492134 五、發明説明（1 . 【發明領域】 請 先 閲 讀 % 之 注 意 事 項 再 填 寫 本 頁 本發明係關於真空處理室、電漿顯示裝置的製造裝置 以及電漿顯示裝置的製造方法，特別是關於對位、密封、 街紂則面板與後面板的工程所使用的電漿顯示裝置的製造 裝置以及製造方法的改善。 【發明背景】 【習知技藝之說明】 近年來薄型且可顯示大畫面的電漿顯示裝置受到注目 。圖1 6 ( a )·的符號1 1 1係顯示a C型的電漿顯示裝 置的構造。此電漿顯示裝置1 1 1具有前面板1 2 0與後 面板1 3〇。 在前面板1 2 0與後面板1 3 0的表面分別配設電極 121、131。前面板12〇與後面板130其電極 121、131互相面對，各電極121、131係延伸 配設於互相垂直的方向而平行地對向配置，在複數個電極 121、131之中，藉由選擇適當的電極121、 經濟部智慧財產局員工消費合作社印製 1 3 1施加電壓，以使電漿顯示裝置1 1 1上的所希望的 位置發光來構成。 對於製造這種構成的電漿顯示裝置需要對位、密封預 定的構件分別形成於表面的前面板與後面板，然後，內部 封入放電用的氣體之密封處理。 如此，對位前面板與後面板，密封的裝置如圖1 7的 符號1 0 1所示的製造裝置被提出。 本紙張尺度適用中.國國家標準（CNS ) A4規格（210X297公釐） -4- 492134 A7 ____ B7 ___ 五、發明説明（2 ) 此製造裝置1 0 1具有Mg〇形成膜室1 0 2、蒸鍍 出口室1 0 3、傳送室1 0 4、預烤室1 0 5、定位室 1 0 6、密封室1 〇 7、排氣室1 0 8、密封室1 〇 9。 在M g〇形成膜室1 0 2的前段配置未圖示的傳入室 ，在後段配置蒸鍍出口室1 0 3。蒸鍍出口室1 〇 3係配 置於傳送室1〇4。 在傳送室1 0 4配置預烤室1 〇 5、定位室1 〇 6、 密封室1 0 7。在密封室1 0 7的後段配置排氣室1 〇 8 ，在排氣室1 0 8的後段配置密封室1 1 0，在密封室 1 0 9的後段配置未圖不的傳出室。 對於使用上述製造裝置1 0 1來密封前面板與後面板 ，首先，將預先形成透明電極膜等的預定構件之前面板傳 .入未圖示的傳入室。 接著，對傳入室進行真空排氣，在傳入室內變成真空 環境後，使傳入室內與預先被真空排氣的M g〇形成膜室 1 0 2內連接，將前面板傳入M g〇形成膜室1 0 2。其 次，加熱前面板在達到1 5 0 °C〜2 0 0 °C左右的溫度之 狀態下，利用蒸鍍法在前面板表面形成M g 0保護膜。 在形成預定膜厚的M g 0保護膜後，將前面板傳入蒸 鍍出口室1 0 3後，冷卻前面板的溫度到室溫。當前面板 的溫度降到室溫後，中介傳送室1 0 4將前面板傳入定位 室1 0 6。所傳入的前面板在定位室1 0 6內藉由未圖示 的基板保持機構，在M g〇保護膜的形成膜面朝下的狀態 下被保持。此基板保持機構係由真空吸附裝置來構成，因 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） " ' (請先閲讀背面之注意事項再填寫本頁) 冒裝. 經濟部智慧財產局員工消費合作社印製 492134 A7 B7 五、發明説明（3 ) — ~~一 _ 此定位室1 0 6內的壓力被設定爲大氣壓。 另一方面，在預烤室1 0 5的前段配設未圖示的傳入 室，在將預先形成預定的構件於表面的後面板傳入傳入室 後，利用未圖示的傳送機構傳送到預烤室1 〇 5。 接著，在大氣環境中的預烤室1 〇 5加熱後面板到5 〇0 °C左右的高溫，進行脫氣處理。然後冷卻後面板，當 後面板的溫度降低到室溫後，中介傳送室1 〇 4將後面板. 傳入定位室1 0 6。所傳入的後面板藉由未圖示的基板保 持機構，在表面朝上的狀態下與前面板面對來被.保持。 其次，在大氣環境中的定位室1 〇 6進行前面板與後 面板的相對對位。完成對位後以夾子（Clip )等暫時固定 前面板與後面板，使面板間的相對位置不偏移。 接著，中介傳送室1 〇 4將前面板以及後面板傳入內 部壓力達大氣壓的密封室1 0 7。 後面板的剖面圖顯示於圖1 6 ( b )的符號1 3〇。 在後面板1 3 0表面的周邊形成熱熔融性的密封材質 1 5 8，令密封材質1 5 8與前面板表面抵接，若加熱到 4 0 0 °C左右的話，密封材質1 5 8熱熔融與前面板附著 。由此狀態使面板冷卻凝固密封材質的話，前面板與後面 板被密封。 在後面板的一部分預先設有未圖示的貫通孔，預先安 裝具有與此貫通孔連通的開口的片狀管。因此，在密封的 狀態下，前面板與後面板之間的空間係中介貫通孔以及片 狀管與外部接通。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29*7公釐） (請先閱讀背面之注意事項再填寫本頁) 寶裝- 訂 經濟部智慧財產局員工消費合作社印製 -6 - 492134 A7 ____ B7 _ 五、發明説明（4 ) (請先閲讀背面之注意事項再填寫本頁) 然後，將密封的的一組面板傳入排氣室1 〇 8，對排 氣室1 0 8進行真空排氣。於是一組面板間也自貫通孔以 及片狀管被真空排氣。 接著，連接排氣室1 0 8內與被真空排氣的密封室 1 0 9內，將一組前面板與後面板傳入密封室1 〇 9內。 然後，若導入放電用氣體於密封室1 0 9內到預定壓力的 話，在真空狀態的一組面板間放電氣體也自片狀管以及貫 通孔被導入。一組面板間若達到預定壓力後，弄破片狀管 堵塞貫通孔，氣密地密封一組面板間的話，可得到電漿顯 示裝置。 ' 將如此所製造的電漿顯示裝置傳入傳出室（未圖示） ，在遮斷與密封室1 0 9之間後，若導入大氣於傳出室內 ..的話，可取出電漿顯示裝置。 經濟部智慧財產局員工消費合作社印製 上述製造裝置1 0 1如上述在定位室1 0 6對位前面 板與後面板後，在定位室1 0 6內以夾子等暫時固定前面 板與後面板，使其不產生位置偏移後，傳送到密封室 1 0 7。如此爲了不產生位置偏移，很難以夾子暫時固定 前面板與後面板。而且，以夾子暫時固定後傳送到密封室 時，因夾子與傳傳送機構接觸有發生位置偏移之虞，故需 使用傳送機構不與夾子接觸而構成的特別傳送機構。 而且，習知分別在M g 0形成膜時或脫氣處理時加熱 前面板與後面板後，冷卻各面板到室溫進行對位，然後再 度加熱密封前面板與後面板。由於冷卻一旦加熱的面板到 室溫所需的時間極長，故發生製造所需的時間長、產能（ 1紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐1 一 — 492134 A7 B7 五、發明説明（5 )492134 V. Description of the invention (1. [Field of the invention] Please read the precautions of% before filling out this page. The present invention relates to a vacuum processing chamber, a plasma display device manufacturing device, and a plasma display device manufacturing method, and particularly to Improvement of the plasma display device manufacturing device and manufacturing method for the alignment, sealing, street panel and rear panel engineering. [Background of the Invention] [Explanation of the Know-how] In recent years, thin and large-screen displays The plasma display device attracts attention. The symbol 1 1 1 in Fig. 16 (a) · shows the structure of a type C plasma display device. This plasma display device 1 1 1 has a front panel 1 2 0 and a rear panel 1 30. The electrodes 121 and 131 are respectively arranged on the surfaces of the front panel 120 and the rear panel 130. The front panels 120 and 130 have their electrodes 121 and 131 facing each other, and each of the electrodes 121 and 131 is extended. The electrodes are arranged in a direction perpendicular to each other and arranged in parallel, and among the plurality of electrodes 121 and 131, by selecting an appropriate electrode 121, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, 1 3 1 and applying a voltage, The plasma display device 1 1 is configured to emit light at a desired position. For manufacturing the plasma display device of this configuration, it is necessary to align and seal predetermined members formed on the front and rear panels of the surface, and then the interior Sealing treatment for sealing the discharge gas. In this way, the front and back panels are aligned, and the sealing device is proposed as shown in Fig. 17 with the symbol 1 01. The paper size is applicable. National National Standard (CNS ) A4 size (210X297mm) -4- 492134 A7 ____ B7 ___ 5. Description of the invention (2) This manufacturing device 1 0 1 has Mg〇 forming film chamber 1 0 2, evaporation outlet chamber 1 0 3, transfer chamber 1 0 4, Pre-baking chamber 1 0 5, Positioning chamber 1 06, Sealing chamber 1 07, Exhaust chamber 108, Sealing chamber 1 09. The configuration of the front section of the membrane chamber 1 102 formed at M g〇 is not shown. In the incoming chamber shown below, a vapor deposition outlet chamber 103 is arranged at the rear stage. The vapor deposition outlet chamber 103 is arranged in the transfer chamber 104. A transfer chamber 104 is equipped with a pre-baking chamber 10 and a positioning chamber 1. 〇6. Sealing chamber 107. An exhaust chamber 108 is arranged at the rear stage of the sealing chamber 107, and a rear stage of the exhaust chamber 108 is arranged. A sealing chamber 1 10 is provided, and an outgoing chamber (not shown) is disposed at the rear of the sealing chamber 10 9. For sealing the front panel and the rear panel using the above manufacturing apparatus 101, first, a transparent electrode film or the like is formed in advance. The pre-determined component is introduced into the inlet chamber (not shown) on the front panel. Then, the inlet chamber is evacuated, and after the inlet chamber becomes a vacuum environment, the inlet chamber is formed with M g0 which is evacuated in advance. The membrane chamber 102 is internally connected, and the front panel is introduced into M g0 to form the membrane chamber 102. Next, when the front panel is heated to a temperature of about 150 ° C to 200 ° C, a Mg 0 protective film is formed on the surface of the front panel by a vapor deposition method. After the Mg 0 protective film having a predetermined film thickness is formed, the front panel is introduced into the evaporation outlet chamber 103, and then the temperature of the front panel is cooled to room temperature. After the temperature of the front panel has dropped to room temperature, the intermediary transfer room 104 transfers the front panel into the positioning room 106. The introduced front panel is held by the substrate holding mechanism (not shown) in the positioning chamber 106 with the M g0 protective film forming film surface facing downward. This substrate holding mechanism is composed of a vacuum adsorption device, because this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) " '(Please read the precautions on the back before filling in this page) posing. Economy Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau 492134 A7 B7 V. Description of the invention (3) — ~~ 1_ The pressure in this positioning room 10 6 is set to atmospheric pressure. On the other hand, an introduction chamber (not shown) is arranged in the front section of the pre-baking chamber 105. After the rear panel in which a predetermined member is formed on the surface is introduced into the introduction chamber, it is conveyed by a conveyance mechanism (not shown). Go to the pre-baking room 105. Next, in the pre-baking chamber 105 in the atmospheric environment, the rear panel is heated to a high temperature of about 5,000 ° C, and is degassed. Then cool the rear panel. When the temperature of the rear panel is lowered to room temperature, the intermediary transfer room 104 passes the rear panel into the positioning room 106. The incoming rear panel is held by a substrate holding mechanism (not shown) facing the front panel with the surface facing upward. Second, the positioning room 106 in the atmospheric environment performs relative alignment of the front panel and the rear panel. After the alignment is completed, the front panel and the rear panel are temporarily fixed with a clip or the like so that the relative positions between the panels are not shifted. Next, the intermediary transfer chamber 104 passes the front panel and the rear panel into a sealed chamber 107 having an internal pressure of atmospheric pressure. A cross-sectional view of the rear panel is shown by the symbol 1 30 in FIG. 16 (b). A heat-fusible sealing material 1 5 8 is formed on the periphery of the surface of the rear panel 130, and the sealing material 1 58 is brought into contact with the surface of the front panel. If it is heated to about 400 ° C, the sealing material 1 5 8 is hot. Fused to the front panel. When the panel is cooled and solidified in this state, the front panel and the rear panel are sealed. A part of the rear panel is provided with a through hole (not shown) in advance, and a sheet tube having an opening communicating with the through hole is installed in advance. Therefore, in a sealed state, the space between the front panel and the rear panel is interposed through the through hole and the sheet tube to the outside. This paper size applies Chinese National Standard (CNS) A4 (210X29 * 7mm) (Please read the precautions on the back before filling out this page) Baozhuang-Order Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economics-6-492134 A7 ____ B7 _ V. Description of the invention (4) (Please read the precautions on the back before filling this page) Then, introduce the sealed set of panels into the exhaust chamber 1 08, and carry out the exhaust chamber 1 0 8 Vacuum exhaust. Then, a group of panels are also evacuated from the through holes and the sheet tube by vacuum. Next, the inside of the exhaust chamber 108 is connected to the inside of the sealed chamber 100 which is evacuated, and a set of the front panel and the rear panel are introduced into the sealed chamber 107. Then, if the discharge gas is introduced into the sealed chamber 10 to a predetermined pressure, the discharge gas between a group of panels in a vacuum state is also introduced from the sheet tube and the through hole. If a group of panels reaches a predetermined pressure, the sheet tube is broken, the through hole is blocked, and the space between a group of panels is hermetically sealed to obtain a plasma display device. '' The plasma display device manufactured in this way is introduced into the outgoing room (not shown), and after it is cut off from the sealed room 1 10, if the atmosphere is introduced into the outgoing room .., the plasma display can be taken out Device. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the above manufacturing device 101. As described above, after positioning the front panel and the rear panel in the positioning room 106, the front panel and the rear panel were temporarily fixed with a clip or the like in the positioning room 106 After the position is not shifted, it is transferred to the sealed chamber 107. In order to avoid positional deviation, it is difficult to temporarily fix the front panel and the rear panel with a clip. In addition, when the clip is temporarily fixed and transferred to the sealed room, the clip may be displaced due to contact with the transfer mechanism. Therefore, a special transfer mechanism that does not contact the clip is required. Moreover, it is known to heat the front panel and the rear panel respectively when M g 0 forms a film or degassing treatment, and then cool the panels to room temperature for alignment, and then heat-seal the front and rear panels again. Because it takes a long time to cool the heated panel to room temperature, it takes a long time to produce, and the production capacity (1 paper size applies to China National Standard (CNS) A4 specifications (210X297 mm 1 1 — 492134 A7 B7 5) Description of the invention (5)
Throughput )降低的問題。 【發明槪要】 本發明係爲了解決上述習知技術的不妥當所進行的創 作，其目的爲提供不使製造工程繁雜，可謀求產能的提高 之技術。 爲了解決上述課題，申請專利範圍第1項所述之發明 ，其特徵包含： 真空槽；以及 面板保持機構，配置於‘該真空槽內，其中 該面板保持機構具有在該面板的表面互相對向的狀態 下，水平地配置構成電漿顯示裝置的兩片面板，俾可進行 該面板的相對對位來構成的面板保持機構，其中 該面板保持機構具有上側的面板保持台與下側的面板 保持台，各面板保持台係分別用以可附著保持該面板來構 成，在該面板保持台配設加熱機構，該加熱機構在附著保 持該面板的狀態下，俾可藉由熱傳導加熱該面板來構成。 申請專利範圍第2項所述之發明係申請專利範圍第1 項所述之真空處理室，其中在該面板保持台配設靜電吸附 裝置。 申請專利範圍第3項所述之發明係申請專利範圍第1 項所述之真空處理室，其中在該真空槽配設氣體導入機構 ，在該面板保持台配設真空吸附裝置。 申請專利範圍第4項所述之發明係申請專利範圍第1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -8 - 492134 A7 B7 五、發明説明（6 ) 項所述之真空處理室，其中更具有可將片狀管抵接於該面 板表面來構成的抵接機構。 (請先閲讀背面之注意事項再填寫本頁) 申請專利範圍第5項所述之發明係申請專利範圍第1 項所述之真空處理室，其中包含： 驅動機構，配置於該真空槽外；以及 傳達機構，在維持真空槽內的真空狀態下，將該驅動 機構所生成的驅動力傳達到該面板保持機構。 申請專利範圍第6項所述之發明，其特徵包含：> 形成膜室，由前面板與後面板製造電漿顯示裝置，在 該前面板表面形成保護膜；’ 預烤室，加熱該後面板進行脫氣處理；以及 傳送室，均連接於該形成膜室以及該預烤室的任一個 ，具備該前面板以及該後面板的傳送機構，其中 具有連接於該傳送室的真空處理室，該真空處理室包 含·· 真空槽；以及 面板保持機構，配置於該真空槽內， 經濟部智慧財產局員工消費合作社印製 該面板保持機構具有在該面板的表面互相對向的狀態 下，水平地配置構成電漿顯示裝置的兩片面板，俾可進行 該面板的相對對位來構成的面板保持機構，其中 該面板保持機構具有上側的面板保持台與下側的面板 保持台，各面板保持台係分別用以可附著保持該面板來構 成，在該面板保持台配設加熱機構，該加熱機構在附著保 持該面板的狀態下，俾可藉由熱傳導加熱該面板來構成。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 492134 A7 B7 五、發明説明（7 ) (請先閲讀背面之注意事項再填寫本頁) 申請專利範圍第7項所述之發明係申請專利範圍第6 項所述之電獎顯示裝置的製造裝置，其中在該面板保持台 配設靜電吸附裝置。 申請專利範圍第8項所述之發明係申請專利範圍第6 項所述之電漿顯示裝置的製造裝置，其中在該真空槽配設 氣體導入機構，在該面板保持台配設真空吸附裝置。 申請專利範圍第9項所述之發明係申請專利範圍第6 項所述之電漿顯示裝置的製造裝置，其中更具有可將片狀 管抵接於該面板表面來構成的抵接機構。 申請專利範圍第1 〇項所述之發明係申請專利範圍第 6項所述之電漿顯示裝置的製造裝置，其中包含： 驅動機構，配置於該真空槽外；以及 傳達機構，在維持真空槽內的真空狀態下，將該驅動 機構所生成的驅動力傳達到該面板保持機構。 申請專利範圍第1 1項所述之發明係申請專利範圍第 6項所述之電漿顯示裝置的製造裝置，其中該傳送室係連 接密封該前面板與該後面板的密封室。 經濟部智慧財產局員工消費合作社印製 申請專利範圍第1 2項所述之發明，其特徵包含： 加熱工程，加熱後面板、進行脫氣處理； 對位工程，將該後面板與表面形成保護膜的前面板分 別吸附於面板保持台，在該面板的表面互相對向的狀態下 ，進行該後面板與該前面板的對位； 密封工程，在使形成於該後面板表面的周邊部之密封 材質與該前面板接觸後，加熱該密封材質使其熔融，在緊 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 492134 A7 B7___ 五、發明説明（8 ) (請先閲讀背面之注意事項再填寫本頁) 壓該後面板與該前面板之間成預定間隙爲止後，藉由冷卻 該密封材質使其凝固，以密封該後面板與該前面板，其中 該對位工程中的該後面板的溫度僅比該加熱工程中的 該後面板的溫度低預定溫度來構成。 申請專利範圍第1 3項所述之發明係申請專利範圍第 1 2項所述之電漿顯示裝置的製造方法，其中該對位工程 與該密封工程均在同一處理室內進行。 申請專利範圍第1 4項所述.之發明係申請專利範圍第 1 2項所述之電漿顯示裝置的製造方法，其中該加熱工程 、該對位工程以及該密封X程均在真空環境中進行。 申請專利範圍第1 5項所述之發明係申請專利範圍第 1 3項所述之電漿顯示裝置的製造方法，其中該加熱工程 、該對位工程以及該密封工程均在真空環境中進行。 申請專利範圍第1 6項所述之發明係申請專利範圍第 1 4項所述之電漿顯示裝置的製造方法，其中在該對位工 程與該密封工程中，該前面板以及該後面板係被靜電吸附 於該面板保持台。 經濟部智慧財產局員工消費合作社印製 申請專利範圍第1 7項所述之發明係申請專利範圍第 1 2項所述之電漿顯示裝置的製造方法，其中該對位工程 與該密封工程係在大氣壓條件下進行，在該對位工程與該 密封工程中，該前面板以及該後面板係被真空吸附於該面 板保持台。 申請專利範圍第1 8項所述之發明係申請專利範圍第 1 2項所述之電漿顯示裝置的製造方法，其中在該對位工 本紙張尺度適财關家標準（CNS ) A4規格（21GX297公赛） -11 - 492134 A7 B7 五、發明説明（9 ) 程前，更具有控制該前面板的溫度之工程，俾變成與該對 位工程中的該後面板的溫度相同的溫度。 . (請先閲讀背面之注意事項再填寫本頁) 申請專利範圍第1 9項所述之發明係申請專利範圍第 1 2項所述之電漿顯示裝置的製造方法，其中 在該密封工程前，更具有將前端配設熱熔融性的黏著 材質之片狀管，抵接於該前面板或後面板的任何一方或兩 方之工程， 在該密封工程加熱該密封材質並且加熱該黏著材質使 其熔融，藉由冷卻該黏著材質使其凝固，以該黏著材質使 該片狀管固定於該前面板或後面板的任何一方或兩方。 如果依照本發明的真空處理室，當在一方的面板表面 周圍預先配設熱熔融性的密封材質時，維持完成對位的兩 .片面板的相對位置，同時使未配設密封材質側的面板轰面 與密封材質抵接，利用加熱機構加熱兩片面板使密封材質 熱熔融後，藉由冷卻密封材質使其凝固，可以密封材質來 密封兩片面板。 經濟部智慧財產局員工消費合作社印製 如此，在一個真空處理室不僅進行兩片面板的相對對 位，也能密封兩片面板，維持對位後的正確位置關係，同 時因可立即密封兩片面板，故無須如習知般以夾子固定一 組面板傳送到密封室的工程，可削減工程數。而且，也不 需要爲了不與夾子接觸而製作的特別傳送機構。 此外，在本發明的真空處理室中，使在面板保持機構 配設靜電吸附裝置來構成也可以。這種情形可在真空環境 中吸附保持面板。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -12- 492134 A7 __ B7 五、發明説明（彳0 ) (請先閱讀背面之注意事項再填寫本頁) 而且，在本發明的真空處理室中，使在面板保持機構 配設真空吸附裝置來構成也可以。這種情形可在大氣壓條 件下吸附保持面板。 再者，在本發明的真空處理室中，於面板表面具有可 抵接片狀管的抵接機構。 一方的面板設有貫通孔時，爲了與上述貫通孔連通， 以抵接機構將前端配設熱熔融性的黏著材質的片狀管前端 抵接於面板表面，在密封時以加熱機構加熱兩片面板的話 ，片狀管前端的黏著材質熱熔融，然後藉由冷卻使其凝固 ，在與貫通孔連通的狀態下，可使片狀管黏著於面板表面 〇 經濟部智慧財產局員工消費合作社印製 而且，在本發明的真空處理室中，在驅動機構與真空 槽內遮斷的狀態下，具有使驅動力傳達到面板保持機構的 傳達機構來構成也可以。當驅動機構無法禁得住真空槽內 環境時，例如真空槽內的處理在高溫進行，若於高溫條件 下暴露驅動機構則對動作有妨礙，故對於無法在真空槽內 配設驅動機構時，藉由以傳達機構僅將驅動力傳達到面板 保持機構，可不暴露驅動機構於真空槽內環境，可驅動面 板保持機構。 再者，如果依照本發明的電漿顯示裝置的製造裝置， 係具備形成膜室、脫氣室、傳送室以及本發明的真空處理 室。 相關構成的製造裝置因具有本發明的真空處理室，故 可在一個真空處理室內對位密封兩片面板。因此，與習知 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) "~ 492134 A7 _______ B7 五、發明説明（11 ) 不同，無須以夾子固定一組面板傳送到密封室，進行密封 的工程，可削減工程數。 (請先閲讀背面之注意事項再填寫本頁) 而且，如果依照本發明的電漿顯示裝置的製造裝置， 在傳送室連接密封室來構成也可以。 如此地構成，在真空環境進行密封工程時，可將在本 發明的真空處理室內完成密封工程的一組面板中介傳送室 ，立即傳入密封室。 再者，如果依照本發明的電漿顯示裝置的製造方法， 對位工程中的後面板溫度係比用以脫氣的加熱工程中的後 面板的溫度僅降低預定溫度_。 習知在對位工程時冷卻各面板到室溫，惟本發明的製 造方法在對位時無須冷卻到室溫。因此，可縮短冷卻所需 的時間，相較於習知可縮短製造所需時間。 而且，在本發明的電漿顯示裝置的製造方法中，對位 工程與密封工程都在同一處理室內進行來構成也可以。 經濟部智慧財產局員工消費合作社印製 再者，在本發明的電漿顯示裝置的製造方法中，後面 板的加熱工程、對位工程以及密封工程都在真空環境中進 行。 對於如此構成的情形在密封工程終了後，因密封的一 組面板之間變成真空狀態，密封終了後，立即可在面板間 放入放電用的氣體進行密封。因此，因在大氣壓條件下進 行對位工程以及密封工程，與在密封工程終了後需要對一 組面板間進行真空排氣的習知不同，因不需真空排氣所要 的時間，故相較於習知可縮短製造所需的時間。 -14- ^氏張尺度適用中國國家標準（CNS ) A4規格（210X297公ίΤ 492134 A7 B7 五、發明説明（12) (請先閲讀背面之注意事項再填寫本頁) 而且，在本發明的電漿顯示裝置的製造方法中，於對 位工程與密封工程中，前面板以及後面板靜電.吸附於面板 保持台來構成也可以。 再者，在本發明的電漿顯示裝置的製造方法中，對位 工程與密封工程係在大氣壓條件下進行，在對位工程與密 封工程中，前面板以及後面板真空吸附於面板保持台來構 成也可以。 而且，在本發明的電漿顯示裝置的製造方法中，於對 位工程前，控制前面板的溫度成與對位工程中的後面板的 溫度相同來構成也可以。‘ 藉由如此來構成，可在前面板與後面板的溫度都相等 的狀態下進行對位。 再者，在本發明的電漿顯示裝置的製造方法中，將前 端配設熱熔融性的黏著材質的片狀管預先抵接於前面板或 後面板的任何一方，在密封工程熱熔融/凝固密封材質並 且使黏著材質熱熔融/凝固來構成也可以。 經濟部智慧財產局員工消費合作社印製 如此地構成，於任何一方或兩方的面板設有貫通孔時 ，爲了與此貫通孔連通，使片狀管前端抵接於面板表面， 在密封工程熱熔融片狀管前端的黏著材質後，藉由冷卻/ 凝固，在開口與貫通孔連通的狀態下，可使片狀管黏著於 面板表面。 【圖式之簡單說明】 圖1係說明本發明的一實施形態的製造裝置的構成圖 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ' ' -15- 492134 A7 B7 五、發明説明（13) 〇 (請先閲讀背面之注意事項再填寫本頁) 圖2係說明本發明的一實施形態的製造裝置的傳送室 周邊的處理室的連接關係圖。 圖3係說明本發明的一實施形態的定位密封室的構成 之側剖面圖。 圖4係說明將前面板傳入本發明的一實施形態的定位 密封室的工程圖。 圖5係說明接著的工程圖。 圖6係說明接著的工程圖。 圖7係說明接著的工程圖。 圖8係說明接著的工程圖。 圖9係說明接著的工程圖。 圖Γ 0係說明將後面板傳入本發明的一實施形態的定 位密封室的工程圖。 圖1 1係說明接著的工程圖。 圖1 2係說明關於本發明的一實施形態的定位密封室 的對位之機構的圖。 經濟部智慧財產局員工消費合作社印製 圖1 3係說明定位密封室中的密封工程圖。 圖1 4係說明接著的工程圖。 圖1 5係說明本發明的其他實施形態的定位密封室的 圖。 圖1 6 ( a ):係說明一般的電漿顯示裝置的圖。 (b ):係說明一般的後面板的剖面圖。 圖1 7係說明習知的製造裝置的構成圖。 本^張尺度適用中國國家標準（〇灿）八4規格（210父297公釐） ' 16- 492134 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（14) 【符號說明】 1 :製造裝置 2 : M g〇形成膜室（形成膜室） 4 :傳送室 5 :預烤室（脫氣室） 6 :定位密封室（真空處理室） 9 :密封室 7 1 :前面板 7 2 :後面板 【較佳實施例之詳細說明】 以下參照圖面說明本發明的實施形態。 圖1的符號1係顯示電漿顯示裝置的製造所使用的本 發明的製造裝置。 此製造裝置1具有Mg 0形成膜室2、蒸鍍出口室3 、傳送室4、預烤室5、定位密封室6、密封室9。 在M g〇形成膜室2的前段配置未圖示的傳入室，在 後段依序配置蒸鍍出口室3、傳送室4。 在傳送室4配置預烤室5、定位密封室6、密封室9 。其中在密封室9的後段配置未圖示的傳出室。 以下說明使用上述製造裝置1對位表面預先形成預定 構件的前面板與後面板後進行密封、密封，製造電漿顯示 裝置的工程。 在初期狀態下，預先都假設M g 0形成膜室2、蒸鑛 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -17- 492134 A7 B7 __ 五、發明説明（15 ) 出口室3、傳送室4、預烤室5、定位密封室6、密封室 g被真空排氣。 (請先閱讀背面之注意事項再填寫本頁) 首先，將預先在表面形成透明電極膜等的預定構件之 前面板傳入M g 0形成膜室前段的傳入室。 接著，對傳入室真空排氣，與變成真空狀態的M g〇 形成膜室2內部連接，將前面板傳入M g〇形成膜室2內 。在M g〇形成膜室2內配設未圖示的加熱器（Heater ) ，以加熱器加熱前面板，保持於1 5 0 °C〜2 0 0 °C的溫 度。然後，利用蒸鍍（Evaporation )法在前面板的表面形 成M g〇保護膜。 形成預定膜厚的M g 0保護膜後，利用未圖示的傳送 機構將前面板傳入蒸鍍出口室3。在蒸鍍出口室3內如圖 2所示配設位置調整機構1 1，所傳入的前面板藉由位置 調整機構1 1配置於蒸鍍出口室3內的預定位置。 當前面板配置於預定位置後，傳送機器手臂（R 〇 b 〇 t ) 1 2保持蒸鍍出口室3內的前面板，自蒸鍍出口室3傳出 ，中介傳送室4傳入定位密封室6。 經濟部智慧財產局員工消費合作社印製 定位密封室6的詳細構成如圖3的剖面圖所示。定位 密封室6具有上側升降軸3 1、上側支持台3 2、上側吸 附裝置3 3、支持板3 4、支持棒3 5、基板抵接墊3 6 、風箱（B e 1 1 〇 w s ) 3 7、下側支持軸4 1、下側 支持台4 2、下側吸附裝置4 3、基板升降軸4 4、基板 升降支持板4 5、基板升降銷（P i η ) 4 6、風箱4 7 、風箱4 8、定位機構5 0以及片狀管安裝軸5 9。 玉紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） '一 -18- 492134 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（16) 在定位密封室6內部的上方配置板狀的上側吸附裝置 3 3 °上側吸附裝置3 3與配置於其上方的板狀上側支持 台3 2構成本發明的上側面板保持部，固定於上側支持台 3 2底面，上側支持台3 2的上部係安裝於配設於其上方 的上側升降軸3 1的下端。 在上側升降軸3 1的上端中介風箱3 7連接於未圖示 的驅動機構，若令驅動機構動作的話，上下上側升降軸 3 1可使上側吸附裝置3 3移動於上下方向來構成。 上側吸附裝置3 3與上側支持台3 2設有貫通孔，配 置支持棒3 5俾插通此貫通孔。支持棒3 5的上端係安裝 在支持板3 4，基板抵接墊3 6係朝下安裝在支持棒3 5 的下端。支持板3 4係以未圖示的固定機構固定於定位密 封室6內，使支持棒3 5與基板抵接墊3 6無法移動來構 成。 在定位密封室6內部的下方配置板狀的下側吸附裝置 4 3。下側吸附裝置4 3與配置於其下方的板狀下側支持 台4 2構成本發明的下側面板保持部，固定於下側支持台 4 2上，下側支持台4 2的底面係安裝於配設於其下方的 下側支持軸4 1的上端。下側支持軸4 1的下端中介風箱 4 7固定於定位工作台（Alignment table ) 5 5。定位工 作台5 5連接驅動機構5 0，若令驅動機構5 0動作的話 ，可在水平面內使下側支持台42移動來構成。 在下側吸附裝置4 3與下側支持台4 2配設複數個貫 通孔，配置基板升降銷4 6俾插通各貫通孔。基板升降銷 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -19- 492134 A7 B7 五、發明説明（17 ) (請先閲讀背面之注意事項再填寫本頁) 4 6的下端係安裝於基板升降支持板4 5，基板升降支持 板4 5係安裝於配置在其下方的基板升降軸4 4的上端。 基板升降軸4 4的下端係中介風箱4 8連接於升降機構， 若令升降機構動作則基板升降軸4 4會動作，可使基板升 降銷4 6上下來構成。 在下側吸附裝置4 3以及下側支持台4 2除了插通基 板升降銷4 6的複數個貫通孔外，也配設一個貫通孔，配 置後述的片狀管安裝軸5 9俾插通此貫通孔。片狀管安裝 軸5 9的下端係中介風箱4 8連接於驅動機構，若令驅動 機構動作的話，則可使片狀管安裝軸5 9上下來構成。 圖4係顯示前面板傳入前的定位密封室6的狀態。由 此狀態如圖5所示，傳送機器手臂1 2的臂2 0自水平方 向進入定位密封室6內。在臂2 0上載置Mg〇保護膜的 形成膜面朝鉛直下方的狀態（面朝下，Face down)的前面 板7 1，臂2 0係在前面板7 1位於上側吸附裝置3 3與 下側吸附裝置4 3之間的狀態下靜止。 經濟部智慧財產局員工消費合作社印製 其次，使基板升降銷4 6上升。若基板升降銷4 6上 升的話，如圖6所示基板升降銷4 6的前端抵接於前面板 7 1的底面。然後若再使基板升降銷4 6上升的話，前面 板7 1由臂2 0上換移到基板升降銷4 6上，隨著基板升 降銷4 6的上升前面板7 1也上升。當前面板7 1的頂面 如圖7所示抵接於基板抵接墊3 6後，使基板升降銷4 6 靜止。 接著，臂2 0被排出到定位密封室6外，並且上側吸 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -20- 492134 A7 B7 五、發明説明（18 ) (請先閲讀背面之注意事項再填寫本頁) 附裝置3 3下降。上側吸附裝置3 3下降抵接於前面板 7 1的頂面後如圖8所示，使上側吸附裝置3 3靜止。若 在此狀態下使上側吸附裝置3 3內的靜電吸附裝置動作的 話，前面板7 1被靜電吸附於上側吸附裝置3 3表面。 在前面板7 1被吸附於上側吸附裝置3 3的表面後， 令基板升降銷4 6下降，如圖9所示收納於下側吸附裝置 4 3與下側支持台4 2的貫通孔內。 在上輒支持台3 2內配設未圖示的電阻加熱型的加熱 器，在前面板7 1被吸附於上側吸附裝置3 3表面後，起 動加熱器在吸附前面板7 1的狀態下加熱，使前面板7 1 的溫度升溫到3 7 0 °C。在升溫到3 7 0 °C後，加熱器係 以3 7 0 °C保持前面板7 1的溫度而動作。 如此，前面板7 1被傳入定位密封室6內，被保持於 上側吸附裝置3 3，惟另一方面，後面板被傳入未圖示的 傳入室。後面板被傳入傳入室內後對傳入室內真空排氣達 到真空狀態。其次，維持真空狀態且傳入室內與預烤室5 內連接，以圖2所示的臂1 3將後面板7 2傳入預烤室5 〇 經濟部智慧財產局員工消費合作社印製 預烤室5爲加熱位置（Position )與冷卻位置之兩段構 造，所傳入的後面板7 2首先被置於加熱位置，在加熱位 置被加熱。後面板7 2藉由在5 0 〇°C左右的高溫下放置 預定時間，以進行脫氣處理。 脫氣處理終了後，後面板7 2換移到冷卻位置被冷卻 ，後面板7 2的溫度被降低到3 7 0 t左右。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -21 - 492134 A7 B7 五、發明説明（19 ) (請先閱讀背面之注意事項再填寫本頁) 然後，後面板7 2被配置於冷卻位置的預定位置。於 是傳送機器手臂的臂2 0進入冷卻位置，後面板7 2在表 面朝上方的狀態下（面朝上，Face up )換移到臂2 0，中 介傳送室4被傳入定位密封室6。 經濟部智慧財產局員工消費合作社印製 前面板7 1已經進入被吸附於上側吸附裝置3 3的定 位密封室6內，後面板7 2在面朝上的狀態下載置的臂 2 0自水平方向進入定位密封室6內。臂2 0在後面板 7 2位於上側吸附裝置3 3與下側吸附裝置4 3之間的狀 態下靜止。然後，基板升降銷4 6上升，如圖1 〇所示抵 接於後面板7 2的底面。然後，基板升降銷4 6上升，後 面板7 2由臂2 0換移到基板升降銷4 6後，臂2 0由定 位密封室6排出，並且基板升降銷4 6下降，如圖1 1所 示後面板7 2被載置於下側吸附裝置4 3的頂面。若在此 狀態下使下側吸附裝置4 3內的靜電吸附裝置動作的話， 後面板7 2被靜電吸附於下側吸附裝置4 3表面。在下側 支持台4 2內配設未圖示的電阻加熱型的加熱器，在後面 板7 2被靜電吸附於下側吸附裝置4 3表面後，起動加熱 器加熱後面板7 2，使後面板7 2的溫度與前面板7 1的 溫度到達相同的3 7 0 °C。 如此，若一組前面板7 1與後面板7 2被傳入定位密 封室6的話，在定位密封室6內於表面互相面對的狀態下 配置於上下。 然後，在定位密封室6內進行傳入的前面板7 1與後 面板7 2的對位。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1----- -22- 492134 A7 B7 五、發明説明（20) (請先閲讀背面之注意事項再填寫本頁) 圖1 2係顯示定位密封室6內的對位機構。如圖1 2 所示在定位密封室6內的上方配置圖3〜圖1 1所未圖示 的燈6 1 1、6 1 2，俾在下方可照射光。在燈6 1 1、 6 1 2的下方爲了與燈6 1 1、6 1 2面對，配置c c D ( 電荷親合，Charged-coupled device )攝像機 6 2 1、6 2 2 〇 前面板7 1與後面板7 2分別預先形成未圖示的對位 標記（A1 i g n m e n t m a r k )，藉由讀取兩個對位標記的相對 位置，俾可檢測前面板7 1與後面板7 2的相對位置偏移 〇 在配設相關的對位機構之定位密封室6內，對於進行 前面板7 1與後面板7 2的相對對位，首先使燈6 1 χ、 .6 1 2發光。於是燈6 1 1、6 1 2的光分別照射到下方的 前面板7 1與後面板7 2。形成於前面板7 1與後面板 7 2的各對位標記預先被形成在位於燈6 1 i、6 1 2與 經濟部智慧財產局員工消費合作社印製 C C D攝像機6 2 χ、6 2 2之間，照射在前面板7 1與後 面板7 2的光照射在前面板7 1與後面板7 2的各對位標 記，C C D攝像機6 2 !、6 2 2攝影各對位標記。 由C C D攝像機6 2 i、6 2 2攝影的兩個對位標記的 圖像被轉送到未圖示的控制系。控制系解析攝影圖像，判 斷前面板7 1與後面板7 2的相對位置是否在正確位置。 若是在正確位置的話，維持原來的狀態完成對位，若不在 正確位置時，根據解析結果所得到的相對位置偏移量驅動 驅動機構5 0、5 1，僅令下側支持台4 2在水平面內移 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -23 - 492134 A7 _ B7 _ 五、發明説明（21 ) (請先閲讀背面之注意事項再填寫本頁) 動預定量。然後，c C D攝像機6 2 i、6 2 2再度攝影兩 個對位標記，再度檢測相對位置偏移量，根據其位置偏移 量使下側支持台4 2在水平面內移動，俾使前面板7 1與 後面板7 2的相對位置在正確的位置關係。 以上，雖然以配設兩組燈與C C D攝像機以及兩個對 位標記的例子來說明對位，惟分別配設三個以上也可以。 如此，前面板7 1與後面板7 2變成正確的位置關係 ，接著在定位密封室6內密封前面板7 1與後面板7 2。 以下說明關於此密封工程。對位終了後上側吸附裝置 3 3下降。在後面板7 2的表面週邊部配設熱熔融性的密 封材質，在前面板7 1與密封材質抵接後使上側吸附裝置 3 3靜止。 後面板7 2設有貫通孔7 3，其下方配置上述片狀管 安裝軸5 9。片狀管安裝軸5 9在上側吸附裝置3 3靜止 後開始上升。在片狀管安裝軸5 9的前端安裝片狀管6 0 ，在片狀管安裝軸5 9上升片狀管6 0的前端抵接於後面 板7 2的底面後，如圖1 3所示片狀管安裝軸5 9靜止。 經濟部智慧財產局員工消費合作社印製 此時，片狀管6 0的開口與設於後面板7 2的貫通孔連通 〇 如上述對位中的前面板7 1與後面板7 2的溫度爲 3 7 0 °C左右，.惟上側吸附裝置3 3靜止後，利用分別配 設於上側支持台3 2、下側支持台4 2內的加熱器加熱前 面板7 1與後面板7 2，使兩者的溫度都達4 〇 〇 °c左右 。於是密封材質熱熔融。因此，再使上側吸附裝置3 3下 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐丁 ' -24- 492134 A7 B7 ___ 五、發明説明（22) 降，緊壓前面板7 1與後面板7 2之間到預定的間隙。 (請先閱讀背面之注意事項再填寫本頁) 而且，在片狀管6 0的前端配設熱熔融性的黏著材質 。上述密封材質熱熔融並且此黏著材質也熱熔融。 在此狀態下若使加熱器的動作停止冷卻密封材質以及 黏著材質使其凝固的話，前面板7 1藉由黏著材質固定於 後面板72表面上，並且片狀管60被固定於後面板72 的背面，完成密封工程。 密封工程終了後如圖1 4所示，使上側吸附裝置3 3 上升並且使片狀管安裝軸5 9下降收納於貫通孔內。其次 ，再度使基板升降銷4 6上升，使被密封的一組面板7 1 、7 2位於預定高度。 其次，導入傳送機器手臂的臂2 0到定位密封室6內 ，使其位於一組面板7 1、7 2下之後，使基板升降銷 4 6降下，將一組面板7 1、7 2換移到臂2 0上，排出 臂2 0自定位密封室6傳出，中介傳送室4傳入密封室9 〇 經濟部智慧財產局員工消費合作社印製 習知因密封工程係在大氣壓條件下進行，故在一組面 板間的空間氣體被封住，在排氣室進行真空排氣在排出氣 體後，需要封入放電用的氣體進行密封，惟本實施形態的 製造工程因密封工程係在真空環境中進行，一組面板間的 空間爲真空狀態，故無重新進行真空排氣的需要。 因此，密封工程終了後如習知未進行真空排氣，因可 立即將面板傳入密封室9進行密封工程，故可縮短製造所 需的時間。而且，因無須習知所必須的排氣室，可縮小該 本紙張尺度適财家標準（CNS)》4規格（21Gx297公餐） " -25- 492134 Μ Β7 _____ 五、發明説明（23) 部分製造裝置的規模。 (請先閱讀背面之注意事項再填寫本頁} 然後，在密封室9內導入氣、氣氣體等的放電用热體 到預定壓力。於是放電用氣體自片狀管6 0與貫通孔7 3 導入到一組面板7 1、7 2間。一組面板7 1、7 2之間 被放電用氣體充滿到達預定壓力後，以未圖示的機構弄破 片狀管6 0堵塞貫通孔7 3，氣密地密封一組面板7 1、 7 2間。由以上可獲得電漿顯示裝置。 將如此所製造的電漿顯示裝置傳入傳出室（未圖示） ，在遮斷與密封室9之間後，若導入大氣到傳出室內的話 ，可取出電漿顯示裝置。 然後，將新的前面板傳入M g〇形成膜室2，在表面 形成M g〇保護膜後，傳送到定位密封室6，另一方面， .將新的後面板傳入預烤室5進行脫氣處理後，傳送到定位 密封室6，在定位密封室6內進行新的前面板與後面板的 對位、密封，然後傳入密封室。然後，藉由重覆上述動作 可製造複數個電漿顯示裝置。 經濟部智慧財產局員工消費合作社印製 此外，以上所說明的本實施型態因在定位密封室6內 配設加熱器，故可在進行一組面板7 1、7 2的對位後， 維持正確的位置關係同時立即加熱基板到密封溫度（ 4 0 0 °C )進行密封。因此，與習知不同可省略以夾子固 定一組面板傳送到密封室的工程，而且，也無須爲了避免 夾子而使用特別的傳送機構。 而且，因在3 7 0 °C的高溫進行對位，故無須冷卻各 面板到室溫。因此，與在室溫進行對位的習知比較，可大 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）~ ~~ -26- 492134 A7 B7 五、發明説明（24) 幅地縮短面板的冷卻所需的時間，可縮短處理時間、提高 產能。 (請先閲讀背面之注意事項再填寫本頁) 再者，到以上爲止雖然說明配設於定位密封室6內的 上側吸附裝置與下側吸附裝置具有靜電吸附裝置的情形， 惟本發明並非限定於此，例如如圖1 5所示，使用在各個 表面形成吸附溝槽8 3、8 4，以真空吸附溝槽構成的上 側吸附裝置8 1、下側吸附裝置8 2也可以。 這種定位密封室6因無法令室內達到真空環境，故在 惰性氣體環境中於密封後的一組面板間殘留氣體。因此， 密封處理終了後，在密封工程前必須對一組面板間進行真 空排氣，惟即使是這種情形，對位與密封都在定位密封室 6內進行，故有無須利用夾子來暫時固定的優點。 經濟部智慧財產局員工消費合作社印製 再者，上述的定位密封室6如參照圖7所說明的，配 設朝下安裝的基板抵接墊3 6，被基板升降銷4 6上升的 前面板7 1抵接基板抵接墊3 6後，使基板升降銷4 6靜 止，然後，在上側吸附裝置3 3表面靜電吸附前面板7 1 。惟例如在基板抵接墊3 6內部配設吸附裝置，在前面板 7 1抵接基板抵接墊3 6後，起動基板抵接墊3 6內部的 吸附裝置，一時地將前面板7 1吸附於基板抵接墊3 6， 令其在暫時保持的狀態，然後，在上側吸附裝置3 3吸附 前面板7 1來構成也可以。 【發明的功效】 可在一個處理室進行兩片面板的對位工程與密封工程 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -27- 492134 A7 B7 五、發明説明（25 ) 〇而且，在真空環境中進行對位以及密封工程，因可在 密封後不對面板間進行真空排氣而移行到密封工程，故可 縮短製造所需時間，可提高產能。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -28-Throughput). [Summary of the invention] The present invention is an innovation made to solve the above-mentioned problems of the conventional technology. The purpose of the invention is to provide a technology that can increase the productivity without making the manufacturing process complicated. In order to solve the above-mentioned problem, the invention described in claim 1 of the patent application scope includes: a vacuum tank; and a panel holding mechanism disposed in the vacuum tank, wherein the panel holding mechanisms have opposite surfaces on the surface of the panel In the state, two panels constituting the plasma display device are horizontally arranged, and a panel holding mechanism configured by relative alignment of the panels can be arranged. The panel holding mechanism has an upper panel holding table and a lower panel holding device. The panel and each panel holding table are respectively configured to be capable of attaching and holding the panel. The panel holding table is provided with a heating mechanism. The heating mechanism can be configured to heat the panel by heat conduction in a state where the panel is attached and held. . The invention described in the second scope of the patent application is the vacuum processing chamber described in the first scope of the patent application, and an electrostatic adsorption device is arranged on the panel holding table. The invention described in item 3 of the scope of patent application is the vacuum processing chamber described in item 1 of the scope of patent application, in which a gas introduction mechanism is arranged in the vacuum tank, and a vacuum adsorption device is arranged in the panel holding table. The invention described in item 4 of the scope of patent application is the first of the scope of patent application. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page). Printed by the Consumer Affairs Cooperative of the Property Bureau -8-492134 A7 B7 V. The vacuum processing chamber described in item (6) of the invention description, which further has an abutment mechanism that can form a sheet tube against the surface of the panel. (Please read the precautions on the back before filling out this page) The invention described in the scope of patent application No. 5 is the vacuum processing chamber described in the scope of patent application No. 1, which includes: a driving mechanism arranged outside the vacuum tank; And a transmission mechanism that transmits a driving force generated by the driving mechanism to the panel holding mechanism while maintaining a vacuum state in the vacuum chamber. The invention described in the sixth item of the patent application scope includes: > forming a film chamber, manufacturing a plasma display device from a front panel and a rear panel, and forming a protective film on the front panel surface; 'a pre-baking chamber, heating the rear The panel is degassed; and the transfer chamber is connected to any one of the film forming chamber and the pre-baking chamber, and includes a front panel and a rear panel transfer mechanism, and a vacuum processing chamber connected to the transfer chamber. The vacuum processing chamber includes a vacuum tank; and a panel holding mechanism arranged in the vacuum tank. The panel holding mechanism is printed by an employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The panel holding mechanism is horizontal in a state where the surfaces of the panels face each other. Two panels constituting the plasma display device are arranged on the ground, and a panel holding mechanism configured by relative alignment of the panels can be performed. The panel holding mechanism includes an upper panel holding table and a lower panel holding table, and each panel The platforms are respectively configured to attach and hold the panel, and a heating mechanism is arranged on the panel holding platform. The state of the panel, the panel may be heated to serve by heat conduction configuration. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 492134 A7 B7 V. Description of invention (7) (Please read the notes on the back before filling this page) Apply for the invention described in item 7 of the scope of patent application It is the manufacturing device of the electric award display device described in item 6 of the scope of patent application, wherein an electrostatic adsorption device is arranged on the panel holding table. The invention described in item 8 of the scope of patent application is a device for manufacturing a plasma display device described in item 6 of the scope of patent application, wherein a gas introduction mechanism is arranged in the vacuum tank, and a vacuum adsorption device is arranged in the panel holding table. The invention described in item 9 of the scope of patent application is a manufacturing apparatus for a plasma display device described in item 6 of the scope of patent application, and further includes an abutment mechanism capable of abutting the sheet-shaped tube against the surface of the panel. The invention described in item 10 of the scope of patent application is the manufacturing device of the plasma display device described in item 6 of the scope of patent application, which includes: a driving mechanism arranged outside the vacuum tank; and a transmission mechanism that maintains the vacuum tank In a vacuum state inside, the driving force generated by the driving mechanism is transmitted to the panel holding mechanism. The invention described in item 11 of the scope of patent application is a manufacturing apparatus for a plasma display device described in item 6 of the scope of patent application, wherein the transfer chamber is a sealed chamber that is connected to seal the front panel and the rear panel. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the invention described in item 12 of the scope of application for patents, which features: heating engineering, heating the rear panel, and degassing treatment; alignment engineering, protecting the rear panel and the surface The front panel of the film is respectively adsorbed on the panel holding stage, and the alignment of the rear panel and the front panel is performed in a state where the surfaces of the panels are opposed to each other; After the sealing material is in contact with the front panel, the sealing material is heated to melt it, and the Chinese standard (CNS) A4 specification (210X297 mm) is applied to the tight paper size. 492134 A7 B7___ 5. Description of the invention (8) (Please read first Note on the back, fill in this page again) After pressing the rear panel and the front panel into a predetermined gap, cool the sealing material to solidify it to seal the rear panel and the front panel, where the alignment project The temperature of the rear panel is only lower than the temperature of the rear panel in the heating process by a predetermined temperature. The invention described in item 13 of the scope of patent application is the manufacturing method of the plasma display device described in item 12 of the scope of patent application, wherein the alignment project and the sealing project are performed in the same processing chamber. The scope of application for patents is described in item 14. The invention is a method for manufacturing a plasma display device as described in item 12 of the scope of the patent application, wherein the heating process, the alignment process, and the sealing X-process are performed in a vacuum environment. The invention described in item 15 of the scope of patent application is the manufacturing method of the plasma display device described in item 13 of the scope of patent application, wherein the heating project, the alignment project, and the sealing project are performed in a vacuum environment. The invention described in item 16 of the scope of patent application is a method for manufacturing a plasma display device described in item 14 of the scope of patent application, wherein in the alignment project and the sealing project, the front panel and the rear panel are It is electrostatically attracted to this panel holding stage. The Intellectual Property Bureau of the Ministry of Economic Affairs' employee consumer cooperative prints the invention described in the scope of patent application No. 17 is the manufacturing method of the plasma display device described in the scope of patent application No. 12; wherein the alignment project and the sealing project are Under atmospheric pressure conditions, the front panel and the rear panel are vacuum-adsorbed on the panel holding stage in the alignment project and the sealing project. The invention described in item 18 of the scope of patent application is a method for manufacturing a plasma display device described in item 12 of the scope of patent application, in which the paper size of the paper is in accordance with the CNS A4 specification (21GX297) (Competition) -11-492134 A7 B7 V. Description of the invention (9) Before the process, there was a project to control the temperature of the front panel, which became the same temperature as the temperature of the rear panel in the alignment project. . (Please read the precautions on the back before filling out this page) The invention described in item 19 of the scope of patent application is the manufacturing method of the plasma display device described in item 12 of the scope of patent application. Before the sealing project, There is also a process of arranging a sheet tube with a hot-melt adhesive material at the front end to abut one or both of the front panel or the rear panel, heating the sealing material in the sealing process and heating the adhesive material to make it Melt, solidify by cooling the adhesive material, and fix the sheet-shaped tube to one or both of the front panel and the rear panel with the adhesive material. If the vacuum processing chamber according to the present invention, when a heat-fusible sealing material is pre-arranged around one surface of the panel, two alignments are maintained. The relative position of the sheet panel, and at the same time, the panel surface without the sealing material side is in contact with the sealing material. After heating the two panels with a heating mechanism to fuse the sealing material, the sealing material is cooled to solidify and seal the material. To seal the two-piece panel. This is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Not only can the two panels be oppositely aligned in a vacuum processing room, but also the two panels can be sealed to maintain the correct positional relationship after alignment. Panels, so there is no need to fix a group of panels with clips and transfer them to the sealed room as is known, which can reduce the number of projects. Furthermore, there is no need for a special conveyance mechanism made so as not to contact the clip. The vacuum processing chamber of the present invention may be configured by disposing an electrostatic adsorption device in the panel holding mechanism. In this case, the panel can be sucked and held in a vacuum environment. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -12- 492134 A7 __ B7 V. Description of the invention (彳 0) (Please read the notes on the back before filling this page) Also, in the present invention The vacuum processing chamber may be configured by disposing a vacuum adsorption device in the panel holding mechanism. In this case, the panel can be adsorbed and held under atmospheric pressure. Furthermore, in the vacuum processing chamber of the present invention, a contact mechanism for contacting the sheet-like tube is provided on the surface of the panel. When one panel is provided with a through-hole, in order to communicate with the above-mentioned through-hole, the front end of the sheet-shaped tube provided with a hot-melt adhesive material at the front end is abutted against the surface of the panel by an abutment mechanism, and the two pieces are heated by a heating mechanism during sealing In the case of a panel, the adhesive material at the front end of the sheet tube is melted and then solidified by cooling. The sheet tube can be adhered to the surface of the panel while communicating with the through hole. In the vacuum processing chamber of the present invention, the driving mechanism and the inside of the vacuum tank may be interrupted, and the driving mechanism may be configured to include a transmission mechanism for transmitting the driving force to the panel holding mechanism. When the driving mechanism cannot restrain the environment in the vacuum tank, for example, the treatment in the vacuum tank is performed at high temperature, and exposure to the driving mechanism under high temperature conditions will hinder the operation. Therefore, when the driving mechanism cannot be installed in the vacuum tank, The transmission mechanism only transmits the driving force to the panel holding mechanism, which can drive the panel holding mechanism without exposing the driving mechanism to the environment in the vacuum tank. Furthermore, if the plasma display device manufacturing apparatus according to the present invention includes a film forming chamber, a degassing chamber, a transfer chamber, and a vacuum processing chamber according to the present invention. Since the manufacturing apparatus of the related structure has the vacuum processing chamber of the present invention, it is possible to seal and seal two panels in one vacuum processing chamber. Therefore, it is different from the conventional Chinese paper standard (CNS) A4 specification (210X297 mm) " ~ 492134 A7 _______ B7 V. Description of the invention (11), there is no need to fix a group of panels with clips and transfer them to the sealed room. The sealing process can reduce the number of processes. (Please read the precautions on the back before filling in this page.) Furthermore, if the plasma display device manufacturing device according to the present invention is used, a sealed room may be connected to the transfer room. With such a configuration, when a sealing project is performed in a vacuum environment, a group of panels that complete the sealing project in the vacuum processing chamber of the present invention can be interposed in the transfer chamber and immediately introduced into the sealing chamber. Furthermore, if the plasma display device manufacturing method according to the present invention is used, the temperature of the rear panel in the alignment process is lower than the temperature of the rear panel in the heating process for degassing by only a predetermined temperature. It is known to cool each panel to room temperature during the alignment process, but the manufacturing method of the present invention does not need to cool to room temperature during the alignment. Therefore, the time required for cooling can be shortened, and the time required for manufacturing can be shortened compared with the conventional method. Furthermore, in the method for manufacturing a plasma display device of the present invention, the alignment process and the sealing process may be performed in the same processing chamber. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Furthermore, in the manufacturing method of the plasma display device of the present invention, the heating process, the alignment process, and the sealing process of the rear panel are performed in a vacuum environment. In the case of such a configuration, after the sealing process is completed, the sealed group of panels becomes a vacuum state. After the sealing is completed, a gas for discharge can be placed between the panels for sealing. Therefore, because the alignment and sealing works are performed under atmospheric pressure, it is different from the habit of evacuating a group of panels after the end of the sealing works. Because it does not require the time required for vacuum evacuation, it is compared with Knowledge can shorten the time required for manufacturing. -14- ^ Zhang scale is applicable to China National Standard (CNS) A4 specifications (210X297 public ΤΤ 492134 A7 B7 V. Description of the invention (12) (Please read the precautions on the back before filling this page). In the manufacturing method of the slurry display device, the front panel and the rear panel are electrostatically charged in the alignment engineering and the sealing engineering. It may be configured by attaching to a panel holding table. Furthermore, in the manufacturing method of the plasma display device of the present invention, the alignment process and the sealing process are performed under atmospheric pressure. In the alignment process and the sealing process, the front panel and the rear panel are vacuum-adsorbed on the panel holding table. Composition is also possible. Furthermore, in the method for manufacturing a plasma display device of the present invention, before the alignment process, the temperature of the front panel may be controlled to be the same as the temperature of the rear panel in the alignment process. ‘With this structure, alignment can be performed with the temperature of the front panel and the rear panel being equal. Furthermore, in the method for manufacturing a plasma display device of the present invention, a sheet-shaped tube provided with a heat-meltable adhesive material at the front end is brought into contact with either the front panel or the rear panel in advance, and is thermally melted / solidified in the sealing process. It may be configured by sealing the material and thermally melting / solidifying the adhesive material. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, when one or both panels are provided with through holes, in order to communicate with this through hole, the front end of the sheet tube is brought into contact with the surface of the panel, and heat is applied during the sealing process. After the adhesive material at the front end of the sheet-shaped tube is melted, the sheet-shaped tube can be adhered to the surface of the panel by cooling / solidifying, and in a state where the opening communicates with the through hole. [Brief description of the drawings] FIG. 1 is a structural diagram illustrating a manufacturing apparatus according to an embodiment of the present invention. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) '' -15- 492134 A7 B7 V. Description of the Invention (13) 〇 (Please read the precautions on the back before filling out this page.) Figure 2 is a diagram illustrating the connection relationship between the processing chambers around the transfer chamber of the manufacturing apparatus according to one embodiment of the present invention. Fig. 3 is a side sectional view illustrating the structure of a positioning and sealing chamber according to an embodiment of the present invention. Fig. 4 is a process drawing illustrating the introduction of a front panel into a positioning and sealing chamber according to an embodiment of the present invention. FIG. 5 illustrates the subsequent engineering drawings. FIG. 6 illustrates the subsequent engineering drawings. FIG. 7 illustrates the subsequent engineering drawings. FIG. 8 illustrates the subsequent engineering drawings. FIG. 9 illustrates the subsequent engineering drawings. Fig. Γ 0 is a process drawing illustrating the introduction of the rear panel into the positioning and sealing chamber according to an embodiment of the present invention. Figure 11 illustrates the subsequent engineering drawings. Fig. 12 is a diagram illustrating a mechanism for aligning a positioning and sealing chamber according to an embodiment of the present invention. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 14 illustrates the subsequent engineering drawings. Fig. 15 is a diagram illustrating a positioning and sealing chamber according to another embodiment of the present invention. Figure 16 (a): A diagram illustrating a general plasma display device. (b): A sectional view illustrating a general rear panel. FIG. 17 is a block diagram illustrating a conventional manufacturing apparatus. This standard is applicable to the Chinese National Standard (〇 Chan) 8-4 specifications (210 father 297 mm) '16- 492134 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (14) [Notation] 1 : Manufacturing device 2: M g〇 film forming chamber (film forming chamber) 4: transfer chamber 5: pre-baking chamber (degassing chamber) 6: positioning and sealing chamber (vacuum processing chamber) 9: sealing chamber 7 1: front panel 7 2: Rear panel [Detailed description of the preferred embodiment] The embodiment of the present invention will be described below with reference to the drawings. Reference numeral 1 in Fig. 1 shows a manufacturing apparatus of the present invention used for manufacturing a plasma display apparatus. This manufacturing apparatus 1 has a Mg 0 forming film chamber 2, a vapor deposition outlet chamber 3, a transfer chamber 4, a pre-baking chamber 5, a positioning and sealing chamber 6, and a sealing chamber 9. An introduction chamber (not shown) is arranged in the front stage of the M g0 forming film chamber 2, and a vapor deposition outlet chamber 3 and a transfer chamber 4 are arranged in this order in the rear stage. A pre-baking chamber 5, a positioning and sealing chamber 6, and a sealing chamber 9 are arranged in the transfer chamber 4. Among them, an outgoing chamber (not shown) is arranged at the rear stage of the sealed chamber 9. The following describes a process for manufacturing a plasma display device by sealing and sealing a front panel and a rear panel in which a predetermined member is previously formed on an alignment surface using the above-mentioned manufacturing apparatus 1. In the initial state, it is assumed in advance that M g 0 forms a membrane chamber 2. Steaming ore (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210X297 mm) -17 -492134 A7 B7 __ 5. Description of the invention (15) The exit chamber 3, the transfer chamber 4, the pre-baking chamber 5, the positioning and sealing chamber 6, and the sealing chamber g are evacuated by vacuum. (Please read the precautions on the back before filling in this page.) First, insert the front panel of a predetermined member such as a transparent electrode film on the surface into M g 0 to form the introduction chamber at the front of the membrane chamber. Next, the introduction chamber was evacuated and vacuum-connected to the inside of the M g0 forming film chamber 2 in a vacuum state, and the front panel was introduced into the M g0 forming film chamber 2. A heater (not shown) is arranged in the M g0 forming film chamber 2, and the front panel is heated by the heater, and the temperature is maintained at 150 ° C to 200 ° C. Then, an MgO protective film was formed on the surface of the front panel by an evaporation method. After the Mg 0 protective film having a predetermined film thickness is formed, the front panel is introduced into the vapor deposition outlet chamber 3 by a transfer mechanism (not shown). A position adjustment mechanism 11 is arranged in the vapor deposition outlet chamber 3 as shown in FIG. 2, and the front panel introduced is arranged at a predetermined position in the vapor deposition outlet chamber 3 by the position adjustment mechanism 11. After the front panel is disposed at the predetermined position, the transfer robot arm (Rob) 12 holds the front panel in the evaporation outlet chamber 3, exits from the evaporation outlet chamber 3, and the intermediate transfer chamber 4 enters the positioning and sealing chamber 6 . Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The detailed structure of the positioning and sealing chamber 6 is shown in the sectional view of FIG. 3. The positioning and sealing chamber 6 has an upper lifting shaft 3 1, an upper support table 3 2, an upper adsorption device 3 3, a support plate 3 4, a support rod 3 5, a substrate contact pad 3 6, and a bellows (B e 1 1 〇ws) 3 7. Lower support shaft 4 1. Lower support table 4 2. Lower suction device 4 3. Substrate lifting shaft 4 4. Substrate lifting support plate 4 5. Substrate lifting pin (P i η) 4 6. Bellows 4, 7, wind box 4, 8, positioning mechanism 50, and sheet tube mounting shaft 59. Jade paper scale applies Chinese National Standard (CNS) A4 specification (210 × 297 mm) '一 -18- 492134 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economy A plate-shaped upper suction device 3 3 is arranged, and an upper-side suction device 3 3 and a plate-shaped upper support table 3 2 arranged above it constitute an upper panel holding portion of the present invention, which is fixed to the bottom surface of the upper support table 3 2 and the upper support table 3 The upper part of 2 is attached to the lower end of the upper lifting shaft 31 arranged above it. An intermediate air box 37 is connected to a driving mechanism (not shown) at the upper end of the upper lifting shaft 31. If the driving mechanism is operated, the upper and lower lifting shafts 31 can be configured to move the upper suction device 3 3 in the vertical direction. The upper suction device 3 3 and the upper support base 32 are provided with through holes, and a support rod 3 5 俾 is inserted through the through holes. The upper end of the support rod 3 5 is installed on the support plate 3 4, and the substrate abutment pad 3 6 is installed downward on the lower end of the support rod 3 5. The support plate 3 4 is fixed in the positioning and sealing chamber 6 by a fixing mechanism (not shown) so that the support rod 35 and the substrate contact pad 36 cannot move. A plate-shaped lower suction device 43 is arranged below the positioning and sealing chamber 6. The lower adsorption device 43 and the plate-like lower support table 4 2 arranged below it constitute the lower panel holding portion of the present invention, and are fixed to the lower support table 4 2, and the bottom surface of the lower support table 42 is installed. At the upper end of the lower support shaft 41 arranged below it. The lower intermediary bellows 4 7 of the lower support shaft 4 1 is fixed to an alignment table 5 5. The positioning table 55 is connected to the driving mechanism 50, and if the driving mechanism 50 is operated, the lower support table 42 can be moved in a horizontal plane. A plurality of through holes are arranged in the lower adsorption device 43 and the lower support table 4 2, and the substrate lifting pins 4 6 配置 are arranged to pass through the through holes. Lifting pin for substrate (please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) -19- 492134 A7 B7 V. Description of the invention (17) (Please read first Note on the back, please fill in this page again) The lower end of 4 6 is installed on the substrate lifting support plate 4 5, and the substrate lifting support plate 4 5 is installed on the upper end of the substrate lifting shaft 4 4 arranged below it. The lower end of the substrate elevating shaft 44 is connected to the intermediary wind box 48, and if the elevating mechanism is operated, the substrate elevating shaft 44 will operate, and the substrate elevating pins 46 can be moved up and down. In addition to the plurality of through holes of the substrate lifting pins 4 6, the lower suction device 4 3 and the lower support table 4 2 are also provided with a through hole, and a sheet tube mounting shaft 5 to be described later is inserted through the through hole. hole. The lower end of the sheet tube mounting shaft 59 is connected to a driving mechanism through an intermediate air box 48. If the driving mechanism is operated, the sheet tube mounting shaft 59 can be mounted on and off. FIG. 4 shows the state of the positioning and sealing chamber 6 before the front panel is introduced. From this state, as shown in Fig. 5, the arm 20 of the transfer robot arm 12 enters the positioning and sealing chamber 6 from the horizontal direction. The Mg0 protective film is placed on the arm 20 with the front panel 7 1 in a state where the film surface is vertically downward (face down), and the arm 20 is on the front panel 7 1 is located on the upper side of the adsorption device 3 3 and below The side suction devices 4 and 3 are stationary. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. When the substrate lifting pin 46 is raised, as shown in FIG. 6, the front end of the substrate lifting pin 46 is in contact with the bottom surface of the front panel 71. Then, if the substrate lifting pin 46 is raised again, the front panel 71 is shifted from the arm 20 to the substrate lifting pin 46, and the front panel 71 is also raised as the substrate lifting pin 46 is raised. After the top surface of the front panel 7 1 abuts against the substrate abutting pad 36 as shown in FIG. 7, the substrate lifting pin 4 6 is caused to stand still. Then, the arm 20 is discharged out of the positioning and sealing chamber 6, and the upper side of the paper is applied to the Chinese national standard (CNS) A4 specification (210X297 mm) -20- 492134 A7 B7 V. Description of the invention (18) (please first (Please read the notes on the back and fill in this page again.) Attach the device 3 3 down. After the upper adsorption device 33 is brought into contact with the top surface of the front panel 71, the upper adsorption device 33 is brought to a standstill as shown in FIG. When the electrostatic adsorption device in the upper adsorption device 33 is operated in this state, the front panel 71 is electrostatically adsorbed on the surface of the upper adsorption device 33. After the front panel 71 is adsorbed on the surface of the upper adsorption device 33, the substrate lifting pins 46 are lowered, and are accommodated in the through holes of the lower adsorption device 43 and the lower support table 42 as shown in FIG. A resistance heating heater (not shown) is arranged in the upper support stand 3 2. After the front panel 7 1 is adsorbed on the surface of the upper adsorption device 3 3, the heater is activated to heat the front panel 7 1. , Raise the temperature of the front panel 7 1 to 3 7 0 ° C. After the temperature rises to 370 ° C, the heater is operated at 370 ° C while maintaining the temperature of the front panel 71. In this way, the front panel 71 is introduced into the positioning and sealing chamber 6 and held by the upper adsorption device 33, but on the other hand, the rear panel is introduced into an unillustrated introduction chamber. After the rear panel is introduced into the room, the room is evacuated to a vacuum state. Secondly, maintain the vacuum state and connect the interior to the pre-baking chamber 5 and use the arms 1 3 shown in Figure 2 to introduce the rear panel 7 2 into the pre-baking chamber 5 〇 The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the pre-baking The chamber 5 has a two-stage structure of a heating position (Position) and a cooling position. The incoming rear panel 72 is first placed in the heating position, and is heated in the heating position. The rear panel 72 is degassed by being left at a high temperature of about 500 ° C for a predetermined time. After the degassing treatment is completed, the rear panel 72 is moved to a cooling position and cooled, and the temperature of the rear panel 72 is reduced to about 370 t. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297mm) -21-492134 A7 B7 V. Description of the invention (19) (Please read the precautions on the back before filling this page) Then, the rear panel 7 2 is Arranged at a predetermined position in the cooling position. Then, the arm 20 of the transfer robot arm enters the cooling position, the rear panel 72 is shifted to the arm 20 with the surface upward (face up), and the intermediate transfer chamber 4 is introduced into the positioning and sealing chamber 6. The front panel 7 printed by the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has entered the positioning and sealing chamber 6 which is adsorbed on the upper side adsorption device 3 3, and the rear panel 7 2 is in the upward-facing state. Enter the positioning and sealing chamber 6. The arm 20 is stationary in a state where the rear panel 72 is located between the upper adsorption device 33 and the lower adsorption device 43. Then, the substrate lift pins 46 are raised and abut against the bottom surface of the rear panel 72 as shown in FIG. 10. Then, the substrate lifting pin 46 is raised, the rear panel 72 is moved from the arm 20 to the substrate lifting pin 46, and the arm 20 is discharged from the positioning and sealing chamber 6, and the substrate lifting pin 46 is lowered, as shown in FIG. 11 The rear panel 72 is shown on the top surface of the lower adsorption device 43. When the electrostatic adsorption device in the lower adsorption device 43 is operated in this state, the rear panel 72 is electrostatically adsorbed on the surface of the lower adsorption device 43. A resistance heating heater (not shown) is arranged in the lower support table 4 2. After the rear panel 7 2 is electrostatically adsorbed on the surface of the lower adsorption device 4 3, the heater is started to heat the rear panel 7 2 to make the rear panel. The temperature of 7 2 reaches the same 3 7 0 ° C as the temperature of the front panel 7 1. In this way, if a set of the front panel 71 and the rear panel 72 are introduced into the positioning seal chamber 6, the positioning seal chamber 6 is arranged on the upper and lower sides with the surfaces facing each other. Then, the incoming front panel 71 and the rear panel 72 are aligned in the positioning and sealing chamber 6. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 1 ----- -22- 492134 A7 B7 V. Description of invention (20) (Please read the precautions on the back before filling this page) Figure The 12-series display shows the alignment mechanism in the sealed chamber 6. As shown in FIG. 12, lamps 6 1 1 and 6 1 2 (not shown in FIG. 3 to FIG. 11) are arranged above the positioning and sealing chamber 6, and light can be irradiated from below. A cc D (Charged-coupled device) camera 6 2 1, 6 2 2 is arranged under the lights 6 1 1, 6 1 2 so as to face the lights 6 1 1, 6 1 2. Front panel 7 1 An alignment mark (A1 ignmentmark) (not shown) is formed in advance with the rear panel 7 2 respectively. By reading the relative positions of the two alignment marks, the relative position deviation between the front panel 7 1 and the rear panel 7 2 can be detected. 〇In the positioning and sealing chamber 6 equipped with the corresponding alignment mechanism, for the relative alignment of the front panel 7 1 and the rear panel 72, first, the lamps 6 1 χ,. 6 1 2 glows. Then, the lights of the lamps 6 1 1 and 6 1 2 respectively illuminate the front panel 7 1 and the rear panel 7 2 below. The alignment marks formed on the front panel 7 1 and the rear panel 7 2 are formed in advance on the lamps 6 1 i, 6 1 2 and the CCD camera 6 2 χ, 6 2 2 printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In the meantime, the light irradiated on the front panel 71 and the rear panel 72 is irradiated on the registration marks of the front panel 71 and the rear panel 72, and the CCD cameras 6 2! And 6 2 2 photograph the registration marks. The two registration mark images captured by the CC cameras 6 2 i and 6 2 2 are transferred to a control system (not shown). The control system analyzes the photographed image and determines whether the relative positions of the front panel 71 and the rear panel 72 are in the correct positions. If it is in the correct position, maintain the original state to complete the alignment. If it is not in the correct position, drive the drive mechanism 5 0, 5 1 according to the relative position deviation obtained from the analysis result, and only make the lower support table 4 2 on the horizontal plane. The size of the paper moved in is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) -23-492134 A7 _ B7 _ V. Description of the invention (21) (Please read the precautions on the back before filling this page) . Then, the CD cameras 6 2 i and 6 2 2 photographed the two registration marks again, and detected the relative position deviation again, and moved the lower support stage 4 2 in the horizontal plane according to the position deviation, and made the front panel The relative position of 7 1 and the rear panel 7 2 is in the correct positional relationship. In the above, although the alignment has been described by using two sets of lamps and CC cameras and two alignment marks, it is also possible to arrange three or more. In this way, the front panel 71 and the rear panel 72 have a correct positional relationship, and then the front panel 71 and the rear panel 72 are sealed in the positioning and sealing chamber 6. The following explains this sealing process. After the alignment is completed, the upper adsorption device 3 3 is lowered. A heat-fusible sealing material is arranged on the surface peripheral portion of the rear panel 72, and after the front panel 71 comes into contact with the sealing material, the upper suction device 3 3 is brought to a standstill. The rear panel 72 is provided with a through hole 7 3, and the above-mentioned sheet-shaped tube mounting shaft 59 is disposed below. The sheet tube mounting shaft 5 9 starts to rise after the upper suction device 3 3 is at rest. A sheet tube 60 is mounted on the front end of the sheet tube mounting shaft 59, and the front end of the sheet tube mounting shaft 59 rises to the front end of the sheet tube 60 and abuts against the bottom surface of the rear panel 7 2 as shown in FIG. 13 The sheet tube mounting shaft 5 9 is stationary. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. At this time, the opening of the sheet tube 60 communicates with the through hole provided in the rear panel 72. As described above, the temperatures of the front panel 71 and the rear panel 72 are 3 7 0 ° C, However, after the upper adsorption device 3 3 is at rest, the front panel 7 1 and the rear panel 7 2 are heated by heaters arranged in the upper support table 3 2 and the lower support table 4 2 so that the temperature of both of them reaches 4 °. 0 ° c. The sealing material is then melted. Therefore, the upper side of the adsorption device 3 3 is adapted to the Chinese national standard (CNS) A4 specification (210X297 mm D '-24- 492134 A7 B7 ___) V. Description of the invention (22) Lower and squeeze the front panel 7 1 And the rear panel 7 2 to a predetermined gap. (Please read the precautions on the back before filling in this page.) Also, the front end of the sheet tube 60 is provided with a hot-melt adhesive material. The sealing material is hot-melted and This adhesive material is also hot-melt. In this state, if the operation of the heater is stopped to cool the sealing material and the adhesive material to solidify, the front panel 71 is fixed to the surface of the rear panel 72 by the adhesive material, and the sheet tube 60 It is fixed to the back of the rear panel 72 to complete the sealing process. After the sealing process is finished, as shown in FIG. 14, the upper adsorption device 3 3 is raised and the sheet-shaped tube mounting shaft 5 9 is lowered and stored in the through hole. Next, again Raise the substrate lifting pin 4 6 so that the sealed group of panels 7 1, 7 2 is positioned at a predetermined height. Next, the arm 20 of the transfer robot arm is introduced into the positioning and sealing chamber 6 so that it is positioned on the group of panels 7 1, 7 of 2 After that, the substrate lifting pins 4 6 are lowered, and a group of panels 7 1 and 7 2 are moved to the arm 20, and the discharge arm 20 is transmitted from the positioning and sealing chamber 6, and the intermediate transfer chamber 4 is introduced into the sealing chamber 9. Printed by the Intellectual Property Bureau of the Ministry of Intellectual Property and Consumer Cooperatives. Because the sealing project is carried out under atmospheric pressure, the space gas between a group of panels is sealed, and the gas is evacuated in the exhaust chamber. After the gas is discharged, it needs to be sealed and discharged. Gas is used for sealing. However, since the manufacturing process of this embodiment is performed in a vacuum environment, the space between a group of panels is in a vacuum state, so there is no need to re-evacuate the vacuum. Therefore, after the sealing process is completed, It is not known that the vacuum exhaust is performed, and the panel can be immediately introduced into the sealed chamber 9 for sealing. Therefore, the time required for manufacturing can be shortened. Moreover, the required exhaust chamber is not required, and the paper size can be reduced. CNS Standard 4 Specification (21Gx297 Meal) " -25- 492134 Μ B7 _____ V. Description of Invention (23) Scale of some manufacturing equipment. (Please read the precautions on the back before filling in this } Then, a discharge heating gas such as gas or gas is introduced into the sealed chamber 9 to a predetermined pressure. Then, the discharge gas is introduced from the sheet tube 60 and the through hole 7 3 into a group of panels 7 1 and 72. After a group of panels 7 1 and 7 2 is filled with a discharge gas to a predetermined pressure, the sheet-like tube 60 is broken by a mechanism (not shown) to block the through hole 7 3 and hermetically seal the group of panels 7 1 and 7 2 The plasma display device can be obtained from the above. The plasma display device manufactured in this way is introduced into an outgoing room (not shown), and after it is blocked between the sealed room 9 and the atmosphere is introduced into the outgoing room. , Can take out the plasma display device. Then, the new front panel is introduced into M g〇 to form the film chamber 2, and after the M g〇 protective film is formed on the surface, it is transferred to the positioning and sealing chamber 6, on the other hand,. The new rear panel is introduced into the pre-baking chamber 5 for deaeration, and then transferred to the positioning and sealing chamber 6, where the new front panel and the rear panel are aligned and sealed in the positioning and sealing chamber 6, and then introduced into the sealing chamber. Then, by repeating the above operations, a plurality of plasma display devices can be manufactured. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, the above-mentioned embodiment is provided with a heater in the positioning and sealing chamber 6, so it can be maintained after the alignment of a set of panels 7 1 and 7 2 The correct positional relationship at the same time immediately heats the substrate to the sealing temperature (400 ° C) for sealing. Therefore, unlike the conventional method, the process of fixing a group of panels to a sealed room by a clip can be omitted, and it is not necessary to use a special transfer mechanism in order to avoid the clip. Furthermore, since alignment is performed at a high temperature of 370 ° C, it is not necessary to cool each panel to room temperature. Therefore, compared with the practice of alignment at room temperature, the size of the paper can be applied to the Chinese National Standard (CNS) A4 specification (210X297 mm) ~~~ -26- 492134 A7 B7 V. Description of the invention (24) The time required to cool the panel can be shortened, which can shorten the processing time and increase the productivity. (Please read the precautions on the back before filling this page.) Furthermore, although the description above has been made of the case where the upper adsorption device and the lower adsorption device provided in the positioning and sealing chamber 6 have electrostatic adsorption devices, the present invention is not limited thereto. Here, for example, as shown in FIG. 15, the upper adsorption device 81 and the lower adsorption device 82 formed by vacuum adsorption grooves may be used as the adsorption grooves 8 3 and 8 4 formed on each surface. Since the positioning and sealing chamber 6 cannot make the room reach a vacuum environment, gas remains between the sealed group of panels in an inert gas environment. Therefore, after the sealing process is completed, a group of panels must be evacuated before the sealing process. However, even in this case, the alignment and sealing are performed in the positioning and sealing chamber 6, so there is no need to use a clip to temporarily fix it. The advantages. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. As described above with reference to FIG. 7, the above-mentioned positioning sealed chamber 6 is provided with a substrate abutment pad 3 6 mounted downward, and a front panel raised by a substrate lifting pin 4 6. 7 1 After abutting the substrate abutting pad 3 6, the substrate lifting pin 4 6 is stopped, and then the front panel 7 1 is electrostatically adsorbed on the surface of the upper adsorption device 3 3. However, for example, an adsorption device is provided inside the substrate contact pad 36, and after the front panel 71 contacts the substrate contact pad 36, the adsorption device inside the substrate contact pad 36 is activated to temporarily adsorb the front panel 71. The substrate abutting pad 36 may be held temporarily, and then the front panel 71 may be configured to be adsorbed on the upper adsorption device 3 3. [Effects of the invention] The alignment and sealing of two panels can be performed in one processing room. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -27- 492134 A7 B7 V. Description of the invention (25 ) 〇 In addition, the alignment and sealing works are performed in a vacuum environment. After sealing, it is possible to move to the sealing works without vacuum exhausting between the panels, so that the time required for manufacturing can be shortened and the productivity can be increased. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -28-