JPH092682A - Plate material sucker mover - Google Patents
Plate material sucker moverInfo
- Publication number
- JPH092682A JPH092682A JP18761695A JP18761695A JPH092682A JP H092682 A JPH092682 A JP H092682A JP 18761695 A JP18761695 A JP 18761695A JP 18761695 A JP18761695 A JP 18761695A JP H092682 A JPH092682 A JP H092682A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- plate material
- tubular body
- mover
- sucker
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、セラミック基板、プラ
スチック板、金属板、板紙、木板などの板体を吸引、付
着させつつ適宜箇所へ移動、運搬できる板体吸着移動器
に係り、構造が簡易で形状もコンパクトなうえに、被吸
着物たる板体に多数の表裏間小通孔が存在していたり表
面に多少の凹凸があつてもなお充分吸着して移動できる
程に吸引力の強大な板体吸着移動器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate adsorbing mover capable of moving and carrying a plate such as a ceramic substrate, a plastic plate, a metal plate, a paperboard, and a wooden plate to an appropriate place while sucking and adhering the plate, and having a structure. In addition to being simple and compact, the suction force is so strong that even if there are a large number of small holes between the front and back of the plate, which is the object to be adsorbed, or there is some unevenness on the surface, it can still be sufficiently adsorbed and moved. The present invention relates to a plate adsorption transfer device.
【0002】[0002]
【従来の技術】セラミック基板その他の板体を吸着移動
させる器具としては従来、真空発生装置に排気導管を介
して連結された吸盤を板体表面に押圧してその吸盤に板
体を吸着させ、ついでその吸盤及び板体を上方へ引上げ
たうえで適宜箇所まで移動させるものであった。2. Description of the Related Art Conventionally, as a device for adsorbing and moving a ceramic substrate or other plate, a suction cup connected to a vacuum generator through an exhaust conduit is pressed against the surface of the plate to adsorb the plate on the suction cup. Then, the suction cup and the plate body were pulled up and moved to an appropriate position.
【0003】[0003]
【発明が解決しようとする課題】そのような真空発生装
置に排気導管を介して連結された吸盤による吸着器具で
は、吸盤と真空発生装置との間の流体の圧力差は最高で
1気圧に過ぎず、またそれらの間に介在する比較的長い
排気導管内での流体の圧力損失が大きくて、吸盤から吸
引される空気量は多くないことから、吸盤による被吸着
物たる板体の表面への最初の押圧力が弱くて板体と吸盤
間の密接状態が余り良くないとか、或いは板体表裏間に
細い通孔があるとか板体表面に少々凹凸があるとかの状
況にあるときには、板体を上方へ持上げ得るほどに吸盤
で板体を吸着し得ないというトラブルが発生し勝ちであ
る。また、その排気導管内での流体の圧力損失を小さく
して吸盤から吸引される空気量を多くするべく、その排
気導管を大きな径のものにすると装置全体が嵩高いもの
となって不都合である。本発明はそのような従来の板体
吸着器具を改良して吸引空気量が大きくて吸引力が強
く、吸着面を板体に押しつけなくても板体の吸着が可能
であり、また板体に多数の細かい通孔があったり板体表
面に多少の凹凸があったりしても板体の吸着が可能であ
って、その板体を吸着状態の儘で適宜箇所まで運び得
る、構造簡易でコンパクトな板体吸着移動器を開発する
ことを目的とする。In a suction device with a suction cup connected to such a vacuum generator via an exhaust conduit, the pressure difference between the suction cup and the vacuum generator is less than 1 atm. In addition, since the pressure loss of the fluid in the relatively long exhaust conduit interposed between them is large, and the amount of air sucked from the suction cup is not large, the suction cup does not increase the amount of air adsorbed on the surface of the plate body to be adsorbed. When the initial pressing force is weak and the close contact between the plate and the suction cup is not so good, or there is a small through hole between the front and back of the plate or the plate surface has some irregularities, the plate It is prone to a problem that the plate cannot be adsorbed by the suction cup so that the plate can be lifted up. In addition, if the exhaust conduit has a large diameter in order to reduce the pressure loss of the fluid in the exhaust conduit and increase the amount of air sucked from the suction cup, the whole apparatus becomes bulky, which is inconvenient. . The present invention is an improvement of such a conventional plate suction device, which has a large suction air amount and a strong suction force, and can suck the plate without pressing the suction surface against the plate, and Even if there are many fine through holes or there are some irregularities on the surface of the plate, the plate can be adsorbed, and the plate can be carried to an appropriate place in the adsorption state, and the structure is simple and compact. The objective is to develop a simple plate adsorption transfer device.
【0004】[0004]
【課題を解決するための手段及びその作用】本発明は、
圧縮空気導管1を、その先端部ノズルから圧縮空気をし
て筒体2の中間部の内部の、該筒体長手方向の略軸線上
で該筒体上端方向へ噴出させ得る態様に該筒体に配設す
ると共に、下端面がその下方に配置されるべき被移動板
体4の表面と平行面に形成された板体吸着具3を、その
板体吸着具の下端面が該筒体の下端開口面と同位置若し
くはそれよりも下方位置に位置する態様に且つその板体
吸着具が該筒体の下端部開口面積を実質的に狭めない態
様に、該筒体の周壁に密接状にその下方部に周設しつ
つ、該筒体を移動具5に固定してなる板体吸着移動器で
ある。SUMMARY OF THE INVENTION The present invention provides
The compressed air conduit 1 is configured so that compressed air can be blown out from the nozzle at the tip of the compressed air conduit 1 toward the upper end of the cylindrical body inside the intermediate portion of the cylindrical body 2 substantially on the axis of the longitudinal direction of the cylindrical body. And a lower end surface of the tubular member whose lower end surface is parallel to the surface of the movable plate member 4 to be arranged below. In a manner in which it is located at the same position as the lower end opening surface or a position lower than that, and in a manner in which the plate suction tool does not substantially narrow the opening area of the lower end portion of the cylindrical body, in close contact with the peripheral wall of the cylindrical body. It is a plate suction moving device in which the tubular body is fixed to the moving tool 5 while being provided around the lower part thereof.
【0005】このような板体吸着移動器では、セラミッ
ク基板などの被移動板体4を板体吸着具3の下端面の下
方にそれに接近させつつその板体吸着具の下端面と該板
体の表面とが平行状となるように配置したのち、板体吸
着移動器の筒体2内の圧縮空気導管1の先端部ノズルか
ら圧縮空気を該筒体上端方向へ噴出させると、空気エジ
ェクターの原理に従って該筒体内の下方部は減圧状態に
なると共に筒体下端面から何らの圧力損失もなく強力に
外気を吸引するので、その吸引気流に引寄せられて該被
移動板体は自動的に該板体吸着具の下端面に吸い着くよ
うになる。そして移動具5を作動させることによって該
被移動板体は所定箇所の上まで該板体吸着具に吸い着い
た状態で運ばれるが、そこで該圧縮空気導管の先端部ノ
ズルからの圧縮空気の噴出を止めることによって、該板
体は該板体吸着具の下端面から脱着してその所定箇所上
に載置され、所定の該板体の移動が完了するようにな
る。In such a plate sucking / moving device, a moving plate 4 such as a ceramic substrate is moved below the lower end surface of the plate sucking tool 3 and close to the lower end surface of the plate sucking tool and the plate. When the compressed air is jetted toward the upper end of the cylinder from the tip end nozzle of the compressed air conduit 1 in the cylinder 2 of the plate adsorption mover, the compressed air is ejected toward the upper end of the cylinder. According to the principle, the lower part of the cylinder is depressurized and the outside air is strongly sucked from the lower end surface of the cylinder without any pressure loss, so that the movable plate is automatically attracted by the suction airflow. It comes to adhere to the lower end surface of the plate suction device. Then, by operating the moving tool 5, the plate to be moved is carried to a predetermined position in a state in which it is attached to the plate adsorbing tool, where the compressed air is ejected from the nozzle at the tip of the compressed air conduit. By stopping the operation, the plate body is detached from the lower end surface of the plate body adsorption tool and placed on the predetermined position, and the predetermined movement of the plate body is completed.
【0006】この場合、該筒体内下方部で発生する減圧
状態は何らの排気管を介在させることなく該筒体の下端
部から外気を吸引するように働くので、圧縮空気導管の
先端部ノズルから噴出させる圧縮空気量を増やせばそれ
に直接的に相応してその外気吸引量を増やして大きなも
のにすることができ、従来の真空発生装置と板体に密着
すべき吸盤との間に排気導管を配する場合に較べると、
格段にその外気吸引量を大とすることができ、ために、
従来の板体吸着器具では吸着操作が困難であった、吸盤
の下端面と該被移動板体の表面との間に少し隙間が空い
ているとか、該被移動板体の表面に印刷樹脂の点在によ
る凹凸があるとか、また被移動板体の表裏間にその板体
の後処理用に必要な多数の細かい通孔があるといったよ
うに吸盤内の真空度乃至減圧度を充分に維持し難い場合
であっても、別段の支障もなく、該被移動板体が該板体
吸着具の下端面に自動的に且つ安定的に吸い着き得るよ
うになる。In this case, since the depressurized state generated in the lower part of the cylinder works to suck the outside air from the lower end of the cylinder without interposing any exhaust pipe, from the nozzle of the tip of the compressed air conduit. If the amount of compressed air to be jetted is increased, the amount of suction of the outside air can be increased correspondingly to increase the amount, and an exhaust conduit can be installed between the conventional vacuum generator and the suction cup that should be in close contact with the plate. Compared with the case of distributing,
In order to significantly increase the amount of outside air suctioned,
The suction operation was difficult with the conventional plate suction device, there is a little gap between the lower end surface of the suction cup and the surface of the moved plate, or the surface of the moved plate is covered with a printing resin. Sufficiently maintain the degree of vacuum or reduced pressure in the suction cup, such as unevenness due to scattering, and many fine through holes required for post-treatment of the plate body between the front and back of the plate to be moved. Even if it is difficult, the movable plate can be automatically and stably attached to the lower end surface of the plate suction tool without any trouble.
【0007】そして、この板体吸着移動器では前述のご
とく筒体下端部からの外気吸引量を従来の排気管に連結
された吸盤に較べると格段に大となし得て、板体吸着具
の下端面を被移動板体の表面に密接させなくても、(も
とより密接させてもよいが)、被移動板体をその板体吸
着具の下端面に吸い着かせることができるので、従来の
板体の吸着器具におけるようにその吸着操作に際して最
初に一旦、吸盤を押下げて被移動板体表面に密着させる
単位操作が不要となる作用効果が得られることになる。
また、構造が筒体に圧縮空気導管を組合せた程度の簡易
なものであり、従来の板体の吸着器具における吸盤と同
程度の嵩の低いコンパクトなものとなし得るので、種々
な既存の機器でその吸盤に代えて使用することも容易に
できる。更に、従来の板体の吸着器具では必須のもので
あった真空発生装置並びにそれに連結される排気導管を
省いて、一般的に工場などでは得られ易い圧縮空気を用
い且つ内部流体が圧縮状態にあるので比較的小径のもの
で済む圧縮空気導管だけが新たに必要となる板体吸着移
動器であることから設備並びにその運転費用も甚だ経済
的となる。[0007] In this plate suction transfer device, as described above, the amount of outside air sucked from the lower end of the cylindrical body can be markedly larger than that of the conventional suction cup connected to the exhaust pipe. Even if the lower end surface does not have to be in close contact with the surface of the movable plate body (although it may be intimately close to the original surface), the movable plate body can be attached to the lower end surface of the plate body adsorption tool. As in the case of the plate suction device, a unit operation for pushing down the suction cup to bring it into close contact with the surface of the plate to be moved is not necessary in the suction operation.
In addition, the structure is as simple as combining a compressed air conduit with a tubular body, and it can be made as compact as low in bulk as a suction cup in a conventional plate adsorption device, so various existing devices can be used. It can be easily used instead of the suction cup. Further, the vacuum generating device and the exhaust pipe connected to it, which were indispensable in the conventional plate adsorption device, are omitted, and compressed air that is generally easy to obtain in a factory is used and the internal fluid is compressed. Since it is a plate adsorbing mover that requires only a compressed air conduit that requires a relatively small diameter, the equipment and its operating cost are very economical.
【0008】なお、この板体吸着移動器の筒体下端部に
周設されるべき板体吸着具は、それに被移動板体が吸着
したときに、相互の密着性を高めてその吸着状態をより
安定化させるためにゴム、プラスチックなどの弾性体と
か柔軟体で構成されるのが好ましいのはいうまでもな
い。また、この板体吸着移動器の筒体は円筒体であるこ
とが好ましいが、それが少々変形した楕円筒体とか多角
筒体であっても機能に別段の支障は来さない。It should be noted that the plate suction device to be provided around the lower end of the cylindrical body of the plate suction mover enhances the mutual adhesiveness when the plate to be moved is sucked by the plate suction device, and the suction state is maintained. It is needless to say that it is preferable to be composed of an elastic body such as rubber or plastic or a flexible body for more stabilization. Further, it is preferable that the cylindrical body of this plate suction transfer device is a cylindrical body, but even if it is an elliptic cylinder or a polygonal cylinder that is slightly deformed, the function is not particularly affected.
【0009】請求項2の発明は、並列状に配置されるべ
き複数個の板体を同時進行状に吸着移動させたり、或い
は1個の板体吸着移動器ではとても吸着移動できない大
きな表面積を持つ板体を吸着移動させたりするための板
体吸着移動器の集合体であって、複数個の請求項1記載
の板体吸着移動器を、前後又は/及び左右に並列状に組
合せてなる板体吸着移動器の集合体である。この板体吸
着移動器集合体によれば適宜の相互間距離を置きつつ前
後とか左右に並列状に配置された多数の板体とか或いは
前後巾及び左右巾の大きな広い表面積を持つ板体でも、
板体表面部を前述同様にそれぞれの筒体下端部の板体吸
着具で吸着しつつ所定の距離間を移動させることができ
るようになる。According to a second aspect of the present invention, a plurality of plate bodies to be arranged in parallel are adsorbed and moved simultaneously, or a single plate adsorber has a large surface area that cannot be adsorbed and moved. It is an assembly of plate suction transfer devices for advancing and moving a plate transfer plate, wherein a plurality of plate suction transfer devices according to claim 1 are combined in parallel in the front-rear direction and / or the left-right direction. It is an assembly of body adsorption transfer devices. According to this plate adsorbing and moving device assembly, even a large number of plate members arranged in parallel in front and back or left and right while keeping an appropriate mutual distance, or even a plate member having a large front and rear width and a large lateral surface width,
As described above, it becomes possible to move the plate body surface portion by a predetermined distance while adsorbing the plate body suction tools at the lower end portions of the respective cylinder bodies.
【0010】[0010]
【実施例】図1および図2に示すごとく、外周部がその
中間部下方で段付き状に小径部とされ且つその小径部の
下方部外周面には雄螺子が刻設された円筒体2に対し
て、その小径部に嵌合する円孔が中央部の上下面間に開
設されると共に上層一側部に平面台形の突状片が付設さ
れたかたちの角柱体6を、その上面の該円孔周縁を前記
円筒体2の外周部の段付き部に当接させる態様に装着す
る。そして圧縮空気源に連結された鈎形状の圧縮空気導
管1を、該角柱体6の平面台形の突状片中央部の上下面
間に開設された導管用孔、該角柱体6の下面一部に刻設
された導管用溝、並びに該円筒体2の中間下方部周壁の
一部に開設された導管用開口を経由して該円筒体内へ挿
入しながら、その導管の先端部ノズルから該円筒体2の
中間部内部の長手方向軸線上で該円筒体上端方向へ各図
の矢印のごとく圧縮空気を噴出させ得る態様にしつつ、
該円筒体に配設する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIGS. 1 and 2, a cylindrical body 2 having an outer peripheral portion with a stepped small-diameter portion below its middle portion and an external thread engraved on the outer peripheral surface of the lower portion of the small-diameter portion. On the other hand, a circular hole 6 that fits into the small diameter portion is formed between the upper and lower surfaces of the central portion and a flat trapezoidal protruding piece is attached to one side of the upper layer, and The peripheral edge of the circular hole is attached to the stepped portion of the outer peripheral portion of the cylindrical body 2. Then, the hook-shaped compressed air conduit 1 connected to the compressed air source is provided with a conduit hole formed between the upper and lower surfaces of the central portion of the flat trapezoidal projecting piece of the prismatic body 6, and a part of the lower surface of the prismatic body 6. While being inserted into the cylindrical body through the conduit groove formed in the tube and the conduit opening formed in a part of the intermediate lower peripheral wall of the cylindrical body 2, the cylinder is inserted from the tip nozzle of the conduit. While making it possible to eject compressed air in the direction of the upper end of the cylinder on the longitudinal axis inside the intermediate portion of the body 2 as shown by the arrow in each figure,
It is arranged on the cylindrical body.
【0011】そして円筒体2の前記小径部の下方部外周
面の雄螺子に螺合する雌螺子が内周面に刻設された短管
7の外周面に、下端面が下記するごとくその下方に配置
されるべき被移動板体4の表面と平行面に形成された軟
質弾性体であるフォームラバー製の厚肉環体8が、その
下端面が該短管7の下面よりも少し下方に位置するよう
にしつつ密着状に嵌着されてなる板体吸着具3を、該角
柱体6の下面側に移動具5の一部であるアングル材9
の、該円筒体2の挿通孔を有する平板部を介在させ、ま
た必要に応じて同様に該円筒体の挿通孔を有するパッキ
ングなり座金を更に介在させたうえで、該雄螺子と該雌
螺子とを螺合させながら該円筒体2の下端から、その円
筒体下端面が該短管7の下面よりも下方に位置すること
がないように、螺入して締付けることによって、該円筒
体2を移動具5の一部である該アングル材9の平板部に
固定するようにすると共に、前記した圧縮空気導管1
の、該角柱体6の下面一部の導管用溝部を通過する部分
をそのアングル材の平板部で押上げてその部分の圧縮空
気導管をしてその導管用溝の上縁部に当接させつつ固定
し、本発明に係る板体吸着移動器としたものである。Then, a female screw thread to be engaged with a male screw thread on the outer peripheral surface of the lower portion of the small diameter portion of the cylindrical body 2 is formed on the outer peripheral surface of the short tube 7 engraved on the inner peripheral surface thereof. A thick ring 8 made of foam rubber, which is a soft elastic body, is formed in a plane parallel to the surface of the movable plate body 4 to be arranged in the lower end surface of the thick ring body 8 slightly lower than the lower surface of the short tube 7. The plate suction device 3 which is closely fitted while being positioned is provided with the angle member 9 which is a part of the moving device 5 on the lower surface side of the prism body 6.
Of the male screw and the female screw after further interposing a flat plate portion having the insertion hole of the cylindrical body 2 and, if necessary, further interposing a packing washer having the insertion hole of the cylindrical body. While being screwed with each other, the cylindrical body 2 is screwed and tightened so that the lower end surface of the cylindrical body is not positioned below the lower surface of the short tube 7 from the lower end of the cylindrical body 2. Is fixed to the flat plate portion of the angle member 9 which is a part of the moving tool 5, and the compressed air conduit 1 described above is provided.
Of the lower surface of the prismatic body 6 is pushed up by the flat plate portion of the angle member so that the compressed air conduit of the portion is brought into contact with the upper edge portion of the conduit groove. While being fixed, the plate suction transfer device according to the present invention is provided.
【0012】この板体吸着移動器は前述のごとく、その
円筒体2の下端部にある板体吸着具3の下方のそれに接
近した該板体吸着具の下端面との平行面上位置へ、図面
に鎖線で示すようにセラミック基板などの被移動板体4
を適宜の板体配置具10上に載せて運んだのち、圧縮空
気導管1の先端部ノズルから圧縮空気を噴出させること
によって、その被移動板体4が自動的に該板体吸着具の
下端面に吸い着き、ついでその吸い着いた状態の儘で該
移動具5の作動によって適宜箇所上まで運ばれたのち、
その圧縮空気の噴出操作の停止によって該板体吸着具の
下端面から脱着しつつその箇所上へ載置されるようにな
る。As described above, this plate suction device is located below the plate suction device 3 at the lower end of the cylindrical body 2 and on a plane parallel to the lower end face of the plate suction device, which is close to it. As shown by a chain line in the drawing, a movable plate member 4 such as a ceramic substrate.
After being carried on an appropriate plate body arranging tool 10, compressed air is ejected from the tip end nozzle of the compressed air conduit 1, so that the movable plate body 4 automatically moves under the plate body adsorbing tool. After adhering to the end face, and then being carried to the appropriate place by the operation of the moving tool 5 with the suctioned state,
When the jetting operation of the compressed air is stopped, the plate adsorbing tool is detached from the lower end surface and placed on the place.
【0013】[0013]
【発明の効果】前述したごとく本発明の板体吸着移動器
又はその集合体は、その操作に際して板体を敢えてその
板体吸着具の下端面に密着乃至接触させるようにしなく
ても、また従来の板体吸着移動器具では吸着困難であっ
た表裏面間に多数の通孔のある板体などに対してでも、
所定の板体の吸着移動操作を充分遂行できるので吸着移
動操作の簡略化並びに吸着機能の増進に効果があり、ま
た従来の板体吸着移動機具に必要であった真空発生装置
及び排気導管の設置を省略できるので設備費及び運転費
の節減にも効果があると共に、更に構造が甚だ簡易であ
ると共にコンパクトで嵩の低いものに構成できるので、
製造並びに保守が容易なうえに場所を余り選ぶことなく
使用できて用途の拡大にも貢献することになる。As described above, the plate suction moving device or the assembly thereof according to the present invention does not need to intentionally bring the plate into close contact or contact with the lower end surface of the plate sucking tool during its operation. Even for plates that have a large number of through holes between the front and back, which was difficult to pick up with the plate suction transfer device of
Since it is possible to sufficiently perform the suction movement operation of a predetermined plate body, it is effective in simplifying the suction movement operation and enhancing the suction function, and the installation of the vacuum generator and the exhaust conduit required for the conventional plate suction movement equipment. Since it can be omitted, it is effective in saving equipment cost and operating cost, and further, the structure is extremely simple, compact and low in bulk,
It is easy to manufacture and maintain, and can be used without choosing the place so much, which will contribute to the expansion of applications.
【図1】本発明の板体吸着移動器の一実施例の斜視図FIG. 1 is a perspective view of an embodiment of a plate suction transfer device of the present invention.
【図2】第1図実施例の要部中央縦断側面図FIG. 2 is a vertical sectional side view of the central portion of the embodiment of FIG.
1 圧縮空気導管 2 筒体 3 板体吸着具 4 被移動板体 5 移動具 1 Compressed Air Conduit 2 Cylindrical Body 3 Plate Adsorbing Tool 4 Moved Plate 5 Moving Tool
Claims (2)
ルから圧縮空気をして筒体(2)の中間部の内部の、該
筒体長手方向の略軸線上で該筒体上端方向へ噴出させ得
る態様に該筒体に配設すると共に、下端面がその下方に
配置されるべき被移動板体(4)の表面と平行面に形成
された板体吸着具(3)を、その下端面が該筒体の下端
開口面と同位置若しくはそれよりも下方位置に位置する
態様に且つその板体吸着具が該筒体の下端部開口面積を
実質的に狭めない態様に、該筒体の周壁に密接状にその
下方部に周設しつつ、該筒体を移動具(5)に固定した
ことを特徴とする板体吸着移動器1. A compressed air conduit (1) is provided with compressed air from its tip nozzle, inside the middle portion of the cylindrical body (2), on the approximate axis of the longitudinal direction of the cylindrical body, in the upper end direction of the cylindrical body. A plate suction device (3) having a lower end surface arranged parallel to the surface of the movable plate body (4) to be disposed below the cylindrical body in a manner in which the plate suction device (3) can be ejected to In a mode in which the lower end surface is located at the same position as or lower than the lower end opening surface of the tubular body and in a mode in which the plate suction tool does not substantially narrow the opening area of the lower end portion of the tubular body, A plate body suction moving device characterized in that the cylinder body is fixed to a moving tool (5) while closely surrounding the lower wall of the peripheral wall of the cylinder body.
を、前後又は/及び左右に並列状に組合せてなる板体吸
着移動器の集合体2. An assembly of plate adsorbing and moving devices comprising a plurality of the plate adsorbing and moving devices according to claim 1 combined in parallel in front and back or / and right and left.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18761695A JPH092682A (en) | 1995-06-19 | 1995-06-19 | Plate material sucker mover |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18761695A JPH092682A (en) | 1995-06-19 | 1995-06-19 | Plate material sucker mover |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH092682A true JPH092682A (en) | 1997-01-07 |
Family
ID=16209232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18761695A Pending JPH092682A (en) | 1995-06-19 | 1995-06-19 | Plate material sucker mover |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH092682A (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2924373A1 (en) * | 2007-12-04 | 2009-06-05 | Sidel Participations | VACUUM TOOLS (S) FOR HANDLING ROBOT |
CN101637910A (en) * | 2008-07-30 | 2010-02-03 | J.施迈茨有限公司 | Area vacuum gripper driven by compressed air |
EP2222587A1 (en) * | 2007-12-19 | 2010-09-01 | Autolabel AB | A device for a tool and the proceeding for manufacture the same |
EP2562104A1 (en) * | 2011-08-20 | 2013-02-27 | Festo AG & Co. KG | Negative pressure holding device |
JP2013166640A (en) * | 2012-02-16 | 2013-08-29 | Seki Kogyo Kk | Vacuum suction head and article supply device having the vacuum suction head |
JP2013248721A (en) * | 2012-06-04 | 2013-12-12 | Nichimo Co Ltd | Conveying device |
KR101368087B1 (en) * | 2011-07-29 | 2014-02-26 | 다이닛뽕스크린 세이조오 가부시키가이샤 | Substrate processing apparatus, substrate holding apparatus, and substrate holding method |
WO2017212889A1 (en) * | 2016-06-08 | 2017-12-14 | 株式会社ハーモテック | Rotational flow-forming body and sucking device |
EP3784609A4 (en) * | 2018-04-22 | 2022-03-02 | Zenrobotics OY | Waste sorting gantry robot |
US11660762B2 (en) | 2018-05-11 | 2023-05-30 | Mp Zenrobotics Oy | Waste sorting robot |
US12064792B2 (en) | 2020-10-28 | 2024-08-20 | Mp Zenrobotics Oy | Waste sorting robot with gripper that releases waste object at a throw position |
US12122046B2 (en) | 2020-06-24 | 2024-10-22 | Mp Zenrobotics Oy | Waste sorting robot |
-
1995
- 1995-06-19 JP JP18761695A patent/JPH092682A/en active Pending
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2924373A1 (en) * | 2007-12-04 | 2009-06-05 | Sidel Participations | VACUUM TOOLS (S) FOR HANDLING ROBOT |
EP2222587A1 (en) * | 2007-12-19 | 2010-09-01 | Autolabel AB | A device for a tool and the proceeding for manufacture the same |
EP2222587A4 (en) * | 2007-12-19 | 2011-08-10 | Autolabel Ab | A device for a tool and the proceeding for manufacture the same |
CN101637910A (en) * | 2008-07-30 | 2010-02-03 | J.施迈茨有限公司 | Area vacuum gripper driven by compressed air |
EP2149517A3 (en) * | 2008-07-30 | 2010-09-15 | J. Schmalz GmbH | Area vacuum gripper operated with pressurised air |
US8267386B2 (en) | 2008-07-30 | 2012-09-18 | J. Schmalz Gmbh | Pneumatically actuated area vacuum gripper |
US8832924B2 (en) | 2011-07-29 | 2014-09-16 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus, substrate holding apparatus, and method of holding substrate |
KR101368087B1 (en) * | 2011-07-29 | 2014-02-26 | 다이닛뽕스크린 세이조오 가부시키가이샤 | Substrate processing apparatus, substrate holding apparatus, and substrate holding method |
EP2562104A1 (en) * | 2011-08-20 | 2013-02-27 | Festo AG & Co. KG | Negative pressure holding device |
JP2013166640A (en) * | 2012-02-16 | 2013-08-29 | Seki Kogyo Kk | Vacuum suction head and article supply device having the vacuum suction head |
JP2013248721A (en) * | 2012-06-04 | 2013-12-12 | Nichimo Co Ltd | Conveying device |
WO2017212889A1 (en) * | 2016-06-08 | 2017-12-14 | 株式会社ハーモテック | Rotational flow-forming body and sucking device |
EP3784609A4 (en) * | 2018-04-22 | 2022-03-02 | Zenrobotics OY | Waste sorting gantry robot |
US11851292B2 (en) | 2018-04-22 | 2023-12-26 | Mp Zenrobotics Oy | Waste sorting gantry robot |
US11660762B2 (en) | 2018-05-11 | 2023-05-30 | Mp Zenrobotics Oy | Waste sorting robot |
US12122046B2 (en) | 2020-06-24 | 2024-10-22 | Mp Zenrobotics Oy | Waste sorting robot |
US12064792B2 (en) | 2020-10-28 | 2024-08-20 | Mp Zenrobotics Oy | Waste sorting robot with gripper that releases waste object at a throw position |
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