CN1206518C - 用于传感器响应线性化的系统和方法 - Google Patents

用于传感器响应线性化的系统和方法 Download PDF

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Publication number
CN1206518C
CN1206518C CNB008101132A CN00810113A CN1206518C CN 1206518 C CN1206518 C CN 1206518C CN B008101132 A CNB008101132 A CN B008101132A CN 00810113 A CN00810113 A CN 00810113A CN 1206518 C CN1206518 C CN 1206518C
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CN
China
Prior art keywords
calculate
signal
sensor
sensor signal
linearized
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008101132A
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English (en)
Chinese (zh)
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CN1371467A (zh
Inventor
飞索·塔里克
塔马斯·I·帕坦突斯
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Entegris Inc
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Mykrolis Corp
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Publication of CN1371467A publication Critical patent/CN1371467A/zh
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Publication of CN1206518C publication Critical patent/CN1206518C/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/0007—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm for discrete indicating and measuring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
CNB008101132A 1999-07-09 2000-06-20 用于传感器响应线性化的系统和方法 Expired - Fee Related CN1206518C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/350,747 1999-07-09
US09/350,747 US6449571B1 (en) 1999-07-09 1999-07-09 System and method for sensor response linearization

Publications (2)

Publication Number Publication Date
CN1371467A CN1371467A (zh) 2002-09-25
CN1206518C true CN1206518C (zh) 2005-06-15

Family

ID=23378007

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008101132A Expired - Fee Related CN1206518C (zh) 1999-07-09 2000-06-20 用于传感器响应线性化的系统和方法

Country Status (8)

Country Link
US (1) US6449571B1 (https=)
EP (1) EP1192424A1 (https=)
JP (1) JP2003504613A (https=)
KR (1) KR100620282B1 (https=)
CN (1) CN1206518C (https=)
AU (1) AU6405600A (https=)
TW (1) TW436672B (https=)
WO (1) WO2001004582A1 (https=)

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TW514720B (en) 2000-02-14 2002-12-21 Unit Instr Inc Method and apparatus for balancing resistance
US6962164B2 (en) 2001-04-24 2005-11-08 Celerity Group, Inc. System and method for a mass flow controller
WO2004010234A2 (en) * 2002-07-19 2004-01-29 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
KR20050047079A (ko) 2002-07-19 2005-05-19 셀레리티 그룹 아이엔씨 공용 기준 레그를 갖는 가변 저항기 센서
US6859765B2 (en) * 2002-12-13 2005-02-22 Lam Research Corporation Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
WO2006020870A1 (en) * 2004-08-13 2006-02-23 Entegris, Inc. System and method for calibration of a flow device
US20090063070A1 (en) * 2005-06-24 2009-03-05 Carl Peter Renneberg Circuit and Method for Fitting the Output of a Sensor to a Predetermined Linear Relationship
DE102005062981A1 (de) * 2005-12-28 2007-07-05 Endress + Hauser Flowtec Ag Verfahren zur Bestimmung eines Ausgangswertes eines Sensors der Automatisierungstechnik
US7532992B2 (en) * 2006-01-20 2009-05-12 Teledyne Isco, Inc. Measuring apparatuses and methods of using them
JP5073949B2 (ja) * 2006-02-02 2012-11-14 日立オートモティブシステムズ株式会社 流量測定装置
EP2479681A1 (en) * 2011-01-24 2012-07-25 Sensirion AG Approximating a non-linear characteristic in a sensor system
CN103176499B (zh) * 2013-03-29 2014-11-19 哈尔滨工业大学（威海） 低功耗抗工艺偏差和电源噪声的动态电流模式收发系统
GB201323009D0 (en) * 2013-10-21 2014-02-12 Continental Automotive Systems Dual range high precision pressure sensor
JP6731936B2 (ja) * 2015-02-23 2020-07-29 アセインナ インコーポレイテッド Ｍｅｍｓ熱式流量センサ、及び流体の流量を測定する方法
US11793417B2 (en) * 2015-05-20 2023-10-24 Thd S.P.A. Apparatus and a method of measurement thereof
TR201614439A1 (en) 2016-10-13 2018-04-24 Univ Yeditepe SMART OPTIMAL ANALOG CIRCUIT FOR SENSOR LINEARIZATION IN A WIDE RANGE
CN106813737B (zh) * 2016-12-29 2020-01-10 北京七星华创流量计有限公司 流量测量装置、其最佳响应时间获取方法和测试系统
KR20190036959A (ko) 2017-09-28 2019-04-05 금오기전 주식회사 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
CN115452080B (zh) * 2022-08-08 2024-06-11 重庆川仪自动化股份有限公司 热式气体质量流量计信号线性化电路及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4059982A (en) 1975-08-29 1977-11-29 Massachusetts Institute Of Technology Apparatus for the measurement of thermal properties of biomaterials
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5193406A (en) 1991-06-20 1993-03-16 Exxon Research And Engineering Company On-stream method for detecting erosion or plugging for manifolded feed nozzle systems
US5369603A (en) 1992-07-19 1994-11-29 Myers; Allen Calibration of a non-linear sensor
US5660207A (en) 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5710370A (en) * 1996-05-17 1998-01-20 Dieterich Technology Holding Corp. Method for calibrating a differential pressure fluid flow measuring system
US5911238A (en) 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow

Also Published As

Publication number Publication date
KR20020038682A (ko) 2002-05-23
TW436672B (en) 2001-05-28
JP2003504613A (ja) 2003-02-04
CN1371467A (zh) 2002-09-25
EP1192424A1 (en) 2002-04-03
WO2001004582A1 (en) 2001-01-18
KR100620282B1 (ko) 2006-09-13
WO2001004582B1 (en) 2001-05-10
US6449571B1 (en) 2002-09-10
AU6405600A (en) 2001-01-30

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Granted publication date: 20050615