經濟部智慧財產局員工消費合作社印製 ί 447 0 5 6 A7 __；_ B7_____ 五、發明說明（I ) 【發明所屬的技術領域】 本發明係有關於捲帶上的封裝材硬化用搬送裝置。 【先前技術】 如圖5(a)所示，在連續的捲帶i上形成接腳部2，在 接腳部2上接合了半導體晶片3。即，捲帶1是以節距單 位將半導體晶片3接合後的帶狀薄膜。在此捲帶1上，如 圖5(b)所示，是用封裝材滴下裝置，在接腳部2上塗布由 元件保護用的樹脂等所構成的封裝材4，其次，用硬化裝 置進行封裝材4的乾燥。還有，雖未圖示，但在捲帶1的 兩側部，等間隔地形成用來進行節距移送的鏈輪孔。 在硬化裝置，由於封裝材所產生的有機物加以氣化者 、捲帶的搬送所產生的粉塵等會附著在引導捲帶兩側部的 —對導軌上，故必須定期進行淸掃等的維修保養。 【發明所欲解決的課題】 硬化裝置中的捲帶搬送，是在捲帶搬送方向呈開放的 隧道內進行搬送，而且，係將加熱器等靠近捲帶來配設。 因此，在捲帶搬送狀態中，要進行淸掃等的保養會有困難 〇 而且，在捲帶搬送中，當發生某些故障時，必須停止 裝置，再從導軌的導槽中拉出捲帶。但是，習知的導槽因 呈連續狀，故要對導槽進行捲帶的拆、裝會有困難。 本發明的第1課題是提供容易進行保修的封裝材硬化 用搬送裝置。 本發明的第2課題是提供保修及對引導捲帶的導軌進 ! 3 ------------- (請先閱讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 447056 A7 ___B7____ 五、發明說明（l ) .行捲帶的拆裝容易之封裝材硬化用搬送裝置。 [用以解決課題的手段】 用來解決上述課題的本發明的第1手段之封裝材硬化 用搬送裝置，係具備：具有捲帶供給捲軸的裝載部，該捲 軸上捲回有已接合半導體晶片的捲帶；具有滴下裝置之封 裝材滴下部，該滴下裝置能在該裝載部所供給的捲帶之元 件部上滴下樹脂等封裝材；具有硬化裝置的硬化部，該硬 化裝置能使該封裝材滴下部所滴下的封裝材乾燥；以及具 有捲帶捲取捲軸的卸載部，該捲軸能捲取經該硬化部將封 裝材乾燥後的捲帶；其特徵在於： 前述硬化裝置是具備：能引導捲帶的兩側部之一對導 軌，能使封裝材乾燥的加熱器，在捲帶搬送路徑及上方呈 開放狀、至少將前述一對導軌設於內部的硬化本體，以及 ’能封閉該硬化本體的上方、以能開閉自如的方式設於該 硬化本體上的罩蓋；將該硬化裝置設置成能從捲帶的搬送 路徑向前方拉出。 用來解決上述課題之本發明的第2手段，是在上述第 1手段中，前述硬化部具有複數列的硬化裝置，在硬化裝 置的出口側和下一段硬化裝置的入口側，裝設能使捲帶上 下反轉的鏈輪等反轉構件，將前述各硬化裝置設置成能分 別單獨地從捲帶的搬送路徑向前方拉出。 用來解決上述課題之本發明的第3手段，是在上述第 1手段中’前述加熱器是以與滴到捲帶上的封裝材呈對向 的方式設置在硬化本體或罩蓋上。 4 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) I. --線· 經濟部智慧財產局員工消費合作社印製 447056 A7 ___B7__'_ 五、發明說明（々） 用來解決上述課題之本發明的第4手段，是在上述第 1手段中’前述一對的導軌係具備：軌道本體，及以能部 分地引導捲帶的上面之方式固定在該軌道本體的上面之引 導構件。 用來解決上述課題之本發明的第5手段，是在上述第 4手段中，上述引導構件係具備：以能引導捲帶的寬方向 之方式、沿捲帶的搬送方向保持一定間隔固定在軌道本體 之寬方向引導部，及以能引導捲帶的上下方向之方式設置 在該寬方向引導部之上下方向引導部。 【發明之實施形態】 利用圖1至圖5來說明本發明的一實施形態。如圖1 所示，本實施的形態是由：供給圖5(a)所示的捲帶1的裝 載部10，將圖5(b)所示的封裝材4滴入接腳部2的封裝材 滴下部30，使封裝材4乾燥的硬化部40，捲取捲帶1的卸 載部2Ό所構成。 裝載部10上配設有：在圖5(a)所示的捲帶1上重疊保 護帶11再捲回後的捲帶之供給捲軸12，以及’用以捲取 保護帶11的保護帶捲取捲軸13。卸載部20上配設有：捲 回有保護帶21的保護帶供給捲軸22，以及’在經硬化部 40完成封裝材4的乾燥後之捲帶1上重疊保護帶21再捲 取的捲帶捲取捲軸23。保護帶捲取捲軸13及捲帶捲取捲 軸23，分別以未圖示的驅動機構向箭頭A、B方向轉動。 而且，捲帶供給捲軸12及保護帶供給捲軸22也分別以未 圖示的驅動機構向箭頭方向轉動。還有，14是表示將捲帶 ! 5 --------------OI — (請先閱讀背面之注意事項再填寫本頁) ij_ -線. 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 447056 A7 ---- B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ς·) 1引導到封裝材滴下部30的引導構件，24是表示將捲帶i 引導到捲帶捲取捲軸23的引導構件。 在封裝#滴下部30中，是以圖5(a)所示的半導體晶片 3的1節距(元件間距)間隔，配設由周知構造構成的2台滴 下裝置31、32。 在硬化部4〇中’ 3個硬化裝置41、42、43是由下方 到上方以一定間隔來配設。在第1段的硬化裝置41的出口 側41b和第2段的硬化裝置42的入口側42a，配設能卡合 捲帶1之未圖示的鏈輪孔之鏈輪44。在第2段的硬化裝置 42的出口側42b和第3段的硬化裝置43的入口側43a，也 同樣’配設能卡合捲帶1之未圖示的鏈輪孔之鏈輪45。在 第3段的硬化裝置U的出口側43b，配設能將捲帶丨引導 到卸載部20的引導滾輪46。鏈輪44 ' 45是分別以未圖示 的驅動機構朝箭頭C、D方向轉動。 如圖1〜圖3所示，在裝置的背面板5〇上，能將各硬 化裝置4丨、42、43單獨引導的導軌S1是以朝裝置前方的 方式來配置。在導軌51上插嵌滑座52而使其能滑動自如 ’在滑座52上固定硬化裝置41、42、43的基板60 = 硬化裝置41、42、43是如圖2及圖3所示，由大致 相同的構造所構成。硬化裝置41、42、43是由：基板60 、後面板61及前面板62構成的硬化本體63 '和罩蓋64 所組成。如實線所示般關閉罩蓋Μ時，係形成棬帶i的搬 送方向呈開放的隧道狀。罩蓋64是利用鉸鏈65來轉動自 如地結合在後面板61上。在基板60前面，設有爲將硬化 6 4 (請先閱讀背面之注意事項再填寫本頁) Ο ---訂---------線！ .I ·1 n n I n n n n ϋ ϋ n - 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 447 0 5 6 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（5 ) 裝置41、42、43沿著導軌51移動的把手66。在罩蓋64 的前面，也設有用來開閉該罩蓋64的把手67 ^ 在硬化本體63的內部’於前面板62側的基板60上 ，固定著支持棒保持板70，在支持棒保持板70上固設2 個軸承71、72。還有，基於圖不的方便，圖2中僅圖不一 側的軸承71，圖3中則圖示了另一側的軸承72。在軸承 71、72上插嵌接頭73、74而使其能朝任意方向轉動自如 ，在接頭73、74上固定著支持棒75、76。 在罩蓋64的內側，固定著支持棒卡合板77，在支持 棒卡合板77上，形成能卡合支持棒75、76前端的卡合孔 77a =於是，將支持棒75、76的前端折彎成能卡合於卡合 孔77a。而且，支持棒75、76的長度，是如圖2及圖3所 示而不同。在圖2所示的使用狀態中，罩蓋64的打開狀態 受到限制。如圖3所示，當拉出硬化裝置41時，能使罩蓋 64成爲充分打開的狀態。因此，支持棒75的長度比支持 棒76的長度短。 如圖2所示，在罩蓋64上固定著氣體供給接頭80 ; 氣體供給接頭80上，爲了防止在由硬化本體63和罩蓋64 所構成的隧道內被加熱物之捲帶1等的氧化，固定著用以 供給預熱後的氣體之配管81。氣體供給接頭80經由未圖 示的配管連接到未圖示的氣體供給源。 在硬化本體63的內側，爲了引導捲帶1的兩側部，將 一對導軌82A、82B以呈相對向的方式來配設。導軌82A 、82B是由：軌道本體83A、83B，以及，沿著捲帶1的搬 I 7 --------------ΛγI (請先閱讀背面之注意事項再填寫本頁) Ή. --線· ΙΝ)^— ' 尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 447056 B7 五、發明說明（t ) 遂方向固定於其上面的複數個引導構件84A、84B所構成 。引導構件84A、84B是由：構成能引導捲帶1寬方向之 真方向引導部的軸部85A、MB ’和構成能引導捲帶1上 卞方向之上下方向引導部的凸緣部86A、86B所組成。軌 道本體83A、83B長方向的兩端部，分別如圖2所示，被 固定在軌道支持板WA、87B上’軌道支持板WA、MB 則經由支柱88A、δδΒ固定在基板6〇上。 在第1段及第3段的硬化裝置41、43上，加熱器90 晏經由加熱器支持板91固定在罩蓋64上。在第2段的硬 化裝置42上，加熱器90是經由加熱器支持板91固定在基 扳60上。因此，在第1段及第3段的硬化裝置41、43和 第2段的硬化裝置42中，加熱器90的採不同配設方式的 理由如下。 因加熱器90是用以將圖5(b)所示的封裝材4乾燥，故 加熱器90以對向封裝材來配設最有效。在第1段的硬化裝 置41中，如圖5(b)所示，是以封裝材4在上側的狀態搬送 捲帶I，故將加熱器90安裝在罩蓋64上。在第2段的硬 化裝置42中，是用圖1所示的鏈輪44將捲帶1上下反轉 後進行搬送。即，因封裝材成爲下側，故將加熱器90安裝 在基板60上。在第3段的硬化裝置43中，是和第1段的 硬化裝置41相同的狀態搬送捲帶1，故將加熱器90安裝 在罩蓋64上。 其次’就作用加以說明。若裝載部10的捲帶供給捲軸 U朝箭頭方向轉動，保護帶11及捲帶1就會從捲帶供給 8 4 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) n n -線 ΙΌ----------------------- 447056 A7 _____B7_ ______ 五、發明說明（'Ί ) 捲軸12送出。若保護帶捲取捲軸13朝箭頭A方向轉動， 從捲帶供給捲軸12送出的保護帶11會被捲取在保護帶捲 取捲軸I3上，捲帶1則從捲帶供給捲軸12下垂。控制保 護帶捲取捲軸13的轉動，使得該捲帶1的下垂量在一定範 圍內。 若轉動硬化部40的鏈輪44、45，捲帶1就會通過硬 化裝置41、42、4；3內而被搬送到卸載部20。封裝材滴下 部30的滴下裝置31、32，由於是以圖5(a)所示的半導體 晶片3之1元件間距的間隔進行配設’故鏈輪44、45是以 半導體晶片3之2間距、2間距的方式間歇性地轉動。當 圖5(a)所示的接腳部2的位置在滴下裝置31、32的正下方 時，從滴下裝置31、32，如圖5(b)所示滴下封裝材4來進 行塗布。當該捲帶1被搬送到硬化部4〇時，利用硬化裝置 44、42、43來乾燥封裝材4。 在卸載部20，控制捲帶捲取捲軸23的轉動，以使得 捲帶1的下垂量在一定範圍內。若保護帶供給捲軸22朝箭 頭方向轉動，將送出保護帶21。接著，若捲帶捲取捲軸23 朝箭頭B方向轉動，將在捲帶1上重疊保護帶21後再捲 取在捲帶捲取捲軸23上。 在捲帶1的搬送中，當在硬化裝置41、42、43發生 某些的故障，例如，當發生捲帶1的搬送不順時，會令裝 置停止。接著’如圖2所示，若將把手67向上抬起，罩蓋 64就會以鉸鍊65爲中心轉動而打開，撐起支持棒75並將 該支持棒75的前端插入支持棒卡合板77的卡合孔77a。 9 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) is . 線· 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 447056 A7 ___ B7______ 五、發明說明（β ) 藉此，罩蓋64如2點鏈線所示，保持成打開狀態。即，支 持棒75是使用在不將硬化裝置41、42、43拉到裝置前方 的情形3 於是，爲了排除捲帶1的搬送故障，當從軌道本體 83A、83B上拉出捲帶1時，只要從引導構件84A、84B取 下捲帶1即可，故容易從軌道本體83A、83B上取出捲帶 1。又，於拉出捲帶並行適當的處置後，只要將捲帶1插入 引導構件84A、84B即可，故容易將捲帶1放回導軌82A 、82B。第2段及第3段的硬化裝置42、43也是同樣地進 行。 另外，當定期淸掃硬化裝置41、42、43時或發生重 大的故障時，在捲帶.1未裝設在導軌82A、82B的狀態下 ，若將把手66拉向裝置前方，如圖3所示滑座52將沿著 導軌51移動，而將硬化裝置41移到裝置前方。於是，將· 把手67向上抬起，撐起支持棒76並將該支持棒76的前端' ·* , 插入京持棒卡合板77的卡合孔77a。即，支持棒76是使 甩^將硬化裝置41、42、43拉到裝置前方的情形。 藉此，罩蓋64是如2點鏈線所示般保持打開的狀態。 該狀態因將罩蓋64開大，故導軌S2A、82B的搬送部之淸 除或修復及保養檢查容易進行。若完成第i段硬化裝置41 的淸掃，則採用與上述相反的動作，取下支持棒6後關閉 罩蓋64，即成爲圖3的實線所示的狀態。接著壓下把手67 則成爲圖2實線所示的狀態。第2段及第3段的硬化裝置 42、43也是同樣地進行。 10 ' 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ί 447 0 5 6 A7 __; _ B7_____ V. Description of the Invention (I) [Technical Field to which the Invention belongs] The present invention relates to a conveying device for hardening the packaging material on a tape. [Prior Art] As shown in FIG. 5 (a), a pin portion 2 is formed on a continuous tape i, and a semiconductor wafer 3 is bonded to the pin portion 2. That is, the tape 1 is a tape-shaped film in which the semiconductor wafer 3 is bonded in pitch units. As shown in FIG. 5 (b), the tape 1 is a dripping device using a sealing material, and a sealing material 4 made of resin or the like for element protection is coated on the pin portion 2. Next, a curing device is used. Drying of the packaging material 4. Although not shown in the drawings, sprocket holes for pitch transfer are formed at equal intervals on both sides of the tape 1. In the hardening device, the organic matter generated by the packaging material is vaporized, and the dust generated during the transport of the tape will adhere to the guide rails on both sides of the tape. Therefore, it must be regularly cleaned and maintained. . [Problems to be Solved by the Invention] The tape conveyance in the curing device is carried in a tunnel whose tape conveyance direction is open, and a heater or the like is arranged close to the tape. Therefore, it is difficult to perform maintenance such as sweeping during the tape conveying state. Moreover, when certain troubles occur during the tape conveying, the device must be stopped and the tape is pulled out of the guide groove of the guide rail. . However, since the conventional guide groove is continuous, it is difficult to remove and install the guide groove. A first object of the present invention is to provide a conveying device for curing a sealing material which is easy to perform warranty. The second problem of the present invention is to provide warranty and guide the guide of the tape! 3 ------------- (Please read the precautions on the back before filling this page) China National Standard (CNS) A4 specification (210 X 297 mm) 447056 A7 ___B7____ 5. Description of the invention (l). A transport device for hardening of packaging materials that is easy to disassemble and reel. [Means for Solving the Problem] The first embodiment of the present invention to solve the above-mentioned problem, the packaging material curing conveying device includes a loading section having a tape supply reel, and the reel is wound with a bonded semiconductor wafer. A tape; a dripping part of a packaging material having a dropping device capable of dripping a packaging material such as a resin on a component part of the tape supplied by the loading section; a hardening part having a hardening device which enables the packaging The sealing material dripped from the lower part of the material is dried; and the unloading part is provided with a take-up reel, and the reel can take up the reel after the sealing material is dried by the hardening part; the hardening device is provided with: A pair of guide rails on both sides of the tape, a heater capable of drying the packaging material, a hardened body that is open at the top and bottom of the tape conveying path, and has at least the aforementioned pair of guide rails inside, and can 'close the hardening A cover provided on the hardened body above the body so as to be able to be opened and closed freely; the hardened device is provided so as to be able to be pulled forward from a transport path of the tape. A second means of the present invention for solving the above-mentioned problem is that in the first means, the hardening section has a plurality of hardening devices, and an exit side of the hardening device and an inlet side of the next-stage hardening device are provided to enable the hardening device. The reversing members such as a sprocket that is reversed up and down are provided with each of the aforementioned hardening devices so that they can be individually pulled forward from the transport path of the reel. A third means of the present invention for solving the above-mentioned problems is that in the first means, the heater is provided on the hardened body or the cover so as to face the packaging material dropped on the tape. 4 5 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back before filling out this page) I.-Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 447056 A7 ___ B7 __'_ 5. Description of the invention (4) The fourth means of the present invention for solving the above-mentioned problems is that in the first means, the aforementioned pair of guide rails are provided with: a track body, and a part of the guide A guide member that is fixed to the upper surface of the rail body in a manner of winding the upper surface of the tape. A fifth means of the present invention for solving the above-mentioned problems is the above-mentioned fourth means, wherein the guide member is provided to be fixed to the track at a constant interval along the conveyance direction of the tape so as to guide the wide direction of the tape. A wide-direction guide portion of the main body and a vertical-direction guide portion provided above the wide-direction guide portion so as to be able to guide the vertical direction of the tape. [Embodiment of the invention] An embodiment of the present invention will be described with reference to Figs. 1 to 5. As shown in FIG. 1, the form of this embodiment is such that: the loading section 10 of the tape 1 shown in FIG. 5 (a) is supplied, and the packaging material 4 shown in FIG. 5 (b) is dropped into the package of the pin section 2. The material dropping portion 30 is constituted by a hardened portion 40 that dries the packaging material 4, and a unloading portion 2 取 that winds up the tape 1. The loading section 10 is provided with a supply roll 12 for a reel after the protective tape 11 is superposed on the reel 1 shown in FIG. 5 (a), and a protective tape roll for winding the protective tape 11 is provided. Take the reel 13. The unloading section 20 is provided with a protective tape supply reel 22 with a protective tape 21 rolled back, and a tape with the protective tape 21 superimposed on the tape 1 after the drying of the sealing material 4 after the curing section 40 is completed, and then the tape is wound. Rolling reel 23. The protective tape take-up reel 13 and the take-up take-up reel 23 are respectively rotated in the directions of arrows A and B by drive mechanisms (not shown). The tape supply reel 12 and the protective tape supply reel 22 are also rotated in the directions of arrows by drive mechanisms (not shown). Also, 14 means take the tape! 5 -------------- OI — (Please read the notes on the back before filling in this page) ij_ -line. Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the consumer cooperatives The paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 447056 A7 ---- B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy A guide member 24 to the lower portion 30 of the packaging material is a guide member that indicates that the tape i is guided to the tape take-up reel 23. In the package #dripping portion 30, two dropping devices 31 and 32 each having a well-known structure are arranged at a pitch (element pitch) of the semiconductor wafer 3 shown in Fig. 5 (a). In the hardened portion 40, the three hardening devices 41, 42, 43 are arranged at regular intervals from the bottom to the top. A sprocket 44 (not shown) capable of engaging the sprocket hole of the tape 1 is provided on the exit side 41b of the hardening device 41 in the first stage and the inlet side 42a of the hardening device 42 in the second stage. Similarly, an exit side 42b of the hardening device 42 in the second stage and an entrance side 43a of the hardening device 43 in the third stage are also provided with a sprocket 45 capable of engaging a sprocket hole (not shown) of the tape 1. On the exit side 43b of the hardening device U in the third stage, a guide roller 46 capable of guiding the tape 丨 to the unloading section 20 is provided. The sprocket wheels 44'45 are rotated in the directions of arrows C and D by drive mechanisms (not shown). As shown in Figs. 1 to 3, on the rear panel 50 of the device, guide rails S1 that can individually guide the hardening devices 4 丨, 42, 43 are arranged so as to face the front of the device. Insert the sliding seat 52 on the guide rail 51 so that it can slide freely. 'Fix the substrates of the hardening devices 41, 42, 43 on the sliding seat 52. The hardening devices 41, 42, 43 are as shown in Figs. 2 and 3. Consists of approximately the same structure. The curing devices 41, 42, 43 are composed of a substrate 60, a rear panel 61, and a front panel 62, and a curing body 63 'and a cover 64. When the cover M is closed as shown by the solid line, the tunnel i is formed in an open tunnel in the conveying direction. The cover 64 is rotatably coupled to the rear panel 61 by a hinge 65. On the front of the substrate 60, there is a 6 4 for hardening (please read the precautions on the back before filling this page) 〇 --- Order --------- Line! .I · 1 nn I nnnn ϋ ϋ n-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 447 0 5 6 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (5) A handle 66 that moves the devices 41, 42, 43 along the guide rail 51. A handle 67 for opening and closing the cover 64 is also provided in front of the cover 64. A support rod holding plate 70 is fixed to the substrate 60 on the front panel 62 side inside the hardened body 63, and the support rod holding plate Two bearings 71 and 72 are fixed on the 70. In addition, due to the inconvenience of the figure, only the bearing 71 on one side is shown in FIG. 2, and the bearing 72 on the other side is shown in FIG. The joints 73 and 74 are inserted into the bearings 71 and 72 so that they can rotate freely in any direction, and the supporting rods 75 and 76 are fixed on the joints 73 and 74. A support rod engaging plate 77 is fixed on the inner side of the cover 64, and an engaging hole 77a is formed on the support rod engaging plate 77 for engaging the front ends of the support rods 75 and 76. Therefore, the front ends of the support rods 75 and 76 are folded. It is bent so that it can engage with the engaging hole 77a. The lengths of the support rods 75 and 76 are different from those shown in Figs. 2 and 3. In the use state shown in Fig. 2, the open state of the cover 64 is restricted. As shown in FIG. 3, when the hardening device 41 is pulled out, the cover 64 can be fully opened. Therefore, the length of the support rod 75 is shorter than the length of the support rod 76. As shown in FIG. 2, a gas supply joint 80 is fixed to the cover 64; the gas supply joint 80 prevents oxidation of the coil 1 and the like of the object to be heated in the tunnel formed by the hardened body 63 and the cover 64. A pipe 81 for supplying the preheated gas is fixed. The gas supply joint 80 is connected to a gas supply source (not shown) through a pipe (not shown). A pair of guide rails 82A, 82B are arranged inside the hardened body 63 so as to guide both sides of the tape 1 so as to face each other. The guide rails 82A and 82B are composed of: the rail bodies 83A and 83B, and the moving along the reel 1 7 -------------- ΛγI (Please read the precautions on the back before filling in this Page) Ή. --- line · ΙΝ) ^-'The scale is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 447056 B7 V. Description of the invention (t) A plurality of guide members 84A and 84B whose directions are fixed to the upper surfaces are configured. The guide members 84A and 84B are composed of shaft portions 85A and MB 'constituting a true direction guide capable of guiding the width 1 of the tape 1 and flange portions 86A and 86B constituting a guide capable of guiding the upper and lower directions of the tape 1. Composed of. The rail bodies 83A and 83B are fixed to the rail support plates WA and 87B at both ends in the longitudinal direction, as shown in Fig. 2, respectively. The rail support plates WA and MB are fixed to the base plate 60 via the pillars 88A and δδB. In the hardening devices 41 and 43 of the first and third steps, the heater 90 is fixed to the cover 64 via the heater support plate 91. In the hardening device 42 of the second stage, the heater 90 is fixed to the base plate 60 via a heater support plate 91. Therefore, in the hardening devices 41 and 43 of the first and third steps and the hardening device 42 of the second step, the reason why the heater 90 is arranged differently is as follows. Since the heater 90 is used to dry the packaging material 4 shown in Fig. 5 (b), the heater 90 is most effectively provided with the opposing packaging material. In the hardening device 41 of the first stage, as shown in FIG. 5 (b), the tape I is transported with the packaging material 4 on the upper side, so that the heater 90 is attached to the cover 64. In the hardening device 42 in the second stage, the reel 1 is reversed up and down by a sprocket 44 shown in Fig. 1 and then conveyed. That is, since the sealing material is on the lower side, the heater 90 is mounted on the substrate 60. In the hardening device 43 in the third stage, since the reel 1 is transported in the same state as the hardening device 41 in the first stage, the heater 90 is attached to the cover 64. Next, the role will be explained. If the reel supply reel U of the loading section 10 is turned in the direction of the arrow, the protective tape 11 and the reel 1 will be supplied from the reel 8 4 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) nn -line ΙΌ ----------------------- 447056 A7 _____B7_ ______ V. Description of the invention (' Ί) Reel 12 sends out. If the protective tape take-up reel 13 rotates in the direction of arrow A, the protective tape 11 sent from the tape supply reel 12 will be wound on the protective tape take-up reel I3, and the tape 1 will sag from the tape supply reel 12. The rotation of the protection tape take-up reel 13 is controlled so that the amount of sag of the take-up tape 1 is within a certain range. When the sprockets 44, 45 of the hardened portion 40 are rotated, the reel 1 is transported to the unloading portion 20 through the hardening devices 41, 42, 4; 3. The dripping devices 31 and 32 of the dropping portion 30 of the packaging material are arranged at intervals of one element pitch of the semiconductor wafer 3 shown in FIG. 5 (a), so the sprockets 44 and 45 are at two pitches of the semiconductor wafer 3. , 2 pitches rotate intermittently. When the position of the leg portion 2 shown in Fig. 5 (a) is directly below the dropping devices 31 and 32, the packaging material 4 is dropped and applied from the dropping devices 31 and 32 as shown in Fig. 5 (b). When the reel 1 is transported to the curing section 40, the sealing material 4 is dried by the curing devices 44, 42, 43. In the unloading section 20, the rotation of the take-up reel 23 is controlled so that the amount of sag of the take-up tape 1 is within a certain range. When the protective tape supply reel 22 is turned in the direction of the arrow, the protective tape 21 is fed out. Next, if the take-up reel 23 is turned in the direction of arrow B, the protective tape 21 is superposed on the take-up reel 1 and then wound on the take-up reel 23. During the conveyance of the reel 1, certain failures occur in the hardening devices 41, 42, 43. For example, when the conveyance of the reel 1 is not smooth, the device will be stopped. Next, as shown in FIG. 2, if the handle 67 is lifted upward, the cover 64 will be opened with the hinge 65 as the center, and the support rod 75 is supported and the front end of the support rod 75 is inserted into the support rod engaging plate 77. Engagement hole 77a. 9 4 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the notes on the back before filling out this page) is. Line · Ministry of Economic Affairs, Intellectual Property Bureau, Employee Consumer Cooperatives, Printing Ministry of Economic Affairs Printed by the Intellectual Property Bureau's Consumer Cooperatives 447056 A7 ___ B7______ 5. Description of the Invention (β) With this, the cover 64 is kept open as shown by the 2-point chain line. That is, the support rod 75 is used in the case where the hardening devices 41, 42, 43 are not pulled to the front of the device. Therefore, in order to eliminate the transport failure of the reel 1, when the reel 1 is pulled out from the rail bodies 83A, 83B, It is only necessary to remove the tape 1 from the guide members 84A and 84B, and therefore it is easy to take out the tape 1 from the rail bodies 83A and 83B. In addition, after the take-up tape is pulled out and processed appropriately, the take-up tape 1 can be inserted into the guide members 84A and 84B, so that the take-up tape 1 can be easily returned to the guide rails 82A and 82B. The hardening devices 42, 43 in the second and third steps are also performed in the same manner. In addition, when the hardening device 41, 42, 43 is periodically cleaned or a major failure occurs, if the reel.1 is not installed on the guide rails 82A, 82B, if the handle 66 is pulled toward the front of the device, as shown in FIG. 3 The slide 52 shown will move along the guide rail 51 and move the hardening device 41 to the front of the device. Then, the handle 67 is lifted up, the support rod 76 is supported, and the front end of the support rod 76 is inserted into the engaging hole 77a of the Kyoko rod engaging plate 77. That is, the support rod 76 is a case where the hardening device 41, 42, 43 is pulled to the front of the device by tossing it. As a result, the cover 64 is kept open as shown by the two-dot chain line. In this state, since the cover 64 is opened, the removal of the conveying sections of the guide rails S2A and 82B, repair, maintenance and inspection can be easily performed. When the sweeping of the i-th stage hardening device 41 is completed, the operation opposite to the above is adopted, and the cover 64 is closed after the support rod 6 is removed, and the state shown by the solid line in FIG. 3 is obtained. Next, when the handle 67 is depressed, the state shown by the solid line in FIG. 2 is obtained. The hardening devices 42, 43 in the second and third steps are also performed in the same manner. 10 'This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)
.SJ --線· 447 0 5 6 A7 _B7 _ 五、發明說明（1 ) 【發明之效果】 依據本發明的第1〜第3手段，藉由拉出硬化裝置並 打開罩蓋，可容易地進行保修。依據本發明的第4及第5 手段，保修及對引導捲帶的導軌進行捲帶的拆裝容易進行 〇 【圖式之簡單說明】 圖1係顯示本發明的封裝材硬化用搬送裝置的一實施 形態的槪略構成前視圖。 圖2係圖1的E — E線截面圖。 圖3係將硬化裝置拉到前方的狀態之截面圖。 圖4係顯示硬化裝置的導軌，（a)是立體圖，（b)是從搬 送方向視的圖3 圖5(a)是已接合半導體晶片的捲帶之截面圖，（b)是已 塗布封裝材的捲帶之截面圖。 -------------3JI (請先間讀背面之注意事項再填寫本頁) 訂. β. 經濟部智慧財產局員工消費合作社印製 【符諕說明】 1 捲帶 2 接腳部 3 半導體晶片 4 封裝材 10 裝載部 12 捲帶供給捲軸 20 卸載部 23 捲帶捲取捲軸 30 封裝材滴下部 11 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 447056 A7 B7 五、發明說明（ 31 ' 32 40 41、42 44、45 51 52 63 64 65 75、76 ΊΊ 82A、8 83A、83B 84A、84B 85A ' 85B 86A > 86B 90 滴下裝置 硬化部 43硬化裝置 鏈輪 導軌 滑座 硬化本體 罩蓋 鉸鍊 支持棒 支持棒卡合板 導軌 軌道本體 引導構件 軸部 凸緣部 加熱器 (請先閲讀背面之it意事項再填寫本頁) 訂·_ •線. 經濟部智慧財產局員_工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐）.SJ-line · 447 0 5 6 A7 _B7 _ V. Description of the invention (1) [Effects of the invention] According to the first to third means of the present invention, by pulling out the hardening device and opening the cover, it is easy to Make a warranty. According to the fourth and fifth means of the present invention, it is easy to perform maintenance and disassembly of the tape guide rails. [Brief Description of the Drawings] FIG. 1 shows a first example of a conveying device for curing a sealing material of the present invention. The outline of the embodiment forms a front view. FIG. 2 is a sectional view taken along the line E-E in FIG. 1. Fig. 3 is a cross-sectional view of a state in which the curing device is pulled forward. Fig. 4 shows a guide rail of the curing device, (a) is a perspective view, (b) is a view from a conveying direction, and Fig. 5 (a) is a cross-sectional view of a tape of a bonded semiconductor wafer, and (b) is a coated package. A cross-sectional view of the roll of material. ------------- 3JI (Please read the precautions on the back before filling this page) Order. Β. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs [Description of Symbols] 1 roll 2 Pins 3 Semiconductor wafers 4 Packaging material 10 Loading section 12 Tape supply reel 20 Unloading section 23 Tape winding reel 30 Sealing material dripping part 11 This paper standard applies to China National Standard (CNS) A4 (210 X 297 male) 447056 A7 B7 V. Description of the invention (31 '32 40 41, 42 44, 45 51 52 63 64 65 75, 76 ΊΊ 82A, 8 83A, 83B 84A, 84B 85A' 85B 86A > 86B 90 Hardening part of the dripping device 43 hardening device sprocket guide slide hardened body cover hinge support rod support rod clamp plate guide rail guide body guide member shaft portion flange portion heater (please read this page on the back before filling in this page) Order · _ • Thread Member of the Bureau of Intellectual Property, Ministry of Economic Affairs_Industrial and Consumer Cooperatives printed this paper in accordance with China National Standard (CNS) A4 (210 x 297 mm)