TW466213B - Reaction furnace for generating water - Google Patents

Abstract

To improve the safety of a reaction furnace for generating water by completely preventing the generation of ignition of hydrogen or backfire and the stripping of a platinum coating catalytic layer in the inside of a reaction furnace main body for generating water and to reduce the dead space in the inside space of the reaction furnace main body to remarkably miniaturize the reaction furnace main body. The reaction furnace for generating water consists of an inlet side furnace main body member having a gas supply port, an outlet side furnace main body member having a water gas take-out port, a reflection body disposed in the inside space of the reaction furnace main body formed by combining both furnace main body members with each other and a platinum coating catalytic layer formed respectively on the inside wall surface of the inlet side furnace main body member and the inside wall surface of the outlet side furnace main body member. Water is generated by the reaction of hydrogen with oxygen under a non-combustion condition by bringing hydrogen and oxygen supplied to the inside space of the reaction furnace main body from the gas supply port into contact with the platinum coating catalytic layer to activate the reaction.

Description

^^ ¾ 466 21 3 l [Technical Field] < Please read the notice on the back before filling out this page) The present invention relates to an improvement of a reactor for moisture generation mainly used in semiconductor manufacturing equipment. In detail, the present invention relates to completely preventing the ignition or backfire of chlorine gas, the peeling of the platinum coating catalyst layer and the like by achieving uniform temperature of the entire temperature of the reactor body, and can achieve safety. Reactors for moisture generation such as lifting, durability of reactors, and drastic reduction in manufacturing costs. [Background Art] The formation of an oxide film on silicon in semiconductor manufacturing requires a high-purity moisture at a flow rate of at least 100 QSCCM (1000 cc / min under standard conditions). In order to provide these applications, the present inventors have invented a water-generating reaction furnace having a structure as shown in FIG. 6 and disclosed it in Japanese Patent Application No. Hei 10-297907. That is, in Fig. 6, A is the reactor body, 1 is the inlet-side furnace body member, 1a is the gas supply port, and 2 is the outlet-side furnace body member. 2 a is the moisture gas outlet, 3 is the inlet-side internal space, 4 is the outlet-side internal space, 5 is the inlet-side reflector, 6 is the outlet-side reflector, 7 is a metal filter, and 8 is a platinum-coated catalyst layer Among them, the aforementioned platinum-coated catalyst layer 8 is provided with a barrier film 8 a such as T i N on the inner surface of the outlet-side furnace body member 2, and a platinum coating film 8 b Laminated to form. When moisture is generated, the national standard (CNS> A4 (210 X 297 mm)) will be applied in advance from the gas supply port 1 a to the predetermined paper size -W — A7 466213 -__ B7_ V. Description of the invention (2 ) The mixed gas G of Η 2 and 〇2 mixed in the mixing ratio is supplied into the reaction furnace body A. The mixed gas G ′ supplied into the inlet-side internal space 3 of the reaction furnace body a will be received by the inlet-side reflector 5 and The metal filter 7 diffuses, flows into the inner space 4 on the outlet side and comes into contact with the platinum coating film 8 b, and the reactivity of 0 2 and Η 2 is activated. By being in contact with the platinum coating layer 8 Η2 and 〇2, which are activated by contact with b, will react at a high temperature of about 300 to 500 ° C to be converted into moisture gas (water vapor). In addition, the generated moisture gas will be The outlet-side reflector 6 and the gap between the inner wall surfaces of the outlet-side furnace body member 2 are supplied from the moisture gas outlet 2a to a process chamber (not shown) and the like for semiconductor manufacturing. , At high temperature, make 02 and 1 {2 react water reaction The main body A keeps the temperature in its internal spaces 3 and 4 below the ignition temperature of H2 or H2 containing gas, while preventing the explosive combustion reaction between? 12 and 02 while reversing them at an appropriate speed. In order to generate the moisture gas with the required flow rate, the reactor body A of the above-mentioned Fig. 6 can produce a high-purity moisture of the desired flow rate in a simple and convenient manner under a high reaction rate in a small-sized reactor furnace body and exert excellent performance. Practical utility. However, even the moisture generating furnace of the structure shown in Fig. 6, there are still problems to be solved, and among them, the problems that need to be solved urgently are more complete to prevent the fire of confrontation 2 or from the gas supply port 1 At the same time of backfire of a, the temperature distribution of the entire reactor body A is uniformized and the partial peeling and peeling of the platinum coating catalyst layer 8 caused by the local temperature rise is completely eliminated. National Standard (CNS) A4 (210 X 297 mm) (谙 Please read the notes on the back before filling this page) Order --------- line, -5- 466 21 3 A7 B7 V. Invention description (3) (Please read the precautions on the back before filling this page.) As mentioned above, the temperature in the internal space of the main body A of the reaction furnace for moisture generation is kept at the lowest critical ignition temperature than the gas containing H2 or ^ 12 (about 5 At 60 ° C, the critical ignition temperature will rise to about 5 6 0 ° C or higher with the mixing rate of H2 and 0 2). It is much lower at about 4 5 0 ° C to 5 0 ° C, and can be suppressed. 2 With 0 2 explosive combustion reaction. However, the temperature in the internal space 3 and 4 of the reaction furnace A for moisture generation is often kept completely below the aforementioned critical ignition temperature, which is actually very difficult. For unknown reasons, the inlet side furnace body member 1 or the outlet side In some cases, the temperature of the inner wall surface of the furnace body member 2 and the like may rise locally to a critical ignition temperature or higher. In addition, in case the temperature of the inner wall surface of the inlet-side furnace body member 1 or the outlet-side furnace body member 2 rises to the critical ignition temperature, it is not always possible to generate an explosive combustion reaction of 0 and H2 and cause backfire. Generally, In other words, there are many cases where no fire or backfire will occur. However, in the case where the radon 2 concentration in the mixed gas G is extremely high, ignition or backfire of Hs may occur. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the reasons for the aforementioned fire or backfire on Hs, that is, the local and sharp temperature rise of the two furnace body components 1, 2 or the metal filter 7, etc. So far, it is unknown, but the real reason has not been determined. However, from the experience of the inventors in manufacturing and using a reaction furnace for moisture generation, it is considered that the inner wall surface of the inlet-side furnace body member 1 (the furnace body on the gas supply port 1 a side) constituting the reaction furnace body A The inner wall surface of the component) or the external surface of the inlet reflector 5, the outlet reflector 6, the metal filter 7, and other metal catalysts, and the H2 in the mixed gas G. This paper applies the Yin National Standard (CNS) A4 specifications (210 X 297 mm) -6- 4 6 6 ^ A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. The description of the invention (4) and 0 2 are activated, so that some parts of the aforementioned inner wall surface are generated. The fact that the temperature is rising sharply and sexually is the first cause of the fire. That is, the inlet-side furnace body member 1, the two reflectors 5, 6, the metal filter 7, and the like are all formed of stainless steel (SUS 3 1 6L). In addition, the outer surfaces of these components are usually covered with oxide films or passive coatings of various metals that are naturally formed. Therefore, the required catalyst activity originally maintained on the outer surface of stainless steel is suppressed. However, if the aforementioned oxide film or passive film is exposed to the mixed gas G with a high concentration of Η 2 at a high temperature of about 450 ° C to 500 ° C for a long time, the oxide film will be removed from stainless steel. The surface is peeled off or restored and the metal outer surface will be partially exposed. As a result, the metal catalyst activity of the outer surface of the stainless steel is exerted. Therefore, it can be considered that the surface temperature of parts other than the portion provided with the platinum-coated catalyst layer 8 in the internal spaces 3 and 4 of the reactor body A rises to H2 (Or H2 contains gas) above the ignition critical temperature. On the other hand, it is known that the temperature of the inner wall surface of the platinum-coated catalyst layer 8 which is generally provided with the outlet-side reaction furnace body 2 tends to become higher as it moves toward the center portion of the body 2, especially when the mixing is increased by N2 dilution or the like. In the case where the flow velocity and flow rate of the gas G are used, the temperature from the outer periphery of the outlet-side reflector 6 to the portion near the center will further increase. Therefore, if the cause of ignition or backfire is the inner wall surface side of the exit-side furnace body member 2 provided with the platinum-coated catalyst layer 8, it is considered to be opposed to the outer peripheral portion of the exit-side reflector 6. Part of the platinum-coated catalyst layer 8 facing the direction of the inflow of the mixed gas G in the gap L is subject to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Please read the back (Notes for filling in this page)

-7- 4 6 6?-^ A7 B7 V. Explanation of the invention (5) The reaction between ^ 12 and 〇2 becomes active, so the temperature of the inner wall surface will rise sharply locally to reach the critical ignition temperature and generate confrontation. Fire of 2 or partial peeling of platinum-coated catalyst layer 8. In addition, in order to prevent local temperature rise in the internal spaces 3 and 4 of the reaction furnace main body A, a common countermeasure is to increase the size of the reaction furnace main body A itself to increase the heat capacity and install a heat radiation or cooling device. In order to strengthen the cooling performance of the reactor body A. However, since a semiconductor manufacturing apparatus is generally installed in a clean room, it is difficult to increase the installation space. Therefore, the requirements for miniaturization of the water-generating reaction furnace attached to the semiconductor manufacturing apparatus are particularly strict. It is necessary to increase the size of the reaction furnace body A or enhance the cooling device to prevent the inside of the water-generating reaction furnace as described above. The countermeasures for local temperature rise or peeling of the platinum-coated catalyst layer 8 due to temperature rise are currently in a state that is impossible in reality. __________________ 0 [Problem to be solved by the invention] The present invention is intended to solve the problem in the past The above-mentioned problem exists in the reaction furnace for moisture generation, that is, even if the temperature of the internal space of the inlet and outlet furnace body members 1 and 2 constituting the reaction furnace body A is maintained at a threshold higher than H2 or a gas containing Krypton 2 gas. If the ignition temperature is relatively low, such as the use of a mixed gas with a high concentration of ^ 12, there will be problems with fire or backfire of Η2 or partial peeling of the platinum-coated catalyst layer 8 in the generation of moisture. A type that does not rely on the enlargement of the reactor body A in order to increase its heat capacity, or enlarges the cooling device of the reactor body A to greatly increase its cooling capacity This paper size is applicable to the national standard (CNS) A4 specification (210 X 297). Please read the note # on the back before filling this page:) Pack! —Order—if ------ line-Economic Village Intellectual Property Workers 1. Consumption Combination: 咋 print 4 6 6 21 ο A7 B7 V. Description of Invention (6) (Please read the note on the back of the praise first Please fill in this page again.) However, it is a countermeasure against the capacity, and it is made by using a very small moisture generation reaction. The furnace can be changed to change the structure in the reaction furnace, which can completely prevent H2 during the operation of the water generation reaction furnace. A reaction furnace for moisture generation due to ignition or backfire, or peeling of the platinum-coated catalyst layer 8. [Disclosure of the Invention] The present inventors have studied the cause of the ignition or backfire of Ha in the former reaction furnace for moisture generation, and found that the cause of the aforementioned ignition or backfire is "because ① is formed by the The oxide film on the outer surface of the metal on the inner space side of the main body of the reactor is peeled off and the metal is exerted.

I The catalytic activity on the surface. Based on the catalytic activity of the metal surface, the reaction of 〇2 and 112 will be locally intense and proceed at a high density. The temperature of the metal surface will partially rise to the critical ignition temperature of ^ 2 containing gas. The above may be due to the fact that the temperature of the platinum-coated catalyst layer 8 at a position opposite to the vicinity of the outer peripheral portion of the exit-side reflector 6 locally rises above the critical ignition temperature ". The consumer cooperation of the Intellectual Property Bureau of the Ministry of Economic Affairs, Du printed, and the present inventors found that "Even if the entrance-side internal space or the entrance-side reflector 5 and the metal filter 7 in the reactor body A are removed, the response is still high. This invention is based on the above findings of the present inventors. The invention of the first scope of the present invention is to apply an inlet-side furnace body member with a gas supply port and The main body components of the exit side furnace are oppositely combined, and the reaction furnace body with an internal space formed by welding of the two is in accordance with the gas supply in the internal space of the foregoing reaction furnace body. CNS) M specification (210 297 mm) ~ Printed by the Intellectual Property Office of the Ministry of Economic Affairs 1 · Consumption and printing 4 6 6 21 〇A7 B7 V. Description of the invention (7 > Entrance side reflection provided in a relative shape Body, an outlet-side reflector disposed in the interior space so as to face the moisture gas outlet, and a platinum coating formed on the inner wall surface of the outlet-side furnace body member The layer is formed by contacting the hydrogen and oxygen supplied from the gas supply port to the internal space of the reaction furnace body with the platinum coating film and activating the reactivity, so that hydrogen and oxygen are in a non-combustion state. The basic constituent of an invention that reacts in a state to produce water. The invention in the second scope of the patent application is the invention in the first scope of the patent application. The inner wall surface forms a circular concave portion with a flat bottom surface, and a taper portion is formed on the side opposite to the bottom surface of the furnace body member at the outer peripheral edge portion of the inlet-side reflector and the outlet-side reflector, and further, The inlet-side reflector and the outlet-side reflector are used to fix the inlet-side furnace body member and the outlet-side furnace body member in a state of maintaining a gap with their respective bottom surfaces. The invention in the third scope of the patent application The inlet-side furnace body member of the gas supply port and the outlet-side furnace body member having a moisture gas outlet are opposed to each other and combined; A reaction furnace body having an internal space formed therein, a reflector disposed inside the internal space of the reaction furnace body so as to face the gas supply port and the moisture gas outlet, and within the outlet side furnace body member The platinum coating catalyst layer formed on the wall surface is formed by contacting hydrogen and oxygen supplied from the gas supply port to the internal space of the reactor body with the platinum coating film to activate the reactivity. The basic constituents of the invention for the constitution of the reaction of hydrogen and oxygen in a non-combustion state to produce water "This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ----- ------ Equipment ------— Order · —! * J * i ... {Please read the note on the back before filling this page) -10- 4 6 6 21 3 A7 B7 Five 、 Explanation of invention (8) {Please read the notes on the back before filling out this page) The invention in the fourth scope of the patent application is the invention in the third scope of the patent scope, and is used as the main body of the inlet side furnace and the outlet side. The bottom surface of the inner wall surface of the furnace body member is flat The circular concave portion and the outer diameter of the reflector are slightly smaller than the inner diameter of the circular concave portion. Furthermore, at the exit-side furnace body member of the outer peripheral edge portion of the reflector, The tapered part is formed on the side opposite to the bottom surface, and the reflector is fixed to the outlet-side furnace body member in a manner to keep a gap with the bottom surface of the furnace body. The invention in the fifth scope of the patent application is in the first scope of the patent scope. Or in the third invention, a method of forming a platinum-coated catalyst layer from a barrier film and a platinum-coated film fixed to the barrier-coated film. The invention in the scope of patent application No. 6 is among the inventions in scope of patent application No. 1 or 3, which are used to remove the platinum-coated catalyst layer and other parts in the internal space provided with the reactor body and Those who form a non-catalytic barrier film on the reflector. The invention in item 7 of the scope of patent application is the invention in item 5 in the scope of patent application. The barrier film is made by T i N, T i C, and the employee ’s intellectual property bureau;

A barrier film made of any of TiCN, TiAIN, A 1 2 0 3, Cr03, Si02, and Cr N. The invention in item 8 of the scope of patent application is the invention in item 1 or 3 in the scope of patent application, which is used to install a source gas that is a mixed gas of hydrogen and oxygen in the gas supply port of the main body of the inlet side furnace. The method of mixing the raw material gas into the device. The invention in item 9 of the scope of patent application is in the invention in item 8 of the scope of patent application. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -11-A7 B7_ V. Invention Description (9) The raw material gas supply device is formed by: a hydrogen supply pipe for supplying hydrogen, an oxygen supply pipe for supplying oxygen, and a connector that joins the downstream ends of the two supply pipes and connects to the raw material gas supply port, and The connector is a method of forming a structure in which a plurality of small-diameter pipe sections and a large-diameter pipe section interact side by side in the direction of gas flow. The invention in item 10 of the scope of patent application is the invention in item 1 or 3 of the scope of patent application, which is installed on the outer wall surface of the main body member of the inlet-side furnace and the main body of the outlet-side furnace to heat the reaction furnace body A temperature control device of a predetermined temperature. The invention in item 11 of the scope of patent application is the method of using the temperature control device as a cooler provided with the cooling furnace body in the invention in item 10 of the scope of patent application. The invention in the 12th scope of the patent application is the one in the invention in the 11th scope of the patent application, in which the cooler is used as a heat sink (fin) mounted on the outer surface of the main body of the reaction furnace. [Brief description of the drawing] Member of the Intellectual Property Bureau of the Ministry of Economic Affairs I Consumption; Printed (please read the precautions on the back before filling out this page) Figure 1: The reaction for generating water in the first embodiment of the present invention Vertical sectional view of the furnace body ^ Figure 2: Partial vertical sectional view showing the formation state of the platinum coating film. Fig. 3: Partial vertical cross-sectional view showing the formation state of the barrier film. Fig. 4: Reverse paper size for moisture generation according to the second embodiment of the present invention. Applicable to China National Standard < CNS) A4 Standard (210 X 297 mm) -12- Consumption cooperation by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6 ^ 21 3 A7 __B7_ V. Description of the invention (〖〇) A vertical section of the furnace body. Fig. 5 is a longitudinal sectional view of a main body of a water-generating reactor according to a third embodiment of the present invention. Fig. 6: Vertical sectional view of a conventional reaction furnace body for generating moisture [Explanation of symbols] A: Reaction furnace body Η: 2: Hydrogen 0 2: Oxygen G: Mixed gas L: Gap V: Internal space α: Reflected outside Taper angle of peripheral part 1: Inlet-side furnace body member 1 a: Gas supply port 1b: Connection metal 2: Outlet-side furnace body member 2a: Moisture gas outlet 2 b: Connection metal 5: Inlet-side reflector 6 : Exit reflector 8: Platinum-coated catalyst layer 8 a: Barrier film (谙 Please read the precautions on the back before filling this page) ·------ 1 Order · -------- · This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) -13- d662! 3 A7 _ B7 V. Description of the invention (") 8b: Platinum coating film (Please read the precautions on the back first (Fill in this page again) 9: Barrier film on the inner wall surface of the main body of the entrance side furnace 1 0: Barrier film on the outer surface of the entrance side reflecting the outer surface _ 1 1: Barrier film on the outer surface of the exit side reflecting the external surface 13, 14 15: Welding part 16: Bolt hole for mounting 17: Reflector 18: Mounting hole for c1S form thermometer 19: Reverse Barrier film on the external surface 2 0: Raw material gas mixing supply device 21: Hydrogen supply tube 2 2: Oxygen supply tube 24: Temperature control device 2 5: Heating tube 2 7: Heater holding sheet 2 7 a: Cooling sheet economy Printed by the Intellectual Property Bureau of the People's Republic of China on Consumer Consumption ii [Forms for Implementing the Invention] The following describes the embodiments of the present invention based on the drawings. [First Embodiment] FIG. 1 is the first implementation of the present invention. Section of the reactor for moisture generation. In the first figure, A is the main body of the reactor, and v is the internal paper size. Applicable to China National Standard (CNS) A4 (210 X 297 mm) A7 B7 Wisdom of the Ministry of Economic Affairs Cooperative consumption of employees of the Property Bureau; printed five. Description of Invention (I2), L · is the gap, 1 is the inlet side furnace body component, 1 a is the gas supply port, 2 is the outlet side furnace body component, and 2 a is Moisture gas outlet, 5 is the inlet-side reflector, 6 is the outlet-side reflector, 8 is a platinum-coated catalyst layer, 8 a is a barrier film, 8b is a platinum-coated film, g, 10, and 11 are barriers Barrier film. In addition, fixed screw inspection not shown] _ 3, 1 4 and Barriers 1 3 a, 1 4 a are also formed with barrier films on the outer surface. In addition, the spacers 1 3 a, 1 4 a to be abutted on the inner surface of the main body member 2 of the U-side furnace And the platinum coating film 8b is not formed near it. The reactor body A for moisture generation is made by sealing the inlet-side furnace body 1 and the outlet-side furnace body member 2 made of stainless steel (s US 3 1 6 L) in an airtight manner. It is connected to form a circular hollow disk shape. The inlet-side furnace body member 1 'is provided with a circular concave portion having a flat bottom surface in the inside thereof, and the gas supply port 1a communicates with the concave portion. Further, the outlet-side furnace main body member 2 is provided inside with a circular concave portion having a flat bottom surface, and the moisture gas outlet 2a communicates with the concave portion. In addition, flange bodies are formed on the outer peripheral ends of the two body members 1 and 2 inwardly. The flange bodies are welded in an airtight manner 15 so that the two flange bodies face each other. Reaction furnace body A. In addition, in this embodiment, the bottom surfaces of the circular recessed portions of the two furnace body members 1, 2 are made flat, as a matter of course, this can be made into a spherical bottom surface. The above-mentioned inlet-side reflector 5 is a disc-shaped body, so that the center point of the inlet-side reflector 5 faces the gas supply port 1 a of the inlet-side furnace body member 1 'is facing the furnace (please read the item # 1 on the back of Jing back and fill in (This page) n —J I- 一 θ 'ϋ 1 J- I Ik I »II n IK nn I— I n I —J inif I: This paper size applies to the national solid standard (CNS> A4 specifications < 210 * 297 public love> -15- Member of the Intellectual Property Bureau of the Ministry of Economic Affairs X. Consumption combination printed A7 B7 V. Description of the invention (13) The bottom surface of the body member 1 is separated by a gap L and fixed to the furnace with fixing bolts 1 4 Main body member 1. In addition, the entrance-side reflector 5 is made of stainless steel (SUS 316L), and its diameter is set to be slightly smaller than the inner diameter of the circular concave portion. Similarly, the exit-side reflector 6 is formed to correspond to The inlet-side reflector 5 is almost the same shape, so that the center point of the inlet-side reflector 5 faces the moisture gas outlet 2 a of the outlet-side furnace body member 2, and a fixing bolt 1 is used with a gap L spaced from the furnace body member 2. 3 is fixed to the furnace body member 2. In addition, it is opposite to the entrance-side reflector 5 and the exit side. As shown in FIG. 1, the outer peripheral edge portions of the furnace body members 1 and 2 of the body 6 facing each other are trimmed to a tapered surface with an appropriate inclination angle α. The entrance side reflector 5 is provided with the inclination angle α and the mixed gas mill G flowing in from the gas supply port 1 a will flow out in a smooth manner into the internal space v. Also, the reflector 6 on the exit side, such as the reflector 6 and the platinum-coated catalyst If the distance between the layers 8 is constant, the heat will be concentrated near the platinum-coated catalyst layer 8 in the portion facing the outer peripheral end of the reflector. As shown in Figure 1, the gap L is gradually increased. Narrowing can prevent heat generation. In this embodiment, solid bolts 13 and 14 are used to fix the two reflectors 5 and 6 '. However, it can also be used as an appropriate support sheet (not shown). ) And are respectively fixed to the furnace body member side by welding. In addition, in this embodiment, spot welding is performed after the heads of the fixing bolts 13 and 14 are locked, and so-called locking treatment is applied. 'Within the exit side furnace body member 2 near the spacer 1 3 a (Please read the business matters on the back before filling this page)

Assembly i 丨 i I I order iii-J -16- 46621ο Α7 __ Β7 _____ 5. Description of the invention (M) The wall surface, as described above, is used to prevent the local heating of the bolt 13 and the platinum coating film 8b has not been formed. (Please read the precautions on the back before filling in this page) The gas that is ejected toward the entrance reflector 5 through the gas supply port 1 a * After colliding with the surface of the reflector 5, it is ejected in the direction of the arrow through the gap L, And it diffuses in the inner space V. In addition, the gas sprayed into the internal space V will collide with the platinum-coated catalyst layer 8 to thereby perform so-called catalyst activation, and pass through the exit-side reflector 1 2 and the platinum-coated catalyst layer 8 The gap L flows in the direction of the water gas outlet 2 a. Furthermore, H2 & 02, which is activated due to conflicting contact with the aforementioned platinum-coated catalyst layer 8 or through this contact in the gap L, will react in the requested non-combustion state and generate water. Then, the generated moisture gas passes through the gap L between the exit-side reflector 6 and the platinum-coated catalyst layer 8 and is led out to the moisture gas extraction 2a. The aforementioned platinum-coated catalyst layer 8 was printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, which was formed on the entire area of the inner surface of the main body member 2 of the exit side furnace made of SUS 3 1 6 L (but the spacer 13 a touched (The part near it is omitted). As shown in FIG. 2, after a barrier film 8 a made of T i N is formed on the inner surface of the furnace body member 2, a platinum coating film is formed on the barrier film 8 a. 8b. That is, the platinum coating catalyst layer 8 is formed by the barrier film 8a and the platinum coating film 8b. The thickness of the aforementioned platinum coating film 8b is preferably about 0-l ^ m to 3 ym. In this embodiment, a platinum paper sheet having a thickness of about 1 Am is formed in accordance with Chinese National Standard (CNS) A4 specifications (210 X 297 male t) -17- A7 4 6 6 ”_ ____B7_____ 5. Description of the invention (I5) {Please read the intentions on the back before filling this page) Coating film 8 ~ 3. Also, barrier film 8 3 The thickness is in the range of 0.1 to 111, which is the most appropriate level. In this embodiment, a barrier film made of T i N with a thickness of about 2 / zm is formed. The aforementioned barrier film made of τ i N A barrier film 9 'made of TiN is formed not only on the exit-side furnace body member 2 forming the platinum-coated catalyst layer 8, but also on the inner surface of the entrance-side furnace body member 1 or the outer surfaces of the two reflectors 5, 6 10, 11. Fig. 3 shows the formation state of the barrier film 9 on the inner surface of the inlet-side furnace body member 1. 'That is, when the barrier films 8a, 9, 10, 11 are formed, First, apply appropriate surface treatment to the inner surface of each component, and remove the oxide films or passive passivation of various metals naturally formed on the stainless steel surface. Next, the barrier films 8a, 9, 10, and 11 using TiN are formed for each member. In this embodiment, a T i N resistive film having a thickness of about 2 is formed according to an ion plating method. Barrier film 8 a, 9,10,11 »As the material of the aforementioned barrier film 8 a, 9,10,11, except for printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

In addition to TiN, TiC, TiCN, TiAIN, etc. cannot be used. This is because it is non-catalytic and is superior to reversion resistance and oxidation resistance ^ Also, the thickness of the barrier film 8a, 9, 10, 11 is, as described above, from 0.1 μm to 5; um degree As appropriate. If the thickness is less than 0.1 μm, the barrier function cannot be fully exerted. On the other hand, if the thickness exceeds 5, the formation of the barrier film itself takes time, and due to the expansion difference during heating, etc. It may cause peeling of the barrier film. This paper size applies the Chinese standard (CNS > A4 size (210 X 297 mm) -18- A7 4 6 6 213 _B7_____ V. Description of the invention (16) {Please read the precautions on the back before filling this page) For the formation method of the barrier film, in addition to the foregoing ion plating method, a PVD (physical vapor deposition) method or a chemical vapor deposition method (CVD method) such as an ion sputtering method and a vacuum evaporation method can be used. ), Hot press (hot pross) method, spray metal coating (spray metal coating) method, etc. If the formation of the barrier film 8 a is completed on the aspect of the main body member 2 of the outlet side furnace, a platinum coating film 8 b is continuously formed thereon. In this embodiment, a platinum coating film 8b having a thickness of about 1 #m is formed in accordance with the ion plating method. The thickness of the platinum coating film 8b is preferably about 0.1 to 3 m. If the thickness is less than 0.1 V m, it is difficult to exert the catalyst activity for a long period of time. On the contrary, if the thickness is 3 μm or more, the formation cost of the platinum coating film 8 b will increase, even if the thickness is more than 3 m. There is almost no difference in catalyst thickness, catalyst activity or retention period | and peeling may occur due to the difference in expansion during heating. Printed by the Economic Village Intellectual Property Bureau employee consumer cooperative, and the method for forming the platinum coating film 8 b, in addition to the ion plating method, ion sputtering, vacuum evaporation method, hot pressing method, etc. can be used, further > such as barriers When the coating 8 a is a conductive material such as T i N, the plating method can also be used. In the first embodiment of the present invention shown in FIGS. 1 to 3 described above, the inner surface of the entrance-side furnace body member 1 or the outer surface of the entrance-side reflector 5 and the outer surface of the exit-side reflector 12 are each The reason for the formation of the barrier films 9, 10, and 11 is that, as described above, the metal outer surfaces of the members 1, 5, and 12 do not function as catalysts. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " '-19- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs △ 6 6 2 1 3 Α7 Β7 V. Description of the invention (17) From such a viewpoint, the inlet-side furnace main body member 1, the inlet-side reflector 5, and the outlet-side reflector 6 can be formed of a non-catalytic and reductive material. [Second Embodiment] Fig. 4 is a longitudinal sectional view of a water-generating reactor according to a second embodiment of the present invention. In the second embodiment | inside the internal space V of the reaction furnace body A | using a bolt 13, 14 to fix a thick plate-shaped reflector 17 to the exit-side furnace body member 2 side, except for using one Except for the point of the reflector 17, the other structures are slightly the same as those of the first embodiment shown in FIG. In the fourth figure, a 18-series cis-type thermometer is provided with a mounting hole and a cis-type thermometer (not shown) is inserted into the inlet-side furnace body member 1. An 8-series platinum-coated catalyst layer is formed on the inner wall surface of the outlet-side furnace body member 2. In addition, barrier films 9, 19 of T i N and the like are formed on the outer surfaces of the entrance-side furnace body member 1 and the reflector 17 and the like. The reflector 17 is formed of a material having a large thickness, for example, a material having a thickness of about 1/2 or more of the width of the lateral width of the internal space V, and the outer diameter of the reflector 17 is larger than that of the internal space V. A disc shape with a slightly smaller inner diameter. In addition, the side surface facing the inner wall surface of the exit-side furnace body member 2 at the outer peripheral end portion of the reflector 17 is formed as a tapered surface at an angle α. In addition, in the fourth figure, it is to apply the furnace body components 1, 2 and the paper size to the national standard (CNS) A4 specification (210 X 297 mm) (please read the legal matters on the back before filling in (This page)] Install i I! Order --- line -20- 4 6 6 21 ^ A7 B7 V. Description of the invention (M) The reflector 1 7 uses stainless steel to form * the inner wall surface and reflection of the main body of the entrance side furnace The outer surface of the body 17 forms a barrier film 9, 19. However, as in the case of the second embodiment, the entrance-side furnace body member 1 and the reflector 1 can be formed of non-catalytic materials. In the reaction furnace body A of the second embodiment, not only the ignition or backfire against H2 gas can be completely prevented, but also the thermal capacity of the reflector 17 can be increased, so that the platinum-coated catalyst layer 8 can be more effectively prevented. The excessive temperature rise in the central part can reduce the volume of the internal space of the reactor body A (i.e., dead zone). Therefore, in terms of miniaturization of the reactor body A, or to accelerate the change of the raw material gas, ◦ In the case of a mixture ratio of 2 and Η 2, it is very suitable in terms of gas substitution. Example 1 In the first embodiment shown in FIG. 1, the outer diameter of the reactor body A is 14 mm 0, the thickness is 3 4 mm 0, The thickness of the inner space V is 14mm, the inner diameter of the inner space V is 10 8mm0, the outer diameter of the entrance-side reflector 5 and the exit-side reflector 6 is 8mm, the thickness is 2mm, the size of the gap L is 1mm, the length of the taper surface is 10mm, and the platinum is coated. Layer catalyst layer 8 (T i N barrier film 5 em + P t coating film 0.3 #m), entrance side furnace body member 1 and barrier films 9 and 19 of two reflectors 5 and 12 are TiN ( 5 # m). Using Η 220% rich gas as raw material and (Not shown) at a temperature (4 locations in total) of 450 ° C to 500 ° C for more than 1,000 hours of continuous moisture generation (water-based paper dimensions apply Chinese National Standards (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page) Loading ----- 1 Order —!-Line— ^ y-. _C ·, / y Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the consumer cooperative 4 6 6 2 3 A7 B7 Printed by the consumer property cooperative of employees of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention description (19) Sub-capacity (1 000 S c cm) Ignition or backfire and peeling of the platinum-coated catalyst layer 8. Example 2 In the second embodiment shown in Fig. 4, the outer diameter is 114mm, the thickness is 30mm, and the internal space is the reverse I® furnace body A. The thickness of V is 10 mm, the inner diameter of the internal space V is 8 8 mm, the thickness of the reflector 17 is 6 mm, the outer diameter is 10 2 mm 0, the gap L 1 mm from the exit-side furnace body member 2, and the entrance-side furnace body member 3mm between 1 flat, taper surface length of about 21mm (taper angle α = 8 °), platinum-coated catalyst layer 8 (TiN barrier film 8a 5 β m + P t coating 86 0 .3 # m), barrier film 9, 19gTiN (5 μm) on the inner wall surface of the entrance-side furnace body member 1 and the outer surface of the reflector 17. It is slightly the same as the case of the foregoing embodiment 1. As a result of the continuous moisture generation test performed under the same conditions, as in the case of the first embodiment, no ignition or backfire of Krypton 2 gas, peeling of the platinum-coated catalyst layer 8 and the like occurred. (Third Embodiment) Fig. 5 is a longitudinal sectional view of a water-generating reactor according to a third embodiment of the present invention. This third embodiment is one in which the raw material gas mixing and supplying device and the temperature control device are respectively installed on the reaction furnace body A of the first embodiment, and the reaction furnace body A itself is exactly the same as that in the first figure. This paper size applies to Chinese national standards (CNS> A4 size (210 X 297 mm)) (Please read the notes on the back of this page before filling in this page > -------- ^ ------- I. ^ I) ^ Ύ nil — — — ri- -22- Printed iBB printed by the consumer property cooperation baht of the Intellectual Property Bureau of the Ministry of Economic Affairs 2 1 3 A? __B7 V. Description of the invention (2〇) Also, Figure 3, Figure 3 In the embodiment, the reactor body A shown in FIG. 1 is used as the reactor body A, but the reactor body A of the second embodiment shown in FIG. 4 can also be used instead. The aforementioned raw material gas supply device 2 0 As shown in FIG. 5, the hydrogen supply pipe 2 1 for supplying hydrogen, the oxygen supply pipe 2 2 for supplying oxygen, the oxygen supply pipe 2 2 and the two supply pipes 2 1 and 2 2 The downstream end portion is formed by a connector 23, which is merged and connected to the gas supply port 1a of the inlet-side furnace body member 1. The connector 2 3 is formed as a plurality of small-diameter tube portions 2 3 in the direction of gas flow. a, 2 3 c and the large-diameter pipe section 2 3b and 2 3 d are arranged in parallel. In addition, the second large-diameter pipe section 2 3 d is welded and fixed. To the gas supply port 1 a of the furnace body member 1 on the inlet side. The temperature control device 2 4 is for heating and maintaining the reactor body A at a predetermined temperature. As shown in FIG. 5: ^, equipped with: heating inlet The heater 2 of the side furnace body member 1 and the exit side furnace body member 2 5. The controller (not shown) that controls the heater 25 in an on * off manner, and the cooler 2 that cools the reactor body A 6 6 »The aforementioned heater It is a so-called pneumatic heater for heaters (rabbit heater), which is contact-fixed to the reactor body A using a disc-shaped heater support 27. The controller maintains the reactor by turning the heater 25 on and off. The temperature of the body A (furnace temperature) is a predetermined appropriate temperature (a temperature lower than the ignition temperature of the hydrogen mixed gas and the reaction between hydrogen and oxygen can be effectively carried out. Generally, it is preferably set at 40 ° C. Below) This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions for the poor side before filling out this page)) Packing ------ line · ， 0 ". -23- 46621 ^ A? B7 V. Invention Ming () (Please read the notes on the back before filling out this page). Moreover, the cooler 26 is a comb-shaped cooling fin 27a installed on each heater support 27 to prevent an excessive rise in the furnace temperature caused by the reaction heat between hydrogen and oxygen, and seeks Effect of Stabilizing Invention of Moisture Reaction In the present invention, since the portion other than the platinum coating catalyst layer 8 in the internal space V of the reaction furnace body A is formed, it has excellent non-catalytic properties and resistance to reduction Because of the structure covered by the barrier film 8a, it does not expose the surface of the original metal with a catalyst function during the operation of the moisture generator. As a result, even if the mixed gas G with a high H2 concentration is used for a long period of time to generate water, the catalysis of metal surfaces other than the aforementioned platinum-coated catalyst layer will not occur at all, and 〇2 and Η2 will intensely occur. The fact of the reaction can therefore completely prevent the occurrence of a fire or backfire against the puppet as in the past. Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs have combined the printing and printing, and because only one reflector 17 or two reflectors 5, 21 are provided in the interior space of the reactor body A, the metal filter is removed as before Due to its structure, the outer diameter and thickness of each reflector can be made larger. As a result, it is possible to effectively prevent the temperature of the central portion of the platinum-coated catalyst layer 8 from rising to zero and to locally peel the platinum-coated catalyst layer 8 to zero °. Furthermore, while increasing the thickness of each reflector, The diameter is made smaller than the inside diameter V of the internal space V of the reaction furnace body A, and the outer diameter dimension 1 is set to a taper angle α on the outer periphery of the reflector. Therefore, the heat capacity of the reflector is increased to effectively prevent the temperature of the central portion of the platinum-coated catalyst layer 8 from rising. In addition, the internal space of the reactor body A can be reduced. -24- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 466213 A7 B7 V. Description of the invention (22) Dead space of V ) And the gas substitution of the reactor will become easy. Thus, in addition to the possibility of generating a small amount of water using a diluent gas, further miniaturization of the reactor body A will be possible. In addition, since the taper angle is set at the outer periphery of each reflector 0: It can prevent local temperature rise in the outer layer of the platinum-coated catalyst layer 8. If a raw material gas mixing and supply device 20 is provided, a raw material gas G that is sufficiently mixed with oxygen and hydrogen will be supplied through the connector 23. To the gas supply port 1 a. Therefore, the reaction responsiveness between hydrogen and oxygen is improved, so that the reaction rate of water generation will be further improved. Also, if a temperature control device 24 is provided, the effect of the heater 25 on the reaction furnace body A In the initial period of operation, the temperature of the reactor body A can be maintained at 400 to 450 ° C, and from the initial period of operation of the reactor body A, a high moisture generation reaction rate of hydrogen and oxygen can be obtained. Furthermore, a cooler 26 formed by installing cooling fins 27a on the reaction furnace body A was constructed to promote heat release. Therefore, even if the temperature of the reaction furnace main body A rises due to the generation of reaction heat due to moisture, the temperature of the reaction furnace main body A can be appropriately maintained due to heat release. This paper size applies the Chinese Family Standard (CNS) A4 specification (210 X 297 Gongchu) (谙 Please read the precautions on the back before filling out this page) Economic Zou Intellectual Property Bureau1 · Consumer cooperation: — — — Ί — — — — 1 V — — — — — — — — — — —

Claims (1)

6. Scope of patent application (please read the precautions on the back before filling out this page) 1—A reaction furnace for moisture generation, characterized in that the inlet side furnace body member with gas supply port and the outlet with moisture gas outlet The side furnace main body components are opposed to each other and are combined; a reaction furnace main body having an internal space formed by welding between the two, and an inlet side disposed in the internal space of the reaction furnace main body so as to oppose the gas supply port A reflector, an outlet-side reflector disposed in the interior space so as to face the moisture gas outlet, and a platinum-coated catalyst layer formed on the inner wall surface of the outlet-side furnace body member are formed by The hydrogen and oxygen supplied from the gas supply port to the internal space of the reaction furnace body are brought into contact with the platinum coating film to activate the reactivity, so that hydrogen and oxygen react in a non-combustion state to generate water. Composition. 2. The reaction furnace for moisture generation according to item 1 of the scope of the patent application, wherein the inner wall surfaces of the inlet-side furnace body member and the outlet-side furnace body member are formed with a circular concave portion having a flat bottom surface, and are reflected from the inlet side. The bottom surface of the furnace body member of the outer peripheral edge portion of the body and the outlet-side reflector forms a tapered portion with respect to the meat side. Furthermore, the inlet-side reflector and the outlet-side reflector are used as the inlet-side furnace body member and the outlet-side furnace. The body members are fixed in such a manner as to maintain a gap with their respective bottom surfaces. 3. A reaction furnace for moisture generation, characterized in that an inlet-side furnace body member having a gas supply port and an outlet-side furnace body member having a moisture gas outlet are opposed to each other and combined; A reaction furnace body having an internal space formed therein, a reflector disposed in the internal space of the reaction furnace body so as to face the gas supply port and the moisture gas outlet, and an inner wall surface of the outlet side furnace body member. The size of this paper is in accordance with Yin National Standard (CNS) A4 (210 X 297 mm) -20- iS6 213 Α8 Β8 ca D8 Hydrogen and oxygen supplied from the gas supply port to the internal space of the reaction furnace body are brought into contact with the platinum coating film to activate the reactivity, so that hydrogen and oxygen react to generate water in a non-combustion state. Make up. 4. If the reaction furnace for moisture generation according to item 3 of the scope of the patent application, the inner wall surfaces of the inlet-side furnace body member and the outlet-side furnace body member are formed as circular concave portions having a flat bottom surface and reflecting the aforementioned reflection The outer diameter of the body is made slightly smaller than the inner diameter of the aforementioned circular concave portion, and a taper portion is formed on the side opposite to the bottom surface of the main body member of the exit-side furnace body of the green portion on the outer periphery of the reflector, The reflector is fixed to the exit-side furnace body member in a state of maintaining a gap with the bottom surface of the reflector. 5. The water-generating reaction furnace according to item 1 or item 3 of the scope of the patent application, which is a method for forming a platinum-coated catalyst layer from a barrier film and a platinum-coated film fixed thereto. 6. The reaction furnace for moisture generation as described in item 1 or 3 of the scope of the patent application, wherein the other parts and the reflector are used to remove the platinum-coated catalyst layer in the internal space provided with the reaction furnace body. A way to form a non-catalytic barrier film. 7. The reaction furnace for moisture generation according to item 5 of the scope of patent application, wherein the barrier film is made of TiN, TiC, TiCN, TiAIN, A 1 a 0 a, C ra 0 3, Si〇2, CrN A barrier film made of either. 8. If the reaction furnace for moisture generation in item 1 or item 3 of the scope of patent application, which is installed as the gas supply port of the main body of the inlet side furnace, this paper is applicable to Chinese National Standard (CNS) A4 (210 X 297) (Mm) (谞 Please read the notes on the back before filling in this page) -27- 4 6 6 21 3 as C8 D8 6. Scope of Patent Application The method of supplying the raw material gas which is the raw material gas of the mixed gas of hydrogen and oxygen is supplied to the device. 9. The reaction furnace for moisture generation according to item 8 of the scope of patent application, wherein the raw material gas supply device is composed of: a hydrogen flooding tube for supplying hydrogen, an oxygen supply tube for supplying oxygen, and downstream ends of the two supply tubes. The connector is formed by confluence and connection to the source gas supply port, and the connector is a structure in which a plurality of small-diameter pipe sections and a large-diameter pipe section interact in parallel in the direction of gas flow. 10. The reaction furnace for moisture generation according to item 1 or item 3 of the scope of the patent application, wherein the reaction furnace body is heated and maintained at a predetermined temperature by being installed on the outer wall surface of the inlet side furnace body member and the outlet side furnace body member. Way of temperature control device. 11. The reaction furnace for moisture generation according to item 10 of the scope of the patent application, wherein the temperature control device is used as a cooler provided with a method for cooling the body of the reaction furnace. .1 2. The reaction furnace for moisture generation according to the scope of the application for patent No. _11, wherein the cooler is used as a way of radiating fins installed on the outer surface of the body of the reaction furnace. % 声 t! 才 1 3 I C. § t > ¥ L This paper size applies Yin National Standard < CNS) A4 specification (210 X 297 mm) (read the unintentional matter on the back before filling in this (Page) I n I nnin I in I n IIJI n I i I n I ϋ n II n DI