態中，藉由 經沒有閉塞之細孔，而流入到該真空室中之空氣壓力損 失，以保持該真空室內部在負壓狀態中。 藉由使用此構成，縱使在電子元件比在複數個細孔之 吸著面上之個別開口大之情況，亦可以一個吸著噴嘴來吸 著。 再者，因爲在不會完全閉塞該細孔之狀態中，藉由經 沒有閉塞之細孔，而流入到該真空室中之空氣壓力損失， 以保持該真空室內部在負壓狀態中，所以縱使在吸引焊 錫、灰塵而沒有堵塞細孔口徑之程度嚴重時，亦可在沒有 完全閉塞吸著面之細孔之開口部情況下，吸著電子元件。 經濟部智慧財產局員工消費合作社印製 圖式之簡單說明： 第1圖係顯示出電子元件搭載裝置之整體的立體圖； 第2圖係顯示出沿著第1圖之2-2線之剖面圖； 弟3圖係顯不出沿者弟1圖之3 - 3線之剖面圖 第4圖係顯示出沿著第3圖之4-4線之剖面圖； 第5圖係顯示出第3圖及第4圖之搭載頭之立體圖； 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 530526 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（7) 第6圖係顯示出第4圖之重要部分之放大剖面圖； 第7圖係顯示出沿著第6圖之7-7線之剖面圖； 第8圖係顯示出沿著第6圖之8-8線之剖面圖； 第9圖係顯示出沿著第6圖之9-9線之剖面圖； 第10圖係顯示出沿著第9圖之10-10線之剖面圖； 第11圖係顯示出噴射式真空泵之內部構造之空氣壓電 路圖； 第12圖係顯示出吸著嘴與中空軸心之連結狀況之剖面 圖； 第13(a)圖係顯示出吸著嘴本體之吸著面之頂視圖； 第13(b)圖係顯示出第13(a)圖之11-11線之剖面圖； 第14(a)圖係顯示出將電子元件吸著於吸著嘴本體之 吸著面之位置部上之狀態的頂視圖； 第14(b)圖係顯示出沿著第14(a)圖之12-12線之剖面 圖；以及 第15(a)、15(b)圖係顯示出吸著嘴之變形範例之吸著 面的頂視圖。 符號之簡單說明： 10〜電子元件搭載裝置； 11〜裝置本體； 12〜貫穿孔； 13〜元件支持台； 14〜元件供給部； 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------I---;--•裝--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 530526 5 3 ρίΓ. dot" Ο ()6 _B7 五、發明說明（$ ) 16〜搭載頭； 19〜導引軌； (請先閱讀背面之注意事項再填寫本頁) 23〜中空軸心； 24〜工作握持具； 25〜吸著噴嘴； 2 8〜螺旋軸； 29〜上下移動板； 43〜電磁閥； 48〜攝影機； 31、51〜馬達； 5 3〜滑輪； 55〜定時帶； 56〜惰輪； 6 2〜電磁閱； 63〜真空破壞用電磁閾； 67〜可變限流閩； 71〜噴嘴本體； 7 2〜夕t筒； 經濟部智慧財產局員工消費合作社印製 72a〜裝著圓筒部； 75〜0型環； 80〜細孔； 82〜角形細管；以及 9〇〜真空室。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 530526 5359pir.doc/0 06 A7 B7 ^ —-— 五、發明說明（乙） 竇施例： 以卩，依據圖式來詳細說明本發明之實施形態。 第1圖係顯示出所謂晶片安裝裝置之電子元件搭載裝 置10之整體立體圖。第2圖係顯示出沿著第1圖之2-2 線之剖面圖。第3圖係顯不出沿著第1圖之3 - 3線之剖面 圖。第4圖係顯不出沿著第3圖之4 - 4線之剖面圖。 電子元件搭載裝置10具有裝置本體11，此裝置本體11 具備延伸至上下方向之2個圓柱部11 a、11 b以及連結至 其上端部之水平棵部11 c。錯由將外蓋安裝在由個型鋼材 所形成之骨架外側，以形成圓柱部11a、lib及水平樑部 11c。將貫穿孔12成於裝置本體11之中央部。 將元件支持台13形成於裝置本體11之一側。如第2 圖所示，元件供給部14是設置在元件支持台13上。在第 1圖中，雖然顯示出設置在元件支持台13之一側之元件供 給部14，但是如第2圖所示，元件供給部14是設置在元 件支持台13之兩側。 複數個封裝組是裝塡在元件供給部14中。將以握持個 別1C、LSI之半導體晶片、電容器、二極體、電阻器等電 t兀件之狀態’而卷曲成卷曲狀之帶子收容於個別封裝組 中。除了將做爲搭載之電子元件收納於封裝組中之外，亦 可將其收納於堆豐儲存器中或盤儲存器中。上述封裝組、 堆豐储存器或盤儲存器是安裝在元件支持台13。堆疊儲存 器爲管狀之盒子，其稱爲膠卷之剖面爲矩形，而電子元件 是以直線狀方式配置收容於其中。有關於盤儲存器，電子 -------------裝---- (請先閱讀背面之注音？事項再填寫本頁} 訂--------- 經濟部智慧財產局員工消費合作社印製530526 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5 3 5 9pir.doc / 0 0 (> V. Description of the Invention (/)-= The month of the month is related to the semiconductor chips and diodes of K, LSI, etc. Electronic components such as resistors, electronic components mounted on the actual mounting substrate, and suction nozzles for sucking electronic components from the component supply unit. Semiconductor chips, capacitors, diodes, etc. Electronic components such as a body are mounted on a mounted member such as a mounting substrate or an inspection board to mount an electronic component mounting device such as a mounting device or a wafer mounting device. In order to transfer the electronic components accommodated in the component supply unit to the vicinity On the actual mounting substrate configured by the component supply section, this mounting device has a helical head that moves horizontally, and a work grip that can move up and down freely is mounted on this mounting head. At present, from the component supply section The suction nozzle for taking out electronic components and sucking them, and the tight handshake for holding the electronic components are used on the work grip. The end surface (suction surface) of the suction nozzle is in contact with the semiconductor. The surface of electronic components such as wafers is vacuumed to make the surfaces of electronic components such as semiconductor wafers vacuum. For suction spray, the nozzle body is composed of a single tube, which opens the single tube. The surface becomes the suction surface, so that you can understand the structure of the suction electronic component. In addition, the ring-shaped suction portion with an annular slit opening is arranged concentrically on the suction surface, and the structure of the suction electronic component can also be understood. The size of the electronic components mounted on the mounted component such as the actual mounting substrate is different. Because the suction nozzle used as a work holder for holding electronic components cannot be replaced with the size of the electronic components Therefore, it is necessary to correspond to the composition of electronic components of various sizes. With regard to the suction nozzle of the nozzle body being a single tube, the suction surface 4 The paper size is applicable to China National Standard (CNS) A4 (210 X 297) (Mm) ------------ install ---- C Please read the phonetic on the back? Matters before filling out this page) Order --------- 530526 pi f.doc / 0 06 A7 B7 V. Description of the Invention (2) (Please read first Note the surface to fill out this page) is set Zhi's caliber. In order to suck small electronic components by the diameter of the sucking surface, the suction nozzle must be replaced in accordance with the size of general electronic components. In order to improve the installation efficiency, it is necessary to have a technology that does not need to be replaced. On the one hand, using a suction nozzle with a ring-shaped suction portion formed on the suction surface in a concentric shape, and matching the size of the electronic component to be suctioned, and selecting a ring suction nozzle to attract, various electronic sizes can be performed. Adsorption of components. However, it is difficult to produce a suction nozzle in which a ring-shaped suction portion is formed on the suction surface in a concentric shape, and the production cost of the suction nozzle is expensive. In addition, in order to selectively attract a ring-shaped suction portion arranged in a concentric circle in accordance with the size of the electronic component to be suctioned, it must have a structure of suction by an independent ring-shaped suction portion. This will complicate the mechanical structure. An object of the present invention is to provide a suction nozzle which can be simply configured to suction large and small electronic components. An object of the present invention is to provide an electronic component mounting device provided with a suction nozzle which can be simply configured to suction large and small electronic components. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The above and other objects and features of the present invention can be understood from this specification and the attached drawings. Hereinafter, representative points disclosed in the invention of the present application will be briefly explained. That is, the present invention is a suction nozzle, which is installed at the lower end of the up-and-down movement axis, which is arranged on the mounting head in a freely up-and-down manner, and the mounting head can be placed above the component supply section and the substrate. Mounting components This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 530526 5 3 5 c) pi Γ. D oc 0 0 6 A7 B7 V. Description of the invention ($) (Please read the back first (Notes on this page, please fill in this page again.) The top nozzle can move freely in the horizontal direction. The suction nozzle is used to suck / hold the electronic components stored in the electronic component supply section. It is characterized by having a nozzle body. It sets the communication surface connected to the vacuum chamber provided on the up-and-down moving axis at the upper end, and sets the suction surface of the suction electronic component at the lower end to form a plurality of fine holes, and the plurality of fine holes will individually The suction surface communicates with the communication surface to the nozzle body; in a state where the electronic component is suctioned on the suction surface without completely occluding the pore, by passing the pore without occlusion, and Flow into the true The chamber air pressure loss, the inside of the vacuum chamber to maintain a negative pressure state in the. By using this structure, even if the electronic component is larger than the individual openings on the suction surface of the plurality of fine holes, it can be suctioned by one suction nozzle. Furthermore, in a state where the pores will not be completely occluded, the pressure of the air flowing into the vacuum chamber through the pores without occlusion is lost to keep the interior of the vacuum chamber in a negative pressure state, so Even if the degree of attracting solder and dust without clogging the diameter of the pores is serious, the electronic components can be attracted without completely closing the openings of the pores on the suction surface. Brief description of the printed drawings of the employees' cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs: Figure 1 shows the overall perspective view of the electronic component mounting device; Figure 2 shows the cross-sectional view along line 2-2 of Figure 1 Figure 3 shows the cross-section view along line 3-3 of Figure 1; Figure 4 shows the cross-section view along line 4-4 of Figure 3; Figure 5 shows the third figure And the perspective view of the mounting head in Figure 4; 6 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 530526 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (7) Figure 6 shows an enlarged cross-sectional view of the important part of Figure 4; Figure 7 shows a cross-sectional view taken along line 7-7 of Figure 6; Figure 8 shows a cross-section along Figure 8-8 A cross-sectional view taken along line -8; FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 6; FIG. 10 is a cross-sectional view taken along line 10-10 of FIG. 9; Figure 12 shows the air pressure circuit diagram of the internal structure of the jet vacuum pump; Figure 12 is a sectional view showing the connection between the suction nozzle and the hollow shaft center; Figure 13 (a) The figure shows the top view of the suction surface of the suction nozzle body; Figure 13 (b) shows the cross-sectional view taken along line 11-11 of Figure 13 (a); Figure 14 (a) shows A top view showing a state in which an electronic component is sucked onto a position portion of a suction surface of a suction nozzle body; FIG. 14 (b) shows a cross section taken along line 12-12 of FIG. 14 (a) Figures; and Figures 15 (a) and 15 (b) are top views showing the suction surface of a modified example of the suction nozzle. Brief explanation of symbols: 10 ~ electronic component mounting device; 11 ~ device body; 12 ~ through hole; 13 ~ component support table; 14 ~ component supply section; 7 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ------ I ---;-• install -------- order --------- (Please read the precautions on the back before filling this page) 530526 5 3 ρίΓ. Dot " Ο () 6 _B7 V. Description of the invention ($) 16 ~ Mounting head; 19 ~ Guide rail; (Please read the precautions on the back before filling this page) 23 ~ Hollow shaft; 24 ~ Working grip; 25 ~ Suction nozzle; 2 8 ~ Spiral shaft; 29 ~ Up and down moving plate; 43 ~ Solenoid valve; 48 ~ Camera; 31, 51 ~ Motor; 5 3 ~ Pulley; 55 ~ Timing belt; 56 ~ Idler; 6 2 ~ Electromagnetic reading; 63 ~ Electromagnetic threshold for vacuum destruction; 67 ~ Variable current limiter; 71 ~ Nozzle body; 7 2 ~ X tube; Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 72a ~ A cylindrical portion is mounted; a 75 to 0 ring; 80 to a fine hole; 82 to an angular thin tube; and 90 to a vacuum chamber. This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 530526 5359pir.doc / 0 06 A7 B7 ^ —- — V. Description of the invention (B) Example of sinus: Take 卩, according to the diagram Embodiments of the present invention will be described in detail. Fig. 1 is an overall perspective view showing an electronic component mounting apparatus 10 of a so-called wafer mounting apparatus. Figure 2 is a cross-sectional view taken along line 2-2 of Figure 1. Figure 3 is a sectional view taken along line 3-3 of Figure 1. Figure 4 is a sectional view taken along line 4-4 of Figure 3. The electronic component mounting device 10 includes a device body 11 having two cylindrical portions 11 a and 11 b extending in the up-down direction and a horizontal tree portion 11 c connected to the upper end portion thereof. The outer cover is mounted on the outside of the skeleton formed of the profiled steel to form a cylindrical portion 11a, lib, and a horizontal beam portion 11c. The through hole 12 is formed in a central portion of the apparatus body 11. The component supporting table 13 is formed on one side of the apparatus body 11. As shown in FIG. 2, the component supply unit 14 is provided on the component support table 13. In FIG. 1, the component supply sections 14 provided on one side of the component support table 13 are shown, but as shown in FIG. 2, the component supply sections 14 are provided on both sides of the component support table 13. A plurality of package groups are housed in the component supply unit 14. Tapes that are rolled into a curled shape while holding electrical components such as individual 1C and LSI semiconductor wafers, capacitors, diodes, and resistors' are contained in individual packaging groups. In addition to the electronic components to be carried in the packaging group, it can also be stored in a heap storage or a disk storage. The above-mentioned package group, heap storage, or disk storage is mounted on the component support table 13. The stacked storage is a tubular box, which is called a film with a rectangular cross section, and the electronic components are accommodated in a linear configuration. Regarding disk storage, electronic ------------- installation ---- (Please read the phonetic on the back? Matters before filling out this page} Order --------- Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperative
經濟部智慧財產局員工消費合作社印製 530526 -s35l)pi I' .cioc 006 A7 __ B7 五、發明說明（q) 元件是以平面狀方式配置收納於其中。 如第2圖所示，朝X軸方向延伸之2條輸送帶15之設 置在元件支持台13上方。藉由輸送帶15，將搭載瞳耔元 件之實際安裝基板15a自裝置本體11之外部搬入◦上述 二條輸送帶15a對應於實際安裝基板15a之大小，在Y軸 方向上以彼此接近遠離方式來移動，藉以調整相互間之距 離◦但是，在第1圖中，省略輸送帶15之描繪。 爲了將收容於封裝組中之電子元件搭載在實際安裝基 板15a之所預定之位置上，將可在X軸方向與γ軸方向之 水平方向自由移動之二個搭載頭16安裝在裝置本體11 上。 爲了使搭載頭16在水平方向上移動，將朝Y軸方向延 伸之二條導引軌17安裝在水平樑11c上。沿著個別導引 軌17以及可在Y軸方向上自由摺動方式來裝設移動樑丨8。 移動樑18以設置在其基端部側之摺動阻塞部17a部分， 以可自由摺動方式裝設於導引軌17上。朝著X軸方向延 伸將每二條導引軌19安裝在個別之移動樑18上。以沿著 導引軌19以及可在X軸方向上自由移動方式，來裝設搭 載頭16 ◦ 雖然，如第2圖所示，將具有個別搭載頭16之二個移 動樑18裝設在裝置本體11，但是爲了製圖之方便，在個 別移動樑18中，只顯示出導引軌19。但是，亦可使用一 個移動樑18以及具有一個搭載頭16之元件搭載裝置。如 圖所示，導引軌19是安裝在片持式之移動樑18的下部， 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----,·I-----·裝--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 530526 'p i Γ. d ο 〇/()() 6 Α7 Β7 五、發明說明（ί) 其自移動樑18之前端到達水平固定樑11c之下方。以垂 下於導引軌19下之狀態，朝水平方向移動之搭載頭16亦 利用水平固定樑11c下方之空間，以確保在X軸方向上做 廣闊移動動作。 如第4圖所示，搭載頭16具有握持部21，其用來固 定可沿著個別導引軌19摺動之摺動阻塞部19a。此握持部 21構成搭載頭本體。第5圖係顯示出搭載頭16之槪略構 造之立體圖。第6圖係顯示出第4圖之搭載頭16之放大 圖。 如第5圖所示，握持部21具有二個連結部21a，其裝 設在導引軌19上、二個垂直部21b，其自個別連結部21a， 朝上下方向延伸、一水平部21c ’其連結到垂直部21b。 將軸受阻塞部22安裝在個別垂直部21b之下端部外側。 以可在個別軸方向上自由摺動以及自由回轉方式將每四個 中空軸心23安裝在個別軸受阻塞部22上。因此，如在第 5圖之符號23a〜23h所示，共八個中空軸心23是安裝在一 個搭載頭16上。將做爲工作握持具24之吸著噴嘴25裝 設在個別中空軸心23之前端。藉由工作握持具24來握持 電子元件E。 支持構件2 7是固定在握持部21之連結部21 a上。如 第6圖所示，將螺旋軸28以自由旋轉方式安裝於支持構 件27與水平部21c之間。上下移動板29以母螺旋部29a 之部分與螺旋軸28結合在一起。藉由旋轉驅動螺旋軸28， 以上下方向來驅動上下移動板29。如第7圖所示，爲了導 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注咅P事項再填寫本頁) 裝 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 530526 5 3 5 9 p i Γ . d o c n〇6 A7 B7 五、發明說明（7) 引上下移動板29，將固定在支構件27上之導引桿30嵌合 於形成在上下移動板29中之貫穿孔中。 如第7圖所示，爲了旋轉螺旋軸28，將馬達31固定 在握持部21上。將定時帶34橫掛於固定在馬達31之軸 心上之定時滑輪32與固定在螺旋軸28之定時滑輪33之 間。藉由螺旋軸28以上下方向來驅動上下移動板29。 如第8圖所示，以對應於八個工作握持具24，將八個 空氣壓缸35安裝在上下移動板29上。如第6圖所示，藉 由將形成於空氣壓缸外周面之公螺旋與形成於上下移動板 29以螺旋方式結合在一起，將個別之空氣壓缸35安裝在 上下移動板29上。將驅動槓桿37固定在個別空氣壓缸35 之活塞桿36之前端部。個別驅動槓桿37貫穿形成於垂直 部21b之狹縫，且突出於垂直部21b之外側。 中空軸心23貫穿形成於個別驅動槓桿37之前端之貫 穿孔。如第6圖所示，中空軸心23之大徑部38與驅動槓 桿37接觸。將壓縮線圈彈簧42裝設於驅動槓桿37與固 定在中空軸心23之停止部41之間。藉由壓縮線圈彈簧42， 施加向下方之彈簧力至中空軸心23。 如第9圖所示，將控制個別壓縮空氣之供給與供給停 止之四個電磁閥43安裝在握持部21之一側的垂直部21b 上。個別電磁閥43之給氣埠經由軟管連接到對應於四個 中空軸心23e〜23h之四個空氣壓缸35。將相同之電磁閥43 安裝在另一側之垂直部21b，並經由軟管連接到對應於四 個中空軸心23a〜23d之四個空氣壓缸35。因此，如果將壓 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂------ (請先閱讀背面之注意事項再填寫本頁) 530526 5 3 5 9 pi Γ. ci〇c/()()6 A7 B7 五、發明說明（A?) 縮空氣供給到空氣壓缸35中，活塞桿36會朝下方前進移 動，將驅動槓桿37驅動至下方。 (請先閱讀背面之注意事項再填寫本頁) 緊拉線圈彈簧44是裝設在驅動槓桿37與上下移動板 29之間。將朝上方之彈簧力施加到個別上下移動板29。 因此，如果停止壓縮空氣之供給，使空氣壓缸35內部與 電磁閥43之排氣埠相通時，藉由緊拉線圈彈簧44之簧彈 力，個別驅動槓桿37相對於上下移動板29而上升移動。 如第9圖所示，將自前端開口部吸引空氣，以真空吸 著電子元件E之吸著嘴25與具有可藉由空氣壓來開閉動 作之指狀物之緊握手26中之一裝設在中空軸心23之前 端，以做爲工作握持具24。如第9圖所示，緊握手26是 裝設在四個中空軸心23之一，而吸著嘴25是裝設在其它 三個中空軸心23。 經濟部智慧財產局員工消費合作社印製 藉由工作握持具24來握持裝塡在元件支持台Π之電 子元件E時，在搭載頭16水平移動至所預定之位置後， 下降移動中空軸心23 ’在握持後，上升移動中空軸心23。 而且，在將搭載16移動至實際安裝基板15a之所預定位 置時，再度下降移動中空軸心23。因此，雖然以握持電子 元件E於工作握持具24之狀態，進行上升下降移動與水 平移動，但是因爲在水平移動時如干擾到其它電子元件E， 則電子元件會從工作保握具24上落下，所以必須設定不 會使工作保握具24之上下移動動作產生千擾之嚴格的長 度。 如考慮相對於實際安裝基板15a之電子元件E之搭載 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 530526 Α7 Β7 五、發明說明（ο ) 能率之改善時，期望能在短時間內迅速地使工作握持具24 上升下降移動。在圖示之電子元件搭載裝置10中，藉由 利用馬達而使上下移動板29之上下移動與利用所安裝之 空氣壓缸35之上下移動的複合驅動，來驅動個別中空軸 心23。 雖然可藉由使活塞接觸到空氣缸35之桿蓋’以高精確 度地決定空氣壓缸35之活塞桿36的前進限位置，但是在 中間位置時，很難以高精確度來決定活塞桿36位置。對 於此，可以高精確度來控制馬達31之旋轉數’使上下移 動板29停止在任意位置。而且，與馬達31之上下移動板 29之上下移動速度相比，可很容易地設定空氣壓缸之活塞 桿36之前進移動速度成爲較高速度。有關於在下降移動 工作握持具24，以接觸到電子元件E時，所施加給電子元 件E之衝擊力，與空氣壓缸35之驅動力相比，馬達31之 驅動力可設定成較小。因此，如圖所示，藉由複合馬達31 之驅動與空氣壓缸35之驅動，來上下移動工作握持具24， 一面可迅速地進行工作握持具24之上下移動，另一面不 會施加衝擊力到電子元件E上。由於電子元件之種類而具 有不同之電子元件高度時，可藉由馬達31之旋轉數任意 地調整工作握持具24之下降限位置。 裝設.在個別中空軸23之工作握持具24爲吸著嘴25 時，爲了供給負壓（亦即真空）至吸著嘴25，對應於個別工 作握持具24設置四個噴射式真空泵45(共八個）在位於第 6圖左右之個別軸受阻塞物22上。噴射式真空泵45乃爲 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公髮） ---------^---裝 (請先閱讀背面之注意事項再填寫本頁) 訂--------- 經濟部智慧財產局員工消費合作社印製 530526 A7 B7 五、發明說明（/2j 將壓縮空氣吹入擴散器，藉以產生真空之泵。籍由將所產 生之真空連接於吸引埠46與中空軸23之上端之接頭部47 之間，使工作握持具24之前端之吸著嘴25成爲真空狀態。 一方面，在做爲工作握持具24之緊握手26裝設於中 空軸心23之前端時’使倂入噴射式真空泵45之電磁閥動 後，將壓縮空氣供給到中空軸心23，藉以開閉指狀物。 爲了撿測出搭載頭16移動時之位置，將攝影機安 在握持部21。在將所握持之電子兀件E搭載到實際安裝 基板15a之所預定位置時，藉由攝影機檢測出基準位置。 不是以所預定之姿勢，將吸著電子元件E握持在工作握持 具24上，而是以旋轉姿勢來握持。 此時，當檢測出握持工作握持具24之電子元件E之姿 勢，與所預定之姿勢是不一致時，則必須將其調整至所預 定之位置。如第9圖與第10圖所示，將馬達51安裝在握 持部21上。一方面，如第6圖所示，將中空栓槽軸5 2以 自由旋轉方式併入到軸受阻塞部22內。中空軸心23旋轉 栓槽軸52，同時相對於栓槽軸52以上下方向自由摺動。 如第9圖及第1〇圖所示，將定時滑輪53固定在對應於個 別中空軸心23之栓槽軸52。將定時帶55橫掛於固定在馬 達5 1之軸心之定時滑輪54與共計八個定時滑輪53之間。 因此’在驅動馬達51時，旋轉個別工作握持具24，以變 更握持在工作握持具24之電子元件E之旋轉方向之姿勢。 再者’在第10圖中之符號56代表惰輪。 第Π圖係顯示出設置在如第6圖所示之握持部21之 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注咅？事項再填寫本頁) -裝---- 訂---------線| 經濟部智慧財產局員工消費合作社印製 530526 ' ^ p i Γ. cl o c / 0 0 6 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（/>) 二個垂直部21b之外側之噴射式真空泵45(各四個）之內部 構造的空氣壓電路圖。如圖所示，真空產生用電磁閾62 與真空破壞用電磁閾63是設置在供給壓縮空氣之給氣埠 61與吸引埠46之間。如打開真空產生用電磁閾62時，將 壓縮空氣吹至具有擴散器之噴射部64中，藉以在噴射部64 中產生真空。如此，吸引埠46之空氣經由過濾器65與逆 止閾流入噴射部64中，以將電子元件E吸著於吸著嘴25 之前端時，吸引埠46會成爲真空狀態（亦即負壓狀態）。 藉由壓力感測器66檢測出吸引埠46之壓力，以檢測出是 否電子元件E被握持於吸著嘴25上。 在取下吸著於吸著嘴25之電子元件E時，打開真空破 壞用電磁閾63，將來自給氣埠61之壓縮空氣導入吸引璋 46中。藉由可變限流閾67控制供給到真空破壞用電磁閾 63之壓縮空氣量。再者，自噴射部64排出之空氣在以消 音器消音後，排出到外部。 在使用吸著嘴25做爲工作握持具24時，使吸引埠46 成爲真空狀態，來真空吸著及握持電子元件E。一方面， 在使緊握手26來做爲工作握持具24時，不會使如第11 圖所示之真空產生用電磁閾62動作，而是藉由打開/關閉 真空破壞用電磁閾62，將壓縮空氣供給到緊握手26，來 開閉設置在緊握手26之指狀物，以握持電子元件E。 如在第12圖所不之本實施中’做爲工作握持具2 4之 吸著噴嘴25是由直圓筒狀之噴嘴本體71與具有裝著圓筒 部72a之外筒72所構成，上述裝著圓筒部72a用來將噴 「丨！_ (請先閱讀背面之注意事項再填寫本頁) 裝 #. 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 530526 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（/^) 嘴本體71插入固定於先端側上。 如第12圖所示，有關於外筒72，裝著圓筒部72a與 中空軸心23用之裝著圓筒部72b是一體成型的。裝著圓 筒部72a內之小口徑之中空部與裝著圓筒部72b之大徑中 空部是一體構成，用來做爲連通空間。 如第13(a)、13(b)圖所示，藉由將小口徑之細管73 插入大口徑之直圓筒狀之外側管子，以便利用噴嘴本體71 中之細管73，將細孔8〇形成於噴嘴本體71中。在本實施 例中’可使用細管73內部與外側管子74間之隙間部分， 來做爲細孔80。如此，在本實施例中，如第13(&)圖所示， 吸著噴嘴本體71之吸著面71a是形成於多孔面上。 將複數個細孔80設置在內部之噴嘴本體71之連通面 71b側是插入固定於設置在外筒72之前端側之裝著圓筒部 71a。在固定時，例如··以使裝著圓筒部？2a之內周面與所 插入之噴嘴本體71之外周面間不會產生空氣洩漏方式， 來接著固定。 ' 再者，螺旋溝是在外筒72之大徑中空部之裝著圓筒部 72b之則端側內周部，如第12圖所示，可與設置在中空軸 心23之前端側外周上之螺旋部以螺旋方式相連結。 將〇型環75設置在中空軸心、23之外周面。在 爾中，使中空軸心23以螺旋方式進入外筒72之大 倥中殳部之固定狀態下，如此可以不會有空 情況來密封。 伐漏産生之 再者，在上述要領中，使裝著在外筒72內之噴嘴本體 ----------一 —^--------^--------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適财^SF(cNS)A4規格⑽心兩 530526 5 3 59pir.d〇c,/(>()6 A7 B7 五、發明說明（/夕） (請先閱讀背面之注意事項再填寫本頁) 71之連通面7 1B與中空軸23之前端側分離。其間隙形成 於真空室90之空間中。有關於使複數個細管73設置在噴 嘴本體71中，所構成之細孔80，其一端是朝吸著面71a 開口，而另一端是朝連通於真空室90內部之連通面71b 開口。導通複數個細孔80，使吸著面71a側與面朝真空室 90內部之連通面71b相互連通。 一方面，如第14(a)、14(b)圖所示，有關於細孔8〇 之長度1，縱使吸著面71 a之開口部之一部，例如：於電子 元件E之吸著而處於閉塞狀態，亦可自未閉塞開口部而導 通之細孔80吸引外部空氣，藉由在細孔80內所產生之壓 力損失（ΔΡ)，維持真空室90內之負壓，以維持電子元件 E之吸著。 附帶，在細孔管壁之管摩擦係數爲λ時，可從下列之 細孔80之長度L與細孔80之口徑d間之關係式，計算出 細孔80內所產生之壓力損失ΔΡ。 尙且，v代表流體之'平均流速，g代表重力加速度。 AP=X(L/d)(v2/2g) 經濟部智慧財產局員工消費合作社印製 細孔8 0之長度爲所求得之長度L以上。在長度小於L 時，未閉塞開口部所導通之細孔80上之壓力損失會較小， 所以並沒有S寸論電子兀件之吸著所必須之吸引力維持。例 如：沒有使吸著面71a成爲全面閉塞狀態，而會成爲沒有 吸著之情況。 接下來，依序說明使用上述電子元件搭載裝置10，使 電子元件E搭載在實際安裝基板15a上。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 530526 5 3 5 9 p i Γ. d o c / 0 ί) 6 A7 B7 五、發明說明（/合） ------— — — — — (請先閱讀背面之注意事項再填寫本頁) 藉由沿著個別導引軌丨7，使移動樑18朝Y軸方向移 動，同時沿著設置在移動樑18上之導引軌19 ’使搭載頭 16朝X軸方向移動，來使設置在一個電子元件搭載裝置1〇 之二個搭載頭16在水平方向上移動。如圖所示’在設置 二個搭載頭16時，以不使搭載頭16相互干擾之情況下， 控制個別水平方向之移動。 首先，使個別搭載頭16移動至元件供給部14之所預 定位置。決定設置在搭載頭16之八個工作握持具24中之 一在所預定之電子元件E之上端之位置。在此狀態下，使 對應於工作握持具24之空氣壓缸35動作，使中空軸心23 經由驅動槓桿37下降移動。而且，驅動馬達31，以使上 下移動板29下降移動。以所預定之時序’將控制信號傳 送至在噴射式真空泵45內之所預定之真空產生用電磁閥 62 ◦將壓縮空氣供給到噴射部64中，以使吸引埠46成爲 負壓狀態。 經濟部智慧財產局員工消費合作社印製 在藉由空氣壓缸35，使中空軸心23下降移動之後， 在藉由以馬達23使中空軸心23下降移動，以使吸著噴嘴 25之前端接觸到電子元件E時，可慢慢地接觸到吸著噴嘴 25，因而可防止吸著噴嘴25將衝擊力施加到電子元件E 上。而在吸著噴嘴25之前端之停止位置與電子元件E之 表面間之誤差，可藉由中空軸心23上升，以抵抗彈簧42 之彈簧力來去除。如吸著嘴25接觸到電子元件E之表面 時，藉由自前端流入內部之空氣，將電子元件E真空吸著 於吸著噴嘴25之前端。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 530526 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（Λ/) 接下來，藉由逆轉馬達31，以使上下移動板29上升 移動，同時將空氣壓缸35內之壓縮空氣排出到外部，以 拉緊之線圈彈賛4 4之弹黃力’使驅動彳貝桿3 7上升移動’ 進而使中空軸心2 3上升移動。在上升移動時’亦可同時 地進行上下移動板29之驅動與空氣壓缸35之動作。如此， 上升移動工作握持具24，同時或者在結束上升移動後，將 搭載頭16移動至水平方向，使搭載頭16停止在實際安裝 基板15 a之所預定之位置。 在此狀態下，與上述握持電子元件E之中空軸心23時 一樣，藉由下降移動，將電子元件E配置在實際安裝基板 15a上。藉由打開如第11圖所示之真空破壞用電磁閾63， 取下吸著在吸著嘴25之電子元件E後，將其載置在實際 安裝基板15a上。 藉由在使用緊握手26以做爲工作保握具24時，以所 預定之時序打開真空破壞用電磁閾63，將壓縮空氣供給到 緊握手26中，以握持電子元件E。在使緊握手26動作與 進行真空破壞時，於改變供給到吸引璋46之壓縮空氣量 時，調整節流閾67。 以上，雖然依據本發明之實施形態來具體說明’但是 本發明並非限定於上述實施形態◦更不用說，本發明之要 旨在不脫離本發明之範圍下，可做各種改變。 例如：有關於在本發明之吸著噴嘴25中（如圖所示）’ 雖然顯示出以最密狀態將細管73設置在大口徑之外側管 子74中之構成，但是，亦可如第15(a)圖所示之外側管子 20 本紙張尺度翻中國國家標準（CNS)A4規格（210 X 297公爱）— ' (請先閱讀背面之注意事項再填寫本頁} · ϋ ϋ eamm ϋ ·1 ϋ I ϋ 1 ϋ n I # 530526 ί 59 pi Γ. ci oc/006 A7 B7 五、發明說明（/7 ) 74，沿著管方向，設置隔板’來形成細孔80。 再者，亦可使角形細管82之側面相互接著，以使吸著 面71a形成於角形開口之多孔面上。 再者，雖然使複數個細管73之口徑爲相同之口徑，但 是亦可使用不同口徑之細管。例如：亦可將大口徑之細管 配置在外側管子74內之中心部’以及沿著大口徑之細管73 之圓周部，配置複數個小口徑之細管73。 再者，雖然如圖所示之上述電子元件搭載裝置適用於 將複數種類之電子元件E搭載在實際安裝基板15a上，但 是在將特定電子元件搭載在做爲被搭載構件之測試板上 時，亦適用之。 再者，雖然設置八個中空軸心23於一個搭載頭16上， 但是亦可設置任意數之中空軸心（不限於八個）。此外，雖 然如圖所示，使工作握持具2安裝在做爲上下移動板之中 空軸心23之下端部，利用中空軸心23內之孔，導引使工 作握持具24動作之流體，但是軸心可以不是中空，亦可 對應於安裝在其下端部之工作握持具24，藉由軟管等，直 接供給流體。 因爲本發明之吸著噴嘴，在使吸著面之開口部之一部 分成爲閉塞狀態時，可藉由導通至吸著面之未閉塞開口部 之細管所產生之壓力損失，來維持在真空室內之吸著所必 要之負壓，所以可將電子元件吸著於吸著面之一部分上。 因爲在吸著面之開口部之一部分成爲閉塞狀態時，可 藉由導通至吸著面之未閉塞開口部之細孔所產生之壓力損 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----7——；11·裝--------訂---------^9— (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 530526 A7 5 3 5 p i Γ. d o c / 0 0 6 _B7_ 五、發明說明（/f) 失，維持真空室內之吸著所需之負壓，這樣來設定吸著噴 嘴，所以縱使沒有閉塞吸著面之全部，亦可吸著電子元件。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 530526 -s35l) pi I '.cioc 006 A7 __ B7 V. Description of the Invention (q) The components are arranged and stored in a flat shape. As shown in FIG. 2, two conveyor belts 15 extending in the X-axis direction are disposed above the component support table 13. The actual mounting substrate 15a carrying the pupillary element is carried in from the outside of the device body 11 by the conveyor belt 15. The two above-mentioned conveyor belts 15a correspond to the size of the actual mounting substrate 15a, and are moved close to each other in the Y axis direction In order to adjust the distance between them, the drawing of the conveyor belt 15 is omitted in the first figure. In order to mount the electronic components contained in the package group at a predetermined position of the actual mounting substrate 15a, two mounting heads 16 that can move freely in the horizontal direction of the X-axis direction and the γ-axis direction are mounted on the device body 11. . In order to move the mounting head 16 in the horizontal direction, two guide rails 17 extending in the Y-axis direction are mounted on the horizontal beam 11c. The moving beams 8 and 8 are installed along the individual guide rails 17 and can be freely folded in the Y-axis direction. The moving beam 18 is provided on the guide rail 17 in a freely foldable manner with a portion of the foldable blocking portion 17a provided on the base end side thereof. Each two guide rails 19 are mounted on individual moving beams 18 extending in the X-axis direction. The mounting head 16 is installed along the guide rail 19 and can move freely in the X-axis direction. ◦ Although, as shown in FIG. 2, two moving beams 18 having individual mounting heads 16 are installed in the device. The main body 11, but for the convenience of drawing, only the guide rail 19 is shown in the individual moving beams 18. However, a moving beam 18 and a component mounting device having a mounting head 16 may be used. As shown in the figure, the guide rail 19 is installed on the lower part of the sheet-type mobile beam 18, and the paper size is in accordance with the Chinese National Standard (CNS) A4 (210 X 297 mm) -----, · I- ---- · install -------- order --------- line (please read the notes on the back before filling this page) 530526 'pi Γ. D ο 〇 / () ( ) 6 Α7 Β7 V. Description of the invention (ί) The front end of the self-moving beam 18 reaches below the horizontal fixed beam 11c. The mounting head 16 that moves in the horizontal direction while being suspended under the guide rail 19 also uses the space under the horizontal fixed beam 11c to ensure a wide movement in the X-axis direction. As shown in FIG. 4, the mounting head 16 has a gripping portion 21 for fixing a folding blocking portion 19a that can be folded along the individual guide rails 19. This holding portion 21 constitutes a mounting head body. Fig. 5 is a perspective view showing a schematic structure of the mounting head 16. Fig. 6 is an enlarged view showing the mounting head 16 of Fig. 4. As shown in FIG. 5, the holding portion 21 has two connecting portions 21 a, which are installed on the guide rail 19 and two vertical portions 21 b, which extend from the individual connecting portions 21 a in the up-down direction and a horizontal portion 21 c. 'It is connected to the vertical portion 21b. The shaft blocking portion 22 is mounted outside the lower end portion of the individual vertical portion 21b. Each of the four hollow shaft cores 23 is mounted on the individual shaft blocked portion 22 in such a manner that it can be freely folded and rotated in the direction of the individual shafts. Therefore, as shown by symbols 23a to 23h in FIG. 5, a total of eight hollow shaft centers 23 are mounted on one mounting head 16. A suction nozzle 25 serving as a work holder 24 is installed at the front end of each hollow shaft center 23. The electronic component E is held by the work holder 24. The supporting member 27 is fixed to the connecting portion 21 a of the holding portion 21. As shown in Fig. 6, the screw shaft 28 is mounted between the support member 27 and the horizontal portion 21c in a freely rotatable manner. The up-and-down moving plate 29 is coupled to the screw shaft 28 by a part of the female screw portion 29a. By rotating the screw shaft 28, the up-and-down movement plate 29 is driven. As shown in Figure 7, in order to guide the paper size to the Chinese National Standard (CNS) A4 (210 X 297 mm) (please read the note on the back before filling out this page). Printed by the Consumer Cooperative, printed by the Intellectual Property Bureau of the Ministry of Economy, printed by the Consumer Cooperative 530526 5 3 5 9 pi Γ. Docn〇6 A7 B7 V. Description of the invention (7) Guide the up-and-down moving plate 29, which will be fixed on the support member 27 The lever 30 is fitted into a through hole formed in the up-and-down moving plate 29. As shown in Fig. 7, in order to rotate the screw shaft 28, the motor 31 is fixed to the grip portion 21. The timing belt 34 is hung horizontally between a timing pulley 32 fixed on the axis of the motor 31 and a timing pulley 33 fixed on the screw shaft 28. The up-and-down moving plate 29 is driven by the screw shaft 28 in the up-down direction. As shown in Fig. 8, eight air cylinders 35 are mounted on the up-and-down moving plate 29 so as to correspond to the eight working grips 24. As shown in Fig. 6, a male air cylinder 35 formed on the outer peripheral surface of the air pressure cylinder and a vertical movement plate 29 are spirally coupled to each other, and an individual air pressure cylinder 35 is mounted on the vertical movement plate 29. The driving lever 37 is fixed to the front end of the piston rod 36 of the individual air cylinder 35. The individual driving lever 37 penetrates a slit formed in the vertical portion 21b, and protrudes beyond the vertical portion 21b. The hollow shaft center 23 passes through a through hole formed at the front end of the individual driving lever 37. As shown in FIG. 6, the large-diameter portion 38 of the hollow shaft center 23 is in contact with the driving lever 37. A compression coil spring 42 is installed between the driving lever 37 and the stopper 41 fixed to the hollow shaft center 23. A downward spring force is applied to the hollow shaft center 23 by the compression coil spring 42. As shown in Fig. 9, four solenoid valves 43 that control the supply and stop of the supply of individual compressed air are mounted on the vertical portion 21b on one side of the grip portion 21. The air supply ports of the individual solenoid valves 43 are connected via hoses to four air cylinders 35 corresponding to the four hollow shaft centers 23e to 23h. The same solenoid valve 43 is mounted on the other vertical portion 21b, and is connected to four air cylinders 35 corresponding to the four hollow shaft centers 23a to 23d via a hose. Therefore, if the size of the pressed paper applies the Chinese National Standard (CNS) A4 (210 X 297 mm) -------------------- Order ----- -(Please read the precautions on the back before filling this page) 530526 5 3 5 9 pi Γ. Cioc / () () 6 A7 B7 V. Description of the invention (A?) The compressed air is supplied to the air cylinder 35 , The piston rod 36 moves forward downward, and drives the driving lever 37 downward. (Please read the precautions on the back before filling in this page.) The tension coil spring 44 is installed between the driving lever 37 and the up-and-down moving plate 29. An upward spring force is applied to the individual up and down moving plates 29. Therefore, if the supply of compressed air is stopped and the inside of the air cylinder 35 communicates with the exhaust port of the solenoid valve 43, the spring force of the coil spring 44 is tightly pulled, and the individual driving levers 37 are moved up and down relative to the upper and lower moving plates 29 . As shown in FIG. 9, one of the suction nozzle 25 that sucks air from the opening at the front end and sucks the electronic component E in a vacuum, and one of the tight handshake 26 that has a finger that can be opened and closed by air pressure. It is set at the front end of the hollow shaft center 23 as a working grip 24. As shown in Fig. 9, the tight grip 26 is mounted on one of the four hollow shaft centers 23, and the suction nozzle 25 is mounted on the other three hollow shaft centers 23. When the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints and holds the electronic component E mounted on the component support table Π with the work holding tool 24, after the mounting head 16 is horizontally moved to a predetermined position, the hollow shaft is lowered and moved. Heart 23 'After holding, the hollow shaft 23 is moved upward. When the mount 16 is moved to a predetermined position of the actual mounting substrate 15a, the hollow shaft center 23 is lowered and moved again. Therefore, although the electronic component E is held in the state of the working grip 24, the upward and downward movements and the horizontal movement are performed, but if other electronic components E are disturbed during the horizontal movement, the electronic components will be removed from the work holding fixture 24. Since it moves up and down, it is necessary to set a strict length that does not cause disturbance to the up and down movement of the work holding grip 24. For example, considering the mounting of electronic components E relative to the actual mounting substrate 15a, the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 530526 Α7 B7 V. Description of the invention (ο) The improvement of energy efficiency is expected The work grip 24 is quickly moved up and down in a short time. In the electronic component mounting device 10 shown in the figure, the individual hollow shafts 23 are driven by a combined drive of moving the up and down moving plate 29 up and down with a motor and up and down using an air cylinder 35 mounted thereon. Although it is possible to determine the forward limit position of the piston rod 36 of the air cylinder 35 with high accuracy by bringing the piston into contact with the rod cover of the air cylinder 35, it is difficult to determine the piston rod 36 with high accuracy in the intermediate position. position. On the other hand, the number of rotations of the motor 31 can be controlled with high accuracy to stop the up-and-down moving plate 29 at an arbitrary position. Moreover, compared with the up-down moving speed of the up-down moving plate 29 of the motor 31, the forward movement speed of the piston rod 36 of the air cylinder can be easily set to a higher speed. Regarding the impact force applied to the electronic component E when the work grip 24 is moved downward to contact the electronic component E, the driving force of the motor 31 can be set smaller than the driving force of the air cylinder 35 . Therefore, as shown in the figure, the work gripper 24 is moved up and down by the driving of the compound motor 31 and the air cylinder 35, and the work gripper 24 can be moved up and down quickly on one side without being applied on the other side. The impact force is on the electronic component E. When the height of the electronic component is different due to the type of the electronic component, the lower limit position of the work holder 24 can be arbitrarily adjusted by the number of rotations of the motor 31. Installation. When the working grips 24 of the individual hollow shafts 23 are suction nozzles 25, in order to supply negative pressure (ie, vacuum) to the suction nozzles 25, four jet-type vacuum pumps are provided corresponding to the individual working grips 24. 45 (a total of eight) are on the individual shaft obstructions 22 located around the sixth figure. The jet vacuum pump 45 is based on the Chinese paper standard (CNS) A4 (210 X 297) issued for the paper size. --------- ^ --- install (please read the precautions on the back before filling in this Page) Order --------- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 530526 A7 B7 V. Description of the invention (/ 2j The compressed air is blown into the diffuser to create a vacuum pump. The generated vacuum is connected between the suction port 46 and the joint portion 47 at the upper end of the hollow shaft 23, so that the suction nozzle 25 at the front end of the working grip 24 becomes a vacuum state. On the one hand, as the working grip 24, When the tight grip 26 is installed at the front end of the hollow shaft center 23, the solenoid valve of the injection vacuum pump 45 is actuated, and compressed air is supplied to the hollow shaft center 23 to open and close the fingers. In order to pick out the mounting head 16 when moving, mount the camera on the holding part 21. When the held electronic element E is mounted on the predetermined position of the actual mounting substrate 15a, the reference position is detected by the camera. Not in the predetermined posture , Holding the suction electronic component E on the working grip 24, but Rotate to hold. At this time, when it is detected that the posture of the electronic component E holding the work grip 24 is not consistent with the predetermined posture, it must be adjusted to the predetermined position. As shown in FIG. 9 As shown in Fig. 10, the motor 51 is mounted on the holding portion 21. On the one hand, as shown in Fig. 6, the hollow bolt groove shaft 52 is freely rotated into the shaft blocking portion 22. The hollow shaft center 23 Rotate the spigot shaft 52 while flexing freely in the up and down direction relative to the spigot shaft 52. As shown in Figs. 9 and 10, the timing pulley 53 is fixed to the peg groove shaft corresponding to the individual hollow shaft center 23. 52. Hang the timing belt 55 between the timing pulley 54 fixed to the axis of the motor 51 and a total of eight timing pulleys 53. Therefore, when driving the motor 51, rotate the individual working grips 24 to change the grip The posture of holding the electronic component E in the rotation direction of the work grip 24. Furthermore, the symbol 56 in Fig. 10 represents the idler. Fig. Π shows the holding portion provided in Fig. 6 The paper size of 21 applies to China National Standard (CNS) A4 (210 X 297 mm) (Please First read the note on the back? Matters and then fill out this page)-Install ---- Order --------- Line | Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs 530526 '^ pi Γ. Cl oc / 0 0 6 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (/ >) The internal pressure circuit diagram of the jet vacuum pump 45 (four for each) outside the two vertical sections 21b. As shown in the figure, the electromagnetic threshold 62 for vacuum generation and the electromagnetic threshold 63 for vacuum destruction are provided between the air supply port 61 and the suction port 46 that supply compressed air. For example, when the electromagnetic threshold 62 for vacuum generation is turned on, compressed air is blown into the ejection section 64 having a diffuser, thereby generating a vacuum in the ejection section 64. In this way, when the air in the suction port 46 flows into the spraying portion 64 through the filter 65 and the check threshold to attract the electronic component E to the front end of the suction nozzle 25, the suction port 46 becomes a vacuum state (that is, a negative pressure state). ). The pressure of the suction port 46 is detected by the pressure sensor 66 to detect whether the electronic component E is held on the suction nozzle 25 or not. When the electronic component E sucked by the suction nozzle 25 is removed, the vacuum-breaking electromagnetic threshold 63 is opened, and the compressed air from the air supply port 61 is introduced into the suction port 46. The amount of compressed air supplied to the electromagnetic threshold 63 for vacuum destruction is controlled by the variable current limiting threshold 67. The air discharged from the injection unit 64 is silenced by a muffler, and then discharged to the outside. When the suction nozzle 25 is used as the work holder 24, the suction port 46 is brought into a vacuum state to vacuum-hold and hold the electronic component E. On the one hand, when the handshake 26 is used as the work holder 24, the electromagnetic threshold 62 for vacuum generation as shown in FIG. 11 is not operated, but the electromagnetic threshold 62 for vacuum destruction is opened / closed. The compressed air is supplied to the tight grip 26 to open and close the fingers provided on the tight grip 26 to hold the electronic component E. As in the present embodiment shown in FIG. 12, the suction nozzle 25 as the working gripper 24 is composed of a straight cylindrical nozzle body 71 and an outer cylinder 72 having a cylindrical portion 72a. The above-mentioned cylindrical part 72a is used for spraying "丨! _ (Please read the precautions on the back before filling in this page). Loading #. This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) 530526 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (/ ^) The mouth body 71 is inserted and fixed on the tip side. As shown in FIG. 12, the outer cylinder 72 is equipped with a cylindrical portion 72a. The cylindrical portion 72b is integrally formed with the hollow shaft center 23. The small-diameter hollow portion in which the cylindrical portion 72a is installed and the large-diameter hollow portion in which the cylindrical portion 72b is installed are integrally formed. As shown in Figures 13 (a) and 13 (b), by inserting a small-diameter thin tube 73 into a large-diameter straight cylindrical outer tube, in order to use the thin tube 73 in the nozzle body 71, A narrow hole 80 is formed in the nozzle body 71. In this embodiment, a gap between the inside of the thin tube 73 and the outer tube 74 can be used Partly, it is used as the pores 80. Thus, in this embodiment, as shown in FIG. 13, the suction surface 71a of the suction nozzle body 71 is formed on the porous surface. A plurality of pores 80 The side of the communication surface 71b of the nozzle body 71 provided inside is inserted and fixed to the cylindrical portion 71a provided on the front end side of the outer cylinder 72. When fixing, for example, so that the cylindrical portion is installed within 2a There will be no air leakage between the peripheral surface and the outer peripheral surface of the inserted nozzle body 71, and it will be fixed. 'Furthermore, the spiral groove is the end side of the cylindrical portion 72b of the large-diameter hollow portion of the outer cylinder 72. As shown in FIG. 12, the inner peripheral portion can be spirally connected to the spiral portion provided on the outer periphery of the front end side of the hollow shaft center 23. The O-ring 75 is provided on the outer peripheral surface of the hollow shaft center and 23. Here, the hollow shaft center 23 is screwed into the fixed state of the middle part of the large cymbal of the outer cylinder 72 in a spiral manner, so that there can be no air to seal. In addition, in the above-mentioned method, the installation Nozzle body inside the outer cylinder 72 ---------- One-^ -------- ^ --------- (Please read first Please fill in this page before filling in this page.) This paper is suitable for ^ SF (cNS) A4 specifications. 530526 5 3 59pir.d〇c, / (> () 6 A7 B7. V. Description of the invention (/) (Please read the precautions on the back before filling in this page.) The communication surface 7 1B of 71 is separated from the front end side of the hollow shaft 23. The gap is formed in the space of the vacuum chamber 90. A plurality of thin tubes 73 are provided in the nozzle body. In 71, one of the pores 80 is opened toward the suction surface 71a, and the other end is opened toward the communication surface 71b communicating with the inside of the vacuum chamber 90. The plurality of fine holes 80 are conducted so that the side of the suction surface 71a and the communication surface 71b facing the inside of the vacuum chamber 90 communicate with each other. On the one hand, as shown in Figures 14 (a) and 14 (b), there is a length 1 of the pore 80, and even if one of the openings of the suction surface 71a is, for example, the suction of the electronic component E While in the occluded state, the pores 80 that are conducted without opening the openings can also attract external air, and maintain the negative pressure in the vacuum chamber 90 by the pressure loss (ΔP) generated in the pores 80 to maintain the electrons. Absorption of element E. Incidentally, when the pipe friction coefficient of the pore wall is λ, the pressure loss ΔP generated in the pore 80 can be calculated from the following relationship between the length L of the pore 80 and the diameter d of the pore 80. Furthermore, v represents the 'average flow velocity of the fluid, and g represents the acceleration of gravity. AP = X (L / d) (v2 / 2g) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The length of the pores 80 is more than the length L obtained. When the length is less than L, the pressure loss on the pores 80 opened by the unblocked openings will be small, so the attractive force necessary for the adsorption of the S-element electronic components is not maintained. For example, if the suction surface 71a is not completely closed, there will be no suction. Next, the use of the above-mentioned electronic component mounting apparatus 10 is described in order to mount the electronic component E on the actual mounting substrate 15a. The size of this paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 530526 5 3 5 9 pi Γ. Doc / 0 ί) 6 A7 B7 V. Description of the invention (/ total) -------- — — — — (Please read the notes on the back before filling in this page) By following the individual guide rails 7 and 7, the mobile beam 18 is moved in the Y-axis direction, and at the same time guided along the guide provided on the mobile beam 18 The rail 19 ′ moves the mounting head 16 in the X-axis direction to move the two mounting heads 16 provided in one electronic component mounting device 10 in the horizontal direction. As shown in the figure, when two mounting heads 16 are provided, the horizontal movements of the individual heads are controlled without causing the mounting heads 16 to interfere with each other. First, the individual mounting head 16 is moved to a predetermined position of the component supply section 14. It is decided to set the position of one of the eight working grips 24 of the mounting head 16 above the predetermined electronic component E. In this state, the air cylinder 35 corresponding to the work grip 24 is operated, and the hollow shaft center 23 is moved downward through the driving lever 37. Then, the motor 31 is driven to move the upper and lower moving plates 29 downward. The control signal is transmitted to the predetermined vacuum generating solenoid valve 62 in the ejection type vacuum pump 45 at a predetermined timing ′. The compressed air is supplied to the ejection portion 64 so that the suction port 46 becomes a negative pressure state. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, after the hollow shaft 23 is moved downward by the air cylinder 35, the hollow shaft 23 is moved downward by the motor 23 so that the front end of the suction nozzle 25 contacts When the electronic component E reaches the suction nozzle 25, the suction nozzle 25 can be prevented from applying an impact force to the electronic component E. The error between the stop position at the front end of the suction nozzle 25 and the surface of the electronic component E can be removed by lifting the hollow shaft 23 to resist the spring force of the spring 42. For example, when the suction nozzle 25 contacts the surface of the electronic component E, the electronic component E is vacuum-sucked to the front end of the suction nozzle 25 by the air flowing into the interior from the front end. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 530526 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (Λ /) Next, by reversing the motor 31, The up-and-down moving plate 29 is moved upward, and at the same time, the compressed air in the air pressure cylinder 35 is discharged to the outside, and the tension coil is used to spring the spring force of the 4 4 to move the driving cymbal lever 3 7 to move the hollow shaft. Heart 2 3 moves up. In the ascending movement, the driving of the up-and-down moving plate 29 and the operation of the air cylinder 35 may be performed simultaneously. In this way, the lifting and moving work holder 24 is moved at the same time or after the lifting movement is completed, the mounting head 16 is moved to the horizontal direction, and the mounting head 16 is stopped at a predetermined position where the substrate 15a is actually mounted. In this state, the electronic component E is placed on the actual mounting substrate 15a by moving downward as in the case of holding the hollow shaft center 23 of the electronic component E as described above. The electromagnetic threshold 63 for vacuum destruction shown in Fig. 11 is opened, the electronic component E sucked by the suction nozzle 25 is removed, and then it is placed on the actual mounting substrate 15a. When the tight grip 26 is used as the work holding grip 24, the vacuum destruction electromagnetic threshold 63 is opened at a predetermined timing, and compressed air is supplied to the tight grip 26 to hold the electronic component E. The throttle threshold 67 is adjusted when the amount of compressed air to be supplied to the suction yoke 46 is changed when the tightly shaking hands 26 are operated and the vacuum is broken. As mentioned above, although it is specifically described based on the embodiment of the present invention, the present invention is not limited to the above embodiment. Not to mention, the gist of the present invention can be variously changed without departing from the scope of the present invention. For example, in the suction nozzle 25 of the present invention (as shown in the figure) 'Although the structure in which the thin tube 73 is provided in the large-diameter outer-side tube 74 in the densest state is shown, it may also be the same as in section 15 ( a) The outside tube shown in the figure is 20 paper sizes (Chinese National Standards (CNS) A4 specifications (210 X 297)) — '(Please read the precautions on the back before filling this page} · · ϋ eamm ϋ · 1 ϋ I ϋ 1 ϋ n I # 530526 ί 59 pi Γ. ci oc / 006 A7 B7 V. Description of the invention (/ 7) 74, along the direction of the tube, a partition plate is provided to form a fine hole 80. Furthermore, it is also possible to The side surfaces of the angular thin tube 82 are adhered to each other so that the suction surface 71a is formed on the porous surface of the angular opening. In addition, although the diameters of the plurality of thin tubes 73 are the same, thin tubes of different diameters can also be used. : It is also possible to arrange a large-diameter thin tube in the center of the outer tube 74 and a plurality of small-diameter thin tubes 73 along the circumference of the large-diameter thin tube 73. Furthermore, although the above-mentioned electronic Component mounting device is suitable for mounting multiple types of electronic components E It is mounted on the actual mounting substrate 15a, but it is also applicable when a specific electronic component is mounted on a test board as a mounted component. In addition, although eight hollow shaft centers 23 are provided on one mounting head 16, You can set any number of hollow shafts (not limited to eight). In addition, as shown in the figure, the work holder 2 is installed at the lower end of the hollow shaft 23 as a vertical moving plate, and the hollow shaft is used. The hole in 23 guides the fluid that causes the working grip 24 to move, but the axis may not be hollow, or it may correspond to the working grip 24 installed at its lower end, and the fluid is directly supplied through a hose or the like. Because the suction nozzle of the present invention, when a part of the opening portion of the suction surface is closed, the pressure loss caused by the thin tube that is conducted to the unclosed opening portion of the suction surface can be maintained in the vacuum chamber. The necessary negative pressure for suction makes it possible to suck the electronic component on a part of the suction surface. When a part of the opening on the suction surface becomes closed, it can be conducted to the unclosed opening on the suction surface. The pressure loss caused by the pores of the Ministry of Standards of this paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ----- 7 ----; 11 · installation -------- order- -------- ^ 9— (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 530526 A7 5 3 5 pi Γ. Doc / 0 0 6 _B7_ V. Description of the invention (/ f) If the suction pressure is maintained in the vacuum chamber, the suction nozzle is set so that the electronic components can be suctioned even if the entire suction surface is not blocked. (Please read the back Please fill in this page for further information.) Printed on the paper by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm).