TW444126B - IC sucking device, and IC porting device and IC testing device using the sucking device - Google Patents

Abstract

The present invention aims to provide an IC sucking device that can combine its composition components in small size and has good motion response. The solution of the present invention is to integrally combine a sucking disk (1051), a cylinder (1052), a cylinder control valve (1053), a vacuum generator (1054), a supply valve (1055), a destructive valve (1056), and a pressure detector (1057) as one to form an IC sucking device (105d).

Description

444126 V. Description of the invention (i) '' ------- [Technical field to which the invention belongs] The present invention relates to various electronic components used in testing semiconductor integrated circuit elements (hereinafter referred to as "ICs") The used 1C adsorption device of the old shell, and the use of the Ic adsorption handling device and IC test device, especially the action:: adsorption device, IC handling device using the 1C adsorption device [prior art 】 The handler is called the handler (iIC). Most of the tested pallets are transported to the processing station for electrical contact with the test connector, and tested at the 1C test device (the following tester). Then, Thai Carry Out Test 4 · Receive the method based on the test results, the so-called good product and bad product category h transfer trays, into the past processing, after the eye test 1C tray (below β Killing, showing the IC before the containment test or the T-tray used in the tester for cyclical use) There are also types that deal with this type of processing cry, in: the second is called the test tray) ' Perform between pallets: press the specified pallet and test 1C within the period after the test: connect the K pallet to the test :::: test 1. Reprinted or tested 1C adsorption device is by adsorption: J set: IC adsorption device x. In the past, the vacuum generator, the suction cup that controls the straight line, the control of the suction force (//) that provided this suction cup; and the actuator that opens and closes the suction force of the device, such as 2 (Cylinder) 444126 Five 'invention description (2) and control for driving actuators [Problems to be solved by the invention] However, in the past, the IC actuator was installed in a control valve for the actuator, for example, the air generator and its control The valve must also have a hose connecting the actuator to its control unit. Therefore, it is necessary to respond to the control signal because the return of these zero hoses becomes difficult and it is necessary to perform the operation. Consisting of valve control. ] In the suction device, the front end is equipped with a suction cup to the bottom of the X γ conveying device, and the drive is installed at a place other than the bottom, and it is really installed in other parts, so the connection of the page valve must be soft Problems will occur with the distance between the tube and the distance between the suction cup and the vacuum pump's driving part and the control valve. The installation position of the piece, the aforementioned suction cup and actuator connected between them are through X — Υ The carrying device needs to have a length that can cover its action range. The present invention is an object improved in view of the aforementioned problems in the prior art. The components are summarized together in small size, and the purpose is to improve the 1C sorption device with good responsiveness and use the device (1: conveying device and IC test device. [Means to solve the problem] (1) In order to achieve the above Purpose 'The 1C suction device according to the present invention is characterized by at least a suction cup that is held and held by the test 1C, an actuator that moves the suction cup, and suction control that opens and closes the suction force of the suction cup. The valves are integrated and integrated. In the 1C adsorption device of the present invention, the suction cup, the actuator, and the adsorption control valve system are integrated and combined.

Page 5 444126 V. Description of the invention (3) On the bottom of the X-Y handling device, the suction function parts of the IC are summarized together, and the hose connected to the suction cup and the suction control valve can be shortened. Can improve its action response. The integrated combination described in the present invention not only means that the suction cup, the actuator, and the adsorption control cymbal are combined on one part, but also includes the aforementioned components are combined and installed by using a connection mechanism such as a screw or a screw. Means. Therefore, in the case where the suction strokes have different moving strokes and the same suction force, a part of the suction device can be widely used by exchanging the suction cups and the actuators. In addition, the suction control valve according to the present invention is a control valve that releases suction while supplying suction force ^ to the suction cup. In addition to being constituted by the supply valve alone, it can also be read by the supply and destruction. Make up in combination. In the case where the suction control valve is constituted by a control valve alone, the supply room is operated when the suction power is turned on. When the suction power is turned off, the air pressure that is the source of the suction power is released to the atmosphere. On the other hand, if you want to mention the suction force of the tested IC and the speed of release, or if it is tested, [c is a lighter ^ occasion, the suction can be closed forcibly by adding a destruction valve. ^ (2) Although the above There is no particular limitation in the invention, such as

Like the 1C adsorption device described in the second item of the scope, the detectors that detect the adsorption force of === can be integrated together.囍. The suction cup's detectors are combined in an integrated way to read the suction force. Because the suction force depends on the suction cup, the detection through the debt tester is accurate. $ = ”The position is tight (3) In the aforementioned invention, the aforementioned Suction will increase.

444 12 6 V. Description of the invention ⑷ Although a lifetime device can share equipment outside the device, but when each device is equipped with a suction force generator that enables several devices to be used in combination, it is best to use the suction force generator They are integrated in an integrated manner as in the 10 adsorption device described in item 3 of the scope of patent application. In this way, the IC's suction function parts can be summarized in a small size, which can shorten the connection of the suction force generator, the suction cup, and the suction control. The t tube or the fluid path can improve the response of the action. κ C4) In the aforementioned invention, the actuator for moving the aforementioned sucker may use any of an electric type, an electromagnetic type, and a fluid pressure type. When using the% synchronizing cylinder of the breast milk pressure cylinder, 'the π adsorption device t as described in item 4 of the patent scope of the patent, it is better to integrate the red suppression valve that controls the driving of the fluid pressure cylinder as a whole. . 1 When a fluid pressure cylinder is used as an actuator, although a cylinder control valve for controlling the driving of the fluid pressure cylinder is necessary, since the ^ = control valve is integrated as a whole, the 1C suction function parts can be In addition to the small size, the hose or fluid path connecting the fluid pressure cylinder and the cylinder control valve can be shortened, and the action response of the fluid pressure cylinder can be improved. (5) Although not particularly limited, when a fluid pressure cylinder is used as an actuator, the "suction

ίΪ mining Si; the control method of the pressure cylinder is based on the differential pressure control method.

Sl | rr „Differential pressure control method, not only the cylinder control valve becomes small, but also can achieve the miniaturization of the 1C adsorption device. The main operation and profit model (around 6 ^ ί ί is not particularly limited in the aforementioned invention, please beside Specially, the 1C suction device order, multiple electrical signal wiring 444126 5. Invention description (5) There are at least multiple lightning repair devices and suction control rooms "13 Eryou line is connected to-where. For Actuator of the Institute of Drilling " ^ 1 ", the electrical signal wiring of the debt tester is composed of a plurality of cables. The method of connection can be shared, and the number of electrical signal wirings (including ::: number) can be reduced. Outside this field, it is also possible to connect a plurality of thunder rhinestones with wiring to one location and be connected to one. However, if you connect several electrical signal wirings among the wirings at one place, you can provide all wirings of the gas signal wirings. Although in the aforementioned invention, the 2C 1C adsorption device is included. The eighth range of interest Item 10 of Suction Suck j Be = Limited, the application specifically describes Suction Control And the above-mentioned detectors' escape the actuator and the front wiring. 彳 ° The wiring 'is set as the internal wiring through the actuator and suction suppression, and is determined as the internal wiring method' IC ^ = and The signal wiring of the detector is set to be summarized. The functional parts of the detector can be added in a smaller size. (8) Although in the aforementioned invention, the suction range is described in item 9 above, it should be installed with suction. The generator and the aforementioned fluid pressure ^ have a fluid path for the front fluid pressure cylinder inside, but in the case of the suction force generator and combination, the functional parts integrated by the% f suction functional parts inside the unit can be more: Type ::::: Body path method, 1C adsorption (9) In the aforementioned 1 (;: adsorption 1C adsorption device is directed at least -w ϋ 'also ϋ as a driving device combination that moves the second before The later ic 444126 V. Description of the invention (6) The use of the carrying device can also be combined in the IC test device for carrying out the test after carrying the test IC to the test connector and classifying the test jc according to the information of the test result. Use. On this occasion The 1C adsorption device of the present invention is suitable for an IC test device with a storage chamber type, an IC test device with a heating plate type, and an I c test device that performs a test when the test is placed on a test tray. Various IC test devices that perform the test 1C and 1C sorption devices directly and carry out the test _ IC test devices of test type, etc. In addition, 'carrying parts, non-carrying parts, or test connectors, etc.' can be applied to IC testing Various IC adsorption devices in the device. [Embodiments of the invention] The embodiments of the present invention will be described below with reference to the drawings. Fig. 1 is a plan view of an embodiment of an IC test device suitable for the 1C adsorption device according to the present invention. Fig. 2 is a cross-sectional view taken along line nJ in Fig. 1, and Fig. 3 is a detailed cross-sectional view showing the contact portion of the test joint in Fig. 2 (fig.!) The cross-section circle along the line II-III is shown in Figure 4). Figure 4 is the plane of the socket guide shown in Figure 3. The IC test device consists of processor i 0 卩 test connector 20 and tester check Ϊ connector 20 and tester. Between 30, it is electrically charged with m τ. The test before the test on the tray 10 2 mounted on the processor 10 is pushed through the χ-γ transfer device 104 and 105 into the test head. After the test connector 2 ° and the cable 40 performs the test panel 1c of the test, the test IC is stored in the classification according to the test results

Page 9 444126 V. Description of the invention (7) '' ------- The processor 10 is provided with a substrate 109, and the substrate 109 is also provided with X-Y handling devices 104 and 105 for test 1C. In addition, a mouth portion 110 ′ is formed on the substrate 10. As shown in FIG. 2, the test portion 1C passes through the opening portion 1 丨 and a press-in contact is provided to the test connector 2 at the rear end of the processor 10. Contact ^ 部 2 01 ° The substrate 109 of the processor 10 is provided with two sets of XY handling devices 104 and 105. Among them, the χ-γ conveying device 1 〇4 is a 1C suction device i〇4d fixed to the fixed bottom 104c through guide rails i 04a and i〇4b provided along the X-axis direction and the Y-axis direction, respectively. The areas from the sorting tray 103, the supply tray 102, the empty tray, and the heating plate 106 to the two buffer sections 108 and 108 are movably configured. In addition, the suction plate 1041 of the 1C suction device i04d can move through the z-axis actuator (equivalent to the cylinder 1 052 shown in Fig. 3) in the Z-axis direction, so as to move up and down. Then, through the two 1C adsorption devices provided on the fixed base 104d, suction, transportation, and release of two test ICs can be performed at one time. In this regard, the XY conveying device 〇〇5 is fixed to the fixed bottom 10 5c 1C suction device i〇5d through the guide rails 105a and i〇5b provided along the X-axis direction and the Y-axis direction, respectively. The buffer section 108 is movably formed in the area between the test connector and the test connector. In addition, the suction cup 1051 of the IC suction device 105d can be moved in the Z-axis direction (that is, the vertical direction) through a cylinder 1052 (Z-axis actuator) shown in FIG. 3 (not shown). Then, through the two 1C adsorption devices installed on the fixed base 105d, suction, transportation, and release of two test ICs can be performed at one time. The two buffer portions 108 and 108 are transmitted through the guide rail 108a and not shown.

Page 10 4441 2 6 V. Description of the invention (8) The actuator moves back and forth between the operation fields of the two X-Y handling devices 104 and 105. In Fig. 1, the upper buffer section 丨 0 8 is moved from the heating plate 丨 0 6 to be tested 丨 c to the test joint 2 〇, and the lower buffer zone 108 is to be transferred. At the end of the test at the test joint 20, the test jc sends out the job. With the existence of the two buffer portions, the two X-Y transfer devices 104 and 105 can operate simultaneously without interference. The operation field of the XY conveying device 104 is provided with a supply tray 1 equipped with a test IC to be tested next. 02. The I c after the test is classified according to the type corresponding to the test result, and the four classifications are stored. The tray 丨 〇3 and the empty tray 101 'are further provided with a heating plate 106 at a position close to the buffer portion 108. The heating plate 106 may be a metal plate formed with a plurality of recessed portions 1 06a where the test IC is dropped. The pre-test ic delivered from the supply tray is transferred to the recessed portion 106a by an XY transfer device. . The heating plate 106 is a heating source for applying the defined thermal stress to the IC under test. After the test, c will be heated to the defined temperature at the heating plate 106, and then pass through one of the buffer portions 1 0 8 is pressed into the contact portion of the test joint 2 0. As shown in FIG. 3, a component-shaped ring 2 〇2 is electrically connected to the test connector 20 above the contact connector 201 (contact portion 201) through the test connector 20 and the cable 203. . This component-shaped ring 2 has a plurality of POGO PINs (POGO PIN: a movable pin that can be flexibly supported in the axial direction through a spring through a spring. The movable pin is provided by the aforementioned spring. The contact pin is fixed in the protruding direction), and a functional substrate 2 05 is provided at the p0G0 pIN204 to be in contact with the terminal. In addition, the functional substrate 20

Page 11 444 2 2

V. Description of the invention (9) The upper part is provided with two electrical connections 1 (: sockets 206, 206. Therefore, the contact pins (not shown) of [c socket 2 06] pass through the functional substrate 2) 〇5,? 〇 (? ()

Pi Ν204, the component-shaped ring 202 and the cable 20 3 are electrically connected to the body of the test connector 20. In other words, 'the two 1C sockets 206 are provided with socket guides 207 having two openings 207a and guide pins 207b as shown in Fig. 4, and are maintained in the IC suction device. The test IC of 1 〇5 d will be pressed into the IC socket 2 0 6 through the opening 2 0 7 of the socket guide 2, and the guide pins 207 b provided at the socket guide 2 〇 γ will be inserted separately. The guide hole 1051a formed on the suction cup 1051 of the ic suction device i05d is used to adjust the position of the test 1 (: and 1 (: socket 206) in this way. As shown in FIG. 3, The ic suction device i05d described in the present invention is controlled by the cylinder 1 that moves the suction cup 1051 that is held by the test 1C to be held up and down to control the driving of the cylinder 1 〇2. Valve 1 〇5 3. Vacuum generator 1054 that supplies suction force to suction cup 1051, supply valve 1 05 that controls the widening of the vacuum generator low and break valve 1 〇6, and detection of suction generated by the vacuum generator The forceful pressure detector 1057 and the like are configured in a unitary and integrated manner. The vacuum generator used in this embodiment 丨〇54 uses the so-called spray effect of the vacuum pump "introduces compressed air from the suction chamber into the narrow path" through the suction flow formed by the accompanying flow to create attraction. Therefore, the vacuum generator 1 054 An air hose 1058 for supplying compressed air to a factory or the like is connected above, and the compressed air is introduced into the vacuum generator to generate a suction hose 1054a connected to the suction cup 1051.

Page 12 4441 2 6 V. Description of the Invention (ίο) Attraction can attract the test IC. Also, the 'vacuum generator 1054 supplies suction force to the suction hose 1 05, that is, the suction cup 1 051, through the opening and closing of the contracted air supplied from the air hose 058. Therefore, 'supply valve 1 055 for guiding compressed air from an air hose to the suction chamber of a vacuum generator, and destruction valve 1 056 for discharging compressed air guided to the suction chamber of a vacuum generating system, etc. It is provided on a side portion of the vacuum generator 1054. In addition, in order to detect the attractive force generated by the vacuum generator 1054, a pressure detector 1057 is also installed in the vacuum generator side by side with the supply valve 1055 and the destruction valve 1056. On the other hand, the cylinder control valve 1 〇 5 3 that drives the control cylinder 1 〇 2 will be supplied. 丨 to a part of the compressed air supplied by the air hose 1 008 5, so that the cylinder 1 105 2 cylinder 1 〇52a will move forward and backward (here it is up and down). Here, the compressed air supplied from the air hose 1 058 is supplied to the aforementioned vacuum generator 1 54 and the cylinder control valve 1 053. Although the illustration is omitted, an air passage is formed for this purpose. The vacuum generator 1054 and the cylinder control valve 1053 are included. Fig. 5 is a circuit diagram of the air-pressure circuit of this embodiment. In the two-pressure circuit shown in the figure, the Η cylinder 1 0 5 2 is controlled in the same manner as that of the stomach. The so-called differential pressure control method means that the surface of the cylinder 1 052 5 a is set on the surface of the piston of the cylinder 052 and the opposite surface is compared. The phenomenon that the pressure area is small is that the cylinder 1052a is advanced by introducing compressed air of the same pressure to the surface of the piston. That is, as shown in the air compressor circuit diagram, only in the circle of the piston

Page 13 444126 V. Description of the invention (11) Compressed air is often introduced into the air inlet of the cylinder 1 052a end, so that when the cylinder 1052a advances, the air holes on the opposite side also introduce compressed air with the same pressure. . As a result, compared with the cylinder 1052a, the pressure area on the opposite side of the piston is increased only by the cylinder portion and the total pressure is increased, so that the cylinder 1052a will move forward. Also, "if the introduction of compressed air to the opposite end of the piston, V is clean", the compressed air introduction cylinder i52a passing through the cylinder end will move backward. In the case of adopting the cylinder of the differential pressure control method described above, the cylinder control valve 1053 may be a small-sized object, and thus the j c adsorption device of this embodiment is further miniaturized. However, "the operation control method of the cylinder 1052 according to the present invention is not limited to the method shown in Fig. 5" and the general operation control method shown in Fig. 6 is adopted without any problem. In FIG. 6, parts common to those in FIG. 5 are indicated by the same symbols. On the other hand, the signal wiring for the cylinder control valve 1 053, the supply valve 1 055, and the destruction valve 1 056 and the output signal wiring 1059 from the pressure sensor are connected to the IC suction device 1 as shown in the figure. 5 (1), so the front is the internal wiring inside the module. In this case, some or all of the internal wiring can use objects such as printed wiring boards. Next, each operation will be described. Mounted on the processor 丨〇The supply tray 丨 〇2 is tested 丨 c is sucked and maintained by the XY conveying device and then transferred to the heating plate〗 〇The recessed portion 106a is placed here only for the defined time. Yes, the temperature rises to the defined temperature, so the test 1C before the temperature rise is transferred from the supply tray 102 to the heating plate 106, the χ_γ transfer device 104

Page 14 44412 6 V. Description of the invention (12) After putting down the test IC, place the job K placed on the heating plate 丨 at the temperature defined by the original suction and maintain the transfer ^ 2 1 at the stop = the right end of the transfer Up to this point, it was held by the χ_γ transfer device 10.5 (>) and held by suction, as shown in FIG. 3, and pressed into contact with the test connector 20iic socket 206 as shown in FIG. 3 through the substrate. Here, 1C of this embodiment is sucked, and the device i05d is composed of a suction cup 1051, a cylinder 1 052, a cylinder control room 1 0 53, a vacuum generator 1054, a supply valve 1055 and a destruction valve 10. 5, 6, and the pressure detector 1 〇 5 7 and other components are integrated in a combination of components to form a structure, so when installed on the χ_γ transfer device 丨 05 fixed bottom 105c '1C adsorption function parts can be miniaturized Ground " Add: In addition, the distance between the air hose 1 0 5 8 and the cylinder control valve 0 5 3 for supplying compressed air, the distance between the air tube 1058 and the vacuum generator, and the vacuum generation The distance between the device and the suction cup can be shortened respectively, so for the input by the signal wiring 1059 The input signal can improve the responsiveness of the operation of the cylinder 1052 and the vacuum generator 1 54. In the 1C suction device 105d of the present embodiment, the suction cup 1051 'cylinder 10 52, the cylinder control valve 1053, and the vacuum generator 1054, supply valve 1055, destruction valve 1 0 5 6 and pressure detector 1 0 5 7 are combined by screws or screws, so for example, when you want to change the stroke of the cylinder 1 0 5 2 only This cylinder can be exchanged, and other parts can be shared. In addition, air hoses or electrical wiring are strongly formed inside, so IC suction function parts can be reduced in size.

P.15 ϊ 444126 V. Description of the invention (13) The above-mentioned embodiment is for easy understanding of the description of the present invention, and is not a description of the present invention. Therefore, each of the elements described in the foregoing embodiments is meant to include all design changes or equivalent items that belong to the technical scope of the present invention. In the foregoing embodiment, although the κ adsorption device of the present invention is applied to the X-Y transfer device 105 of the test joint 20, the ^ test device of the foregoing embodiment is also applicable to the χ ~ γ transfer device 104. The actuator that moves the suction cup 1051 up and down is not limited to the cylinder 052, and an actuator using an electric motor as a source may be used. In addition, the vacuum generator 1054 is not a κ

= 箸 装置 requisite 的 物 #, where a vacuum source is provided externally, such as Ivy, only the supply valve 1055 and the destruction valve; [〇56 can be integrated into the device [effect of the invention] 1 1 ° from the foregoing In view of the present invention, ic is summarized, and the driving unit and the control unit can improve the operation response of the driving unit. [Simplified description of the drawing] The distance between the valve and the like that can reduce the size of the suction functional parts can be shortened. Fig. 1 is a plan view of an application mode of an ic adsorption device suitable for the present invention. The actual I C test device Figure 2 is a cross-sectional view taken along line I in Figure 1. Fig. 3 is a detailed sectional view of the contact portion of the test connector of Fig. 2. Fig. 4 is a plan view of the socket guide of Fig. 3.

Fig. 5 is an empty circuit diagram of the IC suction device of the present invention. Circuit implementation type Other circuit implementation Figure 6 shows the air pressure of the 1C adsorption device of the present invention 4441

5. Description of the invention (14) Circuit diagram. [Description of Symbols 1 ~ ϊc test device; 1〇 ~ feed tray; 1〇3 ~ sorting tray glassware; 101 ~ empty tray; 102 ~ for 104 ~ χ_Υ transport device; 105 ~ XY transfer Vibration set; 104a ~ Guide; i04b ~ Guide ~ Guide ~ Guide; i04c ~ Fixed bottom; 105c ~ Fixed bottom; 104d ~ IC suction device; USd ~ ic suction device; 105b suction cup 1 0 52 ~ cylinder (actuator); 1 053 ~ red control valve; 1054 ~ vacuum generator; 1055 ~ supply valve (suction force 1 2nd system); 1G56 ~ break valve (suction force control) Valve); 1 057 ~ pressure detection j.,-., N 〇 ^ '1058 ~ air hose; 1059 ~ signal wiring; 106 ~ heating. ", Take, 1 ϋ 8 ~ Μ also *,", , 'Head; 201 ~ Heng Lin; 109 ~ substrate; 110 ~ opening; 20 ~ test connection-_; 30 ~ tester; 40 ~ cable.

Page 17

Claims (1)

--——- _ VI. Patent application scope L ~ 1C The combination of the aforementioned suction cups that are maintained by adsorption. 2. If you apply for the combination of the suction cups mentioned above. 3. If applying for the aforementioned suction cups supply combination. 4‘If you apply for the aforementioned suction cup supply combination. 5. If applied, the actuator is controlled by a driven cylinder. 6. If applied, the fluid pressure cylinder. 7. If applied, the actuator is controlled by 8. If applied, the number of electrical signals is in one place. Suction device suction cup, make the patented range of the force, patented the range of the suction force, the patented range of the suction force, and the fluid pressure. This fluid is expanded by a patented range by pressing the patented range of the electromagnetic range of the patented electromagnetic cylinder. Its characteristics The reason is that at least the actuator for moving the IC under test and the suction cup and the suction control valve for opening and closing are integrated with the 1C suction device described in item 1, wherein the newly detected detector The 1C adsorption device described in the first item is integrated, and the ° and the force generator are integrated. The ic adsorption device described in the second item is integrated, and the suction force generator is further integrated. The 1C adsorption device described in the item Ϊ of the group is integrated, which is composed of the combination of the front pressure rainbow and the control of the fluid pressure cylinder. The 1C adsorption device described in item 5 is controlled by a difference control circuit, and the 1C adsorption device described in item 1 is configured. The 1C suction device described in item 1, among which the front of which is at least a plurality of electrical signal wirings are connected 9. As described in claim 2 of the ic absorption device of the patent scope, where Page 18 444 12 6 VI. Scope of patent application The signal wiring of the aforementioned actuator, the aforementioned suction control valve and the aforementioned detector is set as internal wiring. 10. The IC adsorption device according to item 4 of the scope of patent application, wherein the fluid path to the aforementioned adsorption force generator is formed inside. 11. The IC suction device according to item 5 of the scope of the patent application, wherein a fluid path to the aforementioned fluid pressure cylinder is formed inside. 12. A 1C handling device, including: an IC suction device, the one described in the patent application scope 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or 11; and a driving device , So that the IC suction device is moved in at least one axis direction. 1 3. —An IC test device that carries the test IC to the test connector and performs the test, and classifies the test IC according to the information of the test result. It is characterized by: 1C adsorption device according to item 4, 4, 5, 6, 7, 8, or 9. Page 19