JP2018193223A - Storage system and storage method - Google Patents

Abstract

To provide a storage system which can secure a storage part of articles while suppressing the inhibition of motions of bogies which try to deliver the articles to a device port, and a storage method.SOLUTION: A storage system 1 comprises: a traveling rail 2 in which a plurality of first rails 21 and a plurality of second rails 22 are arranged in a lattice shape; a plurality of bogies 3 having traveling parts 31 and placing parts 32; and storage parts 4 in which FOUPs 9 are placed. In the traveling rail 2, there are formed first opening regions 2a immediately above the device ports 8, second opening regions 2b in which traveling parts 31 stop when the placing parts 32 move the FOUPs 9 to the device ports 8 via the first opening regions 2a, and third opening regions 2c other than the first and second opening regions. The storage parts 4 are not arranged immediately below the first opening regions 2a and the second opening regions 2b, and arranged immediately below the third opening regions 2c. The bogies 3 deliver the FOUPs 9 to rack units 40 via the third opening regions.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a storage system and a storage method.

  For example, as a storage system applied to a transfer device of a semiconductor manufacturing factory, a traveling rail having a plurality of rails arranged in a grid on the same horizontal plane, and a plurality of traveling rails that run the traveling rails and hold and lift articles There is known a system including a carriage and a storage unit that is disposed on the upper side of the apparatus port and on the lower side of the traveling rail and on which articles are placed (for example, see Patent Document 1). In such a storage system, the carriage delivers articles to each of the device port and the storage unit through an opening region provided between the rails.

International Publication No. 15/174181

  In the storage system as described above, when delivering the article to each of the device port and the storage unit, the carriage travels on the traveling rail to an area where the article can be delivered, stops in the area, and stops the article. Delivery of. By the way, the storage unit can be arranged immediately below an arbitrary region of the traveling rail. For this reason, when the storage unit is arranged directly under the area where the article can be delivered to the device port, the article is delivered to the device port by another carriage that delivers the article to the storage unit. There is a risk that the operation of the carriage to be performed is hindered.

  Therefore, the present invention provides a storage system and a storage method capable of securing a storage unit for an article while suppressing an operation of a cart that attempts to deliver the article to an apparatus port from being hindered. Objective.

  The storage system of the present invention has a plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction, the plurality of first rails and the plurality of rails A traveling rail in which the second rail is arranged in a grid on the same plane, a traveling section that travels the traveling rail in each of the first direction and the second direction, and a transfer that holds and lifts the article. And a storage unit on which articles are placed. The traveling rail is surrounded by a pair of first rails adjacent to each other and a pair of second rails adjacent to each other. A plurality of opening areas each having a size that allows the article to pass in the up-down direction, and the carriage is opened from the traveling section in a state where the traveling section is stopped on any of the opening areas. Project over other open areas adjacent to the area The transfer unit performs delivery of the article to the transfer destination located below the traveling rail through the other opening area, and the plurality of opening areas include a first opening area positioned directly above the device port. The second position that is located immediately below the stop position of the traveling unit when the article is delivered to the device port through the first opening region with the carriage positioned on the first opening region. An opening region, and a third opening region other than the first opening region and the second opening region, and the storage unit is not provided immediately below the first opening region and the second opening region, and the third opening It is provided directly under the area, and the cart delivers articles to the storage section through the third opening area with the transfer section positioned on the third opening area.

  In this storage system, the storage unit includes a first opening region located immediately above the device port, and a second opening located immediately below the stop position of the traveling unit when the cart delivers articles to the device port. It is not provided directly under the region, but is provided directly under the third opening region other than those regions. For this reason, it is difficult for other carriages that deliver articles to the storage unit to hinder the running of the carriage and article delivery operations to deliver articles to the device port. Therefore, according to this storage system, it is possible to secure an article storage unit while suppressing the obstruction of the operation of the carriage that attempts to deliver the article to the device port.

  In the storage system of the present invention, the stop position of the traveling unit when the article is delivered to the storage unit via the third opening region in a state where the carriage is positioned on the third opening region. , It may be determined at a position other than directly above the second opening region. According to this, the storage unit is arranged so that the area where the cart that delivers the article to the device port stops and the area where the other carriage that delivers the article stops to the storage unit do not overlap. Can do. For this reason, it becomes possible to suppress that the operation | movement of the trolley | bogie which tries to deliver articles | goods to an apparatus port more reliably is inhibited.

  The storage system of the present invention is characterized in that the storage unit is not provided immediately below an area provided adjacent to the first opening area so as to surround the first opening area in the third opening area. May be provided. According to this, the traffic jam of the carriage around the device port is suppressed, and the carriage that tries to deliver the article to the device port can smoothly travel to the area where the article can be delivered. .

  In the storage system of the present invention, the work scaffold may be attached to the traveling rail immediately below the second opening region. According to this, an operator can easily work in the vicinity immediately above the device port.

  The storage method of the present invention has a plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction, the plurality of first rails and the plurality of rails A traveling rail in which the second rail is arranged in a grid on the same plane, a traveling section that travels the traveling rail in each of the first direction and the second direction, and a transfer that holds and lifts the article. A plurality of carriages each having a portion and a storage unit provided on the lower side of the traveling rail, on which articles are placed, and the traveling rail is adjacent to the pair of first rails adjacent to each other. A plurality of opening areas each having a size that allows an article to pass in the vertical direction are provided by the pair of matching second rails, and the plurality of opening areas are located immediately above the device port. The first opening area and the carriage are on the first opening area A second opening region located immediately below the stop position of the traveling unit, when the article is delivered to the device port through the first opening region with the transfer unit positioned, a first opening region, A storage method implemented in a storage system including a third opening region other than the second opening region, wherein the carriage delivers articles to the storage unit via the first opening region and the second opening region. In the state where the transfer unit is positioned on the third opening region, the article is delivered to the storage unit via the third opening region, and at that time, the vehicle travels directly above the second opening region. When the section is stopped, the article is not delivered to the storage section.

  In this storage method, the cart does not deliver the article to the storage unit via the first opening area and the second opening area, and delivers the article to the storage part via the third opening area. . For this reason, it is difficult for other carriages that deliver articles to the storage unit to hinder the running of the carriage and article delivery operations to deliver articles to the device port. Further, the cart does not deliver the article to the storage unit in a state where the traveling unit is stopped immediately above the second opening region. For this reason, the storage unit can be arranged so that the region where the cart that delivers the article to the apparatus port stops and the region where the other cart that delivers the article stops to the storage unit do not overlap. . Therefore, according to this storage method, it is possible to secure an article storage unit while suppressing the movement of the carriage that attempts to deliver the article to the device port.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to ensure the storage part of articles | goods, suppressing the operation | movement of the trolley | bogie which tries to deliver articles | goods to an apparatus port being inhibited.

It is a top view of the storage system of one embodiment. It is a partially expanded view of the storage system of FIG. It is a front view of the rack unit with which the storage system of FIG. 1 is provided. FIG. 4 is a bottom view of the rack unit of FIG. 3. FIG. 4 is a side view of the rack unit of FIG. 3.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or equivalent part, and the overlapping description is abbreviate | omitted.
[Storage system configuration]

  As shown in FIGS. 1 and 2, the storage system 1 includes a traveling rail 2, a plurality of carriages 3, and a storage unit 4. The storage system 1 is laid above a plurality of semiconductor processing apparatuses 10 each having a plurality of apparatus ports 8 in a semiconductor manufacturing factory. The storage system 1 temporarily stores a FOUP (Front Opening Unified Pod) 9 in which a plurality of semiconductor wafers are accommodated. More specifically, in the storage system 1, the FOUP 9 is transported between the storage unit 4 and the device port 8 by the carriage 3 traveling on the traveling rail 2, and the storage unit 4 FOUP 9 (before supplying the FOUP 9 to the device port 8). The FOUP 9 and the FOUP 9) collected from the apparatus port 8 are temporarily stored. For example, the FOUP 9 is carried into or out of the storage system 1 by OHT (Overhead Hoist Transfer). The OHT travels along a track laid between the storage system 1 and the ceiling of the semiconductor manufacturing factory.

  The semiconductor processing apparatuses 10 are arranged in a plurality of rows (two rows along the first direction D1 in FIG. 1) below the traveling rail 2. Each semiconductor processing apparatus 10 is disposed in a direction in which the apparatus ports 8 face each other in a pair of adjacent rows. When the FOUP 9 is supplied to the apparatus port 8 of the semiconductor processing apparatus 10 by the carriage 3, the semiconductor wafer accommodated in the FOUP 9 is taken into the semiconductor processing apparatus 10. Then, after the semiconductor wafer is subjected to a predetermined process in the semiconductor processing apparatus 10, it is accommodated in the FOUP 9 again. As a result, the FOUP 9 can be collected and transported by the carriage 3.

  The traveling rail 2 has a plurality of first rails 21 and a plurality of second rails 22. Each first rail 21 extends linearly in the first direction D1, and a predetermined interval is provided between the first rails 21 adjacent to each other. Each second rail 22 extends linearly in a second direction D2 orthogonal to the first direction D1, and a predetermined interval is provided between the second rails 22 adjacent to each other. The plurality of first rails 21 and the plurality of second rails 22 are arranged in a grid on the same horizontal plane. The traveling rail 2 is provided with a plurality of opening regions. Each opening region is a region surrounded by a pair of first rails 21 adjacent to each other and a pair of second rails 22 adjacent to each other. Each opening region has a size that allows the FOUP 9 to pass in the vertical direction.

  As shown in FIGS. 1, 2, and 3, the carriage 3 includes a traveling part 31, a transfer part 32, and a protruding part 33. The traveling unit 31 can travel in the first direction D1 along a pair of first rails 21 adjacent to each other, and can travel in a second direction D2 along a pair of second rails 22 adjacent to each other. is there. The traveling unit 31 includes a main body unit 37 and four wheels 36. Each wheel 36 is provided so as to protrude downward from the main body portion 37, and rolls on the tread surface 24 a of the traveling rail 2.

  The transfer unit 32 includes a holding unit 32a that holds the flange portion 9a of the FOUP 9, a belt 32b that suspends the holding unit 32a, and an elevating drive unit 32c that raises and lowers the holding unit 32a by winding and unwinding the belt 32b. And a θ rotation mechanism 32d that rotates the elevating drive unit 32c about a vertical direction (a direction perpendicular to each of the first direction D1 and the second direction D2). FIG. 3 shows a state in the middle of transferring the FOUP 9 to the storage unit 4 by the transfer unit 32.

  The protruding portion 33 causes the transfer portion 32 to protrude from the traveling portion 31 in each of the first direction D1 and the second direction D2. As an example, the protrusion 33 includes a turning mechanism 33a. The base end part of the turning mechanism 33a is rotatably attached to the traveling part 31, and the transfer part 32 is attached to the distal end part of the turning mechanism 33a.

  In the state where the traveling unit 31 is stopped on any one of the opening regions, the carriage 3 has the other opening by the transfer unit 32 that protrudes from the traveling unit 31 onto the other opening region adjacent to the opening region. The FOUP 9 is delivered to the transfer destination located below the traveling rail 2 through the area. Examples of the transfer destination include the storage unit 4 and the device port 8.

  Of the plurality of opening areas, the first opening area (opening area) 2 a is an area located immediately above the device port 8. Among the plurality of opening regions, the second opening region (opening region) 2b is the device port 8 through the first opening region 2a in a state where the carriage 3 positions the transfer part 32 on the first opening region 2a. This is an area located immediately below the stop position of the traveling unit 31 when the FOUP 9 is delivered. Among the plurality of opening regions, the third opening region (opening region) 2c is a region other than the first opening region 2a and the second opening region 2b.

  The area above the plurality of device ports 8 and below the traveling rail 2 is classified into a non-storage area 5 and a storage area 6. The non-storage area 5 includes a plurality of sections each constituted by each first opening area 2a and each area provided adjacent to the first opening area 2a so as to surround the first opening area 2a; It is an area immediately below the area (intervening) located between the sections in the opening area 2c. Here, the “region located between each compartment” is located between two compartments constituting at least one combination among all combinations constituted by two compartments of the plurality of compartments. It means a region where all the regions are added together. In other words, the non-storage area 5 is an area where each section is located with respect to a line connecting the outer edges on the side that does not face the other sections among the outer edges of each section. The storage area 6 is an area excluding the non-storage area 5, and a plurality of third opening areas 2c are provided immediately above it. In other words, the storage area 6 is an area on the side where each section is not located with respect to a line connecting the outer edges on the side not facing the other sections among the outer edges of each section.

  The storage unit 4 is not provided immediately below all the regions provided adjacent to the first opening region 2a so as to surround the first opening region 2a in the third opening region 2c. The storage unit 4 may not be provided in the non-storage region 5. In this case, in the traveling rail 2 around the device port 8, it is possible to suppress the occurrence of traffic congestion due to the carriage 3. .

  The storage unit 4 is configured by combining a plurality of rack units 40 adjacent to each other. The storage unit 4 includes a plurality of rack units 40 that are attached to the first rail 21 or the second rail 22 adjacent to the first rail 21 or the second rail 22 so as to correspond to the plurality of third opening regions 2c. Has been. Each rack unit 40 corresponds to a plurality of third opening regions 2c arranged in a line in either the first direction D1 or the second direction D2. FOUP 9 is delivered to each rack unit 40 through each of the corresponding third opening regions 2c. As an example, in the storage system 1, each rack unit 40 corresponds to the three third opening regions 2c arranged in a row in the second direction D2.

The first opening region 2 a is formed by partially thinning out at least one of the first rail 21 and the second rail 22. Each first opening region 2a has a size corresponding to a plurality of second opening regions 2b and third opening regions 2c. As an example, in the storage system 1, the first opening region 2a is a region immediately above the plurality of device ports 8 arranged in a line in the first direction D1.
[Configuration of traveling rail and rack unit]

  As shown in FIGS. 3, 4, and 5, the first rail 21 is formed of an H-shaped steel material that is disposed such that the web portion 23 is vertical. The upper surface of the flange portion 24 provided at the lower end of the web portion 23 is a tread surface 24 a of the four wheels 36 included in the traveling portion 31 of the carriage 3. The second rail 22 has the same configuration as the first rail 21. When the traveling unit 31 is located immediately above the second opening region 2b or the third opening region 2c, the four wheels 36 are a pair of tread surfaces 24a (tread surfaces 24a of the first rail 21) facing each other in the second direction D2. And a pair of tread surfaces 24a (the tread surface 24a of the second rail 22) facing each other in the first direction D1. The traveling unit 31 performs the direction change between the first direction D1 and the second direction D2 by simultaneously changing the direction when the four wheels 36 are located at the four intersections.

  The rack unit 40 includes a mounting member 51, a plurality of support members 42, and a plurality of reinforcing members 43. The placement member 51 is a member on which the FOUP 9 is placed. The mounting member 51 is, for example, a pair of beam-like members 41 provided at intervals. The pair of beam-like members 41 extends in the direction below the plurality of third opening regions 2c arranged in a line in either the first direction D1 or the second direction D2. The pair of beam-like members 41 are arranged in parallel to each other on the same horizontal plane. That is, the pair of beam-like members 41 are arranged in parallel.

  The plurality of support members 42 extend upward from both end portions of the pair of beam-like members 41. The upper end portion of each support member 42 is detachably attached to the first rail 21 or the second rail 22. That is, the rack unit 40 is suspended from the traveling rail 2 below the third opening region 2 c and is detachable from the traveling rail 2. As an example, in the storage system 1, the pair of beam members 41 extends in the second direction D2 below the three third opening regions 2c arranged in a row in the second direction D2, The upper end portion of each support member 42 is detachably attached to the first rail 21.

  The plurality of reinforcing members 43 connect the pair of support members 42 connected to the same end portion of each of the pair of beam-like members 41 at their lower end portions. Thereby, the change of the attitude | position of each support member 42 is suppressed.

The mounting structure of the rack unit 40 to the first rail 21 or the second rail 22 will be described more specifically. A plurality of brackets 25 are detachably fixed to the lower surfaces of the flange portions 24 of the first rail 21 and the second rail 22 with bolts or the like. The plurality of brackets 25 are arranged at a pitch corresponding to the third opening region 2c. Each bracket 25 provided on the first rail 21 has a pair of beam-like members 41 extending in the second direction D2, and one of the pair of rack units 40 adjacent to each other in the second direction D2. The upper end portion of the other side support member 42 in the side rack unit 40 and the upper end portion of the one side support member 42 in the other side rack unit 40 can be attached by bolts. Each bracket 25 provided on the second rail 22 has a pair of beam-like members 41 extending in the first direction D1 and one of the pair of rack units 40 adjacent to each other in the first direction D1. The upper end portion of the other side support member 42 in the side rack unit 40 and the upper end portion of the one side support member 42 in the other side rack unit 40 can be attached by bolts. Therefore, with the above configuration, the rack unit 40 can be attached to and detached from the flange portion 24 by attaching and detaching the bracket 25 to the lower surface of the flange portion 24 of each of the first rail 21 and the second rail 22. .
[Position relationship of rack unit mounting surface]

  As shown in FIGS. 3, 4, and 5, a plurality of beam-like members 41 included in the rack unit 40 are provided in a plurality via the respective third opening regions 2 c corresponding to the rack unit 40. FOUP9 is mounted. The mounting member 51 such as the beam-like member 41 is provided with a mounting portion 50 that is a portion on which the FOUP 9 is mounted, and the upper surface of the mounting portion 50 is a mounting surface 40a. Therefore, when viewed from the vertical direction, the FOUP 9 placed on the placement surface 40a is located in the third opening region 2c. A plurality of positioning pins (positioning portions) 44 for positioning each FOUP 9 with respect to the rack unit 40 are provided on the upper surfaces of the pair of beam-like members 41. The plurality of positioning pins 44 fit into a plurality of recesses provided on the bottom surface of the FOUP 9.

The rack unit 40 is configured such that the FOUP 9 placed on the placement surface 40 a overlaps the first rail 21 and the second rail 22 when viewed from the horizontal direction. The space between the mounting surface 40a and the first rail 21 and the space between the mounting surface 40a and the second rail 22 have sizes that the FOUP 9 cannot pass through. In addition, the rack unit 40 is configured such that the upper end of the FOUP 9 placed on the placement surface 40a is positioned below the lower end of the main body portion 37 of the traveling unit 31 of the carriage 3 that travels immediately above the rack unit 40. ing. Furthermore, the rack unit 40 is configured such that the upper end of the FOUP 9 placed on the placement surface 40 a is positioned above the tread surface 24 a of the traveling rail 2.
[Operation example of cart in storage system]

  As shown in FIG. 2, the traveling rail 2 has a first stop area 20 a and a second stop area (adjacent area) 20 b. The first stop area 20 a is a part of the traveling rail 2 corresponding to the plurality of third opening areas 2 c immediately above the storage area 6. The second stop area 20 b is a part of the traveling rail 2 corresponding to the plurality of second opening areas 2 b adjacent to each of the plurality of first opening areas 2 a in the non-storage area 5. Thus, the first stop area 20a and the second stop area 20b do not overlap.

  The storage unit 4 is provided below the first stop region 20a, but the storage unit 4 is not provided below the second stop region 20b. A working scaffold 7 attached to the traveling rail 2 so as to be suspended is provided below the second opening region 2b (for example, a region immediately below).

  As an example, in the storage system 1, the first opening region 2a extends in the first direction D1, and the second stop region 20b is in the first direction D1 on both sides of the first opening region 2a in the second direction D2. This is a portion corresponding to a plurality of second opening regions 2b arranged in a row. The cart 3 travels in the first direction D1 and the second direction D2 with the transfer unit 32 protruding from the travel unit 31 in the first direction D1. Hereinafter, an operation example of the carriage 3 in this case will be described.

  When delivering the FOUP 9 to the predetermined rack unit 40 via the predetermined third opening region 2c, the transfer unit 32 is projected in the first direction D1 from the traveling unit 31. The traveling unit 31 stops at the first stop region 20a so that 32 is positioned on the predetermined third opening region 2c. In this state, the carriage 3 moves the holding unit of the transfer unit 32 up and down to deliver the FOUP 9 to the predetermined rack unit 40 through the predetermined third opening region 2c.

  In this case, when the traveling unit 31 is stopped in the second stop area 20b, the carriage 3 does not deliver the FOUP 9 to the rack unit 40 via the third opening area 2c. In other words, the stop position of the traveling unit 31 when the FOUP 9 is delivered to the rack unit 40 via the third opening region 2c with the carriage 3 positioned on the third opening region 2c. Is defined at a position excluding the portion directly above the second opening region 2b.

  Further, the carriage 3 may deliver the FOUP 9 to the predetermined rack unit 40 through the predetermined third opening region 2c as follows. That is, the carriage 3 stops the traveling unit 31 at a portion corresponding to one third opening region 2c of the pair of third opening regions 2c adjacent to each other in the storage region 6, and on the other third opening region 2c. The transfer unit 32 is positioned in the position. In this state, the carriage 3 may deliver the FOUP 9 to the predetermined rack unit 40 via the other third opening region 2c.

  The cart 3 does not deliver the FOUP 9 to the rack unit 40 via the first opening area 2a and the second opening area 2b.

When the FOUP 9 is delivered to the predetermined device port 8 through the predetermined first opening region 2a, the transfer port 32 protrudes from the traveling unit 31 in the second direction D2, and the device port The traveling unit 31 stops at a portion corresponding to the second stop region 20b so that the transfer unit 32 is positioned on the first opening region 2a immediately above the eighth. In this state, the carriage 3 moves the holding unit of the transfer unit 32 up and down to deliver the FOUP 9 to the device port 8 through the first opening region 2a. Note that, in the first opening region 2a, when the device port 8 is located immediately below a portion shifted from a portion corresponding to the lattice formed by the plurality of first rails 21 and the plurality of second rails 22 (that is, In the case where the device port 8 is located immediately below a portion extending over each of the portions corresponding to the two lattices adjacent to each other), the traveling unit 31 stops at a portion shifted from the portion corresponding to the lattice in the second opening region 2b. However (in other words, the traveling unit 31 stops at portions extending over the portions corresponding to the two lattices adjacent to each other), and in this state, the carriage 3 may deliver the FOUP 9 to the device port 8.
[Action and effect]

  As described above, in the storage system 1, the storage unit 4 includes the first opening region 2 a located immediately above the device port 8 and the traveling unit when the cart 3 delivers the FOUP 9 to the device port 8. It is not provided immediately below the second opening region 2b located immediately below the stop position 31 but is provided immediately below the third opening region 2c other than those. For this reason, it is difficult for the other cart 3 that delivers the FOUP 9 to the storage unit 4 to hinder the traveling of the cart 3 and the delivery of the article that are going to deliver the FOUP 9 to the device port 8. Therefore, according to the storage system 1, the storage unit 4 of the FOUP 9 can be secured while suppressing the operation of the carriage 3 that attempts to deliver the FOUP 9 to the device port 8 from being hindered.

  In the storage system 1, the traveling unit 31 when the FOUP 9 is delivered to the storage unit 4 through the third opening region 2 c in a state where the carriage 3 positions the transfer unit 32 on the third opening region 2 c. This stop position is determined at a position excluding the portion directly above the second opening region 2b. For this reason, the storage unit 4 is arranged so that the region where the cart 3 that delivers the FOUP 9 to the device port 8 stops and the region where the other cart 3 that delivers the FOUP 9 to the storage unit 4 does not overlap. Can be arranged. For this reason, it becomes possible to suppress the operation | movement of the trolley | bogie 3 which tries to deliver the FOUP 9 with respect to the apparatus port 8 more reliably.

  In the storage system 1, the storage unit 4 is not provided immediately below an area provided adjacent to the first opening area 2 a so as to surround the first opening area 2 a in the third opening area 2 c. For this reason, the traffic jam of the cart 3 around the device port 8 is suppressed, and the cart 3 that is to deliver the FOUP 9 to the device port 8 can smoothly travel to an area where the FOUP 9 can be delivered. become.

  In the storage system 1, the work scaffold 7 is attached to the traveling rail 2 immediately below the second opening region 2 b. For this reason, the operator can work easily in the vicinity immediately above the device port 8.

In the storage method executed in the storage system 1, the carriage 3 does not deliver the FOUP 9 to the storage unit 4 via the first opening area 2 a and the second opening area 2 b, and passes through the third opening area 2 c. Then, the FOUP 9 is delivered to the storage unit 4. For this reason, it is difficult for the other cart 3 that delivers the FOUP 9 to the storage unit 4 to hinder the traveling of the cart 3 that attempts to deliver the FOUP 9 to the device port 8 and the operation of delivering the FOUP 9. Further, the cart 3 does not deliver the FOUP 9 to the storage unit 4 in a state where the traveling unit 31 is stopped immediately above the second opening region 2b. For this reason, the storage unit 4 is arranged so that the region where the cart 3 that delivers the FOUP 9 to the device port 8 stops and the region where the other cart 3 that delivers the FOUP 9 to the storage unit 4 does not overlap. Can be arranged. Therefore, according to this storage method, it is possible to secure the storage unit 4 of the FOUP 9 while suppressing the obstruction of the operation of the carriage 3 that attempts to deliver the FOUP 9 to the device port 8.
[Modification]

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said one Embodiment. For example, the rack unit 40 may be provided immediately below at least one region provided adjacent to the first opening region 2a so as to surround the first opening region 2a in the third opening region 2c. .

  Further, in the traveling rail 2, the plurality of first rails 21 and the plurality of second rails 22 are not limited to the same horizontal plane, and may be disposed on the same inclined plane, for example.

  Moreover, in the trolley | bogie 3, the protrusion part 33 may make the transfer part 32 protrude from the driving | running | working part 31 in any direction of the 1st direction D1 or the 2nd direction D2. That is, the protrusion part 33 should just project the transfer part 32 from the traveling part 31 in at least one direction of the 1st direction D1 and the 2nd direction D2. For example, the projecting portion 33 includes a slide mechanism for moving the transfer portion 32 forward and backward, and the slide mechanism causes the transfer portion 32 to project from the traveling portion 31 in either the first direction D1 or the second direction D2. Alternatively, the protrusion 33 rotates the arm extending in the horizontal direction from the traveling unit 31 around the central axis on the traveling unit 31 to rotate the transfer unit 32 held on the tip side of the arm. A swing mechanism may be included, and the transfer unit 32 may be protruded from the traveling unit 31 in either the first direction D1 or the second direction D2 by the swing mechanism. Moreover, the protrusion part 33 may remain in a state in which the transfer part 32 is always protruded from the traveling part 31 in either the first direction D1 or the second direction D2.

  The storage unit 4 may be provided below the second stop area 20b. In this case, the carriage 3 is stored in a state where the traveling unit 31 is stopped at a portion corresponding to the second stop area 20b. FOUP 9 is not delivered to part 4.

  Further, the two rack units 40 provided adjacent to each other may share the support member 42 on the side adjacent to each other.

  Further, the article stored by the storage system of the present invention is not limited to the FOUP 9 containing a plurality of semiconductor wafers, and may be other containers containing glass wafers, reticles and the like. Further, the storage system of the present invention is not limited to a semiconductor manufacturing factory, and can be applied to other facilities.

  DESCRIPTION OF SYMBOLS 1 ... Storage system, 2 ... Running rail, 2a ... 1st opening area (opening area), 2b ... 2nd opening area (opening area), 2c ... 3rd opening area (opening area), 3 ... Cart, 4 ... Storage Part 7 ... scaffolding 8 ... device port 9 ... FOUP (article) 20b ... second stop area (adjacent area) 21 ... first rail 22 ... second rail 31 ... running part 32 ... transfer Part, 33 ... projecting part, D1 ... first direction, D2 ... second direction.

Claims (5)

A plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction, wherein the plurality of first rails and the plurality of second rails are Traveling rails arranged in a grid on the same plane;
A plurality of carriages each having a traveling unit that travels on the traveling rail in each of the first direction and the second direction, and a transfer unit that holds and lifts articles;
A storage unit on which the article is placed,
The traveling rail is surrounded by a pair of adjacent first rails and a pair of adjacent second rails, and each has a plurality of openings each having a size through which the article can pass in the vertical direction. An area is provided,
In the state where the traveling unit is stopped on any one of the opening regions, the cart is moved by the transfer unit projecting from the traveling unit onto the other opening region adjacent to the opening region. Deliver the article to the transfer destination located on the lower side of the traveling rail through the opening area,
The plurality of opening regions are:
A first open region located directly above the device port;
In the state where the carriage is positioned on the first opening region, the stop position of the traveling unit when the article is delivered to the device port through the first opening region. A second opening region located immediately below;
A third opening region other than the first opening region and the second opening region,
The storage unit is not provided immediately below the first opening region and the second opening region, and is provided immediately below the third opening region.
The storage system is configured to deliver the article to the storage unit via the third opening region in a state where the transfer unit is positioned on the third opening region.   A stop position of the traveling unit when the article is delivered to the storage unit through the third opening region in a state where the carriage is positioned on the third opening region. The storage system according to claim 1, wherein the storage system is defined at a position other than directly above the second opening area.   The storage unit is not provided immediately below a region provided adjacent to the first opening region so as to surround the first opening region in the third opening region. The storage system described.   The storage system according to any one of claims 1 to 3, wherein a work scaffold is attached to the traveling rail immediately below the second opening region. A plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction, wherein the plurality of first rails and the plurality of second rails are Traveling rails arranged in a grid on the same plane;
A plurality of carriages each having a traveling unit that travels on the traveling rail in each of the first direction and the second direction, and a transfer unit that holds and lifts articles;
A storage section provided on the lower side of the traveling rail, on which the article is placed,
The traveling rail is surrounded by a pair of adjacent first rails and a pair of adjacent second rails, and each has a plurality of openings each having a size through which the article can pass in the vertical direction. An area is provided,
The plurality of opening regions are:
A first open region located directly above the device port;
In the state where the carriage is positioned on the first opening region, the stop position of the traveling unit when the article is delivered to the device port through the first opening region. A second opening region located immediately below;
A storage method implemented in a storage system including a third opening region other than the first opening region and the second opening region,
The cart is
Through the first opening area and the second opening area, the article is not delivered to the storage unit,
In the state where the transfer unit is positioned on the third opening region, the article is delivered to the storage unit via the third opening region, and at that time, immediately above the second opening region. A storage method in which the article is not delivered to the storage unit when the traveling unit is stopped.

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