JPH11214893A - Suction transferring device for electronic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a suction transferring device for an electronic component with the weight of its suction head for sucking an electronic component made lighter. SOLUTION: A suction transferring device 25 set on a mounting head universally movable in a horizontal direction is integrally formed and lightened by an air pressure cylinder 31 driving a piston rod 34 having a suction tool 26 upward and downward, a vacuum generating block 32 built in by an ejector, an electromagnetic valve 39 for piston operation, an electromagnetic valve 56 operating the ejector, and an electromagnetic valve 56 for breaking vacuum. A pressure sensor 60 detecting a pressure of the suction tool 26 is set on the suction transferring device 25 and a signal from the pressure sensor 60 is sent to a sensor controller prepared outside. This makes it possible to detect outside if the electronic component is drawn by the suction tool 26. The absence of a pressure switch on the suction transferring device 25 lightens the suction transferring device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction and transfer device for an electronic component, which sucks and transfers an electronic component such as an IC to a member to be assembled such as an inspection board or a mounting board.

[0002]

2. Description of the Related Art ICs and LSs on which a semiconductor integrated circuit is formed
A large number of electronic components such as I are mounted on an inspection board, and each electronic component is inspected to determine whether it has a predetermined function. At that time, the electronic components arranged on the trays and the like are mounted on the inspection board by the transport device. Also, when electronic components are mounted on the mounting board, a plurality of types of electronic components are sequentially mounted on the mounting board in a predetermined order by using a transfer device.

[0003] Such a transport device includes an X direction and a Y direction.
A vertically movable suction device is provided on a transport head that is horizontally movable in two axial directions, and the transport head is moved to a predetermined position between the component supply stage and the inspection board. The suction tool is moved up and down.

[0004] A plurality of suction tools are provided in the transport head in accordance with the size of the components and the like, and a predetermined suction tool is moved up and down in accordance with the components to be transported by suction using a vacuum, that is, a negative pressure. When an electronic component is sucked to the suction device by supplying a vacuum to the suction device, the pressure sensor detects that the electronic component has been suctioned to the tip of the suction device. When the pressure in the flow path reaches a predetermined degree of vacuum, it is determined that the electronic component is held at the tip of the suction tool.

In such a transfer apparatus, how to move the transfer head quickly is an important problem to be solved. To move the transfer head quickly,
It is necessary to reduce the weight of the transfer head.

[0006]

The inventor made various studies to reduce the weight of the transport head in the transport device. A pneumatic cylinder is used in the transfer head to move the suction tool up and down, that is, to move in the Z-axis direction. In order to supply vacuum to the suction tool provided at the tip of the piston rod that moves up and down by this cylinder, The vacuum generator is attached to the transfer head. Therefore, how to reduce the weight of these structures is an important factor in reducing the weight of the transport head.

Further, a pressure switch which is activated when the pressure in the vacuum flow path in the suction tool reaches a predetermined pressure is incorporated in the transfer head. The weight of the pressure switch is also a major factor in increasing the weight of the transport head.

An object of the present invention is to make it possible to reduce the weight of a suction transfer device in a suction transfer device configured to suction and transfer an electronic component.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0010]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, an electronic component suction and transfer apparatus according to the present invention is provided along a mounting table having a component supply stage for accommodating a plurality of electronic components and a mounting stage for supporting a mounted member on which the electronic components are mounted. What is claimed is: 1. A suction / conveyance device for an electronic component having a mounting head which is movable in a horizontal direction, the device comprising a suction rod attached to the mounting head and having a suction tool for suctioning the electronic component at a tip thereof, and driving a piston rod in a vertical direction. A prism-shaped pneumatic cylinder, a vacuum generating block fixed to the pneumatic cylinder, and incorporating an ejector including a diffuser and a nozzle for supplying air thereto, and a vacuum generating block attached to an upper end of the pneumatic cylinder; Opening / closing an air supply passage communicating with an air supply port formed in the generation block controls vertical movement of the piston rod. A solenoid valve for operating a piston that is attached to the vacuum generating block, and a solenoid valve for ejector operation that controls the operation of the ejector by opening and closing an air supply passage communicating from the air supply port to the nozzle. A vacuum breaking electromagnetic valve attached to the vacuum generating block, which opens and closes a vacuum breaking path connected to a vacuum path guiding the vacuum generated by the ejector to the suction tool; and A plurality of suction transfer devices having a sensor for detecting pressure in a path are mounted on the transfer head, and the compressed air supplied from the air supply port in each of the suction transfer devices is supplied to the pneumatic cylinder and the ejector. The nozzle and the vacuum breaking path are commonly guided.

In the present invention, the suction transfer device is formed integrally with a pneumatic cylinder, a vacuum generating block, a solenoid valve for operating a piston, a solenoid valve for operating an ejector, and a solenoid valve for breaking a vacuum. Therefore, the weight of the suction transfer device can be reduced, and the mounting head can be moved quickly.
Thereby, the electronic component can be efficiently mounted on the mounted member.

The electronic component suction and conveyance device of the present invention has a sensor controller fixedly installed on the mounting table side, and a cable is connected to a predetermined number of the pressure sensors of the suction and conveyance device. A predetermined number of input terminals connected to the device controller, an output terminal connected to the device controller via a cable to output an output signal to the device controller, and a signal terminal for inputting / outputting a control signal between the device controller and the device controller And a pressure judging means for outputting a detection signal to the signal terminal when the pressure in the vacuum path becomes equal to or more than a predetermined negative pressure value by the pressure sensor, and inputting the predetermined negative pressure value. And a threshold value input means, wherein a pressure detection signal is transmitted to the device controller by the sensor controller fixedly installed away from the transport head. Characterized in that way the.

In the present invention, the signal from the pressure sensor provided in the suction transfer device is sent to a sensor controller provided separately from the suction transfer device via a cable, so that the suction transfer device is lightweight. Thus, the mounting head can be quickly moved, and the electronic component can be efficiently mounted on the object.

The threshold value input means is provided on the device controller side, and the device controller side can input a threshold value for each pressure sensor. This allows the user of the apparatus to concentrate and input the threshold value on the apparatus controller side from a position away from the suction conveyance apparatus.

The threshold input means is provided on a control panel of the sensor controller. By manual operation of a push button provided on the sensor controller, selection of a pressure sensor and pressure data of a threshold corresponding thereto are performed. Input can be made in decimal numbers, and each input value is displayed on a display unit such as an LED provided on the control panel. Since the input can be made on the control panel side, the operation of the suction conveyance device can be confirmed without operating the device controller, which is advantageous for maintenance and inspection.

Further, when the pressure sensor is connected to the input terminal, a voltage in a predetermined normal range corresponding to a negative pressure value is output to the A / D converter, and when the pressure sensor is not connected. Since the sensor controller is provided with a sensor connection detecting means for setting the voltage to 0 V, the operator can confirm whether or not a plurality of pressure sensors are connected to predetermined input terminals, and furthermore, a disconnection occurs. In this case, it is possible to confirm at which part the disconnection has occurred.

The input / output signal of the signal terminal is set to 8 bits, and a selected channel input of the pressure sensor, a read strobe signal thereof, and an error signal are connected to the control panel by two parallel connectors. As a result, wiring can be reduced.

[0019]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a schematic plan view showing a suction conveyance device according to an embodiment of the present invention. This suction device is used for automatically mounting an electronic component such as an IC placed on a component stage on an inspection board. A transport device is used. A predetermined number of electronic components mounted on the inspection board are automatically conveyed from this position and sent to the inspection stage.

This suction transfer device has a mounting table 11, and an inspection board 12 as a member to be mounted is loaded into a predetermined position of the mounting table 11 from, for example, the right side of FIG. To be carried out.

Two guide rails 13 extending in the X direction are laid on the mounting table 11, and a sliding block 14 slidably provided along each guide rail 13 has a guide extending in the Y direction. A rail 15 is attached. A transport head 16 is provided on the guide rail 15.
Are mounted so as to be slidable in the Y direction, and the transport head 16 is driven in the Y direction by a ball screw driven by a motor (not shown). The transport head 16 is configured such that each slide block 14 is driven in the X direction by a ball screw driven by a motor (not shown).

The mounting table 11 is provided with a plurality of component supply stages 23 for disposing electronic components such as ICs, and the same or different types of electronic components are wound around a tray or tape on each of the component supply stages 23. It is arranged in a state where it is placed.

A plurality of sets of suction transfer units 24 are attached to the transfer head 16, one of which is shown in FIG. 2 in an enlarged manner. One set of suction transfer units 24 includes eight suction transfer units. 25. 2 in FIG.
FIG. 3 is a cross-sectional view taken along line 3, and FIG. 4 is a diagram illustrating the internal structure of one suction transfer device 25 illustrated in FIG.

As shown in FIG. 3, an electronic component W such as an IC
1 is movable in the vertical direction, that is, the Z-axis direction. For example, when the electronic component at the position A in the component supply stage 23 in FIG. The transport head 16 is moved in the X-axis direction and the Y-axis direction in FIG.
The suction tool 26 is moved downward while the component is positioned directly above the position A of the component supply stage 23. As a result, the suction tool 26 comes into contact with the electronic component, and in this state, the electronic component is held by the suction tool by supplying a vacuum to the suction tool. In this state, while moving the suction tool upward, the transport head 16 is moved in the X-axis direction and the Y-axis direction to position the suction tool just above the position B. By moving the suction tool 26 downward in this state, the electronic component can be mounted at a predetermined position on the inspection board 12. Suction equipment 2
As shown in FIG. 3, a vacuum hose 27 connected to a vacuum port of the suction transfer device 25 is connected to 6.

When a large number of electronic components are mounted on a mounting board instead of the inspection board 12, the suction transfer device shown in FIG. 1 can be used. In this case, not only a plurality of ICs but also various types of electronic components such as capacitors and resistors are mounted at predetermined positions on the mounting board.

The suction and transfer device has a mounting table for supporting a mounted member such as the inspection board 12 and a component supply stage for accommodating electronic components. If it is a type which moves a conveyance machine, it will not be restricted to what is shown in FIG.

The eight suction conveyance devices 25 have an L-shaped cross section and are fixed to a bracket 28 attached to the conveyance head 16, and each suction conveyance device 25 has an internal structure as shown in FIG. It has a cylinder 31 and a vacuum generating block 32 fixed thereto. The pneumatic cylinder 31 has a quadrangular prism shape, and the vacuum generating block 32 has a rectangular parallelepiped shape. A piston 33 is axially reciprocally mounted in a pneumatic chamber formed inside the pneumatic cylinder 31. A suction rod 26 is attached to the tip of a piston rod 34 attached to the piston 33.
Can be attached.

An air supply port 35 to which compressed air is supplied is formed on the distal end surface of the vacuum generation block 32. The air supply port 35 is formed by an air supply passage 36 formed in the vacuum generation block 32 and the pneumatic cylinder 31. , And is communicated with a pneumatic chamber 37a for retreating the piston. Pneumatic cylinder 3
1 is provided with a valve block 38 provided at the rear end of the air supply passage 3.
A solenoid valve 39 for operating the piston is provided for opening and closing the air supply passage 36a communicating with the piston 6 with respect to the pneumatic chamber 37b for moving the piston forward. When power is not supplied to the solenoid of the solenoid valve 39, the piston rod 34 is brought to the retreat limit position by air supplied into the pneumatic chamber 37a as shown in FIG. Since the air is also supplied and the sectional area of the pneumatic chamber 37b is set to be larger than that of the pneumatic chamber 37a, the piston rod 34 moves forward.

The solenoid valve 39 for operating the piston includes a main valve 41.
The main valve 41 opens and closes the air supply passage 36a. A driven valve 44, which is interlocked with the main valve 41 via a plurality of interlocking rods 43, is disposed on the pneumatic chamber 37b side. When the solenoid of the solenoid valve 39 is energized, the driven valve 44 moves with the retreat of the plunger 42. 44 closes the exhaust passage 45, the energization is released and the supply passage 36a is closed, and the driven valve 44
5, the air in the air pressure chamber 37b is discharged to the outside.

A diffuser 46 is incorporated in the vacuum generating block 32, and a nozzle 47 for supplying air to a mixing passage 46a of the diffuser 46 is disposed opposite to the diffuser 46. Form an ejector, that is, a vacuum generator. The nozzle 47 is supplied with air from an air supply passage 36b communicating with the air supply port 35, and a suction port 46b formed to communicate with the diffuser 46 with the mixing passage 46a is connected via a vacuum passage 48. To the vacuum port 49. This vacuum port 49 has
As shown in FIG. 3, a connection plug 50 is attached, and a vacuum hose 27 is connected between the connection plug 50 and the suction tool 26.

Therefore, the air supplied to the air supply port 35 is supplied from the nozzle 47 to the mixing passage 46 of the diffuser 46.
a, the suction port 4 is provided in the mixing passage 46a.
A flow of the air sucked in from the air 6b is generated, and the vacuum port 49 is in a vacuum, that is, a negative pressure state. The air discharged from the diffuser 46 is discharged outside from an exhaust port 51 provided adjacent to the air supply port 35.

In order to control the supply of air from the air supply port 35 to the nozzle 47, an electromagnetic valve 54 for operating an ejector is attached to the vacuum generating block 32 via a flow path block 52 and a valve block 53. I have. The solenoid valve 54 has the same structure as the solenoid valve 39 for operating the piston. In a state where the solenoid of the solenoid valve 54 is not energized, the air supply passage 36 b communicating with the air supply port 35 is provided. The driven valve 44 is opened to bring the supply path 36b into communication with the supply path 36c communicating with the nozzle 47. When energized, the driven valve 44 closes and the nozzle 47
The supply of air to is stopped.

An electromagnetic valve 56 for breaking vacuum is attached to a valve block 55 attached to the vacuum generating block 32 on the opposite side of the valve block 53, and this electromagnetic valve 56 is similar to the electromagnetic valves 39 and 54. The structure is used. The valve block 55 is provided with an air supply passage d communicating between the air supply chamber 57 formed therein and the air supply port. When the solenoid of the solenoid valve is energized, the air supply passage d is opened. Thus, air is supplied into the air supply chamber 57. When the energization is released, the plunger 42 moves forward and the main valve 41 closes the air supply passage 36d as shown in FIG. Air supply chamber 57
Is connected to a vacuum break path 58 formed in the vacuum generating block 32, and the vacuum break path 58 is connected to the vacuum path 48.

Therefore, when removing the electronic component sucked and held by the suction tool 26 shown in FIG. 3 from the suction tool 26, the power supply to the solenoid valve 54 for operating the ejector is released,
Electricity is supplied to the vacuum breaking electromagnetic valve 56. As a result, air is supplied to the vacuum path 48, so that the electronic component is removed from the suction tool 26.

The vacuum port 49 is provided with a filter 59 for removing dust in the air flowing therethrough. In order to detect the pressure in the vacuum port 49, a pressure sensor 60 is connected to the vacuum generating block 32. Attached to.

As described above, the pneumatic cylinder 31 has a square pillar shape, and the vacuum generating block 32 fixed to the pneumatic cylinder 31 has a width corresponding to the width of the pneumatic cylinder 31. It can be narrowed, and by arranging a plurality of layers in the horizontal direction,
It becomes possible to attach a large number of suction conveyance devices 25 to the mounting head 16.

In addition, each suction transfer device 25 has one common air supply port 35 for the air pressure chambers 37 a and 37 b of the air pressure cylinder 31, the ejector including the diffuser 46 and the nozzle 47, and the vacuum breaking passage 58. , And can be provided as a compact and lightweight suction transfer device 25 as a whole without having to crawl hoses for supplying air to the respective devices. Therefore, for example, even if eight of these are stacked to form one suction conveyance unit 24, the conveyance head 16 can be quickly moved without increasing its weight.

Each of the solenoid valves 39, 54 and 56 has a connector 6 for supplying power thereto.
1a to 61d are detachably mounted.

FIG. 5 is an enlarged view of the pressure sensor 60. The main body 60a, which is fixed to the vacuum generating block 32 and has a flow passage communicating with the vacuum port 49, is formed. Cover 60b covering pressure sensor unit to be detected
And an electronic component such as a sensor amplifier is incorporated in the mounting section 60c.

The pressure sensor 6 of the suction transfer device 25 shown in FIG.
The input signal from 0 is sent to the sensor controller 63 via the cable 62 as shown in FIG. The sensor controller 63 is connected to the device controller 65 by a flat cable 64.

As shown in FIG. 1, the sensor controller 63 is mounted on the mounting table 11 or on a support 66 arranged near the table. It is provided in.

FIG. 7 is a block diagram showing a circuit of the sensor controller 63.
7.

A control panel 67 is provided with eight sensor input terminals 71 connected to the respective pressure sensors 60 of the eight suction transfer devices 25 shown in FIG. One input signal is selected from the output signals from the sensor 60 and sent to the A / D converter 74 via the sample and hold circuit 73. The sample / hold circuit 73 has an A /
The voltage input to the D converter 74 is sampled and held, and the held voltage is maintained until the conversion is completed. Therefore, an analog signal corresponding to the pressure value detected by the pressure sensor 60 is binarized and sent to a CPU (Central Processing Unit) 75.

When the electronic component W is sucked by the suction tool 26, the negative pressure in the vacuum path 48 becomes large, that is, becomes lower than the atmospheric pressure. Therefore, by detecting the negative pressure,
It is possible to detect that the electronic component W has been sucked by the suction tool 26. On the other hand, when the electromagnetic valve 56 for vacuum breaking is energized and pressurized air is supplied to the vacuum path 48, the electronic component W is separated from the suction tool 26 and the vacuum path 4 at that time is separated.
8, the electronic component W is attached to the suction tool 26.
Can be detected.

When the electronic component 26 is sucked, the vacuum path 48
Is greater than or equal to a predetermined value, a RAM 76 is connected to the CPU 75 to store the predetermined value. Therefore, based on the input signal from the pressure sensor 60, the CPU 75 as a pressure determination unit
By comparing the threshold value read from 76 with the negative pressure value detected by the pressure sensor 60, it can be determined whether the electronic component W is attracted or detached.

The comparison output signal is sent to the number of pressure switch output terminals 77 corresponding to the number of the respective pressure sensors 60 via the output port and the buffer. This output signal is sent to the device controller 65 via the flat cable 64 as shown in FIG. The control signal from the device controller 65 controls the movement of the transport head 16 and the operation of the respective electromagnetic valves 39, 54 and 56.

In order to make the above-mentioned threshold value different depending on various conditions such as the size of the electronic component W, a push button switch 78 as a threshold value input means is provided on the control panel 67. Is input to the CPU 75 and the RAM via an input port.
76. With the push button switch 78, it is possible to select a specific pressure sensor among the plurality of pressure sensors 60 in a decimal number, and to input specific pressure data corresponding to the size of the suction device 26 for each pressure sensor. Input threshold and pressure sensor 6
The number 0 and the like are lit on a display unit 78a formed of an LED or the like.

The control panel 67 is provided with a control terminal 81 connected to the device controller 65 via a flat cable 64 and for inputting pressure data. A threshold value can also be input from the device controller 65. For this purpose, the device controller 65 is also provided with a memory such as a ROM or a RAM for storing a pressure threshold value corresponding to each pressure sensor 60, and the device controller 65 inputs the threshold value. And store it in memory. Each pressure sensor 60
The control panel 67 is provided with a control terminal 82 for outputting pressure data in order to display the pressure value detected by the control unit 65 on the display unit of the device controller 65.

The input of the threshold value on the device controller 65 side or the control panel 67 side is performed in the pressure unit Pa.
Is converted as P = A (4/10) (where A indicates 8-bit data).

Further, the control panel 67 is provided with control terminals 83 for inputting an address, and these control terminals 82 and 83 are connected to the device controller 65 via a flat cable 64.

Therefore, when the operation of the specific suction tool 26 is instructed from the device controller 65, the selected channel of the pressure sensor is sent from the control terminal 81 to the control panel 67, and the selected channel is sent from the address input control terminal 83. Is sent, and the CPU 75 determines whether or not the electronic component W is attracted to or detached from the attracting tool 26 based on the threshold value.

The power supply to the control circuit provided on the control panel 67 is performed via a power supply cable connected to the power supply terminal 84.

An error signal input / output terminal 85 for inputting / outputting an error signal between the control panel 67 and the device controller 65 is provided. An error signal is sent to the side.

A grounded resistor R is connected to the input line connected to each input terminal 71, and this resistor R constitutes sensor connection detecting means. By this sensor connection detecting means, the pressure sensor 60
2 is not connected to the corresponding input terminal 71, the input signal to the A / D converter 74 becomes 0V. The output voltage from the pressure sensor 60 is designed to output a voltage of 0 V or more regardless of the pressure value, and the normal operation range of the pressure sensor 60 is set to about 5 V from 0 V + α. . Therefore, when the pressure sensor 60 is not connected to any of the plurality of input terminals 71, no voltage is supplied to the input terminal 71, and by detecting this, the pressure sensor 60 is not connected. The position of the input terminal 71 can be detected. The signal of the position of the input terminal 71 to which the pressure sensor 60 is not connected is sent to the device controller 65 and displayed on the display unit. Therefore, the operator can identify which of the multiple sensor input terminals 71 the pressure sensor 60 is connected to by observing the display.

A failure detection circuit 75a is connected to the CPU 75, and even when the cable 62 or the like is disconnected, its position is lit on the display unit.

FIG. 8 shows a support case 9 for supporting a control panel 67 constituting the sensor controller 63.
FIG. 1 is a diagram showing a support case 91 having a front panel 92 and a rear panel 93;
The control panel 67 is mounted in a space surrounded by the control panels 2 and 93. The control panel 67 is provided with connectors 94a to 94d connected to input and output terminals provided on the control panel 67.
The cable 62 and the flat cable 64 are connected to these connectors.

FIG. 8 shows a control panel 67 for receiving signals from the eight pressure sensors 60 and detecting the operating state of the pressure sensors 60. By arranging a plurality of support cases 91, output signals from a large number of pressure sensors 60 can be processed.

FIG. 9 shows a control unit formed by arranging four control panels 67 shown in FIG. By attaching the support case 91, in which the control panel 67 is incorporated, to the connection fitting 95, the output signals from the 32 pressure sensors 60 are processed, and the electronic component is sucked by the suction tool 26. It can be detected whether or not the user is in a detached state.

A control terminal 81 for inputting a selected channel of the pressure sensor shown in FIG. 7, a control terminal 83 for inputting a strobe signal for reading it, a control terminal 82 for outputting detected pressure data, and an error signal As shown in FIG. 8 (C), the input / output control terminals 85 are connected by two parallel connectors 94d, and when a plurality of control panels 67 are assembled as shown in FIG. By connecting the adjacent control pal 69 via one connector, wiring can be reduced.

Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the above-described embodiments and can be variously modified without departing from the gist thereof. Needless to say, there is.

[0062]

Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

(1) Since the suction carrier is formed integrally with a pneumatic cylinder, a vacuum generating block, a solenoid valve for operating a piston, a solenoid valve for operating an ejector, and a solenoid valve for breaking vacuum, The weight of the suction transfer device is reduced, and the mounting head can be moved quickly.

(2) Since the signal from the pressure sensor provided on the suction transfer device is sent via a cable to a sensor controller provided separately from the suction transfer device, a pressure switch is provided on the suction transfer device. This eliminates the necessity, and reduces the weight of the suction transfer device, so that the mounting head can be moved quickly.

(3) Thereby, the mounting head provided with the suction transfer device can be moved quickly, and the electronic component can be efficiently mounted on the mounted member.

(4) Since the suction and desorption of the electronic components can be set by the device controller on the user side, the operation and control can be performed intensively from the device controller side.

(5) Since the pressure for the adsorption and desorption can be set manually, the adjustment and inspection can be performed by operating the sensor controller without operating the device controller when the device is started up, in addition to the maintenance and inspection of the device. And can be done.

(6) The sensor controller itself can check for disconnection or disconnection on the pressure sensor side.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing a suction conveyance device according to an embodiment of the present invention.

FIG. 2 is an enlarged plan view showing the suction conveyance unit shown in FIG. 1;

FIG. 3 is an enlarged view as viewed from a direction along line 3-3 in FIG. 2;

FIG. 4 is a sectional view of FIG. 3;

FIG. 5 is an enlarged sectional view of the pressure sensor shown in FIGS. 3 and 4;

FIG. 6 is a block diagram illustrating a connection state of a sensor, a sensor controller, and a device controller.

FIG. 7 is a block diagram illustrating a detailed structure of a sensor controller illustrated in FIG. 6;

FIG. 8 is a front view and left and right side views showing a support case for supporting a control panel constituting a sensor controller.

FIG. 9 is a front view and left and right side views showing a control unit having four control panels.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Mounting table 12 Inspection board 13 Guide rail 14 Sliding block 15 Guide rail 16 Transfer head 23 Parts supply stage 24 Suction transfer unit 25 Suction transfer device 26 Suction tool 27 Vacuum hose 28 Bracket 31 Pneumatic cylinder 32 Vacuum generation block 33 Piston 34 Piston Rod 35 Air supply port 36 Air supply path 37a, 37b Air pressure chamber 38 Valve block 39 Solenoid valve for piston operation 41 Main valve 42 Plunger 43 Connecting rod 44 Follower valve 45 Exhaust path 46 Diffuser 47 Nozzle 48 Vacuum path 49 Vacuum port 50 Plug Reference Signs List 51 exhaust port 52 flow path block 53 valve block 54 solenoid valve for ejector operation 55 valve block 56 solenoid valve for vacuum break 57 air supply chamber 58 vacuum break passage 59 filter 60 pressure Sensor 61a to 61d Connector 62 Cable 63 Sensor controller 64 Flat cable 65 Device controller 66 Support base 67 Control panel 71 Sensor input terminal 75 CPU 75a Failure detection circuit 77 Pressure switch output terminal 81 Pressure data input terminal 82 Pressure data output terminal 83 Address input Terminal 84 Power supply terminal 91 Support case 92 Front panel 93 Rear panel 94a-94d Connector 95 Connection fitting

Claims (5)

[Claims] 1. A mounting head which is horizontally movable along a mounting table having a component supply stage for accommodating a plurality of electronic components and a mounting stage for supporting a mounted member on which the electronic components are mounted. A quadrangular prism-shaped pneumatic cylinder mounted on the mounting head and driving a piston rod having a suction tool at its tip to adsorb the electronic component, the pneumatic cylinder having: A vacuum generating block, which is fixed and has an ejector including a diffuser and a nozzle for supplying air thereto, incorporated therein, and is attached to an upper end of the pneumatic cylinder and communicates with an air supply port formed in the vacuum generating block. A solenoid valve for operating a piston that opens and closes an air supply passage to control vertical movement of the piston rod; A solenoid valve for ejector operation, which is attached to the raw block and opens and closes an air supply passage communicating from the air supply port to the nozzle to control the operation of the ejector, and is attached to the vacuum generating block and generated by the ejector. A vacuum break solenoid valve for opening and closing a vacuum break passage connected to a vacuum passage for guiding the vacuum drawn to the suction device, and a sensor attached to the vacuum generating block and detecting a pressure in the vacuum passage. A plurality of suction transfer devices are mounted on the transfer head, and compressed air supplied from the air supply port in each suction transfer device is commonly guided to the pneumatic cylinder, the nozzle of the ejector, and the vacuum breaking path. A suction and transfer device for electronic components, wherein 2. The suction and transfer device for an electronic component according to claim 1, further comprising a sensor controller fixedly installed on the mounting table side, wherein the sensor controller has a predetermined number of the pressure sensors of the suction and transfer devices. A predetermined number of input terminals connected to the device controller via a cable, an output terminal connected to the device controller via a cable to output an output signal to the device controller, and input / output a control signal between the device controller A signal terminal; a pressure judging unit for outputting a detection signal to the signal terminal when the pressure in the vacuum path becomes equal to or more than a predetermined negative pressure value by the pressure sensor; and inputting the predetermined negative pressure value. Threshold value input means for performing a pressure detection signal in the sensor controller fixedly installed away from the transport head. An electronic component suction / conveying device, wherein the electronic component is transmitted. 3. The suction device according to claim 2, wherein when the pressure sensor is connected to the input terminal, a voltage in a predetermined normal range according to a negative pressure value is applied to the A / D. An electronic component suction / conveying device, wherein a sensor connection detecting means for outputting to a converter and setting the voltage to 0 V when the pressure sensor is not connected is provided in the sensor controller. 4. The electronic component suction and transport device according to claim 2, wherein the input / output signal of the signal terminal is 8 bits, and the selected channel input of the pressure sensor, the read strobe signal thereof, and the error signal are arranged in parallel. Wherein the two connectors are connected to the control panel. 5. The suction and transfer device for an electronic component according to claim 2, wherein the means for inputting the predetermined negative pressure value includes:
A push button for inputting a selection of a sensor and pressure data in a decimal number is provided on the control panel, and a display unit for displaying a value input by the push button is provided on the control panel. Suction transport device.