JP2018193222A - Storage system - Google Patents

Abstract

To provide a storage system which can suppress a fall of articles placed in storage parts by a simple constitution.SOLUTION: A storage system 1 comprises: a traveling rail 2 in which a plurality of first rails 21 extending to a first direction D1 and a plurality of second rails 22 extending to a second direction D2 are arranged in a lattice shape on the same horizontal plane; bogies 3; and storage parts 4 which are arranged at a lower side of the traveling rail 2, and in which FOUPs 9 are placed. A plurality of third opening regions 2c surrounded by a pair of the first rails 21 and a pair of the second rails 22, and having magnitudes for allowing the passage of the FOUPs 9 in a vertical direction are formed at the traveling rail 2. The storage parts 4 are constituted so that the placed FOUPs 9 are located in the third opening regions 2c when viewed from a vertical direction, and the placed FOUPs 9 are overlapped on the first rails 21 and the second rails 22 when viewed from a horizontal direction.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a storage system.

  For example, as a storage system applied to a transfer device in a semiconductor manufacturing factory, a traveling rail having a plurality of rails arranged in a grid on the same horizontal plane, and a carriage that travels on the traveling rail and holds and lifts articles There is known a system that includes a storage unit that is disposed below the traveling rail and on which articles are placed (see, for example, Patent Document 1). In such a storage system, the carriage delivers articles to the storage unit through an opening area provided between the rails.

International Publication No. 15/174181

  In the storage system as described above, it is required to prevent the article placed on the storage unit from falling. Therefore, for example, there may be a case where a separate fence is provided between the storage unit and the traveling rail to prevent the article from falling. However, in this case, the configuration of the storage system becomes complicated.

  Then, an object of this invention is to provide the storage system which can suppress the fall of the articles | goods mounted in the storage part with simple structure.

  The storage system of the present invention has a plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction, the plurality of first rails and the plurality of rails A traveling rail in which the second rail is arranged in a grid on the same plane, a traveling section that travels the traveling rail in each of the first direction and the second direction, and a transfer that holds and lifts the article. And a storage unit provided on the lower side of the traveling rail and having a placement surface on which articles are placed. The traveling rail is adjacent to a pair of first rails adjacent to each other. Surrounded by a pair of matching second rails and provided with a plurality of opening areas each having a size allowing articles to pass in the vertical direction, the storage unit is placed when viewed from the vertical direction. So that the article placed on the surface is located in the opening area, One, when viewed from the horizontal direction, as mounted on the mounting surface article overlapping with the first rail and second rail are constructed.

  In this storage system, when viewed from the vertical direction, the article placed on the placement surface of the storage part is placed in the opening area, and when viewed from the horizontal direction, the storage part is placed. The storage unit is configured such that the article placed on the surface overlaps the first rail and the second rail. For this reason, the movement of the article placed on the placement surface in the horizontal direction is restricted by the first rail and the second rail. That is, the first rail and the second rail also serve as a configuration for suppressing the falling of the article from the storage unit. Therefore, according to this storage system, it is possible to suppress the fall of the article placed on the storage unit with a simple configuration.

  In the storage system of the present invention, each of the space between the placement surface and the first rail and the space between the placement surface and the second rail has a size through which articles cannot pass. May be. According to this, the fall of the articles | goods mounted in the storage part can be suppressed more reliably.

  In the storage system of the present invention, the traveling part includes a main body part and a plurality of wheels that are provided so as to protrude downward from the main body part and roll on the tread surface of the traveling rail, and the storage part is a mounting surface. So that the upper end of the article placed on the placement surface is lower than the lower end of the main body part of the traveling part traveling on the traveling rail, and the upper end of the article placed on the placing surface is You may be comprised so that it may be located above a tread surface. According to this, since the upper end of the article placed on the placement surface is located below the lower end of the main body portion of the traveling unit, the article placed on the storage unit passes above the article. Interference with the carriage can be prevented. Moreover, since the upper end of the article placed on the placement surface is positioned above the running surface of the traveling rail, the distance between the placement surface and the traveling rail can be shortened in the vertical direction. Therefore, when delivering the article to the storage unit, the distance that the transfer unit moves the article up and down can be shortened, so that the time required for delivering the article can be shortened.

  In the storage system of the present invention, the storage unit may include a positioning unit for positioning an article placed on the storage unit with respect to the storage unit. According to this, the article can be placed at an appropriate position in the storage unit.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible with the simple structure to suppress the fall of the articles | goods mounted in the storage part.

It is a top view of the storage system of one embodiment. It is a partially expanded view of the storage system of FIG. It is a front view of the rack unit with which the storage system of FIG. 1 is provided. FIG. 4 is a bottom view of the rack unit of FIG. 3. FIG. 4 is a side view of the rack unit of FIG. 3.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or equivalent part, and the overlapping description is abbreviate | omitted.
[Storage system configuration]

  As shown in FIGS. 1 and 2, the storage system 1 includes a traveling rail 2, a plurality of carriages 3, and a storage unit 4. The storage system 1 is laid above a plurality of semiconductor processing apparatuses 10 each having a plurality of apparatus ports 8 in a semiconductor manufacturing factory. The storage system 1 temporarily stores a FOUP (Front Opening Unified Pod) 9 in which a plurality of semiconductor wafers are accommodated. More specifically, in the storage system 1, the FOUP 9 is transported between the storage unit 4 and the device port 8 by the carriage 3 traveling on the traveling rail 2, and the storage unit 4 FOUP 9 (before supplying the FOUP 9 to the device port 8). The FOUP 9 and the FOUP 9) collected from the apparatus port 8 are temporarily stored. For example, the FOUP 9 is carried into or out of the storage system 1 by OHT (Overhead Hoist Transfer). The OHT travels along a track laid between the storage system 1 and the ceiling of the semiconductor manufacturing factory.

  The semiconductor processing apparatuses 10 are arranged in a plurality of rows (two rows along the first direction D1 in FIG. 1) below the traveling rail 2. Each semiconductor processing apparatus 10 is disposed in a direction in which the apparatus ports 8 face each other in a pair of adjacent rows. When the FOUP 9 is supplied to the apparatus port 8 of the semiconductor processing apparatus 10 by the carriage 3, the semiconductor wafer accommodated in the FOUP 9 is taken into the semiconductor processing apparatus 10. Then, after the semiconductor wafer is subjected to a predetermined process in the semiconductor processing apparatus 10, it is accommodated in the FOUP 9 again. As a result, the FOUP 9 can be collected and transported by the carriage 3.

  The traveling rail 2 has a plurality of first rails 21 and a plurality of second rails 22. Each first rail 21 extends linearly in the first direction D1, and a predetermined interval is provided between the first rails 21 adjacent to each other. Each second rail 22 extends linearly in a second direction D2 orthogonal to the first direction D1, and a predetermined interval is provided between the second rails 22 adjacent to each other. The plurality of first rails 21 and the plurality of second rails 22 are arranged in a grid on the same horizontal plane.

  As shown in FIGS. 1, 2, and 3, the carriage 3 includes a traveling part 31, a transfer part 32, and a protruding part 33. The traveling unit 31 can travel in the first direction D1 along a pair of first rails 21 adjacent to each other, and can travel in a second direction D2 along a pair of second rails 22 adjacent to each other. is there. The traveling unit 31 includes a main body unit 37 and four wheels 36. Each wheel 36 is provided so as to protrude downward from the main body portion 37, and rolls on the tread surface 24 a of the traveling rail 2.

  The transfer unit 32 includes a holding unit 32a that holds the flange portion 9a of the FOUP 9, a belt 32b that suspends the holding unit 32a, and an elevating drive unit 32c that raises and lowers the holding unit 32a by winding and unwinding the belt 32b. And a θ rotation mechanism 32d that rotates the elevating drive unit 32c about a vertical direction (a direction perpendicular to each of the first direction D1 and the second direction D2). FIG. 3 shows a state in the middle of transferring the FOUP 9 to the storage unit 4 by the transfer unit 32.

  The protruding portion 33 causes the transfer portion 32 to protrude from the traveling portion 31 in each of the first direction D1 and the second direction D2. As an example, the protrusion 33 includes a turning mechanism 33a. The base end part of the turning mechanism 33a is rotatably attached to the traveling part 31, and the transfer part 32 is attached to the distal end part of the turning mechanism 33a.

  The traveling rail 2 is provided with a plurality of opening regions. Each opening region is a region surrounded by a pair of first rails 21 adjacent to each other and a pair of second rails 22 adjacent to each other. Each opening region has a size that allows the FOUP 9 to pass in the vertical direction. Of the plurality of opening areas, the first opening area (opening area) 2 a is an area located immediately above the device port 8. Among the plurality of opening regions, the second opening region (opening region) 2b is the device port 8 through the first opening region 2a in a state where the carriage 3 positions the transfer part 32 on the first opening region 2a. This is an area located immediately below the stop position of the traveling unit 31 when the FOUP 9 is delivered. Among the plurality of opening regions, the third opening region (opening region) 2c is a region other than the first opening region 2a and the second opening region 2b.

  The area above the plurality of device ports 8 and below the traveling rail 2 is classified into a non-storage area 5 and a storage area 6. The non-storage area 5 includes a plurality of sections each constituted by each first opening area 2a and each area provided adjacent to the first opening area 2a so as to surround the first opening area 2a; It is an area immediately below the area (intervening) located between the sections in the opening area 2c. Here, the “region located between each compartment” is located between two compartments constituting at least one combination among all combinations constituted by two compartments of the plurality of compartments. It means a region where all the regions are added together. In other words, the non-storage area 5 is an area where each section is located with respect to a line connecting the outer edges on the side that does not face the other sections among the outer edges of each section. The storage area 6 is an area excluding the non-storage area 5, and a plurality of third opening areas 2c are provided immediately above it. In other words, the storage area 6 is an area on the side where each section is not located with respect to a line connecting the outer edges on the side not facing the other sections among the outer edges of each section.

  The storage unit 4 is not provided immediately below all the regions provided adjacent to the first opening region 2a so as to surround the first opening region 2a in the third opening region 2c. The storage unit 4 may not be provided in the non-storage region 5. In this case, in the traveling rail 2 around the device port 8, it is possible to suppress the occurrence of traffic congestion due to the carriage 3. .

  The storage unit 4 is configured by combining a plurality of rack units 40 adjacent to each other. The storage unit 4 includes a plurality of rack units 40 that are attached to the first rail 21 or the second rail 22 adjacent to the first rail 21 or the second rail 22 so as to correspond to the plurality of third opening regions 2c. Has been. Each rack unit 40 corresponds to a plurality of third opening regions 2c arranged in a line in either the first direction D1 or the second direction D2. FOUP 9 is delivered to each rack unit 40 through each of the corresponding third opening regions 2c. As an example, in the storage system 1, each rack unit 40 corresponds to the three third opening regions 2c arranged in a row in the second direction D2.

The first opening region 2 a is formed by partially thinning out at least one of the first rail 21 and the second rail 22. Each first opening region 2a has a size corresponding to a plurality of second opening regions 2b and third opening regions 2c. As an example, in the storage system 1, the first opening region 2a is a region immediately above the plurality of device ports 8 arranged in a line in the first direction D1.
[Configuration of traveling rail and rack unit]

  As shown in FIGS. 3, 4, and 5, the first rail 21 is formed of an H-shaped steel material that is disposed such that the web portion 23 is vertical. The upper surface of the flange portion 24 provided at the lower end of the web portion 23 is a tread surface 24 a of the four wheels 36 included in the traveling portion 31 of the carriage 3. The second rail 22 has the same configuration as the first rail 21. When the traveling unit 31 is located immediately above the second opening region 2b or the third opening region 2c, the four wheels 36 are a pair of tread surfaces 24a (tread surfaces 24a of the first rail 21) facing each other in the second direction D2. And a pair of tread surfaces 24a (the tread surface 24a of the second rail 22) facing each other in the first direction D1. The traveling unit 31 performs the direction change between the first direction D1 and the second direction D2 by simultaneously changing the direction when the four wheels 36 are located at the four intersections.

  The rack unit 40 includes a mounting member 51, a plurality of support members 42, and a plurality of reinforcing members 43. The placement member 51 is a member on which the FOUP 9 is placed. The mounting member 51 is, for example, a pair of beam-like members 41 provided at intervals. The pair of beam-like members 41 extends in the direction below the plurality of third opening regions 2c arranged in a line in either the first direction D1 or the second direction D2. The pair of beam-like members 41 are arranged in parallel to each other on the same horizontal plane. That is, the pair of beam-like members 41 are arranged in parallel.

  The plurality of support members 42 extend upward from both end portions of the pair of beam-like members 41. The upper end portion of each support member 42 is detachably attached to the first rail 21 or the second rail 22. That is, the rack unit 40 is suspended from the traveling rail 2 below the third opening region 2 c and is detachable from the traveling rail 2. As an example, in the storage system 1, the pair of beam members 41 extends in the second direction D2 below the three third opening regions 2c arranged in a row in the second direction D2, The upper end portion of each support member 42 is detachably attached to the first rail 21.

  The plurality of reinforcing members 43 connect the pair of support members 42 connected to the same end portion of each of the pair of beam-like members 41 at their lower end portions. Thereby, the change of the attitude | position of each support member 42 is suppressed.

The mounting structure of the rack unit 40 to the first rail 21 or the second rail 22 will be described more specifically. A plurality of brackets 25 are detachably fixed to the lower surfaces of the flange portions 24 of the first rail 21 and the second rail 22 with bolts or the like. The plurality of brackets 25 are arranged at a pitch corresponding to the third opening region 2c. Each bracket 25 provided on the first rail 21 has a pair of beam-like members 41 extending in the second direction D2, and one of the pair of rack units 40 adjacent to each other in the second direction D2. The upper end portion of the other side support member 42 in the side rack unit 40 and the upper end portion of the one side support member 42 in the other side rack unit 40 can be attached by bolts. Each bracket 25 provided on the second rail 22 has a pair of beam-like members 41 extending in the first direction D1 and one of the pair of rack units 40 adjacent to each other in the first direction D1. The upper end portion of the other side support member 42 in the side rack unit 40 and the upper end portion of the one side support member 42 in the other side rack unit 40 can be attached by bolts. Therefore, with the above configuration, the rack unit 40 can be attached to and detached from the flange portion 24 by attaching and detaching the bracket 25 to the lower surface of the flange portion 24 of each of the first rail 21 and the second rail 22. .
[Position relationship of rack unit mounting surface]

  As shown in FIGS. 3, 4, and 5, a plurality of beam-like members 41 included in the rack unit 40 are provided in a plurality via the respective third opening regions 2 c corresponding to the rack unit 40. FOUP9 is mounted. The mounting member 51 such as the beam-like member 41 is provided with a mounting portion 50 that is a portion on which the FOUP 9 is mounted, and the upper surface of the mounting portion 50 is a mounting surface 40a. Therefore, when viewed from the vertical direction, the FOUP 9 placed on the placement surface 40a is located in the third opening region 2c. A plurality of positioning pins (positioning portions) 44 for positioning each FOUP 9 with respect to the rack unit 40 are provided on the upper surfaces of the pair of beam-like members 41. The plurality of positioning pins 44 fit into a plurality of recesses provided on the bottom surface of the FOUP 9.

The rack unit 40 is configured such that the FOUP 9 placed on the placement surface 40 a overlaps the first rail 21 and the second rail 22 when viewed from the horizontal direction. The space between the mounting surface 40a and the first rail 21 and the space between the mounting surface 40a and the second rail 22 have sizes that the FOUP 9 cannot pass through. In addition, the rack unit 40 is configured such that the upper end of the FOUP 9 placed on the placement surface 40a is positioned below the lower end of the main body portion 37 of the traveling unit 31 of the carriage 3 that travels immediately above the rack unit 40. ing. Furthermore, the rack unit 40 is configured such that the upper end of the FOUP 9 placed on the placement surface 40 a is positioned above the tread surface 24 a of the traveling rail 2.
[Operation example of cart in storage system]

  As shown in FIG. 2, the traveling rail 2 has a first stop area 20 a and a second stop area (adjacent area) 20 b. The first stop area 20 a is a part of the traveling rail 2 corresponding to the plurality of third opening areas 2 c immediately above the storage area 6. The second stop area 20 b is a part of the traveling rail 2 corresponding to the plurality of second opening areas 2 b adjacent to each of the plurality of first opening areas 2 a in the non-storage area 5. Thus, the first stop area 20a and the second stop area 20b do not overlap.

  The storage unit 4 is provided below the first stop region 20a, but the storage unit 4 is not provided below the second stop region 20b. A working scaffold 7 attached to the traveling rail 2 so as to be suspended is provided below the second opening region 2b (for example, a region immediately below).

  As an example, in the storage system 1, the first opening region 2a extends in the first direction D1, and the second stop region 20b is in the first direction D1 on both sides of the first opening region 2a in the second direction D2. This is a portion corresponding to a plurality of second opening regions 2b arranged in a row. The cart 3 travels in the first direction D1 and the second direction D2 with the transfer unit 32 protruding from the travel unit 31 in the first direction D1. Hereinafter, an operation example of the carriage 3 in this case will be described.

  When delivering the FOUP 9 to the predetermined rack unit 40 via the predetermined third opening region 2c, the transfer unit 32 is projected in the first direction D1 from the traveling unit 31. The traveling unit 31 stops at the first stop region 20a so that 32 is positioned on the predetermined third opening region 2c. In this state, the carriage 3 moves the holding unit of the transfer unit 32 up and down to deliver the FOUP 9 to the predetermined rack unit 40 through the predetermined third opening region 2c.

  In this case, when the traveling unit 31 is stopped in the second stop area 20b, the carriage 3 does not deliver the FOUP 9 to the rack unit 40 via the third opening area 2c. In other words, the stop position of the traveling unit 31 when the FOUP 9 is delivered to the rack unit 40 via the third opening region 2c with the carriage 3 positioned on the third opening region 2c. Is defined at a position excluding the portion directly above the second opening region 2b.

  Further, the carriage 3 may deliver the FOUP 9 to the predetermined rack unit 40 through the predetermined third opening region 2c as follows. That is, the carriage 3 stops the traveling unit 31 at a portion corresponding to one third opening region 2c of the pair of third opening regions 2c adjacent to each other in the storage region 6, and on the other third opening region 2c. The transfer unit 32 is positioned in the position. In this state, the carriage 3 may deliver the FOUP 9 to the predetermined rack unit 40 via the other third opening region 2c.

  The cart 3 does not deliver the FOUP 9 to the rack unit 40 via the first opening area 2a and the second opening area 2b.

When the FOUP 9 is delivered to the predetermined device port 8 through the predetermined first opening region 2a, the transfer port 32 protrudes from the traveling unit 31 in the second direction D2, and the device port The traveling unit 31 stops at a portion corresponding to the second stop region 20b so that the transfer unit 32 is positioned on the first opening region 2a immediately above the eighth. In this state, the carriage 3 moves the holding unit of the transfer unit 32 up and down to deliver the FOUP 9 to the device port 8 through the first opening region 2a. Note that, in the first opening region 2a, when the device port 8 is located immediately below a portion shifted from a portion corresponding to the lattice formed by the plurality of first rails 21 and the plurality of second rails 22 (that is, In the case where the device port 8 is located immediately below a portion extending over each of the portions corresponding to the two lattices adjacent to each other), the traveling unit 31 stops at a portion shifted from the portion corresponding to the lattice in the second opening region 2b. However (in other words, the traveling unit 31 stops at portions extending over the portions corresponding to the two lattices adjacent to each other), and in this state, the carriage 3 may deliver the FOUP 9 to the device port 8.
[Action and effect]

  As described above, in the storage system 1, when viewed from the vertical direction, the FOUP 9 placed on the placement surface 40a of the storage unit 4 is positioned in the third opening region 2c and in the horizontal direction. When viewed from above, the storage unit 4 is configured such that the FOUP 9 placed on the placement surface 40 a of the storage unit 4 overlaps the first rail 21 and the second rail 22. For this reason, the movement of the FOUP 9 placed on the placement surface 40 a in the horizontal direction is restricted by the first rail 21 and the second rail 22. That is, the first rail 21 and the second rail 22 also serve as a configuration for suppressing the fall of the FOUP 9 from the storage unit 4. Therefore, according to this storage system 1, it is possible to suppress the FOUP 9 placed on the storage unit 4 from dropping with a simple configuration.

  In the storage system 1, each of the space between the mounting surface 40a and the first rail 21 and the space between the mounting surface 40a and the second rail 22 has a size that the FOUP 9 cannot pass through. doing. For this reason, the fall of FOUP9 mounted in the storage part 4 can be suppressed more reliably.

  In the storage system 1, the traveling unit 31 includes a main body 37 and a plurality of wheels 36 that are provided so as to protrude downward from the main body 37 and roll on the tread surface 24 a of the traveling rail 2. Is mounted on the mounting surface 40a so that the upper end of the FOUP 9 mounted on the mounting surface 40a is positioned below the lower end of the main body portion 37 of the traveling unit 31 traveling on the traveling rail 2. The upper end of the FOUP 9 is configured to be located above the tread surface 24a of the traveling rail 2. For this reason, since the upper end of the FOUP 9 placed on the placement surface 40a is located below the lower end of the main body portion 37 of the traveling unit 31, the FOUP 9 placed on the storage unit 4 and the upper side of the FOUP 9 Interference with the passing carriage 3 can be prevented. Further, since the upper end of the FOUP 9 placed on the placement surface 40a is located above the tread surface 24a of the travel rail 2, the distance between the placement surface 40a and the travel rail 2 is shortened in the vertical direction. Can do. Accordingly, when the FOUP 9 is delivered to the storage unit 4, the distance that the transfer unit 32 moves the FOUP 9 up and down can be shortened, so that the time required to deliver the FOUP 9 can be shortened.

In the storage system 1, the storage unit 4 has positioning pins 44 for positioning the FOUP 9 placed on the storage unit 4 with respect to the storage unit 4. According to this, the FOUP 9 can be placed at an appropriate position in the storage unit 4.
[Modification]

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said one Embodiment. For example, in the traveling rail 2, the plurality of first rails 21 and the plurality of second rails 22 are not limited to the same horizontal plane, and may be disposed on the same inclined plane, for example. Further, the storage system 1 may not have a plurality of carriages 3 and may have only one.

  Moreover, in the trolley | bogie 3, the protrusion part 33 may make the transfer part 32 protrude from the driving | running | working part 31 in any direction of the 1st direction D1 or the 2nd direction D2. That is, the protrusion part 33 should just project the transfer part 32 from the traveling part 31 in at least one direction of the 1st direction D1 and the 2nd direction D2. For example, the projecting portion 33 includes a slide mechanism for moving the transfer portion 32 forward and backward, and the slide mechanism causes the transfer portion 32 to project from the traveling portion 31 in either the first direction D1 or the second direction D2. Alternatively, the protrusion 33 rotates the arm extending in the horizontal direction from the traveling unit 31 around the central axis on the traveling unit 31 to rotate the transfer unit 32 held on the tip side of the arm. A swing mechanism may be included, and the transfer unit 32 may be protruded from the traveling unit 31 in either the first direction D1 or the second direction D2 by the swing mechanism. Moreover, the protrusion part 33 may remain in a state in which the transfer part 32 is always protruded from the traveling part 31 in either the first direction D1 or the second direction D2.

  Further, the storage unit 4 may be provided below the second stop area 20b. In this case, the carriage 3 is stored in a state where the traveling unit 31 is stopped at a portion corresponding to the second stop area 20b. FOUP 9 is not delivered to part 4.

  In the rack unit 40, the pair of beam-like members 41 may be provided with positioning portions other than the plurality of positioning pins 44. For example, the positioning portion may be a pedestal that is provided at a position corresponding to the outer edge portion of the bottom surface of the FOUP 9 in a state where the FOUP 9 is placed at an appropriate position of the rack unit 40 and supports the outer edge portion. . In this case, a plurality of pedestals may be provided and support a plurality of locations on the outer edge of the bottom surface of the FOUP 9 (for example, four pedestals may be provided and support the four corners of the bottom surface of the FOUP 9). Alternatively, the pedestal may form a single frame and may support the outer edge of the bottom surface of the FOUP 9 on its entire circumference.

  Further, the two rack units 40 provided adjacent to each other may share the support member 42 on the side adjacent to each other.

  Further, the article stored by the storage system of the present invention is not limited to the FOUP 9 containing a plurality of semiconductor wafers, and may be other containers containing glass wafers, reticles and the like. Further, the storage system of the present invention is not limited to a semiconductor manufacturing factory, and can be applied to other facilities.

  DESCRIPTION OF SYMBOLS 1 ... Storage system, 2 ... Travel rail, 2a ... 1st opening area (opening area), 2b ... 2nd opening area, 2c ... 3rd opening area (opening area), 3 ... Dolly, 4 ... Storage part, 9 ... FOUP (article), 21 ... first rail, 22 ... second rail, 24a ... tread surface, 31 ... running section, 32 ... transfer section, 36 ... wheel, 37 ... main body section, 40a ... mounting surface, 44 ... positioning Pin (positioning part), D1 ... 1st direction, D2 ... 2nd direction.

Claims (4)

A plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction, wherein the plurality of first rails and the plurality of second rails are Traveling rails arranged in a grid on the same plane;
A traveling unit that travels on the traveling rail in each of the first direction and the second direction, and a carriage that includes a transfer unit that holds and lifts articles.
A storage unit provided on the lower side of the traveling rail and having a mounting surface on which the article is mounted;
The traveling rail is surrounded by a pair of adjacent first rails and a pair of adjacent second rails, and each has a plurality of openings each having a size through which the article can pass in the vertical direction. An area is provided,
When the storage unit is viewed from the vertical direction, the article placed on the mounting surface is positioned in the opening area, and when viewed from the horizontal direction, A storage system configured such that the article placed thereon overlaps the first rail and the second rail.   Each of the space between the placement surface and the first rail and the space between the placement surface and the second rail has a size that the article cannot pass through. The storage system according to claim 1. The traveling part includes a main body part and a plurality of wheels that are provided so as to protrude downward from the main body part and roll on the tread surface of the traveling rail;
The storage unit is configured so that an upper end of the article placed on the mounting surface is positioned below a lower end of the main body of the traveling unit that travels on the traveling rail. The storage system according to claim 1 or 2, wherein the upper end of the article placed on a surface is configured to be positioned above the tread surface of the traveling rail.   The said storage part is a storage system as described in any one of Claims 1-3 which has the positioning part for positioning the article mounted in the said storage part with respect to the said storage part.

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