TW522054B - System for cleaning boxes, box cleaner, and method for cleaning a container, boxes, and box doors - Google Patents

Abstract

A cleaning system for cleaning boxes (52) or containers used to carry semiconductor wafers and other flat articles, has box holder assemblies (50) and a box door holder assembly (300) attached to a rotor (36) within an enclosure (38). Upper and lower hooks (96, 108, 314, 316) on the box holder and box door holder assemblies hold boxes (52) and doors (325) as the rotor spins. Liquid spray manifolds (406) have one or more spray nozzles (430) that spray at an angle toward or away from the direction of rotation of the rotor, or an angle up or down, rather than straight at the boxes in the box holder assemblies. Improved spray coverage and cleaning is achieved. Boxes and their doors, such as front opening unified pods (FOUP), are both efficiently cleaned and handled.

Description

522054 A7 B7 V Description of the invention G) Field of the invention The field of the invention is a cleaning device for cleaning and processing semiconductor wafers, substrates, flat-panel displays or similar flat objects and workpieces that require low pollution levels. Semiconductor wafers, substrates, photomasks, flat-panel displays, data discs, optical media, and other related semiconductor industry items (collectively referred to herein as wafers) are quite sensitive to contamination. These items or wafers require a relatively low level of pollution Even particles can cause damage in articles or components, so in fact, it is necessary to maintain a high level of cleanliness in all manufacturing steps. Semiconductor wafers and similar items are usually manufactured in batches. Batch containment occurs during the entire production process, or in one or more process steps, or related containment operations. Batch processes usually use a certain type of carrier. Tools, containers, or boxes (collectively referred to herein as carriers) to hold wafers. The wafer carrier can have a variety of designs. In the box carrier of the process equipment transportation process, the wafer can be contained and sealed from contamination; other carriers are open, allowing the process liquid or gas to contact the carrier contained in the carrier. Wafer. Cleaning the wafer carrier is necessary to prevent particles and contaminants on the carrier from contaminating the wafer. However, cleaning wafer carriers is quite difficult because they usually have grooves, grooves, corners, openings, etc. A known wafer carrier is a front-opening integrated wafer cassette, or FOUP. A FOUP carrier has a A five-sided box with an open front end. A door is attached to the front of the box to seal the box from outside contaminants and help maintain wafer cleanliness. F 〇 U P or other carriers can be designed to accommodate 200mm or 300mm wafers. Therefore, their large size and the above -4- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Cao

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V. Description of the invention G If they have an internal hollow area instead of: straight spray cleaning technology cleaning, because the cleaning liquid will accumulate in them (therefore, the cleaning device needs improved devices and technology. In the centrifugal cleaner The carrier can be cleaned continuously. For example, in the centrifugal cleaner shown in the U.S. Patent No. ^ 7 = 128, a box or a carrier with an upper opening or a box front from the rotor radially outward from the rotor is loaded on a rotor soil. When the rotor is rotating, spray the box with cleaning liquid and blow dry air. The centrifugal force helps to remove the cleaning liquid from the box and dry the box. These technologies have been effective for different types of carriers and boxes. However, to achieve better and more reliable vehicle and door cleaning is still a challenge in engineering design. The FOUP vehicle includes a box and a separate door, and both need to be cleaned, so an effective cleaning foup is required. Two-element device. First of all, the device for cleaning the door of a vehicle includes an ultrasonic transducer in a cleaning tank. Preferably, an elevator supports a base for accommodating a plurality of doors. The lowering machine moves the door in and out of the cleaning tank. When lowering the base to enter the tank, it is better to stick a slot cover on the elevator and seal the tank. This can effectively clean the door even if they have a hollow space And other difficult-to-clean shapes. The first 'centrifugal cleaner for cleaning the carrier box has a rotor therein'. The box receiving container on the rotor includes upper and lower hooks, and the upper side of the box is placed behind the upper hook. , The box is rotated to the position, and the upper and lower hooks are locked on the rotor. Therefore, the box can be installed and locked on the rotor without moving the latch or other locking elements. -5- Paper Size National Finance Minister of Shicai State) M specifications (⑽X297 public love) 522054 A7 B7

5. Description of the invention C Third, the system for cleaning semiconductor wafers or other flat objects includes a combination of a box cleaner and a door cleaner. The box cleaner has a rotor therein, and the box containing components on the rotor include Hook up and down to lock the box on the rotor. The door cleaner is preferably adjacent to the box cleaner. The door cleaner has an ultrasonic transducer in a cleaning tank, and an elevator moves the door into and out of the cleaning tank, so that the box and door can be effectively cleaned and contained in a single location. . Fourth, a box or FOUP door receiving assembly is provided on the rotor. The box door receiving assembly preferably has a plurality of box door receiving positions. Each box door receiving position preferably has a door guide and a door hook or a door latch. The box accommodating component can use a box cleaner to clean the box and door, and can avoid cleaning the door individually. Fifth, the device for cleaning the carrier includes a rotor for transporting the container or the box, and the open end of the box faces the radially outer portion. The spray manifold preferably has a linear spray nozzle and an angled spray nozzle. The linear spray nozzle preferably provides a spray stream that is directed to the center of the rotor and usually directly into the box; the angled spray nozzles are facing and / or carrying The direction of rotation is preferably on the front and / or backflow sides, corners, and outside the box, which improves cleaning. Sixth, a spray manifold is provided with spray nozzles having an up and / or down angle. Other further inventive features will appear later, and the present invention also exists in the sub-system and combination of the above-mentioned features. The features of the various specific embodiments described may be implemented not only in any of the specific embodiments described above. An object of the present invention is to provide an improved cleaning device and method. Brief description of the drawings -6- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) v Binding line 522054 A7

In the figure, the same reference numerals represent the same components in multiple views: Figure 1 is a perspective view of a cleaned carrier box and carrier door used to house semiconductor wafers and similar objects. FIG. 2 is a perspective view of a rotor shown in FIG. 1 in the box cleaner. FIG. 3 is an enlarged perspective view of the box receiving container assembly shown in FIG. 2. FIG. Fig. 4 is a side view thereof. Figure 5 is a perspective view of a carrier box. FIG. 6 is a partial side view showing the order in which the box as shown in FIG. 5 is loaded into the container assembly shown in FIGS. 3 and 4. FIG. 7 is a perspective view of the carrier door cleaner shown in FIG. 8 is a perspective view of the elevator and the tank as shown in FIG. 7. Fig. 9 is a side view of a part thereof. FIG. 10 is a circuit diagram of the door cleaner shown in FIG. 7. Fig. 11 is a perspective view of a box door receiving container assembly used with a rotor as shown in Fig. 2. Figure 12 is a perspective view thereof. Figure 13 is a side view of another system similar to the system shown in Figures 1-6, but with an improved nozzle structure. FIG. 14 is a perspective view of the enclosure, rotor, and spray manifold of the system shown in FIG. Figures 14-20 are diagrams of the spray pattern, nozzle orientation, and container / rotor movement in the systems shown in Figures 13 and 14. Figure 2 1 is a perspective view of the angled spray nozzle used in the system of Figures 1 3-20. The paper size is applicable to China National Standard (CNS) A4 specification (21〇297297)

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522054 A7 B7 5. Description of the invention (5) Figure. FIG. 22 is an enlarged sectional view of the nozzle shown in FIG. 21. Figure 23 is a perspective view of a section of a left or right spraying manifold. Figure 24 is a perspective view of a section of an upper or lower spray manifold. Description of main component symbols C Center 164 Lifting motor (or right-angle driver) N-axis 166 Driving rod Θ Angle 180 Ultrasonic converter 30 Vehicle (container) cleaning system 182 Inlet 32 Box cleaner 184 Drain line 34 Door cleaner 185 Slot Injection valve 36 Rotor assembly 186 Slot exhaust discharge line 38 Round wall 188 Nitrogen cleaning system 40 Wall door 189 Cleaning valve 44 Central structure 190 Inlet 45 Operator 192 Detection tube 50 Box receiving container assembly 194 Recovery tank 52 Box 195 Drain valve 53 Front opening 196 Transmission pump 54 Frame 197 Gas condenser 56 Upper box position 198 Exhaust valve 58 Lower box position 202 Parallel strainer 60 Upper ring plate 204 Liquid injection line -8- This paper size applies to China National Standard (CNS) A4 specifications (210X 297mm) 522054 A7 B7 V. Description of the invention (6 62 Lower ring plate 206 Condensate recovery line 63 Side wall 208 Cold water supply line 64 Upper ring 210 Cold water recovery line 65 Bottom soil 212 Waste valve 66 Left ring 214 Drain line 67 Right Ring 215 Gas condensation drain line 68 Fitting 216 Drain valve 69 Handle 218 Chemical liquid supply 72 Upper plate 220 Chemical liquid discharge line 74 Middle plate 222 Air supply line 75 Bolt 224 Injection pump 76 Bottom plate 226 Drain pump 78 Side plate 300 Box door receiving device 80 Side plate 302 Upper hook assembly 82 Side buffer lever 304 Lower hook assembly 84 Clip Bracket 306 Upper compartment 85 Fastener 308 Compartment 86 Rear rail 310 Door block 88 Lower unloaded buffer lever 311 Angle slot 90 Upper hook assembly 312 Door rail 92 Arm 314 Upper hook 94 Spacer 316 Lower door hook 96 Upper hook 318 Bifurcation head 98 legs 320 long arms -9- This paper size applies to Chinese National Standard (CNS) A4 specifications (210X 297 mm) 522054 A7 B7 V. Description of the invention (7 100 feet 322 short arm 102 hook assembly below 324 bifurcation Slot 104 Arm 325 Door 106 such as partition bar 326 rear stopper 107 rear partition bar 328 front end 108 center hook 330 rail slot 110 foot 332 rail step 112 base guard 334 angled wall 114 raised portion 336 slot bottom 125 door 338 support Wall 130 Frame 350 Door storage location 132 Workbench 400 Box cleaner 134 Work space 402 Outer spray manifold 135 Computer controller 4 04 Outer Ring Spray Manifold 136 Control Panel 406 Outer Ring Spray Manifold 138 Indicator Light 408 Outer Ring Spray Manifold 140 Cleaning Unit 410 Outer Ring Spray Manifold 142 Process Tank 412 Inner Ring Liquid Spray Manifold 144 Lifter 420 Nozzle 146 Surrounding Wall 430 Straight spray nozzle 148 Enclosed door 432 Angled spray nozzle 150 Base 434 Guide surface 152 Door receiving container handle groove 436 Nozzle outlet 154 Lifting rod 438 Nozzle body __- 10- This paper size applies to Chinese national standards ( CNS) A4 specification (210X 297 mm) 522054 A7 ______B7 V. Description of the invention (8) " 156 Slot cover 452 Outside surface 158 Lifting tube 454 Internal corner 160 Lead screw guard 456 Inner side wall 162 Lifter motor 460 Piston pattern details Referring back to the figure, as shown in FIG. 1, a carrier cleaning system 30 includes a centrifugal box cleaner 32 and a door cleaner 34. The door cleaner 34 is preferably adjacent to the box cleaner 32. A rotor assembly 36 is rotatably supported in the surrounding wall 38 of the box cleaner 32, and can be slidably opened for loading and unloading, and slidably closed during cleaning. The surrounding wall door 4 〇 and the rotor assembly 36 is obtained. Referring next to FIGS. 2, 3 and 4, the box receiving container assembly 50 is attached to and becomes a part of the rotor assembly 36 in the box cleaner 32. The rotor assembly 36 has an upper ring plate 60 and a lower ring attached to the center structure 44. The flat plate 62 and the receiving container assembly 50 are rigidly attached to the upper and lower ring flat plates 60 and 62 using bolts 75. 3 and 4, the female personal container assembly 50 has an upper flat plate 72, a middle flat plate 74, and a bottom plate 76 joined to one of the side plates 78 and 80. An upper plate 72 is formed between the upper plate 72 and the middle plate 74. Box position 56; Similarly, a lower box position 58 is formed between the middle plate 74 and the bottom plate%. A plurality of side buffer rods 8 2 are attached to the inner surfaces of the side walls 7 8 and 80 by a clip bracket 8 4 and extend through the side buffer rod 8 2, the clip bracket 8 4 and, if necessary, through the side plates 78 and 80. The fasteners 85 are attached to the outer surfaces of the side walls 78 and 80. The upper and lower unloaded buffers 88 are attached to the inner surface of the side wall 78. As shown in FIG. 3, in the upper box position 56 and the lower box position 58, the lower unloaded buffer lever 88 is at an angle downward and faces each box position _______- 11 > This paper size applies to the country of China Standard (CNS) A4 specification (210X297 public love)

Pei Deng 522054 A7 B7 V. Invention Description (9) Open before 156 and 58, and the unloaded buffer lever 88 in each box position 56 and 58 is usually horizontal. As shown in the "best example" in Figure 4, a pair of separated guides 86 are attached to the upper plate 72 and the middle plate 74, and a pair of separated rear guides 86 are also attached to the middle plate 74 and the bottom plate 76. After the side plates 78 and 80, the shape is half-octagonal. Referring to FIG. 3, an upper hook assembly 90 has arms 92 attached to the side walls 78 and 80, a partition 94 extends between the arms 92, and the hook% extends downward from the partition 94. As best shown in Fig. 4, each hook 96 has a leg 98 extending downward and a foot 100 extending substantially perpendicular to the leg 98 and extending inwardly. However, the feet of the upper hook 96 can be ignored, so the hook 96 becomes a simple pole or leg 98 surface. Returning to FIG. 3 again, a lower hook assembly 102 similarly has an arm 104 attached to the side plates 78 and 80, a front partition rod 106 extends between the arms 104, and a center hook 108 Then it is loaded on the spacer 106, and each hook has a foot 110 extending inward. The base 112 on the outside of the hook 108 is supported on the front grid 106 and attached to the arm 104, and the spacer 1007. Each base rod 112 is provided with a raised portion 114 and rises from the front partition rod 106 to the rear partition rod 107 from front to back. In the specific embodiment shown in FIG. 2, five container receiving assemblies 50 are radially and equally spaced on the rotor assembly 36, and each container receiving assembly 50 has an upper box position 56 and a lower part. The box positions 58, each of the upper and lower box positions 56 and 58 has the upper and lower hook assemblies 90 and 102, the side buffer lever 82, and the unloaded buffer sample 88 as described above. As shown in Figure 2-6 _______ 12_ This paper size is applicable to SS home standard (CNS) A4 specification (21GX 297 public love) " " " 522054 A7 __ _B7 V. The description of the invention (⑴) In the case of the invention, if the fishing tackle assemblies 90 and 102 are separated, other components are unnecessary. Returning now to FIG. 5, a (FOUP) carrier box 52 has a front opening 53 surrounded by a frame 54 having an upper ring 64, a bottom ring 65, a left ring 66, and a right ring 67. A handle 69 is attached to the side wall 63 of the box 52, and an accessory 68 for loading a robot or other robotic arm is attached to the upper surface of the box 52. Referring again to Fig. 1, the box cleaner 32 has been described above, and the door cleaner 34, which is in combination with the box? Cleaner 32, forms a container cleaning system 30, which is now described. As shown in FIG. 7, the door cleaner 34 has a frame 130 including a work surface 132 that can provide a working space 134. The control panel 136 is located behind the work table 1 3 2 and indicates on the control panel 1 3 6 The lights 1 3 8 provide a visual indication of the status of the door cleaner 34. The door cleaner 34 includes a cleaning unit 140 next to the working space 134. The cleaning unit 140 has a process groove 142 extending downward from the surface 132 of the table, and a surrounding wall 146 fixed to the upper surface of the table 32 Located above and around the slot 42. The perimeter door 148 that attaches the fulcrum to the tank perimeter wall 146 is raised so that the door 125 can be loaded into the cleaning unit 1 40 or the self-cleaning unit 丨 4 〇 unload, and the perimeter door 丨 4 8 is supported downwards during cleaning Close the tank 1 4 2 and isolate it from the environment. As shown in FIGS. 8 and 9, the cleaning unit 140 includes a lifter 144. The lifter has a base 150 ′ on the base 150 and a door receiving container handle groove 152 supporting the door 1 2 5 ′ handle groove 1 5 2 Vertically and slightly separate the door 125 'on the base 150. The lifting rod 154 extends upward from the base 150 and is attached to the slot cover I% -13- _ This paper size is suitable for SS home standards (CNS) Α4 size (210X297 Mm) ·! Staple

Line 522054 A7 _______B7 5. In the description of the invention (11), the groove cover 156 is sequentially supported on the lifting pipe 158 on the opposite corner of the diagonal, and the lifting pipe 158 has an internal thread that is engaged with the lead screw 160. The lead screw 160 is rotated via a lift motor 164 that rotates through a drive rod 166 of one of the right-angle drivers 164. As shown in FIG. 9, an ultrasonic converter 18 is located at the bottom of the slot 142 'and an interlocking device can prevent the elevator from moving when the wall door Ια is opened. As shown in FIGS. 9 and 10, a discharge line 184 at the bottom of the process tank 142 is connected to the frame 130 and a recovery tank 194 under the table 132. A liquid injection line 204 is connected from a recovery tank 194 to a transfer pump 196, and then passes through a parallel screen 2 0 2 and flows into an injection port 1 8 2 at the bottom of the process tank 1 4 2. A discharge valve 1 9 5 controls the flow from the discharge line 1 8 4 into the recovery tank 1 9 4. A liquid level detection inlet 190 connects the process tank 142 to a liquid level detection tube extending upward along the tank 1 9 2 To detect the liquid level in the tank 1 4 2. A trough exhaust gas exhaust line 186 extends from the top of the trough 142 to a waste gas valve 212, which allows the exhaust gas in the trough to be exhausted through the exhaust gas line 2 1 4 or enter the gas condenser 197. The ice water supply and recovery lines 208 and 208 connect the gas condenser 197 to a cold water source, and the condensate recovery line 206 is connected from the gas condenser 197 to a recovery tank 1 94 through an exhaust valve 198. A chemical The liquid supply line 2 1 8 is connected to the recovery tank 194 through an injection pump 224, and a clean and dry air supply line 222 is connected to the injection pump 224, the transfer pump 196, and the discharge pump 226 connected to the chemical liquid discharge line 220. To drive the pump with gas, another option is to use an electric pump. A gas condensation discharge line 21 5 extends outward from the gas condenser 1 9 7 and is connected to the discharge line 2 i 4 through a condensation discharge valve 2 丨 6. ¥ Paper size suitable financial S S home standard (CNS) A4 size (210X297 public love) 14 a 522054 A7

A nitrogen cleaning system 188 provides nitrogen through a cleaning valve 189 to clean the process tank 142 and the lines connected to the tank. The nitrogen cleaning system 188 and the valves 212, 198, 189, and 216 can be removed from the cleaning unit 14 Atmosphere and humidity, cleaning reduces or eliminates condensed water vapor in the cleaning unit 14o. A computer controller 135 is connected to different valves, pumps, detectors and other elements that control the operation of the door cleaner 34. Returning again to FIG. 1, in use, the box 52 to be cleaned is transferred to the container cleaning system 30. A system operator 45 usually lifts the box 52 from a trolley and places the box in the door cleaner 34. On the working space 134, the operator 45 removes the door 1 2 5 and loads the door on the base 150 of the elevator 144 in the door cleaner 34. In order to load the box 52 into the box cleaner 32 later, the operator 45 rotates the rotor assembly 36 through a control panel until an empty receiving assembly 50 is aligned with the opening of the wall door 40, and the wall door is controlled by the operator The control panel slides the switch automatically. Referring to FIG. 6, the operator rotates the box 5 2 so that the right side ring 6 7 is above, and then the operator 45 moves the box 52 into the open box position 56 or 58, and the right side ring 67 of the box 52 is above the hook 96. And behind, the operator 45 then moves 52 to the box position 56 or 58 using the sequence shown in FIG. 6, and moves the left side ring 6 6 to the lower fishing tackle 1 0 8 on the frame 5 4 of the box 5 2 After that, the operator 45 will move the box 52 downward, so as shown in FIGS. 3, 4 and 6, if the foot 100 of the upper hook 96 is used, it will extend to the lower part of the ring 67 and the lower hook 1. The foot 110 of 8 extends across and buzzes the ring of the box 52 --- -15- The paper size is suitable for the country's national standard (CNS) A4 specification (210 X 297 male Θ ''-

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522054 A7 ____B7 1. Description of the invention (13 ~) '6 6 ° Refer to Figure 6' During the loading sequence, the rising portion 114 of the base rod 112 helps to guide the box 52 to the correct position, and the rear rail 86 uses the Avoiding the box from moving too far in the receptacle assembly 50 helps to guide the box 52 to position. The side buffer lever 8 2 helps to guide the box 5 2 laterally. Unless the box 52 is placed upright, the unloaded buffer 桴 88 can prevent the box 52 from being loaded in the receiving container 50 and contact the receiving container 50 of the box 52. The element is preferably composed of a material that does not generate excessive particles through friction or the like. Through the steps described above, the operator 45 then loads the box 52 to the empty box positions 56 and 58, and the door 125 is removed from the box and correspondingly loaded on the base 150 in the door cleaner 34. When the box 52 'has been loaded in all positions or when there are no boxes to clean, the operator 45 will close the wall door 40 and begin the cleaning sequence. The rotor assembly 36 is rotated, and the cleaning liquid is sprayed on the box 5 2 'and then the above-mentioned drying gas is used to dry the box, for example, the method in U.S. Patent No. 5,73 8,128. After the box 52 is cleaned and dried, the box is unloaded from the box cleaner 32 and removed, followed by the reverse order of the above. Use the box cleaner 3 2 or 4 0 0 to clean the box, use the door cleaner 3 4 or the box cleaner with the door position on the rotor as shown in Fig. 1 1 to clean the door. The device and method for selecting the door can be seen. Door designs and special applications vary. "When using a door cleaner, each door 1 2 5 must be removed from the box 5 2, and the operator 45 manually places them 125 on the base 150 in the cleaning unit 140 of the door cleaner 34 and makes 15 by machine. 〇The handle-shaped groove 152 on the upper side of the door 125 applies the Chinese national standard ^ 4 standard (21〇χ297 公 爱) 16 ----- 522054 A7 ____B7 ϊ, description of the invention (i4) " Contain, this At this time, the process tank 142 is empty (filled with air). In the specific embodiment shown, the 'cleaning unit 140' has a capacity of ten doors, and the doors 1 25 are slightly separated by the container handle-type groove 152. Using the base of the loading door, the operator 45 can use the control panel 1 3 6 to start the cleaning steps. 'Close the wall door 1 4 8 and supply the elevator motor 16 2 with energy to lower the base 150 to allow the door 125 to enter the slot 142. By completely lowering the lifter 144, the tank cover 156 can be sealed around the upper surface of the work table 132, so that a sealed cleaning unit 140 can be provided, and expensive cleaning liquids can be kept inside, while retaining the atmosphere and humidity. Outside. Open the nitrogen purge valve 1 8 9 and nitrogen flows into the tank to clean the atmosphere. When this happens, 'the condensation exhaust valve 216 is opened instantaneously to exhaust the atmosphere, and after cleaning the atmosphere, the valves 1 8 9 and 2 1 6 are closed. The tank 142 is filled with liquid by opening the breather valve 198, and the tank is filled with liquid. The injection valve 185 opens the transfer pump 196, and the liquid can be drawn into the tank 142 through the injection line 204, the filter 202, the valve 185, and the injection port 182 by the recovery tank 194. The cleaning liquid is preferably hydrofluoroether (HFE) ( C4F9CH3, Methyl Nonafluorobutyl Ether), which is available from 3 M Company, St. Paul, Minnesota, USA. Supply the ultrasonic converter 180 energy, ultrasonically clean the door 125 in the tank 142, and after the cleaning is completed, open the breather valve ι98 and The drain valve 195 uses gravity to make the liquid self-made process tank 1 4 2 flow back to the recovery tank 194. The filling process tank 1 4 2 described above. The ultrasonic cleaning and discharge process of the process tank preferably repeat a required cycle. The HFE is condensed in a recovery cycle, and the discharge valve 212 is closed, and the paper size of the condensed paper is applied to the Chinese National Standard (CNS) A4 specification (210X297 public director) " ---- 522054 A7 _____B7 5. Invention (15) The discharge valve 2 16 and the nitrogen purge valve 189 are opened for a predetermined time and closed. Ice water flows through the gas condenser 194, and the condensed gas is discharged back to the recovery tank 194 through the condensation recovery line 206. The uncondensed gas is discharged through the Line 2 14 is discharged. Then, the elevator motor 162 is supplied with energy, and is operated in the opposite direction to support the base 150 until it rises to the same south degree as the table 132, so that the process tank is broken and sealed. Open the grooved wall door 148 and remove the box door 125 from the base. It can be determined as needed. When the cleaned box 52 is sequentially removed from the box cleaner 32, each door 125 can be re-operated. The space 134 is mounted on the box 52. With the proper sequence, each door 2 5 can be reinstalled on the specific box 52 it was originally provided with. In order to process the next batch of doors, the above steps can be repeated. It is better to use nitrogen between each batch of doors to keep the condensate outside the tank and pipeline. A specific carrier having a door can be cleaned in a centrifugal cleaner. Referring to FIGS. 11 and 12, a door-receiving container assembly 300 is provided on the rotor assembly 36 to replace one of the box-receiving container assemblies 50 to form An improved carrier cleaning system capable of carrying boxes and doors inside the box cleaner 3 2. In this system, the box cleaner 32 and the method of using it are the same as those described in Figs. 1-6, without using a separate box door cleaner as shown in Figs. 7-10. The door-receiving container assembly 300 has a middle plate 74, side plates 78 and 80, an arm 92, upper and lower struts 106, and similar box receiving as shown in FIGS. 3 and 4. Other components of the container assembly 50. Referring to Figs. 2, 11 and 1 2 'Door-closed container assembly 3 〇 Using the upper plate 7 2 and the bottom plate 7 6 bolts 7 5 extending through the door-closed container module 3 0 0 rigidly attached to the ____- 18- _ This paper size applies to China National Standard (CNS) A4 (210 X 297 public love) ~ *-522054 A7

Sub-assembly 36 upper and lower ring plates 60 and 62. Referring to FIG. Η, the door-closing container assembly 300 has an upper compartment 306 and a lower compartment 308, usually separated by a middle plate 74, and each compartment 306 and 308 has an upper hook Component 302 and a lower hook component 304. Each of the upper hook assemblies 302 includes a plurality of upper door hooks 3 14 and lower door hooks 3 16, which are preferably separated by equal space. Each of the upper and lower door hooks 3 14 and 3 16 has a split head 318 including a long arm 320, a short arm 322, and a split groove 324 formed therebetween. Each compartment 306 and 308 preferably has 4 receiving positions 3 50, door receiving positions for compartments labeled A, B, C and D above, and labeled E, F, G and below The compartment door receiving position is preferably the same. In FIG. 11, the box door 325 is shown loaded in the door accommodation position β. The door rail 312 at the upper and rear positions of each compartment 306 and 308 has an angle groove 3 11. When the door 325 is loaded into the door receiving position, the upper and rear corners of the door 325 can be fitted into the angle groove 311. 12 helps to support the door laterally (ie making the door resistant to side-to-side movement). A door block 3 1 0 is aligned with an upper and lower door hook 314 and 316 at each door receiving position 3 50. Referring to FIG. 11 again, each door block 310 has a support wall 338 and an acute angle extending To the angled wall 334 of the support wall 338, a rail step 332 extends inwardly from the angled wall 334 toward the support wall 338. The guide rail step 332 is separated from the support wall 338 by the groove bottom 336, and forms a guide groove 33 with the guide rail step 3 32, the groove bottom 3 3 6 and the support wall 3 38. -19- This paper size applies to China National Standard (CNS) Α4 (210 X 297 mm)

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Line 522054 A7 ____B7 V. Description of Invention (i7 ~) " " " ~~ In each door storage position A-Η, the upper door hook 3 14 and the lower door fishing 3 16 are divided. The fork groove 324 is aligned with the guide groove 3 3 0 in the door block 31, and the upper door hook 3 1 4 is separated from each other by a space through which the door 3 2 5 can pass. 'The lower door fishing 3 1 6 — Similar separation. If door rails or other alignment devices are used to place the bottom of the door, the upper and lower hook assemblies 302 and 304 can be replaced by simple rods or flat plates without the need for a hook shape. In addition, if the hook assemblies 302 and 304 are used, various devices of the guide groove 330, including the rear stopper 326, guide rail step 332, angled 嫱 334, support wall 338, groove bottom 336, etc. Invention is not necessary. In use, in order to load the door 325 into the door-receiving container assembly 300 on the rotor assembly 36, the surrounding wall door 40 is opened, and the rotor assembly 36 is instructed or rotated until the door-receiving container assembly 300 is moved to the alignment door 40. Then, the door 3 2 5 is manually loaded into the door closing container assembly 3 00. In particular, an operator moves the door 3 2 5 between the hooks 3 1 4 and 3 1 6, and the door 325 is guided by the angled guide wall 334 to the radius of the rotor and faces the control direction at a sharp angle (Face close to the center of the rotor). When the front end of the door 325 cleans the short arms 3 2 2 of the fishing tackles 3 1 4 and 3 1 6, the front end 3 2 8 of the door 3 2 5 moves laterally to the left in FIG. 1 1 so that the door 3 25 moves the guide rail 3 32 moves away and moves into the rail groove 330. The door 325 is then aligned with the fork grooves 3 2 4 in the door hooks 3 14 and 3 16. The operator can then pull the door 3 2 5 slightly downward, so that the front end 328 of the door moves into the fork groove 324 and contacts the door hook 3. 14 and 3 16 fork heads 3 18 ° Door hooks 3 1 4 and 3 1 6 After the rotor assembly 3 6 rotates, the door 3 2 5 is restricted ------- 20- This paper size applies to Chinese national standards (CNS) A4 size (210 X 297 mm) --- A7 B7 V. Description of the invention Movement (to avoid radial outward movement), also limits the lateral movement of the door 3 2 5 because the bottom edge of the door is in the guide groove 33 ° also restricts lateral movement between the support wall 338 and the guide rail step 332 laterally. The upper and rear corners of the door 325 are supported by the angle grooves 311 of the door guide 312. The stopper 3 26 behind the rear end of the door block 310 prevents the door 325 from moving too far inward when the device is installed. Using the sequence described above, a door-closing container assembly 300 'having a door 3 2 5 can be loaded, which typically has four doors in the upper compartment 306 and four doors in the lower compartment 308. Referring to FIG. 2 again, because the door-receiving container assembly 300 replaces one of the box-receiving container assemblies 50, the rotor assembly 36 has four box-receiving container assemblies 50, each having two boxes, and the whole having eight boxes. The door-receiving container assembly 300 with eight doors can clean eight boxes with doors in a single cycle in a cleaning system. The door 3 2 5 can be unloaded from the door receiving container assembly 300 using the reverse order described above. Due to the larger size of the box or container 52 shown in FIG. 5, in the container receiving assembly or bracket 50, it is usually a spraying device as described in US Patent No. 5,738,128, which supports the container 52. The geometry on the rotor assembly 36 does not effectively clean all surfaces of the container or box 52. Referring to Figs. 1, 3, 14 and 15, in a modified embodiment 400 of a centrifugal box cleaner, the spray nozzles 402, 404, 406, 408, and 41 on the outer periphery are sprayed. O Spray the liquid radially inwardly on or in the box or container 52. The inner inner liquid spraying manifold 4 1 2 sprays the liquid radially outward on the back of the box 5 2 ′ and the inner inner liquid spraying manifold 4 12 is located radially inside the rotary rotor 36. The outer manifolds 402, 404, 406, 408, and 4 10 are located in the surrounding wall 38 as shown in FIG. 14 or outside the surrounding wall 38, and as shown in FIG. 13 -21-522054 A7 B7 V. Description of the invention (shown in 19), there is a spray nozzle in the surrounding wall that extends through the opening and on the manifold. The inner and outer liquid spraying manifolds can also be established in the box cleaner 400 to dry in a Spraying gas such as clean, dry air during the cycle can also provide individual inner and / or outer gas spraying manifolds. Referring to Figures 14 and 15, the first outer liquid spraying manifold 4 〇2 has a plurality of and preferably equally spaced spray nozzles 4 3 0 and 4 32. The nozzle 4 3 0 is a linear spray nozzle that sprays directly outward and toward the center C of the rotating shaft and the rotor 36. Straight spray nozzle 43 0 can spray a conical pattern and surround it at a solid angle of 10-60 degrees or 15-45 degrees, preferably a 30-degree conical nozzle. Linear spray nozzle 43 0 also Can provide a flat fan pattern spray nozzle. For better efficiency when cleaning the box 52, included in the first branch The nozzles 432 on the tube 402 may be angled spray nozzles. Preferably, the first manifold 402 has two or four separated by at least one, and preferably a plurality of linear spray nozzles 430 Angled spray nozzles 432. Refer to Figure 15 'The angled spray nozzles 432 on the first more peripheral liquid spray manifold 402 are rotated in a direction away from the FOUP box or container or rotor by A Spraying at an angle Θ, the linear spray nozzle 430 on the first manifold 402 is sprayed directly toward the center c of the rotor assembly 36, and the linear spray manifold 43 on the first manifold 402 is The spraying technique can clean the surfaces of different boxes 52; however, the angled spray nozzles 4 3 2 on the first manifold 402 are preferably configured as shown in FIG. 16 to clean the inner corners of the box 52. If necessary, all the nozzles on the first manifold 402 may be spray nozzles 432 at an angle of Θ as shown in FIG. 15, but may have different spray angles.

522054 A7 ______B7 V. Description of the Invention (20) However, preferably, the first-manifold 402 has two or four angled spray nozzles each spraying at an angle of 0, and the rest are linear spray nozzles 43. Preferably, the first manifold 402 has two or four angled spray nozzles 432 and five or seven linear spray nozzles 430, and all the nozzles are equally spaced. Of course, other numbers and configurations can also be used. Referring to Figures 15 and 16, the second outer outer spray manifold 40 is preferably above or within the surrounding wall or bowl 38 to be about 90 ° to the first manifold 402. Angle arrangement, the second manifold 404 has a linear nozzle 430 preferably sprayed outward in a direction perpendicular to the spray direction of the linear nozzle 430 on the first manifold 402. The second manifold 404 also has at least one, preferably two to four angled spray nozzles 432, which are directed radially inward toward c, but spray at a downward angle of 0 (angle from the rotor or box cleaner 400) . The third outer ring liquid spraying manifold 406 is preferably designed as a mirror image of the first outer ring liquid spraying manifold 402, that is, the third outer ring liquid spraying manifold 40. 6 has a linear spraying nozzle spraying toward the center C, and also has an angled spraying nozzle 432 with an angle of $ facing the direction approaching the box, and an angle opposite to the direction of rotation A. The fourth outer ring liquid spraying manifold 408 has a linear spraying nozzle 430 spraying toward the center c and at least one angled spraying nozzle 432 (preferably at least four), which is upward at an angle 0 Spray (to the top of the box cleaner 400). To avoid interference between adjacent spray nozzles, the downwardly angled spray nozzles 432 on the second outer outer spray manifold 404 and the fourth outer spray nozzles are tender. 'Better I- 23-This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 522054 A7 B7 V. Description of the invention (21) The lower or higher (individual) linear spraying of the ground next to the next one The nozzles 43 are spaced a sufficient distance to avoid extended collisions from spraying back. Therefore, the distances between the linear spray nozzles 43 0 and the angled spray nozzles 43 2 on the second and fourth outer ring spray manifolds 404 and 408 are preferably non-equidistant. Conversely, the distance between the angled spray manifolds 432 on the first outer-circle spray manifold 402 and the third outer-circle spray manifold 406 may and preferably are approximately equal. The upper and lower angles of the spray angle nozzles 432 on the spray manifold of the fourth outer ring 408 and the second outer ring 404 need not be equal to each other, or the The angle 0 of the angled spray nozzle 432 on the spray manifold is equal. This angle may vary depending on different applications, but preferably all angles (to the right of manifold 402, below manifold 404, left of manifold 406, and above manifold 408) are between 10-80 degrees, 20 -70 degrees, 30-50 degrees, preferably between 40-50 degrees. In the specific embodiment shown, all angled spray nozzles are designed to spray at an angle of 45 degrees. The manifolds 402, 404, 406, and 408 are preferably spaced at equal intervals around the inner wall of the reaction chamber 38 at intervals of 90 degrees. Preferably, between each of the manifolds 402, 404, 406, and 408 having an angled spray nozzle, there is at least one linear spray manifold 410, preferably only a linear spray nozzle 4 3 0, as shown in FIG. 15 As shown. All the inner ring spray manifolds 4 12 are preferably only linear spray nozzles 43 0 mainly used to clean the back of the box 5 2; however, the inner ring spray manifolds 4 1 2 may also have angled sprays. The spray nozzles 4 3 2 are like the outer spray nozzles. -24-This paper is suitable for standard paper ® ® household materials (CNS) A4 size (210 X 297 mm) ~ '" Binding

522054 A7 ________B7 V. Description of the invention () In the specific embodiment, there are a total of eight outer-ring spray manifolds 4 02, 404, 40 6, 408, and four outer-row linear spray manifolds. Tube 4 1 0. Preferably, there are eight inner-spray spray manifolds' aligned with the outer-spray spray manifold as shown in Fig. 15, or they are offset or staggered vertically. There may also be angular deviations, such as spraying from the liquid spraying manifold 412 of the inner ring, aiming at a point between the spraying pipes of the two outer ring. If necessary, the vertical positions of the nozzles 430 and 432 on the outer-running spray manifold can be offset or staggered to provide a wider spray coverage. As shown in FIGS. 21 and 22, the angled spray nozzle 432 may include a guide surface 434 that extends to the nozzle outlet 436 to create a conical spray pattern at an angle of 0 to the end of the shaft of the nozzle body 438 . After the device, the shaft N usually intersects the center of rotation of the rotor C, and the guide surface 434 causes the spray pattern to extend at an angle of 0 relative to the shaft N. Figure 15-20 shows the operation of the box cleaner 400. The rotor is carried by the box 52 in the direction A. Provide cleaning liquid to all of the manifolds 402, 404, 406, 408, 4 10, and 4 12 so that the liquid is preferably sprayed from all of the nozzles 430 and 432 onto all of the manifolds. In FIG. 15, the linear jet of the linear spray nozzle 430 of the manifold 41 reaches the specific lateral or rear inner surface of the box 52 and cleans the box 52 when the rotor moves the box 52 to the position shown in FIG. 16. The linear spray nozzle 43 on the manifold 402 is preferably sprayed onto and within the box 52 in the same pattern and shape as the linear spray of manifold 4 10 in FIG. 15; however, in The angled nozzle 432 on the manifold 402 is sprayed at an angle of 0 so that it can directly spray and clean its tail outer surface 452 and front inner corner 454 and inner wall 456, as shown in FIGS. 5 and 16. This paper size applies the Chinese National Standard (CNS) A4 specification (21 × 297 public love) 522054 A7 B7 V. Description of the invention (23) Referring to FIG. 17, when the box 5 2 rotates to the range of the manifold 4 0 4 The linear nozzle 430 on the manifold 404 sprays inside and above the box in a similar manner to the linear manifold 430 on the manifolds 410 and 402; however, the angled spray nozzle on the manifold 404 432 is sprayed downward at an angle, so the upper surface 4 50 of the box 52 can be cleaned better, as shown in FIG. 5. Referring to FIG. 18, the box 52 is moved to the range of the manifold 4 by the rotation of the rotor. The linear spray nozzle 430 of the manifold 406 is in line with the straight lines on the manifolds 412, 4 02, and 04 04. The spray nozzle 430 sprays into and above the box 52, and the angled spray nozzle 432 on the manifold 406 sprays at a negative 0 angle to optimally cover and clean the outer side wall of the front end of the box 5 and the tail end. Inside corner. Referring to FIG. 19, when the box 52 moves to the range of the manifold 408, the linear spray nozzle 430 on the manifold 408 sprays in and on the box in the above-mentioned method, and the angled spray nozzle on the manifold 408 432 is sprayed upward, so that the downward surface of the box 52 can be optimally cleaned. The rotor usually rotates at 2000-50 rpm, usually after the rotation in the A direction, the rotation direction will be reversed, so the angled nozzle front / tail relationship on the manifolds 402 and 406 will also be reversed. 0 For manufacturing The efficiency of the manifolds 40 2-4 10 can be the same, and then the nozzles 420 and 432 are installed on the left, right, upper or lower sides as described. Therefore, only one manifold design and two nozzle designs are required to manufacture all the manifolds 402, 404, 406, 408, and 410. In this example, the manifold 404 with a downward spray nozzle 432 and the manifold 408 with an upward spray nozzle 432 have a piston 460 that closes the nozzle hole to avoid angled nozzles up or down.

522054 A7 B7 V. Description of the Invention (24 cases affect adjacent linear spray patterns. The linear spray nozzle 430 is preferably sprayed at a three-dimensional cone angle of 15-45 degrees, preferably about 30 degrees, preferably , All outer spray nozzles have more linear spray nozzles than angled spray manifolds, which provides cleaning of the rotor itself and the box. Using all angled spray nozzles on one manifold will reduce Rotor cleaning. For rotors with racks, such as rack 50 with two box positions, there are preferably two, three or four angled nozzles on the manifolds 402-408. The shelf's more angled nozzles would be better. Therefore, cleaning can be improved by spraying nozzles on a manifold that faces at an angle or away from the direction of rotation or up or down, of course, linear spray nozzles It can also be attached to a manifold at an angle or an offset amount, or the manifold itself has an angle, so that the nozzle sprays at an angle to achieve the better results described above. The box cleaner of the rotor of the 〇up door can use an angled spray pattern, as shown in Figures η and 12, and the manifold 4 02-4 08 can also have at least one angled spray nozzle in a positive 0 direction and at least one Angled spray nozzles in the negative 0 direction (on the same manifold).

Claims (1)

522054 A8 B8 C8 _______ D8 VI. Patent application Fanyuan L A box cleaning system for cleaning boxes for moving and storing objects, including: a surrounding wall; a rotor rotatably supported in the surrounding wall, the rotor having Box storage position; placing a plurality of spray manifolds to spray a cleaning or washing liquid on the rotor, at least one of the spray manifolds has a plurality of linear spray nozzles and at least one angled spray nozzle. 2. The cleaning system according to item 1 of the patent application scope, wherein the linear spray nozzle sprays a pattern having a horizontal central axis, and the angled spray nozzle is directed upward or downward at an angle relative to the horizontal central axis Spray extended. 3. The cleaning system according to item 2 of the patent application, wherein the angle is 30-60 degrees. 4. The cleaning system according to item 1 of the patent application scope, wherein the angled spray nozzle is directed to spray a pattern having a central axis and opposite to the direction of rotation of the rotor. 5. The cleaning system according to item 1 of the patent application scope, wherein the manifold has two angled nozzles separated by at least two linear spray nozzles. 6 · A box cleaning method for cleaning a pentagon box used for carrying or storing objects, comprising the following steps: The box is placed in or on a rotor, and the open end of the box is opened by the rotor. The center is radially outward; the rotor housing the box is rotated; -28- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 522054 8 8 8 8 AB c D 6. The scope of patent application will be The first spray of a liquid is sprayed toward the center of the rotor or its rotation axis; and the second spray of the liquid is sprayed at an angle relative to the first spray. 7. The method according to item 6 of the patent application, wherein the first spray is sprayed with a pattern having a center line or a substantially flat center axis, and the second spray is sprayed with a center line having a substantially horizontal Pattern spraying. 8. The method according to item 6 of the patent application, wherein the first spraying is in a horizontal direction and the second spraying is at an angle relative to the upward or downward direction of the first spraying. 9. The method of claim 7 in which the central axis of the first spray is aimed at the center of the rotor, and the centerline of the second spray is aimed at an angle relative to the first spray, The second spraying sprays a liquid pattern in the same or opposite direction as the rotation direction of the rotor. 10. A method for cleaning a container having a box and a door attached to one of the boxes, including the following steps: separating the door from the box; using the upper end of the box to place one of the boxes in a box to receive the container Load the box on a rotor in a box cleaner after the upper leg is closed, lift the box up, rotate the box to move the bottom of the box into the box, and move the box The lower front end is above a lower hook in the box receiving container; and the box is lowered to place the lower front end of the box behind the lower hook; this paper size applies to the Chinese National Standard (CNS) A4 size (210 X 297 mm) 522054 A8 B8 C8 D8, patent application scope Spray a liquid on the box; and dry the box. 11. If the method of claim 10 of the scope of patent application, further includes the step of drying the box, it is to blow a first drying gas down onto the box and spray a second drying gas on the box. 12. A box cleaner comprising: a surrounding wall; a rotor in the surrounding wall; a box receiving container on the surrounding wall, the box receiving container having: a plurality of above the upper end of the box receiving container Hooks; and a plurality of hooks below the lower end of the box container. 13. The box cleaner according to item 12 of the scope of patent application, further includes a foot on each hook which faces toward the center of rotation of the rotor. 14. A box cleaning system for cleaning a flat object in a clean environment, the boxes each having a door, comprising: a rotor rotatably loaded in a surrounding wall; at least one box receiving container assembly on the rotor, It has at least one position for receiving a box; and at least one door receiving container assembly on the rotor, it has at least one position for receiving a box door. 15. The system according to item 14 of the patent application scope, wherein the rotor has four box-receiving container assemblies and one door-receiving container assembly. 16. The system according to item 14 of the scope of patent application, wherein each box door receiving position has an upper door hook, a lower door hook and a door guide. -30- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) Binding • Thread 522054 A8 B8 C8 17. The system according to item 16 of the patent application park, wherein at least one of the upper door hook and the lower door hook has a minute head. The 18+ Chinese patent & item i 7 system, wherein the bifurcated head has a long arm and a-short arm, and a bifurcated groove is formed therebetween. 19. The system of claim 16 in the patent application park, wherein the door rail includes an angled step extending at an angle relative to the support wall. 20. For example, the system and system of item i 4 of the patent application, wherein the door closing container assembly includes a left side plate and a right side plate attached to an upper plate, a middle plate, and a bottom plate, and formed An upper compartment and a lower compartment, and each compartment has a plurality of upper and lower door hooks and door rails. 21. A method for cleaning a Yizi door, comprising the steps of: sliding a box door in a first direction toward a door guide in a cleaning device; moving at least one side of a child door in a second direction; and A third direction moves, and the second direction is substantially perpendicular to the third direction. 22. The method as claimed in claim 21, wherein the first direction and the second direction form an acute angle. 23. The method according to item 2 of the patent application scope, further comprising the step of moving the door in a third-party direction until a door hook locks the door. 24. The method in item 2 of the patent scope of claim 4, further comprising the step of lowering the door to move into a door guide when the door moves in the second direction. 25. The method according to item 2 of the patent application scope further includes the step of rotating the box door in the cleaning device, and using the method to store the door with at least one hook -31 _ Domain grid ㈣χ Norwegian public reply) Binding line 522054 8 8 8 8 AB c D One of the patent application scopes is limited by the centrifugal force of the outer edge to restrict the movement of the door-32- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) < 5ΐΤΓΤΒ suspect. ¾¾¾¾; Announce the date of this application. Η, ί Case No. 0〇〇M Category% (The above blocks are filled in by the Office) A4 C4 Revised Chinese Manual (November 91) Patent Specification f 522054 Chinese -12 ^ English box cleaning system, box cleaner, container, box and box door cleaning method_ SYSTEM FOR CLEANING BOXES, BOX CLEANER, AND METHOD FOR CLEANING A CONTAINER, BOXES, AND BOX DOORS Daniel P. Beckton DANIEL P. BEXTEN 2 Jerry R. Norbie JERRY R. NORBY 3. James Blair JAMES BRYEH are all US US living and living 1 No. 655, Simone Ave., 2nd, National ¥ 655 No. 655, Simone Ave., Kalispell, ANA3. Nationality American business MITITO company, SEMITOOL, INC. US line III. Applicant's residence, residence (office) Willian A. Flyman, 655 West Joseph Avenue, Callisbell, Montana, USA WILLIAM A. FREEMAN The paper size is suitable for money @ 国 iBi ^ (CNg) A4 size (21GX297 male sauce 1 -------