TW524856B - Casting slab of shadow mask for braun tube, its heat treatment method and materials of shadow mask for braun tube - Google Patents
Casting slab of shadow mask for braun tube, its heat treatment method and materials of shadow mask for braun tube Download PDFInfo
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Mm —修止 五、發明說明(1) 本發明係有關蝕刻時之條紋斑點 Ni-Fe糸合金之顯像管遮蔽屏用鑄造制效果優越的 顯像管遮蔽屏用㈣,尤指較適片,其熱處理方法及 腦顯示器用顯像管之遮蔽屏的Ni_Fef\色電視顯像管或電 屏用鑄造β、其熱處理方法及遮蔽屏用= 之顯像管遮蔽 習知技術 為人所知被使用作大型彩色電 器用的高精細顯像管之遮 颂像官或電腦顯示 Ν卜Fe合金(尤指Fe —36%Ni合金),"的般鋼(Invar)合金之 時有於被稱作「條紋斑點」之方;將此合金钱刻穿孔 現條紋狀花紋的缺點。此種條紋斑點方向上會出 主要供蝕刻的材料板中存 X生原因係被指於 料連續鑄造或一 &鈐p R±在 及Fe的成分偏析。在將材 後的熱乳力丄i=之r偏析即使經過經予組合其 存於最终的穿。u火等步驟,此成分偏析亦殘 圈之:軋2=伸:::之:;係在下-步驟成為於線 方向上明顯形成平狀:L:::刻製品板時於輥軋 向來’為抑制此種I虫 干技術係被提出著,:列時ί條紋斑點的發生而採的若 公平7-7827 0號)公報,斜4專利第2 1 30577號(日本特 揭示有施以-定的溫产、3制凝固組織之連續鑄造片, 點發生之方法。 …守間以上之熱處理,抑制條紋斑 89110318-1625TW-1625TYNYJP.ptc 第6頁 524856Mm — Revised 5. Description of the invention (1) The present invention relates to a stripe-spotted Ni-Fe 糸 alloy picture tube shielding screen used for etching. The picture tube shielding screen is superior in casting effect, especially a suitable film, and its heat treatment method Ni_Fef \ color TV picture tube or screen for cast screen for brain display. Casting β, its heat treatment method and screen use = screen tube masking. Known technology is known as a high-definition picture tube for large color appliances. The burial image or computer display shows that NbFe alloys (especially Fe—36% Ni alloys), " Invar alloys are sometimes called "striped spots"; this alloy money Disadvantages of engraved perforation showing a striped pattern. In the direction of such streaks, there will be X-causes in the material plate mainly used for etching, which is referred to as continuous casting of the material or a segregation of Fe and Fe. After segregation, the thermal elongation 丄 i = of r segregation will be stored in the final wear even after pre-combination. u Fire and other steps, the segregation of this component is also a residual circle: rolling 2 = stretching :::::; in the next step-the step becomes a flat shape in the line direction: L ::: Rolling has always been when carving the product plate ' In order to suppress this kind of insect pests, the Department of Technology has proposed the following: Gazetted No. 7-7827 0 adopted for the occurrence of streaked spots at the time of publication, Bulletin 4 Patent No. 2 1 30577 (Japanese Patent No. Warm production, continuous casting of 3 solidification structure, spot generation method.… Heat treatment above the interval to suppress streaks 89110318-1625TW-1625TYNYJP.ptc page 6 524856
案號 89110318 五、發明說明(2) 又’於日本專利第2000 0 62號(日本特公平7_u〇34 $ ^ ^正揭示有同樣的對連續鑄造片施以高溫長時間退^火 再者’於曰本專利第195〇743號(曰本特公平6 — 68128 儿)、A報内正揭示有無連續鑄造、普通鑄錠之區別下, 由以滿足一定的溫度及時間之關係的條件以 1曰士 間熱處理鑄造片以抑制條紋斑點發生之方法。。 ^ 在π Ϊ等^習知技術之基本原理係利用熱擴散方式以將存 在於由回溫長時間熱處理引起的鑄造片内部之N丨、◦、 =成Ϊc r等成分偏析予以均f化並防止㈣斑點為重點 ^日本專利第2 1 30577號公報雖曾提及凝固組織,伸 二思義所在係在於凝固組織之結晶定向對製品板—曰 =的影響,肖防止歸因於其結晶定向之钕 。、”曰 發明欲解決的課題 、 咬電==ΐ 技術方面’至於#時的彩色電視影像管 :“不益用顯像管之遮蔽屏肖,以製造足夠的特 板:退火雖係可能的 '然而近年來尤 ΓίΓ遺2型化、高度精細化進展、掩膜兹刻條 Μ永= 在以習用技術可達成的程度之降低偏析水準, 二:低Γ掩膜蝕刻時發生的條紋斑點乃變成不足,則更加 牛低偏析現象乃為人所期待的。 、 明係藉由發現應因應此種要求之 慮的每造組織及凝固時之成分偏析之關係、及配Case No. 89110318 V. Description of the invention (2) It is also disclosed in Japanese Patent No. 2000 0 62 (Japanese Patent Fair 7_u〇34 $ ^ ^ is revealing the same high temperature long-term retreat for continuous casting pieces ^ fire again) In the Japanese Patent No. 195〇743 (Japanese Bent Fair 6-68128), the A newspaper is revealing whether there is a difference between continuous casting and ordinary ingots, in order to meet the conditions of a certain temperature and time relationship. A method of heat-treating a cast piece to suppress the occurrence of streaks. ^ The basic principle of the conventional technique is to use thermal diffusion to remove N existing inside the cast piece caused by a long-term heat treatment after reheating. Segregation of components such as, Ϊ, Cr, etc. is to be homogenized and to prevent the occurrence of 日本 spots. ^ Japanese Patent No. 2 1 30577 has mentioned solidification structure, but the meaning lies in the crystal orientation of the solidified structure on the product board. —The effect of ==, Xiao prevents the neodymium attributed to its crystal orientation., “The problem to be solved by the invention, the bite == ΐ Technical aspects.” As for the color TV image tube: "It is not beneficial to use the shadow tube for shielding Screen shaw Create enough special plates: Although annealing is possible, in recent years, the type has been reduced to 2 types, highly refined, and the mask is engraved. M = = to reduce the level of segregation to the extent that can be achieved with conventional techniques, two: The streaks that occur during the etching of the low Γ mask become insufficient, and it is expected that the phenomenon of low segregation will be even worse. 明 Ming is by discovering the structure of each structure and component segregation during solidification that should be considered in response to such requirements. Relationship, and match
第7頁 纖漏 89110318-1625TW.1625TYNYIP.ptc 524856Page 7 Fiber Leak 89110318-1625TW.1625TYNYIP.ptc 524856
--累號汕]1(1:训 五、發明說明(3) 降達成的高度降 解決課題而接的手段 申請專利範圍第1項之條紋斑點品級優越的遮蔽屏 鑄造片,係供製造由含有30〜45%之以賴—心::: 遮献屏而用的鑄造片,該鑄造片係以由鑄造組織之99%以 上為柱狀晶及/或激冷細晶体而成者為特徵。 申請專利範圍第2項之鑄造片,係以前述鑄 含等軸晶者為特徵。 何w 為不 、,申請專利範圍第3項之鑄造片,係以不進行電磁攪 拌、且以保持鑄造片内未凝固部之金屬熔液溫度在液相線 以上,同時採用操作的連續鑄造法而得者。 申請專利範圍第4項之遮蔽屏用鑄造片之熱處理方 法,係以採用前述的鑄造片,在κ值設為15Q㈣以上的溫 度及時間進行熱處理為特徵。 士申請專利範圍第5項之遮蔽屏用材料,係以採用前述 的鑄造片’經過具有熱軋、冷軋、退火之步驟 4主嫩。 V钓 發明之實施形態 被使用作遮蔽屏原材料之N i -Fe合金之「條紋斑點」 缺陷,係可予理解成以鑄造片中存在的以之成分偏析為主 要因’ 3有此N 1成分偏析之鑄造片的組織以由柱狀晶及#-Tired number Shan] 1 (1: training five, description of the invention (3) the method to solve the problem of reducing the height to achieve the problem to apply for the first scope of the patent scope of the stripe speck of the superior level of the shielding screen casting sheet, for manufacturing Made from 30% to 45% of cores ::: Casting sheet used to cover the screen, the casting sheet is made of more than 99% of the cast structure is columnar crystals and / or chilled fine crystals Features. The casting slabs in the scope of patent application No. 2 are characterized by the aforementioned casting with equiaxed crystals. Why not, the casting slabs in the scope of patent application No. 3 are not electromagnetically stirred and maintained. The temperature of the molten metal in the unsolidified part of the casting sheet is above the liquidus temperature, and the continuous casting method is used. The heat treatment method of the casting sheet for shielding screen in the scope of patent application No. 4 is based on the aforementioned casting. It is characterized by heat treatment at a temperature and time set to a κ value of 15Q㈣ or more. The material for the shielding screen in the scope of patent application No. 5 is based on the steps of hot rolling, cold rolling, and annealing using the aforementioned casting sheet. 4 main tender. Implementation of the V fishing invention Defects in the "striped spots" of Ni-Fe alloys used as shielding material for the screen can be understood as the main reason for the segregation of the components present in the casting sheet. Structured by columnar crystals and #
524856 __ 案號 五、發明說明(4)524856 __ Case number V. Description of the invention (4)
激冷細晶体而成為佳。若採用以鑄造片之組織的形態屬非 為柱狀晶及/或激冷細晶体之鑄造片為起始原料時,則其 後即使組合熱軋加工、冷軋加工、退火鑄造片等的步驟、 時,鑄造片時的N i之成分偏析亦不消除,即使加工成作$ 最終的遮蔽屏原材料之薄板亦會出現「條紋斑點」缺陷: 作為本發明之對象的材料、係由含Ni 30〜45%之NI-Fe 合金而成的遮蔽屏用原材料。大多使用被稱作殷鋼合金的 主要由36%Ni、餘量實質上由Fe而成的材料,且於本發明 之組成内,其他視必要時,例如雖可含有至約數%為止的 Nb、Co、Cr等添加成分,惟對本發明之功效並無影響,本 發明係含有此等者。 將本發明之遮蔽屏用鑄造片限定成由其鑄造組織之 9 9%以上,宜為1〇〇%柱狀晶及/或激冷細晶体而成的連續禱 造片者係採用以下的理由。亦即,於鑄造片之凝固過程, 由於下一步驟的熱擴散,在降低成分偏析的情形成為最具 支配的要因係偏析的成分變動之間隔。此間隔愈短則降低 偏析所需的加熱溫度愈低,又以加熱時間短即可濟事的一 般見解為準、著眼於鑄造片之成分偏析與凝固組織間之關 係,進行詳細的調查。 其結果,於具有與於連續鑄造中生成的柱狀晶組織或 柱狀aa組織類似的凝固形態之激冷細晶体結晶組織,發現 與其他凝固組織相較,成分偏析之間隔有格外變短的事 實。又於此等凝固組織之成分偏析之間隔亦發現與其初生 (一次)樹枝狀晶体臂間隔有相依性的事實。歸因於再生Fine crystals are best chilled. If the casting material whose casting structure is non-columnar crystal and / or chilled fine crystal is used as the starting material, the subsequent steps, such as the combination of hot rolling processing, cold rolling processing, and annealed casting chips, are used as starting materials. At the same time, the segregation of Ni components during casting is not eliminated, and even if processed into the final sheet of the shielding material, the "striped spots" defect will appear: The material used as the object of the present invention is Ni 30 Raw materials for shielding screens made of ~ 45% NI-Fe alloy. Many materials called 36% Ni, which are mainly made of Fe, and the remainder of which are essentially Fe, are used as the so-called steel alloys. In the composition of the present invention, if necessary, other materials such as Nb, Co, Cr and other added ingredients have no effect on the efficacy of the present invention, and the present invention contains these. The continuous praying makers who limited the casting sheet for shielding screens of the present invention to more than 99%, preferably 100% columnar crystals and / or chilled fine crystals, of the casting structure adopted the following reasons . That is, during the solidification process of the cast piece, due to the thermal diffusion of the next step, in the case of reducing the component segregation, it becomes the interval of the most dominant factor-based component segregation. The shorter the interval, the lower the heating temperature required to reduce segregation, and based on the general knowledge that a short heating time can be used, focusing on the relationship between component segregation and solidified structure of the cast piece, a detailed investigation is conducted. As a result, in the chilled fine crystal crystalline structure having a solidified morphology similar to that of the columnar crystal structure or the columnar aa structure produced in continuous casting, it was found that the interval between the segregation of the components was extremely shorter than that of other solidified structures. fact. It is also found that there is a dependency on the interval between the component segregation of these solidified tissues and the spacing of their primary (primary) dendritic crystal arms. Attributed to regeneration
89110318-1625TW-1625TYNYJP.ptc 第9頁 五、發明說明(5) ( 人)及二次樹枝狀晶体臂之忐八伯k L 土 處理會消失,故在本發明並未㈡:在此較短時間之熱 組織二激本二明曰,本遮,用碡造“岭 ^ ^.. ,a, V;;^ ^ ^ ^100, I, ^ 急冷凝固•,故幾乎=η制於與凝固時之模具接近的 積僅占全体之《Λ 在通f的連料W,其体 宜,晶体以外的部分設成柱狀晶組織為 m的操作上之控制予以達成。 析或通造設備之操作上為避免成分偏 拌、同時進行鎢、生丁^撥掉(EMS)並進行金屬炫液之攪 為得本發Sic*晶組織,並不合適。因此, 或ϊίΕ; λ金屬溶液之流動的操作即成必要的。 法:係有效的λ電磁制動等㈣金屬炫液之流動的方 造片内未凝因一為即使無金屬熔液之流動情形時、鑄 屬、这、r φ合I ° ^金屬熔液之溫度在液相線以下時,因金 之柱ί晶i1起等轴晶,核發生、成長’故未能獲得目的 態圖之=相、因此,操作係以保持金屬熔液之溫度在狀 ί 25 °C以上准以上、具体而言離開液相線之偏離度(A7) f 上進仃為宜。Αΐ之上限係在各個連續鎮造機之 操作條件的範圍不同,故在本發明並無特目/規^之^ 要之。 524856 案號 8911031ft 年 月 修正 五、發明說明(6) 且、’在本發明雖不特別規定鑄造片之加熱溫度之上 限,惟以材料溶點之負i 〇度(—i 〇 〇c )為宜。 下式 擴散距離 K/ U m (D · t)0.5 X 106 (1) ^ Do · exp(-Q/RT)89110318-1625TW-1625TYNYJP.ptc Page 9 V. Description of the invention (5) (person) and the secondary dendrite crystal arm of the eight-bar kL soil treatment will disappear, so it is not in the present invention: shorter here The thermal organization of time is the second shock of Ben Erming, Ben Zhe, and "Zhang ^ ^ .., a, V;" ^ ^ ^ 100, I, ^ is rapidly condensed and solidified, so almost = η is controlled by and solidified. The close product of the mold at that time only accounts for the whole of Λ in the continuous feed W of f, which is appropriate, and the operation control of the part other than the crystal to set the columnar crystal structure to m can be achieved. In order to avoid partial mixing of the components, it is not appropriate to simultaneously perform tungsten and sintering (EMS) and stir the metal dazzling liquid to obtain the Sic * crystal structure of the present invention. Therefore, ϊίΕ; λ metal solution flow The operation is necessary. Method: effective lambda electromagnetic brake and other metal splatter flow. The non-condensing factor in the film is that even if there is no metal melt flow, the casting, this, and r φ are combined. When the temperature of the molten metal is below the liquidus, I ’m unable to obtain the target because of the equiaxed crystal from the pillar of gold i1, the nucleation occurs and grows. State diagram = phase. Therefore, it is advisable to keep the temperature of the molten metal above 25 ° C or above, specifically, the deviation from the liquidus (A7) f. It is advisable. The upper limit of Αΐ The range of operating conditions is different in each continuous town machine, so there is no special feature / regulation in the present invention. 524856 Case No. 8911031ft Rev. V. Description of the Invention (6) The upper limit of the heating temperature of the casting sheet is not specified, but the negative i 0 ° (-i 〇〇c) of the melting point of the material is suitable. The diffusion distance K / U m (D · t) 0.5 X 106 (1) ^ Doexp (-Q / RT)
Do 1.63 x 1 0"4 /m2 · S_1 Q = 2· 7 9 x 1 05 /J · mol-1 R = 8· 31/J · mol-1 · K-1 (式内 D:擴散係數【m2/S】 D。:由實驗所求得的N i擴散之數項 【m2/S】 Q :由實驗所求得的N i擴散之活性化 能【J / m ο 1】 退火溫度【K】 退火時間【S】 一 y 氣體常數【J/mol · K】 %、佳表:Ϊ :式’係鑄造片中生成的成分偏析,藉由其 二距H〔Γ μ,熱處理’表示出可於鑄造片中擴散的擴 散距離之公知關係式。 、 ^ 於此式(1)内,將N i之擴散活性能 之4彳、入’並將代表的鑄造片熱處理時間(浸潰時間)及熱 處理溫度(浸潰溫度)代入並計算而求得的K值,示於下表1 内0Do 1.63 x 1 0 " 4 / m2 · S_1 Q = 2 · 7 9 x 1 05 / J · mol-1 R = 8 · 31 / J · mol-1 · K-1 (D in the formula: diffusion coefficient [m2 / S] D .: Several terms of Ni diffusion obtained from experiments [m2 / S] Q: Activation energy of Ni diffusion obtained from experiments [J / m ο 1] Annealing temperature [K] Annealing time [S]-y gas constant [J / mol · K]%, good table: Ϊ: formula 'system segregation generated in the casting piece, by its two-distance H [Γ μ, heat treatment' shows that it can be used in The well-known relational expression of the diffusion distance of the diffusion in the casting piece. ^ In this formula (1), the temperature of the diffusion active energy of N i is set to 4, and the heat treatment time (immersion time) and heat treatment of the representative casting piece are performed. The K value obtained by substituting and calculating the temperature (immersion temperature) is shown in Table 1 below. 0
89110318-1625TW-1625TYNYJP.ptc 第11頁 52485689110318-1625TW-1625TYNYJP.ptc Page 11 524856
表1 取代浸漬條件時之κ値 溫度 熱處理時間 36小時 48小時 60小時 72小時 1280〇C 93 108 121 132 1300°C 107 124 138 152 1320〇C 123 142 158 173 1340〇C 140 161 180 198 第6圖為表tf出表1所示的κ值與條紋斑點等級(rank)Table 1 κ 値 temperature when substituting the immersion conditions. Heat treatment time 36 hours 48 hours 60 hours 72 hours 1280 ° C 93 108 121 132 1300 ° C 107 124 138 152 1320 ° C 123 142 158 173 1340 ° C 140 161 180 198 6 The figure shows the t value of κ and the rank of the streaks (rank) shown in Table 1.
間之關係。由第7圖可知,為設成條紋斑點等級c以上,以 在使K值設為1 5 0 // m以上的條件進行熱處理為宜,再者欲 作成等級B以上時在使κ值成為丨7 〇 v m以上的條件進行熱處 理為宜。在此,條紋斑點等級係指實際上由遮蔽屏之蝕刻 廠商製作遮蔽屏時,對條紋斑點之程度以實用上不生成問 題的程度予以決定等級者。 等級A係表示條紋斑點完全未被觀察出的情形,E為表 示出條紋斑點被非常明顯的觀察出的情形,利用條紋斑點 之強度將其區間分成5階段,至於條紋斑點之程度,由習 用材料之經驗或實績可知以在等級C以上為宜。因此,本Relationship. It can be seen from FIG. 7 that, in order to set the level of the streaks and spots to c or higher, it is appropriate to perform heat treatment under the condition that the K value is 1 5 0 // m or more, and to make the κ value 丨 when the level B or higher is desired. The heat treatment is preferably performed at a condition of 70 vm or more. Here, the streak level refers to a person who actually determines the level of the streaks to such an extent that a problem does not cause a problem when the mask is actually produced by the masking screen etching manufacturer. Grade A indicates that the streaks are not observed at all, and E indicates that the streaks are observed very clearly. The intensity of the streaks is used to divide the interval into 5 stages. As for the extent of the streaks, the conventional materials are used. From experience or actual results, it is clear that it is better to be above level C. So this
W4856 五、發明說明』-L 修,卜— 第5圖係表示矯造η μ · 間之關係圖。第5圖所示的“標^ =與條紋斑點等級 步驟以製造遮蔽屏材料:=品板厚度為正模擬製程 刻面上的條紋斑點等έ( 乂凋查该時際出現於蝕 若由第5圖,Λ 斑點之強度)者。W4856 V. Description of the invention-L Xiu, Bu-Figure 5 is a diagram showing the relationship between the fabricated η μ ·. The "marked ^ = and streak speck step steps to make the masking screen material shown in Fig. 5: = the plate thickness is positive, and the streak specks on the facet of the manufacturing process are simulated. Figure 5, Λ spot intensity).
紋斑點等級愈低(品質舜以=^偏析&準偏差愈大時條 溫長時間進行熱處理、/可_、:::即由第4圖,在高 可知惟將鑄造片M i偏析尸準低=1析會降低的傾向, 值設成15G _以上時為^準差③成G.G7niass%以下時,K 浸潰ί4划亦係表對干鑄出造在片Λ橫軸之κ值表示的條件進行鑄造片 間隔最長且擴散 ^貝後的鑄造片中心、附近之Ni偏析的 究竟成為何種程的部分之鑄造州偏析標準偏差 鑄造片中心偏“2; ’所謂鑄造片中心附近,係指由 進行。 旱度方向約之位置,採樣則在此位置 的鑄二〜3 !:示的圖係使可將上《值設成15。㈣上 使依χ—γ—z盥浸、、眚仪从T规"、f如弟1至3圖所不,若 擴散的情形。Y即條Λ移Λ進/時^顯示出N1之進行 散時,則在超過第丨m右精由”'、处理每造片並欲谋求^^1之擴 間及溫度之條件予^之境界線的領域◦處,以熱處理時 領域P以孰處理時二處理為宜。在超過第2圖之W界線的 求Nk擴散。再者及溫度之條件處理時,則可進-步謀 處理時間及溫Π 1在超過第3圖之z境界線的領域9以熱 ------二又(牛處理時,則可較謀求N i之擴散 II IWi W Sli tl ί ΓΠΐ!ΙΏ?ΓίίΚίιΐίji.uj « — — 第13頁 89110318-1625TW-1625TYNYJP.plc 524856The lower the level of the streaks (the higher the quality, the greater the ^ segregation & the quasi deviation, the longer the bar temperature will be heat treated for a long time. / 可 _, ::: From Figure 4, it is known that the cast film Mi will be segregated. The quasi-low = 1 analysis will reduce the tendency, when the value is set to 15G _ or more ^ quasi-difference ③ to G. G7niass% or less, K immersion 4 strokes are also dry-cast on the Λ horizontal axis of the film κ The conditions indicated by the values are the longest interval between the slabs and the spread of the center of the slab after the diffusion. What is the part of the nearby Ni segregation? The standard deviation of the state segregation of the slab. "2; , Refers to the position where the direction of drought is about, and the sampling is at this position. The picture shown in the figure is to set the value of the above to 15. ㈣ 上 使 使 χ-γ-z ,, Pu Yi from the T gauge ", f as shown in Figures 1 to 3, if the situation of diffusion. Y is the bar Λ shift Λ advance / hour ^ shows N1 when the divergence, it is more than the right Refined by "', the area where each piece is processed and the boundary of ^^ 1 and temperature conditions are sought to be ^, the area P is treated with heat treatment, and the area is treated with 孰It is appropriate. When the Nk diffusion is exceeded beyond the W boundary in FIG. 2 and the temperature conditions are processed, the processing time and temperature can be further advanced in the area exceeding the z boundary in FIG. 9 9 To heat ------ two and (when the cattle are processed, you can better seek the diffusion of N i II IWi W Sli tl Γ ΓΠΐ! ΙΏ? ΓίίίΚΙιΐίji.uj «— Page 13 89110318-1625TW-1625TYNYJP.plc 524856
五、發明說明(9) 以第1圖之0、第2圖之p、第3圖之Q表示的各自領域, 係表示出上述關係式(1)表示的擴散距離之K值為150 以 上(對應於第1圖之0領域)、宜為160 //m以上(對應於第2圖 之P領域),再宜為設成170 //m以上(對應於第3圖之q領域) 之領域的境界線。 7 且’在本發明之過程中’供評估材料特性而用的Νι偏 析,完全以下列條件測定,並進行數據處理者。V. Description of the invention (9) The respective fields represented by 0 in FIG. 1, p in FIG. 2, and Q in FIG. 3 indicate that the K value of the diffusion distance represented by the above-mentioned relationship (1) is 150 or more ( Corresponds to the 0 area in Figure 1), it should be 160 // m or more (corresponds to the P area in Figure 2), and then it should be set to 170 // m or more (corresponds to the q area in Figure 3) Realm. 7 And, in the process of the present invention, the Nim segregation for evaluating the characteristics of the material is measured under the following conditions completely, and the data processor is performed.
測定裝置:日本電子公司製造的微分析儀 (Microanalyzer) JXA-8600MX 測定方法:線分析 測定條件: N i偏析測定條件係予如下設定。 探針直徑 照射電流 100〜300nm 5· 0 X 1 〇 -7/ 加 測 測 測 分 數 數據, 準偏差 的鑄造 (波美 潰,表 速電 定時 定長 定間 光結 壓 20KV 〇 · 5 s e c / 點 1 〇mm 2 /z m LiF 據=里^法對以上列測定條件而得的5 0 0 0點測定 :為nT : 動平均值四次後的4992點之數據的標 片Ni偏折Ρ ΐ之指標,表示成以第4圖之縱軸表示 R 二準偏差。遮蔽屏材料之蝕刻係於5Be 示刿?4溫之氯化鐵溶液溶液中進行20分鐘浸 目視方式賦與條紋斑點之發生程度 度 隔 曰曰Measurement device: Microanalyzer JXA-8600MX manufactured by Nippon Denshi Co., Ltd. Measurement method: Line analysis Measurement conditions: Ni segregation measurement conditions are set as follows. Probe diameter irradiation current 100 ~ 300nm 5 · 0 X 1 〇-7 / Add the measured score data, quasi-deviation casting (Pomeranian, meter speed electrical timing fixed length fixed interval light junction pressure 20KV 〇 5 sec / Point 1 0 mm 2 / zm LiF 50 000 points measured by the above-mentioned measurement conditions according to the Li method: nT: the standard Ni deflection P of the data of 4992 points after the moving average four times. The index is expressed by the R axis quasi deviation shown in the vertical axis of Fig. 4. The etching of the masking screen material is performed in a 5Be ferrite chloride solution at a temperature of 20 ° C for 20 minutes to cause the occurrence of streaks. Degree interval
89110318-1625TW-1625TYNY.IP.ptc 第14頁 524856 n 卞 五、發明說明G〇) 的等級。 第7圖係表示本發明之要件的由99%以上柱狀晶及/或 激々細晶体而成的連續鑄造片,與供作比較例而於鑄造片 中、4生成荨轴晶約30%之連續禱造片之同時在鑄造片中 心附,部之1 3 0 〇 °c — 72hr熱處理後的N i偏析經予測定的結 果。第7圖之橫軸係以X射線微分析儀之線分析的測定距 離、縱軸為Ni之重量%。由第7圖亦可顯而得知在等軸晶上 以偏析之週期為1〇〇〇//111〜2〇〇〇//111,與柱狀晶相比,可曰曰增 長至2 4倍’結果利用熱處理之降低偏析變成較難進行。 由,等軸晶率3 〇 %之鑄造片,對由實驗室軋製而製造的薄 板试料予以餘刻並進行條紋斑點判定,其結果為等級E。 因此,/等軸晶組織之鑄造片並不適用作遮蔽屏材料。又, 第8,係表示本發明之鑄造片之組織照相圖。第9圖係 比較例之鑄造片之組織照相圖。此照相之蝕刻條二 以喷布氣化鐵溶液(45。Be、5〇。〇蝕刻i分鐘者。且,也 鑄造組織之比率,係對鑄造方向以在垂直截面 面積比率表示。 祝不的 或生產 熱處理條 品板即成 且’在貫際操作方面,考慮熱處理爐之能力 性,由表1選擇為獲得所期待的κ值而用之鑄造片 件各人衣造具有任意蝕刻時之條紋斑點品級的繫 為有可能的。 " 洗 行 M w述鑄造片為2. 5mm之熱軋鋼板,其後進行確 在下:步驟之冷軋時的加工率大致在2〇〜95%之/ ¾ 退火係在使用連續式爐時的7〇〇〜1〇〇〇 t之範圍^疒89110318-1625TW-1625TYNY.IP.ptc Page 14 524856 n 卞 5. The level of invention description. FIG. 7 shows a continuous casting sheet made of 99% or more of columnar crystals and / or excited fine crystals, which is an essential part of the present invention, and about 30% of netting crystals are formed in the casting sheet as a comparative example. At the same time, the continuous prayer sheet was attached to the center of the casting sheet, and the results of the Ni segregation after heat treatment at 1300 ° C-72hr were determined. The horizontal axis in Fig. 7 is the measurement distance analyzed by the X-ray microanalyzer line, and the vertical axis is the weight% of Ni. It can also be clearly seen from Fig. 7 that the period of segregation on the equiaxed crystal is 1000 // 111 to 2000 // 111, which can be increased to 2 4 compared with the columnar crystal. As a result, it becomes difficult to reduce segregation by heat treatment. From a cast piece having an equiaxed crystal ratio of 30%, a thin plate sample manufactured by laboratory rolling was subjected to a cut and a streak spot was determined, and the result was grade E. Therefore, the cast sheet of the / equiaxed crystal structure is not suitable as a shielding screen material. In addition, No. 8 is a photomicrograph showing the structure of the casting sheet of the present invention. Fig. 9 is a photograph of the structure of a cast piece of a comparative example. The second etching strip of this photograph is sprayed with a vaporized iron solution (45. Be, 50. 0 etch for 1 minute. Also, the ratio of the casting structure is expressed by the ratio of the vertical cross-sectional area to the casting direction. Or the production of heat-treated strips is ready and 'in terms of inter-operation, taking into account the capabilities of the heat-treating furnace, the cast pieces used to obtain the desired κ value are selected from Table 1 and each garment has a stripe at any time when it is etched The speckled grade is possible. &Quot; Washing Mw said that the cast piece is a 2.5 mm hot-rolled steel sheet, and then proceed to the following: the processing rate in the cold rolling step is approximately 20% to 95%. / ¾ Annealing is in the range of 700 ~ 1000t when using a continuous furnace ^ 疒
524856 _案號洲11似18 _平月日__ 五、發明說明(11) 光整冷軋則以在加工率1〜5 0 %之範圍進行為宜。經過此種 步驟、製造出0.1〜0.39mm範圍内之板厚不同的遮蔽屏材 料,將此等遮蔽屏材料蝕刻並調查條紋斑點品級,其結果 係進入第6圖所示的品級A、B、C之領域内。 發明之功效 如上述般、採用本發明之遮蔽屏用鑄造片之遮蔽屏用 材料,因係滿足習用的蝕刻廠商之要求程度的條紋斑點水 準,在蝕刻後完全無條紋斑點之發生,欲提供具有符合超 高精細用之水準者的要求品質之條紋斑點品級的材料一事 乃成為可能的。524856 _Case No.11 is like 18 _Pingyueri__ V. Description of the invention (11) It is advisable to perform cold rolling in the range of 1 to 50%. After such steps, masking screen materials with different thicknesses in the range of 0.1 to 0.39 mm were manufactured. The masking screen materials were etched and the streak specks were investigated. The results are in the grade A, In the fields of B and C. The effect of the invention is as described above. The masking screen material using the casting sheet for masking screens of the present invention has a level of streaks and speckles that meets the requirements of conventional etching manufacturers. There is no streaks after etching. It is possible to make a streak-speck grade material that meets the requirements of those who use ultra-fine precision.
89110318-1625TW-1625TYNYJP.ptc 第16頁 524856 修止 圖式間早t兒曰月 說明 變化時的Κ值之圖 以為表示使鑄造片之浸潰條件 圖為表示使鑄造片之浸、、眚 ^ …一#〜间 第3圖為表示使鑄造片之读Ιί件變化時的1(值之圖。 第4圖為# -脖i ,貝條件變化時的κ值之圖。 袢門、义不 k 1偏析標準偏差及鑄造片之浸潰條 1干间之關係圖。 第5圖為表示鑄造片N i偏析標準偏差及條紋斑點品級間 之關係圖。 第6圖為表示K值與條紋斑點之關係圖。 第7圖為表示測定本發明之鑄造片與比較例之鑄造片間 之N i偏析的結果之圖。 第8圖為本發明之鑄造片之組織照相圖。 苐9圖為比較例之鑄造片之組織照相圖。89110318-1625TW-1625TYNYJP.ptc Page 16 524856 The figure of the K value at the time when the description of the pattern is changed is shown as the graph showing the immersion condition of the casting sheet, and … 一 # ~ 间 3 is a graph showing the value of 1 () when the reading of the casting piece is changed. Figure 4 is a graph of # -necki and the κ value when the conditions are changed. Figure 1 shows the relationship between the segregation standard deviation of k 1 and the immersion strip 1 of the cast piece. Figure 5 shows the relationship between the standard deviation of the segregation N i of the cast piece and the grade of the streaks. Figure 6 shows the value of K and the streak. The relationship between spots. Fig. 7 is a graph showing the results of measuring N i segregation between the casting sheet of the present invention and the casting sheet of the comparative example. Fig. 8 is a photograph of the structure of the casting sheet of the present invention. Comparative photograph of the structure of a cast piece.
89110318-1625TW.1625TYNYJP.ptc 第17頁89110318-1625TW.1625TYNYJP.ptc Page 17
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