522129 A7 B7_ 五、發明說明（f ) [發明所屬之技術領域】 本發明俗關於在舖設格柵（格子板）的床，具有為敷設 使台車移動用軌道的床構造、形成其床構造所用之床組 件及床單元、以及其床構造之搬送条統。 [習用技術】 一般而言，無菌室的床，以將多數枚之格柵舖裝於混 凝土製的基底床上而形成。在無菌室内，空氣從天花板 朝床送風。此氣流通過格柵，流入配置於格柵下方的排 氣風管。由於格柵床可防止空氣的滯留，因此能貢獻無 菌室内的清淨化。而且，在工廠内使用為搬送物品的無 人搬送車（以下，簡稱「搬送車」）。搬送車具有沿鐵軌 等軌道移動的有軌道台車。如果將有軌道台車利用於無 菌室内的物品搬送，卽可在半導體製造過程謀求搬送作 業的無人化。 [發明欲解決之課題] 如欲使用軌道台車移動，必需敷設有軌道台車移動的 軌道。但，由於如上述無菌室的床由格柵形成，因此必 需對於格柵實施切斷或焊接等的處理。並且，補強軌道 和格柵的連接部份的強度時，或將軌道埋入床以敷設， 以免軌道妨礙作業人員的步行時，必需將專用的支柱設 置於混凝土床。因此，如欲將軌道敷設於格柵，即需要 大規模的工程。 為解決上述問題，本發明的第1圖的，在於提供具備 可簡單實施將有軌台車的軌道敷設於格柵床之工程的有 -3- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------Γί----,% (請先閱讀背面之注意事項再填寫本頁) 1TW----------線· 經濟部智慧財產局員工消費合作社印製 522129 A7 _B7 五、發明說明（> ) 軌道台車用床構造，形成其床構造所用之床組件及床單 元，以及其床構造之搬送条統。 (請先閱讀背面之注意事項再填寫本頁) 本發明的第2目的，在於提供有軌道台車屬於皮帶移 動驅動方式時，具備可簡單實施軌道的敷設工程及皮帶 敷設工程的有軌道台車用床構造、形成其床構造所用之 床組件及床單元，以及設置有其床構造之搬送糸統。 [為解決課題之裝置] 為達成上述目的，在申請專利範圍第1項所載的發明 ，傜提供在舖裝形成具有規定形狀的多數格栅的格柵床 ，裝設使台車移動所用的移動領域，軌道被敷設於其移 動領域内的床構造。多數的支柱支撐格柵。多數的交叉 樑以直接方式或間接方式支撐於位於移動領域的支柱。 交叉樑以和軌道交叉的方式跨接於支柱間。軌道為將多 數的軌道組件連結而形成，而且被支撐於交叉樑上。多數的 床板在移動領域，被支撐於交叉樑上，且以填補軌道和 格柵的間隙方式被配置。 申請專利範圍第2項所記載的發明，傺在申請專利範 圍第1項的發明中，交叉樑被直接支撐於支柱。各格柵 經濟部智慧財產局員工消費合作社印製 道 範軌被 軌利 ，中 沿 專伸個 板請延一 床。申狀何 各徽在線任 α 。待係直少擻 狀其，以至待 形為明道央其 方倍發軌中為 長數的沿的寸 呈然載域樑尺 板自記領叉同 床的所動交相 各度項移該部 ， 長 3 ，及全 且邊第中端板 而一圍明兩床 ， 棚範 發的的 狀格利的樑數 形傺專項叉多 方度請 1 交 ， 正長申第被撐 呈的 圍道支 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7 五、發明說明（4 經濟部智慧財產局員工消費合作社印製 範部 範。定 圍邊 定設其皮的柵材第 1 範帶輪， 利合 利動的 範一 規裝在設道格床於第 利皮帶件 專繫 專驅帶 利的 有，於張軌和 2 撐於 專掛皮組 請的 請帶皮 專柵 具床用而於有第支配 請纏動床 申道 申皮該 請格 使柵適道置具 C 柱裝 申為驅 2 在軌 在的位 申各 在格，軌配材柱支被 於括動第 ，於 ，設定 在偽 ，的域沿別床支由構 ，包驅於 是合 為張部 ，， 為成領為分1 於，機 明構為配 明繫 明道端 為度 明形動供括第撐向位 發機和裝 發， 發軌兩 明長 發而移提包。支縱定 的位，和 的道 的沿其 發的 的柱的，，材，的的 載定輪， 載軌 載由在 的件 載支用造件床端道帶 記，帶源 記位 記係設 載組。記數所構組2 一軌皮 所中皮力 所定 所車裝 所道徽所多動床床第向在位 項件動動 項為。項台， 項軌特項於移的對及縱，定 8 組驅的 4 ，歡5 ，端 6各其7撐車道一材的寸為 第床的材 第中特第中兩 C 第，為第支台軌 C 床道尺。。圍的材床 圍明其圍明的歡圍中倍圍柵的設件1軌同側材範載床1 範發為範發向特範明數範格動敷組第在相反床利記1第 利的樑利的縱其利發然利數驅内床的，柵相2專所第於 專項叉專項的為專的自專多帶域對端寸格的第請項於配 請1交請1道構請項的請的皮領一兩尺和材及申7配裝 申第成申第軌機申1 度申狀由動的向同有床材在第裝而 圍形 圍在位 第長 形使移帶縱相具 1 床 圍而， (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 522129 A7 B7_ 五、發明說明（4 ) 而且為纏掛皮帶所用的被動皮帶輪。 (請先閱讀背面之注意事項再填寫本頁) 在申請專利範圍第9項所記載的發明為，於申請專利 範圍第7項所記載的床組件中，台車具備為驅動皮帶的 動力源，定位機構包括為調節皮帶張力而裝配於第1床 材、而且固定前述皮帶一端的張力調節裝置，和裝配於 第2床組件、而且固定皮帶的他端的固定構件。 經濟部智慧財產局員工消費合作社印製 申請專利範圍第10項所記載的發明，偽提供在由多數 的支柱支撐之格柵而由格柵形成的床，裝設為使由皮帶 驅動的台車移動領域的床單元。其床單元包括軌道，多 數的交叉樑，多數的床板，第1及第2床組件。為移動 台車的軌道俗連接多數的軌道組件而形成。多數的交叉 樑被直接或間接支撐於支柱間以便和軌道交叉。多數的 床板被支撐於交叉樑上，以使镇補軌道和格柵的間隙方 式配置。一對的床組件，包括分別配置於軌道的縱向兩 端的第1床材及第2床材。第1床材具有和格柵相同尺 寸，在軌道的縱向一端，被支柱支撐。第2床材具有和 格柵相同尺寸，在軌道的縱向，在第1床材的相反側， 由支柱支撐。為定位皮帶的定位機構則被裝配於第1床 材及第2床材。 在申請專利範圍第1 1項所記載的發明，於申請專利範 圍第10項所記載的床單元中，定位機構包括為纏掛皮帶 ，而裝配於第1床材的驅動皮帶輪，和為驅動驅動皮帶 輪而裝配於第1床材的動力源，和裝配於第2床組件， 而且為纏掛皮帶所用的被動皮帶輪。 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 522129 經濟部智慧財產局員工消費合作社印製 A7 B7_ 五、發明說明U ) 在申請專利範圍第1 2項所記載的發明，於申請專利範 圍第10項所記載的床單元中，台車具備為驅動皮帶所用 的動力源，定位機構包括為調節皮帶的張力，而裝配於 第1床材，而且固定皮帶一端的張力調節裝置，和裝置 第2床組件，而且固定皮帶他端的固定構件。 申請專利範圍第13項所記載的發明為提供在舖裝具有 規定形狀的多數格柵而形成的格柵床，裝設為使台車移 動的移動領域，在其移動領域内敷設軌道的搬送条統。 多數的支柱支撐格柵。多數的交叉樑被直接或間接地支 撐於位於移動領域的支柱。其交叉樑以和軌道交叉的方 式跨接於支柱間。軌道由連接多數的軌道組件而形成， 而且支撐於交叉樑上。多數的床板在前述移動領域中， 被支撐於交叉樑上，以镇補軌道和格柵的間隙方式配置。 申請專利範圍第14項所記載的發明為在申請專利範圍 第13項所記載的發明中，為沿軌道張設驅動台車的皮帶 ，而在軌道的縱向各端，再具備被支柱支撐的第1及第 2床組件。第1床組件具備具有和格柵相同尺寸的第1 床材，和使纏掛皮帶的驅動皮帶輪回轉驅動的動力源。 動力源被裝配於第1床材。第2床組件具備在軌道的縱 向，第1床材的相反側，由支柱支撐，而且具有和格柵 相同尺寸的第2床材，和裝配於其第2床材，而且纏掛 皮帶的被動皮帶輪。 申請專利範圍第15項所記載的發明為在申請專利範圍 第13項所記載的搬送条統，再具備包覆移動領域的機殼 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------------------訂—-------線 (請先閱讀背面之注意事項再填寫本頁) 522129 A7 B7 五、發明說明（t 經濟部智慧財產局員工消費合作社印製 的和被 被一樑是道單 件置皮道設道將 由裝定 數，板 樑的叉道軌用 組位以軌張軌可 藉件規 多且床 叉柵交軌。使 道定車於道於此 ，組於 即而。 交格撐因伸可 軌規台設軌由因 明床置 ，，上 ，為支，延，C，於，裝沿，， 發將配 明柱樑 明向被明排此隙明置明依 ，明倍 的領被 。 發支叉。發縱部發柵因間發配發帶態發數 載要構 置的的交隙.的的端的格。的的被的皮狀的然 記的機 裝 載用的間載道兩載沿種間載而載的的載自 所同位 淨 記栅數的記軌其記域一道記，記動位記的 項相定 清 所格多間所在在所領少軌所合所移定所度 。9 柵的 的項於於道項板此項動至補項繫項其被項長樑 ~ 格材 用 1 撐置軌 2 床因 3 移中瑱 4 部 5 於以 6 邊叉 7 和床 所 第支載補第於，第的央板第合第用，第一交第以於 淨圍地被填圍由度圍樑中床圍繫圍 ，構圍的於圍部配 清範接道使範。長範叉和其範的範動機範栅定範端裝 内利間軌以利間倍利交端由利樑利移位利格固利兩先 殼專或。上專柱數專列兩，專叉專式定專係部專的預 機請接接樑請支然請排的板請交請方的請，端請向而 其 申直跨叉申於自申故樑床申成申動端申度的申縱 ， 使依被叉交依接的依 ，叉的依形依驅兩依長件依的柱 為¾)果樑交於果跨度果狀交小果和果動向果的組果道支 和 π 如叉道置如接長如線於大如由如移縱如件道如軌於 ，：3 交軌載 直邊 直位一 藉 帶的 組軌 在置 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 經濟部智慧財產局員工消費合作社印製 A7 B7_ 五、發明說明（7 ) 位置。因此，使台車移動的皮帶以被定位於和一對床組 件之間的狀態跨接。 尤其是，如果依申請專利範圍第9項所記載的發明， 以使台車移動所用的皮帶定位於和一對床組件之間的狀 態，而可調節其皮帶的張力。 如果依申請專利範圍第10〜12項所記載的發明，即依 必要零件被組件化的床單元，簡單實施在由多數的支柱 支撐的多數格柵形成的床，裝設為使由皮帶驅動的台車 移動所用的移動領域的工程。 如果依申請專利範圍第13項所記載的發明，搬送条統 偽由被組件化的床單元及床組件，和配備於其上的台車 所構成。由被組件化的床單元及床組件，而可簡單實施 搬送条統的設置工程。 如果依申請專利範圍第14項所記載的發明，將有軌道 台車屬於皮帶移動驅動方式的搬送条統配備於格柵床時 ，由被組件化的床單元及床組件，而可簡單實施軌道的 敷設工程及皮帶的敷設工程。 如果依申請專利範圍第15項所記載的發明，台車在依 清淨裝置而保持清淨的機殼内移動領域移動。因此，在 此搬送糸統，由有軌道台車搬送的貨可保持清淨。 [發明之實施形態] 玆參閲第1〜13圖説明本發明的第1實施形態如下： 如第12圖所示，無菌室1的床2 ，由正方形的多數的 格柵3 (格子板）所形成。各格柵3的一邊的長度L偽約 -9- 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） ---------------------訂·—------ (請先閱讀背面之注意事項再填寫本頁) 522129 A7 _B7_ 五、發明說明（J ) (請先閱讀背面之注意事項再填寫本頁) 60cm。在無菌室1内，配備用於半導體製造的設備4、5 及為在設備4、5之間搬送半導體晶片等貨6所用的搬送 条統7 。 如第13圖所示，搬送糸統7具備作為有軌道台車的搬 送車8 ，機殼9及控制盤14。機殼9包圍搬送車8移動 的領域全體。機殼9的前面及後面俗以由樹脂或玻璃所 製成的透明板材形成以使從外部可看到搬蓮車8的位置 或其作業狀況。機殼9俗將多數的房屋單元10在縱向連 接而構成。一個房屋單元10的寬度偽格柵3的一邊長度 的2倍。在各房屋單元10的天花板配置作為清淨裝置的 風扇過濾器單元11。風扇過濾器單元11，具備風扇和過 濾器（都未圖示）。空氣俗由過濾器淨化而送入機殼9内 。由風扇過濾器單元11，搬送機殼9内亦即貨6的移動 領域内清淨度被保持為高於在無菌室1内的機殼9外部 的清淨度。 在機殼9的縱向的中央附近，配置通路12及為封鎖其 通路12所用的門13。作業人員可通過通路12而橫過機殼 9 。在第13圖中，於機殼9的右端設置前述控制盤140 經濟部智慧財產局員工消費合作社印製 的 4 ii 盤 制 控 作 操 由 0 像 制 控 其 及 定 設 一了 y/1 蓮 C 的施 00 實 車板 送表 搬儀 隔 3 間柵 定格 規和 依為 域定 全設 的被 15隔 面間 土的 6 凝 1 混柱 在支 ， ο 示16 所柱 圖支 3 1 的 、數 11多 第設 如立 而 度 長 C 邊上 一16 的柱 支 於 撐 支 被 ΤΠΣΓ 四 其 在 3 柵 格 〇 同 相 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7 五、發明說明（9 經濟部智慧財產局員工消費合作社印製 驅帶沿20如。 的底裝外 領平27溝 δ、皮溝位1½車 動皮此、。〇〇 對的隔的 動側道的18動的 ，21於 移的，19部車 一22間24移兩軌26輪被26示帶 設 帶數21、底蓮。及架線輪 於的用軌 帶和軌所皮 裝 皮多}18的搬構24車心車 設26動導 皮18導3Η的8» 用置 U 、22動機輪於中各 敷軌移於 導輪於13間28 採配Μ17架移位車設度於 被導於置 引帶納第U 架 動割®rB1輪車向定個裝寬低26在置配 個皮容如20貨 驅分 ί 帶的方的四式的置 軌27載被 兩導被。輪 的 的端帶皮〇〇轉車備方22位 導道4Μ25於引，面帶 造 8兩皮於車回送具的架面 的軌24輪 導的份一皮。構 車的的掛送的搬22轉車下 溝用輪導 引側部成動側架 _ 送域用纏搬23成架回沿最 有動車。1¾上側形被面框11-搬領動被於達構車可25的 具移個動21於上面 g背有-於動移式定馬20,以輪面 ，支四g 帶位_上19的具， 對移。方固依~示24導周。示 2 的27。皮 。2 的輪 3 示 ，在20的被即17所輪的外置所，8道動，20帶2帶檷1 示，、道端，輪圖車對的位圖且車軌滾示輪皮床皮格0P 所卽19軌兩動帶10個一25面11而蓮用26所帶的成導於10 圖亦、的的驅皮、四。輪下、。搬動軌圖皮間置引位、 10018821被各9 。隅導最9央。移導10動U配的份9、 第式、車帶達，第25四各的第中設沿沿第被20而側部第 如方17送皮馬外如輪的。面如的敷，，如9¾輪，下端如 動輪搬。果此 導部設周 域行上内19帶内於下 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 _B7 五、發明說明（t。） 架22上。為載置貨6所用的托盤29被配置於貨架28的上 部。在第13圖中，在機殼9内的右端及左端，裝設為偵 測在移動領域内是否存在作業人員或異物所用的絨應器 30。由於貨架28傜以框架構造形成，因此從感應器30放 射的偵測用光線，不被貨架2 8遮蔽，而可通過貨架2 8的框 架的間隙。 Η參閲第1〜8圖及第11圖說明有關移動領域的床構造 如下： 如第11圖所示，在移動領域内的床，取代格柵3 ，裝 配床單元31。床單元31包括具備軌道26、27的移動床。 移動床被支撐於支柱16上以支撐鄰接格柵3 。 床單元31傺由為構築敷設軌道26、27之軌道區所用的 組件群，和為安裝皮帶21而配置於軌道區兩端的一組床 組件33、34所構成。用於軌道區構築的組件群，傺為交 叉樑37，導軌組件38,移動用軌道組件39及床板40。各 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 在帶36，形的固 你 皮 材 l/r、/L3 3 33動床 所中柵柵 件驅的 圖的格格 組及寸 l6a從將 床23尺 第tl因而 。達同 如!!。， 各 用馬相 。It 孔孔 在 使配 3 孔 針栓 量裝柵 針ao的螺 酌體格 C 的 1 3 的 次一和元示針柵 a 每 CO 在單圖支格 1 要材傺的未 4 入針 需床 3 2 成成插各 的的件輪形形被於 度寸組帶隅部 a 著 長尺床皮四端16螺 區同。動的上針栓 。 道相元被 3 的。螺16 軌 3 單配柵16孔使柱 視柵的裝格柱栓側支 件格17體在支螺面於 組和輪一 在成上定 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 _B7_ 五、發明說明（^ ) 在這裡，參閲第1〜3圖説明有關軌道區的床構造。 交叉樑37俗和格柵3的一邊大致相同的長度。如第1 、11圖所示，多數的交叉樑37偽在軌道區内的橫向跨接 於成對的支柱1 6間。各交叉樑3 7以和移動軌道交叉的方 式被配置（本例為和移動軌道成直角）。各軌道組件38、 39及床板4Q傺對於各交叉樑37，以在下面被支撐的狀態 安裝。 床板40的長邊的長度，傺格柵3的一邊長度L的2倍 (2L)。因使床板40的長邊的長度為格柵3的一邊長度的 自然數倍（n XL·:但、η為自然數），而可在縱向的兩端 部對於交叉樑37以螺栓固定床板40。床板40的短邊的長 度被設定為從格柵3的一邊的長度，扣除3支軌道組件 38、39的寬度合計值的一半長度。因此，床板40可填補 軌道組件38、39之間的間隙。 一方面，各軌道組件38、39的長度，係格柵3的一邊 長度的4倍（4L)。如果軌道組件38、39的長度是格柵3 的一邊的自然數倍的長度，儘管不是4倍也可以。而且 ，軌道組件38的長度和軌道組件39的長度相同或不同也 可以。 在床板40，形成多數的圓孔4Ga 。在導軌組件38的底 部，按照每一定間隔形成圓孔3 8 a 。藉由形成於床板4 0 及導軌組件38的各圓孔40a、38a,來自風扇過濾器單元 11的鼓風空氣，不會停留，通過移動床32，而可流進排 氣風管。而且，藉由導軌組件38的圓孔38a ，可避免灰 -13- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------*------— (請先閱讀背面之注意事項再填寫本頁) 訂"---------線· 經濟部智慧財產局員工消費合作社印製 522129 A7 _B7_ 五、發明說明（、> ) 塵積存於導軌組件38的底部。 第2、3圖傺移動床32的剖面圖。在交叉樑37的兩端部 ，分別形成兩個針孔37a 。支柱16的針16a被插通於交 叉樑3 7的針孔3 7 a 。螺栓4 1從交叉樑3 7的上面側螺著於 各針16a的螺栓孔。因此，交叉樑37被固定於支柱16。 螺栓41的頭部以和形成於交叉樑37的兩端部上面的凸部 37b的上面成為一面的方式被埋没。其凸部37b被套入 形成於移動用軌道組件39背面的凹部。移動用軌道組件 39接觸凸部37b的上面全體，被水平配置如第2圖所示 ，在交叉樑37的中央形成凹部37c 。導軌組件38套入凹 部37c 。如第1、2圖所示，各軌道組件38、39，像由螺 栓4 2、4 3固定於交叉樑3 7。而且，分別配置於軌道區兩 端的兩個交叉樑37的寬度，傺其他.交叉樑37寬度的一半。 床板40具有朝下方彎成直角的兩側面。在各床板40的 縱向的兩端部的背面，焊接多數的圓筒形的支撐部40b 。因將螺栓44插通於支撐部4Gb的孔，而螺著於交叉樑 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 製 C 制線 在引右 鋁度控電 ，，。 俗強為給 示17件 3 的 。的 所輪組 樑定 e 用 圖帶要 叉規37機 。-6皮必 交持孔電撐 4 動的 於維通種支第驅等 由且貫各 、如 ，45 。而個或通 。23元 37量兩器插造達單 樑輕成應被構馬器 叉為形{^CD 的配滴4 交此道種3734裝過~1 於因軌各孔、體扇 定，沿的通33一風 固 d ，用貫件先及 被 3 3 所些組預 1 40棱樑動這床 ，、 板有叉移在明3518 床具交 8 線說材輪 故且各車號次床帶 ，而在送信其端皮 37， 搬及 右導 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7 五、發明說明（ο ) 端材3 5僳和格柵3相同大小。在右端床材3 5的四隅形成 應格柵3相同的針孔（未圖示）。在右端床材35的針孔插入 (請先閱讀背面之注意事項再填寫本頁) 支柱1 6的針1 6 a 。因從右端床材3 5的上面側將螺栓Β螺 著於針16a的螺栓孔，而右端床組件33被裝配於支柱16。 馬達23偽介由支撐材46被支撐於床材35的上面。驅動 皮帶輪17被裝設於馬達23的驅動軸。床材35具有缺口 35a ，其缺口 35a以和導軌26的凹部連續方式被連接。 上側的引導皮帶輪18以可回轉的方式支撐於支撐部47。 下側的引導皮帶輪19以可回轉的方式支撐於支撐部48。 下側的引導皮帶輪1 9的一部份位於缺口 3 5 a内。 在右端床材35形成多數的圓孔35b 。在右端床材35的 上面安裝2支支撐臂49。蓋子50被支撐於2支支撐臂49 ，而包覆馬逹23，皮帶輪17〜19，風扇過濾器單元45及 各圓孔35b 。隨著馬逹23或各皮帶輪17〜19，及皮帶21 的動作，在蓋子50内産生的灰塵，傺由風扇過濾器單元 4 5排出床材3 5的下方。此外，在第6圖省略引導皮帶輪 18〇 經濟部智慧財產局員工消費合作社印製 其次說明有關左端床組件34。如第7、8圖所示，左端 床材3 6的一邊的長度偽和格柵3相同。在左端床材3 6的 四隅形成和格柵3同樣的針孔（未圖示）。藉由將支柱1 6 的針1 6 a插通於左端床材3 6的針孔，將螺栓B從床材3 6 的上面側螺著於針16a ，在支柱16裝配左端床組件34。 左端床材36具有以和導軌26的凹部連接的方式延伸之缺 口 36a 。多數的圓孔36b被形成於左端床材36的大致全 面。 -1 5- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7 五、發明說明（4 ) (請先閱讀背面之注意事項再填寫本頁) 在床材36的下面，安裝為以可回轉的方式支撐被動支 帶輪2 0所用的支持部5 2。被動皮帶輪2 ϋ的一部份被配置 於缺口 3 6 a内。 被動皮帶輪2 0的最上部位於和右端床組件3 3的引導皮 帶輪18的最下部大致相同的高度。被動皮帶輪20的最下 部位於和右端床組件3 3的引導皮帶輪1 9的最下部相同的 高度。因此，位於上側的皮帶2 1和位於下側的皮帶2 1互 相平行延伸。在左端床材36安裝包覆被動皮帶輪20的蓋 子53。在被動皮帶輪20或皮帶21的滑動部份産生的蓋子 53内之灰塵，傺由蓋子53，引導至床材36的下方。此夕卜 ，在第7圖皮帶21被省略。 設置搬送条統7的移動床32裝配成如下： 經濟部智慧財產局員工消費合作社印製 將各交叉樑37跨接於對應軌道區的支柱16之間，以前 述方法固定於支柱16。在各交叉樑37的兩端的凸部37b 分別套入各移動用軌道組件3 9。以一排連接規定數量的 移動用軌道組件3 9，而形成移動用軌道2 7。在位於各交 叉樑3 7中央的凹部3 7 c套入導軌組件3 8。以一排連接規 定數量的導軌組件3 8 ,而形成一支導軌2 6。使用多數的 螺栓42、43將各軌道組件38、39固定於各交叉樑37。在 形成於各移動用軌道2 7和導軌2 6之間的二排間隙舖裝多 數的床板4 G。以螺栓4 4將各床板4 G固定於各交叉樑3 7。 其次在移動領域的右及左端部裝配兩床組件3 3、3 4。 在床材3 5、3 6的四隅的針孔分別插通支柱1 6的針1 6 a 。 從床材3 5、3 6的上面側將螺栓B螺箸於針1 6 a的螺栓孔 一 1 6一 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7_ 五、發明說明（β ) (請先閱讀背面之注意事項再填寫本頁) 。因此，兩床材3 5、3 6被固定於支柱1 6。由於在床組件 33、34和床材35、36同時預先一體地裝配所需要的各種 組件，因此兩床組件3 3、3 4的裝配為僅將床材3 5、3 6裝 配於支柱1 6的作業。這樣移動床3 2的裝配作業結束。 將皮帶2 1安裝於移動床3 2的工程，偽拆除排列於導軌 2 6和單側的移動用軌道2 7之間的一排床板4 0而進行。將 皮帶21固定於搬送車8的作業傺拆除一部份的床板40而 進行。將給電線或信號線配線於移動床3 2背面的工程， 偽拆除一排的床板4 0而進行。 為了搬送車8的維修，檢査配置於移動床32背面的電 線類，更換皮帶2 1時，只要拆除需要片數的排列於導軌 2 6和單側的移動用軌道2 7之間的床板4 0即可。此時，因 為床板40是格柵3的一邊長度二倍的長度2L，所以較拆 除格柵3時，其拆除Η數少量即可解決。而且，由於床 板4 0傺和軌道組件3 8、3 9為另外構件，因此較輕。所以 床板4 0的拆除作業容易。 第1實施形態可獲得下列效果。 經濟部智慧財產局員工消費合作社印製 (1) 在本發明的床構造中，因在格柵用的支柱16裝 配床單元31的構成組件而可敷設軌道26、27。因此，可 簡單地進行將為使搬送車8移動所用的導軌2 6及移動用 軌道2 7敷設於床2的工程。 (2) 在多數排的交叉樑37和移動軌道交叉的方向交叉 樑3 7被跨接於支柱1 6之間，軌道組件3 8、3 9及床板4 0承 受於這些交叉樑37上。因此，軌道組件38、39及床板40 -1 7 - 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7_ 五、發明說明（4 ) 對於來自上面的重大負載能堅固地支撐。 (3) 由於在交叉樑37形成裝配軌道組件38、39的凸部 (請先閱讀背面之注意事項再填寫本頁) 37b及凹部37c ，因此軌道組件38、39僅依套入這些凸 部37b或凹部37c的簡單作業，即可配置於正確的位置。 (4) 床板40的長邊的長度俗為格柵3的一邊的長度L 的自然數倍。因此，床板40的兩端部被配置於交叉樑37 上，而固定於交叉樑3 7。所以，儘管重大的負載對於移 動床32的上面産生作用，仍然能堅固地支撐移動床32。 尤其是因為在本實施形態床板40的長邊長度傺格柵3的 一邊長度的2倍，所以使用的床板40片數較少即可解決 。因此，可減少床板4ϋ的安裝作業及拆除作業的工夫。 經濟部智慧財產局員工消費合作社印製 (5 )移動床3 2的區域被設定於格柵3的一排份的區域 。而且，其區域寬度相當於支柱16的間隔。導軌26被配 置於移動床32的區域寬度的中央。並且，二支移動用軌 道2 7被配置於其區域寛度的兩端。而且，由於導軌26和 各移動用軌道2 7的寬度分別相同，因此配置於導軌2 6和 各移動用軌道27之間的床板40以具有單一尺寸的一種組 件即可解決。所以能減少床板40的製造成本。並且，床 板4 0的安裝時，可節省互相比較組件的工夫，順利進展 其安裝作業。 (6 )床板4 0以2排排列於導軌2 6的兩側。因此，藉由 僅拆除導軌2 6的單側一排份的床板4 0需要片數，即可進 行配置於移動床32背面的電線類維修，或皮帶21的更換 。而且，床板40偽和軌道組件38、39為另外組件，由於 -1 8 - 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 522129 Α7 Β7 五、發明說明（π ) 較輕量，因此比格柵3容易實施其拆除作業。 (7 )軌道組件3 8、3 9的長度，傺格柵3的一邊長度的 自然數倍，而且長於床板40長邊的長度。因此，軌道組 件3 8、3 9的連接處少，減少容易在這些連接處産生的搬 送車8異動。 (8) 右端床組件33具有預先裝配於床材35的馬達23及 驅動皮帶輪17。左端床組件34具有預先裝配於床材36的 被動皮帶輪20。亦即，右端及左端床組件33、34具備預 先作為單元之具備為沿導軌26張設皮帶21所需要的各種 組件。右端及左端床組件33、34傺作為床單元31的構成 組件被包括。因此，可簡化移動床32的裝配工程的工夫。 (9) 機殼9和搬送車8 —起包覆其移動領域。而且， 在其機殼9設置為將其内部清淨度自無菌室1的清淨度 再提高所使用的風扇過濾器單元11。因此，半導體晶Η 等的貨6在清淨的空氣下搬送。結果提高所製造的半導 體晶片等的成品率。 (10) 由於搬送車8是以皮帶移動驅動方式驅動，因此 馬達2 3等的驅動糸統的組件被配置於離開搬送車的位置 。所以減少由從這些驅動条統的組件滑動部份産生之灰 塵的貨 6的污染。 (11) 由於在機殼9裝設通路12，因此作業人員可橫貫 機殼9 。所以，儘管是以機殼9包覆搬送車8之移動領 域的構造，仍可將作業人員通行的妨礙抑制於最小限度。 (12) 由於搬送車8的貨架28偽框架構造，因此安裝於 -1 9- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） — — — — —-------% (請先閱讀背面之注意事項再填寫本頁) 訂‘----.-----線« 經濟部智慧財產局員工消費合作社印製 522129 A7 B7_ 五、發明說明（J ) 移動領域兩端的感應器3 0的偵測光可通過框架間。所以 ，可確實偵測作業人員或異物進入移動領域内。 (請先閱讀背面之注意事項再填寫本頁) (13)多數的圓孔4Ga形成於床板40的大致全面。而且 ，在導軌組件38的底面也形成圓孔38a 。因此，從天花 板流往下面的氣流不會停滯可通過床2 。結果在床2的 上方産生的灰塵，和氣流一起順利地送於床2下方的排 氣風管。並且，導軌組件38雖然是溝形，但灰塵不容易 積存於其溝内。因此，可保持移動領域内的清淨。 Η參閲第14、15圖說明本發明的第2實施形態如下： 關於和第1實施形態相同的構成，附加相同符號省略其 説明。 在第2實施形態，馬達61被裝備於搬蓮車8的車架22 。在馬達61的驅動軸安裝驅動皮帶輪62。被兩個引導皮 帶輪63引導的皮帶21被纏掛於驅動皮帶輪62。皮帶21的 兩端部被固定於軌道縱向的兩端床面。四個車輪24被載 置於2支移動用軌道27上，沿移動用軌道27滾動。裝設 於車架2 2底部中央的引導輪6 4沿導軌2 6滾動。如果馬達 61被驅動，搬送車8即沿導軌26、27，朝皮帶21的端部 移動。 經濟部智慧財產局員工消費合作社印製 在軌道區的第2實施形態之床構造傺和第1實施形態 相同，由交叉樑37,軌道組件38、39及床板40所構成。 在配置於軌道區兩端的床組件6 5、6 6，預先裝配為固 定皮帶21端部所用的機構。 左端床組件65具備左床材67,左床材67係和格柵3相 -20- 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 522129 A7 _B7_ 五、發明說明（β ) 同大小，在其四隅具有和格柵3相同為插通支柱16的針 1 6 a的所用的針孔（未圖示）。在左床材6 7裝配為固定皮 帶21之左端部的所用的固定構件68。右端床組件66也具 備和左床材6 7相同的右床材6 9。在各床材6 7、6 9形成多 數的圓孔69a 。右床材6 9具備固定皮帶21的右端部，而 且可調節皮帶21張力的張力調節裝置70。 如第15画所示，張力調節裝置70具備可纏繞皮帶21的 圓筒和棘輪機構7 2。在圓筒7 1固定皮帶2 1的右端。棘輪 機構72容許圓筒71朝纏繞皮帶21的方向回轉，而且限制 圓筒71朝放捲皮帶21的方向回轉。棘輪機構72具備可和 圓筒71—體回轉的棘輪齒輪73，和可與該棘輪齒輪73繫 合的繫止爪74。圓筒71的回轉軸75被支撐於支撐台76。 操作捍7 7於其使用時裝設於回轉軸7 5的端部。 支撐台76具有為插通固定用螺栓79所用的多數長孔80 。長孔80和軌道26的延長線平行形成。支撐台76由固定 用螺栓79固定於床材69的上面。如果鬆弛固定用螺栓79 ，支撐台76即可沿長孔80在床材69上滑動。支撐部69b 被固定於床材69。調節用螺栓78連接支撐部69b和支撐 (請先閱讀背面之注意事項再填寫本頁) «衣 訂--- 線一 經濟部智慧財產局員工消費合作社印製 螺78軸力藉 用栓 轉張， 節螺 回與次 調用 於賦其 轉節 合 2 。 回調 繫帶伸 ，依 作皮拉 態俗 操在隔 狀力 ，即間 的張 態，距 79的 狀轉節 栓21的回的 9 13 螺 7 7 7 用皮 栓筒輪 定。 螺圓齒 固動。用使輪 她滑調定而棘 鬆76微固，以 以台而弛7721 由撐置鬆桿帶 藉支位以作皮 。，轉果操時 7678回如的此 台检的 7 。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 B7 五、發明說明 經濟部智慧財產局員工消費合作社印製 張38得 體於程 也 此在將組狀件種舖 體要組 的件 獲 一配工 如 式道形組這程 車需道 21組 可 被裝的 例 以 3 方軌或道用工 於不軌 帶道。， 置構床 ， 可柵的入置軌採的 設，， 皮軌31果 裝機動 態 也格叉套位合果單 裝時37 調，元效 節的移 形 道的交於其配如簡 由此樑 微37單的 調用設 施 軌份道37慮板。以 ，。叉 置樑床態 力所敷 實 的部軌樑考床狀16如以交 位叉成形 張力 3 2 狀之線叉，。形柱 例可由 71交構施 上張化 第 線區曲交式部的支 。也傺 筒由，實69節簡 及 曲道和在方凸隙用 意式元 圓，661 材調場 1 用軌37C 的或間利 任方單 更態 、第 床21現 第 採於樑間線部其可 係的床。2-變形65上 的帶在 於 而當叉之曲凹補仍 式動，成-2 而施件加66皮， 定 ，相交16道的瑱道 方移66構 78實組， 件為以 限 道線支柱軌部可軌 動而、所 栓 2 床態 組將所 不 軌曲數支寫合成線 驅動6540 螺第及形 床要。 明 的沿多於描繫形曲 的驅、板 用在40施。在需業 發：狀除使接像為而是 車輪34床 節，板實果於不作 本下線拆以跨好作狀管 台車 、及 調外床 2 效由此的 ，如直如域樑道成形儘。道使3339 轉此，第的4)因 3 。外更代例區叉軌 線，道軌達件 、 回 。39在下(1，柵夫此變取，述交時尤曲構軌有馬組38 由力、 以 化格工 可 時上該件而的結設 的床件 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 _B7_ 五、發明說明（^ ) 交叉樑3 7不必配置於沿移動領域的全部支柱1 6之間， 視支撐的重量，按照每任意的間隔配置也可以。 (請先閱讀背面之注意事項再填寫本頁) 交叉樑37不直接裝設於支柱16，介由另外的支撐用交 叉樑裝設於支柱16也可以。亦即，將支撐用交叉樑對以 和軌道平行，而且互相對向的方式跨接於兩支支柱1 6間 。將交叉樑37跨接於其支撐用交叉樑間。因此，交叉樑 37被配置於和移動軌道交叉的方向。如果依此結構，即 可以短於支柱間的節距配置交叉樑3 7。因此，儘管床板 的強度較弱時，由於從其下面以短間隔由更多的交叉樑 3 7所支撐，所以床2可確保希望的強度。而且，由於沿 軌道的床板長度，只要兩端部得位於交叉樑的上面即可 ，因此不必設定為格柵3的一邊的長度的自然數倍也可 以。 省略二支移動用軌道，僅使用一支導軌也可以。此時 ，車輪在格柵或床板的上面滾動。在床板的上面，如果 未將圓孔形成於接觸車輪的領域，搬送車即可光滑地移 動。 省略導軌，僅使用二支移動用軌道也可以。如果是一 經濟部智慧財產局員工消費合作社印製 道軌為 備 軌導定 準 有要設 ， 式需被 時 應不度 此 ^即寬 C 的，的 央 動帶板 中 移色床 的 面或， 樑 一帶道 叉 ，磁軌 交 道貼用。於 軌粘動等定 測道移相限 。 偵軌支致不板 光沿二大置床 射先用隔位種 反預採間置兩 或要僅的設的 力只，道的同 磁，時軌軌不 依車此其導度 面台。和 寬 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 522129 A7 _B7 五、發明說明（Ρ ) 跨接交叉樑的移動領域寬度，不限定為格柵3的一 Η 份寬度。移動領域的寬度，依有軌道台車（搬送車）的車 輪的輪距，而作為多數Η份的格柵寬度也可以。例如涵 蓋多數排的格柵，按照每各格柵排敷設一支軌道也可以 。此時，床板的寬度（和移動軌道交叉的方向邊長度）長 於格柵3的一邊長度也無妨。 在皮帶移動驅動式的有軌道台車用的床構造中，不使 用床組件33、34、65、66;而使用交叉樑37,軌道組件 3 8、3 9及床板4 Q，僅敷設移動床的軌道區，因而採用對 於格柵3使用裝配用托架等；而直接裝配為安裝皮帶所 需要的皮帶輪或馬達的結構也可以。 本發明可對於無菌室以外的格柵床加以具體化。對於 非皮帶移動驅動方式的有軌道台車，偽以除床組件以夕卜 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 的 床 C 16栅圖 柱 格面 支 於平。 入 設 的。圖 插 敷 造圖面 C 由 道 構面剖 圖 藉 軌 床剖的。面 僅 的 態的造圖剖 ， 車 形造構面側 栓 C 台 施構床平的 螺以 道 實床圖的件 用可 軌 1 圖 2 件組4- 使也 有 第 1 第組床-2 不16將 示第示床圖 C 3 柱 行 表示表端 4 元柵支 進^]部表大右第 單格於1簡 Ρ 局大放示示 床及設i]可plfi以放再表表 成37裝 U 明 f^m 構樑， ，發 _ 圖圖圖圖圖 ^ 7^ 之 4 之 件戈 a ^ 1 2 3 4 5 組交16M 依 U 第第第第第 ] 卜發 圖 •ώ 金 _—_ _—. 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 522129 A7 _B7_ 五、發明說明（^ ) 第6圖僳表示第4圖床組件的背面圖。 第7圖傜表示左端床組件的平面圖。 第8圖係表示第7圖床組件的側剖面圖。 第9圖偽表示搬送車的正面圖。 第1 0圖傺表示第9圖搬送車的側面圖。 第11圖傺表示第1實施形態床構造的平面圖。 第12圖偽表示無菌室的平面圖。 第13圖傺表示第1實施形態搬送条統的側面圖。 第14圖偽表示第2實施形態搬送車的側面圖。 第15画像表示第14圖床組件的平面圖。 [參考符號之說明】 2 .....格柵床 3 .....格柵 7 .....搬送条統 8 .....台車 9 .....機殼 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製522129 A7 B7_ V. Description of the invention (f) [Technical field to which the invention belongs] The present invention relates to a bed on which a grid (lattice) is laid, and has a bed structure for laying a track for moving a trolley and forming the bed structure. Bed assembly and bed unit, and the transportation system of the bed structure. [Conventional technique] Generally, a bed in a sterile room is formed by laying a large number of grids on a concrete bed. In a sterile room, air is blown from the ceiling towards the bed. This airflow passes through the grille and flows into the exhaust duct arranged below the grille. The grill bed prevents air from stagnating, which contributes to the purification of the sterile room. In addition, unmanned transport vehicles (hereinafter referred to as "transport vehicles") are used as transport items in factories. The transport vehicle includes a tracked trolley that moves along a track such as a railroad track. If the trolleys are used for the transportation of articles in sterile rooms, it is possible to make the transportation operations unmanned in the semiconductor manufacturing process. [Problems to be Solved by the Invention] If a rail car is to be used for movement, a rail for the rail car must be laid. However, since the bed of the sterile room is formed by a grille as described above, it is necessary to perform a process such as cutting or welding on the grille. In addition, when the strength of the connecting part between the track and the grille is reinforced, or the track is buried in the bed for laying, so as to prevent the track from interfering with the walking of the operator, it is necessary to place a dedicated pillar on the concrete bed. Therefore, if the track is to be laid on the grid, large-scale engineering is required. In order to solve the above-mentioned problems, the first figure of the present invention is to provide a method for easily implementing the project of laying a rail of a trolley on a grill bed. 210 X 297 mm) ------ Γί ----,% (Please read the notes on the back before filling out this page) 1TW ---------- Line · Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employee Consumption Cooperative 522129 A7 _B7 V. Description of the invention (>) The bed structure for the track trolley forms the bed components and bed units used in the bed structure, and the transportation system of the bed structure. (Please read the precautions on the back before filling in this page.) The second object of the present invention is to provide a bed for rail-mounted trolleys that can easily implement rail laying and belt-laying when the rail-mounted trolley belongs to the belt moving driving method. A bed assembly and a bed unit for constructing and forming a bed structure thereof, and a transportation system provided with the bed structure. [Apparatus for solving the problem] In order to achieve the above-mentioned object, in the invention described in the first patent application scope, a grid bed having a plurality of grids having a predetermined shape is formed on the pavement, and a movement for moving the trolley is installed. In the field, the track is laid on the bed structure in its moving field. Most pillars support the grille. Most cross beams are supported directly or indirectly on pillars located in the mobile field. The cross beam crosses between the pillars in such a way as to cross the track. The rails are formed to connect the majority of rail components and are supported on cross beams. Most of the slabs are supported on the cross beams in the moving field and are arranged to fill the gap between the track and the grille. In the invention described in item 2 of the patent application scope, in the invention in item 1 of the patent application scope, the cross beam is directly supported by the pillar. The grids printed by the employees ’cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs are being used for profit. Please extend a bed to the central board. Shen Zhehe each emblem is in line with α. To be tied straight, to be shaped, so as to be shaped as a long edge of the track of the Ming Dao, the length of the edge is shown in the load field beam ruler self-reporting collar and the same cross-term terms moved by the same degree , Length 3, and the whole and the middle end plate and two beds surrounded by one, the shed fan-shaped beam number shape, the special fork multi-degree please ask 1, Zheng Changshen was supported by the fence The size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 522129 A7 B7 V. Description of the invention (4 The printing department of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The first fan belt wheel of the grille, Li Yili's fan Yiqi installed on the Doug bed on the Di Li belt parts special drive special belt drive, there are Zhang Rail and 2 on the special hanging leather group please Please bring a leather special bed with a bed, and if you have the first control, please move the bed. Shen Dao Shen Pi should ask the grid to install the C column. The column is installed to drive the drive. The pillars are supported by the movements, and the domains set in the pseudo, along the other branches, are structured, and the drive is combined into the Zhangbu, which is divided into 1 for the collar. The machine structure is to match the Ming Dao end of the Ming Dao for the Ming Dynasty to provide support for the starting machine and installation of hair, two long hair for the rail track and move the bag. The vertical position is supported, and the Tao of the road is issued along it. The column, material, and wheel of the wheel, the rails are loaded by the existing parts on the bed end track, the source record is set up by the load group. The number of 2 sets of one track The moving position of the multi-moving bed in the vehicle installation station of the Peili Station in the leather institute is the position of the moving element in the direction of the moving bed. 5, 6 at each end of the 7-lane driveway is the material of the first bed, the second, the second, the second, the second, and the second bed rail C bed ruler. The surrounding material bed surrounds its surroundings. The middle rail fence is equipped with 1 rail with the same side material Fan load bed 1 Fan Fa for Fan Fa to the special Fanming number Fange dynamic application group in the opposite bed Lee 1 1 For the inner bed, the second phase of the grid phase 2 special project is the special self-provisioned multi-band domain opposite end. The first item is in the configuration 1 and the first item is in the leather collar. Ruler and material and Shen 7 equipped with Shen Di Cheng Shen orbit machine Shen 1 degree The shape of the bed is the same as the bed material, and the surrounding shape is in place. The long shape makes the moving belt longitudinally have 1 bed circumference. (Please read the precautions on the back before filling this page.) This paper size applies to China National Standard (CNS) A4 specification (210 x 297 mm) 522129 A7 B7_ V. Description of the invention (4) and passive pulley for hanging the belt. (Please read the precautions on the back before filling this page) Apply for a patent The invention described in item 9 of the scope is that in the bed assembly described in item 7 of the scope of patent application, the trolley is provided with a power source for driving the belt, and the positioning mechanism includes a first bed material for adjusting the belt tension and fixed The tension adjusting device at one end of the belt and a fixing member which is attached to the second bed unit and fixes the other end of the belt. The invention described in item 10 of the scope of patent application is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, and a bed formed by a grille is provided on a grille supported by a plurality of pillars. The bed is configured to move a trolley driven by a belt. Sphere bed unit. The bed unit includes a track, most cross beams, most bed plates, and first and second bed components. It is formed to connect most of the track components to the track of mobile trolleys. Most crossing beams are directly or indirectly supported between the pillars to cross the track. Most of the slabs are supported on cross beams so that the gap between the ballast track and the grille is arranged. A pair of bed components includes a first bed material and a second bed material which are respectively arranged at both longitudinal ends of the rail. The first bed material has the same dimensions as the grille, and is supported by pillars at the longitudinal end of the rail. The second bed has the same dimensions as the grille, and is supported by pillars in the longitudinal direction of the rail and on the opposite side of the first bed. The positioning mechanism for positioning the belt is assembled on the first bed material and the second bed material. In the invention described in claim 11 of the scope of patent application, in the bed unit described in claim 10 of the scope of patent application, the positioning mechanism includes a drive pulley mounted on the first bed material for hanging the belt, and a drive drive The pulley is a power source that is installed on the first bed material and a passive pulley that is installed on the second bed unit and is used for hanging the belt. This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) 522129 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7_ V. Description of the invention U) The invention described in item 12 of the scope of patent application In the bed unit described in item 10 of the scope of patent application, the trolley is provided with a power source for driving the belt, and the positioning mechanism includes a tension adjusting device that is mounted on the first bed material to adjust the tension of the belt and fixes one end of the belt , And the second bed assembly of the device, and the fixing member for fixing the other end of the belt. The invention described in item 13 of the scope of patent application is to provide a grid bed formed by paving a plurality of grids having a predetermined shape. The grid bed is installed in a mobile area where a trolley is moved, and a rail transportation system is installed in the mobile area. . Most pillars support the grille. Most cross beams are directly or indirectly supported by pillars located in the mobile area. Its cross beam crosses between the pillars in a way that crosses the track. The track is formed by connecting most track components and is supported on the cross beam. Most of the slabs are supported on the cross beams in the aforementioned moving field, and are arranged to compensate the gap between the track and the grille. The invention described in item 14 of the scope of patent application is the invention described in item 13 of the scope of patent application. The belt for driving the trolley is stretched along the track. The longitudinal ends of the track are further supported by pillars. And 2nd bed components. The first bed unit is provided with a first bed material having the same size as the grille, and a power source for driving the drive pulley of the entangled belt to rotate. The power source is assembled on the first bed material. The second bed unit is provided with a second bed material of the same size as the grille, which is supported by a pillar in the longitudinal direction of the track, the opposite side of the first bed material, and a passive belt-mounted passive belt. Pulley. The invention described in item 15 of the scope of patent application is the conveyance system described in item 13 of the scope of patent application, and it is also equipped with a casing that covers the field of movement. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297). Mm) --------------------- Order --------- line (please read the precautions on the back before filling this page) 522129 A7 B7 V. Description of the invention (t Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy The number of borrowings is large and the bed forks cross the rails. The road is fixed here, and the group will be formed immediately. The cross grid support can be extended by the rails. ， 于 ， 装 边 ，， Hair will be equipped with Mingzhu Liangming to be clearly arranged in this gap Mingyi Mingming, Ming times the quilt. Hair support fork. Hair vertical hair grid due to hair distribution for several weeks Intersect to be constructed. End of the grid. The skin-like Ranji machine is used for loading the two-way track, which is carried along the species, and the track is recorded from the same net number of grids. Xiang Ding Qing Suo Ge Duo Jian Duo is in the position of the little track and the position of the position. The item of the 9 grid is moved to the item of the supplementary item. The item is covered by the item long beam ~ The grid is used to support the rails. 2 The bed is moved by 3. The middle is 4 parts. The first branch is used to supplement the first, the first central board is used first, and the first cross is used to fill the net area. The surrounding area is surrounded by a degree bed, and the surrounding area is equipped with a clear fan. . The long fan fork and its fan's fan motive. Fanzhe decimation end-loading. The internally beneficial rails are to benefit the more profit. The intersection is shifted by Li Liangli. The number of columns in the college is two. The pre-machines of the special fork special-type department are connected to the beam. Please support the board. Please submit the board to the requesting party. Therefore, the application of the vertical end of the beam bed Shencheng application makes the column that is cross-connected by the fork, and the shape of the fork depends on the two columns of the long-form. Fruit and fruit move toward the group of fruit road branches and π If the fork road is placed as long as the line is as long as the line is as large as the road is moved as if it is in the same way as the track: 3 Crossing the track carrying the straight side and a borrowed group track In the home (Please read the notes on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 522129 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7_ V. Invention Explain (7) the location. Therefore, the belt that moves the trolley is bridged in a state where it is positioned between the pair of bed components. In particular, according to the invention described in item 9 of the scope of the patent application, the belt tension for moving the trolley is positioned between the pair of bed components and the belt tension can be adjusted. According to the inventions described in claims 10 to 12 of the scope of the patent application, that is, a bed unit that is assembled according to necessary parts, it is simply implemented on a bed formed by a plurality of grilles supported by a plurality of pillars, and is installed as a belt-driven Engineering in the mobile field for trolley movement. According to the invention described in claim 13 of the scope of the patent application, the transport system is composed of a modularized bed unit and a bed unit, and a trolley provided thereon. The modularized bed unit and bed module can easily carry out the installation process of the transportation system. According to the invention described in item 14 of the scope of the patent application, if the trolleys with belt-driven drive systems are installed on the grille bed, the bed unit and bed assembly can be used to implement the track. Laying works and belt laying works. According to the invention described in claim 15 of the scope of patent application, the trolley moves in the moving area of the cabinet which is kept clean by the cleaning device. Therefore, the transportation system here can keep the goods carried by the trolleys clean. [Embodiment of the invention] The first embodiment of the present invention will be described with reference to Figs. 1 to 13 as follows: As shown in Fig. 12, the bed 2 of the sterile room 1 is composed of a square grid 3 (lattice). Formed. The length L of one side of each grille 3 is approximately -9- This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) ----------------- ---- Order · ---------- (Please read the notes on the back before filling this page) 522129 A7 _B7_ V. Description of the invention (J) (Please read the notes on the back before filling this page) 60cm . The clean room 1 is provided with equipment 4, 5 for semiconductor manufacturing, and a transportation system 7 for transferring goods 6 such as semiconductor wafers between the equipment 4 and 5. As shown in Fig. 13, the transport system 7 includes a transport vehicle 8 as a tracked trolley, a cabinet 9 and a control panel 14. The casing 9 surrounds the entire area where the transport vehicle 8 moves. The front and back of the cabinet 9 are conventionally formed of a transparent plate made of resin or glass so that the position of the lotus cart 8 or the working condition thereof can be seen from the outside. The cabinet 9 is generally formed by connecting a plurality of housing units 10 in the vertical direction. The width of one housing unit 10 is twice the length of one side of the pseudo-grid 3. A fan filter unit 11 as a cleaning device is arranged on the ceiling of each house unit 10. The fan filter unit 11 includes a fan and a filter (neither of which is shown). The air is purified by the filter and sent into the casing 9. By the fan filter unit 11, the cleanliness in the moving area of the conveying case 9, that is, the goods 6, is maintained higher than that of the outside of the case 9 in the aseptic room 1. Near the center in the longitudinal direction of the cabinet 9, a passage 12 and a door 13 for closing the passage 12 are arranged. The worker can pass through the casing 9 through the passage 12. In Fig. 13, the aforementioned control panel 140 is set on the right end of the case 9. The 4 control panel printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is controlled by 0 images and set to a y / 1 lotus. The application of C is 00, the actual car board is sent to the table, the instrument is divided into 3 grids and the grid is set in accordance with the domain. The 6 columns are mixed with 1 set of columns. Ο Show 16 columns. The number of columns is more than 11 and the length of a 16-column support on the side of C is supported by ΠΠΓ. It is on 3 grids. 0 The same paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 522129 A7 B7 V. Description of the invention (9 Printed drive belt along the edge of 20 such as the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy. Separate moving sideways are 18-moving, 21-moving, 19-cars, 22-moving, 24-moving, two-track, 26-wheel, 26-band, 26-band, belt number 21, bottom lotus, and rails and rails. Leather, leather and more} 18 relocation structure, 24 car cores, 26 moving guides, 18 guides, 3 guides, 8 »Use U, 22 motive wheels on each track Moved to the guide wheel at 13 rooms 28 equipped with M17 shifting car set to be guided by the installation of the U-frame U-cutting® rB1 wheeler to a fixed width of 26 and a skin size of 20 goods Drive the belt. The square four-type mounting rail 27 is carried by the two guides. The end of the wheel is belted. The car is turned to the side and the 22-bit guide is 4M25 on the guide. The belt is made of 8 two on the rack of the car return. The surface of the rail is 24 wheels. It is used to transport the car. The 22-turn car is used to guide the lower side of the ditch to guide the side into the moving side frame. Cover frame 11-Moved and moved by Yugogok 25's tool 21 on the top and g on the back-with the moving type fixed horse 20, with wheels, supporting four g belts _ on 19, Opposite movement. Fang Guyi ~ Shows 24 weeks. Shows 2 of 27. Leather. 2 of 3 wheels are shown, 20 of the 17 wheels are located outside, 8 movements, 20 belts and 2 belts are shown, Road end, bitmap of the wheel map and car pairs, and the track rolls show the wheel bed, Pig 0P, 19 tracks, two moving belts, 10 with 25 sides, 11 and lotus belts with 26, which are guided by 10 Drive the skin, four. Under the wheel, move the rail map between the inductive positions, 10018821 were 9 each. Participate in the 10th move with U, the 9th type, and the belt, the 25th fourth center set along the 20th side and the 17th side of the side to send the pima outside the wheel. The surface is applied, For example, the 9¾ wheel, the lower end is moved by a moving wheel. If this guide is set, the upper and inner bands of the perimeter line shall be 19 bands and bottom bands (please read the precautions on the back before filling this page). (210 X 297 mm) 522129 A7 _B7 V. Description of the invention (t. ) On the shelf 22. A tray 29 for placing the goods 6 is arranged on the upper portion of the shelf 28. In Fig. 13, the right end and the left end in the casing 9 are provided with a pile 30 for detecting the presence or absence of an operator or a foreign object in a moving area. Since the shelf 28 is formed in a frame structure, the detection light emitted from the sensor 30 is not blocked by the shelf 28, but can pass through the gap between the frames of the shelf 28. ΗRefer to Figures 1 to 8 and Figure 11 to explain the bed structure in the mobile area as follows: As shown in Figure 11, the bed in the mobile area replaces the grille 3 and is equipped with a bed unit 31. The bed unit 31 includes a moving bed provided with rails 26 and 27. The moving bed is supported on a pillar 16 to support the adjoining grille 3. The bed unit 31 傺 is composed of a group of components for constructing the track area for laying the tracks 26 and 27, and a set of bed components 33 and 34 arranged at both ends of the track area for the installation of the belt 21. The group of components used for the construction of the track area includes a cross beam 37, a guide rail assembly 38, a moving rail assembly 39, and a bed 40. Each (please read the precautions on the back before filling out this page) The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed on the belt 36, shaped solid leather material l / r, / L3 3 33 The grid group and inch l6a of the figure from the bed will be 23 feet and tl. Datong is like !!. , Each with a horse. It holes are equipped with a 3-hole needle plug to measure the screw size of the grid needle ao, the physical size of C is 1 3, and the element display grid is a. Each CO is in the single grid. 3 2 The pieces are inserted in a wheel shape at the crotch a of the duo inch group. The 16 screw regions on the four ends of the long skin are the same. Move the upper pin. Tao phase element is 3's. Screws 16 rails 3 single grids 16 holes to make the column view grid mounting grid bolt side support grid 17 body on the support screw surface in groups and wheels one set the paper size applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) 522129 A7 _B7_ V. Description of the invention (^) Here, please refer to Figures 1 to 3 to explain the bed structure of the track area. The cross beam 37 is approximately the same length as one side of the grille 3. As shown in Figs. 1 and 11, most of the cross beams 37 are transversely bridged between the pair of pillars 16 in the track area. Each of the crossing beams 37 is arranged so as to cross the moving rail (in this example, it is at a right angle to the moving rail). Each of the rail assemblies 38, 39 and the bed plate 4Q 'is attached to each of the cross beams 37 in a supported state below. The length of the long side of the bed board 40 is twice the length L of one side of the grate grille 3 (2L). Since the length of the long side of the bed plate 40 is a natural multiple of the length of one side of the grille 3 (n XL · :, η is a natural number), the bed plate 40 can be fixed to the cross beam 37 with bolts at both longitudinal ends. . The length of the short side of the bed plate 40 is set to the length of one side of the grille 3, and the half of the total width of the three rail assemblies 38 and 39 is subtracted. Therefore, the bed plate 40 can fill the gap between the track assemblies 38,39. On the one hand, the length of each of the rail assemblies 38 and 39 is 4 times (4L) the length of one side of the grille 3. It is also possible if the length of the track assemblies 38, 39 is several times the length of one side of the grille 3, although it is not 4 times. The length of the rail assembly 38 and the length of the rail assembly 39 may be the same or different. A large number of circular holes 4Ga are formed in the bed plate 40. At the bottom of the guide rail assembly 38, circular holes 3 8 a are formed at regular intervals. Through the circular holes 40a and 38a formed in the bed plate 40 and the guide rail assembly 38, the blast air from the fan filter unit 11 can flow into the exhaust duct through the moving bed 32 without staying. Moreover, the round hole 38a of the guide rail assembly 38 can avoid ash. 13- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------ * ------ — (Please read the precautions on the back before filling out this page) Order " --------- Line · Printed by the Consumer Consumption Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 522129 A7 _B7_ V. Description of Invention (, >) Dust accumulates on the bottom of the rail assembly 38. 2 and 3 are sectional views of the moving bed 32. FIG. Two pin holes 37a are formed at both ends of the cross beam 37, respectively. The pin 16a of the pillar 16 is inserted into the pin hole 37a of the cross beam 37. The bolt 41 is screwed into the bolt hole of each needle 16a from the upper side of the cross beam 37. Therefore, the cross beam 37 is fixed to the pillar 16. The head of the bolt 41 is buried so as to be flush with the upper surface of the convex portion 37b formed on the upper surface of both ends of the cross beam 37. The convex portion 37b is fitted into a concave portion formed on the back surface of the moving rail unit 39. The moving rail unit 39 contacts the entire upper surface of the convex portion 37b, and is horizontally arranged as shown in FIG. 2, and a concave portion 37c is formed in the center of the cross beam 37. The guide rail assembly 38 fits into the recess 37c. As shown in Figs. 1 and 2, each of the rail assemblies 38 and 39 is fixed to the cross beam 37 by bolts 4 2 and 4 3. Moreover, the width of the two cross beams 37 respectively disposed at both ends of the track area, 傺 other. The cross beam 37 is half the width. The bed board 40 has two side surfaces bent at right angles downward. A large number of cylindrical support portions 40b are welded to the back surfaces of the longitudinal end portions of each bed plate 40. Because the bolt 44 is inserted into the 4Gb hole of the support part, it is screwed to the cross beam (please read the precautions on the back before filling out this page) Degree control electricity ,,. Vulgarity is shown 17 17 3. The wheel set of Liang Ding e used a picture belt to fork gauge 37 machine. -6 skins must pass through the holes to support the electric drive. The first drive of the Wei Weitong branch and so on, such as, 45. And this or pass. 23 yuan, 37 pieces, two-instrument, and a single beam, which should be shaped by a horse-shaped fork. {^ CD's matching drop 4 Intersection 3734 installed ~ 1. Due to the holes of the track, the body fan, and the along the pass 33 一 风 固 d, move the bed with the first and the pre-40 beams of the 3 3 groups, the board has a fork to move in the Ming 3518 bed, cross the 8 line, say the wheel, and each car number bed When sending the end cover 37, the paper size of the guide is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 522129 A7 B7 V. Description of the invention (ο) End material 3 5 僳 and grille 3 same size. Four pinholes of the right side bed material 3 5 form the same pinholes (not shown) as the grille 3. Insert it into the pinhole of the right side bed material 35 (please read the precautions on the back before filling this page). Since the bolt B is screwed to the bolt hole of the needle 16a from the upper side of the right end bed material 35, the right end bed assembly 33 is fitted to the stay 16. The motor 23 is supported on the upper surface of the bed material 35 via a support material 46. The drive pulley 17 is mounted on a drive shaft of the motor 23. The bed material 35 has a notch 35 a, and the notch 35 a is continuously connected to the recess of the guide rail 26. The upper guide pulley 18 is rotatably supported by the support portion 47. The lower guide pulley 19 is rotatably supported by the support portion 48. A part of the lower guide pulley 19 is located in the notch 3 5 a. A large number of circular holes 35b are formed in the right end bed material 35. Two support arms 49 are mounted on the right end bed material 35. The cover 50 is supported by two support arms 49, and covers the stirrup 23, the pulleys 17-19, the fan filter unit 45, and each circular hole 35b. With the movement of the stirrup 23 or each of the pulleys 17 to 19 and the belt 21, the dust generated in the cover 50 is discharged by the fan filter unit 45 under the bed material 35. In addition, the guide pulley 18 is omitted in FIG. 6. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Next, the left end bed assembly 34 will be described. As shown in FIGS. 7 and 8, the length of one side of the left end bed material 36 is the same as that of the grille 3. In the left end of the bed material 3 6, pinholes (not shown) similar to the grille 3 are formed. The left end bed assembly 34 is assembled on the stay 16 by inserting the needle 16 of the stay 16 into the pin hole of the left end bed 36, and screwing the bolt B to the needle 16a from the upper side of the bed 36. The left end bed material 36 has a notch 36a extending to connect with the recess of the guide rail 26. A large number of circular holes 36b are formed on substantially the entire surface of the left end bed material 36. -1 5- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 522129 A7 B7 V. Description of the invention (4) (Please read the precautions on the back before filling this page) On the bed material 36 Underneath, a support portion 52 is installed to support the passive support pulley 20 in a rotatable manner. A part of the passive pulley 2 ϋ is arranged in the gap 3 6 a. The uppermost portion of the passive pulley 20 is located at approximately the same height as the lowermost portion of the guide pulley 18 of the right end bed assembly 33. The lowermost portion of the passive pulley 20 is located at the same height as the lowermost portion of the guide pulley 19 of the right end bed assembly 33. Therefore, the belt 21 located on the upper side and the belt 21 located on the lower side extend parallel to each other. A cover 53 covering the passive pulley 20 is attached to the left end bed material 36. The dust in the cover 53 generated in the sliding part of the passive pulley 20 or the belt 21 is guided by the cover 53 to the lower side of the bed material 36. In addition, the belt 21 is omitted in FIG. 7. The moving bed 32 provided with the transport system 7 is assembled as follows: Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Each cross beam 37 is bridged between the pillars 16 of the corresponding track area, and is fixed to the pillars 16 by the method described above. The projections 37b at both ends of each of the cross beams 37 are fitted into the respective moving rail assemblies 39. A predetermined number of moving rail assemblies 39 are connected in a row to form a moving rail 27. The guide rail assembly 38 is fitted in the recess 3 7 c located at the center of each cross beam 37. A predetermined number of rail assemblies 3 8 are connected in a row to form one rail 26. The rail assemblies 38 and 39 are fixed to the cross beams 37 using a plurality of bolts 42 and 43. A large number of bed plates 4G are paved in the two rows of gaps formed between each of the moving rails 27 and the guide rails 26. Each bed plate 4 G is fixed to each cross beam 37 with bolts 4 4. Secondly, two-bed assemblies 3, 3 and 4 are assembled at the right and left ends of the moving field. The pin holes 16 of the pillar 16 are respectively inserted into the pinholes of the four sheets of the bed material 3 5 and 36. From the upper side of the bed material 3 5, 3 6 screw the bolt B to the bolt hole of the needle 16 a-1 6-This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 522129 A7 B7_ 5. Description of the invention (β) (Please read the notes on the back before filling this page). Therefore, the two bed materials 3 5 and 3 6 are fixed to the pillar 16. Because the bed components 33, 34 and the bed materials 35, 36 are assembled in advance and integrally assembled with various components required, the two bed components 3 3, 3 4 are assembled only by installing the bed materials 3 5, 3 6 on the pillar 1 6 Assignment. This completes the assembling operation of the moving bed 32. The process of installing the belt 21 on the moving bed 32 is performed by pseudo-removing a row of bed plates 40 arranged between the guide rail 26 and the one-side moving rail 27. The operation of fixing the belt 21 to the transport vehicle 8 is performed by removing a part of the floor board 40. The process of wiring electric wires or signal wires to the back of the moving bed 32 is performed by pseudo-removing a row of bed plates 40. For maintenance of the transport vehicle 8, check the electric wires arranged on the back of the moving bed 32. When replacing the belt 21, the number of sheets arranged between the guide rails 2 6 and the one-side moving rails 2 7 is removed when the belt 2 1 is replaced. Just fine. At this time, since the length of the bedboard 40 is 2L, which is twice the length of one side of the grille 3, it can be resolved by a small number of removals when the grille 3 is removed. Further, since the bed base 40 傺 and the track assemblies 38, 39 are separate components, they are lighter. Therefore, the removal operation of the bed board 40 is easy. According to the first embodiment, the following effects can be obtained. (1) In the bed structure of the present invention, the rails 26, 27 can be laid because the bed 16 for the grille is equipped with the components of the bed unit 31. Therefore, the process of laying the guide rails 26 and the moving rails 27 for moving the transport vehicle 8 on the bed 2 can be easily performed. (2) A plurality of rows of cross beams 37 intersect with the moving rails. The cross beams 37 are bridged between the pillars 16 and the rail assemblies 38, 39, and the floor plates 40 are supported by these cross beams 37. Therefore, the track assemblies 38, 39 and the bedboard 40 -1 7-This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 522129 A7 B7_ V. Description of the invention (4) For the heavy load energy from above Firmly supported. (3) Since the convex parts for assembling the rail assemblies 38 and 39 are formed on the cross beam 37 (please read the precautions on the back before filling in this page) 37b and the concave parts 37c, the rail assemblies 38 and 39 only fit into these convex parts 37b. Or the simple operation of the recessed portion 37c can be arranged at the correct position. (4) The length of the long side of the bed board 40 is generally a natural multiple of the length L of one side of the grille 3. Therefore, both end portions of the floor board 40 are arranged on the cross beam 37 and fixed to the cross beam 37. Therefore, even though a heavy load acts on the upper surface of the moving bed 32, the moving bed 32 can be firmly supported. In particular, since the length of the long side of the bed plate 40 in this embodiment is twice the length of one side of the grille 3, the number of the bed plate 40 used can be reduced. Therefore, the time required for the installation work and the removal work of the bed board 4 can be reduced. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (5) The area of the moving bed 32 is set in the area of one row of the grille 3. The area width corresponds to the interval between the pillars 16. The guide rail 26 is arranged at the center of the area width of the moving bed 32. In addition, two moving rails 27 are arranged at both ends of the area. In addition, since the widths of the guide rail 26 and each of the moving rails 27 are the same, the bed plate 40 disposed between the guide rails 26 and each of the moving rails 27 can be solved by one component having a single size. Therefore, the manufacturing cost of the bed board 40 can be reduced. In addition, during the installation of the bed board 40, the time required to compare the components can be saved, and the installation work can be smoothly progressed. (6) The bed board 40 is arranged in two rows on both sides of the guide rail 26. Therefore, by removing only a single number of sheets of the bedboard 40 on one side of the guide rails 26, it is possible to perform maintenance of electric wires or the replacement of the belt 21 on the back of the moving bed 32. Moreover, the bedplate 40 pseudo and track components 38 and 39 are additional components. Because -1 8-this paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) 522129 Α7 Β7 V. Description of the invention (π) Since it is lightweight, it is easier to perform the removal operation than the grille 3. (7) The lengths of the track assemblies 3 8 and 39 are naturally multiples of the length of one side of the grate grille 3 and are longer than the length of the long side of the bed board 40. Therefore, there are fewer joints of the track assemblies 38 and 39, and it is possible to reduce the movement of the transport vehicle 8 which is likely to occur at these joints. (8) The right end bed assembly 33 includes a motor 23 and a drive pulley 17 which are pre-assembled on the bed material 35. The left end bed assembly 34 has a passive pulley 20 which is pre-assembled on the bed material 36. That is, the right-end and left-end bed assemblies 33 and 34 are provided in advance as a unit with various components necessary for setting the belt 21 along the guide rail 26. The right and left end bed assemblies 33, 34 'are included as constituent components of the bed unit 31. Therefore, the time and labor for assembling the moving bed 32 can be simplified. (9) The casing 9 and the transport vehicle 8 cover the moving area together. The housing 9 is provided with a fan filter unit 11 for increasing the internal cleanliness from the cleanliness of the sterile room 1. Therefore, the goods 6 such as semiconductor wafers are transported under clean air. As a result, the yield of the manufactured semiconductor wafer and the like is improved. (10) Since the transport vehicle 8 is driven by a belt moving drive, components of the drive system such as the motor 23 are arranged at a position away from the transport vehicle. Therefore, contamination of the cargo 6 caused by the dust generated from the sliding portion of the components of these driving systems is reduced. (11) Since the passage 12 is installed in the casing 9, the operator can traverse the casing 9. Therefore, despite the structure in which the moving area of the transport vehicle 8 is covered with the casing 9, it is possible to minimize the obstacles to the passage of workers. (12) Due to the pseudo-frame structure of the shelf 28 of the transport vehicle 8, it is installed at -1 9- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) — — — — —----- -% (Please read the notes on the back before filling this page) Order '----. ----- line «Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 522129 A7 B7_ V. Description of the invention (J) The detection light of the sensors 30 at both ends of the mobile field can pass between the frames. Therefore, it is possible to surely detect that an operator or a foreign object enters the mobile area. (Please read the precautions on the back before filling out this page.) (13) Most of the circular holes 4Ga are formed on the bed 40. Moreover, a circular hole 38a is also formed in the bottom surface of the guide rail assembly 38. Therefore, the air flow from the ceiling to the bottom does not stagnate and can pass through the bed 2. As a result, the dust generated above the bed 2 is smoothly sent to the exhaust duct below the bed 2 together with the air flow. In addition, although the guide rail assembly 38 is groove-shaped, dust does not easily accumulate in the groove. Therefore, cleanliness in the mobile field can be maintained. (2) The second embodiment of the present invention will be described with reference to Figs. 14 and 15 as follows. Regarding the same configuration as that of the first embodiment, the same reference numerals are attached and the description is omitted. In the second embodiment, the motor 61 is mounted on the frame 22 of the lotus car 8. A drive pulley 62 is attached to a drive shaft of the motor 61. The belt 21 guided by the two guide belt pulleys 63 is wrapped around the drive pulley 62. Both ends of the belt 21 are fixed to the bed surfaces at both ends in the longitudinal direction of the rail. The four wheels 24 are placed on two moving rails 27 and roll along the moving rails 27. A guide wheel 6 4 mounted on the bottom center of the frame 2 2 rolls along the guide rail 2 6. When the motor 61 is driven, the transport vehicle 8 moves along the guide rails 26 and 27 toward the end of the belt 21. Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The bed structure 傺 of the second embodiment in the track area is the same as the first embodiment, and is composed of a cross beam 37, track assemblies 38, 39, and a bed 40. The bed assemblies 6 5 and 6 arranged at both ends of the track area are preassembled as a mechanism for fixing the ends of the belt 21. The left end bed assembly 65 is provided with a left bed material 67, a left bed material 67 series, and a grille of 3 phases-20. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) 522129 A7 _B7_ V. Description of the invention ( β) have the same size and have pinholes (not shown) for the pins 16 of the pillars 16 which are the same as the grille 3 on the four sides. On the left bed material 67, a fixing member 68 for fixing the left end portion of the belt 21 is assembled. The right end bed assembly 66 is also provided with the right bed material 6 9 which is the same as the left bed material 6 7. A plurality of circular holes 69a are formed in each of the bed materials 67, 69. The right bed material 69 includes a tension adjusting device 70 that fixes the right end portion of the belt 21 and adjusts the tension of the belt 21. As shown in the fifteenth picture, the tension adjusting device 70 is provided with a cylinder and a ratchet mechanism 72 which can be wound around the belt 21. The right end of the belt 21 is fixed to the cylinder 7 1. The ratchet mechanism 72 allows the cylinder 71 to rotate in the direction of winding the belt 21 and restricts the cylinder 71 to rotate in the direction of unwinding the belt 21. The ratchet mechanism 72 includes a ratchet gear 73 capable of rotating integrally with the cylinder 71, and a locking claw 74 capable of engaging with the ratchet gear 73. The rotation shaft 75 of the cylinder 71 is supported by a support base 76. The operation guard 7 7 is provided at the end of the rotary shaft 7 5 in its usage fashion. The support base 76 has a plurality of long holes 80 for inserting the fixing bolts 79. The long hole 80 and the extension line of the rail 26 are formed in parallel. The support base 76 is fixed to the upper surface of the bed material 69 by fixing bolts 79. If the fixing bolt 79 is loosened, the support table 76 can slide on the bed material 69 along the long hole 80. The support portion 69b is fixed to the bed material 69. Adjusting bolt 78 connects the support 69b and the support (please read the precautions on the back before filling this page) The snail return and the next call are assigned to its turn 2. Pull back the lacing extension, according to the pila behavior, exercise in the space force, that is, the state of tension, the distance from 79 to the state of the knot 21, the return of the bolt 13 13 7 7 7 with a leather bolt tube. Spiral teeth fixed. Use the wheel to adjust her slip and loosen 76 micro-solid, to relax with the platform 7721 by the support of the loose rod to lend support for skin. When the fruit was transferred, 7678 was returned to this Taiwanese inspection 7. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 522129 A7 B7 V. Description of the invention Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed a sheet of 38 decently, and here is where the group is planted The essential parts are assigned a worker, such as a road-shaped group. This group of cars can be installed in 21 groups. For example, 3 square rails or rails are used for off-track lanes. The structure of the bed, the installation of the grid can be installed into the track, the leather rail 31 fruit loading machine dynamics are also installed in the fork set, the fruit is installed 37 single-tune, the element effect section of the transfer path to its configuration is simple This beam micro 37 single call facility rails share road 37. With. The shape of the beam-shaped test bed 16 of the partial rail beam which is solidified by the position of the fork beam is formed by a cross-shaped fork with a tension of 3 2. The example of a shaped column can be supported by the intersection of 71 and the upper part of the curved section of the tension zone. It is also made from 69 knots and curved tracks and using Italian yuan in the square convex gap. 661 Tune Field 1 uses the track 37C's or indirect one-way single state. The 21st bed is currently adopted on the beam line. A bed that can be fastened. The band on 2-deformation 65 lies in the shape of the fork, and it is still moving. It becomes -2, and the application is added with 66 skins. The line support rail can be moved, and the two-bed state group will write the number of tracks that are not tracked into a line to drive the 6540 screw-shaped bed. Ming's drive and plate are more than 40 lines. In the industry: In addition to making the connection like the 34 bed section of the wheel, the board does not need to be disassembled to cross the shape of the tube trolley and adjust the outer bed. The effect is as straight as a field beam. Take shape. The Tao makes 3339 turn this, and 4) because of 3. The cross-over rails in the exception area, the rails reach parts, and return. 39 in the next (1, this change is taken, the Quyou Arima group is described at the time of submission. 38 The bedding set that can be loaded on the piece by force and in a formal way (please read the precautions on the back before filling out) (This page) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 522129 A7 _B7_ V. Description of the invention (^) The cross beam 3 7 does not need to be arranged between all the pillars 1 6 along the moving field. Depending on the weight of the support, it can be arranged at any interval. (Please read the precautions on the back before filling this page.) The cross beam 37 is not directly installed on the pillar 16 but is installed on the pillar through another cross beam for support. 16 is also possible. That is, the supporting cross beam pair is parallel to the track and is opposed to each other between the two pillars 16. The cross beam 37 is bridged between the supporting cross beams. Therefore, The cross beam 37 is arranged in a direction intersecting with the moving rail. According to this structure, the cross beam 37 can be arranged shorter than the pitch between the pillars. Therefore, although the strength of the bedboard is weak, it is because of the short interval from the bottom. Supported by more cross beams 37 The desired strength can be ensured by the bed 2. In addition, since the length of the bed along the rail, as long as both ends are positioned above the cross beam, it is not necessary to set it to a natural multiple of the length of one side of the grille 3. Omit It is also possible to use only one guide rail for two moving rails. At this time, the wheels roll on the grille or the bedboard. On the bedboard, if the round hole is not formed in the area contacting the wheel, the transport vehicle can be smoothly Move. Omit the guide rails and use only two moving rails. If it is printed by a consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, it is necessary to set a guide for the preparation of the guide. Wide C, the surface of the color shift bed in the central moving belt plate, or the beam with a fork, magnetic rail crossing and pasting. It is used to determine the phase limit of the track movement such as track sticking. When setting the bed, first use the spacer type to pre-collect the two or only set the force, the same magnetic field of the road, and the time of the rail does not depend on the car's guide surface. And the wide paper size applies Chinese national standards (CNS ) A4 size (210 X 297 (Mm) 522129 A7 _B7 V. Description of the invention (P) The width of the moving area across the cross beam is not limited to the width of the grille 3. The width of the moving area depends on the wheel of the rail trolley (carriage). The track width can also be the width of the grille as a majority. For example, the grille covering a large number of rows can be laid for each grille row. At this time, the width of the bed plate (the direction of the direction crossing the moving rail Length) may be longer than the length of one side of the grille 3. In the bed structure of the belt-moving bed for rail trolleys, the bed assemblies 33, 34, 65, and 66 are not used; instead, the cross beam 37 and the track assembly 38 are used. 3 9 and the bed board 4 Q only lay the track area of the moving bed. Therefore, a mounting bracket or the like is used for the grille 3; and a structure for directly installing a belt pulley or a motor required for mounting the belt may be used. The present invention can be embodied for a grill bed other than a sterile room. For non-belt mobile drive tracked trolleys, it is assumed that the bed components are removed (please read the precautions on the back before filling out this page). The C 16 grid of the bed printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy The surface is flat. Into the set. The drawing inserts and creates the drawing surface C, which is cut through the track bed and cut through the track bed. The surface is only a drawing section, the car-shaped construction surface side bolt C platform construction bed flat screw can be used for the real bed drawing of the rails 1 Figure 2 Group 4-so that there is also the first group bed -2 No. 16 will show the bed chart C 3 column row indicates the end of the table 4 yuan grid support ^] part of the table to the right of the first cell at 1 Jan P Bureau display bed and set i] can be plfi to put the table into 37 pieces of U-shaped f ^ m beams, 发 _ 图 图 图 图 图 图 ^ 7 ^ of 4 pieces a ^ 1 2 3 4 5 Group 16M according to the first U] [Futu] • Gold _—_ _—. This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) 522129 A7 _B7_ V. Description of the invention (^) Figure 66 shows the rear view of the bed assembly in Figure 4. Figure 7 (a) shows a plan view of the left end bed assembly. Fig. 8 is a side sectional view of the bed assembly of Fig. 7; Fig. 9 is a front view of the transport vehicle. Fig. 10 (a) shows a side view of the transport vehicle of Fig. 9. Fig. 11A is a plan view showing the bed structure of the first embodiment. Fig. 12 is a plan view of a sterile room. Fig. 13 (a) is a side view of the transport system according to the first embodiment. Fig. 14 is a side view schematically showing a transport vehicle according to a second embodiment. Fig. 15 is a plan view of the bed unit of Fig. 14. [Explanation of reference symbols] 2. . . . . Grill bed 3. . . . . Grille 7. . . . . Delivery system 8. . . . . Trolley 9. . . . . Chassis (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs
7 8 1X 風支驅 元 單 器 滴 過 被皮馬導 輪罾輪 帶^帶 導 皮：!皮 扇柱動.¾動帶逹軌 輪 本紙張尺度適用中國國家標準（CNS)A4規格mo X 297公釐） 522129 A7 _B7 五、發明說明（4 ) 經濟部智慧財產局員工消費合作社印製 2 7... • •移 動 用 軌 道 3 1... • •床 αα 早 元 3 3... • •右 1U1S m 床 組 件 3 4... • •左 端 床 組 件 3 5... • •右 端 床 材 3 6... • •左 X1U 床 材 3 7... • •交 叉 樑 3 7b.. ..·凸部 3 7c.. ..·凹部 38… • •導 軌 組 件 3 9... • •移 動 用 軌 道 組件 4 0... • •床 板 65… • •左 端 床 組 件 6 6... • •右 rrfr 端 床 組 件 6 7... • •左 I.Tfy 端 床 材 68… …固 定 構 件 6 9... 端 床 材 7 0... • •張 力 調 整 裝 置 6 2 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐）7 8 1X Single unit of wind-driven drive unit is passed through the Pima guide wheel 罾 belt ^ belt guide:! Leather fan column moves. ¾ moving belt 逹 track wheel This paper size applies to China National Standard (CNS) A4 specifications mo X 297 mm) 522129 A7 _B7 V. Description of the invention (4) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2 7 ... • • Track for mobile 3 1 ... • • Bed αα Early Yuan 3 3 ... • • Right 1U1S m bed component 3 4 ... • • Left end bed component 3 5 ... • • Right end bed material 3 6 ... • • Left X1U bed material 3 7 ... • • Cross beam 3 7b. .. · convex part 3 7c .. .. · concave part 38… • • rail assembly 3 9 ... • • moving rail assembly 4 0 ... • • bed base 65… • • left end bed assembly 6 6 .. • • Right rrfr end bed assembly 6 7 ... • • Left I.Tfy end bed 68 ...… fixing member 6 9 ... end bed 7 0 ... • • tension adjustment device 6 2 (please first Read the notes on the reverse side and fill in this page) This paper size applies to China National Standard (CNS) A4 (210 x 297 mm)