TW436672B - System and method for sensor response linearization - Google Patents
System and method for sensor response linearization Download PDFInfo
- Publication number
- TW436672B TW436672B TW089113537A TW89113537A TW436672B TW 436672 B TW436672 B TW 436672B TW 089113537 A TW089113537 A TW 089113537A TW 89113537 A TW89113537 A TW 89113537A TW 436672 B TW436672 B TW 436672B
- Authority
- TW
- Taiwan
- Prior art keywords
- signal
- calculate
- flow rate
- sensor
- patent application
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 72
- 230000004044 response Effects 0.000 title description 14
- 238000004364 calculation method Methods 0.000 claims abstract description 23
- 238000012545 processing Methods 0.000 claims description 14
- 206010022000 influenza Diseases 0.000 claims description 9
- 238000012937 correction Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 description 14
- 230000008901 benefit Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 108010038447 Chromogranin A Proteins 0.000 description 1
- 102100031186 Chromogranin-A Human genes 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- CPTIBDHUFVHUJK-NZYDNVMFSA-N mitopodozide Chemical compound C1([C@@H]2C3=CC=4OCOC=4C=C3[C@H](O)[C@@H](CO)[C@@H]2C(=O)NNCC)=CC(OC)=C(OC)C(OC)=C1 CPTIBDHUFVHUJK-NZYDNVMFSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/0007—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm for discrete indicating and measuring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/350,747 US6449571B1 (en) | 1999-07-09 | 1999-07-09 | System and method for sensor response linearization |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW436672B true TW436672B (en) | 2001-05-28 |
Family
ID=23378007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW089113537A TW436672B (en) | 1999-07-09 | 2000-07-07 | System and method for sensor response linearization |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6449571B1 (https=) |
| EP (1) | EP1192424A1 (https=) |
| JP (1) | JP2003504613A (https=) |
| KR (1) | KR100620282B1 (https=) |
| CN (1) | CN1206518C (https=) |
| AU (1) | AU6405600A (https=) |
| TW (1) | TW436672B (https=) |
| WO (1) | WO2001004582A1 (https=) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100808727B1 (ko) | 2000-02-14 | 2008-02-29 | 셀레리티 인크. | 저항 평형 방법 및 그 장치 |
| AU2002307547A1 (en) | 2001-04-24 | 2002-11-05 | Unit Instruments, Inc. | System and method for configuring and asapting a mass flow controller |
| CN100344941C (zh) | 2002-07-19 | 2007-10-24 | 迅捷公司 | 具有公共参考臂的可变电阻传感器 |
| KR20050031109A (ko) * | 2002-07-19 | 2005-04-01 | 셀레리티 그룹 아이엔씨 | 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치 |
| US6859765B2 (en) | 2002-12-13 | 2005-02-22 | Lam Research Corporation | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection |
| US7216019B2 (en) * | 2004-07-08 | 2007-05-08 | Celerity, Inc. | Method and system for a mass flow controller with reduced pressure sensitivity |
| EP1779073A4 (en) * | 2004-08-13 | 2008-05-07 | Entegris Inc | SYSTEM AND METHOD FOR CALIBRATING A FLOW APPARATUS |
| WO2006135977A1 (en) * | 2005-06-24 | 2006-12-28 | Carl Peter Renneberg | A circuit and method for fitting the output of a sensor to a predetermined linear relationship |
| DE102005062981A1 (de) * | 2005-12-28 | 2007-07-05 | Endress + Hauser Flowtec Ag | Verfahren zur Bestimmung eines Ausgangswertes eines Sensors der Automatisierungstechnik |
| US7532992B2 (en) * | 2006-01-20 | 2009-05-12 | Teledyne Isco, Inc. | Measuring apparatuses and methods of using them |
| JP5073949B2 (ja) * | 2006-02-02 | 2012-11-14 | 日立オートモティブシステムズ株式会社 | 流量測定装置 |
| EP2479681A1 (en) * | 2011-01-24 | 2012-07-25 | Sensirion AG | Approximating a non-linear characteristic in a sensor system |
| CN103176499B (zh) * | 2013-03-29 | 2014-11-19 | 哈尔滨工业大学（威海） | 低功耗抗工艺偏差和电源噪声的动态电流模式收发系统 |
| GB201323009D0 (en) * | 2013-10-21 | 2014-02-12 | Continental Automotive Systems | Dual range high precision pressure sensor |
| US9874467B2 (en) * | 2015-02-23 | 2018-01-23 | Aceinna, Inc. | MEMS thermal flow sensor with compensation for fluid composition |
| WO2016185322A1 (en) * | 2015-05-20 | 2016-11-24 | Thd S.P.A. | An apparatus for manometric measurements and a method of measurement thereof |
| TR201614439A1 (en) | 2016-10-13 | 2018-04-24 | Univ Yeditepe | SMART OPTIMAL ANALOG CIRCUIT FOR SENSOR LINEARIZATION IN A WIDE RANGE |
| CN106813737B (zh) * | 2016-12-29 | 2020-01-10 | 北京七星华创流量计有限公司 | 流量测量装置、其最佳响应时间获取方法和测试系统 |
| KR20190036959A (ko) | 2017-09-28 | 2019-04-05 | 금오기전 주식회사 | 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법 |
| US10969797B2 (en) * | 2018-08-29 | 2021-04-06 | Illinois Tool Works, Inc. | Mass flow valve controller and control method with set point filter and linearization system based on valve model |
| CN115452080B (zh) * | 2022-08-08 | 2024-06-11 | 重庆川仪自动化股份有限公司 | 热式气体质量流量计信号线性化电路及方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4059982A (en) | 1975-08-29 | 1977-11-29 | Massachusetts Institute Of Technology | Apparatus for the measurement of thermal properties of biomaterials |
| US5062446A (en) * | 1991-01-07 | 1991-11-05 | Sematech, Inc. | Intelligent mass flow controller |
| US5193406A (en) | 1991-06-20 | 1993-03-16 | Exxon Research And Engineering Company | On-stream method for detecting erosion or plugging for manifolded feed nozzle systems |
| US5369603A (en) | 1992-07-19 | 1994-11-29 | Myers; Allen | Calibration of a non-linear sensor |
| US5660207A (en) | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
| US5710370A (en) * | 1996-05-17 | 1998-01-20 | Dieterich Technology Holding Corp. | Method for calibrating a differential pressure fluid flow measuring system |
| US5911238A (en) | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
| US5944048A (en) * | 1996-10-04 | 1999-08-31 | Emerson Electric Co. | Method and apparatus for detecting and controlling mass flow |
-
1999
- 1999-07-09 US US09/350,747 patent/US6449571B1/en not_active Expired - Fee Related
-
2000
- 2000-06-20 AU AU64056/00A patent/AU6405600A/en not_active Abandoned
- 2000-06-20 WO PCT/US2000/040254 patent/WO2001004582A1/en not_active Ceased
- 2000-06-20 JP JP2001509948A patent/JP2003504613A/ja not_active Withdrawn
- 2000-06-20 KR KR1020027000306A patent/KR100620282B1/ko not_active Expired - Fee Related
- 2000-06-20 CN CNB008101132A patent/CN1206518C/zh not_active Expired - Fee Related
- 2000-06-20 EP EP00951068A patent/EP1192424A1/en not_active Withdrawn
- 2000-07-07 TW TW089113537A patent/TW436672B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001004582A1 (en) | 2001-01-18 |
| KR100620282B1 (ko) | 2006-09-13 |
| EP1192424A1 (en) | 2002-04-03 |
| CN1206518C (zh) | 2005-06-15 |
| WO2001004582B1 (en) | 2001-05-10 |
| US6449571B1 (en) | 2002-09-10 |
| JP2003504613A (ja) | 2003-02-04 |
| CN1371467A (zh) | 2002-09-25 |
| KR20020038682A (ko) | 2002-05-23 |
| AU6405600A (en) | 2001-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |