504482 A7 ___B7 _____ 五、發明説明（1 ) [發明所屬之技術領域] (請先閲讀背面之注意事項再填寫本頁) 本發明係關於將極小且極薄之冰晶片予以檢查，分類 等之過程中，使用移送用之搬運裝置之極薄水晶片測定分 類裝置。更詳言之，係關於本發明之水晶片測定分類裝置 係在檢查水晶片之過程中，將不損傷水晶片之狀態下，能 夠安全且穩定地供給搬送水晶片之極薄水晶片測定分類裝 置者。 [己往之技術] 在檢查水晶片用之測定分類裝置中，從零件進給裝置 接受水晶片於水平配置之水晶片搬送部之後，移送至檢查 站而實行檢查，按照檢查結果而分類之。 經濟部智慧財產局員工消費合作社印製 參考第8圖，就使用以往之選取放置裝置，從零件進給 裝置拾起水晶片之狀況說明如下。零件進給裝置係由球狀 冒口與直進進給器所構成之。在球狀冒口之排出端有配置 直進進給器之直進進給滑槽。在直進進給滑槽之排出端設 有止動板（未圖示）。用選取放置裝置撿起送到識末端之水晶 片。選取放置裝置之臂桿65有支持吸嘴63。吸嘴63係吸取 用空氣管64而連接於真空源。 直進進給滑槽61之表面成爲水晶片1之滑動面，安裝有 邊緣板62以便調整邊緣之突出量調整成爲水晶片1枚之厚度 。直進進給器滑槽61係對水平面傾斜15〜20度左右，以便留 下所重疊之水晶片中最下段之水晶片而使上側之水晶片自 然落下之構成者。又按，設有導承板66以便導承水晶片1沿 -4 - 本紙張尺度適用中.國國家標準（CNS ) A4規格（210 X 297公釐） 504482 A7 B7 ___ 五、發明説明（2 ) 著邊緣板62而前進。 (請先閱讀背面之注意事項再填寫本頁) 爲吸取水晶片1而下降選取放置裝置，在下降之位置用 吸嘴63吸取水晶片1。 然而，因爲吸嘴63之下端面與水晶片1並非平行的關係 ，吸嘴63不能吸取水晶片1之中心而會發生保持位置偏差。 以選取放置裝置吸取搬送該狀態之水晶片而要放進搬（P-3) 送部之凹處時，有會發生水晶片1之損傷。或者，會發生末 進入凹處而散亂在周圍的情形。 又按，球狀冒□係雖未圖示，但其水晶片滑動面60(第8圖 中以虛線表示）係對水平面傾斜30〜45度左右。 直進進給器滑槽61之傾斜角（15〜20度左右）係考量前述 之選取放置動作而設定爲小於前述球狀冒口之角度。因此， 在球狀冒口與直進進給器滑槽之連接處可能會阻礙供給水 晶片之穩定性。 [發明所欲解決之問題] 經濟部智慧財產局員工消費合作社印製 最近，廣泛地使用與己往之水晶片相較，極薄且小型的水 晶片。爲了要得到較高之振盪頻率起見，其厚度只有1〇數微 米，爲對應小型之機器，其面積爲例如lmmX2mm之，所請極薄 之水晶片之需要日益增加。要處理該水晶片是非常困難。 本發明之目的，在於提供一種可以解決上述問題點，而不 會在供給及輸送時損傷極薄水晶片，經常能夠安全且穩定地 供給搬送的水晶片測定分類裝置者。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 504482 A7 B7 五、發明説明（3 ) [解決問題之手段] (請先閲讀背面之注意事項再填寫本頁) 爲達成前述目的，本發明之申請專利範圍第1項之極薄水 晶片測定分類裝置爲，將從零件進給裝置撿取之極薄水晶片， 用旋轉搬送部搬送之過程中，實行特性之測定，根據前述測定 之結果予以分類之水晶片測定分類裝置中， 前述零件進給裝置係由水平配置之球狀冒口與前述球 狀冒口之零件滑動面之傾斜角，及直進進給器滑槽之零件滑 動面之傾斜角係傾斜成相同的角度之零件進給裝置所成， 前述旋轉搬送部係將前述旋轉中心軸傾斜而配置，藉以 以軸爲中心而旋轉之吸嘴之下端面能夠與前述直進進給器 滑槽之零件滑動面成平行而構成者。（P-4) 申請專利範圍第2項之裝置之前述旋轉搬送部係在申請 專利範圍第1項之極薄水晶片測定分類裝置中，在圓周上以等 間隔配置複數個吸嘴，具備有該間隔之分割及旋轉功能，以及 在上昇位置與下降位置間移動之上下移動功能，使各吸嘴在 下降位置撿取極薄水晶片之構成。 經濟部智慧財產局員工消費合作社印製 申請專利範圍第3項之極薄水晶片測定分類裝置係在申 請專利範圍第2項之極薄水晶片測定分類裝置中，復具備有所 撿取之極薄水晶片之定位功能爲其特徵者。 申請專利範圍第4項之極薄水晶片測定分類裝置係在申 請專利範圍第1，2或3項之極薄水晶片測定分類裝置中，前述 直進進給滑槽之水晶片之滑動面設定成與前述球狀冒口之 水晶片滑動面之傾斜角30〜45度相同的角度者。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 504482 Μ _ Β7 __ 五、發明説明（4 ) [實施發明之形態] (請先閲讀背面之注意事項再填寫本頁) 茲參考圖式等，將本發明之極薄水晶片測定分類裝置之 實施形態詳細說明如下。 第1圖顯示將各機構裝配成一體之極薄水晶片測定分類 裝置之主要部分之側視圖，第2圖係顯示將本發明之極薄水晶 片測定分類裝置之主要部，從第1圖之圖中X-X箭號方向所 視之平面圖。第3圖係顯示第1圖之直進進給器4與旋轉搬送 部之吸嘴.6之位置關係予以放大而顯示之圖。該實施例裝置 之處理對象之水晶片係其厚度在10數微米，面積爲例如 ImmX2mm之小型且極薄水晶片者。 經濟部智慧財產局員工消費合作社印製 如第1圖所示，零件進給裝置係由球狀冒□ 5及直進進給 器4所構件。直進進給器4爲如第3圖所示，有安裝直進進給滑 槽2,在球狀冒口 5之水晶片之排出端，有配置直進進給滑槽2 。直進進給滑槽2之表面成爲水晶片之滑動面，對直進進給滑 槽2有安裝邊緣板3,以便當直進進給器滑槽2之表面成爲水晶 片之滑動面時，將該邊緣之突出量調整成相當於一枚水晶片 之厚度藉以只允許一枚水晶片滑動。再者，傾斜直進進給滑 槽2藉以使（P-5)直進進給器滑槽2之水晶片之滑動面成爲相 同於球狀冒口 5之水晶片滑動面對水平面之傾斜角30〜45度 之角度。 如第3圖所示，位於直進進給滑槽2前端之水晶片1係安裝 在旋轉搬送部之吸嘴6下降，吸引而撿取之。吸嘴6係安裝在 吸住軸7，而吸住軸7係以吸住用空氣管9連接於未圖示之真空 源。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 504482 A7 B7____ 五、發明説明（5 ) (請先閱讀背面之注意事項再填寫本頁) 旋轉搬送部係對水平面傾斜與直進進給器滑槽2之水晶 片1之滑動面之傾斜角相同的角度，俾使吸嘴6能夠垂直地吸 引水晶片1之中心。 如第1圖及第2圖所示，旋轉搬送部係等分割地配置8支吸 住用臂桿8。各吸住用臂桿8之前端之同一圓周上有安裝吸 住軸7,在該吸住軸7之前端有安裝吸嘴6。各吸住軸7係以吸 住用空氣管9連接於未圖示之個別獨立的真空源，以預定之時 序實行吸引及不吸引者。 分度處理裝置12係具有間隔分割功能及上下動功能，使 軸出軸11旋轉及上下運動。以等間隔分割爲8而配置之8支 吸住用臂桿8之基部之中心係固定於前述輸出軸11。如第1 圖所示，分度處理裝置12之輸入軸12之輸入軸12A設有定時 滑輪13。安裝在馬達16之輸出軸之定時滑輪14與前述定時 滑輪13係以同步皮帶15連結，分度處理裝置12係以馬達16之 輸出軸16A之旋轉所驅動。8支的吸住用臂桿8係以前述輸出 軸11向時針方向旋轉之。 經濟部智慧財產局員工消費合作社印製 各臂桿係在角度方向之停止位置內，在第2圖中所示之A 位置撿取來自零件進給裝置之水晶片，在B位置實行水晶片 之定位，在C位置實行水晶片之特性測定，在下一位置將水晶 片放下而收容於分類收容箱20內。分類收容箱20係複數個 搭載於分類平台2 1，藉由繞掛於安裝在分類平台2 1之旋轉軸 之定時滑輪22及安裝於馬達25之輸出軸之定時滑輪23之同 步皮帶24,以馬達25所驅動。根據水晶片之特性測定之結果 來決定把水晶片應放進複數個分類收容箱20中之那一個箱 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） — 504482 A7 B7 五、發明説明（6 ) 內。決定要收容的分類收容箱20係以馬達25驅動至要放進 收容該水晶片之吸嘴之位置。 (請先閱讀背面之注意事項再填寫本頁) 前述之旋轉搬送部，實行定位之裝置，實行特性測定之裝 置及分類收容部係設置在本裝置之底板1〇上。第4圖係第2 圖之圖中所示8支吸住用臂桿8當中設在B位置之極薄水晶 片定位用之定位裝置之側視圖。第5圖係第4圖所不定位裝 置之上視圖。第6圖係第2圖中所示8支吸嘴用臂桿8當中設 置在C之位置之，實行水晶片特性測定用之測定裝置之側視 圖。 如第4圖所示，水晶片1之定位裝置係藉由塊狀體3 2而有4 爪氣動夾頭裝置31安裝於底板10上。4爪氣動夾頭裝置31之4 個爪分別有安裝定位用爪30。以各定位用爪30開放之狀態 下，吸嘴6以吸住水晶片1之狀態，下降至設有定位爪30之高度 位置。在該下降之位置，操作4爪氣動夾頭裝置3 1關閉各定位 用爪30以修整水晶片1之位置，使吸嘴6位於水晶片1之中心位 置。完成該修整位置之後，開放各定位用爪30,上昇吸嘴6吸 住用臂桿8移動至下一特性測定裝置。 經濟部智慧財產局員工消費合作社印製 水晶片1之特性測定裝置係如第6圖所示，在底板10上藉 由塊狀體44安裝有氣動滑道平台43。氣動滑道平台43之上 面，女裝有測疋用之彡早黃探針40之探針保持器41。探（P-7)針 保持器41係以電性絕緣材料構成。測定用之彈簧探針40及 未圖示之特性測定用之計測器係以連接線42連結之。再者， 底板10上藉由塊狀體56安裝滑動裝置54及測微計頭55。滑動 裝置54有安裝電極保持器53。將測定用之下電極元件50埋 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） " ' 504482 A7 _ B7 ____ 五、發明説明（7 ) (請先閲讀背面之注意事項再填寫本頁) 設在以電性絕緣材構成之絕緣襯套5 1並粘接，將該絕緣襯套 5 1埋設在電極保持件53而粘接之。測定用之下電極元件5〇 係以連接線5 2連結於前述之計測器。吸住水晶片1之8個吸 嘴6係均爲測定用之上電極，而安裝有吸嘴6之8支吸住軸7係 均以電性絕緣材料所構成。 第7圖係用前述之特性測定裝置實行水晶片1之特性測 定之狀況之說明圖。吸嘴6係以吸住水晶片1之狀態下降。 用測微計頭5 5預先調整，使在下降端之水晶片1與下電極元件 50之間隙成20〜30微米。此時起動氣動滑道平台43,使彈簧 探針40與上電極之吸嘴6接觸。於是，水晶片1則以吸住之狀 態及無接觸之狀態下可實行特性測定。 [發明之效果] 根據本發明，供給極薄水晶片之球狀冒口之極薄水晶片 之滑動面之傾斜角，與直進進給器滑槽之極薄水晶片之滑動 面之傾斜角呈相同的角度，因此，可消除極薄水晶片之穩定供 給在球狀冒口與直進進給器滑槽之接頭處受到阻礙的現象 經濟部智慧財產局員工消費合作社印製 〇 根據本發明，本裝置之旋轉搬送部係對水平面傾斜成與 直進進給器滑槽之極薄水晶片之滑動面之傾斜角同樣角度， 藉以使吸嘴能夠垂直地吸引極薄水晶片之中心，因此儘量能 使吸嘴接近極薄水晶片而吸引，能夠實行穩定的撿取水晶片 之作業。(P-8) 再者，使用本發明之裝置時，以吸嘴吸住極薄水晶片之狀 -10- 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） 504482 A7 B7 五、發明説明（8 ) 態下，決定極薄水晶片之位置，可實行無接觸之特性測定。因 此，從零件進給裝置撿取極薄水晶片之後，一直到將極薄水晶 片放進分類收容箱爲止，均未分離極薄水晶片，因此絕無在搬 送途中損傷極薄水晶片或使水晶片散亂在周圍，能夠安全且 穩定地搬送。 [圖式之簡單說明] 第1圖係顯示本發明之極薄水晶片測定分類裝置之主要 部分之側視圖。 第2圖係顯示第1圖之從線X-X方向所視之平面圖。 第3圖係顯示第1圖之直進進給器4與旋轉搬送部之吸嘴 6之位置關係予以放大而顯示之圖。 第4圖係顯示第2圖中所示8支吸嘴用臂桿8當中設置在B 之位置之極薄水晶片定位用之定位裝置之側視圖。 第5圖係顯示第4圖所示之定位用裝置之上視圖。 第6圖係顯示第2圖中所示8支吸嘴用臂桿8當中設置在C 之位置之，實行水晶片特性測定用之測定裝置之側視圖。 第7圖係顯示以第6圖所示之測定裝置來實行極薄水晶 片之特性測定之狀況之說明圖。 第8圖係顯示以己往之撿取放置方式從零件進給裝置撿 取水晶片之狀況之說明圖。 [元件編號之說明] 1 水晶片 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁)504482 A7 ___B7 _____ V. Description of the invention (1) [Technical field to which the invention belongs] (Please read the precautions on the back before filling out this page) This invention is about the process of inspecting and classifying very small and thin ice wafers In this case, an ultra-thin wafer measurement and classification device using a transfer device for transfer is used. More specifically, it relates to the crystal wafer measurement and classification device of the present invention, which is capable of safely and stably supplying an ultra-thin crystal wafer measurement and classification device that does not damage the crystal wafer during the inspection of the crystal wafer. By. [Previous technology] In the measurement and classification device for inspecting crystal chips, after receiving the crystal chips in a horizontally arranged crystal chip transfer unit from the part feeding device, they are transferred to an inspection station for inspection, and they are classified according to the inspection results. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Refer to Figure 8 for the status of picking up water crystals from the parts feeding device using the conventional selection and placement device. The part feeding device is composed of a ball feeder and a straight feeder. A straight feed chute is provided at the discharge end of the ball feeder. A stop plate (not shown) is provided at the discharge end of the linear feed chute. Use the pick and place device to pick up the crystal piece sent to the end of the recognition. The arm 65 for selecting and placing the device has a supporting nozzle 63. The suction nozzle 63 is connected to a vacuum source by a suction air pipe 64. The surface of the straight feed chute 61 becomes the sliding surface of the crystal chip 1, and an edge plate 62 is installed to adjust the protruding amount of the edge to the thickness of one crystal chip. The straight feeder chute 61 is a component that inclines about 15 to 20 degrees from the horizontal plane so as to leave the lowermost wafer among the overlapping wafers and let the upper wafer naturally fall. Press again, with guide plate 66 to guide the water chip 1 along -4-This paper size is applicable. National National Standard (CNS) A4 specification (210 X 297 mm) 504482 A7 B7 ___ V. Description of the invention (2 ) Advance towards the edge plate 62. (Please read the precautions on the back before filling in this page.) Select the placement device to lower the wafer 1 and suck the wafer 1 with the suction nozzle 63 at the lowered position. However, because the lower end surface of the suction nozzle 63 is not in a parallel relationship with the crystal wafer 1, the suction nozzle 63 cannot suck the center of the crystal wafer 1 and a holding position deviation occurs. When the pick-and-place device is used to suck and convey the crystal chips in this state and put them into the recess of the transport section (P-3), damage to the crystal chips 1 may occur. Or, it may happen that it does not enter the recess and is scattered around. Furthermore, although the spherical shape is not shown in the figure, the slide surface 60 (shown by a dotted line in Fig. 8) of the crystal chip is inclined about 30 to 45 degrees from the horizontal plane. The inclination angle (about 15 to 20 degrees) of the straight feeder chute 61 is set to be smaller than the angle of the spherical riser in consideration of the aforementioned selection and placement action. Therefore, the stability of the water supply wafer may be hindered at the connection between the spherical riser and the straight feeder chute. [Problems to be Solved by the Invention] Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Recently, ultra-thin and small-sized wafers have been widely used compared to their previous wafers. In order to obtain a high oscillation frequency, its thickness is only 10 micrometers. For a small machine, its area is, for example, 1mm × 2mm. Therefore, the demand for extremely thin crystal chips is increasing. It is very difficult to handle this crystal. An object of the present invention is to provide a device for measuring and classifying a wafer that can be safely and stably supplied without damaging the ultra-thin wafers during supply and transportation, and which can solve the above-mentioned problems. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 504482 A7 B7 V. Description of the invention (3) [Solution to the problem] (Please read the precautions on the back before filling this page) In order to achieve the aforementioned purpose The ultra-thin crystal wafer measurement and classification device according to item 1 of the scope of patent application of the present invention is to measure the characteristics of the ultra-thin crystal wafer picked up from the part feeding device and transported by the rotary conveying unit. According to the foregoing, In the crystal wafer measurement and classification device that is classified according to the measurement results, the aforementioned component feeding device is composed of a horizontally arranged spherical feeder and a tilt angle of a sliding surface of the aforementioned spherical feeder and a component of a straight feeder chute. The inclination angle of the sliding surface is formed by a component feeding device inclined at the same angle. The rotation conveying unit is arranged by inclining the rotation center axis, and the lower end surface of the suction nozzle rotating with the axis as the center can be linearly advanced with the foregoing. The sliding surfaces of the parts of the feeder chute are formed in parallel. (P-4) The aforementioned rotary transfer unit of the device in the second scope of the patent application is an ultra-thin crystal wafer measurement and classification device in the first scope of the patent application. A plurality of nozzles are arranged at equal intervals on the circumference. The function of dividing and rotating the interval, and the function of moving up and down between the ascending position and the descending position enable each nozzle to pick up a thin crystal wafer in the descending position. The Ministry of Economic Affairs ’Intellectual Property Bureau employee consumer cooperative prints the ultra-thin crystal wafer measurement and classification device for patent application item 3, which is included in the ultra-thin crystal wafer measurement and classification device for patent application item 2 The positioning function of thin water crystal is its characteristic. The ultra-thin crystal wafer measurement and classification device of the patent application scope item 4 is the ultra-thin crystal wafer measurement and classification device of the patent application scope item 1, 2 or 3, wherein the sliding surface of the above-mentioned straight feed chute slide surface is set to It is the same angle as the inclination angle of the sliding surface of the crystal riser of the spherical riser of 30 to 45 degrees. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 504482 Μ Β7 __ V. Description of the invention (4) [Forms of implementing the invention] (Please read the precautions on the back before filling this page) Reference Embodiments of the ultra-thin crystal wafer measurement and classification device of the present invention will be described in detail in the drawings and the like. Fig. 1 shows a side view of the main part of the ultra-thin crystal wafer measurement and classification device with each mechanism assembled, and Fig. 2 shows the main part of the ultra-thin crystal wafer measurement and classification device of the present invention. Plan view seen from the direction of arrow XX in the figure. Fig. 3 is an enlarged view showing the positional relationship between the linear feeder 4 and the suction nozzle .6 of the rotary conveying section in Fig. 1. The crystal wafer of the device of this embodiment is a small and extremely thin crystal wafer having a thickness of 10 micrometers and an area of, for example, 1 mm × 2 mm. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs As shown in Figure 1, the part feeding device is composed of a ball 5 and a straight feeder 4. As shown in Fig. 3, the linear feeder 4 is provided with a linear feed chute 2 and a linear feed chute 2 is provided at the discharge end of the crystal wafer of the spherical riser 5. The surface of the straight feed chute 2 becomes the sliding surface of the crystal chip, and an edge plate 3 is installed to the straight feed chute 2 so that when the surface of the straight feeder chute 2 becomes the slide surface of the crystal chip, the edge The protruding amount is adjusted to be equivalent to the thickness of one crystal piece, so that only one crystal piece is allowed to slide. In addition, the inclined straight feed chute 2 is used to make the sliding surface of the crystal wafer of the (P-5) straight feeder chute 2 the same as the inclined angle of the sliding surface of the crystal wafer of the spherical feeder 5 to the horizontal plane 30 ~ 45 degree angle. As shown in Fig. 3, the crystal wafer 1 located at the front end of the straight feed chute 2 is mounted on the suction nozzle 6 of the rotary conveying section, and is sucked and picked up. The suction nozzle 6 is mounted on a suction shaft 7, and the suction shaft 7 is connected to a vacuum source (not shown) by a suction air pipe 9. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 504482 A7 B7____ V. Description of the invention (5) (Please read the precautions on the back before filling this page) The rotary conveying unit is inclined to the horizontal plane and straight forward The inclination angle of the sliding surface of the crystal piece 1 of the dispenser chute 2 is the same, so that the suction nozzle 6 can vertically attract the center of the crystal piece 1. As shown in Figs. 1 and 2, eight suction arms 8 are arranged at equal intervals in the rotary transfer unit. A suction shaft 7 is mounted on the same circumference of the front end of each suction arm 8 and a suction nozzle 6 is mounted on the front end of the suction shaft 7. Each suction shaft 7 is connected to a separate independent vacuum source (not shown) by a suction air pipe 9 and performs suction and non-sucking at a predetermined timing. The indexing processing device 12 has an interval division function and an up-and-down function, which rotates the shaft out shaft 11 and moves up and down. The center of the base of the eight sucking booms 8 which are divided into eight at equal intervals is fixed to the output shaft 11. As shown in Fig. 1, the input shaft 12A of the input shaft 12 of the indexing processing device 12 is provided with a timing pulley 13. The timing pulley 14 mounted on the output shaft of the motor 16 and the aforementioned timing pulley 13 are connected by a timing belt 15. The indexing processing device 12 is driven by the rotation of the output shaft 16A of the motor 16. Eight suction arms 8 are rotated in the clockwise direction by the aforementioned output shaft 11. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints each boom in the stop position in the angular direction, picks up the water crystal from the part feeding device at the position A shown in Figure 2, and implements the water crystal at the B position. Positioning, measurement of the characteristics of the quartz crystal is performed at the C position, and the quartz crystal is lowered at the next position to be stored in the sorting storage box 20. The sorting storage box 20 is a plurality of timing belts 24 mounted on the sorting platform 21, and wound on a timing pulley 22 mounted on a rotating shaft mounted on the sorting platform 21 and a timing belt 24 mounted on a timing pulley 23 mounted on an output shaft of the motor 25. It is driven by the motor 25. According to the results of the measurement of the characteristics of the crystal chips, it is determined which one of the plurality of classification storage boxes 20 should be placed in the box. The paper size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) — 504482 A7 B7 Fifth, the description of the invention (6). The sorting storage box 20 decided to be stored is driven by a motor 25 to a position where it is to be put into a nozzle for holding the crystal chips. (Please read the precautions on the back before filling this page.) The aforementioned rotary conveying unit, the device for positioning, the device for measuring characteristics, and the classification and storage unit are installed on the bottom plate 10 of the device. Fig. 4 is a side view of the positioning device for positioning the ultra-thin crystal piece set at the B position among the eight suction arm 8 shown in the second figure. Figure 5 is a top view of the positioning device not shown in Figure 4. Fig. 6 is a side view of a measuring device for measuring the characteristics of a crystal wafer when the eight-nozzle boom 8 shown in Fig. 2 is set at the position C. As shown in FIG. 4, the positioning device of the crystal piece 1 is mounted on the bottom plate 10 by a four-jaw pneumatic chuck device 31 through a block body 32. The four jaws of the four-jaw pneumatic chuck device 31 each have a jaw 30 for mounting and positioning. With the positioning claws 30 being opened, the suction nozzle 6 is lowered to the height position where the positioning claws 30 are provided while holding the crystal wafer 1. In this lowered position, the 4-jaw pneumatic chuck device 31 is operated to close the positioning jaws 30 to trim the position of the crystal wafer 1 so that the suction nozzle 6 is positioned at the center of the crystal wafer 1. After this trimming position is completed, each positioning claw 30 is opened, and the suction nozzle 6 lifts the suction arm 8 and moves to the next characteristic measuring device. The device for measuring the characteristics of the water crystal chip 1 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is shown in FIG. 6, and a pneumatic slide platform 43 is mounted on the bottom plate 10 via a block 44. Above the pneumatic slide platform 43 is a probe holder 41 for women's early yellow probe 40 for measurement. The probe (P-7) needle holder 41 is made of an electrically insulating material. The spring probe 40 for measurement and the measuring device for characteristic measurement (not shown) are connected by a connecting wire 42. Furthermore, a sliding device 54 and a micrometer head 55 are mounted on the bottom plate 10 via a block 56. The slide device 54 has a mounted electrode holder 53. The paper size of the lower electrode element used for the measurement is 50. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " '504482 A7 _ B7 ____ V. Description of the invention (7) (Please read the note on the back first (Please fill in this page again for details.) An insulating bush 51 made of an electrically insulating material is provided and bonded, and the insulating bush 51 is embedded in an electrode holder 53 and bonded. The lower electrode element 50 for measurement is connected to the above-mentioned measuring instrument by a connecting wire 5 2. The eight nozzles 6 that suck the quartz wafer 1 are all upper electrodes for measurement, and the eight suction shafts 7 that are equipped with the nozzle 6 are all made of an electrically insulating material. Fig. 7 is an explanatory diagram of a state where the characteristic measurement of the crystal wafer 1 is performed by the aforementioned characteristic measuring device. The suction nozzle 6 is lowered while sucking the quartz chip 1. The micrometer head 55 is adjusted in advance so that the gap between the quartz chip 1 on the lower end and the lower electrode element 50 becomes 20 to 30 m. At this time, the pneumatic slide platform 43 is started so that the spring probe 40 is in contact with the suction nozzle 6 of the upper electrode. Therefore, the crystal chip 1 can be measured in a state of being absorbed and a state of no contact. [Effects of the invention] According to the present invention, the inclination angle of the sliding surface of the ultra-thin crystal wafer that supplies the spherical riser of the ultra-thin crystal chip is inferior to the inclination angle of the sliding surface of the ultra-thin crystal chip of the straight feeder chute. At the same angle, therefore, the phenomenon that the stable supply of ultra-thin crystal wafers is blocked at the joint of the spherical riser and the straight feeder chute can be eliminated. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. According to the present invention, The rotary conveying unit of the device is inclined to the horizontal plane at the same angle as the inclination angle of the sliding surface of the ultra-thin crystal wafer of the straight feeder chute, so that the suction nozzle can vertically attract the center of the ultra-thin crystal wafer. The suction nozzle is attracted by being close to the extremely thin crystal wafer, and the stable operation of picking up the crystal wafer can be performed. (P-8) Furthermore, when using the device of the present invention, the ultra-thin wafer is sucked with a nozzle. -10- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 504482 A7 B7 V. Description of the invention (8) In the state of determining the position of the ultra-thin crystal wafer, non-contact characteristic measurement can be performed. Therefore, after picking up the ultra-thin crystals from the part feeding device, and until the ultra-thin crystals are placed in the sorting storage box, the ultra-thin crystals are not separated, so the ultra-thin crystals are never damaged or damaged during transportation. The water crystals are scattered around and can be transported safely and stably. [Brief description of the drawings] Fig. 1 is a side view showing the main part of the ultra-thin crystal wafer measurement and classification device of the present invention. Fig. 2 is a plan view showing the first figure viewed from the line X-X direction. Fig. 3 is an enlarged view showing the positional relationship between the linear feeder 4 and the suction nozzle 6 of the rotary conveying section in Fig. 1. FIG. 4 is a side view showing the positioning device for positioning the ultra-thin crystal wafers at the position B among the eight nozzle arms 8 shown in FIG. 2. Fig. 5 is a top view showing the positioning device shown in Fig. 4; Fig. 6 is a side view showing a measurement device for measuring the characteristics of a crystal wafer, which is provided at a position C among the eight nozzle arms 8 shown in Fig. 2; Fig. 7 is an explanatory diagram showing a state in which the characteristics of the ultra-thin crystal piece are measured by the measuring device shown in Fig. 6; Fig. 8 is an explanatory diagram showing a state in which a crystal wafer is picked up from a part feeding device by its own pick and place method. [Explanation of the component number] 1 Crystal wafer This paper size applies to China National Standard (CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling this page)
、1T 線'^»· 經濟部智慧財產局員工消費合作社印製 -11 - 504482 A7 B7 五、發明説明（9 ) 經濟部智慧財產局員工消費合作社印製 2,61 直進進給滑槽 3,62 邊緣板 4 直進進給器 5 球狀冒口 6,63 吸嘴 7 吸住軸 8 吸住用臂桿 9,64 吸住用空氣管 10 底板 11 輸出軸 12 分度處理裝置 1 3,14,22,23 定時滑 15,24 同步皮帶 16,25 馬達 20 分類收容箱 21 分類平台 30 定位用爪 31 4爪氣動夾頭裝丨 32,44,56 塊狀體 40 彈簧探針 41 探針支持器 42,52 連接線 43 氣動滑道平台 50 下電極元件 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 504482 A7 B7 五、發明説明（10) 51 絕緣襯套 53 電極保持器 54 滑動裝置 55 測微計頭 60 球狀冒口之水晶片之滑動面 63 吸嘴 65 臂桿 66 導承板 (請先閱讀背面之注意事項再填寫本頁)、 1T line '^ »· Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -11-504482 A7 B7 V. Invention Description (9) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2,61 Straight feed chute 3, 62 Edge plate 4 Straight feeder 5 Spherical feeder 6,63 Suction nozzle 7 Suction shaft 8 Suction arm 9,64 Suction air tube 10 Base plate 11 Output shaft 12 Indexing device 1 3,14 , 22,23 Timing slide 15,24 Timing belt 16,25 Motor 20 Sorting storage box 21 Sorting platform 30 Positioning claw 31 4-claw pneumatic chucks 32,44,56 Block 40 Spring probe 41 Probe support Connector 42, 52 Connecting line 43 Pneumatic slide platform 50 Lower electrode element (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210X 297 mm) 504482 A7 B7 5 Description of the invention (10) 51 Insulating bushing 53 Electrode holder 54 Slider 55 Micrometer head 60 Sliding surface of the wafer of spherical riser 63 Suction nozzle 65 Arm rod 66 Guide plate (Please read the note on the back first (Fill in this page again)
、1T 線^: 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -13-Line 1T ^: Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies to China National Standard (CNS) A4 (210X297 mm) -13-