46 92 1 3 A7 _ B7 五、發明說明（1) 發明領域 --------------裝.丨— (請先IU讀背面之注意事項再谇本頁) 本發明有關層叠設備，可對真空氣氛下加熱加壓而成 形之材料層疊= 相關技術 -線 製造印刷電路板時，有一程序係以酚樹脂、環氧樹脂 等熱固性樹脂或聚醯亞胺熱塑性樹脂製成之高撓性絕緣基 底與銅箔等導電層層疊，銅箔稍後供蝕刻處理（之後’前 者稱爲層疊基底，後者稱爲軟層疊基底）。若形成之層疊 在真空氣氛下熱壓，因熱固性樹脂化學反應，致絕緣基底 塑化，再因附著與銅箔層疊，進一步化學反應使與銅箔附 著之絕緣基底硬化。若過分類似地形成軟層疊基底’絕緣 基底膜與銅箔在真空氣氛下熱壓而硬化，致絕緣基底膜塑 化，並因附著而與銅箔層疊。當銅箔等導電層層叠時，形 成材料本身如熱塑性樹脂等絕緣基底或絕緣基底膜變黏。 經濟部智慧財產局貝工消费合作杜印梨 就這些層疊基底及軟層叠基底，爲保護層疊之銅箔， 可用金屬鍍層及焊接，在支承膜與光敏層構成之膜狀光阻 形成層所層疊之導電層面上施以熱壓附著。光阻形成層因 加熱變黏，並受壓而層叠於銅箔面。 就如此形成之印刷電路板，近年集積程度甚高，而其 表面處理亦使結構改變。最後1已常有多層印刷電路板， 或多層軟電路板，含表面導電層有三層以上導電圖案。製 造多層印刷電路板時，常用堆積方法，依序將絕緣基底或 絕緣基底膜及導電膜層叠至層疊基底或軟層疊基底之導電 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -4- 經濟部智慧財產局貝工消费合作社印製 ^69213 ； 五、發明說明（2) 層。 如此，實施以上導電層層疊或熱壓附著或膜狀光蝕形 成層時，在層叠基底或軟層疊基底與銅箔間或層疊銅箔與 膜狀光阻形成層之間，易留下含形成材料揮發成份之氣泡 ，產生空洞。在熔焊浴之高溫下後處理時，空間會變大而 損及層疊銅箔及膜狀層疊光阻形成層，可能致防護絕緣不 良，影響導電性。 熱壓每種形成材料而層叠時，欲示於之間形成空洞， 有習知方法於真空氣氛下層叠，如揭示於日本專利公開案 295218/1988 及 299895/1988。上 述專利可提供真空層疊設備，對多數平板或片膜材料構成 之形成材料層疊，可將一圓柱形橡膠提供在加熱容器內， 或真空室有一橡膠片，真空室無須開關，圓柱形橡膠或橡 膠片內連接一真空泵。此真空層叠設備中，形成材料置於 圓柱形橡膠或橡膠片之間。將其密封形成真空室’對真空 室除壓，而以圓柱形橡膠或橡膠片對形成材料施壓。在日 本專利公開案2 9 5 2 1 8號中，與加熱設備連接之加熱 室對階材加熱。在日本專利公開案2 9 9 8 9 5/ 1 9 8 8號中，以加熱機構加熱固定室及移動室而對階材 加熱。 另一習知真空層疊設備如日本專利公開案5 2 2 0 0 /1 9 9 2揭示，爲一真空熱冲床’其中多數熱板置於固 定座與移動座之間，對於固定板無須開關’並包含一空間 成爲真空室，可供移動座移動。一般每一熱板中均形成調 — tllllllll — —· *— — — 1— — I « — — — 111-- <請先wsl背面匕注意事項再滇 '本頁) 本紙張尺度適用t國0家楳準（CNS〉A4規格（210 X 297公釐） -5- 經濟部智慧財產局貝工消费合作社印製 4 6 92 1 3 A7 B7 五、發明說明（3) 溫流體通道，今加壓蒸氣或熱油等加熱介質通過通道’插 入熱板之間之每一形成材料同時受熱壓。與加熱介質交互 供應冷卻劑通過調溫流體通道或另—通道以供應冷卻劑在 各熱板上，令受熱之形成材料冷卻° 另一習知真空層疊設備如專利公開案3 1 5 2 5 7/ 1 9 9 8號揭示，所知之真空層疊設備包含一上平板及一 下平板，可相對地靠近並分開上，下平板各相對面上有一 膜體，一框體可在二膜體之間形成容納形成材料之空間’ 上下平板之相對面上任一膜體上至少提供一加熱機構’一 凹部位於具加熱機構之膜體與具膜體之上或下平板相對面 之間，其間保留一空間，一冷卻機構可冷卻凹部，一除壓 機構可對材料容納空間除壓，及一膜體可於適當時機控制 膜體於與凹部分開時對形成材料容納空間加壓，並使層疊 之形成材料緊附於上及/或下平板之凹部。就上述真空層 疊設備之加熱機構，使用軟性可緊附於凹部，而於加壓形 成材料容納空間時硬度可作爲一基座。 以上日本專利公開案2952 1 8/1 988及 2 9 9 8 9 5/1 9 8 .8所用真空層疊方法之設備中，一 直有問題，在加壓熱固性樹脂前，因室內熱傳導及輻射* 硬化持續進行，故形成材料附著銅箔不良，致附著強度不 佳。 且因加熱機構所加熱之形成材料逐漸冷卻至穩定之溫 度’即使完成層疊後，加熱時之熱量留在形成材料中，且 因銅箔導電層與熱固性樹脂或膜狀光阻形成層之絕緣基底 本紙張尺度適用中國Η家標準（CNS)A4規格<210 X 297公g ) -6- -----It— —---- 裝 I I--- - 訂·— — 線 (請先Μ讀背面之注意事項再戌本頁) 經濟部智慧財產局員工消费合作社印製 4 6 921 3 Α7 ____ Β7 五、發明說明（4) 間熱膨賬係數不同，可能產生皺曲，或因溫度不均引起拉 引及變形。 形成材料與溫度高度相關，如膜狀光阻形成層之黏性 如上述受熱，在進入真空氣氛之前，與材料接觸之部分黏 著，致空氣吸引層疊銅箔與膜狀光阻形成層之間，引起不 良。此外問題爲加壓前持續塑化，致層叠產生皺曲或減少 定位精度。良率因而下降。 另者，如曰本專利公開案52200/1 992號之 真空熱冲床，因經由各加熱板之調溫流體通道供應加熱介 質，熱量甚大，成形周期不能縮短，故熱效率差，成本高 ，生產力低。 就曰本專利公開案3 1 5 2 5 7/1 9 8 8之真空層 疊設備，因層疊品附於欲冷卻之上下平板之凹部，必須對 膜體操作機構爲複雜控制。且因冷卻機構直接提供於上平 板或下平板’層疊品附於具冷卻機構之上或下平板之凹部 ，產品任一面冷卻均會如此。 發明槪述 本發明欲解決以上問題，其目的提供層疊設備，可用 簡單結構有效地加熱形成材料使各層層疊，且層叠品可有 效冷卻，使層疊穩定。 根據本發明第一目的，其層疊設備包含如下，—上平 板與~下平板彼此相對設置，可靠近及分開，上平板與下 平板各相對面上具膜體’一框體供形成材料容納空間形成 本紙張尺度適用中固國家標準（CNS)A4規格<210 X 297公爱） -----------裝！ II 訂·！ I ·線 <請先閱讀背面之注*¥項再破i本頁) A7 d6 1 B7__ 五、發明說明（5 ) ’可於上下平板接近時，使形成材料容納在二膜體之間， 加熱機構靠近上下平板相對面上之膜體各面，分別提供冷 卻機構在各加熱機構與上下平板之相對面之間，一除壓機 構可對形成材料容納空間除壓，一膜體操作機構可隨時防 止各膜體膨脹，而於除壓之形成材料容納空間中對形成材 料加壓，或在形成材料容納空間中施壓形成材料，並有一 空間保持機構令加熱機構跟隨膜體移動，以緊隨各膜體， 同時保持加熱機構與冷卻機構分開一定距離，如同緊隨各 膜體般》 根據本發明第二目的’隨時靠著空間保持機構，有一 冷卻機構控制機構可控制各冷卻機構，致透過加熱機構附 迟各膜體。 本發明第一目的中，上下平板分開時多數層疊層中之 形成材料插入框體，並使上下平板接近形成材料容納空間 ，形成材料容納空間具有二膜體及框體。接著，爲防止形 成材料容納空間中之形成材料受壓，在形成材料容納空間 中進行除壓’同時分別令二膜體經由膜體操作機構附近上 下平板之相對面以防止各膜體膨脹，在形成材料容納空間 進行除壓。然後解除二膜體分別附近上下平板，並以膜體 操作機構令二膜體膨脹，以加壓形成材料。此時，加熱機 構附於各膜體，同時與各冷卻機構隔一距離，係透過空間 保持機構’並跟隨膜體移動，以膜體加壓形成材料，再以 加熱機構加熱而彼此層疊。因透過空間保持機構使加熱機 構分開一距離，可減少加熱機構之熱容量，提高電效率。 -------------i I I I I I I I I I I--- (請先閲讀背面之注意事項再戏，本頁) 經濟部智慧財產局員工消f合作社印製 本紙張尺度適用t國國家標準（CNS)A4規格（210 X 297公* ) -8- 46 92 1 A7 B7 五、發明說明（6) 本發明第二目的中，對形成材料熱壓之層疊程序後， 同時以膜體保持加壓，停止以加熱機構加熱，並以冷卻機 構操作機構冷卻層疊品’而層疊品夾持在冷卻機構通過膜 體與加熱機構之間°層疊品於每層層疊處溫度均勻下降， 熱收縮，穩定而無皴曲。 圖示簡要說明 圖1爲真空層疊設備一例之截面圖，顯示形成材料容 納空間之打開狀態。 圖2爲形成材料容納空間之截面圖，係由圖1狀態使 上下平板相對靠近。 圖3截面圖顯示形成材料容納空間由圖2狀態除壓之 狀態。 圖4截面圖顯示由圖3狀態熱壓形成材料之狀態。 圖5截面圖顯示由圖4加壓及冷卻形成材料之狀態。 圖6部分平面圖顯示一導電端子，一板狀導件及一導 電插頭，可供電至冷卻板及上平板之加熱器。 圖7爲部分拆解之放大截面圖，顯示下平板之空間保 持機構。 主要元件對照表 1 上平板 2 下平板 3 膜體 本紙張尺度適用中國國家標準（CNS>A4規格（210 X 297公釐） --------- I----t--- (請先Ba讀背面之注意事項再y *本頁) 訂·· *線· 經濟部智慧財產局貝工消费合作社印製 -9 - Λ 6 92 1 ; Α7 Β7 經濟部智慧財產局員工消费合作社印製 、 發明說明（7) 4 膜體 5 框體 7 加熱機構 8 加熱機構 9 冷卻機構 1 0 冷卻機構 1 1 空間保持機構 1 2 空間保持機構 1 3 冷卻機構操作機構 1 4 冷卻機構操作機構 3 0 凹部 5 A 上框體 5 B 下框體 3 1 膜體操作徑 4 0 凹部 4 1 膜體操作徑 J 氣密空間 K 氣密空間 5 0 抽氣徑 5 1 徑 5 2 切口 3 2 冷卻板 4 2 冷卻板 3 3 導電端子 ----I I ^---- I ------- I--^ <請先閲讀背面之注意事項再气V本頁) 本紙張尺度適用中國S家標準<CNS)A4規格（210 X 297公釐） -10- 4 6 92 1 3 A7 B7 五、發明說明（8 ) 經濟部智慧財產局員工消費合作社印製 4 3 導電端子 3 2 a 導孔 4 2 a 導孔 3 4 絕緣構件 4 4 絕緣構件 3 5 導電插頭 4 5 導電插頭 3 6 密封軸套 4 6 密封軸套 3 7 導電構件 4 7 導電構件 3 8 冷卻流體供應排放管 4 8 冷卻流體供應排放管 3 9 密封軸套 4 9 密封軸套 7 0 密封軸套 8 0 密封軸套 7 1 螺栓 8 1 螺栓 1 3 a 活塞桿 1 4 a 活塞桿 Η 形成材料 S 形成材料空納空間 {請先閱讀背面之注意事項再#本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -11 - I46 9213 A7 B7 五、發明說明（9 ) 實施例 本發明真空層叠設備實施例如圖1說明。圖中相同符 號代表相同部件或對應部件。 本發明真空層叠設備大致包含如下，一上平板1及一 下平板’係相對地設置，可接近及分開，膜體3、 4分別 位於上下平板1及2之各相對面上，一框體5供形成層疊 S以容納形成材料Η在二膜體3、 4之間，加熱機構7、 8分別位於各膜體3、4面上靠近地相對上平板1及下平 板2’冷卻機構9、 10分別位於各加熱機構7、 8與上 下平板1、2之相對面之間，一除壓機構（待後述）可對 形成材料容納空間S除壓，一瞑體操作機構（後述）可操 作膜體3、 4以隨時令各膜體3、 4防止膨脹，不致使除 壓材料中形成之形成材料Η形成加壓容納空間形成材料容 納空間’或致各膜體3、 4膨脹而加壓除壓材料中之形成 材料Η形成容納空間s，及一空間保持機構1 1、 1 2， 可保持加熱機構7、 8與各冷卻機構9、 10分開一定空 間以上’並使加熱機構7、 8跟隨膜體3、 4移動而附著 膜體3、4,其中另提.供一冷卻機構操作機構13、14 ’以隨時控制操作各冷卻機構9、 10,使其附著膜體3 、4 〇 本例中，上平板1爲矩形板狀，在上平板1底部形成 —凹部3 0與下平板2相對，其面積約與框體5內周開口 相同。參考上，本例框體5包含一上框體5 Α置於上平板 1上，及一下框體5 B置於下平板2上，其內周開口下致 本紙張尺度適用中國國家標準<CNS)A4規格（210 X 297公釐） -12 - 背 面 之 注 項 訂 轾濟邹¾¾财產局員X消費合作社印製 4 6 92 1 3 A7 B7_ 五、發明說明（1Q) (請先閲讀背面之注意事項再本頁) 相同。上框體5A利用框體3周緣氣密地附於上面，且藉 密封構件以螺栓置於上平板1底部。故在上平板1內’利 用膜體3凹部3 0形成一氣密空間J 。大約在上平板1中 央提供一膜體操作徑3 1以開向空間J 。瞑體操作徑3 1 以導管（未示）連接以供應及排放由膜體操作機構作膜體 之操作流體。 下平板2如上平板，爲矩形板狀，有一凹部4 0之面 積大致相同於下框體5 B之內周開口，而下框體5 B底部 氣密附於膜體4周緣，並經密封構件以螺栓安裝於下平板 2上面。故在下平板2內利用凹部4 0與膜體4形成一氣 密空間K。就上下平板1及2，任一均可固定支承，而移 動者可相對接近或分開*或上下平板兩者均可彼此靠近及 分開。大約下平板2中央提供一膜體操作徑4 1開向空間 K。膜體操作徑41具一導管（未示）|可供應膜體操作 流體以利用膜體操作機構操作膜體4而排出= 膜體3、 4均可具有片狀矽膠，具撓性、彈性及耐熱 性，並可用燃燒加工附著至各框體3、 4。二膜體3、 4 可形成氣密空間：[及K在凹部30，40間上下平板1、 經濟部智慧財產局員工消费合作社印製 2內，並確保對形成材料Η之加壓之安全面積，故不須固 定形成材料Η及上下框體5 A、5Β。 如上述，本例框體5由上框體5 Α及下框體5 Β構成 ，並經由一密封件（未示）安置在上平板1及下平板2上 。如圖2〜5所示，當上下平板1及2彼此靠近時，上框 體5A與下框體5B端靠，並與二膜體3、 4配合形成氣 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -13- 46 92 1 3 A7 _ B7 經濟部智慧財產局員工消费合作杜印製 五、發明說明（11) 密之形成材料容納空間S。本例在下平板2上形成一抽氣 徑5 0與真空泵等除壓機構連接，對形成材料容納空間s 除壓’有一路徑5 1與抽氣徑5 0連通並開向下框體5 B 上面，上框體5A具有一切口 5 2與一路徑5 0連通以開 口形成材料容納空間S及下框體5 B上面。本發明不限於 本例’不須均如上述上框體5 A及下框體5 B。只要當上 下平板1及2 1相對靠近時，形成氣密之形成材料容納空 間S，分開時則形成材料容納空間打開。此外*例如連接 除壓機構之抽氣徑5 0可位於上平板1上，連通抽氣徑 5 0之路徑5 1可位於上框體5A上，而一切口 5 2可位 於下框體5 B上，或上下框體5A或5 B任一上，可直接 提供連接除壓機構之路徑5 0。 在上下平板1及2之凹部3 0及4 0中，由冷卻機構 9、 10構成之冷卻板32、 42上下可往返移動地套合 ，加熱機構7、 8置於各冷卻板32、 42與膜體3、 4 之相對面之間。本例之各加熱機構7、 8由不銹鋼等薄片 構成，熱容量很小，當施加電流時因電阻生熱，且其表面 平坦。相對加熱機構7、 8之邊緣置有導電端子33、 43可供應電流，導電端子33、 43插入穿過冷卻板 32、 42之導孔32a、 42a ’經過相對冷卻板32 、42可上下移動之絕緣件34、 44’並防止由導孔 3 2 a及4 2 a落下。上下平板1及2分別具對一導電插 頭35、 45與外界及空間J及K連通’利用密封軸套 36、46使空間J、K氣密’如圖6 ’各導電端子33 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） -14- --------------裝·！ (請先閱讀背面之注$項再本頁) 訂- --線-46 92 1 3 A7 _ B7 V. Description of the invention (1) Field of invention -------------- Installation. 丨 (Please read the precautions on the back of IU before clicking this page) The present invention Regarding lamination equipment, materials that can be formed by heating and pressing in a vacuum atmosphere are laminated = related technology-when manufacturing printed circuit boards by wire, there is a procedure made of thermosetting resins such as phenol resins, epoxy resins, or polyimide thermoplastic resins The highly flexible insulating substrate is laminated with a conductive layer such as copper foil, and the copper foil is later subjected to an etching process (hereinafter, the former is called a laminated substrate, and the latter is called a soft laminated substrate). If the formed laminate is hot-pressed in a vacuum atmosphere, the insulating substrate is plasticized due to the chemical reaction of the thermosetting resin, and then laminated with the copper foil due to adhesion, and further the chemical reaction hardens the insulating substrate attached to the copper foil. If a soft laminated substrate is formed too similarly, the insulating base film and the copper foil are hardened by hot pressing in a vacuum atmosphere, resulting in plasticization of the insulating base film and lamination with the copper foil due to adhesion. When a conductive layer such as a copper foil is laminated, the forming material itself such as an insulating base such as a thermoplastic resin or an insulating base film becomes sticky. Du Yinli, Shellfish Consumer Cooperation of the Intellectual Property Bureau of the Ministry of Economic Affairs, on these laminated substrates and soft laminated substrates, in order to protect the laminated copper foil, metal plating and welding can be used to laminate the film-shaped photoresist forming layer composed of a supporting film and a photosensitive layer The conductive surface is attached by hot pressing. The photoresist-forming layer becomes viscous by heating and is laminated on the copper foil surface under pressure. The printed circuit board thus formed has a high degree of accumulation in recent years, and its surface treatment has also changed its structure. In the last 1, there are often multilayer printed circuit boards, or multilayer flexible circuit boards, and there are more than three conductive patterns including the surface conductive layer. When manufacturing multilayer printed circuit boards, a commonly used stacking method is to sequentially stack an insulating substrate or an insulating substrate film and a conductive film to the conductive substrate of a laminated substrate or a soft laminated substrate. (B) -4- Printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ^ 69213; V. Description of Invention (2). In this way, when the above conductive layer lamination, hot-pressing adhesion, or film-like photo-etching formation layer is implemented, it is easy to leave a formation between the laminated substrate or the soft laminated substrate and the copper foil or between the laminated copper foil and the film-shaped photoresist forming layer. The bubbles of the volatile components of the material create voids. When post-processing at the high temperature of the fusion bath, the space will become larger and damage the laminated copper foil and film-like laminated photoresist formation layer, which may cause poor protective insulation and affect the conductivity. When laminating each of the forming materials by hot pressing to form a cavity therebetween, there are conventional methods for laminating in a vacuum atmosphere, as disclosed in Japanese Patent Laid-Open Nos. 295218/1988 and 299895/1988. The above patents can provide vacuum lamination equipment for laminating most of the flat plate or sheet material. A cylindrical rubber can be provided in the heating container or a rubber sheet in the vacuum chamber. The vacuum chamber does not need to be opened and closed. Cylindrical rubber or rubber A vacuum pump is connected on the chip. In this vacuum lamination apparatus, a forming material is placed between cylindrical rubbers or rubber sheets. It is sealed to form a vacuum chamber 'to depressurize the vacuum chamber, and a cylindrical rubber or rubber sheet is used to press the forming material. In Japanese Patent Laid-Open No. 2 9 5 2 18, a heating chamber connected to a heating device heats the step material. In Japanese Patent Laid-Open No. 2 9 9 8 9 5/1 9 8 8, the step chamber is heated by heating the fixed chamber and the moving chamber with a heating mechanism. Another conventional vacuum lamination device, as disclosed in Japanese Patent Laid-Open No. 5 2 2 0 0/1 9 9 2, is a vacuum hot punch 'most of the hot plates are placed between the fixed seat and the moving seat, and no switch is required for the fixed plate' And contains a space to become a vacuum chamber for the mobile base to move. Generally, a tone is formed in each hot plate — tllllllll — — · * — — — 1 — — I «— — — 111-< Please note the precautions on the back of the wsl first, then the page on this page) 0 home standard (CNS> A4 specification (210 X 297 mm) -5- Printed by Shelley Consumer Cooperative, Intellectual Property Bureau, Ministry of Economic Affairs 4 6 92 1 3 A7 B7 V. Description of the invention (3) Warm fluid channel Heating medium such as steam or hot oil is passed through the channel 'each forming material inserted between the hot plates is simultaneously heated and pressed. The coolant is supplied in interaction with the heating medium through the temperature-regulating fluid channel or another channel to supply the coolant on each hot plate. On the other hand, the heated forming material is cooled. Another conventional vacuum lamination device is disclosed in Patent Publication No. 3 1 5 2 5 7/1 9 98. The known vacuum lamination device includes an upper plate and a lower plate, which can be relatively The floor is close to and separated from the upper and lower plates. There is a membrane on each of the opposite sides of the lower plate. A frame can form a space for the forming material between the two membranes. 'At least one heating mechanism is provided on any of the opposite sides of the upper and lower plates.' The recess is located in the film body with the heating mechanism and Between the upper and lower faces of the membrane body, there is a space reserved between them. A cooling mechanism can cool the recesses, a pressure relief mechanism can depressurize the material accommodation space, and a membrane body can control the membrane body and the recesses at an appropriate time. When separating, pressurize the forming material storage space and make the laminated forming material tightly adhere to the concave portions of the upper and / or lower plates. As for the heating mechanism of the above vacuum lamination equipment, it can be tightly adhered to the concave portions using softness, and formed under pressure. The hardness can be used as a base when the material contains the space. In the equipment of the vacuum lamination method used in the above Japanese Patent Publications 2952 1 8/1 988 and 2 9 9 8 9 5/1 9 8 .8, there has been a problem. Before the thermosetting resin, because the indoor heat conduction and radiation * hardening continue, the forming material is poorly attached to the copper foil, resulting in poor adhesion strength. And the forming material heated by the heating mechanism is gradually cooled to a stable temperature. The heat of the time is left in the forming material, and the insulating substrate of the copper foil conductive layer and the thermosetting resin or film-shaped photoresist forming layer is in accordance with the Chinese standard (CNS) A4. Specifications < 210 X 297mm g) -6- ----- It— —---- Install I I ----Order · — — Line (Please read the precautions on the back before clicking this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6 921 3 Α7 ____ Β7 V. Description of the invention (4) The thermal expansion coefficient is different between the two, which may cause wrinkles, or may be pulled and deformed due to uneven temperature. The forming material is highly dependent on temperature. For example, the viscosity of the film-shaped photoresist-forming layer is heated as described above. Before entering the vacuum atmosphere, the part in contact with the material is adhered, causing air to attract the laminated copper foil and the film-shaped photoresist-forming layer. Cause bad. Another problem is that continuous plasticization before pressing causes wrinkles in the laminate or reduces positioning accuracy. Yield is thus reduced. In addition, for example, the vacuum thermal punching machine of Japanese Patent Publication No. 52200/1 992, because the heating medium is supplied through the temperature regulating fluid channel of each heating plate, the heat is very large, the forming cycle cannot be shortened, so the thermal efficiency is poor, the cost is high, and the productivity is low. . For example, the vacuum lamination equipment of this patent publication 3 1 5 2 5 7/1 9 8 8 requires complicated control of the membrane operating mechanism because the laminate is attached to the concave portion of the upper and lower flat plates to be cooled. And because the cooling mechanism is directly provided on the upper flat plate or the lower flat plate, the laminated product is attached to the concave portion above or below the cooling plate, so the cooling on either side of the product will be the same. DISCLOSURE OF THE INVENTION The present invention is intended to solve the above problems, and an object thereof is to provide a laminating device which can effectively heat a forming material to laminate layers with a simple structure, and the laminated product can be effectively cooled to stabilize the lamination. According to the first object of the present invention, the lamination equipment includes the following:-the upper plate and the lower plate are opposite to each other and can be approached and separated; each of the opposite surfaces of the upper plate and the lower plate is provided with a film body; a frame for forming a material receiving space; Form this paper standard applicable to the National Solid State Standard (CNS) A4 specification < 210 X 297 public love) ----------- installed! Order II! I. Line < Please read the note on the back * item before breaking this page) A7 d6 1 B7__ 5. Description of the invention (5) 'When the upper and lower plates are approached, the forming material can be contained between the two membrane bodies, The heating mechanism is close to each side of the membrane body on the opposite surface of the upper and lower plates, and a cooling mechanism is provided between each heating mechanism and the opposite surface of the upper and lower plates. A depressurization mechanism can depressurize the forming material storage space, and a membrane operation mechanism can The membranes are prevented from expanding at any time, and the forming material is pressurized in the forming material accommodation space for depressurization, or the forming material is pressed in the forming material accommodation space, and a space retaining mechanism is provided for the heating mechanism to follow the movement of the membrane to tightly With each film body, at the same time, the heating mechanism and the cooling mechanism are kept separated by a certain distance, as if following each film body. According to the second object of the present invention, 'Anytime by the space holding mechanism, a cooling mechanism control mechanism can control each cooling mechanism, Each membrane is attached by a heating mechanism. In the first object of the present invention, when the upper and lower plates are separated, most of the forming materials in the laminated layer are inserted into the frame body, and the upper and lower plates are brought close to the forming material accommodating space, and the forming material accommodating space has a two-film body and a frame body. Next, in order to prevent the forming material in the forming material receiving space from being pressurized, the pressure is removed in the forming material receiving space. At the same time, the two membranes are respectively passed through the opposite sides of the upper and lower flat plates near the membrane operation mechanism to prevent the membranes from expanding. A material receiving space is formed for depressurization. Then release the upper and lower plates near the two membranes respectively, and use the membrane operating mechanism to expand the two membranes to form a material under pressure. At this time, the heating mechanism is attached to each film body and at a distance from each cooling mechanism, passes through the space retaining mechanism 'and follows the film body, presses the film body to form a material, and then heats the heating mechanism to laminate each other. Since the heating mechanism is separated by a distance through the space holding mechanism, the heat capacity of the heating mechanism can be reduced and the electrical efficiency can be improved. ------------- i IIIIIIIII I --- (Please read the notes on the back first, then play, this page) Staff of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by the cooperative, this paper is applicable in the country National Standard (CNS) A4 specification (210 X 297 male *) -8- 46 92 1 A7 B7 V. Description of the invention (6) In the second object of the present invention, after the lamination process of hot-pressing the forming material, the film body is simultaneously used. Keep pressurized, stop heating by the heating mechanism, and cool the stacked product with the cooling mechanism operation mechanism while the stacked product is sandwiched between the cooling mechanism through the film body and the heating mechanism ° The temperature of the stacked product decreases uniformly at each layer and heat shrinks , Stable without curling. Brief Description of the Drawings Fig. 1 is a cross-sectional view of an example of a vacuum lamination apparatus showing an opened state of a material receiving space. Fig. 2 is a cross-sectional view of a material accommodating space, and the upper and lower flat plates are relatively close to each other in the state shown in Fig. 1. FIG. 3 is a cross-sectional view showing a state where the forming material accommodating space is depressurized from the state of FIG. 2. FIG. 4 is a cross-sectional view showing a state in which a material is formed by hot pressing from the state of FIG. 3. FIG. 5 is a cross-sectional view showing a state in which a material is formed by pressing and cooling in FIG. 4. Fig. 6 is a plan view showing a conductive terminal, a plate-shaped guide and a conductive plug, which can supply power to the cooling plate and the upper plate heater. Fig. 7 is an enlarged sectional view of a part of the disassembly, showing the space retaining mechanism of the lower plate. Comparison table of main components 1 Upper plate 2 Lower plate 3 Membrane The paper size applies to Chinese national standard (CNS > A4 specification (210 X 297 mm) --------- I ---- t --- (Please read the notes on the back of the Ba first, and then y * this page) Order · · * Thread · Printed by the Shellfish Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-9-Λ 6 92 1; Α7 Β7 Printing and description of invention (7) 4 Membrane body 5 Frame body 7 Heating mechanism 8 Heating mechanism 9 Cooling mechanism 1 0 Cooling mechanism 1 1 Space retaining mechanism 1 2 Space retaining mechanism 1 3 Cooling mechanism operating mechanism 1 4 Cooling mechanism operating mechanism 3 0 Recess 5 A Upper frame 5 B Lower frame 3 1 Membrane operating diameter 4 0 Recess 4 1 Membrane operating diameter J Airtight space K Airtight space 5 0 Air extraction diameter 5 1 Diameter 5 2 Notch 3 2 Cooling plate 4 2 Cooling plate 3 3 Conductive terminal ---- II ^ ---- I ------- I-^ < Please read the precautions on the back first and then V page) This paper size applies to China S Home Standards < CNS) A4 Specification (210 X 297 mm) -10- 4 6 92 1 3 A7 B7 V. Description of Invention (8) Wisdom of the Ministry of Economic Affairs Printed by the production bureau employee consumer cooperatives 4 3 conductive terminals 3 2 a guide holes 4 2 a guide holes 3 4 insulating members 4 4 insulating members 3 5 conductive plugs 4 5 conductive plugs 3 6 sealed shaft sleeves 4 6 sealed shaft sleeves 3 7 conductive Component 4 7 Conductive component 3 8 Cooling fluid supply discharge pipe 4 8 Cooling fluid supply discharge pipe 3 9 Sealed bushing 4 9 Sealed bushing 7 0 Sealed bushing 8 0 Sealed bushing 7 1 Bolt 8 1 Bolt 1 3 a Piston rod 1 4 a Piston rod Η Forming material S Forming material vacant space {Please read the precautions on the back before # this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -11-I46 9213 A7 B7 V. Description of the invention (9) Example An example of the vacuum lamination equipment of the present invention is illustrated in FIG. 1. The same symbols in the figure represent the same or corresponding parts. The vacuum lamination equipment of the present invention generally includes the following: an upper plate 1 and a lower plate are oppositely arranged and can be accessed and separated; the membrane bodies 3 and 4 are respectively located on the opposite sides of the upper and lower plates 1 and 2; a frame 5 is provided for A stack S is formed to accommodate the forming material. Between the two membrane bodies 3, 4, heating mechanisms 7, 8 are located on the surfaces of the membrane bodies 3, 4, respectively, and are relatively close to the upper plate 1 and the lower plate 2 '. The cooling mechanisms 9, 10 are respectively Located between the opposing surfaces of each heating mechanism 7, 8 and the upper and lower flat plates 1, 2, a pressure relief mechanism (to be described later) can depressurize the forming material storage space S, and a carcass operating mechanism (described later) can operate the membrane body 3 , 4 to prevent the membranes 3 and 4 from expanding at any time, so as not to cause the forming material formed in the pressure-relief material to form a pressure-containing space to form a material-receiving space, or cause each of the membranes 3 and 4 to expand and pressurize the pressure-relief material. The forming material Η forms a storage space s, and a space holding mechanism 1 1, 1 2 can keep the heating mechanisms 7 and 8 apart from the cooling mechanisms 9 and 10 by a certain space or more, and make the heating mechanisms 7 and 8 follow the film body. 3, 4 move and adhere to the membrane body 3, 4, which In addition, a cooling mechanism operating mechanism 13 and 14 ′ are provided to control and operate each cooling mechanism 9 and 10 at any time so that the film bodies 3 and 4 adhere to the film. In this example, the upper plate 1 is a rectangular plate, and the bottom of the upper plate 1 Formation—The recessed portion 30 is opposite to the lower flat plate 2 and has an area approximately the same as the opening of the inner periphery of the frame 5. For reference, the frame 5 of this example includes an upper frame 5 A placed on the upper flat plate 1 and a lower frame 5 B placed on the lower flat plate 2. The inner circumference of the lower frame 2 causes the paper size to apply Chinese national standards < CNS) A4 specification (210 X 297 mm) -12-Remarks on the back are provided. ¾ ¾ Printed by the property bureau member X Consumer Cooperative 4 6 92 1 3 A7 B7_ V. Description of the invention (1Q) (Please read the back first Note on this page). The upper frame 5A is air-tightly attached to the upper surface by the periphery of the frame 3, and is placed on the bottom of the upper plate 1 with a bolt by a sealing member. Therefore, in the upper plate 1, an airtight space J is formed by using the concave portion 30 of the film body 3. A membrane operating diameter 31 is provided approximately at the center of the upper plate 1 to open to the space J. Carcass operating diameter 3 1 is connected with a pipe (not shown) to supply and discharge the operating fluid used as the membrane body by the membrane body operating mechanism. The lower plate 2 is a rectangular plate like the upper plate. The area of a recess 40 is approximately the same as the opening of the inner periphery of the lower frame 5 B. The bottom of the lower frame 5 B is air-tightly attached to the periphery of the membrane 4 and passes through the sealing member. Mounted on the lower plate 2 with bolts. Therefore, an airtight space K is formed in the lower plate 2 with the concave portion 40 and the film body 4. Either the upper and lower plates 1 and 2 can be fixedly supported, and the mover can be relatively close or separated * or both the upper and lower plates can be close to and separated from each other. Approximately the center of the lower plate 2 provides a membrane operating diameter 41 opening space K. Membrane operation diameter 41 with a conduit (not shown) | Can supply membrane operation fluid to operate membrane 4 by membrane operation mechanism and discharge = Membrane 3, 4 can have sheet silicone, flexible, elastic and It is heat resistant and can be attached to each of the frames 3 and 4 by burning. The two membrane bodies 3 and 4 can form an air-tight space: [and K are in the concave part 30, 40 upper and lower flat plates 1. Printed in the consumer consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2 and ensure a safe area for pressurizing the forming material Therefore, it is not necessary to fix the forming material Η and the upper and lower frames 5 A and 5B. As described above, the frame 5 of this example is composed of the upper frame 5 A and the lower frame 5 B, and is placed on the upper plate 1 and the lower plate 2 through a seal (not shown). As shown in Figures 2 to 5, when the upper and lower flat plates 1 and 2 are close to each other, the upper frame 5A and the lower frame 5B abut against each other, and cooperate with the two membranes 3 and 4 to form a gas. ) A4 size (210 X 297 mm) -13- 46 92 1 3 A7 _ B7 Printed by the consumer cooperation of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (11) Densely formed material storage space S. In this example, a suction path 50 is formed on the lower plate 2 and connected to a pressure relief mechanism such as a vacuum pump. There is a path 5 1 for pressure relief of the forming material storage space s. 5 1 communicates with the suction path 50 and opens to the lower frame 5 B. The upper frame 5A has all the openings 5 2 in communication with a path 50 to open a material receiving space S and the upper surface of the lower frame 5 B. The present invention is not limited to this example, and does not need to be the same as the upper frame 5A and the lower frame 5B described above. As long as the upper and lower flat plates 1 and 21 are relatively close to each other, the airtight forming material receiving space S is formed, and when separated, the forming material receiving space is opened. In addition * For example, the suction path 50 connected to the pressure relief mechanism may be located on the upper plate 1, the path 51 connected to the suction path 50 may be located on the upper frame 5A, and all the ports 5 2 may be located on the lower frame 5 B The upper, or upper and lower frames 5A or 5 B, can directly provide a path 50 to the pressure relief mechanism. In the recessed portions 30 and 40 of the upper and lower flat plates 1 and 2, the cooling plates 32, 42 composed of the cooling mechanisms 9, 10 are reciprocally fitted up and down, and the heating mechanisms 7, 8 are placed on each of the cooling plates 32, 42 and Between the opposite sides of the membrane body 3, 4. Each of the heating mechanisms 7 and 8 in this example is composed of a thin sheet of stainless steel or the like, and has a small heat capacity. When a current is applied, heat is generated due to resistance, and the surface is flat. Conductive terminals 33 and 43 are provided on the edges of the opposite heating mechanisms 7 and 8 to supply current. The conductive terminals 33 and 43 are inserted through the guide holes 32a and 42a of the cooling plates 32 and 42 and can be moved up and down through the opposite cooling plates 32 and 42. The insulators 34 and 44 'prevent falling through the guide holes 3 2 a and 4 2 a. The upper and lower flat plates 1 and 2 have a pair of conductive plugs 35 and 45 communicating with the outside world and the space J and K, respectively. The sealed shaft sleeves 36 and 46 are used to make the space J and K air-tight. China National Standard (CNS) A4 specification (210x 297 mm) -14- -------------- installed! (Please read the note on the back of the page before this page) Order --- line-
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IF 46 9213 A7 B7 五、發明說明（12) 、43及導電插頭35、 45由具撓性之板狀導電構件 37、 47連接。就下平板2面之導電插頭45及板狀導 電構件4 7，注意圖中只顯示其中之一。本例有一對導電 插頭35、 45分別連接直流電源。就導電構件37、 47，若可確實供應電流至加熱機構7、8，係相對上下 平板1及2可相對上下移動，則不限於本例所示。 在冷卻板32、 42內形成路徑32b、 42b以供 應定溫之循環及排放冷卻流體，冷卻流體供應排放管3 8 、48連接至這些路徑端點（省略32b、 42b與38 、48之連接）。冷卻流體供應排放管38、 48於縱向 可移動地支承於上下平板1及2，透過密封軸套3 9、 49以保持空間J、 K氣密。上平板1與下平板2具由驅 動柱筒13、 14,作爲冷卻機構操作機構。驅動柱筒 13、 14之活塞桿13a、 14a與導電插頭35、 45及冷卻流體供應排放管38、 48間置密封軸套70 、80，以保持空間J、K之氣密性》冷卻板32、42 以螺拴71、 81安裝於活塞桿13a、 14a之梢端。 活塞桿13a、 14a伸長時，冷卻板32、 42行經加 熱機構7、8，保持膜體3、4氣密。 本例以空氣爲膜骽操作流體，膜體操作機構具有空氣 壓縮機，可供應空氣在上平板1之膜體操作徑3 1，有一 膜體操作徑4 1，一真空泵可由膜體操作徑3 1、4 1抽 氣，有一控制機構有一變化閥可控制隨時供氣或抽氣，獨 立地由膜體操作徑31、41 (未示）完成。 先 背 之 注 項 再 本 頁 經濟部智慧財產局貝工消t合作社印製 本纸張尺度遶用中S困家標準（CNSU4现格<210 X 297公) -15- 46 9213 A7 B7 經濟部智慧財產局具工消费合作社印製 五、發明說明（13) 膜體操作機構之真空泵使膜體3、 4分別附於冷卻板 32、42，經由加熱機構7、8，在膜體3與凹部30 間空間J及膜體4與凹部4 0間空間K抽空氣，避免當形 成材料容納空間S除壓時，不意地以膨脹膜體3、 4對形 成材料Η加壓》膜操作機構之空氣壓縮機將空氣送入空間 J、 Κ使膜體3、 4膨脹，在定壓下加壓形成材料Η。膜 操作機構之控制機構控制由空間J、Κ抽氣，並隨時供應 空氣而以膜體3、 4加壓形成材料容納空間S中形成材料 Η。根據形成材料η所需壓力，有一例爲僅除壓形成材料 容納空間S，並釋放空間J、Κ於大氣，即爲足夠，如此 不需利用空氣壓縮機。 本例空間保持機構11、 12視上平板1之加熱機構 7及下平板2之加熱機構8，可採不同結構。如前述*將 冷卻板3 2與加熱機構7分開一定空間之空間保持機構 1 1之結構係將加熱機構7相對緣上之導電端子3 3插入 冷卻板3 2之導孔3 2 a。即加熱機構7藉自重附於膜體 而緊隨，同時以插入掛著冷卻板3 2導孔3 2 a中之導電 端子3 3將冷卻板3 2分開。加熱機構7與冷卻板分開之 空間取決導電端子3 3距冷卻板3 2控制懸掛量之長度， 較佳爲0 . 5〜1mm，故電流供至加熱機構7所生熱不 受冷卻板3 2影響。 另者，將下平板2之加熱機構與冷卻扳4 2分開之空 間保持機構1 2之結構，係利用加熱機構8二緣所設導電 端子43插入冷卻板42之導孔42a ，如圖7 ’並提供 讀 背 面 之 注 碩 再 0 本 頁 裝 訂 線 本紙張尺度適用中國國家標準（CNS)A4规格（210 X 297公釐） · 16 - A7 B7 五、發明說明（14) --------------裝--- (請先閱讀背面之注意事項再本頁) 一加熱機構保持構件6 2插入冷卻板4 2之底孔4 2 c ， 並設一加熱機構8及一壓縮彈簧6 3向上推著加熱機構保 持構件6 2。因導電端子4 3插入冷卻板4 2導孔4 2 a ’並限制移動’加熱機構8乃與冷卻板4 2分開，並附著 跟隨膜體4 ’係以壓縮彈簧6 3偏置。加熱機構8與冷卻 板4 2分開之空間決定於加熱機構8上導電端子4 3之長 度’受限於冷卻板4 2上表面之突出量，以加熱機構保持 構件6 2上之壓縮彈簧6 3偏置之。 -線 本發明欲層疊之形成材料Η，如支承膜與光阻層組成 之膜狀光阻層’係層疊在一層疊結構及一軟層疊結構，係 由多數板狀材料、連續片狀或膜狀材料構成，並可爲熱塑 性樹脂或熱固性樹脂之組合’或膜狀材料及木材、金屬、 有機材料或複合物之基底之附著組合。可對二種以上相同 或不同材層疊或層疊膜狀材料在基底一面或二面上，而完 成膜狀材料本身層疊。 經濟部智慧財產局具工消費合作社印製 接著參考圖1〜5說明本發明真空層疊設備之操作。 如圖1，上平板1與下平板2之狀態係彼此分開，而形成 材料容納空間S係開放。此時，形成材料Η引入框體5。 欲層疊之形成材料Η引入膜體3、4之間，並由連續膜（ 未不）支承’二者接近但彼此略爲分開，或形成材料Η之 長度僅可引入框體5，並置於膜體4上。若可防止彼此重 疊’視情況而定，可將多數相同或相異之形成材料Η引入 框體5 = 然後抽出空間J及Κ之空氣，即經由膜操作徑3丄、 本紙張尺度適用中國圏家標準（CNS)A4規格（210 X 297公釐） -17 4 6 92 1 3 A7 B7 五、發明說明（15) 41以膜體操作機構除壓，膜體3、4經加熱機構7、8 被吸附至冷卻板3 2、4 2。故加熱機構7靠其空重附於 冷卻板3 2 ’而加熱機構8靠壓縮彈簧6 3之力量附於冷 卻板4 2。可在形成材料容納空間s除壓時進行膜體3、 4吸附。在冷卻板32、 42之路徑32b、 42b中經 常循環水冷卻介質’通過冷卻流體供應排放管38、 48 0 如圖2，當上平板1與下平板2靠近而端靠上框體 5 A至下框體5 B ’並形成形成材料容納空間s。此時， —抽氣徑5 0與大氣連通’而膜體3、4分別經由加熱機 構7、 8附於冷卻板32、 42。 接著如圇3，驅動真空泵等除壓機構，形成材料容納 空間S中空氣經切口部52、路徑5 1及抽氣徑50抽出 .而除壓。在層叠完成前持續對形成材料容納空間S除壓* 並將上下平板1、 2分開而解除形成材料容納空間S。此 時，形成材料容納空間S中除壓大致與除壓空間J及K之 一相同，加熱機構7以其空重，而加熱機構8以壓縮彈簧 63之力完成，同時保持加熱機構7、 8接觸膜體3、 4 背側，而加熱機構7、 8與冷卻板32、 42分開一空間 。因導電端子33、 34插入導孔32a, 42a，並防 止移動使導電端子不會由冷卻板32、 42跑出來，故形 成材料Η不會示意由膜體3、 4加壓。 如此狀態，如圖4，當空間J、Κ打開時’以膜操作 機構經由膜操作徑31、 41至大氣，或供應定壓之壓縮 本紙張尺度適用中國困家標準（CNS>A4现格（210 * 297公3Π 請 先 明 讀 背 面 之 注IF 46 9213 A7 B7 5. Description of the invention (12), 43 and conductive plugs 35, 45 are connected by flexible plate-shaped conductive members 37, 47. Regarding the conductive plug 45 and the plate-shaped conductive member 47 on the lower surface of the two flat plates, note that only one of them is shown in the figure. In this example, a pair of conductive plugs 35 and 45 are connected to a DC power source, respectively. The conductive members 37 and 47 are not limited to those shown in this example, as long as they can supply current to the heating mechanisms 7, 8 and move relatively up and down with respect to the upper and lower plates 1 and 2. Paths 32b, 42b are formed in the cooling plates 32, 42 to supply a constant temperature circulation and discharge cooling fluid, and cooling fluid supply discharge pipes 3 8 and 48 are connected to the end points of these paths (the connections of 32b, 42b and 38, 48 are omitted) . The cooling fluid supply discharge pipes 38 and 48 are movably supported on the upper and lower flat plates 1 and 2 in the longitudinal direction and pass through the sealed shaft sleeves 39 and 49 to keep the spaces J and K airtight. The upper plate 1 and the lower plate 2 are provided with driving cylinders 13 and 14 as a cooling mechanism operation mechanism. The piston rods 13a, 14a of the driving cylinders 13, 14 and the conductive plugs 35, 45 and the cooling fluid supply discharge pipes 38, 48 are interposed with sealed shaft sleeves 70, 80 to maintain the airtightness of the spaces J, K. Cooling plate 32 , 42 are mounted on the tip ends of the piston rods 13a, 14a with bolts 71, 81. When the piston rods 13a, 14a are extended, the cooling plates 32, 42 pass through the heating mechanisms 7, 8 to keep the membrane bodies 3, 4 airtight. In this example, air is used as the membrane operating fluid. The membrane operating mechanism has an air compressor that can supply air to the membrane operating diameter 3 1 of the upper plate 1, a membrane operating diameter 4 1 and a vacuum pump can be operated by the membrane. 1, 4 1 pumping, there is a control mechanism and a change valve to control air supply or pumping at any time, which is independently completed by the membrane operating diameters 31 and 41 (not shown). The first note is on this page, and then printed on the paper by the Intellectual Property Bureau of the Ministry of Economic Affairs, the Bureau of Industry and Commerce, and printed on the paper standard. (CNSU4 is now < 210 X 297) -15- 46 9213 A7 B7 Economy Printed by the Ministry of Intellectual Property Bureau and the Industrial Cooperative Cooperative. V. Invention Description (13) The vacuum pump of the membrane operating mechanism attaches the membranes 3 and 4 to the cooling plates 32 and 42, respectively. The space J between the recessed portion 30 and the space between the membrane body 4 and the space K between the recessed portion 40 are evacuated to avoid unintentionally pressurizing the forming material with the expanded membrane bodies 3 and 4 when the forming material accommodation space S is depressurized. The air compressor sends air into the spaces J, K to expand the membrane bodies 3, 4 and pressurize under a constant pressure to form a material 压. The control mechanism of the membrane operating mechanism controls the space J, K to draw air, and supplies air at any time to press the membrane bodies 3, 4 to form the material 空间 in the material holding space S. According to the pressure required for forming the material η, there is an example in which only the pressure-receiving space is formed for the material accommodating space S, and the spaces J and K are released to the atmosphere, which is sufficient, so that no air compressor is required. In this example, the space holding mechanisms 11 and 12 are different depending on the heating mechanism 7 of the upper plate 1 and the heating mechanism 8 of the lower plate 2. As mentioned above, the space retaining mechanism 1 1 that separates the cooling plate 3 2 from the heating mechanism 7 by a certain space is configured to insert the conductive terminals 3 3 on the opposite edges of the heating mechanism 7 into the guide holes 3 2 a of the cooling plate 32. That is, the heating mechanism 7 adheres to the membrane body by its own weight and follows closely, and at the same time, the cooling plate 32 is separated by the conductive terminals 3 3 inserted into the guide holes 3 2 a of the cooling plate 32. The space between the heating mechanism 7 and the cooling plate depends on the length of the conductive terminal 3 3 from the cooling plate 3 2 to control the amount of suspension, preferably 0.5 to 1 mm, so the heat generated by the current supplied to the heating mechanism 7 is not affected by the cooling plate 3 2 influences. In addition, the structure of the space holding mechanism 12 separating the heating mechanism of the lower plate 2 from the cooling plate 42 is to use the conductive terminals 43 provided on the two edges of the heating mechanism 8 to be inserted into the guide holes 42a of the cooling plate 42, as shown in FIG. 7 ' Please read the note on the back of the page again. 0 Binding line on this page. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). · 16-A7 B7 V. Description of the invention (14) ------ -------- Install --- (Please read the precautions on the back before this page) A heating mechanism holding member 6 2 is inserted into the bottom hole 4 2 c of the cooling plate 4 2, and a heating mechanism 8 and A compression spring 63 pushes up the heating mechanism holding member 62. Since the conductive terminal 4 3 is inserted into the cooling plate 4 2 guide hole 4 2 a ′ and restricts movement, the heating mechanism 8 is separated from the cooling plate 42 and adheres to the film body 4 ′ and is biased by the compression spring 6 3. The space between the heating mechanism 8 and the cooling plate 4 2 is determined by the length of the conductive terminal 4 3 on the heating mechanism 8. It is limited by the protrusion of the upper surface of the cooling plate 4 2, and the compression spring 6 3 on the heating mechanism holding member 6 2 is limited. Offset it. -The forming material 欲 of the present invention to be laminated, such as a film-shaped photoresist layer composed of a supporting film and a photoresist layer, is laminated in a laminated structure and a soft laminated structure, and is composed of most plate materials, continuous sheets or films. It can be a combination of thermoplastic materials or thermosetting resins' or a combination of film-like materials and substrates of wood, metal, organic materials or composites. Two or more of the same or different materials can be laminated or laminated with a film-like material on one or both sides of the substrate, and the film-like material itself can be laminated. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and the Consumer Cooperatives Next, the operation of the vacuum lamination equipment of the present invention will be described with reference to Figs. As shown in Fig. 1, the states of the upper plate 1 and the lower plate 2 are separated from each other, and the material accommodating space S is opened. At this time, the forming material Η is introduced into the frame body 5. The forming material to be laminated is introduced between the film bodies 3 and 4 and is supported by a continuous film (not without). The two are close but slightly separated from each other, or the length of the forming material can only be introduced into the frame 5 and placed in the film. Body 4. If it can be prevented from overlapping each other, depending on the situation, most of the same or different forming materials can be introduced into the frame 5 = then the air in the space J and KK is extracted, that is, the operating diameter of the paper through the membrane 3 丄, this paper size applies to China 圏Standard (CNS) A4 (210 X 297 mm) -17 4 6 92 1 3 A7 B7 V. Description of the invention (15) 41 The membrane operating mechanism is used to remove the pressure, and the membranes 3 and 4 are heated by the heating mechanism 7, 8 Is adsorbed to the cooling plate 3 2, 4 2. Therefore, the heating mechanism 7 is attached to the cooling plate 3 2 'by its empty weight, and the heating mechanism 8 is attached to the cooling plate 4 2 by the force of the compression spring 63. The adsorption of the membrane bodies 3 and 4 can be performed when the pressure of the forming material storage space s is removed. In the paths 32b, 42b of the cooling plates 32, 42, the water cooling medium is often circulated through the cooling fluid supply discharge pipes 38, 48 0. As shown in FIG. 2, when the upper plate 1 and the lower plate 2 are close to each other and the upper frame 5 A to The lower frame 5 B ′ forms a material receiving space s. At this time,-the suction path 50 is in communication with the atmosphere ', and the membrane bodies 3 and 4 are attached to the cooling plates 32 and 42 via the heating mechanisms 7, 8 respectively. Next, as shown in 囵 3, a pressure relief mechanism such as a vacuum pump is driven to form the air in the material accommodating space S through the cutout portion 52, the path 51, and the suction diameter 50 to remove the pressure. Before the lamination is completed, the forming material storage space S is continuously depressurized *, and the upper and lower flat plates 1, 2 are separated to release the forming material storage space S. At this time, the depressurization pressure in the formed material accommodating space S is approximately the same as one of the depressurization spaces J and K. The heating mechanism 7 uses its empty weight, and the heating mechanism 8 is completed by the force of a compression spring 63, while maintaining the heating mechanisms 7, 8 The back sides of the film bodies 3 and 4 are contacted, and the heating mechanisms 7 and 8 are separated from the cooling plates 32 and 42 by a space. Since the conductive terminals 33 and 34 are inserted into the guide holes 32a and 42a and prevented from moving so that the conductive terminals do not run out of the cooling plates 32 and 42, the forming material Η does not indicate that the membrane bodies 3 and 4 are pressurized. In this state, as shown in Fig. 4, when the space J and K are opened, the film operating mechanism is used to pass through the membrane operating diameters 31 and 41 to the atmosphere, or the compressed paper is supplied at a constant pressure. The standard of this paper applies to the Chinese standards (CNS > A4 is now ( 210 * 297 male 3Π Please read the note on the back first
項 再 W I 經濟部智慧財產局貝工消f合作社印製 -18- 46 92 1 3 Α7 Β7 經濟部智慧財產局員工消费合作社印製 五、發明說明（16) 空氣，經由形成材料容納空間S除壓，或加上空氣J、 K 內供應壓縮空氣之壓力，膜體3、 4彼此膨脹，使形成材 料容納空間S內容量下降，使形成材料η受壓《此時，驅 動柱筒1 4內之活塞桿1 4 a適度伸長，而加熱機構8受 壓縮彈簧6 3之力與冷卻板4 2分開，並使下平板2之冷 卻板4 2僅上移’加熱機構8跟隨下平板2膨脹以加壓形 成材料Η，並受壓縮彈簧6 3偏置，受限制之導電端子 4 3移動緊觸膜體4背側。由直流電源供電至加熱機構7 、8’經由板狀導電構件37、 47及導電端子33、 43連接至導電插頭35、 45>不銹鋼製加熱機構7、 8受熱至定溫，整體一致，係利用加熱機構二邊緣上導電 端子33、 43所供直流電作用電阻，故熱量加至被膜體 3、 4施壓之形成材料Η。因加熱機構7、 8分開於冷卻 板3 2、4 2 —定空間，冷卻板3 2、42經常有冷卻介 質流通，其熱容量可降低而不致熱損·乃提高熱效率。形 成材料Η受膜體3、 4加壓，受加熱機構7、 8加熱，多 數層乃融化固定而層叠。 接著如圖5，加壓膜體時，停止供電至加熱機構7、 8,經由加熱機構7、 8將驅動柱筒13、 14之活塞桿 13a、 14a伸長，冷卻板32、 42分別緊附於膜體 3、4背側。融化而固定層叠之成品Η —因溫度均勻下降 而各層冷卻，在膜體3、 4之間受壓而熱收縮。保持層叠 成品Η #冷卻狀態一定時間。故層叠成品Η >穩定不生皴 曲，且形成周期減少。因層叠成品Η **冷卻時除去加熱機 請 先 讀 背 面 之 注 項 裝 訂 線 本紙張尺度適用中國國家標準（CNS>A4规格（210 X 297公«〉 -19 - d6 9213 A7 B7 五、發明說明（17) 構7、 8之熱量’不須擔心因加熱機構7、 8餘熱使層叠 --------------裝--- (請先閱讀背面之注意事項再t .本頁) 成品Η —過度塑硬化’因下一層疊周期加壓前預熱而生皺 曲，及各位定位精度下降。 在層疊成品Η —冷卻穩定後，爲中止膜體3、4以壓 力作用層疊成品’活塞桿1 3 a、 1 4 a縮回而驅動柱筒 13、 1 4 ’形成材料容納空間S中空氣與大氣連通，係 以除壓機構供應空氣經過框體5路徑5 a與排放徑5 0， 故上下平板1及2彼此分開而打開形成材料容納空間S， 取出層疊成品Η '。當連通形成材料容納空間s周圍時， 以膜體操作機構抽氣經膜體操作徑3 1、4 1對空間J , Κ除氣，以加熱機構7、8備用下一層疊周期，令膜體3 、4緊觸冷卻板32、 42。本例二柱筒13、 14係根 據雙功能式活塞桿，可伸縮，但本發明可適用僅驅動活塞 桿13a、 14a伸長，可藉空間：τ、κ除氣因膜體3、 4緊觸而退回。 經濟部智慧財產局具工消费合作社印製 利用本發明第一特性之簡單結構，以加熱機構鄰置於 各上下平板分別相對面，冷卻機構分別在各加熱機構與上 下平板各相對面之間’除壓機構對形成材料容納空間除壓 ’膜體操作機構可隨時防止各膜體膨脹，故形成材料容納 空間中形成材料不會受壓，或使各膜體膨脹以加壓形成材 料容納空間中之形成材料，及空間保持機構使加熱機構與 冷卻機構分開一定距離，並保持各膜體跟隨緊觸，當加熱 形成材料時’形成材料夾持在冷卻機構之間，故層疊成品 緊觸，利用膜體及加熱機構，操作冷卻機構操作機構，層 20 本紙張尺度適用中國國家標準（CNSM4規格（210 * 297公釐） 46 92 1 3 A7 _B7 五、發明說明（18) 疊成品每一形成材料可冷卻均勻及熱收縮，不生皺曲，故 真空層疊設備可有效加熱形成材料而層叠每一層。 根據本發明第二特性，就第一特性以外再隨時提供冷 卻機構操作機構以控制操作各冷卻機構，使其藉加熱機構 靠著空間保持機構接觸各膜體，在加熱加壓而層疊形成材 料之後，並保持以膜體加壓，中止加熱機構所生熱，使層 疊成品經由膜體及加熱機構夾持在冷卻機構之間，冷卻時 緊觸，故熱收縮及降溫均勻，層疊成品無皺曲，有效冷卻 層疊成品，提供完美之真空層疊設備。 -------------裝--------訂_ {請先閲A背面之注意事項爯·"'本買) -線 經濟部智慧財產局貝工消费合作社印製 本紙張尺度適用中國國家標準（CNS>A4規格（210 * 297公釐） -21 -Xiang Zai WI Printed by the Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-18- 46 92 1 3 Α7 Β7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (16) Air is removed by forming the material storage space S Pressure, or the pressure of the supply of compressed air in the air J, K, the membrane bodies 3, 4 expand each other, so that the content of the forming material accommodating space S decreases, and the forming material η is compressed. At this time, the inside of the driving cylinder 14 is driven. The piston rod 1 4 a is moderately extended, and the heating mechanism 8 is separated from the cooling plate 4 2 by the force of a compression spring 63, and the cooling plate 4 2 of the lower plate 2 is moved only upwards. The heating mechanism 8 follows the expansion of the lower plate 2 to The material Η is formed under pressure, and is biased by the compression spring 63, and the restricted conductive terminal 43 is moved close to the back side of the film body 4. Powered by a DC power supply to the heating mechanisms 7, 8 'are connected to the conductive plugs 35, 45 via plate-shaped conductive members 37, 47 and conductive terminals 33, 43 > The stainless steel heating mechanisms 7, 8 are heated to a constant temperature and are uniform as a whole. The resistance of the direct current provided by the conductive terminals 33 and 43 on the two edges of the heating mechanism, so that heat is added to the material 形成 which is pressed by the film bodies 3 and 4. Because the heating mechanisms 7, 8 are separated from the cooling plates 3 2, 4 2-a constant space, the cooling plates 3 2, 42 often have cooling medium in circulation, and their heat capacity can be reduced without heat loss, which improves the thermal efficiency. The forming material is pressurized by the film bodies 3 and 4 and heated by the heating mechanisms 7 and 8. Most layers are melted and fixed and stacked. Next, as shown in FIG. 5, when the membrane body is pressurized, the power supply is stopped to the heating mechanisms 7 and 8, and the piston rods 13 a and 14 a of the driving cylinders 13 and 14 are extended through the heating mechanisms 7 and 8, and the cooling plates 32 and 42 are respectively tightly attached to Membrane body 3, 4 dorsal side. The melted and fixed laminated product Η — due to the uniform temperature drop, each layer is cooled, and it is compressed between the membrane bodies 3 and 4 to thermally shrink. Keep stacked Finished product #Cooling state for a certain time. Therefore, the laminated product > is stable and not warped, and the formation cycle is reduced. Due to the stacking of finished products ** Please remove the heating machine when cooling Please read the note binding line on the back This paper size is applicable to Chinese national standards (CNS > A4 specifications (210 X 297 public «〉 -19-d6 9213 A7 B7) V. Description of the invention (17) The heat of the structure 7, 8 'don't need to worry about the stacking due to the residual heat of the heating mechanism 7, 8 -------------- install --- (Please read the precautions on the back before t (This page) Finished product Η—Excessive plastic hardening 'wrinkles due to preheating before pressing in the next lamination cycle, and the positioning accuracy of each part is reduced. After the laminated product Η—After the cooling is stable, the film bodies 3 and 4 are pressed. The stacked product 'piston rods 1 3 a, 1 4 a retract and drive the cylinders 13, 1 4' to form air in the material receiving space S, which communicates with the atmosphere, and supplies air through the frame 5 through the path 5 a and The discharge diameter is 50, so the upper and lower flat plates 1 and 2 are separated from each other to open the material storage space S, and take out the laminated product Η '. When the communication formation material storage space s is connected around, the membrane operation mechanism is used to extract air through the membrane operation diameter 3 1, 4 1 pair of spaces J, K degassing, heating mechanism 7, 8 for the next stacking cycle The membrane bodies 3 and 4 are in close contact with the cooling plates 32 and 42. In this example, the two cylinders 13, 14 are retractable according to the dual-function piston rod, but the present invention is applicable to drive only the piston rods 13a, 14a to extend, and can be borrowed. Space: τ, κ degassing is returned due to the close contact of membrane bodies 3 and 4. The simple structure using the first feature of the present invention is printed by the Industrial Property Cooperatives of the Intellectual Property Bureau of the Ministry of Economics, with the heating mechanism adjacent to each of the upper and lower plates. The cooling mechanism is between each heating mechanism and the opposite sides of the upper and lower plates. The pressure-removing mechanism removes pressure from the forming material storage space. The membrane operation mechanism can prevent the expansion of each membrane at any time. It will be pressed, or expand each film body to pressurize the forming material in the forming material storage space, and the space retaining mechanism separates the heating mechanism from the cooling mechanism and keeps each film body in close contact with each other when the forming material is heated 'The forming material is sandwiched between the cooling mechanism, so the laminated product is in close contact. The film body and heating mechanism are used to operate the cooling mechanism operation mechanism. The layer 20 is suitable for the Chinese country. Standard (CNSM4 specification (210 * 297 mm) 46 92 1 3 A7 _B7 V. Description of the invention (18) Each forming material of the stacked product can be cooled uniformly and heat shrinks without wrinkling, so the vacuum lamination equipment can be effectively heated to form According to the second characteristic of the present invention, in addition to the first characteristic, a cooling mechanism operation mechanism is provided at any time to control the operation of each cooling mechanism, so that it can contact each film body by the heating mechanism against the space holding mechanism, After being laminated to form the material, the film body is kept under pressure to stop the heat generated by the heating mechanism, so that the laminated product is sandwiched between the cooling mechanism through the film body and the heating mechanism, and tightly touches during cooling, so the heat shrinks and the temperature is uniform. , Laminated products without wrinkles, effectively cooling the laminated products, providing the perfect vacuum lamination equipment. ------------- Equipment -------- Order_ (Please read the precautions on the back of A first &" 'this purchase) The paper size printed by the consumer cooperative is applicable to the Chinese national standard (CNS > A4 specification (210 * 297 mm) -21-