KR100341659B1 - A transportation system for moving a vehicle, floor bed parts, floor unit and floor bed structure for the transportation system - Google Patents

Abstract

It is a problem to install rail of track track bogie on the grating floor by simple construction.

The plurality of crossbeams 37 are supported by a support 16 for supporting the grating 3. The crossbeam 37 is laid across to cross the rail. The guide rail component 38 and the traveling rail component 39 are mounted on the crossbeam 37. The guide rail 26 and the traveling rail 27 are formed by the rail parts 38 and 39, respectively. The bottom plate 40 is arranged in two rows and fills the gap between the guide rail 26 and the traveling rail 27. Each rail part 38, 39 and bottom plate 40 are fixed to the crossbeam 37 by screws 42, 43, 44. The plurality of bottom plates 40 are all rectangular in the same size, and the length of the long side is twice the length of one side of the grating. The length of each rail part 38, 39 is the natural multiple of the length of one side of a grating.

Description

Transport system for driving trolleys, floor parts for this transport system, floor unit and floor structure {A TRANSPORTATION SYSTEM FOR MOVING A VEHICLE, FLOOR BED PARTS, FLOOR UNIT AND FLOOR BED STRUCTURE FOR THE TRANSPORTATION SYSTEM}

The present invention relates to a floor structure for laying a rail for driving a trolley on a floor covered with a grating (lattice plate), a floor part and a floor unit for forming the floor structure, and a conveying system having the floor structure.

Generally, the floor of a clean room is formed by spreading a plurality of gratings on a concrete base floor. In a clean room, air is blown from the ceiling to the floor. This air flow passes through the grating and into the exhaust duct disposed below the grating. The grating floor can prevent the retention of air, thus contributing to the cleansing in the clean room. In addition, in the factory, an unmanned transport vehicle (hereinafter referred to simply as a transport vehicle) for transporting goods is used. There is a tracked trolley bogie which runs along tracks, such as a rail, in a carrier vehicle. The use of a tracked trolley for conveying articles in a clean room makes it possible to unmann the conveying operation in the semiconductor manufacturing process.

In order to drive the tracked trolley, it is necessary to lay a rail on which the tracked trolley travels. However, since the bottom of a clean room is formed by grating as mentioned above, it is necessary to process cutting, welding, etc. to grating. In addition, in the case of reinforcing the strength of the joint portion of the rail and the grating or when the rail is embedded in the floor so that the rail does not interfere with the walking of the worker, it is necessary to install a dedicated support on the concrete floor. As such, a large construction is required to install the rails on the grating.

In order to solve the above problems, a first object of the present invention is to simplify the construction of laying the rail of the track trolley on the grating floor, the floor structure for the track trolley, the floor parts and floor for forming the floor structure It is to provide a conveying system having a unit and its bottom structure.

The second object of the present invention is a floor structure for forming a track structure for the track structure, which can simplify the installation work of the rail and the installation of the belt, when the tracked trolley is a belt driving drive system, floor parts for forming the floor structure And a floor unit and a conveying system having the floor structure.

1 is a plan view partially showing a floor structure of a first embodiment;

FIG. 2 is an enlarged cross-sectional view of the floor structure of FIG. 1. FIG.

3 is a cross-sectional view showing an enlarged bottom structure of FIG.

4 is a plan view showing a bottom end right part;

Fig. 5 is a side cross-sectional view showing the bottom part of Fig. 4.

6 is a rear view showing the bottom part of FIG.

7 is a plan view showing a bottom end bottom part.

8 is a side cross-sectional view showing a bottom end bottom part of FIG.

9 is a front view illustrating a transport vehicle.

FIG. 10 is a side view illustrating the transport vehicle of FIG. 9; FIG.

11 is a plan view of the floor structure of the first embodiment;

12 is a plan view of a clean room;

The side view which shows the conveyance system of 1st Embodiment.

Fig. 14 is a side view showing the transport vehicle in the second embodiment.

15 is a plan view of the bottom part of FIG. 14;

※ Explanation of code for main part of drawing

2: grating bottom 3: grating

7: Return System 8: Balance

9 housing 11 fan filter unit

16: holding 17: driving pulley

18,19: guide pulley 20: driven pulley

21: belt 23: motor

26: guide rail 27: driving rail

31: floor unit 33: right end floor parts

34: left end floor part 35: right end floor material

36: left end flooring material 37: cross beam

37b: convex portion 37c: concave portion

38: guide rail parts 39: driving rail parts

40: bottom plate 65: left end bottom parts

66: right end floor parts 67: left end floor materials

68: fixing member 69: right end floor material

70: tension control device

In order to achieve the above object, the invention according to claim 1 forms a driving station for driving a truck on a grating floor formed by applying a plurality of gratings having a predetermined shape, and a floor structure in which a rail is installed in the running area. to provide. The plurality of struts supports the grating. The plurality of crossbeams are supported directly or indirectly on the posts located in the travel area. The crossbeam is laid across the posts to intersect the rails. The rail is formed by connecting a plurality of rail parts and is also supported on the crossbeam. The plurality of bottom plates is supported on the crossbeam in the travel area and is arranged to fill the gap between the rail and the grating.

In the invention according to claim 2, in the invention according to claim 1, the crossbeam is directly supported by the support. Each grating is square, and each bottom plate is rectangular. The length along the rail of each bottom plate is characterized in that the natural arrangement of the length of one side of the grating.

In the invention according to claim 3, in the invention of claim 1, the running region extends linearly along the rail, the rail is supported at at least one of both ends of the crossbeam and the center of the crossbeam, and the plurality of bottom plates are all It is characterized by the same dimensions.

According to the invention of claim 4, in the invention of claim 1, an engaging portion engaged with the rail for positioning the rail is formed in the crossbeam.

In the invention according to claim 5, in the invention according to claim 1, the trolley is driven by a belt mounted along the rail. A positioning mechanism for positioning the belt at both ends thereof is provided at both ends in the longitudinal direction of the rail.

In the invention according to claim 6, in the invention according to claim 1, the length of each rail part is a natural arrangement of the length of one side of each grating.

In the invention according to claim 7, a traveling area for driving a trolley driven by a belt is formed on a grating floor formed by supporting a plurality of gratings having a predetermined shape on a plurality of struts, and a rail is laid in the running area. It is applied to the installed floor structure and provides a pair of floor parts for mounting the belt along the rail. The pair of bottom parts includes a first floor material and a second floor material respectively disposed at both ends in the longitudinal direction of the rail. The first floor has the same dimensions as the grating and is supported on the post at one end in the longitudinal direction of the rail. The second flooring material has the same dimensions as the grating and is supported by the posts on the opposite side of the first flooring material in the longitudinal direction of the rail. Positioning mechanisms for positioning the belt are mounted to the first floor material and the second floor material.

The invention according to claim 8 is the floor part according to claim 7, wherein the positioning mechanism comprises: a driving pulley mounted on the first flooring material for winding the belt; a power source mounted on the first flooring material for driving the driving pulley; 2 Mounted on floor parts and including driven pulleys for fastening the belt.

In the invention according to claim 9, in the bottom part according to claim 7, the trolley comprises a power source for driving the belt, and the positioning mechanism is mounted to the first flooring material to adjust the tension of the belt, and one end of the belt A fixed tension control device and a fixing member mounted to the second bottom part and fixed to the other end of the belt.

The invention as set forth in claim 10 provides a floor unit for forming a travel area for driving a trolley driven by a belt on a floor formed by a grating supported by a plurality of struts. The floor unit includes a rail, a plurality of crossbeams, a plurality of bottom plates, and first and second floor parts. The rail for driving a trolley | bogie is formed by connecting several rail components. The plurality of crossbeams are supported directly or indirectly between the posts to intersect the rails. The plurality of bottom plates are supported on the crossbeam and are arranged to fill the gap between the rail and the grating. The pair of bottom parts includes a first floor material and a second floor material respectively disposed at both ends in the longitudinal direction of the rail. The first flooring has the same dimensions as the grating and, at one end in the longitudinal direction of the rail, is supported on the post. The second flooring material has the same dimensions as the grating and is supported by the posts on the opposite side of the first flooring material in the longitudinal direction of the rail. Positioning mechanisms for positioning the belt are mounted to the first floor material and the second floor material.

The invention according to claim 11 is the floor unit according to claim 10, wherein the positioning mechanism comprises: a driving pulley mounted on the first flooring material for winding the belt; a power source mounted on the first flooring material for driving the driving pulley; 2 Mounted on floor parts and including driven pulleys for fastening the belt.

The invention according to claim 12 is the floor unit according to claim 10, wherein the trolley has a power source for driving the belt, and the positioning mechanism is mounted to the first flooring material to adjust the tension of the belt, and one end of the belt is fixed. And a fixing member mounted to the second bottom part and fixed to the other end of the belt.

The invention according to claim 13 provides a conveying system in which a traveling area for running a truck is formed on a grating floor formed by applying a plurality of gratings having a predetermined shape, and a rail is installed in the running area. The plurality of struts supports the grating. The plurality of crossbeams are supported directly or indirectly on the posts located in the travel area. The crossbeam is laid across the posts to intersect the rails. The rail is formed by connecting a plurality of rail parts and is also supported on the crossbeam. A plurality of bottom plates is supported on the crossbeam in the travel area, and is arranged to fill the gap between the rail and the grating.

The invention according to claim 14 further includes the first and second bottom parts supported on the support at each end in the longitudinal direction of the rail for mounting the belt for driving the bogie along the rail. do. The first bottom part has a first bottom member having the same dimensions as the grating and a power source for rotationally driving the drive pulley to which the belt is wound. The power source is mounted to the first floor. The second bottom part comprises a second floor material which is supported by the support on the opposite side of the first floor material in the longitudinal direction of the rail and has the same dimensions as the grating, and a driven pulley which is mounted on the second floor material and the belt is wound. Equipped.

The invention according to claim 15 further includes a housing covering the travel area and a cleaning device for cleaning the inside of the housing.

(Action)

According to the invention as set forth in claim 1, a plurality of crossbeams are supported directly or indirectly on the grating posts, and are also laid across the rails. The rail is placed on a number of crossbeams. The bottom plate is placed on the crossbeam to fill the gap between the rails.

According to the invention as set forth in claim 2, the crossbeam is directly interposed between the posts. Since the bottom plate is a length of natural arrangement of the length of one side of the grating in the longitudinal direction of the rail, it is supported by the crossbeam at both ends thereof.

According to the invention as set forth in claim 3, since the rails are straight, the running area in which the crossbeams are arranged extends along the rows of gratings. The rail is located at at least one of both ends and the center of the crossbeam. Thus, a single bottom plate can be used, and the bottom plate fills the gap between the rails.

According to the invention as set forth in claim 4, the rail component is arranged at a predetermined position by engaging the engaging portion formed in the crossbeam.

According to the invention as set forth in claim 5, the trolley is driven by a belt running drive system, and the belt used for the traveling is mounted along the rail in a state positioned by positioning mechanisms provided at both ends in the longitudinal direction of the rail.

According to the invention as set forth in claim 6, the length of the rail part is a natural multiple of the length of one side of the grating, so that the end of the rail part can be fixed to the crossbeam.

According to the inventions of claims 7 to 9, the positioning mechanisms, which are pre-attached to the flooring material, are mounted at predetermined positions by mounting the floor parts to the posts at the same ends as the gratings at both ends in the longitudinal direction of the rail. As a result, the belt for driving the trolley is caught in a position positioned between the pair of bottom parts.

In particular, according to the invention as set forth in claim 9, the tension of the belt can be adjusted in a state in which a belt for driving the trolley is positioned between a pair of bottom parts.

According to the invention of Claims 10 to 12, the floor unit having the necessary parts assembled therein forms a travel area for driving the trolley driven by the belt on the floor formed by the plurality of gratings supported by the plurality of posts. Construction is simple.

According to the invention as set forth in claim 13, the conveying system is constituted by an assembled floor unit and floor parts and a bogie disposed thereon. The installation work of the conveying system is made simple by the assembled floor unit and the floor parts.

According to the invention as set forth in claim 14, in the case where the conveyance system having the tracked trolley is a belt driving drive system on the grating floor, the rail installation work and the belt installation work are easily performed by the assembled floor unit and the floor part.

According to the invention as set forth in claim 15, the trolley travels in a traveling area in the housing kept clean by the cleaning device. Therefore, in this conveyance system, the goods conveyed by the track trolley | bogie are kept clean.

EMBODIMENT OF THE INVENTION Hereinafter, 1st Embodiment of this invention is described with reference to FIGS.

As shown in FIG. 12, the bottom 2 of the clean room 1 is formed of a plurality of square gratings 3. The length L of one side of each grating 3 is about 60 cm. In the clean room 1, the conveyance system 7 for conveying articles 6, such as a semiconductor wafer, is arrange | positioned between the facilities 4 and 5 used for manufacture of a semiconductor, and the facilities 4 and 5.

As shown in FIG. 13, the conveyance system 7 is equipped with the conveyance vehicle 8, the housing | casing 9, and the control panel 14 as a tracked trolley | bogie. The housing 9 surrounds the entire area in which the transport vehicle 8 travels. The front and rear surfaces of the housing 9 are formed of a transparent plate made of resin or glass so that the position of the transport vehicle 8 and its working situation can be seen from the outside. The housing 9 is configured by connecting a plurality of house units 10 in the longitudinal direction. The width of one house unit 10 is twice the length of one side of the grating 3. On the ceiling of each house unit 10, a fan filter unit 11 as a cleaning device is arranged. The fan filter unit 11 is equipped with a fan and a filter (all are not shown). The air is cleaned by the filter and sent into the housing 9. The cleanliness of the inside of the housing 9 by the fan filter unit 11, that is, in the travel area in which the article 6 is conveyed, is maintained higher than the cleanliness of the outside of the housing 9 in the clean room 1.

Near the center in the longitudinal direction of the housing 9, a passage 12 and a door 13 for closing the passage 12 are arranged. The operator can traverse the housing 9 through the passage 12. In FIG. 13, the control panel 14 is provided at the right end of the housing 9. The setting of the travel of the carrier vehicle 8 and its control are made by operating the panel of the control panel 14.

As shown to FIG. 11, 13, many support | pillars 16 are installed in the whole area | region of the concrete surface 15, standing up at predetermined intervals. The spacing of the struts 16 is set equal to the length (about 60 cm) of one side of the grating 3. The grating 3 is supported on the strut 16 at its four corners.

As shown in FIG. 10, the belt running drive system is employ | adopted for the drive of the conveyance vehicle 8. As shown in FIG. That is, the plurality of pulleys 17, 18, 19, and 20 are divided and arranged at both ends of the travel area. The traveling belt (timing belt) 21 is wound around the pulleys 17, 18, 19, 20 so as to follow the track of the transport vehicle 8. Both ends of the belt 21 are fixed to the bottom of the undercarriage 22 of the transport vehicle 8. When the motor 23 is driven, the transport vehicle 8 moves in accordance with the rotation direction of the motor 23. Each pulley 17 to 20 constitutes a positioning mechanism of the transport vehicle.

As shown to FIG. 9, FIG. 10, the chassis 22 is provided with four wheels 24 and a pair of guide rollers 25. As shown in FIG. Four wheels 24 are rotatably mounted in four corners of the bottom of the chassis 22. The pair of guide rollers 25 are attached at intervals along the centerline of the width of the chassis 22. The lowest position of the outer circumferential surface of each guide roller 25 is lower than the lowest position of the outer circumferential surface of each wheel 24.

As shown in FIG. 9, FIG. 11, the guide rail 26 which has a groove is provided in the center of a travel area | region. In addition, the two traveling rails 27 are provided in parallel on both sides of the guide rails 26. Four wheels 24 of the transport vehicle 8 are mounted on the running rails 27 and rolled along the running rails 27. The guide roller 25 is disposed in the groove of the guide rail 26 and rolls along the guide rail 26.

As shown in FIG. 10, the belt 21 is guided by two guide pulleys 18 and 19 and a driven pulley 20. The upper portion of the belt 21 located between the upper guide pulley 18 and the driven pulley 20 is accommodated in the groove of the guide rail 26 and is disposed so that the upper surface and the bottom of the bottom 2 coincide with each other. . As shown in FIG. 13, the lower part of the belt 21 located between the lower guide pulley 19 and the driven pulley 20 is located in the back surface side of the grating 3. As shown in FIG.

9 and 10, an article support 28 having a frame structure is mounted on the chassis 22. As shown in FIG. A base 29 for placing the article 6 is arranged on top of the article holder 28. In FIG. 13, the sensor 30 for detecting whether an operator or a foreign object exists in the travel area is provided in the right end part and the left end part in the housing 9. As shown in FIG. Since the article holder 28 is formed in a frame structure, the detection light emitted from the sensor 30 may pass through a gap of the frame of the article holder 28 without being blocked by the article holder 28.

Hereinafter, the floor structure of the travel area will be described with reference to FIGS. 1 to 8 and 11.

As shown in FIG. 11, the floor unit 31 is attached to the floor in the traveling area instead of the grating 3. The floor unit 31 includes a running floor 32 having rails 26 and 27. The running floor 32 is supported on the support 16 for supporting the adjacent grating 3.

The floor unit 31 includes a group of parts for constructing a track area on which rails 26 and 27 are laid, and a set of floor parts 33 and 34 disposed at both ends of the track area for mounting the belt 21. It consists of The group of parts used for the construction of the track area is a crossbeam 37, a guide rail part 38, a traveling rail part 39 and a bottom plate 40. Each part is used as many as necessary depending on the length of the track area. The bottom part 33 is a unit in which the motor 23 and the driving pulley 17 are integrally mounted to the flooring 35 having the same dimensions as the grating 3. The bottom part 34 is a unit in which the driven pulley 20 is integrally mounted on the flooring material 36 having the same dimensions as the grating 3.

Four corners of the grating 3 are formed with pinholes not shown. As shown in FIG. 1, four pins 16a are formed at the upper end of the support 16. A screw hole is formed in the center of each pin 16a. The pin 16a is inserted into the pin hole of the grating 3. The grating 3 is fixed to the support 16 by inserting a bolt into the threaded hole of each pin 16a on the upper surface side of the grating 3.

Here, the bottom structure of the track area will be described with reference to FIGS. 1 to 3.

The crossbeam 37 is about the same length as one side of the grating 3. As shown in FIG. 1, FIG. 11, the some cross beam 37 is across between the paired struts 16 in the width direction in a track area. Each crossbeam 37 is arranged to intersect with the traveling trajectory (at right angles with the traveling trajectory in this example). Each of the rail parts 38 and 39 and the bottom plate 40 are attached to the cross beams 37 in a state of being supported from the lower surface thereof.

The length of the long side of the bottom plate 40 is 2 times (2L) the length L of one side of the grating 3. The length of the long side of the bottom plate 40 is a natural arrangement (n × L: where n is a natural number) of the length of one side of the grating 3, so that the bottom plate 40 crosses the beams 37 at both ends in the longitudinal direction. Can be screwed against. The length of the short side of the bottom plate 40 is set to the length of half of the value obtained by subtracting the total value of the widths of the three rail parts 38 and 39 from the length of one side of the grating 3. As a result, the bottom plate 40 can fill the gap between the rail parts 38 and 39.

On the other hand, the length of each rail part 38 and 39 is 4 times 4L of the length of one side of the grating 3. The length of the rail parts 38 and 39 may not be four times as long as it is the length of the natural arrangement of one side of the grating 3. In addition, the length of the rail component 38 may be the same as or different from the length of the rail component 39.

The bottom plate 40 is formed with a plurality of circular holes 40a. A circular hole 38a is formed at the bottom of the guide rail component 38 at regular intervals. Each of the circular holes 40a and 38a formed in the bottom plate 40 and the guide rail component 38 passes through the running floor 32 without exhausting the blower air from the fan filter unit 11 to the exhaust duct. Can flow. In addition, dust and dirt can be prevented from accumulating on the bottom of the guide rail part 38 by the circular hole 38a of the guide rail part 38.

2 and 3 are cross-sectional views of the running floor 32. Two pin holes 37a are formed at both ends of the crossbeam 37, respectively. The pin 16a of the support 16 is inserted through the pinhole 37a of the crossbeam 37. The bolt 41 is fitted into the screw hole of each pin 16a on the upper surface side of the crossbeam 37. In this way, the crossbeam 37 is fixed to the strut 16. The head of the bolt 41 is buried so as to coincide with the upper surface of the convex portion 37b formed on the upper surface of both ends of the crossbeam 37. The convex portion 37b is fitted to the concave portion formed on the rear surface of the traveling rail component 39. The traveling rail component 39 is disposed horizontally in contact with the entire upper surface of the convex portion 37b. As shown in FIG. 2, the recessed part 37c is formed in the center of the crossbeam 37. As shown in FIG. The guide rail part 38 is fitted to the recessed part 37c. As shown in Figs. 1 and 2, the rail parts 38 and 39 are fixed to the crossbeam 37 by screws 42 and 43, respectively. In addition, the widths of the two crossbeams 37 respectively disposed at both ends of the track area are half the width of the other crossbeams 37.

The bottom plate 40 has both side surfaces curved downward at right angles. A plurality of cylindrical support portions 40b are welded to the rear surfaces of both end portions in the longitudinal direction of each bottom plate 40. The bottom plate 40 is fixed to the crossbeam 37 by inserting the screw 44 into the hole of the support part 40b and inserting it into the crossbeam 37. Since the cross beam 37 is made of aluminum and has a rib 37d, the cross beam 37 is lightweight and maintains a predetermined strength.

In each crossbeam 37, two through holes 37e are formed along the rail. Various sensors for running control of the transport vehicle 8, supply wires for various electric devices, and signal lines are inserted and supported through these through holes 37e.

Next, the structure of the bottom parts 33 and 34 is demonstrated. 4 to 6, necessary parts such as a motor 23, a drive pulley 17, guide pulleys 18 and 19, and a fan filter unit 45 are integrally mounted on the bottom end 35 of the right end in advance. It is. The right end floor material 35 is the same size as the grating 3. Four corners of the right end floor material 35 are formed with the same pinholes (not shown) as the grating 3. The pin 16a of the support 16 is inserted into the pin hole of the right end bottom material 35. The right end bottom part 33 is attached to the support 16 by fitting the bolt B into the screw hole of the pin 16a on the upper surface side of the right end bottom material 35.

The motor 23 is supported by the support material 46 on the upper surface of the floor material 35. The drive pulley 17 is attached to the drive shaft of the motor 23. The flooring material 35 has the cut part 35a, and the cut part 35a is connected so that it may continue in the recessed part of the guide rail 26. As shown in FIG. The upper guide pulley 18 is supported to be rotatable to the support part 47. The lower guide pulley 19 is supported by the support portion 48 so as to be rotatable. A part of the lower guide pulley 19 is located in the cut part 35a.

A plurality of circular holes 35b are formed in the right end floor material 35. Two support arms 49 are mounted on the upper surface of the right end floor material 35. The cover 50 is supported by two support arms 49 and covers the motor 23, the pulleys 17 to 19, the fan filter unit 45, and each circular hole 35b. The dust and dirt generated in the cover 50 with the operation of the motor 23, the respective pulleys 17 to 19, and the belt 21 are discharged to the bottom of the flooring material 35 by the fan filter unit 45. . In addition, the guide pulley 18 is abbreviate | omitted in FIG.

Next, the left end bottom part 34 is demonstrated. As shown in FIG. 7 and FIG. 8, the length of one side of the left end flooring material 36 is the same as that of the grating 3. Four corners of the left end flooring material 36 are formed with the same pinholes (not shown) as the grating 3. The left end bottom part 34 is inserted by inserting the pin 16a of the support 16 into the pin hole of the left end bottom 36, and fitting the bolt B to the pin 16a from the upper surface side of the bottom 36. ) Is mounted to the strut 16. The left end floor 36 has a cutout 36a extending continuously with the recess of the guide rail 26. A large number of circular holes 36b are formed almost in front of the left end floor material 36.

The lower surface of the flooring material 36 is equipped with a support 52 for supporting the driven pulley 20 so as to be rotatable. A part of driven pulley 20 is arrange | positioned in cut part 36a. The uppermost part of the driven pulley 20 is located at substantially the same height as the lowermost part of the guide pulley 18 of the right end bottom part 33. The lowermost part of the driven pulley 20 is located at the same height as the lowermost part of the guide pulley 19 of the right end bottom part 33. Therefore, the belt 21 located above and the belt 21 located below extend in parallel with each other. The cover 53 which covers the driven pulley 20 is attached to the left end floor material 36. Dust and dirt in the cover 53 generated at the sliding portion of the driven pulley 20 or the belt 21 are guided downward of the flooring 36 by the cover 53. In addition, the belt 21 is abbreviate | omitted in FIG.

The traveling floor 32 on which the conveying system 7 is installed is mounted as follows.

Each crossbeam 37 is traversed between the struts 16 to which the orbital zones correspond and is fixed to the struts 16 in the manner described above. Each running rail part 39 is fitted to the convex parts 37b at both ends of each crossbeam 37, respectively. A predetermined number of traveling rail parts 39 are connected in series to form a traveling rail 27. The guide rail component 38 is fitted to the recess 37c located in the center of each crossbeam 37. A predetermined number of guide rail parts 38 are connected in series to form one guide rail 26. Each rail part 38, 39 is fixed to each crossbeam 37 by using a plurality of screws 42, 43. A plurality of bottom plates 40 are laid in the gaps of two rows formed between each running rail 27 and the guide rail 26. Each bottom plate 40 is fixed to each crossbeam 37 by screws 44.

Subsequently, both bottom parts 33 and 34 are attached to the right end and the left end of the travel area. The pins 16a of the support 16 are inserted through the pin holes at the four corners of the flooring materials 35 and 36, respectively. The bolt B is inserted into the screw hole of the pin 16a from the upper surface side of the flooring materials 35 and 36. Thereby, both floors 35 and 36 are secured to the strut 16. Since various necessary parts are integrally mounted to the floor parts 33 and 34 together with the floor materials 35 and 36, the mounting of both floor parts 33 and 34 supports the floor materials 35 and 36. Just work on mounting. In this way, the mounting work of the running floor 32 is completed.

The work for attaching the belt 21 to the running floor 32 is performed by removing the row of bottom plates 40 arranged between the guide rail 26 and one running rail 27. The work of fixing the belt 21 to the transport vehicle 8 is performed by removing a part of the bottom plate 40. The work for wiring the supply wires or the signal wires to the back surface of the traveling floor 32 is performed by removing the bottom plate 40 in a row.

In order to maintain and repair the transport vehicle, the electric wires arranged on the rear surface of the traveling floor 32 are inspected, or when the belt 21 is replaced, arranged between the guide rail 26 and one driving rail 27. The bottom plate 40 may be removed as long as necessary. At this time, since the bottom plate 40 is 2L in length 2L of the length of one side of the grating 3, the number of peelings can be reduced compared with the case where the grating 3 is removed. In addition, since the bottom plate 40 is a member separate from the rail parts 38 and 39, it is relatively light weight. Therefore, the work of removing the bottom plate 40 is easy.

In the first embodiment, the following effects are obtained.

(1) In the floor structure of the present invention, the rails 26 and 27 can be laid by mounting the components of the floor unit 31 to the grating support 16. Therefore, the construction which spreads and installs the guide rail 26 and the traveling rail 27 for driving the conveyance vehicle 8 on the floor 2 is made simple.

(2) A plurality of rows of crossbeams 37 are laid across the struts 16 in a direction intersecting with the traveling trajectory, and the rail parts 38 and 39 and the bottom plate 40 are on their crossbeams 37. Is installed. Thus, the rail parts 38 and 39 and the bottom plate 40 are firmly supported against large loads from above.

(3) Since the cross beam 37 is formed with the convex portion 37b and the concave portion 37c on which the rail parts 38 and 39 are mounted, the rail parts 38 and 39 are formed with the convex portion 37b or the like. It is arrange | positioned in an accurate position by simple operation which fits into the recessed part 37c.

(4) The length of the long side of the bottom plate 40 is a natural arrangement of the length L of one side of the grating 3. Therefore, both ends of the bottom plate 40 are disposed on the crossbeam 37 and fixed to the crossbeam 37. Therefore, even if a large load acts on the upper surface of the running floor 32, the running floor 32 is firmly supported. In particular, in the present embodiment, since the length of the long side of the bottom plate 40 is twice the length of one side of the grating 3, the number of sheets of the bottom plate 40 to be used can be relatively small. Therefore, the process of attaching and detaching the bottom plate 40 is reduced.

(5) The area of the running floor 32 is set to the area of one line of the grating 3. Moreover, the area width corresponds to the space | interval of the strut 16. As shown in FIG. The guide rail 26 is disposed at the center of the zone width of the running floor 32. In addition, two traveling rails 27 are arranged at both ends of the area width thereof. In addition, since the widths of the guide rails 26 and the traveling rails 27 are equal to each other, the bottom plate 40 disposed between the guide rails 26 and each of the traveling rails 27 has a single dimension. It may be a kind of component. Therefore, the manufacturing cost of the bottom plate 40 is reduced. In addition, since the effort to compare components with each other at the time of mounting the bottom plate 40 can be omitted, the mounting work is smooth.

(6) The bottom plates 40 are arranged in two rows on both sides of the guide rails 26. Therefore, by removing the bottom plate 40 for one row of the guide rails 26 by the required number of times, maintenance and repair of electric wires arrange | positioned on the back surface of the running floor 32, and replacement of the belt 21 are performed. can do. In addition, the bottom plate 40 is a separate part from the rail parts 38 and 39, and is relatively light, so that the bottom plate 40 is easier to remove than the grating 3.

(7) The length of the rail parts 38 and 39 is a natural multiple of the length of one side of the grating 3 and is longer than the length of the long side of the bottom plate 40. Therefore, there are few connection parts of the rail parts 38 and 39, and the rattling of the conveyance vehicle 8 which is easy to generate | occur | produce in those connection parts is reduced.

(8) The right end bottom part 33 has the motor 23 and the drive pulley 17 previously attached to the flooring 35. The left end bottom part 34 has the driven pulley 20 previously attached to the flooring 36. That is, the right end and left end bottom parts 33 and 34 are equipped with the various parts required for mounting the belt 21 along the guide rail 26 as a unit beforehand. The right end and left end bottom parts 33 and 34 are included as components of the bottom unit 31. Therefore, the process of the assembly work of the running floor 32 is simplified.

(9) The housing 9 covers the traveling area with the transport vehicle 8. The housing 9 is provided with a fan filter unit 11 for further improving the cleanliness of the interior of the housing 9 than the cleanliness of the clean room 1. Therefore, articles 6, such as semiconductor wafers, are conveyed in a clean atmosphere. As a result, the yield of the semiconductor wafer to be produced is improved.

(10) Since the conveyance vehicle 8 is driven by the belt running drive system, components of the drive system such as the motor 32 and the like are disposed at a position away from the conveyance vehicle 8. Thus, contamination of the article 6 due to dust and dirt generated in the sliding portions of the components of these drive systems is reduced.

(11) Since the passage 12 is formed in the housing 9, the operator can cross the housing 9. Therefore, even in a structure in which the traveling area of the transport vehicle 8 is covered with the housing 9, the disturbance of the passage of the operator can be minimized.

(12) Since the article support 28 of the transport vehicle 8 has a frame structure, the detection light of the sensor 30 mounted at both ends of the travel area can pass between the frames. Therefore, it is possible to reliably detect that an operator or a foreign object has entered the traveling area.

(13) A large number of circular holes 40a are formed almost in front of the bottom plate 40. A circular hole 38a is also formed in the bottom of the guide rail component 38. Therefore, the air flow flowing downward from the ceiling can pass through the bottom 2 without staying. As a result, the dust and the dust which generate | occur | produced above the bottom 2 are smoothly sent to the exhaust duct below the bottom 2 with airflow. Further, the guide rail component 38 is grooved, but dust and dirt are hard to stay in the groove. Therefore, the inside of the traveling area can be kept clean.

EMBODIMENT OF THE INVENTION Hereinafter, 2nd Embodiment of this invention is described with reference to FIG. 14, FIG. About the same structure as 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

In the second embodiment, the motor 61 is provided on the undercarriage of the transport vehicle 22. The drive pulley 62 is attached to the drive shaft of the motor 61. The belt 21 guided by the two guide pulleys 63 is wound around the drive pulley 62. Both ends of the belt 21 are fixed to the bottom surfaces of both ends in the longitudinal direction of the rail. Four wheels 24 are mounted on two travel rails 27 and rolled along the travel rails 27. The guide wheel 64 installed at the bottom center of the chassis 22 is rolled along the guide rail 26. When the motor 61 is driven, the transport vehicle 8 moves along the rails 26 and 27 toward the end of the belt 21.

The bottom structure of the second embodiment in the track area is constituted by the crossbeam 37, the rail parts 38 and 39, and the bottom plate 40 similarly to the first embodiment.

Mechanisms for fixing the ends of the belt 21 are mounted in advance on the bottom parts 65, 66 disposed at both ends of the track area.

The left end bottom part 65 has a left end bottom material 67, and the left end floor material 67 is the same size as the grating 3 and has pins of the strut 16 in the four corners, the same as the grating 3. It has a pinhole (not shown) for inserting through 16a. The left end bottom member 67 is provided with a fixing member 68 for fixing the left end of the belt 21. The right end bottom part 66 also has the right end bottom material 69 of the same shape as the left end bottom material 67. Each floor member 67 and 69 is provided with a large number of circular holes 69a. The right end bottom material 69 is provided with the tension control apparatus 70 which can fix the right end part of the belt 21, and can adjust the tension of the belt 21. As shown in FIG.

As shown in FIG. 15, the tension adjusting device 70 includes a drum 71 capable of winding the belt 21, and a ratchet mechanism 72. The right end of the belt 21 is fixed to the drum 71. The ratchet mechanism 72 permits the rotation of the drum 71 in the winding direction of the belt 21 and further regulates the rotation of the drum 71 in the loosening direction. The ratchet mechanism 72 is provided with a ratchet gear 73 which can rotate integrally with the drum 71 and an engaging ring 74 that can engage with the ratchet gear 73. The rotating shaft 75 of the drum 71 is supported by the support 76. The operation lever 77 is attached to the end of the rotation shaft 75 in its use.

The support 76 has a plurality of long holes 80 for inserting the fixing bolt 79 through. The long hole 80 is formed in parallel with the extension line of the rail 26. The support base 76 is fixed to the upper surface of the bottom end 69 of the right end by the fixing bolt 79. Loosening the fixing bolt 79, the support 76 is slidable on the right end floor 69 along the long hole (80). The supporting portion 69b is fixed to the right end bottom material 69. The adjustment bolt 78 connects the support 69b and the support 76. By rotating the adjusting bolt 78 in a state in which the fixing bolt 79 is loosened, the support 76 slides. The tension of the belt 21 is finely adjusted according to the rotational position of the adjusting bolt 78.

Tension is applied to the belt 21 when the drum 71 is rotated by operating the operation lever 77 engaged with the rotation shaft 75 while the fixing bolt 79 is loosened. At this time, the belt 21 is pulled at the pitch interval of the ratchet gear 73. Next, the tension of the belt 21 is finely adjusted by rotating the adjusting bolt 78 to change the position of the drum 71. In the second embodiment, the bottom unit 31 is constituted by the crossbeam 37, the rail parts 38 and 39, the bottom plate 40, and the bottom parts 65 and 66.

In the second embodiment, the following effects are obtained in addition to the effects of the first embodiment.

(14) Since the tension adjusting device 70 is integrated in the right end bottom material 69 of the right end bottom part 66, the operation for mounting the mechanism for tension adjustment of the belt 21 to the grating 3 is performed. Not required. Therefore, the process of constructing and installing the running floor at the site is simplified.

In addition, this invention is not limited to 1st and 2nd embodiment, For example, you may change as follows.

Instead of the straight rail, a curved rail may be employed. In this case, for example, the grating 3 of the portion corresponding to the orbit along the curve is removed and a plurality of crossbeams 37 intersect between the struts 16 so as to intersect with the curve orbit. The cross beam 37 is formed in consideration of the position and the shape of the concave portion and the convex portion as the engaging portion so that the rails curve the track when the rail component is inserted. The bottom plate is formed into a shape that can fill the gap in accordance with the curved shape of the rail parts. If such a configuration is adopted, the rail can be installed by simple construction using the support 16 even in a curved track.

The driving method of the tracked bogie is arbitrary. For example, the wheel may be driven by a motor mounted on the vehicle body. In this case, the bottom parts 33, 34, 65 and 66 are not necessary, and the bottom unit is comprised of the crossbeam 37, the rail parts 38 and 39, and the bottom plate 40. As shown in FIG.

The cross beam 37 does not need to be disposed between all the struts 16 along the travel area, and may be disposed at any interval according to the weight to be supported.

The crossbeam 37 may be attached to the support 16 via a separate support crossbeam without directly attaching the support to the support 16. That is, a pair of supporting crossbeams is laid between the two struts 16 in parallel with the rails and facing each other. The crossbeam 37 is sandwiched between the supporting crossbeams. As a result, the crossbeam 37 is arranged in a direction crossing the traveling trajectory. According to this structure, the crossbeam 37 can be arrange | positioned at a pitch shorter than between pillars. Therefore, even when the strength of the bottom plate is relatively weak, since it can be supported by more crossbeams 37 at short intervals from the bottom surface, the bottom 2 can secure the desired strength. In addition, since the length of the bottom plate along the rail should just be so that both ends may be located in the upper surface of a crossbeam, it does not need to set it as the natural multiple of the length of one side of the grating 3.

Two guide rails may be omitted, and only one guide rail may be used. In this case, the wheel rolls on the upper surface of the grating or the bottom plate. If a hole is not formed in the area | region which a wheel contact | connects on the upper surface of a bottom plate, a conveyance vehicle can run smoothly.

The guide rail may be omitted, and only two running rails may be used. For example, in the guided trolley bogie that travels while detecting the track by magnetism or reflected light, a guide rail is not necessary if magnetic tape or colored tape is attached along the track. In this case, only two running rails are employed, and the width of the bottom plate is set to be almost equal to the distance between the rails.

The installation position of the guide rail is not limited to the center of the crossbeam. In this case, two types of bottom plates having different widths are prepared.

The width of the traveling area spanning the cross beam is not limited to the width of one sheet of the grating 3. The width of the travel area may be a width of a plurality of gratings depending on the distance between the wheels of the wheels of the tracked bogie (carrier). For example, one rail may be installed for each grating row over a plurality of grating rows. In this case, the width of the bottom plate (the length of the side crossing the traveling track) may be longer than the length of one side of the grating 3.

In the bottom structure for the track-driven trolley of the belt driving drive system, the cross beams 37, the rail parts 38, 39 and the bottom plate 40 are not used without the floor parts 33, 34, 65 and 66. It is also possible to adopt a configuration in which only the track area of the running floor is laid and used to directly mount a pulley or a motor necessary for attaching the belt to the grating 3 using a mounting bracket or the like.

The present invention may be embodied on a grating floor other than a clean room. For track tracks other than belt driving, the floor unit is composed of parts except floor parts.

The crossbeam 37 and the grating 3 may be attached to the support 16 only by pushing the pin 16a of the support 16 without using screws or bolts.

According to the present invention, the construction of laying the rail of the track trolley on the grating floor is made simple.

Claims (15)

A conveying station is formed in the grating floor 2 formed by applying a plurality of gratings 3 having a predetermined shape, and the rails 26 and 27 are laid in the running area so as to form a driving station for driving the truck 8. As the floor structure for the system, A plurality of struts 16 for supporting the grating 3, A plurality of crossbeams 37 directly or indirectly supported by the support 16 located in the travel area, The cross beam 37 is placed across the strut 16 so as to intersect the rails 26, 27, and the rails 26, 27 are formed by connecting a plurality of rail parts 38, 39. Is also supported on the crossbeam 37, In the traveling area, a floor for a conveying system, which is supported on the cross beam 37 and has a plurality of bottom plates 40 arranged to fill the gap between the rails 26 and 27 and the grating 3. rescue. 2. The cross beam (37) according to claim 1, wherein the crossbeam (37) is directly supported by the support (16), and each of the gratings (3) has a square shape, and each of the bottom plates (40) has a rectangular shape. A length along the rails (26, 27) of the bottom plate (40) is a natural arrangement of the length of the length (L) of one side of the grating (3). 2. The traveling area of claim 1, wherein the travel region extends linearly along the rails (26, 27), and the rails (26, 27) are both ends of the cross beam (37) and the center of the cross beam (37). The bottom structure for the conveying system which is supported by at least one of the said, and the said several bottom boards 40 are all the same dimension. The floor structure according to claim 1, wherein said crossbeam (37) is provided with engaging portions (37b, 37c) for engaging said rails for positioning said rails (26, 27). 2. The cart (8) according to claim 1, wherein the trolley (8) is driven by belts (21) mounted along the rails (26, 27), and the belts (21) are provided at both ends in the longitudinal direction of the rails (26, 27). A bottom structure for a conveying system provided with positioning mechanisms (17, 18, 19, 20; 28, 70) for positioning at both ends thereof. The floor structure according to claim 1, wherein the length of each rail part (38, 39) is a natural arrangement of the length (L) of one side of each grating (3). In the grating bottom 2 formed by supporting the plurality of gratings 3 having a predetermined shape to the plurality of struts 16, a traveling area for driving the trolley 8 driven by the belt 21 is formed. It is applied to the floor structure installed with the rails 26, 27 in the running area, the longitudinal direction of the rails 26, 27 for mounting the belt 21 along the rails 26, 27 As a pair of bottom parts 33, 34; 65, 66 for the conveying system respectively disposed at both ends of A first floor member (35; 69) having the same dimensions as the grating (3) and supported by the support (16) at one end in the longitudinal direction of the rails (26, 27), A second flooring material 36; 67 having the same dimensions as the grating 3 and supported by the support 16 opposite the first flooring material 35; 69 in the longitudinal direction of the rail; A positioning mechanism 17, 18, 19, 20; 70, 68 mounted to the first floor material 35; 69 and the second floor material 36; 67 to position the belt 21. Floor parts for conveying systems. 8. The driving mechanism according to claim 7, wherein the positioning mechanism comprises: a drive pulley (17) mounted to the first floor material (35) to wind the belt (21); A power source 28 mounted to the first flooring material 35 to drive the driving pulley 17; A bottom part for a conveying system comprising a driven pulley (20) mounted on a second bottom part (36) and for winding said belt (21). 8. The vehicle (8) according to claim 7, wherein the trolley (8) has a power source (23) for driving the belt (21), The positioning mechanism is mounted on the first flooring material 69 to adjust the tension of the belt 21 and the tension adjusting device 70 is fixed to one end of the belt 21, A bottom part for a conveying system comprising a fixing member (68) mounted to a second bottom part (67) and fixed to the other end of said belt (21). A conveying system for forming a travel area for driving the trolley 8 driven by the belt 21 on the bottom 2 formed by the plurality of gratings 3 supported by the plurality of struts 16. As the floor unit 31 for And rails 26 and 27 formed by connecting a plurality of rail parts 38 and 39 to drive the trolley 8, A plurality of crossbeams 37 supported directly or indirectly between the struts 16 so as to intersect the rails 26, 27, A plurality of bottom plates 40 supported on the crossbeams 37 and disposed to fill gaps between the rails and the gratings 3, In order to mount the belt 21 along the rails 26, 27, a pair of bottom parts 33, 34; 65, 66 are disposed at both ends in the longitudinal direction of the rails 26, 27, respectively. , The bottom parts 33, 34; 65, 66 A first floor member (35; 69) having the same dimensions as the grating (3) and supported by the support (16) at one end in the longitudinal direction of the rails (26, 27), A second flooring material 36; 67 having the same dimensions as the grating 3 and supported by the support 16 opposite the first flooring material 35; 39 in the longitudinal direction of the rail; A positioning mechanism (17, 18, 19, 20; 70, 68) mounted to the first floor (35; 69) and the second floor (36; 67) to position the belt (21). Floor unit for conveying system. The driving mechanism according to claim 10, wherein the positioning mechanism includes: a drive pulley (17) mounted on the first floor material (35) to wind the belt (21); A power source 23 mounted to the first flooring material 35 to drive the driving pulley 17; And a driven pulley (20) mounted on the second bottom part (36) and for winding the belt (21). 11. The trolley (8) according to claim 10, wherein the trolley (8) has a power source (23) for driving the belt (21), The positioning mechanism is mounted on the first flooring material 69 to adjust the tension of the belt 21 and the tension adjusting device 70 is fixed to one end of the belt 21, And a fixing member (68) mounted to the second bottom part (67) and fixed to the other end of the belt (21). A conveying area is formed in the grating floor 2 formed by applying a plurality of gratings 3 having a predetermined shape, and the rails 26 and 27 are laid in the running area so as to drive the trolley 8 therein. As the system 7, A plurality of struts 16 for supporting the grating 3, A plurality of crossbeams 37 directly or indirectly supported by the struts 16 located in the travel area, the crossbeams 37 intersecting with the rails 26 and 27; 16 between them, the rails 26, 27 are formed by connecting a plurality of rail parts 38, 39, and are supported on the crossbeam, And a plurality of bottom plates (40) which are supported on the crossbeam (37) in the traveling area and are arranged to fill the gap between the rails (26, 27) and the grating (3). 14. The first and the first and second ends of the rails 26 and 27 for mounting a belt 21 for driving the trolley 8 along the rails 26 and 27. And further provided with second bottom parts 33, 34; 65, 66, The first bottom part 33 is supported by the support 16 and is mounted on the first flooring material 35 having the same dimensions as the grating 3 and the first flooring material 35 and the belt 21. A power source 23 for rotating and driving the driving pulley 17 wound around The second bottom part 34 is supported by the support 16 on the opposite side of the first flooring material 35 in the longitudinal direction of the rails 26, 27 and has the same dimensions as the grating 3. Second flooring material having a 36, And a driven pulley (20) mounted on the second floor (36) and on which the belt (21) is wound. 14. The conveying system according to claim 13, further comprising a housing (9) covering the travel area and a purifier (11) for cleaning the inside of the housing (9).